Dispersion measurement device and dispersion measurement method

Abstract

To provide a device and method with which it is possible to measure the amount of wavelength dispersion of a measurement object with good accuracy.SOLUTION: A dispersion measuring device 1A comprises a pulse formation unit 3, a light detection unit 4, and a computation unit 5b. The pulse formation unit 3 has a SLM for presenting a phase pattern that adds a prescribed per-wavelength phase shift to a light pulse Pa and forms, from the light pulse Pa, a light pulse train Pb that includes light pulses Pb1, Pb2 having a mutual time difference and mutually differing in center wavelength. The light detection unit 4 detects a time waveform of the light pulse train Pb. The computation unit 5b is electrically connected to the light detection unit 4. An optical component 7 is arranged on the optical path between the pulse formation unit 3 and the light detection unit 4. The computation unit 5b estimates the wavelength dispersion amount of the optical component 7 on the basis of the feature quantity of the time waveform. The phase pattern of the SLM includes a pattern for adding, to the light pulse Pa, a group delay dispersion which is of the reverse sign to the group delay dispersion of the optical component 7.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a dispersion measurement device and a dispersion measurement method. [Background technology]

[0002] Patent Document 1 describes a dispersion measurement device and a dispersion measurement method capable of measuring the amount of chromatic dispersion of a pulsed laser light source. In these devices and methods, an optical pulse train including a plurality of optical pulses having a time difference and different center wavelengths is formed from an optical pulse to be measured output from a pulsed laser light source, the optical pulse train is incident on a correlation optical system, the correlation optical system outputs correlated light including cross-correlation or autocorrelation of the optical pulse train, the time waveform of the correlated light is detected, and the amount of chromatic dispersion of the pulsed laser light source is estimated from features of the detected time waveform of the correlated light. Furthermore, by inserting an object to be measured, such as an optical component, into the optical system, the amount of chromatic dispersion of the object to be measured can also be measured from the time waveform of the correlated light. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-169946 Summary of the Invention [Problem to be solved by the invention]

[0004] When measuring the amount of chromatic dispersion of an object to be measured, multiple optical pulses with different center wavelengths and a time difference between them are transmitted through the object to be measured. Then, the amount of chromatic dispersion of the object to be measured can be estimated based on the time waveforms (e.g., peak intervals) of the multiple optical pulses after passing through the object to be measured. However, when the optical pulses pass through the object to be measured, the pulse width of the optical pulses gradually widens and the peak intensity of the optical pulses gradually decreases due to the chromatic dispersion of the object to be measured. The wider the pulse width of the optical pulses in the object to be measured, the lower the accuracy of detecting the peak intervals of the optical pulses. Furthermore, the lower the peak intensity of the optical pulses in the object to be measured, the lower the accuracy of detecting the time waveform of the optical pulses. If the intensity falls below the detection threshold of the photodetector, the optical pulses may not be detected. Therefore, the amount of chromatic dispersion of the object to be measured may not be measured accurately.

[0005] An object of one aspect of the present invention is to provide a dispersion measurement device and a dispersion measurement method that can accurately measure the amount of chromatic dispersion of an object to be measured. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems, a dispersion measurement device according to one aspect of the present invention is an apparatus for measuring the amount of chromatic dispersion of an object to be measured having positive or negative group delay dispersion, and includes a light source, a pulse forming unit, an optical detector, and a calculation unit. The light source outputs a first optical pulse. The pulse forming unit has a spatial light modulator that provides a phase pattern for generating modulated light by imparting a predetermined phase shift for each wavelength to the first optical pulse, and forms an optical pulse train from the first optical pulse, which is modulated light including a plurality of second optical pulses that have a time difference from one another and different center wavelengths. The optical detector detects the time waveform of the optical pulse train. The calculation unit is electrically connected to the optical detector. The object to be measured is placed on an optical path between the light source and the pulse forming unit, or on an optical path between the pulse forming unit and the optical detector. The calculation unit estimates the amount of chromatic dispersion of the object to be measured based on feature quantities of the time waveform. The phase pattern includes a pattern for imparting group delay dispersion of an opposite sign to the group delay dispersion of the object to be measured.

[0007] A dispersion measurement method according to one aspect of the present invention is a method for measuring the amount of chromatic dispersion of an object to be measured having positive or negative group delay dispersion, and includes an output step, a pulse forming step, a detection step, and a calculation step. In the output step, a first optical pulse is output. In the pulse forming step, an optical pulse train is formed from the first optical pulse using a spatial light modulator that provides a phase pattern for generating modulated light by imparting a predetermined phase shift for each wavelength to the first optical pulse. The optical pulse train is modulated light including a plurality of second optical pulses having different center wavelengths and a time difference from each other. In the detection step, the time waveform of the optical pulse train is detected. In the calculation step, the amount of chromatic dispersion of the object to be measured is estimated. In the pulse forming step, an optical pulse train is formed from the first optical pulse that has passed through the object to be measured, or in the detection step, the time waveform of the optical pulse train that has passed through the object to be measured is detected. In the calculation step, the amount of chromatic dispersion of the object to be measured is estimated based on a feature of the time waveform. The phase pattern includes a pattern for imparting group delay dispersion of an opposite sign to the group delay dispersion of the object to be measured.

[0008] In these devices and methods, the pulse forming unit (pulse forming step) imparts group delay dispersion of an opposite sign to the group delay dispersion of the object to be measured to the first optical pulse. As a result, the peak intensity of the multiple second optical pulses incident on the object to be measured temporarily decreases and the pulse width temporarily widens. However, after these second optical pulses enter the object to be measured and before they are emitted from the object to be measured, the group delay dispersion of the object to be measured increases the peak intensity of each second optical pulse and decreases the pulse width of each second optical pulse. Thus, according to the above devices and methods, the pulse width of the second optical pulses emitted from the object to be measured decreases, thereby suppressing a decrease in the accuracy of detecting the peak intervals between the multiple second optical pulses. Furthermore, the peak intensity of the multiple second optical pulses emitted from the object to be measured increases, thereby suppressing a decrease in the accuracy of detecting the time waveform of the optical pulse train. Therefore, the amount of chromatic dispersion of the object to be measured can be measured with high accuracy.

[0009] In the above device, the optical detection unit may have a correlation optical system that receives an optical pulse train and outputs correlated light including cross-correlation or auto-correlation of the optical pulse train, and may detect the time waveform of the correlated light instead of the time waveform of the optical pulse train. The calculation unit may estimate the amount of chromatic dispersion of the object to be measured based on a feature of the time waveform of the correlated light. Similarly, in the above method, the detection step may generate correlated light including cross-correlation or auto-correlation of the optical pulse train, and may detect the time waveform of the correlated light instead of the time waveform of the optical pulse train. The calculation step may estimate the amount of chromatic dispersion of the object to be measured based on a feature of the time waveform of the correlated light. According to these devices and methods, the time waveform of an optical pulse train can be measured even when, for example, the multiple second optical pulses are ultrashort pulses on the order of femtoseconds. Therefore, the amount of chromatic dispersion of the object to be measured can be measured with even greater accuracy using ultrashort pulses.

[0010] In the above-described device and method, the absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern may be within a predicted range of the absolute value of the group delay dispersion of the object to be measured. In this case, the absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern can be made closer to the absolute value of the group delay dispersion of the object to be measured. Therefore, the pulse width of the second optical pulse can be made smaller in the object to be measured, and a decrease in the accuracy of detecting the peak intervals of the plurality of second optical pulses can be further suppressed. Furthermore, the peak intensities of the plurality of second optical pulses in the object to be measured can be further increased, and a decrease in the accuracy of detecting the time waveform of the optical pulse train can be further suppressed.

