A stretchable display substrate, a method for manufacturing the same, and a display device

Abstract

The present invention discloses a stretchable display substrate, a method for fabricating the same, and a display device. The stretchable display substrate includes a plurality of hole regions, and includes a base, a pixel unit disposed on the base, a signal line disposed on the base and electrically connected to the pixel unit, and a plurality of inorganic insulating layers laminated on the base, at least one of the plurality of inorganic insulating layers has a first cutout portion near the hole region, and the orthogonal projection of the first cutout portion on the base does not overlap with the orthogonal projection of the signal line and the pixel unit on the base.

Description

Technical Field

[0001] The present disclosure relates to the technical field of displays, and in particular, to a stretchable display substrate, a method for manufacturing the same, and a display device.

Background Art

[0002] With the development of display technology, organic light-emitting diodes (OLEDs) capable of performing flexible displays have promoted the diversity of displays and are gradually becoming the mainstream of display technology. In some related technologies, OLED flexible display devices can satisfy the buckling of a two-dimensional surface, but are not suitable for the flexibility requirements of stretchable display substrates of display devices under more complex conditions (for example, wearable devices).

[0003] In order to develop a stretchable OLED display function, in some related technologies, holes are formed in the substrate material of an OLED flexible display device to form islands for preparing pixel regions and bridges for wiring, and the deformation of the bridges is utilized to realize the stretching and shrinking of the display device.

Summary of the Invention

[0004] Embodiments of the present invention provide a stretchable display substrate including a plurality of hole regions, and the stretchable display substrate includes a base, a pixel unit disposed on the base, a signal line disposed on the base and electrically connected to the pixel unit, and a plurality of inorganic insulating layers stacked on the base, at least one of the plurality of inorganic insulating layers having a first cutout portion close to the hole region and not overlapping with the orthographic projections of the signal line and the pixel unit on the base.

[0005] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the stretchable display substrate further includes a plurality of pixel island regions disposed at intervals between the hole regions, and connection bridge regions disposed between the pixel island regions and the hole regions. The connection bridge region includes at least one of the pixel units, the first cutout portion is disposed in the connection bridge region, and the first cutout portion is disposed between the pixel unit of the connection bridge region and the hole region.

[0006] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the connection bridge region includes a plurality of the pixel units, and the orthographic projection of the signal line on the base is at least in the orthographic projection of the region between the pixel units of the connection bridge region and the pixel units of the connection bridge region on the base.

[0007] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the extending direction of the first cutout portion is substantially the same as the edge of the hole region.

[0008] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the first cutout portion does not penetrate the hole region.

[0009] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the distance between the side wall of the first cutout portion close to the hole region and the side wall of the hole region close to the first cutout portion is greater than or equal to 2 μm.

[0010] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, in the direction from the pixel island region to the hole region, the width of the first cutout portion is greater than or equal to 5 μm.

[0011] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the first cut-out portion penetrates the hole region.

[0012] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, an edge of the first cut-out portion close to the hole region overlaps an edge of the hole region close to the first cut-out portion.

[0013] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the pixel unit includes at least one sub-pixel, the sub-pixel includes a pixel circuit and a light-emitting element, the light-emitting element includes a stacked anode, an organic light-emitting layer, and a cathode, in the connection bridge region, a partition structure is arranged at a position close to the pixel unit, the organic light-emitting layer is cut by the partition structure, and the cathode is cut by the partition structure. The distance between a side wall of the first cut-out portion close to the pixel unit and the partition structure is greater than or equal to 2 μm.

[0014] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the first cut-out portion is a closed structure arranged around the hole region.

[0015] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the partition structure is a closed structure arranged around the first cut-out portion.

[0016] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, a part of the hole region extends in a first direction and includes a first sub-hole region and a second sub-hole region arranged in a second direction, and a third sub-hole region extending in the second direction. Another part of the hole region includes a fourth sub-hole region and a fifth sub-hole region extending in the second direction and arranged in the first direction, and a sixth sub-hole region extending in the first direction. The first direction is substantially perpendicular to the second direction. The third sub-hole region is substantially connected to the central regions of the first sub-hole region and the second sub-hole region. The sixth sub-hole region is substantially connected to the central regions of the fourth sub-hole region and the fifth sub-hole region. of the domain substantially connected to the central region The first cut-out portion is arranged at at least one of the following positions: the side of the connection position between the first sub-hole region and the third sub-hole region, the side of the connection position between the second sub-hole region and the third sub-hole region, the end side of the first sub-hole region and the end side of the second sub-hole region, the side of the connection position between the fourth sub-hole region and the sixth sub-hole region, the side of the connection position between the fifth sub-hole region and the sixth sub-hole region, the end side of the fourth sub-hole region and the end side of the fifth sub-hole region.

[0017] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the side of the connection position between the first sub-hole region and the third sub-hole region, the side of the connection position between the second sub-hole region and the third sub-hole region, the end side of the first sub-hole region and the end side of the second sub-hole region, the side of the connection position between the fourth sub-hole region and the sixth sub-hole region, the side of the connection position between the fifth sub-hole region and the sixth sub-hole region, the end side of the fourth sub-hole region and the end side of the fifth sub-hole region all have the first cut-out portion.

[0018] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the pixel island region includes at least one of the pixel units, and the resolution of the pixels in the pixel island region is substantially the same as the resolution of the pixels in the connection bridge region.

[0019] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the plurality of inorganic insulating layers are the first on the S barrier layer, buffer layer, first gate insulating layer, second gate insulating layer, interlayer dielectric layer, first passivation layer, second passivation layer, and inorganic encapsulation layer laminated on the substrate, and at least one of the first barrier layer, the buffer layer, the first gate insulating layer, the second gate insulating layer, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer is provided with the first cutout portion.

[0020] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer are provided with the first cutout portion, and each of the first cutout portions substantially overlaps.

