Valve module for vacuum pump system

Abstract

A valve module (104) for a vacuum pump system, the valve module (104) comprising: a plurality of inlets (110) for receiving a fluid; a plurality of pressure sensors (122) each configured to measure a fluid pressure associated with a respective inlet (110); a first fluid line manifold (114); a second fluid line manifold (116); and a plurality of multi-branched conduits (112) each connecting a respective inlet (110) to both the first and second fluid line manifolds (114, 116). a plurality of valves (124, 126) disposed within the multi-branch conduit (112); and a valve controller (128) connected to the sensor (122) and the valves (124, 126), the valve controller (128) configured to control the valves (124, 126) based on pressure measurements from the sensor (122) such that fluid flow through the multi-branch conduit (112) is directed only to the first fluid line manifold (114) or only to the second fluid line manifold (116).

Description

[Technical Field]

[0001] The present invention relates to a valve module for use in vacuum pumping systems, including but not limited to vacuum systems for pumping fluids from semiconductor processing tools. [Background technology]

[0002] Semiconductor foundries manufacture integrated circuit chips. In the manufacture of such devices, wafers are processed through a number of different processing stations, including stations where the wafers undergo, for example, chemical vapor deposition, physical vapor deposition, implant, etching, and lithography processes. Many of these processes involve the use of gaseous environments, often requiring the use of high vacuum and reduced gas pressures.

[0003] Vacuum pumps are used to provide such reduced gas pressure within the process chamber, to provide evacuation of the chamber, and to maintain the flow of process gases. Summary of the Invention [Means for solving the problem]

[0004] If the pressure in a chamber of a semiconductor processing tool is not a working vacuum, for example, after the gas chamber has been evacuated to atmospheric pressure to allow for service or maintenance, a so-called "pump-down event" is performed to establish the required reduced gas pressure in the chamber. The pump-down event involves pumping gas out of the chamber to reduce the pressure in the chamber to the required level.

[0005] Vacuum and pressure reduction systems may be used to simultaneously pump gas from multiple gas chambers in a semiconductor processing tool using a common pump via a common manifold. The inventors have recognized that in such systems, because multiple chambers are fluidly connected to a common manifold, performing a pump-down event on one of the chambers may affect conditions in the other chambers. For example, performing a pump-down event on one chamber may cause highly undesirable fluctuations in other chambers connected to the same manifold.

[0006] Aspects of the present invention provide a valve module for controlling fluids from multiple chambers of a semiconductor processing tool in a manner that reduces or eliminates such drawbacks.

[0007] In a first aspect, a valve module for a vacuum pump system is provided, the valve module comprising: a plurality of inlets, each configured to receive a fluid to be pumped; a plurality of pressure sensors, each configured to measure a pressure of the fluid associated with a respective one of the plurality of inlets; a first fluid line manifold; a second fluid line manifold; a plurality of multi-branch conduits, each fluidly connecting a respective inlet to both the first fluid line manifold and the second fluid line manifold; a plurality of valves, one or more of which are disposed in a respective one of the plurality of multi-branch conduits; and a valve controller operably connected to the plurality of pressure sensors and the plurality of valves, the valve controller being configured to control the plurality of valves based on pressure measurements received from the plurality of pressure sensors, wherein each of the one or more valves disposed in each of the multi-branch conduits is adapted to selectively direct fluid flow through the multi-branch conduit to either only the first fluid line manifold or only the second fluid line manifold.

[0008] Each of the multi-branch conduits can include a first branch and a second branch, the first branch fluidly connected to a first fluid line manifold and the second branch fluidly connected to a second fluid line manifold. Each of the one or more valves disposed in each of the multi-branch conduits can include a first valve disposed in the first branch of the multi-branch conduit and a second valve disposed in the second branch of the multi-branch conduit.

[0009] The plurality of pressure sensors can include a first pressure sensor configured to measure a pressure of a fluid associated with a first inlet of the plurality of inlets, the first inlet being an inlet of a first multi-branch conduit of the plurality of multi-branch conduits. The valve controller can be configured to control one or more valves disposed in the first multi-branch conduit to direct the fluid flow through the first multi-branch conduit to the second fluid line manifold in response to pressure measurements received from the first pressure sensor satisfying one or more first criteria. The one or more first criteria can comprise one or more criteria selected from the group of criteria consisting of: the measured pressure exceeding a first threshold; the measured pressure exceeding the first threshold for at least a first period of time; a rate of increase of the measured pressure exceeding a second threshold; and a rate of increase of the measured pressure exceeding the second threshold for at least a second period of time. The valve controller can be configured to control one or more valves disposed in the first multi-branch conduit to direct fluid flow through the first multi-branch conduit to the first fluid line manifold in response to pressure measurements received from the first pressure sensor satisfying one or more second criteria. The one or more second criteria can comprise one or more criteria selected from the group of criteria consisting of: the measured pressure being less than or equal to a third threshold, the measured pressure being less than or equal to the third threshold for at least a third period of time, a rate of decrease of the measured pressure exceeding a fourth threshold, a rate of decrease of the measured pressure exceeding the fourth threshold for at least a fourth period of time, and a preset period of time elapses.

