Inspection Equipment

Abstract

To provide an inspection device capable of improving inspection accuracy.SOLUTION: An inspection device comprises an emission portion including a plurality of emission elements capable of emitting ultrasonic waves. The plurality of emission elements include a plurality of first column elements arranged along a first direction, a first peripheral element, and a second peripheral element. A second peripheral element position of the second peripheral element in a second direction is different from a first peripheral element position of the first peripheral element in the second direction. A position of the first peripheral element in the first direction is between a position of the second peripheral element in the first direction and the positions of the plurality of first column elements in the first direction. A first peripheral element distance between the first peripheral element and the second peripheral element is longer than a first column element distance between one of the plurality of first column elements and another of the plurality of first column elements. The another of the plurality of first column elements is next to the one of the plurality of first column elements.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD An embodiment of the present invention relates to an inspection apparatus. [Background technology]

[0002] For example, there are inspection devices that use ultrasound, etc. Improvement of inspection accuracy is desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-57804 Summary of the Invention [Problem to be solved by the invention]

[0004] An embodiment of the present invention provides an inspection device that can improve inspection accuracy. [Means for solving the problem]

[0005] According to an embodiment of the present invention, an inspection device includes an emission unit including a plurality of emission elements capable of emitting ultrasonic waves. The plurality of emission elements include a plurality of first column elements arranged along a first direction, a first peripheral element, and a second peripheral element. No other emission elements are provided that overlap the first peripheral elements in a second direction perpendicular to the first direction. No other emission elements are provided that overlap the second peripheral elements in the second direction. The second peripheral element position of the second peripheral element in the second direction is different from the first peripheral element position of the first peripheral element in the second direction. The position of the first peripheral element in the first direction is between the position of the second peripheral element in the first direction and the positions of the plurality of first column elements in the first direction. A first peripheral element distance between the first peripheral element and the second peripheral element is longer than a first column element distance between one of the plurality of first column elements and another of the plurality of first column elements. The other one of the plurality of first column elements is adjacent to the one of the plurality of first column elements. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 2] FIG. 2 is a schematic side view illustrating the inspection device according to the first embodiment. [Figure 3] FIG. 3 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 4] FIG. 4 is a graph illustrating the characteristics of the inspection device. [Figure 5] FIG. 5 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 6] FIG. 6 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 7] FIG. 7 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 8] FIG. 8 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the inspection device according to the first embodiment. [Figure 10] FIG. 10 is a schematic plan view illustrating the inspection device according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the inspection device according to the first embodiment. FIG. 2 is a schematic side view illustrating the inspection device according to the first embodiment. 1 and 2, an inspection device 110 according to the embodiment includes an emission unit 10. The emission unit 10 includes a plurality of emission elements 10E. The plurality of emission elements 10E are capable of emitting ultrasonic waves 10w.

[0009] 2, the receiving section 50 is provided in the inspection apparatus 110. The receiving section 50 may include a plurality of receiving elements 50E. The inspection apparatus 110 may be provided with a support section 60.

[0010] The ultrasonic waves 10w are incident on the object of inspection 80 between the emission unit 10 and the reception unit 50. The ultrasonic waves 10w that pass through the object of inspection 80 are incident on the multiple receiving elements 50E of the reception unit 50. A signal Sd is output from the reception unit 50. The signal Sd corresponds to the ultrasonic waves 10w that have entered the reception unit 50.

[0011] The support unit 60 is provided, for example, between the emitter 10 and the receiver 50. The support unit 60 is capable of supporting the inspection object 80. The inspection object 80 passes through the space SP between the emitter 10 and the receiver 50 along the conveying direction 80D. The direction from the emitter 10 to the receiver 50 (for example, the third direction D3) intersects with the conveying direction 80D. The third direction D3 may be inclined with respect to the conveying direction 80D.

[0012] The inspection object 80 is, for example, a banknote. The inspection object may also be paper such as securities. The material of the inspection object 80 is arbitrary. The inspection object 80 includes, for example, at least one of paper and resin.

[0013] For example, the support part 60 is transported by a first transport part 61 (e.g., rollers) and a second transport part 62 (e.g., rollers). In the support part 60, a transport belt (or rollers) or the like may be provided between the first transport part 61 and the second transport part 62. The inspection object 80 is placed on the support part 60. As the support part 60 is transported, the inspection object 80 is transported along a transport direction 80D.

[0014] For example, the plurality of emitting elements 10E of the emitting unit 10 include deformable film portions. The film portions of the plurality of emitting elements 10E emit ultrasonic waves 10w. A transmission circuit 10D is connected to the plurality of emitting elements 10E. A drive signal from the transmission circuit 10D causes the film portions of the plurality of emitting elements 10E to deform, and the ultrasonic waves 10w are emitted. The deformation of the film portions of the plurality of emitting elements 10E is caused by, for example, a piezoelectric element.

[0015] For example, the multiple receiving elements 50E included in the receiving unit 50 include deformable membranes. The membranes of the multiple receiving elements 50E are deformed by the received ultrasonic waves 10w. The deformation of the membranes of the multiple receiving elements 50E is converted into electrical signals by a piezoelectric element or the like. For example, the signals output from the multiple receiving elements 50E are supplied to a receiving circuit 50D. The receiving circuit 50D amplifies the signals and outputs a signal Sd.

