Substrate transfer robot and control method thereof

Abstract

To provide a substrate transfer robot capable of suppressing substrate interference when transferring the substrate.SOLUTION: A substrate transfer robot 100 is structured so that a control section 30 acquires a transfer clearance C including at least any one of a clearance between a position of a substrate retaining hand 20 in a storage part 200 and a substrate 1 and a clearance between a substrate 1 transferred to the substrate retaining hand 20 and a substrate 1 adjacent to the substrate 1 transferred to the substrate retaining hand 20 and a clearance between mutual substrates 1 stored in the storage part 200 on the basis of images photographed by a photographing section 25. A control section 30 controls operations of a robot arm 10 and the substrate retaining hand 20 to perform at least one of carrying out a substrate 1 from the storage part 200 and carrying in a substrate 1 into the storage part 200 on the basis of the magnitude of the acquired transfer clearance C.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] This disclosure relates to a substrate transfer robot and a method for controlling the substrate transfer robot, and more particularly, to a substrate transfer robot including a substrate holding hand for holding a substrate and a method for controlling the substrate transfer robot.

Background Art

[0002] Conventionally, a substrate transfer robot including a substrate holding hand for holding a substrate has been known (see, for example, Patent Document 1).

[0003] Patent Document 1 discloses a substrate transfer robot that unloads a substrate from a cassette in which a plurality of substrates are stored. The substrate transfer robot unloads the substrate from the cassette by a hand based on pre-taught teaching data. Further, Patent Document 1 discloses a camera that photographs a plurality of substrates stored in the cassette and a control unit that processes an image photographed by the camera. Then, the control unit acquires the tilt angle, the curved state, etc. of the plurality of substrates arranged in the cassette based on the image photographed by the camera. The control unit corrects the teaching data for unloading the substrate based on the acquired tilt angle, the curved state, etc. of the substrate. That is, based on the acquired tilt angle, the curved state, etc. of the substrate, the movement path, the position, etc. of the hand that enters the cassette are changed. Thereby, even when the substrate is arranged in the cassette in a tilted state or when the substrate is curved, it becomes possible to unload the substrate from the cassette.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Here, a plurality of substrates are arranged in the cassette so as to be stacked at a predetermined interval. For this reason, as in the above Patent Document 1, when the movement path and position of the hand entering the cassette are changed based on the inclination angle and curvature state of the acquired substrate, etc., the hand may interfere with the substrate arranged adjacent to the substrate to be carried out. Further, the substrate being carried by the hand may interfere with the substrate arranged adjacent thereto. For this reason, there is a problem that the substrates interfere with each other when the substrates are carried.

[0006] This disclosure has been made to solve the above problems, and one object of this disclosure is to provide a substrate transfer robot and a control method for the substrate transfer robot capable of suppressing interference between substrates when transferring the substrates.

Means for Solving the Problems

[0007] A substrate transfer robot according to a first aspect of this disclosure is a substrate transfer robot that performs at least one of carrying out a substrate from a storage unit for storing a plurality of substrates and carrying a substrate into the storage unit, including a robot arm, a substrate holding hand attached to the tip of the robot arm for holding the substrate, a photographing unit for photographing a plurality of substrates stored in the storage unit, An optical sensor that moves along the arrangement direction in which a plurality of substrates stored in a storage unit are arranged and detects the substrates, and a control unit, and the control unit the detection result of the optical sensor, Based on the image photographed by the photographing unit and acquires a transfer gap including at least one of the gap between the position of the substrate holding hand and the substrate in the storage unit, the gap between the substrate being carried by the substrate holding hand and the substrate adjacent to the substrate being carried by the substrate holding hand, and the gap between the substrates stored in the storage unit, and controls the operations of the robot arm and the substrate holding hand so as to perform at least one of carrying out a substrate from the storage unit and carrying a substrate into the storage unit based on the size of the acquired transfer gap.

[0008] In the substrate transfer robot according to the first aspect of this disclosure, as described above, the control unit, based on the image captured by the imaging unit, determines at least one of the gap between the position of the substrate holding hand in the storage unit and the substrate, the gap between the substrate being transferred by the substrate holding hand and the substrate adjacent to the substrate being transferred by the substrate holding hand, and the gap between the substrates stored in the storage unit. one acquires a transfer gap including the above, and based on the size of the acquired transfer gap, controls the operations of the robot arm and the substrate holding hand to perform at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit. As a result, even when changing the movement path and position of the substrate holding hand entering the storage unit based on the tilt angle and curvature state of the substrate, if the size of the transfer gap is insufficient, it is possible to control not to unload the substrate from the storage unit or load the substrate into the storage unit. Therefore, it is possible to prevent the substrate holding hand from interfering with the substrate arranged adjacent to the substrate to be unloaded, and to prevent the substrate being transferred by the substrate holding hand from interfering with the adjacent substrate. As a result, when transferring the substrate, it is possible to prevent the substrates from interfering with each other.

[0009] It is also possible to move the optical sensor along the arrangement direction of the substrates stored in the storage unit to detect the position of the substrates and obtain the transfer gap. On the other hand, in this case, since the optical sensor only detects a part such as one end of the substrate, it is difficult to accurately obtain the transfer gap at the central part and the other end of the substrate. Therefore, by obtaining the transfer gap based on the image captured by the imaging unit as described above, it is possible to obtain the transfer gap not only at one end of the substrate but also at the central part and the other end. As a result, when transferring the substrate, it is possible to appropriately prevent the substrates from interfering with each other.