[0010] At least the plurality of inlets, the first fluid line manifold, the second fluid line manifold, the plurality of multi-branched conduits, the plurality of valves, and the valve controller may be configured as a single integrated unit and housed in the frame.

[0011] The valve module may further comprise a plurality of additional valves, and for each valve in the plurality of valves, a respective pair of additional valves is disposed on either side of the valve. The additional valves may be manually operated valves.

[0012] The valve module may further comprise a gas inlet for receiving gas for purging one or more of the multi-branch conduits and / or for actuating one or more of the valves.

[0013] In a further aspect, a system is provided that includes a semiconductor processing tool including a plurality of process chambers; the valve module of the above aspect, wherein each inlet of the plurality of inlets is fluidly connected to a respective process chamber of the plurality of process chambers; and one or more vacuum pumps operatively connected to the first fluid line manifold and the second fluid line manifold.

[0014] The system further includes a cooling device for supplying a cooling fluid to one or more of the process chambers, the valve module being disposed on top of the cooling device.

[0015] In a further aspect, a method is provided for a valve module for a vacuum pump system, the valve module including: receiving a respective pumped fluid at each inlet of a plurality of inlets, each inlet being an inlet to a respective multi-branch conduit of a plurality of multi-branch conduits, the multi-branch conduits fluidly connecting each inlet to both a first fluid line manifold and a second fluid line manifold; measuring a pressure of each one of the pumped fluids with one or more pressure sensors of a plurality of pressure sensors; and controlling, by a controller, one or more valves of a plurality of valves based on the one or more measured pressures, the one or more valves being disposed in a first multi-branch conduit of the plurality of multi-branch conduits, wherein controlling the one or more valves selectively directs fluid flow through the first multi-branch conduit to either only the first fluid line manifold or only the second fluid line manifold.

[0016] The method may further include measuring a pressure of the pumped fluid in the first multi-branch conduit with a first pressure sensor of the plurality of pressure sensors; and controlling one or more valves disposed in the first multi-branch conduit to direct fluid flow through the first multi-branch conduit to a second fluid line manifold and prevent fluid flow through the first multi-branch conduit from flowing to the first fluid line manifold in response to pressure measurements received from the first pressure sensor satisfying one or more first criteria. The method may then control one or more valves disposed in the first multi-branch conduit to prevent fluid flow through the first multi-branch conduit to the second fluid line manifold and then direct fluid flow through the first multi-branch conduit to the first fluid line manifold in response to pressure measurements received from the first pressure sensor satisfying one or more second criteria. [Brief explanation of the drawings]

[0017] [Figure 1]1 is a schematic diagram (not to scale) of a semiconductor manufacturing facility. [Figure 2] FIG. 1 is a schematic diagram (not to scale) showing a perspective view of a valve module of a semiconductor manufacturing facility. [Figure 3] 1 is a process flow chart illustrating certain steps in a process for pumping gases in a semiconductor manufacturing facility. [Figure 4] FIG. 1 is a schematic diagram (not to scale) showing a system in which two valve modules are mounted on top of multiple cooling devices. DETAILED DESCRIPTION OF THE INVENTION

[0018] FIG. 1 is a schematic diagram (not to scale) of a semiconductor manufacturing facility 100 according to an embodiment.

[0019] The semiconductor manufacturing facility 100 includes a semiconductor processing tool 102, a valve module 104, and a plurality of vacuum pumps 106.

[0020] The semiconductor processing tool 102 includes a number of process chambers 108 in which semiconductor wafers undergo respective processes, including, but not limited to, chemical vapor deposition, physical vapor deposition, implant, etch, and lithography processes.

[0021] A plurality of vacuum pumps 106 are configured to pump fluids (ie, process gases) through the valve module 104 and out of the process chamber 108 of the semiconductor processing tool 102 .

[0022] The valve module 104 includes a plurality of inlets 110, a plurality of multi-branch conduits 112, a first fluid line manifold 114, and a second fluid line manifold .