[0011] In the above-described device and method, the absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern may be equal to the absolute value of the group delay dispersion in the design of the object to be measured. In this case, too, the absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern can be made closer to the absolute value of the group delay dispersion of the object to be measured. Therefore, the pulse width of the second optical pulse can be made smaller in the object to be measured, further suppressing a decrease in the accuracy of detecting the peak intervals of the plurality of second optical pulses. Furthermore, the peak intensities of the plurality of second optical pulses in the object to be measured can be made higher, further suppressing a decrease in the accuracy of detecting the time waveform of the optical pulse train.

[0012] In the above-described device, the object to be measured may be placed on the optical path between the pulse forming unit and the optical detection unit. Furthermore, in the detection step of the above-described method, the time waveform of the optical pulse train transmitted through the object to be measured may be detected. According to the above-described device and method, the object to be measured can be placed at any position on the optical path, for example, as described above. Therefore, the spatial design of the device has a high degree of freedom, and it is possible to design the device to be compact and to improve convenience, such as making it easier to attach and remove the object to be measured.

[0013] In the above-described apparatus and method, the wavelength characteristic of the spectral phase imparted to the first optical pulse by the phase pattern may be symmetric about the central wavelength of the first optical pulse, and may have a characteristic in which the spectral phase increases and then decreases with increasing distance from the central wavelength. For example, by presenting such a phase pattern to a spatial light modulator, it is possible to suitably impart negative group delay dispersion to the first optical pulse.

[0014] In the above-described device and method, the wavelength characteristic of the spectral phase imparted to the first optical pulse by the phase pattern may be symmetric with respect to the central wavelength of the first optical pulse, and may have a characteristic in which the spectral phase decreases and then increases with increasing distance from the central wavelength. For example, by presenting such a phase pattern to the spatial light modulator, it is possible to suitably impart positive group delay dispersion to the first optical pulse.

[0015] The device may further include a control unit that stores a first phase pattern for imparting positive group delay dispersion to the first optical pulse and a second phase pattern for imparting negative group delay dispersion to the first optical pulse, and selectively outputs the first phase pattern and the second phase pattern to the spatial light modulator. In this case, the phase pattern can be easily switched between when the object to be measured has positive group delay dispersion and when the object to be measured has negative group delay dispersion. [Effects of the Invention]

[0016] According to a dispersion measurement device and a dispersion measurement method according to one aspect of the present invention, the amount of chromatic dispersion of an object to be measured can be measured with high accuracy. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a diagram illustrating a schematic configuration of a dispersion measurement device according to an embodiment. [Figure 2] FIG. 2 is a diagram illustrating a configuration example of a pulse forming section. [Figure 3] FIG. 2 is a diagram showing a modulation surface of a spatial light modulator. [Figure 4] These are diagrams showing examples of band-controlled multipulses. (a) is a spectrogram. (b) shows the time waveform of an optical pulse train. (c) shows the spectrum obtained by combining two optical pulses. [Figure 5] As a comparative example, this figure shows an example of a multipulse without bandwidth control. (a) is a spectrogram. (b) shows the time waveform of an optical pulse train. (c) shows the spectrum obtained by combining two optical pulses. [Figure 6] FIG. 10 is a diagram showing a spectral waveform given to an optical pulse by a phase pattern, in which negative group delay dispersion is given to the optical pulse. [Figure 7] FIG. 10 is a diagram showing a spectral waveform given to an optical pulse by a phase pattern, in which positive group delay dispersion is given to the optical pulse. [Figure 8]10 is a graph showing an example of the relationship between the group delay dispersion of an optical pulse train and the peak intensity and pulse width in the time waveform of the optical pulse. [Figure 9] 10 is a graph showing an example of a time waveform of a pulse train output from a pulse forming section of an embodiment. [Figure 10] 10 is a graph showing, as a comparative example, an example of the time waveform of a pulse train output from a pulse forming section when no group delay dispersion is given to optical pulses in a spatial light modulator. [Figure 11] 10 is a graph showing an example of a time waveform of a pulse train after passing through an optical component. [Figure 12] FIG. 2 is a diagram illustrating an example of the configuration of a correlation optical system. [Figure 13] FIG. 1 is a diagram schematically illustrating a correlation optical system for generating correlation light including autocorrelation of an optical pulse train, as an example of the configuration of the correlation optical system. [Figure 14] FIG. 10 is a diagram schematically illustrating a correlation optical system for generating correlation light including the cross-correlation of optical pulse trains, as another configuration example of the correlation optical system. [Figure 15] FIG. 10 is a diagram schematically illustrating a correlation optical system for generating correlation light including the cross-correlation of optical pulse trains, as yet another configuration example of the correlation optical system. [Figure 16] 10 is a graph showing an example of the time waveform of correlated light output from a correlation optical system in a state where no optical component is arranged in one embodiment. [Figure 17] 10 is a graph showing, as a comparative example, an example of the time waveform of correlated light output from a correlation optical system with no optical components arranged when group delay dispersion is not applied to the optical pulse in the spatial light modulator. [Figure 18] 10 is a graph showing an example of a time waveform of correlated light when an optical component is arranged in an embodiment. [Figure 19] FIG. 2 is a diagram illustrating an example of the hardware configuration of a control device. [Figure 20] 1 is a flowchart illustrating a dispersion measurement method. [Figure 21] 1A is a diagram showing an example of the spectral waveform of a single light pulse, and FIG. 1B is a diagram showing the time intensity waveform of the light pulse. [Figure 22] 1A is a diagram showing the spectral waveform of output light from a pulse forming unit when a rectangular wave-shaped phase spectrum modulation is applied in a spatial light modulator, and FIG. 1B is a diagram showing the temporal intensity waveform of the output light. [Figure 23] FIG. 1 is a diagram showing the configuration of a modulation pattern calculation device that calculates a modulation pattern of a spatial light modulator. [Figure 24] FIG. 2 is a block diagram showing the internal configuration of a phase spectrum design unit and an intensity spectrum design unit. [Figure 25] FIG. 10 is a diagram illustrating a procedure for calculating a phase spectrum by an iterative Fourier transform method. [Figure 26] FIG. 10 is a diagram illustrating a procedure for calculating a phase spectrum function in a phase spectrum design unit. [Figure 27] FIG. 10 is a diagram showing a procedure for calculating the spectral intensity in the intensity spectrum design unit. [Figure 28] FIG. 10 is a diagram showing an example of a procedure for generating a target spectrogram in a target generation unit. [Figure 29] FIG. 10 is a diagram illustrating an example of a procedure for calculating an intensity spectrum function. [Figure 30] 1A and 1B are diagrams showing a spectrogram and a target spectrogram obtained by changing the spectrogram, respectively; [Figure 31] 1A and 1B are diagrams showing the time waveform of an optical pulse before it is incident on an optical component and the time waveform of an optical pulse that has passed through the optical component. [Figure 32] 10A and 10B are diagrams showing the time waveform of correlated light when no optical component is provided and the time waveform of correlated light when an optical component is provided. [Figure 33] 10 is a graph showing an example of the relationship between group delay dispersion of an optical component and the pulse width of correlated light. [Figure 34] 10 is a graph showing an example of the relationship between group delay dispersion of an optical component and the peak intensity of correlated light. [Figure 35]10 is a diagram illustrating an example of the relationship between the group delay dispersion of an optical component and the amount of change in the peak interval of correlation light when an optical pulse incident on the optical component does not have group delay dispersion. FIG. [Figure 36] 10 is a graph showing the relationship between the absolute value of group delay dispersion of an optical component and the rate of change of the peak interval of correlation light with respect to the group delay dispersion of the optical component. [Figure 37] 10A and 10B are diagrams illustrating a shift in the relationship between the group delay dispersion of an optical component and the amount of change in the peak interval of correlation light. [Figure 38] FIG. 10 is a diagram showing the configuration of a dispersion measurement device according to a first modified example. [Figure 39] FIG. 10 is a diagram showing the configuration of a second modified example. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, embodiments of a dispersion measuring device and a dispersion measuring method according to the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted.

