Coating device, meniscus head, and coating method

Abstract

Provided according to embodiments are a coating device that can obtain a uniform coating film over a large area, a meniscus head, and a coating method. The coating device according to the embodiments forms a coating film by a meniscus method, wherein the coating device is equipped with a member that transports a base material, a coating bar, a slot die that supplies a coating solution to the surface of the coating bar, and a member that supplies the coating solution to the slot die, and each member is positioned so that the coating solution supplied from the slot die is supplied between the coating bar and the base material via the surface of the coating bar to form a meniscus.

Description

Technical Field

[0001] Embodiments of the present invention relate to a coating apparatus, a meniscus head, and a coating method.

Background Art

[0002] Organic thin-film solar cells and organic / inorganic hybrid solar cells using organic semiconductors are expected to be low-cost solar cells because an inexpensive coating method can be applied to form the active layer. In order to realize organic thin-film solar cells and organic / inorganic hybrid solar cells at low cost, it is required to uniformly coat the coating material for forming the organic active layer and other layers. The film thickness of each layer is about several nm to several hundred nm, and it is required to form such a very thin layer with good uniformity over a large area. For example, the meniscus coating method is known as one of the roll-to-roll (R2R) coating methods capable of coating an extremely thin layer at low cost over a large area. As a meniscus coating method, a method of supplying liquid from a plurality of nozzles to a coating bar to obtain a large-area coating film is simple, and the structure of the instrument is also simple. However, it may be difficult to control the film thickness at the intermediate portion between adjacent nozzles to be the same as that of other portions to obtain a uniform film thickness.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The problem to be solved by the present invention is to provide a coating apparatus, a meniscus head, and a coating method capable of obtaining a uniform coating film over a large area.

Means for Solving the Problems

[0005] The provided embodiments are as follows. [1] A coating apparatus for supplying a coating liquid to the surface of a substrate and forming a coating film by the meniscus method, a member for conveying the substrate, a coating bar, a slot die for supplying the coating liquid to the surface of the coating bar, a coating liquid supply member for supplying the coating liquid to the slot die, and each member is arranged such that the coating liquid supplied from the slot die is supplied between the coating bar and the substrate via the surface of the coating bar to form a meniscus. [2] The coating apparatus according to [1], wherein the cross-sectional shape in a plane perpendicular to the longitudinal direction of the coating bar is constant. [3] The coating apparatus according to [1] or [2], further comprising a position detection member for detecting that the longitudinal direction of the coating bar is parallel to the coating liquid discharge port of the slot die. [4] The coating apparatus according to any one of [1] to [3], further comprising a distance measurement member for measuring the distance between the coating bar and the slot die. [5] The coating apparatus according to [4], wherein the distance measurement member measures the distance by measuring the electrical resistance between the coating bar and the slot die. [6] The coating apparatus according to any one of [1] to [5], further comprising a distance control member for controlling the distance between the coating bar and the slot die. [7] The coating apparatus according to any one of [1] to [6], comprising a number of coating liquid supply members less than or equal to the number of slot dies. [8] The coating apparatus according to any one of [1] to [7], comprising a plurality of slot dies. [9] The coating apparatus according to [8], further comprising a slot die interval adjustment member for adjusting the interval between adjacent slot dies.

[10] A meniscus head that is disposed apart from a substrate and supplies a coating liquid to the surface of the substrate to form a coating film, wherein the meniscus head, comprises a coating bar, a slot die that supplies the coating liquid to the surface of the coating bar, and a fixing member that connects and fixes the coating bar and the slot die, and the coating liquid discharged from the slot die is supplied to the gap between the coating bar and the substrate via the surface of the coating bar to form a meniscus, thereby forming the coating film. A meniscus head.

[11] The meniscus head according to

[10] , wherein the length of the coating bar in the longitudinal direction is 30 cm or more, and the length of the coating liquid discharge port of the slot die is 10 cm or less.

