Mask transfer device and mask conveyance system including the same

Abstract

This mask delivery device (2) transfers a mask (120), to be used when solder is printed onto a substrate, onto an accommodating unit (100) that accommodates the mask (120). The mask delivery device (2) comprises: a mobile mechanism (11) that includes a guide (21) that extends in a fixed direction along one surface of the accommodating unit (100) that has an opening for loading and unloading the mask (120), and a mobile body (23) that moves along the guide (21); and a multi-joint robot (12) that is supported on the mobile body (23) and transfers the mask (120) between the accommodating unit (100) and a placement location spaced away from the accommodating unit (100).

Description

Technical Field

[0001] The present invention relates to a mask delivery device for delivering a mask used when printing solder on a substrate, and a mask transport system including the same.

Background Art

[0002] On a substrate on which electronic components are mounted, paste-like solder, i.e., cream solder, is previously applied to locations where the electronic components are to be mounted. As a device for applying this cream solder to the substrate, a cream solder printer is known. In a cream solder printer, generally, a sheet-like mask having mask openings corresponding to a predetermined printing pattern is used. That is, cream solder is supplied from above the mask mounted on the surface of the substrate, and the supplied cream solder is spread by a squeegee, whereby the cream solder is printed on the substrate through the mask openings.

[0003] At a substrate manufacturing site, generally, a plurality of types of masks are used according to the types of substrates to be manufactured. For example, a storage shelf for storing various masks is facilitated, and the necessary mask is taken out from this storage shelf and used in a cream solder printer. In this case, after the mask is taken out from the storage shelf, it passes through a cream solder printer, a cleaning area, an inspection area, etc., and then is returned to the storage shelf again. The more types of masks there are, the more frequently the masks enter and exit the storage shelf. For this reason, a technology capable of efficiently transferring the masks to and from the storage shelf has been demanded.

[0004] Although this is not a technique related to mask transfer, the following Patent Document 1 discloses a plate cylinder replacement device for replacing a plate cylinder used in gravure printing. Specifically, the plate cylinder replacement device of this Patent Document 1 includes a storage shelf (storage unit) for storing the plate cylinder, a pallet transport means for transporting a pallet on which the plate cylinder is placed between the inlet / outlet of the storage shelf and a predetermined transfer station, a plate cylinder replacement cart that is movable along a rail passing through a standby position on the side of the printing machine, and a plate cylinder transfer crane for transferring the plate cylinder between the pallet at the transfer station and the plate cylinder replacement cart.

[0005] If mask transfer is performed using a device similar to that of Patent Document 1 above, that is, if mask transfer is performed using a transfer crane or a replacement cart with a fixed moving direction, etc., the degree of freedom in setting the mask transfer route is low, and there is a possibility that the mask cannot be transferred efficiently.

Prior Art Documents

Patent Documents

[0006]

Patent Document 1

Summary of the Invention

[0007] The present invention has been made in view of the above circumstances, and an object thereof is to provide a mask delivery device capable of efficiently transferring a mask to and from a storage unit that houses the mask, and a mask transport system including the same.

[0008] As a means for solving the above problems, a mask delivery device according to an aspect of the present invention is a device for transferring a mask to and from a storage unit that houses a mask used when printing solder on a substrate, and includes a guide extending in a certain direction along one surface of the storage unit having an opening for inserting and removing the mask, and a moving body that moves along the guide, and a multi-joint robot that is supported by the moving body and transfers the mask between the storage unit and a placement site away from the storage unit.

[0009] A mask transfer system according to another aspect of the present invention includes the above-described mask delivery device, a movable carrier having a mask mounting portion capable of mounting the mask as the placement site, and a conveyance control unit that moves the carrier to a predetermined target position when the mask is transferred from the storage unit to the mask mounting portion by the mask delivery device.

[0010] According to the mask delivery device and the mask transfer system of the present invention, the transfer of the mask to the storage unit in which the mask is stored can be efficiently performed.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

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Figure 9B

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DETAILED DESCRIPTION OF THE INVENTION

[0012] [Overall Configuration of Mask Transfer System] FIGS. 1 and 2 are a perspective view and a plan view showing a mask transfer system 1 according to an embodiment of the present invention. The mask transfer system 1 shown in this figure is a system for transferring a mask 120 used in a cream solder printer (hereinafter simply referred to as a printer) outside the figure. The printer is a device for applying cream solder (hereinafter simply referred to as solder), which is a paste-like solder, to a substrate on which electronic components are mounted by printing. Further, the mask 120 used in the printer is a sheet-like jig having a mask opening corresponding to a predetermined printing pattern. That is, in the printer, the mask 120 is placed on the surface of the substrate, and solder is supplied and spread from above the mask 120, so that the solder is printed on the substrate through the mask opening. In the present embodiment, the mask transfer system 1 is used to transfer the mask 120 for such applications.

[0013] As shown in FIG. 3, the mask 120 has a mask body 121 and a frame 122 for holding the mask body 121. The mask body 121 is a metal sheet body (metal mask) in which the mask opening is formed. The frame 122 is a frame surrounding the mask body 121 and is formed to have a thickness larger than that of the mask body 121.