[0016] The processing unit 70 can process the signal Sd and output an inspection signal S1. The inspection signal S1 includes information about the inspection result of the inspection object 80. The processing unit 70 may supply a control signal Sc to the transmission circuit 10D. The drive signal from the transmission circuit 10D is based on the control signal Sc.

[0017] 2, the emitting unit 10 may include a first waveguide 10G. Ultrasonic waves 10w generated by each of the plurality of emitting elements 10E pass through the first waveguide 10G and travel toward the receiving unit 50. The receiving unit 50 may include a second waveguide 50G. The ultrasonic waves 10w that have passed through the space SP including the inspection object 80 pass through the second waveguide 50G and travel toward each of the plurality of receiving elements 50E.

[0018] The emitting unit 10 includes a first surface 10F. For example, a plurality of emitting elements 10E are provided on the first surface 10F. The receiving unit 50 includes a second surface 50F. For example, a plurality of receiving elements 50E are provided on the second surface 50F. The second surface 50F faces the first surface 10F.

[0019] 1 shows an example of an arrangement of a plurality of emitting elements 10E provided on a first surface 10F. As shown in Fig. 1, the emitting elements 10E include a plurality of first column elements 11, a first peripheral element 21, and a second peripheral element 22. The plurality of first column elements 11 are arranged along a first direction D1.

[0020] As shown in FIG. 1, the multiple first row elements 11 overlap with the center of the test object 80 in the direction from the emission unit 10 to the reception unit 50 (third direction D3). The first peripheral element 21 and the second peripheral element 22 overlap with a region including one end of the test object 80 in the third direction D3. The test object 80 moves along a conveying direction 80D. FIG. 1 illustrates a conveying region 60R such as a conveying roller or a conveying belt.

[0021] As shown in Fig. 2, the third direction D3 is perpendicular to the first surface 10F. As shown in Fig. 1, the first direction D1 is along the first surface 10F. The first direction D1 is defined as the X-axis direction. A direction perpendicular to the X-axis direction is defined as the Y-axis direction. A direction perpendicular to the X-axis and Y-axis directions is defined as the Z-axis direction.

[0022] A direction perpendicular to the first direction D1 is defined as a second direction D2. The second direction D2 is along the first surface 10F. The second direction D2 is, for example, the Y-axis direction. The third direction D3 is, for example, along the Z-axis direction.

[0023] As shown in FIG. 1, no other emitting elements 10E are provided that overlap the first peripheral elements 21 in the second direction D2 perpendicular to the first direction D1. No other emitting elements 10E are provided that overlap the second peripheral elements 22 in the second direction D2. Unnecessary emitting elements 10E are omitted. A practical inspection device 110 is obtained.

[0024] A second peripheral element position P22 of the second peripheral element 22 in the second direction D2 is different from a first peripheral element position P21 of the first peripheral element 21 in the second direction D2. The position of the first peripheral element 21 in the first direction D1 is between the position of the second peripheral element 22 in the first direction D1 and the positions of the multiple first column elements 11 in the first direction D1.

[0025] The distance between the first peripheral element 21 and the second peripheral element 22 is defined as a first peripheral element distance dp1. The distance between one of the multiple first column elements 11 (element 11a) and another of the multiple first column elements 11 (element 11b) is defined as a first column element distance d1. The other of the multiple first column elements 11 (element 11b) is adjacent to the one of the multiple first column elements 11 (element 11a).

[0026] In the embodiment, the first peripheral element distance dp1 is longer than the first column element distance d1, which, as will be described below, suppresses crosstalk at the edge of the inspection object 80. This improves inspection accuracy.

[0027] For example, the position of the end of the inspection object 80 in the first direction D1 fluctuates. As a result, for example, the overlap state with the inspection object 80 changes at the emitting element 10E at a position corresponding to the end of the inspection object 80. For example, when the emitting element 10E does not overlap with the inspection object 80, the intensity of the ultrasonic waves 10w emitted from that emitting element 10E is not substantially attenuated. On the other hand, when the emitting element 10E overlaps with the inspection object 80, the ultrasonic waves 10w emitted from that emitting element 10E are attenuated according to the state of the inspection object 80. For example, when the intensity of the ultrasonic waves 10w is not attenuated, the ultrasonic waves 10w affect the ultrasonic waves 10w emitted from the surrounding emitting elements 10E. This causes crosstalk. Noise due to the crosstalk occurs.

[0028] In the embodiment, the distance between the plurality of emitting elements 10E (for example, the first peripheral element 21 and the second peripheral element 22) corresponding to the end of the inspection object 80 is set longer than the distance between the plurality of first-row elements 11. This makes it possible to suppress crosstalk due to positional fluctuations even when the position of the end of the inspection object 80 in the first direction D1 fluctuates. According to the embodiment, it is possible to provide an inspection device that can improve inspection accuracy.

