Waveguide element

Abstract

Provided is a waveguide element capable of ensuring excellent low propagation loss performance in an aspect in which a line substrate is mounted (supported) on a support substrate. A waveguide element according to an embodiment of the present invention is provided with: a line substrate comprising a semiconductor substrate having holes periodically formed therein; a waveguide path for propagating electromagnetic waves trapped in the holes; a low-dielectric portion having a permittivity smaller than a permittivity of the line substrate, the low-dielectric portion overlapping the waveguide path in the thickness direction of the line substrate; and a support substrate provided under the line substrate and supporting the line substrate. The waveguide element guides electromagnetic waves of frequencies of 30GHz to 20THz inclusive.

Description

[Technical Field]

[0001] The present invention relates to a waveguide element. [Background technology]

[0002] Development of waveguide elements is underway as a type of electro-optical element. Waveguide elements are expected to be applied and developed in a wide range of fields, including optical waveguides, next-generation high-speed communications, sensors, laser processing, and solar power generation. For example, development of waveguide elements is underway as waveguides for millimeter waves to terahertz waves, which are key to next-generation high-speed communications. As an example of such a waveguide element, a technology using a photonic crystal made of a semiconductor material has been proposed (Patent Document 1). When photonic crystals made using this technology are used in various industrial products, mounting the photonic crystals on a support substrate such as an IC board or a printed circuit board is considered. However, mounting a photonic crystal on a support substrate poses the problem of a significant increase in propagation loss. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2019-33464 A Summary of the Invention [Problem to be solved by the invention]

[0004] A primary object of the present invention is to provide a waveguide element that can ensure excellent low propagation loss performance in a configuration in which a line substrate is mounted (supported) on a support substrate. [Means for solving the problem]

[0005] [1] A waveguide element according to an embodiment of the present invention comprises a line substrate formed by periodically forming voids in a semiconductor substrate; a waveguide in which electromagnetic waves are confined and propagated by the voids; a low-permittivity portion having a dielectric constant smaller than that of the line substrate and overlapping with the waveguide in the thickness direction of the line substrate; and a support substrate provided below the line substrate and supporting the line substrate. The waveguide element guides electromagnetic waves with a frequency between 30 GHz and 20 THz. [2] In the waveguide element described in [1] above, the dimension of the low dielectric constant portion in the thickness direction of the line substrate may satisfy the following formula (1): T ≥ √ε × D / 10 (1) (In the formula, T represents the dimension of the low-permittivity portion in the thickness direction of the line substrate, ε represents the permittivity of the line substrate at 300 GHz, and D represents the thickness of the line substrate.) [3] In the waveguide element described in [1] or [2] above, the dimension of the low dielectric constant portion in the thickness direction of the line substrate may be between 1 / 10 and 1 / 5 of the wavelength λ of the electromagnetic wave guided in the waveguide. [4] In the waveguide element described in any one of [1] to [3] above, the waveguide element may be an active element capable of at least one of transmitting, receiving, and amplifying the electromagnetic wave, and may include an active element supported on the support substrate. [5] In the waveguide element described in any one of [1] to [4] above, the semiconductor substrate may be made of silicon, and the support substrate may be made of at least one material selected from the group consisting of indium phosphide, silicon, aluminum nitride, silicon carbide, and silicon nitride. [6] In the waveguide element according to any one of [1] to [5] above, the low dielectric constant portion may be a cavity. [7] In the waveguide element according to any one of [1] to [6] above, the line substrate may be directly bonded to the support substrate. [8] In the waveguide element described in any one of [1] to [7] above, the support substrate may have a recess, and the cavity may be defined by the lower surface of the line substrate and the recess of the support substrate. [9] In the waveguide element described in any one of [1] to [8] above, the waveguide element may include an insulating layer located between the line substrate and the support substrate, and the cavity may be defined by the lower surface of the line substrate, the upper surface of the support substrate, and the insulating layer.

[10] In the waveguide element according to any one of [1] to [9] above, the line substrate may be made of a photonic crystal or an effective dielectric medium.

[11] In the waveguide element according to any one of [1] to

[10] above, a resonator and / or an antenna made of a photonic crystal may be formed on the line substrate.

[12] In the waveguide element according to any one of [1] to

[11] above, the low dielectric constant portion may overlap with all the holes in addition to the waveguide in the thickness direction of the line substrate. [Effects of the Invention]

[0006] According to the embodiment of the present invention, in a mode in which a line substrate is mounted (supported) on a support substrate, it is possible to realize a waveguide element that can ensure excellent low propagation loss performance. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a schematic perspective view of a waveguide element according to an embodiment of the present invention; [Figure 2] 2 is a cross-sectional view along the line AA of the waveguide element of FIG. 1; [Figure 3] 2 is a BB' cross-sectional view of the waveguide element of FIG. [Figure 4] FIG. 10 is a schematic perspective view of a waveguide element according to another embodiment of the present invention. [Figure 5] 5 is a cross-sectional view of the waveguide element shown in FIG. 4 along AA'. [Figure 6] 5 is a schematic diagram illustrating a propagation path of an electromagnetic wave in the waveguide element of FIG. 4. FIG. [Figure 7] FIG. 10 is a schematic perspective view of a line substrate used in a waveguide element according to yet another embodiment of the present invention. [Figure 8] FIG. 8 is an enlarged plan view of the line substrate of FIG. [Figure 9] 9(a) and 9(b) are plan views of two different unit cells provided on the line substrate of FIG. 7, where FIG. 9(a) shows the first unit cell and FIG. 9(b) shows the second unit cell. [Figure 10] FIG. 10 is a schematic perspective view of a waveguide element according to yet another embodiment of the present invention. [Figure 11] 10 is a graph showing the relationship between the thickness of a low dielectric constant portion and propagation loss. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of the present invention will be described, but the present invention is not limited to these embodiments. A. Overall configuration of the waveguide element A-1. Overall configuration of the director element 100 FIG. 1 is a schematic perspective view of a waveguide element according to one embodiment of the present invention; FIG. 2 is a cross-sectional view of the waveguide element of FIG. 1 taken along line AA'; and FIG. 3 is a cross-sectional view of the waveguide element of FIG. 1 taken along line BB'. The illustrated waveguide element 100 comprises a line substrate 90 formed by periodically forming holes 12 in a semiconductor substrate 10, a waveguide 16 in which electromagnetic waves are confined by the holes 12 and propagate, a low-permittivity portion 80 having a dielectric constant smaller than that of the line substrate 90 and overlapping with the waveguide 16 in the thickness direction of the line substrate 90, and a support substrate 30 provided below the line substrate 90 and supporting the line substrate 90. The waveguide element 100 is configured to guide electromagnetic waves with a frequency of 30 GHz or more and 20 THz or less. The waveguide 16 included in the illustrated waveguide element 100 confines and propagates electromagnetic waves ranging from millimeter waves to terahertz waves using holes 12. Millimeter waves are electromagnetic waves typically having a frequency of about 30 GHz to 300 GHz, and terahertz waves are electromagnetic waves typically having a frequency of about 300 GHz to 20 THz. The waveguide 16 is typically a line-defect waveguide defined as a portion of the semiconductor substrate 10 where no holes 12 are formed. According to the above configuration, in an aspect in which the line substrate is mounted (supported) on a support substrate, the low dielectric constant portion overlaps the waveguide in the thickness direction, so that when electromagnetic waves with a frequency of 30 GHz or more and 20 THz or less are propagated, leakage of the electromagnetic waves into the support substrate can be suppressed. As a result, even in an aspect in which the line substrate is mounted (supported) on a support substrate, the electromagnetic waves can be stably confined and propagated in the waveguide formed in the line substrate, and an increase in propagation loss can be suppressed.

