Processing system

Abstract

To provide a machining system allowing for backup with utilization of an existing installation without the need of preparing a new recording medium for backup.SOLUTION: A machining system 1 includes a plurality of machining devices 10 mutually connected through a communication line 2, in which each machining device 10 comprises a chuck table 20 that holds a work-piece, a machining unit 30 that machines the work-piece held on the chuck table 20, a control section 100 that controls driving to the chuck table 20 and the machining unit 30, and a recording section 110 that records control information for the control section 100 to control driving. In the machining system 1, the recording section 110 includes a backup recording section 111 that records, for backup, control information of another machining device 10 connected through the communication line 2, and the control section 100 sends control information of the machining device 10 comprising the control section 100 to a backup recording section 111 of another machining device 10 designated, to record the same for backup.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a processing system.

Background Art

[0002] Various processing apparatuses are known for cutting or grinding various plate-shaped workpieces such as semiconductor device wafers, resin package substrates, ceramic substrates, and glass substrates with a cutting blade or grinding wheel mounted on a spindle, or processing them with a laser beam.

[0003] In these processing apparatuses, when driving a chuck table and a processing unit (including a spindle, a condenser lens for a laser beam, etc.) to perform a desired process on a workpiece, various information of each processing apparatus is recorded in a recording unit of a control unit. The various information includes, for example, the initial positions of the chuck table and the spindle, the initial positions with various sensors, the drive programs of the chuck table and the processing unit when processing the workpiece under desired conditions, or the operating system that controls the control unit itself. For example, Patent Document 1 discloses a system that transmits and shares arbitrary processing conditions with other similar apparatuses.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] However, if the processing device loses the recorded information or the recording unit itself is damaged due to some cause such as a power outage, etc., and no backup has been taken, a great deal of man-hours will be required to re-register the data for restart. For example, measures such as preparing a spare recording medium for backup are costly, and management man-hours are also required for regularly performing backups.

[0006] The present invention has been made in view of such problems, and an object thereof is to provide a processing system that can perform backup using existing equipment without the need to prepare a new recording medium for backup.

Means for Solving the Problems

[0007] In order to solve the above-described problems and achieve the object, a processing system of the present invention includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held by the chuck table, a control unit that controls the driving of the chuck table and the processing unit, and a recording unit in which control information for the control unit to control the driving is recorded, and processing devices including these are connected to each other by a communication line. Different types of A processing system having a plurality of processing devices, wherein the recording unit includes a backup recording unit that records, for backup, the control information of another processing device connected by the communication line, and the control unit transmits the control information of the processing device including the control unit to the backup recording unit of another specified One type of processing device and records it for backup. Type of It is characterized in that.

[0008] Further, in the processing system of the present invention, a program of the operating system of the control unit is recorded in the recording unit, and the control unit may transmit the program of the operating system to the backup recording unit of another specified Of the one type of processing device processing device and record it for backup. The other Type of processing device. In addition, when the control information of the one type of processing device of the processing system of the present invention is damaged, the control information of the one type of processing device recorded in the backup recording unit of the other type of processing device is installed in the recording unit of the one type of processing device to restore the one type of processing device. In addition, the processing system of the present invention includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held by the chuck table, a control unit that controls the driving of the chuck table and the processing unit, and a recording unit in which control information for the control unit to control the driving is recorded. A processing system having a plurality of processing devices connected to each other by a communication line, wherein the recording unit includes a backup recording unit that records the control information of the other processing device connected by the communication line for backup, and the control unit transmits the control information of the processing device including the control unit to the backup recording unit of the specified other processing device for recording. When the control information of the processing device is damaged, the control information of the processing device recorded in the backup recording unit of the other processing device is installed in the recording unit of the processing device to restore the processing device.

Advantages of the Invention

[0009] The present invention can perform backup using existing equipment without the need to prepare a new recording medium for backup.

Brief Description of the Drawings

[0010]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Modes for Carrying Out the Invention

[0011] The mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the content described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Also, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

[0012] (Embodiment) 〔Processing System 1〕 Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a configuration example of a processing system 1 according to an embodiment. The processing system 1 has a plurality of processing devices 10 connected to each other by a communication line 2. The communication line 2 is a communication line for communication including wired communication or wireless communication. The communication line 2 is connected so as to be able to transmit various kinds of information between the plurality of processing devices 10.