[0021] Optionally, in the stretchable display substrate provided by the embodiment of the present invention, the inorganic encapsulation layer includes a first inorganic layer and a second inorganic layer laminated on the second passivation layer, the stretchable display substrate further includes a first planar layer and a second planar layer disposed between the interlayer dielectric layer and the first passivation layer, a pixel definition layer disposed between the second passivation layer and the inorganic encapsulation layer, and an organic layer disposed between the first inorganic layer and the second inorganic layer, at least one of the first planar layer, the second planar layer, the pixel definition layer, and the organic layer has a second cutout portion close to the hole region, and the first cutout portion and the second cutout portion substantially overlap.

[0022] Optionally, in the above stretchable display substrate provided by the embodiments of the present invention, the base includes a flexible layer, or the base is the first barrier layer of away from the buffer layer side of and includes a first flexible layer, a second barrier layer, and a second flexible layer stacked thereon.

[0023] Correspondingly, embodiments of the present invention further provide a display device including the above stretchable display substrate.

[0024] Correspondingly, embodiments of the present invention further provide a method for manufacturing the above stretchable display substrate, and the method includes: providing a base; forming a pixel unit and a signal line electrically connected to the pixel unit on the base; forming a plurality of stacked inorganic insulating layers on the base, wherein at least one of the plurality of inorganic insulating layers has a first cutout portion close to the via region, and an orthographic projection of the first cutout portion on the base does not overlap with orthographic projections of the signal line and the pixel unit on the base.

[0025] Optionally, in the above manufacturing method provided by the embodiments of the present invention, that at least one of the plurality of inorganic insulating layers has a first cutout portion close to the via region means that depositing a first barrier layer, a buffer layer, a first gate insulating layer, a second gate insulating layer, an interlayer dielectric layer, a first passivation layer, a second passivation layer, and an inorganic encapsulation layer on the base; forming the first cutout portion in at least one of the first barrier layer, the buffer layer, the first gate insulating layer, the second gate insulating layer, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer by using a patterning process.

Brief Description of the Drawings

[0026]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7A

Figure 7B

Figure 7C

Figure 7D

Figure 7E

Figure 7F

Figure 7G

Figure 7H

Figure 7I

Figure 7J

Figure 7K

Embodiments for Carrying Out the Invention

[0027] To make the objectives, technical solutions, and advantages of the present invention more clear, specific examples of the method for manufacturing a stretchable display substrate provided by an embodiment of the present invention will be described in detail below with reference to the accompanying drawings. It should be understood that the preferred embodiments described below are only used to illustrate and explain the present invention and do not limit the present invention. Furthermore, when there is no conflict, the embodiments in the present application and the features in the embodiments can be combined with each other.

[0028] The thickness, size, and shape of the films of each layer in the accompanying drawings do not reflect the true scale of the stretchable display substrate and are only for explaining the present invention.

[0029] Embodiments of the present invention provide a stretchable display substrate including a plurality of hole regions Q2, as shown in FIGS. 1 and 2. Specifically, the hole regions Q2 are configured to provide a deformation space for the display substrate during stretching and contraction.

[0030] Specifically, as shown in FIGS. 3 and 4, FIG. 3 is a schematic cross-sectional view of the partial structure in the direction AA' in FIG. 1, and FIG. 4 is a schematic cross-sectional view of the partial structure in the direction AA' in FIG. 2. The stretchable display substrate includes a base 1, pixel units 4, signal lines 2, and a plurality of inorganic insulating layers.

[0031] The base 1 may be a flexible base such that the stretchable region of the stretchable display substrate can be stretched and contracted.

[0032] The pixel units 4 are arranged on the base 1.

[0033] The signal lines 2 are arranged on the base 1 and are electrically connected to the pixel units 4. Specifically, the signal lines 2 may include gate lines, data lines, and the like.

[0034] The plurality of inorganic insulating layers are stacked on the base 1. At least one of the plurality of inorganic insulating layers has a first cutout portion 3 at a position close to the hole region Q2, and the orthographic projection of the first cutout portion 3 on the base 1 does not overlap with the orthographic projections of the signal lines 2 and the pixel units 4 on the base 1.

[0035] In the case of the stretchable display substrate provided by the embodiment of the present invention, when the stretchable display substrate is stretched and contracted, the position close to the hole region Q2 is deformed under tensile force. In the present invention, since at least one of the plurality of inorganic insulating layers has the first cutout portion 3 at a position close to the hole region Q2, that is, at least one layer of the plurality of inorganic insulating layers is removed from the position close to the hole region Q2, the buckling deformation behavior during stretching and contraction of the position close to the hole region Q2 can be improved, the position close to the hole region Q2 is less likely to be damaged, the pixel units 4 are less likely to be damaged, and the stretching and contracting characteristics of the stretchable display substrate are improved.

[0036] Note that, as shown in FIGS. 1 and 2, it should be noted that the hole region Q2 in the embodiment of the present invention may completely penetrate the stretchable display substrate. Of course, the hole region Q2 may also penetrate not only all the film layers on the base of the stretchable display substrate but also a part of the base.

[0037] Note that, as shown in FIGS. 3 and 4, it should be noted that the embodiment of the present invention is schematically illustrated in a state where all the inorganic insulating layers on the base 1 are removed to form the first cutout portion 3 as an example. Of course, it is also possible to remove any one or a plurality of the inorganic insulating layers to form the first cutout portion 3.

[0038] In specific implementation, the stretchable panel having the structure design of the island bridge in the related art faces the problems of low display resolution (PPI) and display unevenness. In order to improve the display resolution and solve the problem of display unevenness, as shown in FIGS. 1 to 4, the stretchable display substrate provided by the embodiment of the present invention further includes a plurality of pixel island regions Q1 spaced apart between the hole regions Q2, and a connection bridge region Q3 located between the pixel island region Q1 and the hole region Q2. Specifically, the pixel island region Q1 is configured to display an image, and the connection bridge region Q3 is configured for wiring (for signal communication between adjacent pixel island regions Q1) and tension transmission.

