Light source device, exposure device using same, and cassette mounting position adjustment method

Abstract

To provide a light source device which enables easy and accurate positioning of cassettes relative to a frame and enables cooling air from a front surface of each light source to come around a back surface easily.SOLUTION: A light source device 10 includes: multiple light sources 12; cassettes 14 having multiple light source attachment holes 20 to which the multiple light sources 12 are respectively attached; a frame 16 having multiple cassette attachment parts 22 to which the multiple cassettes 14 are respectively attached; and attachment structures 18 which attach the multiple cassettes 14 to the frame 16 with one-touch action. Each of the cassettes 14 is attached to the cassette attachment part 22 by the attachment structures 18 with a gap A existing therebetween.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a light source device that can easily and accurately position the optical axis of a light source, an exposure apparatus that uses the same, and a method for adjusting the mounting position of a cassette. [Background technology]

[0002] BACKGROUND ART It has been known for some time that a plurality of light sources is used in a light source device of an exposure tool used in manufacturing semiconductors and the like (for example, Patent Document 1).

[0003] The light source device disclosed in Patent Document 1 comprises a cassette in which multiple light sources are mounted and a frame in which multiple cassettes are mounted; by properly mounting the cassette to the frame, the optical axis emitted from each light source mounted to the cassette is oriented in the correct direction as designed. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-113270 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in the case of the light source device disclosed in Patent Document 1, positioning was achieved by abutting the frame abutment surface formed on the cassette against the cassette insertion surface formed on the frame, i.e., by "face abutment."

[0006] Therefore, if the surface accuracy of the cassette insertion surface of the frame or the cassette's frame abutment surface is poor, or if a foreign object is caught between the frame and the cassette, the cassette will become loose and the cassette will not be able to be fixed in the appropriate position.

[0007] In addition, if the cassette is "face-to-face" with the frame, it becomes difficult for the cooling air from the front of each light source attached to the cassette (the light-emitting surface) to reach the back of each light source (the side where the power wiring, etc. is located), which causes thermal degradation in the power wiring (lead harness) to each light source, and in the worst case scenario, there is a risk of the wiring shorting out.

[0008] The present invention has been made in consideration of these problems, and its purpose is to provide a light source device that allows for easy and accurate positioning of a cassette relative to a frame and that makes it easier for cooling air from the front of each light source to flow around to the back, an exposure device using the same, and a method for adjusting the cassette mounting position. [Means for solving the problem]

[0009] According to one aspect of the present invention, Multiple light sources; a cassette having a plurality of light source mounting holes to which the plurality of light sources are attached; a frame having a plurality of cassette mounting portions to which the plurality of cassettes are attached; a mounting structure for mounting each of the plurality of cassettes to the frame with one touch, The mounting structure mounts the plurality of cassettes with the entire periphery of each cassette spaced apart from the frame and a gap between each cassette and the cassette mounting portion, so that cooling air from the front of the light source passes through the gap and reaches the rear of the light source. A light source device is provided.

[0015] According to another aspect of the present invention, Multiple light sources; a cassette having a plurality of light source mounting holes to which the plurality of light sources are attached; a frame having a plurality of cassette mounting portions to which the plurality of cassettes are attached; a mounting structure for mounting each of the plurality of cassettes to the frame with one touch; a light source device in which the plurality of cassettes are attached to the cassette attachment portion with a gap therebetween so that cooling air from the front of the light source can flow around to the rear of the light source by the attachment structure; and 1. A method for adjusting the mounting position of a cassette in an exposure apparatus equipped with an optical system that converges and collimates light from a plurality of light sources, comprising: A light source having a narrow light distribution angle is selected as the light source, targets are disposed at positions where the optical axes of the plurality of light sources intersect with the optical axis of the optical system in the optical system; The cassette is attached to the frame at a position where it is adjusted so that light from the plurality of light sources is focused on the target. A method for adjusting the cassette mounting position is provided. 。 [Effects of the Invention]

[0016] According to the present invention, the cassettes can be attached to the cassette attachment portion with a single touch using the mounting structure with a gap between them, thereby providing a light source device that allows the cassettes to be positioned easily and accurately relative to the frame, and that allows the cooling air from the front of each light source to easily flow around to the back because of the gap between the cassettes and the frame. [Brief explanation of the drawings]

