Ultraviolet irradiation system and ultraviolet irradiation method

Abstract

The purpose of the present invention is to provide: an ultraviolet light irradiation system that can ascertain the state of a region irradiated with ultraviolet light and thereby emit or block the ultraviolet light; and an ultraviolet light irradiation method.　An ultraviolet light irradiation system 301 according to the present invention comprises: an ultraviolet light source unit 11 for generating ultraviolet light; N irradiation units 13 (N is a natural number) for irradiating an irradiation object Ar with the ultraviolet light; a sensor unit 31 for detecting the presence or absence, on the irradiation object Ar, of an avoidance object for which exposure to the ultraviolet light should be avoided; and a blocking unit 30 for interrupting the irradiation of the ultraviolet light from the irradiation units 13 to the irradiation object Ar if the avoidance object is present on the irradiation object Ar.

Description

Technical Field

[0001] The present disclosure relates to an ultraviolet irradiation system and a decontamination method for performing sterilization and virus inactivation using ultraviolet light.

Background Art

[0002] For purposes such as preventing infectious diseases, the demand for systems that perform sterilization and virus inactivation using ultraviolet light is increasing. In this embodiment, the description of "decontamination" shall include sterilization and virus inactivation.

[0003] There are roughly three categories of products for decontamination systems. (1) Mobile sterilization robot A mobile sterilization robot is an autonomous mobile robot that irradiates ultraviolet light. The mobile sterilization robot can automatically decontaminate a wide area without human intervention by irradiating ultraviolet light while moving inside a building such as a hospital room. For example, refer to the website of Cantum Ushikata Co., Ltd. (https: / / www.kantum.co.jp / product / sakkin_robot / sakkinn_robot / UVD_robot). (2) Stationary air purifier A stationary air purifier is a device that is installed at a predetermined location on the ceiling or indoors and decontaminates while circulating the indoor air. Since the stationary air purifier does not irradiate ultraviolet light to the outside and has no effect on the human body, highly safe decontamination is possible. For example, refer to the website of Iwasaki Electric Co., Ltd. (https: / / www.iwasaki.co.jp / optics / sterilization / air / air03.html). (3) Portable sterilization device The portable sterilization device is a portable device equipped with an ultraviolet light source such as a fluorescent lamp, a mercury lamp, or an LED. The user takes the portable sterilization device to the area where decontamination is desired and irradiates it with ultraviolet light. In this way, the portable sterilization device can be used in various places. For example, refer to the website of Funakoshi Co., Ltd. (https: / / www.funakoshi.co.jp / contents / 68182).

Prior Art Documents

Non-Patent Documents

[0004]

Non-Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The prior art has the following difficulties. (1) Since the mobile sterilization robot irradiates high-power ultraviolet light, the device is large-scale and expensive. Therefore, there is a problem that it is difficult to economically realize the mobile sterilization robot. (2) Since the stationary air cleaner sterilizes the circulated indoor air, there is a problem that it is difficult to decontaminate clothes, etc. and immediately decontaminate bacteria and viruses emitted from carriers. (3) The portable sterilization device has a problem that the irradiated ultraviolet light is relatively weak and it is difficult to decontaminate in a short time. Also, even if a high-power mercury lamp or fluorescent lamp is used, these are generally large and have a short lifespan, and the light diffuses in proportion to the square of the distance and the power is reduced, so it is difficult to apply to the portable sterilization device.

[0006] Regarding the above problems (1) to (3), a system using an optical fiber can be considered (for example, see Non-Patent Document 1). By transmitting ultraviolet light from a light source using a thin and easily bendable optical fiber, it becomes possible to have the flexibility to irradiate the ultraviolet light output from the fiber tip to the place where decontamination is desired pinpoint. Also, by adopting a system configuration on the P-MP side such as that used in FTTH, cost reduction can be expected by sharing a single light source.

[0007] Regarding the deep ultraviolet light used in a sterilization system using ultraviolet rays, when irradiating the eyes and skin of living organisms including humans, it can cause skin cancer and cataracts. Therefore, in a space where people are constantly present, such as a living space, it is necessary to perform an operation to start / stop the light output from the light source so as not to irradiate people with ultraviolet light.

[0008] However, in the above-described sterilization system, the location of the light source and the irradiation location are not close to each other. When a person enters the irradiation location, or when ultraviolet light leaks due to, for example, the optical fiber connecting the light source and the irradiation location being broken, the light source side cannot grasp this fact, and there is a risk of causing ultraviolet exposure to people because the operation to stop the light output cannot be performed. That is, the conventional decontamination system using an optical fiber has a problem that it is difficult to grasp a state that causes ultraviolet exposure and block the ultraviolet light.

[0009] Therefore, an object of the present invention is to provide an ultraviolet light irradiation system and an ultraviolet light irradiation method that can grasp the state of an ultraviolet light irradiation region and output / block ultraviolet light in order to solve the above problems.

