Heating device

Abstract

A heating device (100) according to the present disclosure comprises a heating plate (110), a plurality of heaters (130), and collecting electrodes. The heating plate (110) has a heating surface (110a), and a plurality of recessed portions (113) positioned on the opposite side to the heating surface (110a). The plurality of heaters (130) are positioned respectively in the plurality of recessed portions (113), and are each connected to lead electrodes (133, 134). The collecting electrodes (160, 170) are connected to two or more of the lead electrodes (133, 134).

Description

Technical Field

[0001] The disclosed embodiments relate to a heating device.

Background Art

[0002] Conventionally, a heating device is known that has a heating plate into which a plurality of cartridge heaters are inserted from the side, and heats an object by bringing the object into contact with such a heating plate. Patent Document 1 discloses a heating device in which a heat insulating material is provided on substantially the entire back surface (the surface located on the side opposite to the heating surface) of the heating plate in order to prevent heat dissipation from the heating plate (see Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

[0004] A heating device according to an aspect of the embodiment includes a heating plate, a plurality of heaters, and a collective electrode. The heating plate has a heating surface and a plurality of recesses located on the side opposite to the heating surface. The plurality of heaters are respectively located in the plurality of recesses and are each connected to a lead electrode. The collective electrode is connected to two or more lead electrodes.

Brief Description of the Drawings

[0005]

Figure 1

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[0006] Hereinafter, a mode for implementing the heating device according to the present disclosure (hereinafter referred to as "embodiment") will be described in detail with reference to the drawings. Note that the heating device according to the present disclosure is not limited by this embodiment. In addition, each embodiment can be appropriately combined within a range that does not conflict with the processing contents. In the following embodiments, the same parts are denoted by the same reference numerals, and duplicate descriptions are omitted.

[0007] In addition, in the embodiments described below, expressions such as "constant", "orthogonal", "perpendicular", or "parallel" may be used, but these expressions do not necessarily require strict "constant", "orthogonal", "perpendicular", or "parallel". That is, each of the above expressions shall allow for deviations such as manufacturing accuracy and installation accuracy.

[0008] In addition, each of the drawings referred to below is schematic for convenience of explanation. Therefore, details may be omitted, and the dimensional ratios do not necessarily match the actual ones.

[0009] In addition, in each of the drawings referred to below, for the sake of easy understanding of the explanation, an orthogonal coordinate system may be shown that defines the X-axis direction, Y-axis direction, and Z-axis direction orthogonal to each other, with the positive Z-axis direction being the vertically upward direction.

[0010] The cartridge heater has a temperature distribution in the longitudinal direction. For this reason, in a configuration that prevents heat dissipation using a heat insulating material as in the technology described in Patent Document 1, a difference is likely to occur between the temperature of the metal plate near the central portion of the heat insulating material and the temperature of the metal plate near the outer peripheral portion, making it difficult to make the temperature of the metal plate uniform.

[0011] In addition, there was a risk that the heat generated in the plurality of cartridge heaters would dissipate separately from the lead electrodes of each cartridge heater, causing the temperature of the metal plate to become non-uniform.

[0012] Therefore, there is an expectation for providing a heating device capable of improving the heat uniformity.

[0013] FIG. 1 is a side view of the heating device 100 according to the embodiment as viewed from the negative Y-axis direction. Hereinafter, when the heating device 100 is brought into contact with the object to be heated, the surface located on the object-to-be-heated side is defined as the "upper surface", and the surface located on the side opposite to the object to be heated is defined as the "lower surface". Note that the heating device 100 is not limited to this, and may be used, for example, with the top and bottom reversed, or in any posture.

[0014] The heating device 100 shown in FIG. 1 includes a heating plate 110, a fixing plate 120, a plurality of heaters 130, and a support plate 150. The heating device 100 also includes a plurality of anode-side collecting electrodes 160 and a plurality of cathode-side collecting electrodes 170. The anode-side collecting electrodes 160 and the cathode-side collecting electrodes 170 are examples of collecting electrodes.

[0015] The heating plate 110 is, for example, a plate-shaped member made of metal. The heating plate 110 has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated. The upper surface 110a is used, for example, for heating a mold as an example of an object to be heated. A plurality of recesses 113 (see FIGS. 3, 5, etc.) into which a plurality of heaters 130 are respectively inserted are located on a lower surface 110b (an example of an opposite surface) on the side opposite to the heating surface of the heating plate 110.