[0009] In the illustrated waveguide element 100, the low-dielectric-constant portion 80 is a cavity 80a. The low-dielectric-constant portion preferably has a dielectric constant of 4 or less, and may be, for example, an SiO2 layer or a quartz glass plate. As shown in FIG. 11, when the low-dielectric-constant portion is a cavity, leakage of electromagnetic waves propagating through the waveguide can be more stably prevented than when the low-dielectric-constant portion is an SiO2 layer or a quartz glass plate. Note that FIG. 11 shows the results of an electromagnetic field simulation calculated by the finite element method under the following conditions: Simulation conditions; Hole period: 160 μm, hole radius: 72 μm, line substrate thickness: 260 μm, line width (waveguide width): 360 μm, line substrate material: silicon, set frequency: 300 GHz, line length (waveguide length): 10 mm

[0010] In the illustrated waveguide element 100, the line substrate 90 is directly bonded to the support substrate 30. In this specification, "direct bonding" refers to bonding two layers or substrates without the use of an adhesive (typically, an organic adhesive). The form of direct bonding can be appropriately determined depending on the configuration of the layers or substrates to be bonded. Furthermore, the interface bonded by direct bonding is typically amorphous. Therefore, it is possible to significantly reduce the thermal resistance of the bonded interface compared to resin bonding. As a result, when an active element such as an oscillator or receiver is mounted on the waveguide element, even if heat generated by the active element is transferred to the line substrate, such heat can be smoothly dissipated from the line substrate to the package via the support substrate. As a result, heating of the line substrate can be suppressed, and deterioration of the characteristics of other active elements and mounted components can be suppressed. The means of "direct bonding" will be described in detail later. By integrating them by direct bonding, it is possible to effectively prevent peeling in the waveguide element, and as a result, it is possible to effectively prevent damage (for example, cracks) to the line substrate caused by such peeling. The direct bonding form can also include bonding the support substrate and the line substrate via a bonding portion. The illustrated waveguide element 100 further includes a bonding portion 20 provided between the line substrate 90 and the support substrate 30, bonding the line substrate 90 and the support substrate 30. In FIGS. 1 to 3, only the bonding portion 20 is provided between the line substrate 90 and the support substrate 30. It is preferable that no organic adhesive or resin material such as a resin material substrate is interposed between the line substrate 90 and the support substrate 30 (i.e., the line substrate 90 and the support substrate 30 are used) (i.e., the line substrate 90 and the support substrate 30 are used). This reduces the thermal resistance at the interface between the line substrate and the support substrate. Alternatively, the line substrate and the support substrate may be directly bonded without providing a bonding portion.

[0011] In one embodiment, the support substrate 30 has a recess 31. The recess 31 is recessed downward from the upper surface of the support substrate 30. The recess 31 is typically open toward one side in the waveguiding direction of the waveguide 16. The cavity 80a is defined by the lower surface of the line substrate 90 and the recess 31 of the support substrate 30.

[0012] In one embodiment, the dimension of the low dielectric constant portion 80 (cavity 80a) in the thickness direction of the line substrate 90 satisfies the following formula (1), and more preferably satisfies the following formula (2). T ≥ √ε × D / 10 (1) T ≥ √ε × D / 10 + 50 (2) (In the formula, T represents the dimension of the low-permittivity portion in the thickness direction of the line substrate, ε represents the permittivity of the line substrate at 300 GHz, and D represents the thickness of the line substrate.) When the dimensions of the low dielectric constant portion in the thickness direction of the line substrate satisfy the above formula, the electromagnetic waves can be stably confined and propagated by the waveguide, and propagation loss can be reduced. The dielectric constant ε of the line substrate 90 at 300 GHz is typically 11.5 or more, preferably 11.6 or more, and typically 13 or less, preferably 12.5 or less. The thickness D of the line substrate 90 is typically 50 μm or more, preferably 100 μm or more, and more preferably 200 μm or more, and is typically 600 μm or less, and preferably 500 μm or less.

[0013] In one embodiment, the dimension of the low dielectric constant portion 80 (cavity 80a) in the thickness direction of the line substrate 90 is 1 / 10 or more of the wavelength λ of the electromagnetic wave guided in the waveguide 16, preferably 1 / 8 or more of the wavelength λ of the electromagnetic wave, and 1 / 5 or less of the wavelength λ of the electromagnetic wave. When the dimension of the low dielectric constant portion in the thickness direction of the line substrate is within the above range, the electromagnetic waves can be more stably confined by the waveguide, and the propagation loss can be further reduced. The dimensions of the low dielectric constant portion 80 (cavity 80a) in the thickness direction of the line substrate 90 are specifically 20 μm or more, preferably 50 μm or more, more preferably 80 μm or more, and even more preferably 120 μm or more, for example, 500 μm or less, preferably 200 μm or less.

[0014] The illustrated waveguide element 100 is an active element capable of at least one of transmitting, receiving, and amplifying electromagnetic waves having a frequency of 30 GHz or more and 20 THz or less, and includes an active element 40 supported by a support substrate 30. With this configuration, the active element and the line substrate can be integrated into a wafer process, which reduces variations in characteristics and improves productivity of the waveguide element, thereby enabling the realization of an inexpensive waveguide element. The active element 40 is supported by the support substrate 30, and is typically embedded in a portion of the upper surface of the support substrate 30 other than the recess 31. Examples of the active element 40 include a resonant tunneling diode, a Schottky barrier diode, a CMOS transceiver, and an InP HEMT. In the illustrated example, the active element 40 is a resonant tunneling diode. The active element 40 is capable of at least transmitting (generating and radiating) electromagnetic waves. The active element 40 may also be capable of receiving and / or amplifying electromagnetic waves. The active element 40 includes a first element electrode 41 and two second element electrodes 42. The first element electrode 41 and the two second element electrodes 42 each extend in the waveguiding direction of the waveguide 16. The two second element electrodes 42 are spaced apart from each other in a direction perpendicular to the waveguiding direction of the waveguide 16. The first element electrode 41 is disposed between the two second element electrodes 42.

[0015] The illustrated waveguide element 100 includes a second waveguide that allows electromagnetic waves to propagate between the waveguide 16 and the active element 40. The electrodes that constitute the second waveguide are typically disposed on the surface of the line substrate 90 and are in direct contact with the line substrate 90. More specifically, the waveguide element 100 includes a coplanar electrode pattern 50 that is disposed on the line substrate 90. The coplanar electrode pattern 50 and the portion of the line substrate 90 that is located below the coplanar electrode pattern 50 constitute a coplanar waveguide, which is an example of a second waveguide. The waveguide substrate 90 of the waveguide element 100 includes a hole-formed portion 90a where holes 12 are periodically formed in the substrate 10, a waveguide 16 defined as a portion of the hole-formed portion 90a (semiconductor substrate 10) where no holes 12 are formed, and a remaining portion 90b other than the hole-formed portion 90a. The remaining portion 90b typically does not have any holes 12. While the holes 12 are periodically formed, the remaining portion 90b may have holes formed at a different period from the holes 12 or may have holes present independently in order to suppress electromagnetic wave leakage and stray capacitance. In this case, a conductive film may be formed in the holes to short-circuit the top surface and the opposite surface of the line substrate 90, forming so-called via holes.