[0029] 1, in this example, the first peripheral element position P21 of the first peripheral element 21 in the second direction D2 is different from the first row element positions P11 of the multiple first row elements 11 in the second direction D2. This makes it possible to suppress the influence of fluctuations in the position of the edge of the object of inspection 80 on the first row elements 11 in the ultrasonic waves 10w emitted from the first peripheral element 21.

[0030] In this example, the direction from the second peripheral element 22 to the one (element 11a) of the plurality of first column elements 11 is along the first direction D1. For example, the second peripheral element position P22 is substantially the same as the first column element position P11.

[0031] In the embodiment, at least one of the first peripheral element position P21 and the second peripheral element position P22 may be different from the first column element position P11 of the plurality of first column elements 11 in the second direction D2.

[0032] As shown in FIG. 1 , the distance in the first direction D1 between the center of the first peripheral element 21 in the first direction D1 and the center of the second peripheral element 22 in the first direction D1 is defined as distance pt2. The distance between the center of one of the first column elements 11 (element 11a) in the first direction D1 and the center of another of the first column elements 11 in the first direction D1 is defined as distance pt1. The distance pt1 corresponds to the pitch of the first column elements 11. In the embodiment, the distance pt2 may be substantially the same as the distance pt1. For example, the distance pt2 is preferably 0.8 to 1.2 times the distance pt1. This allows, for example, the position of the edge of the test object 80 in the first direction D1 to be detected with a desired high degree of accuracy. For example, an abnormality in the edge of the test object 80 can be detected with a high degree of accuracy.

[0033] 1, the plurality of emitting elements 10E may further include a first other peripheral element 31 and a second other peripheral element 32. The position of the first other peripheral element 31 in the first direction D1 is between the positions of the plurality of first column elements 11 in the first direction D1 and the positions of the second other peripheral element 32 in the first direction D1. The positions of the plurality of first column elements 11 in the first direction D1 are between the positions of the first peripheral element 21 in the first direction D1 and the positions of the first other peripheral element 31 in the first direction D1.

[0034] The first peripheral element 21 and the second peripheral element 22 are provided at a position corresponding to an area including one end of the test object 80. The first other peripheral element 31 and the second other peripheral element 32 are provided at a position corresponding to an area including another end of the test object. The multiple first column elements 11 are provided at a position corresponding to the center of the test object 80 (between the two ends).

[0035] For example, in the second direction D2, no other emitting element is provided that overlaps with the first other peripheral element 31. In the second direction D2, no other emitting element is provided that overlaps with the second other peripheral element 32. Unnecessary emitting element 10E is omitted. A practical inspection device 110 is obtained.

[0036] A second other peripheral element position P32 of the second other peripheral element 32 in the second direction D2 is different from a first other peripheral element position P31 of the first other peripheral element 31 in the second direction D2. A first other peripheral element distance dq1 between the first other peripheral element 31 and the second other peripheral element 32 is longer than the first column element distance d1. Crosstalk caused by fluctuations in the position of the other end of the object to be inspected 80 in the first direction D1 can be suppressed.

[0037] The distance in the first direction D1 between the center of the first other peripheral element 31 in the first direction D1 and the center of the second other peripheral element 32 in the first direction D1 is defined as distance pt3. The distance pt3 is preferably, for example, 0.8 to 1.2 times the distance pt1. As described above, the distance pt1 is the distance between the center of one of the first row elements 11 (element 11a) in the first direction D1 and the center of the other of the first row elements 11 in the first direction D1. For example, the position of the other end of the test object 80 in the first direction D1 can be detected with a desired high degree of accuracy. For example, an abnormality in the other end of the test object 80 can be detected with a high degree of accuracy.

[0038] 1, in this example, the first other peripheral element position P31 is different from the first column element position P11 in the second direction D2 of the multiple first column elements 11. The second other peripheral element position P32 may be different from the first column element position P11.

[0039] FIG. 3 is a schematic plan view illustrating the inspection device according to the first embodiment. 3 illustrates an example of an arrangement of a plurality of receiving elements 50E on the second surface 50F of the receiving unit 50. A plurality of receiving elements 50E are provided on the second surface 50F. As shown in FIGS. 1 and 3, in this example, the positions of the plurality of receiving elements 50E correspond to the positions of the plurality of emitting elements 10E.

[0040] For example, one of the plurality of receiving elements 50E faces one of the plurality of emitting elements 10E. The plurality of receiving elements 50E can receive the ultrasonic waves 10w emitted from the plurality of emitting elements 10E.

[0041] 2, the inspection apparatus 110 may include a support unit 60. The support unit 60 is capable of supporting the inspection object 80. The support unit 60 causes the inspection object 80 to pass through a space SP between the plurality of emitting elements 10E and the plurality of receiving elements 50E along a conveying direction 80D. The conveying direction 80D intersects with a direction from one of the plurality of emitting elements 10E to one of the plurality of receiving elements 50E (e.g., a third direction D3).

[0042] When the test object 80 passes through the space SP, a portion (e.g., a central portion) of the test object 80 overlaps with multiple first-row elements 11 in the third direction D3. When the test object 80 passes through the space SP, an end of the test object 80 overlaps with at least one of the first peripheral element 21 and the second peripheral element 22 in the third direction D3. When the test object 80 passes through the space SP, another end of the test object 80 overlaps with at least one of the first other peripheral element 31 and the second other peripheral element 32 in the third direction D3.