[0013] In the embodiment shown in FIG. 1, the plurality of processing devices 10 include two cutting devices 10-1 and 10-2 and one grinding device 10-3. Note that the processing devices 10 included in the processing system 1 in the present invention are not limited to the three in the embodiment, and may be two or four or more. Also, the plurality of processing devices 10 may all be of different types, may all be of the same type, or some of the same type and different types may be mixed. The processing system 1 may have, as the processing device 10, for example, a laser processing device, a plasma etching device, an expansion device, or a splitting device.

[0014] The processing device 10 included in the processing system 1 includes at least a chuck table 20, a processing unit 30, a control unit 100, and a recording unit 110, and the recording unit 110 includes a backup recording unit 111. Each processing device 10 may also have a display unit 90 shown in FIGS. 2 and 3.

[0015] The chuck table 20 holds a workpiece 200 (see FIG. 2). The workpiece 200 is, for example, a wafer such as a disk-shaped semiconductor device wafer or an optical device wafer having a substrate such as silicon (Si), sapphire (Al2O3), gallium arsenide (GaAs), silicon carbide (SiC), or lithium tantalate (LiTa3). Note that the workpiece 200 is not limited to the disk shape shown in FIG. 2 and may not be disk-shaped in the present invention.

[0016] The processing unit 30 processes the workpiece 200 held by the chuck table 20. For example, when the processing device 10 is the cutting devices 10-1 and 10-2, the processing unit 30 is the cutting unit 40. For example, when the processing device 10 is the grinding device 10-3, the processing unit 30 is the grinding unit 60.

[0017] The control unit 100 controls the driving of the chuck table 20 and the processing unit 30. The control unit 100 includes an arithmetic processing device as arithmetic means and an input / output interface device as communication means. The arithmetic processing device includes, for example, a microprocessor such as a CPU (Central Processing Unit). The control unit 100 performs various calculations based on a predetermined program stored in the recording unit 110. The program includes the operating system program of the control unit 100. The operating system program is the most basic software for managing the entire processing device 10 and running various application softwares such as a program for controlling the processing operation.

[0018] The control unit 100 outputs various control signals to the above-described respective components via the input / output interface device according to the calculation result, and controls the processing device 10. The control unit 100 transmits various information to other processing devices 10 specified via the communication line 2. The various information includes, for example, control information of the processing device 10 including the control unit 100, or backup information such as the program of the operating system of the control unit 100. The information of the processing device 10 including the control unit 100 transmitted via the communication line 2 by the control unit 100 is transmitted together with the solid information such as the manufacturing number of the processing device 10.

[0019] The recording unit 110 records control information for controlling the drive of the control unit 100. Further, the recording unit 110 records a program of the operating system of the control unit 100. The recording unit 110 includes a storage device as a storage means and an input / output interface device as a communication means. The storage device has a memory such as an HDD, a ROM (Read Only Memory), or a RAM (Random Access Memory). The recording unit 110 may be physically configured separately from the control unit 100, may be configured integrally with the control unit 100, or may be configured as a part of the control unit 100 as a computer. The recording unit 110 includes a backup recording unit 111.

[0020] The backup recording unit 111 records information for backup of another processing device 10 connected via the communication line 2. The backup recording unit 111 records, for example, control information of another processing device 10 connected via the communication line 2 for backup. The control unit 100 transmits, for example, control information of the processing device 10 including the control unit 100 to the backup recording unit 111 of a specified other processing device 10 and causes it to be recorded for backup. The backup recording unit 111 records, for example, a program of the operating system of the control unit 100 of another processing device 10 connected via the communication line 2. The control unit 100 transmits, for example, a program of the operating system to the backup recording unit 111 of a specified other processing device 10 and causes it to be recorded for backup.

[0021] The various information transmitted to the backup recording unit 111 includes solid information such as the manufacturing number of the source processing device 10. The backup recording unit 111 records the various information in separate folders for each processing device 10. When information for changing the various information is transmitted from another processing device 10, the backup recording unit 111 overwrites and records the changed information.

