Heating element and aerosol generating device including the same

The SPR-based heating element in aerosol generating devices addresses inefficiencies in existing heating technologies by utilizing a substrate and metal prism to generate heat efficiently through surface plasmon resonance, achieving localized and efficient heating with low energy input.

JP7699237B2Active Publication Date: 2025-06-26KT&G CO LTD
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Patent Information

Application Number
JP2023577326
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2022-05-18
Filing Date
2023-05-11
Publication Date
2025-06-26
Estimated Expiration
2043-05-11

AI Technical Summary

Technical Problem

Existing heating technologies for aerosol generating devices are inefficient in generating localized heat with low energy input, limiting their thermal efficiency.

Method used

A heating element utilizing surface plasmon resonance (SPR) is developed, comprising a substrate and a metal prism with holes, designed to generate heat efficiently by resonating with light in the visible spectrum.

Benefits of technology

The SPR-based heating element achieves localized heating with improved thermal efficiency, allowing for effective heating of targets with relatively low energy input.

✦ Generated by Eureka AI based on patent content.

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Abstract

A heating element configured to generate heat using surface plasmon resonance includes a substrate and a metal prism configured to form at least one hole on the substrate to generate heat by surface plasmon resonance.
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Description

Technical Field

[0001] The present disclosure relates to a heating element configured to generate heat by surface plasmon resonance (SPR), and for example, to an aerosol generating device including the heating element.

Background Art

[0002] Techniques for generating heat to heat a target have been developed. As an example, heat can be generated by supplying electrical energy to an electrically resistive element. As another example, heat may be generated by electromagnetic coupling between a coil and a susceptor. The background art described above is what was retained or acquired during the derivation process of the present disclosure, and it cannot necessarily be said to be publicly known technology that was publicly disclosed to the general public before the filing of the present disclosure.

Summary of the Invention

Problems to be Solved by the Invention

[0003] One aspect of the present disclosure is to provide a heating element that generates heat using surface plasmon resonance and an aerosol generating device including the same.

Means for Solving the Problems

[0004] The heating element includes a substrate and a metal prism formed with at least one hole on the substrate and configured to generate heat by surface plasmon resonance.

[0005] The at least one hole can be surrounded by the substrate and the metal prism.

[0006] The metal prism can form a plurality of holes separated from each other.

[0007] The at least one hole can substantially include a circular or elliptical shape.

[0008] The at least one hole can have a diameter of from about 290 nm to about 360 nm.

[0009] The metal prism can include a first base surface facing the substrate, a second base surface opposite the first base surface, and a plurality of side surfaces between the first base surface and the second base surface that define the at least one hole.

[0010] The distance between the first base surface and the second base surface may be in the range of greater than 0 nm to about 10 nm or less.

[0011] The metal prism can include metal particles configured to resonate with light having a wavelength in the range of from about 380 nm to about 780 nm.

[0012] The substrate can have a thermal conductivity in the range of greater than 0 W / mK to about 45 W / mK or less.

[0013] The aerosol generator includes a light source and a heating element configured to receive light from the electrical light source, and the heating element can include a substrate and a metal prism formed on the substrate with at least one hole and configured to generate heat by surface plasmon resonance.

[0014] The heating element can include a substrate having a thermal conductivity in the range of greater than 0 W / mK to about 45 W / mK or less, and a metal prism disposed on the substrate and configured to generate heat by surface plasmon resonance.

[0015] The substrate can include a glass material.

[0016] A method for manufacturing a heating element for generating heat by surface plasmon resonance includes an operation of applying a plurality of beads on a substrate, an operation of reducing the size of the plurality of beads, an operation of depositing a plurality of metal particles on the substrate and / or the plurality of beads, and an operation of removing the plurality of beads.

[0017] The operation of reducing the size of the plurality of beads can include the operation of etching the plurality of beads using reactive ion etching.

[0018] The operation of reducing the size of the plurality of beads can include the operation of reducing the diameter of the beads in the range of about 290 nm to about 360 nm.

Advantages of the Invention

[0019] According to one embodiment, when the heating element is applied to heat the target, the target can be locally heated or at least some of the plurality of targets can be heated. According to one embodiment, the target can be heated in a temperature range determined with relatively low energy. In other words, the thermal efficiency of the heating element can be improved. The effects of the heating element according to one embodiment and the aerosol generating device including the same are not limited to those described above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description.

[0020] The above-described and other aspects, features, and advantages of specific embodiments of the present disclosure will become apparent from the following detailed description with reference to the accompanying drawings.

Brief Description of the Drawings

[0021]

Figure 1

Figure 2

Figure 3

Figure 4

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Figure 6

Figure 7

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Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

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Figure 17

Figure 18

Figure 19

Mode for Carrying Out the Invention

[0022] The terms used in the embodiments are selected as general terms that are currently widely used as much as possible while considering the functions in the present invention. However, this may vary depending on the intentions or precedents of those skilled in the art, the emergence of new technologies, etc. Also, in certain cases, there are terms arbitrarily selected by the applicant, and in such cases, the meaning thereof will be described in detail in the explanatory part of the corresponding invention. Therefore, the terms used in the present invention are not merely the names of the terms, but must be defined based on the meaning of the terms and the overall content of the present invention.

[0023] Throughout the specification, when any part states that a certain component "includes", this does not exclude other components unless there is a contrary description, but means that other components are further included. Also, terms such as "~ part" and "~ module" described in the specification mean units that process at least one function or operation, and these can be implemented by hardware or software or a combination of hardware and software.

[0024] Hereinafter, with reference to the accompanying drawings, the embodiments of the present invention will be described in detail so that those having ordinary knowledge in the technical field to which the present invention pertains can easily implement them. However, the present invention can be realized in various different forms and is not limited to the embodiments described here.

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[0026] FIGS. 1 to 3 are diagrams showing examples in which aerosol-generating articles are inserted into an aerosol-generating device.

[0027] Referring to FIG. 1, the aerosol-generating device 1 includes a battery 11, a control unit 12, and a heater 13. Referring to FIGS. 2 and 3, the aerosol-generating device 1 further includes an atomizer 14. Also, an aerosol-generating article 2 (for example, a roll-up tobacco) may be inserted into the internal space of the aerosol-generating device 1.

[0028] In the aerosol generating device 1 shown in FIGS. 1 to 3, the components related to the present embodiment are illustrated. Therefore, those having ordinary knowledge in the technical field related to the present embodiment will be able to understand that in addition to the components shown in FIGS. 1 to 3, the aerosol generating device 1 may further include different general-purpose components.

[0029] Also, in FIGS. 2 and 3, the heater 13 is shown as being included in the aerosol generating device 1, but the heater 13 may be omitted as necessary.

[0030] In FIG. 1, the battery 11, the control unit 12, and the heater 13 are shown as being arranged in a row. Also, in FIG. 2, the battery 11, the control unit 12, the vaporizer 14, and the heater 13 are shown as being arranged in a row. Further, in FIG. 3, the vaporizer 14 and the heater 13 are shown as being arranged in parallel. However, the internal structure of the aerosol generating device 1 is not limited to that shown in FIGS. 1 to 3. In other words, depending on the design of the aerosol generating device 1, the arrangements of the battery 11, the control unit 12, the heater 13, and the vaporizer 14 can be changed.

[0031] When the aerosol generating article 2 is inserted into the aerosol generating device 1, the aerosol generating device 1 can operate the heater 13 and / or the vaporizer 14 to generate an aerosol. The aerosol generated by the heater 13 and / or the vaporizer 14 passes through the aerosol generating article 2 and is transmitted to the user.

[0032] As necessary, the aerosol generating device 1 can heat the heater 13 even when the aerosol generating article 2 is not inserted into the aerosol generating device 1.

[0033] The battery 11 supplies the electric power used for the operation of the aerosol generator 1. For example, the battery 11 supplies electric power so that the heater 13 or the vaporizer 14 can be heated, and supplies the electric power necessary for the operation of the control unit 12. Further, the battery 11 may supply the electric power necessary for the operation of a display, a sensor, a motor, etc. installed in the aerosol generator 1.

[0034] The control unit 12 generally controls the operation of the aerosol generator 1. Specifically, the control unit 12 controls the operation of not only the battery 11, the heater 13, and the vaporizer 14 but also other components included in the aerosol generator 1. Further, the control unit 12 may check the state of each component of the aerosol generator 1 and determine whether the aerosol generator 1 is in an operable state.

[0035] The control unit 12 includes at least one processor. The processor may be realized as an array of a plurality of logic gates, or may be realized as a combination of a general-purpose microprocessor and a memory storing a program executable by this microprocessor. Also, those having ordinary knowledge in the technical field to which this embodiment belongs can understand that it can be realized by another form of hardware.

[0036] The heater 13 is heated by the electric power supplied from the battery 11. For example, when the aerosol generating article is inserted into the aerosol generator 1, the heater 13 may be disposed outside the aerosol generating article. Therefore, the heated heater 13 can raise the temperature of the aerosol generating substance in the aerosol generating article.

[0037] The heater 13 may be an electric resistance heater. For example, the heater 13 may include an electrically conductive track, and the heater 13 is heated when an electric current flows through the electrically conductive track. However, the heater 13 is not limited to the above-described example, and any heater that can heat to a desired temperature is applicable without limitation. Here, the desired temperature may be preset in the aerosol generating device 1 or may be set to a temperature desired by the user.