[0039] The connection bridge region Q3 includes at least one pixel unit 4. The first cutout portion 3 is disposed in the connection bridge region Q3, and the first cutout portion 3 is disposed between the pixel unit 4 of the connection bridge region Q3 and the hole region Q2. That is, the present invention expands from originally arranging pixel units only in the pixel island region Q1 to further arranging pixel units in the connection bridge region Q3, so as to improve the display resolution and solve the problem of display unevenness.

[0040] As shown in FIGS. 1 to 4, the connection bridge region Q3 includes a plurality of pixel units 4, and the orthographic projection of the signal line 2 on the base 1 is located at least in the orthographic projection of the pixel unit 4 in the connection bridge region Q3 and the region between the pixel units 4 in the connection bridge region Q3 on the base 1. That is, the signal line 2 is wired below the pixel unit 4 in the connection bridge region Q3 and in the region between the pixel units 4 to realize electrical connection between the pixel units 4.

[0041] During specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 1, the extending direction of the first cutout portion 3 is substantially the same as the edge of the hole region Q2. In this way, since the first cutout portion 3 surrounding the hole region Q2 is arranged around the hole region Q2, the stretchability of the stretchable display substrate can be further improved.

[0042] During specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 3, the first cutout portion 3 does not communicate with the hole region Q2. The first cutout portion 3 is formed in at least one layer of the plurality of inorganic insulating layers. That is, since a plurality of inorganic insulating layers are held between the first cutout portion 3 and the hole region Q2, by removing at least one inorganic insulating layer in the connection bridge region Q3 to form the first cutout portion 3, the buckling deformation behavior during stretching and shrinking of the connection bridge region Q3 can be improved, whereby the connection bridge region Q3 is less likely to be damaged, and the pixel island region Q1 of the adjacent connection bridge region Q3 is less likely to be damaged, improving the stretchability of the stretchable display substrate.

[0043] During specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 3, the distance between the side wall of each first cutout portion 3 close to the corresponding hole region Q2 and the side wall of each hole region Q2 close to the corresponding first cutout portion 3 (this distance is the width of the inorganic insulating layer between the hole region Q2 and the first cutout portion 3) is 2 μm or more.

[0044] In a specific implementation, in order to reduce the difficulty of the process, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 3, in the direction from the pixel island region Q1 to the via region Q2, the width of the first cutout portion 3 is greater than or equal to 5 μm. In this way, when removing each inorganic insulating layer by exposure, development, and etching processes, the difficulty of the exposure, development, and etching processes can be reduced.

[0045] In a specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 4, the first cutout portion 3 and the via region Q2 communicate with each other. That is, when etching each inorganic insulating layer in the connection bridge region Q3, the inorganic insulating layer in the connection bridge region Q3 is directly etched to communicate with the via region Q2, the inorganic insulating layer in the connection bridge region Q3 is further reduced, and the stretchability of the connection bridge region Q3 is further improved.

[0046] In a specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 4, the edge of each first cutout portion 3 close to the corresponding via region Q2 overlaps the edge of each via region Q2 close to the corresponding first cutout portion 3, that is, no inorganic insulating layer is retained between the first cutout portion 3 and the via region Q2. That is, when etching the inorganic insulating layer in the connection bridge region Q3, the inorganic insulating layer in the region corresponding to the first cutout portion 3 is directly etched to the edge of the via region Q2, the inorganic insulating layer in the connection bridge region Q3 is further reduced, and the stretchability of the connection bridge region Q3 is further improved.

[0047] In a specific implementation, in the stretchable display substrate provided by the embodiments of the present invention, as shown in FIGS. 3 and 4, each pixel unit 4 includes at least one sub-pixel. The sub-pixel includes a pixel circuit and a light-emitting element. The pixel circuit is located between the light-emitting element and Base 1, and the light-emitting element includes a stacked anode 6, an organic light-emitting layer 7, and a cathode 8. In each connection bridge region Q3, a partition structure 9 is disposed at a position close to the corresponding pixel unit 4. The partition structure 9 is disposed around the first cutout portion 3 in FIGS. 1 and 2, that is, the partition structure 9 is disposed between the pixel unit 4 and the first cutout portion 3. The organic light-emitting layer 7 is cut by the partition structure 9, and the cathode 8 is cut by the partition structure 9. Since the partition structure 9 is located in the connection bridge region Q3, and the connection bridge region Q3 is located between the hole region Q2 and the pixel island region Q1, the organic light-emitting layer 7 and the cathode 8 separated by the partition structure 9 are partially located in the pixel island region Q1 and partially close to the hole region Q2. The organic light-emitting layer 7 and the cathode 8 close to the hole region Q2 are highly likely to be invaded by water and oxygen. By dividing the organic light-emitting layer 7 and the cathode 8 into two separated parts from each other, the separation path distance for water and oxygen in the organic light-emitting layer 7 and the cathode 8 close to the hole region Q2 to invade the organic light-emitting layer 7 and the cathode 8 in the sub-pixel is effectively shortened. That is, it is guaranteed that water and oxygen cannot invade the organic light-emitting layer 7 and the cathode 8 in the sub-pixel, and the normal display of the display product is ensured.

[0048] The light-emitting element can have a red (R) light-emitting element that emits red light, a green (G) light-emitting element that emits green light, and a blue (B) light-emitting element that emits blue light. The light-emitting element may be an inorganic light-emitting diode, or an organic light-emitting diode (OLED) made of an organic material, or a micro light-emitting diode (Micro LED), or a mini light-emitting diode (mini LED). A micro light-emitting diode refers to an ultra-small inorganic light-emitting element with a size of 100 microns or less that emits light without a backlight or a filter.