[0022] The control unit 100 may transmit backup information to the backup recording units 111 of a specified plurality of processing devices 10 or all the processing devices 10 connected to the communication line 2 for backup recording. The backup of other processing devices 10 by the control unit 100 may be performed, for example, by an operator's manual operation, periodically at a preset cycle such as a predetermined time of day, or automatically under preset conditions such as the timing when the processing conditions of the processing device 10 are changed.

[0023] The display unit 90 illustrated in FIGS. 2 and 3 includes, for example, a liquid crystal display device, an organic EL (Electro Luminescence) display device, etc. The display unit 90 causes the display screen 91 to display a processing condition setting screen, a backup setting and operation screen, the state of the workpiece 200 imaged by the imaging unit of the processing device 10, the state of the processing operation, etc. When the display screen 91 includes a touch panel, the display unit 90 may include an input unit. The input unit can receive various operations such as an operator setting various information. The input unit may be an external input device such as a keyboard. The information and images displayed on the display screen 91 of the display unit 90 are switched by operations from the input unit or the like. The display unit 90 may include a notification unit. The notification unit emits at least one of sound and light to notify the operator of the processing device 10 of predetermined notification information. The notification unit may be an external notification device such as a speaker or a light emitting device.

[0024] 〔Cutting device 10-1〕 FIG. 2 is a perspective view showing a configuration example of a cutting device 10-1 as an example of the processing device 10 shown in FIG. 1. In the following description, the common configuration as the processing device 10 will be omitted, and the configuration specific to the cutting device 10-1 will be described. Also, in the following description, the X-axis direction is a direction in a horizontal plane. The Y-axis direction is a direction in the horizontal plane that is orthogonal to the X-axis direction. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction. The cutting device 10-1 of the embodiment has a cutting feed direction that is the Z-axis direction.

[0025] As shown in FIG. 2, the cutting device 10-1 includes a chuck table 20-1, a cutting unit 40 as a processing unit 30, an imaging unit 45, a moving unit 50, a cassette stage 81 on which a cassette 80 is mounted, a cleaning unit 82, a display unit 90-1, a control unit 100-1, and a recording unit 110-1. The recording unit 110-1 includes a backup recording unit 111-1. The cutting device 10-1 cuts a workpiece 200 held by the chuck table 20-1. At this time, the workpiece 200 is supported within the opening of the frame 210, for example, with an annular frame 210 adhered thereto and a tape 211 having a diameter larger than the outer diameter of the workpiece 200 adhered to the back surface of the workpiece 200.

[0026] The chuck table 20-1 holds the workpiece 200 on the holding surface 21. The holding surface 21 is in a disk shape formed of porous ceramic or the like. In the embodiment, the holding surface 21 is a plane parallel to the horizontal direction. The holding surface 21 is connected to a vacuum suction source via a vacuum suction path, for example. The chuck table 20-1 sucks and holds the workpiece 200 placed on the holding surface 21. A plurality of clamp portions 22 for clamping a frame 210 that supports the workpiece 200 are arranged around the chuck table 20-1. The chuck table 20-1 is movable in the X-axis direction over a processing area below the cutting unit 40 and a loading / unloading area where the workpiece 200 is loaded and unloaded and separated from below the cutting unit 40 by an X-axis direction moving unit 51 of the moving unit 50. The chuck table 20-1 is rotatable about an axis parallel to the Z-axis direction by a rotational movement unit 54 of the moving unit 50.

[0027] The cutting unit 40 is provided on a support frame 12 erected from the apparatus main body 11 via the Y-axis moving unit 52 and the Z-axis moving unit 53 of the moving unit 50. The cutting unit 40 is movable in the Y-axis direction by the Y-axis moving unit 52 and movable in the Z-axis direction by the Z-axis moving unit 53 with respect to the workpiece 200 held on the chuck table 20-1. The cutting unit 40 can position the cutting blade 41 at any position on the holding surface 21 of the chuck table 20-1 by the Y-axis moving unit 52 and the Z-axis moving unit 53. The cutting unit 40 includes a cutting blade 41, a spindle housing 42, and a spindle 43.

