Pericle packaging body and pericle container

Abstract

Provided are a pellicle package and a pellicle housing, configured so that the total amount of outgas from volatile organic components under conditions of heating for 30 minutes at 100°C is 90 ppm or less.

Description

Technical Field

[0001] The present disclosure relates to a pellicle package and a pellicle container.

Background Art

[0002] In a technique (photolithography) of applying a photosensitive substance to the surface of an object such as an electronic component, a printed circuit board, or a display panel and exposing it in a pattern to form a pattern, a transparent substrate having a pattern formed on one side, called a mask, is used. In these manufacturing processes, patterning is performed by irradiating a photosensitive layer or the like with light through a mask (also referred to as an exposure master or a reticle). At this time, if foreign matter adheres to the mask, the light is absorbed by the foreign matter, or the light is reflected and bent on the surface of the foreign matter. As a result, problems such as deformation of the formed pattern, rough edges, and deterioration of the dimensions, quality, and appearance after patterning occur. To solve such problems, a method of suppressing the adhesion of foreign matter by attaching a pellicle having a pellicle film that transmits light to the surface of the mask is adopted.

[0003] In recent years, with the higher performance and finer line width of electronic components, pellicles are also more susceptible to the influence of trace amounts of outgassing and fine particles than in the past. Since outgassing adheres to the surface of the member and reduces surface cloudiness and alteration, for example, in Japanese Patent Application Laid-Open No. 2007-12793, in order to reduce the amount of volatile organic gas generated from the container that houses the pellicle, the container is specified to contain a polycarbonate resin and conductive carbon black.

Summary of the Invention

Problems to be Solved by the Invention

[0004] As a result of intensive studies, the inventors have newly found that outgassing of volatile organic components generated from the package that wraps the pellicle adheres to the packaged pellicle, and separately from the outgassing of volatile components derived from the material itself that constitutes the pellicle, it is generated as outgassing from the pellicle, which is one of the factors causing pellicle contamination.

[0005] The problem to be solved by one embodiment of the present disclosure is to provide a pellicle package in which the amount of outgassing from the pellicle is reduced due to the adhesion of outgassing of volatile organic components generated from the pellicle package. Another problem to be solved by one embodiment of the present disclosure is to provide a pellicle container in which the amount of outgassing from the pellicle is reduced due to the adhesion of outgassing of volatile organic components generated from the pellicle package.

Means for Solving the Problems

[0006] Specific means for solving the above problems include the following aspects. <1> A pellicle package in which the total amount of outgassing of volatile organic components under heating conditions of 100 °C for 30 minutes is 90 ppm or less. <2> The pellicle package according to <1>, including at least two layers of a sealant layer and a base material layer. <3> The pellicle package according to <2>, wherein the sealant layer has a thickness of 40 μm or less. <4> The pellicle package according to <2> or <3>, having an adhesive layer between the sealant layer and the base material layer. <5> The pellicle package according to any one of <2> to <4>, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer. <6> The pellicle package according to any one of <1> to <5>, having a breaking strength of 5 N or more and 50 N or less. <7> A package for a pellicle having an adhesive for the original plate, wherein the adhesive for the original plate contains a styrene-butadiene-based adhesive, and the pellicle package according to any one of <1> to <6>. <8> A pellicle, and a pellicle container for housing the pellicle; the pellicle packaging body according to any one of <1> to <7> for packaging the pellicle container; A pellicle container comprising: <9> the pellicle contains an original plate adhesive, The pellicle container according to <8>, wherein the original plate adhesive is a styrene-butadiene adhesive.

Advantages of the Invention

[0007] According to one embodiment of the present disclosure, it is possible to provide a pellicle packaging body in which the amount of outgas from the pellicle is reduced due to the adhesion of outgas of volatile organic components generated from the pellicle packaging body. According to another embodiment of the present disclosure, it is possible to provide a pellicle container in which the amount of outgas from the pellicle is reduced due to the adhesion of outgas of volatile organic components generated from the pellicle packaging body.