[12] A coating method for supplying a coating liquid between a coating bar and a substrate to form a meniscus and form a coating film on the surface of the substrate, (S31) a step of supplying the coating liquid to the slot die to vent air, (S32) a step of controlling the distance between the coating bar and the slot die, (S33) a step of controlling the distance between the coating bar and the substrate, (S34) a step of supplying the coating liquid from the slot die via the surface of the coating bar to form a meniscus between the coating bar and the substrate as described above, (S35) a step of conveying the substrate to create the coating film A coating method having.

[13] The coating method according to

[12] , wherein the length of the coating bar in the longitudinal direction is 30 cm or more, and the length of the coating liquid discharge port of the slot die is 10 cm or less.

[14] The viscosity of the coating liquid at the application temperature is 2×10 -3 kg·m / s or less. The coating method according to

[12] or

[13] .

[15] In step (S32), the coating method according to any one of

[12] to

[14] , wherein the method for measuring the distance between the coating bar and the slot die is to measure the electrical resistance between the coating bar and the slot die.

[16] The coating method according to any one of

[12] to

[15] , further including a step of confirming that the coating liquid discharge port of the slot die is arranged parallel to the coating bar.

[17] Before transporting the substrate, start supplying the coating liquid to form a meniscus between the coating bar and the substrate, according to the coating method of any one of

[12] to

[16] .

Brief Description of the Drawings

[0006]

Figure 1A

Figure 1B

Figure 2

Figure 3

Embodiments for Carrying Out the Invention

[0007] Hereinafter, embodiments will be described with reference to the drawings.

[0008] Note that the same reference numerals are assigned to common configurations throughout the embodiments, and redundant descriptions are omitted. Also, each figure is a schematic diagram for promoting the understanding of the embodiment, and there are parts where its shape, dimensions, ratio, etc. are different from the actual device, but these can be appropriately changed in design in consideration of the following description and known techniques.

[0009] (First Embodiment) FIGS. 1A and 1B are a side conceptual view and a top conceptual view showing a coating apparatus according to an embodiment. The coating device 100 includes a member 103 for conveying the substrate 102, a coating bar 101, a slot die 106 that supplies a coating liquid 104 between the coating bar 101 and the substrate 102 to form a meniscus 105, a coating liquid supply member 107 (such as a liquid feed pump, shown as one in the figure) that supplies the coating liquid to the slot die, and has

[0010] The coating device can further include a coating liquid tank 108 and a pipe 109. These are for feeding the coating liquid 104 stored in the coating liquid tank 108 to the slot die 106. The substrate conveyed from the coating device is usually conveyed to a drying device (not shown) and dried.

[0011] In the coating device according to the embodiment, the coating liquid discharged from the slot die is not directly applied to the substrate surface, but the coating liquid supplied from the slot die passes through the surface of the coating bar and is supplied between the coating bar and the substrate to form a meniscus, and the members are arranged accordingly.

[0012] Also, there may be one slot die, but as shown in FIG. 1B, a plurality of slot dies can be arranged. By arranging the mutual slot dies in parallel, the flows of the coating liquid discharged from the respective slot dies are combined with each other on the coating bar surface to form a wide flow of the coating liquid, and by forming a meniscus therefrom, a uniform and wide coating film can be formed.

[0013] Meniscus coating is known as one of the coating methods for forming a coating film on a substrate. A "meniscus" is a phenomenon in which the surface of a liquid forms a concave or convex curved surface. When a coating liquid containing various materials is injected into the gap between the coating bar and the substrate, a meniscus is formed on the liquid surface. If the substrate is moved in the state where the meniscus is formed, a coating film can be formed on the substrate.