[0014] As shown in FIGS. 1 and 2, the mask transfer system 1 includes a mask transfer device 2 and an AGV 3. The mask transfer device 2 is a device that transfers the mask 120 between the storage shelf 100 in which the mask 120 is stored and the AGV 3. The AGV 3 is an automated guided vehicle that can move between the mask transfer device 2 and the printing machine or the like. Note that the storage shelf 100 corresponds to the "storage unit" in the present invention, and the AGV 3 corresponds to the "transfer body" in the present invention.

[0015] The storage shelf 100 is a shelf having a plurality of (here, two) storage spaces divided vertically, and is installed on the floor surface on which the AGV 3 travels. As shown in FIG. 1, the storage shelf 100 includes a pair of left and right side plates 101, a top plate 102 that connects the upper ends of both side plates 101, a bottom plate 103 that connects the vicinity of the lower ends of the pair of side plates 101, and a shelf plate 104 that connects the pair of side plates 101 at a height between the top plate 102 and the bottom plate 103. An upper storage space having a rectangular opening P1 is formed by each side plate 101, the top plate 102, and the shelf plate 104, and a lower storage space having a rectangular opening P2 is formed by each side plate 101, the bottom plate 103, and the shelf plate 104. Each of the openings P1 and P2 opens forward, which is the side where the mask transfer device 2 is disposed. In other words, the storage shelf 100 has a front surface 110 in which the upper and lower openings P1 and P2 are formed.

[0016] A plurality of masks 120 are stored side by side in the upper and lower storage spaces of the storage shelf 100, respectively. The mask 120 can be taken in and out of each storage space through the openings P1 and P2 of the front surface 110 of the storage shelf 100. Lane members 105 that define the storage positions of the masks 120 are respectively attached to the upper surfaces of the bottom plate 103 and the shelf plate 104. The lane member 105 has a plurality of lanes L1 each formed by a concave groove corresponding to the width of the mask 120 (specifically, the width of the frame body 122), that is, a concave groove capable of receiving one edge of the mask 120. The mask 120 is stored in the storage shelf 100 in a state of being arranged at equal intervals left and right by being arranged at the positions defined by these lanes L1.

[0017] The mask transfer device 2 includes a transfer mechanism 11 composed of an orthogonal robot disposed close to the front surface 110 of the storage shelf 100, and an articulated robot 12 supported by the transfer mechanism 11.

[0018] Here, a direction parallel to the vertical axis is defined as the Z-axis direction, a direction parallel to the front surface 110 of the storage shelf 100 and orthogonal to the Z-axis direction is defined as the X-axis direction, and a direction orthogonal to both the X-axis direction and the Z-axis direction is defined as the Y-axis direction. The transfer mechanism 11 includes a base 21 extending in the X-axis direction installed on the floor surface in the vicinity of the front side (+Y side) of the storage shelf 100, a first slider 22 movably supported in the X-axis direction on the base 21, a tower 23 fixed to the first slider 22 and extending in the Z-axis direction (vertical direction), and a second slider 24 movably supported in the Z-axis direction on the tower 23. That is, the transfer mechanism 11 is an orthogonal robot that can move on the XZ plane in the vicinity of the front side of the storage shelf 100.

[0019] Although detailed illustration is omitted, the base 21 includes a guide rail that slidably supports the first slider 22 in the X-axis direction, a first actuator M1 (FIG. 7) that moves the first slider 22 along the guide rail, and a housing that houses the first actuator M1 and the like. The first actuator M1 may include, for example, an electric motor that drives a ball screw mechanism, or may utilize a linear motor. The first slider 22 can move over a predetermined range in the X-axis direction on the upper surface of the base 21 in response to the drive of the first actuator M1 in the base 21.

[0020] The structure of the tower 23 is the same as that of the base 21. That is, the tower 23 includes a guide rail that slidably supports the second slider 24 in the Z-axis direction, a second actuator M2 (FIG. 7) that moves the second slider 24 along the guide rail, and a housing that houses the second actuator M2 and the like. The second slider 24 can move over a predetermined range in the Z-axis direction on the side surface (+X side surface) of the tower 23 in response to the drive of the second actuator M2 in the tower 23.

[0021] The multi-joint robot 12 is a so-called 3-axis scalar robot, and includes a fixed portion 31 fixed to the second slider 24 of the moving mechanism 11, a first arm 32 pivotally supported by the fixed portion 31, a second arm 33 pivotally supported by the first arm 32, a third arm 34 pivotally supported by the second arm 33, and a chuck 35 attached to the tip of the third arm 34.

[0022] The first arm 32, the second arm 33, and the third arm 34 are each rotatable about an axis parallel to the Z-axis direction (vertical direction). That is, the first arm 32 is rotatable with respect to the fixed portion 31 about a first axis AX1 in the vertical direction, the second arm 33 is rotatable with respect to the first arm 32 about a second axis AX2 in the vertical direction, and the third arm 34 is rotatable with respect to the second arm 33 about a third axis AX3 in the vertical direction.