Brief Description of the Drawings

[0008]

Figure 1

Modes for Carrying Out the Invention

[0009] In the present disclosure, the numerical range indicated by using "~" means a range including the numerical values described before and after "~" as the minimum value and the maximum value, respectively. In the numerical ranges described step by step in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the upper limit value or the lower limit value of the numerical range described in other step-by-step descriptions. Further, in the numerical ranges described in the present disclosure, the upper limit value or the lower limit value described in a certain numerical range may be replaced with the value shown in the examples. In the present disclosure, a combination of two or more preferred embodiments is a more preferred embodiment. In the present disclosure, unless otherwise specified, when there are multiple substances corresponding to each component, the amount of each component means the total amount of the multiple substances. In this specification, the term "step" includes not only an independent step but also a step that cannot be clearly distinguished from other steps, as long as the intended purpose of the step is achieved.

[0010] <Pericle package> The pericle package of the present disclosure has a total outgassing amount of volatile organic components of 90 ppm or less under heating conditions of 100 °C for 30 minutes. According to the pericle package of the present disclosure, the outgassing amount from the pericle due to the adhesion of outgassing of volatile organic components generated from the pericle package is reduced.

[0011] The pericle package refers to a packaging member that packages the pericle.

[0012] The volatile organic component refers to a component having a vapor pressure of 0.01 KPa or more at 25 °C. Examples of the volatile organic component include hydrocarbon compounds such as aromatic hydrocarbon compounds and aliphatic hydrocarbon compounds. Outgassing means a gas generated from a material constituting a pericle package such as resin.

[0013] The pericle package has a total outgassing amount of volatile organic components of 90 ppm or less under heating conditions of 100 °C for 30 minutes, preferably 30 ppm or less, more preferably 15 ppm or less, still more preferably 10 ppm or less, and particularly preferably 5 ppm or less. That is, the closer the total outgassing amount of volatile organic components of the pericle package is to 0 ppm under heating conditions of 100 °C for 30 minutes, the more preferable it is, and it is more preferable that it is below the detection limit or 0 ppm. When the total outgassing amount of the volatile organic components in the pericle package is within the above range, the outgassing amount from the pericle due to the adhesion of outgassing of volatile organic components generated from the pericle package is further reduced.

[0014] The outgassing amount of the above-mentioned volatile organic components is measured as follows. The pellicle package is cut to 10 mg and used as a test piece. The test piece is set in a glass insert with a two-hole cap. Next, while flowing He gas as a carrier gas at 3.0 mL / min, it is heated at 100 °C for 30 minutes, and the volatilized volatile organic components are collected by a cold trap at -20 °C. The amount of the collected volatile organic components is measured (in terms of n-decane conversion) using a gas chromatograph mass spectrometer (hereinafter also referred to as GCMS), and this is taken as the outgassing generation amount. The measurement conditions of GCMS are as follows. Measuring device name: QP2010plus Column: DB-1 (inner diameter: 0.32 mm, length: 60 m, thickness: 1.00 μm) Scan range: 35 - 450 m / Z Ionization: 0.78 kV Measurement method: Calculate the gas amount generated at 100 °C for 30 minutes by n-decane conversion.

[0015] The specific method for setting the outgassing amount of the above-mentioned volatile organic components within the above range is not particularly limited, and examples include a method of adjusting the material forming the pellicle package. For example, a method of making the pellicle package a laminate including at least two layers of a sealant layer and a base material layer, and adjusting the material of the sealant layer and the thickness of the sealant layer, etc. can be mentioned.

[0016] From the viewpoint of the strength in use, the pellicle package preferably has a breaking strength of 5 N or more and 50 N or less, more preferably 7 N or more and 45 N or less, and even more preferably 10 N or more and 40 N or less.

[0017] The measurement of the above-mentioned breaking strength is in accordance with JIS-K7127-5 (1999) (corresponding to ISO527-3:1995). Both ends of a dumbbell-shaped test piece of test piece type 5 of JIS-K7127 (total length 115 mm, width of parallel part 6 mm, distance between gauge marks 25 mm, width of gripping part 25 mm) are pulled to measure the breaking strength.

[0018] Specific methods for setting the above-mentioned breaking strength within the above range are not particularly limited, and examples thereof include a method of adjusting the material and thickness of the base material layer.

[0019] The film package preferably includes at least two layers of a sealant layer and a base material layer, and more preferably includes a sealant layer, an adhesive layer, and a base material layer in this order. When the film package is a laminate including at least two layers of a sealant layer and a base material layer, or when the film package is a laminate including a sealant layer, an adhesive layer, and a base material layer in this order, the outermost surface on the film side may be the sealant layer, and the outermost surface on the outer peripheral surface side may be the base material layer. When the film package is configured to include at least two layers of a sealant layer and a base material layer, or when the film package is a laminate including a sealant layer, an adhesive layer, and a base material layer in this order, it is considered that outgassing of volatile organic components in the film package is likely to occur from the sealant layer. Therefore, when the outermost surface on the film side is the sealant layer, adhesion of outgassing of volatile organic components generated from the film package also becomes remarkable. On the other hand, the film package of the present disclosure has the above-described configuration, so that the amount of outgassing from the film is likely to be kept low due to adhesion of outgassing of volatile organic components generated from the film package.