[0017] [Figure 1] FIG. 1 is a diagram showing an exposure apparatus 100 according to an embodiment. [Figure 2] 1 is a diagram showing a light source device 10 to which the present invention is applied. [Figure 3] FIG. 10 is a diagram showing a light source device 10 according to another embodiment. [Figure 4] 1 is a diagram illustrating an example mounting structure 18. FIG. [Figure 5] 10 is a view showing a catch member 34 of the mounting structure 18. FIG. [Figure 6] 10A and 10B are diagrams showing a mounting structure 18 according to another embodiment. [Figure 7] 10A and 10B are diagrams showing a mounting structure 18 according to another embodiment. [Figure 8] FIG. 10 is a diagram showing a mounting structure 18 according to yet another embodiment. [Figure 9] 10 is a diagram showing an example of the arrangement of the mounting structure 18 at one cassette mounting portion 22. FIG. [Figure 10] 10 is a diagram showing an example of the arrangement of the mounting structure 18 and the positioning protrusions 72 at one cassette mounting portion 22. FIG. [Figure 11]10 is a diagram showing an example of the arrangement of the mounting structure 18 and the positioning protrusions 72 at one cassette mounting portion 22. FIG. [Figure 12] 10 is a diagram showing an example of the arrangement of the mounting structure 18 and the positioning protrusions 72 at one cassette mounting portion 22. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0018] (Configuration of exposure apparatus 100 and light source apparatus 10) As shown in FIG. 1, the exposure apparatus 100 according to this embodiment is generally made up of a light source device 10 and an optical system 110.

[0019] As shown in FIG. 2, the light source device 10 is generally composed of a light source 12, a cassette 14, a frame 16, and a mounting structure 18.

[0020] The light source 12 emits light L of a wavelength required for exposure, etc., and may be, for example, a high-pressure discharge lamp, an LED, an organic EL, an incandescent lamp, etc. In this embodiment, a high-pressure discharge lamp is used as the light source 12.

[0021] The cassette 14 is a substantially rectangular plate-like member having a plurality of light source mounting holes 20 to which a plurality of light sources 12 are attached. The cassette 14 according to this embodiment has nine light source mounting holes 20 formed therein, but the number of light source mounting holes 20 in one cassette 14 is not particularly limited.

[0022] The frame 16 is a substantially rectangular member to which a plurality of cassettes 14 are attached, and is formed with a plurality of cassette mounting portions 22. Although the frame 16 according to this embodiment is formed with four cassette mounting portions 22, the number of cassette mounting portions 22 per frame 16 is not particularly limited.

[0023] The cassette mounting portions 22 will now be described. Each cassette mounting portion 22 has a fitting hole 24 that is substantially the same shape as the outer shape of the cassette 14, and the cassette 14 is fitted into this fitting hole 24. Furthermore, a peripheral abutment portion 26 is formed at the bottom of the fitting hole 24, against which the front peripheral edge of the cassette 14, in which the light source mounting hole 20 is formed, comes into contact, and this peripheral abutment portion 26 and the cassette 14 come into contact via the mounting structure 18.

[0024] The fitting hole 24 has an opening 28 located inside the peripheral abutment portion 26, and light L from the plurality of light sources 12 attached to the cassette 14 is emitted to the outside through this opening 28.

[0025] The cassette mounting portion 22 is not limited to this embodiment. For example, as shown in FIG. 3, an opening 28 slightly smaller than the outer shape of the cassette 14 may be formed in the frame 16, and the peripheral portion 30 of the opening 28 may abut against the cassette 14 via the mounting structure 18.

[0026] Mounting structure 18 is a member for mounting cassette 14 at a predetermined position on frame 16. This mounting structure 18 is characterized in that cassette 14 can be mounted to frame 16 with a single touch, and that cassette 14 can be mounted with a gap A between cassette mounting portion 22 and cassette mounting portion 22, as shown in FIG.

[0027] 4 shows an example of the mounting structure 18. This mounting structure 18 is divided into a receiving member 32 and a catch member 34, with the receiving member 32 attached to the cassette mounting portion 22 of the frame 16 and the catch member 34 attached to the cassette 14.

[0028] The receiving member 32 has a substantially plate-shaped receiving member main body 36 and a receiving portion 38 protruding from the center of the receiving member main body 36 .

[0029] As shown in FIG. 5, the catch member 34 has a substantially plate-shaped catch member main body 40 and a pair of catch portions 42 projecting from the catch member main body 40 at a predetermined interval.