[0016] The plurality of heaters 130 are respectively inserted into the plurality of recesses 113. In other words, the plurality of heaters 130 are respectively positioned in the plurality of recesses 113. Thereby, the plurality of heaters 130 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110 which is the heating surface. In this way, by arranging the plurality of heaters 130 perpendicular to the heating surface of the heating plate 110, variations in the distance between the plurality of heaters 130 and the heating surface are suppressed, so that the heat uniformity within the plane of the heating surface can be improved. Also, a temperature distribution occurs in the longitudinal direction of the heater 130. In contrast, by arranging the plurality of heaters 130 perpendicular to the heating surface of the heating plate 110, it is possible to suppress the occurrence of a temperature difference caused by the temperature distribution of the heaters 130 between the central portion and the outer peripheral portion of the upper surface 110a.

[0017] Here, the configuration of the heater 130 will be described with reference to FIG. 2. FIG. 2 is a cross-sectional view of the heater 130 according to the embodiment.

[0018] As shown in FIG. 2, the heater 130 according to the embodiment includes a heater body 131, a fixing member 132, an anode-side lead electrode 133, and a cathode-side lead electrode 134. The anode-side lead electrode 133 and the cathode-side lead electrode 134 are examples of lead electrodes.

[0019] The heater body 131 is a ceramic heater. The heater body 131 has a heating resistor 131a inside the ceramic body. By using the heater body 131 as a ceramic heater, it is possible to suppress sticking between the heating plate 110 made of metal and the heater body 131. Therefore, for example, problems such as the heater 130 becoming unable to be replaced due to the heater body 131 sticking to the heating plate 110 are less likely to occur.

[0020] The length of the heater body 131, that is, the length of the ceramic body, can be, for example, about 1 mm or more and 200 mm or less. Also, the outer dimensions of the ceramic body can be, for example, about 0.5 mm or more and 100 mm or less.

[0021] The shape of the heater body 131, that is, the shape of the ceramic body, is, for example, cylindrical. Note that the shape of the heater body 131 is not limited to a cylindrical shape and may be, for example, an elliptical columnar shape or a prismatic shape. The material of the ceramic body is, for example, a ceramic having insulating properties. As the material of the ceramic body, for example, oxide ceramics, nitride ceramics, carbide ceramics, etc. can be used.

[0022] The heating resistor 131a is a member that generates heat when an electric current flows through it. The heating resistor 131a is connected to the coil portion 133a of the anode-side lead electrode 133, which will be described later, at one end. Also, the heating resistor 131a is connected to the coil portion 134a of the cathode-side lead electrode 134, which will be described later, at the other end.

[0023] The heating resistor 131a may include, for example, a high-resistance conductor containing tungsten, molybdenum, or the like. The dimensions of the heating resistor 131a can be, for example, a width of 0.1 mm or more and 5 mm or less, a thickness of 0.05 mm or more and 0.3 mm or less, and an overall length of 1 mm or more and 500 mm or less. Further, the heating resistor 131a may be, for example, a conductive ceramic containing tungsten carbide. In this case, the thermal expansion difference between the ceramic body and the heating resistor 131a can be reduced. Thereby, the thermal stress between the ceramic body and the heating resistor 131a can be reduced. As a result, the durability of the heater body 131 can be enhanced.

[0024] The fixing member 132 has a cylindrical shape surrounding the peripheral surface of the heater body 131. The fixing member 132 has, for example, a first member 132a and a second member 132b.

[0025] A male thread 132c is located on the outer peripheral surface of the first member 132a. The material of the first member 132a is, for example, a heat-resistant metal material. As the material of the fixing member 132, for example, an alloy containing Fe or Ni or the like can be used. Specifically, the fixing member 132 can be made of stainless steel, an Fe-Ni-Co alloy, a Ni-based heat-resistant alloy, or the like.

[0026] The second member 132b is located between the first member 132a and the coil portion 134a of the cathode-side lead electrode 134. The material of the second member 132b is, for example, an insulating ceramic. As the material of the second member 132b, for example, alumina or silicon nitride or the like may be used.

[0027] The anode-side lead electrode 133 and the cathode-side lead electrode 134 are fixed to the peripheral surface of the heater body 131. One end of the anode-side lead electrode 133 is connected to an external power source via an anode-side collector electrode 160 described later, and the other end is electrically connected to the heating resistor 131a. Further, one end of the cathode-side lead electrode 134 is connected to an external power source via a cathode-side collector electrode 170 described later, and the other end is electrically connected to the heating resistor 131a.

[0028] The anode-side lead electrode 133 and the cathode-side lead electrode 134 are wire materials containing a metal material such as nickel, iron, or a nickel-based heat-resistant alloy, for example. The cross-section of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be, for example, circular, or may be elliptical or rectangular. The outer diameter of the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be, for example, 0.5 or more and 2.0 mm or less.