[0038] On the other hand, as a different example, the heater 13 may be an induction heating type heater. Specifically, the heater 13 may include an electrically conductive coil for heating the aerosol generating article by an induction heating method, and the aerosol generating article may include a susceptor that can be heated by the induction heating type heater.

[0039] For example, the heater 13 may include a tube-type heating element, a plate-type heating element, a needle-type heating element, or a rod-type heating element, and may heat the inside or outside of the aerosol generating article 2 according to the shape of the heating element.

[0040] Also, a plurality of heaters 13 may be arranged in the aerosol generating device 1. Here, the plurality of heaters 13 may be arranged so as to be inserted into the aerosol generating article 2, or may be arranged outside the aerosol generating article 2. Also, some of the plurality of heaters 13 may be arranged so as to be inserted into the aerosol generating article 2, and the rest may be arranged outside the aerosol generating article 2. Also, the shape of the heater 13 is not limited to the shapes shown in FIGS. 1 to 3, and may be manufactured in various shapes.

[0041] The vaporizer 14 heats the liquid phase composition to generate an aerosol, and the generated aerosol can be transmitted to the user through the aerosol generating article 2. In other words, the aerosol generated by the vaporizer 14 moves along the air flow path of the aerosol generating device 1, and the air flow path can be configured such that the aerosol generated by the vaporizer 14 passes through the aerosol generating article and is transmitted to the user.

[0042] For example, the vaporizer 14 includes, but is not limited to, a liquid storage part (e.g., a storage place), a liquid transfer means, and a heating element. For example, the liquid storage part, the liquid transfer means, and the heating element may be included in the aerosol generator 1 as independent modules.

[0043] The liquid storage part stores the liquid phase composition. For example, the liquid phase composition may be a liquid containing a tobacco-containing substance including a volatile tobacco fragrance component, or a liquid containing a non-tobacco substance. The liquid storage part may be manufactured so as to be detachable / attachable to the vaporizer 14, or may be manufactured integrally with the vaporizer 14.

[0044] For example, the liquid phase composition may include water, a solvent, ethanol, a plant extract, a fragrance, a flavoring agent, or a vitamin mixture. The fragrance may include, but is not limited to, menthol, peppermint, spearmint oil, and fragrance components of various fruits. The flavoring agent includes components that can provide various fragrances or flavors to the user. The vitamin mixture is a mixture in which at least one of vitamin A, vitamin B, vitamin C, and vitamin E is mixed, but is not limited thereto. Further, the liquid phase composition may include an aerosol-forming agent such as glycerin and propylene glycol.

[0045] The liquid transfer means can transfer the liquid phase composition of the liquid storage part to the heating element. For example, the liquid transfer means may be a wick such as cotton fiber, ceramic fiber, glass fiber, or porous ceramic, but is not limited thereto.

[0046] The heating element is an element for heating the liquid composition transmitted by the liquid transmission means. For example, the heating element includes, but is not limited to, a metal heating wire, a metal hot plate, a ceramic heater, etc. Further, the heating element may be composed of a conductive filament such as a nichrome wire and may be arranged in a structure wound around the liquid transmission means. The heating element is heated by current supply, transfers heat to the liquid composition in contact with the heating element, and can heat the liquid composition. As a result, an aerosol can be generated.

[0047] For example, the vaporizer 14 is referred to as, but not limited to, a cartomizer or an atomizer.

[0048] On the other hand, the aerosol generating device 1 may further include a general-purpose configuration in addition to the battery 11, the control unit 12, the heater 13, and the vaporizer 14. For example, the aerosol generating device 1 may include a display capable of outputting visual information and / or a motor for outputting tactile information. Further, the aerosol generating device 1 may include at least one sensor (such as a puff detection sensor, a temperature detection sensor, an insertion detection sensor for an aerosol generating article, etc.). Further, the aerosol generating device 1 can be manufactured in a structure that allows outside air to flow in or internal gas to flow out even when the aerosol generating article 2 is inserted.

[0049] Although not shown in FIGS. 1 to 3, the aerosol generating device 1 may constitute a system together with a separate cradle. For example, the cradle may be used for charging the battery 11 of the aerosol generating device 1. Or, the heater 13 may be heated in a state where the cradle and the aerosol generating device 1 are coupled.

[0050] The aerosol generating article 2 is similar to a general combustion-type aerosol generating article. For example, the aerosol generating article 2 is divided into a first part containing aerosol generating substances and a second part containing a filter or the like. Alternatively, the second part of the aerosol generating article 2 may also contain aerosol generating substances. For example, aerosol generating substances in the form of granules or capsules may be inserted into the second part.

[0051] The whole of the first part is inserted inside the aerosol generating device 1, and the second part is exposed to the outside. Alternatively, only a part of the first part may be inserted inside the aerosol generating device 1, or the whole of the first part and a part of the second part may be inserted. The user can inhale the aerosol while holding the second part in the mouth. Here, the aerosol is generated when outside air passes through the first part, and the generated aerosol is transmitted to the user's mouth through the second part.

[0052] As an example, outside air can flow in through at least one air passage formed in the aerosol generating device 1. For example, the opening and closing of the air passage formed in the aerosol generating device 1 and / or the size of the air passage can be adjusted by the user. Therefore, the amount of smoke, the smoking feeling, etc. can be adjusted by the user. As a different example, outside air may flow into the aerosol generating article 2 through at least one hole formed on the surface of the aerosol generating article 2.

[0053] Hereinafter, referring to FIGS. 4 and 5, an example of the aerosol generating article 2 will be described.

[0054] FIGS. 4 and 5 are diagrams showing examples of aerosol generating articles.

[0055] Referring to FIG. 4, the aerosol generating article 2 includes a tobacco rod 21 and a filter rod 22. The first part 21 described above with reference to FIGS. 1 to 3 includes the tobacco rod 21, and the second part 22 includes the filter rod 22.

[0056] In FIG. 4, the filter rod 22 is illustrated as a single segment, but it is not limited thereto. In other words, the filter rod 22 may be composed of a plurality of segments. For example, the filter rod 22 may include a segment for cooling the aerosol and a segment for filtering a predetermined component contained in the aerosol. Further, if necessary, the filter rod 22 may further include at least one segment for performing other functions.

[0057] The diameter of the aerosol generating article 2 is within the range of 5 mm to 9 mm, and the length may be about 48 mm, but it is not limited thereto. For example, the length of the tobacco rod 21 may be about 12 mm, the length of the first segment of the filter rod 22 may be about 10 mm, the length of the second segment of the filter rod 22 may be about 14 mm, and the length of the third segment of the filter rod 22 may be about 12 mm, but it is not limited thereto.

[0058] The aerosol generating article 2 is wrapped by at least one wrapper 24. At least one hole may be formed in the wrapper 24 for the outside air to flow in or the internal gas to flow out. As an example, the aerosol generating article 2 may be wrapped by one wrapper 24. As a different example, the aerosol generating article 2 may be repeatedly wrapped by two or more wrappers 24. For example, the tobacco rod 21 may be wrapped by the first wrapper 241, and the filter rod 22 may be wrapped by the wrappers 242, 243, 244. Then, the whole aerosol generating article 2 may be re-wrapped by a single wrapper 245. If the filter rod 22 is composed of a plurality of segments, each segment may be wrapped by the wrappers 242, 243, 244.

[0059] The first wrapper 241 and the second wrapper 242 can be manufactured from common filter paper. For example, the first wrapper 241 and the second wrapper 242 may be porous or non-porous wrapping paper. Also, the first wrapper 241 and the second wrapper 242 may be manufactured from oil-resistant papers and / or aluminum-aluminum composite paper packaging materials.

[0060] The third wrapper 243 may be manufactured from hard wrapping paper. For example, the basis weight of the third wrapper 243 is included within the range of 88 g / m 2 ~96 g / m 2 and preferably may be included within the range of 90 g / m 2 ~94 g / m 2 Also, the thickness of the third wrapper 243 is included within the range of 120 μm to 130 μm and preferably may be 125 μm.

[0061] The fourth wrapper 244 may be manufactured from oil-resistant hard wrapping paper. For example, the basis weight of the fourth wrapper 244 is included within the range of 88 g / m 2 ~96 g / m 2 and preferably may be included within the range of 90 g / m 2 ~94 g / m 2 Also, the thickness of the fourth wrapper 244 is included within the range of 120 μm to 130 μm and preferably may be 125 μm.

[0062] The fifth wrapper 245 may be manufactured from sterilized paper (MFW). Here, sterilized paper (MFW) means paper that is specially manufactured so that its tensile strength, water resistance, smoothness, etc. are enhanced compared to ordinary paper. For example, the basis weight of the fifth wrapper 245 is included within the range of 57 g / m 2 ~63 g / m 2 and preferably may be 60 g / m 2 Also, the thickness of the fifth wrapper 245 is included within the range of 64 μm to 70 μm and preferably may be 67 μm.

[0063] The fifth wrapper 245 can be filled with a predetermined substance. Here, silicon is given as an example of the predetermined substance, but it is not limited thereto. For example, silicon has properties such as heat resistance with little change due to temperature, oxidation resistance that does not oxidize, resistance to various chemicals, water repellency to water, or electrical insulation. However, even if it is not silicon, any substance having the above-described properties can be applied (or coated) to the fifth wrapper 245 without limitation.

[0064] The fifth wrapper 245 can prevent the phenomenon of the aerosol generating article 2 from burning. For example, if the tobacco rod 21 is heated by the heater 13, the aerosol generating article 2 may burn. Specifically, when the temperature rises above the ignition point of any one of the substances contained in the tobacco rod 21, the aerosol generating article 2 burns. Even in such a case, since the fifth wrapper 245 contains a non-combustible substance, the phenomenon of the aerosol generating article 2 burning is prevented.

