Ceramic copper circuit board and semiconductor device using the same

Abstract

Provided are: a ceramic copper circuit board in which the average length RSm of the roughness curve element on the surface of a copper member is controlled; and a semiconductor device using same. A ceramic copper circuit board according to an embodiment of the present invention comprises a ceramic substrate and a copper member bonded to one surface of the ceramic substrate. When the average length RSm of the roughness curve element is measured at each of five arbitrary points selected from the surface of the copper member, the average value of the five average lengths RSm is 40-250 μm.

Description

[Technical Field]

[0001] The embodiments described below generally relate to a ceramic copper circuit board and a semiconductor device using the same. [Background technology]

[0002] Ceramic copper circuit boards, which are formed by bonding a ceramic substrate and a copper plate, are used as circuit boards for mounting semiconductor elements and the like. Furthermore, as semiconductor elements become more powerful, their junction temperatures are expected to rise. Accordingly, bonding using Ag nanoparticles for mounting semiconductor elements has been considered. For bonding using Ag nanoparticles, the formation of an Ag layer on the surface of a metal plate has been considered. For example, the ceramic circuit board described in Japanese Patent No. 6262968 (Patent Document 1) is a circuit board in which a ceramic substrate and an aluminum plate are bonded via a bonding layer, with improved surface roughness (arithmetic mean roughness Ra). Furthermore, Ag paste is used for mounting semiconductor elements and the like. A plating film is also applied to the surface of a copper plate to improve adhesion with the silver layer. A Ni-P plating film is used for the plating film. For example, Japanese Patent Laid-Open No. 2019-41108 (Patent Document 2) discloses the formation of recesses on the copper surface. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6262968 [Patent Document 2] Japanese Patent Application Publication No. 2019-41108 Summary of the Invention [Problem to be solved by the invention]

[0004] As mentioned above, silver (Ag) paste has been used to improve bonding with semiconductor elements. However, when a silver (Ag) layer is provided on the copper member of a ceramic copper circuit board, a phenomenon of reduced bonding strength occurs. Investigation into the cause of this problem revealed that it was due to the average length RSm of the roughness curve element on the surface of the copper member. The present invention addresses this problem and aims to provide a ceramic copper circuit board in which the average length RSm of the roughness curve element on the surface of the copper member is controlled. [Means for solving the problem]

[0005] A ceramic copper circuit board according to an embodiment includes a ceramic substrate and a copper member bonded to one surface of the ceramic substrate, and is characterized in that when the average lengths RSm of roughness curve elements are measured at five arbitrary locations selected from the surface of the copper member, the average value of the five average lengths RSm is 40 μm or more and 250 μm or less. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic view showing an example of a ceramic copper circuit substrate according to an embodiment. [Figure 2] FIG. 2 is a schematic diagram showing a method for testing bonding strength (peel strength) in the examples. [Figure 3] 1 is a schematic diagram showing an example of a semiconductor device according to an embodiment; DETAILED DESCRIPTION OF THE INVENTION

[0007] A ceramic copper circuit board according to an embodiment includes a ceramic substrate and a copper member bonded to one surface of the ceramic substrate, and is characterized in that when the average lengths RSm of roughness curve elements are measured at five arbitrary locations selected from the surface of the copper member, the average value of the five average lengths RSm is 40 μm or more and 250 μm or less.

[0008] The drawings of the present application will be described. Fig. 1 is a schematic diagram showing an example of a ceramic copper circuit board according to an embodiment of the present invention. Fig. 1 shows an example in which two copper plates are bonded to both sides of a ceramic substrate. The copper plates are an example of a copper member. In Fig. 1, 1 is a ceramic copper circuit board, 2 is a ceramic substrate, 3 is a copper plate (front copper plate), 4 is a copper plate (back copper plate), and 5 is a brazing material layer (active metal brazing material layer).

[0009] In the ceramic copper circuit board 1 shown in FIG. 1, a copper plate 3 and a copper plate 4 are disposed on both sides of a ceramic substrate 2, with a brazing filler metal layer 5 interposed therebetween. In the structure shown in FIG. 1, a circuit pattern is imparted to the copper plate 3, and the copper plate 4 is used as a heat sink. For convenience, the copper plate 3 is referred to as the front copper plate, and the copper plate 4 is referred to as the back copper plate. Two front copper plates 3 are disposed. The ceramic copper circuit board 1 according to the embodiment is not limited to this configuration. Three or more front copper plates 3 may be provided on the ceramic substrate 2, or only one front copper plate 3 may be provided. The ceramic copper circuit board 1 may also have a structure in which a circuit pattern is imparted to the back copper plate 4. Alternatively, the ceramic copper circuit board 1 may have a structure in which only the front copper plate 3 is provided, without the back copper plate 4. FIG. 1 shows an example in which copper plates are bonded to both sides of the ceramic substrate 2. When the back copper plate 4 is used as a heat dissipation member, an aluminum plate may be used as the heat dissipation plate instead of the back copper plate 4.