Means for Solving the Problems

[0010] To achieve the above object, the ultraviolet light irradiation system according to the present invention is configured to confirm the state of the ultraviolet light irradiation region by a sensor unit and control the output / block of ultraviolet light.

[0011] Specifically, the ultraviolet light irradiation system according to the present invention An ultraviolet light source unit that generates ultraviolet light, N (N is a natural number) irradiation units that irradiate the ultraviolet light to a desired location, A sensor unit that detects whether there is an avoidance target to be avoided from being exposed to the explosion at the desired location, A blocking unit that stops irradiating the ultraviolet light from the irradiation unit to the desired location when the avoidance target exists at the desired location, Comprising.

[0012] In addition, the ultraviolet light irradiation method according to the present invention is an ultraviolet light irradiation method in which ultraviolet light generated by an ultraviolet light source unit is irradiated from N (N is a natural number) irradiation units to a desired location, Detecting whether there is an avoidance target to be avoided from being exposed to the explosion at the desired location, and When the avoidance target exists at the desired location, stopping irradiating the ultraviolet light from the irradiation unit to the desired location, Characterized by.

[0013] This ultraviolet light irradiation system checks the state of the irradiation area of ultraviolet light with a sensor unit, blocks the ultraviolet light when detecting an object (person or animal) to be avoided from being exposed to the explosion of ultraviolet light, and outputs the ultraviolet light to the irradiation area when not detecting the avoidance target. Therefore, the present invention can provide an ultraviolet light irradiation system and an ultraviolet light irradiation method capable of grasping the state of the ultraviolet light irradiation area and outputting / blocking the ultraviolet light.

[0014] For example, the blocking unit of the ultraviolet light irradiation system according to the present invention is arranged in the optical transmission path from the ultraviolet light source unit to the irradiation unit, closes the optical transmission path when the avoidance target exists at the desired location, and opens when the avoidance target does not exist at the desired location, and is characterized by being an optical shutter.

[0015] For example, the blocking unit of the ultraviolet light irradiation system according to the present invention is a light source control unit that stops outputting the ultraviolet light to the ultraviolet light source unit when the avoidance target exists at the desired location, and outputs the ultraviolet light to the ultraviolet light source unit when the avoidance target does not exist at the desired location, and is characterized by this.

[0016] When the blocking unit is the light source control unit, the information from the sensor unit may be transmitted to the light source control unit via a path different from the optical transmission path from the ultraviolet light source unit to the irradiation unit.

[0017] Also, when the blocking unit is the light source control unit, the information from the sensor unit may be transmitted to the light source control unit via the optical transmission path from the ultraviolet light source unit to the irradiation unit at a wavelength different from that of the ultraviolet light.

[0018] The ultraviolet light irradiation system according to the present invention may be configured to branch ultraviolet light and irradiate a plurality of irradiation regions. In the case of this configuration (when N ≥ 2), identification information is given to each of the sensor units, the ultraviolet light source unit is composed of one or more light sources that supply the ultraviolet light to the respective irradiation units, and the light source control unit causes the output or output stop of the ultraviolet light supplied from the light source based on the identification information which is a feature.

[0019] The ultraviolet light irradiation system according to the present invention further includes a sensor information light source unit that supplies a carrier light wave having a wavelength different from that of the ultraviolet light to the sensor unit side on the ultraviolet light source unit side, and further includes an optical modulation unit on the sensor unit side that modulates the carrier light wave to generate information from the sensor unit and transmits it to the light source control unit which is preferable. By supplying a carrier wave for the optical signal output from the sensor unit side from the light source side, a light source is not required on the sensor unit side, and the power consumption can be reduced accordingly.

[0020] In addition, the above inventions can be combined as much as possible.

Effects of the Invention

[0021] The present invention can provide an ultraviolet light irradiation system and an ultraviolet light irradiation method capable of grasping the state of an ultraviolet light irradiation region and outputting / blocking ultraviolet light.

Brief Description of the Drawings

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Embodiments for Carrying Out the Invention

[0023] Embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments described below are examples of the present invention, and the present invention is not limited to the following embodiments. In the present specification and drawings, components having the same reference numerals are assumed to be the same as each other.

[0024] (Gist of the Invention) FIG. 1 and FIGS. 4 to 9 are diagrams for explaining the ultraviolet light irradiation system of the present invention. The basic structure of this system is such that an ultraviolet light source unit 11 and an ultraviolet light irradiation unit 13 are connected by an optical transmission path 70 for transmitting ultraviolet light, and it is equipped with a sensor unit 31 for detecting the presence or absence of an avoidance target (such as a person or an animal) for which ultraviolet light irradiation should be avoided in the irradiation target Ar. When the sensor unit 31 detects an avoidance target in the irradiation target Ar, this system can prevent exposure of the avoidance target to ultraviolet rays by stopping the output of ultraviolet light from the ultraviolet light source unit 11 or blocking the ultraviolet light propagating through the optical transmission path 70. The structural example of this system will be described in detail below.