[0065] In addition, the fifth wrapper 245 can prevent the aerosol generating device (for example, the holder) from being contaminated by the substance generated by the aerosol generating article 2. Depending on the user's puff, a liquid substance is generated inside the aerosol generating article 2. For example, when the aerosol generated by the aerosol generating article 2 is cooled by the outside air, a liquid substance (for example, moisture, etc.) is generated. By the fifth wrapper 245 packaging the aerosol generating article 2, it is possible to prevent the liquid substance generated inside the aerosol generating article 2 from leaking to the outside of the aerosol generating article 2.

[0066] The tobacco rod 21 contains aerosol generating substances. For example, the aerosol generating substances include, but are not limited to, at least one of glycerin, propylene glycol, ethylene glycol, dipropylene glycol, diethylene glycol, triethylene glycol, tetraethylene glycol, and oleyl alcohol. Further, the tobacco rod 21 can contain other additive substances such as flavoring agents, wetting agents, and / or organic acids. Also, a flavoring liquid such as menthol or a humectant may be added to the tobacco rod 21 by spraying it onto the tobacco rod 21.

[0067] The tobacco rod 21 can be manufactured in various ways. For example, the tobacco rod 21 may be manufactured from a sheet, or it may be manufactured from a strand. Also, the tobacco rod 21 may be manufactured from cut tobacco in which the tobacco sheet is finely cut. Further, the tobacco rod 21 may be surrounded by a heat conductive substance. For example, the heat conductive substance may be a metal foil such as an aluminum foil, but is not limited thereto. As an example, the heat conductive substance wrapping the tobacco rod 21 can evenly disperse the heat transmitted to the tobacco rod and improve the thermal conductivity applied to the tobacco rod, thereby improving the taste of the tobacco. Also, the heat conductive substance wrapping the tobacco rod 21 is heated by an induction heating type heater and functions as a susceptor. Here, although not shown in the drawings, the tobacco rod 21 may further include an additional susceptor in addition to the heat conductive substance wrapping the outside.

[0068] The filter rod 22 may be an acetyl cellulose filter. On the other hand, there is no limitation on the shape of the filter rod 22. For example, the filter rod 22 may be a cylindrical type rod, or it may be a tube type rod including a hollow inside. Also, the filter rod 22 may be a recess type rod. If the filter rod 22 is composed of a plurality of segments, at least one of the plurality of segments may be manufactured in a different shape.

[0069] The first segment of the filter rod 22 may be an acetyl cellulose filter. For example, the first segment may be a tubular structure having a hollow inside. When the heater 13 is inserted by the first segment, it is possible to prevent the phenomenon that the internal substance of the tobacco rod 21 shifts backward, and a cooling effect of the aerosol can also be generated. The diameter of the hollow included in the first segment is preferably within the range of 2 mm to 4.5 mm, but is not limited thereto.

[0070] The length of the first segment is preferably within the range of 4 mm to 30 mm, but is not limited thereto. Preferably, the length of the first segment is 10 mm, but is not limited thereto.

[0071] The hardness of the first segment can be adjusted by adjusting the content of the plasticizer during the production of the first segment. Further, the first segment may be manufactured by inserting a structure such as a film or a tube of the same or a release material inside (for example, a hollow).

[0072] The second segment of the filter rod 22 cools the aerosol generated by the heater 13 heating the tobacco rod 21. Therefore, the user can inhale the aerosol cooled at an appropriate temperature.

[0073] The length or diameter of the second segment can be determined variously according to the form of the aerosol generating article 2. For example, the length of the second segment may be appropriately adopted within the range of 7 mm to 20 mm. Preferably, the length of the second segment is about 14 mm, but is not limited thereto.

[0074] The second segment can be manufactured by weaving polymer fibers. In this case, a flavoring liquid may be applied to the fibers made of the polymer. Alternatively, the second segment may be manufactured by weaving together fibers made of a polymer and fibers with a flavoring liquid applied separately. Alternatively, the second segment may be formed by a wound polymer sheet.

[0075] For example, the polymer can be manufactured from a material selected from the group consisting of polyethylene (PE), polypropylene (PP), polyvinyl chloride (PVC), polyethylene terephthalate (PET), polylactic acid (PLA), acetyl cellulose (CA), and aluminum foil.

[0076] By forming the second segment from woven polymer fibers or wound polymer sheets, the second segment may include one or more channels extending in the longitudinal direction. Here, the channel means a passage through which gas (e.g., air or aerosol) passes.

[0077] For example, the second segment made of a wound polymer sheet may be formed from a material having a thickness between about 5 μm and about 300 μm, for example, between about 10 μm and about 250 μm. Also, the total surface area of the second segment may be between about 300 mm 2 / mm and about 1000 mm 2 / mm. Also, the aerosol cooling element may be formed from a material having a specific surface area between about 10 mm 2 / mg and about 100 mm 2 / mg.

[0078] On the other hand, the second segment may include a thread containing a volatile fragrance component. Here, the volatile fragrance component may be menthol, but is not limited thereto. For example, the thread may be filled with a sufficient amount of menthol to provide 1.5 mg or more of menthol to the second segment.

[0079] The third segment of the filter rod 22 may be an acetyl cellulose filter. The length of the third segment can be appropriately adopted within the range of 4 mm to 20 mm. For example, the length of the third segment may be about 12 mm, but is not limited thereto.

[0080] In the process of manufacturing the third segment, it may be manufactured such that a fragrance is generated by injecting a flavoring liquid into the third segment. Alternatively, a separate fiber coated with the flavoring liquid may be inserted into the third segment. The aerosol generated by the tobacco rod 21 is cooled by passing through the second segment of the filter rod 22, and the cooled aerosol is transmitted to the user through the third segment. Therefore, when a flavoring element is added to the third segment, an effect is produced in which the persistence of the fragrance transmitted to the user is enhanced.

[0081] Further, the filter rod 22 may include at least one capsule 23. Here, the capsule 23 may perform a function of generating a fragrance or a function of generating an aerosol. For example, the capsule 23 may have a structure in which a liquid containing a fragrance is wrapped with a film. The capsule 23 may have a spherical or cylindrical shape, but is not limited thereto.

[0082] Referring to FIG. 5, the aerosol generating article 3 further includes a shear plug 33. The shear plug 33 is disposed on one side of the tobacco rod 31 facing the filter rod 32. The shear plug 33 prevents the tobacco rod 31 from detaching externally and prevents the aerosol liquefied from the tobacco rod 31 during smoking from flowing into the aerosol generating device (for example, FIGS. 1 to 3).

[0083] The filter rod 32 includes a first segment 321 and a second segment 322. Here, the first segment 321 corresponds to the first segment of the filter rod 22 shown in FIG. 4, and the second segment 322 corresponds to the third segment of the filter rod 22 shown in FIG. 4.

[0084] The diameter and the overall length of the aerosol generating article 3 correspond to the diameter and the overall length of the aerosol generating article 2 shown in FIG. 4. For example, the length of the shear plug 33 may be about 7 mm, the length of the tobacco rod 31 may be about 15 mm, the length of the first segment 321 may be about 12 mm, and the length of the second segment 322 may be about 14 mm, but is not limited thereto.

[0085] The aerosol generating article 3 is wrapped by at least one wrapper 35. At least one hole through which outside air can flow in or internal gas can flow out can be formed in the wrapper 35. For example, the shear plug 33 is wrapped by the first wrapper 351, the tobacco rod 31 is wrapped by the second wrapper 352, the first segment 321 is wrapped by the third wrapper 353, and the second segment 322 is wrapped by the fourth wrapper 354. Then, the entire aerosol generating article 3 can be repackaged by the fifth wrapper 355.

[0086] Also, at least one perforation 36 can be formed in the fifth wrapper 355. For example, the perforation 36 is formed in the region wrapping the tobacco rod 31, but is not limited thereto. The perforation 36 serves to transfer the heat generated by the heater 13 shown in FIGS. 2 and 3 to the inside of the tobacco rod 31.

[0087] Also, the second segment 322 may contain at least one capsule 34. Here, the capsule 34 may perform a function of generating a fragrance or a function of generating an aerosol. For example, the capsule 34 may have a structure in which a liquid containing a fragrance is wrapped by a film. The capsule 34 has a spherical or cylindrical shape, but is not limited thereto.

[0088] The first wrapper 351 may be a general filter paper with a metal foil such as aluminum foil bonded thereto. For example, the overall thickness of the first wrapper 351 is included in the range of 45 μm to 55 μm, and may preferably be 50.3 μm. Also, the thickness of the metal foil of the first wrapper 351 is included in the range of 6 μm to 7 μm, and may preferably be 6.3 μm. Also, the weight of the first wrapper 351 is 2 ~55 g / m 2 and is included in the range of, and may preferably be 2 53 g / m.

[0089] The second wrapper 352 and the third wrapper 353 are manufactured from a general filter paper. For example, the second wrapper 352 and the third wrapper 353 may be porous or non-porous paper.