[0016] The coplanar electrode pattern 50 is arranged on the other portion 90b of the line substrate 90, and is aligned with the waveguide 16 in the waveguiding direction. The coplanar electrode pattern 50 includes a signal electrode 51 extending in the waveguiding direction of the waveguide 16 and a ground electrode 52 that is U-shaped in plan view and opens toward the waveguide 16. The signal electrode 51 is disposed inside the ground electrode 52 and is spaced apart from the ground electrode 52. This forms a gap (slit) between the signal electrode 51 and the ground electrode 52 that extends in the waveguiding direction of the waveguide 16. The signal electrode 51 is electrically connected to the first element electrode 41 of the active element 40 through a via 43. The ground electrode 52 is electrically connected to the second element electrode 42 of the active element 40 through two vias 44. The second waveguide is not limited to a coplanar waveguide, but may also be configured as, for example, a microstrip waveguide or a waveguide integrated waveguide.

[0017] In such a waveguide element 100, when a voltage is applied to the coplanar electrode pattern 50, an electric field is generated between the signal electrode 51 and the ground electrode 52. Furthermore, when a voltage is applied to the active element 40, the active element 40 transmits an electromagnetic wave. The electromagnetic wave transmitted from the active element 40 propagates toward the signal electrode 51 through the via 43, and then couples with the electric field formed between the signal electrode 51 and the ground electrode 52, and propagates through the semiconductor substrate 10 toward the waveguide 16. In this way, the electromagnetic wave transmitted from the active element 40 first propagates through the coplanar waveguide, and then propagates into the waveguide 16. Although not shown, the director 100 may also include a second ground electrode located between the line substrate 90 and the support substrate 30. If the director 100 includes a second ground electrode, the electric field generated between the signal electrode and the ground electrode can be prevented from leaking from the line substrate to the support substrate. The second ground electrode may be provided between the line substrate and the joint, or between the joint and the support substrate. The joint may also be made of metal and function as the second ground electrode.

[0018] A-2. Overall configuration of the director element 101 FIG. 4 is a schematic perspective view of a waveguide element according to another embodiment of the present invention; FIG. 5 is a cross-sectional view of the waveguide element of FIG. 4 taken along line AA'; and FIG. 6 is a schematic explanatory diagram for explaining the propagation path of an electromagnetic wave in the waveguide element of FIG. 4. The illustrated waveguide element 101 includes a line substrate 90, a waveguide 16, a low dielectric constant portion 80, and a support substrate 30, as well as an insulating layer 23 located between the line substrate 90 and the support substrate 30. The illustrated insulating layer 23 has a U-shape in plan view that opens toward one side in the waveguiding direction of the waveguide 16. The thickness of the insulating layer 23 is, for example, 1 μm or more and 1 mm or less. Representative materials for the insulating layer 23 include inorganic materials, and specifically, quartz glass. When the insulating layer 23 is made of quartz glass, the insulating layer 23 can function as the low dielectric constant portion described above. The director element 101 further includes a joint 21 that directly joins the line substrate 90 and the insulating layer 23, and a joint 22 that directly joins the support substrate 30 and the insulating layer 23. In the waveguide element 101, the cavity 80b as the low dielectric constant portion 80 may be defined by the lower surface of the line substrate 90, the upper surface of the support substrate 30, and the insulating layer 23, or may be defined by the lower surface of the substrate 10, the junction 22 located on the upper surface of the support substrate 30, and the insulating layer 23. 4 to 6, only the joint 21, the insulating layer 23, and the joint 22 are provided between the line substrate 90 and the support substrate 30. Note that the line substrate and the insulating layer may be directly joined without providing a joint, or the insulating layer and the support substrate may be directly joined without providing a joint.

[0019] Similarly to the director element 100, the director element 101 also includes an active element 40 supported by a support substrate 30. The illustrated waveguide element 101 includes a resonator 17 that allows electromagnetic waves to propagate between the waveguide 16 and the active element 40. The resonator 17 is typically made of a photonic crystal and is a mode-gap-trapping resonator defined as a portion of the semiconductor substrate 10 where no air holes 12 are formed. The line substrate 90 included in the waveguide element 101 includes a line-defect waveguide 16 defined as a portion where no air holes 12 are formed, and a mode-gap-trapping resonator 17 defined as a portion where no air holes 12 are formed. The resonator 17 can receive the electromagnetic wave transmitted from the active element 40, and can send the received electromagnetic wave to the waveguide 16. The resonator 17 is aligned with the waveguide 16 in the waveguiding direction of the waveguide 16 and is continuous with the waveguide 16. The width of the resonator 17 (the dimension in the direction perpendicular to the waveguiding direction of the waveguide 16) is greater than the width of the waveguide 16. In the illustrated example, the waveguide 16 is sandwiched between five rows of holes, and the resonator 17 is surrounded by three rows of holes. In addition, the resonator 17 overlaps with the cavity 80b in the thickness direction of the semiconductor substrate 10.

[0020] In such a waveguide element 101, when a voltage is applied to the active element 40, the first element electrode 41 functions as an antenna, and an electromagnetic wave is transmitted from the first element electrode 41 toward the resonator 17. The electromagnetic wave that reaches the resonator 17 is received by the resonator 17 and then transmitted from the resonator 17 to the waveguide 16 via the continuous portion between the resonator 17 and the waveguide 16. The electromagnetic wave is then propagated to the waveguide 16.

[0021] Furthermore, since a mode gap trapping resonator can receive and transmit electromagnetic waves at specific frequencies, it can function as an antenna for receiving and transmitting electromagnetic waves at specific frequencies. Antennas made from photonic crystals are not limited to mode gap trapping resonators. Even photonic crystal structures that do not have any areas without voids can trap externally incident electromagnetic waves at specific frequencies. This effect can also reversibly emit electromagnetic waves. Therefore, even photonic crystal structures that do not have any areas without voids can function as antennas. Furthermore, if a conductive layer (mirror surface) is formed on the bottom surface of a photonic crystal, the gap s between the two layers can widen the specific frequency band, allowing the construction of an antenna that transmits and receives broadband electromagnetic waves.

[0022] 1 to 6 show examples in which the active element functions to transmit (generate and radiate) electromagnetic waves, and the electromagnetic waves transmitted from the active element are coupled to the waveguide via a second waveguide or a resonator. However, these figures can easily be envisioned as embodiments in which the active element functions to receive electromagnetic waves, and the electromagnetic waves guided through the waveguide are coupled to the active element via a second waveguide or a resonator.