[0020] (Sealant layer) The sealant layer may be a single layer or a laminate composed of two or more layers. The material of the sealant layer is not particularly limited, and a composition containing a known resin can be applied. Examples of the resin include polyolefin resins which are homopolymers such as polyethylene (PE) (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), polypropylene (PP), polybutene, and polymethylpentene; copolymers of two or more selected from the group consisting of olefins such as ethylene, propylene, butene, and methylpentene; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), and polyethylene naphthalate; polyamide resins such as nylon-6, nylon-6,6, metaxylylenediamine-adipic acid condensation polymer, and polymethylmethacrylimide; ethylene-vinyl alcohol copolymer; and the like. The resin may be used alone or in combination of two or more kinds.

[0021] Among these, as the material of the sealant layer, from the viewpoint of further reducing the amount of outgas from the pellicle due to the adhesion of volatile organic components generated from the pellicle package, it preferably contains at least one selected from the group consisting of polyester resins, polyamide resins, and ethylene-vinyl alcohol copolymers, more preferably contains at least one selected from the group consisting of polyester resins and ethylene-vinyl alcohol copolymers, and even more preferably contains an ethylene-vinyl alcohol copolymer.

[0022] The sealant layer preferably has a thickness (total thickness in the case of a laminated structure composed of two or more layers) of 500 μm or less, more preferably 100 μm or less, even more preferably 50 μm or less, and particularly preferably 40 μm or less. When the thickness of the sealant layer is within the above range or less, the amount of outgas from the pellicle due to the adhesion of volatile organic components generated from the pellicle package is further reduced.

[0023] The sealant layer may have a thickness (total thickness in the case of a laminated structure composed of two or more layers) of 3 μm or more, 5 μm or more, or 15 μm or more from the viewpoint of sealing performance. From the above viewpoints, the sealant layer may have a thickness (total thickness in the case of a laminated structure composed of two or more layers) of 3 μm or more and 500 μm or less, or 3 μm or more and 40 μm or less.

[0024] The sealant layer may have a thickness (total thickness in the case of a laminated structure composed of two or more layers) of 40 μm or more, 70 μm or more, or 90 μm or more. As described above, when the pellicle package includes at least two layers of a sealant layer and a base material layer, it is considered that outgassing of volatile organic components in the pellicle package is likely to occur from the sealant layer. Therefore, as the thickness of the sealant layer increases, the adhesion of outgassing of volatile organic components generated from the pellicle package is likely to become prominent. On the other hand, the pellicle package of the present disclosure has the above-described configuration, so that even when the thickness of the sealant layer is within the above range, the amount of outgassing from the pellicle due to the adhesion of outgassing of volatile organic components generated from the pellicle package is likely to be kept low.

[0025] (Base material layer) The base material layer may be a single layer or a laminate composed of two or more layers.

[0026] The material of the base material layer is not particularly limited, and a composition containing a known resin can be applied. Examples of the resin include polyolefin resins such as polyethylene (including high-density polyethylene (HDPE), medium-density polyethylene (MDPE), low-density polyethylene (LDPE), linear low-density polyethylene (LLDPE), etc.), ethylene-propylene copolymer, ethylene-butene copolymer, ethylene-hexene copolymer, ethylene-octene copolymer, polypropylene (PP), ethylene-vinyl acetate copolymer, ethylene-methyl methacrylate copolymer, ionomer resin; polyester resins such as polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polyethylene naphthalate; amide resins such as nylon-6, nylon-6,6, metaxylylenediamine-adipic acid condensation polymer, polymethyl methacrylimide; acrylic resins such as polymethyl methacrylate; styrene-acrylonitrile resins such as polystyrene, styrene-acrylonitrile copolymer, styrene-acrylonitrile-butadiene copolymer, polyacrylonitrile; hydrophobized cellulose resins such as triacetate cellulose, diacetate cellulose; halogen-containing resins such as polyvinyl chloride, polyvinylidene chloride, polyvinylidene fluoride, Teflon (registered trademark); highly hydrogen-bonding resins such as polyvinyl alcohol, ethylene-vinyl alcohol copolymer, cellulose derivatives; engineering plastic resins such as polycarbonate resin, polysulfone resin, polyethersulfone resin, polyetheretherketone resin, polyphenylene oxide resin, polymethylene oxide resin, liquid crystal resin; etc. The resin may be used alone or in combination of two or more kinds.