[0023] Each of the inlets 110 is in fluid communication with a respective process chamber 108 so as to be able to receive fluid pumped from the process chamber 108 .

[0024] Each multi-branch conduit 112 fluidly connects a respective inlet 110 to both a first fluid line manifold 114 and a second fluid line manifold 116. More specifically, in this embodiment, the multi-branch conduit 112 is a branched conduit including a respective first branch 118 and a second branch 120. The first branch 118 of each multi-branch conduit 112 fluidly connects the respective inlet 110 to the first fluid line manifold 114. The second branch 120 of each multi-branch conduit 112 fluidly connects the respective inlet 110 to the second fluid line manifold 116.

[0025] The valve module 104 further comprises a plurality of pressure sensors 122. Each pressure sensor 122 is operably coupled to a respective inlet 110 or to a respective multi-branch conduit 112 at or near the inlet 110.

[0026] Each pressure sensor 122 is configured to measure the pressure associated with a respective process chamber 108. In particular, each pressure sensor 122 is configured to measure the pressure of the process gas being pumped out of a respective process chamber 108. The pressure sensors 122 are preferably located as close as possible to the outlet of the process chamber 108.

[0027] The valve module 104 further includes a plurality of gate valves, more specifically, a plurality of first gate valves 124 and a plurality of second gate valves 126. In this embodiment, the first gate valve 124 and the second gate valve 126 are pneumatic valves.

[0028] Each of the first gate valves 124 is disposed on a respective one of the first branches 118 and is configured to control the flow of fluid therethrough.

[0029] Each of the second gate valves 126 is disposed on a respective one of the second branches 120 and is configured to control the flow of fluid therethrough.

[0030] The valve module 104 further includes a valve controller 128 .

[0031] The valve controller 128 is operably connected to each of the plurality of pressure sensors 122 via a wired or wireless connection (not shown) such that pressure measurements obtained by the plurality of pressure sensors 122 can be received by the valve controller 128.

[0032] Valve controller 128 is further operatively connected to each of first gate valves 124 and each of second gate valves 126 via respective gas lines (not shown).

[0033] 3, the valve controller 128 is configured to control the operation of the first and second gate valves 124, 126 based on pressure measurements received from the pressure sensor 122. The valve controller 128 is configured to control the operation of the first and second gate valves 124, 126 by communicating a gas fluid through the gas lines.

[0034] The valve module 104 further comprises a plurality of manual valves (i.e., valves configured to be manually operated by a human operator), more specifically, a plurality of first manual valves 130, a plurality of second manual valves 132, and a plurality of third manual valves 134.

[0035] In this embodiment, each first manual valve 130 is disposed on a respective multi-branch conduit 112 between the pressure sensor 122 of the multi-branch conduit 112 and the point at which the multi-branch conduit 112 branches.

[0036] In this embodiment, each second manual valve 132 is positioned on a respective first branch 118 of the multi-branch conduit 112 between the first gate valve 124 of the multi-branch conduit 112 and the first fluid line manifold 114.

[0037] In this embodiment, each third manual valve 134 is disposed on a respective second branch 120 of the multi-branch conduit 112 between the second gate valve 126 of the multi-branch conduit 112 and the second fluid line manifold 116.

[0038] Thus, in this embodiment, each of the first and second gate valves 124, 126 is disposed between a respective pair of manual valves 130-134. Specifically, each first gate valve 124 is disposed between the first manual valve 130 and the second manual valve 132. Also, each second gate valve 126 is disposed between the first manual valve 130 and the third manual valve 134.

[0039] In this embodiment, the first fluid line manifold 114 is the manifold through which process gases are pumped from the process chamber 108 where the semiconductor fabrication process is occurring. The first fluid line manifold 114 can be considered the "process gas line." The second fluid line manifold 116 can be considered the "pump-down gas line." The fluid line manifolds 114 and 116 are sized appropriately for gas flow and vacuum requirements.

[0040] A pump-down event may be performed to evacuate gases from one or more of the process chambers 108, which may be at atmospheric pressure, to reduce the pressure therein to a level suitable for a semiconductor fabrication process. For convenience, the gases evacuated from the gas chambers during pump-down are hereinafter referred to as pump-down gases. In this embodiment, the second fluid line manifold 116 is the manifold through which the pump-down gas is pumped out of the process chambers 108.