[0028] The cutting blade 41 is an extremely thin grinding wheel having a substantially ring shape. In the embodiment, the cutting blade 41 is a so-called hub blade, and includes an annular circular base mounted on the spindle 43 and an annular cutting edge having a predetermined thickness disposed on the outer peripheral edge of the circular base. The circular base is made of a conductive metal. The cutting edge is composed of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material (binder) such as metal or resin.

[0029] The spindle housing 42 is supported on a support frame 12 erected from the apparatus main body 11 via the Y-axis moving unit 52 and the Z-axis moving unit 53 of the moving unit 50. The spindle housing 42 is provided to be movable in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 52 and the Z-axis moving unit 53. The spindle housing 42 is movable in the Y-axis direction by the Y-axis moving unit 52 and movable in the Z-axis direction by the Z-axis moving unit 53 with respect to the workpiece 200 held on the chuck table 20-1.

[0030] The spindle 43 is rotatably provided around the axis within the spindle housing 42. The spindle 43 rotates when driven by a spindle motor (not shown) or the like. A cutting blade 41 is attached to the tip of the spindle 43. In the embodiment, the axes of the spindle 43 and the cutting blade 41 are set in a direction parallel to the Y-axis direction.

[0031] The imaging unit 45 is fixed to the cutting unit 40 so as to move integrally with the cutting unit 40. The imaging unit 45 includes an imaging element that photographs the area to be divided of the workpiece 200 before cutting held on the chuck table 20-1. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The imaging unit 45 photographs the workpiece 200 held on the chuck table 20-1, acquires an image for performing alignment such as aligning the workpiece 200 and the cutting blade 41, and outputs the acquired image to the control unit 100-1.

[0032] The moving unit 50 is a unit that relatively moves the chuck table 20-1 and the cutting unit 40. The moving unit 50 includes an X-axis direction moving unit 51, a Y-axis direction moving unit 52, a Z-axis direction moving unit 53, and a rotational moving unit 54.

[0033] The X-axis direction moving unit 51 is a unit that relatively moves the chuck table 20-1 and the cutting unit 40 in the X-axis direction, which is the machining feed direction. The X-axis direction moving unit 51 is provided on the apparatus main body 11. In the embodiment, the X-axis direction moving unit 51 moves the chuck table 20-1 and the rotational moving unit 54 in the X-axis direction.

[0034] The Y-axis direction moving unit 52 is a unit that relatively moves the chuck table 20-1 and the cutting unit 40 in the Y-axis direction, which is the indexing feed direction. The Y-axis direction moving unit 52 is provided on a support frame 12 erected from the apparatus main body 11. In the embodiment, the Y-axis direction moving unit 52 moves the spindle housing 42 of the cutting unit 40 in the Y-axis direction.

[0035] The Z-axis direction moving unit 53 is a unit that relatively moves the chuck table 20-1 and the cutting unit 40 in the Z-axis direction, which is the plunge feed direction. The Z-axis direction moving unit 53 is supported by the Y-axis direction moving unit 52. In the embodiment, the Z-axis direction moving unit 53 moves the spindle housing 42 of the cutting unit 40 in the Z-axis direction.

[0036] The rotational movement unit 54 is a unit that relatively rotates the chuck table 20-1 and the cutting unit 40 around an axis parallel to the Z-axis direction. The rotational movement unit 54 is supported by the X-axis direction moving unit 51. In the embodiment, the rotational movement unit 54 rotates the chuck table 20-1 around an axis parallel to the Z-axis direction. The rotational movement unit 54 is processed and fed in the X-axis direction together with the chuck table 20-1.

[0037] The cassette 80 accommodates a plurality of workpieces 200 supported by the frame 210 and is used for conveying between various processing apparatuses 10 used in the semiconductor manufacturing process. In the embodiment, the cassette 80 is placed on a cassette stage 81 on the upper surface of the apparatus main body 11. The cassette stage 81 is vertically movable in the Z-axis direction. The cassette stage 81 moves the placed cassette 80 in the Z-axis direction. With the cassette 80 placed on the cassette stage 81, the workpiece 200 supported by the frame 210 is taken in and out by a conveying mechanism (not shown). The direction for taking the workpiece 200 in and out of the cassette 80 is the Y-axis direction in the embodiment.