[0027] Among the above, from the viewpoint of preventing dust such as dirt from adhering to the surface of the pellicle package, materials that are less likely to generate static electricity (preferably resins containing an antistatic-treated resin, more preferably resins containing either polyethylene terephthalate or polyethylene naphthalate) are preferred as the material for the base layer.

[0028] The thickness of the base material layer (or the total thickness in the case of a laminated structure composed of two or more layers) is not particularly limited, but for example, it is preferably 0.1 μm or more and 500 μm or less, more preferably 1 μm or more and 100 μm or less, and even more preferably 5 μm or more and 30 μm or less.

[0029] (Adhesive layer) The pellicle package of the present disclosure may have an adhesive layer between the sealant layer and the base material layer, if necessary. The adhesive layer may be a single layer or a laminate composed of two or more layers.

[0030] The material of the adhesive layer is not particularly limited, and a composition containing a known resin can be applied. Examples of the resin include polyurethane resin, polyester resin, polyether resin, and mixtures thereof.

[0031] The thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of adhesive strength, it is preferably 1 μm or more, and more preferably 2 μm or more. The thickness of the adhesive layer is not particularly limited, but for example, from the viewpoint of shortening the curing reaction time during the formation of the adhesive layer and reducing the ratio of unreacted substances and residual solvents during the effect reaction, it is preferably 5 μm or less, and more preferably 4 μm or less.

[0032] (Shape and properties of the pellicle package) The shape of the pellicle package is not particularly limited. Examples of the shape of the pellicle package include sheet-like, bag-like, pack-like, box-like, etc. The pellicle package may be configured to include, as part of the package, a packaging member having a total outgas amount of volatile organic components under heating conditions of 100°C for 30 minutes exceeding 90 ppm, as long as the effects of the present disclosure can be obtained. On the other hand, the proportion of the packaging member having a total outgas amount exceeding 90 ppm in the pellicle package is preferably 20% by mass or less of the entire pellicle package, more preferably 10% by mass or less, and even more preferably 5% by mass or less. The pellicle package preferably does not include a packaging member having a total outgas amount exceeding 90 ppm.

[0033] The volume of the pellicle package is not particularly limited and can be appropriately set according to the size of the pellicle and the packaging form. The volume of the package is, for example, 2000 cm 3 ~70000 cm 3 and preferably 4000 cm 3 ~30000 cm 3 and more preferably 5000 cm 3 ~10000 cm 3 .

[0034] When the volume of the pellicle package is within the above range, the volume of the pellicle or the pellicle case packaged in the pellicle package and the surface area of the pellicle package are likely to be optimized. Therefore, the proportion of the outgas of volatile organic components generated from the pellicle package becomes smaller, and the outgas amount from the pellicle due to the adhesion of the outgas derived from the pellicle package is also further reduced.

[0035] In one aspect, the pellicle package of the present disclosure may be a package for a pellicle having an adhesive for an original plate containing a styrene-butadiene-based adhesive.

[0036] ≪Pellicle container≫ The pellicle container of the present disclosure includes a pellicle, a pellicle container that houses the pellicle, and the pellicle package of the present disclosure that packages the pellicle container. According to the pellicle container of the present disclosure, the amount of outgas from the pellicle is reduced due to the adhesion of outgas of volatile organic components generated from the pellicle package.

[0037] The pellicle container refers to a structure in which a container containing a pellicle is packaged with the pellicle package of the present disclosure.

[0038] As the pellicle, a known pellicle can be applied. The pellicle is composed of, for example, a pellicle film and a support frame that supports the pellicle film. The shape of the pellicle container is not particularly limited, and examples include a box shape.

[0039] Hereinafter, with reference to the drawings, one aspect of the pellicle will be described. FIG. 1 is a schematic cross-sectional view showing a pellicle 10. In the pellicle 10, the pellicle film 12 and the support frame 14 are adhered via an adhesive layer 13 for the film. Ventilation holes 16 are formed in the support frame 14, and an adhesive layer 15 for the original plate is formed. Although not shown, a release sheet (for example, a separator) for protecting the adhesive layer 15 for the original plate may be further disposed on the surface of the adhesive layer 15 for the original plate. The ventilation holes 16 may not be formed in the support frame 14, or the support frame 14 may have a structure laminated from a plurality of layers.