[0041] Apparatus, including valve controller 128, for implementing the above configurations and performing the method steps described below can be provided by configuring or adapting any suitable apparatus, such as one or more computers or other processing devices or processors, and / or by providing additional modules. The apparatus can include a computer, a network of computers, or one or more processors for executing instructions and using data, including instructions and data in the form of one or more computer programs, stored in a machine-readable storage medium such as a computer memory, a computer disk, a ROM, a PROM, or any combination thereof or other storage medium.

[0042] FIG. 2 is a schematic diagram showing a perspective view of the valve module 104, not to scale.

[0043] In this embodiment, certain components of the valve module 104, including, for example, at least the inlet 110, the multi-branch conduit 112, the first fluid line manifold 114, the second fluid line manifold 116, the gate valves 124, 126, the valve controller 128, and the manual valves 130, 132, 134, are configured or arranged as a single integrated unit (hereinafter referred to as the "first integrated unit"). These components are housed in a common frame 200. The frame 200 may be made of steel.

[0044] In some embodiments, the pressure sensor 122 may also be included in the first integrated unit and housed in the frame 200. However, in some embodiments, the pressure sensor 122 is separate from the first integrated unit. For example, the pressure sensor 122 may be configured or arranged as a separate second integrated unit that may be coupled to the first integrated unit, e.g., on top of the first integrated unit. The second integrated unit including the pressure sensor 122 may be coupled between the process chamber 108 and the inlet 110 of the first integrated unit.

[0045] FIG. 3 is a process flow diagram illustrating certain steps of a process 300 for pumping gases in semiconductor manufacturing facility 100.

[0046] It should be noted that some of the process steps shown in the flowchart of Figure 3 and described below may be omitted, or such process steps may be performed in a different order than that presented below and shown in Figure 3. Furthermore, although all process steps are shown as separate, temporally consecutive steps for convenience and ease of understanding, some of the process steps may nevertheless actually be performed simultaneously or at least with some degree of overlap in time.

[0047] In step s302, semiconductor manufacturing processes are performed in the process chamber 108. These semiconductor manufacturing processes generate process gases.

[0048] In this embodiment, at this stage, the first gate valve 124 is open, the second gate valve 126 is closed, and the manual valves 130-134 are all open.

[0049] In step s304, the vacuum pump 106 connected to the first fluid line manifold 114 pumps the generated process gas out of the process chambers 108 through the valve module 104. Specifically, in this embodiment, the process gas is pumped from each process chamber 108 sequentially through the inlet 110 connected thereto, the first branch 118 of the multi-branch conduit 112 connected thereto (including through the first gate valve 124 disposed thereon), and the first fluid line manifold 114.

[0050] In step s306, the pressure sensors 122 measure the pressure associated with the process chamber 108. Specifically, each pressure sensor 122 measures the pressure of a process gas pumped through a respective inlet 110. In this embodiment, the pressure sensors 122 measure the pressure substantially continuously.

[0051] In step s308, the pressure sensor 122 sends the measured pressure values to the valve controller 128. The valve controller 128 processes the received measured pressure values substantially continuously.

[0052] In step s310, one of the process chambers 108 (hereinafter referred to as the "first process chamber 108" for convenience) is shut down for inspection, maintenance, repair, or servicing. In this embodiment, shutting down the first process chamber 108 includes stopping the pumping of gas from the first process chamber 108. In this embodiment, this may be accomplished by an operator closing an isolation valve on the inlet 110 associated with the first process chamber 108. In this embodiment, shutting down the first process chamber 108 may further include increasing the pressure in the first process chamber 108 to approximately atmospheric pressure. This may be accomplished by opening a valve connected to the first process chamber 108, thereby allowing gas to flow into the first process chamber 108.

[0053] In step s312, a human operator inspects, services, repairs, or performs maintenance on the first process chamber 108.

[0054] After inspection, maintenance, repair, or service, a low gas pressure environment is re-established within the first process chamber 108 and a semiconductor manufacturing process can be performed therein.

[0055] Accordingly, in step s314, the isolation valve associated with the first process chamber 108 is reopened, thereby allowing gas to be pumped out of the first process chamber 108.

[0056] The pumping of this gas from the first process chamber 108 in step s314 is a pump-down event.

[0057] In step s316, the valve controller 128 processes the measured pressure values received from the pressure sensor 122 and determines that a pump-down event is occurring.

[0058] In particular, in this embodiment, the valve controller 128 determines that a pump-down event is occurring for the first process chamber 108 in response to the measured pressure associated with the first process chamber 108 exceeding a first threshold and / or the calculated rate of increase of the measured pressure associated with the first process chamber 108 exceeding a second threshold.