[0090] For example, the porosity of the second wrapper 352 may be 35000 CU, but it is not limited thereto. Also, the thickness of the second wrapper 352 is included in the range of 70 um to 80 um, and preferably may be 78 um. Further, the basis weight of the second wrapper 352 is included in the range of 20 g / m2 to 25 g / m 2 and preferably may be 23.5 g / m 2

[0091] For example, the porosity of the third wrapper 353 may be 24000 CU, but it is not limited thereto. Also, the thickness of the third wrapper 353 is included in the range of 60 um to 70 um, and preferably may be 68 um. Further, the basis weight of the third wrapper 353 is included in the range of 20 g / m 2 to 25 g / m 2 and preferably may be 21 g / m 2

[0092] The fourth wrapper 354 may be manufactured from a PLA laminated paper. Here, the PLA laminated paper means a triple-layer paper including a paper layer, a PLA layer, and a paper layer. For example, the thickness of the fourth wrapper 354 is included in the range of 100 um to 120 um, and preferably may be 110 um. Further, the basis weight of the fourth wrapper 354 is included in the range of 80 g / m 2 to 100 g / m 2 and preferably may be 88 g / m 2

[0093] The fifth wrapper 355 may be manufactured from a sterilized paper (MFW). Here, the sterilized paper (MFW) means a paper specially manufactured so that its tensile strength, water resistance, smoothness, etc. are enhanced compared to general paper. For example, the basis weight of the fifth wrapper 355 is included in the range of 57 g / m 2 to 63 g / m 2 and preferably may be 60 g / m 2 ​​​It may also be the case. Further, the thickness of the fifth wrapper 355 is included within the range of 64 μm to 70 μm, and preferably may be 67 μm.

[0094] The fifth wrapper 355 may contain a predetermined substance added therein. Here, silicon is cited as an example of the predetermined substance, but it is not limited thereto. For example, silicon has properties such as heat resistance with little change due to temperature, oxidation resistance that is not oxidized, resistance to various chemicals, water repellency to water, or electrical insulation. However, even if it is not silicon, as long as it is a substance having the above-described properties, it can be applied (or coated) to the fifth wrapper 355 without limitation.

[0095] The shear plug 33 can be manufactured from acetyl cellulose. As an example, the shear plug 33 may be manufactured by adding a plasticizer (for example, triacetin) to acetyl cellulose tow. The mono denier of the filaments constituting the acetyl cellulose tow may be included within the range of 1.0 to 10.0, and preferably may be included within the range of 4.0 to 6.0. More preferably, the mono denier of the filaments of the shear plug 33 may be about 5.0. Also, the cross-section of the filaments constituting the shear plug 33 may be Y-shaped. The total denier of the shear plug 33 may be included within the range of 20,000 to 30,000, and preferably may be included within the range of 25,000 to 30,000. More preferably, the total denier of the shear plug 33 may be 28,000.

[0096] Also, if necessary, the shear plug 33 may include at least one channel, and the cross-sectional shape of the channel can be manufactured in various ways.

[0097] The tobacco rod 31 corresponds to the tobacco rod 21 described above with reference to FIG. 4. Therefore, the specific description of the tobacco rod 31 will be omitted hereinafter.

[0098] The first segment 321 can be manufactured from acetyl cellulose. For example, the first segment may be a tubular structure with a hollow interior. The first segment 321 can be manufactured by adding a plasticizer (e.g., triacetin) to acetyl cellulose tow. For example, the monodenier and total denier of the first segment 321 may be the same as those of the shear plug 33.

[0099] The second segment 322 can be manufactured from acetyl cellulose. The monodenier of the filaments constituting the second segment 322 may be included in the range of 1.0 to 10.0, preferably, it may be included in the range of 8.0 to 10.0. More preferably, the monodenier of the filaments of the second segment 322 may be 9.0. Also, the cross-section of the filaments of the second segment 322 may be Y-shaped. The total denier of the second segment 322 may be included in the range of 20000 to 30000, preferably, it may be 25000.

[0100] FIG. 6 is a block diagram of an aerosol generating device 400 according to another embodiment.

[0101] The aerosol generating device 400 includes a control unit 410, a detection unit 420, an output unit 430, a battery 440, a heater 450, a user input unit 460, a memory 470, and a communication unit 480. However, the internal structure of the aerosol generating device 400 is not limited to that shown in FIG. 6. That is, depending on the design of the aerosol generating device 400, some of the configurations shown in FIG. 6 may be omitted or new configurations may be further added, which would be understandable to those having ordinary knowledge in the technical field related to this embodiment.

[0102] The detection unit 420 detects the state of the aerosol generating device 400 or the state around the aerosol generating device 400, and transmits the detected information to the control unit 410. Based on the detected information, the control unit 410 can control the aerosol generating device 400 so that various functions such as operation control of the heater 450, restriction of smoking, determination of the presence or absence of insertion of aerosol generating articles (e.g., cigarettes, cartridges, etc.), and notification display are executed.

[0103] The detection unit 420 includes at least one of a temperature sensor 422, an insertion detection sensor 424, and a puff sensor 426, but is not limited thereto.

[0104] The temperature sensor 422 detects the temperature at which the heater 450 (or the aerosol generating substance) heats. The aerosol generating device 400 may include a separate temperature sensor for detecting the temperature of the heater 450, or the heater 450 itself may serve as the temperature sensor. Alternatively, the temperature sensor 422 may be arranged around the battery 440 to monitor the temperature of the battery 440.

[0105] The insertion detection sensor 424 can detect the insertion and / or removal of the aerosol generating article. For example, the insertion detection sensor 424 may include at least one of a film sensor, a pressure sensor, a light sensor, a resistive sensor, a capacitive sensor, an inductive sensor, and an infrared sensor, and can detect a signal change due to the insertion and / or removal of the aerosol generating article.

[0106] The puff sensor 426 can detect the user's puff based on various physical changes in the air flow path or air flow channel. For example, the puff sensor 426 may detect the user's puff based on any one of a temperature change, a flow change, a voltage change, and a pressure change.

[0107] In addition to the sensors 422 to 426 described above, the detection unit 420 may further include at least one of an on / humidity sensor, a barometric pressure sensor, a magnetic sensor, an acceleration sensor, a gyroscope sensor, a position sensor (e.g., GPS), a proximity sensor, and an RGB sensor (illuminance sensor). Since the function of the angle sensor can be intuitively inferred by those skilled in the art from its name, a specific description thereof is omitted.

[0108] The output unit 430 outputs information regarding the state of the aerosol generator 400 and provides it to the user. The output unit 430 includes at least one of a display unit 432, a haptic unit 434, and an acoustic output unit 436, but is not limited thereto. When the display unit 432 and the touch pad form a layer structure and are configured as a touch screen, the display unit 432 may be used as an input device in addition to an output device.

[0109] The display unit 432 can visually provide information regarding the aerosol generator 400 to the user. For example, the information regarding the aerosol generator 400 means various information such as the charging / discharging state of the battery 440 of the aerosol generator 400, the preheating state of the heater 450, the insertion / removal state of the aerosol article, or the state in which the use of the aerosol generator 400 is restricted (e.g., detection of an abnormal article), and the display unit 432 may output the information to the outside. The display unit 432 may be, for example, a liquid crystal display panel (LCD), an organic light emitting display panel (OLED), or the like. Further, the display unit 432 may be in the state of an LED light emitting element.

[0110] The haptic unit 434 can convert an electrical signal into a mechanical stimulus or an electrical stimulus and provide information regarding the aerosol generator 400 to the user tactilely. For example, the haptic unit 434 may include a motor, a piezoelectric element, or an electrical stimulation device.

[0111] The audio output unit 436 can aurally provide the user with information regarding the aerosol generator 400. For example, the audio output unit 436 can convert an electrical signal into an acoustic signal and output it externally.

[0112] The battery 440 supplies the electric power used for the operation of the aerosol generator 400. The battery 440 can supply power so that the heater 450 can be heated. Also, the battery 440 supplies the electric power necessary for the operation of different components (for example, the detection unit 420, the output unit 430, the user input unit 460, the memory 470, and the communication unit 480) provided in the aerosol generator 400. The battery 440 may be a rechargeable battery or a disposable battery. For example, the battery 440 may be a lithium polymer (LiPoly) battery, but is not limited thereto.

[0113] The heater 450 is supplied with power from the battery 440 and heats the aerosol generating substance. Although not shown in FIG. 6, the aerosol generator 400 may further include a power conversion circuit (for example, a DC / DC converter) that converts the power of the battery 440 and supplies it to the heater 450. Also, when the aerosol generator 400 generates aerosol by an induction heating method, the aerosol generator 400 may further include a DC / AC converter that converts the DC power supply of the battery 440 into an AC power supply.

[0114] The control unit 410, the detection unit 420, the output unit 430, the user input unit 460, the memory 470, and the communication unit 480 can be powered by the battery 440 and perform their functions. Although not shown in FIG. 6, it may further include a power conversion circuit, such as an LDO (low dropout) circuit or a voltage regulator circuit, that converts the power of the battery 440 and supplies it to each component.

[0115] In one embodiment, the heater 450 may be formed of any suitable electrically resistive material. For example, suitable electrically resistive materials may include, but are not limited to, metals or metal alloys such as titanium, zirconium, tantalum, platinum, nickel, cobalt, chromium, hafnium, niobium, molybdenum, tungsten, tin, gallium, manganese, iron, copper, stainless steel, nichrome, etc. Further, the heater 450 may be implemented as a metal wire, a metal plate with an electrically conductive track disposed thereon, a ceramic heating element, etc., but is not limited thereto.

[0116] In one embodiment, the heater 450 may be an induction heating type heater. For example, the heater 450 may generate heat through a magnetic field applied by a coil and may include a susceptor for heating the aerosol product substance.