[0019] FIG. 1 is a diagram illustrating a schematic configuration of a dispersion measurement apparatus 1A according to one embodiment of the present invention. This dispersion measurement apparatus 1A measures the amount of chromatic dispersion of an optical component 7 to be measured, and includes a pulse laser light source 2 (light source), a pulse forming unit 3, an optical detector 4, and a control device 5. The optical input end 3a of the pulse forming unit 3 is optically coupled to the pulse laser light source 2, either spatially or via an optical waveguide such as an optical fiber. The optical component 7 is disposed on an optical path between the pulse forming unit 3 and the optical detector 4. The optical input end 7a of the optical component 7 is optically coupled to the optical output end 3b of the pulse forming unit 3, either spatially or via an optical waveguide such as an optical fiber. The optical input end 4a of the optical detector 4 is optically coupled to the optical output end 7b of the optical component 7, either spatially or via an optical waveguide such as an optical fiber. The optical detector 4 is a correlator and includes a correlation optical system 40 and a detector 400. The optical input end of the correlation optical system 40 constitutes the optical input end 4a of the optical detector 4. An optical output end 40b of the correlation optical system 40 is optically coupled to a detector 400 either spatially or via an optical waveguide such as an optical fiber. A control device 5 is electrically connected to the pulse forming unit 3 and the detector 400. The control device 5 has a control unit 5a, a calculation unit 5b, an input unit 5c, and an output unit 5d.

[0020] The pulsed laser light source 2 outputs a coherent optical pulse Pa (first optical pulse). The pulsed laser light source 2 is, for example, a femtosecond laser, and in one embodiment, is a solid-state laser light source such as a LD directly pumped Yb:YAG pulsed laser. The time waveform of the optical pulse Pa is, for example, a Gaussian function. The full width at half maximum (FWHM) of the optical pulse Pa is, for example, in the range of 10 fs to 10,000 fs, and in one example, is 100 fs. This optical pulse Pa is an optical pulse having a certain bandwidth and includes multiple continuous wavelength components. In one embodiment, the bandwidth of the optical pulse Pa is 10 nm, and the center wavelength of the optical pulse Pa is 1030 nm.

[0021] The pulse shaping unit 3 forms an optical pulse train Pb from an optical pulse Pa, which includes optical pulses Pb1 and Pb2 (plurality of second optical pulses) that have a time difference from each other and different center wavelengths. The optical pulse train Pb is a group of single pulses generated using each of a plurality of wavelength bands that are obtained by dividing the spectrum that constitutes the optical pulse Pa into a plurality of wavelength bands. Note that there may be overlapping portions at the boundaries between the plurality of wavelength bands. In the following description, the optical pulse train Pb may be referred to as a "band-controlled multi-pulse."

[0022] FIG. 2 is a diagram showing an example of the configuration of the pulse shaping unit 3. This pulse shaping unit 3 includes a diffraction grating 12, a lens 13, a spatial light modulator (SLM) 14, a lens 15, and a diffraction grating 16. The diffraction grating 12 is a dispersing element in this embodiment and is optically coupled to the pulse laser light source 2. The SLM 14 is optically coupled to the diffraction grating 12 via the lens 13. The diffraction grating 12 spatially separates the multiple wavelength components contained in the optical pulse Pa into individual wavelengths. Note that other optical components such as a prism may be used as the dispersing element instead of the diffraction grating 12. The optical pulse Pa is incident obliquely on the diffraction grating 12 and is dispersed into multiple wavelength components. The light P1 containing these multiple wavelength components is condensed by the lens 13 into each wavelength component and formed into an image on the modulation surface of the SLM 14. The lens 13 may be a convex lens made of a light-transmitting member or a concave mirror having a concave light-reflecting surface.

[0023] The SLM 14 applies a predetermined phase shift for each wavelength to the optical pulse Pa to convert the optical pulse Pa into an optical pulse train Pb (modulated light). Specifically, the SLM 14 receives a control signal from the control unit 5a (see FIG. 1) to apply a phase shift to the optical pulse Pa to generate the optical pulse train Pb. The SLM 14 presents a phase pattern in response to the control signal output from the control unit 5a. The SLM 14 simultaneously performs phase modulation and intensity modulation of the light P1 using the presented phase pattern. In this manner, the SLM 14 mutually shifts the phases of the multiple wavelength components output from the diffraction grating 12. Note that the SLM 14 may perform only phase modulation or only intensity modulation. The SLM 14 is, for example, a phase modulation type. In one embodiment, the SLM 14 is an LCOS (Liquid Crystal on Silicon) type. Note that although a transmissive SLM 14 is shown in the drawings, the SLM 14 may also be a reflective type.

[0024] FIG. 3 is a diagram showing the modulation surface 17 of the SLM 14. As shown in FIG. 3, on the modulation surface 17, multiple modulation regions 17a are arranged along a certain direction A, and each modulation region 17a extends in a direction B intersecting with direction A. Direction A is the direction of light dispersion by the diffraction grating 12. This modulation surface 17 functions as a Fourier transform plane, and each of the multiple modulation regions 17a is incident on a corresponding wavelength component after dispersion. The SLM 14 modulates the phase and intensity of each incident wavelength component in each modulation region 17a independently from the other wavelength components. Note that since the SLM 14 of this embodiment is a phase modulation type, intensity modulation is achieved by a phase pattern (phase image) presented on the modulation surface 17.

[0025] Each wavelength component of modulated light P2 modulated by SLM 14 is focused to a single point on diffraction grating 16 by lens 15. In this case, lens 15 functions as a focusing optical system that focuses modulated light P2. Lens 15 may be a convex lens made of a light-transmitting member, or a concave mirror with a concave light-reflecting surface. In addition, diffraction grating 16 functions as a combining optical system that combines each wavelength component after modulation. In other words, lens 15 and diffraction grating 16 focus and combine the multiple wavelength components of modulated light P2 together to form a bandwidth-controlled multi-pulse (optical pulse train Pb).