[0010] FIG. 2 is a schematic diagram showing a method for testing bonding strength (peel strength) in an example of the present invention. In FIG. 2, 1 is a ceramic copper circuit board, 6 is a bonding layer, and 7 is a silver ribbon. As shown in FIG. 2, the peel strength test was conducted using a silver ribbon. FIG. 3 is a schematic diagram showing an example of a semiconductor device according to an embodiment of the present invention. In FIG. 3, 6 is a bonding layer, 8 is a semiconductor element, and 9 is a semiconductor device. In the semiconductor device 9 shown in FIG. 3, one semiconductor element 8 is mounted on the front copper plate 3. Multiple semiconductor elements 8 may be provided in the semiconductor device 9. Multiple semiconductor elements 8 may be mounted on one front copper plate 3. In the example shown in FIG. 3, the semiconductor device 9 has a bonding layer 6 (brazing material layer), but the bonding layer 6 may not be provided and the front copper plate 3 and the semiconductor element 8 may be directly bonded.

[0011] The ceramic substrate 2 is a silicon nitride substrate, an aluminum nitride substrate, an aluminum oxide substrate, an alu-zir substrate, or the like. The thickness of the ceramic substrate 2 is preferably 0.1 mm or more and 3 mm or less. If the substrate thickness is less than 0.1 mm, the strength may be reduced. If the substrate thickness is greater than 3 mm, the ceramic substrate 2 may become a thermal resistor, which may reduce the heat dissipation performance of the ceramic copper circuit board 1. A more preferable range for the thickness of the ceramic substrate 2 is 0.2 mm or more and 2 mm or less.

[0012] The three-point bending strength of the silicon nitride substrate is preferably 600 MPa or more. The thermal conductivity is preferably 80 W / m·K or more. If the thermal conductivity is 80 W / m·K or more, the thermal conductivity of the silicon nitride substrate may be 90 W / m·K or more, or 130 W / m·K or more. Increasing the strength of the substrate allows for a thinner substrate. For this reason, the three-point bending strength of the silicon nitride substrate is preferably 600 MPa or more, and more preferably 700 MPa or more. By using a silicon nitride substrate, the substrate thickness can be reduced to 0.40 mm or less, or even 0.30 mm or less.

[0013] The three-point bending strength of an aluminum nitride substrate is approximately 300 to 450 MPa. On the other hand, the thermal conductivity of an aluminum nitride substrate is 160 W / m·K or more. Because the strength of an aluminum nitride substrate is low, a substrate thickness of 0.60 mm or more is preferable. The three-point bending strength of an aluminum oxide substrate is approximately 300 to 450 MPa, but aluminum oxide substrates are inexpensive. The three-point bending strength of an alu-zirconium substrate is high, approximately 550 MPa, but the thermal conductivity is approximately 30 to 50 W / m·K. An alu-zirconium substrate is a substrate made from a sintered mixture of aluminum oxide and zirconium oxide.

[0014] The ceramic substrate 2 is preferably either a silicon nitride substrate or an aluminum nitride substrate. The silicon nitride substrate and the aluminum nitride substrate are nitride-based ceramic substrates. Nitride-based ceramics react with an active metal brazing material containing Ti to form titanium nitride. Oxide-based ceramics react with an active metal brazing material containing Ti to form titanium oxide. Nitride-based ceramics can improve the bonding strength with copper members (especially copper plates) by using an active metal bonding method.

[0015] The copper member may be oxygen-free copper, a copper alloy, or the like. Generally, copper has a high thermal conductivity of approximately 400 W / m·K, which can improve the heat dissipation of the ceramic copper circuit board 1. The thickness of the copper plate 3 and the copper plate 4 may be 0.3 mm or more, or even 0.6 mm or more. Copper plates having a thickness of 0.6 mm or more include, for example, 1 mm copper plates, 2 mm copper plates, etc.

[0016] Increasing the thickness of the copper plate can improve the heat dissipation of the bonded body (ceramic copper circuit board 1). The thickness of the front copper plate 3 and the back copper plate 4 may be the same or different. The copper member is preferably made of oxygen-free copper or a copper layer containing a graphite layer. Oxygen-free copper has a copper purity of 99.96 wt% or higher, as specified in JIS-H-3100 (ISO 1337, etc.). The copper member may be bonded directly to the ceramic substrate 2 or via a brazing layer. A copper member having a circuit pattern previously formed by punching or other processing may be bonded to the ceramic substrate. After bonding the copper plate to the ceramic substrate, the circuit pattern may be formed on the copper plate by etching. The heat dissipation member may have a shape that protrudes from the ceramic substrate (for example, a shape in which the heat dissipation plate and lead frame are integrated). The heat dissipation member may have a groove.