[0023] A-3. Overall configuration of director element 102 FIG. 10 is a schematic perspective view of a waveguide element according to yet another embodiment of the present invention. The above-described waveguide elements 100 and 101 include an active element 40 supported by a support substrate 30 and are configured to allow electromagnetic waves to propagate between the waveguide 16 and the active element 40, but the waveguide element of the present invention does not necessarily include the active element 40. The illustrated waveguide element 102 does not include the active element 40. In such a waveguide element 102, an electromagnetic wave can be input to the waveguide 16 from a separately prepared active element.

[0024] In this specification, the term "waveguide element" encompasses both a wafer on which at least one waveguide element is formed (waveguide element wafer) and chips obtained by cutting the waveguide element wafer.

[0025] B. Track board B-1.Semiconductor substrate The semiconductor substrate 10 has an upper surface exposed to the outside and a lower surface located within the composite substrate. The semiconductor substrate 10 is made of a semiconductor material. Any appropriate material may be used as the semiconductor material as long as the effects of the embodiments of the present invention are obtained. Representative examples of such materials include silicon, aluminum nitride, and silicon carbide. The semiconductor substrate 10 is preferably made of silicon. The semiconductor substrate 10 is not made of a sintered compact of semiconductor material powder, but is made of a single crystal grown by a CZ (Czochralski) method, FZ (Floating Zone) method, or the like. Therefore, the porosity of the semiconductor substrate 10 is such that the number of pores with a pore size of 1 μm or more is less than 0.5 ppm. Note that, in this specification, "pores" refers to bubbles (micropores) present in the substrate itself and is different from pores formed to form a photonic crystal or an effective dielectric medium.

[0026] B-2. Photonic Crystals As described above, the line substrate 90 is formed by periodically forming holes 12 in the semiconductor substrate 10. The line substrate 90 is made of a photonic crystal or an effective dielectric medium.

[0027] The photonic crystal that constitutes the line substrate 90 is a multidimensional periodic structure consisting of a medium with a high refractive index and a medium with a low refractive index, with a period comparable to the wavelength of light, and has an optical band structure similar to the band structure of electrons. Therefore, by appropriately designing the periodic structure, it is possible to create a predetermined optical forbidden band (photonic band gap). A photonic crystal with a forbidden band functions as an object that neither reflects nor transmits light of a predetermined wavelength. When a line defect that disrupts the periodicity is introduced into a photonic crystal with a photonic band gap, a waveguide mode is formed within the frequency range of the band gap, making it possible to realize a waveguide that propagates electromagnetic waves with low loss.

[0028] A typical photonic crystal is a slab-type two-dimensional photonic crystal. A slab-type two-dimensional photonic crystal is a photonic crystal in which cylindrical or polygonal low-refractive-index pillars with a refractive index lower than that of the material constituting the thin semiconductor slab are arranged in a thin semiconductor slab at an appropriate two-dimensional periodic interval corresponding to the intended and desired photonic band gap, and the thin semiconductor slab is further sandwiched between upper and lower claddings with a refractive index lower than that of the thin semiconductor slab. In the illustrated example, the air holes 12 function as the low-refractive-index pillars, the portion 14 between the air holes 12 in the semiconductor substrate 10 functions as the high-refractive-index portion, the low-dielectric-constant portion (cavity) functions as the lower cladding, and the external environment (air) above the line substrate 90 functions as the upper cladding. Portions of the semiconductor substrate 10 where the periodic pattern of the air holes 12 is not formed become line defects, and these line defect portions form the waveguide 16.

[0029] The air holes 12 may be formed in a periodic pattern as described above. The air holes 12 are typically arranged to form a regular lattice. Any suitable lattice shape may be adopted as long as it can achieve a predetermined photonic band gap. Typical examples include a triangular lattice and a square lattice. In one embodiment, the air holes 12 may be through-holes. Through-holes are easy to form, and as a result, the refractive index can be easily adjusted. Any suitable shape may be adopted as the shape of the air holes (through-holes) in a planar view. Specific examples include an equilateral polygon (e.g., an equilateral triangle, a square, a regular pentagon, a regular hexagon, or a regular octagon), an approximate circle, or an ellipse. An approximate circle is preferred. The substantially circular shape preferably has a major axis / minor axis ratio of 0.90 to 1.10, more preferably 0.95 to 1.05. As described above, the through holes 12 may be low-refractive-index columns (columnar portions made of a low-refractive-index material). However, since through holes are easier to form and are made of air, which has the lowest refractive index, the difference in refractive index with the waveguide can be made large. Furthermore, the diameter of some holes may be different from the diameter of other holes, and the hole period may also be different from the period of other holes.

[0030] When the line substrate is made of a photonic crystal, the lattice pattern of the air holes can be appropriately set depending on the purpose and desired photonic band gap. In the illustrated example, air holes with a diameter d form a square lattice with a period P. Although a square lattice is formed in the illustrated example, similar operation, function, and effects can be obtained with a triangular lattice by appropriately setting the diameter and period of the air holes. The square lattice pattern is formed on both sides of the waveguide element, and a waveguide 16 is formed in the center where no lattice pattern is formed. The length of the waveguide 16 is preferably 30 mm or less, more preferably 0.1 mm to 10 mm. The width of the waveguide 16 can be, for example, 1.01 P to 3 P (2 P in the illustrated example) relative to the air hole period P. The number of air hole rows in the waveguide direction (hereinafter sometimes referred to as lattice rows) can be 3 to 10 rows (5 rows in the illustrated example) on each side of the waveguide. The air hole period P can satisfy, for example, the following relationship: (1 / 7)×(λ / n)≦P≦1.4×(λ / n) Here, λ is the wavelength (μm) of the electromagnetic wave introduced into the waveguide, and n is the refractive index of the semiconductor substrate. The refractive index εr is proportional to the 1 / 2 power of the dielectric constant, so "n" in the above formula is "(εr) 1 / 2 " may be replaced with ". The hole period P is preferably 10 μm to 1 mm, more preferably 200 μm to 800 μm. In one embodiment, the hole period P may be equal to the thickness of the photonic crystal (semiconductor substrate). The hole diameter d is preferably 0.1P to 0.9P relative to the hole period P, more preferably 0.2P to 0.6P. The width of the grating pattern is preferably 10P or more, and more preferably 12P to 20P. The width of the grating pattern is the distance between the outermost grating row in the grating pattern on one side of the waveguide and the outermost grating row in the grating pattern on the other side of the waveguide. Therefore, as shown in the example, the width of the grating pattern on one side of the waveguide is 4P or more.

[0031] A desired photonic band gap can be obtained by appropriately combining and adjusting the hole diameter d, hole period P, number of lattice rows, number of holes in one lattice row, thickness of the semiconductor substrate, constituent material of the semiconductor substrate (effectively, refractive index), width of the line defect portion, width and height of the cavity, etc. More specifically, when the line substrate is made of a photonic crystal in which periodic holes are formed in a silicon substrate, the normalized frequency P / λ exceeds 0.23.