[0049] The pixel circuit can adopt various structures. For example, the pixel circuit can include a structure of two transistors and one capacitor (2T1C), or a structure of seven transistors and one capacitor (7T1C), or a structure of twelve transistors and one capacitor (12T1C), etc. As shown in FIGS. 3 and 4, which are schematic diagrams of the driving transistor, the light-emitting element, and the storage capacitor in the pixel circuit, each pixel circuit generally includes a driving transistor and other switching transistors. The driving transistor may be a top-gate type and includes an active layer 21 laminated on the base 1, a first gate insulating layer 22, a gate 23, a second gate insulating layer 24, an interlayer dielectric layer 25, a source 26, and a drain 27. Specifically, the active layer 21 may be formed on the buffer layer 28, the buffer layer 28 is disposed on the first barrier layer 29, the first gate insulating layer 22 covers the buffer layer 28 and the active layer 21, and the gate 23 is formed on the side of the first gate insulating layer 22 away from the active layer 21. The second gate insulating layer 24 covers the gate 23 and the first gate insulating layer 22. The interlayer dielectric layer 25 covers the second gate insulating layer 24. The source 26 and the drain 27 are formed on the side of the interlayer dielectric layer 25 away from the base 1, are located on two opposite sides of the gate 23 respectively, and the source 26 and the drain 27 can contact two opposite sides of the active layer 21 through via holes respectively. As shown in FIGS. 3 and 4, the capacitor structure (for example, the storage capacitor Cst of the pixel circuit) may include a first electrode plate C1 and a second electrode plate C2. The second electrode plate C2 and the gate 23 are disposed in the same layer. The first electrode plate C1 is located between the second gate insulating layer 24 and the interlayer dielectric layer 25, and the first electrode plate C1 faces the second electrode plate C2.

[0050] Specifically, as shown in FIGS. 3 and 4, the signal line 2 located in the connection bridge region Q3 is disposed within the film layer where the source 26 and the drain 27 are located. The anode 6 of the light-emitting element and the drain 27 may be directly electrically connected (i.e., a single-layer SD structure), or may be electrically connected via an overlap electrode 30 located between the anode 6 and the drain 27 (i.e., a multi-layer SD structure). A first planar layer 31 is disposed between the overlap electrode 30 and the drain 27. A second planar layer 32, a first passivation layer 33, and a second passivation layer 34 are disposed between the overlap electrode 30 and the anode 6. Each light-emitting element in the stretchable display substrate is generally defined by a pixel definition layer 35. The pixel definition layer 35 has an opening region that exposes the light-emitting element.

[0051] In the stretchable display substrate provided by an embodiment of the present invention, the base may include a flexible layer, or as shown in FIGS. 3 and 4, the base 1 includes a first flexible layer 11, a second barrier layer 12, and a second flexible layer 13 laminated on a side of the first barrier layer 29 away from the buffer layer 28.

[0052] Specifically, the material of the flexible layer may be polyimide (PI), polyester, polyamide, or the like.

[0053] Specifically, as shown in FIGS. 3 and 4, the base 1 may be disposed on the glass substrate 10 to facilitate subsequent peeling.

[0054] Specifically, as shown in FIGS. 3 and 4, the distance between the side of the first cutout portion 3 close to the pixel unit 4 and the partition structure 9 (i.e., the width of the inorganic insulating layer between the first cutout portion 3 and the partition structure 9) may be 2 μm or more. The organic light-emitting layer 7 is cut in the partition structure 9, and the cathode 8 is cut in the partition structure 9.

[0055] In a specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 1, the first cutout portion 3 is a closed structure arranged around the hole region Q2 so as to remove the inorganic insulating layer in the connection bridge region Q3 as much as possible and to most improve the stretchability of the connection bridge region.

[0056] In a specific implementation, since there is a high possibility that water or oxygen may enter the hole region in pixel units, in the stretchable display substrate provided by the embodiment of the present invention, in order to block the intrusion path of water or oxygen at each position in the hole region, as shown in FIG. 3, the partition structure 9 is a closed structure arranged around the first cutout portion 3. That is, the orthographic projection of the partition structure 9 on the base 1 is the same as the boundary diagram of the hole region Q2. That is, the partition structure 9 is arranged around the hole region Q2, and the partition structure 9 can surely prevent water or oxygen from entering the pixel island region Q1 from the hole region Q2 at various positions.

[0057] In a specific implementation, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 2, a part of the hole region Q2 includes a first sub-hole region Q21 and a second sub-hole region Q22 extending in the first direction X and arranged in the second direction Y, and a third sub-hole region Q23 extending in the second direction Y. Another part of the hole region Q2 includes a fourth sub-hole region Q24 and a fifth sub-hole region (not shown) extending in the second direction Y and arranged in the first direction X, and a sixth sub-hole region Q26 extending in the first direction X. The first direction X and the second direction Y are substantially perpendicular. The sixth sub-hole region Q26 is substantially connected to the central regions of the fourth sub-hole region Q24 and the fifth sub-hole region.

[0058] When the stretchable display substrate is stretched, as shown in FIG. 2, the side (abductor angle) of the connection position between the first subhole region Q21 and the third subhole region Q23, the side (abductor angle) of the connection position between the second subhole region Q22 and the third subhole region Q23, the end side of the first subhole region Q21 and the end side of the second subhole region Q22, the side (abductor angle) of the connection position between the fourth subhole region Q24 and the sixth subhole region Q26, the side of the connection position between the fifth subhole region and the sixth subhole region Q26, the end side of the fourth subhole region Q24, and the end side of the fifth subhole region are all stress concentrations that occur during stretching, and the inorganic insulating layer at these positions is broken first. In order to avoid breakage of the inorganic insulating layer at these positions, the first cutout portion 3 is disposed at at least one of the following positions: the side of the connection position between the first sub-hole region Q21 and the third sub-hole region Q23, the side of the connection position between the second sub-hole region Q22 and the third sub-hole region Q23, the end side of the first sub-hole region Q21 and the end side of the second sub-hole region Q22, the side of the connection position between the fourth sub-hole region Q24 and the sixth sub-hole region Q26, the side of the connection position between the fifth sub-hole region and the sixth sub-hole region Q26, the end side of the fourth sub-hole region Q24, and the end side of the fifth sub-hole region. In this way, the difficulty of making a large-area first cutout portion 3 can be reduced, and further, the problem of breakage of the inorganic insulating layer at the position where the inorganic insulating layer corresponding to the hole region Q2 is likely to break can be solved.

