Cutting device

Abstract

To provide a cutting device that eliminates the need to manually remove a cutting blade from a blade case.SOLUTION: A cutting device comprises: a cutting unit including a spindle serving as a rotation shaft, and a mount flange which is fixed to a tip of the spindle and on which a cutting blade is mounted; a support unit including a blade case support portion supporting a blade case in which the cutting blade is housed, and supporting the cutting blade housed in the blade case; a replacement mechanism which removes the cutting blade from the mount flange with the cutting blade attached thereto and attaches the cutting blade supported by the support unit to the mount flange; and a moving mechanism that moves the replacement mechanism among a replacement position where the cutting blade can be attached to / detached from the mount flange, a blade transfer position where the cutting blade can be transferred to / received from the support unit, and a retraction position apart from the replacement position and the blade transfer position.SELECTED DRAWING: Figure 10

Description

Technical Field

[0001] The present invention relates to a cutting device for cutting a workpiece with a cutting blade.

Background Art

[0002] By dividing a wafer on which a plurality of devices typified by semiconductor integrated circuits are formed, a plurality of device chips each having a device are manufactured. Further, after mounting a plurality of device chips on a predetermined substrate and covering the mounted device chips with a sealing material (mold resin), a package substrate is obtained. By dividing this package substrate, a packaged device including one or a plurality of packaged device chips is manufactured. The packaged device is mounted on various electronic devices such as mobile phones and personal computers.

[0003] When dividing a workpiece such as a wafer or a package substrate, a cutting device is used. The cutting device includes a chuck table for holding the workpiece and a cutting unit for performing cutting on the workpiece. The cutting unit includes a spindle and a mount flange fixed to the tip of the spindle, and an annular cutting blade for cutting the workpiece is mounted on the mount flange.

[0004] The mount flange has a boss portion that is inserted into an opening provided at the center of the cutting blade. The cutting blade is fixed to the mount flange by a nut that is tightened on the boss portion with the boss portion of the mount flange inserted into the opening. When the spindle is rotated with the cutting blade mounted on the mount flange, the cutting blade rotates. By cutting the rotating cutting blade into the workpiece held by the chuck table, the workpiece is cut and divided.

[0005] The cutting blade wears out during the cutting process of the workpiece and is replaced as needed. When replacing the cutting blade, first loosen the nut and remove it from the boss part. Next, remove the cutting blade mounted on the mounting flange from the mounting flange. Then, mount the replacement cutting blade (for example, an unused cutting blade) on the mounting flange, and then tighten the nut on the boss part to fix the replacement cutting blade to the mounting flange.

[0006] Performing such replacement of the cutting blade manually is time-consuming and there is a risk of accidentally dropping the cutting blade or the nut during the operation or hitting them against the cutting device. Therefore, a cutting device equipped with an exchange device that automatically exchanges the cutting blade mounted on the cutting unit (spindle unit) has been proposed so that the replacement of the cutting blade can be done without manual operation (see, for example, Patent Document 1).

[0007] The exchange device of the cutting device described above includes a cutting blade attachment / detachment mechanism for attaching and detaching the cutting blade, and a nut attachment / detachment mechanism for attaching and detaching the nut for fixing the cutting blade to the cutting unit. Further, the cutting blade attachment / detachment mechanism includes a first holding part for gripping the mounted cutting blade mounted on the spindle, and a second holding part for gripping the replacement cutting blade that can be exchanged with the mounted cutting blade.

Prior Art Documents

Patent Documents

[0008]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0009] By the way, in the cutting device described above, the second holding part of the cutting blade attachment / detachment mechanism holds the replacement cutting blade housed in the blade stocker within the cutting device, and attaches this replacement cutting blade to the spindle. The blade stocker has, for example, a shaft that is inserted into the opening of the cutting blade. After the cutting blade is taken out from the blade case that houses this cutting blade, for example, it is manually hung on the shaft and housed in the blade stocker.

[0010] However, if the removal of the cutting blade from the blade case and the housing of the cutting blade in the blade stocker are performed manually, there is a risk of accidentally dropping the cutting blade or nut, or hitting them against the cutting device.

[0011] The present invention has been made in view of such problems, and an object thereof is to provide a cutting device that does not require manual removal of the cutting blade from the blade case.

Means for Solving the Problems

[0012] According to one aspect of the present invention, a cutting unit including a spindle serving as a rotation axis and a mount flange fixed to the tip of the spindle to which a cutting blade is attached , cutting Cutting blade is Housing made Blade case is placed Including a blade case support part, in a state of being housed in the blade case by cutting A support unit that supports the cutting blade , cutting From the mount flange in a state where the cutting blade is attached already attached Removing the cutting blade, and the support unit is housed in the blade case placed on The cutting blade taken out from the blade case An exchange mechanism that attaches the cutting blade to the mount flange, and the mount flange remove the attached cutting blade from and the mounting flange With respect to the for replacement The cutting blade of attaching At an exchange position where it can be already attached The cutting blade and the replacement cutting blade A cutting device is provided that includes a transfer mechanism for moving the exchange mechanism between a blade transfer position where transfer can be performed, an exchange position, and a retracted position away from the exchange position and the blade transfer position.

[0013] In one aspect of the present invention, the support unit further includes a rotation mechanism for rotating the blade case support portion, and the blade case support portion is arranged along the direction of rotation by the rotation mechanism and each to the blade case is placed may have a plurality of blade case support portions.

[0014] Also, in one aspect of the present invention, the mount flange includes a fixed mount fixed to the spindle and between the fixed mount for cutting a pressing flange attached to the fixed mount so as to sandwich and fix the cutting blade, and the support unit further includes a pressing flange support portion for supporting the pressing flange. The exchange mechanism, together with the pressing flange, for replacement attaches the cutting blade to the receiving flange and, together with the pressing flange, already attached may remove the cutting blade from the receiving flange.

[0015] Also, in one aspect of the present invention, the blade case , cutting has a housing portion for housing the cutting blade and a lid portion for closing the housing portion, and the cutting device may further include an opening / closing unit for opening and closing the lid portion of the blade case.

[0016] Also, in one aspect of the present invention, the cutting device , cutting includes a dressing board used for dressing the cutting blade or is for cutting a table for holding an inspection board on which inspection grooves are formed by the cutting blade, and the support unit , do dressing board or is for inspection further includes a board support portion for supporting the inspection board. The transfer mechanism, between it and the support unit by doing dressing board or is for inspection A board transfer position where a inspection board can be transferred, and for the table by doing a dressing board or is for inspection a carry-in / carry-out position where an inspection board can be carried in and out, the replacement position, the blade transfer position, and the storage position, and move the replacement mechanism among them, and the replacement mechanism , do a dressing board or is for inspection remove the dressing board or already attached a dressing board or already attached the inspection board from the table with the dressing board or for replacement the inspection board supported by the support unit may be attached to the table. for replacement

[0017] , cutting Further, in one aspect of the present invention, the cutting device includes a reading unit that reads an identification mark and and information obtained by reading the identification mark attached to the cutting blade by the reading unit and information obtained by reading the identification mark attached to the blade case by the reading unit and may further include a blade case determination unit that determines whether they match.

[0018] , cutting Further, in one aspect of the present invention, the cutting device includes a reading unit that reads an identification mark and and information obtained by reading the identification mark attached to the cutting blade by the reading unit is for inspection a dressing board or and information obtained by reading the identification mark attached to the inspection board by the reading unit and may further include a board determination unit that determines whether they match.

Advantages of the Invention

[0019] ​A cutting device according to one aspect of the present invention includes a support unit that supports a cutting blade while being housed in a blade case, a cutting unit that includes a mount flange to which the cutting blade is attached, an exchange mechanism that attaches the cutting blade supported by the support unit to the mount flange, and a moving mechanism that moves the exchange mechanism.

[0020] Therefore, after supporting the cutting blade housed in the blade case by the support unit, the cutting blade of the cutting unit can be exchanged by moving the exchange mechanism with the moving mechanism. That is, according to the cutting device according to one aspect of the present invention, it is not necessary to manually remove the cutting blade from the blade case as in the prior art.

Brief Description of the Drawings

[0021] [Figure 1] FIG. 1 is a perspective view showing a cutting device. [Figure 2] FIG. 2 is an exploded perspective view showing a cutting unit to which a hub-type cutting blade is attached. [Figure 3] FIG. 3 is an exploded perspective view showing a cutting unit to which a washer-type cutting blade is attached. [Figure 4] FIG. 4 is a perspective view showing an exchange unit. [Figure 5] FIG. 5 is a perspective view showing the exchange unit with the exchange device arranged at the exchange position. [Figure 6] FIG. 6 is a perspective view showing an exchange device. [Figure 7] FIG. 7(A) is a side view showing the exchange device, and FIG. 7(B) is a front view showing the exchange device. [Figure 8] FIG. 8(A) is a front view showing a holding portion, and FIG. 8(B) is a cross-sectional view showing the holding portion. [Figure 9] FIG. 9(A) is a cross-sectional view showing a holding portion that holds a hub-type cutting blade, and FIG. 9(B) is a cross-sectional view showing a holding portion that holds a washer-type cutting blade. [Figure 10] FIG. 10(A) is a perspective view showing a support unit that can store an exchangeable cutting blade or the like in a supported state, and FIG. 10(B) is a perspective view showing a blade case. [Figure 11] FIG. 11(A) is a plan view showing a hub-type cutting blade with an identification mark, FIG. 11(B) is a plan view showing a washer-type cutting blade with an identification mark, and FIG. 11(C) is a plan view showing a dressing board or inspection board with an identification mark. [Figure 12] FIG. 12(A) is a schematic view showing an exchange device in the exchangeable cutting blade holding step, FIG. 12(B) is a schematic view showing an exchange device in the nut removal step, FIG. 12(C) is a schematic view showing an exchange device in the first retraction step, and FIG. 12(D) is a schematic view showing an exchange device in the used cutting blade holding step. [Figure 13] FIG. 13(A) is a schematic view showing an exchange device in the second retraction step, FIG. 13(B) is a schematic view showing an exchange device in the cutting blade mounting step, FIG. 13(C) is a schematic view showing an exchange device in the third retraction step, and FIG. 13(D) is a schematic view showing an exchange device in the nut mounting step. [Figure 14] FIG. 14(A) is a perspective view showing a holding portion for holding a square dressing board, and FIG. 14(B) is a perspective view showing a holding portion for holding a rectangular dressing board. [Figure 15] FIG. 15(A) is a schematic view showing an exchange device in the exchangeable board holding step, FIG. 15(B) is a schematic view showing an exchange device in the used board holding step, FIG. 15(C) is a schematic view showing an exchange device in the retraction step, and FIG. 15(D) is a schematic view showing an exchange device in the placement step. [Figure 16] FIG. 16 is a perspective view showing a cutting device provided with a support unit according to a modified example. [Figure 17] FIG. 17 is a perspective view showing a support unit including a rotatable support plate. [Figure 18] FIG. 18 is a perspective view showing the opening / closing unit. [Figure 19] FIG. 19(A) is a perspective view showing a state in which the blade case placed on the blade case support portion is fixed by the holding mechanism, and FIG. 19(B) is a perspective view showing a state in which the lid portion of the blade case is pushed upward by the unlocking mechanism. [Figure 20] FIG. 20(A) is a perspective view showing a state in which the lid portion of the blade case is further opened by the push mechanism, and FIG. 20(B) is a perspective view showing a state in which the lid portion of the blade case is closed by the locking mechanism.

Embodiments for Carrying Out the Invention

[0022] Hereinafter, embodiments according to one aspect of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a cutting device 2 according to this embodiment. In FIG. 1, the X-axis direction (machining feed direction, first horizontal direction, front-rear direction) and the Y-axis direction (indexing feed direction, second horizontal direction, left-right direction) are perpendicular to each other. The Z-axis direction (vertical direction, up-down direction, height direction) is perpendicular to the X-axis direction and the Y-axis direction.

[0023] The cutting device 2 includes a base 4 that supports or houses each component constituting the cutting device 2. An elevator 6 including a lifting table 6a is provided at a front corner of the base 4. The elevator 6 includes a lifting mechanism (not shown) and raises and lowers the lifting table 6a along the Z-axis direction.

[0024] On the lifting table 6a of the elevator 6, a container 8 that houses various tools (parts, consumables, etc.) used in the cutting device 2 and a cassette 10 that houses a plurality of workpieces 11 to be machined by the cutting device 2 are placed. FIG. 1 shows an example in which the container 8 is placed on the lifting table 6a and the cassette 10 is placed on the container 8. Details of the tools housed in the container 8 will be described later.

[0025] The cassette 10 has a pair of opposing side surfaces. Further, a plurality of guide rails 10a are fixed to each side surface of the cassette 10 at predetermined intervals along the height direction of the cassette 10. A frame unit (workpiece unit) 17 including a workpiece 11 is supported by a pair of guide rails 10a at the same height position fixed to both side surfaces of the cassette 10.

[0026] For example, the workpiece 11 is a disk-shaped wafer made of a semiconductor material such as silicon. The workpiece 11 is partitioned into a plurality of regions by a plurality of division planned lines (streets) arranged in a grid pattern, and devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are formed on the surface (upper surface) side of each of these regions. By cutting and dividing the workpiece 11 along the division planned lines, a plurality of device chips each including a device are manufactured.

[0027] However, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer made of a semiconductor other than silicon (such as GaAs, InP, GaN, SiC), glass, ceramics, resin, metal, etc. Also, there are no restrictions on the type, quantity, shape, structure, size, arrangement, etc. of the devices formed on the workpiece 11, and the workpiece 11 may not have any devices formed thereon. Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate.

[0028] On the back surface (lower surface) side of the workpiece 11, a circular tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is attached. As the tape 13, a sheet or the like having a film-shaped base material formed in a circular shape and an adhesive layer (paste layer) provided on the base material can be used. For example, the base material is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of an epoxy-based, acrylic-based, or rubber-based adhesive or the like. Further, an ultraviolet curable resin that cures by irradiation with ultraviolet rays may be used for the adhesive layer.

[0029] The outer peripheral portion of the tape 13 is made of metal or the like and is attached to an annular frame 15 having a circular opening at the center. Note that the diameter of the opening of the frame 15 is larger than the diameter of the workpiece 11, and the workpiece 11 is disposed inside the opening of the frame 15.

[0030] When the tape 13 is attached to the workpiece 11 and the frame 15, the workpiece 11 is supported by the frame 15 via the tape 13. Thereby, a frame unit 17 including the workpiece 11, the tape 13, and the frame 15 is configured. Then, one or a plurality of frame units 17 are accommodated in the cassette 10.