[0117] In one embodiment, the heater 450 may include a plurality of heaters. For example, the heater 450 may include a first heater for heating the aerosol generating article and a second heater for heating the liquid phase.

[0118] The user input unit 460 receives information input from the user or outputs information to the user. For example, the user input unit 460 includes, but is not limited to, a keypad, a dome switch, a touch pad (capacitive touch type, pressure resistive film type, infrared detection type, surface acoustic wave conduction type, integral tension measurement type, piezoelectric effect type, etc.), a jog wheel, a jog switch, etc. Also, although not shown in FIG. 6, the aerosol generating device 400 further includes a connection interface such as a USB (universal serial bus) interface, and can be connected to other external devices via a connection interface such as a USB interface to transmit and receive information or charge the battery 440.

[0119] Memory 470 may store data processed by the control unit 410 and data to be processed, as hardware for storing various data processed within the aerosol generator 400. Memory 470 may include at least one type of storage medium among flash memory type, hard disk type, multimedia card micro type, card type memory (such as SD or XD memory, etc.), RAM (random access memory), SRAM (static random access memory), ROM (read-only memory), EEPROM (electrically erasable programmable read-only memory), PROM (programmable read-only memory), magnetic memory, magnetic disk, and optical disk. Memory 470 may store data such as the operating time of the aerosol generator 400, the maximum puff count, the current puff count, at least one temperature profile, and data regarding the user's smoking pattern.

[0120] The communication unit 480 includes at least one component for communication with other electronic devices. For example, the communication unit 480 includes a short-range communication unit 482 and a wireless communication unit 484.

[0121] The short-range wireless communication unit 482 includes, but is not limited to, a Bluetooth (registered trademark) communication unit, a BLE (Bluetooth (registered trademark) Low Energy) communication unit, a Near Field Communication unit, a WLAN (Wi-Fi) communication unit, a Zigbee (registered trademark) communication unit, an infrared (IrDA, infrared Data Association) communication unit, a WFD (Wi-Fi Direct) communication unit, a UWB (ultra wideband) communication unit, an Ant+ communication unit, etc.

[0122] The wireless communication unit 484 includes, but is not limited to, a cellular network communication unit, an Internet communication unit, a computer network (e.g., LAN or WAN) communication unit, etc. The wireless communication unit 484 can identify and authenticate the aerosol generator 400 within the communication network using subscriber information (e.g., International Mobile Subscriber Identifier (IMSI)).

[0123] The control unit 410 controls the overall operation of the aerosol generator 400. In one embodiment, the control unit 410 may include at least one processor. The processor may be implemented as an array of multiple logic gates, or can be implemented as a combination of a general-purpose microprocessor and a memory storing a program executable by the microprocessor. Also, those with ordinary knowledge in the technical field to which this embodiment belongs will understand that it can be implemented with other forms of hardware.

[0124] The control unit 410 can control the temperature of the heater 450 by controlling the supply of power from the battery 440 to the heater 450. For example, the control unit 410 can control the power supply by controlling the switching of the switching element between the battery 440 and the heater 450. As a different example, according to the control command of the control unit 410, a direct heating circuit may control the power supply to the heater 450.

[0125] The control unit 410 analyzes the results detected by the detection unit 420 and then controls the subsequent processes. For example, the control unit 410 can control the power supplied to the heater 450 so that the operation of the heater 450 is disclosed or terminated based on the results detected by the detection unit 420. As a different example, the control unit 410 can control the amount of power supplied to the heater 450 and the time during which the power is supplied so that the heater 450 can be heated to a predetermined temperature or maintain an appropriate temperature based on the results detected by the detection unit 420.

[0126] Based on the results detected by the detection unit 420, the control unit 410 can control the output unit 430. For example, when the number of puffs counted via the puff sensor 426 reaches a preset number, the control unit 410 can notify the user that the aerosol generator 400 will end soon via at least one of the display unit 432, the haptic unit 434, and the acoustic output unit 436.

[0127] In one embodiment, the control unit 410 can control the power supply time and / or the power supply amount to the heater 450 according to the state of the aerosol generating article detected by the detection unit 420. For example, when the aerosol generating article is in a clasped state, the control unit 410 can control the power supply time to the induction coil and increase the preheating time compared to when the aerosol generating article is in a general state.

[0128] One embodiment may also be implemented in the form of a recording medium including computer-executable instructions such as program modules executed by a computer. The computer-readable recording medium may be any usable medium accessible by a computer, including all volatile and non-volatile media, removable and non-removable media. Also, the computer-readable recording medium can include all computer storage media and communication media. The computer storage media may include all volatile and non-volatile, removable and non-removable media implemented by any method or technology for storing information such as computer-readable instructions, data structures, program modules, or other data. The communication media typically includes modulated data signals such as computer-readable instructions, data structures, program modules, or other data, or other transmission mechanisms, and includes any information transmission medium.

[0129] Figures 7 to 11 are diagrams showing the operations of a method for manufacturing a heating element according to an embodiment. The order of operations for manufacturing the heating element is not limited to the order described in this document, and at least one additional operation may be included during the operations, any one of the described operations may be omitted, or the order of some operations may be changed.

[0130] Referring to FIG. 7, a method for manufacturing a heating element 550 includes an operation of providing a substrate 551. The substrate 551 may have a plate shape with surfaces opposite to each other (for example, a surface oriented in the +Z direction and a surface oriented in the -Z direction). At least one surface of the substrate 551 (for example, the surface oriented in the +Z direction) may be formed as a substantially flat surface.

[0131] In one embodiment, the substrate 551 may be formed from various materials. For example, the substrate 551 may be formed from glass, silicon (Si), silicon oxide (SiO2), sapphire, polystyrene, polymethyl methacrylate, and / or any other material suitable for heat conduction. In any embodiment, the substrate 551 may be formed by any one or a combination of glass, silicon (Si), silicon oxide (SiO2), and sapphire. In any embodiment, the substrate 551 may include a material having a relatively low heat transfer coefficient. This allows heat to be locally transferred to a partial region on the substrate 551.

[0132] In one embodiment, the substrate 551 exhibits electrical conductivity. In one embodiment, the substrate 551 exhibits electrical insulation.

[0133] In one embodiment, the substrate 551 may be formed from a material having any thermal conductivity suitable for use in the environment in which the heating element 550 is disposed. For example, the substrate 551 may have a thermal conductivity of about 0.6 W / mK or less, about 1 W / mK to about 2 W / mK, about 2 W / mK to about 5 W / mK, about 5 W / mK to about 10 W / mK, about 10 W / mK to about 100 W / mK, about 100 W / mK to about 200 W / mK at a pressure of 1 bar and a temperature of 25°C.

[0134] In one embodiment, the substrate 551 can have a relatively low thermal conductivity. In other words, the thermal conductivity of the substrate 551 can be substantially the same as or less than that of other components of the heating element 550 (e.g., the metal prism 554). The substrate 551 having a relatively low thermal conductivity can reduce heat dissipation by the substrate 551 and increase the amount of heat transfer to the target. The substrate 551 can have a thermal conductivity of, for example, about 45 W / mK or less, about 40 W / mK or less, about 35 W / mK or less, about 30 W / mK or less, about 25 W / mK or less, about 20 W / mK or less, about 15 W / mK or less, about 10 W / mK or less, about 5 W / mK or less, about 2 W / mK or less, or about 1 W / mK or less at a pressure of 1 bar and a temperature of 25°C.

[0135] Referring to FIG. 8, a method for manufacturing the heating element 550 includes the operation of applying a plurality of beads 552 on one surface of the substrate 551 (e.g., the surface oriented in the +Z direction). The plurality of beads 552 can be patterned in a monolayer (i.e., substantially a single layer) on one surface of the substrate 551.

[0136] In one embodiment, the plurality of beads 552 can be deposited on the substrate 551 in any suitable manner. For example, the plurality of beads 552 can be deposited by physical vapor deposition, chemical vapor deposition, atomic layer deposition, and / or any other suitable method. In any embodiment, the plurality of beads 552 can be deposited by physical vapor deposition.

[0137] In one embodiment, the plurality of beads 552 can be applied at a substantially low heat-resistant temperature. As an example, the plurality of beads 552 may be applied at a heat-resistant temperature of about 110 °C or lower, about 100 °C or lower, about 90 °C or lower, about 80 °C or lower, about 70 °C or lower, about 60 °C or lower, about 50 °C or lower, about 40 °C or lower, or about 30 °C or lower. As an example, the plurality of beads 552 may be applied at a heat-resistant temperature of about 20 °C or higher, about 30 °C or higher, about 40 °C or higher, about 50 °C or higher, about 60 °C or higher, about 70 °C or higher, or about 80 °C or higher. As an example in either case, the plurality of beads 552 may be applied at a heat-resistant temperature close to normal temperature (about 25 °C).

[0138] In one embodiment, the plurality of beads 552 can have a structure having a substantially curved surface. For example, the plurality of beads 552 may be respectively formed on spheres having a circular or elliptical cross-sectional shape. In one embodiment, the plurality of beads 552 may be formed on a solid having a polygonal cross-sectional shape.

[0139] In one embodiment, some of the plurality of beads 552 may be arranged in contact with each other. In one embodiment, the plurality of beads 552 may be arranged to form a region between some (for example, three) adjacent beads 552.