[0023] As shown in FIG. 7 described later, the multi-joint robot 12 includes first to third motors M3 to M5 which are drive sources for rotating the first to third arms 32 to 34 described above. The first motor M3 is a motor for rotating the first arm 32 about the first axis AX1, the second motor M4 is a motor for rotating the second arm 33 about the second axis AX2, and the third motor M5 is a motor for rotating the third arm 34 about the third axis AX3.

[0024] The chuck 35 is a holder for holding the mask 120 when taking the mask 120 in and out of the storage shelf 100. The chuck 35 may be of any type as long as it can hold the mask 120. In the present embodiment, as also shown in FIG. 4, a type of chuck 35 that holds the mask 120 by sandwiching it from above and below is used. That is, the chuck 35 includes a pair of upper and lower holding pieces 35a that can be separated from and contacted with each other, and an actuator M6 (FIG. 7) for changing the distance between both holding pieces 35a.

[0025] A first camera 51 is attached to the tip of the multi-joint robot 12. The first camera 51 is a camera for imaging ID codes (mask code Q1 and shelf code Q2) described later. In the present embodiment, the first camera 51 is attached to a side portion of the third arm 34 at a position adjacent to the chuck 35.

[0026] In the mask transfer device 2 described above, the tower 23 that supports the multi-joint robot 12 corresponds to the "moving body" in the present invention. Further, the base 21 that supports the tower 23 so as to be movable in the X-axis direction corresponds to the "guide" in the present invention.

[0027] FIG. 5 is an enlarged front view of the storage shelf 100. As shown in this figure, ID codes (Q1, Q2) are attached to the storage shelf 100 and the masks 120 stored therein, respectively. That is, the shelf code Q2 is attached to the position corresponding to each lane L1 in the storage shelf 100, and the mask code Q1 is attached to the peripheral surface of the mask 120 arranged in each lane L1. Specifically, the mask code Q1 is attached to a surface on one side of the frame body 122 of the mask 120, which is the side (+Y side) exposed to the front surface 110 of the storage shelf 100. Further, the shelf code Q2 is attached to the positions corresponding to each lane L1 on the front surfaces of the top plate 102 and the shelf plate 104 of the storage shelf 100. The mask code Q1 is a code assigned for each type of mask 120 to identify the type of the mask 120, and the shelf code Q2 is a code assigned to each lane L1 of the storage shelf 100 to specify the storage position of the mask 120. Here, the type of the mask 120 refers to, for example, the case where the masks 120 are classified according to the difference in the pattern of the mask openings formed in the mask body 121.

[0028] FIG. 6 is a side view of the AGV 3. As shown in FIG. 6 and FIGS. 1 and 2 above, the AGV 3 includes a vehicle body 41, a plurality of wheels 42 that movably support the vehicle body 41, a mask mounting portion 43 attached to the upper part of the vehicle body 41, a traveling motor 44 (FIG. 7) that drives the wheels 42, and a locking mechanism 45 attached to the front portion of the vehicle body 41. In this embodiment, the left side in FIG. 6 when the AGV 3 is viewed from the side is defined as the "front" of the AGV 3, and the opposite side is defined as the "rear". Also, the direction orthogonal to the plane of FIG. 6 is defined as the width direction of the AGV 3.

[0029] The mask mounting portion 43 is a placement area where the mask 120 transferred to the AGV 3 is placed, and is a member for holding the mask 120 in an upright state (see FIG. 6). The mask mounting portion 43 is an L-shaped member in side view having a bottom portion 43a fixed to the upper surface of the front portion of the vehicle body 41 and an upright portion 43b extending upward from the rear end of the bottom portion 43a. A plurality of lanes L2 formed by concave grooves corresponding to the width of the mask 120 (specifically, the width of the frame body 122) are formed at equal intervals in the width direction of the AGV 3 on the bottom portion 43a. One edge of the mask 120 is received in any one of the lanes L2, whereby the mask 120 is held in an upright state at a predetermined position on the mask mounting portion 43.

[0030] The locking mechanism 45 is a mechanism for locking the mask 120 mounted on the mask mounting portion 43. Specifically, the locking mechanism 45 includes a fixing portion 45a fixed to the front end surface 41a of the vehicle body 41, a locking plate 45b slidably supported by the fixing portion 45a, and an actuator (not shown) that slides the locking plate 45b up and down with respect to the fixing portion 45a. When the mask 120 is locked by the locking mechanism 45, the locking plate 45b is slid upward with respect to the fixing portion 45a, whereby the mask 120 on the mask mounting portion 43 (bottom portion 43a) is sandwiched and locked between the locking plate 45b and the upright portion 43b.

[0031] As shown in FIGS. 1 and 2, when transferring the mask 120 between the AGV 3 and the storage shelf 100, the AGV 3 waits at a location close to one end of the base 21 of the moving mechanism 11. Specifically, the AGV 3 waits in a region on the floor surface axially adjacent to the tip 21a, which is the +X side end of the base 21 extending in the X-axis direction. At this waiting location, the AGV 3 stops in a posture where the front end surface 41a of the vehicle body 41 faces the tip 21a of the base 21 so that the mask mounting portion 43 is close to the tip 21a of the base 21.

[0032] As shown in FIG. 1, above the AGV 3 at the waiting location, a second camera 52 is arranged. The second camera 52 is a camera for imaging the mask mounting portion 43 of the AGV 3 to check the availability of the mask mounting portion 43.