[0017] In the ceramic copper circuit board 1 according to the embodiment, when the average length RSm of the roughness curve elements is measured at each of five arbitrary locations selected from the surface of the copper member, the average value of the five average lengths RSm is preferably 40 μm or more and 250 μm or less. More preferably, the average value of the five average lengths RSm is 50 μm or more and 200 μm or less. Most preferably, the average value of the five average lengths RSm is 60 μm or more and 150 μm or less. When the average length RSm of the roughness curve elements is within the above-mentioned range, the bonding material can easily penetrate into minute recesses on the surface of the copper plate 4. This allows for stronger bonding between the copper plate 4 and the bonding layer 6.

[0018] The five arbitrary locations are selected from regions that do not overlap each other and are at least 500 μm apart from each other. The "surface" refers to the region excluding the side surface. The average length RSm of the roughness curve elements on the side surface may be within the above-mentioned preferred range, or may be outside the range.

[0019] The measurement length per measurement is set to 4 mm. If the measurement length cannot be measured at 4 mm, measurements at multiple locations (3 locations or less) can be used instead. Set each measurement length so that the total measurement length at multiple locations is 4 mm, and average the average length RSm measured at each location according to the ratio of the measurement lengths.

[0020] For example, the value of RSm measured at a first location with a measurement length of 3 mm is A μm, and the value of RSm measured at a second location with a measurement length of 1 mm is B μm. In this case, RSm is calculated using the following formula. RSm=(3A+B) / 4

[0021] JIS B 0601:2013 is referenced for calculating surface roughness, such as the average length RSm. JIS-B-0601 corresponds to ISO 4287. Surface roughness is measured using a device with measurement accuracy equivalent to or greater than the SURFCOM 2000DX-23 manufactured by Tokyo Seimitsu Co., Ltd.

[0022] The minimum value of the five average lengths RSm is preferably 30 μm or more. Therefore, it is more preferable that each numerical value (absolute value) of the five average lengths RSm is 30 μm or more and 250 μm or less. Even more preferably, each numerical value of the five average lengths RSm is 35 μm or more and 150 μm or less. Most preferably, each numerical value of the five average lengths RSm is 40 μm or more and 140 μm or less. The fact that the individual average lengths RSm values ​​are within the above-mentioned range indicates that the difference in the average lengths RSm at each measurement point is small and that the variation is controlled. Therefore, the variation in bonding strength can be reduced, and a ceramic copper circuit board 1 that is easier to use can be obtained.

[0023] In addition to the average length RSm, it is also preferable that the arithmetic mean roughness Ra is controlled. When the arithmetic mean roughness Ra is measured at each of five arbitrary locations selected from the surface of the copper member, it is preferable that the average value of the five arithmetic mean roughnesses Ra is 0.1 μm or more and 0.7 μm or less. More preferably, the average value of the five arithmetic mean roughnesses Ra is 0.2 μm or more and 0.6 μm or less. It is also preferable that all of the five arithmetic mean roughnesses Ra are greater than 0 μm and 1.5 μm or less. More preferably, all of the arithmetic mean roughnesses Ra are 0.05 μm or more and 1.0 μm or less.

[0024] It is also preferable that the maximum valley depth Rv of the roughness curve is controlled. When the maximum valley depth Rv of the roughness curve is measured at each of five arbitrary locations selected from the surface of the copper member, it is preferable that the average value of the five maximum valley depths Rv is 0.4 μm or more and 2.5 μm or less. More preferably, the average value of the five maximum valley depths Rv is 0.5 μm or more and 2.0 μm or less. Even more preferably, the average value of the five maximum valley depths Rv is 0.6 μm or more and 1.8 μm or less.

[0025] The surface roughness is preferably controlled so that the minimum value of the five maximum valley depths Rv is 0.25 μm or more and 2.5 μm or less. The surface roughness is more preferably controlled so that the minimum value of the five maximum valley depths Rv is 0.3 μm or more and 2.4 μm or less. The surface roughness is even more preferably controlled so that the minimum value of the five maximum valley depths Rv is 0.4 μm or more and 2.3 μm or less.

[0026] It is also preferable that the maximum height roughness Rz is controlled. When the maximum height roughness Rz of the roughness curve is measured at each of five arbitrary locations selected from the surface of the copper member, it is preferable that the average value of the five maximum height roughness Rz is 10 μm or less.