[0031] An opening 4a is provided in a region on the upper surface side of the base 4 that is adjacent to the elevator 6 in the X-axis direction. Inside this opening 4a, a cleaning unit 12 for cleaning the workpiece 11 is disposed. The cleaning unit 12 includes a spinner table 14 that holds the workpiece 11 and a nozzle (not shown) provided above the spinner table 14 for supplying a cleaning liquid such as pure water.

[0032] A rotation drive source (not shown) such as a motor for rotating the spinner table 14 around a rotation axis substantially parallel to the Z-axis direction is connected to the spinner table 14. With the workpiece 11 held by the spinner table 14, the workpiece 11 is cleaned by supplying a cleaning liquid from the nozzle while rotating the spinner table 14. Note that as the cleaning liquid, a gas-liquid mixed fluid in which a liquid (such as pure water) and air are mixed can also be used.

[0033] Above the cleaning unit 12, a pair of guide rails 16 for holding the frame unit 17 are provided along the X-axis direction. A moving mechanism (not shown) for moving the pair of guide rails 16 closer to and away from each other along the Y-axis direction is connected to the pair of guide rails 16. By sandwiching the frame unit 17 between the pair of guide rails 16, the position of the frame unit 17 in the Y-axis direction is adjusted.

[0034] A rectangular opening 4b is provided at a position on the upper surface side of the base 4 adjacent to the guide rail 16 in the Y-axis direction. The opening 4b is formed such that its longitudinal direction is along the X-axis direction. Inside this opening 4b, a flat table cover 18 is provided. Also, on both sides of the table cover 18 in the X-axis direction, bellows-shaped dust and splash-proof covers 20 that can expand and contract in the X-axis direction are provided.

[0035] On the table cover 18, a chuck table (holding table) 22 for holding the workpiece 11 or the like is provided. The upper surface of the chuck table 22 constitutes a flat holding surface for holding the workpiece 11 or the like. Also, a plurality of clamps 24 for gripping and fixing the frame 15 or the like are provided around the chuck table 22.

[0036] For example, the chuck table 22 includes a cylindrical frame body (not shown) made of a metal such as stainless steel. Also, a circular recess is formed on the upper surface side of the central portion of the frame body, and a disk-shaped porous member made of a porous material such as porous ceramics is fitted into this recess. The holding surface of the chuck table 22 is connected to a suction source (not shown) such as an ejector via the porous member, a flow path (not shown) provided inside the chuck table 22, a valve (not shown), and the like.

[0037] For example, the frame unit 17 is disposed on the chuck table 22 such that the front surface side of the workpiece 11 is exposed upward and the back surface side of the workpiece 11 (the tape 13 side) faces the holding surface of the chuck table 22. Further, the frame 15 is fixed by a plurality of clamps 24. In this state, when a negative pressure of a suction source is applied to the holding surface of the chuck table 22, the workpiece 11 is sucked and held by the chuck table 22 via the tape 13.

[0038] Also, on the table cover 18, a pair of sub-tables (holding tables) 26 are provided adjacent to the chuck table 22. The pair of sub-tables 26 are arranged on the rear side of the chuck table 22 and spaced apart from each other in the Y-axis direction.

[0039] The upper surface of the sub-table 26 constitutes a flat holding surface for holding plate-like members used for setup, inspection, evaluation, etc. of cutting. For example, the holding surface of the sub-table 26 is formed in a rectangular shape and is connected to a suction source (not shown) such as an ejector via a flow path (not shown), a valve (not shown), etc. provided inside the sub-table 26. By this sub-table 26, a dressing board 19, an inspection board 21 (see FIG. 10(A)), etc., which will be described later, are held.

[0040] Below the table cover 18, a moving unit (not shown) and a rotational drive source (not shown) are provided. The moving unit is constituted by a ball screw type moving mechanism or the like and moves the chuck table 22 and the sub-table 26 along with the table cover 18 in the X-axis direction. Also, the rotational drive source is constituted by a motor or the like and rotates the chuck table 22 around a rotation axis substantially parallel to the Z-axis direction.

[0041] The front side of the opening 4b (the area adjacent to the opening 4a) corresponds to the conveyance area where the workpiece 11 is carried in and out. Also, the rear side of the opening 4b corresponds to the processing area where the workpiece 11 is processed. By moving the chuck table 22 and the sub-table 26 along the X-axis direction by the moving unit, the chuck table 22 and the sub-table 26 can be positioned in the conveyance area or the processing area.

[0042] Above the processing area, a processing chamber cover 28 that forms a space (processing chamber) where the workpiece 11 is cut is provided. In FIG. 1, the contour of the processing chamber cover 28 is shown by a two-dot chain line. The processing chamber cover 28 is formed, for example, in a rectangular parallelepiped shape by metal or the like and is arranged to cover the processing area. Also, on the side surface of the processing chamber cover 28 on the conveyance area side, an entrance / exit (opening) 28a through which an exchange device 100 (see FIG. 6 etc.) described later can pass is provided.

[0043] Inside the processing chamber cover 28, a pair of cutting units 30 for cutting the workpiece 11 are provided. The cutting unit 30 cuts the workpiece 11 by rotating an annular cutting blade and making it cut into the workpiece 11. For example, a hub-type cutting blade 36 (see FIG. 2) is mounted on the cutting unit 30.

[0044] FIG. 2 is an exploded perspective view showing the cutting unit 30 on which the hub-type cutting blade 36 is mounted. The cutting unit 30 includes a cylindrical housing 32. In this housing 32, a columnar spindle 34 that is arranged along the Y-axis direction and serves as a rotation axis is accommodated.

[0045] The tip end portion (one end side) of the spindle 34 is exposed outside the housing 32, and a screw hole 34a is formed in the end face of the tip end portion of the spindle 34. Also, a rotational drive source such as a motor is connected to the base end portion (the other end side) of the spindle 34. An annular cutting blade 36 is mounted on the tip end portion of this spindle 34. The cutting blade 36 mounted on the tip end portion of the spindle 34 rotates by the power transmitted from the rotational drive source via the spindle 34.

[0046] The cutting blade 36 is composed of an annular base 38 made of metal or the like and an annular cutting edge 40 formed along the outer peripheral edge of the base 38 integrally. A circular opening 36a penetrating the cutting blade 36 (the central part of the base 38) in the thickness direction is provided at the central part of the cutting blade 36 (the central part of the base 38).

[0047] The base 38 has surfaces (first surface) 38a and a back surface (second surface) 38b that are generally parallel to each other. The surface 38a of the base 38 constitutes an annular holding surface that is held when the cutting blade 36 is attached and detached. Also, the cutting edge 40 is formed at the outer peripheral part on the back surface 38b side of the base 38. For example, the cutting edge 40 is composed of an electroformed grinding wheel in which abrasive grains made of diamond or the like are fixed by a binder such as a nickel plating layer.

[0048] A mounting flange 42 to which the cutting blade 36 is attached is fixed to the tip of the spindle 34. The mounting flange 42 includes a disk-shaped flange portion 44 that supports the cutting blade 36 and a cylindrical boss portion (support shaft) 46 that protrudes from the central part of the surface 44a of the flange portion 44. Also, a through hole 42a penetrating the central part of the flange portion 44 and the central part of the boss portion 46 is provided in the mounting flange 42.

[0049] An annular convex portion 44b protruding from the surface 44a is provided at the outer peripheral part of the flange portion 44. The tip surface of the convex portion 44b is formed generally parallel to the surface 44a and constitutes an annular support surface 44c that supports the cutting blade 36.

[0050] On the outer peripheral surface of the tip of the boss portion 46, a threaded portion 46a having a thread groove is formed, and an annular nut 48 is fastened to this threaded portion 46a. In the central portion of the nut 48, a circular opening 48a penetrating the nut 48 in the thickness direction is formed. The opening 48a is formed to have approximately the same diameter as the boss portion 46, and on the inner side of the opening 48a (the inner peripheral surface of the nut 48), a thread groove corresponding to the threaded portion 46a of the boss portion 46 is provided. Further, in the nut 48, a plurality of through holes 48b penetrating the nut 48 in the thickness direction are formed at substantially equal intervals along the circumferential direction of the nut 48.

[0051] A screw 50 is inserted into the threaded hole 34a of the spindle 34 through the through hole 42a of the mount flange 42 and tightened, whereby the mount flange 42 is fixed to the tip of the spindle 34. Then, when the boss portion 46 is inserted into the opening 36a of the cutting blade 36, the cutting blade 36 is attached to the mount flange 42. In this state, when the nut 48 is fastened to the threaded portion 46a of the boss portion 46, the cutting blade 36 is sandwiched between the support surface 44c of the flange portion 44 and the nut 48 and fixed to the mount flange 42.

[0052] Note that a washer-type cutting blade 52 (see FIG. 3) may be attached to the cutting unit 30. FIG. 3 is an exploded perspective view showing the cutting unit 30 to which the washer-type cutting blade 52 is attached.

[0053] The cutting blade 52 is composed of an annular cutting edge in which abrasive grains are fixed by a bonding material such as a metal bond, a resin bond, or a vitrified bond. In the central portion of the cutting blade 52, a circular opening 52a penetrating the cutting blade 52 in the thickness direction is provided.

[0054] A mount flange 54 to which the cutting blade 52 is attached is attached to the tip of the spindle 34. The mount flange 54 includes a fixed mount 56 fixed to the tip of the spindle 34 and a pressing flange 62 that presses the cutting blade 52 attached to the fixed mount 56.

[0055] The fixed mount 56 includes a disk-shaped flange portion 58 that supports the cutting blade 52, and a columnar boss portion (support shaft) 60 that protrudes from the central portion of the surface 58a of the flange portion 58. Further, the fixed mount 56 is provided with a through hole 56a that penetrates the central portion of the flange portion 58 and the central portion of the boss portion 60, and an annular receiving portion 56b that supports a washer 66 described later is provided inside the through hole 56a.

[0056] An annular convex portion 58b that protrudes from the surface 58a is provided on the outer peripheral portion of the flange portion 58. The tip surface of the convex portion 58b is formed substantially parallel to the surface 58a, and constitutes an annular support surface 58c that supports the cutting blade 52.

[0057] The boss portion 60 includes an annular first boss portion (first support shaft) 60a that protrudes from the surface 58a of the flange portion 58, an annular second boss portion (second support shaft) 60b that protrudes from the tip of the first boss portion 60a, and an annular third boss portion (third support shaft) 60c that protrudes from the tip of the second boss portion 60b. The diameter of the second boss portion 60b is smaller than the diameter of the first boss portion 60a, and the diameter of the third boss portion 60c is smaller than the diameter of the second boss portion 60b. Further, the first boss portion 60a, the second boss portion 60b, and the third boss portion 60c are provided concentrically.

[0058] A pressing flange 62 is attached to the fixed mount 56. The pressing flange 62 is an annular member made of metal or the like, and includes a surface (first surface) 62a and a back surface (second surface) 62b that are substantially parallel to each other. The surface 62a of the pressing flange 62 corresponds to an annular holding surface that is held when the pressing flange 62 is attached and detached. Further, the back surface 62b of the pressing flange 62 corresponds to an annular support surface that supports the cutting blade 36.

[0059] At the center of the pressing flange 62, a circular opening 62c that penetrates the pressing flange 62 from the front surface 62a to the back surface 62b is provided. Further, in the region between the outer peripheral edge of the pressing flange 62 and the opening 62c, a plurality of through holes 62d that penetrate the pressing flange 62 from the front surface 62a to the back surface 62b are formed at substantially equal intervals along the circumferential direction of the pressing flange 62.

[0060] On the outer peripheral surface of the tip of the boss portion 60 of the fixed mount 56, a threaded portion 60d having a thread groove is formed, and an annular nut 64 is fastened to this threaded portion 60d. A circular opening 64a that penetrates the nut 64 in the thickness direction is formed at the center of the nut 64. The opening 64a is formed to have substantially the same diameter as the third boss portion 60c, and a thread groove corresponding to the threaded portion 60d of the boss portion 60 is provided on the inner side of the opening 64a (the inner peripheral surface of the nut 48). Further, a plurality of through holes 64b that penetrate the nut 64 in the thickness direction are formed at substantially equal intervals along the circumferential direction of the nut 64.

[0061] The fixed mount 56 is attached to the spindle 34 by a screw 68. Specifically, first, a washer 66 is disposed on the receiving portion 56b of the fixed mount 56. In this state, the screw 68 is inserted into the screw hole 34a of the spindle 34 through the through hole 56a of the washer 66 and the fixed mount 56 and tightened, whereby the fixed mount 56 is fixed to the tip of the spindle 34.

[0062] Also, when the boss portion 60 is inserted into the opening 52a of the cutting blade 52 and the opening 62c of the pressing flange 62 in this order, the cutting blade 52 and the pressing flange 62 are attached to the fixed mount 56 in this order. Note that an annular convex portion (not shown) that protrudes from the back surface 62b is provided on the back surface 62b side of the pressing flange 62. The diameter of the outer peripheral surface of this convex portion is, for example, slightly smaller than the diameter of the opening 52a of the cutting blade 52, and the diameter of the inner wall (inner peripheral surface) of the convex portion is, for example, slightly larger than the diameter of the outer peripheral surface of the first boss portion 60a.

[0063] The convex portion of the pressing flange 62 is fitted inside the opening 52a of the cutting blade 52. Thereby, the alignment between the pressing flange 62 and the cutting blade 52 is performed. Further, the first boss portion 60a is fitted inside the inner wall of the convex portion of the pressing flange 62, and the second boss portion 60b is fitted into the opening 62c of the pressing flange 62.

[0064] In this state, when the nut 64 is tightened onto the screw portion 60d formed on the third boss portion 60c, the cutting blade 36 and the pressing flange 62 are fixed to the fixing mount 56. Thereby, the cutting blade 36 is sandwiched between the support surface 58c of the flange portion 58 and the back surface 62b of the pressing flange 62 and fixed to the mount flange 54.

[0065] As described above, the cutting blade 36 or the cutting blade 52 is mounted on each of the pair of cutting units 30 shown in FIG. 1. The cutting blade 36 or the cutting blade 52 mounted on the pair of cutting units 30 is arranged so as to face each other.

[0066] Each of the pair of cutting units 30 is equipped with an imaging unit (reading unit) 70 that images the workpiece 11 or the like held by the chuck table 22. For example, the imaging unit 70 is composed of a visible light camera equipped with an imaging element that receives visible light and generates an electrical signal, an infrared camera equipped with an imaging element that receives infrared light and generates an electrical signal, and the like. Based on the image obtained by the imaging unit 70, alignment between the workpiece 11 and the cutting unit 30 is performed.