[0025] (Embodiment 1) FIG. 1 is a diagram for explaining the ultraviolet light irradiation system 301 of this embodiment. The ultraviolet light irradiation system 301 includes an ultraviolet light source unit 11 that generates ultraviolet light, N (N is a natural number) irradiation units 13 that irradiate the irradiation target Ar with the ultraviolet light, a sensor unit 31 that detects whether or not there is an avoidance target that should avoid exposure in the irradiation target Ar, and a blocking unit 30 that stops irradiating the irradiation target Ar with the ultraviolet light from the irradiation unit 13 when the avoidance target exists in the irradiation target Ar. It is provided with these.

[0026] The blocking unit 30 of the ultraviolet light irradiation system 301 is arranged in the optical transmission path 70 from the ultraviolet light source unit 11 to the irradiation unit 13, and is characterized by being an optical shutter 33 that closes the optical transmission path when the avoidance target exists in the irradiation target Ar and opens it when the avoidance target does not exist in the irradiation target Ar.

[0027] The optical transmission path 70 transmits ultraviolet light to each irradiation unit 13. If the optical transmission path 70 is an optical fiber or an optical cable described below, the irradiation unit 13 can also be laid in a fine place where a conventional robot or device cannot enter.

[0028] FIG. 2 is a diagram for explaining an optical cable or a multi-core optical fiber constituting the optical transmission path 70. FIG. 2(A) is an optical cable formed by bundling a plurality of single-core optical fibers 21. FIG. 2(B) is a multi-core optical fiber having a plurality of cores 22. FIG. 2(C) is an optical cable formed by bundling a plurality of multi-core optical fibers 23.

[0029] FIG. 3 is a diagram for explaining the cross sections of the single-core optical fiber and the multi-core optical fiber described above. That is, the optical cable of the single-core optical fiber or the multi-core optical fiber shown in FIG. 3, or the multi-core optical fiber can be used as the optical transmission path 70. In addition to the solid-core optical fiber using a general additive as shown in FIG. 3(1), an optical fiber having a hole structure described in FIGS. 3(2) to (4), a multi-core optical fiber having a plurality of core regions described in FIGS. 3(5) and (6), or an optical fiber having a structure combining them (FIGS. 3(7) to (10)) may be used.

[0030] (1) Solid-core optical fiber This optical fiber has one solid core 52 having a refractive index higher than that of the cladding 60 inside the cladding 60. "Solid" means "not hollow". Note that the solid core can also be realized by forming an annular low-refractive-index region inside the cladding. (2) Hole-assisted optical fiber This optical fiber has a solid core 52 inside the cladding 60 and a plurality of holes 53 arranged on the outer periphery thereof. The medium of the holes 53 is air, and the refractive index of air is sufficiently small compared to silica glass. Therefore, the hole-assisted optical fiber has a function of returning the light leaked from the core 52 due to bending or the like back to the core 52 again, and is characterized by a small bending loss. (3) Hole-structured optical fiber This optical fiber has a pore group 53a of a plurality of pores 53 in a cladding 60, and has a refractive index that is lower than that of a host material (such as glass) more effectively. This structure is called a photonic crystal fiber. This structure can take a structure in which there is no high refractive index core with a changed refractive index, and the region 52a surrounded by the pores 53 can be used as an effective core region to confine light. Compared with an optical fiber having a solid core, the photonic crystal fiber can reduce the influence of absorption and scattering loss due to core additives, and can realize optical characteristics that cannot be realized in a solid-core optical fiber, such as reduction of bending loss and control of non-linear effects. (4) Hollow-core optical fiber In this optical fiber, the core region is formed of air. Light can be confined in the core region by taking a photonic bandgap structure formed by a plurality of pores or an anti-resonant structure formed by glass fine wires in the cladding region. This optical fiber has a small non-linear effect and can supply high-power or high-energy lasers. (5) Coupled-core type optical fiber In this optical fiber, a plurality of solid cores 52 having a high refractive index are arranged close to each other in a cladding 60. This optical fiber guides light by optical wave coupling between the solid cores 52. Since the coupled-core type optical fiber can disperse and transmit light by the number of cores, it can be made high-power and sterilized efficiently. In addition, the coupled-core type optical fiber has the merit that it can mitigate fiber degradation due to ultraviolet rays and extend its life. (6) Solid-core multi-core optical fiber In this optical fiber, a plurality of solid cores 52 having a high refractive index are arranged apart from each other in a cladding 60. This optical fiber guides light in a state where the optical wave coupling between the solid cores 52 is made sufficiently small and the influence of optical wave coupling can be ignored. Therefore, the solid-core multi-core optical fiber has the merit that each core can be treated as an independent waveguide. (7) Pore-assisted multi-core optical fiber This optical fiber has a structure in which the pore structure and core regions of (2) above are arranged in a cladding 60. (8) Pore-structured multi-core optical fiber This optical fiber has a structure in which a plurality of the hole structures of (3) above are arranged in the cladding 60. (9) Hollow-core multi-core optical fiber This optical fiber has a structure in which a plurality of the hole structures of (4) above are arranged in the cladding 60. (10) Coupled-core multi-core optical fiber This optical fiber has a structure in which a plurality of the coupled-core structures of (5) above are arranged in the cladding 60.