[0027] When measuring the average length RSm, arithmetic mean roughness Ra, maximum valley depth Rv, and maximum height roughness Rz, the measurement locations are all the same. In other words, the five locations where the average length RSm is measured, the five locations where the arithmetic mean roughness Ra is measured, the five locations where the maximum valley depth Rv is measured, and the five locations where the maximum height roughness Rz is measured are all the same.

[0028] In the ceramic copper circuit board 1, the ceramic substrate 2 and the copper plate 3 are preferably bonded via a brazing filler metal layer 5. Furthermore, the brazing filler metal layer 5 preferably contains silver (Ag), copper (Cu), or an active metal. Specific examples include a brazing filler metal layer containing Ag, Cu, and an active metal, a brazing filler metal layer containing copper and an active metal but substantially no Ag, and a brazing filler metal layer containing Cu and magnesium (Mg). "Substantially no Ag" refers to the absence of intentional Ag addition, including the unavoidable inclusion of Ag as an impurity. Sn or In may be added as needed. The brazing filler metal layer 5 may contain 0.1% by mass to 10% by mass of one or more selected from carbon (C), tungsten (W), molybdenum (Mo), and rhenium (Re). The addition of carbon, tungsten, molybdenum, and rhenium can control the fluidity of the active metal brazing filler metal. Manganese (Mn) may also be added to the brazing filler metal layer 5 as needed.

[0029] An active metal brazing filler metal containing an active metal is preferably used to bond the ceramic substrate 2 and the copper plate 4. The active metal is preferably one or more selected from Ti (titanium), Nb (niobium), Zr (zirconium), and Hf (hafnium). The active metal brazing filler metal preferably contains at least Ti. The thickness of the bonding layer is preferably 5 μm or more. More preferably, the thickness of the brazing filler metal layer 5 is 10 μm or more and 200 μm or less. Even more preferably, the thickness of the brazing filler metal layer 5 is 15 μm or more and 150 μm or less. If the brazing filler metal layer 5 is thin, less than 5 μm, sufficient bonding strength may not be maintained. On the other hand, if the brazing filler metal layer 5 is thick, more than 200 μm, this may result in increased costs.

[0030] Next, the composition of each brazing filler metal component and the joining method will be described. The Ag content in the brazing filler metal is preferably in the range of 0% by mass to 95% by mass. The Cu content is preferably in the range of 3% by mass to 90% by mass. The total content of active metals or active metal hydrides is preferably in the range of 1% by mass to 15% by mass. The total content of Sn or In is preferably in the range of 1% by mass to 30% by mass. More preferably, the total content of Sn or In is in the range of 2% by mass to 15% by mass.

[0031] Ag or Cu is the main component of the brazing material layer 5. The active metal or active metal hydride is a component that reacts with the ceramic substrate 2 to obtain a strong bond. Sn or In has the effect of lowering the melting point of the active metal brazing material. The brazing material may also contain other unavoidable impurities.

[0032] The active metal brazing filler metal may contain 0.1% by mass or more and 2% by mass or less of carbon (C). The active metal brazing filler metal may also contain 0.1% by mass or more and 10% by mass or less of one or more elements selected from tungsten (W), molybdenum (Mo), and rhenium (Re). The addition of carbon, tungsten, molybdenum, and rhenium can control the fluidity of the active metal brazing filler metal. Manganese (Mn) may also be added to the brazing filler metal as needed.

[0033] The component ratios of the active metal brazing material described above are the ratios when the total of each metal component is 100% by mass. For example, when titanium nitride powder is used, the mass % of titanium is used. The mass of organic substances such as binders is not counted. In the joining method according to the embodiment, a brazing material paste having the above-mentioned composition may be prepared and applied to the ceramic substrate, or a metal foil having the above-mentioned composition may be used instead of the brazing material paste. Here, a method using a brazing material paste is described. The brazing material components are mixed and a binder and other additives are added to prepare an active metal brazing material paste.

[0034] Various substrates can be used for the ceramic substrate 2. Examples of ceramic substrates include silicon nitride substrates, aluminum nitride substrates, alumina substrates, zirconia substrates, and aruziru (a mixture of alumina and zirconia) substrates. The substrates can also be classified into oxide-based ceramic substrates and nitride-based ceramic substrates. The substrates can also be classified according to the metal component, such as silicon-containing ceramic substrates, aluminum-containing ceramic substrates, and zirconium-containing ceramic substrates.