[0029] The anode-side lead electrode 133 has a coil portion 133a and a terminal portion 133b. The coil portion 133a is a portion of the anode-side lead electrode 133 that is spirally wound along the circumferential surface of the heater body 131, and is electrically connected to one end of the heating resistor 131a. The terminal portion 133b is a portion of the anode-side lead electrode 133 that is drawn out from the coil portion 133a to the outside of the heater body 131. The terminal portion 133b extends from the rear end of the heater body 131 in the outward direction in the longitudinal direction of the heater body 131 (here, the negative Z-axis direction).

[0030] The cathode-side lead electrode 134 has a coil portion 134a and a terminal portion 134b. The coil portion 134a is a portion that is spirally wound along the circumferential surface of the heater body 131, and is electrically connected to the other end of the heating resistor 131a. The terminal portion 134b is a portion of the cathode-side lead electrode 134 that is drawn out from the coil portion 134a. The terminal portion 134b extends from the circumferential surface of the heater body 131 in the radially outward direction of the heater body 131 (here, the positive Y-axis direction).

[0031] Thus, the lead electrodes (anode-side lead electrode 133 and cathode-side lead electrode 134) of the heater 130 have coil portions 133a and 134a located along the circumferential surface of the heater body 131, and terminal portions 133b and 134b drawn out from the coil portions 133a and 134a. The heater 130 configured in this way has coil portions 133a and 134a functioning as springs, so that stress is less likely to concentrate. Therefore, the heater 130 configured in this way has high durability.

[0032] Here, an example where the anode-side lead electrode 133 is located on the rear end side of the heater body 131 with respect to the cathode-side lead electrode 134 has been described. However, the positional relationship between the anode-side lead electrode 133 and the cathode-side lead electrode 134 may be reversed. That is, the lead electrode provided at the position of the anode-side lead electrode 133 shown in FIG. 2 may be the cathode-side lead electrode 134. Also, the lead electrode provided at the position of the cathode-side lead electrode 134 shown in FIG. 2 may be the anode-side lead electrode 133.

[0033] The plurality of heaters 130 included in the heating device 100 are inserted into a plurality of recesses 113 formed in the lower surface 110b of the heating plate 110. FIG. 3 is a plan view of the heating device 100 according to the embodiment as viewed from the positive Z-axis direction.

[0034] In FIG. 3, the upper surface 110a of the heating plate 110, which is the heating surface, is shown in a rectangular plate shape, and the positions of the plurality of recesses 113 are indicated by broken lines. As an example, the plurality of recesses 113 shown in FIG. 3 are arranged in 6 rows and 6 columns. That is, the heating plate 110 according to the embodiment has a total of 36 recesses 113. Note that the arrangement and number of the plurality of recesses 113 are not limited to the illustrated example.

[0035] Returning to FIG. 1, the fixing plate 120 will be described. The fixing plate 120 is, for example, a plate-shaped member made of metal and is arranged at a distance from the heating plate 110. A plurality of heaters 130 respectively inserted into the plurality of recesses 113 are fixed to the fixing plate 120. The fixing mode of the heater 130 to the fixing plate 120 will be described later.

[0036] The support plate 150 is fixed to the fixed plate 120 by a plurality of columnar members 151 while being separated from the fixed plate 120. By the support plate 150 being positioned away from the fixed plate 120, a space for arranging the terminal portions 133b, 134b of each heater 130, in other words, a space for arranging the anode side collector electrode 160 and the cathode side collector electrode 170, which will be described later, can be secured between the support plate 150 and the fixed plate 120. Note that the support plate 150 and the plurality of columnar members 151 may be omitted as necessary.

[0037] FIG. 4 is a cross-sectional view taken along line IV-IV shown in FIG. 3. Further, FIG. 5 is a cross-sectional view taken along line V-V shown in FIG. 3. Note that in FIGS. 4 and 5, the illustration of the support plate 150 and the plurality of columnar members 151 is omitted.

[0038] As shown in FIGS. 4 and 5, the heating device 100 is configured such that a plurality of heaters 130 are fixed to the fixed plate 120 and are respectively inserted into a plurality of recesses 113 of the heating plate 110.

[0039] The heating plate 110 has a first plate member 111 and a second plate member 112.

[0040] The first plate member 111 is a plate-shaped member having the upper surface 110a of the heating plate 110, which is a heating surface. The first plate member 111 is joined to the second plate member 112 by a fixing member 114 such as a bolt. That is, the lower surface 111a on the side opposite to the upper surface 110a of the first plate member 111 is a joining surface joined to the second plate member 112.