[0032] B-3. Effective dielectric medium When the line substrate is made of an effective dielectric medium, the waveguide element typically has an electromagnetic wave frequency range of 50 GHz or higher where the absolute value of the propagation loss is 1 dB / cm or less. In other words, the waveguide element can function as a so-called broadband waveguide element with low propagation loss over a wide frequency range. Such broadband characteristics can typically be achieved by forming a periodic pattern of holes 12 in the semiconductor substrate 10 that does not form a photonic bandgap (forbidden band) (i.e., by using a structure other than a photonic crystal). Such an effective dielectric medium is sometimes called an effective dielectric cladding (EMC).

[0033] When the line substrate is made of an effective dielectric medium, the normalized frequency P / λ may be, for example, 0.05 to 0.3, or 0.05 to 0.025, or 0.1 to 0.03, or 0.1 to 0.025. For example, when the line substrate is made of an effective dielectric medium in which periodic holes are formed in a silicon substrate, the normalized frequency P / λ is 0.2 or less. If the normalized frequency P / λ is within this range, the electromagnetic waves are not diffracted by the periodic holes, and the periodic holes effectively function as a low-permittivity region. This is equivalent to behaving like the cladding of an optical fiber. In the case of photonic crystals, the wavelength dispersion characteristics of the propagation constant change significantly, and the group refractive index increases. This reduces the propagation velocity of the signal pulse, making delay problems more pronounced. On the other hand, in the case of EMC modes, the effective dielectric constant (refractive index) can be reduced, so the group velocity does not decrease and delay can be suppressed.

[0034] When the line substrate is made of an effective dielectric medium, the hole period P is preferably 50 μm or more, more preferably 50 μm to 1 mm, and even more preferably 200 μm to 800 μm. The variation in the hole period P is preferably P / 100 (0.01 P) or more, more preferably 0.05 P to 0.3 P. As mentioned above, when the EMC mode is adopted, the wavelength of the propagating electromagnetic wave is not within the photonic band. Therefore, there is no need to form a photonic band gap, and a certain degree of variation in the accuracy of the hole pattern (typically, the hole period) is acceptable. Furthermore, in the case of an effective dielectric medium, it has the characteristic that it can propagate in any polarization direction.

[0035] When the line substrate is made of an effective dielectric medium, the hole diameter d is preferably P / 100 (0.01P) or more relative to the hole period P, more preferably 0.7P to 0.96P, and even more preferably 0.8P to 0.94P. If the hole diameter d and the hole period P have such a relationship, it is possible to achieve both the effects of reducing the effective dielectric constant and maintaining mechanical strength.

[0036] 1 to 6 includes a line-defect waveguide 16 defined as a portion of a semiconductor substrate 10 where no holes 12 are formed. Although the waveguide 16 is strip-shaped (linear) in the illustrated example, a waveguide of a predetermined shape (and therefore a predetermined waveguiding direction) can be formed by changing the lattice pattern. For example, the waveguide may extend in a direction at a predetermined angle (diagonal direction) relative to the long side or short side direction of the waveguide element, or may bend at a predetermined point (the waveguiding direction may change at a predetermined point).

[0037] B-4. Valley Photonic Crystal As shown in FIGS. 7 to 9, the line substrate 90 may be a valley photonic crystal layer 11 in which the boundary between regions consisting of two different unit cells functions as a waveguide. The valley photonic crystal layer 11 includes a first region 11a consisting of a plurality of first unit cells 18 and a second region 11b consisting of a plurality of second unit cells 19. The first region 11a and the second region 11b are adjacent to each other, and the boundary between the first region 11a and the second region 11b is configured as a waveguide 15.

[0038] Each of the first unit cell 18 and the second unit cell 19 is formed by periodically forming two types of holes of different sizes in the semiconductor substrate 10. The holes are typically arranged to form a regular lattice. Any suitable lattice shape can be adopted as long as it can realize a desired photonic band gap in the millimeter wave to terahertz wave waveguide.

[0039] In each of the illustrated first unit cell 18 and second unit cell 19, three relatively large first voids 12a and three relatively small second voids 12b are arranged to form a honeycomb lattice (hexagonal lattice). In each unit cell, the first voids 12a and the second voids 12b are arranged alternately. The first unit cell 18 and the second unit cell 19 are in a relationship of 180° rotational symmetry (line symmetry). When the first unit cell 18 is rotated 180° around the center of the lattice as an axis, it coincides with the second unit cell 19.

[0040] Each of the first and second holes 12a and 12b typically has an equilateral triangular shape. The length L of one side of the first hole 12a satisfies the following formula (3), and the length S of one side of the second hole 12b satisfies the following formula (4).

number

[0041] Waveguide 15 is capable of propagating millimeter waves to terahertz waves while confining them by means of holes 12, and is formed at the boundary between first region 11a and second region 11b. Although waveguide 15 in the illustrated example is bent at a predetermined point (the waveguiding direction changes at a predetermined point), a waveguide of a desired shape can be formed by changing the shapes of first region 11a and second region 11b and thereby changing the shape of the boundary between them. For example, the waveguide may extend linearly along the long or short side direction of the photonic crystal element without bending, or may extend in a direction at a predetermined angle (diagonal direction) relative to the long or short side direction of the photonic crystal element.

[0042] C. Joint The bonding portion 20 integrates the semiconductor substrate 10 and the substrate 30 by direct bonding, as shown in FIG. 21 The semiconductor substrate 10 and the insulating layer 23 are integrated by direct bonding. Joint 22 The insulating layer 23 and the support substrate 30 are integrated by direct bonding. The joint may be a single layer, or two or more layers may be laminated. The joint is typically made of an inorganic material. Examples of the joint include a SiO2 layer, an amorphous silicon layer, and a tantalum oxide layer. The joint may also be made of a metal selected from gold (Au), titanium (Ti), platinum (Pt), chromium (Cr), copper (Cu), tin (Sn), or a combination (alloy) thereof. Among these joints, an amorphous silicon layer is preferred. To ensure adhesion strength and prevent migration, a metal film of Ti, Cr, Ni, Pt, or Pd may be formed as an intermediate layer between the line substrate and the support substrate, or between the insulating layer and the line substrate or the support substrate. The thickness of the joint is, for example, 0.001 μm to 10 μm, preferably 0.1 μm to 3 μm.

[0043] Direct bonding can be achieved, for example, by the following procedure: -6A neutralization beam is irradiated onto the bonding surfaces of the components (layers or substrates) to be bonded at a pressure of about 100 Pa. This activates each bonding surface. Next, the activated bonding surfaces are brought into contact with each other in a vacuum atmosphere and bonded at room temperature. The load during this bonding can be, for example, 100 N to 20,000 N. In one embodiment, when performing surface activation using the neutralization beam, an inert gas is introduced into a chamber, and a high voltage is applied from a DC power supply to an electrode placed in the chamber. With this configuration, an electric field generated between the electrode (positive electrode) and the chamber (negative electrode) causes electrons to move, generating a beam of atoms and ions from the inert gas. Of the beams that reach the grid, the ion beam is neutralized by the grid, and a beam of neutral atoms is emitted from the fast atom beam source. The atomic species constituting the beam are preferably inert gas elements (e.g., argon (Ar) and nitrogen (N)). The voltage during activation by beam irradiation is, for example, 0.5 kV to 2.0 kV, and the current is, for example, 50 mA to 200 mA. The direct bonding method is not limited to this, and other methods such as surface activation using FAB (Fast Atom Beam) or an ion gun, atomic diffusion, and plasma bonding can also be used.