[0059] The first threshold may be any suitable threshold. The second threshold may be any suitable threshold.

[0060] In some embodiments, the valve controller 128 determines that a pump-down event is occurring with respect to the first process chamber 108 in response to the measured pressure associated with the first process chamber 108 exceeding a first threshold for at least a first period of time. The first period of time may be any suitable period of time.

[0061] In some embodiments, the valve controller 128 determines that a pump-down event is occurring with respect to the first process chamber 108 in response to the calculated rate of increase of the measured pressure associated with the first process chamber 108 exceeding a second threshold for at least a second period of time. The second period of time may be any suitable period of time.

[0062] In step s318, in response to detecting a pump-down event for the first process chamber 108, the valve controller 128 controls the first gate valve 124 associated with the first process chamber 108 to close. Thus, gas flow from the first process chamber 108 to the first fluid line manifold 114 is blocked or impeded.

[0063] In this embodiment, the valve controller 128 delivers a gaseous fluid (eg, nitrogen) to the first gate valve 124 to control the first gate valve 124 .

[0064] In step s320, following closing the first gate valve 124, the valve controller 128 controls the second gate valve 126 associated with the first process chamber 108 to open, thus permitting gas flow from the first process chamber 108 to the second fluid line manifold 116.

[0065] In this embodiment, the valve controller 128 directs the gas fluid to the second gate valve 126 to control the second gate valve 126 .

[0066] In step s322, the vacuum pump 106 connected to the second fluid line manifold 116 pumps the pump-down gas out of the first process chamber 108 through the valve module 104. Specifically, in this embodiment, the pump-down gas is pumped from the first process chamber 108 sequentially through the inlet 110 connected thereto, the second branch 120 of the multi-branch conduit 112 connected thereto (including through an open second gate valve 126 disposed thereon), and the second fluid line manifold 116.

[0067] Thus, the pump-down gas is pumped out of the first process chamber 108 to establish a resulting low gas pressure or vacuum environment therein.

[0068] In step s324, the valve controller 128 processes the measured pressure values received from the pressure sensor 122 and determines that the pump-down event has ended.

[0069] In particular, in this embodiment, the valve controller 128 determines that the pump-down event for the first process chamber 108 has ended in response to the measured pressure associated with the first process chamber 108 being less than or equal to a third threshold and / or the calculated rate of decrease of the measured pressure associated with the first process chamber 108 being greater than or equal to a fourth threshold. Alternatively, the pump-down event ends after running for a preset period of time.

[0070] The third threshold may be any suitable threshold, hi some embodiments, the third threshold is less than or equal to the first threshold.

[0071] The fourth threshold may be any suitable threshold, hi some embodiments, the fourth threshold is less than or equal to the second threshold.

[0072] In some embodiments, the valve controller 128 determines that the pump-down event for the first process chamber 108 has ended in response to the measured pressure associated with the first process chamber 108 being less than or equal to a third threshold for at least a third period of time. The third period of time may be any suitable period of time.

[0073] In some embodiments, the valve controller 128 determines that the pump-down event for the first process chamber 108 has ended in response to the calculated rate of decrease of the measured pressure associated with the first process chamber 108 being greater than or equal to a fourth threshold for at least a fourth period of time. The fourth period of time may be any suitable period of time.

[0074] In step s326, in response to detecting that the pump-down event for the first process chamber 108 has ended, the valve controller 128 controls the second gate valve 126 associated with the first process chamber 108 to close. Thus, gas flow from the first process chamber 108 to the second fluid line manifold 116 is blocked or impeded.

[0075] In step s328, following closing the second gate valve 126, the valve controller 128 controls the first gate valve 124 associated with the first process chamber 108 to open, thus allowing gas flow from the first process chamber 108 to the first fluid line manifold 114.

[0076] In step s330, semiconductor manufacturing processes may be performed in the first process chamber 108. These semiconductor manufacturing processes generate process gases.

[0077] In step s332, the vacuum pump 106 connected to the first fluid line manifold 114 pumps the generated process gas out of the first process chamber 108 through the valve module 104.

[0078] Accordingly, a process 300 for pumping gases in a semiconductor manufacturing facility 100 is provided.

[0079] The above-described systems and methods tend to advantageously reduce or eliminate pump-down events that adversely affect conditions within the parallel gas chamber, which tends to be accomplished by pumping the pump-down gas into a separate manifold that is distinct from the manifold through which the process gas is pumped.

[0080] Advantageously, pump-down events and the termination of pump-down events tend to be automatically detected and mitigated.