[0067] Furthermore, above the base 4, a first transfer unit 72 for transferring the workpiece 11 is provided. The first transfer unit 72 is provided with an air cylinder having a built-in rod that can move along the Z-axis direction. A moving mechanism (not shown) for moving the first transfer unit 72 along the X-axis direction and the Y-axis direction is connected to the upper part of this air cylinder.

[0068] At the lower end of the rod of the air cylinder, a holding unit 72a for holding the frame 15 of the frame unit 17 and the like is fixed. For example, the holding unit 72a includes a plurality of suction pads that suck and hold the upper surface side of the frame 15 of the frame unit 17. Further, at the end of the holding unit 72a on the side of the elevator 6, a gripping mechanism 72b capable of gripping the end of the frame 15 of the frame unit 17 and the like is provided.

[0069] Above the holding unit 72a included in the first transfer unit 72, a second transfer unit 74 for transferring the workpiece 11 is provided. The second transfer unit 74 is provided with an air cylinder having a built-in rod that can move along the Z-axis direction. At the upper part of this air cylinder, a moving mechanism (not shown) for moving the second transfer unit 74 along the Y-axis direction is connected.

[0070] At the lower end of the rod of the air cylinder, a holding unit 74a for holding the frame 15 of the frame unit 17 and the like is fixed. The structure of the holding unit 74a is the same as that of the holding unit 72a of the first transfer unit 72.

[0071] Also, on the side of the chuck table 22, an exchange unit 76 for exchanging the cutting blade 36, the cutting blade 52, etc. mounted on the cutting unit 30 is provided. Details of the structure of the exchange unit 76 will be described later.

[0072] On the edge of the base 4 on the side of the exchange unit 76, a plate-shaped cover 78 is provided. One end of the cover 78 is connected to the base 4 via a hinge 80, and the cover 78 can rotate around the hinge 80.

[0073] When the workpiece 11 is processed by the cutting unit 30, the cover 78 is in a state of standing along the Z-axis direction (open state) as shown by the solid line in FIG. 1. On the other hand, when the cutting blade 36, the cutting blade 52, etc. are exchanged by the exchange unit 76, the cover 78 is in a state of lying along the X-axis direction and the Y-axis direction (closed state) as shown by the two-dot chain line in FIG. 1.

[0074] Each component constituting the cutting device 2 (elevator 6, cleaning unit 12, guide rail 16, chuck table 22, clamp 24, sub-table 26, cutting unit 30, imaging unit 70, first transfer unit 72, second transfer unit 74, exchange unit 76, etc.) is connected to a control unit (control section) 82. The control unit 82 generates control signals for controlling the operations of the components of the cutting device 2.

[0075] For example, the control unit 82 is constituted by a computer and includes a processing section (blade case determination section, board determination section) 82a that performs various processes (such as calculations) necessary for the operation of the cutting device 2, and a storage section 82b that stores various types of information (data, programs, etc.) used for the processes by the processing section 82a. The processing section 82a is configured to include a processor such as a CPU (Central Processing Unit). Also, the storage section 82b is configured to include various memories constituting a main storage device, an auxiliary storage device, etc.

[0076] The cutting process of the workpiece 11 is performed by the above-described cutting device 2. When machining the workpiece 11, first, the frame unit 17 including the workpiece 11 to be machined is accommodated in the cassette 10. Then, the cassette 10 containing this frame unit 17 is placed on the lift table 6a of the elevator 6.

[0077] The frame unit 17 accommodated in the cassette 10 is carried out of the cassette 10 by the first transfer unit 72. Specifically, the first transfer unit 72 moves along the X-axis direction away from the cassette 10 while gripping the end of the frame 15 with the gripping mechanism 72b. Thereby, the frame unit 17 is pulled out from the cassette 10 and placed on the pair of guide rails 16. Then, the frame unit 17 is sandwiched by the pair of guide rails 16, and the alignment of the frame unit 17 is performed.

[0078] Next, the first transfer unit 72 holds the upper surface side of the frame 15 with the holding unit 72a and transfers the frame unit 17 onto the chuck table 22 disposed in the transfer area. Further, the chuck table 22 moves from the transfer area to the processing area while sucking and holding the back surface side (tape 13 side) of the workpiece 11. As a result, the workpiece 11 is disposed inside the processing chamber cover 28.

[0079] Then, based on the image acquired by imaging the workpiece 11 with the imaging unit 70, after alignment between the workpiece 11 and the cutting unit 30 is performed, the workpiece 11 is cut by the cutting unit 30. For example, the workpiece 11 is cut along the planned division line and divided into a plurality of device chips.

[0080] When the cutting process is completed, the chuck table 22 moves to the transfer area. Then, the second transfer unit 74 holds the upper surface side of the frame 15 with the holding unit 74a and transfers the frame unit 17 from the chuck table 22 to the cleaning unit 12. Then, the workpiece 11 is cleaned by the cleaning unit 12.

[0081] When the cleaning of the workpiece 11 is completed, the first transfer unit 72 holds the frame 15 with the holding unit 72a and transfers the frame unit 17 onto the pair of guide rails 16. Then, the frame unit 17 is sandwiched by the pair of guide rails 16 and alignment of the frame unit 17 is performed. Thereafter, the first transfer unit 72 moves toward the cassette 10 while gripping the frame 15 with the gripping mechanism 72b and accommodates the frame unit 17 in the cassette 10.

[0082] The storage unit 82b of the control unit 82 stores a program describing the series of operations of the above-described cutting device 2. Then, when the operator instructs the cutting device 2 to process the workpiece 11, the processing unit 82a reads out the program from the storage unit 82b and executes it, and sequentially generates control signals for controlling the operations of the respective components of the cutting device 2.

[0083] Here, the cutting blades 36 and 52 mounted on the cutting unit 30 gradually wear out by cutting the workpiece 11, and thus are replaced as necessary. In the cutting device 2, the replacement unit 76 automatically replaces the cutting blades 36 and 52.

[0084] FIG. 4 is a perspective view showing the replacement unit 76. The replacement unit 76 includes an exchange device (exchange mechanism) 100 for replacing the cutting blade 36 and the cutting blade 52, and a moving unit (moving mechanism) 84 for moving the exchange device 100. The moving unit 84 includes a lifting mechanism 86 for moving the exchange device 100 along the Z-axis direction, and a multi-joint arm 90 connected to the lifting mechanism 86 for moving the exchange device 100 along a direction parallel to the X-axis direction and the Y-axis direction (horizontal direction).

[0085] The lifting mechanism 86 includes a columnar base plate 88 arranged along the Z-axis direction, and moves the multi-joint arm 90 along the Z-axis direction along the base plate 88. For example, the lifting mechanism 86 includes a motor (not shown) provided at the lower part of the base plate 88 with a driving pulley fixed to the shaft, and a driven pulley (not shown) provided at the upper part of the base plate 88. A single toothed endless belt (not shown) is wound around the driving pulley and the driven pulley, and a metal first support 92A is fixed to the toothed endless belt.

[0086] When the shaft of the motor of the lifting mechanism 86 is rotated in the first direction, the first support 92A rises, and when it is rotated in the second direction opposite to the first direction, the first support 92A descends. Thereby, the first support 92A moves along the Z-axis direction.

[0087] However, as long as the first support 92A can be lifted and lowered, the structure of the lifting mechanism 86 is not limited. For example, the lifting mechanism 86 may be a ball screw type lifting mechanism. In this case, the ball screw type lifting mechanism has a pair of guide rails (not shown) arranged along the Z-axis direction. Also, a flat moving plate (not shown) is attached to the pair of guide rails in a slidable state along the guide rails.

[0088] On the surface (first surface) side of the moving plate, the first support tool 92A is fixed. Further, on the back surface (second surface) side of the moving plate, a nut portion (not shown) is provided. This nut portion is screwed onto a ball screw arranged substantially parallel to the pair of guide rails. One end of the ball screw is connected to a pulse motor (not shown), and when this pulse motor is rotated, the first support tool 92A moves along the Z-axis direction.

[0089] The first support tool 92A is fixed with a first rotation mechanism 94A having a rotational drive source such as a motor. This rotational drive source is provided such that the rotation axis is arranged substantially parallel to the Z-axis direction. One end of a first arm 96A arranged along a direction parallel to the X-axis direction and the Y-axis direction is attached to the first rotation mechanism 94A.

[0090] A second rotation mechanism 94B is attached to the other end of the first arm 96A. The second rotation mechanism 94B has a rotational drive source such as a motor whose rotation axis is arranged substantially parallel to the Z-axis direction. One end of a second arm 96B arranged along a direction parallel to the X-axis direction and the Y-axis direction is attached to the second rotation mechanism 94B.

[0091] A third rotation mechanism 94C is attached to the other end of the second arm 96B. The third rotation mechanism 94C has a rotational drive source such as a motor whose rotation axis is arranged substantially parallel to the Z-axis direction. A second support tool 92B made of metal is attached to the third rotation mechanism 94C. And an exchange device 100 for exchanging the cutting blade 36, the cutting blade 52, etc. is mounted on the second support tool 92B.

[0092] When the cutting blades 36, 52, etc. are not to be replaced, as shown in FIG. 4, the replacement device 100 is arranged at a position (retracted position) adjacent to the base plate 88. When replacing the cutting blades 36, 52, etc., the moving unit 84 is driven, and the replacement device 100 is arranged above the base 4 (replacement position). FIG. 5 is a perspective view showing the replacement unit 76 with the replacement device 100 arranged at the replacement position.

[0093] The replacement device 100 moves (ascends and descends) along the Z-axis direction by the elevating mechanism 86 and moves along a plane (horizontal plane) parallel to the X-axis and Y-axis by the articulated arm 90. That is, the replacement device 100 is positioned at an arbitrary position by the elevating mechanism 86 and the articulated arm 90.

[0094] Next, a configuration example of the replacement device 100 will be described. FIG. 6 is a perspective view showing the replacement device 100. FIG. 7(A) is a side view showing the replacement device 100, and FIG. 7(B) is a front view showing the replacement device 100. In FIG. 7(B), among the components of the replacement device 100, the connecting members 114a and 114b described later are omitted. Hereinafter, the structure of the replacement device 100 will be mainly described with reference to FIG. 6.

[0095] The replacement device 100 includes a detaching / attaching unit 102 for detaching / attaching the cutting blade 36 or the cutting blade 52 and the nut 48 or the nut 64 (see FIGS. 2 and 3). A rotation mechanism 104 for rotating the detaching / attaching unit 102 is connected to the detaching / attaching unit 102.

[0096] The rotation mechanism 104 includes a rotating part (shaft) 106 connected to the detaching / attaching unit 102 and a rotation driving source (not shown) such as a motor for rotating the rotating part 106 around the rotation axis 106a passing through the rotating part 106. The rotation driving source rotates the rotating part 106 in both directions (the first direction and the second direction opposite to the first direction) around the rotation axis 106a. When the rotating part 106 rotates, the detaching / attaching unit 102 connected to the rotating part 106 rotates around the rotation axis 106a in conjunction with the rotating part 106.

[0097] The detachable unit 102 includes a frame body 110 connected to a rotating part 106 of a rotating mechanism 104. The frame body 110 includes a pair of plate-like support members 112a and 112b formed using metal or the like and arranged substantially parallel to each other.

[0098] Between the support member 112a and the support member 112b, rectangular parallelepiped-shaped connecting members 114a and 114b are provided. The connecting member 114a is fixed to one end portion (the rotating part 106 side) of the support member 112a and one end portion (the rotating part 106 side) of the support member 112b. Further, the connecting member 114b is fixed to the other end portion (the side opposite to the rotating part 106) of the support member 112a and the other end portion (the side opposite to the rotating part 106) of the support member 112b. That is, the support members 112a and 112b are connected to each other via the connecting members 114a and 114b.

[0099] A nut rotating part (nut detachable unit) 120 for holding and rotating a nut 48 or a nut 64 (see FIGS. 2 and 3) for attaching the cutting blade 36 or the cutting blade 52 to the cutting unit 30 is attached to the frame body 110. The nut rotating part 120 includes a nut holding part 122 for holding the nut 48 or the nut 64, and a columnar rotating part (shaft) 124 (see FIG. 7(B)) connected to the nut holding part 122.

[0100] The rotating part 124 is accommodated in a cylindrical housing 126. One end side (tip end part) of the rotating part 124 is exposed from the housing 126, and the nut holding part 122 is connected to this one end side of the rotating part 124. Further, the other end side (base end part) of the rotating part 124 is connected to a rotation driving source 128 such as a motor that rotates (rotates itself) the rotating part 124 around a rotating shaft 124a passing through the inside of the rotating part 124.

[0101] The rotational drive source 128 rotates the rotating part 124 in a bidirectional manner (a first direction and a second direction opposite to the first direction) around the rotation axis 124a. When the rotating part 124 rotates, the nut holding part 122 connected to the rotating part 124 rotates around the rotation axis 124a in conjunction with the rotating part 124.

[0102] An opening (not shown) that penetrates the support member 112a in the thickness direction is provided at the central portion of the support member 112a, and an opening (not shown) that penetrates the support member 112b in the thickness direction is provided at the central portion of the support member 112b. One end side of the rotating part 124 exposed from the housing 126 is inserted into the opening of the support member 112a and protrudes from the support member 112a toward the outside of the frame body 110. Also, the other end side of the rotating part 124 is inserted into the opening of the support member 112b together with the end portion of the housing 126 and protrudes from the support member 112b toward the outside of the frame body 110.

[0103] One end side of the rotating part 124 is connected to the nut holding part 122 outside the frame body 110. Also, the other end side of the rotating part 124 is connected to the rotational drive source 128 outside the frame body 110. Thereby, the nut rotating part 120 is attached to the frame body 110 such that the frame body 110 is sandwiched between the nut holding part 122 and the rotational drive source 128. This nut rotating part 120 is arranged such that the rotation axis of the nut holding part 122 (corresponding to the rotation axis 124a) is along a direction perpendicular to the rotation axis 106a of the rotating part 106.

[0104] The nut holding part 122 includes a columnar rotating member 130 fixed to one end side of the rotating part 124. The rotating member 130 is biased toward the side opposite to the support member 112a by a spring or the like, and moves toward the support member 112a side when an external force is applied.

[0105] The rotating member 130 also includes a surface 130a located on the side opposite to the support member 112a. A plurality (four in FIG. 6) of holding pins 132 protruding from the surface 130a are provided at substantially equal intervals along the circumferential direction of the surface 130a on the rotating member 130.