[0038] The cleaning unit 82 is a unit that cleans the workpiece 200 that has been machined by the cutting unit 40. The cleaning unit 82 has, for example, a holding unit that holds the workpiece 200, a cleaning liquid supply unit that supplies a cleaning liquid, and a cleaning chamber that houses the holding unit and the cleaning liquid supply unit. The cleaning unit 82 may further have an air supply unit that jets air against the workpiece 200 in order to dry the workpiece 200 after cleaning.

[0039] Regarding the display unit 90-1, the display screen 91-1, the control unit 100-1, the recording unit 110-1, and the backup recording unit 111-1 of the recording unit 110-1, since the configuration and functions are common to the display unit 90, the control unit 100, the recording unit 110, and the backup recording unit 111 of the other processing device 10, the description thereof is omitted.

[0040] 〔Cutting device 10-2〕 The cutting device 10-2 shown in FIG. 1 includes a chuck table 20-2, a cutting unit 40 as a processing unit 30, a control unit 100-2, and a recording unit 110-2, and the recording unit 110-2 includes a backup recording unit 111-2. Other configurations of the cutting device 10-2 may be the same as those of the cutting device 10-1, or may be different from those of the cutting device 10- 1 Since the configurations of the chuck table 20-2, the cutting unit 40, the control unit 100-2, the recording unit 110-2, and the backup recording unit 111-2 of the recording unit 110-2 in the cutting device 10-2 of the embodiment are common in configuration and function to the chuck table 20-1, the cutting unit 40, the control unit 100-1, the recording unit 110-1, and the backup recording unit 111-1 of the recording unit 110-1 in the cutting device 10-1, the description thereof is omitted.

[0041] 〔Grinding device 10-3〕 FIG. 3 is a perspective view showing a configuration example of a grinding device 10-3 as an example of the processing device 10 shown in FIG. 1. In the following description, the common configuration of the processing device 10 will be omitted, and the configuration specific to the grinding device 10-3 will be described. Further, in the following description, the X-axis direction is one direction in the horizontal plane. The Y-axis direction is a direction orthogonal to the X-axis direction in the horizontal plane. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction. In the grinding device 10-3 of the embodiment, the grinding feed direction is the Z-axis direction.

[0042] As shown in FIG. 3, the grinding device 10-3 includes three chuck tables 20-3, two grinding units 60 as a processing unit 30, a moving unit 70, a cassette 85, an alignment unit 86, a transfer unit 87, a cleaning unit 88, a loading / unloading unit 89, a display unit 90-3, a control unit 100-3, and a recording unit 110-3. The recording unit 110-3 includes a backup recording unit 111-3. The grinding device 10-3 grinds the workpiece 200 (see FIG. 2) held by the chuck table 20-3 to thin it to a predetermined thickness.

[0043] The chuck table 20-3 holds the workpiece 200 on the holding surface 23. The holding surface 23 has a disk shape formed of porous ceramic or the like. The holding surface 23 is a plane parallel to the horizontal direction in the embodiment. The holding surface 23 is connected to a vacuum suction source via a vacuum suction path, for example. The chuck table 20-3 suction-holds the workpiece 200 placed on the holding surface 23. In the embodiment, the chuck table 20-3 includes three chuck tables 20-3. The three chuck tables 20-3 are arranged at equal intervals on the turntable 72 of the moving unit 70 at a phase angle of, for example, 120 degrees. The chuck table 20-3 is movable over the processing area below each of the two grinding units 60 and the loading / unloading area where the workpiece 200 is loaded and unloaded while being separated from below the grinding units 60 by the rotation of the turntable 72.