[0043] In the embodiment, the arrangement of the plurality of receiving elements 50E can be modified in various ways. For example, a large number of the plurality of receiving elements 50E may be arranged in a matrix. As illustrated in Figs. 1 and 3, by arranging the plurality of receiving elements 50E corresponding to the plurality of emitting elements 10E, more efficient inspection can be performed.

[0044] FIG. 4 is a graph illustrating the characteristics of the inspection device. FIG. 4 illustrates the characteristics when the first peripheral element distance dp1 is changed. As already explained, the first peripheral element distance dp1 is the distance between the first peripheral element 21 and the second peripheral element 22. The horizontal axis of FIG. 4 is the distance ratio R1. The distance ratio R1 is the ratio (dp1 / d1) of the first peripheral element distance dp1 to the first column element distance d1. As already explained, the first column element distance d1 is the distance between one of the multiple first column elements 11 (element 11a) and another of the multiple first column elements 11 (adjacent element 11b). The vertical axis of FIG. 4 is the S / N ratio. The S / N ratio corresponds to the degree of crosstalk that occurs when the position of the edge of the test object 80 fluctuates. When the S / N ratio is low, the crosstalk is large. When the S / N ratio is high, the crosstalk is small.

[0045] As shown in Figure 4, when the distance ratio R1 is low, the S / N ratio is low. When the distance ratio R1 is 1.7 or more, the S / N ratio becomes 2 or more.

[0046] In the embodiment, the first peripheral element distance dp1 is preferably 1.7 times or more the first row element distance d1. This results in a high S / N ratio. The first peripheral element distance dp1 may be twice or more the first row element distance d1. This results in a higher S / N ratio. For example, the first peripheral element distance dp1 may be 10 times or less the first row element distance d1. If the first peripheral element distance dp1 is excessively long, the length of the output section 10 along the second direction D2 will be excessively long. If the first peripheral element distance dp1 is 10 times or less the first row element distance d1, a practical and small output section 10 will be obtained.

[0047] FIG. 5 is a schematic plan view illustrating the inspection device according to the first embodiment. 5 illustrates the emission unit 10 of the inspection device 110. As already described, the emission unit 10 includes a plurality of emission elements 10E. The plurality of emission elements 10E are capable of emitting ultrasonic waves 10w (see FIG. 2). The emission unit 10 includes a first surface 10F.

[0048] 5, the first surface 10F includes a first region 10R and a first peripheral region 10A. The plurality of emission elements 10E includes a plurality of first column elements 11 provided in the first region 10R and a plurality of peripheral elements 20 provided in the first peripheral region 10A. The plurality of peripheral elements 20 includes a first peripheral element 21 and a second peripheral element 22. The plurality of first column elements 11 are aligned in a first direction D1 along the first surface 10F.

[0049] 5, the first peripheral region length LP1 of the first peripheral region 10A along the second direction D2 is longer than the first region length L1 of the first region 10R along the second direction D2. The second direction D2 is along the first surface 10F. The second direction D2 is perpendicular to the first direction D1.

[0050] A plurality of peripheral elements 20 are provided in the first peripheral region 10A, which has a long length along the second direction D2. The density of the plurality of peripheral elements 20 in the first peripheral region 10A is lower than the density of the plurality of first column elements 11 in the first region 10R. This makes it possible to suppress crosstalk in the first peripheral region 10A.

[0051] As will be described later, the number of the plurality of peripheral elements 20 may be three or more. The second peripheral element 22 is the closest to the first peripheral element 21 among the plurality of peripheral elements 20.

[0052] As shown in FIG. 5, the first surface 10F may further include a second peripheral region 10B. The first region 10R is located between the first peripheral region 10A and the second peripheral region 10B in the first direction D1. The plurality of emission elements 10E includes a plurality of other peripheral elements 30 provided in the second peripheral region 10B. A second peripheral region length LP2 of the second peripheral region 10B along the second direction D2 is longer than the first region length L1. For example, the density of the plurality of other peripheral elements 30 in the second peripheral region 10B is lower than the density of the plurality of first column elements 11 in the first region 10R. This suppresses crosstalk in the second peripheral region 10B.

[0053] As will be described later, the number of the multiple other peripheral elements 30 may be three or more. The second other peripheral element 32 is the closest to the first other peripheral element 31 among the multiple other peripheral elements 30.

[0054] Other emitting elements 10E that overlap with the first peripheral element 21 in the second direction D2 may not be provided. Other emitting elements 10E that overlap with the second peripheral element 22 in the second direction D2 may not be provided. Other emitting elements 10E that overlap with the first other peripheral element 31 in the second direction D2 may not be provided. Other emitting elements 10E that overlap with the second other peripheral element 32 in the second direction D2 may not be provided.

[0055] In the multiple peripheral elements 20 arranged in the first peripheral region 10A illustrated in Figure 5, the pitch of the multiple peripheral elements 20 in the first direction D1 (distance pt2 illustrated in Figure 1) may be substantially the same as the pitch of the multiple first column elements 11 in the first direction D1 (distance pt1 illustrated in Figure 1).