[0059] 1 and 2, in the embodiment of the present invention, the hole region Q2 is shown as a shape of the character "工" as an example. Of course, the shape of the hole region Q2 is not limited to this, and may be, for example, "T" or "一".

[0060] Preferably, in the stretchable display substrate provided by the embodiment of the present invention, as shown in FIG. 2, on the side of the connection position between the first sub-hole region Q21 and the third sub-hole region Q23, on the side of the connection position between the second sub-hole region Q22 and the third sub-hole region Q23, on the end side of the first sub-hole region Q21 and the end side of the second sub-hole region Q22, on the side of the connection position between the fourth sub-hole region Q24 and the sixth sub-hole region Q26, on the side of the connection position between the fifth sub-hole region and the sixth sub-hole region Q26, and on the end side of the fourth sub-hole region Q24 and the end side of the fifth sub-hole region, a first cutout portion 3 is provided in each case.

[0061] In the stretchable display substrate provided by the embodiment of the present invention, as shown in FIGS. 1 and 2, the pixel island region Q1 includes at least one pixel unit 4, and the resolution of the pixels in the pixel island region Q1 is substantially the same as the resolution of the pixels in the connection bridge region Q3. In this way, the display resolution can be improved and the problem of display unevenness can be solved.

[0062] In the stretchable display substrate provided by the embodiment of the present invention, as shown in FIGS. 3 and 4, the plurality of inorganic insulating layers include a first barrier layer 29, a buffer layer 28, a first gate insulating layer 22, a second gate insulating layer 24, an interlayer dielectric layer 25, a first passivation layer 33, a second passivation layer 34, and an inorganic encapsulation layer 36 laminated on the base 1. At least one of the first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, the second gate insulating layer 24, the interlayer dielectric layer 25, the first passivation layer 33, the second passivation layer 34, and the inorganic encapsulation layer 36 is provided with a first cutout portion 3.

[0063] In a specific implementation, in the stretchable display substrate provided by the embodiments of the present invention, as shown in FIGS. 3 and 4, the interlayer dielectric layer 25, the first passivation layer 33, the second passivation layer 34, and the inorganic encapsulation layer 36 are all provided with the first cutouts 3, and each of the first cutouts 3 substantially overlaps. Of course, in a specific implementation, the first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, and the second gate insulating layer 24 may also all be provided with the first cutouts 3.

[0064] As shown in FIGS. 3 and 4, in an embodiment of the present invention, as an example, it is schematically shown that the first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, the second gate insulating layer 24, the interlayer dielectric layer 25, the first passivation layer 33, the second passivation layer 34, and the inorganic encapsulation layer 36 all include the first cutouts 3. Of course, when the first cutouts 3 are provided in a plurality of inorganic insulating layers (that is, when each inorganic insulating layer is etched and the inorganic insulating layer is cut out in the corresponding region), the cutting process of the plurality of inorganic insulating layers may be cut out from the uppermost inorganic encapsulation layer 36 to any inorganic insulating layer above the second flexible layer 13. For example, it may be directly cut out so as to be above the second flexible layer 13, or directly cut out in any one of the first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, the second gate insulating layer 24, the interlayer dielectric layer 25, the first passivation layer 33, the second passivation layer 34, and the inorganic encapsulation layer 36 film layer. The first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, the second gate insulating layer 24, and the interlayer dielectric layer 25 film layer may be cut out using one or two etching processes in the process of manufacturing the stretchable display substrate. After the inorganic encapsulation layer 36 is manufactured, it is cut out by thinning through etching after one exposure and etching process. Of course, all the inorganic insulating layers can also be cut out by one exposure and deep hole etching process after being manufactured. The specific etching process can be selected according to actual needs.

[0065] In a specific implementation, in the stretchable display substrate provided by the embodiments of the present invention, as shown in FIGS. 3 and 4, the inorganic encapsulation layer 36 includes a first inorganic layer and a second inorganic layer laminated on the second passivation layer 34.

[0066] The stretchable display substrate further includes a first planar layer 31 and a second planar layer 32 located between the interlayer dielectric layer 25 and the first passivation layer 33, a pixel definition layer 35 located between the second passivation layer 34 and the inorganic encapsulation layer 36, and an organic layer located between the first inorganic layer and the second inorganic layer.

[0067] At least one of the first planar layer 31, the second planar layer 32, the pixel definition layer 35, and the organic layer has a second cutout portion at a position close to the hole region Q2. The first cutout portion 3 and the second cutout portion substantially overlap.

[0068] It should be understood that the first barrier layer 29, the buffer layer 28, the first gate insulating layer 22, the second gate insulating layer 24, the interlayer dielectric layer 25, the first passivation layer 33, the second passivation layer 34, and the inorganic encapsulation layer 36 mentioned in the embodiments of the present invention may be made of an inorganic insulating material such as silicon oxide or silicon nitride. Also, the first planar layer 31, the second planar layer 32, the pixel definition layer 35, and the organic layer may be organic film layers, that is, they may be made of an organic insulating material such as photoresist or PI.