[0030] The catch part 42 has a ball inlet / outlet hole 44 formed on the surface facing the opposing catch part 42, a ball 46 arranged so as to be able to freely inlet / outlet through the ball inlet / outlet hole 44, and a pressing member 48 that presses the ball 46 in the direction in which it comes out.

[0031] With this mounting structure 18, the receiving portion 38 of the receiving member 32 is pushed between the pair of balls 46 of the catch member 34, thereby fixing the receiving portion 38 between the pair of balls 46. This makes it possible to attach and detach the cassette 14 with a single touch, without using tools or the like, and also makes it possible to fix the cassette 14 to the frame 16 with the gap A remaining.

[0032] The mounting structure 18 is not limited to this, and for example, as shown in Figure 6, the receiving member 32 may be formed by a roughly cylindrical receiving member main body 36 having an inner insertion hole 50, and the catch member 34 may be formed by a roughly cylindrical catch member main body 40 having an inner space 52, a pin member 54 arranged to be slidable within the inner space 52, a pin biasing member 56 that biases the pin member 54 upward in the figure, and a plurality of locking balls 58.

[0033] A locking ball movement hole 60 is formed at the tip of the catch member main body 40 of the catch member 34, and allows multiple locking balls 58 to protrude from and retract into the outer surface. The outer diameter of the tip of the pin member 54 is basically formed to be approximately the same as the inner diameter of the tip of the catch member main body 40. Furthermore, a recess 62 into which the locking ball 58 fits is formed in a portion of the tip of the pin member 54. In addition, the position of the recess 62 is set to coincide with the position of the locking ball movement hole 60 when the pin member 54 is pressed downward in the figure against the pressing force from the pin biasing member 56.

[0034] As a result, with the pin member 54 pressed downward in the figure against the biasing force of the pin biasing member 56, each locking ball 58 enters the recess 62 of the pin member 54, and the locking balls 58 are no longer exposed on the peripheral surface of the tip of the catch member main body 40. In this state, the tip of the catch member main body 40 is inserted into the inner insertion hole 50 of the receiving member main body 36.

[0035] 7, when the pin member 54 is released from being pressed down, the position of the recess 62 in the pin member 54 is displaced from the position of the locking ball movement hole 60 by the biasing force from the pin biasing member 56, so that each locking ball 58 is exposed from the peripheral surface of the tip of the catch member main body 40, and the locking balls 58 are caught on the locking portions 61 formed in the inner insertion hole 50 of the receiving member main body 36. As a result, the state in which the catch member main body 40 is inserted into the inner insertion hole 50 is maintained.

[0036] Even with such a mounting structure 18, the cassette 14 can be fixed to the frame 16 with one touch and with the gap A remaining.

[0037] 8, in another example of the mounting structure 18, the receiving member 32 is formed of a leaf spring, and the inner insertion hole 50 is set so that the diameter decreases toward the tip. The catch member 34 is composed of a large-diameter tip portion 64, a small-diameter shaft portion 66, and a step portion 68 between the tip portion 64 and the shaft portion 66.

[0038] As a result, when the catch member 34 is inserted into the inner insertion hole 50 of the receiving member 32, the receiving member 32 and the catch member 34 engage with each other when the step portion 68 of the catch member 34 passes the narrowest part 70 of the inner insertion hole 50.

[0039] Even with such a mounting structure 18, the cassette 14 can be fixed to the frame 16 with one touch and with the gap A remaining.

[0040] Next, a description will be given of the arrangement of the mounting structures 18. As shown in Fig. 9, the mounting structures 18 are basically arranged at positions corresponding to the four corners of the cassette 14.

[0041] In this way, mounting structures 18 may be placed at all four corners, but as shown in Figure 10, mounting structures 18 may be placed at only one of the four corners, and positioning protrusions 72 that support the cassette 14 at a predetermined distance from the cassette mounting portion 22 may be placed at the remaining three corners.

[0042] 11, mounting structures 18 may be arranged at one pair (two locations) of the four corners on a diagonal line, and positioning protrusions 72 may be arranged at the remaining pair of locations. Furthermore, as shown in FIG. 12, mounting structures 18 may be arranged at both ends of one side that constitutes the outer shape of cassette 14, and one positioning protrusion 72 may be arranged at the center of the side opposite this side.

[0043] The arrangement of the mounting structures 18 and the positioning protrusions 72 described so far is merely an example, and five or more mounting structures 18 and positioning protrusions 72 may be arranged.