[0010] A control method for a substrate transfer robot according to a second aspect of this disclosure is a control method for a substrate transfer robot that performs at least one of carrying out a substrate from a storage unit for storing a plurality of substrates and carrying a substrate into the storage unit, including: photographing a plurality of substrates stored in the storage unit by a photographing unit; detecting a substrate by an optical sensor that moves along the arrangement direction in which a plurality of substrates stored in a storage unit are arranged, and the detection result of the optical sensor, an image photographed by the photographing unit and Based on the image, obtaining a transfer gap including at least one of a gap between the position of a substrate holding hand of the substrate transfer robot in the storage unit and a substrate, a gap between a substrate being transferred by the substrate holding hand and a substrate adjacent to the substrate being transferred by the substrate holding hand, and a gap between substrates stored in the storage unit; and controlling operations of a robot arm and a substrate holding hand of the substrate transfer robot so as to perform at least one of carrying out a substrate from the storage unit and carrying a substrate into the storage unit based on the size of the obtained transfer gap. The control method of the substrate transfer robot includes a method taught to the substrate transfer robot by teaching data and control parameters.

[0011] As described above, the control method for a substrate transfer robot according to the second aspect of this disclosure includes photographing a plurality of substrates stored in the storage unit by a photographing unit, and based on the image photographed by the photographing unit, at least one of a gap between the position of a substrate holding hand of the substrate transfer robot in the storage unit and a substrate, and a gap between a substrate being transferred by the substrate holding hand and a substrate adjacent to the substrate being transferred by the substrate holding hand; oneTo obtain a conveyance gap including the same, and based on the size of the obtained conveyance gap, to control the operations of the robot arm and the substrate holding hand of the substrate transfer robot so as to perform at least one of unloading the substrate from the storage unit and loading the substrate into the storage unit. As a result, even when changing the movement path, position, etc. of the substrate holding hand that enters the storage unit based on the inclination angle, curvature state, etc. of the substrate, if the size of the conveyance gap is insufficient, it is possible to control so as not to unload the substrate from the storage unit or load the substrate into the storage unit. For this reason, it is possible to suppress the substrate holding hand from interfering with a substrate arranged adjacent to the substrate to be unloaded, and the substrate being conveyed by the substrate holding hand from interfering with a substrate arranged adjacent to it. As a result, it is possible to provide a control method for a substrate transfer robot that can suppress interference of the substrate when conveying the substrate.

[0012] Also, it is possible to move the optical sensor along the arrangement direction of the substrates stored in the storage unit to detect the position of the substrate and obtain the conveyance gap. On the other hand, in this case, since the optical sensor only detects a part such as one end portion of the substrate, it is difficult to accurately obtain the conveyance gap at the central portion and the other end portion of the substrate. Therefore, by obtaining the conveyance gap based on the image captured by the imaging unit as described above, it is possible to obtain the conveyance gap not only at one end portion but also at the central portion and the other end portion of the substrate. As a result, it is possible to provide a control method for a substrate transfer robot that can suppress interference at the central portion and the other end portion of the substrate.

Advantages of the Invention

[0013] According to the present disclosure, it is possible to suppress interference of the substrate when conveying the substrate.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Mode for Carrying Out the Invention

[0015] Hereinafter, an embodiment of the present disclosure embodying the present disclosure will be described with reference to the drawings.

[0016] With reference to FIGS. 1 to 7, the configuration of the substrate transfer robot 100 according to the present embodiment will be described.

[0017] As shown in FIGS. 1 and 2, the substrate transfer robot 100 transports a substrate 1 such as a semiconductor wafer or a printed circuit board. The substrate transfer robot 100 performs at least one of carrying out the substrate 1 from the storage unit 200 for storing a plurality of substrates 1 and carrying the substrate 1 into the storage unit 200.

[0018] The substrate transfer robot 100 includes a robot arm 10 and a substrate holding hand 20 attached to the tip of the robot arm 10 for holding the substrate 1. Further, the substrate transfer robot 100 includes a control unit 30 for controlling the operation of the substrate transfer robot 100.

[0019] The robot arm 10 is a horizontal articulated robot arm. The robot arm 10 includes a first robot arm 11 and a second robot arm 12. One end of the first robot arm 11 is configured to be rotatable with respect to a lifting shaft 13 described later with the one end as a rotation center. Specifically, one end of the first robot arm 11 is rotatably connected to the lifting shaft 13 via a first joint JT1. The second robot arm 12 is configured to be rotatable with respect to the first robot arm 11 with one end as a rotation center. Specifically, one end of the second robot arm 12 is rotatably connected to the other end of the first robot arm 11 via a second joint JT2. Further, a substrate holding hand 20 is rotatably connected to the other end of the second robot arm 12 via a third joint JT3. A servo motor, which is a drive source for rotational drive, and a rotational position sensor for detecting the rotational position of the output shaft of the servo motor are arranged at each of the joints of the first joint JT1, the second joint JT2, and the third joint JT3.