[0035] Silicon nitride substrates and aluminum nitride substrates are called nitride ceramic substrates. When nitride ceramics and a copper plate are bonded using the active metal bonding method, the active metal reacts with the nitride ceramic substrate to form an active metal nitride layer. When Ti is used as the active metal, a titanium nitride (TiN) layer is formed. The formation of this active metal nitride layer can improve the bonding strength between the ceramic substrate 2 and the copper plate 3.

[0036] Aluminum oxide substrates, zirconium oxide substrates, and aluminium oxide substrates are called oxide-based ceramic substrates. When an oxide-based ceramic substrate and a copper plate are joined using the active metal joining method, the active metal reacts with the oxide-based ceramic substrate to form an active metal oxide layer. When Ti is used as the active metal, a titanium oxide (TiO2) layer is formed. The formation of this active metal oxide layer can improve the bonding strength between the ceramic substrate 2 and the copper plate 3.

[0037] The bonded body formed by bonding a ceramic substrate 2 and a copper plate 3 may be a multi-piece aggregate substrate that can be divided into two or more pieces. Individual bonded bodies can be obtained by dividing the aggregate substrate into multiple pieces. The bonded body may also have a notch or through-hole for screw fastening or the like. In other words, the shape of the ceramic copper circuit board 1 is not limited to the rectangular shape shown in the figure. It is also preferable to prepare a bonded body by placing copper plates on both sides of a ceramic substrate and heating them at 850°C, and then etching the front copper plate to obtain a ceramic copper circuit board 1 as shown in Figure 1.

[0038] The thickness of the copper member is preferably 0.3 mm or more. By making the copper plate 3 thicker, heat dissipation can be improved. It is also possible to increase the current-carrying capacity. For this reason, the thickness of the copper plate is preferably 0.3 mm or more, more preferably 0.6 mm or more. There is no particular upper limit to the thickness of the copper plate, but it is preferably 5 mm or less. If it exceeds 5 mm, it may be difficult to form a circuit shape by etching. It is preferable that the thickness of both the front copper plate 3 and the back copper plate 4 be 0.3 mm or more.

[0039] Here, "copper plate" also includes copper alloy plate. The copper plate is preferably an oxygen-free copper plate. As specified in JIS-H-3100, oxygen-free copper has a copper purity of 99.96 wt% or more. A coating may be provided on the surface of the copper member, or a rust inhibitor may be applied. The rust inhibitor and coating may be provided partially or entirely on the copper member. The copper plate may be given a predetermined shape, such as a circuit shape, by punching or the like before joining. Furthermore, a rust inhibitor may be applied to the surface of the copper plate.

[0040] 1 shows an example of a ceramic copper circuit board 1 having a three-layer structure of copper-ceramic-copper. The structure of the ceramic copper circuit board 1 is not limited to the example shown in the figure. For example, the ceramic copper circuit board 1 may have a structure of five or more layers, such as copper-ceramic-copper-ceramic-copper.

[0041] When bonding a copper plate to a semiconductor element, it is preferable to use a paste containing one or more selected from silver and copper. More preferably, at least one of silver and copper is used as the main component of the solid components. Here, the term "main component" refers to a component that accounts for 50 wt% or more. Bonding materials containing 50 wt% or more of silver or copper are distinguished from common SnAg solder and SnCu solder. It is preferable that the paste used for bonding to a semiconductor element does not contain metal components other than copper or silver beyond the level of impurities. More preferably, silver paste or copper paste is used. Even more preferably, silver paste is used. Silver paste may cause ion migration, but is less prone to oxidation than copper. This is preferable because it maintains the reliability of the bond. Copper paste is easily oxidized, but is less prone to ion migration. Therefore, different pastes may be used depending on the application of the ceramic copper circuit board 1.

[0042] Here, copper member-ceramic substrate-copper member has been described as an example of an embodiment of the present invention, but the structure of the ceramic copper circuit board 1 is not particularly limited. The ceramic copper circuit board 1 may have a structure such as copper member-ceramic substrate-copper member-ceramic substrate-copper member. The heat sink may be aluminum, as in copper member-ceramic substrate-aluminum member. The thickness of the heat sink may be different from the thickness of the circuit part (front copper plate 3). The heat sink may have a shape integrated with the lead. In other words, the copper member may protrude from the ceramic substrate 2.

[0043] Next, a method for controlling surface roughness will be described. First, a ceramic copper circuit board 1 is prepared. Next, the surface roughness of the copper member (front copper plate 3) is measured to confirm whether the surface roughness is within a desired range. The surface of a typical copper member is often smooth, with the average value of the average length RSm being less than 40 μm. In the process of preparing the ceramic copper circuit board 1, the surface roughness may be controlled by a method other than the method exemplified below. For example, the surface roughness may be controlled to be within a desired range by devising a process for removing or bonding a resist provided on the surface of the copper member. If the surface roughness is not within the desired range, it is preferable to carry out a process for controlling the surface properties. The surface property control process may be carried out without measuring the surface properties. Examples of methods for controlling the surface properties include abrasive paper and plasma treatment.