[0140] In one embodiment, the plurality of beads 552 can be applied on the substrate 551 in a regular arrangement. For example, the plurality of beads 552 includes a plurality of first beads 552A arranged in a first direction (for example, + / −X direction) of the substrate 551, and a plurality of second beads 552B located in a second direction (for example, + / −Y direction) intersecting the first direction of the substrate 551 from the plurality of first beads 552A and arranged in the first direction of the substrate 551. In any embodiment, when looking at the centers of the plurality of first beads 552A and the centers of the plurality of second beads 552B in one direction (for example, + / −Y direction) of the substrate 551, the plurality of first beads 552A and the plurality of second beads 552B may be arranged so as not to coincide.

[0141] In one embodiment, the plurality of beads 552 may be formed from a styrene resin, a (meth)acrylic resin, an imide resin, and / or a copolymer thereof. In any embodiment, the plurality of beads 552 may be formed from polymethyl methacrylate, polyethyl methacrylate, poly-n-butyl methacrylate, poly-sec-butyl methacrylate, poly-tert-butyl methacrylate, polymethyl acrylate, polyisopropyl acrylate, polycyclohexyl methacrylate, poly-2-methylcyclohexyl methacrylate, polydicyclopentanyloxyethyl methacrylate, polyisobornyl methacrylate, polycyclohexyl acrylate, poly-2-methylcyclohexyl acrylate, polydicyclopentenyl acrylate, polydicyclopentanyl acrylate, polydicyclopentenyl methacrylate, polydicyclopentanyl methacrylate, polydicyclopentanyloxyethyl acrylate, polyisobornyl acrylate, polyphenyl methacrylate, polyphenyl acrylate, polybenzyl acrylate, polybenzyl methacrylate, poly-2-hydroxyethyl methacrylate, polystyrene, poly-α-methylstyrene, poly-m-methylstyrene, poly-p-methylstyrene, vinyltoluene, 1,3-butadiene, isoprene, 2,3-dimethyl-1,3-butadiene, polyimide, and / or a combination thereof. In any embodiment, the plurality of beads 552 may be formed from polystyrene or silica. In any embodiment, the plurality of beads 552 may be formed from polystyrene.

[0142] In one embodiment, the plurality of beads 552 may have an average maximum diameter of about 10 nm or more, about 50 nm or more, about 90 nm or more, about 100 nm or more, about 150 nm or more, about 200 nm or more, about 300 nm or more, about 450 nm or more, or about 500 nm or more. In any embodiment, the plurality of beads 552 may have an average maximum diameter of about 450 nm or more.

[0143] In one embodiment, the plurality of beads 552 may have an average maximum diameter of about 1,000 nm or less, about 900 nm or less, about 800 nm or less, about 700 nm or less, about 600 nm or less, or about 550 nm or less. In any embodiment, the plurality of beads 552 may have an average maximum diameter of about 600 nm or less.

[0144] Referring to FIG. 9, a method for manufacturing the heating element 550 includes an operation of reducing the size of the plurality of beads 552 on the substrate 551.

[0145] In one embodiment, the reduced size (e.g., average maximum diameter) of the plurality of beads 552 is about 360 nm or less, about 350 nm or less, about 340 nm or less, about 330 nm or less, about 320 nm or less, about 310 nm or less, or about 300 nm or less. In one embodiment, the reduced size (e.g., average maximum diameter) of the plurality of beads 552 may be about 290 nm or more, about 300 nm or more, about 310 nm or more, about 320 nm or more, about 330 nm or more, or about 340 nm or more.

[0146] In one embodiment, the plurality of beads 552 may have substantially the same shape as the shape before its size is reduced. For example, the plurality of beads 552 may be held in a spherical shape having a circular or elliptical cross-sectional shape.

[0147] In one embodiment, the size of the plurality of beads 552 is reduced by any suitable method. For example, the size of the plurality of beads 552 may be reduced by an etching process (e.g., reactive ion etching (RIE), ion milling, and / or any other etching). Reactive ion etching may be selected as an advantageous process when considering that the free electrons of the metal particles are concentrated in the edge area of the metal prism (e.g., metal prism 554). In one embodiment, the size of the plurality of beads 552 may be reduced by immersing the plurality of beads 552 at least partially in a solvent.

[0148] In one embodiment, at least some of the plurality of beads 552 having a reduced size may be physically separated from each other. Some of the plurality of beads 552 may be offset without contacting each other to form a gap therebetween.

[0149] Referring to FIG. 10, a method for manufacturing the heating element 550 includes an operation of depositing a plurality of metal particles 553 on one surface of the substrate 551 (for example, the surface oriented in the +Z direction).

[0150] In one embodiment, the plurality of metal particles 553 can have a nanoscale size. For example, the plurality of metal particles 553 may have an average maximum diameter of about 1 um or less. In any embodiment, the plurality of metal particles 553 may have an average maximum diameter of about 700 nm or less, about 600 nm or less, about 500 nm or less, about 400 nm or less, about 300 nm or less, about 200 nm or less, about 150 nm or less, or about 100 nm or less.

[0151] In one embodiment, the plurality of metal particles 553 can be deposited on the substrate 551 and / or the plurality of beads 552 by any suitable deposition method. For example, the plurality of metal particles 553 may be deposited by sputtering, ion beam deposition, thermal evaporation, chemical vapor deposition, plasma deposition, and / or any other suitable deposition method.

[0152] In one embodiment, the plurality of metal particles 553 are deposited on a first deposition region A1 including the exposed regions of the plurality of beads 552 located on one surface of the substrate 551, and a second deposition region A2 including at least a partial region of one surface of the substrate 551 and / or the region between the plurality of beads 552. In any embodiment, the substrate 551 includes a non-deposition region A3 where the plurality of beads 552 are not located and the plurality of metal particles 553 are not deposited.

[0153] In one embodiment, the plurality of metal particles 553 may be formed of any material suitable for generating heat. For example, the plurality of metal particles 553 may include at least one of gold, silver, copper, palladium, platinum, aluminum, titanium, nickel, chromium, iron, cobalt, manganese, rhodium, and ruthenium, or a combination thereof.

[0154] In one embodiment, the plurality of metal particles 553 may be formed of any material suitable for interacting with light in a determined wavelength band (e.g., the visible light wavelength band, i.e., from about 380 nm to about 780 nm) to generate heat. For example, the plurality of metal particles 553 may include at least one of gold, silver, copper, palladium, and platinum, or a combination thereof.

[0155] In any embodiment, the plurality of metal particles 553 can be formed of a metal material having an average maximum absorbance. Here, the average maximum absorbance can be defined as the absorbance having a substantial peak depending on the wavelength band. The wavelength band corresponding to the absorbance is understood as the wavelength band at which the plurality of metal particles 553 resonate. For example, the plurality of metal particles 553 may be formed of a metal material having an average maximum absorbance in a wavelength band between about 430 nm and about 450 nm, between about 480 nm and about 500 nm, between about 490 nm and about 510 nm, between about 500 nm and about 520 nm, between about 550 nm and about 570 nm, between about 600 nm and about 620 nm, between about 620 nm and about 640 nm, between about 630 nm and about 650 nm, between about 640 nm and about 660 nm, between about 680 nm and about 700 nm, or between about 700 nm and about 750 nm. The average maximum absorbance of the plurality of metal particles 553 may vary depending on, in addition to the metal material, the type of the substrate 551, the size and / or the shape of the structure (e.g., a metal prism) formed by the plurality of metal particles 553.

[0156] In one embodiment, the deposition thickness of the plurality of metal particles 553 is about 20 nm or less. In a preferred embodiment, the deposition thickness of the plurality of metal particles 553 is about 10 nm or less. When the plurality of metal particles 553 are deposited on the substrate 551 with a thickness exceeding 10 nm, the exothermic reaction is reduced in the structure (e.g., metal prism) formed by the plurality of metal particles 553. When the thickness of the structure formed by the plurality of metal particles 553 exceeds 10 nm, the possibility of heat being taken away from the periphery of the heating element 550 increases, and thereby the thermal efficiency of the heating element 550 can be reduced.

[0157] Referring to FIG. 11, a method for manufacturing the heating element 550 includes an operation of removing a plurality of beads (e.g., beads 552 in FIG. 10). When the plurality of beads are removed, a plurality of holes H surrounded by the metal prism 554 are formed on the substrate 551. The holes H may have a shape corresponding to the cross-sectional shape of the beads (e.g., substantially circular or elliptical).

[0158] Removing the plurality of beads can be performed by any suitable method. In one embodiment, the plurality of beads can be dissolved by a solvent by being immersed in the solvent. For example, the solvent may include one or more of toluene, acetone, benzene, phenol, ether, and / or any other suitable inorganic solvent or any organic solvent. In one embodiment, the plurality of beads may be removed by an etching process (e.g., reactive ion etching (RIE), ion milling, and / or any other etching).

[0159] FIG. 12 is a plan view of a part of a heating element according to one embodiment, and FIG. 13 is a cross-sectional view of the heating element taken along line 13-13 shown in FIG. 12 according to one embodiment.

[0160] Referring to FIGS. 12 and 13, the heating element 650 is configured to generate heat by surface plasmon resonance. "Surface plasmon resonance" refers to the collective oscillation of electrons transmitted by the interface between metal particles and a medium. For example, the collective oscillation of electrons in metal particles may be generated by light transmitted outside the heating element 650. The excitation of electrons in metal particles generates thermal energy, and the generated thermal energy can be transmitted within the environment to which the heating element 650 is applied.