[0040] The pellicle film 12 is supported by the support frame 14. Examples of the material of the pellicle film 12 include materials having transparency such as quartz glass, fluororesin, cellulose acetate, and carbon nanotubes. Examples of the material of the support frame 14 include an anodized aluminum frame, a titanium frame, and a silicon frame. The support frame 14 is preferably black from the viewpoints of preventing reflection of exposure light and facilitating inspection of the presence or absence of adhered foreign substances. The adhesive layer 13 for the film adheres the support frame and the pellicle film. The material of the adhesive layer 13 for the film is not particularly limited, and examples thereof include fluoropolymers such as acrylic resin adhesives, epoxy resin adhesives, silicone resin adhesives, and fluorine-containing silicone adhesives. The adhesive layer 15 for the original plate can be formed by applying a known adhesive and drying it. The material of the adhesive layer 15 for the original plate (hereinafter also referred to as the adhesive for the original plate) is not particularly limited, and examples thereof include acrylic-based, silicone-based, styrene-butadiene-based, urethane-based, and olefin-based adhesives.

[0041] That is, in the pellicle container of the present disclosure, the pellicle may contain the adhesive for the original plate, and the adhesive for the original plate may be a styrene-butadiene-based adhesive.

[0042] The styrene-butadiene-based adhesive is preferable as the material of the adhesive layer 15 for the original plate that adheres the support frame 14 and the original plate in order to easily suppress the distortion of the original plate. After the outgas of volatile organic components generated from the pellicle package adheres to the pellicle, the styrene-butadiene-based adhesive is more likely to generate outgas from the pellicle. By having the above-described configuration, the pellicle package according to the present disclosure can reduce the amount of outgas from the pellicle caused by the adhesion of the outgas of volatile organic components generated from the pellicle package even when a styrene-butadiene-based adhesive is used as the material of the adhesive layer 15 for the original plate.

[0043] In the present disclosure, "adhesive" is a concept that includes adhesives and pressure-sensitive adhesives. In the present disclosure, "adhesive layer" is a concept that includes adhesive layers and pressure-sensitive adhesive layers.

[0044] Examples of the material of the release sheet include polyethylene terephthalate films and polypropylene films. Depending on the materials of the pellicle film 12 and the support frame 14, the support frame and the pellicle film may be adhered without passing through the adhesive layer 13 for the film.

[0045] Known pellicle containers can be applied to the pellicle container of the present disclosure. Examples of the material of the pellicle container include resins such as polycarbonate, carbon nanotubes, conductive carbon black, and conductive materials such as inorganic particles.

[0046] The preferred embodiments of the pellicle package in the pellicle container of the present disclosure are the same as the preferred embodiments listed in the pellicle package of the present disclosure.

Examples

[0047] Hereinafter, the present disclosure will be described in more detail with reference to examples and the like, but the invention of the present disclosure is not limited to these examples only.

[0048] <Experimental Examples 1 to 3 and Comparative Example 1> Pellicle packages each having a base material layer and a sealant layer with the materials and film thicknesses shown in the table were produced. For each of the obtained pellicle packages, the total amount of outgas of volatile organic components (referred to as "total amount of outgas of pellicle package" in the table) measured under the heating conditions of 100°C for 30 minutes by the above-described measurement method is shown in Table 1. Further, for each of the pellicle packages of each example, the value of the breaking strength measured by the above-described measurement method was within the range of 10 N or more and 40 N or less.

[0049] <Evaluation of Total Amount of Pellicle Outgas> (1) Preparation of various components as raw materials for mask adhesives · Thermoplastic elastomer (A) Styrene-hydrogenated isoprene-styrene block copolymer (trade name "Hybrar 7125" manufactured by Kuraray Co., Ltd., tanδ peak temperature: -5°C, styrene content: 20% by mass)

[0050] · Tackifying resin (B) Hydrogenated alicyclic petroleum resin: C9 hydrogenated petroleum resin (product name "Arcon P-100" (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100±5°C, number average molecular weight (Mn): 610) Rosin ester resin (product name "Pine Crystal KE-311" (manufactured by Arakawa Chemical Industries, Ltd.), softening point: 100±5°C)