[0106] The holding pin 132 is formed corresponding to the through hole 48b (see FIG. 2) of the nut 48 or the through hole 64b (see FIG. 3) of the nut 64, and can be inserted into the through hole 48b or the through hole 64b. Note that the number, size, arrangement, etc. of the holding pins 132 are appropriately set according to the through hole 48b or the through hole 64b.

[0107] Around the rotating member 130, a plurality (four in FIG. 6) of gripping members 134 for gripping the nut 48 or the nut 64 are arranged at substantially equal intervals along the circumferential direction of the rotating member 130. The gripping members 134 are each formed in a columnar shape, and the base end portion (one end side) of the gripping member 134 is fixed to the outer peripheral surface of the rotating member 130.

[0108] The tip portion (the other end side) of the gripping member 134 protrudes from the surface 130a of the rotating member 130, and a claw portion 134a bent toward the center side of the rotating member 130 is formed at this tip portion. Further, the gripping member 134 is biased toward the outer side in the radial direction of the rotating member 130 by a spring or the like, and when an external force is applied, the claw portion 134a moves toward the inner side in the radial direction of the rotating member 130.

[0109] Furthermore, a cover 136 formed in a hollow cylindrical shape is provided around the rotating member 130. The cover 136 is configured to be rotatable around the rotation axis 124a independently of the rotating member 130, and is arranged so as to surround the rotating member 130 and the base end sides of the plurality of gripping members 134. When the surface 130a of the rotating member 130 is pressed toward the inner side (the support member 112a side) of the cover 136, the rotating member 130 is pushed into the inner side of the cover 136 together with the plurality of gripping members 134 while a spring or the like that biases the rotating member 130 is deformed.

[0110] When the rotating member 130 is pressed and pushed into the inside of the cover 136, the distal ends (the claw portions 134a side) of the plurality of gripping members 134 come into contact with and are pressed against the inner wall of the cover 136. As a result, while a spring or the like that biases the gripping member 134 deforms, the distal ends of the plurality of gripping members 134 move inward in the radial direction of the rotating member 130. Then, the plurality of gripping members 134 are arranged such that their longitudinal directions are along the inner wall of the cover 136 (closed state). At this time, the claw portion 134a of the gripping member 134 is disposed, for example, radially inward of the outer peripheral edge of the rotating member 130 relative to the rotating member 130.

[0111] On the other hand, when the pressing force on the rotating member 130 is released, the rotating member 130 moves outward toward the outside of the cover 136 by the restoring force of a spring or the like, and the state in which the distal ends of the gripping members 134 are pressed by the inner wall of the cover 136 is released. As a result, the distal ends of the plurality of gripping members 134 also move outward in the radial direction of the rotating member 130 by the restoring force of a spring or the like. Then, the distal ends of the plurality of gripping members 134 are disposed in a state radially outside the rotating member 130 than in the closed state (open state). At this time, the claw portion 134a of the gripping member 134 is disposed, for example, radially outside the outer peripheral edge of the rotating member 130 relative to the rotating member 130.

[0112] Furthermore, a plurality (for example, four) of pins 138 protruding from the outer peripheral surface of the rotating member 130 are provided on the outer peripheral surface of the rotating member 130. Also, a plurality (for example, four) of openings 136a penetrating the cover 136 from the outer peripheral surface to the inner peripheral surface (inner wall) are provided in the cover 136. And at least a part of each of the pins 138 is inserted into the openings 136a.

[0113] The end portion located on the side opposite to the support member 112a of the opening 136a is formed in a stepped shape and includes a first pin receiving portion 136b and a second pin receiving portion 136c. The second pin receiving portion 136c is disposed at a position (on the support member 112a side) farther from the surface 130a of the rotating member 130 than the first pin receiving portion 136b.

[0114] The nut holding portion 122 is in a state where the pin 138 is in contact with the first pin receiving portion 136b, for example, in an initial state where the rotating member 130 is not pushed into the cover 136. When the rotating member 130 is pressed and pushed into the cover 136, the pin 138 separates from the first pin receiving portion 136b. When the rotating portion 124 is rotated in the first direction in this state, the pin 138 moves from the first pin receiving portion 136b side to the second pin receiving portion 136c side.

[0115] After that, when the pressing of the rotating member 130 is released, the pin 138 comes into contact with the second pin receiving portion 136c and is supported by the second pin receiving portion 136c. As a result, the state where the rotating member 130 is pushed into the cover 136 is maintained, and the plurality of gripping members 134 are maintained in a closed state.

[0116] On the other hand, when the rotating member 130 in the state of being pushed into the cover 136 is further pressed and pushed into the cover 136, the pin 138 separates from the second pin receiving portion 136c. When the rotating portion 124 is rotated in the second direction opposite to the first direction in this state, the pin 138 moves from the second pin receiving portion 136c side to the first pin receiving portion 136b side.

[0117] After that, when the pressing of the rotating member 130 is released, the pin 138 comes into contact with the first pin receiving portion 136b and is supported by the first pin receiving portion 136b. As a result, the rotating member 130 is pushed out from the inside of the cover 136, and the plurality of gripping members 134 are in an open state.

[0118] The above-described nut rotating portion 120 holds and rotates the nut 48 or the nut 64. Specifically, first, the surface 130a of the rotating member 130 contacts the nut 48 or the nut 64 so that the holding pin 132 is inserted into the through hole 48b (see FIG. 2) of the nut 48 or the through hole 64b (see FIG. 3) of the nut 64. When the rotating member 130 is pushed into the cover 136 in this state, the plurality of gripping members 134 are in a closed state, and the claw portions 134a contact the outer peripheral surface of the nut 48 or the nut 64 to grip the nut 48 or the nut 64.

[0119] When the rotating member 124 (see FIG. 7(B)) is rotated by the rotary drive source 128 with the nut 48 or the nut 64 held by the plurality of gripping members 134, the rotating member 130 connected to the rotating member 124 rotates, and the nut 48 or the nut 64 held by the gripping members 134 also rotates.

[0120] By holding and rotating the nut 48 or the nut 64 with the nut rotating portion 120, the removal and tightening of the nut 48 or the nut 64 can be automatically performed when replacing the cutting blade 36 or the cutting blade 52 mounted on the cutting unit 30.

[0121] For example, when removing the nut 48 (see FIG. 2) mounted on the mounting flange 42 of the cutting unit 30, first, the exchange device 100 is moved by the elevating mechanism 86 and the articulated arm 90 (see FIGS. 4 and 5), and the exchange device 100 is disposed inside the processing chamber cover 28 through the entrance / exit 28a (see FIG. 1) of the processing chamber cover 28. Then, the attachment / detachment unit 102 is rotated by the rotation mechanism 104 to oppose the nut holding portion 122 to the mounting flange 42.

[0122] Thereafter, the nut holding portion 122 is moved toward the mounting flange 42 side. As a result, the surface 130a side of the rotating member 130 is pressed against the nut 48 mounted on the mounting flange 42. At this time, the plurality of holding pins 132 provided on the rotating member 130 are inserted into the through hole 48b of the nut 48.

[0123] Then, the rotating member 130 is pressed by the nut 48 and pushed into the inside of the cover 136, and the plurality of gripping members 134 are in a closed state. As a result, the nut 48 is gripped by the claw portions 134a of the plurality of gripping members 134.

[0124] Next, the rotating portion 124 (see FIG. 7(B)) is rotated by the rotation drive source 128, and the rotating member 130 is rotated in the first direction (the direction to loosen the nut 48) around the rotation axis 124a. As a result, the nut 48 held by the rotating member 130 rotates and loosens, and is removed from the boss portion 46 of the mount flange 42. When the rotating member 130 rotates in the first direction while being pushed into the inside of the cover 136, the pin 138 moves from the first pin receiving portion 136b side to the second pin receiving portion 136c side.

[0125] Thereafter, the nut holding portion 122 is moved in a direction away from the mount flange 42. At this time, since the pin 138 is supported by the second pin receiving portion 136c, the state in which the rotating member 130 is pushed into the inside of the cover 136 is maintained. As a result, the state in which the plurality of gripping members 134 grip the nut 48 (closed state) is maintained.

[0126] On the other hand, when attaching the nut 48 to the mount flange 42 of the cutting unit 30, first, the nut holding portion 122 holding the nut 48 is opposed to the mount flange 42, and the nut holding portion 122 is moved toward the mount flange 42 side. As a result, the nut 48 held by the nut holding portion 122 is positioned at the tip of the boss portion 46 of the mount flange 42, and the rotating member 130 is pushed into the inside of the cover 136.

[0127] Next, the rotating portion 124 (see FIG. 7(B)) is rotated by the rotation drive source 128, and the rotating member 130 is rotated in the second direction (the direction to tighten the nut 48), which is opposite to the first direction, around the rotation axis 124a. As a result, the nut 48 rotates and is tightened into the screw portion 46a formed in the boss portion 46 of the mount flange 42, and is attached to the mount flange 42. When the rotating member 130 rotates in the second direction while being pushed into the inside of the cover 136, the pin 138 moves from the second pin receiving portion 136c side to the first pin receiving portion 136b side.

[0128] Thereafter, the nut holding portion 122 is moved in a direction away from the mounting flange 42. As a result, the rotating member 130 is pushed out from the inside of the cover 136, and the gripping of the nut 48 by the plurality of gripping members 134 is released. Then, the pin 138 is supported by the first pin receiving portion 136b.

[0129] Note that the method of maintaining the plurality of gripping members 134 in the closed state or the open state is not limited to the method described above. For example, instead of providing the pin 138 on the rotating member 130, an actuator that moves the cover 136 along the height direction of the cover 136 (a direction parallel to the rotation axis 124a) may be provided in the detachable unit 102. For example, the actuator is constituted by an air cylinder or the like and is fixed to the support member 112a. By moving the cover 136 by this actuator, the closed state and the open state of the plurality of gripping members 134 can be freely switched.

[0130] An annular member 140 made of metal or the like is provided between the support member 112a and the support member 112b. The annular member 140 surrounds the housing 126 (rotating portion 124) and is disposed in a state generally parallel to the support member 112a and the support member 112b so as not to contact the housing 126.

[0131] The annular member 140 is connected to the support member 112a via a plurality of elastic bodies (elastic members) 142a and is also connected to the support member 112b via a plurality of elastic bodies (elastic members) 142b. That is, the annular member 140 is suspended by the elastic bodies 142a and the elastic bodies 142b and is held in a state of not contacting the support member 112a and the support member 112b (see FIG. 7(B)).

[0132] For example, the elastic bodies 142a and the elastic bodies 142b are stretchable members such as springs and rubbers. When an external force is applied to the annular member 140, the annular member 140 moves or rotates in an arbitrary direction due to the stretching and contracting of the elastic bodies 142a and the elastic bodies 142b.

[0133] On the outer peripheral surface of the annular member 140, a holding portion 150A (first holding portion) and a holding portion 150B (second holding portion) for holding the cutting blade 36 or the cutting blade 52 are connected. The holding portions 150A and 150B are disk-shaped members made of resin, metal, etc., and hold the cutting blade 36 or the cutting blade 52 on the circular surface 150a side facing the side opposite to the annular member 140. The holding portions 150A and 150B are arranged at positions facing each other with the frame body 110 interposed therebetween so that the surface 150a of the holding portion 150A and the surface 150a of the holding portion 150B face the outside of the frame body 110.

[0134] The holding portions 150A and 150B are respectively arranged at positions separated by an angular interval of 90° from the nut holding portion 122 in the circumferential direction (rotation direction) of the rotating portion 106 of the rotation mechanism 104. Further, the nut holding portion 122, the surface 150a of the holding portion 150A, and the surface 150a of the holding portion 150B are arranged so as to be separated from each other around the rotation axis 106a of the rotating portion 106 and face the side opposite to (outside of) the rotation axis 106a.

[0135] Next, a configuration example of the holding portions 150A and 150B will be described. FIG. 8(A) is a front view showing the holding portion 150A, and FIG. 8(B) is a cross-sectional view showing the holding portion 150A. Hereinafter, the structure and function of the holding portion 150A will be described, but the structure and function of the holding portion 150B are the same as those of the holding portion 150A.

[0136] The holding portion 150A includes a disk-shaped frame body 152 made of resin, metal, etc. The frame body 152 includes a surface (first surface) 152a and a back surface (second surface) 152b that are substantially parallel to each other. The surface 152a side of the frame body 152 corresponds to the surface 150a side of the holding portion 150A. A circular first groove (first recess) 152c is provided at the central portion on the surface 152a side of the frame body 152. The diameter of the first groove 152c is larger than the diameter of the surface 38a (see FIG. 9(A)) of the base 38 of the cutting blade 36 and the diameter of the surface 62a (see FIG. 9(B)) of the pressing flange 62.

[0137] Furthermore, a circular second groove (second recess) 152d is provided at the center of the bottom of the first groove 152c. And at the bottom of the second groove 152d, an annular third groove (third recess) 152e is formed with a predetermined width along the outer periphery of the second groove 152d.

[0138] An annular elastic member 154 is fitted into the third groove 152e. The elastic member 154 is made of an elastic material capable of elastic deformation such as rubber or resin. The elastic member 154 includes an annular base portion 154a fitted inside the third groove 152e and a pair of lip portions 154b protruding from the base portion 154a. One lip portion 154b is arranged along the outer portion in the radial direction of the annular base portion 154a. Also, the other lip portion 154b is arranged along the inner portion in the radial direction of the annular base portion 154a.

[0139] The pair of lip portions 154b are configured such that the distance between them increases as they go toward the tips away from the base portion 154a. Specifically, the pair of lip portions 154b are inclined with respect to the surface 152a of the frame body 152 in a state where the base portion 154a is fitted into the third groove 152e.

[0140] The pair of lip portions 154b are configured to spread from the inside to the outside of the base portion 154a in the radial direction of the base portion 154a. That is, each of the pair of lip portions 154b is configured to extend from the inside to the outside of the third groove 152e in the width direction of the third groove 152e. Also, the tips of the pair of lip portions 154b protrude from the surface 152a of the frame body 152 in the thickness direction of the frame body 152.

[0141] In a region of the base portion 154a that overlaps with the space between the pair of lip portions 154b, a plurality of through holes 154c penetrating the base portion 154a are provided. For example, as shown in FIG. 8(A), six through holes 154c are formed in the base portion 154a at substantially equal intervals along the circumferential direction of the elastic member 154. One end side of the through hole 154c is open on the surface 152a side of the frame body 152, and the other end side of the through hole 154c is connected to an annular fourth groove (fourth recess) 152f provided at the bottom of the third groove 152e.