[0044] D. Low dielectric constant part The width of the low-dielectric-constant portion 80 (cavities 80a, 80b) is typically greater than the width of the waveguide. The low-dielectric-constant portion 80 (cavities 80a, 80b) preferably extends from the waveguide to at least the third lattice row. Light not only propagates within the waveguide, but some of the optical energy may also diffuse to lattice rows near the waveguide. Therefore, providing a cavity directly below such a lattice row can suppress propagation loss. From this perspective, it is more preferable that the low-dielectric-constant portion 80 (cavities 80a, 80b) extend from the waveguide to the fifth row, and it is particularly preferable that the low-dielectric-constant portion 80 (cavities 80a, 80b) extend in the thickness direction of the line substrate 90 so as to overlap the entire area of the hole-forming portion. When the low dielectric constant portion is an SiO2 layer or a quartz glass plate, the low dielectric constant portion is located between the line substrate and the support substrate.

[0045] E. Substrate The support substrate 30 has an upper surface located within the composite substrate and a lower surface exposed to the outside. The support substrate 30 is provided to increase the strength of the composite substrate, thereby allowing the thickness of the semiconductor substrate to be reduced. Any appropriate configuration can be adopted for the support substrate 30. Specific examples of materials that can be used to form the support substrate 30 include indium phosphide (InP), silicon (Si), glass, sialon (Si3N4-Al2O3), mullite (3Al2O3·2SiO2, 2Al2O3·3SiO2), aluminum nitride (AlN), magnesium oxide (MgO), aluminum oxide (Al2O3), spinel (MgAl2O4), sapphire, quartz, quartz crystal, gallium nitride (GaN), silicon carbide (SiC), silicon nitride (Si3N4), and gallium oxide (Ga2O3). The support substrate 30 is preferably made of at least one material selected from the group consisting of indium phosphide, silicon, aluminum nitride, silicon carbide, and silicon nitride, and more preferably made of silicon or indium phosphide. It is preferable that the linear expansion coefficient of the material constituting the support substrate 30 is as close as possible to the linear expansion coefficient of the material constituting the semiconductor substrate 10. With such a configuration, thermal deformation (typically, warpage) of the composite substrate can be suppressed. Preferably, the linear expansion coefficient of the material constituting the support substrate 30 is within a range of 50% to 150% of the linear expansion coefficient of the material constituting the semiconductor substrate 10. From this perspective, the support substrate may be made of the same material as the semiconductor substrate. [Example]

[0046] The present invention will be described in more detail below with reference to examples, but the present invention is not limited to these examples. The propagation loss of a waveguide element was measured as follows.

[0047] Example 1 The waveguide element shown in FIGS. 1 to 3 was fabricated.

[0048] 1-1. Preparation of the support substrate A support substrate was prepared on a 3-inch InP wafer with a resonant tunneling diode (active element) formed (embedded). A resist film was patterned on the top surface of the InP wafer so as to expose the portion of the InP wafer located directly below the entire periodic hole portion to be formed in the silicon wafer that would serve as the line substrate. The portion of the InP wafer exposed from the resist film was then dry-etched using reactive ion etching to form a recess (hollow structure). The etching depth of the recess was set to 150 μm. In this way, an InP wafer (support substrate) with a recess was prepared.

[0049] 1-2. Formation of the joint (joint layer) Next, a 1 μm thick SiO2 film and a 0.2 μm thick amorphous silicon film were sputtered onto the InP wafer with the recesses as bonding layers. After deposition, the amorphous silicon film was polished and flattened. Using an atomic force microscope, the arithmetic mean roughness of a 10 μm square area (a 10 μm square area; the same applies below) on the surface of the amorphous silicon film was measured and found to be 0.2 nm.

[0050] 1-3. Bonded wafer (direct bonding) Next, a 3-inch silicon wafer (semiconductor substrate) with a thickness of 525 μm was prepared. Using an atomic force microscope, the arithmetic mean roughness of the surface of the silicon wafer over a 10 μm square was measured, and found to be 0.2 nm. The amorphous silicon surface of the InP wafer on which the resonant tunneling diode was formed was directly bonded to a silicon wafer as follows: First, the InP wafer and the silicon wafer were placed in a vacuum chamber. -6In a vacuum of the Pa range, both bonding surfaces (the amorphous silicon surface of the InP wafer and the surface of the silicon wafer) were irradiated with a high-speed Ar neutral atom beam (accelerating voltage 1 kV, Ar flow rate 60 sccm) for 70 seconds. After irradiation, the InP wafer and silicon wafer were left to cool for 10 minutes, and then the bonding surfaces of the InP wafer and silicon wafer (the beam-irradiated surfaces of the InP wafer and silicon wafer) were brought into contact and pressed together at 4.90 kN for 2 minutes to bond the InP wafer and silicon wafer. In other words, the InP wafer and silicon wafer were directly bonded via the amorphous silicon layer and SiO2 film (bonding area). The silicon surface of the bonded composite wafer was then polished and the silicon wafer was thinned to a thickness of 230 μm. No defects such as peeling were observed at the bonded interface in the resulting silicon / InP composite substrate.

[0051] 1-4. Formation of voids Next, a resist was applied to a silicon wafer, and a resist pattern with a hole pattern corresponding to the periodic holes and via holes was formed by photolithography. The silicon and SiO2 exposed from the resist pattern were then dry-etched by reactive ion etching to form periodic holes and via holes with a period of 240 μm and a hole radius of 72 μm in the silicon wafer. This resulted in periodic holes being formed in the silicon wafer, and the line substrate was constructed as a photonic crystal (two-dimensional photonic crystal slab). The two-dimensional photonic crystal slab included a line-defect waveguide, defined as the area where no holes were formed, and the length of the line-defect waveguide in the waveguiding direction was 10 mm.

[0052] 1-5. Formation of coplanar electrode pattern Next, resist was applied again onto the silicon wafer, and the resist was patterned by photolithography to expose the area where the coplanar electrode pattern and the via hole area were to be formed, and to mask the periodic hole area. After that, a 50 nm thick Cr film and a 100 nm thick Ni film were formed by sputtering on the upper surface of the silicon wafer exposed from the resist to form the base electrode. In addition, a Cr film and a Ni film were formed on the inner surface of the via hole to ensure electrical continuity between the electrode of the resonant tunneling diode on the InP substrate and the base electrode on the silicon. Furthermore, a Cr film and a Ni film were formed on the base electrode. electrolytic Copper was deposited by plating to form a coplanar electrode pattern. Finally, the SiO2 bonding layer in the recesses (hollow structures) of the InP wafer was removed by wet etching using buffered hydrofluoric acid (BHF) through the periodic voids in the silicon wafer. The waveguide element was obtained as described above. In the waveguide element, the recess of the InP wafer and the lower surface of the silicon wafer defined a cavity as a low-dielectric-constant portion. The thickness of the cavity was 150 μm, the same as the etching depth of the portion.

