Gas-liquid mixing device, and related systems and methods

Abstract

The fluid mixing system can include a fluid inlet, a gas inlet, a common outlet, and a mixing chamber. The mixing chamber can be defined between a stator and a magnetically levitated rotor. The rotor can be configured to rotate relative to the stator. The mixing chamber can include an uneven surface. The mixing chamber can operatively couple the fluid inlet and the gas inlet to the common outlet.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to mixing devices. In particular, embodiments of the present disclosure relate to mixing devices configured to mix a gas into a liquid, as well as related systems and methods.

Background Art

[0002] Mixing a gas into a liquid is a common process for creating many different fluid combinations for processes such as semiconductor manufacturing processes, cleaning processes, etc. For example, oxygenated water and ozonated water are fluids commonly used in cleaning processes such as for cleaning semiconductor materials before, during, and after semiconductor manufacturing processes. A typical process for mixing a gas into a liquid is a passive process in which a liquid (e.g., water) is held in a tank and a gas (e.g., oxygen or ozone) is released at the bottom of the tank. Next, due to the contact between the gas and the liquid, as the gas dissipates or dissolves into the liquid, the gas rises through the tank as bubbles that slowly dissipate into the liquid.

Summary of the Invention

Means for Solving the Problems

[0003] Some embodiments of the present disclosure include a fluid mixing system. The fluid mixing system can include a gas inlet, a fluid mixing device, and a pump. The fluid mixing device can include a fluid inlet, a common outlet, and a mixing chamber. The mixing chamber may be defined between a stator and a magnetically levitated rotor. The rotor may be configured to rotate relative to the stator. The mixing chamber can include an uneven surface. The mixing chamber can operatively couple the fluid inlet and the gas inlet to the common outlet. The pump can be separated from the fluid mixing device and coupled to the fluid mixing device through a pipe.

[0004] Another embodiment of the present disclosure may include a mixing device. The mixing device may include a stator and a rotor. The stator may include at least two annular permanent magnets having a first polarity. The stator may further include an inner surface. The rotor may be configured to rotate relative to the stator. The rotor may include at least two complementary annular permanent magnets having a second polarity. The at least two complementary annular permanent magnets may be arranged coaxially with the at least two annular permanent magnets. The rotor may further include an uneven surface. The mixing device may further include a mixing cavity defined between the inner surface of the stator and the uneven surface of the rotor.

[0005] Other embodiments of the present disclosure may include a method of mixing a liquid with a gas. The method may include flowing the liquid into a chamber defined between the inner surface of the stator and the uneven surface of the rotor. The rotor may be configured to float within the stator in contact with a magnetic bearing. The method may further include flowing the gas into a chamber defined between the inner surface of the stator and the uneven surface of the rotor. The method may also include rotating the rotor relative to the stator. The method may further include mixing the liquid and the gas at the uneven surface of the rotor as the rotor rotates.

Brief Description of the Drawings

[0006] This specification particularly points out and clearly claims the embodiments of the present disclosure. However, the effects of the embodiments of the present disclosure can be more easily confirmed from the following description of the embodiments of the present disclosure when read in conjunction with the accompanying drawings.

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DETAILED DESCRIPTION OF THE INVENTION

[0007] The examples presented herein are not meant to be actual diagrams of any particular mixing device, mixing system, or components thereof, but are merely idealized representations used to illustrate exemplary embodiments. The drawings are not necessarily to scale.

[0008] As used herein, the term "substantially" with respect to a given parameter means and includes to the extent that one of ordinary skill in the art would understand that the given parameter, characteristic, or condition is met with a degree of variation, such as within acceptable manufacturing tolerances. For example, a parameter that is substantially met may be met at least about 90%, at least about 95%, at least about 99%, or at least about 100%.

[0009] As used herein, relative terms such as "first", "second", "upper", "lower", etc. are generally used for clarity and convenience in understanding the disclosure and the accompanying drawings and do not imply or depend on any particular selection, orientation, or order, except where the context clearly indicates otherwise.

[0010] As used herein, the term "and / or" means and includes any and all combinations of one or more of the associated listed items.

[0011] As used herein, the terms "vertical" and "lateral" refer to the orientations as shown in the figures.

[0012] As used herein, the term "magnetic material" means and includes ferromagnetic materials, ferrimagnetic materials, antiferromagnetic materials, and paramagnetic materials.

[0013] Dispersing or mixing gaseous fluids such as air, oxygen, ozone, etc. into liquids such as water, solvents, etc. is used to generate cleaning fluids for processes such as cleaning steps in a manufacturing process. For example, ozone-treated water can be utilized in several different cleaning steps during the manufacturing process of semiconductor devices, such as wafer cleaning, photoresist removal, cleaning after dicing, and particle removal before lamination. Increasing the proportion of the gaseous fluid mixed in the liquid can improve the cleaning characteristics of the resulting mixture.

[0014] An ozone reactor is a common tool used to mix ozone into a liquid. The ozone reactor includes a chamber having a liquid, and provides ozone into the liquid at the bottom of the chamber to allow the ozone gas bubbles to disperse into the liquid as they move through the liquid. Ozone may not be completely dispersed in the liquid, resulting in large bubbles of ozone that are not dispersed in the fluid. By mixing ozone or other gases with turbulent flow and / or other mixing components, the amount of gas dispersed in the liquid can be increased. Increasing the amount of gas dispersed in the fluid can improve the cleaning characteristics of the associated fluid. Improving the cleaning characteristics of the fluid can improve the efficiency of the associated cleaning process and / or reduce the amount of cleaning fluid used in the process.

[0015] FIG. 1 shows an embodiment of a mixing device 100 according to the present disclosure. The mixing device 100 can include a main body 102 and a flow housing 104. The main body 102 can include a motor (e.g., a DC motor, an AC motor, etc.), drive components for the mixing device 100, and / or a mixing chamber. The main body 102 can include a port 106. The port 106 allows power and / or electrical signals (e.g., electricity) to be transmitted from an external power source and / or a controller / drive device to the motor within the main body 102. The main body 102 can include a mounting structure 108.

[0016] The mounting structure 108 can be used to fix the mixing device 100 to a stationary object (e.g., wall, floor, mounting pad, structure, frame, etc.). In some embodiments, the mounting structure 108 may include a flange 110 through which at least one hole 112 (e.g., slot, opening, etc.) extends. The hole 112 may be configured to receive mounting hardware such as bolts, studs, screws, straps (e.g., metal straps, polymer straps, cloth straps, nylon straps, band straps, clamp straps, etc.), cables, brackets, hooks, etc. In some embodiments, the mounting structure 108 may include integral mounting hardware (e.g., studs, clamps, threaded inserts, etc.).

[0017] The body 102 may also include one or more fins 114 (e.g., protrusions, plates, etc.) extending from the body 102. In some embodiments, the fins 114 may be configured to assist in the transfer of heat (e.g., cooling of the motor) from a motor or other component within the body 102. The fins 114 may be linear (e.g., substantially linear), extend radially outward from the body 102, and may be oriented parallel to the long axis of the body 102 as shown in FIG. 1. In some embodiments, the fins 114 may be substantially circular (e.g., annular, etc.) extending circumferentially about a central axis L100 (e.g., a series of rings, spirals, helices, etc.).

[0018] The flow housing 104 can include a backplate 120. The backplate 120 can include one or more cooling ports 122. The cooling ports 122 can be configured to direct a fluid (e.g., air, water, etc.) flow to cover the fins 114. In some embodiments, the cooling ports 122 can be configured to direct a passive fluid flow. In some embodiments, an auxiliary device such as a fan or a pump can be coupled to the backplate 120 and configured to force a fluid flow to flow over the fins 114 through the cooling ports 122. For example, the auxiliary device can be configured to draw the fluid flow through the cooling ports 122 such that the fluid flows over the fins 114 and is then drawn through the cooling ports 122 by the auxiliary device. In some embodiments, the auxiliary device can be configured to force the fluid to flow through the cooling ports 122 and then over the fins 114.

[0019] The flow housing 104 can include a first fluid port 116 and a second fluid port 118. Fluid can enter the flow housing 104 through the first fluid port 116. The fluid entering through the first fluid port 116 can include a plurality of fluids such as a liquid (e.g., water) and a gas (e.g., air, ozone, etc.). The mixing device 100 can be configured to mix the plurality of fluids to form a substantially homogeneous mixture of the fluids before the fluid flows out of the second fluid port 118. In some embodiments, the body 102 or the flow housing 104 can include an additional inlet port configured to receive an additional fluid, and the additional fluid is mixed with the fluid received through the first fluid port 116 in a mixing chamber within the body 102. For example, the fluid received through the first fluid port 116 can be a single fluid such as a liquid, and the fluid received through the additional inlet port can be another fluid such as a gas, as will be described in more detail below with respect to FIGS. 10 and 11. The fluids can be combined and mixed into a substantially homogeneous mixture within the mixing chamber in the body 102 of the mixing device 100 before flowing out through the second fluid port 118.