[0142] One end side of a flow path 156 constituted by a tube, a pipe, or the like is connected to the fourth groove 152f. The other end side of the flow path 156 is connected to a suction source 160 via a valve 158. For example, the valve 158 is constituted by an electromagnetic valve whose opening and closing are electrically controlled, and the suction source 160 is constituted by an ejector. When the valve 158 is opened, the negative pressure of the suction source 160 acts on the space between the pair of lip portions 154b via the fourth groove 152f of the frame body 152 and the through holes 154c of the elastic member 154.

[0143] Also, in a region of the flow path 156 between the fourth groove 152f and the valve 158, a pressure measuring device (pressure sensor) 162 for measuring the pressure of the flow path 156 is connected. For example, the pressure measuring device 162 measures the pressure inside the flow path 156 based on the gauge pressure (the difference between the absolute pressure and the atmospheric pressure). The pressure value of the flow path 156 measured by the pressure measuring device 162 is output to a control unit 82 (see FIG. 1) and stored in a storage unit 82b.

[0144] The cutting blade 36 or the cutting blade 52 is held by the holding portion 150A described above. When replacing the cutting blade 36 or the cutting blade 52, the cutting blade 36 or the cutting blade 52 (for example, the used cutting blade) mounted on the cutting unit 30 or the replacement cutting blade 36 or the cutting blade 52 (for example, the unused cutting blade) is held by the holding portion 150A. Note that the holding portion 150A can hold both the hub-type cutting blade 36 and the washer-type cutting blade 52.

[0145] FIG. 9(A) is a cross-sectional view showing a holding part 150A that holds a hub-type cutting blade 36. When holding the cutting blade 36 with the holding part 150A, for example, the valve 158 is opened and the negative pressure of the suction source 160 is applied to the space between the pair of lip parts 154b. Then, with the surface 150a side of the holding part 150A facing the cutting blade 36, the holding part 150A is brought closer to the base 38 of the cutting blade 36.

[0146] When the surface 38a of the base 38 comes into contact with the tips of the pair of lip parts 154b, the space between the pair of lip parts 154b is sealed, and this space is decompressed by the negative pressure of the suction source 160. As a result, the pair of lip parts 154b adhere closely to the cutting blade 36, and the cutting blade 36 is suction-held by the holding part 150A.

[0147] FIG. 9(B) is a cross-sectional view showing a holding part 150A that holds a washer-type cutting blade 52. When holding the cutting blade 52 with the holding part 150A, the holding part 150A sucks the surface 62a side of the pressing flange 62 and sucks the cutting blade 52 through the through hole 62d provided in the pressing flange 62.

[0148] Specifically, for example, the valve 158 is opened and the negative pressure of the suction source 160 is applied to the space between the pair of lip parts 154b. Then, with the surface 150a side of the holding part 150A facing the pressing flange 62 and the cutting blade 52, the holding part 150A is brought closer to the pressing flange 62.

[0149] When the surface 62a of the pressing flange 62 comes into contact with the tips of the pair of lip parts 154b, the space between the pair of lip parts 154b is sealed, and this space is decompressed by the negative pressure of the suction source 160. As a result, the pair of lip parts 154b adhere closely to the pressing flange 62, and the pressing flange 62 is suction-held by the holding part 150A.

[0150] Further, the negative pressure of the suction source 160 also acts on the cutting blade 52 through a plurality of through holes 62d provided in the pressing flange 62. As a result, the cutting blade 52 is suction-held by the holding portion 150A via the pressing flange 62.

[0151] Note that the through holes 62d are formed so as to open to a region corresponding to the elastic member 154 on the surface 62a of the pressing flange 62 and a region in contact with the cutting blade 52 on the back surface 62b of the pressing flange 62. The diameter of the through holes 62d is set to about 1 mm, for example.

[0152] However, the holding portion 150A can also hold only the pressing flange 62. Specifically, the pressing flange 62 in a state of not being in contact with the cutting blade 52 is suctioned by the holding portion 150A as described above. At this time, although the negative pressure of the suction source 160 slightly leaks through the through holes 62d of the pressing flange 62, the holding portion 150A can hold the pressing flange 62 by appropriately controlling the suction force of the suction source 160.

[0153] As described above, the cutting blade 36 or the cutting blade 52 is held by the holding portion 150A. Whether or not a desired object is appropriately held by the holding portion 150A can be determined by measuring the pressure in the flow path 156 with the pressure measuring device 162.

[0154] For example, when the cutting blade 36 is held by the holding portion 150A (see FIG. 9(A)), the space between the pair of lip portions 154b is sealed. That is, the pressure P in the flow path 156 in a state where the holding portion 150A holds the cutting blade 36 a1 and the pressure P in the flow path 156 in a state where the holding portion 150A does not hold the cutting blade 36 a2 (>P a1 ) will result in a difference. Therefore, the pressure measured by the pressure measuring device 162 and a preset threshold value P tha (P a1 <P tha <P a2By comparing with , it is possible to determine whether the cutting blade 36 is held by the holding portion 150A.

[0155] Further, when holding the cutting blade 52 with the holding portion 150A (see Fig. 9(B)), the pressure P of the flow path 156 in a state where the holding portion 150A holds the cutting blade 52 and the pressing flange 62 by suction b1 and the pressure P of the flow path 156 in a state where the holding portion 150A holds only the pressing flange 62 by suction b2 (> pressure P b1 ) and the pressure P of the flow path 156 in a state where the holding portion 150A holds neither the cutting blade 52 nor the pressing flange 62 b3 (> P b2 ) will result in a difference.

[0156] Therefore, by comparing the pressure measured by the pressure measuring device 162 with the preset threshold values P thb1 (P b1 < P thb1 < P b2 ) and the threshold value P thb2 (P b2 < P thb2 < P b3 ) respectively, it is possible to determine whether the cutting blade 52 or the pressing flange 62 is held by the holding portion 150A.

[0157] The above determination is performed, for example, by previously storing the threshold values (P tha , P thb1 , P thb2 ) in the storage portion 82b of the control unit 82 (see Fig. 1), and causing the processing portion 82a to execute a process of comparing the pressure measured by the pressure measuring device 162 with the threshold values. In this case, a program describing the process of comparing the measured pressure with the threshold values is stored in the storage portion 82b. Then, the processing portion 82a accesses the storage portion 82b, reads out the program, and executes it to compare the measured pressure with the threshold values.

[0158] As described above, the cutting blade 36 or the cutting blade 52 is held by the holding portion 150A. Note that the procedure when the cutting blade 36 or the cutting blade 52 is held by the holding portion 150B is the same as that of the holding portion 150A.

[0159] Also, in the region inside the fourth groove 152f on the surface 152a side of the frame body 152, a columnar fifth groove (fifth recess) 152g is provided. And the diameter of the fifth groove 152g is set larger than the diameter of the boss portion 46 (see FIG. 2) of the mount flange 42 and the diameter of the third boss portion 60c (see FIG. 3) of the mount flange 54. Thereby, when the holding portion 150A or the holding portion 150B is brought close to the cutting unit 30, the tip of the boss portion 46 or the third boss portion 60c is inserted into the fifth groove 152g, and contact between the holding portion 150A or the holding portion 150B and the cutting unit 30 is avoided.

[0160] Note that the elastic member 154 does not necessarily have to be provided in the holding portion 150A or the holding portion 150B. For example, instead of the elastic member 154, two O-rings with different diameters may be arranged concentrically. In this case, for example, one O-ring is provided along the side wall of the third groove 152e located on the outer side in the radial direction of the frame body 152, and the other O-ring is provided along the side wall of the third groove 152e located on the inner side in the radial direction of the frame body 152.

[0161] Here, as shown in FIGS. 6 and 7(B), the holding portion 150A and the holding portion 150B are connected to the rotating portion 106 of the rotating mechanism 104 via the elastic bodies 142a and 142b. Thereby, the holding portion 150A and the holding portion 150B can each tilt at an arbitrary angle. That is, when an external force is applied to the holding portion 150A or the holding portion 150B, its surface 150a can freely tilt in an arbitrary direction.

[0162] Therefore, when the cutting blade 36 or the pressing flange 62 described above comes into contact with the surface 150a side of the holding portion 150A or the surface 150a side of the holding portion 150B, the holding portion 150A or the holding portion 150B tilts so that its surface 150a is arranged parallel to the surface 38a of the cutting blade 36 or the surface 62a of the pressing flange 62. As a result, the surface 150a side of the holding portion 150A or the surface 150a side of the holding portion 150B comes into appropriate contact with the cutting blade 36 and the pressing flange 62, and the cutting blade 36 and the pressing flange 62 are securely sucked and held.

[0163] The cutting blade 36 or the cutting blade 52 is replaced by the above-described replacement device 100. The replacement of the cutting blade 36 or the cutting blade 52 is performed, for example, by removing the cutting blade 36 or the cutting blade 52 mounted on the cutting unit 30 and then mounting the replacement cutting blade 36 or the cutting blade 52 on the cutting unit 30. The replacement cutting blade 36 or the cutting blade 52 is stored in the cutting device 2 in advance.

[0164] FIG. 10(A) is a plan view showing a support unit (stock portion) 200 that can store the replacement cutting blade 36 or the cutting blade 52 and the like in a supported state. As shown in FIG. 10(A), the support unit 200 includes, for example, a plate-shaped support plate 202 having the same outer shape as the frame 15 that supports the workpiece 11.

[0165] On the upper surface 202a of the support plate 202, a plurality of blade case support portions 204 are provided so as to be able to support the blade cases 172 that accommodate the cutting blade 36 or the cutting blade 52, respectively. Each blade case support portion 204 is, for example, a concave region having a shape corresponding to the blade case 172 and is configured to be able to place the blade case 172. Note that each blade case support portion 204 may be formed by arranging a guide structure having a shape corresponding to the blade case 172.

[0166] FIG. 10(B) is a perspective view showing the blade case 172. The blade case 172 includes a housing portion 174 and a lid portion 176 formed of a synthetic resin such as polypropylene, for example. The housing portion 174 and the lid portion 176 are connected to each other by a hinge portion 178.

[0167] The housing portion 174 has a bottom plate 180 and a side wall 182 provided on the outer peripheral portion of the bottom plate 180. The inside of the side wall 182 becomes a housing area 174a for housing the cutting blade 36 or the cutting blade 52. An outwardly facing first claw portion 184 is formed outside the region of the side wall 182 opposite to the hinge portion 178.

[0168] The lid portion 176 has a top plate 186 and a side wall 188 provided on the outer peripheral portion of the top plate 186. For example, the height of this side wall 188 is lower than the height of the side wall 182 of the housing portion 174. Also, an inwardly facing second claw portion 190 is formed inside the region of the side wall 188 opposite to the hinge portion 178.

[0169] For example, by rotating the lid portion 176 about the hinge portion 178 to close the housing area 174a of the housing portion 174, the cutting blade 36 or the cutting blade 52 housed in the housing area 174a will not fall out of the blade case 172. Note that when the first claw portion 184 and the second claw portion 190 are engaged (locked state), the closed state of the housing area 174a is maintained. On the other hand, when the lid portion 176 is open, external access to the cutting blade 36 or the cutting blade 52 housed in the housing area 174a becomes possible.

[0170] With the cutting blade 36 or the cutting blade 52 housed in the blade case 172, by placing the blade case 172 on the blade case support portion 204, the cutting blade 36 or the cutting blade 52 is supported by the support unit 200. Note that the blade case 172 with the lid portion 176 open is placed on each blade case support portion 204 of the support unit 200.

[0171] Further, on the upper surface 202a of the support plate 202, a plurality of presser flange support portions 206 are provided, each configured to support a presser flange 62. Each presser flange support portion 206 is, for example, a concave region having a shape corresponding to the presser flange 62 and is configured to place the presser flange 62 thereon. Note that each presser flange support portion 206 may be formed by arranging a guide structure having a shape corresponding to the presser flange 62.

[0172] Furthermore, on the upper surface 202a of the support plate 202, a plurality of board support portions 208 are provided, each capable of supporting a dressing board 19 used for dressing the cutting blade 36 or the cutting blade 52 and an inspection board 21 used for inspecting the cutting blade 36 or the cutting blade 52.

[0173] Each board support portion 208 is, for example, a concave region having a shape corresponding to the dressing board 19 or the inspection board 21 and is configured to place the dressing board 19 or the inspection board 21 thereon. Note that each board support portion 208 may be formed by arranging a guide structure having a shape corresponding to the dressing board 19 or the inspection board 21.

[0174] When machining the workpiece 11 with the cutting blade 36 or the cutting blade 52, dressing is performed to intentionally wear the tip of the cutting blade 36 or the cutting blade 52 for the purpose of correcting the shape of the cutting blade 36 or the cutting blade 52 and ensuring the sharpness of the cutting blade 36 or the cutting blade 52.

[0175] Dressing is performed by cutting the cutting blade 36 or the cutting blade 52 into the dressing board 19. For example, the dressing board 19 is formed by fixing abrasive grains such as green carborundum (GC) and white alumina (WA) with a binder such as a resin bond or a vitrified bond.

[0176] When dressing is performed, the binder of the cutting blade 36 or the cutting blade 52 comes into contact with the dressing board 19 and wears, for example, the shape of the cutting blade 36 or the cutting blade 52 is adjusted to be concentric with the spindle 34 (rounding). Also, when dressing is performed, similarly, the binder of the cutting blade 36 or the cutting blade 52 comes into contact with the dressing board 19 and wears, for example, the abrasive grains are appropriately exposed from the binder (truing). By using the cutting blade 36 or the cutting blade 52 that has undergone such dressing, the machining accuracy of the workpiece 11 is improved.

[0177] Also, when machining the workpiece 11 with the cutting blade 36 or the cutting blade 52, the cutting blade 36 or the cutting blade 52 may be cut into the inspection board 21 to inspect the shape of the cutting blade 36 or the cutting blade 52, correct the position of the cutting blade 36 or the cutting blade 52, etc.

[0178] For example, by cutting the cutting blade 36 or the cutting blade 52 into the inspection board 21 and observing the groove (cutting groove) formed in the inspection board 21, it is inspected whether the tip of the cutting blade 36 or the cutting blade 52 has the desired shape. Also, based on the length of the cutting groove formed in the inspection board 21, the position (cutting depth) of the lower end of the cutting blade 36 or the cutting blade 52 is calculated, and the height position of the cutting blade 36 or the cutting blade 52 is adjusted.

[0179] As the inspection board 21, for example, a plate-shaped member (silicon board) formed using silicon is used. However, as long as the inspection board 21 can be cut by the cutting blade 36 or the cutting blade 52, there is no limitation on the material of this inspection board 21. Therefore, as a material suitable for the inspection board 21, the same material as the workpiece 11 can be used.