[0026] FIG. 4 is a diagram showing an example of a band-controlled multipulse. This example shows an optical pulse train Pb consisting of optical pulses Pb1 and Pb2. FIG. 4(a) is a spectrogram showing time on the horizontal axis and wavelength on the vertical axis, with light intensity represented by color shading. FIG. 4(b) shows the time waveform of the optical pulse train Pb. The time waveform of each optical pulse Pb1, Pb2 is, for example, a Gaussian function. As shown in FIGS. 4(a) and 4(b), the peaks of the optical pulses Pb1, Pb2 are separated from each other in time, and the propagation timings of the optical pulses Pb1, Pb2 are shifted from each other. In other words, one optical pulse Pb1 is delayed in time with respect to another optical pulse Pb2, and the optical pulses Pb1, Pb2 have a time difference from each other. The optical pulses Pb1 and Pb2 have different center wavelengths. The central wavelength of the optical pulse Pb1 is, for example, 1560 nm, and the central wavelength of the optical pulse Pb2 is, for example, 1540 nm. The time interval (peak interval) between the optical pulses Pb1 and Pb2 is, for example, within a range of 10 fs to 10,000 fs, and is, for example, 2,000 fs. The FWHM of the optical pulses Pb1 and Pb2 is, for example, within a range of 10 fs to 5,000 fs, and is, for example, 300 fs.

[0027] FIG. 4(c) shows the spectrum obtained by combining two optical pulses Pb1 and Pb2. As shown in FIG. 4(c), the spectrum obtained by combining two optical pulses Pb1 and Pb2 has a single peak. However, as shown in FIG. 4(a), the center wavelengths of the two optical pulses Pb1 and Pb2 are offset from each other. The single peak shown in FIG. 4(c) roughly corresponds to the spectrum of optical pulse Pa. The peak wavelength interval between adjacent optical pulses Pb1 and Pb2 is determined by the spectral bandwidth of optical pulse Pa and is generally within a range of twice the full width at half maximum. For example, when the full width at half maximum (FWHM), which is the spectral bandwidth of optical pulse Pa, is 10 nm, the peak wavelength interval is 10 nm. As a specific example, when the central wavelength of optical pulse Pa is 800 nm, the peak wavelengths of optical pulse Pb1 and optical pulse Pb2 can be 805 nm and 795 nm, respectively.

[0028] FIG. 5 shows an example of a non-band-controlled multipulse as a comparative example. In this example, an optical pulse train Pd consisting of two optical pulses Pd1 and Pd2 is shown. Similar to FIG. 4(a), FIG. 5(a) is a spectrogram in which the horizontal axis represents time and the vertical axis represents wavelength, and light intensity is represented by color shading. FIG. 5(b) shows the time waveform of the optical pulse train Pd. FIG. 5(c) shows the spectrum obtained by combining the two optical pulses Pd1 and Pd2. As shown in FIGS. 5(a) to 5(c), the peaks of the two optical pulses Pd1 and Pd2 are separated from each other in time, but the center wavelengths of the two optical pulses Pd1 and Pd2 are the same. The pulse shaping unit 3 of this embodiment does not generate such an optical pulse train Pd, but generates an optical pulse train Pb having different center wavelengths, as shown in FIG. 4.

[0029] Referring again to FIG. 1, the optical component 7 receives the optical pulse train Pb output from the pulse shaping unit 3. The optical component 7 has positive or negative group delay dispersion (GDD). In this embodiment, the magnitude of the group delay dispersion of the optical component 7 to be measured is unknown before measurement, but the sign of the group delay dispersion of the optical component 7 is assumed to be clear before measurement. The sign of the group delay dispersion matches the sign of the group velocity dispersion, which is the group delay dispersion per unit length. The optical pulse train Pb that has passed through the optical component 7 is output from the optical output end 7b.

[0030] The optical component 7 is, for example, a light-guiding member such as an optical fiber or an optical waveguide. Examples of optical fibers include single-mode fibers, multimode fibers, rare-earth-doped fibers, photonic crystal fibers, dispersion-shifted fibers, and double-clad fibers. Examples of optical waveguides include semiconductor microwaveguides such as SiN or InP. Alternatively, the optical component 7 may be, for example, a semiconductor or dielectric optical crystal. In this case, the optical component 7 may be diamond, SiO2, LiNbO3, LiTaO3, PLZT, Si, Ge, fullerene, graphite, graphene, carbon nanotubes, GaN, GaAs, a magnetic material, an organic material, a polymer material, or the like.

[0031] The phase pattern presented on modulation surface 17 of SLM 14 is a phase pattern for generating optical pulse train Pb, superimposed with a phase pattern for imparting to optical pulse Pa group delay dispersion of an opposite sign to the group delay dispersion possessed by optical component 7 (i.e., for making optical pulse train Pb have group delay dispersion of an opposite sign to the group delay dispersion possessed by optical component 7). Specifically, if optical component 7 has positive group delay dispersion, the phase pattern imparts to optical pulse Pa negative group delay dispersion. Also, if optical component 7 has negative group delay dispersion, the phase pattern imparts to optical pulse Pa positive group delay dispersion.

[0032] 6 and 7 show examples of spectral waveforms (spectral phase G11 and spectral intensity G12) imparted to optical pulse Pa by phase patterns. In FIGS. 6 and 7, the horizontal axis represents wavelength (nm), the left vertical axis represents spectral intensity values ​​(arbitrary units), and the right vertical axis represents spectral phase values ​​(rad). The spectral waveform shown in FIG. 6 shows a case where negative group delay dispersion is imparted to optical pulse Pa. The spectral waveform shown in FIG. 7 shows a case where positive group delay dispersion is imparted to optical pulse Pa.

[0033] In the spectral waveform shown in Figure 6, the wavelength characteristic of the spectral phase G11 is symmetrical with respect to the center wavelength of the optical pulse Pa, and the spectral phase smoothly increases and then decreases with increasing distance from the center wavelength. The slope of the spectral phase G11 is discontinuous at the center wavelength and continuous at other wavelengths. In the illustrated example, the center wavelength of the spectral phase G11 is 800 nm, and the spectral phase G11 has maximum values ​​near 783 nm and 817 nm. For example, by presenting such a phase pattern to the modulation surface 17, it is possible to convert the optical pulse Pa into an optical pulse train Pb and simultaneously impart negative group delay dispersion to the optical pulse Pa.

[0034] 7, the wavelength characteristic of the spectral phase G11 is symmetrical with respect to the center wavelength of the optical pulse Pa, and the spectral phase smoothly decreases and then increases with increasing distance from the center wavelength. The slope of the spectral phase G11 is discontinuous at the center wavelength and continuous at other wavelengths. In the illustrated example, the center wavelength of the spectral phase G11 is 800 nm, and the spectral phase G11 has minimum values ​​near 783 nm and 817 nm. For example, by presenting such a phase pattern to the modulation surface 17, it is possible to convert the optical pulse Pa into an optical pulse train Pb and simultaneously impart positive group delay dispersion to the optical pulse Pa.

[0035] The control unit 5a may store a first phase pattern for imparting positive group delay dispersion to the optical pulse Pa and a second phase pattern for imparting negative group delay dispersion to the optical pulse Pa, and selectively output the first phase pattern and the second phase pattern to the SLM 14. In this case, the control unit 5a may obtain information regarding the sign of the group delay dispersion of the optical component 7 via the input unit 5c.

[0036] It is desirable that the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern be close to the absolute value of the group delay dispersion possessed by the optical component 7. For example, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern may be within a predicted range (e.g., within a tolerance) of the absolute value of the group delay dispersion possessed by the optical component 7. Alternatively, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern may be equal to the absolute value of the group delay dispersion of the optical component 7 in terms of design.