[0020] Figure 2 shows a cross-sectional view of the mixing device 100. The main body 102 can surround the stator assembly 220 and the rotor assembly 230. The rotor assembly 230 may be disposed within the stator assembly 220, and the rotor assembly 230 and the stator assembly 220 may define a mixing chamber 202 between the rotor assembly 230 and the stator assembly 220. As will be described in more detail below, the rotor assembly 230 can be configured to rotate relative to the stator assembly 220 to generate a mixing action within the mixing chamber 202 between the stator assembly 220 and the rotor assembly 230.

[0021] The stator assembly 220 can include one or more permanent magnets 222 and one or more drive magnets 224. The drive magnet 224 can be, for example, an electromagnet, a winding, a commutator, a coil, an armature, etc., and is configured to generate a magnetic field around the rotor assembly 230. The one or more permanent magnets 222 can be substantially annular (e.g., ring-shaped, circular, etc.). The permanent magnet 222 may abut against a spacer 226 (e.g., a shim, an annular ring, etc.). The stator assembly 220 can further include a pull magnet 228 and a lift magnet 229. The pull magnet 228 and the lift magnet 229 can be configured to control or maintain the position of the rotor assembly 230 relative to the stator. In some embodiments, at least one of the pull magnet 228 and the lift magnet 229 may be an electromagnet. In some embodiments, at least one of the pull magnet 228 and the lift magnet 229 may be a permanent magnet.

[0022] The rotor assembly 230 can include one or more complementary permanent magnets 232, an armature 234, a spacer 236, and a complementary pull magnet 238. The complementary permanent magnets 232 and the armature 234 may be substantially annular in shape. The armature 234 is, for example, a coil, winding, conductor, permanent magnet, etc., and is configured to generate a rotational force on the rotor assembly 230 from the magnetic field generated by the drive magnet 224. The complementary permanent magnets 232 are arranged axially and substantially linearly along the major axis L100 with the permanent magnets 222 of the stator assembly 220. The complementary pull magnets 238 may not be arranged axially and substantially linearly with the pull magnets 228 of the stator assembly 220.

[0023] In some embodiments, the magnetic fields generated by the permanent magnets 222 and the complementary permanent magnets 232 can form a passive bearing (e.g., a magnetic bearing, a non-contact bearing, etc.). For example, the permanent magnets 222 and the complementary permanent magnets 232 may be configured to induce a repulsive force between the permanent magnet 222 and the complementary permanent magnet 232. The repulsive force may float the rotor assembly 230 within the stator assembly 220, such that the rotor assembly 230 does not physically contact the stator assembly 220 at any point. Such non-contact interaction can reduce frictional losses within the motor. The non-contact interaction further enables the space formed between the rotor assembly 230 and the stator assembly 220 to form the mixing chamber 202, allowing fluid to flow through the mixing chamber 202 in the space between the rotor assembly 230 and the stator assembly 220.

[0024] In some embodiments, at least one of the permanent magnet 222 and the complementary permanent magnet 232 can be formed from a relatively high-strength magnetic material. The high-strength magnetic material can have a maximum energy product of at least about 5 MGOe, such as at least about 42 MGOe, at least about 52 MGOe. In some embodiments, at least one of the permanent magnet 222 and the complementary permanent magnet 232 can be formed from a magnetic material such as alnico (e.g., an alloy of aluminum, nickel, and cobalt), neodymium alloy, or samarium cobalt alloy.

[0025] In some embodiments, the pull magnet 228 and the complementary pull magnet 238 can be configured to control the axial position of the rotor assembly 230 relative to the stator assembly 220. For example, the pull magnet 228 can be configured to induce an axial force on the complementary pull magnet 238, as described in more detail below with respect to FIG. 4. The pull magnet 228 and the complementary pull magnet 238 can be controlled by an electronic controller. For example, the controller 260 may be housed within the stator assembly 220. Examples of controllers and control systems for the pull magnet 228 and the complementary pull magnet 238 are described in U.S. Patent Application No. 16 / 779,944, filed on February 3, 2020, entitled "Pump Having Magnets for Journalling and Magnetically Axially Positioning a Rotor, and Related Methods". This disclosure is hereby incorporated by reference in its entirety. In some embodiments, the electronic controller may be disposed externally (e.g., away from the stator assembly 220).

[0026] The rotor assembly 230 and / or the stator assembly 220 can include an uneven surface 240. The uneven surface 240 can be configured to generate turbulence in the fluid within the mixing chamber 202 when the rotor assembly 230 rotates relative to the stator assembly 220. As used herein, an uneven surface is a rough surface (e.g., not flat) that includes a plurality of protrusions and / or depressions such as ridges, bumps, divots, dimples, channels, etc., and is formed on a surface that obscures a relatively flat or smooth surface. As will be described in more detail below, the uneven surface 240 can include a pattern of recesses (e.g., channels or divots) or protrusions (e.g., bumps or ridges). When the rotor assembly 230 rotates relative to the stator assembly 220, the surface shape of the uneven surface 240 interacts with the fluid within the mixing chamber 202 to generate vortices and turbulence and mix the fluid present within the mixing chamber 202.

[0027] In some embodiments, both the outer surface of the rotor assembly 230 and the inner surface of the stator assembly 220 may include the uneven surface 240. In some embodiments, the surface shape of the uneven surface 240 on the outer surface of the rotor assembly 230 may be different from the surface shape of the inner surface of the stator assembly 220. For example, the outer surface of the rotor assembly 230 may include a pattern of divots such as those similar to the surface of a golf ball, and the inner surface of the stator assembly 220 may include a series of linear ridges and channels. In some embodiments, only one of the outer surface of the rotor assembly 230 and the inner surface of the stator assembly 220 may include the uneven surface 240.

[0028] In some embodiments, additional components 250, such as mixing blades, impellers, fins, etc., may be connected (e.g., attached, coupled, etc.) to the rotor assembly 230, such that any rotation of the rotor assembly 230 is imparted to the additional components 250 and / or any rotation of the additional components 250 is imparted to the rotor assembly 230. Examples of additional components 250 and connections thereto are described in U.S. Patent Application No. 16 / 779,944, filed on February 3, 2020, entitled "Pump with Magnets for a Journalling and Magnetically Axially Positioned Rotor, and Related Methods", the disclosure of which is incorporated herein by reference in its entirety.

[0029] The mixing device 100 may be used with an external pump device configured to generate a flow through the mixing device 100. The mixing device 100 can include an impeller or other pumping components configured to assist the mixing process and may assist the fluid flow within the mixing device 100. The mixing device need not be the primary source of pumping force to prevent pockets of gas, such as air bubbles remaining in the fluid after the fluid has passed through the mixing chamber 202, from causing an airlock or vapor lock condition with the impeller or pumping components. An airlock condition can substantially prevent more fluid from entering the region having the impeller or other pumping components and can lead to damage due to excessive heat and / or cavitation.

[0030] In some embodiments, when the rotor assembly 230 rotates relative to the stator assembly 220, energy can be transferred between the armature 234 and the drive magnet 224. For example, electricity is supplied to the drive magnet 224, and the drive magnet 224 generates a rotational force on the armature 234. The rotational force can rotate the rotor assembly 230 relative to the stator. In another embodiment, the rotation of the additional components 250 can rotate the rotor assembly 230 relative to the stator. When the armature 234 rotates relative to the drive magnet 224, the armature 234 can induce a current in the drive magnet 224 that generates electrical energy.

[0031] Figure 3 shows an enlarged view of the permanent magnet 222 and complementary permanent magnet 232 of the embodiment of the mixing device 100 of FIG. 2. The rotor assembly 230 can include a plurality of structural sections configured to hold and separate different components of the rotor assembly 230. For example, the rotor assembly 230 can include a front support 302 having a front holding structure 304 configured to hold the complementary permanent magnet 232 on the first axial end 306. The first complementary permanent magnet 232a may be disposed relative to the front holding structure 304. The spacer 236 can be disposed between the first complementary permanent magnet 232a and the second complementary permanent magnet 232b. The second complementary permanent magnet 232b may be fixed in place by the stator support 308. The stator support 308 can include a front center spacer 310 configured to sandwich the first and second complementary permanent magnets 232a, 232b and the spacer 236 between the front holding structure 304 and the front center spacer 310.

[0032] In some embodiments, the space between the front holding structure 304 and the front center spacer 310 may be adjustable. For example, the stator support 308 may be screwed onto the front support 302. In some embodiments, the stator support 308 may be a collar having threads on the inner surface of the stator support 308. The stator support 308 is configured to interface with threads on the outer surface of the front support 302. In some embodiments, the interface between the front support 302 and the stator support 308 is relatively smooth such that the stator support 308 can slide axially along the front support 302. The stator support 308 and the front support 302 can use another hardware (e.g., bolts, screws, studs, spring clamps, screw clamps, etc.) to clamp the first and second complementary permanent magnets 232a, 232b, and the spacer 236 between the front holding structure 304 and the front center spacer 310.