[0031] Note that for the propagation modes in these optical fibers, not only single-mode but also multi-mode may be used.

[0032] The ultraviolet light source unit 11 outputs ultraviolet light to the optical transmission path 70. The ultraviolet light source unit 11 may be composed of one or more ultraviolet light sources. When the optical transmission path 70 is an optical cable, the ultraviolet light source unit 11 inputs light to each optical fiber. When the optical transmission path 70 is a multi-core optical fiber, the ultraviolet light source unit 11 inputs light to each core.

[0033] The irradiation unit 13 irradiates the ultraviolet light transmitted through the optical transmission path 70 onto the desired irradiation target Ar. The irradiation unit 13 is composed of an optical system such as a lens designed for wavelengths in the ultraviolet region. The sensor unit 31 detects the movement of an avoidance target (such as a person or an animal) around the irradiation target Ar.

[0034] The blocking unit 30 of the ultraviolet light irradiation system 301 has an irradiation control unit 32 and an optical shutter 33. When an avoidance target is detected based on the information from the sensor unit 31, the irradiation control unit 32 blocks the ultraviolet light with the optical shutter 33 and stops outputting ultraviolet light from the irradiation unit 13. On the other hand, when no avoidance target is detected based on the information from the sensor unit 31, the irradiation control unit 32 opens the optical shutter 33 and starts outputting ultraviolet light from the irradiation unit 13.

[0035] The optical shutter 33 blocks or transmits the ultraviolet light propagating through the optical transmission path 70 based on an instruction from the irradiation control unit 32.

[0036] When there is an avoidance target in the irradiation target Ar, the ultraviolet light irradiation system 301 closes the optical shutter 33 to stop the output of ultraviolet light to the irradiation target Ar, and when there is no avoidance target in the irradiation target Ar, it opens the optical shutter 33 to resume the output of ultraviolet light to the irradiation target Ar. Therefore, the ultraviolet light irradiation system 301 can grasp the state of the ultraviolet light irradiation area and output / block ultraviolet light.

[0037] In the ultraviolet light irradiation system 301 of FIG. 1, there is one ultraviolet light source unit 11 and one irradiation unit 13 each, but a light distribution unit may be provided in the optical transmission path 70 to form one ultraviolet light source unit 11 and N irradiation units 13, and a blocking unit 30 may be arranged for each of the irradiation units 13.

[0038] (Embodiment 2) FIG. 4 is a diagram for explaining the ultraviolet light irradiation system 302 of the present embodiment. The ultraviolet light irradiation system 302 has a different configuration of the blocking unit 30 from the ultraviolet light irradiation system 301 of FIG. 1. The blocking unit 30 of the ultraviolet light irradiation system 302 is a light source control unit 35 that stops the output of the ultraviolet light to the ultraviolet light source unit 11 when the avoidance target exists in the irradiation target Ar, and outputs the ultraviolet light to the ultraviolet light source unit 11 when the avoidance target does not exist in the irradiation target Ar. In this embodiment, it is characterized in that the information from the sensor unit 13 reaches the light source control unit 35 via a path different from the optical transmission path 70 from the ultraviolet light source unit 11 to the irradiation unit 13. In this embodiment, only the configuration different from that of the ultraviolet light irradiation system 301 will be described.

[0039] The blocking unit 30 of this embodiment includes a sensor information output unit 34, a light source control unit 35, and a signal path 71. The sensor information output unit 34 includes a transmitter and transmits the information detected by the sensor unit 31 to the signal path 71. The signal path 71 can be an optical fiber, a metal wire, or wireless. When the signal path 71 is an optical fiber, the signal path 71 can be an optical fiber that propagates the ultraviolet light of the optical transmission path 70, an optical fiber other than the core, or the core. When the signal path 71 is an optical fiber, the transmitter is an optical transmitter and modulates the carrier light with the information from the sensor unit 31. The same applies when the signal path 71 is a metal wire or wireless. When the light source control unit 35 detects an avoidance target based on the information received from the sensor unit 31 via the signal path 71, the light source control unit 35 stops the output of the ultraviolet light from the ultraviolet light source unit 11. On the other hand, when the light source control unit 35 does not detect an avoidance target based on the information received from the sensor unit 31 via the signal path 71, the light source control unit 35 starts the output of the ultraviolet light from the ultraviolet light source unit 11.