[0044] In the embodiment, the grinding unit 60 includes two grinding units 60: a rough grinding unit that performs rough grinding on the upper surface of the workpiece 200, and a finish grinding unit that performs finish grinding on the upper surface of the workpiece 200. Each grinding unit 60 is provided on an upright column 14 erected from the apparatus main body 13 via the grinding feed unit 71 of the moving unit 70. The grinding unit 60 is movable in the Z-axis direction by the grinding feed unit 71 with respect to the workpiece 200 held by the chuck table 20-3. The grinding unit 60 can position the grinding wheel 65 at any position on the holding surface 23 of the chuck table 20-3 by the grinding feed unit 71. The grinding unit 60 includes a spindle housing 61, a spindle 62, a spindle motor 63, a grinding wheel 64, and a grinding stone 65.

[0045] The spindle housing 61 is supported by an upright column 14 erected from the apparatus main body 13 so as to be movable in the Z-axis direction via the grinding feed unit 71 of the moving unit 70. The spindle 62 is rotatably provided around its axis within the spindle housing 61. The axis of the spindle 62 is arranged parallel to the Z-axis direction. The spindle 62 is rotated around its axis by the spindle motor 63.

[0046] The grinding wheel 64 has a disk shape and is attached to the lower end of the spindle 62. A plurality of grinding stones 65 are annularly arranged and attached to the lower surface side of the grinding wheel 64. The grinding stone 65 has a grinding surface facing the holding surface 23 of the chuck table 20-3. A plurality of grinding stones 65 are annularly attached to the lower surface side of the grinding wheel 64. The grinding stones 65 of the rough grinding unit have a large grit size. The grinding stones 65 of the finish grinding unit have a fine grit size.

[0047] The moving unit 70 is a unit that relatively moves the chuck table 20-3 and the grinding unit 60. The moving unit 70 includes a grinding feed unit 71 and a turntable 72.

[0048] The grinding feed unit 71 is a unit that moves the chuck table 20-3 and the grinding unit 60 relative to each other in the Z-axis direction, which is the grinding feed direction. The grinding feed unit 71 is provided on the standing column 14 erected from the apparatus main body 13. The grinding feed unit 71 is provided one by one for each grinding unit 60. In the embodiment, the grinding feed unit 71 moves the grinding unit 60 in the Z-axis direction.

[0049] The turntable 72 has a disk shape provided on the upper surface of the apparatus main body 13. The turntable 72 is rotatably provided around an axis parallel to the Z-axis direction in the horizontal plane. The turntable 72 rotates the three chuck tables 20-3 around an axis parallel to the Z-axis direction.

[0050] The cassette 85 is for accommodating a plurality of workpieces 200 and transporting them between various processing apparatuses 10 used in the semiconductor manufacturing process. The workpiece 200 accommodated in the cassette 85 is taken in and out by the loading / unloading unit 89. In the embodiment, the direction in which the workpiece 200 is taken in and out of the cassette 85 is the Y-axis direction. In the embodiment, two cassettes 85 are provided. One cassette 85 accommodates the workpiece 200 before grinding, and the other cassette 85 accommodates the workpiece 200 after grinding.

[0051] The alignment unit 86 is a table for temporarily placing the workpiece 200 taken out from the cassette 85 and performing centering thereof.

[0052] In the embodiment, two transfer units 87 are provided. The two transfer units 87 have suction pads for sucking the workpiece 200. One transfer unit 87 sucks and holds the workpiece 200 before grinding aligned by the alignment unit 86 and transfers it onto the chuck table 20-3 located in the loading / unloading area. The other transfer unit 87 sucks and holds the workpiece 200 after grinding held on the chuck table 20-3 located in the loading / unloading area and transfers it out to the cleaning unit 88.

[0053] The cleaning unit 88 cleans the workpiece 200 after grinding and removes contaminants such as grinding chips adhering to the surface of the ground workpiece 200.

[0054] The loading / unloading unit 89 is, for example, a robot pick having a U-shaped hand, and adsorbs and holds the workpiece 200 with the U-shaped hand and conveys it. Specifically, the loading / unloading unit 89 takes out the workpiece 200 before grinding from the cassette 85 and unloads it to the alignment unit 86, and at the same time, takes out the workpiece 200 after grinding from the cleaning unit 88 and loads it into the cassette 85.