[0033] The permanent magnets 222 within the stator assembly 220 can include a similar retaining structure. For example, the stator assembly 220 includes a front retaining component 312 and a second front retaining component 318. The front retaining component 312 is configured to contact the front end 316 of the first permanent magnet 222a. The second front retaining component 318 is configured to sandwich the second permanent magnet 222b and the first permanent magnet 222a, similar to the spacer 226, between the front retaining component 312 and the second retaining component 318. In some embodiments, the front retaining component 312 and the second front retaining component 318 may be clamped to each other using bolt connections. In other embodiments, the front retaining component 312 and the second front retaining component 318 may be clamped together with a threaded connection or other connections similar to those outlined above with respect to the armature support 308 and the front support 302. In some embodiments, the front retaining component 312 and the second front retaining component 318 may be part of the stator assembly 220. In some embodiments, the front retaining component 312 and the second front retaining component 318 may be part of the body 102. In some embodiments, the front retaining component 312 and the second front retaining component 318 may be a combination of components of the body 102 and components of the stator assembly 220.

[0034] In some embodiments, the position sensor 320 is disposed within the stator assembly 220 arranged substantially linearly with the position indicator 322. In some embodiments, the position indicator 322 may be a permanent magnet. In some embodiments, the position indicator 322 may be another component configured to interact with the position sensor 320, such as a heating component, a reflective component, etc. The position sensor 320 may be configured to generate a signal corresponding to the axial position of the rotor assembly 230 relative to the stator assembly 220. In some embodiments, the sensor 320 may be a magnetic proximity sensor, a Hall effect sensor, an ultrasonic sensor, an inductive sensor, a laser sensor, an optical sensor, a capacitance sensor, an infrared sensor, etc. In some embodiments, the controller 260 can monitor the signal from the position sensor 320. The controller 260 can control the axial position of the rotor assembly 230 and adjust the axial force acting on the rotor assembly 230 by adjusting the power to the pull magnet 228, as will be described in detail below.

[0035] The position sensor 320 may be coupled to the front holding component 312 via the connection portion 330. In some embodiments, the connection portion 330 may be a bolt connection portion as shown in FIG. 3. In some embodiments, the connection portion 330 may be an adhesive connection portion such as an adhesive or an epoxy. In some embodiments, the connection portion 330 may be a clamp connection portion such as a spring clamp or a bolt clamp. The controller 260 can compare the reading from the position sensor 320 with a defined threshold value. In some embodiments, the threshold value is defined at a position such that an alarm can stop the operation of the mixing device 100 before damage occurs. The controller 260 may be configured to control the axial position of the rotor assembly 230 within about 0.5 mm, or even within about 0.25 mm.

[0036] FIG. 4 shows an enlarged view of the pull magnet 228 and complementary pull magnet 238 of the embodiment of the mixing device 100 shown in FIG. 2. The magnetic fields generated by the pull magnet 228 and the complementary pull magnet 238 generate an axial force acting on the rotor assembly 230. The pull magnet 228 may be an electromagnet so that the axial force can be adjusted to maintain the rotor assembly 230 at a desired axial position. For example, when the rotor assembly 230 and the complementary pull magnet 238 move axially away from the rear housing surface 242, the pull magnet 228 can generate an increased axial force toward the rear housing surface 242. Alternatively, if the rotor is too close to or in contact with the rear housing surface 242, the pull magnet 228 can reduce the axial force or induce a repulsive force that pushes the complementary pull magnet 238 and the rotor assembly 230 away from the rear housing surface 242. In some embodiments, the rear housing surface 242 may be a hard stop configured to maintain the axial position of the rotor assembly 230 within tolerances so that damage to the components of the rotor assembly 230 is substantially prevented.

[0037] In some embodiments (e.g., when the mixing device 100 is installed with the axis of the stator in the vertical direction), the lift magnet 229 may not be part of the assembly. In other embodiments (e.g., when the mixing device 100 is installed with the axis of the stator in the horizontal plane), the lift magnet 229 may be a permanent magnet configured to repel the complementary pull magnet 238. The lift magnet 229 may be disposed at the end of the stator assembly 220 near the pull magnet 238. The lift magnet 229 can introduce a load on the rotor assembly 230. The load can increase as the complementary pull magnet 238 descends radially in the direction of gravity and decrease as the complementary pull magnet 238 rises radially in the direction of gravity.

[0038] FIG. 5 shows an exploded view of the mixing device 100. The stator assembly 220 and the rotor assembly 230 are substantially coaxial about the axis L100. The rotor assembly 230 is configured to be at least partially disposed within the hole 502 defined by the stator assembly 220. The rotor assembly 230 is configured to rotate within the hole 502 of the stator assembly 220. As described above, the outer surface 508 of the rotor assembly 230 can include the uneven surface 240. The uneven surface 240 can include a pattern of uneven portions 512 such as linear portions (e.g., linear channels or linear ridges), dimples, divots, bumps, etc., disposed around the outer surface 508 of the rotor assembly 230. The inner surface 510 of the stator assembly 220 can also include the uneven surface 240. The uneven surface 240 of the stator assembly 220 can also include a pattern of uneven portions 514 such as linear ridges and / or channels, dimples, divots, bumps, etc., disposed around the inner surface 510 of the stator assembly 220.

[0039] The rotor assembly 230 includes an inlet 506 near the first end 504 of the rotor assembly 230. The inlet 506 allows fluid to enter the rotor assembly 230 through the first end 504 of the rotor assembly 230. The fluid passes through a path through the central region of the rotor assembly 230 and then through a mixing chamber 202 formed within the hole 502 of the stator assembly 220 between the outer surface 508 of the rotor assembly 230 and the inner surface 510 of the stator assembly 220. In some embodiments, the fluid entering the inlet 506 can include both fluids to be mixed within the mixing chamber 202. In other embodiments, the mixing device 100 can include a second inlet configured to receive a second fluid.

[0040] Figure 6 shows an exploded view of the rotor assembly 230. The rotor assembly 230 is housed within a shell 602. The shell 602 can also provide an outer surface 508 of the rotor assembly 230. Over the outer surface 508 of the rotor assembly 230, fluid can flow without directly contacting the internal components of the rotor assembly 230. In some embodiments, the shell 602 is formed from a non-ferrous material such as a polymer (e.g., polytetrafluoroethylene (PTFE), polyvinyl chloride (PVC), etc.), a non-ferrous metal (e.g., aluminum, copper, stainless steel, etc.). In some embodiments, the shell 602 may be formed from a corrosion-resistant material (e.g., a polymer, aluminum, etc.) or may have a corrosion-resistant coating (e.g., a rubber coating, a polymer coating, etc.).

[0041] As described above, the outer surface 508 of the shell 602 may be an uneven surface 240 that includes a pattern of uneven portions 512 such as ridges, depressions, etc. In some embodiments, the outer surface 508 of the shell 602 may be a substantially smooth surface. For example, the mixing chamber 202 can induce turbulence in the fluid within the mixing chamber 202 depending on the uneven surface 240 on the inner surface 510 of the stator assembly 220 and / or the frictional force between the moving outer surface 508 of the shell 602 and the fluid.

[0042] The rotor assembly 230 may be assembled concentrically on a central shaft 606. In some embodiments, the central shaft 606 may be hollow. For example, the central shaft 606 may define an opening, passage, or path through the longitudinal direction of the shaft 606. Fluid can flow through the central shaft. For example, fluid can circulate around the outer surface 508 of the shell 602 and then through the central shaft 606, or fluid can first pass through the central shaft 606 and then out around the outer surface 508 of the shell 602.

[0043] The central shaft 606 may be connected (e.g., attached, coupled, etc.) to the front connection component 608. In some embodiments, the central shaft 606 may be attached to the front connection component 608 with hardware (e.g., screws, bolts, studs, rivets, pins, etc.). In some embodiments, the central shaft 606 may be attached to the front connection component 608 with an adhesive (e.g., glue, epoxy, etc.), welding, or soldering. In some embodiments, the central shaft 606 may be attached to the front connection component 608 by interference fitting (e.g., press fitting, friction fitting, etc.). In some embodiments, the central shaft 606 may be formed as part of the front connection component 608. For example, the central shaft 606 may be extruded or drawn from the front connection component 608, or the front connection component 608 and the central shaft 606 may be formed in a process such as forging or molding. In some embodiments, the central shaft 606 may be attached to the front connection component 608 via a combination of several attachment means. In some embodiments, the shell 602 may be configured to connect to the front connection component 608 by welding, adhesion, screw connection, mechanical fasteners, etc.