[0037] Here, we will explain the change in the time waveform of the optical pulse train Pb caused by group delay dispersion. Fig. 8 is a graph showing an example of the relationship between the group delay dispersion of the optical pulse train Pb and the peak intensity and pulse width in the time waveform of the optical pulses Pb1 and Pb2. In Fig. 8, the left vertical axis indicates the peak intensity (arbitrary unit) of the optical pulses Pb1 and Pb2, and the right vertical axis indicates the pulse width (unit: fs) of the optical pulses Pb1 and Pb2. The horizontal axis indicates the group delay dispersion (unit: fs) of the optical pulse train Pb. 2 ) in the figure. The white circle plot D11 in the figure indicates the peak intensity of the optical pulses Pb1 and Pb2, and the black square plot D12 in the figure indicates the pulse width of the optical pulses Pb1 and Pb2. In the description of this embodiment, the "peak intensity of an optical pulse" and the "pulse width of an optical pulse" mean the peak intensity and pulse width of an optical pulse in the time domain, unless otherwise specified.

[0038] As shown in Fig. 8, the peak intensity and pulse width of the optical pulses Pb1 and Pb2 depend on the group delay dispersion. That is, when the group delay dispersion is zero, the peak intensity of the optical pulses Pb1 and Pb2 is maximum and the pulse width is minimum. As the absolute value of the group delay dispersion increases, the peak intensity of the optical pulses Pb1 and Pb2 decreases and the pulse width increases.

[0039] In this embodiment, first, positive or negative group delay dispersion is imparted to the optical pulse Pa in the SLM 14. When positive group delay dispersion is imparted to the optical pulse Pa, the optical pulse train Pb has positive group delay dispersion, and the peak intensities of the optical pulses Pb1 and Pb2 change in the direction of arrow B11 shown in FIG. 8, and the pulse widths of the optical pulses Pb1 and Pb2 change in the direction of arrow B12. When negative group delay dispersion is imparted to the optical pulse Pa, the optical pulse train Pb has negative group delay dispersion, and the peak intensities of the optical pulses Pb1 and Pb2 change in the direction of arrow B21 shown in FIG. 8, and the pulse widths of the optical pulses Pb1 and Pb2 change in the direction of arrow B22. Therefore, in either case, the peak intensities of the optical pulses Pb1 and Pb2 decrease and the pulse widths increase.

[0040] When the SLM 14 applies group delay dispersion to the optical pulse Pa, the peak intensities of the optical pulses Pb1 and Pb2 in the time domain are reduced while the intensities of the optical pulses Pb1 and Pb2 in the spectral domain are maintained.

[0041] Next, when the optical pulse train Pb passes through the optical component 7, the optical pulse train Pb is given a group delay dispersion with an opposite sign to the group delay dispersion given to the optical pulse Pa by the SLM 14 by the optical component 7. When the optical component 7 gives a negative group delay dispersion to the optical pulse train Pb, the peak intensities of the optical pulses Pb1 and Pb2 change in the direction of arrow B31 shown in Fig. 8, and the pulse widths of the optical pulses Pb1 and Pb2 change in the direction of arrow B32. When the optical component 7 gives a positive group delay dispersion to the optical pulse train Pb, the peak intensities of the optical pulses Pb1 and Pb2 change in the direction of arrow B41 shown in Fig. 8, and the pulse widths of the optical pulses Pb1 and Pb2 change in the direction of arrow B42. Therefore, in either case, the peak intensities of the optical pulses Pb1 and Pb2 increase, and the pulse widths decrease.

[0042] The closer the absolute value of the group delay dispersion imparted to optical pulse Pa in SLM 14 is to the absolute value of the group delay dispersion imparted to optical pulse train Pb in optical component 7, the closer the group delay dispersion of optical pulse train Pb after passing through optical component 7 approaches zero. When the absolute value of the group delay dispersion imparted to optical pulse Pa in SLM 14 is equal to the absolute value of the group delay dispersion imparted to optical pulse train Pb in optical component 7, the group delay dispersion of optical pulse train Pb after passing through optical component 7 becomes zero, and therefore the peak intensities of optical pulses Pb1 and Pb2 become maximum and the pulse widths become minimum.

[0043] Fig. 9 is a graph showing an example of the time waveform of the optical pulse train Pb output from the pulse shaping section 3 of this embodiment. Fig. 10 is a graph showing, as a comparative example, an example of the time waveform of the optical pulse train Pb output from the pulse shaping section 3 when no group delay dispersion is imparted to the optical pulse Pa in the SLM 14. As shown in Figs. 9 and 10, it can be seen that when group delay dispersion is imparted to the optical pulse Pa in the SLM 14, the peak intensity of the optical pulses Pb1 and Pb2 decreases and the pulse width increases, compared to when no group delay dispersion is imparted to the optical pulse Pa in the SLM 14.

[0044] Fig. 11 is a graph showing an example of the time waveform (curve G21) of the optical pulse train Pb after it has passed through the optical component 7. Note that Fig. 11 also shows the time waveform (curve G22) of the optical pulse train Pb shown in Fig. 9. As shown in Fig. 11, it can be seen that the peak intensities of the optical pulses Pb1 and Pb2 become higher and the pulse widths become narrower after they have passed through the optical component 7, compared to before they have passed through the optical component 7.

[0045] The correlation optical system 40 shown in FIG. 1 receives an optical pulse train Pb transmitted through the optical component 7 and outputs correlation light Pc, which is the cross-correlation or autocorrelation of the optical pulse train Pb. FIG. 12 illustrates an exemplary configuration of the correlation optical system 40. The correlation optical system 40 may include a lens 41, an optical element 42, and a lens 43. The lens 41 is provided on the optical path between the pulse shaping unit 3 (see FIG. 1) and the optical element 42 and focuses the optical pulse train Pb output from the pulse shaping unit 3 onto the optical element 42. The optical element 42 is a light emitter that includes at least one of a nonlinear optical crystal that generates second harmonic generation (SHG) and a phosphor. Examples of nonlinear optical crystals include KTP (KTiOPO) crystal, LBO (LiBO) crystal, and BBO (β-BaBO) crystal. Examples of phosphors include coumarin, stilbene, and rhodamine. The optical element 42 receives the optical pulse train Pb and generates correlated light Pc containing cross-correlation or auto-correlation of the optical pulse train Pb. The lens 43 collimates or focuses the correlated light Pc output from the optical element 42. The correlated light Pc is generated to detect the time waveform of the optical pulse train Pb with higher accuracy.

[0046] An example of the configuration of the correlation optical system 40 will now be described in detail. FIG. 13 is a schematic diagram illustrating a correlation optical system 40A, as an example of the configuration of the correlation optical system 40, for generating correlation light Pc including the autocorrelation of the optical pulse train Pb. This correlation optical system 40A has a beam splitter 44 as an optical branching component that branches the optical pulse train Pb into two. The beam splitter 44 is optically coupled to the pulse forming unit 3 shown in FIG. 1 and transmits a portion of the optical pulse train Pb input from the pulse forming unit 3 and reflects the remainder. The branching ratio of the beam splitter 44 is, for example, 1:1. One of the optical pulse trains Pba branched by the beam splitter 44 passes through an optical path 40c including multiple mirrors 45 and reaches a lens 41. The other optical pulse train Pbb branched by the beam splitter 44 passes through an optical path 40d including multiple mirrors 46 and reaches the lens 41. The optical lengths of the optical paths 40c and 40d are different from each other. Therefore, the multiple mirrors 45 and the multiple mirrors 46 constitute a delay optical system that imparts a time difference between one optical pulse train Pba and the other optical pulse train Pbb split by the beam splitter 44. Furthermore, at least a portion of the multiple mirrors 46 are mounted on a moving stage 47, making the optical length of the optical path 40d variable. Therefore, with this configuration, the time difference between the optical pulse trains Pba and Pbb can be varied.