[0033] [Control System] FIG. 7 is a block diagram showing the control system of the mask transfer system 1 of the present embodiment. As shown in this figure, the mask transfer device 2 includes a robot controller C1 that controls the operations of the moving mechanism 11 and the articulated robot 12. Further, the mask transfer system 1 includes a transfer controller C2 that controls the operation of the AGV 3. The robot controller C1 corresponds to the "robot control unit" in the present invention, and the transfer controller C2 corresponds to the "transfer control unit" in the present invention.

[0034] The robot controller C1 and the transfer controller C2 are each a control device mainly composed of a microcomputer including a processor (CPU) that performs calculations, a memory such as a ROM and a RAM, and various input / output buses. The robot controller C1 and the transfer controller C2 are electrically connected wirelessly or by wire so as to be able to communicate with each other. In FIG. 7, the block representing the transfer controller C2 is shown outside the block of the AGV 3, but the transfer controller C2 may be built in the AGV 3.

[0035] The robot controller C1 is electrically connected to each part of the moving mechanism 11 and the articulated robot 12. Specifically, the robot controller C1 is electrically connected to the first actuator M1 and the second actuator M2 of the moving mechanism 11, and is also electrically connected to the first motor M3, the second motor M4, the third motor M5, and the actuator M6 of the articulated robot 12. The robot controller C1 causes the moving mechanism 11 and the articulated robot 12 to perform desired operations through the control of these devices. For example, the robot controller C1 controls the actuators M1 and M2 so that the first slider 22 and the second slider 24 of the moving mechanism 11 move to desired positions respectively. Also, the robot controller C1 controls the motors M3 to M5 so that the first arm 32, the second arm 33, and the third arm 34 of the articulated robot 12 rotate at desired angles, and controls the actuator M6 so that the chuck 35 performs desired operations such as holding the mask 120.

[0036] The robot controller C1 is also electrically connected to the first camera 51 and the second camera 52. The imaging data from each of the cameras 51 and 52 is input into the robot controller C1 respectively.

[0037] The conveyance controller C2 is electrically connected to the traveling motor 44 and the locking mechanism 45 of the AGV 3. That is, the conveyance controller C2 controls the traveling motor 44 so that the AGV 3 travels along a desired route or stops at a desired position. Also, the conveyance controller C2 controls the actuator built in the locking mechanism 45 so that the locking plate 45b of the locking mechanism 45 of the AGV 3 moves up and down appropriately.

[0038] [Control Example] The mask transfer system 1 configured as described above is operated to transfer the mask 120 among a plurality of locations, including a storage shelf 100 (FIG. 1) that houses the mask 120 and a printing machine that performs solder printing using the mask 120. Further, as part of the transfer of the mask 120, control is performed to transfer the mask 120 between the storage shelf 100 and the AGV 3. For example, using the mask transfer device 2, control is performed to take out the mask 120 from the storage shelf 100 and transfer it to the AGV 3, or to take out the mask 120 from the AGV 3 and transfer it to the storage shelf 100. FIG. 8 is a flowchart showing an example of the transfer control of the mask 120 between the storage shelf 100 and the AGV 3. Specifically, FIG. 8 shows the control procedures performed by the robot controller C1 and the transfer controller C2 when transferring the mask 120 from the storage shelf 100 to the AGV 3. Regarding the control when transferring the mask 120 from the AGV 3 to the storage shelf 100, basically only the transfer source and the transfer destination are swapped, so the explanation thereof is omitted here.

[0039] When the control shown in FIG. 8 starts, the robot controller C1 determines whether an instruction to transfer the mask 120 from the storage shelf 100 to a predetermined target position has been issued (step S1). Such a transfer instruction can be issued, for example, through a production management application that comprehensively manages the production of a substrate, including solder printing on the substrate and component mounting. Further, the target position, which is the transfer destination of the mask 120, is typically the printing machine where the mask 120 is actually used, but an inspection site for inspecting the mask 120 or a cleaning site for cleaning the mask 120 can also be the target position.

[0040] If it is determined YES in step S1 and it is confirmed that a mask transfer instruction has been issued, the robot controller C1 determines whether the AGV 3 is ready to wait (step S2). That is, based on communication with the transfer controller C2 that controls the AGV 3, the robot controller C1 determines whether the AGV 3 has already moved to the waiting location shown in FIGS. 1 and 2.

[0041] When it is determined as NO in the step S2 and it is confirmed that the AGV 3 is in a standby state, the transfer controller C2 moves the AGV 3 to the standby location (step S3).

[0042] On the other hand, when it is determined as YES in the step S2 and it is confirmed that the AGV 3 is in a standby state, the robot controller C1 moves the articulated robot 12 to the lane L1 in the storage shelf 100 where the shelf position associated with the specified type of mask 120, that is, the specific type of mask 120 to be transferred according to the instruction in the step S1, is stored (step S4). This control is performed based on the relationship between the mask code Q1 and the shelf code Q2 stored in advance in the storage unit of the robot controller C1.