[0044] Following the front connection component 608, the rotor assembly 230 can include a pattern of complementary permanent magnets 232 and spacers 236. The complementary permanent magnets 232 can be configured to interact with corresponding permanent magnets 222 within the stator assembly 220 (FIGS. 2 and 9) to form a magnetic bearing. The spacers 236 are configured to position the complementary permanent magnets 232 in the correct axial position and maintain the complementary permanent magnets 232 in a predetermined position when the rotor assembly 230 is assembled. The spacers 236 may have different thicknesses at different positions to define the correct axial position of the complementary permanent magnets 232. The complementary permanent magnets 232 and spacers 236 may be arranged to form a front magnetic bearing assembly 620 and a rear magnetic bearing assembly 622. Each of the front magnetic bearing assembly 620 and the rear magnetic bearing assembly 622 can include at least one complementary permanent magnet 232 and at least one spacer 236. In some embodiments, the front magnetic bearing assembly 620 can include at least two complementary permanent magnets 232 separated by at least one spacer 236. Similarly, the rear magnetic bearing assembly 622 can include at least two complementary permanent magnets 232 separated by at least one spacer 236. In another embodiment, at least one of the front magnetic bearing assembly 620 and the rear magnetic bearing assembly 622 can include at least three complementary permanent magnets 232 separated by at least two spacers 236. In some embodiments, the front magnetic bearing assembly 620 and / or the rear magnetic bearing assembly 622 can include additional complementary permanent magnets 232, such as four, five, six, or more complementary permanent magnets 232. Similarly, the front magnetic bearing assembly 620 and / or the rear magnetic bearing assembly 622 can include additional spacers 236, such as three, four, five, six, or more spacers 236.

[0045] In some embodiments, adjacent complementary permanent magnets 232 induce a repulsive force between adjacent complementary permanent magnets 232 within the rotor assembly 230, causing the complementary permanent magnets 232 to be pressed against the front and / or rear center spacers 310, 618 and / or the front and / or rear retaining structures 304, 626. One or more of the adjacent complementary permanent magnets 232 in the front magnetic bearing assembly 620 and the rear magnetic bearing assembly 622 may be oriented with opposite polarities. In some embodiments, adjacent complementary permanent magnets 232 induce an attractive force between adjacent complementary permanent magnets 232 in the rotor assembly 230, causing the complementary permanent magnets 232 to be pulled against the spacer 236 between the adjacent complementary permanent magnets 232. One or more of the adjacent complementary permanent magnets 232 in the front magnetic bearing assembly 620 and the rear magnetic bearing assembly 622 may be oriented with the same polarity.

[0046] The position indicator 322 may be disposed at one end of either the front magnetic bearing assembly 620 or the rear magnetic bearing assembly 622. For example, the position indicator 322 may be disposed in front of the front magnetic bearing assembly 620, between the front magnetic bearing assembly 620 and the front connection component 608. The position indicator 322 may be configured to interact with the position sensor 320 within the stator assembly 220 (FIG. 3).

[0047] The armature 234 may be disposed between the two center spacers 310, 618. The front center spacer 310 may be disposed between the armature 234 and the front magnetic bearing assembly 620. The rear center spacer 618 may be disposed between the armature 234 and the rear magnetic bearing assembly 622. The assembly of the front and rear magnetic bearing assemblies 620, 622, the center spacers 310, 618, and the armature 234 may be fixed between the front retaining structure 304 and the rear retaining structure 626.

[0048] The armature 234 can be configured to convert the magnetic impulses provided by the stator assembly 220 (FIG. 5) into rotation. The armature 234 may be fixed to the rotor assembly 230 such that rotation of the armature 234 can also rotate the entire rotor assembly 230. In some embodiments, the armature 234 may be fixed to the central shaft 606 such that rotation of the armature 234 is directly transmitted to the central shaft 606 and the central shaft transmits the rotation to the front connection component 608 and other rotating components. In some embodiments, the armature 234 is fixed to at least one of the front central spacer 310 and the rear central spacer 618. And at least one of the front central spacer 310 and the rear central spacer 618 is connected to the corresponding front and / or rear magnetic bearing assemblies 620, 622. The front and / or rear magnetic bearing assemblies 620, 622 may be connected to their respective front or rear holding structures 304, 626. The front holding structure 304 may be connected to at least one of the central shaft 606 and / or the front connection component 608, and the rear holding structure 626 may be connected to the central shaft 606. In such embodiments, the armature 234 can transmit rotation to the central shaft 606 and / or the front connection component 608 via a series of interconnected components.

[0049] The rotor assembly 230 can include complementary pull magnets 238 disposed rearward (e.g., rear, subsequent, etc.) of the rear holding structure 626. The complementary pull magnets 238 are configured to interact with at least one corresponding pull magnet 228 (FIGS. 2 and 9) within the stator assembly 220 to maintain and / or correct the axial position of the rotor assembly 230 within the stator assembly 220. In some embodiments, the complementary pull magnets 238 may be fixed to the central shaft 606. In some embodiments, the complementary pull magnets 238 may be fixed to the rear holding structure 626. In some embodiments, the complementary pull magnets 238 may be fixed to the rotor assembly 230 by the shell 602.

[0050] In some embodiments, the rotor assembly 230 may be configured to be easily disassembled and reassembled such that individual components such as the complementary permanent magnets 232, spacers 236, armature 234, complementary pull magnets 238, etc. can be removed and replaced as needed. For example, the individual components may be replaced when an individual component is worn, damaged, or otherwise defective. In some embodiments, the rotor assembly 230 may be configured to be replaced as a unit. For example, the rotor assembly 230 may be removed from the stator assembly 220 (FIG. 5), and a replacement rotor assembly 230 may be inserted in its place. In some embodiments, the rotor assembly 230 may be exchangeable and reconstructable as a unit.

[0051] FIG. 7 shows an exploded view of a portion of the rotor assembly 230 shown in FIG. 6. The front retaining structure 304 includes an external interface structure 702 such as threads (e.g., pipe threads, machine threads, etc.), grooves, ridges, tabs, etc., and is configured to interface with a complementary internal interface structure 704 within the front center spacer 310. The complementary internal interface structure 704 may be configured to receive the external interface structure 702 of the front retaining structure 304 to secure the front retaining structure 304 to the front center spacer 310.

[0052] The distance between the front holding structure 304 and the front center spacer 310 can be defined by the boundary between the external interface structure 702 and the complementary internal interface structure 704. In some embodiments, the distance between the front holding structure 304 and the front center spacer 310 may be constant (e.g., regardless of the size of the front magnetic bearing assembly 620, the distance remains the same each time the rotor assembly 230 is assembled). In some embodiments, the distance between the front holding structure 304 and the front center spacer 310 may be adjustable. For example, a threaded interface between the external interface structure 702 and the complementary internal interface structure 704 may allow the distance between the front holding structure 304 and the front center spacer 310 to be changed when the front holding structure 304 is threaded into or out of the front center spacer 310.

[0053] The rear holding structure 626 may also include an external interface component 706. In some embodiments, the rear center spacer 618 can include a complementary internal interface component 708 configured to interface with the external interface component 706. In some embodiments, the external interface component 706 may be configured to interface with the internal interface structure 704 of the front center spacer 310.

[0054] The distance between the rear holding structure 626 and the rear center spacer 618 can be defined by the interface between the external interface component 706 and the complementary internal interface component 708. In some embodiments, the distance between the rear holding structure 626 and the rear center spacer 618 may be constant (e.g., the distance remains the same each time the rotor assembly 230 is assembled, regardless of the size of the rear magnetic bearing assembly 622). In some embodiments, the distance between the rear holding structure 626 and the rear center spacer 618 may be adjustable, such as by a threaded interface.

[0055] The distance between the rear retaining structure 626 and the front center spacer 310 can be defined by the interface between the external interface component 706 and the complementary internal interface structure 704. In some embodiments, the distance between the rear retaining structure 626 and the front center spacer 310 may be constant (e.g., the distance remains the same each time the rotor assembly 230 is assembled, regardless of the size of the rear magnetic bearing assembly 622 combined with the rear center spacer 618 and the armature 234). In some embodiments, the distance between the rear retaining structure 626 and the front center spacer 310 may be adjustable by a threaded interface.

[0056] In some embodiments, the interface between the external interface component 706 of the rear retaining structure 626 and the complementary internal interface component 708 of the rear center spacer 618 may be a floating connection. For example, the rear center spacer 618 may be slidably connected to the rear retaining structure 626 such that the rear center spacer 618 can move axially relative to the rear retaining structure 626. The distance between the rear retaining structure 626 and the rear center spacer 618 can be defined by intermediate components between the front center spacer 310 and the rear retaining structure 626, such as the armature 234 and / or the rear magnetic bearing assembly 622.