[0053] 1-6. Calculating propagation loss To measure the propagation loss of the line-defect waveguide, three waveguide elements with line-defect waveguide lengths of 30 mm, 40 mm, and 50 mm were fabricated in the same manner as above. Next, a voltage was applied to the resonant tunneling diode (active element), and a receiving antenna and an RF signal receiver were coupled to the output side of the line defect waveguide. Next, a voltage was applied to the resonant tunneling diode, causing it to transmit electromagnetic waves at the frequencies shown in Table 1. This caused the electromagnetic waves to be introduced into the line-defect waveguide via the coplanar waveguide. The RF signal receiver measured the RF power of the electromagnetic waves output from the line-defect waveguide. From the measurement results of three waveguide elements with different waveguide lengths, the propagation loss (dB / cm) was calculated and evaluated according to the following criteria. The results are shown in Table 1. ◎ (Excellent): Less than 0.5dB / cm Good: 0.5 dB / cm or more and less than 1 dB / cm △ (Acceptable): 1dB / cm or more and less than 2dB / cm × (not allowed): 2dB / cm or more

[0054] <Example 2> The waveguide element shown in FIGS. 4 to 6 was fabricated.

[0055] 2-1. Preparation of the support substrate and insulating layer First, in the same manner as in Example 1, a wafer (support substrate) was prepared, in which a resonant tunneling diode (active element) was formed (embedded) on a planarized 3-inch InP wafer. Additionally, a 3-inch, 0.3 mm thick piece of quartz glass was prepared as an insulating layer. This quartz glass was drilled with a water jet to create periodic holes that would be formed in the silicon wafer to be bonded later, and a hollow structure directly below the antenna part. As a result, the quartz glass (insulating layer) was formed into a U-shape in plan view.

[0056] 2-2. Formation of the joint (joint layer) Next, a 0.1 μm thick amorphous silicon film was deposited as a bonding layer on one side of the drilled quartz glass. After deposition, the amorphous silicon film was polished to a flattened surface. Using an atomic force microscope, the arithmetic mean roughness of the amorphous silicon film surface (10 μm square) and the arithmetic mean roughness of the silicon surface were measured, and both were found to be 0.2 nm (10 μm square).

[0057] 2-3. Bonded wafer (direct bonding) The InP wafer and the synthetic quartz glass wafer were then directly bonded. The direct bonding was carried out in the same manner as in Example 1. That is, the InP wafer and the quartz glass wafer were directly bonded via an amorphous silicon layer and an SiO2 film (bonding portion). In the obtained synthetic quartz glass / InP composite substrate, no defects such as peeling were observed at the bonding interface. The synthetic quartz glass was then polished to a thickness of 150 μm. A 0.1 μm thick amorphous silicon film was then deposited on the polished surface of the quartz glass as a bonding layer, and the deposited surface was then flattened. The arithmetic mean roughness of the amorphous silicon surface was measured, and was found to be 0.2 nm over a 10 μm square. Next, a 3-inch silicon wafer (semiconductor substrate) with a thickness of 525 μm was prepared, and a second direct bonding was performed between the silicon wafer and the synthetic quartz glass / InP composite substrate. That is, the quartz glass wafer and the silicon wafer were directly bonded via an amorphous silicon layer (bonding part). The silicon surface of the bonded composite wafer was then polished to thin the silicon wafer down to a thickness of 230 μm. No defects such as peeling were observed at the bonded interface in the resulting silicon / InP composite substrate.

[0058] 2-4. Formation of voids Next, a resist was applied to a silicon wafer, and a resist pattern with a hole pattern corresponding to the periodic holes and antenna was formed by photolithography. The silicon and SiO2 exposed from the resist pattern were then dry-etched by reactive ion etching to form periodic holes with a period of 240 μm and a hole radius of 72 μm and an antenna in the silicon wafer. This resulted in periodic holes being formed in the silicon wafer, and the line substrate was constructed as a photonic crystal (two-dimensional photonic crystal slab). The two-dimensional photonic crystal slab had a line-defect waveguide defined as the area where no holes were formed and a mode-gap-trapping resonator defined as the area where no holes were formed. The length of the line-defect waveguide in the waveguiding direction was 10 mm. In this way, a waveguide element was obtained.

[0059] 2-5. Calculating propagation loss Furthermore, to measure the propagation loss of the line-defect waveguide, three waveguide elements with line-defect waveguide lengths of 30 mm, 40 mm, and 50 mm were fabricated in the same manner as described above. Next, as in Example 1, a voltage was applied to the resonant tunneling diode (active element), and a receiving antenna and an RF signal receiver were coupled to the output side of the line-defect waveguide, and the RF power of the electromagnetic wave output from the line-defect waveguide was measured using the RF signal receiver. The propagation loss of the waveguide element of Example 2 was evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0060] <Examples 3 to 5> A waveguide element was fabricated in the same manner as in Example 1, except that the etching depth of the recess was changed to change the thickness of the cavity to the value shown in Table 1. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0061] Example 6 A waveguide element was fabricated in the same manner as in Example 1, except that the InP wafer used as the support substrate was changed to a silicon wafer. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0062] Example 7 A waveguide element was fabricated in the same manner as in Example 2, except that the InP wafer used as the support substrate was changed to a silicon wafer. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0063] Example 8 First, similarly to Example 1, a wafer was prepared in which a resonant tunneling diode (active element) was formed (embedded) on a planarized 3-inch InP wafer (support substrate). Next, a SiO2 layer (1 μm thick) was formed as a low-dielectric-constant portion on the top surface of the InP wafer (support substrate) by sputtering. The SiO2 layer was polished by CMP to reduce the arithmetic mean roughness Ra. The surface was then cleaned, and a Ta2O5 (tantalum oxide) layer was further formed to a thickness of 0.1 μm by sputtering. Next, a 0.5mm thick quartz glass plate (quartz glass wafer) was prepared, and a 0.1µm thick Ta2O5 (tantalum oxide layer) was formed by sputtering, followed by CMP polishing to reduce the arithmetic mean roughness Ra. After cleaning the InP wafer and quartz glass wafer, the arithmetic mean roughness Ra of the surface of the Ta2O5 on the InP wafer and the Ta2O5 on the quartz glass wafer was measured using an atomic force microscope over a 10µm square, and was found to be 0.5nm and 0.5nm, respectively. The film-forming surface of each substrate was cleaned to remove surface contamination, and then placed in a vacuum chamber. -6 In a vacuum of the Pa range, the bonding surfaces of each substrate were irradiated with a high-speed Ar neutral atom beam (accelerating voltage 1 kV, Ar flow rate 60 sccm) for 70 seconds. After irradiation, each substrate was left to cool for 10 minutes, and then the InP wafer and quartz glass wafer were brought into contact with each other at their beam-irradiated surfaces, and then the two substrates were bonded together by applying a pressure of 4.90 kN for 2 minutes. In other words, the quartz glass wafer and the InP wafer with a SiO2 layer were directly bonded via the tantalum oxide layer (bonding area). After bonding, the quartz glass wafer was polished to a thickness of 150 μm to form a composite wafer. No defects such as peeling were observed at the bonding interface. Next, an amorphous silicon film was formed on the upper surface of the quartz glass plate to a thickness of 0.1 μm as a bonding layer. After film formation, the amorphous silicon film was polished and flattened. Here, the arithmetic mean roughness of the surface of the amorphous silicon film was measured using an atomic force microscope and found to be 0.2 nm over a 10 μm square. Similarly to Example 1, a 3-inch silicon wafer (semiconductor substrate) with a thickness of 525 μm was prepared, and direct bonding was performed between the silicon wafer and the quartz glass plate / InP composite substrate. That is, the silicon wafer and the quartz glass plate were directly bonded via an amorphous silicon layer (bonding portion). The direct bonding was performed in the same manner as in Example 1. Next, in the same manner as in Example 1, periodic holes were formed in the silicon wafer to form a photonic crystal (two-dimensional photonic crystal slab, line substrate), and then a coplanar electrode pattern was formed on the two-dimensional photonic crystal slab. In this way, a waveguide element was fabricated. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0064] Example 9 A waveguide element was fabricated in the same manner as in Example 1, except that periodic holes with a period of 160 μm and a hole radius of 72 μm and via holes were formed in a silicon wafer, and the line substrate was configured as an effective dielectric medium. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0065] Example 10 A waveguide element was fabricated in the same manner as in Example 2, except that periodic holes with a period of 160 μm and a hole radius of 72 μm and via holes were formed in a silicon wafer, and the line substrate was formed as an effective dielectric medium. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0066] Example 11 Except for changing the width dimension of the recess so that the cavity was formed only directly below the line-defect waveguide, a waveguide element was fabricated in the same manner as in Example 1. That is, in the waveguide element of Example 11, the cavity was arranged so as not to overlap with multiple holes. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0067] Example 12 A waveguide element was fabricated in the same manner as in Example 2, except that the width dimension of the recess was changed so that the cavity was formed only directly below the line-defect waveguide and the resonator. That is, in the waveguide element of Example 12, the cavity was arranged so as not to overlap with multiple holes. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0068] Example 13 A waveguide element was fabricated in the same manner as in Example 1, except that the silicon wafer used as the semiconductor substrate was changed to a SiC wafer. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0069] Example 14 A waveguide element was fabricated in the same manner as in Example 2, except that the silicon wafer used as the semiconductor substrate was changed to a SiC wafer. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0070] <Reference example 1> A two-dimensional photonic crystal slab on which a coplanar electrode pattern was formed was used as a waveguide element in the same manner as in Example 1, except that the line substrate was not bonded to a support substrate. The obtained waveguide element was held so that the external environment on both the top and bottom of the line substrate was air, and a separately prepared resonant tunneling diode (active element) was coupled to the input side of the photonic crystal element, and a receiving antenna and RF signal receiver were coupled to the output side of the line defect waveguide. Next, the propagation loss of the director element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0071] <Comparative Example 1> A waveguide element was fabricated in the same manner as in Example 1, except that no recess was formed in the silicon wafer and the waveguide element did not have a cavity as a low dielectric constant portion. The propagation loss of the obtained waveguide element was calculated and evaluated in the same manner as in Example 1. The results are shown in Table 1.