[0041] The second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a joined surface joined to the joining surface of the first plate member 111, and a lower surface 110b located on the side opposite to the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.

[0042] Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112b forms the inner side surface of each recess 113, and the lower surface 111a of the first plate member 111 forms the bottom surface (ceiling surface in the posture shown in FIG. 5) of each recess 113.

[0043] The fixed plate 120 is connected to the heating plate 110 by a connecting member 121 such as a bolt or the like with a gap formed between the fixed plate 120 and the heating plate 110, and thus is disposed at a distance from the heating plate 110. By disposing the fixed plate 120 at a distance from the heating plate 110, it is possible to suppress the temperature rise of the fixing portions (for example, fixing holes 120a described later) of the plurality of heaters 130 with respect to the fixed plate 120. On the other hand, since the heat taken away from the heating plate 110 by the fixed plate 120 is reduced, the temperature rise of the heating plate 110 can be promoted.

[0044] The fixed plate 120 has a plurality of fixing holes 120a at positions corresponding to the plurality of recesses 113. The plurality of heaters 130 are respectively inserted and fixed in the plurality of fixing holes 120a. Hereinafter, for the sake of convenience of explanation, when there is no particular need to distinguish, the plurality of recesses 113, the plurality of fixing holes 120a, and the plurality of heaters 130 are simply referred to as "recess 113", "fixing hole 120a", and "heater 130", respectively.

[0045] The heater body 131 of the heater 130 passes through the fixing hole 120a, and its tip is inserted into the concave portion 113. The base end portion of the heater body 131 protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, rather than the lower surface of the fixing plate 120. The anode-side lead electrode 133 and the cathode-side lead electrode 134 described above are located at the base end portion of the heater body 131. By providing the anode-side lead electrode 133 and the cathode-side lead electrode 134 at the base end portion of the heater body 131 that protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, the anode-side lead electrode 133 and the cathode-side lead electrode 134 can be separated from the heating surface. Therefore, according to such a configuration, heat transfer to the anode-side lead electrode 133 and the cathode-side lead electrode 134 can be suppressed.

[0046] The fixing member 132 of the heater 130 fixes the heater body 131 in the fixing hole 120a with a gap between the inner wall of the fixing hole 120a. Specifically, a female thread is formed in a part of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110. On the other hand, the fixing member 132 has an external thread 132c on the outer peripheral portion of the first member 132a. When the heater body 131 is inserted into the fixing hole 120a, the fixing member 132 fixes the heater body 131 in the fixing hole 120a with a gap formed between the heater body 131 and the inner wall of the fixing hole 120a by fitting the external thread 132c into the female thread of the fixing hole 120a.

[0047] In this way, since the heater body 131 is fixed in the fixing hole 120a with a gap between the inner wall of the fixing hole 120a, the fixing plate 120 is less likely to receive heat from the heater body 131. As a result, the temperature rise of the fixing plate 120 is suppressed, and thus the heat radiated from the fixing plate 120 toward the base end portion of the heater body 131 where the anode-side lead electrode 133 and the cathode-side lead electrode 134 are provided is suppressed. For this reason, according to the heating device 100 according to the embodiment, deterioration of the anode-side lead electrode 133 and the cathode-side lead electrode 134 in the heater 130 can be reduced.

[0048] A spacer member 140 is disposed between the heating plate 110 and the fixing plate 120. The spacer member 140 has a cylindrical shape and allows the connecting member 121 to pass through it. By providing the spacer member 140 between the heating plate 110 and the fixing plate 120, the heating plate 110 and the fixing plate 120 can be kept separated from each other, and the distance between the heating plate 110 and the fixing plate 120 can be maintained. Therefore, according to such a configuration, the temperature rise of the fixing plate 120 due to heat transfer from the heating plate 110 can be continuously suppressed.

[0049] The material of the spacer member 140 is preferably, for example, a heat-resistant ceramic. As the material of the spacer member 140, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. Thereby, since the thermal expansion and thermal contraction of the spacer member 140 can be reduced, the wear of the spacer member 140 can be reduced.

[0050] Returning to FIG. 1. The anode-side collecting electrode 160 is electrically connected to the anode-side lead electrodes 133 of the plurality of heaters 130. In the embodiment, the heating device 100 has 36 heaters 130, and the anode-side collecting electrode 160 is electrically connected to the anode-side lead electrodes 133 of 6 heaters 130 arranged in a row among these 36 heaters 130. The heating device 100 has a total of 6 anode-side collecting electrodes 160 (see FIG. 7).