[0014] In meniscus coating using a coating bar, the supply of liquid to the coating bar is generally carried out by a syringe needle. Also, when continuous coating is required, such as in the roll-to-roll method (sometimes called R2R), the supply of coating liquid is often carried out from a plurality of needles to a single coating bar. In such cases, the spacing between adjacent needles varies depending on the physical properties of the coating liquid used, the coating liquid film, the coating speed, etc. The number of needles that can be arranged with respect to a single coating bar is limited because the supply structure of the coating liquid becomes complicated, so it is difficult to use a long coating bar. Also, it is difficult to stably supply the coating liquid to the intermediate portion between adjacent needles, and streaks may occur in the coating liquid.

[0015] In coating by a slot die (slot coating), it is common to supply liquid to one slot die. When a wide coating width is required, the discharge port of the slot die also becomes long. Usually, the coating liquid is injected into the slot die from a central injection port, and it is distributed over the entire discharge port. When the viscosity of the coating liquid is low, it becomes difficult for pressure to be transmitted to both ends of the long discharge port of the slot die, and it becomes difficult to uniformly discharge the liquid from the slot die discharge port.

[0016] In the coating apparatus according to this embodiment, the coating liquid discharged from the slot die is supplied to the surface of the substrate via a coating bar to perform meniscus coating. According to this method, even when the coating liquid is discharged non-uniformly from the slot die, a coating film with improved uniformity can be formed. Furthermore, by using a plurality of slot dies, even in meniscus coating using a long coating bar, a uniform supply of the coating liquid to the coating bar can be performed from a plurality of short slot dies, and uniform coating is possible even over a large area. In the method of arranging a plurality of short slot dies side by side and directly applying the discharged liquid from the slot dies to the substrate without using a coating bar, the coating film between the slot dies tends to be non-uniform. On the other hand, in this embodiment where the coating liquid is supplied to the surface of the substrate via a coating bar, the coating liquid is easily uniformly distributed on the coating bar.

[0017] In the coating apparatus according to this embodiment, it is possible to assume that the cross-sectional shape in a plane perpendicular to the longitudinal direction of the coating bar is constant. The cross-sectional shape of the coating bar 101 is arbitrary. The cross-sectional shape of the coating bar 101 is, for example, circular, oval, or polygonal. A part of the cross-sectional shape may be curved and the other part may be linear. For example, the cross-sectional shape of the surface of the coating bar 101 facing the substrate 102 may be curved.

[0018] The coating bar 101 preferably includes at least one selected from the group consisting of, for example, stainless steel, aluminum, titanium, and glass. This facilitates the processing of the coating bar 101. In one example, the surface of the coating bar 101 is a mirror surface. In another example, the surface of the coating bar 101 may include irregularities.

[0019] In an embodiment, it is preferable that the longitudinal direction of the coating bar is parallel to the coating liquid discharge port of the slot die. For this purpose, a position detection member that detects that the longitudinal direction of the coating bar is parallel to the coating liquid discharge port of the slot die before or during coating can be provided. As the detection method, an optical method is preferable, and an image camera is preferable.

[0020] In the coating apparatus according to this embodiment, it is preferable to control the distance between the coating bar and the slot die during coating. For this purpose, a distance measurement member that measures the distance between the coating bar and the slot die before or during coating can be further provided. Here, in the coating apparatus according to one embodiment, the coating bar and the slot die may be in contact. When the coating bar and the slot die are in contact, the coating liquid can be directly applied to the coating bar, and splashing of the coating liquid is less likely to occur. Therefore, as the distance measurement member, a device that detects that the coating bar and the slot die are in contact can be used. The contact between the coating bar and the slot die can be easily detected, and the uniformity of the coating film can be improved by maintaining the contact state.

[0021] Also, in the coating apparatus according to the present embodiment, as the distance measurement member, a member (electrical resistance measuring device) for measuring the electrical resistance between the coating bar and each slot die can be used. When the slot die and the coating bar are made of conductive stainless steel or the like, and when a plurality of slot dies are provided, if the space between each slot die is insulated, by measuring the electrical resistance between the coating bar and the slot die, the electrical resistance sharply decreases at the moment of contact, so the contact can be detected. Also, since the electrical resistance changes depending on the state of contact, it becomes possible to monitor the state of contact.