[0081] Advantageously, the valve modules described above can be integrated in-line with a horizontal manifold that connects a semiconductor processing tool to a vacuum pump.

[0082] Advantageously, the valve modules described above tend to be robust. The vacuum modules can be fully assembled, leak checked, and pre-tested, for example, off-site prior to delivery to a semiconductor manufacturing facility, or on-site upon delivery. This tends to simplify the installation process and reduce installation time.

[0083] Advantageously, the valve modules described above tend to be modular and expandable.

[0084] Advantageously, the gas flow path components of the valve modules tend to be easy to service, repair, and replace. For example, each gate valve can be isolated from the fluid flow by closing manual valves upstream and downstream of that gate valve, allowing a human operator to service, repair, or replace the gate valve.

[0085] Advantageously, the state and operating conditions of the system tend to be easily monitored, for example via a human machine interface in the valve module or remotely.

[0086] Advantageously, each valve module in the system tends to be easily controllable by the system controller using a communication protocol such as EtherCAT or Ethernet.

[0087] Advantageously, the valve modules described above allow for multiple mounting options. For example, the valve modules can be suspended from the ceiling of a semiconductor manufacturing facility, which provides the advantage of not consuming floor space. Alternatively, the valve modules can be mounted on a stationary frame or other equipment.

[0088] The following describes an embodiment in which the valve module is mounted on top of other equipment, specifically a cooling device for controlling the temperature of a process chamber of a semiconductor processing tool.

[0089] 4 is a schematic diagram (not to scale) illustrating a system 400 in which two valve modules 104 are mounted on a number of chillers 402. The chillers 402 are commonly referred to as "chiller racks" or "chillers."

[0090] The system 400 includes six cooling devices 402 , two valve modules 104 , a power supply 404 , and a gas supply 406 .

[0091] In this embodiment, the valve modules 104 may be substantially the same as those described above with reference to Figures 1 and 2. Each valve module 104 is configured to receive a respective one of a plurality of pumped fluid streams from a fluidly connected process chamber 108.

[0092] Each cooling device 402 is fluidly connected to a respective process chamber 108. Each cooling device 402 is configured to provide a flow of cooling fluid to the respective process chamber 108 to which it is connected. The cooling fluid may be used within the process chamber 108 to control the temperature.

[0093] In this embodiment, the valve modules 104 and cooling devices 402 are arranged in a stacked configuration. More specifically, each valve module is positioned above three cooling devices 402, which are themselves arranged adjacent to one another, for example, in a side-by-side configuration.

[0094] Advantageously, the stacked configuration results in a reduced footprint within a semiconductor manufacturing facility.

[0095] Furthermore, a stacked configuration tends to facilitate easier connection of the cooling device 402 and valve module 104 to the process chamber 108. For example, a stacked configuration tends to allow for closer positioning of the cooling device 402 and / or valve module 104 relative to the process chamber 108, thereby reducing conduit lengths and resulting in shorter installation time and difficulty. Additionally, the shorter conduit lengths may reduce the likelihood of leaks from or damage to the conduits.

[0096] In this embodiment, the power supply 404 is electrically connected to each of the cooling device 402 and the valve module 104. The power supply 404 is configured to provide power to each of the cooling device 402 and the valve module 104. Thus, the power supply 404 can be considered a common power source.

[0097] Advantageously, using a common power source for the chiller 402 and the valve module 104 tends to ease installation and allow for reduced footprint and cabling.

[0098] In this embodiment, the gas source 406 is fluidly connected to each of the cooling device 402 and the valve module 104 via one or more conduits. The gas source 406 is configured to supply a gaseous fluid to each of the cooling device 402 and the valve module 104. As such, the gas source 406 may be considered a common gas source. The gaseous fluid may be any suitable type of gas, including, but not limited to, nitrogen gas or CDA (clean dry gas).

[0099] Advantageously, using a common gas supply 406 for the cooling device 402 and the valve module 104 tends to ease installation and result in a reduced footprint and length of gas fluid conduits.

[0100] In this embodiment, the gas fluid received in the valve module 104 from the gas source 406 can be used to actuate the valves of the valve module 104. More specifically, the valve controller 128 of the valve module 104 can be configured to route the gas fluid to each of the first gate valves 124 and each of the second gate valves 126 via respective gas lines, thereby actuating the first and second gate valves 124, 126. The gas fluid can therefore be considered a "valve control fluid."