[0051] Also, the cathode-side collecting electrode 170 is electrically connected to the cathode-side lead electrodes 134 of the plurality of heaters 130. In the embodiment, the heating device 100 has 36 heaters 130, and the cathode-side collecting electrode 170 is electrically connected to the cathode-side lead electrodes 134 of 6 heaters 130 arranged in a row among these 36 heaters 130. The heating device 100 has a total of 6 cathode-side collecting electrodes 170 (see FIG. 9).

[0052] Thus, the heating device 100 according to the embodiment has an anode-side collective electrode 160 connected to two or more anode-side lead electrodes 133 of two or more heaters 130 included in the heating device 100. Further, the heating device 100 according to the embodiment has a cathode-side collective electrode 170 connected to two or more cathode-side lead electrodes 134 of two or more heaters 130 included in the heating device 100.

[0053] Heat generated by a plurality (here, six) of heaters 130 is transmitted to one collective electrode via the lead electrodes. Thereby, it is possible to suppress the heat generated by each heater 130 from dissipating separately from the lead electrodes of each heater 130. Therefore, according to the heating device 100 according to the embodiment, it is possible to improve the heat uniformity.

[0054] Hereinafter, the configurations of the anode-side collective electrode 160 and the cathode-side collective electrode 170 will be described more specifically with reference to FIGS. 6 to 9. FIG. 6 is a side view of the heating device 100 according to the embodiment as viewed from the negative X-axis direction. FIG. 7 is a cross-sectional view taken along the line VII-VII shown in FIG. 6. FIG. 8 is a side view of the heating device 100 according to the embodiment as viewed from the positive Y-axis direction. FIG. 9 is a plan view of a plurality of cathode-side collective electrodes 170 according to the embodiment as viewed from the negative Z-axis direction.

[0055] As shown in FIGS. 6 and 7, the anode-side collective electrode 160 includes a first metal plate 161, a second metal plate 162, and a plurality of fixing members 163. The first metal plate 161 and the second metal plate 162 are metal plates having a rectangular cross-section. The fixing member 163 detachably fixes the first metal plate 161 and the second metal plate 162. The fixing member 163 is, for example, a bolt.

[0056] The anode-side collector electrode 160 is electrically connected to the plurality of anode-side lead electrodes 133 by sandwiching the terminal portions 133b of the plurality of anode-side lead electrodes 133 between the first metal plate 161 and the second metal plate 162. Specifically, in the embodiment, the first metal plate 161 and the second metal plate 162 extend along the X-axis direction and sandwich a plurality (here, six) of terminal portions 133b arranged along the X-axis direction.

[0057] With such a configuration, since the plurality of anode-side lead electrodes 133 can be connected in a straight line, the plurality of anode-side lead electrodes 133 can be connected in the shortest way. Also, even when there is variation in the length of the terminal portions 133b, the connection is easy.

[0058] Also, the fixing of the first metal plate 161 and the second metal plate 162 by the fixing member 163 can be released. Therefore, for example, when any one of the plurality of heaters 130 fails, only the failed one can be replaced. Thus, according to the heating device 100 according to the embodiment, the replacement of the heater 130 is easy.

[0059] As shown in FIG. 7, the plurality (here, six) of anode-side collector electrodes 160 are arranged along the Y-axis direction. As shown in FIG. 7, in a plan perspective view looking toward the upper surface 110a which is the heating surface of the heating plate 110, the connection positions of each anode-side collector electrode 160 and the terminal portion 133b overlap with the upper surface 110a of the heating plate 110. Thus, by connecting the anode-side collector electrode 160 and the terminal portion 133b within the range of the heating region, for example, compared with the case of connecting the anode-side collector electrode 160 and the terminal portion 133b outside the heating region, the dissipation of heat from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further enhanced.

[0060] As shown in FIGS. 6, 8, and 9, the cathode-side current collector 170 includes a first metal plate 171, a second metal plate 172, and a plurality of fixing members 173. The first metal plate 171 and the second metal plate 172 are metal plates having a rectangular cross-sectional shape. The fixing member 173 detachably fixes the first metal plate 171 and the second metal plate 172. The fixing member 173 is, for example, a bolt.

[0061] The cathode-side current collector 170 is electrically connected to the plurality of cathode-side lead electrodes 134 by sandwiching the terminal portions 134b of the plurality of cathode-side lead electrodes 134 between the first metal plate 171 and the second metal plate 172. Specifically, in the embodiment, the first metal plate 171 and the second metal plate 172 extend along the X-axis direction and sandwich a plurality (here, six) of terminal portions 134b arranged along the X-axis direction (see FIGS. 8 and 9).