[0040] The ultraviolet light irradiation system 302 stops the output of the ultraviolet light from the ultraviolet light source unit 11 if there is an avoidance target in the irradiation target Ar, and resumes the output of the ultraviolet light from the ultraviolet light source unit 11 if the avoidance target disappears from the irradiation target Ar. Therefore, the ultraviolet light irradiation system 302 can grasp the state of the ultraviolet light irradiation area and output / block the ultraviolet light.

[0041] (Embodiment 3) FIG. 5 is a diagram for explaining the ultraviolet light irradiation system 303 of this embodiment. The ultraviolet light irradiation system 303 has a different configuration of the blocking unit 30 from the ultraviolet light irradiation system 301 in FIG. 1. The blocking unit 30 of the ultraviolet light irradiation system 303 is a light source control unit 35 that stops the output of the ultraviolet light to the ultraviolet light source unit 11 when the avoidance target exists in the irradiation target Ar, and outputs the ultraviolet light to the ultraviolet light source unit 11 when the avoidance target does not exist in the irradiation target Ar. In this embodiment, the information from the sensor unit 31 is characterized in that it reaches the light source control unit 35 via the optical transmission path 70 from the ultraviolet light source unit 11 to the irradiation unit 13 at a wavelength different from that of the ultraviolet light. In this embodiment, only the configuration different from that of the ultraviolet light irradiation system 301 will be described.

[0042] The blocking unit 30 of this embodiment includes a sensor information output unit 34, a light source control unit 35, an optical multiplexer / demultiplexer (36, 37), and a signal path 50.

[0043] The sensor information output unit 34 includes a transmitter and transmits the information detected by the sensor unit 31 to the signal path 71. The transmitter is an optical transmitter and modulates the carrier light with the information from the sensor unit 31. The wavelength of the carrier light is a wavelength that can be wavelength-division multiplexed or demultiplexed with the ultraviolet light used for decontamination, and any wavelength is acceptable as long as it can form an optical transmitter. In this embodiment, as an example, the case where the carrier light is infrared light will be described.

[0044] The optical multiplexer / demultiplexer (36, 37) multiplexes / demultiplexes the infrared light that transmits the sensor information from the sensor information light output unit 34 onto / from the optical transmission path 70 that transmits the ultraviolet light irradiated from the irradiation unit 13. Here, the ultraviolet light and the infrared light can be transmitted through the same optical fiber or the same core. When the optical transmission path 70 is a multi-core optical fiber, the core for transmitting the ultraviolet light and the core for transmitting the sensor information may be different cores. In that case, the optical multiplexer / demultiplexer (36, 37) is a fan-in / fan-out device.

[0045] When the light source control unit 35 detects an avoidance target based on the information from the sensor unit 31 separated by the optical multiplexer / demultiplexer 37, the light source control unit 35 stops the output of the ultraviolet light from the ultraviolet light source unit 11. On the other hand, when the light source control unit 35 does not detect an avoidance target based on the information from the sensor unit 31 separated by the optical multiplexer / demultiplexer 37, the light source control unit 35 starts the output of the ultraviolet light from the ultraviolet light source unit 11.

[0046] The ultraviolet light irradiation system 303 stops the output of the ultraviolet light from the ultraviolet light source unit 11 if there is an avoidance target in the irradiation target Ar, and resumes the output of the ultraviolet light from the ultraviolet light source unit 11 when the avoidance target disappears from the irradiation target Ar. Therefore, the ultraviolet light irradiation system 303 can grasp the state of the ultraviolet light irradiation area and output / block the ultraviolet light.

[0047] (Embodiment 4) FIG. 6 is a diagram for explaining the ultraviolet light irradiation system 304 of the present embodiment. The ultraviolet light irradiation system 304 is different from the ultraviolet light irradiation system 303 in FIG. 4 in that the number of irradiation units 13 is plural (N≧2). When N≧2, identification information is given to each sensor unit 13, the ultraviolet light source unit 11 is composed of one or more light sources that supply the ultraviolet light to the respective irradiation units 13, and the light source control unit causes the output or output stop of the ultraviolet light supplied from the light source based on the identification information characterized in that. In the present embodiment, only the configuration different from that of the ultraviolet light irradiation system 303 will be described.