[0101] In this embodiment, in the valve module 104, gaseous fluid received from the gas source 406 can be used to perform a purge process to purge one or more portions of the multi-branch conduit 112. More specifically, a manual operator can send gaseous fluid into each of the multi-branch conduits 112 via a respective purge port of each of the multi-branch conduits 112. The gaseous fluid can be forced through at least a portion of the multi-branch conduit 112, thereby purging at least a portion of the multi-branch conduit 112. The gaseous fluid can exit the multi-branch conduit 112 through the first fluid line manifold 114 and / or the second fluid line manifold 116. Thus, the gaseous fluid can be considered a “purge fluid.” Purging can typically be performed prior to maintenance or service of the valve module 104, for example, prior to replacement of the first gate valve 124 and / or the second gate valve 126. Advantageously, the first gate valve 124 and / or the second gate valve 126 can be isolated from the rest of the system by closing the first manual valve 130, the second manual valve 132, and the third manual valve 134.

[0102] In this embodiment, the purge port of the valve module 104 can be used to perform one or more leak tests on the multi-branch conduit 112. More specifically, the valve module 104 can further include means for detecting leaks from the multi-branch conduit 112 using the purge port, or a human operator can detect the presence of a leak using appropriate sensing equipment attached to the purge port.

[0103] 4, there are six cooling devices 402 and two valve modules 104. However, in other embodiments, the system may include a different number of cooling devices and / or a different number of valve modules.

[0104] 4, each of the valve modules 104 is mounted on three cooling devices 402. However, in other embodiments, one or more of the valve modules can be mounted on a different number of cooling devices. In some embodiments, one or more cooling devices are mounted on top of one or more valve modules or other equipment.

[0105] In the above embodiment, the valve module is implemented in a semiconductor manufacturing facility to route pumped process gases. However, in other embodiments, the valve module may be implemented in different systems and used to route different types of fluids.

[0106] In the above embodiment, there is a single semiconductor processing tool that includes six gas chambers. However, in other embodiments, there are one or more semiconductor processing tools. One or more of the semiconductor processing tools may include a different number of gas chambers other than six.

[0107] In the above embodiment, there is either a single valve module, or two valve modules in the embodiment of Figure 4. However, in other embodiments, there can be a different number of valve modules.

[0108] In the above embodiment, the valve module includes six inlets and six multi-branch conduits. However, in other embodiments, the valve module includes a different number of inlets and multi-branch conduits other than six.

[0109] In the above embodiments, each multi-branch conduit comprises two gate valves, one in each branch. However, in other embodiments, the multi-branch conduit comprises a different number of gate valves than two. In some embodiments, the multi-branch conduit comprises a single valve (e.g., a three-way valve) operable to direct fluid flow along a selected branch on the multi-branch conduit. In some embodiments, multiple gate valves are disposed along each branch. In some embodiments, the multi-branch conduit comprises three or more branches, each of which may include one or more respective gate valves.

[0110] In the above embodiment, each multi-branch conduit includes three manual valves. However, in other embodiments, the multi-branch conduit includes a different number of manual valves other than three. For example, in some embodiments, manual valves may be omitted. In some embodiments, the multi-branch conduit includes four or more manual valves arranged along the multi-branch conduit in any suitable manner. [Explanation of symbols]

[0111] 100 Semiconductor manufacturing equipment 102 Processing Tools 104 Valve Module 106 Vacuum Pump 108 Process Chamber 110 Entrance 112 Multi-branched conduit 114 first fluid line manifold 116 Second fluid line manifold 118 First Branch 120 Second Branch 122 Pressure Sensor 124 First Gate Valve 126 Second Gate Valve 128 Valve Controller 130 First manual valve 132 Second manual valve 134 Third manual valve 200 frames 300 processes S302-S332 Step 400 System 402 Cooling device 404 Power supply 406 Gas Supply Source

Claims

1. 1. A valve module for a vacuum pumping system, comprising: a plurality of inlets each configured to receive a fluid to be pumped; a plurality of pressure sensors, each configured to measure a pressure of a fluid associated with a respective one of the plurality of inlets; a first fluid line manifold; a second fluid line manifold; a plurality of multi-branched conduits, each fluidly connecting a respective inlet to both the first fluid line manifold and the second fluid line manifold, the plurality of multi-branched conduits comprising a first branch and a second branch, the first branch being fluidly connected to the first fluid line manifold and the second branch being fluidly connected to the second fluid line manifold; a plurality of valves, one or more valves of each of the plurality of valves being disposed in a respective one of the plurality of multi-branch conduits, each of the one or more valves disposed in a respective multi-branch conduit including a first valve disposed in the first branch of the multi-branch conduit and a second valve disposed in the second branch of the multi-branch conduit; a valve controller operatively connected to the plurality of pressure sensors and the plurality of valves; Equipped with the valve controller is configured to control the plurality of valves based on pressure measurements received from the plurality of pressure sensors, wherein each of one or more valves disposed in a respective multi-branch conduit is adapted to selectively direct fluid flow through the multi-branch conduit to either only the first fluid line manifold or only the second fluid line manifold; a valve module, wherein at least the plurality of inlets, the first fluid line manifold, the second fluid line manifold, the plurality of multi-branched conduits, the plurality of valves, and the valve controller are configured as a single integrated unit and housed in a frame.