[0072] [Table 1]

[0073] As is clear from Table 1, even the waveguide element of Reference Example 1, which does not have a support substrate, exhibits excellent low propagation loss performance when used with the external environment on both the top and bottom sides of the line substrate held in place so that it is air. However, as shown in Comparative Example 1, when the waveguide element of Reference Example 1 is mounted on a support substrate, it is found that the propagation loss of the waveguide element increases significantly unless there is a low-dielectric portion. In contrast, the waveguide element of the embodiment of the present invention has a low dielectric constant portion, so even if the line substrate is mounted (supported) on a support substrate, the propagation loss is small and excellent low propagation loss performance can be ensured. [Industrial Applicability]

[0074] The waveguide element according to the embodiment of the present invention can be used in a wide range of fields, such as waveguides, next-generation high-speed communications, sensors, laser processing, and solar power generation, and is particularly suitable for use as a waveguide for millimeter waves to terahertz waves. Such a waveguide element can be used, for example, in an antenna, a bandpass filter, a coupler, a delay line (phase shifter), or an isolator. [Explanation of symbols]

[0075] 10. Semiconductor substrate 12 Vacancies 16 Waveguide 30 Support substrate 31 Recess 40 Active elements 80 Low dielectric constant part 100 Waveguide element 101 Waveguide element 102 Waveguide element

Claims

1. a line substrate formed by periodically forming holes in a semiconductor substrate; a waveguide in which electromagnetic waves are confined and propagated by the holes; a low-dielectric-constant portion having a dielectric constant smaller than that of the line substrate, the low-dielectric-constant portion overlapping the waveguide in a thickness direction of the line substrate; a support substrate provided below the line substrate and supporting the line substrate; Equipped with The dimension of the low dielectric constant portion in the thickness direction of the line substrate satisfies the following formula (1): A waveguide element that guides electromagnetic waves with a frequency of 30 GHz or more and 20 THz or less. T ≥ √ε × D / 10 (1) (In the formula, T represents the dimension of the low dielectric constant portion in the thickness direction of the line substrate, ε represents the dielectric constant of the line substrate at 300 GHz, and D represents the thickness of the line substrate.)

2. A line substrate formed by periodically forming holes in a semiconductor substrate; a waveguide in which electromagnetic waves are confined and propagated by the holes; a low-dielectric-constant portion having a dielectric constant smaller than that of the line substrate, the low-dielectric-constant portion overlapping the waveguide in a thickness direction of the line substrate; a support substrate provided below the line substrate and supporting the line substrate; Equipped with a dimension of the low dielectric constant portion in a thickness direction of the line substrate is 20 μm or more and 500 μm or less; A waveguide element that guides electromagnetic waves with a frequency of 30 GHz or more and 20 THz or less.

3. 3. The waveguide element according to claim 1, wherein the dimension of the low dielectric constant portion in the thickness direction of the line substrate is between 1 / 10 and 1 / 5 of the wavelength λ of the electromagnetic wave guided by the waveguide.

4. 3. A waveguide element according to claim 1, comprising an active element capable of at least one of transmitting, receiving and amplifying the electromagnetic wave, the active element being supported by the support substrate.

5. the semiconductor substrate is made of silicon, 3. The waveguide element according to claim 1, wherein the support substrate is made of at least one material selected from the group consisting of indium phosphide, silicon, aluminum nitride, silicon carbide, and silicon nitride.

6. The waveguide element according to claim 1 , wherein the low dielectric constant portion is a cavity.

7. The waveguide element according to claim 6 , wherein the line substrate is directly bonded to the support substrate.

8. The waveguide element according to claim 7 , wherein the support substrate has a recess, and the cavity is defined by the lower surface of the line substrate and the recess of the support substrate.

9. an insulating layer located between the line substrate and the support substrate; The waveguide element according to claim 6 , wherein the cavity is defined by the lower surface of the line substrate, the upper surface of the support substrate, and the insulating layer.

10. 3. The waveguide element according to claim 1, wherein the line substrate is made of a photonic crystal or an effective dielectric medium.

11. 3. The waveguide element according to claim 1, wherein a resonator and / or an antenna made of a photonic crystal is formed on the line substrate.

12. 3. The waveguide element according to claim 1, wherein the low dielectric constant portion overlaps not only the waveguide but also all the holes in the thickness direction of the line substrate.

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