[0069] In the connection bridge region Q3, when all the inorganic insulating layers on the base 1 are etched away, the first planar layer 31, the second planar layer 32, the pixel definition layer 35, and the organic layer are also etched away, that is, it is necessary to point out that a via hole penetrating all the inorganic insulating layers and the organic insulating layers may be formed in the connection bridge region Q3 and represented by the first cutout portion 3.

[0070] The inventors of the present invention have tested the stretchable display substrate provided by the embodiment of the present invention as shown in FIG. 3 and the stretchable characteristics of the stretchable display substrate having no first cutout in the connection bridge region in the related art. As a result of the test, the stretch amount of the present invention is about 2%, and the stretch amount in the related art is less than 1%. It has been found that the characteristics of the stretchable display substrate provided by the embodiment of the present invention are improved.

[0071] Based on the same inventive concept, an embodiment of the present invention further provides a method for manufacturing the above-mentioned stretchable display substrate, as shown in FIG. 5, including the following: S501. Provide a base.

[0072] S502. Form a pixel unit and a signal line electrically connected to the pixel unit on the base.

[0073] S503. Form a plurality of inorganic insulating layers laminated on the base, wherein at least one of the plurality of inorganic insulating layers has a first cutout close to the hole region, and the orthographic projection of the first cutout on the base does not overlap with the orthographic projections of the signal line and the pixel unit on the base.

[0074] During specific implementation, in the above manufacturing method provided by the embodiment of the present invention, as shown in FIG. 6, at least one of the plurality of inorganic insulating layers has a first cutout close to the hole region. Specifically, as shown in FIG. 6, it specifically includes the following: S601. Deposit a first barrier layer, a buffer layer, a first gate insulating layer, a second gate insulating layer, an interlayer dielectric layer, a first passivation layer, a second passivation layer, and an inorganic encapsulation layer on the base.

[0075] S602. Use a patterning process to form a first cutout in at least one of the first barrier layer, the buffer layer, the first gate insulating layer, the second gate insulating layer, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer.

[0076] The process of forming each layer structure in the embodiments of the present invention may include a patterning process, a photolithography process, etc. The patterning process may include processes such as film formation, photoresist coating, mask exposure, development, etching, photoresist stripping, etc., and the photolithography process may include processes such as film coating, mask exposure, development, etc. Evaporation, deposition, coating, spraying, etc. used are all mature manufacturing processes in related technologies.

[0077] The manufacturing process of the stretchable display substrate shown in FIG. 3 will be described in detail below and may include the following processes.

[0078] (1) Taking the base 1 including two flexible layer structures as an example, the base 1 is divided into a pixel island region Q1, a hole region Q2, and a connection bridge region Q3, and a first flexible layer 11, a second barrier layer 12, and a second flexible layer 13 are sequentially formed on the glass substrate 10. When forming the second barrier layer 12, the second barrier layer 12 corresponding to the hole region Q2 is removed by etching. Next, as shown in FIG. 7A, a first barrier layer 29 is formed on the second flexible layer 13. The material of the flexible layer may be polyimide (PI), polyester, polyamide, etc. The material of the barrier layer may be silicon nitride (SiNx), silicon oxide (SiOx), etc. in order to improve the water resistance and oxygen resistance of the base.

[0079] (2) As shown in FIG. 7B, a buffer layer 28 is formed on the first barrier layer 29, an active layer film is formed on the buffer layer 28, the active layer film is patterned to form an active layer 21 on the buffer layer 28 through a patterning process, and a first gate insulating layer 22 is formed on the active layer 21.

[0080] (3) As shown in FIG. 7C, a metal film is formed on the first gate insulating layer 22, the metal film is patterned to form a gate 23, a second electrode plate C2, a grid line (not shown), and a gate connection line (not shown) formed in the connection bridge region Q3 on the first insulating layer 22, and then a second gate insulating layer 24 is formed on the gate 23.

[0081] (4) A metal film is formed on the second gate insulating layer 24, and the metal film is patterned through a patterning process to form a first electrode plate C1 on the second insulating layer 24. The first electrode plate C1 is positionally corresponding to the second electrode plate C2. Next, an interlayer dielectric layer 25 is formed on the film layer where the first electrode plate C1 is located. As shown in FIG. 7D, by patterning the first gate insulating layer 22, the second gate insulating layer 24, and the interlayer dielectric layer 25, via holes located above both ends of the active layer 21, via holes corresponding to the hole region Q2, and a corresponding first cutout portion 3 in the connection bridge region Q3 are formed.

[0082] (5) A metal film (layer SD1) is formed on the interlayer insulating edge film 25, and through a patterning process of this metal film, a source 26, a drain 27, and a signal line 2 (data line) are formed on the interlayer insulating layer 25. The source 26 and the drain 27 are respectively connected to the active layer 21 through via holes penetrating the first gate insulating layer 22, the second gate insulating layer 24, and the interlayer insulating layer 25. Then, a planar film coated with an organic material is formed on the base 1 having the source 26 and the drain 27, and a first planar layer 31 is formed by a masking process, an exposure process, and a development process. As shown in FIG. 7E, all the positions corresponding to the source 26, the hole region Q2, and the first cutout portion 3 in the connection bridge region Q3 of the first planar layer 31 are developed and removed.

[0083] (6) A metal film (layer SD2, or layer SD2 may not be present) is formed on the first planar layer 31, and the metal film is patterned through a patterning process to form the overlap electrode 30 on the first planar layer 31. A planar film coated with an organic material is formed on the film layer where the overlap electrode 30 is located, and the second planar layer 32 is formed through a masking process, an exposure process, and a development process. All the positions corresponding to the overlap 30, the hole region Q2, and the first cutout portion 3 of the second planar layer 32 are developed and removed. Next, an inorganic insulating material is formed on the second planar layer 32. Next, the buffer layer 28 and the first barrier layer 29 in the hole region Q2, and the first flexible layer 11 and the second flexible layer 13 in the hole region Q2 are first removed by etching. Among the inorganic insulating material, the buffer layer 28, and the first barrier layer 29, the inorganic insulating material, a part of the second planar layer 32, and a part of the first planar layer 31 corresponding to the position where the partition structure 9 of the connection bridge region Q3 is formed are etched and removed. As shown in FIG. 7F, a first passivation layer 33 is formed on the etched inorganic insulating material.