[0043] That is, in the storage unit of the robot controller C1, map data associating the mask code Q1 and the shelf code Q2 shown in FIG. 5 is stored as data for knowing which type of mask 120 is stored in which lane L1 of the storage shelf 100. As this map data, default data set at the start of production is used while being appropriately updated. In step S4, the robot controller C1 identifies, based on the map data, the lane L1 in the storage shelf 100 in which the specified type of mask 120 is stored, and moves the articulated robot 12 to that lane L1. Specifically, the robot controller C1 identifies, from the map data, the shelf code Q2 associated with the mask code Q1 corresponding to the specified type of mask 120, and identifies the lane L1 corresponding to the identified shelf code Q2 as the lane in which the specified type of mask 120 is stored. Then, the articulated robot 12 is moved to the identified lane L1. For example, if the identified lane L1 is the nth lane from the left in the upper (or lower) row of the storage shelf 100, the articulated robot 12 is moved to the position of that nth lane. In addition, when there are a plurality of masks 120 of the same type, that is, when there are a plurality of lanes L1 for storing the specified type of mask 120, one lane is appropriately selected from among them, and the articulated robot 12 is moved to the position of the selected lane. Hereinafter, the lane that becomes the movement destination of the articulated robot 12 as described above is appropriately referred to as the "storage lane of the specified mask 120" or the "storage lane of the movement destination".

[0044] FIG. 9A is a plan view showing a state where the articulated robot 12 is moved to the storage lane of the specified mask 120. As shown in this figure, the robot controller C1 controls the positions of the sliders 22, 24 of the movement mechanism 11 and the angles of the respective arms 32 to 33 of the articulated robot 12 so that the chuck 35 of the articulated robot 12 moves to the storage lane of the specified mask 120.

[0045] Next, the robot controller C1 acquires each ID code of the mask 120 and its storage lane (step S5). That is, the robot controller C1 controls the first camera 51 attached to the tip of the articulated robot 12 to image (acquire) the shelf code Q2 (FIG. 5) attached to the storage lane of the destination and the mask code Q1 attached to the mask 120 stored in the storage lane, respectively.

[0046] Next, the robot controller C1 collates the mask code Q1 and the shelf code Q2 acquired in step S5 above, and determines whether the type of the mask 120 at the destination matches the specified type (step S6). That is, the robot controller C1 confirms that the chuck 35 has actually moved to the storage lane of the specified mask 120 based on the acquired shelf code Q2, and determines whether the type of the mask 120 in the storage lane matches the specified type based on the acquired mask code Q1.

[0047] In this embodiment, the loading and unloading of the mask 120 to and from the storage shelf 100 can be performed not only by the mask transfer device 2 but also, for example, by an operator. This means that the storage position of the mask 120 can change within the range not grasped by the robot controller C1. Therefore, the robot controller C1 needs to collate the ID codes in step S6 above and confirm the type of the mask 120 at the destination.

[0048] When it is determined as YES in step S6 above and it is confirmed that the type of the mask 120 matches the specified one, the robot controller C1 images the mask mounting portion 43 of the AGV3 with the second camera 52 (step S7). That is, the robot controller C1 checks the empty status of the mask mounting portion 43 based on the image obtained by imaging the bottom 43a (FIG. 1) of the mask mounting portion 43 from above with the second camera 52.

[0049] Next, the robot controller C1 determines whether there is an empty space in the mask mounting unit 43 (step S8). That is, the robot controller C1 determines whether at least one of the plurality of lanes L2 at the bottom 43a of the mask mounting unit 43 is empty based on the image captured in step S8.

[0050] If it is determined as NO in step S8 and it is confirmed that there is no empty space in the mask mounting unit 43, that is, all of the plurality of lanes L2 of the mask mounting unit 43 are filled with the masks 120, the robot controller C1 performs a predetermined error notification (step S9). This error notification may include, for example, a process of notifying an operator that there is no empty space in the mask mounting unit 43 or displaying a message on a display to prompt the operator to take necessary measures.

[0051] On the other hand, if it is determined as YES in step S8 and it is confirmed that there is an empty space in the mask mounting unit 43, the robot controller C1 determines a position to mount the mask 120 on the mask mounting unit 43 (step S10). For example, when there are a plurality of empty lanes L2 in the mask mounting unit 43, the robot controller C1 selects an appropriate one of them and determines it as the mounting position of the mask 120.

[0052] Next, the robot controller C1 takes out the mask 120 from the storage shelf 100 by the articulated robot 12 (step S11). That is, as shown in FIG. 9B, the robot controller C1 holds the mask 120 obtained with the mask code Q1 in step S5 by the chuck 35, and controls each arm 32 to 34 of the articulated robot 12 so that the mask 120 held by the chuck 35 moves from the storage shelf 100 to the outside thereof. For example, by controlling each arm 32 to 34 so that the chuck 35 moves to the +Y side, the mask 120 is pulled out from the storage shelf 100.

[0053] Next, the robot controller C1 mounts the mask 120 at the mounting position determined in step S10 (step S12). FIG. 9C is a diagram showing the situation of mounting the mask 120 on the mask mounting section 43. As shown in this figure, the robot controller C1 controls the moving mechanism 11 and the articulated robot 12 so that the mask 120 moves toward a specific lane L2 on the mask mounting section 43 determined as the mounting position, and mounts the mask 120 on the lane L2.