[0044] Examples of abrasive paper include sandpaper. When using sandpaper, it is preferable that the grain size (particle size) is 20 μm or more and 50 μm or less. In addition to controlling the grain size, the surface roughness can also be adjusted by changing the number of times it is rubbed in the same direction. The number of times it is rubbed is preferably 2 to 30 times. The surface roughness can be controlled by rubbing the surface of the copper member with sandpaper. The surface becomes rougher by increasing the number of times it is rubbed or by increasing the rubbing strength. Furthermore, the larger the grain size, the rougher the surface after rubbing.

[0045] When performing plasma treatment, it is preferable to use argon (Ar) gas. Specifically, a ceramic copper circuit substrate 1 is placed in a treatment space, and Ar gas plasma is generated. Exposing the surface of the copper member to the plasma makes the surface rougher. The plasma treatment may be performed at normal pressure or in a reduced pressure atmosphere. Plasma treatment is preferable because it may also be possible to remove elements other than copper that are attached to the surface of the copper member.

[0046] The surface properties of the copper member may be controlled by etching or chemical polishing. In this case, it is preferable to use a chemical solution with a controlled dissolution rate for the copper member. By using a chemical solution with a controlled dissolution rate and controlling the time the copper member is in contact with the chemical solution, the surface of the copper member can be more controlled. The method for controlling the surface properties is preferably one selected from the methods described above, and two or more methods may be combined.

[0047] When bonding a semiconductor element, the holding time for pressure sintering is preferably 100 seconds or more and 280 seconds or less. The holding time is more preferably 120 seconds or more and 200 seconds or less. Holding times within the aforementioned range are preferred because they reduce bonding variations. A reducing agent may also be added to the bonding layer between the copper member and the semiconductor element. The difference between the average length RSm of the roughness curve elements of the front copper plate 3 and the average length RSm of the roughness curve elements of the back copper plate 4 is preferably 100 μm or less.

[0048] Examples of semiconductor elements include Si elements, SiC elements, and GaN elements. Of these, SiC elements and GaN elements are preferred. These semiconductor elements may be elements processed using a dicer.

[0049] (Example) Examples of the present invention are described below. First, copper plates are placed on both sides of a ceramic substrate with an active metal brazing layer interposed between them. The laminate is heated to bond the copper plates to the ceramic substrate, thereby obtaining a ceramic copper circuit substrate. The ceramic substrate in the ceramic copper circuit substrate is a silicon nitride substrate or an aluminum nitride substrate. The thickness of the copper plate is set to 0.3 mm or more and 1.0 mm or less. The thickness of the brazing layer is set to 30 μm or more and 50 μm or less. The types of ceramic substrates, the thickness of the copper plate, and the thickness of the brazing layer in the examples and comparative examples are as shown in Table 1.

[0050] [Table 1]

[0051] In Examples 1-11 and Comparative Examples 1-2, the surface of the copper plate of the resulting bonded body was treated with sandpaper. The grain size of the sandpaper used in the examples was 20 μm to 50 μm. The surface of the copper plate was rubbed 2 to 30 times in approximately the same direction to roughen the surface of the copper plate. Meanwhile, in Comparative Example 1, the surface of the copper member was rubbed 10 times with sandpaper having a grain size of 5 μm or less. In Comparative Example 2, the surface of the copper member was rubbed 20 times with sandpaper having a grain size of 100 μm or more.

[0052] In Examples 1-11 and Comparative Examples 1-2, the surface roughness of copper (Cu) members was measured. The results of the surface roughness measurements are shown in Table 2. A SURFCOM 2000DX-23 manufactured by Tokyo Seimitsu Co., Ltd. was used to measure the surface roughness. The surface roughness was measured at five locations selected from the surface of the copper plate. Each measurement location was separated by at least 500 μm. Furthermore, the values ​​of RSm, Ra, Rv, and Rz were simultaneously measured from the results of the measurements at the five locations. In other words, the four parameters RSm, Ra, Rv, and Rz were simultaneously measured from one measurement location.

[0053] Table 2 lists the average value of RSm at five locations, the minimum value of RSm among the five locations, the average value of Ra at five locations, and the average value of Rv at five locations. In addition, in the column for the minimum RSm value, the value farthest from 145 μm (the average value of 40 μm and 250 μm, which is the range described in claim 1) is listed in parentheses. In all examples, the measurement length was standardized to 4.0 mm.