[0055] Regarding the display unit 90-3, the display screen 91-3, the control unit 100-3, the recording unit 110-3, and the backup recording unit 111-3 of the recording unit 110-3, since the configuration and functions are common to the display unit 90, the control unit 100, the recording unit 110, and the backup recording unit 111 of the other processing device 10, the description thereof is omitted.

[0056] 〔Backup Method〕 FIG. 4 is a diagram showing an example of the display screen 91 of the processing device 10. FIG. 5 is a diagram showing another example of the display screen 91 of the processing device 10. The display screen 91 in the embodiments shown in FIGS. 4 and 5 includes a touch panel.

[0057] In the configuration example of the display screen 91 shown in FIG. 4, the backup setting screen 92 displays a message area 921 and two selection buttons 922, 923. In the message area 921, for example, a message prompting the user to select whether to execute data backup, for example, a message such as "Do you want to back up the data?" is displayed.

[0058] The selection button 922, i.e., the button displayed as "Yes", can accept an operation for displaying a backup information setting screen 93 for setting the information to be backed up shown in FIG. 5. Further, the selection button 923, i.e., the button displayed as "No", can accept an operation for not executing the backup and displaying an initial screen, for example, a menu screen related to the execution of operations, settings, maintenance, etc. of the processing apparatus 10.

[0059] In the display screen 91 shown in FIG. 4, the selection button 922 is shown as being selected. That is, it indicates the state selected by the user when backing up. The selection buttons 922 and 923 are configured such that when a selection operation is performed, for example, the colors of the selection buttons 922 and 923 change.

[0060] In the configuration example of the display screen 91 shown in FIG. 5, a message area 931, 934 and five selection buttons 932, 933, 935, 936, 937 are displayed on the backup information setting screen 93. In the message area 931, for example, a message for prompting the user to select the type of information to be backed up, for example, a message such as "Please select the information to be backed up" is displayed.

[0061] The selection button 932, i.e., the button displayed as "Processing conditions", can accept an operation for selecting to back up the control information related to the processing conditions of the processing apparatus 10 having the display screen 91. When the processing apparatus 10 having the display screen 91 is the cutting apparatuses 10-1 and 10-2, the processing conditions include, for example, as shown in Table 1 below, the number and rotation speed of the spindles 43, the machining feed rate of the chuck tables 20-1 and 20-2, the type of cutting blade 41, the blade size and blade height, the alignment conditions, the cutting water volume, the rotation speed of the spinner table of the cleaning unit 82, and the spinner cleaning water volume.

[0062]

Table 1

[0063] The selection button 933, i.e., the button displayed as "Machine Data", can receive an operation for selecting to back up control information regarding the device-specific data of the processing device 10 having the display screen 91. When the processing device 10 having the display screen 91 is the cutting devices 10-1 and 10-2, the device-specific data includes, for example, as shown in Table 2 below, the machine serial number, the plunge feed speed, the machining feed speed, the indexing feed speed, the initial height of the spindle 43, and the height of the origin one of the chuck tables 20-1 and 20-2.

[0064]

Table 2

[0065] In the message area 934, for example, a message prompting the user to select the processing device 10 as the backup destination, such as "Please select the device to back up", is displayed. As the processing device 10 to which the backup is to be made, for example, among the plurality of processing devices 10 included in the processing system 1, one to all of the selection buttons 935, 936, and 937 corresponding to a processing device 10 other than the processing device 10 having the display screen 91 can be selected.

[0066] The selection button 935, i.e., the button displayed as "Dicer A", can receive an operation for selecting the processing device 10 as the backup destination for the cutting device 10-1. The selection button 936, i.e., the button displayed as "Dicer B", can receive an operation for selecting the processing device 10 as the backup destination for the cutting device 10-2. The selection button 937, i.e., the button displayed as "Grinder A", can receive an operation for selecting the processing device 10 as the backup destination for the grinding device 10-3.

[0067] In the display screen 91 shown in FIG. 5, the selection buttons 932 and 937 are shown in a selected state. That is, when the control information regarding the processing conditions of the processing apparatus 10 (for example, the cutting apparatus 10-1) having the display screen 91 is backed up to the grinding apparatus 10-3, the state selected by the user is shown. The selection buttons 932, 933, 935, 936, and 937 are configured such that, when a selection operation is performed, for example, the colors of the selection buttons 932, 933, 935, 936, and 937 are changed.