[0044] Additionally, an adjustment member (for example, a height adjustment shim, etc.) may be provided to adjust the mounting height of a portion of the mounting structure 18 on at least one of the cassette 14 and the frame 16.

[0045] Furthermore, a positioning protrusion adjusting member (for example, a height adjusting shim) for adjusting the height of the positioning protrusion may be provided.

[0046] Returning to Fig. 1, the optical system 110 is a component for converging and collimating the light L from the above-mentioned plurality of light sources 12, and is composed of a plurality of reflecting mirrors, an integrator lens, a concave mirror, etc. Note that the optical system 110 shown in Fig. 1 is merely an example and is not limited to this.

[0047] Furthermore, it is preferable to set the optical system 110 so that the optical axes CL from the plurality of light sources 12 intersect with the optical system optical axis MCL in the optical system 110 at approximately the same position.

[0048] Specifically, a light source with a narrow light distribution angle is selected as the light source 12, and a target T is disposed at a position where the optical axes CL from the multiple light sources 12 each intersect with the optical axis MCL of the optical system in the optical system 110, and the mounting position of the cassette 14 relative to the frame 16 is adjusted so that the light L from the multiple light sources 12 is concentrated on the target T.

[0049] (Features of the light source device 10 according to the embodiment) According to the light source device 10 of the above-described embodiment, the multiple cassettes 14 can be attached to the cassette attachment portion 22 with a single touch using the mounting structure 18, with the gap A remaining. This allows the cassettes 14 to be positioned easily and accurately relative to the frame 16, and the presence of the gap A between the cassettes 14 and the frame 16 makes it possible to provide a light source device 10 that allows cooling air from the front of each light source 12 to easily flow around to the back.

[0050] In the above embodiment, the mounting structure 18 is configured to fix a convex structure such as the receiving portion 38 or the pin member 54, but instead, the cassette 14 may be fixed to the frame 16 by another member such as a clamp lever or a lever stopper, after the cassette 14 has been positioned relative to the frame 16 by a positioning convex portion 72 attached to one of the cassette 14 and the frame 16 and a recess formed in the other of the cassette 14 and the frame 16.

[0051] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not by the above description, and is intended to include all modifications within the meaning and scope of the claims. [Explanation of symbols]

[0052] 10...light source device, 12...light source, 14...cassette, 16...frame, 18...mounting structure 20...light source mounting hole, 22...cassette mounting portion, 24...fitting hole, 26...periphery abutment portion, 28...opening, 30...periphery 32...receiving member, 34...catch member, 36...receiving member main body, 38...receiving portion, 40...catch member main body, 42...catch portion, 44...ball exit hole, 46...ball, 48...pressure member, 50...inner insertion hole, 52...inner space, 54...pin member, 56...pin biasing member, 58...locking ball, 60...locking ball moving hole, 61...locking portion, 62...recess, 64...tip portion, 66...shaft portion, 68...step portion, 70...nearest portion, 72...positioning protrusion 100... exposure device, 110... optical system L...light, T...target, CL...optical axis, MCL...optical axis of optical system, A...gap

Claims

1. Multiple light sources; a cassette having a plurality of light source mounting holes to which the plurality of light sources are attached; a frame having a plurality of cassette mounting portions to which the plurality of cassettes are attached; a mounting structure for mounting each of the plurality of cassettes to the frame with one touch, The mounting structure mounts the plurality of cassettes with the entire periphery of each cassette spaced apart from the frame and a gap between each cassette and the cassette mounting portion, so that cooling air from the front of the light source passes through the gap and reaches the rear of the light source. Light source device.

2. Multiple light sources; a cassette having a plurality of light source mounting holes to which the plurality of light sources are attached; a frame having a plurality of cassette mounting portions to which the plurality of cassettes are attached; a mounting structure for mounting each of the plurality of cassettes to the frame with one touch; a light source device in which the plurality of cassettes are attached to the cassette attachment portion with a gap therebetween so that cooling air from the front of the light source can flow around to the rear of the light source by the attachment structure; and 1. A method for adjusting the mounting position of a cassette in an exposure apparatus equipped with an optical system that converges and collimates light from a plurality of light sources, comprising: A light source having a narrow light distribution angle is selected as the light source, targets are disposed at positions where the optical axes of the plurality of light sources intersect with the optical axis of the optical system in the optical system; The cassette is attached to the frame at a position where it is adjusted so that light from the plurality of light sources is focused on the target. How to adjust the cassette mounting position.

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