[0048] The optical transmission path 70 of the present embodiment is an optical cable formed by bundling single-core optical fibers in FIG. 2(A), or a multi-core optical fiber in FIG. 2(B). As shown in FIG. 7(A), the ultraviolet light source unit 11 has a plurality (N units) of light sources 11a. The ultraviolet light from each light source 11a is incident on each core 70a of the single-core optical fiber or the core 70a of the multi-core optical fiber of the optical transmission path 70 via the optical system 11b. Further, as another configuration, the inside of the ultraviolet light source unit 11 may be configured as shown in FIG. 7(B). The ultraviolet light from a single light source 11a is incident on each core 70a of the single-core optical fiber or the core 70a of the multi-core optical fiber of the optical transmission path 70 via the optical system 11b and the demultiplexer 11c. The light source 11a may have a configuration in which a plurality of light sources are arrayed inside and used as one light source.

[0049] The optical distribution unit 75 distributes the ultraviolet light transmitted from the ultraviolet light source unit 11 to a plurality (N) of single-core optical fibers 72. Specifically, the optical distribution unit 75 connects each optical fiber of the optical transmission path 70 or each core of the multi-core optical fiber and each single-core optical fiber 72 in a one-to-one manner. That is, the light source 11a of the ultraviolet light source unit 11 and the irradiation target Ar have a one-to-one relationship.

[0050] The sensor information optical output units (34-1 to 34-N) have the following functions in addition to the functions of the aforementioned sensor information optical output unit 34. The sensor information optical output units (34-1 to 34-N) generate optical signals of sensor information at different wavelengths for each irradiation target Ar, and transmit them to the ultraviolet light source unit 11 side through either the optical fiber or the core of the optical transmission path 70 via the optical multiplexer / demultiplexer units (36-1 to 36-N), the single-core optical fiber 72, and the optical distribution unit 75. Alternatively, the sensor information optical output units (34-1 to 34-N) generate optical signals of sensor information for each irradiation target Ar at wavelengths different from the wavelength of the ultraviolet light output from the irradiation unit 13 (for example, infrared light), and transmit them to the ultraviolet light source unit 11 side through either the optical fiber or the core of the respective optical transmission paths 70 corresponding to the irradiation target Ar via the optical multiplexer / demultiplexer units (36-1 to 36-N), the single-core optical fiber 72, and the optical distribution unit 75.

[0051] On the ultraviolet light source unit 11 side, there is a sensor information management unit 38. The sensor information management unit 38 manages the surrounding situation (existence or non-existence of an avoidance target) of each irradiation target Ar based on the received sensor information, and notifies the light source control unit 35. The light source control unit 35 gives an instruction to the ultraviolet light source unit 11 to output ultraviolet light from the light source 11a corresponding to the irradiation target Ar without an avoidance target, and an instruction not to output ultraviolet light from the light source 11a corresponding to the irradiation target Ar with an avoidance target.

[0052] The ultraviolet light irradiation system 304 stops the output of ultraviolet light from the ultraviolet light source unit 11 for each irradiation target Ar if there is an avoidance target, and resumes the output of ultraviolet light from the ultraviolet light source unit 11 when the avoidance target disappears. Therefore, the ultraviolet light irradiation system 304 can grasp the state for each ultraviolet light irradiation area and output / block ultraviolet light.

[0053] (Embodiment 5) FIG. 8 is a diagram for explaining the ultraviolet light irradiation system 305 of this embodiment. The ultraviolet light irradiation system 305 is different from the ultraviolet light irradiation system 304 in FIG. 6 in that the optical transmission path 70 is an optical cable formed by bundling a plurality of multi-core optical fibers in FIG. 2(C).

[0054] As shown in FIG. 7, the ultraviolet light source unit 11 has a plurality (N units) of light sources 11a. The ultraviolet light from each light source 11a is incident on each of the cores 70a of the multi-core optical fiber of the optical transmission path 70 via the optical system 11b.

[0055] The light distribution unit 75 distributes the ultraviolet light transmitted from the ultraviolet light source unit 11 to a plurality (N) of multi-core optical fibers 73. Specifically, the light distribution unit 75 connects each multi-core optical fiber of the optical transmission path 70 and each multi-core optical fiber 73 in a one-to-one manner. That is, there is a one-to-one relationship between the light source 11a of the ultraviolet light source unit 11 and the irradiation target Ar.

[0056] The sensor information optical output units (34-1 to 34-N) and the optical multiplexer / demultiplexer units (36-1 to 36-N) are different from the ultraviolet light irradiation system 304 in FIG. 6 in the following points. The sensor information optical output units (34-1 to 34-N) generate optical signals of sensor information for each irradiation target Ar, and transmit them to the ultraviolet light source unit 11 side via the optical transmission path 70 through the optical multiplexer / demultiplexer units (36-1 to 36-N), the multi-core optical fibers 73, and the light distribution unit 75. At this time, the optical multiplexer / demultiplexer units (36-1 to 36-N) make the optical signals of the sensor information incident on the cores of the multi-core optical fibers 73 so as to satisfy the following two conditions in the optical transmission path 70. (1) It is other than the core that propagates the ultraviolet light irradiated to the irradiation region Ar (2) It is a different core for each irradiation region Ar By satisfying the above conditions, the sensor information management unit 38 can identify which irradiation target Ar the sensor information is from.