[0047] In this example, the optical element 42 includes a nonlinear optical crystal. The lens 41 focuses each of the optical pulse trains Pba and Pbb toward the optical element 42, and also causes the optical axes of the optical pulse trains Pba and Pbb to intersect with each other at a predetermined angle in the optical element 42. As a result, in the optical element 42, which is a nonlinear optical crystal, a second harmonic is generated starting from the intersection of the optical pulse trains Pba and Pbb. This second harmonic is correlated light Pc, which includes the autocorrelation of the optical pulse train Pb. The correlated light Pc is collimated or focused by the lens 43 and then input to the detector 400.

[0048] 14 is a schematic diagram illustrating a correlation optical system 40B, as another example of the correlation optical system 40, for generating correlation light Pc including the cross-correlation of the optical pulse train Pb. In this correlation optical system 40B, the optical pulse train Pb reaches the lens 41 through an optical path 40e, while the reference optical pulse Pr, which is a single pulse, reaches the lens 41 through an optical path 40f. The optical path 40f includes multiple mirrors 48 and is bent in a U-shape. Furthermore, at least some of the multiple mirrors 48 are mounted on a moving stage 49, making the optical length of the optical path 40f variable. Therefore, with this configuration, the time difference between the optical pulse train Pb and the reference optical pulse Pr (the difference in timing at which they reach the lens 41) can be varied.

[0049] In this example, the optical element 42 also includes a nonlinear optical crystal. The lens 41 focuses the optical pulse train Pb and the reference optical pulse Pr toward the optical element 42, and causes the optical axis of the optical pulse train Pb and the optical axis of the reference optical pulse Pr to intersect each other at a predetermined angle in the optical element 42. As a result, in the optical element 42, which is a nonlinear optical crystal, a second harmonic is generated starting from the intersection of the optical pulse train Pb and the reference optical pulse Pr. This second harmonic is correlated light Pc, which includes the cross-correlation of the optical pulse train Pb. The correlated light Pc is collimated or focused by the lens 43 and then input to the detector 400.

[0050] FIG. 15 is a schematic diagram illustrating a correlation optical system 40C, as yet another example of the correlation optical system 40, for generating correlation light Pc including the cross-correlation of the optical pulse train Pb. In this example, the SLM 14 in the pulse shaping unit 3 is a polarization-dependent spatial light modulator that modulates in a first polarization direction. In contrast, the polarization plane of the optical pulse Pa input to the pulse shaping unit 3 is tilted with respect to the polarization direction modulated by the SLM 14, and the optical pulse Pa includes a polarization component in the first polarization direction (arrow Dp1 in the figure) and a polarization component in a second polarization direction (symbol Dp2 in the figure) that is orthogonal to the first polarization direction. Furthermore, the polarization of the optical pulse Pa is not limited to the above-described polarization (tilted linear polarization) but may also be elliptically polarized.

[0051] The polarization component of the optical pulse Pa in the first polarization direction is modulated by the SLM 14 and output from the pulse forming unit 3 as an optical pulse train Pb. On the other hand, the polarization component of the optical pulse Pa in the second polarization direction is not modulated by the SLM 14 and is output as is from the pulse forming unit 3. This unmodulated polarization component is provided to the correlation optical system 40 as a reference optical pulse Pr, which is a single pulse, on the same axis as the optical pulse train Pb. The correlation optical system 40 generates correlation light Pc, which includes the cross-correlation of the optical pulse train Pb, from the optical pulse train Pb and the reference optical pulse Pr. In this configuration example, by delaying the optical pulse train Pb in the SLM 14 and making the delay time variable (arrow E in the figure), the time difference between the optical pulse train Pb and the reference optical pulse Pr (the difference in timing at which they arrive at the lens 41) can be made variable, and the correlation optical system 40 can preferably generate correlation light Pc, which includes the cross-correlation of the optical pulse train Pb.

[0052] As shown in FIGS. 13 to 15, the correlation optical system 40 is an optical system that spatially and temporally superimposes the optical pulse train Pb with itself or with another pulse train. Specifically, by sweeping one of the pulse trains in time, a correlation waveform corresponding to the time waveform shape of the optical pulse train Pb is detected. Here, pulse sweeping is generally performed by spatially varying the optical path length using a drive stage or the like, so the amount of movement of the stage corresponds to the amount of time delay in the correlation waveform. In this case, the amount of time delay relative to the amount of stage movement is very small. Therefore, by employing the correlation optical system 40, the pulse shape can be observed at a high time resolution scale reaching the order of femtoseconds in a detector 400 (described later), and therefore the feature quantities of the time waveform of the optical pulse train Pb can be measured with higher accuracy.

[0053] When the chromatic dispersion of the optical component 7 is not zero, the feature quantities (peak intensity, full width at half maximum, peak time interval) of the time waveform of the multiple optical pulses contained in the correlated light Pc change significantly compared to when the chromatic dispersion of the optical component 7 is zero. The amount of change depends on the chromatic dispersion of the optical component 7. Therefore, by observing the change in the feature quantities of the time waveform of the correlated light Pc, the chromatic dispersion of the optical component 7 can be determined accurately and easily. However, in the above observation, the chromatic dispersion of the optical component 7 may be corrected using the known chromatic dispersion of the pulsed laser light source 2.

[0054] As described above, in this embodiment, the SLM 14 imparts positive or negative group delay dispersion to the optical pulse Pa. Fig. 16 is a graph showing an example of the time waveform of the correlated light Pc output from the correlation optical system 40 in this embodiment when the optical component 7 is not provided. Fig. 17 is a graph showing, as a comparative example, an example of the time waveform of the correlated light Pc output from the correlation optical system 40 in a state where the optical component 7 is not provided and the SLM 14 does not impart group delay dispersion to the optical pulse Pa. As shown in Figs. 16 and 17 , when the SLM 14 imparts group delay dispersion to the optical pulse Pa, the peak intensity of the correlated light Pc in a state where the optical component 7 is not provided is lower and the pulse width is wider, compared to when the SLM 14 does not impart group delay dispersion to the optical pulse Pa.

[0055] Fig. 18 is a graph showing an example of the time waveform (curve G31) of the correlated light Pc when the optical component 7 is provided in this embodiment. Note that Fig. 18 also shows the time waveform (curve G32) of the correlated light Pc shown in Fig. 16. As shown in Fig. 18, when the optical component 7 is provided, the peak intensity of the correlated light Pc increases and the pulse width decreases compared to when the optical component 7 is not provided.

[0056] Referring again to FIG. 1, the detector 400 receives the correlated light Pc output from the correlation optical system 40. The detector 400 detects the time waveform of the correlated light Pc formed from the optical pulse train Pb having a peak intensity equal to or greater than the detection threshold of the optical detection unit 4. The detector 400 includes a photodetector such as a photodiode. The detector 400 detects the time waveform of the correlated light Pc by converting the intensity of the correlated light Pc into an electrical signal. The electrical signal, which is the detection result, is provided to the calculation unit 5b. In this embodiment, the detection threshold is a value determined based on the characteristics of the correlation optical system 40 and the detector 400. When the optical pulse train Pb having a peak intensity equal to or greater than the detection threshold enters the correlation optical system 40, the detector 400 can accurately detect the time waveform of the optical pulse train Pb.