[0056] In the multiple other peripheral elements 30 arranged in the second peripheral region 10B illustrated in Figure 5, the pitch of the multiple other peripheral elements 30 in the first direction D1 (distance pt3 illustrated in Figure 1) may be substantially the same as the pitch of the multiple first column elements 11 in the first direction D1 (distance pt1 illustrated in Figure 1).

[0057] For example, the area between the first peripheral area 10A and the first area 10R may face the transport area 60R (see FIG. 1). For example, the area between the second peripheral area 10B and the first area 10R may face another transport area 60R (see FIG. 1). The first peripheral area 10A is located outside the transport area 60R. The second peripheral area 10B is located outside the transport area 60R. The first area 10R corresponds to the area between two transport areas 60R.

[0058] FIG. 6 is a schematic plan view illustrating the inspection device according to the first embodiment. 6 shows an example of the emitting section 10. As shown in Fig. 6, in an inspection device 111 according to the embodiment, the plurality of emitting elements 10E include a plurality of second-row elements 12. Except for this, the configuration of the inspection device 111 may be similar to the configuration of the inspection device 110.

[0059] The second-row elements 12 are arranged in the first direction D1. Second-row element positions P12 of the second-row elements 12 in the second direction D2 are different from first-row element positions P11 of the first-row elements 11 in the second direction D2.

[0060] The position of one of the multiple second column elements 12 in the first direction D1 is between the position of one of the multiple first column elements 11 (e.g., element 11a) in the first direction D1 and the position of another of the multiple first column elements 11 (e.g., element 11b) in the first direction D1.

[0061] The pitch of the second row elements 12 may be substantially the same as the pitch (distance pt1) of the first row elements 11. The second row elements 12 may be provided with a half-pitch shift, which allows for high resolution in inspection.

[0062] As shown in FIG. 6, the plurality of emitting elements 10E may further include a third peripheral element 23. For example, no other emitting elements 10E overlap with the third peripheral element 23 in the second direction D2. The position of the first peripheral element 21 in the first direction D1 is between the position of the third peripheral element 23 in the first direction D1 and the positions of the plurality of first column elements 11 in the first direction D1. The distance between the first peripheral element 21 and the third peripheral element 23 and the distance between the second peripheral element 22 and the third peripheral element 23 are longer than the first column element distance d1. Crosstalk is suppressed. Inspection can be performed while maintaining high resolution at the edge of the inspection object 80.

[0063] As shown in FIG. 6, the multiple emitting elements 10E may further include a third other peripheral element 33. For example, no other emitting elements 10E overlap with the third other peripheral element 33 in the second direction D2. The position of the first other peripheral element 31 in the first direction D1 is between the positions of the multiple first-row elements 11 in the first direction D1 and the position of the third other peripheral element 33 in the first direction D1. The distance between the first other peripheral element 31 and the third other peripheral element 33, and the distance between the second other peripheral element 32 and the third other peripheral element 33, are longer than the first-row element distance d1. Crosstalk is suppressed. Higher resolution inspection is possible at the edge of the inspection object 80. An inspection device that can improve inspection accuracy can be provided.

[0064] FIG. 7 is a schematic plan view illustrating the inspection device according to the first embodiment. FIG. 7 illustrates the emission section 10 of the inspection device 111. As shown in FIG. 7, the first surface 10F includes a first region 10R, a first peripheral region 10A, and a second peripheral region 10B. A plurality of first row elements 11 and a plurality of second row elements 12 are provided in the first region 10R. A plurality of peripheral elements 20 (such as a first peripheral element 21, a second peripheral element 22, and a third peripheral element 23) are provided in the first peripheral region 10A. A plurality of other peripheral elements 30 (such as a first other peripheral element 31, a second other peripheral element 32, and a third other peripheral element 33) are provided in the second peripheral region 10B.

[0065] 7, the first peripheral region length LP1 of the first peripheral region 10A along the second direction D2 is longer than the first region length L1 of the first region 10R along the second direction D2. The second peripheral region length LP2 of the second peripheral region 10B along the second direction D2 is longer than the first region length L1 of the first region 10R along the second direction D2.

[0066] For example, the density of the peripheral elements 20 in the first peripheral region 10A is lower than the density of the first row elements 11 in the first region 10R. This makes it possible to suppress crosstalk in the first peripheral region 10A. For example, the density of the other peripheral elements 30 in the second peripheral region 10B is lower than the density of the first row elements 11 in the first region 10R. This makes it possible to suppress crosstalk in the second peripheral region 10B.

[0067] FIG. 8 is a schematic plan view illustrating the inspection device according to the first embodiment. Fig. 8 shows one example of the emission unit 10. As shown in Fig. 8, in the inspection device 112 according to the embodiment, the region where the plurality of first-row elements 11 and the plurality of second-row elements 12 are provided is separated from the region where the first peripheral element 21, the second peripheral element 22, and the third peripheral element 23 are provided. The region where the plurality of first-row elements 11 and the plurality of second-row elements 12 are provided is separated from the region where the first other peripheral element 31, the second other peripheral element 32, and the third other peripheral element 33 are provided. The configuration of the inspection device 112 other than these may be similar to the configuration of the inspection device 111, for example.