[0054] By the control of step S12 as described above, the transfer of the mask 120 from the storage shelf 100 to the AGV 3 is completed. The robot controller C1 transmits a signal indicating the completion of the transfer to the conveyance controller C2. Then, the conveyance controller C2 executes control to drive the AGV 3 to the target position (step S13). Specifically, the conveyance controller C2 operates the locking mechanism 45 (FIG. 6) of the AGV 3 to lock the mask 120 on the mask mounting section 43, and drives the traveling motor 44 in that state to drive the AGV 3 to travel. By such control of the conveyance controller C2, the AGV 3 automatically travels to a predetermined target position such as a printing machine.

[0055] Next, the control when it is determined as NO in step S6, that is, when a mismatch in the type of the mask 120 is confirmed, will be described. The fact that the determination here is NO means that the mask code Q1 obtained in the previous step S5 is not of the specified type, or that the mask code Q1 could not be obtained because the storage lane at the destination is empty. In this case, the robot controller C1 updates the association between the mask code Q1 and the shelf code Q2 (step S15). That is, the robot controller C1 updates the map data associating the mask code Q1 and the shelf code Q2 to reflect a new relationship specified from the data obtained in step S5.

[0056] Next, the robot controller C1 performs predetermined error notification (step S16). For example, the robot controller C1 notifies the operator through message display on the display or the like that the type of the destination mask 120 is different from the specification and that map data needs to be updated accordingly.

[0057] Next, the robot controller C1 moves the articulated robot 12 to the next candidate position (step S17). That is, the robot controller C1 identifies another shelf code Q2 associated with the mask code Q1 corresponding to the specified type of mask 120, and moves the chuck 35 of the articulated robot 12 to the lane L1 corresponding to the other shelf code Q2. After the movement, the process returns to step S5 to perform the collation of the ID code, and the subsequent processing is repeated.

[0058] [Operational effects] As described above, in the present embodiment, the articulated robot 12 is supported by the transfer mechanism 11 composed of an orthogonal robot disposed on the front side (+Y side) of the storage shelf 100, and the mask 120 is transferred between the storage shelf 100 and the AGV 3 using the articulated robot 12. According to such a configuration, there is an advantage that the mask 120 can be efficiently transferred between the storage shelf 100 and the AGV 3.

[0059] That is, in this embodiment, since the transfer of the mask 120 is performed using the articulated robot 12 that is supported so as to be movable along the front surface 110 of the storage shelf 100, for example, after taking out the mask 120 from the front surface 110 of the storage shelf 100, the mask 120 is appropriately rotated, and the posture of the mask 120 is changed so as to be along the X-axis parallel to the front surface 110 of the storage shelf 100 (see FIGS. 4 and 9C). In this state, the mask 120 can be moved to the AGV 3. Therefore, if the mask 120 is moved to the AGV 3 without such a rotation operation (posture change), that is, compared with the case where the mask 120 is moved to the AGV 120 while maintaining the posture along the Y-axis orthogonal to the front surface 110 of the storage shelf 100 (see FIG. 9B), the projected area of the mask 120 along the X-axis direction can be reduced, and the possibility of the mask 120 interfering with obstacles that may exist near the storage shelf 100 can be reduced. Further, even in a case where interference with obstacles cannot be avoided only by the rotation operation of the mask 120, since the movement route of the mask 120 can be set with a relatively high degree of freedom by controlling each arm 32 to 34 of the articulated robot 12, the mask 120 can be moved to the AGV 3 along the shortest possible route while avoiding interference with obstacles. That is, according to this embodiment, the transfer of the mask 120 between the storage shelf 100 and the AGV 3 can be performed along the shortest possible route, and the time required for the transfer can be shortened to improve the working efficiency.

[0060] Further, in this embodiment, when taking out the mask 120 from the storage shelf 100, the mask code Q1 and the shelf code Q2 are imaged by the first camera 51 attached to the articulated robot 12, and the position and type of the mask 120 in the storage shelf 100 are specified. According to such a configuration, it is possible to prevent taking out a mask other than the designated mask 120 or failing to take out the mask 120, and the designated mask 120 can be accurately taken out from the storage shelf 100 and transferred to the AGV 3.

[0061] In addition, in the present embodiment, after the mask 120 is transferred from the storage shelf 100 to the AGV 3 by the multi-joint robot 12, the AGV 3 is controlled to automatically travel to a predetermined target position such as a printing machine. Therefore, the mask 120 can be appropriately transported between the storage shelf 100 and the target position.

[0062] In addition, in the present embodiment, when the mask 120 is transferred from the storage shelf 100 to the AGV 3, the mask mounting portion 43 of the AGV 3 is imaged by the second camera 52. Therefore, while checking the empty space (the lane L2 where the mask 120 is not mounted) of the mask mounting portion 43 based on the captured image, the mask 120 can be appropriately mounted in the empty space.