[0020] Further, the substrate transfer robot 100 includes a lifting shaft 13 for lifting the robot arm 10. A servo motor and a rotational position sensor for detecting the rotational position of the output shaft of the servo motor are arranged on the lifting shaft 13.

[0021] A blade 21 is provided on the substrate holding hand 20. The blade 21 is a thin plate-shaped support plate for supporting the substrate 1. The blade 21 has a shape in which the tip is bifurcated. In the blade 21, a pair of support portions 22 are arranged at the tips of the bifurcated portions, respectively. Further, a pair of support portions 23 are arranged at the base end of the blade 21. The pair of support portions 22 and the pair of support portions 23 support the back surface of the outer peripheral edge of the substantially circular substrate 1 from below.

[0022] In this embodiment, as shown in FIG. 3, the substrate transfer robot 100 includes an optical sensor 24 that moves along the arrangement direction in which a plurality of substrates 1 stored in the storage unit 200 are arranged. The optical sensor 24 is disposed at the tip of the substrate holding hand 20. Specifically, the optical sensor 24 is disposed at the tip of the bifurcated blade 21. The optical sensor 24 is, for example, a transmissive type center. The optical sensor 24 includes a light projecting unit 24a and a light receiving unit 24b. The light projecting unit 24a emits detection light toward the light receiving unit 24b. The detection light is, for example, infrared light. Note that a reflective type optical sensor 24 may be used.

[0023] In this embodiment, as shown in FIG. 4, the optical sensor 24 is moved by the substrate holding hand 20 along the arrangement direction in which a plurality of substrates 1 are arranged. Specifically, the optical sensor 24 moves along the arrangement direction of the plurality of substrates 1 when the robot arm 10 is moved up and down by the elevating shaft 13. The arrangement direction is the vertical direction. The robot arm 10 moves up and down with the end of the substrate 1 positioned between the bifurcated tips of the blade 21. Thereby, when the substrate 1 is positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked. Thereby, the presence of the substrate 1 is detected. When the substrate 1 is not positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is received by the light receiving unit 24b. Thereby, it is detected that the substrate 1 does not exist. The detection result of the light receiving unit 24b is input to the control unit 30. The presence or absence of the substrate 1 is determined by the control unit 30. The detection result of the rotation position sensor that detects the rotation position of the output shaft of the servo motor of the elevating shaft 13 is also input to the control unit 30 together with the detection result of the light receiving unit 24b. Thereby, the control unit 30 acquires the position of the elevating shaft 13 in association with the information on the presence or absence of the substrate 1. That is, the control unit 30 acquires the position in the vertical direction where the substrate 1 is arranged. Further, the control unit 30 acquires the shape of the substrate 1 based on the detection result of the light receiving unit 24b. The shape of the substrate 1 is, for example, a shape along a horizontal plane or a curved shape.

[0024] In this embodiment, as shown in FIG. 4, the substrate transfer robot 100 includes an imaging unit 25 that images a plurality of substrates 1 stored in the storage unit 200. The imaging unit 25 is composed of, for example, a two-dimensional camera. Note that the imaging unit 25 may be composed of a three-dimensional camera. Further, the imaging unit 25 cannot image all the substrates 1 stored in the storage unit 200 in a single imaging. Therefore, in order to image all the substrates 1 stored in the storage unit 200, it is necessary to perform imaging a plurality of times by the imaging unit 25. The imaging unit 25 images a plurality of substrates 1 stored in the storage unit 200 from the outside of the storage unit 200.

[0025] In this embodiment, the imaging unit 25 is disposed on the robot arm 10 or the substrate holding hand 20. Specifically, in this embodiment, the imaging unit 25 is disposed on the proximal end side of the substrate holding hand 20. That is, the imaging unit 25 rotates as the substrate holding hand 20 rotates around the JT3 axis. Further, the imaging unit 25 moves up and down as the robot arm 10 and the substrate holding hand 20 move up and down by the elevating shaft 13.

[0026] In this embodiment, the substrate transfer robot 100 includes a notification unit 40. The notification unit 40 notifies, by voice or image, that the substrate 1 cannot be unloaded from the storage unit 201 described later and that the substrate 1 cannot be loaded into the storage unit 202.

[0027] As shown in FIG. 5, the storage unit 200 stores a plurality of substrates 1. The plurality of substrates 1 are arranged side by side in the vertical direction within the storage unit 200. The plurality of substrates 1 are arranged at a predetermined interval from each other. On the inner surface of the storage unit 200, a protruding portion 200a on which the substrate 1 is placed is arranged. The protruding portion 200a protrudes along the horizontal direction. The substrate 1 is placed on the protruding portion 200a.

[0028] As shown in FIG. 2, the storage unit 200 includes a storage unit 201 in which the substrate 1 is stored in advance, and a storage unit 202 into which the substrate 1 unloaded from the storage unit 201 by the substrate transfer robot 100 is loaded.

[0029] As shown in FIG. 5, a plurality of substrates 1 are arranged in the storage unit 200. The first and third substrates 1 from the top in FIG. 5 have a shape along a horizontal plane. The second substrate 1 from the top in FIG. 5 has a shape curved downward. The fourth substrate 1 from the top in FIG. 5 is inclined with respect to the horizontal plane by being placed on the protruding portions 200a having different height positions.