[0084] (7) An inorganic insulating material is formed on the first passivation layer 33, the inorganic insulating material corresponding to the hole region Q2 and the position of the first cutout portion 3 of the inorganic insulating material is etched and removed, and the corresponding inorganic insulating material and the first passivation layer 33 at the position of the overlap electrode 30 are etched and removed to form a second passivation layer 34 as shown in FIG. 7G.

[0085] (8) A conductive film is formed on the second passivation layer 34, and the anode 6 is formed through a patterning process of the conductive film. The anode 6 penetrates through the via holes of the first passivation layer 33 and the second passivation layer 34 and is electrically connected to the overlapping electrode 30 as shown in FIG. 7H. In an exemplary embodiment, the conductive film may have a three-layer laminated structure of a transparent conductive film / metal film / transparent conductive film. The material of the transparent conductive film may be indium tin oxide ITO or indium zinc oxide IZO, and the metal film may be a metal film such as Al, Ag, or Cu.

[0086] (9) A pixel definition film is applied to the anode 6, and the pixel definition layer 35 is formed through masking, exposure, and development processes. Pixel openings are arranged in the pixel island region Q1 in the pixel definition layer 35, and the pixel definition layer 35 of the pixel openings is developed and removed to expose the surface of the anode 6. Also, as shown in FIG. 7I, all the positions corresponding to the hole region Q2 and the connection bridge region Q3 in the pixel definition layer 35 are developed and removed.

[0087] (10) Both the organic light-emitting layer 7 and the cathode 8 can be fabricated and formed through an evaporation process. The material of the cathode 8 may be any one or more of magnesium (Mg), silver (Ag), aluminum (Al), copper (Cu), and lithium (Li), or an alloy made from any one or more of the above metals.

[0088] (11) An inorganic encapsulation layer 36 is formed on the cathode 8. The inorganic encapsulation layer 36 may include a first inorganic layer, an organic layer, and a second inorganic layer to be laminated. The positions of the inorganic encapsulation layer 36, the cathode 8, and the organic light-emitting layer 6 corresponding to the hole region 2 and the first cutout portion 3 are etched and removed as shown in FIG. 7K. That is, a stretchable display substrate provided by the embodiment of the present invention as shown in FIG. 3 is formed.

[0089] Embodiments of the present invention will be described by taking as an example the method for manufacturing a stretchable display substrate shown in FIG. 3, and the method for manufacturing a stretchable display substrate shown in FIG. 4 is the same as that shown in FIG. 3. The difference is that all the inorganic insulating layer and the organic insulating layer between the first cutout portion 3 and the hole region Q2 in FIG. 3 are etched away to form a structure in which the first cutout portion 3 communicates with the hole region Q2. Note that a detailed description of the manufacturing method shown in FIG. 4 will be omitted. Note that the etching of the inorganic insulating layer and the organic insulating layer between the first cutout portion 3 and the hole region Q2 may be performed together with the same film layer in other regions during etching.

[0090] Finally, a stretchable display substrate can be obtained by peeling the glass substrate 10 under the stretchable display substrate shown in FIGS. 3 and 4 from the stretchable display substrate.

[0091] Based on the same inventive concept, embodiments of the present invention further provide a display device including any of the stretchable display substrates provided by the embodiments of the present invention. The display device can be any product or component having a display function, such as a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, and a navigator. For the implementation of the display device, reference can be made to the above embodiments of the stretchable display substrate, but this will not be repeated here.

[0092] The display device may be an organic light-emitting diode display panel, a quantum dot light-emitting diode display panel, a display module, a curved screen mobile phone, a smart watch, or other products or components having a display function.

[0093] According to the stretchable display substrate, a manufacturing method thereof, and a display device provided by the embodiments of the present invention, when the stretchable display substrate is stretched or contracted, adjacent connection bridge regions close to the via region are deformed under tension. At least one of the plurality of inorganic insulating layers has a first cutout portion at a position close to the via region in the connection bridge region, that is, at least one of the plurality of inorganic insulating layers is removed from a position close to the via region in the connection bridge region, so that the buckling deformation behavior during the stretching and contracting of the connection bridge region can be improved, the connection bridge region is less likely to be damaged, the pixel island region of the adjacent connection bridge region is less likely to be damaged, and the stretching and contracting characteristics of the stretchable display substrate are improved.

[0094] It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the present invention. Accordingly, the present invention is intended to cover modifications and variations of the present invention provided that they come within the scope of the appended claims of the present invention and their equivalents.

Claims

1. A stretchable display substrate including a plurality of hole regions, wherein the stretchable display substrate comprises: a base, pixel units disposed on the base, signal lines disposed on the base and electrically connected to the pixel units, and a plurality of inorganic insulating layers stacked on the base, at least one of the plurality of inorganic insulating layers has a first cutout portion close to the hole region, and an orthographic projection of the first cutout portion on the base does not overlap with orthographic projections of the signal lines and the pixel units on the base, further including a plurality of pixel island regions disposed at intervals between the hole regions, and connection bridge regions disposed between the pixel island regions and the hole regions, the connection bridge region includes at least one of the pixel units, the first cutout portion is disposed in the connection bridge region, and the first cutout portion is disposed between the pixel units in the connection bridge region and the hole region, a stretchable display substrate.

2. The connection bridge region includes a plurality of the pixel units, and an orthographic projection of the signal line on the base is at least in an orthographic projection of a region between the pixel units in the connection bridge region and the pixel units in the connection bridge region on the base. The stretchable display substrate according to claim 1.