[0180] Dressing board 19 or inspection board 21 is cut by cutting blade 36 or cutting blade 52 while being held by a pair of sub-tables 26 (see FIG. 1). At this time, for example, on one sub-table 26, dressing board 19 or inspection board 21 to be cut by cutting blade 36 or cutting blade 52 attached to one cutting unit 30 is held.

[0181] Also, for example, on the other sub-table 26, dressing board 19 or inspection board 21 to be cut by cutting blade 36 or cutting blade 52 attached to the other cutting unit 30 is held. In this way, the pair of sub-tables 26 is installed corresponding to the pair of cutting units 30.

[0182] Note that various tools supported by support unit 200 may be provided with identification marks including information regarding the tools. FIG. 11(A) is a plan view showing cutting blade 36 with identification mark 212, FIG. 11(B) is a plan view showing cutting blade 52 with identification mark 214, and FIG. 11(C) is a plan view showing dressing board 19 or inspection board 21 with identification mark 216.

[0183] Identification mark 212, identification mark 214, and identification mark 216 are, for example, one-dimensional codes (barcodes), two-dimensional codes, etc. Note that these identification marks 212, 214, and 216 may be directly printed on the object, or seals or the like on which these identification marks 212, 214, and 216 are printed may be attached to the object.

[0184] The identification mark 212 attached to cutting blade 36 and the identification mark 214 attached to cutting blade 52 include, for example, information such as the type (hub type or washer type) of cutting blade 36 or cutting blade 52, outer diameter, inner diameter, thickness (width), material of abrasive grains, particle size of abrasive grains, material of binder, serial number, etc.

[0185] On the other hand, the identification mark 216 attached to the dressing board 19 includes information such as, for example, the size, shape, abrasive grain material, abrasive grain particle size, and binder material of the dressing board 19. Further, the identification mark 216 attached to the inspection board 21 includes information such as, for example, the size, shape, material, and serial number of the inspection board 21.

[0186] The identification mark 212 attached to the cutting blade 36, the identification mark 214 attached to the cutting blade 52, the identification mark 216 attached to the dressing board 19 or the inspection board 21, etc. are read, for example, by a reading unit provided in the cutting device 2. The reading unit is a camera, a barcode reader, etc., and is selected according to the types of the above-mentioned identification marks 212, identification marks 214, identification marks 216, etc.

[0187] For example, the imaging unit 70 (see FIG. 1) adjacent to the cutting unit 30 also functions as a reading unit, and the identification marks 212, identification marks 214, identification marks 216, etc. are read by this imaging unit 70. However, a reading unit different from the imaging unit 70 may be provided in the cutting device 2.

[0188] The information read by the reading unit is input to the control unit 82 (see FIG. 1) and stored in the storage unit 82b. For example, when the processing unit 82a of the control unit 82 performs replacement of the cutting blade 36 or the cutting blade, etc., it refers to the information stored in the storage unit 82b and specifies the object to be held by the replacement unit 76.

[0189] It is desirable that each of the above-mentioned blade cases 172 is also attached with an identification mark corresponding to the cutting blade 36 or the cutting blade 52 to be accommodated. Thereby, the mismatch between the blade case 172 and the cutting blade 36 or the cutting blade 52 to be accommodated in this blade case 172 can be easily confirmed.

[0190] In this case, information obtained by reading the identification mark 212 attached to the cutting blade 36 or the identification mark 214 attached to the cutting blade 52 with a reading unit, and information obtained by reading the identification mark attached to the blade case 172 with a reading unit, are stored in the storage unit 82b.

[0191] After that, the processing unit 82a of the control unit 82 refers to the information stored in the storage unit 82b and determines whether the blade case 172 and the cutting blade 36 or the cutting blade 52 to be accommodated therein correspond to each other. Specifically, the processing unit 82a determines whether the information obtained from the identification mark 212 or the identification mark 214 and the information obtained from the identification mark attached to the blade case 172 correspond to each other. In this case, the processing unit 82a functions as a blade case determination unit that performs the determination.

[0192] Similarly, the processing unit 82a of the control unit 82 can also refer to the information stored in the storage unit 82b and determine whether the cutting blade 36 or the cutting blade 52 and the dressing board 19 or the inspection board 21 to be used correspond to each other. Specifically, the processing unit 82a determines whether the information obtained from the identification mark 212 or the identification mark 214 and the information obtained from the identification mark 216 correspond to each other. In this case, the processing unit 82a functions as a board determination unit that performs the determination.

[0193] Also, for example, when information such as the type of the cutting blade and other processing conditions are stored in the storage unit 82b in advance, the processing unit 82a of the control unit 82 can refer to the information stored in the storage unit 82b and determine whether the processing conditions and the cutting blade 36 or the cutting blade 52 correspond to each other. In this case, the processing unit 82a functions as a processing condition determination unit that performs the determination.

[0194] In addition, when it is determined that the blade case 172 does not correspond to the cutting blade 36 or the cutting blade 52 to be accommodated therein, or when it is determined that the cutting blade 36 or the cutting blade 52 does not correspond to the dressing board 19 or the inspection board 21 to be used, or when it is determined that the processing conditions employed in the cutting of the workpiece 11 do not correspond to the cutting blade 36 or the cutting blade 52, etc., the control unit 82 may notify the operator or the like to that effect or stop the operation of the cutting device 2.

[0195] The above-described support unit 200 is accommodated in a container 8 (see FIG. 1) provided in the cutting device 2. The support unit 200 is pulled out from the container 8 by the first transfer unit 72 and transferred onto the closed cover 78. A door (not shown) that can be opened and closed is provided on the cleaning unit 12 side of the container 8. When taking out the support unit 200 from the container 8, the elevator 6 moves up and down to adjust the height of the container 8 to the height of the pair of guide rails 16.

[0196] Also, the shape of the support plate 202 of the support unit 200 corresponds to the shape of the frame 15 that supports the workpiece 11. Therefore, the support unit 200 can be transferred onto the closed cover 78 by an operation similar to the operation when transporting the frame unit 17 to the chuck table 22.

[0197] Note that the transfer destination of the support unit 200 is not limited to above the cover 78. For example, the support unit 200 may be transferred onto the pair of guide rails 16. Also, the cover 78 can be omitted from the cutting device 2, and the support unit 200 can be transferred onto the chuck table 22.

[0198] Next, a specific example of a blade replacement method for replacing the cutting blade 36 or the cutting blade 52 mounted on the cutting unit 30 of the cutting device 2 will be described. In the following, as an example, a replacement method for replacing the cutting blade 36 (see FIG. 2) mounted on the mount flange 42 will be described.

[0199] First, place the cutting blade 36 for replacement on the upper surface 202a of the support plate 202 provided in the support unit 200 (preparation step). Specifically, place the blade case 172 containing the cutting blade 36 for replacement (for example, an unused cutting blade 36) on each of the plurality of blade case support portions 204A provided on the upper surface 202a of the support plate 202.

[0200] Note that it is desirable for the blade case 172 to be placed on the blade case support portion 204 with the lid portion 176 open. This allows the cutting blade 36 to be appropriately replaced even when the cutting device 2 is not provided with an opening / closing unit for opening and closing the lid portion 176. The support unit 200 supporting the cutting blade 36 for replacement via the blade case 172 is housed in the container 8 (see FIG. 1).

[0201] Then, the first transfer unit 72 pulls out the support unit 200 from the container 8 and transfers it onto the closed cover 78. As a result, the cutting blade 36 for replacement is held by the cover 78. As described above, the support unit 200 may be arranged on the pair of guide rails 16 or on the chuck table 22.

[0202] Next, hold the cutting blade 36 for replacement placed on the upper surface 202a of the support plate 202 by the holding portion 150B of the replacement device 100 (cutting blade for replacement holding step). FIG. 12(A) is a schematic diagram showing the replacement device 100 in the cutting blade for replacement holding step.

[0203] In the cutting blade for replacement holding step, first, move the replacement device 100 by the lifting mechanism 86 and the articulated arm 90 (see FIGS. 4 and 5), and arrange the replacement device 100 above the support plate 202 held by the cover 78 etc. (blade transfer position). Also, rotate the frame body 110 by the rotation mechanism 104 (see FIGS. 6 etc.) so that the holding portion 150B faces the upper surface 202a of the support plate 202.

[0204] Next, lower the replacement device 100 and bring the holding part 150B into contact with the replacement cutting blade 36 disposed on the upper surface 202a of the support plate 202. Then, suck and hold the replacement cutting blade 36 by the holding part 150B. After that, raise the replacement device 100 and move the holding part 150B in a direction away from the upper surface 202a of the support plate 202. Thereby, the replacement cutting blade 36 is lifted by the holding part 150B.

[0205] Next, remove the nut 48 attached to the mounting flange 42 of the cutting unit 30 from the mounting flange 42 (nut removal step). FIG. 12(B) is a schematic diagram showing the replacement device 100 in the nut removal step. In the nut removal step, first, move the replacement device 100 by the elevating mechanism 86 and the articulated arm 90 (see FIGS. 4 and 5) and place the replacement device 100 in the processing chamber cover 28 (see FIG. 1). Also, oppose the nut holding part 122 of the replacement device 100 to the mounting flange 42 in a state where the cutting blade 36 and the nut 48 are attached.

[0206] Then, hold and rotate the nut 48 attached to the mounting flange 42 by the nut holding part 122. Specifically, in a state where the nut 48 is gripped by a plurality of gripping members 134 (see FIG. 6 etc.), rotate the rotating member 130 (see FIG. 6 etc.) by the rotation drive source 128 to rotate the nut 48 in the first direction (the direction in which the nut 48 loosens). As a result, the nut 48 loosens and is removed from the mounting flange 42.

[0207] Next, separate the nut holding part 122 and the mounting flange 42 (first retraction step). FIG. 12(C) is a schematic diagram showing the replacement device 100 in the first retraction step. In the first retraction step, move the replacement device 100 by the articulated arm 90 (see FIGS. 4 and 5) in a direction opposite to the mounting flange 42. Thereby, the nut holding part 122 moves in a direction away from the mounting flange 42 while holding the nut 48.

[0208] Next, the cutting blade 36 (for example, the cutting blade 36 after use) attached to the mounting flange 42 of the cutting unit 30 is held by the holding portion 150A of the replacement device 100 (used cutting blade holding step). FIG. 12(D) is a schematic view showing the replacement device 100 in the used cutting blade holding step.

[0209] In the used cutting blade holding step, first, by rotating the rotating portion 106 (see FIG. 6 etc.) of the rotation mechanism 104, the surface 150a side (see FIG. 8(A) etc.) of the holding portion 150A is opposed to the mounting flange 42. Then, the replacement device 100 is moved toward the mounting flange 42 side, and the holding portion 150A is brought into contact with the used cutting blade 36 attached to the mounting flange 42. Then, the used cutting blade 36 is sucked and held by the holding portion 150A.

[0210] Next, the holding portion 150A and the mounting flange 42 are separated (second retraction step). FIG. 13(A) is a schematic view showing the replacement device 100 in the second retraction step. In the second retraction step, the replacement device 100 is moved by the articulated arm 90 (see FIGS. 4 and 5) in a direction opposite to the mounting flange 42. As a result, the holding portion 150A moves away from the mounting flange 42 while holding the used cutting blade 36, and the used cutting blade 36 is removed from the mounting flange 42.

[0211] Next, the replacement cutting blade 36 held by the holding portion 150B of the replacement device 100 is attached to the mounting flange 42 (cutting blade attachment step). FIG. 13(B) is a schematic view showing the replacement device 100 in the cutting blade attachment step. In the cutting blade attachment step, first, by rotating the rotating portion 106 (see FIG. 6 etc.) of the rotation mechanism 104, the surface 150a (see FIG. 8(A) etc.) side of the holding portion 150B holding the replacement cutting blade 36 is opposed to the mounting flange 42.

[0212] Then, the exchange device 100 is moved toward the mounting flange 42 side, and the cutting blade 36 for replacement is arranged such that the boss portion 46 (see FIG. 2) of the mounting flange 42 is inserted into the opening 36a (see FIG. 2) of the cutting blade 36 for replacement. In this state, when the suction holding of the cutting blade 36 for replacement by the holding portion 150B is released, the cutting blade 36 for replacement is attached to the mounting flange 42.

[0213] Next, the holding portion 150B and the mounting flange 42 are separated (third retraction step). FIG. 13(C) is a schematic diagram showing the exchange device 100 in the third retraction step. In the third retraction step, the exchange device 100 is moved by the articulated arm 90 (see FIGS. 4 and 5) in a direction opposite to the mounting flange 42. As a result, the holding portion 150B moves in a direction away from the mounting flange 42 and away from the cutting blade 36 for replacement attached to the mounting flange 42.

[0214] Next, the nut 48 held by the nut holding portion 122 is attached to the mounting flange 42 (nut attachment step). FIG. 13(D) is a schematic diagram showing the exchange device 100 in the nut attachment step. In the nut attachment step, first, the rotating portion 106 (see FIGS. 6 etc.) of the rotating mechanism 104 is rotated to oppose the nut holding portion 122 holding the nut 48 to the mounting flange 42. Also, the exchange device 100 is moved toward the mounting flange 42 side, and the nut 48 is positioned at the tip of the boss portion 46 (see FIG. 2) of the mounting flange 42.

[0215] Then, the rotating member 130 (see FIGS. 6 etc.) is rotated by the rotation drive source 128, and the nut 48 held by the plurality of gripping members 134 (see FIGS. 6 etc.) is rotated in the second direction (the direction in which the nut 48 is tightened). As a result, the nut 48 is tightened onto the boss portion 46 (see FIG. 2) of the mounting flange 42 and attached to the mounting flange 42. Thereby, the cutting blade 36 for replacement is clamped between the mounting flange 42 and the nut 48 and fixed to the tip of the spindle 34.

[0216] By the above procedure, the cutting blade 36 mounted on the mounting flange 42 is replaced. Then, the used cutting blade 36 held by the holding portion 150A is placed on the blade case support portion 204A of the support unit 200.

[0217] In addition, in the above-described steps, the approach and separation between the mounting flange 42 and the exchange device 100 may be realized by moving the cutting unit 30 (mounting flange 42). For example, in the first retraction step, the second retraction step, and the third retraction step, the cutting unit 30 can be moved along the Y-axis direction away from the exchange device 100, so that the exchange device 100 and the mounting flange 42 can be separated from each other.

[0218] In addition, in the above-described steps, the replacement of the cutting blade 36 mounted on the mounting flange 42 has been described. However, the replacement of the cutting blade 52 (see FIG. 3) mounted on the mounting flange 54 is also performed in the same procedure. However, when replacing the cutting blade 52, as described above, the pressing flange 62 is held by the holding portions 150A and 150B together with the cutting blade 52 (see FIG. 9(B)). That is, instead of replacing the cutting blade 36 described above, the cutting blade 52 and the pressing flange 62 are replaced.