[0022] It is desirable to install wiring with the electrical resistance measuring device in advance between the slot dies and the coating bar. An opening / closing part is provided in the wiring, and before coating, the slot die can be moved to confirm contact with the coating bar. Also, if the electrical resistance is continuously measured during coating, it is possible to detect a case where there is an abnormality in the contact between the slot die and the coating bar. The electrical resistance measuring device can also be an external device separate from the coating apparatus.

[0023] The coating apparatus according to the present embodiment can be equipped with a coating liquid supply member fewer than the slot dies, for example, a pump. For example, as shown in FIG. 1B, a coating liquid supply member can be arranged for each of the plurality of slot dies one by one, but for example, it is also possible to supply the coating liquid from one coating liquid supply member to three slot dies. In the present embodiment, even if the coating liquid is unevenly supplied to the plurality of slot dies, the coating liquid discharged from the slot die becomes uniform on the coating bar. Therefore, for example, in general slot coating, the uniformity of the coating film is higher than when the coating liquid is directly supplied from the slot die onto the substrate.

[0024] In the coating apparatus according to the present embodiment, when a plurality of slot dies are provided, a member for controlling the interval between each slot die can be provided. Examples of the member for controlling the slot die interval include spacers provided between the slot dies.

[0025] In the coating apparatus according to the embodiment, the slot die can be detachably attached and detached separately.

[0026] In the coating apparatus according to the embodiment, the pipe for supplying the coating liquid to the slot die can be provided with a joint that can be detached from the slot die. With such a structure, individual slot dies can be easily detached and attached.

[0027] In the coating apparatus according to the embodiment, each pipe connecting to each slot die can be provided from one coating liquid tank. This simplifies the arrangement of the pipes and makes it easier to uniformly control the pressure from the tank to each pipe and the supply amount of the coating liquid.

[0028] In the coating apparatus according to the embodiment, the moving direction of the substrate is not particularly limited, but it is preferable to perform coating while conveying the substrate from bottom to top in the vertical direction. By moving the substrate from bottom to top in the vertical direction, gravity acts on the meniscus portion, making it easier to form a uniform film and enabling faster coating. However, depending on the configuration of the apparatus and the physical properties of the coating liquid, etc., the moving direction can be adjusted, and generally it is in the range of ±30° from the vertical direction.

[0029] The substrate conveying member preferably conveys the substrate from bottom to top. At this time, the slot die is preferably arranged to supply the coating liquid from above the coating bar. By supplying the coating liquid from above the coating bar, liquid dripping can be suppressed.

[0030] The coating apparatus according to the embodiment can further be provided with a member that measures and controls the distance between the coating bar and the substrate. Since a meniscus is formed between the coating bar and the material, by controlling the distance between the coating bar and the substrate, the uniformity of the thickness of the coating film can be further improved.

[0031] The coating apparatus according to the embodiment can further include a member for cleaning the coating bar. Thereby, the coating bar can be cleaned regularly to remove impurities mixed from the atmosphere and solid matter precipitated from the coating liquid. Specifically, examples include a member for spraying or emitting a solvent such as water, and a member for applying ultrasonic waves.

[0032] The coating apparatus according to the embodiment can further include a member for recovering the excess coating liquid. This member can prevent the backflow of the coating liquid after the coating is completed and the loss of the expensive coating liquid, and also easily prevent the release of the solvent or the like into the environment.

[0033] (Second Embodiment) The second embodiment relates to a meniscus head. The meniscus head according to the embodiment is used, for example, as a part of the coating apparatus 10 (and its modifications) described with respect to the first embodiment. The meniscus head according to the embodiment The meniscus head includes a coating bar, a slot die for supplying the coating liquid to the surface of the coating bar, and a fixing member for connecting and fixing the coating bar and the slot die. It is composed of these components.