[0068] For example, in the inspection device 112, the first peripheral element distance dp1 is longer than the first column element distance d1. The first other peripheral element distance dq1 is longer than the first column element distance d1. Crosstalk is suppressed. An inspection device that can improve inspection accuracy can be provided.

[0069] In the inspection device 112, the distance px2 in the first direction D1 between the center of the first peripheral element 21 in the first direction D1 and the center of the third peripheral element 23 in the first direction D1 may be 0.8 to 1.2 times the distance pt1. The distance px3 in the first direction D1 between the center of the first other peripheral element 31 in the first direction D1 and the center of the third other peripheral element 33 in the first direction D1 may be 0.8 to 1.2 times the distance pt1.

[0070] FIG. 9 is a schematic plan view illustrating the inspection device according to the first embodiment. FIG. 9 illustrates the emission section 10 of the inspection device 112. As shown in FIG. 9, the first surface 10F includes a first region 10R, a first peripheral region 10A, and a second peripheral region 10B. The first peripheral region length LP1 is longer than the first region length L1. The second peripheral region length LP2 is longer than the first region length L1. For example, the density of the peripheral elements 20 in the first peripheral region 10A is lower than the density of the first row elements 11 in the first region 10R. This allows crosstalk to be suppressed in the first peripheral region 10A. For example, the density of the other peripheral elements 30 in the second peripheral region 10B is lower than the density of the first row elements 11 in the first region 10R. This allows crosstalk to be suppressed in the second peripheral region 10B.

[0071] FIG. 10 is a schematic plan view illustrating the inspection device according to the first embodiment. Fig. 10 illustrates an example of the emission unit 10. As shown in Fig. 10, in an inspection device 113 according to the embodiment, in addition to a plurality of first-row elements 11 and a plurality of second-row elements 12, a plurality of third-row elements 13 and a fourth-row elements 14 are provided. Except for this, the configuration of the inspection device 113 may be similar to the configuration of the inspection device 111, for example.

[0072] The multiple third column elements 13 are aligned along the first direction D1. The multiple fourth column elements 14 are aligned along the first direction D1. The position of one of the multiple fourth column elements 14 in the first direction D1 is between the position of one of the multiple third column elements 13 in the first direction D1 and the position of another of the multiple third column elements 13 in the first direction D1.

[0073] For example, multiple transport regions 60R may be provided spaced apart from one another in the second direction D2. Multiple first row elements 11 and multiple second row elements 12 may be provided corresponding to one position of the multiple transport regions 60R in the second direction D2. Multiple third row elements 13 and multiple fourth row elements 14 may be provided corresponding to another position of the multiple transport regions 60R in the second direction D2. Crosstalk can also be suppressed in the inspection device 113. An inspection device that can improve inspection accuracy can be provided.

[0074] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) an emission unit including a plurality of emission elements capable of emitting ultrasonic waves; The plurality of output elements include: a plurality of first column elements aligned along a first direction; a first peripheral element; A second peripheral element; Including, No other emission element is provided that overlaps with the first peripheral element in a second direction perpendicular to the first direction, There is no other emission element that overlaps with the second peripheral element in the second direction, a second peripheral element position of the second peripheral element in the second direction is different from a first peripheral element position of the first peripheral element in the second direction; a position of the first peripheral element in the first direction is between a position of the second peripheral element in the first direction and a position of the plurality of first column elements in the first direction; a first peripheral element distance between the first peripheral element and the second peripheral element is longer than a first column element distance between one of the plurality of first column elements and another of the plurality of first column elements; The other one of the plurality of first column elements is adjacent to the one of the plurality of first column elements.

[0075] (Configuration 2) 2. The inspection apparatus according to configuration 1, wherein at least one of the first peripheral element position and the second peripheral element position is different from first column element positions of the plurality of first column elements in the second direction.

[0076] (Configuration 3) An inspection device as described in configuration 1, wherein the distance in the first direction between the center in the first direction of the first peripheral element and the center in the first direction of the second peripheral element is 0.8 to 1.2 times the distance between the center in the first direction of one of the plurality of first column elements and the center in the first direction of the other of the plurality of first column elements.

[0077] (Configuration 4) 4. The inspection apparatus according to configuration 3, wherein the first peripheral element positions are different from first column element positions of the plurality of first column elements in the second direction.

[0078] (Configuration 5) 5. The inspection apparatus of configuration 4, wherein a direction from the second peripheral element to the one of the plurality of first column elements is along the first direction.

[0079] (Configuration 6) the plurality of emission elements further include a first other peripheral element and a second other peripheral element; a position of the first other peripheral element in the first direction is between the positions of the plurality of first column elements in the first direction and the position of the second other peripheral element in the first direction; the positions of the plurality of first column elements in the first direction are between the positions of the first peripheral element in the first direction and the positions of the first other peripheral element in the first direction; There is no other emission element that overlaps with the first other peripheral element in the second direction, There is no other emission element that overlaps with the second other peripheral element in the second direction, a second other peripheral element position of the second other peripheral element in the second direction is different from a first other peripheral element position of the first other peripheral element in the second direction; 2. The inspection apparatus according to configuration 1, wherein a first other peripheral element distance between the first other peripheral element and the second other peripheral element is longer than the first column element distance.