[0219] In addition, when replacing the cutting blade 52, in the cutting blade holding step for replacement, after holding the pressing flange 62 by the holding portion 150B, the cutting blade 36 is held by the holding portion 150B. Specifically, first, the holding portion 150B is opposed to the pressing flange 62 supported by the pressing flange support portion 206 (see FIG. 10(A)), and the pressing flange 62 is held by the holding portion 150B.

[0220] Next, while holding the pressing flange 62, the holding portion 150B is opposed to the replacement cutting blade 52 in the blade case 172 supported by the blade case support portion 204B (see Fig. 10(A)), and the replacement cutting blade 52 is held together with the pressing flange 62 by the holding portion 150B. At this time, the cutting blade 52 is held by the negative pressure of the suction source 160 acting on the cutting blade 52 through the through hole 62d (see Fig. 9(B)) formed in the pressing flange 62.

[0221] Further, the exchange device 100 can also exchange the dressing board 19 or the inspection board 21 (see Fig. 10(A)) held by the sub-table 26 (see Fig. 1). For example, when dressing the cutting blade 36 or the cutting blade 52 using the dressing board 19, cutting grooves are formed in the dressing board 19.

[0222] When these cutting grooves are formed across the entire dressing board 19, the used dressing board 19 is exchanged for a replacement dressing board 19 (for example, an unused dressing board 19). Similarly, the inspection board 21 used for inspecting the cutting blade 36 or the cutting blade 52 is also exchanged for a replacement inspection board 21 (an unused inspection board 21) at a predetermined timing.

[0223] The holding portions 150A and 150B of the exchange device 100 are configured to be able to hold not only the cutting blade 36 and the cutting blade 52 but also plate-shaped members such as the dressing board 19 and the inspection board 21. Therefore, the exchange device 100 can perform the exchange of the dressing board 19 and the inspection board 21 held by the sub-table 26.

[0224] FIG. 14(A) is a perspective view showing a holding portion 150A that holds a square dressing board 19 (dressing board 19A). FIG. 14(A) shows a dressing board 19A sized to cover the entire surface 152a side of the frame body 152. In FIG. 14(A), the contour of the dressing board 19A is indicated by a two-dot chain line.

[0225] When holding the dressing board 19A with the holding portion 150A, a pair of lip portions 154b of the elastic member 154 are brought into contact with the dressing board 19A. At this time, the holding portion 150A is arranged such that the entire elastic member 154 is covered by the dressing board 19A. Thereby, the space between the pair of lip portions 154b is sealed. Then, the dressing board 19A is suction-held by the negative pressure of a suction source 160 (see FIG. 8(B)) acting on the space between the pair of lip portions 154b.

[0226] There are no significant restrictions on the size and shape of the dressing board 19 held by the holding portion 150A. FIG. 14(B) is a perspective view showing the holding portion 150A that holds a rectangular dressing board 19 (dressing board 19B). FIG. 14(B) shows a dressing board 19B whose long side is longer than the diameter of the frame body 152 and whose short side is shorter than the diameter of the frame body 152. However, the short side of the dressing board 19B is longer than the diameter of the elastic member 154.

[0227] When holding the dressing board 19B with the holding portion 150A, a pair of lip portions 154b of the elastic member 154 are brought into contact with the dressing board 19B. At this time, the holding portion 150A is arranged such that the entire elastic member 154 is covered by the dressing board 19B. Thereby, the space between the pair of lip portions 154b is sealed. Then, the dressing board 19B is suction-held by the negative pressure of a suction source 160 (see FIG. 8(B)) acting on the space between the pair of lip portions 154b.

[0228] However, the manner in which the dressing board 19 is held by the holding portion 150A is not limited to these. For example, the dressing board 19 may be held by the holding portion 150A without contacting the lip portion 154b. In this case, wear of the lip portion 154b due to contact with the dressing board 19 can be prevented.

[0229] For example, the holding portion 150A may be configured such that the tips of the pair of lip portions 154b do not protrude from the surface 152a of the frame body 152 and are disposed inside the first groove 152c rather than the surface 152a. In this case, the holding portion 150A can hold the dressing board 19A so that the lip portion 154b does not contact the dressing board 19A (FIG. 14(A)).

[0230] Specifically, the holding portion 150A is disposed such that the entire first groove 152c is covered by the dressing board 19A. At this time, the dressing board 19A is supported by the surface 152a of the frame body 152 and does not contact the lip portion 154b. In this state, when the negative pressure of the suction source 160 (see FIG. 8(B)) is applied to the first groove 152c, the dressing board 19A is suction-held.

[0231] Further, the holding portion 150A may be provided with a mechanism that ejects a gas such as air and holds the dressing board 19 in a non-contact manner using the Bernoulli effect. In this case, even when a dressing board 19B having a size and shape that cannot cover the entire first groove 152c as shown in FIG. 14(B) is used, the dressing board 19B can be held by the holding portion 150A without contacting the lip portion 154b.

[0232] Although FIGS. 14(A) and 14(B) show how the dressing board 19 is held by the holding portion 150A, the holding portion 150B can similarly hold the dressing board 19. Further, the holding portion 150A and the holding portion 150B can hold the inspection board 21 in the same manner as the dressing board 19.

[0233] Next, a specific example of a method for replacing a dressing board 19 or an inspection board held by the sub-table 26 of the cutting device 2 will be described. In the following, as an example, a method for replacing the dressing board 19 used for dressing the cutting blade 36 or the cutting blade 52 will be described.

[0234] First, a replacement dressing board 19 is placed on the upper surface 202a of the support plate 202 provided in the support unit 200 (see Fig. 10(A)) (preparation step). Specifically, the replacement dressing board 19 (for example, an unused dressing board 19) is placed on the board support portion 208 provided on the upper surface 202a of the support plate 202. The support unit 200 with the replacement dressing board 19 supported thereon is housed in the container 8 (see Fig. 1).

[0235] Then, the support unit 200 is pulled out from the container 8 by the first transfer unit 72 and transferred onto the closed cover 78. Thereby, the replacement dressing board 19 is prepared on the cover 78. Note that the support unit 200 may be disposed on the pair of guide rails 16 or on the chuck table 22.

[0236] Next, the replacement dressing board 19 placed on the upper surface 202a of the support plate 202 is held by the holding portion 150B of the replacement device 100 (replacement board holding step). Fig. 15(A) is a schematic diagram showing the replacement device 100 in the replacement board holding step.

[0237] In the replacement board holding step, first, the replacement device 100 is moved by the elevating mechanism 86 and the articulated arm 90 (see Figs. 4 and 5), and the replacement device 100 is disposed above the support plate 202 held by the cover 78 or the like (board transfer position). Also, the frame 110 is rotated by the rotation mechanism 104 (see Fig. 6 etc.) so that the holding portion 150B faces the upper surface 202a of the support plate 202.

[0238] Next, lower the replacement device 100 and bring the holding portion 150B into contact with the dressing board 19 for replacement disposed on the upper surface 202a of the support plate 202. Then, suck and hold the dressing board 19 for replacement by the holding portion 150B. After that, raise the replacement device 100 and move the holding portion 150B in a direction away from the upper surface 202a of the support plate 202. Thereby, the dressing board 19 for replacement is lifted by the holding portion 150B.

[0239] Next, hold the used dressing board 19 held by the sub-table 26 by the holding portion 150A of the replacement device 100 (used board holding step). FIG. 15(B) is a schematic view showing the replacement device 100 in the used board holding step.

[0240] In the used board holding step, first, move the replacement device 100 by the elevating mechanism 86 and the articulated arm 90 (see FIGS. 4 and 5) and place the replacement device 100 above the sub-table 26 (loading / unloading position) where the used dressing board 19 is disposed. Also, by rotating the rotating portion 106 (see FIGS. 6 etc.) of the rotation mechanism 104, oppose the holding portion 150A to the sub-table 26.

[0241] Then, move the replacement device 100 toward the sub-table 26 side and bring the holding portion 150A into contact with the used dressing board 19 held by the sub-table 26. After that, suck and hold the used dressing board 19 by the holding portion 150A.

[0242] Next, separate the holding portion 150A from the sub-table 26 (retraction step). FIG. 15(C) is a schematic view showing the replacement device 100 in the retraction step. In the retraction step, raise the replacement device 100 by the elevating mechanism 86 (see FIGS. 4 and 5) and move this replacement device 100 toward the side opposite to the sub-table 26. Thereby, with the used dressing board 19 held, the holding portion 150A moves in a direction away from the sub-table 26, and the used dressing board 19 is lifted.

[0243] Next, the dressing board 19 for replacement held by the holding part 150B of the replacement device 100 is placed on the sub-table 26 (placement step). FIG. 15(D) is a schematic diagram showing the replacement device 100 in the placement step.

[0244] In the placement step, first, by rotating the rotating part 106 (see FIG. 6 etc.) of the rotating mechanism 104, the holding part 150B holding the dressing board 19 for replacement is opposed to the sub-table 26. Then, the replacement device 100 is moved toward the sub-table 26 side to position the dressing board 19 for replacement above the sub-table 26. Thereafter, when the suction holding of the dressing board 19 for replacement by the holding part 150B is released, the dressing board 19 for replacement is placed on the sub-table 26.

[0245] Through the above procedure, the dressing board 19 held by the sub-table 26 is replaced. Then, the used dressing board 19 held by the holding part 150A is placed on the board support part 208 of the support unit 200. Here, although the replacement of the dressing board 19 has been described, when the inspection board 21 is placed on the sub-table 26, the replacement of the inspection board 21 can also be carried out in the same procedure.

[0246] As described above, the cutting device 2 according to the present embodiment includes a support unit 200 that supports the cutting blade 36 or the cutting blade 52 in a state of being housed in the blade case 172, a cutting unit 30 including a mount flange 42 to which the cutting blade 36 is attached or a mount flange 54 to which the cutting blade 52 is attached, a replacement device (replacement mechanism) 100 that attaches the cutting blade 36 or the cutting blade 52 supported by the support unit 200 to the mount flange 42 or the mount flange 54, and a moving unit (moving mechanism) 84 that moves the replacement device 100.

[0247] Therefore, after supporting the cutting blade 36 or the cutting blade 52 in a state of being accommodated in the blade case 172 by the support unit 200, by moving the exchange device 100 with the moving unit 84, the cutting blade 36 or the cutting blade 52 of the cutting unit 30 can be exchanged. That is, according to the cutting device 2 according to the present embodiment, it is not necessary to manually take out the cutting blade 36 or the cutting blade 52 from the blade case 172 as in the prior art.

[0248] Note that the present invention is not limited to the description of the above-described embodiments and can be implemented with various modifications. FIG. 16 is a perspective view showing a cutting device 2 provided with a support unit (stock unit) 250 according to a modified example. The cutting device 2 shown in FIG. 16 includes a rotary support unit 250 provided in the vicinity of the exchange unit 76 and supporting various tools used in the cutting device 2 instead of the container 8 (see FIG. 1). For example, the support unit 250 is disposed in a region adjacent to the opening 4b of the base 4.

[0249] The support unit 250 is configured to be able to support tools such as the cutting blade 36, the cutting blade 52, the pressing flange 62, the dressing board 19, and the inspection board 21 (see FIG. 10(A)) used in the cutting device 2. Specifically, the support unit 250 includes a support plate (support base) 252 on which various tools are placed.

[0250] FIG. 17 is a perspective view showing a support unit 250 including a rotatable support plate 252. The support plate 252 is, for example, a member formed in a disk shape, and a plurality of blade case support portions 254 configured to be able to support the blade cases 172 for accommodating the cutting blades 52 are provided on the upper surface 252a thereof. In FIG. 17, for convenience of explanation, the lid portion 176 of the blade case 172 is omitted.

[0251] Each blade case support portion 204 is, for example, a concave region having a shape corresponding to the blade case 172, and is configured to be able to place the blade case 172 thereon. Note that each blade case support portion 204 may be formed by arranging a guide structure having a shape corresponding to the blade case 172.

[0252] Also, on the upper surface 252a of the support plate 252, a plurality of retainer flange support portions 256 are provided, each of which is configured to be able to support the retainer flange 62. Each retainer flange support portion 206 is, for example, a concave region having a shape corresponding to the retainer flange 62, and is configured to be able to place the retainer flange 62 thereon. Note that each retainer flange support portion 206 may be formed by arranging a guide structure having a shape corresponding to the retainer flange 62.

[0253] The plurality of blade case support portions 254 and the plurality of retainer flange support portions 256 are arranged at substantially equal intervals along the circumferential direction of the support plate 252. On the lower surface side of the central portion of the support plate 252, a shaft (rotating mechanism) 258 that rotates by power transmitted from a rotational drive source (rotating mechanism) (not shown) such as a motor is connected. When the shaft 258 is rotated by the rotational drive source, the support plate 252 rotates around a rotation axis substantially parallel to the Z-axis. That is, the plurality of blade case support portions 254 and the plurality of retainer flange support portions 256 are arranged along the direction of rotation by the shaft 258.

[0254] Below the support plate 252, a reading unit 260 capable of reading an identification mark 214 or the like attached to the cutting blade 52 and a ring-shaped light source 262 for illuminating the identification mark 214 or the like are arranged. For example, the cutting blade 52 is supported by the blade case support portion 254 via the blade case 172 such that the surface with the identification mark 214 faces downward.

[0255] The reading unit 260 is composed of, for example, a visible light camera, an infrared camera, etc., and reads the identification mark 214 attached to the cutting blade 52 via the support plate 252 and the blade case 172. Therefore, the materials of the support plate 252 and the blade case 172 are selected according to the type of the reading unit 260.

[0256] For example, when the reading unit 260 is a visible light camera, the whole or a part of the support plate 252 and the blade case 172 are made of a material that transmits visible light. Specifically, the whole or a part of the support plate 252 is made of a transparent material such as plastic (e.g., polypropylene), glass (e.g., quartz glass, borosilicate glass), etc. Also, the whole or a part of the blade case 172 is made of a transparent material such as plastic (e.g., polypropylene).

[0257] However, the materials of the support plate 252 and the blade case 172 are arbitrarily changed according to the type of the reading unit 260. For example, when the reading unit 260 is an infrared camera, the whole or a part of the support plate 252 and the blade case 172 are made of a material that transmits infrared rays.

[0258] By rotating the support plate 252 and arranging the reading unit 260 directly below an arbitrary blade case support portion 254, the identification mark 214 attached to the cutting blade 52 supported by this blade case support portion 254 via the blade case 172 can be read by the reading unit 260.