[0063] In addition, in the present embodiment, since the AGV 3 is provided with a locking mechanism 45 for locking the mask 120 mounted on the mask mounting portion 43, it is possible to prevent a situation where the mask 120 falls off from the mask mounting portion 43 during the transportation of the mask 120 by the AGV 3, and the transportation of the mask 120 can be stably performed.

[0064] In addition, in the present embodiment, the standby location of the AGV 3 for receiving the mask 120 from the multi-joint robot 12 is set in a region axially adjacent to the tip portion 21a of the base 21 of the moving mechanism 11 extending in the X-axis direction. Therefore, the occupied space of the facility including the standby location of the AGV 3 can be reduced in the width direction (Y-axis direction) orthogonal to the extending direction (X-axis direction) of the base 21, and the facility can be made more compact. For this reason, for example, as shown in FIG. 10, it becomes easier to secure a work space W for the worker V in the region on the rear side (-Y side) of the storage shelf 100 on the side opposite to the base 21. In other words, in the present embodiment, it is possible to suppress the size of the facility in the Y-axis direction while facilitating the cooperative work with the worker V.

[0065] [Modification Example] In the above embodiment, the AGV 3 that has come to receive the mask 120 is made to wait in a region axially adjacent to the tip 21a of the base 21 of the moving mechanism 11 composed of an orthogonal robot. However, the waiting location of the AGV 3 is not limited to this. For example, as shown in FIG. 11, the AGV 3 may be made to wait in the lateral region on the +Y side (opposite side of the storage shelf 100) of the base 21. In other words, in the modified example of FIG. 11, the storage shelf 100 is arranged in a region on one side of the base 21 on the floor surface, and the AGV 3 waits in a region on the other side of the base 21 on the floor surface. In this way, a plurality of AGVs 3 can be made to wait simultaneously, and congestion of the AGV 3 can be avoided.

[0066] In the above-described embodiment, a 3-axis scalar robot was used as the articulated robot 12. However, the types of articulated robots that can be used in the present invention are not limited to this. An example in which the type of the articulated robot is changed is shown in FIG. 12. The mask transfer device 202 shown in this figure includes an articulated robot 212 composed of a 6-axis articulated robot and a moving mechanism 211 composed of a single-axis robot that supports the articulated robot 212 so as to be movable in the X-axis direction. The moving mechanism 211 includes a base 221 (guide) similar to the base 21 of the above-described embodiment and a slider 222 (moving body) supported by the base 221 so as to be movable in the X-axis direction. The articulated robot 212 includes a fixing portion 231 fixed to the slider 222, a first arm link 232 rotatable about a first axis AX11 with respect to the fixing portion 231, a second arm link 233 swingable about a second axis AX12 with respect to the first arm link 232, a third arm link 234 swingable about a third axis AX13 with respect to the second arm link 233, a fourth arm link 235 rotatable about a fourth axis AX14 with respect to the third arm link 234, a fifth arm link 236 swingable about a fifth axis AX15 with respect to the fourth arm link 235, a sixth arm link 237 rotatable about a sixth axis AX16 with respect to the fifth arm link 236, and a chuck 238 fixed to the sixth arm link 237 as a holder for holding the mask 120. Also, with the mask transfer device 202 including such an articulated robot 212, the transfer of the mask 120 between the storage shelf 100 and the AGV 3 can be efficiently performed as in the above-described embodiment.

[0067] In the above embodiment, the mask transfer device 2 is used to transfer the mask 120 between the storage shelf 100 and the AGV 3. However, the mask transfer device in the present invention can be widely used when transferring a mask between a place (storage section) for storing the mask and a place (placement site) away from there. The storage shelf 100 and the AGV 3 are merely examples. For example, the AGV may be in the storage section and the storage shelf may be the placement site. Also, the transfer destination when transferring the mask taken out from the storage shelf is not limited to the AGV. For example, a second storage shelf located at a place away from the storage shelf may be used as the transfer destination, or the work site of the next process for performing predetermined processing on the mask may be used as the transfer destination.

[0068] [Summary] The above embodiment and its modified examples include the following inventions.

[0069] A mask transfer device according to an aspect of the present invention is a device for transferring a mask to a storage section that stores a mask used when printing solder on a substrate, and includes a guide extending in a certain direction along one surface of the storage section having an opening for taking in and out the mask, and a moving body that moves along the guide, and a moving mechanism including the same, and a multi-joint robot that is supported by the moving body and transfers the mask between the storage section and a placement site away from the storage section.

[0070] According to the present invention, since the mask is transferred using a multi-joint robot that is movably supported along one surface of the storage section, for example, after taking out the mask from one surface of the storage section, the mask can be appropriately rotated, or the movement route of the mask can be set with a relatively high degree of freedom using the characteristics of the multi-joint robot. Therefore, the transfer of the mask between the storage section and the placement site can be performed along the shortest route while avoiding interference with obstacles, and the time required for the transfer can be shortened to improve work efficiency.

[0071] Preferably, the mask transfer device further includes a first camera attached to the articulated robot, and a robot control unit that controls the articulated robot to take out the designated mask from the storage unit while imaging the storage unit and the mask inside thereof by the first camera when receiving a request to transfer the mask from the storage unit to the placement site.