[0080] (Configuration 7) An inspection device as described in configuration 6, wherein the distance in the first direction between the center in the first direction of the first other peripheral element and the center in the first direction of the second other peripheral element is 0.8 to 1.2 times the distance between the center in the first direction of one of the plurality of first column elements and the center in the first direction of the other one of the plurality of first column elements.

[0081] (Configuration 8) 7. The inspection apparatus according to configuration 6, wherein the first other peripheral element position is different from first column element positions of the plurality of first column elements in the second direction.

[0082] (Configuration 9) the plurality of emission elements further include a third other peripheral element; There is no other emission element that overlaps with the third other peripheral element in the second direction, the position of the first other peripheral element in the first direction is between the positions of the plurality of first column elements in the first direction and the position of the third other peripheral element in the first direction; The inspection device of configuration 6, wherein the distance between the first other peripheral element and the third other peripheral element and the distance between the second other peripheral element and the third other peripheral element are longer than the first column element distance.

[0083] (Configuration 10) the plurality of output elements further includes a third peripheral element; There is no other emission element that overlaps with the third peripheral element in the second direction, the position of the first peripheral element in the first direction is between the position of the third peripheral element in the first direction and the positions of the plurality of first column elements in the first direction; An inspection device described in any one of configurations 1 to 9, wherein the distance between the first peripheral element and the third peripheral element and the distance between the second peripheral element and the third peripheral element are longer than the first column element distance.

[0084] (Configuration 11) the plurality of emission elements further includes a plurality of second row elements aligned along the first direction, second-column element positions of the plurality of second-column elements in the second direction are different from first-column element positions of the plurality of first-column elements in the second direction; An inspection device as described in configuration 1, wherein the position of one of the plurality of second column elements in the first direction is between the position of one of the plurality of first column elements in the first direction and the position of another of the plurality of first column elements in the first direction.

[0085] (Configuration 12) 2. The inspection apparatus according to configuration 1, wherein the first peripheral-element distance is 1.7 times or more the first column-element distance.

[0086] (Configuration 13) an emission unit including a plurality of emission elements capable of emitting ultrasonic waves; the emission portion includes a first surface, the first surface includes a first region and a first peripheral region; The plurality of output elements include: a plurality of first column elements provided in the first region; a plurality of peripheral elements provided in the first peripheral region; Including, the plurality of peripheral elements include a first peripheral element and a second peripheral element; the plurality of first row elements are arranged in a first direction along the first surface, a first peripheral region length along the second direction of the first peripheral region is longer than a first region length along the second direction of the first region; The second direction is along the first surface, and the second direction is perpendicular to the first direction.

[0087] (Configuration 14) the first surface further includes a second peripheral region; the first region is located between the first peripheral region and the second peripheral region in the first direction; the plurality of emission elements include a plurality of other peripheral elements provided in the second peripheral region, 14. The inspection device according to configuration 13, wherein a second peripheral region length along the second direction of the second peripheral region is longer than the first region length.

[0088] (Configuration 15) the plurality of output elements further include a plurality of second row elements provided in the first region; second-column element positions of the plurality of second-column elements in the second direction are different from first-column element positions of the plurality of first-column elements in the second direction; An inspection device as described in configuration 14, wherein the position of one of the plurality of second column elements in the first direction is between the position of one of the plurality of first column elements in the first direction and the position of another of the plurality of first column elements in the first direction.

[0089] (Configuration 16) 16. The inspection apparatus of configuration 15, wherein the pitch of the peripheral elements in the first direction is substantially the same as the pitch of the first column elements in the first direction.

[0090] (Configuration 17) Further comprising a receiving unit including a plurality of receiving elements; one of the plurality of receiving elements faces one of the plurality of emitting elements; 14. The inspection device according to configuration 1 or 13, wherein the plurality of receiving elements are capable of receiving the ultrasonic waves emitted from the plurality of emitting elements.

[0091] (Configuration 18) Further provided with a support part capable of supporting an object to be inspected, the support unit passes the inspection object through a space between the plurality of emitting elements and the plurality of receiving elements along a conveying direction; 18. The inspection apparatus of claim 17, wherein the transport direction intersects with a third direction from the one of the plurality of emitting elements to the one of the plurality of receiving elements.

[0092] (Configuration 19) 19. The inspection apparatus of configuration 18, wherein a portion of the test object overlaps with the plurality of first row elements in the third direction when the test object passes through the space.

[0093] (Configuration 20) 20. The inspection device of claim 19, wherein an end of the object to be inspected overlaps with at least one of the first peripheral element and the second peripheral element in the third direction when the object to be inspected passes through the space.

[0094] According to the embodiment, an inspection device capable of improving inspection accuracy can be provided.