[0057] FIG. 8 shows an exploded view of a stator assembly 800 and a status sleeve 802 (e.g., housing, isolator, wall, etc.). The status sleeve 802 is configured to be fixed to a pump housing and disposed between a rotor assembly 230 (FIG. 5) and the stator assembly 800. The rotor assembly 230 can be inserted into a hole 804 of the status sleeve 802. In some embodiments, the hole 804 may be sized to provide a clearance fit (e.g., slightly larger, somewhat larger, etc.) to the rotor assembly 230. For example, the hole 804 may be sized such that the inner diameter of the hole 804 is within a range of about 5 μm to about 5 mm larger than the outer diameter of the rotor assembly 230, such as between about 2 mm and about 4 mm. The difference between the inner diameter of the hole 804 and the outer diameter of the rotor assembly 230 may define a mixing chamber 202 (FIG. 2).

[0058] The status sleeve 802 can include a pattern of uneven portions 514 (e.g., dimples, ridges, vanes, grooves, fins, etc.) on an inner surface 510 of the status sleeve 802 (e.g., the surface facing the rotor assembly 230 (FIG. 5)). The pattern on the inner surface 510 can induce turbulence in and / or within the fluid flowing in a mixing chamber 202 defined between the rotor assembly 230 (FIG. 5) and the inner surface 510 of the status sleeve 802. The turbulence can increase the mixing between the fluids in the mixing chamber 202. For example, the turbulence can break up the individual fluids into smaller concentrations (e.g., concentrated groups), increasing the amount of contact between the two fluids and allowing the second fluid (e.g., gas) to be more completely dispersed in the first fluid (e.g., liquid).

[0059] The status sleeve 802 can be at least partially disposed within the stator assembly 220. The status sleeve 802 can be configured to isolate the stator assembly 220 from the rotor assembly 230 (FIG. 5). The status sleeve 802 can be configured to allow fluid to flow around the rotor assembly 230 while substantially preventing the fluid from contacting the stator assembly 220. In some embodiments, the status sleeve 802 can be configured to shield the stator assembly 220 from contact or debris in the event of a failure of the rotor assembly 230 (e.g., if the rotor assembly 230 is damaged, if the rotor assembly 230 is misaligned, etc.). The status sleeve 802 can be formed from a strong non-ferrous material such as a polymer (e.g., polytetrafluoroethylene (PTFE), polyvinyl chloride (PVC), etc.), a non-ferrous metal (e.g., aluminum, copper, etc.). In some embodiments, the status sleeve 802 may be formed from a corrosion-resistant material (e.g., a polymer, aluminum, etc.) or may have a corrosion-resistant coating (e.g., a rubber coating, a polymer coating, etc.).

[0060] The stator assembly 220 can be formed from an assembly of annular parts that define a hole 808 configured to receive the status sleeve 802. In some embodiments, the annular parts of the stator assembly 220 may be attached (e.g., fixed, mounted, etc.) to the status sleeve 802. In some embodiments, the annular parts of the stator assembly 220 may be attached to an external body, housing, or casing (e.g., the body 102 (FIG. 1)). In some embodiments, the annular parts of the stator assembly 220 may be attached to other annular parts of the stator assembly 220. In some embodiments, the annular parts of the stator assembly 220 may be attached to a combination of the above-described parts.

[0061] FIG. 9 shows an exploded view of the stator assembly 220 of FIG. 8. The annular components of the stator assembly 220 can include a front magnetic bearing assembly 920, a rear magnetic bearing assembly 922, drive magnets 224, a front retaining component 312, a rear retaining structure 926, and pull magnets 228. The front magnetic bearing assembly 920 and the rear magnetic bearing assembly 922 can each include at least one permanent annular magnet 222. In some embodiments, the annular components can be positioned using spacers similar to those described above with respect to the rotor assembly 230 shown in FIGS. 6 and 7. In some embodiments, the spacers may be integrated with a mounting structure such as the body 102 (FIG. 2).

[0062] Referring to FIGS. 6, 8, and 9, the front and rear magnetic bearing assemblies 920, 922 can be configured to interact with the front and rear magnetic bearing assemblies 620, 622 of the rotor assembly 230. For example, the front and rear magnetic bearing assemblies 920, 922 of the stator assembly 220 may be arranged (e.g., spaced apart) such that each permanent magnet 222 is aligned with a corresponding complementary permanent magnet 232 of the rotor assembly 230. In some embodiments, each permanent magnet 222 is arranged in an orientation such that the polarity of the permanent magnet 222 (e.g., N pole, S pole) is aligned with the polarity of the corresponding complementary permanent magnet 232 of the rotor assembly 230, and as a result, a repulsive force is induced by the magnetic field between the permanent magnet 222 and the corresponding complementary permanent magnet 232. In some embodiments, each permanent magnet 222 is arranged in an orientation such that the polarity of the permanent magnet 222 is opposite to the polarity of the corresponding complementary permanent magnet 232 of the rotor assembly 230, and as a result, an attractive force is induced by the magnetic field between the permanent magnet 222 and the corresponding complementary permanent magnet 232. In some embodiments, some of the permanent magnets 222 are arranged such that their polarities are linearly aligned with the corresponding complementary permanent magnets 232 of the rotor. On the other hand, other magnets are arranged such that their polarities are opposite to the corresponding complementary permanent magnets 232. For example, the permanent magnets 222 of the front magnetic bearing assembly 920 are arranged such that their polarities are linearly aligned with the corresponding complementary permanent magnets 232 of the front magnetic bearing assembly 620 of the rotor assembly 230, and the permanent magnets 222 of the rear magnetic bearing assembly 922 are arranged such that their polarities are opposite to the corresponding complementary permanent magnets 232 of the rear magnetic bearing assembly 622. In another example, each of the front and rear magnetic bearing assemblies 920, 922 can include at least one permanent magnet 222 whose polarity is linearly aligned with the corresponding complementary permanent magnet 232 of the rotor assembly 230 and at least one permanent magnet 222 whose polarity is arranged to be opposite to the corresponding complementary permanent magnet 232 of the rotor assembly 230.

[0063] In some embodiments, adjacent permanent magnets 222 in one or more of the front magnetic bearing assembly 920 and the rear magnetic bearing assembly 922 are arranged with the same polarity such that the adjacent permanent magnets 222 induce a repulsive force between adjacent permanent magnets 222 within the stator assembly 220. In some embodiments, adjacent permanent magnets 222 in one or more of the front magnetic bearing assembly 920 and the rear magnetic bearing assembly 922 may be arranged with opposite polarities such that the adjacent permanent magnets 222 induce an attractive force between adjacent permanent magnets 222 within the stator assembly 220.

[0064] The drive magnet assembly 224 can be arranged substantially linearly with respect to the armature 234 of the rotor assembly 230 and configured to interact with the armature 234. For example, a current may be supplied to the drive magnet 224. The drive magnet 224 can generate a magnetic field from a current that can induce a rotational force in the armature 234. The current may be generated from an external power source (e.g., a generator, a power line, a transformer, an inverter, a motor controller, a variable frequency drive, etc.). In some embodiments, an internal circuit (e.g., a control board, a motor controller, a speed controller, etc.) can change the current. In some embodiments, the pump can include a controller 260. The controller can divert a portion of the current to power and operate the controller 260 and / or other components of the pump. In some embodiments, other components such as complementary pull magnets 228 and the controller 260 can be powered separately from the pump via an independent power source or the like. The controller 260 can modify the current (e.g., change the amplitude, frequency, voltage, amperage, etc.) before sending the current to the drive magnet 224. In some embodiments, the controller 260 can monitor the current supplied to the drive magnet 224. In some embodiments, the controller 260 can control other components of the pump based on the current supplied to the drive magnet 224. For example, the controller 260 can monitor the amperage supplied to the drive magnet 224 and control the current supplied to the pull magnet 228 based on the amperage supplied to the drive magnet 224.

[0065] FIG. 10 shows a cross-sectional view of another embodiment of the mixing device 100. The mixing device 100 can include a primary inlet 1002 and a secondary inlet 1004. The primary inlet 1002 can be configured to receive a first fluid, and the secondary inlet 1004 can be configured to receive a second fluid. As shown in FIG. 10, the primary inlet 1002 may coincide with the first fluid port 116 of the mixing device 100.

[0066] The first fluid can enter the mixing device 100 through the primary inlet 1002. The primary inlet 1002 can be operably coupled to the inlet 506 of the rotor assembly 230. The first fluid can enter the passage 1010 through the inlet 506 and through the rotor assembly 230. The first fluid can pass through the central region of the rotor assembly 230 through the passage 1010 and exit the rotor assembly 230 at the rear portion of the rotor assembly 230.

[0067] The second fluid can enter the mixing device 100 through the secondary inlet 1004. The secondary inlet 1004 may be coupled to the mixing chamber 202 in a region of the mixing chamber 202 proximate to the rear portion of the rotor assembly 230. Thus, the second fluid can be introduced into the first fluid in the mixing chamber 202 proximate to the rear portion of the rotor assembly 230 when the first fluid exits the passage 1010 through the rotor assembly 230.