[0030] Here, in the present embodiment, the control unit 30 obtains a conveyance gap C including at least one of the gap between the position of the substrate holding hand 20 and the substrate 1 in the storage unit 200, the gap between the substrate 1 being conveyed by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being conveyed by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200, based on the image captured by the imaging unit 25. Then, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 so as to perform at least one of carrying out the substrate 1 from the storage unit 201 and carrying the substrate 1 into the storage unit 202, based on the size of the obtained conveyance gap C. In the present embodiment, both the carrying out and carrying in of the substrate 1 are performed based on the size of the obtained conveyance gap C. Further, in the present embodiment, the conveyance gap C includes all of the gap between the position of the substrate holding hand 20 and the substrate 1 in the storage unit 200, the gap between the substrate 1 being conveyed by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being conveyed by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200.

[0031] In this embodiment, the conveyance gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to the upper side of the substrate holding hand 20 within the storage unit 200, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 arranged adjacent to the lower side of the substrate holding hand 20 within the storage unit 200. Here, the upper surface 20a of the substrate holding hand 20 includes the upper surface of the blade 21, the upper surface of the support portion 22, and the upper surface of the support portion 23. That is, it is the entire upper region of the substrate holding hand 20. The lower surface 20b of the substrate holding hand 20 includes the lower surface of the blade 21. That is, it is the entire lower region of the substrate holding hand 20. That is, the conveyance gap C is the hatched region in FIG. 5. That is, it means the gap between the substrate holding hand 20 and the substrate 1 adjacent to the upper side and the substrate 1 adjacent to the lower side when viewed from the direction in which the substrate holding hand 20 enters the storage unit 200.

[0032] In this embodiment, as shown in FIG. 6, the conveyance gap C includes a gap C3 between the upper surface 1a of the substrate 1 being conveyed by the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to the upper side of the substrate holding hand 20, and a gap C4 between the lower surface 20b of the substrate holding hand 20 conveying the substrate 1 and the upper surface 1a of the substrate 1 arranged adjacent to the lower side of the substrate holding hand 20. That is, the conveyance gap C includes the first and second hatched regions from the top in FIG. 6.

[0033] The conveyance gap C includes a gap C5 between the substrates 1 stored in the storage unit 200. Specifically, the conveyance gap C includes the third hatched region from the top in FIG. 6. In FIG. 6, only one gap C5 is shown, but actually, the gap C5 is obtained for all the substrates 1 stored in the storage unit 200.

[0034] In this embodiment, the control unit 30 acquires at least one of the shape and position of the substrate 1 based on the image captured by the imaging unit 25, and acquires the size of the conveyance gap C. Specifically, the control unit 30 acquires both the shape and position of the substrate 1 by performing image analysis on the image captured by the imaging unit 25. For example, the control unit 30 acquires the shape along the horizontal plane of the substrate 1 or the curved shape based on the image captured by the imaging unit 25. In addition, the control unit 30 acquires the position of the substrate 1 based on the image captured by the imaging unit 25.

[0035] In this embodiment, the control unit 30 corrects at least one of the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25 based on the detection result of the optical sensor 24. Here, the detection accuracy of the optical sensor 24 is higher than that of the imaging unit 25. Therefore, the control unit 30 corrects at least one of the shape and position of the substrate 1 by the imaging unit 25 based on the detection result of the high-precision optical sensor 24. In this embodiment, both the shape and position of the substrate 1 are corrected.

[0036] In this embodiment, as shown in FIG. 4, the control unit 30 controls the imaging unit 25 to image a plurality of substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. As described above, the optical sensor 24 moves in the arrangement direction of the plurality of substrates 1 when the robot arm 10 is moved up and down by the elevating shaft 13. For example, the optical sensor 24 rises when the robot arm 10 is raised. Then, when the substrate 1 is positioned between the bifurcated tips of the blade 21, the detection light emitted toward the light receiving unit 24b is blocked by the substrate 1. Thereby, the control unit 30 causes the imaging unit 25 to perform imaging. The control unit 30 causes the imaging unit 25 to perform imaging every time the substrate 1 is detected or every time a predetermined number of substrates 1 are detected.

[0037] In this embodiment, the control unit 30 acquires the position of the substrate holding hand 20 in the storage unit 200 based on the movement path of the substrate holding hand 20 when transporting the substrate 1 taught in advance. Specifically, the substrate transfer robot 100 is pre-taught with a movement path for carrying out the substrate 1 from the storage unit 201 and a movement path for carrying the substrate 1 into the storage unit 202. Thereby, the control unit 30 can acquire the position in the state where the substrate holding hand 20 is inserted into the storage unit 201 or the storage unit 202 based on the pre-taught movement path. Further, the control unit 30 acquires the gaps C1 and C2 based on the position of the substrate holding hand 20 acquired based on the pre-taught movement path and the shape and position of the substrate 1 corrected based on the detection result of the optical sensor 24 obtained from the image captured by the imaging unit 25. Further, the control unit 30 acquires the gaps C3 and C4 based on the movement path of the substrate holding hand 20 when transporting the substrate 1 taught in advance and the shape of the substrate 1.