[0057] The calculation unit 5b is electrically connected to the detector 400. The calculation unit 5b estimates the amount of chromatic dispersion of the optical component 7 based on the feature quantities of the time waveform provided by the detector 400. As described above, according to the knowledge of the present inventors, when correlated light Pc including cross-correlation or autocorrelation of the optical pulse train Pb is generated, various feature quantities (e.g., peak interval, peak intensity, pulse width, etc.) in the time waveform of the correlated light Pc have a significant correlation with the amount of chromatic dispersion of the measurement target. Therefore, the calculation unit 5b can accurately estimate the amount of chromatic dispersion of the measurement target optical component 7 by evaluating the feature quantities of the time waveform of the correlated light Pc.

[0058] The input unit 5c receives input from a user of the dispersion measurement apparatus 1A. The input unit 5c acquires information relating to the sign of the group delay dispersion of the optical component 7. The information relating to the sign of the group delay dispersion of the optical component 7 is information that the group delay dispersion of the optical component 7 is positive, or information that the group delay dispersion of the optical component 7 is negative.

[0059] The output unit 5d outputs the result of the estimation of the amount of chromatic dispersion in the calculation unit 5b. The output unit 5d is, for example, a display device that displays the result of the estimation of the amount of chromatic dispersion.

[0060] Fig. 19 is a diagram schematically illustrating an example of the hardware configuration of the control device 5. As shown in Fig. 19, the control device 5 can be physically configured as a normal computer including a processor (CPU) 51, main storage devices such as a ROM 52 and a RAM 53, input devices 54 such as a keyboard, mouse, and touch screen, output devices 55 such as a display (including a touch screen), a communication module 56 such as a network card for transmitting and receiving data to and from other devices, and an auxiliary storage device 57 such as a hard disk.

[0061] The processor 51 of the computer can realize the function of the calculation unit 5b by means of a chromatic dispersion amount calculation program. In other words, the chromatic dispersion amount calculation program causes the processor 51 of the computer to operate as the calculation unit 5b. The chromatic dispersion amount calculation program is stored in a storage device (storage medium) inside or outside the computer, such as an auxiliary storage device 57. The storage device may be a non-transitory recording medium. Examples of the recording medium include recording media such as flexible disks, CDs, and DVDs, recording media such as ROMs, semiconductor memories, cloud servers, etc. An output device 55 such as a display (including a touch screen) operates as the output unit 5d.

[0062] Auxiliary storage device 57 stores feature quantities of the time waveform of correlated light Pc that are theoretically calculated in advance (or measured in advance) assuming that the amount of chromatic dispersion of optical component 7 is zero. By comparing these feature quantities with the feature quantities of the time waveform of correlated light Pc detected by detector 400, it is possible to determine the extent to which the feature quantities of correlated light Pc have changed due to the amount of chromatic dispersion of optical component 7. Therefore, calculation unit 5b can estimate the amount of chromatic dispersion of optical component 7 by comparing the feature quantities stored in auxiliary storage device 57 with the feature quantities of the time waveform of correlated light Pc detected by detector 400.

[0063] 20 is a flowchart showing a dispersion measuring method using the dispersion measuring apparatus 1A having the above configuration. First, in an output step S101, the pulse laser light source 2 outputs a light pulse Pa.

[0064] Next, in a pulse forming step S102, the pulse forming unit 3 receives the optical pulse Pa and generates an optical pulse train Pb. Specifically, the pulse forming unit 3 forms the optical pulse train Pb, which is modulated light including optical pulses Pb1 and Pb2 having different center wavelengths and a time difference from each other, from the optical pulse Pa output from the pulse laser light source 2. For example, the multiple wavelength components included in the optical pulse Pa are spatially separated by wavelength, and the SLM 14 is used to shift the phases of the multiple wavelength components relative to each other, and then the multiple wavelength components are focused. This makes it easy to generate the optical pulse train Pb. Additionally, in the pulse forming step S102, the phase pattern presented to the SLM 14 imparts positive or negative group delay dispersion to the optical pulse Pa.

[0065] Next, in detection step S103, the time waveform of the correlated light Pc is detected. Specifically, after the optical pulse train Pb output from the pulse forming unit 3 passes through the optical component 7, the correlation optical system 40 receives the optical pulse train Pb output from the optical component 7 and outputs the correlated light Pc, which is the cross-correlation or auto-correlation of the optical pulse train Pb. Then, the detector 400 detects the time waveform of the correlated light Pc. As an example, the correlation optical system 40 uses an optical element 42 including at least one of a nonlinear optical crystal and a phosphor to generate the correlated light Pc, which includes the cross-correlation or auto-correlation of the optical pulse train Pb.

[0066] For example, as shown in Fig. 13, an optical pulse train Pb is branched into two, one of the branched optical pulse trains Pbb is time-delayed with respect to the other optical pulse train Pba, and correlated light Pc containing the autocorrelation of the optical pulse train Pb is generated from the time-delayed one optical pulse train Pbb and the other optical pulse train Pba. Also, for example, as shown in Fig. 14, an optical pulse train Pb and a reference optical pulse Pr are input, and the reference optical pulse Pr is time-delayed with respect to the optical pulse train Pb, and correlated light Pc containing the cross-correlation of the optical pulse train Pb is generated from the time-delayed reference optical pulse Pr and the optical pulse train Pb. Also, for example, as shown in FIG. 15, an optical pulse train Pb is generated by modulating only the polarization component of an optical pulse Pa in a first polarization direction in the SLM 14, and the polarization component in a second polarization direction is used as a reference optical pulse Pr. The optical pulse train Pb is time-delayed relative to the reference optical pulse Pr in the SLM 14, and correlation light Pc including the cross-correlation of the optical pulse train Pb is generated from the time-delayed optical pulse train Pb and the reference optical pulse Pr.

[0067] Next, in calculation step S104, the calculation unit 5b estimates the amount of chromatic dispersion of the optical component 7 based on the feature amount of the time waveform of the correlated light Pc. Specifically, first, the calculation unit 5b acquires the feature amount of the time waveform of the correlated light Pc that has been theoretically calculated in advance (or measured in advance) assuming that the chromatic dispersion of the optical component 7 is zero. Next, the calculation unit 5b acquires the feature amount of the time waveform of the correlated light Pc detected in the detection step S103. Here, the feature amount is, for example, at least one of the peak intensity, full width at half maximum, and peak time interval of the multiple optical pulses included in the correlated light Pc. Next, the calculation unit 5b compares the feature amounts of the two acquired time waveforms to estimate the amount of chromatic dispersion of the optical component 7.

[0068] Here, we will explain in detail the phase modulation for generating bandwidth-controlled multi-pulses in the SLM 14 of the pulse shaping unit 3 shown in FIG. 2. The region before the lens 15 (spectral region) and the region after the diffraction grating 16 (time domain) have a Fourier transform relationship with each other, and phase modulation in the spectral domain affects the time-domain intensity waveform. Therefore, the output light from the pulse shaping unit 3 can have various time-domain intensity waveforms different from that of the optical pulse Pa according to the modulation pattern of the SLM 14. FIG. 21(a) shows, as an example, the spectral waveform (spectral intensity G41 and spectral phase G42) of a single-pulse optical pulse Pa, and FIG. 21(b) shows the time-domain intensity waveform of the optical pulse Pa. Furthermore, FIG. 22(a) shows, as an example, the spectral waveform (spectral intensity G51 and spectral phase G52) of the output light from the pulse shaping unit 3 when a rectangular-wave phase spectral modulation is applied in the SLM 14, and FIG. 22(b) shows the time-domain intensity waveform of the output light. In Figures 21(a) and 22(a), the horizontal axis represents wavelength (nm), the left vertical axis represents intensity values ​​(arbitrary units) of the intensity spectrum, and the right vertical axis represents phase values ​​(rad) of the phase spectrum. Also, in Figures 21(b) and 22(b), the horizontal axis represents time (femtoseconds), and the vertical axis represents light intensity (arbitrary units). In this example, by imparting a triangular phase spectrum to the output light, the single pulse of the optical pulse Pa is converted into a double pulse. Note that the spectrum and waveform shown in Figure 22 are just one example, and the time-intensity waveform of the output light from the pulse shaping unit 3 can be shaped into various shapes by combining various phase spectra and intensity spectra.