3. The extending direction of the first cutout portion is substantially the same as an edge of the hole region. The stretchable display substrate according to claim 1.

4. The first cutout portion does not penetrate the hole region. The stretchable display substrate according to claim 1.

5. The distance between the side wall of the first cutout portion close to the hole region and the side wall of the hole region close to the first cutout portion is greater than or equal to 2 μm. The stretchable display substrate according to claim 4.

6. In the direction from the pixel island region to the hole region, the width of the first cutout portion is greater than or equal to 5 μm. The stretchable display substrate according to claim 4.

7. The first cutout portion penetrates the hole region. The stretchable display substrate according to claim 1.

8. The edge of the first cutout portion close to the hole region overlaps the edge of the hole region close to the first cutout portion. The stretchable display substrate according to claim 7.

9. The pixel unit includes at least one sub-pixel. The sub-pixel includes a pixel circuit and a light-emitting element. The light-emitting element includes a stacked anode, an organic light-emitting layer, and a cathode. In the connection bridge region, a partition structure is arranged at a position close to the pixel unit. The organic light-emitting layer is cut by the partition structure, and the cathode is cut by the partition structure. The distance between the side wall of the first cutout portion close to the pixel unit and the partition structure is greater than or equal to 2 μm. The stretchable display substrate according to claim 4, claim 7, or claim 8.

10. The first cutout portion is a closed structure arranged around the hole region. The stretchable display substrate according to claim 9.

11. The partition structure is a closed structure arranged around the first cutout portion. The stretchable display substrate according to claim 10.

12. A part of the hole region includes a first sub-hole region and a second sub-hole region extending in a first direction and arranged in a second direction, and a third sub-hole region extending in the second direction. Another part of the hole region includes a fourth sub-hole region and a fifth sub-hole region extending in the second direction and arranged in the first direction, and a sixth sub-hole region extending in the first direction. The first direction is substantially perpendicular to the second direction. The third sub-hole region is substantially connected to the central regions of the first sub-hole region and the second sub-hole region. The sixth sub-hole region is substantially connected to the central regions of the fourth sub-hole region and the fifth sub-hole region. The first cut-out portion is disposed at at least one position among the side of the connection position between the first sub-hole region and the third sub-hole region, the side of the connection position between the second sub-hole region and the third sub-hole region, the end side of the first sub-hole region and the end side of the second sub-hole region, the side of the connection position between the fourth sub-hole region and the sixth sub-hole region, the side of the connection position between the fifth sub-hole region and the sixth sub-hole region, and the end side of the fourth sub-hole region and the end side of the fifth sub-hole region. The stretchable display substrate according to claim 10.

13. The side of the connection position between the first sub-hole region and the third sub-hole region, the side of the connection position between the second sub-hole region and the third sub-hole region, the end side of the first sub-hole region and the end side of the second sub-hole region, the side of the connection position between the fourth sub-hole region and the sixth sub-hole region, the side of the connection position between the fifth sub-hole region and the sixth sub-hole region, and the end side of the fourth sub-hole region and the end side of the fifth sub-hole region all include the first cut-out portion. The stretchable display substrate according to claim 12.

14. The pixel island region includes at least one of the pixel units, and the resolution of the pixels in the pixel island region is substantially the same as the resolution of the pixels in the connection bridge region. The stretchable display substrate according to claim 1.

15. The plurality of inorganic insulating layers include a first barrier layer, a buffer layer, a first gate insulating layer, a second gate insulating layer, an interlayer dielectric layer, a first passivation layer, a second passivation layer, and an inorganic encapsulation layer laminated on the base. At least one of the first barrier layer, the buffer layer, the first gate insulating layer, the second gate insulating layer, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer includes the first cutout portion. The stretchable display substrate according to claim 1.

16. The interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer include the first cutout portion, and each of the first cutout portions substantially overlaps. The stretchable display substrate according to claim 15.

17. The inorganic encapsulation layer includes a first inorganic layer and a second inorganic layer laminated on the second passivation layer. The stretchable display substrate further includes a first planar layer and a second planar layer disposed between the interlayer dielectric layer and the first passivation layer, a pixel definition layer disposed between the second passivation layer and the inorganic encapsulation layer, and an organic layer disposed between the first inorganic layer and the second inorganic layer. At least one of the first planar layer, the second planar layer, the pixel definition layer, and the organic layer has a second cutout portion close to the hole region, and the first cutout portion and the second cutout portion substantially overlap. The stretchable display substrate according to claim 15.

18. The base includes a flexible layer. Alternatively, the base includes a first flexible layer, a second barrier layer, and a second flexible layer laminated on a side of the first barrier layer away from the buffer layer, according to claim 15, the stretchable display substrate.

19. A display device including the stretchable display substrate according to any one of claims 1 to 18.

20. A method for manufacturing the stretchable display substrate according to any one of claims 1 to 18, providing a base; forming a pixel unit and a signal line electrically connected to the pixel unit on the base; forming a plurality of stacked inorganic insulating layers on the base, at least one of the plurality of inorganic insulating layers has a first cutout portion close to the hole region, and an orthographic projection of the first cutout portion on the base does not overlap with orthographic projections of the signal line and the pixel unit on the base, the manufacturing method.

21. The fact that at least one of the plurality of inorganic insulating layers has a first cutout portion close to the hole region means that depositing a first barrier layer, a buffer layer, a first gate insulating layer, a second gate insulating layer, an interlayer dielectric layer, a first passivation layer, a second passivation layer, and an inorganic encapsulation layer on the base; forming the first cutout portion in at least one of the first barrier layer, the buffer layer, the first gate insulating layer, the second gate insulating layer, the interlayer dielectric layer, the first passivation layer, the second passivation layer, and the inorganic encapsulation layer using a patterning process, according to claim 20, the manufacturing method.

Images