[0057] The operation on the ultraviolet light source unit 11 side is the same as the operation on the ultraviolet light source unit 11 side of the ultraviolet light irradiation system 304 in FIG. 6.

[0058] The ultraviolet light irradiation system 305 also stops the output of the ultraviolet light of the ultraviolet light source unit 11 for each irradiation target Ar if there is an avoidance target, and resumes the output of the ultraviolet light of the ultraviolet light source unit 11 when the avoidance target disappears. Therefore, the ultraviolet light irradiation system 305 can grasp the state for each ultraviolet light irradiation region and output / block the ultraviolet light.

[0059] (Embodiment 6) FIG. 9 is a diagram for explaining the ultraviolet light irradiation system 306 of the present embodiment. The ultraviolet light irradiation system 306 is different from the ultraviolet light irradiation system 305 in FIG. 8 in that the light distribution unit is configured in multiple stages.

[0060] The ultraviolet light irradiation system 306 includes one light distribution unit 75-1 and M light distribution units 75-2. The light distribution unit 75-1 is the same as the light distribution unit 75 included in the ultraviolet light irradiation system 305 in FIG. 8, and distributes the ultraviolet light transmitted from the ultraviolet light source unit 11 to a plurality (M) of multi-core optical fibers 73. Specifically, the light distribution unit 75-1 connects each multi-core optical fiber of the optical transmission path 70 and each multi-core optical fiber 73 in a 1:1 manner. The light distribution unit 75-2 is the same as the light distribution unit 75 included in the ultraviolet light irradiation system 304 in FIG. 6, and distributes the ultraviolet light transmitted through the multi-core optical fiber 73 to a plurality (N) of single-core optical fibers 72. Specifically, the light distribution unit 75-2 connects each core of the multi-core optical fiber 73 and each single-core optical fiber 72 in a 1:1 manner.

[0061] The optical transmission path 70 is an optical cable formed by bundling a plurality of multi-core optical fibers in FIG. 2(C). As the optical fiber 72, an optical fiber having the structure described in FIGS. 3(1) to 3(5) can be used.

[0062] The functions of the sensor information optical output units (34-1 to 34-N) and the sensor information management unit 38 are the same as those of the sensor information optical output units (34-1 to 34-N) and the sensor information management unit 38 included in the ultraviolet light irradiation system 304 in FIG. 6.

[0063] For each irradiation target Ar, the ultraviolet light irradiation system 306 stops the output of the ultraviolet light from the ultraviolet light source unit 11 if there is an avoidance target, and resumes the output of the ultraviolet light from the ultraviolet light source unit 11 when the avoidance target disappears. Therefore, the ultraviolet light irradiation system 306 can grasp the state for each ultraviolet light irradiation area and output / block the ultraviolet light.

[0064] (Embodiment 7) FIG. 10 is a diagram for explaining the ultraviolet light irradiation system 307 of the present embodiment. The ultraviolet light irradiation system 307 is different from the ultraviolet light irradiation system 303 in FIG. 5 in that the carrier light of the optical signal of the sensor information transmitted from the sensor side is supplied from the ultraviolet light source unit side.

[0065] Specifically, the ultraviolet light irradiation system 307, compared with the ultraviolet light irradiation system 303 in FIG. 5, further includes a sensor information light source unit 39 that supplies carrier light having a wavelength different from that of the ultraviolet light to the sensor unit 31 side on the ultraviolet light source unit 11 side, and on the sensor unit side, as an alternative to the sensor information output unit 34, includes an optical modulation unit 34a that modulates the carrier light to generate sensor information from the sensor unit 31 and transmits it to the light source control unit 35. This is the feature.

[0066] Hereinafter, only the differences from the ultraviolet light irradiation system 303 will be described. The sensor information light source unit 39 generates carrier light (continuous light) having a wavelength different from that of the ultraviolet light (for example, infrared light). The carrier light passes through the optical circulator 33-1 and is multiplexed with the optical transmission path 70 by the optical multiplexer / demultiplexer 37. The carrier light may be multiplexed with the same core as the ultraviolet light in the optical transmission path 70, or may be multiplexed with a core or optical fiber different from the ultraviolet light. The carrier light is separated from the optical transmission path 70 by the optical multiplexer / demultiplexer 36, passes through the signal path 71 and the optical circulator 33-2, and is supplied to the sensor information optical modulation unit 34a. The sensor information optical modulation unit 34a corresponds to the sensor information output unit 34 provided in the ultraviolet light irradiation system 303 in FIG. 5.