[0034] The coating liquid discharged from the slot die is supplied via the surface of the coating bar to the gap between the coating bar and a substrate disposed at a distance, forming a meniscus, and a coating film is formed as the substrate is transferred.

[0035] FIG. 2 is a conceptual diagram of the meniscus head 200 of the present embodiment. The meniscus head 200 has a coating bar 201 and a plurality of slot dies 202 for supplying the coating liquid to the coating bar (three in FIG. 2), and has a fixing member 203 for the coating bar and the slot die.

[0036] The fixing member can adopt various structures, but those that are easy to remove and clean are preferred. It is preferable to connect and fix the shaft of the coating bar and the shaft connecting each slot die, and to have an adjusting member 204 for adjusting the distance between the coating bar and the discharge port of the slot die.

[0037] Each slot die preferably includes a member (not shown) for introducing the coating liquid from the coating liquid inlet 202a into the interior and then removing the air mixed into the slot die interior.

[0038] In the meniscus head 200 of the embodiment, the length in the longitudinal direction of the coating bar can be 30 cm or more, and the length of the coating liquid discharge port (not shown) of the slot die 202 can be 10 cm or less.

[0039] (Third Embodiment) The third embodiment relates to a coating method. In the coating method according to the embodiment, for example, coating is performed using the coating apparatus 100 (and its modifications) described with respect to the first embodiment.

[0040] FIG. 3 is a flowchart diagram illustrating a coating method S30 according to the third embodiment. In a coating method of creating a meniscus between a coating bar and a substrate and coating the substrate, (S31) A step of supplying the coating liquid to the slot die and venting air; (S32) A step of controlling the distance between the coating bar and the slot die; (S33) A step of controlling the distance between the coating bar and the substrate; (S34) A step of supplying the coating liquid from the slot die through the surface of the coating bar and forming a meniscus between the coating bar and the substrate as described above; (S35) A step of conveying the substrate and creating the coating film is included. The steps of S31 to S33 may be in a different order.

[0041] In the coating method according to this embodiment, the length of the coating bar in the longitudinal direction can be 30 cm or more, and the length of the discharge port of the slot die can be 10 cm or less.

[0042] In the coating method according to this embodiment, the viscosity of the coating liquid at the coating temperature can be 2×10 -3 kg·m / s (2 cp) or less.

[0043] In the step (S32) of the coating method according to this embodiment, the method of checking the distance between the slot die and the coating bar may be to measure the electrical resistance between them.

[0044] In the coating method according to this embodiment, it is preferable that the coating liquid discharge port of the slot die is parallel to the coating bar, and the method may further include a step of checking that they are arranged to be parallel.

[0045] In the coating method according to this embodiment, it is preferable to start supplying the coating liquid before transporting the substrate to form a meniscus between the coating bar and the substrate. By starting the transportation of the substrate after the meniscus is formed, a uniform film can be formed.

[0046] (Example 1) In Example 1, using the coating apparatus 100 shown in Fig. 1A, a transparent electrode film is produced as follows. A SUS303 coating bar with a circular cross-sectional shape with a radius of 10 mm in a plane perpendicular to the longitudinal direction and a length of 300 mm in the coating width direction, and three slot dies with a discharge port length of 95 mm are used.

[0047] Each slot die is connected to a Teflon tube with a detachable joint, and three small pumps are used to supply the coating liquid to each slot die. As the coating liquid, the viscosity at the coating temperature is 1.7×10 -3Prepare an aqueous dispersion of silver nanowires at kg·m / s. Supply the coating solution to the slot die and remove air. Adjust the distance between the coating bar and each slot die, and confirm that the outlet of the slot die is parallel to the coating bar. Use a PET substrate as the base material, and arrange the coating bar using an actuator so that the minimum gap distance between the coating bar and the PET substrate is 200 μm. Supply 0.2 mL of the coating solution from each slot die to form a meniscus column before transporting the substrate. While controlling the gap distance between the coating bar and the PET substrate, transport the PET substrate and continuously supply the coating solution to obtain a coating film. The moving speed of the PET substrate is set to be constant at 83 mm / s. After coating, the PET substrate is placed in an R2R-compatible hot air drying oven and dried continuously. The resulting coating film has high uniformity.