[0068] Next, the two fluids can flow through the mixing chamber 202 defined between the rotor assembly 230 and the stator assembly 220 to the collection chamber 1006 proximate to the front portion of the rotor assembly 230. The rotor assembly 230 can be configured to rotate relative to the stator assembly 220. As described above, the interaction between the armature 234 and the drive magnet 224 can rotate the rotor assembly 230 relative to the stator assembly 220.

[0069] Rotation of the rotor assembly 230 can generate turbulence in the two fluids as the two fluids pass through the mixing chamber 202 between the rotor assembly 230 and the stator assembly 220. For example, the outer surface 508 of the rotor assembly 230 can induce a rotational force in the fluid contacting the outer surface 508 of the rotor assembly 230 by friction. As described above, the outer surface 508 of the rotor assembly 230 can include irregularities 512 such as protrusions (e.g., ridges or bumps) or depressions (e.g., channels, divots, or dimples). The irregularities 512 can generate a greater amount of turbulence in the two fluids, such as by increasing the frictional force between the outer surface 508 of the rotor assembly 230 and the fluid and / or by creating trip points configured to transition laminar flow to turbulent flow.

[0070] The inner surface 510 of the stator assembly 220 can also help induce turbulence in the fluid within the mixing chamber 202. For example, since the stator assembly 220 remains substantially stationary relative to the rotor assembly 230, the inner surface 510 of the stator assembly 220 can generate a force in the fluid proximate to the inner surface 510 in a direction opposite to the direction of rotation of the rotor assembly 230. As described above, the inner surface 510 of the stator assembly 220 can include irregularities 514. The irregularities 514 can generate a greater force in the fluid, such as by increasing the friction between the fluid and the inner surface 510 of the stator assembly 220 and / or by creating trip points configured to transition laminar flow to turbulent flow.

[0071] The rotation of the rotor assembly 230 can generate turbulence throughout the mixing chamber 202 as the two fluids pass from the rear portion of the rotor assembly 230 into the collection chamber 1006. The turbulence can accelerate the mixing of the two fluids within the mixing chamber 202 such that, as the two fluids exit the mixing chamber 202 and enter the collection chamber 1006, the two fluids can form a substantially homogeneous fluid. The accelerated mixing of the two fluids within the mixing chamber 202 can enable a greater amount of gas to be dispersed into the liquid while maintaining the resulting fluid as a substantially homogeneous fluid.

[0072] Next, the substantially homogeneous fluid can flow out of the collection chamber 1006 through the outlet 1008. As shown in FIG. 10, the outlet 1008 may coincide with the second fluid port 118 of the mixing device 100. The flow of fluid into the mixing device 100 can move the homogeneous fluid within the collection chamber 1006 and cause the homogeneous fluid to flow out of the mixing device 100 through the outlet 1008. In some embodiments, one or more of the fluids entering the mixing device 100 may be pressurized, such as by a pump or compressor. The pressurized fluid can cause the homogeneous fluid within the collection chamber 1006 to exit the collection chamber 1006 and enable a higher pressure fluid to flow into the collection chamber 1006. In some embodiments, the outlet 1008 can be coupled to a device configured to generate suction, such as a vacuum or the inlet of a pump. The device can draw the substantially homogeneous fluid out of the collection chamber 1006 through the outlet 1008 such that the collection chamber 1006 can continue to receive the substantially homogeneous fluid from the mixing chamber 202.

[0073] FIG. 11 shows another embodiment of the mixing device 100. The mixing device 100 can include a primary inlet 1104 and a secondary inlet 1106. The primary inlet 1104 is configured to receive a first fluid, and the secondary inlet 1106 is configured to receive a second fluid. As shown in FIG. 11, the primary inlet 1104 and the secondary inlet 1106 may be disposed on the same side of the rotor assembly 230. For example, the primary inlet 1104 and the secondary inlet 1106 may be disposed proximate to the rear portion of the rotor assembly 230.

[0074] The primary inlet 1104 and the secondary inlet 1106 may be configured to direct the first and second fluids directly into the mixing chamber 202. By introducing each of the fluids near the rear portion of the rotor assembly 230, the fluids can begin to mix. For example, the fluids can substantially fill a portion of the mixing chamber 202 proximate to the rear portion of the rotor assembly 230, such that the fluids can contact each other and begin to mix together. As the fluids exit their respective primary inlet 1104 and secondary inlet 1106, the fluids can create vortices and / or turbulence near the primary inlet 1104 and the secondary inlet 1106, causing further mixing. In some embodiments, the primary inlet 1104 and / or the secondary inlet 1106 are oriented such that the fluids flowing through each of the primary inlet 1104 and the secondary inlet 1106 intersect as they exit into the mixing chamber 202 from the primary inlet 1104 and the secondary inlet 1106, thereby creating further mixing and turbulence.

[0075] Next, the fluid can flow through the mixing chamber 202 from the rear portion of the rotor assembly 230 to the collection chamber 1108 proximate to the front portion of the rotor assembly 230. As described above, the rotor assembly 230 can rotate relative to the stator assembly 220. The outer surface 508 of the rotor assembly 230 and the inner surface 510 of the stator assembly 220 can generate turbulence in the fluid within the mixing chamber 202 defined between the outer surface 508 of the rotor assembly 230 and the inner surface 510 of the stator assembly 220 by the frictional forces between the outer surface 508, the inner surface 510, and the fluid respectively. As described above, the turbulence can be enhanced by the uneven portions 512, 514 that may exist on the outer surface 508 and / or the inner surface 510.

[0076] As described above, the turbulence within the mixing chamber 202 can mix the fluids together such that the fluid exiting the mixing chamber 202 and entering the collection chamber 1108 becomes substantially homogeneous. The substantially homogeneous fluid can exit the collection chamber 1108 through the outlet 1102. The outlet 1102 can be disposed at the opposite end of the mixing device 100 from the primary inlet 1104 and the secondary inlet 1106. For example, the outlet 1102 may coincide with the first fluid port 116 of the mixing device 100. Thus, the two fluids enter the mixing device 100 through the primary inlet 1104 and the secondary inlet 1106 on the first end of the mixing device 100 proximate to the rear portion of the rotor assembly 230 and are mixed together to form a substantially homogeneous fluid within the mixing chamber 202 as the fluid travels the length of the rotor assembly 230 and exits the mixing device 100 through the outlet 1102 at the second opposite end of the mixing device 100 proximate to the front portion of the rotor assembly 230.

[0077] In some embodiments, the mixing device 100 may be configured to flow fluids in opposite directions. For example, two fluids can enter the mixing device 100 at a second end proximate to the front portion of the rotor assembly 230. Next, the two fluids enter the mixing chamber 202 at the front portion of the rotor assembly 230 and can be mixed together within the mixing chamber 202 as the fluids travel the length of the rotor assembly 230 to the rear portion of the rotor assembly 230. Next, the fluids can exit the mixing device 100 as a substantially homogeneous fluid through an outlet proximate to the rear portion of the rotor assembly 230.

[0078] Figures 12A through 12C illustrate different embodiments of the rotor assembly 230. As described above, the rotor assembly 230 can include irregularities 512 on the outer surface 508 of the rotor assembly 230. FIG. 12A shows a rotor assembly 230A that includes linear protrusions 1202a. The linear protrusions 1202a can be protrusions such as ridges or depressions such as channels. In some embodiments, the linear protrusions 1202a can be a combination of protrusions and depressions arranged in a pattern around the outer surface 508 of the rotor assembly 230A. For example, each protrusion can be adjacent to a depression.

[0079] In some embodiments, each of the linear protrusions 1202a can be substantially evenly spaced around the outer surface 508 of the rotor assembly 230A. In other embodiments, the spacing between the linear protrusions 1202a can vary such that the space 1204 between some adjacent linear protrusions 1202a is larger than the space 1204 between other adjacent linear protrusions 1202a. In some embodiments, the space 1204 can be defined by other linear protrusions 1202a. For example, the outer surface 508 can include linear ridges that define the linear protrusions 1202a, and the space 1204 between the linear ridges can form linear channels.

[0080] In some embodiments, the stripe protrusions 1202a may be substantially uniform. For example, the stripe protrusions 1202a may each have substantially the same height, depth, and / or length. In other embodiments, the stripe protrusions 1202a may have different sizes. For example, some of the stripe protrusions 1202a may have a greater height or depth than other stripe protrusions 1202a. In some embodiments, some of the stripe protrusions 1202a may have a different length than other stripe protrusions 1202a. For example, some of the stripe protrusions 1202a may not extend the entire length of the rotor assembly 230A. In some embodiments, the stripe protrusions 1202a may have different shapes. For example, some of the stripe protrusions 1202a may have a rectangular shape (e.g., defined primarily by a 90° angle), and some of the stripe protrusions 1202a may have a triangular shape (e.g., extending at an angle greater than about 90° with respect to the outer surface 508 of the rotor assembly 230A).