[0259] The information of the identification mark 214 read by the reading unit 260 is output to the control unit 82 (see FIG. 16). Note that the reading unit 260 may be arranged above the support plate 252. In this case, the cutting blade 52 is supported by the blade case support portion 254 via the blade case 172 so that the surface with the identification mark 214 is exposed upward.

[0260] Note that, a blade case 172 containing a cutting blade 36 may be placed on the blade case support portion 254 of the support plate 252. Further, a plurality of board support portions 208 capable of supporting a dressing board 19 and an inspection board 21 may be provided on the upper surface 252a of the support plate 252.

[0261] Next to the support unit 250 configured as described above, an opening / closing unit capable of opening and closing the lid portion 176 of the blade case 172 supported by the support plate 252 is arranged. FIG. 18 is a perspective view showing the opening / closing unit 270. The opening / closing unit 270 is arranged, for example, below the support plate 252 and includes a holding mechanism 272 capable of sucking and holding the accommodation portion 174 of the blade case 172 placed on the blade case support portion 254 from below and fixing it.

[0262] The holding mechanism 272 includes a box-shaped base 272a in which a drive source (not shown) such as a motor is accommodated. On the upper surface of the base 272a, for example, two openings are formed, and the lower ends of cylindrical holding rods 272b capable of moving up and down by the power of the drive source are inserted into the respective openings.

[0263] At the upper end of each holding rod 272b, a suction cup-shaped suction pad 272c used in contact with the bottom plate 180 constituting the accommodation portion 174 of the blade case 172 is provided. The suction pad 272c is connected to a suction source (not shown) such as an ejector via a flow path or the like provided inside the holding rod 272b.

[0264] On the side of the holding mechanism 272, a lock release mechanism 274 capable of pushing up the lid portion 176 of the blade case 172 fixed by the holding mechanism 272 upward to release the state (locked state) in which the first claw portion 184 and the second claw portion 190 are engaged is arranged. The lock release mechanism 274 includes a push rod 274a that moves up and down by a drive source (not shown) such as a motor. Note that, the lock release mechanism 274 may be an air cylinder or the like that uses the pressure of air to move the push rod 274a up and down.

[0265] On the sides of the unlocking mechanism 274 and the support plate 252, there is arranged a push mechanism 276 capable of further opening the lid portion 176 of the blade case 172 in a state where the engagement state between the first claw portion 184 and the second claw portion 190 is released and the lid portion 176 floats from the housing portion 174.

[0266] The push mechanism 276 includes a box-shaped base 276a in which a drive source (not shown) such as a motor is housed. On the side surface of the base 276a on the support plate 252 side, for example, an opening is formed, and one end of a push rod 276b (see FIG. 19(A), etc.) that can move laterally by the power of the drive source is inserted into this opening.

[0267] Above the support plate 252, there is arranged a lock mechanism 278 for closing the lid portion 176 opened by the push mechanism 276 and engaging the first claw portion 184 and the second claw portion 190. For example, this lock mechanism 278 is arranged on the extension line of the path along which the push rod 276b moves.

[0268] The lock mechanism 278 includes a movable arm 278a that moves laterally by a drive source (not shown) such as a motor. Specifically, this movable arm 278a moves along the extension line of the path along which the push rod 276b moves. On the tip side (the push mechanism 276 side) of the movable arm 278a, there is attached a pressing wheel 278b that is used in a state of contacting the top plate 186 of the lid portion 176 and can rotate (spin) around a rotation axis perpendicular to the moving direction of the movable arm 278a and the Z-axis direction.

[0269] When opening the lid portion 176 of the blade case 172 by the opening / closing unit 270, first, the support plate 252 is rotated to position the blade case 172 above the holding rod 272b of the holding mechanism 272. Then, the two holding rods 272b are raised to bring the suction pad 272c into contact with the bottom plate 180 constituting the housing portion 174 of the blade case 172 from below.

[0270] FIG. 19(A) is a perspective view showing a state in which the blade case 172 placed on the blade case support portion 254 is fixed by the holding mechanism 272. After the suction pad 272c is brought into contact with the housing portion 174 of the blade case 172, the negative pressure of the suction source is applied to suck and hold the housing portion 174 with the suction pad 272c. A gap (opening) that allows the passage of the suction pad 272c is formed in the blade case support portion 254 of the support plate 252.

[0271] After the blade case 172 placed on the blade case support portion 254 is fixed by the holding mechanism 272, the push rod 274a of the unlocking mechanism 274 is raised to push up the second claw portion 190 side of the lid portion 176 upward. Thereby, the state in which the first claw portion 184 and the second claw portion 190 are engaged (locked state) is released. FIG. 19(B) is a perspective view showing a state in which the lid portion 176 of the blade case 172 is pushed upward by the unlocking mechanism 274.

[0272] After the lid portion 176 is pushed upward by the unlocking mechanism 274, the push rod 276b of the push mechanism 276 is moved laterally to further open the lid portion 176. FIG. 20(A) is a perspective view showing a state in which the lid portion 176 of the blade case 172 is further opened by the push mechanism 276. Specifically, the push rod 276b is moved laterally so that the top plate 186 of the lid portion 176 is pushed from the inside by the tip of the push rod 276b to further open the lid portion 176.

[0273] After the lid portion 176 is fully opened, the push rod 276b is moved so as to retract from above the blade case 172. By fully opening the lid portion 176 in this way, the replacement device 100 can easily access the cutting blade 52 housed in the blade case 172.

[0274] When closing the lid portion 176 of the blade case 172 with the opening / closing unit 270, for example, the push rod 274a of the unlocking mechanism 274 is moved downward. Also, after blocking the negative pressure acting on the suction pad 272c of the holding mechanism 272 from the suction source, the holding rod 272b is lowered. Then, the movable arm 278a of the locking mechanism 278 is moved toward the push mechanism 276 side.

[0275] FIG. 20(B) is a perspective view showing a state where the lid portion 176 of the blade case 172 is closed by the locking mechanism 278. When the movable arm 278a is moved toward the push mechanism 276 side, the pressing wheel 278b of the locking mechanism 278 contacts the top plate 186 of the lid portion 176 from the outside. In this state, when the movable arm 278a is further moved toward the push mechanism 276 side, the lid portion 176 is closed so as to be pressed by the pressing wheel 278b, and the first claw portion 184 and the second claw portion 190 are engaged with each other.

[0276] When replacing the cutting blade 52, the support unit 250 supports the replacement cutting blade 52 and the holding flange 62. Then, the replacement unit 76 holds the replacement cutting blade 52 and the holding flange 62 supported by the support unit 250 with the replacement device 100 (see FIG. 9(B)).

[0277] At this time, the control unit 82 controls the replacement unit 76 based on the information included in the identification mark 214 attached to the cutting blade 52, and causes the replacement device 100 to hold a predetermined cutting blade 52. Thereby, a desired cutting blade 52 can be selected as the replacement cutting blade 52. Then, the used cutting blade 52 and the holding flange 62 mounted on the cutting unit 30 are replaced with the replacement cutting blade 52 and the holding flange 62 (see FIGS. 12(A) to 13(D)).

[0278] Similarly, when replacing the dressing board 19 or the inspection board 21, the support unit 250 is made to support the replacement dressing board 19 or inspection board 21. Then, the replacement unit 76 holds the replacement dressing board 19 or inspection board 21 supported by the support unit 250, and exchanges it with the used dressing board 19 or inspection board 21 placed on the sub-table 26 (see FIGS. 15(A) to 16(D)).

[0279] In addition, the structures, methods, etc. according to the above-described embodiments and modifications can be appropriately changed and implemented without departing from the scope of the object of the present invention.

Explanation of Reference Numerals

[0280] 2: Cutting device 4: Base 4a: Opening 4b: Opening 6: Elevator 6a: Lifting platform 8: Container 10: Cassette 10a: Guide rail 12: Cleaning unit 14: Spindle table 16: Guide rail 18: Table cover 20: Dust and splash-proof cover 22: Chuck table 24: Clamp 26: Sub-table 28: Processing chamber cover 28a: Entrance / exit 30: Cutting unit 32: Housing 34: Spindle 34a: Threaded hole 36: Cutting blade 36a: Opening 38: Base 38a: Surface 38b: Back surface 40: Cutting edge 42: Mount flange 42a: Through hole 44: Flange portion 44a: Surface 44b: Protrusion 44c: Support surface 46: Boss portion 46a: Threaded portion 48: Nut 48a: Opening 48b: Through hole 50: Screw 52: Cutting blade 52a: Opening 54: Mount flange 56: Fixed mount 56a: Through hole 56b: Receiving portion 58: Flange portion 58a: Surface 58b: Protrusion 58c: Support surface 60: Boss portion 60a: First boss portion 60b: Second boss portion 60c: Third boss portion 60d: Threaded portion 62: Pressing flange 62a: Surface 62b: Back surface 62c: Opening 62d: Through hole 64: Nut 64a: Opening 64b: Through hole 66: Washer 68: Screw 70: Imaging unit 72: First conveyance unit 72a: Holding unit 72b: Gripping mechanism 74: Second conveyance unit 74a: Holding unit 76: Exchange unit 78: Cover 80: Hinge 82: Control unit 82a: Processing unit 82b: Memory unit 84: Moving unit 86: Lifting mechanism 88: Base plate 90: Multi-joint arm 92A: First support tool 92B: Second support tool 94A: First rotation mechanism 94B: Second rotation mechanism 94C: Third rotation mechanism 96A: First arm 96B: Second arm 100: Exchange device 102: Detachable unit 104: Rotation mechanism 106: Rotating part 106a: Rotation axis 110: Frame body 112a: Support member 112b: Support member 114a: Connecting member 114b: Connecting member 120: Nut rotating part 122: Nut holding part 124: Rotating part 124a: Rotation axis 126: Housing 128: Rotation drive source 130: Rotating member 130a: Surface 132: Holding pin 134: Gripping member 134a: Claw part 136: Cover 136a: Opening 136b: First pin receiving part 136c: Second pin receiving part 138: Pin 140: Annular member 142a: Elastic body 142b: Elastic body 150A: Holding part 150B: Holding part 150a: Surface 152: Frame body 152a: Surface 152c: First groove 152d: Second groove 152e: Third groove 152f: Fourth groove 152g: Fifth groove 154: Elastic member 154a: Base part 154b: Lip part 154c: Through hole 156: Flow path 158: Valve 160: Suction source 162: Pressure measuring device 172: Blade case 174: Accommodation part 174a: Accommodation area 176: Cover part 178: Hinge part 180: Bottom plate 182: Side wall 184: First claw part 186: Top plate 188: Side wall 190: Second claw part 200: Support unit 202: Support plate 202a: Upper surface 204: Blade case support part 204A: Blade case support part 204B: Blade case support part 206: Pressing flange support part 208: Board support part 212: Identification mark 214: Identification mark 216: Identification mark 250: Support unit 252: Support plate 252a: Upper surface 254: Blade case support part 256: Pressing flange support part 258: Shaft 260: Reading unit 262: Light source 270: Opening / closing unit 272: Holding mechanism 272a: Base 272b: Holding rod 272c: Suction pad 274: Lock release mechanism 274a: Push rod 276: Pushing mechanism 276a: Base 276b: Push rod 278: Lock mechanism 278a: Movable arm 278b: Pressing wheel 11: Workpiece 13: Tape 15: Frame 17: Frame unit 19: Dressing board 19A: Dressing board 19B: Dressing board 21: Inspection board

Claims

1. A cutting unit including a spindle serving as a rotation axis and a mounting flange fixed to the tip of the spindle and having a cutting blade mounted thereon, A support unit including a blade case support portion on which a blade case for housing the cutting blade is placed, and supporting the cutting blade in a state of being housed in the blade case, An exchange mechanism for removing the mounted cutting blade from the mounting flange with the cutting blade attached thereto, taking out the replacement cutting blade housed in the blade case placed on the support unit from the blade case, and attaching it to the mounting flange, A cutting apparatus comprising a moving mechanism for moving the exchange mechanism between an exchange position where the mounted cutting blade can be removed from the mounting flange and the replacement cutting blade can be attached to the mounting flange, a blade transfer position where the mounted cutting blade and the replacement cutting blade can be transferred between the support unit, and a retracted position away from the exchange position and the blade transfer position.

2. The support unit further includes a rotation mechanism for rotating the blade case support portion, The cutting apparatus according to claim 1, wherein the blade case support portion has a plurality of blade case support portions arranged along the direction of rotation by the rotation mechanism and each having a blade case placed thereon.

3. The mounting flange has a fixed mount fixed to the spindle and a pressing flange attached to the fixed mount so as to sandwich and fix the cutting blade therebetween, The support unit further includes a pressing flange support portion for supporting the pressing flange, The cutting apparatus according to claim 1 or claim 2, wherein the exchange mechanism attaches the replacement cutting blade to the receiving flange together with the pressing flange and removes the mounted cutting blade from the receiving flange together with the pressing flange.

4. The blade case has a housing portion for housing the cutting blade and a lid portion for closing the housing portion, The cutting apparatus according to any one of claims 1 to 3, further comprising an opening / closing unit for opening and closing the lid portion of the blade case.

5. Further comprising a table for holding a dressing board used for dressing the cutting blade or an inspection board on which inspection grooves are formed by the cutting blade. The support unit further includes a board support portion that supports a dressing board or an inspection board. The moving mechanism moves the exchange mechanism among a board transfer position where a dressing board or an inspection board can be transferred between the support unit, a loading / unloading position where a dressing board or an inspection board can be loaded / unloaded with respect to the table, the exchange position, the blade transfer position, and the retracted position. The exchange mechanism removes a mounted dressing board or a mounted inspection board from the table with the dressing board or the inspection board mounted thereon, and attaches an exchange dressing board or an exchange inspection board supported by the support unit to the table. The cutting device according to any one of claims 1 to 4.

6. A reading unit that reads an identification mark; The cutting device according to any one of claims 1 to 5, further comprising a blade case determination unit that determines whether information obtained by reading an identification mark attached to a cutting blade by the reading unit corresponds to information obtained by reading an identification mark attached to the blade case by the reading unit.

7. A reading unit that reads an identification mark; The cutting device according to claim 5, further comprising a board determination unit that determines whether information obtained by reading an identification mark attached to a cutting blade by the reading unit corresponds to information obtained by reading an identification mark attached to a dressing board or an inspection board by the reading unit.

8. The cutting device according to claim 7, further comprising a blade case determination unit that determines whether information obtained by reading an identification mark attached to a cutting blade by the reading unit corresponds to information obtained by reading an identification mark attached to the blade case by the reading unit.

Images