[0067] The sensor information optical modulation unit 34a modulates the supplied carrier light with the sensor information notified from the sensor unit 31, and outputs the optical signal of the sensor information to the signal path 71. The optical signal passes through the signal path 71 and the optical circulator 33-2, and is multiplexed into the optical transmission path 70 by the optical multiplexer / demultiplexer 36. The signal light may be multiplexed into the same core as the ultraviolet light in the optical transmission path 70, or may be multiplexed into a core or an optical fiber different from the ultraviolet light. However, the signal light is multiplexed into a core or an optical fiber different from the carrier light. The signal light is separated from the optical transmission path 70 by the optical multiplexer / demultiplexer 37, passes through the signal path 71 and the optical circulator 33-1, and enters the light source control unit 35. The operation of the light source control unit 35 is the same as that of the light source control unit 35 included in the ultraviolet light irradiation system 303.

[0068] The ultraviolet light irradiation system 307 stops the output of the ultraviolet light from the ultraviolet light source unit 11 if there is an avoidance target for the irradiation target Ar, and resumes the output of the ultraviolet light from the ultraviolet light source unit 11 when the avoidance target disappears from the irradiation target Ar. Therefore, the ultraviolet light irradiation system 307 can grasp the state of the ultraviolet light irradiation area and output / block the ultraviolet light. Further, the ultraviolet light irradiation system 307 does not need to arrange a light source on the sensor unit 31 side, and can reduce the power consumption on the sensor unit 31 side by the amount of the light source compared with the ultraviolet light irradiation system 303.

[0069] (Embodiment 8) FIG. 11 is a flowchart for explaining an ultraviolet light irradiation method using the ultraviolet light irradiation system (301 to 307) of the present embodiment. This ultraviolet light irradiation method is an ultraviolet light irradiation method for irradiating an irradiation location Ar with ultraviolet light generated by an ultraviolet light source unit 11 from N (N is a natural number) irradiation units 13, and detecting whether there is an avoidance target to be avoided from exposure at the irradiation location Ar (step S01), when the avoidance target does not exist at the irradiation location Ar (No in step S02), irradiating the ultraviolet light from the irradiation unit 13 to the irradiation location Ar (step S03), and When the object to be avoided exists in the irradiation area Ar (Yes in step S02), stop irradiating the ultraviolet light from the irradiation unit 13 to the irradiation area Ar (step S04). It is characterized by the above.

Explanation of symbols

[0070] 11: Ultraviolet light source unit 11a: Light source 11b: Optical system 13: Irradiation unit 21: Single-core optical fiber 22: Core 23: Multi-core optical fiber 30: Blocking unit 31: Sensor unit 32: Irradiation control unit 33: Optical shutter 33-1, 33-2: Optical circulator 34: Sensor information optical output unit 34a: Sensor information optical modulation unit 35: Light source control unit 36, 37: Optical multiplexer / demultiplexer 38: Sensor information management unit 39: Sensor information light source unit 52: Solid core 52a: Region 53: Hole 53a: Hole group 60: Cladding 70: Optical transmission path 71: Signal path 72: Single-core optical fiber 73: Multi-core optical fiber 75, 75-1, 75-2: Optical distribution unit 301~307: Ultraviolet light irradiation system

Claims

【Claim 1】 An ultraviolet light source unit that generates ultraviolet light; N (N is a natural number) irradiation units that irradiate the ultraviolet light to a desired location; An optical transmission path that propagates the ultraviolet light from the ultraviolet light source unit to the irradiation unit; A sensor unit that detects whether or not there is an avoidance target for which exposure should be avoided at the desired location; A blocking unit that stops irradiating the ultraviolet light from the irradiation unit to the desired location when the avoidance target exists at the desired location; An ultraviolet light irradiation system comprising: The blocking unit is a light source control unit that stops outputting the ultraviolet light to the ultraviolet light source unit when the avoidance target exists at the desired location, and outputs the ultraviolet light to the ultraviolet light source unit when the avoidance target does not exist at the desired location; The information from the sensor unit has a wavelength different from that of the ultraviolet light, is multiplexed onto the optical transmission path by an optical multiplexer / demultiplexer on the irradiation unit side, propagates in the direction of the ultraviolet light source unit through the optical transmission path, is demultiplexed from the optical transmission path by an optical multiplexer / demultiplexer on the ultraviolet light source unit side, and reaches the light source control unit. Characterized in that: On the ultraviolet light source unit side, further comprising a sensor information light source unit that supplies a carrier light wave having a wavelength different from that of the ultraviolet light to the sensor unit side; On the sensor unit side, further comprising an optical modulation unit that modulates the carrier light wave to generate information from the sensor unit and transmits it to the light source control unit. An ultraviolet light irradiation system characterized by the above.

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