[0081] FIG. 12B shows a rotor assembly 230B that includes spiral protrusions 1202b. The spiral protrusions 1202b may form a helix that extends from a first end 1206 of the rotor assembly 230B to a second end 1208 of the rotor assembly 230B. In some embodiments, each spiral protrusion 1202b may pass around the outer surface 508 of the rotor assembly 230 at least once between the first end 1206 and the second end 1208. In other embodiments, the spiral protrusions 1202b may not completely surround the outer surface 508 between the first end 1206 and the second end 1208. The spiral protrusions 1202b may be protrusions such as ridges, or depressions such as channels. In some embodiments, the spiral protrusions 1202b may be a combination of protrusions and depressions arranged in a pattern around the outer surface 508 of the rotor assembly 230B. For example, each protrusion may be adjacent to a depression.

[0082] In some embodiments, each of the helical protrusions 1202b may be spaced substantially evenly along the outer surface 508 of the rotor assembly 230B. In other embodiments, the spacing between the helical protrusions 1202b may vary such that the space 1204 between some adjacent helical protrusions 1202b is larger than the space 1204 between other adjacent helical protrusions 1202b. In some embodiments, the space 1204 may be defined by other helical protrusions 1202b. For example, the outer surface 508 may include helical ridges that define the helical protrusions 1202b, and the space 1204 between the helical protrusions may form a helical channel.

[0083] In some embodiments, the helical protrusions 1202b may be substantially uniform. For example, the helical protrusions 1202b may each have substantially the same height, depth, and / or length. In other embodiments, the helical protrusions 1202b may have different sizes. For example, some of the helical protrusions 1202b may have a greater height or depth than other helical protrusions 1202b. In some embodiments, the helical protrusions 1202b may have different shapes. For example, some of the helical protrusions 1202b may have a rectangular shape (e.g., defined primarily by a 90° angle), and some of the helical protrusions 1202b may have a triangular shape (e.g., extending at an angle greater than about 90° with respect to the outer surface 508 of the rotor assembly 230A).

[0084] FIG. 12C shows a rotor assembly 230C including a formed portion 1202c disposed around an outer surface 508 of the rotor assembly 230C. The formed portion 1202c can be a protrusion such as a bump, or a depression such as a divot or dimple. For example, as shown in FIG. 12C, the formed portion 1202c may be a pattern of circular divots similar to the surface of a golf ball. In some embodiments, the formed portion 1202c may be a combination of protrusions and depressions arranged in a pattern around the outer surface 508 of the rotor assembly 230C. The formed portion 1202c may be arranged in rows around the outer surface 508 of the rotor assembly 230C. In some embodiments, as shown in FIG. 12C, the rows are offset to allow a greater number of formed portions 1202c to be disposed on the outer surface 508 of the rotor assembly 230C.

[0085] In some embodiments, the formed portion 1202c can have other shapes such as ovals, ellipses, squares, rectangles, prisms, triangles, pyramids, cones, etc. In some embodiments, the shape and size of the formed portion 1202c can be substantially uniform (e.g., substantially the same size and / or shape). In other embodiments, the size and / or shape of the formed portion 1202c may vary. For example, some of the formed portions 1202c may be substantially circular, and some of the formed portions 1202c may be rectangular. Some of the formed portions 1202c may be smaller than other formed portions 1202c. For example, the formed portion 1202c can have different depths, different heights, different major dimensions (e.g., radius, diameter, length, width, apothem, etc.), etc.

[0086] In some embodiments, the rotor assembly 230 may include a combination of multiple different types of uneven portions 512, such as the strip protrusions 1202a, the spiral protrusions 1202b, and / or the shaped portions 1202c, disposed on the outer surface 508 of the same rotor assembly 230. The different types of uneven portions 512 can generate different types of turbulent flows in the fluid flowing over the outer surface 508 of the rotor assembly 230, and the different types of turbulent flows have different mixing characteristics. Thus, the different uneven portions 512 enable the mixing device 100 to use the advantages of different types of turbulent flows to mix the fluid in the mixing chamber 202, resulting in the generation of a uniform fluid mixture. As described above, a larger amount of turbulent flow also enables the mixing device 100 to mix a larger amount of gas into the liquid.

[0087] Figures 13 and 14 show a system including the mixing device 100 described above. FIG. 13 shows a fluid mixing system 1300 including a pump 1302 configured to supply a first fluid 1304 to the mixing device 100. The pump 1302 may be a centrifugal pump, a reciprocating pump, a scroll pump, a turbine pump, etc., configured to induce a flow into the first fluid 1304, such as by pressurizing the first fluid 1304. The first fluid 1304 may be a fluid in a liquid phase, such as water or deionized water. Due to the pressure from the pump 1302, the first fluid 1304 can flow through the mixing device 100. The pump 1302 may be coupled to the mixing device 100 via a pipe (e.g., a resin pipe, a metal pipe, a line, a conduit, etc.) configured to transfer the first fluid 1304 between the pump 1302 and the mixing device 100.

[0088] The second fluid 1306 can be supplied independently to the mixing device 100. The second fluid 1306 may be a fluid in a gas phase, such as oxygen or ozone. In some embodiments, the second fluid 1306 can be pressurized to at least the same pressure as the first fluid 1304 by a compressor or the like. The second fluid 1306 may be mixed with the first fluid 1304 by the mixing device 100 in the manner described above.

[0089] After the second fluid 1306 is mixed with the first fluid 1304, the mixed fluid 1308 can flow out of the mixing device 100. The mixed fluid 1308 can include both the first fluid 1304 and the second fluid 1306 in a substantially homogeneous mixture. Next, the mixed fluid 1308 can flow from the mixing device 100 to another component 1310 such as a booster pump, a spray nozzle, a holding tank, etc. The flow of the mixed fluid 1308 from the mixing device 100 can be the result of the flow generated by the pump 1302 in the first fluid 1304.

[0090] Figure 14 shows another embodiment of the fluid mixing system 1400. The fluid mixing system 1400 can include a mixing device 100. The mixing device 100 can be configured to receive a first fluid 1304 and a second fluid 1306. The first fluid 1304 can be a liquid-phase fluid, and the second fluid 1306 can be a gas-phase fluid. The first fluid 1304 and the second fluid 1306 can have a system pressure sufficient to flow the first fluid 1304 and the second fluid 1306 into the mixing device 100.

[0091] The second fluid 1306 may be mixed with the second fluid 1306 in the mixing device 100 in the manner described above. The mixed fluid 1308 can exit the mixing device 100. As described above, the mixed fluid 1308 can include both the first fluid 1304 and the second fluid 1306 in a substantially homogeneous mixture.

[0092] The pump 1402 can be configured to draw the mixed fluid 1308 out of the mixing device 100. The pump 1402 may be a centrifugal pump, a reciprocating pump, a scroll pump, a turbine pump, etc., and is configured to induce a flow into the mixed fluid 1308, such as by pressurizing the mixed fluid 1308. The pump 1402 can be coupled to the mixing device 100 via a pipe (e.g., a resin pipe, a metal pipe, a line, a conduit, etc.) configured to transfer the mixed fluid 1308 between the mixing device 100 and the pump 1402. The pump 1402 can flow the mixed fluid 1308 to another component 1404 of the system, such as a spray nozzle, a holding tank, etc.

[0093] Liquids such as ozone-treated water can be used in cleaning processes such as semiconductor cleaning processes. When the ozone concentration in the ozone-treated water is high, the cleaning characteristics of the ozone-treated water may be improved. Therefore, increasing the amount of gas mixed into the liquid can enable the production of ozone-treated water and / or other mixtures with improved characteristics introduced by the gas. Embodiments of the present disclosure can enable a large amount of gas to be mixed or dispersed into the liquid. Conventional methods of mixing gas into a liquid are passive and depend on the time it takes for the gas to move through the liquid and disperse the gas into the liquid. Embodiments of the present disclosure actively mix the gas into the liquid by inducing turbulent flow into the liquid, accelerating the mixing of the gas and the liquid, and as a result, obtaining a substantially homogeneous mixture with a higher concentration of gas.

[0094] Non-limiting exemplary embodiments of the present disclosure include the following.

[0095] Embodiment 1: A fluid mixing system comprising a gas inlet, a fluid mixing device, and a pump. The fluid mixing device comprises a fluid inlet, a common outlet, and a mixing chamber. The mixing chamber is defined between a stator and a magnetically levitated rotor configured to rotate with respect to the stator. The mixing chamber has an uneven surface. The mixing chamber operatively couples the fluid inlet and the gas inlet to the common outlet. The pump is separated from the fluid mixing device and coupled to the fluid mixing device via a pipe.

[0096] Embodiment 2: The fluid mixing system according to Embodiment 1, wherein the pump is disposed upstream from the fluid inlet and configured to pump fluid into the fluid inlet.