[0048] (Comparative Example 1) Instead of the coating apparatus shown in Fig. 1A, perform coating using a coating apparatus that uses 16 needle nozzles instead of the slot die. Slight streaks can be visually observed in the resulting coating film.

[0049] (Comparative Example 2) Instead of the coating apparatus shown in Fig. 1A, perform coating using a coating apparatus that uses a single slot die with a length of 30 cm without using a coating bar. A coating film with a thin film thickness at both ends of the coating film is obtained.

[0050] (Comparative Example 3) Instead of the coating apparatus shown in Fig. 1A, perform coating using a coating apparatus that has three slot dies and no coating bar. Streaks can be seen in the middle of the slot die in the coating film.

[0051] (Example 2) Fabricate a transparent electrode of ITO / Ag alloy / iTO with a sheet resistance of 10 Ω / □ on a 300 mm-wide roll-shaped PET film using an R2R-compatible sputtering apparatus. Next, pattern the transparent electrode into a strip shape with a cell pitch of 12 mm and a width of 50 μm by laser scribing.

[0052] Coating is performed using a coating device with a modified coating bar shape with respect to the coating device shown in FIG. 1A. Specifically, a coating bar made of SUS303 with a trapezoidal cross-section, a width of the bottom surface of 80 mm, and a longitudinal length of 300 mm, and three slot dies with a length of the discharge port of 95 mm are used for film formation.

[0053] Prepare PEDOT / PSS aqueous dispersion as a coating solution for producing the hole transport layer, and arrange the coating bar using an actuator so that the minimum gap distance between the coating bar and the PET substrate on which the transparent electrode is formed is 150 μm.

[0054] After venting the air from the slot die, confirm that the coating bar and the slot die are in contact by measuring the electrical resistance, and form a meniscus column before supplying the coating solution from the slot die to the coating bar and transporting the substrate. Transport the PET substrate and continuously supply the coating solution to obtain a coating film. The moving speed of the PET substrate is set to be constant at 83 mm / s. The coating film is placed in an R2R-compatible hot air drying oven and dried continuously.

[0055] Next, for 1 mL of monochlorobenzene, 8 mg of PTB7 ([poly{4,8-bis[(2-ethylhexyl)oxy]benzo[1,2-b:4,5-b’]dithiophene-2,6-diyl-1t-alt-3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophene-4,6-diyl}] / p-type semiconductor) and 12 mg of PC70BM ([6,6]phenylC 71By dispersing methyl butyrate and an n-type semiconductor, a coating solution, which is a material for forming the organic active layer of a solar cell, is prepared. The coating bar is arranged using an actuator such that the minimum gap distance between the coating bar and the PET substrate on which the hole transport layer has been formed is 300 μm. Before supplying the coating solution from each slot die to the coating bar and conveying the substrate, a meniscus column is formed. While controlling the distance between the slot die and the PET substrate, the PET substrate is conveyed and the coating solution is continuously supplied to obtain a coating film. The moving speed of the PET substrate is set to be constant at 83 mm / s. The PET substrate is placed in an R2R-compatible hot air drying furnace and dried continuously. The two produced coating films are uniform.

[0056] Although some embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and their modifications are included in the scope and gist of the invention and are included in the invention described in the claims and its equivalent scope.