[0095] The above describes embodiments of the present invention with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the inspection device, such as the emission unit, receiving unit, support unit, transmission circuit, receiving circuit, and processing unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0096] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0097] In addition, all inspection devices and inspection methods that can be implemented by a person skilled in the art by appropriately modifying the design based on the inspection device and inspection method described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0098] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0099] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0100] 10...Emitting portion, 10A, 10B...First and second peripheral regions, 10D...Transmitting circuit, 10E...Emitting element, 10F...First surface, 10G...First waveguide portion, 10R...First region, 10w...Ultrasound, 11-14...First to fourth row elements, 11a, 11b...Element, 20...Peripheral element, 21-23...First to third peripheral elements, 30...Other peripheral elements, 31-33...First to third other peripheral elements, 50...Receiving portion, 50D...Receiving circuit, 50E...Receiving element, 50F...Second surface, 50G...Second waveguide portion, 60...Supporting portion, 60R...Transporting region, 61, 62...First and second transporting portions, 70...Processing portion, 80...Inspection object, 80D...Transporting direction, 110-113...inspection device, D1-D3...first to third directions, L1...first region length, LP1, LP2...first and second peripheral region lengths, P11, P12...first and second row element positions, P21, P22...first and second peripheral element positions, P31, P32...first and second other peripheral element positions, R1...distance ratio, S1...inspection signal, SP...space, Sc...control signal, Sd...signal, d1...first row element distance, dp1...first peripheral element distance, dq1...first other peripheral element distance, pt1-pt3...distance, px2, px3...distance

Claims

1. an emission unit including a plurality of emission elements capable of emitting ultrasonic waves; The plurality of output elements include: a plurality of first column elements aligned along a first direction; a first peripheral element; A second peripheral element; Including, No other emission element is provided that overlaps with the first peripheral element in a second direction perpendicular to the first direction, There is no other emission element that overlaps with the second peripheral element in the second direction, a second peripheral element position of the second peripheral element in the second direction is different from a first peripheral element position of the first peripheral element in the second direction; a position of the first peripheral element in the first direction is between a position of the second peripheral element in the first direction and a position of the plurality of first column elements in the first direction; a first peripheral element distance between the first peripheral element and the second peripheral element is longer than a first column element distance between one of the plurality of first column elements and another of the plurality of first column elements; The other one of the plurality of first column elements is adjacent to the one of the plurality of first column elements.

2. 2. The inspection device of claim 1, wherein the distance in the first direction between the center of the first peripheral element in the first direction and the center of the second peripheral element is 0.8 to 1.2 times the distance between the center of one of the plurality of first column elements in the first direction and the center of the other of the plurality of first column elements in the first direction.

3. The plurality of emission elements further include a first other peripheral element and a second other peripheral element, a position of the first other peripheral element in the first direction is between the positions of the plurality of first column elements in the first direction and a position of the second other peripheral element in the first direction; the positions of the plurality of first column elements in the first direction are between the positions of the first peripheral elements in the first direction and the positions of the first other peripheral elements in the first direction; No other emission element is provided that overlaps with the first other peripheral element in the second direction, No other emission element is provided that overlaps with the second other peripheral element in the second direction, a second other peripheral element position of the second other peripheral element in the second direction is different from a first other peripheral element position of the first other peripheral element in the second direction; The inspection device according to claim 1 , wherein a first other peripheral element distance between the first other peripheral element and the second other peripheral element is longer than the first column element distance.

4. the plurality of emission elements further include a plurality of second column elements aligned along the first direction, second column element positions of the plurality of second column elements in the second direction are different from first column element positions of the plurality of first column elements in the second direction; 2. The inspection device of claim 1, wherein the position of one of the plurality of second column elements in the first direction is between the position of the one of the plurality of first column elements in the first direction and the position of the other one of the plurality of first column elements in the first direction.

5. The inspection apparatus according to claim 1 , wherein the first peripheral element distance is equal to or greater than 1.7 times the first column element distance.

6. an emission unit including a plurality of emission elements capable of emitting ultrasonic waves; the light exit portion includes a first surface, the first surface includes a first region and a first peripheral region; The plurality of output elements include: a plurality of first column elements provided in the first region; a plurality of peripheral elements provided in the first peripheral region; Including, the plurality of peripheral elements includes a first peripheral element and a second peripheral element; the plurality of first column elements are arranged in a first direction along the first surface, a first peripheral region length along the second direction of the first peripheral region is longer than a first region length along the second direction of the first region; The second direction is along the first surface, and the second direction is perpendicular to the first direction.

7. Further comprising a receiving unit including a plurality of receiving elements; one of the plurality of receiving elements faces one of the plurality of emitting elements; The inspection device according to claim 1 or 6, wherein the plurality of receiving elements are capable of receiving the ultrasonic waves emitted from the plurality of emitting elements.

8. Further provided with a support part capable of supporting an object to be inspected, the support unit passes the inspection object through a space between the plurality of emitting elements and the plurality of receiving elements along a conveying direction; The inspection device according to claim 7 , wherein the transport direction intersects with a third direction from the one of the plurality of emitting elements to the one of the plurality of receiving elements.

9. The inspection device according to claim 8 , wherein a portion of the inspection object overlaps with the plurality of first row elements in the third direction when the inspection object passes through the space.

10. The inspection device according to claim 9 , wherein an end of the inspection target overlaps with at least one of the first peripheral element and the second peripheral element in the third direction when the inspection target passes through the space.

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