[0097] Embodiment 3: The fluid mixing system according to Embodiment 1 or 2, wherein the pump is disposed downstream from the common outlet and configured to pump fluid out of the common outlet.

[0098] Embodiment 4: The fluid mixing system according to any one of Embodiments 1 to 3, wherein the mixing device does not include pumping components within the fluid mixing device.

[0099] Embodiment 5: The fluid mixing system according to any one of Embodiments 1 to 4, wherein the uneven surface includes a pattern of one or more protrusions and depressions.

[0100] Embodiment 6: The fluid mixing system according to any one of Embodiments 1 to 5, wherein the uneven surface includes the surface of the rotor.

[0101] Embodiment 7: The fluid mixing system according to any one of Embodiments 1 to 6, wherein the uneven surface includes the surface of the stator.

[0102] Embodiment 8: The fluid mixing system according to any one of Embodiments 1 to 7, wherein the gas inlet is coupled to the fluid inlet upstream of the fluid mixing device.

[0103] Embodiment 9: The fluid mixing system according to any one of Embodiments 1 to 8, wherein the gas inlet is directly connected to a fluid mixing device separated from the fluid inlet.

[0104] Embodiment 10: A mixing device having a stator, a rotor configured to rotate with respect to the stator, and a mixing cavity. The stator has at least two annular permanent magnets having a first polarity and an inner surface. The rotor includes at least two complementary annular permanent magnets having a second polarity. The at least two complementary annular permanent magnets are arranged coaxially with the at least two annular permanent magnets. The mixing cavity is defined between the inner surface of the stator and the outer surface of the rotor, and at least one of the inner surface of the stator and the outer surface of the rotor is an uneven surface. The mixing device does not include pumping components inside the mixing device.

[0105] Embodiment 11: The mixing device according to Embodiment 10, wherein the second polarity is opposite to the first polarity.

[0106] Embodiment 12: The mixing device according to Embodiment 10 or 11, wherein the second polarity is the same as the first polarity.

[0107] Embodiment 13: The rotor further includes an armature, and the stator further includes drive magnets configured to induce the rotation of the rotor via the armature. The mixing device according to any one of Embodiments 10 to 12.

[0108] Embodiment 14: The mixing device according to any one of Embodiments 10 to 13, wherein the concave surface includes a plurality of protrusions or depressions.

[0109] Embodiment 15: The mixing device according to any one of Embodiments 10 to 14, wherein each of the outer surface of the rotor and the inner surface of the stator is an uneven surface.

[0110] Embodiment 16: Further provided with a liquid inlet, a gas inlet, and an outlet, the outlet is configured to receive a fluid mixture of the liquid received through the liquid inlet and the gas received through the gas inlet, and the fluid mixture is formed within the mixing cavity, and the mixing device according to any one of Embodiments 10 to 15.

[0111] Embodiment 17: The liquid inlet and the gas inlet are arranged on the first side of the mixing device, and the outlet is arranged on the second side opposite to the first side of the mixing device, and the mixing device according to Embodiment 16.

[0112] Embodiment 18: The stator is provided with a pull magnet, the rotor is provided with a complementary pull magnet, and the pull magnet is provided with an electromagnet configured to adjust the position of the rotor by adjusting one or more of the pull strength and polarity of the pull magnet, and the mixing device according to any one of Embodiments 10 to 16.

[0113] Embodiment 19: A method of mixing a liquid with a gas, comprising the steps of flowing the liquid and the gas into a chamber defined between the inner surface of the stator and the outer surface of the rotor, inducing the flow by a pumping device to at least one of the liquid and the gas, rotating the rotor relative to the stator, and mixing the liquid and the gas on the uneven outer surface of the rotor when the rotor rotates. The rotor is configured to float within the stator on a magnetic bearing. At least one of the inner surface of the stator and the outer surface of the rotor is an uneven surface. The pumping device is separated from the chamber, the rotor, and the stator and is connected to the chamber via a pipe.

[0114] Embodiment 20: The uneven surface includes a plurality of protrusions or depressions, and the method according to Embodiment 19.

[0115] The embodiments of the present disclosure described above and shown in the accompanying drawings are merely examples of embodiments of the present invention and do not limit the scope of the present invention. The present invention is defined by the appended claims and their legal equivalents. Any equivalent embodiments are intended to be within the scope of the present disclosure. Indeed, various modifications of the present disclosure will be apparent to those skilled in the art from this specification in addition to the combinations of useful alternatives of the components described. Such modifications and embodiments are also intended to be within the scope of the appended claims and their legal equivalents.

Claims

1. A fluid mixing system comprising: a gas inlet; a fluid mixing device; a pump, wherein the fluid mixing device comprises: a fluid inlet; a common outlet; a mixing chamber, wherein the mixing chamber is defined between a stator and a magnetically levitated rotor configured to rotate relative to the stator, the mixing chamber has an uneven surface extending between a first axial end and a second axial end of the magnetically levitated rotor, the uneven surface has a plurality of protrusions distributed uniformly, and the mixing chamber operatively couples the fluid inlet and the gas inlet to the common outlet; and the pump is separated from the fluid mixing device and coupled to the fluid mixing device via a pipe.

2. The fluid mixing system according to claim 1, wherein the pump is disposed upstream of the fluid inlet and configured to pump fluid into the fluid inlet.

3. The fluid mixing system according to claim 1, wherein the pump is disposed downstream of the common outlet and configured to pump fluid out of the common outlet.

4. The fluid mixing system according to claim 1, wherein the fluid mixing device does not include pumping components therein.

5. The fluid mixing system according to claim 1, wherein the uneven surface includes a pattern of one or more protrusions and depressions.

6. The fluid mixing system according to claim 1, wherein the uneven surface includes the surface of the magnetically levitated rotor.

7. The fluid mixing system according to claim 1, wherein the uneven surface includes the surface of the stator.

8. The fluid mixing system according to any one of claims 1 to 7, wherein the gas inlet is coupled to the fluid inlet upstream of the fluid mixing device.

9. The fluid mixing system according to any one of claims 1 to 7, wherein the gas inlet is directly coupled to the fluid mixing device separated from the fluid inlet.

10. A mixing device comprising: a stator; a rotor configured to rotate relative to the stator; and a mixing cavity, wherein the stator has at least two annular permanent magnets having a first polarity and an inner surface. The rotor includes at least two complementary annular permanent magnets having a second polarity, and the at least two complementary annular permanent magnets are arranged coaxially with the at least two annular permanent magnets. The mixing cavity is defined between the inner surface of the stator and the outer surface of the rotor, the mixing cavity extends from a first axial end of the rotor to a second axial end of the rotor, and at least one of the inner surface of the stator and the outer surface of the rotor is an uneven surface having a pattern of recesses distributed over the entire mixing cavity. The mixing device is a mixing device that does not include pumping components inside the mixing device.

11. The mixing device according to claim 10, wherein the second polarity is opposite to the first polarity.

12. The mixing device according to claim 10, wherein the second polarity is the same as the first polarity.

13. The rotor further includes an armature, and the stator further includes drive magnets configured to induce rotation of the rotor via the armature. The mixing device according to claim 10.

14. The uneven surface according to claim 10 includes a plurality of protrusions or recesses.

15. The mixing device according to claim 10, wherein each of the outer surface of the rotor and the inner surface of the stator is an uneven surface.

16. Furthermore, a liquid inlet, a gas inlet, an outlet, and the outlet is configured to receive a fluid mixture of the liquid received through the liquid inlet and the gas received through the gas inlet. The fluid mixture is formed within the mixing cavity. The mixing device according to any one of claims 10 to 15.

17. The mixing device according to claim 16, wherein the liquid inlet and the gas inlet are arranged on a first side of the mixing device, and the outlet is arranged on a second side opposite to the first side of the mixing device.

18. The stator includes pull magnets, the rotor includes complementary pull magnets, and the pull magnets include electromagnets configured to adjust the position of the rotor by adjusting one or more of the pull strength and polarity of the pull magnets. The mixing device according to any one of claims 10 to 15.

19. A method of mixing a liquid with a gas, comprising: flowing the liquid and the gas into a chamber defined between an inner surface of a stator and an outer surface of a rotor. The rotor is configured to float within the stator on a magnetic bearing, and at least one of an inner surface of the stator and an outer surface of the rotor is an uneven surface. A step of inducing a flow by a pump device into at least one of a liquid and a gas. The pump device is separated from the chamber, the rotor, and the stator, and is coupled to the chamber via a pipe. A step of rotating the rotor relative to the stator. A step of mixing the liquid and the gas on an uneven outer surface of the rotor when the rotor rotates. The uneven outer surface extends from one end portion to the other end portion of the rotor and has a plurality of protrusions or a plurality of recesses.

20. The method according to claim 19, wherein the uneven outer surface includes a plurality of protrusions and recesses.

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