[0051] Softener Polybutene (product name "Nissan Polybutene 30N" (manufactured by NOF Corporation))

[0052] ·wax Polypropylene pyrolysis wax (product name "Hiwax NP055" (Mitsui Chemicals))

[0053] (2) Manufacturing of the pellicle A raw material mixture was obtained by mixing 100 parts by mass of thermoplastic elastomer (A), 100 parts by mass of tackifier resin (B), and 200 parts by mass of softener to a total of 48 g. The obtained raw material mixture was put into a Labo Plastomill (manufactured by Toyo Seiki Seisakusho, content: 60 mL) and then sealed. The mixture was kneaded at 200 ° C and 100 rpm for 20 minutes to obtain a lump-shaped mask adhesive. About 10 g of the mask adhesive was put into a heating tank (temperature inside the tank: 200 ° C) and melted. Meanwhile, an anodized aluminum support frame 14 (outer dimensions: 148.77 mm × 114.9 mm, frame height H: 2.5 mm, frame width W: 2 mm) as shown in Figure 1 was prepared. The molten mask adhesive extruded from a needle tip connected to the heating tank was applied to one end surface of the support frame 14 to form an adhesive layer 15 for the master plate. The thickness of the formed adhesive layer 15 for the master plate was 0.6 mm. In addition, a separator was placed on the surface of the master adhesive layer 15. A pellicle membrane 12 was attached to the other end face of the support frame 14 (i.e., the end face on the side on which the master adhesive layer 15 was not formed) via a membrane adhesive layer 13 (fluoropolymer (AGC, CYTOP A type)) to obtain a pellicle 10.

[0054] (Evaluation of total outgassing amount) The pellicles of each example were placed in a clean oven under an air atmosphere and degassed by heating within the range of 70°C to 80°C for 20 hours. The pellicles were packaged using the pellicle packages of each example and stored at 23°C for 1 week. After storage, the pellicles were taken out of the pellicle packages and set in an oven. Then, the outgases generated under the heating conditions of 50°C for 4 hours were adsorbed by Tenax (trademark, manufactured by GL Sciences Inc.), which is a powdery adsorbent. Thereafter, Tenax was set in a GCMS, and the total amount (μg) of outgas gases of volatile organic components generated from the pellicles was measured (n-decane conversion) under the heating conditions of 280°C for 10 minutes, and this was designated as the "total amount of outgas from the pellicle (μg / pellicle)". The results are shown in Table 1.

[0055] In Table 1, polyethylene is denoted as PE and polyethylene terephthalate as PET, respectively.

[0056]

Table 1

[0057] As shown in Table 1, the pellicle packages of the examples had a reduced amount of outgas from the pellicles due to the adhesion of outgases of volatile organic components generated from the pellicle packages compared to the pellicle packages of the comparative examples. It was found that the amount of outgas from the pellicles was reduced.

[0058] The disclosure of Japanese Patent Application No. 2022-045759 filed on March 22, 2022 is incorporated herein by reference in its entirety. All documents, patent applications, and technical standards described in this specification are incorporated herein by reference to the same extent as if each individual document, patent application, and technical standard was specifically and individually stated to be incorporated by reference.

Claims

1. A pellicle package for packaging a container containing a pellicle, wherein the total amount of outgas of volatile organic components under heating conditions of 100°C for 30 minutes is 90 ppm or less.

2. The pellicle package according to Claim 1, comprising at least two layers of a sealant layer and a base material layer.

3. The pellicle package according to Claim 2, wherein the sealant layer has a thickness of 40 μm or less.

4. The pellicle package according to Claim 2, having an adhesive layer between the sealant layer and the base material layer.

5. The pellicle package according to any one of Claims 2 to 4, wherein the sealant layer contains an ethylene-vinyl alcohol copolymer.

6. The pellicle package according to any one of Claims 1 to 4, having a breaking strength of 5 N or more and 50 N or less.

7. The pellicle package according to any one of Claims 1 to 4, for packaging a pellicle having an adhesive for an original plate containing a styrene-butadiene-based adhesive.

8. A pellicle, a pellicle container for containing the pellicle, and the pellicle package according to any one of Claims 1 to 4 for packaging the pellicle container. A pellicle container comprising the above.

9. The pellicle container according to Claim 8, wherein the pellicle contains an adhesive for an original plate, and the adhesive for an original plate is a styrene-butadiene-based adhesive.

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