[0038] With respect to the storage unit 201 in which a plurality of substrates 1 are arranged, before carrying out the substrate 1 from the storage unit 201, while moving the optical sensor 24 upward once, the imaging unit 25 captures the substrate 1 a plurality of times. Thereby, the control unit 30 acquires the positions and shapes of all the substrates 1 arranged in the storage unit 201. With respect to the storage unit 202 into which the substrate 1 is carried, for example, before the substrate 1 is carried in, it is assumed that the substrate 1 is arranged on the protruding portion 200a of the odd-numbered stage. In this case, while moving the optical sensor 24 upward once, the substrate 1 placed on the protruding portion 200a of the odd-numbered stage is captured by the imaging unit 25 a plurality of times. Thereby, the control unit 30 acquires the position and shape of the substrate 1 arranged on the protruding portion 200a of the odd-numbered stage of the storage unit 202.

[0039] And in this embodiment, when the control unit 30 determines that the detected size of the conveyance gap C is a size capable of conveying the substrate 1, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to perform at least one of carrying out the substrate 1 from the storage unit 201 and carrying the substrate 1 into the storage unit 202. In this embodiment, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to perform both the carrying out and carrying in of the substrate 1. The control unit 30 determines that the detected size of the conveyance gap C is large enough so that when the substrate 1 is carried out from the storage unit 201 by the substrate holding hand 20, the substrate holding hand 20 or the substrate 1 held by the substrate holding hand 20 does not interfere with the adjacent substrate 1. In this case, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to carry out the substrate 1 from the storage unit 200. Further, the control unit 30 determines that the detected size of the conveyance gap C is large enough so that when the substrate 1 is carried into the storage unit 202 by the substrate holding hand 20, the substrate holding hand 20 or the substrate 1 held by the substrate holding hand 20 does not interfere with the adjacent substrate 1. In this case, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to carry the substrate 1 into the storage unit 202.

[0040] In this embodiment, when the control unit 30 determines that the detected size of the conveyance gap C is not a size capable of conveying the substrate 1, the control unit 30 corrects the conveyance path of the substrate 1 taught in advance based on the detected size of the conveyance gap C. For example, the control unit 30 determines that the size of the gap C2 between the substrate 1 and the lower substrate when the substrate 1 curved downward is carried out is not a size capable of conveying the substrate 1. In this case, since the substrate 1 is curved downward, if the substrate holding hand 20 is allowed to enter the storage unit 201 along the pre-taught conveyance path, the substrate holding hand 20 and the substrate 1 will interfere with each other. Therefore, the control unit 30 corrects the conveyance path for the substrate holding hand 20 to enter the storage unit 201 downward. Thereby, the interference between the substrate holding hand 20 and the substrate 1 is suppressed.

[0041] In this embodiment, when the control unit 30 determines that at least one of unloading the substrate 1 from the storage unit 200 and loading the substrate 1 into the storage unit 200 cannot be performed even if the conveyance path of the substrate 1 taught in advance is corrected, the control unit 30 performs control to cause the notification unit 40 to notify that at least one of loading and unloading the substrate 1 cannot be performed. In this embodiment, the control unit 30 performs control to cause the notification unit 40 to notify both that the substrate 1 cannot be unloaded from the storage unit 201 and that the substrate 1 cannot be loaded into the storage unit 202. Note that the substrate 1 determined to be unloadable is unloaded. As a result, the gap between the substrates 1 becomes larger, so there may be a case where the substrate 1 determined to be unloadable can also be unloaded. In this case, the substrate 1 once determined to be unloadable is also unloaded. Among the substrates 1 loaded into the storage unit 202, the substrates 1 determined to be loadable are loaded.

[0042] Next, with reference to FIG. 7, the operation of the substrate transfer robot 100 will be described. In the following, the unloading operation of the substrate 1 from the storage unit 201 will be described, but the loading operation of the substrate 1 into the storage unit 202 is performed in the same manner.

[0043] First, in step S1, as shown in FIG. 4, the control unit 30 moves the robot arm 10 to move the substrate holding hand 20 below the substrate 1 stored in the storage unit 201. Then, the control unit 30 moves the robot arm 10 upward by the lifting shaft 13. Then, the control unit 30 detects the presence or absence of the substrate 1 by the optical sensor 24 disposed on the substrate holding hand 20.

[0044] In step S2, at the position where the substrate 1 is detected by the optical sensor 24, the control unit 30 controls the imaging unit 25 to image a plurality of substrates 1. Note that after moving the robot arm 10 upward by the lifting shaft 13, the control unit 30 moves the substrate holding hand 20 to the lifting shaft 13 side.

[0045] In step S3, the control unit 30 acquires the shape and position of the substrate 1 based on the image captured by the imaging unit 25. Further, the control unit 30 corrects the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25 based on the detection result of the optical sensor 24.

[0046] In step S4, the control unit 30 acquires a conveyance gap C including at least one of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being conveyed by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being conveyed by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200, based on the image captured by the imaging unit 25. Specifically, the control unit 30 acquires the conveyance gap C based on the shape and position of the substrate 1 corrected based on the detection result of the optical sensor 24.

[0047] In step S5, the control unit 30 determines whether the size of the acquired conveyance gap C is a size capable of conveying the substrate 1.

[0048] In step S5, if yes, in step S6, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to carry out the substrate 1 from the storage unit 200.

[0049] In step S5, if no, in step S7, the control unit 30 corrects the conveyance path of the substrate 1 taught in advance based on the size of the detected conveyance gap C.