[0062] With such a configuration, the plurality of cathode-side lead electrodes 134 can be connected in a straight line, so that the plurality of cathode-side lead electrodes 134 can be connected in the shortest way. Also, even when there is variation in the length of the terminal portion 134b, the connection is easy.

[0063] In addition, since the fixing of the first metal plate 171 and the second metal plate 172 by the fixing member 173 can be released, for example, when any one of the plurality of heaters 130 fails, only the failed one can be replaced. Thus, according to the heating device 100 according to the embodiment, the replacement of the heater 130 is easy.

[0064] As shown in Fig. 9, a plurality (here, six) of cathode-side current collector electrodes 170 are arranged along the Y-axis direction. As shown in Fig. 9, in a plan view seen from a direction perpendicular to the upper surface 110a which is the heating surface of the heating plate 110, the connection positions of the respective cathode-side current collector electrodes 170 and the terminal portion 134b overlap with the upper surface 110a of the heating plate 110. By connecting the cathode-side current collector electrode 170 and the terminal portion 134b within the range of the heating region in this way, for example, compared with the case where the cathode-side current collector electrode 170 and the terminal portion 134b are connected outside the heating region, heat dissipation from each heater 130 to the outside of the heating device 100 can be suppressed. Therefore, according to the heating device 100 according to the embodiment, the heat uniformity can be further enhanced.

[0065] Moreover, since the heating device 100 according to the embodiment employs a configuration in which the lead electrodes are sandwiched between two metal plates on both the anode side and the cathode side, the heat uniformity can be further enhanced compared with the case where the above configuration is employed only on one of the anode side and the cathode side.

[0066] Also, as shown in Figs. 7 to 9, the anode-side current collector electrode 160 and the cathode-side current collector electrode 170 are parallel. By adopting such a configuration, the directions of thermal expansion or thermal contraction of the anode-side current collector electrode 160 and the cathode-side current collector electrode 170 are aligned, so that it becomes difficult for a shearing stress to be applied to the heater 130. Therefore, according to the heating device 100, the durability of the plurality of heaters 130 can be enhanced.

[0067] (First Modification Example) Fig. 10 is a cross-sectional view of the anode-side current collector electrode 160 according to the first modification example. As shown in Fig. 10, the first metal plate 161 of the anode-side current collector electrode 160 may have a recess 161a (an example of a first recess) on the facing surface (an example of a first facing surface) with the second metal plate 162. Also, the second metal plate 162 of the anode-side current collector electrode 160 may have a recess 162a (an example of a second recess) on the facing surface (an example of a second facing surface) with the first metal plate 161. The recesses 161a and 162a have, for example, a groove shape extending along the extending direction of the terminal portion 133b (here, the Z-axis direction).

[0068] In this way, the anode-side current collector 160 may have recesses 161a and 162a in the first metal plate 161 and the second metal plate 162. By adopting such a configuration, the first metal plate 161 and the second metal plate 162 can function as springs. Thereby, the force sandwiching the terminal portion 133b can be maintained over a long period of time.

[0069] Further, the recess 161a of the first metal plate 161 and the recess 162a of the second metal plate 162 may face each other. By adopting such a configuration, the spring force of the first metal plate 161 and the second metal plate 162 can be appropriately transmitted to each terminal portion 133b.

[0070] Note that the recess 161a and the recess 162a do not necessarily have to face each other. Further, the anode-side current collector 160 may have recesses 161a and 162a only in one of the first metal plate 161 and the second metal plate 162.

[0071] Here, an example in which the first metal plate 161 and the second metal plate 162 of the anode-side current collector 160 have recesses 161a and 162a has been described. However, the first metal plate 171 and the second metal plate 172 of the cathode-side current collector 170 may also have similar recesses. That is, the first metal plate 171 of the cathode-side current collector 170 may have a recess on the opposing surface to the second metal plate 172. Further, the second metal plate 172 of the cathode-side current collector 170 may have a recess on the opposing surface to the first metal plate 171. Also, the recess of the first metal plate 171 and the recess of the second metal plate 172 may face each other.

[0072] (Second Modified Example) FIG. 11 is a cross-sectional view of the anode-side current collector electrode 160 according to the second modified example. As shown in FIG. 11, the anode-side current collector electrode 160 has, for example, one metal plate 165. The metal plate 165 has a plurality of insertion holes 165a arranged along the longitudinal direction of the metal plate 165 (here, the X-axis direction). The insertion holes 165a are through holes that extend along the extending direction of the terminal portion 133b of the anode-side lead electrode 133 (here, the Z-axis direction) and penetrate the metal plate 165. The terminal portion 133b of the anode-side lead electrode 133 is inserted into each insertion hole 165a. In other words, the anode-side lead electrode 133 is located in the insertion hole 165a.