Explanation of Reference Numerals

[0057] 100... Coating device, 101... Coating bar, 102... Substrate, 103... Conveying member, 104... Coating solution, 105... Meniscus, 106... Slot die, 107... Coating solution supply member, 108... Coating solution tank, 109... Pipe, 110... Coating film, 200... Meniscus head, 201... Coating bar, 202... Slot die, 203... Fixing member, 204... Spacing adjustment member

Claims

1. A coating apparatus for supplying a coating liquid to the surface of a substrate and forming a coating film by the meniscus method, comprising: a member for conveying the substrate; a coating bar; a plurality of slot dies arranged in parallel with each other for supplying the coating liquid to the surface of the coating bar; a coating liquid supply member for supplying the coating liquid to the plurality of slot dies; a slot die interval adjustment member for adjusting the interval between adjacent ones of the plurality of slot dies; wherein the members are arranged such that the coating liquid supplied from the slot die passes through the surface of the coating bar and is supplied between the coating bar and the substrate to form a meniscus. A coating apparatus according to claim 1, wherein the cross-sectional shape of the coating bar in a plane perpendicular to the longitudinal direction thereof is constant.

2. The coating apparatus according to claim 1, further comprising a position detection member for detecting that the longitudinal direction of the coating bar is parallel to the coating liquid discharge port of the slot die.

3. The coating apparatus according to claim 1 or 2, further comprising an interval measurement member for measuring the interval between the coating bar and the slot die.

4. The coating apparatus according to claim 4, wherein the interval measurement member measures the interval by measuring the electrical resistance between the coating bar and the slot die.

5. The coating apparatus according to claim 1 or 2, further comprising an interval control member for controlling the distance between the coating bar and the slot die.

6. The coating apparatus according to claim 1 or 2, comprising a smaller number of the coating liquid supply members than the number of the slot dies.

7. The coating apparatus according to claim 1 or 2, wherein the slot die interval adjustment member is a spacer provided between the slot dies.

8. The coating apparatus according to claim 1 or 2, wherein the plurality of slot dies are separately detachable.

9. A meniscus head for forming a coating film by supplying a coating liquid to the surface of a substrate while being spaced apart from the substrate, the meniscus head comprising: a coating bar; a plurality of slot dies arranged in parallel with each other for supplying the coating liquid to the surface of the coating bar; a fixing member for connecting and fixing the coating bar and the slot die; and a slot die interval adjustment member for adjusting the interval between adjacent ones of the plurality of slot dies.

10. ​ ​ ​ A meniscus head capable of forming a coating film, wherein the coating liquid discharged from the slot die is supplied to the gap between the coating bar and the substrate via the surface of the coating bar, forming a meniscus.

11. The meniscus head according to claim 10, wherein the length of the coating bar in the longitudinal direction is 30 cm or more, and the length of the coating liquid discharge port of the slot die is 10 cm or less.

12. A coating method for supplying a coating liquid between a coating bar and a substrate to form a meniscus and form a coating film on the surface of the substrate, comprising: (S31) a step of supplying the coating liquid to a plurality of slot dies arranged in parallel with each other to vent air; (S32) a step of controlling the distance between the coating bar and the slot die; (S33) a step of controlling the distance between the coating bar and the substrate; (S33-1) a step of adjusting the distance between adjacent ones of the plurality of slot dies; (S34) a step of supplying the coating liquid from the slot die via the surface of the coating bar to the gap between the coating bar and the substrate to form a meniscus; (S35) a step of conveying the substrate to create the coating film The coating method having.

13. The coating method according to claim 12, wherein the length of the coating bar in the longitudinal direction is 30 cm or more, and the length of the coating liquid discharge port of the slot die is 10 cm or less.

14. The viscosity of the coating liquid at the temperature during coating is 2×10 －３ kg·m / s or less, and the coating method according to claim 12 or 13.

15. The coating method according to claim 12 or 13, wherein in step (S32), the method of measuring the distance between the coating bar and the slot die is to measure the electrical resistance between the coating bar and the slot die.

16. The coating method according to claim 12 or 13, further comprising a step of confirming that the coating liquid discharge port of the slot die is arranged to be parallel to the coating bar.

17. The coating method according to claim 12 or 13, wherein before conveying the substrate, the supply of the coating liquid is started to form a meniscus in the gap between the coating bar and the substrate.

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