[0050] In step S8, the control unit 30 determines whether it is possible to carry out the substrate 1 from the storage unit 200 along the corrected conveyance path.

[0051] In step S8, if yes, in step S6, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to carry out the substrate 1 from the storage unit 200.

[0052] In step S8, if the answer is no, in step S9, the control unit 30 performs control to cause the notification unit 40 to notify that the substrate 1 cannot be carried out from the storage unit 200.

[0053] [Effects of the present embodiment] In the present embodiment, the following effects can be obtained.

[0054] In the present embodiment, as described above, the control unit 30, based on the image captured by the imaging unit 25, determines the gap between the position of the substrate holding hand 20 and the substrate 1 in the storage unit 200, the substrate 1 being conveyed by the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being conveyed by the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200. The control unit 30 acquires a conveyance gap C including at least one of these gaps, and based on the size of the acquired conveyance gap C, controls the operations of the robot arm 10 and the substrate holding hand 20 to perform at least one of carrying out the substrate 1 from the storage unit 200 and carrying the substrate 1 into the storage unit 200. Thereby, even when the movement path, position, etc. of the substrate holding hand 20 entering the storage unit 200 are changed based on the inclination angle, curved state, etc. of the substrate 1, if the size of the conveyance gap C is insufficient, it is possible to control not to carry out the substrate 1 from the storage unit 200 or to carry the substrate 1 into the storage unit 200. For this reason, it is possible to suppress the substrate holding hand 20 from interfering with the substrate 1 arranged adjacent to the substrate 1 to be carried out, and to suppress the substrate 1 being conveyed by the substrate holding hand 20 from interfering with the substrate 1 arranged adjacent thereto. As a result, it is possible to suppress interference of the substrate 1 when the substrate 1 is conveyed.

[0055] Further, it is also possible to move the optical sensor 24 along the arrangement direction of the substrates 1 stored in the storage unit 200 to detect the position of the substrates 1 and the like, and obtain the conveyance gap C. On the other hand, in this case, since the optical sensor 24 detects only a part such as one end portion of the substrate 1, it is difficult to accurately obtain the conveyance gap C at the central portion and the other end portion of the substrate 1. Therefore, by obtaining the conveyance gap C based on the image captured by the imaging unit 25 as described above, it is possible to obtain the conveyance gap C not only at one end portion but also at the central portion and the other end portion of the substrate 1. As a result, when conveying the substrate 1, it is possible to appropriately suppress the interference of the substrate 1.

[0056] In the present embodiment, as described above, the conveyance gap C includes a gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to the upper side of the substrate holding hand 20 in the storage unit 200, and a gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 arranged adjacent to the lower side of the substrate holding hand 20 in the storage unit 200. Thereby, it is possible to suppress interference with both the substrate 1 arranged on the upper surface 20a side of the substrate holding hand 20 and the substrate 1 arranged on the lower surface 20b side. As a result, when conveying the substrate 1, it is possible to further suppress the interference of the substrate 1.

[0057] In the present embodiment, as described above, the control unit 30 obtains at least one of the shape and position of the substrate 1 based on the image captured by the imaging unit 25, and obtains the size of the conveyance gap C. Thereby, the conveyance gap C can be obtained in a state reflecting at least one of the shape and position of the substrate 1. As a result, when conveying the substrate 1, it is possible to further suppress the interference of the substrate 1.

[0058] In the present embodiment, as described above, the control unit 30 corrects at least one of the shape and position of the substrate 1 obtained based on the image captured by the imaging unit 25 based on the detection result of the optical sensor 24. Thereby, even when at least one of the shape and position of the substrate 1 cannot be appropriately obtained in the image captured by the imaging unit 25, at least one of the shape and position of the substrate 1 can be appropriately obtained based on the detection result of the optical sensor 24 with relatively high accuracy.

[0059] In the present embodiment, as described above, the control unit 30 controls the imaging unit 25 to image a plurality of substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. Thereby, even when the number of substrates 1 is relatively large and all the substrates 1 cannot be imaged in one imaging by the imaging unit 25, the entirety of the plurality of substrates 1 can be imaged by imaging a plurality of times.

[0060] In the present embodiment, as described above, the imaging unit 25 is disposed on the robot arm 10 or the substrate holding hand 20, the optical sensor 24 is disposed at the tip of the substrate holding hand 20, and is moved by the substrate holding hand 20 along the arrangement direction in which the plurality of substrates 1 are arranged. Thereby, the imaging unit 25 can be moved together with the optical sensor 24 as the substrate holding hand 20 moves.

[0061] In the present embodiment, as described above, the control unit 30 acquires the position of the substrate holding hand 20 in the storage unit 200 based on the movement path of the substrate holding hand 20 when transporting the substrate 1 taught in advance. Thereby, the transport gap C can be acquired without actually inserting the substrate holding hand 20 inside the storage unit 200 and imaging both the substrate holding hand 20 and the substrate 1 by the imaging unit 25.