[0073] Further, the metal plate 165 may have fixing holes 165b communicating with the insertion holes 165a for each of the plurality of insertion holes 165a. A fixing member 166 for fixing the terminal portion 133b of the anode-side lead electrode 133 is inserted into such fixing holes 165b. The fixing member 166 is, for example, a bolt, and a screw groove is formed on the inner surface of the fixing hole 165b. The terminal portion 133b of the anode-side lead electrode 133 is sandwiched between the inner surface of the insertion hole 165a and the fixing member 166 inserted into the fixing hole 165b. Thereby, the terminal portion 133b is electrically connected to the anode-side current collector electrode 160.

[0074] With such a configuration, for example, even when there is variation in the thickness of the terminal portion 133b, the plurality of terminal portions 133b can be appropriately connected to the anode-side current collector electrode 160.

[0075] Note that the terminal portion 133b only needs to be in contact with at least the metal plate 165. Therefore, the metal plate 165 of the anode-side current collector electrode 160 does not necessarily need to be provided with the fixing holes 165b and the fixing member 166. In this case, for example, by making the diameter of the insertion hole 165a slightly larger than that of the terminal portion 133b, the contact property between the terminal portion 133b and the fixing hole 165b can be enhanced. Also, the metal plate 165 and the terminal portion 133b may be electrically connected by filling the insertion hole 165a with a brazing material, a solder material, or the like.

[0076] Here, an example in the case where the anode-side current collector 160 has a metal plate 165 in which a plurality of insertion holes 165a are formed has been described. However, the cathode-side current collector 170 may also have the same configuration as the anode-side current collector 160 according to the second modification example. That is, the cathode-side current collector 170 may have a metal plate in which a plurality of insertion holes are formed. Further, the cathode-side current collector 170 may have fixing holes communicating with the insertion holes for each of the plurality of insertion holes.

[0077] (Third Modification Example) FIG. 12 is a side view of a plurality of anode-side current collectors 160 according to the third modification example as viewed from the negative X-axis direction. As shown in FIG. 12, at least one of the plurality of anode-side current collectors 160 (an example of a different-position current collector) may have a position different from that of the other anode-side current collectors 160 in a direction (here, the Z-axis direction) perpendicular to the upper surface 110a (see FIG. 1 and the like), which is the heating surface of the heating plate 110. By adopting such a configuration, the plurality of anode-side current collectors 160 can be arranged at a higher density. Further, by shifting the height positions of the plurality of anode-side current collectors 160, the heat dissipation performance of the plurality of anode-side current collectors 160 can be improved.

[0078] Here, an example in the case where the height positions of the plurality of anode-side current collectors 160 have variations has been described. However, the heating device 100 may have variations in the height positions of the plurality of cathode-side current collectors 170. That is, at least one of the plurality of cathode-side current collectors 170 (an example of a different-position current collector) may have a position different from that of the other cathode-side current collectors 170 in a direction (here, the Z-axis direction) perpendicular to the upper surface 110a (see FIG. 1 and the like), which is the heating surface of the heating plate 110.

[0079] (Fourth Modification Example) FIG. 13 is a side view of the heating device 100 according to the fourth modification as viewed from the negative Y-axis direction. As shown in FIG. 13, at least one of the plurality of anode-side collector electrodes 160 (an example of a different-inclination collector electrode) may have an inclination different from that of the other anode-side collector electrodes 160 with respect to the upper surface 110a (see FIG. 1 etc.), which is the heating surface of the heating plate 110. With such a configuration, since the height positions of the plurality of anode-side collector electrodes 160 are displaced, the heat dissipation of the plurality of anode-side collector electrodes 160 can be improved.

[0080] Here, although an example in the case where the inclinations of the plurality of anode-side collector electrodes 160 have variations has been described, the heating device 100 may have variations in the inclinations of the plurality of cathode-side collector electrodes 170. That is, at least one of the plurality of cathode-side collector electrodes 170 (an example of a different-inclination collector electrode) may have an inclination different from that of the other cathode-side collector electrodes 170 with respect to the upper surface 110a (see FIG. 1 etc.), which is the heating surface of the heating plate 110.

[0081] (Fifth Modification) FIG. 14 is a side view of the heating device 100 according to the fifth modification as viewed from the negative X-axis direction. As shown in FIG. 14, in a plane perspective view looking toward the upper surface 110a of the heating plate 110, the extending directions of the anode-side collector electrode 160 and the cathode-side collector electrode 170 may be orthogonal. In the example shown in FIG. 14, an example is shown in which the anode-side collector electrode 160 extends along the Y-axis direction and the cathode-side collector electrode 170 extends along the X-axis direction.