[0161] The heating element 650 includes a substrate 651. The substrate 651 includes a first surface 651A (e.g., a facing surface) and a second surface 651B (e.g., a rubbing surface) opposite to the first surface 651A.

[0162] The heating element 650 includes a metal prism 654. The metal prism 654 may have a net-like shape. The metal prism 654 may form a plurality of holes H as a substantially single structure. The metal prism 654 includes a first base surface 654A facing the first surface 651A of the substrate 651, a second base surface 654B opposite to the first base surface 654A, and a plurality of side surfaces 654C1, 654C2 between the first base surface 654A and the second base surface 654B. The first surface 651A of the substrate 651 and the plurality of side surfaces 654C1, 654C2 of the metal prism 654 can define a plurality of holes H.

[0163] In one embodiment, the first base surface 654A and the second base surface 654B are substantially parallel to each other.

[0164] In one embodiment, the first base surface 654A and / or the second base surface 654B can be formed as a substantially flat surface.

[0165] In one embodiment, the distance between the first base surface 654A and the second base surface 654B (e.g., the thickness of the metal prism 654) is about 10 nm or less. Having a thickness of the metal prism 654 exceeding 10 nm can reduce the exothermic reaction of the plurality of metal particles forming the metal prism 654 and consequently reduce the thermal efficiency of the heating element 650.

[0166] In one embodiment, the plurality of side surfaces 654C1, 654C2 of the metal prism 654 may be oriented in different directions from each other. For example, the first side surface 654C1) may be oriented in a first direction (e.g., the first radial direction), and the second side surface 654C2 may be oriented in a second direction (e.g., the second radial direction) that is substantially opposite to the first direction.

[0167] In one embodiment, at least one of the plurality of side surfaces 654C1, 654C2 may be formed as a substantially curved surface. In any embodiment, the plurality of side surfaces 654C1, 654C2 may be formed as curved surfaces having substantially the same curvature. In one embodiment, the curvature of any one of the plurality of side surfaces 654C1, 654C2 may be different from the curvature of the other one of the side surfaces.

[0168] In one embodiment, the plurality of side surfaces 654C1, 654C2 may be formed as curved surfaces that are concave toward the central portion of the metal prism 654. In one embodiment, at least one of the plurality of side surfaces 654C1, 654C2 may be formed as a curved surface that is convex from the central portion of the metal prism 654.

[0169] In one embodiment, the metal prism 654 includes two side surfaces. For example, the metal prism 654 may have a substantially semi-circular or near semi-circular shape.

[0170] In one embodiment, some of the plurality of holes H may be separated from each other. Some of the holes H may be separated by a part of the metal prism 654. In any embodiment, some of the plurality of holes H may be connected to each other. For example, a part of the region of the metal prism 654 is not connected to each other, and the holes H on both sides may be connected with reference to that region.

[0171] In one embodiment, the plurality of holes H may have an average maximum diameter D of about 10 nm or more, about 50 nm or more, about 90 nm or more, about 100 nm or more, about 150 nm or more, about 200 nm or more, about 300 nm or more, about 350 nm or more, about 450 nm or more, or about 500 nm or more. In any embodiment, the plurality of holes H may have an average maximum diameter D of about 450 nm or more.

[0172] In one embodiment, the plurality of holes H may have an average maximum diameter D of about 1,000 nm or less, about 900 nm or less, about 800 nm or less, about 700 nm or less, about 600 nm or less, or about 550 nm or less. In any embodiment, the plurality of holes H may have an average maximum diameter D of about 600 nm or less.

[0173] FIG. 14 is a graph comparing the average absorbance of the heating elements according to one embodiment.

[0174] Referring to FIG. 14, the left graph shows the absorbance by wavelength of a heating element (e.g., the heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of glass, which are formed using polystyrene beads having a diameter of about 460 nm. The resonance wavelength of the heating element is shown at about 640 nm.

[0175] The middle graph shows the absorbance by wavelength of a heating element (e.g., the heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of glass, which are formed by reducing the size of polystyrene beads having a diameter of about 460 nm using reactive ion etching. The resonance wavelength of the heating element is shown at about 640 nm.

[0176] The graph on the right shows the absorbance by wavelength of a heating element (e.g., heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of glass, formed using polystyrene beads having a diameter of about 800 nm. The resonance wavelength of the heating element is shown at about 700 nm.

[0177] FIG. 15 is a graph comparing the average absorbance of heating elements according to one embodiment.

[0178] Referring to FIG. 15, the graph on the left shows the absorbance by wavelength of a heating element (e.g., heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of sapphire, formed using polystyrene beads having a diameter of about 460 nm. The resonance wavelength of the heating element is shown at about 640 nm.

[0179] The middle graph shows the absorbance by wavelength of a heating element (e.g., heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of sapphire, formed by reducing the size of polystyrene beads having a diameter of about 460 nm using reactive ion etching. The resonance wavelengths of the heating element are shown at about 610 nm and about 680 nm.

[0180] The graph on the right shows the absorbance by wavelength of a heating element (e.g., heating element 650 in FIG. 12) including a metal prism made of gold and a substrate made of sapphire, formed using polystyrene beads having a diameter of about 800 nm. The resonance wavelength of the heating element is not shown in the visible light wavelength band.

[0181] Referring to the graphs of FIGS. 14 and 15, it is confirmed that the resonance wavelength of the heating element increases as the size of the beads increases.

[0182] FIG. 16 is a diagram showing a heating element according to one embodiment.

[0183] Referring to FIG. 16, the heating element 750 includes a substrate 751 including a first surface 751A and a second surface 751B, a surface plasmon resonance (SPR) structure 754 (e.g., metal prisms 554, 654) located on the first surface 751A, and a reflective layer 755 located on the second surface 751B. The heating element 750 may be configured to receive light L on the substrate 751 and / or the SPR structure 754.

[0184] In one embodiment, the SPR structure 754 can be realized in at least one metal prism (e.g., metal prisms 554, 654) including a plurality of metal particles. In one embodiment, the SPR structure 754 may include a plurality of metal particles coated on the first surface 751A of the substrate 751. In one embodiment, the SPR structure 754 may include at least one metal film formed of a metallic material.

[0185] The light source that emits light L can be separated from the heating element 750 by a determined distance. For example, the distance between the light source and the heating element 750 may be determined to be about 40 cm or less, about 35 cm or less, about 30 cm or less, about 25 cm or less, about 20 cm or less, about 15 cm or less, about 10 cm or less, or about 5 cm or less. The distance between the light source and the heating element 750 may be determined to be about 5 cm or more, about 10 cm or more, about 15 cm or more, about 20 cm or more, or about 25 cm or more.

[0186] The light L may form a spat LS on the substrate 751 and / or the SPR structure 754. For example, the spat LS may have a size of about 2 mm or less, about 1.5 mm or less, about 1 mm or less, or about 0.5 mm or less. The spat LS may have a size of about 0.2 mm or more, about 0.4 mm or more, about 0.6 mm or more, or about 0.8 mm or more.

[0187] The reflection layer 755 is configured to reflect the light L that passes through the substrate 751 to the substrate 751 and / or the SPR structure 754. Reflecting the light L that passes through the substrate 751 by the substrate 751 and the SPR structure 754 can increase the light utilization efficiency of the heating element 750 by using the reflected light, and thereby improve the heating efficiency.

[0188] In one embodiment, the reflection layer 755 may be formed over the entire second surface 751B of the substrate 751. In one embodiment, the reflection layer 755 may be locally formed on the second surface 751B of the substrate 751. For example, the reflection layer 755 may be realized as a single reflection area or a plurality of reflection areas in a partial region of the second surface 751B of the substrate 751.

[0189] The reflection layer 755 may be formed of any material suitable for reflecting the light L. In one embodiment, the reflection layer 755 is formed of a metallic material. For example, the reflection layer 755 may be formed of at least one or a combination of gold, silver, copper, and any other metallic material suitable for reflection.

[0190] The reflection layer 755 has any thickness suitable for reflecting the light L. The thickness of the reflection layer 755 is determined to be a value suitable for substantially totally reflecting the light L. For example, the thickness of the reflection layer 755 is about 15 nm or less, about 12 nm or less, about 10 nm or less, about 8 nm or less, or about 5 nm or less. As a preferred example, the reflection layer 755 may have a thickness of about 10 nm. The thickness of the reflection layer 755 is determined by the refractive index of the substrate 751, the thickness of the substrate 751, the refractive index of the reflection layer 755, and / or any other parameter.

[0191] In one embodiment, the reflection layer 755 can be in direct contact with the second surface 751B of the substrate 751. In one embodiment, the reflection layer 755 may be spaced apart from the second surface 751B of the substrate 751, and a medium (e.g., air) may be located between the second surface 751B and the reflection layer 755.

[0192] In one embodiment, the heating element 750 includes an absorption layer 756 positioned on the reflection layer 755. The absorption layer 756 may be configured to absorb some of the transmitted light that is not reflected by the reflection layer 755 and passes through the reflection layer 755. The absorption layer 756 may increase the light utilization efficiency of the heating element 750.

[0193] In one embodiment, the absorption layer 756 may be at least partially coated on the reflection layer 755.

[0194] In one embodiment, the absorption layer 756 has a substantially high emissivity. In any embodiment, the absorption layer 756 may have an emissivity close to 1. The absorption layer 756 may be realized in a structure and / or material that is substantially close to a black body. For example, the absorption layer 756 may be realized in a structure having at least one hole through which light can enter and be substantially permanently reflected inside. As another example, the absorption layer 756 may be realized in a black coloring agent. As a further example, the absorption layer 756 may be realized in a black matrix. In one embodiment, the absorption layer 756 may be realized in a gray body or a white body.