[0054] [Table 2]

[0055] As can be seen from Table 2, in Examples 1 to 11, the average value of RSm at five locations was within the preferred range. In Examples 2 to 6, 8, and 11, the minimum value of RSm was within the preferred range. On the other hand, in Examples 1, 7, 9, and 10, the minimum value of RSm was outside the preferred range.

[0056] In Examples 1-5, the average value of Ra at five locations was also within the preferred range. In Example 6, the average value of Ra was outside the preferred range. Furthermore, in Examples 1-5, the average value of Rv at five locations was also within the preferred range. In Example 6, the average value of Rv was outside the preferred range. Furthermore, in Examples 1-5, Rz was 10 μm or less at all measurement locations. On the other hand, in Example 6, there were locations where Rz exceeded 10 μm.

[0057] A silver (Ag) paste was applied to the surface of a copper plate and dried. As shown in Figure 2, a silver (Ag) ribbon was mounted on the copper plate surface of the resulting ceramic copper circuit board, and pressure sintering was performed. The bonding strength of the silver (Ag) ribbon was measured by a peel strength test. In the peel strength test, the silver ribbon was pulled perpendicularly toward the surface of the ceramic substrate, and the strength at which the silver ribbon peeled from the copper plate was measured. Examples in which the peel strength of the silver ribbon was 4.0 or higher were rated "best." Examples in which the peel strength was 3.0 or higher but less than 4 were rated "better." Examples in which the peel strength was 2.0 or higher but less than 3.0 were rated "good." Examples in which the peel strength was less than 2.0 were rated "bad."

[0058] The peel strength test was carried out using an MX2 series (test speed: 60 mm / min) manufactured by Imada Co., Ltd., and the electrical signal obtained by the device was converted into a numerical value using a load cell FGP-5 (5 kgf) manufactured by Nidec-Shimpo Corporation. The results are shown in Table 3.

[0059] [Table 3]

[0060] As can be seen from Table 3, in all examples where the average RSm, average Ra, and average Rv were all within the preferred range, the peel strength was 4.0 or more. On the other hand, in Example 1, where the minimum RSm value was outside the preferred range, the result of the peel strength test was 3.0 or more and less than 4.0. In Example 6, where the average Ra and average Rv were outside the preferred ranges, the result of the peel strength test was 2.0 or more and less than 3.0. In Comparative Example 1-2, where the average RSm, average Rv, and minimum RSm values ​​were outside the preferred ranges, the result of the peel strength test was less than 2.0.

[0061] As can be seen from the results in Tables 2 and 3, it was found that the surface roughness (particularly RSm) value has a significant effect on the peel strength in bonding with the silver layer.

[0062] This is thought to be due to the following reasons: When the average length RSm of the roughness curve elements is less than 40 μm, the period of the irregularities on the surface of the copper plate is short. The brazing material does not sufficiently penetrate into the irregularities on the copper plate surface, resulting in a decrease in joint strength. On the other hand, when the average length RSm exceeds 250 μm, the period of the irregularities is long, resulting in an insufficient anchor effect on the joining layer in contact with the copper plate surface, resulting in a decrease in joint strength. By setting the average value of the average length RSm to be 40 μm or more and 250 μm or less, the anchor effect on the joining layer can be increased, thereby increasing joint strength.

[0063] The control of the surface roughness is particularly useful when a ceramic copper circuit board and a semiconductor element are bonded together using silver paste.

[0064] In the embodiment of the present invention, the bonding layer between the silver ribbon and the copper plate was formed and measured using silver paste, but this is not limited to this and lead-free solder or copper paste may also be used. Furthermore, a reducing agent may be added to the paste as needed. Furthermore, although the peel strength between the copper plate and the bonding layer was examined, any material may be bonded via the bonding layer.