[0082] With such a configuration, it is possible to equalize the heat diffusion in the X-axis direction and the heat diffusion in the Y-axis direction.

[0083] Further effects and modifications can be easily derived by those skilled in the art. For this reason, the broader aspects of the present disclosure are not limited to the specific details and representative embodiments represented and described as above. Therefore, various changes can be made without departing from the spirit or scope of the general inventive concept defined by the appended claims and their equivalents.

Description of Reference Numerals

[0084] Total of 36 100 Heating device 110 Heating plate 110a Upper surface 110b Lower surface 111 First plate member 111a Lower surface 112 Second plate member 112a Upper surface 112b Through hole 113 Recess 114 Joining member 120 Fixed plate 120a Fixing hole 121 Connecting member 130 Heater 131 Heater body 131a Heating resistor 131a Tip 132 Fixing member 132a First member 132b Second member 133 Anode side lead electrode 133a Coil part 133b Terminal part 134 Cathode side lead electrode 134a Coil part 134b Terminal part 140 Spacer member 150 Support plate 151 Columnar member 160 Anode side collecting electrode 161 First metal plate 161a Recess 162 Second metal plate 162a Recess 163 Fixing member 165 Metal plate 165a Insertion hole 165b Fixing hole 166 Fixing member 170 Cathode side collecting electrode 171 First metal plate 172 Second metal plate 173 fixing member

Claims

1. A heating plate, a plurality of heaters, and a collective electrode, comprising: the heating plate has a heating surface and a plurality of recesses located on the opposite surface of the heating surface; the plurality of heaters are respectively located in the plurality of recesses and are each connected to a lead electrode; the collective electrode has a first metal plate and a second metal plate and is connected to two or more of the lead electrodes; the lead electrode is sandwiched between the first metal plate and the second metal plate; the first metal plate has a first recess on a first facing surface with the second metal plate, a heating device.

2. In a plan view seen towards the heating surface, a connection position between the collective electrode and the lead electrode overlaps with the heating surface, the heating device according to Claim 1.

3. the second metal plate has a second recess on a second facing surface with the first metal plate; the first recess and the second recess face each other, the heating device according to Claim 1.

4. the heater has an anode-side lead electrode and a cathode-side lead electrode; the collective electrode has an anode-side collective electrode that sandwiches the anode-side lead electrode between the first metal plate and the second metal plate, and a cathode-side collective electrode that sandwiches the cathode-side lead electrode between the first metal plate and the second metal plate the heating device according to Claim 1.

5. the anode-side collective electrode and the cathode-side collective electrode are parallel, the heating device according to Claim 4.

6. A heating plate, a plurality of heaters, and a collective electrode, comprising: the heating plate has a heating surface and a plurality of recesses located on the opposite surface of the heating surface; the plurality of heaters are respectively located in the plurality of recesses and are each connected to a lead electrode; the collective electrode has a first metal plate and a second metal plate and is connected to two or more of the lead electrodes; the lead electrode is sandwiched between the first metal plate and the second metal plate; the heater has an anode-side lead electrode and a cathode-side lead electrode; the collective electrode has an anode-side collective electrode that sandwiches the anode-side lead electrode between the first metal plate and the second metal plate, and a cathode-side collective electrode that sandwiches the cathode-side lead electrode between the first metal plate and the second metal plate having; in a plan view seen towards the heating surface, an extending direction of the anode-side collective electrode and the cathode-side collective electrode is orthogonal, a heating device.

7. the collective electrode has a plurality of insertion holes, The heating device according to claim 1 or claim 6, wherein the lead electrode is located in the insertion hole.

8. The collective electrode has a fixing hole communicating with the insertion hole for each of the plurality of insertion holes. The heating device according to claim 7, wherein the lead electrode is sandwiched between a fixing member inserted into the fixing hole and the inner surface of the insertion hole.

9. Having a plurality of the collective electrodes. The heating device according to claim 1 or claim 6, having collective electrodes at different positions, wherein the positions in the direction perpendicular to the heating surface are different from each other.

10. Having a plurality of the collective electrodes. The heating device according to claim 1 or claim 6, having collective electrodes with different inclinations, wherein the inclinations with respect to the heating surface are different from each other.

11. The heater has a columnar heater body. The lead electrode. A coil portion located along the peripheral surface of the heater body. And a terminal portion drawn from the coil portion. And has. The heating device according to claim 1 or claim 6, wherein the collective electrode is connected to the terminal portion of the lead electrode.

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