2. the plurality of pressure sensors comprising a first pressure sensor configured to measure a pressure of a fluid associated with a first inlet of the plurality of inlets, the first inlet being an inlet of a first multi-branch conduit of the plurality of multi-branch conduits; the valve controller is configured to control the one or more valves disposed in the first multi-branch conduit to direct fluid flow through the first multi-branch conduit to the second fluid line manifold in response to pressure measurements received from the first pressure sensor meeting one or more first criteria. The valve module of claim 1 .

3. 3. The valve module of claim 2, wherein the one or more first criteria comprise one or more criteria selected from the group of criteria consisting of: the measured pressure exceeding a first threshold; the measured pressure exceeding the first threshold for at least a first period of time; the rate of increase of the measured pressure exceeding a second threshold; and the rate of increase of the measured pressure exceeding the second threshold for at least a second period of time.

4. 4. The valve module of claim 2, wherein the valve controller is configured to control the one or more valves disposed in the first multi-branch conduit to direct fluid flow through the first multi-branch conduit to the first fluid line manifold in response to pressure measurements received from the first pressure sensor satisfying one or more second criteria.

5. 5. The valve module of claim 4, wherein the one or more second criteria comprise one or more criteria selected from the group of criteria consisting of: the measured pressure being less than or equal to a third threshold; the measured pressure being less than or equal to the third threshold for at least a third period of time; a rate of decrease of the measured pressure exceeding a fourth threshold; a rate of decrease of the measured pressure exceeding the fourth threshold for at least a fourth period of time; and a preset period of time having elapsed.

6. The valve module of claim 1 , further comprising a plurality of additional valves, wherein for each valve in the plurality of valves, a respective pair of the additional valves is disposed on either side of the valve.

7. The valve module of claim 6 , wherein the further valve is a manually operated valve.

8. 10. The valve module of claim 1, further comprising a gas inlet for receiving gas for purging one or more of the multi-branch conduits and / or for actuating one or more of the valves.

9. a semiconductor processing tool including a plurality of process chambers; 2. The valve module of claim 1, wherein each inlet of the plurality of inlets is fluidly connected to a respective process chamber of the plurality of process chambers; one or more vacuum pumps operatively connected to the first fluid line manifold and the second fluid line manifold; A system comprising:

10. 10. The system of claim 9, further comprising a cooling device for supplying cooling fluid to one or more of the process chambers, the valve module being disposed above the cooling device.

11. A method for operating a valve module for a vacuum pump system as defined in claim 1, said method comprising: receiving a respective pumped fluid at each inlet of said plurality of inlets; measuring the pressure of each one of the pumped fluids with one or more pressure sensors of a plurality of pressure sensors; controlling, by the valve controller, one or more valves of a plurality of valves based on one or more measured pressures, the one or more valves being disposed in a first multi-branch conduit of the plurality of multi-branch conduits; Including, and controlling the one or more valves to selectively direct fluid flow through the first multi-branched conduit to either only a first fluid line manifold or only a second fluid line manifold.

12. A step in which a first pressure sensor of the plurality of pressure sensors measures the pressure of the pumped fluid in the first multi-branch conduit; 12. The method of claim 11, further comprising controlling one or more valves disposed in the first multi-branch conduit to direct fluid flow through the first multi-branch conduit to the second fluid line manifold and to prevent fluid flow through the first multi-branch conduit from flowing to the first fluid line manifold in response to the pressure measurement received from the first pressure sensor satisfying one or more first criteria.

13. 13. The method of claim 12, further comprising the step of: thereafter, in response to pressure measurements received from the first pressure sensor satisfying one or more second criteria, controlling the one or more valves disposed in the first multi-branch conduit to prevent fluid flow through the first multi-branch conduit to the second fluid line manifold, and thereafter directing fluid flow through the first multi-branch conduit to the first fluid line manifold.

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