[0072] In this aspect, it is possible to prevent taking out a mask other than the designated mask or failing to take out the mask, and the designated mask can be accurately taken out from the storage unit and transferred to the placement site.

[0073] A mask transfer system according to another aspect of the present invention includes the above-described mask transfer device, a movable carrier having a mask mounting portion capable of mounting the mask as the placement site, and a transfer control unit that moves the carrier to a predetermined target position when the mask is transferred from the storage unit to the mask mounting portion by the mask transfer device.

[0074] According to the present invention, the mask can be appropriately transferred by moving the carrier having received the mask on the mask mounting portion between the storage unit and the target position.

[0075] Preferably, the mask transfer system further includes a second camera that images the mask mounting portion of the carrier waiting at a predetermined position near the guide. The robot control unit controls the articulated robot to mount the mask taken out from the storage unit in the empty space within the mask mounting portion based on the captured image by the second camera.

[0076] In this aspect, while checking the empty space of the mask mounting portion based on the captured image by the second camera, the mask can be appropriately mounted in the empty space.

[0077] Preferably, the carrier further includes a locking mechanism that locks the mask mounted on the mask mounting portion.

[0078] In this aspect, it is possible to prevent a situation where the mask falls off from the mask mounting portion during the conveyance of the mask by the carrier, and the conveyance of the mask can be stably performed.

[0079] Preferably, the guide is arranged to extend along the floor surface on which the carrier moves, the storage portion is arranged in a region on one side of the guide on the floor surface, and the conveyance control unit causes the carrier that has come to receive the mask transferred from the storage portion to wait in a region axially adjacent to one end portion of the guide.

[0080] In this aspect, the occupied space of the equipment including the waiting location of the carrier can be reduced in the width direction orthogonal to the extending direction of the guide, and the equipment can be made more compact.

[0081] The conveyance control unit may cause the carrier that has come to receive the mask transferred from the storage portion to wait in a region on the other side of the guide.

[0082] In this aspect, a plurality of carriers can be made to wait simultaneously, and congestion of the carriers can be avoided.

Explanation of Reference Numerals

[0083] 1 Mask conveyance system 2 Mask transfer device 3 AGV (Carrier) 11 Moving mechanism 12 Multi-joint robot 21 Base (Guide) 23 Tower (Moving body) 43 Mask mounting portion 45 Locking mechanism 51 First camera 52 Second camera 100 Storage shelf (Storage portion) 120 Mask C1 Robot controller (Robot control unit) C2 Transfer Controller (Transfer Control Unit) 202 Mask Delivery Device 211 Moving Mechanism 212 Articulated Robot 221 Base (Guide) 222 Slider (Moving Body)

Claims

1. A mask transfer device for transferring a mask to a storage unit that stores a mask used when printing solder on a substrate, a moving mechanism including a guide extending horizontally along one surface of the storage unit having an opening for inserting and removing the mask, and a moving body moving along the guide, a multi-joint robot supported by the moving body for transferring the mask between the storage unit and a placement site away from the storage unit, a robot control unit for controlling the multi-joint robot to move the mask toward the placement site in a state where the posture of the mask is changed along the extending direction of the guide by rotating the mask taken out from the storage unit, A mask transfer device comprising:

2. The mask transfer device according to claim 1, further comprising a first camera attached to the multi-joint robot, wherein when receiving a request to transfer the mask from the storage unit to the placement site, the robot control unit controls the multi-joint robot to take out the designated mask from the storage unit while imaging the storage unit and the mask inside thereof with the first camera. A mask transfer device.

3. The mask transfer device according to claim 1 or 2, a movable carrier having a mask mounting portion capable of mounting the mask as the placement site, a conveyance control unit for moving the carrier to a predetermined target position when the mask is transferred from the storage unit to the mask mounting portion by the mask transfer device, A mask conveyance system comprising:

4. The mask conveyance system according to claim 3, further comprising a second camera for imaging the mask mounting portion of the carrier waiting at a predetermined position near the guide, wherein the robot control unit controls the multi-joint robot to mount the mask taken out from the storage unit in an empty space within the mask mounting portion based on an image captured by the second camera. A mask conveyance system.

5. The mask conveyance system according to claim 3 or 4, wherein the carrier further comprises a locking mechanism for locking the mask mounted on the mask mounting portion. A mask conveyance system.

6. In the mask conveyance system according to any one of claims 3 to 5, the guide is arranged to extend along the floor surface on which the carrier moves, The storage part is arranged in a region on one side of the guide on the floor surface. The transfer control part is a mask transfer system that makes the carrier that has come to receive the mask transferred from the storage part wait in a region axially adjacent to one end of the guide.

7. In the mask transfer system according to any one of Claims 3 to 5, The guide is arranged so as to extend along the floor surface on which the carrier moves. The storage part is arranged in a region on one side of the guide on the floor surface. The transfer control part is a mask transfer system that makes the carrier that has come to receive the mask transferred from the storage part wait in a region on the other side of the guide.

8. In the mask delivery device according to Claim 2, Before taking out the mask from the storage part, the robot control part images the mask code attached to the mask and the shelf code attached to the lane in which the mask is stored with the first camera, and collates the two imaged codes. It is a mask delivery device.

Images