[0062] In this embodiment, as described above, when the control unit 30 determines that the detected size of the conveyance gap C is a size capable of conveying the substrate 1, the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 to perform at least one of carrying out the substrate 1 from the storage unit 200 and carrying the substrate 1 into the storage unit 200. Thereby, it is possible to suppress at least one of carrying out and carrying in the substrate 1 when the size of the conveyance gap C is insufficient for conveying the substrate 1. As a result, damage to the substrate 1 caused by interference with other substrates 1 or the substrate holding hand 20 can be suppressed.

[0063] In this embodiment, as described above, when the control unit 30 determines that the detected size of the conveyance gap C is not a size capable of conveying the substrate 1, the control unit 30 corrects the conveyance path of the substrate 1 taught in advance based on the detected size of the conveyance gap C. Thereby, even when the size of the conveyance gap C is insufficient for conveying the substrate 1, by correcting the conveyance path of the substrate 1, it is possible to perform at least one of carrying out and carrying in the substrate 1 while suppressing interference with other substrates 1 or the substrate holding hand 20.

[0064] In this embodiment, as described above, when the control unit 30 determines that at least one of carrying out the substrate 1 from the storage unit 200 and carrying the substrate 1 into the storage unit 200 cannot be performed even after correcting the conveyance path of the substrate 1 taught in advance, the control unit 30 performs control to cause the notification unit 40 to notify that at least one of carrying in and carrying out the substrate 1 cannot be performed. Thereby, the operator can recognize that at least one of carrying out and carrying in the substrate 1 cannot be performed.

[0065] In this embodiment, as described above, the conveyance gap C includes the gap between the upper surface 1a of the substrate 1 being conveyed by the substrate holding hand 20 and the lower surface 1b of the substrate 1 arranged adjacent to the upper side of the substrate holding hand 20, and the gap between the lower surface 20b of the substrate holding hand 20 conveying the substrate 1 and the upper surface 1a of the substrate 1 arranged adjacent to the lower side of the substrate holding hand 20. Thereby, since the conveyance gap C during the conveyance of the substrate 1 by the substrate holding hand 20 is also acquired, it is possible to further suppress the interference of the substrate 1 when the substrate 1 is conveyed.

[0066] [Modification Example] It should be noted that the embodiments disclosed this time should be considered as illustrative in all respects and not restrictive. The scope of the present disclosure is indicated by the scope of claims rather than the description of the above embodiments, and further includes all changes (modification examples) within the meaning and scope equivalent to the scope of claims.

[0067] For example, in the above embodiment, an example is shown in which the control unit 30 controls the operations of the robot arm 10 and the substrate holding hand 20 so as to perform both taking out the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202 based on the size of the acquired conveyance gap C. However, the present disclosure is not limited to this. For example, the control unit 30 may control the operations of the robot arm 10 and the substrate holding hand 20 so as to perform only one of taking out the substrate 1 from the storage unit 201 and loading the substrate 1 into the storage unit 202 based on the size of the acquired conveyance gap C.

[0068] Also, in the above-described embodiment, the transport gap C is shown as an example including the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, and the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1. However, the present disclosure is not limited thereto. For example, when the distance between the substrates 1 arranged in the storage unit 201 is relatively large, etc., as the transport gap C, only one of the gap C1 between the upper surface 20a of the substrate holding hand 20 and the lower surface 1b of the substrate 1, and the gap C2 between the lower surface 20b of the substrate holding hand 20 and the upper surface 1a of the substrate 1 may be considered.

[0069] Also, in the above-described embodiment, the control unit 30 is shown as an example of acquiring both the shape and position of the substrate 1 based on the image captured by the imaging unit 25. However, the present disclosure is not limited thereto. For example, the control unit 30 may acquire only one of the shape or position of the substrate 1 based on the image captured by the imaging unit 25.

[0070] Also, in the above-described embodiment, the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25 are shown as an example of being corrected based on the detection result of the optical sensor 24. However, the present disclosure is not limited thereto. For example, if the accuracy of the shape and position of the substrate 1 acquired based on the image captured by the imaging unit 25 is sufficient for acquiring the transport gap C, the correction based on the detection result of the optical sensor 24 may not be performed.

[0071] Also, in the above-described embodiment, the control unit 30 is shown as an example of controlling the imaging unit 25 to image a plurality of substrates 1 at the position where the substrate 1 is detected by the optical sensor 24. However, the present disclosure is not limited thereto. For example, the control unit 30 may control the imaging unit 25 to image a plurality of substrates 1 at a predetermined position. Also, when the field of view of the imaging unit 25 is relatively large, the control unit 30 may control the imaging unit 25 to image all of the substrates 1 by one imaging.

[0072] In the above embodiment, an example where the imaging unit 25 is arranged on the substrate holding hand 20 has been shown, but the present disclosure is not limited to this. For example, the imaging unit 25 may be arranged on the robot arm 10.

[0073] In the above embodiment, an example where the optical sensor 24 is arranged at the tip of the substrate holding hand 20 has been shown, but the present disclosure is not limited to this. For example, the optical sensor 24 may be arranged at a portion other than the tip of the substrate holding hand 20.

[0074] In the above embodiment, an example where one blade 21 is arranged on the substrate transfer robot 100 has been shown, but the present disclosure is not limited to this. For example, as in the substrate transfer robot 110 shown in FIG. 8, two or more blades 21 may be arranged.