[0195] In one embodiment, the absorption layer 756 includes a material having heat resistance. For example, the absorption layer 756 may include a material configured to withstand an environment with a heat resistance temperature of about 750 °C or higher, about 800 °C or higher, about 850 °C or higher, about 900 °C or higher, about 950 °C or higher, or about 1,000 °C or higher.

[0196] In one embodiment, the heating element 750 includes a thermal imager 760 configured to generate a thermal image. For example, the thermal imager 760 may generate an image including the thermal distribution of the heating element 750. In one embodiment, the thermal imager 760 may be included in a component external to the heating element 750 (e.g., the aerosol generator 800 in FIG. 19).

[0197] FIG. 17 is a graph comparing the temperature rise of heating elements according to an embodiment.

[0198] Referring to FIG. 17, the first heating element H1 includes a substrate made of a glass material, a metal film having a thickness of 10 nm made of a gold material, and an absorption layer. The substrate made of a glass material has a thermal conductivity of about 0.8 W / mK. The second heating element H2 includes a substrate made of a sapphire material, a metal film having a thickness of 10 nm made of a gold material, and an absorption layer. The substrate made of a sapphire material has a thermal conductivity of about 46.06 W / mK. For the first heating element H1, the relative increase in temperature is relatively large as the laser output increases, while for the second heating element H2, the relative increase in temperature is relatively small as the laser output increases. This indicates that a substrate with high thermal conductivity absorbs a large amount of heat generated, reducing the thermal efficiency of the heating element.

[0199] FIG. 18 is a graph comparing the temperature rise of heating elements according to an embodiment.

[0200] Referring to FIG. 18, the first heating element H1 was manufactured using polystyrene beads having a diameter of about 460 nm. The size of the polystyrene beads is substantially retained. After the polystyrene beads are removed, the metal prism of the first heating element H1 has a structure in which a plurality of metal prisms are spaced apart from each other. The first heating element H1 includes an absorption layer.

[0201] The second heating element H2 was manufactured using polystyrene beads having a diameter of about 800 nm. The size of the polystyrene beads is substantially retained. After the polystyrene beads are removed, the metal prism of the second heating element H2 has a structure in which a plurality of metal prisms are spaced apart from each other. The second heating element H2 includes an absorption layer.

[0202] The third heating element H3 was manufactured using polystyrene beads having a diameter of about 460 nm. The size of the polystyrene beads was reduced to about 300 nm using reactive ion etching, and then metal particles were deposited to remove the polystyrene beads. The third heating element H3 has a metal prism structure realized by a single structure having a net shape. The third heating element H3 includes an absorption layer.

[0203] The first heating element H1 and the second heating element H2 showed similar temperature increase rates depending on the laser output. On the other hand, the third heating element H3 achieved a higher temperature compared to the first heating element H1 and the second heating element H2 for the same laser output. It is confirmed that a heating element including a net-shaped metal prism manufactured by reducing the size of polystyrene beads using reactive ion etching can achieve increased thermal efficiency.

[0204] FIG. 19 is a diagram showing an aerosol generating device according to an embodiment.

[0205] Referring to FIG. 19, the aerosol generating device 800 includes at least one heating element 850 configured to heat an aerosol generating article (for example, aerosol generating articles 2, 3), and at least one light source 855 configured to emit light toward at least one heating element 850. On the other hand, FIG. 19 shows that the aerosol generating device 800 includes a control unit 810 configured to control the heating element 850 and / or the light source 855, and a battery 840 configured to supply electrical energy to the control unit 810, but other components may be included or omitted.

[0206] In one embodiment, the aerosol generating device 800 includes a single heating element 850. The heating element 850 can at least partially surround a cavity in which an aerosol generating article is disposed. The heating element 850 may have a structure in which, for example, the substrates 551, 651, 751 have at least partially curved surfaces.

[0207] In one embodiment, the aerosol generator 800 includes a plurality of heating elements 850. The plurality of heating elements 850 may be arranged in different portions with respect to a cavity in which an aerosol generating article can be disposed. The metal materials of the metal prisms included in the plurality of heating elements 850 may be the same or different from each other.

[0208] In one embodiment, the light source 855 can be configured to transmit an optical signal at an angle determined toward the heating element 850. For example, the light source 855 may transmit an optical signal at an angle at which total internal reflection occurs on the surface of the heating element 850. In one embodiment, the light source 855 may transmit an optical signal at an arbitrary angle toward the heating element 850.

[0209] In one embodiment, the light source 855 may be configured to transmit light in the ultraviolet band, visible light band, and / or infrared band. In any embodiment, the light source 855 may be configured to transmit light in the visible light band (e.g., from about 380 nm to about 780 nm).

[0210] In any embodiment, the light source 855 may be configured to transmit light in a band corresponding to the material of the metal particles of the metal prism included in the heating element 850. For example, the light source 855 may transmit light in a wavelength band corresponding to the average maximum absorbance by the material of the metal particles.

[0211] In one embodiment, the light source 855 includes a light emitting diode and / or a laser. The light emitting diode and / or the laser have a type and / or size suitable for being included in the aerosol generator 800. As an example, the laser may include a solid state laser and / or a semiconductor laser.

[0212] In one embodiment, the aerosol generator 800 includes a plurality of light sources 855. The plurality of light sources 855 may be realized by the same type of light source. In one embodiment, at least a part of the plurality of light sources 855 may be realized by different types of light sources.

[0213] In one embodiment, at least one of the plurality of light sources 855 may be configured to irradiate a part of the heating element 850.

[0214] In one embodiment, the portion of the heating element 850 irradiated by any one of the plurality of light sources 855 may be different from the portion of the heating element 850 irradiated by another one of the light sources 855. For example, the plurality of light sources 855 may irradiate different portions of a single heating element 850, or may irradiate a plurality of heating elements 850 respectively.

[0215] In one embodiment, the plurality of light sources 855 can be configured to irradiate substantially simultaneously. In one embodiment, the irradiation timing of any one of the plurality of light sources 855 may be different from the irradiation timing of another one of the light sources 855.

[0216] In one embodiment, the plurality of light sources 855 can irradiate the heating element 850 during substantially the same period of time. In one embodiment, the irradiation time of any one of the plurality of light sources 855 may be different from the irradiation time of another one of the light sources 855.

[0217] In one embodiment, the plurality of light sources 855 can transmit light in substantially the same wavelength band. In one embodiment, the band of light irradiated by any one of the plurality of light sources 855 may be different from the band of light irradiated by another one of the light sources 855.

[0218] In one embodiment, the plurality of light sources 855 can irradiate the heating element 850 at substantially the same illuminance. In one embodiment, the illuminance of any one of the plurality of light sources 855 may be different from the illuminance of another one of the light sources 855.

[0219] The embodiments of this document are exemplary and are not intended to be limiting. Various changes can be made to the details of the present disclosure, including the appended claims and their equivalents. Of the embodiments described herein, any embodiment may be used in combination with any other embodiment described herein.

Claims

1. A substrate, a metal prism formed with at least one hole on the substrate and configured to generate heat by surface plasmon resonance, comprising, the hole not penetrating the substrate, a heating element.

2. The heating element according to claim 1, wherein the at least one hole is surrounded by the substrate and the metal prism.

3. The heating element according to claim 1, wherein the metal prism forms a plurality of holes separated from each other.

4. The heating element according to claim 1, wherein the at least one hole substantially includes a circular or elliptical shape.

5. The heating element according to claim 1, wherein the at least one hole has a diameter in the range of about 290 nm to about 360 nm.

6. The heating element according to claim 1, wherein the metal prism includes a first base surface facing the substrate, a second base surface opposite to the first base surface, and a plurality of side surfaces between the first base surface and the second base surface defining the at least one hole.

7. The heating element according to claim 6, wherein the distance between the first base surface and the second base surface is in the range of more than 0 nm to about 10 nm or less.

8. The heating element according to claim 1, wherein the metal prism includes metal particles configured to resonate with light having a wavelength in the range between about 380 nm and about 780 nm.

9. The heating element according to claim 1, wherein the substrate has a thermal conductivity in the range of more than 0 W / mK to about 45 W / mK or less.

10. A light source, a heating element according to claim 1 configured to receive light from an electrical light source, comprising, an aerosol generator.

11. A substrate having a thermal conductivity in the range of more than 0 W / mK to about 45 W / mK or less, a metal prism disposed on the substrate, formed with at least one hole on the substrate, and configured to generate heat by surface plasmon resonance, comprising, the hole not penetrating the substrate, a heating element.

12. The heating element according to claim 11, wherein the substrate includes a glass material.

13. A method for manufacturing a heating element for generating heat by surface plasmon resonance, comprising: applying a plurality of beads on a substrate; reducing the size of the plurality of beads; depositing a plurality of metal particles on the substrate and / or the plurality of beads; removing the plurality of beads, comprising, A hole is formed in the substrate by an operation of removing the plurality of beads, wherein the hole does not penetrate the substrate, a method. **Claim 14** The operation of reducing the size of the plurality of beads includes an operation of etching the plurality of beads using reactive ion etching, the method according to claim 13. **Claim 15** The operation of reducing the size of the plurality of beads includes an operation of reducing the diameter of the beads in a range of about 290 nm to about 360 nm, the method according to claim 13.

Citation Information

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