[0068] For example, in the cutting apparatus 10-1, when it is selected to back up the control information regarding the processing conditions to the grinding apparatus 10-3, the control unit 100-1 of the cutting apparatus 10-1 transmits the control information regarding the processing conditions of the cutting apparatus 10-1 recorded in the recording unit 110-1 via the communication line 2 to the backup recording unit 111-3 of the grinding apparatus 10-3 to record it for backup.

[0069] If the entire recording unit 110-1 of any processing apparatus 10, for example, the cutting apparatus 10-1, is damaged, first, the recording unit 110-1 (HDD) of the cutting apparatus 10-1 is replaced with a new recording unit 110-1. Next, the program of the operating system of the cutting apparatus 10-1 backed up in the backup recording unit 111-3 of another processing apparatus 10, for example, the grinding apparatus 10-3, is installed in the new recording unit 110-1 of the cutting apparatus 10-1. Next, the processing conditions and device-specific setting conditions of the cutting apparatus 10-1 backed up in the backup recording unit 111-3 of the grinding apparatus 10-3 are installed in the new recording unit 110-1 of the cutting apparatus 10-1 to restore the cutting apparatus 10-1.

[0070] As described above, since the processing system 1 according to the embodiment records the information of the processing apparatus 10 in the backup recording unit 111 of another processing apparatus 10 for backup, there is no need to separately prepare a recording medium, and the information is backed up to another processing apparatus 10 set at the set timing. Therefore, even if the information is lost or the recording unit 110 is damaged, backup is possible, which has the effect of.

[0071] Note that the present invention is not limited to the above-described embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention.

Explanation of Reference Numerals

[0072] 1 Processing system 2 Communication line 10 Processing device 10-1, 10-2 Cutting device 10-3 Grinding device 20, 20-1, 20-2, 20-3 Chuck table 30 Processing unit 40 Cutting unit 60 Grinding unit 90, 90-1, 90-3 Display unit 91, 91-1, 91-3 Display screen 92 Backup setting screen 93 Backup information setting screen 100, 100-1, 100-2, 100-3 Control unit 110, 110-1, 110-2, 110-3 Recording unit 111, 111-1, 111-2, 111-3 Backup recording unit 200 Workpiece

Claims

1. A chuck table for holding a workpiece, a processing unit for processing the workpiece held by the chuck table, a control unit for controlling the driving of the chuck table and the processing unit, a recording unit in which control information for the control unit to control the driving is recorded, A processing system having a plurality of different types of processing devices, wherein the processing devices including these are connected to each other by a communication line, The recording unit, includes a backup recording unit for recording, for backup, the control information of the other processing device connected by the communication line, The control unit, transmits the control information of one type of processing device including the control unit to the backup recording unit of a specified other type of processing device and records it for backup, Processing system.

2. The program of the operating system of the control unit is recorded in the recording unit, The control unit transmits the program of the operating system of the one type of processing device to the backup recording unit of the specified other type of processing device and records it for backup, The processing system according to claim 1.

3. When the control information of the one type of processing device is damaged, the control information of the one type of processing device recorded in the backup recording unit of the other type of processing device is installed in the recording unit of the one type of processing device to restore the one type of processing device, The processing system according to claim 1.

4. A chuck table for holding a workpiece, a processing unit for processing the workpiece held by the chuck table, a control unit for controlling the driving of the chuck table and the processing unit, a recording unit in which control information for the control unit to control the driving is recorded, A processing system having a plurality of processing devices, wherein the processing devices including these are connected to each other by a communication line, The recording unit, includes a backup recording unit for recording, for backup, the control information of the other processing device connected by the communication line, The control unit, transmits the control information of the processing device including the control unit to the backup recording unit of a specified other processing device and records it for backup, When the control information of the processing device is damaged, the control information of the processing device recorded in the backup recording unit of the other processing device is installed in the recording unit of the processing device to restore the processing device, Processing system.

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