[0075] In the above embodiment, an example where the transfer gap C includes all of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transferred to the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transferred to the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200 has been shown, but the present disclosure is not limited to this. For example, the transfer gap C may include only one or two of the gap between the position of the substrate holding hand 20 in the storage unit 200 and the substrate 1, the gap between the substrate 1 being transferred to the substrate holding hand 20 and the substrate 1 adjacent to the substrate 1 being transferred to the substrate holding hand 20, and the gap between the substrates 1 stored in the storage unit 200.

Explanation of reference numerals

[0076] 1 Substrate 1a Upper surface 1b Lower surface 10 Robot arm 20 Substrate holding hand 20a Upper surface 20b Lower surface 24 Optical sensor 25 Imaging unit 30 Control unit 40 Notification unit 100, 110 Substrate transfer robot 200, 201, 202 Storage section C Transfer gap

Claims

1. A substrate transfer robot that performs at least one of carrying out the substrate from a storage unit for storing a plurality of substrates and carrying the substrate into the storage unit, comprising: a robot arm; a substrate holding hand attached to the tip of the robot arm for holding the substrate; an imaging unit for imaging the plurality of substrates stored in the storage unit; an optical sensor that moves along the arrangement direction in which the plurality of substrates stored in the storage unit are arranged and detects the substrate; a control unit, wherein the control unit acquires a transfer gap including at least one of a gap between the position of the substrate holding hand in the storage unit and the substrate, a gap between the substrate being transported by the substrate holding hand and the substrate adjacent to the substrate being transported by the substrate holding hand, and a gap between the substrates stored in the storage unit, based on the detection result of the optical sensor and the image captured by the imaging unit; and controls the operations of the robot arm and the substrate holding hand so as to perform at least one of carrying out the substrate from the storage unit and carrying the substrate into the storage unit, based on the size of the acquired transfer gap. A substrate transfer robot.

2. The transfer gap is a gap between the upper surface of the substrate holding hand in the storage unit and the lower surface of the substrate arranged adjacent to be above the substrate holding hand; and a gap between the lower surface of the substrate holding hand in the storage unit and the upper surface of the substrate arranged adjacent to be below the substrate holding hand. The substrate transfer robot according to claim 1.

3. The control unit acquires at least one of the shape and position of the substrate based on the image captured by the imaging unit, and acquires the size of the transfer gap. The substrate transfer robot according to claim 1 or 2.

4. The control unit corrects at least one of the shape and position of the substrate acquired based on the image captured by the imaging unit, based on the detection result of the optical sensor. The substrate transfer robot according to claim 3.

5. The control unit controls the imaging unit to image the plurality of substrates at the position where the substrate is detected by the optical sensor. The substrate transfer robot according to claim 4.

6. The imaging unit is disposed on the robot arm or the substrate holding hand, The optical sensor is disposed at the tip of the substrate holding hand and is moved by the substrate holding hand along the arrangement direction in which the plurality of substrates are arranged. The substrate transfer robot according to claim 4 or 5.

7. The control unit acquires the position of the substrate holding hand in the storage unit based on the movement path of the substrate holding hand when transporting the substrate taught in advance. The substrate transfer robot according to any one of claims 1 to 6.

8. When the control unit determines that the size of the detected transfer gap is a size capable of transferring the substrate, at least one of carrying out the substrate from the storage unit and carrying the substrate into the storage unit. The operation of the robot arm and the substrate holding hand is controlled. The substrate transfer robot according to any one of claims 1 to 7.

9. When the control unit determines that the size of the detected transfer gap is not a size capable of transferring the substrate, the control unit corrects the transfer path of the substrate taught in advance based on the size of the detected transfer gap. The substrate transfer robot according to any one of claims 1 to 8.

10. Further comprising a notification unit, When the control unit determines that even if the transfer path of the substrate taught in advance is corrected, at least one of carrying out the substrate from the storage unit and carrying the substrate into the storage unit cannot be performed, the control unit causes the notification unit to notify that at least one of carrying in and out the substrate cannot be performed. The substrate transfer robot according to claim 9.

11. The transfer gap is a gap between the upper surface of the substrate being transferred to the substrate holding hand and the lower surface of the substrate arranged adjacent to be above the substrate holding hand; a gap between the lower surface of the substrate holding hand transporting the substrate and the upper surface of the substrate arranged adjacent to be below the substrate holding hand. The substrate transfer robot according to any one of claims 1 to 10.

12. A control method for a substrate transfer robot that performs at least one of carrying out the substrate from a storage unit for storing a plurality of substrates and carrying the substrate into the storage unit, imaging the plurality of substrates stored in the storage unit by an imaging unit, Detecting the substrate by an optical sensor that moves along the arrangement direction in which the plurality of substrates stored in the storage unit are arranged; Based on the detection result of the optical sensor and the image captured by the imaging unit, the gap between the position of the substrate holding hand of the substrate transfer robot in the storage unit and the substrate, the gap between the substrate being transferred by the substrate holding hand and the substrate adjacent to the substrate being transferred by the substrate holding hand, and the gap between the substrates stored in the storage unit, obtaining a transfer gap including at least one of them; Controlling the operations of the robot arm and the substrate holding hand of the substrate transfer robot so as to perform at least one of carrying out the substrate from the storage unit and carrying the substrate into the storage unit based on the size of the obtained transfer gap. A control method for a substrate transfer robot.

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