[0065] (Configuration 1) a ceramic substrate; a copper member bonded to one surface of the ceramic substrate, A ceramic copper circuit board in which, when the average length RSm of the roughness curve elements is measured at each of any five locations selected from the surface of the copper member, the average value of the five average lengths RSm is 40 μm or more and 250 μm or less. (Configuration 2) 2. The ceramic copper circuit board according to claim 1, wherein the average value of the five average lengths RSm is 60 μm or more and 150 μm or less. (Configuration 3) 3. The ceramic copper circuit board according to claim 1, wherein the minimum value of the five average lengths RSm is 30 μm or more. (Configuration 4) 4. The ceramic copper circuit board according to claim 1, wherein when the arithmetic mean roughness Ra is measured at each of the five locations, the average value of the five arithmetic mean roughnesses Ra is 0.1 μm or more and 0.7 μm or less. (Configuration 5) 5. The ceramic copper circuit board according to claim 1, wherein, when the maximum valley depth Rv of the roughness curve is measured at each of the five locations, the average value of the five maximum valley depths Rv is 0.5 μm or more and 2 μm or less. (Configuration 6) a brazing material layer that bonds the ceramic substrate and the copper member; 6. The ceramic copper circuit board according to claim 1, wherein the brazing material layer contains at least one material selected from the group consisting of silver, copper, and active metals. (Configuration 7) 7. The ceramic copper circuit board according to claim 1, wherein the main component of the ceramic substrate is at least one selected from the group consisting of silicon nitride, aluminum nitride, aluminum oxide, and zirconium oxide. (Configuration 8) 8. The ceramic copper circuit board according to claim 1, wherein the copper member has a thickness of 0.6 mm or more. (Configuration 9) A ceramic copper circuit board according to any one of claims 1 to 8, a semiconductor element mounted on the copper member; A semiconductor device comprising: (Configuration 10) A ceramic copper circuit board according to any one of claims 1 to 8, a semiconductor element mounted on the copper member; a bonding layer that bonds the semiconductor element to the copper member, The semiconductor device, wherein the bonding layer contains silver or copper.

[0066] According to an embodiment of the present invention, there are provided a ceramic copper circuit board and a semiconductor device in which the average length RSm of the roughness curve elements on the surface of the copper member is controlled.

[0067] Although several embodiments of the present invention have been described above, these embodiments are presented by way of example only and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims. Furthermore, the above-described embodiments can be implemented in combination with each other. [Explanation of symbols]

[0068] 1...Circuit board 2...Ceramic substrate 3...Copper parts (front copper plate) 4...Copper material (back copper plate) 5...Brazing layer (active metal brazing layer) 6... Bonding layer (bonding layer using silver paste or copper paste) 7...Silver ribbon 8...Semiconductor element 9...Semiconductor device

Claims

1. a ceramic substrate; a copper member bonded to one surface of the ceramic substrate; a brazing material layer that joins the ceramic substrate and the copper member, the brazing material layer contains at least an active metal, The thickness of the copper member is 0.3 mm or more and 5 mm or less, When an average length RSm of roughness curve elements is measured at each of any five locations selected from the surface of the copper member, the average value of the five average lengths RSm is 40 μm or more and 250 μm or less, A ceramic copper circuit board, wherein when the arithmetic mean roughness Ra is measured at each of the five locations, the average value of the five arithmetic mean roughnesses Ra is 0.1 μm or more and 0.7 μm or less.

2. The ceramic copper circuit board according to claim 1, wherein the average value of the five average lengths RSm is 60 μm or more and 150 μm or less.

3. The ceramic copper circuit board according to claim 1, wherein the minimum value of the five average lengths RSm is 30 μm or more.

4. 2. The ceramic copper circuit board according to claim 1, wherein when the maximum valley depth Rv of the roughness curve is measured at each of the five locations, the average value of the five maximum valley depths Rv is 0.5 μm or more and 2 μm or less.

5. The ceramic copper circuit board according to claim 2, wherein the minimum value of the five average lengths RSm is 30 μm or more.

6. 3. The ceramic copper circuit board according to claim 2, wherein when the maximum valley depth Rv of the roughness curve is measured at each of the five locations, the average value of the five maximum valley depths Rv is 0.5 μm or more and 2 μm or less.

7. 6. The ceramic copper circuit board according to claim 5, wherein when the maximum valley depth Rv of the roughness curve is measured at each of the five locations, the average value of the five maximum valley depths Rv is 0.5 μm or more and 2 μm or less.

8. 2. The ceramic copper circuit board according to claim 1, wherein when the arithmetic mean roughness Ra is measured at each of the five locations, all of the arithmetic mean roughness Ra is greater than 0 and 1.5 μm or less.

9. 2. The ceramic copper circuit board according to claim 1, wherein the main component of the ceramic substrate is at least one selected from the group consisting of silicon nitride, aluminum nitride, aluminum oxide, and zirconium oxide.

10. 6. The ceramic copper circuit board according to claim 5, wherein the main component of the ceramic substrate is at least one selected from the group consisting of silicon nitride, aluminum nitride, aluminum oxide, and zirconium oxide.

11. 2. The ceramic copper circuit board according to claim 1, wherein the copper member has a thickness of 0.6 mm or more.

12. A ceramic copper circuit board according to any one of claims 1 to 11, a semiconductor element mounted on the copper member; A semiconductor device comprising:

13. A ceramic copper circuit board according to any one of claims 1 to 11, a semiconductor element mounted on the copper member; a bonding layer that bonds the semiconductor element to the copper member, The semiconductor device, wherein the bonding layer contains silver or copper.

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