[0069] FIG. 23 shows the configuration of a modulation pattern calculation device 20 that calculates the modulation pattern of SLM 14. The modulation pattern calculation device 20 is, for example, a computer with a processor, such as a personal computer; a smart device such as a smartphone or tablet; or a cloud server. The calculation unit 5b shown in FIG. 1 may also function as the modulation pattern calculation device 20. The modulation pattern calculation device 20 is electrically connected to SLM 14, calculates a phase modulation pattern for approximating the time intensity waveform of the output light from the pulse forming unit 3 to a desired waveform, and provides a control signal including the phase modulation pattern to SLM 14. The modulation pattern is data for controlling SLM 14 and includes a table of the intensity of the complex amplitude distribution or the intensity of the phase distribution. The modulation pattern is, for example, a computer-generated hologram (CGH).

[0070] The modulation pattern calculation device 20 of this modification stores in the control unit 5a phase patterns including a phase pattern for phase modulation that imparts a phase spectrum to output light to obtain a desired waveform, and a phase pattern for intensity modulation that imparts an intensity spectrum to output light to obtain a desired waveform. To this end, as shown in FIG. 23 , the modulation pattern calculation device 20 has an arbitrary waveform input unit 21, a phase spectrum design unit 22, an intensity spectrum design unit 23, and a modulation pattern generation unit 24. That is, the processor of the computer provided in the modulation pattern calculation device 20 realizes the functions of the arbitrary waveform input unit 21, the phase spectrum design unit 22, the intensity spectrum design unit 23, and the modulation pattern generation unit 24. Each function may be realized by the same processor or by different processors.

[0071] The computer processor can realize each of the above functions by means of a modulation pattern calculation program. Therefore, the modulation pattern calculation program causes the computer processor to operate as an arbitrary waveform input unit 21, a phase spectrum design unit 22, an intensity spectrum design unit 23, and a modulation pattern generation unit 24 in the modulation pattern calculation device 20. The modulation pattern calculation program is stored in a storage device (storage medium) inside or outside the computer. The storage device may be a non-transitory recording medium. Examples of the recording medium include recording media such as a flexible disk, CD, DVD, etc., recording media such as ROM, semiconductor memory, cloud server, etc.

[0072] The arbitrary waveform input unit 21 accepts input of a desired time-intensity waveform from an operator. The operator inputs information about the desired time-intensity waveform (e.g., peak interval, pulse width, number of pulses, etc.) to the arbitrary waveform input unit 21. The information about the desired time-intensity waveform is provided from the arbitrary waveform input unit 21 to the phase spectrum design unit 22 and the intensity spectrum design unit 23. The phase spectrum design unit 22 calculates a phase spectrum of the output light of the pulse shaping unit 3 suitable for realizing the given desired time-intensity waveform. The intensity spectrum design unit 23 calculates an intensity spectrum of the output light of the pulse shaping unit 3 suitable for realizing the given desired time-intensity waveform. The modulation pattern generation unit 24 calculates a phase modulation pattern (e.g., a computer-generated hologram) for applying the phase spectrum calculated by the phase spectrum design unit 22 and the intensity spectrum calculated by the intensity spectrum design unit 23 to the output light of the pulse shaping unit 3. A control signal SC including the calculated phase modulation pattern is then provided to the SLM 14. The SLM 14 is controlled based on the control signal SC.

[0073] Fig. 24 is a block diagram showing the internal configuration of the phase spectrum design unit 22 and the intensity spectrum design unit 23. As shown in Fig. 24, the phase spectrum design unit 22 and the intensity spectrum design unit 23 each have a Fourier transform unit 25, a function substitution unit 26, a waveform function correction unit 27, an inverse Fourier transform unit 28, and a target generation unit 29. The target generation unit 29 includes a Fourier transform unit 29a and a spectrogram correction unit 29b. The functions of each of these components will be described in detail later.

[0074] Here, the desired time-intensity waveform is expressed as a function in the time domain, and the phase spectrum is expressed as a function in the frequency domain. Therefore, the phase spectrum corresponding to the desired time-intensity waveform can be obtained, for example, by an iterative Fourier transform based on the desired time-intensity waveform. Figure 25 shows the procedure for calculating the phase spectrum using the iterative Fourier transform method. First, an initial intensity spectrum function A0(ω) and a phase spectrum function Ψ0(ω), which are functions of frequency ω, are prepared (process number (1) in the figure). In one example, these intensity spectrum function A0(ω) and phase spectrum function Ψ0(ω) represent the spectral intensity and spectral phase of the input light, respectively. Next, the intensity spectrum function A0(ω) and the phase spectrum function Ψ n A waveform function (a) in the frequency domain including (ω) is prepared (processing number (2) in the figure).

number

[0075] Next, the above function (a) is subjected to a Fourier transform from the frequency domain to the time domain (arrow A1 in the figure). This results in a time-intensity waveform function b n (t) and time phase waveform function Θ n The frequency domain waveform function (b) containing (t) is obtained (processing number (3) in the figure).

number

number

number

number

[0076] Next, the intensity spectrum function B included in the above function (e) n In order to constrain (ω), it is replaced with the initial intensity spectrum function A0(ω) (process number (7) in the figure).

number

[0077] However, while the iterative Fourier method described above can control the time-intensity waveform, it has the problem of being unable to control the frequency components (band wavelengths) that make up the time-intensity waveform. Therefore, the modulation pattern calculation device 20 of this embodiment calculates the phase spectral function and intensity spectral function that form the basis of the modulation pattern using the calculation method described below. FIG. 26 is a diagram showing the calculation procedure for the phase spectral function in the phase spectrum design unit 22. First, an initial intensity spectral function A(ω) and a phase spectral function Φ(ω), which are functions of frequency ω, are prepared (process number (1) in the figure). In one example, these intensity spectral function A(ω) and phase spectral function Φ(ω) represent the spectral intensity and spectral phase of the input light, respectively. Next, a first waveform function (g) in the frequency domain that includes the intensity spectral function A(ω) and the phase spectral function Φ(ω) is prepared (process number (2-a)). Here, i is an imaginary number.

number

[0078] Next, the Fourier transform unit 25 of the phase spectrum design unit 22 performs a Fourier transform from the frequency domain to the time domain on the function (g) (arrow A3 in the figure), thereby obtaining a second waveform function (h) in the time domain that includes the time intensity waveform function a0(t) and the time phase waveform function φ0(t) (Fourier transform step, process number (3)).

number

[0079] Next, the function substitution unit 26 of the phase spectrum design unit 22 substitutes the time-intensity waveform function Target0(t) based on the desired waveform input at the arbitrary waveform input unit 21 into the time-intensity waveform function b0(t) as shown in the following formula (i) (processing number (4-a)).

number

[0080] Next, the function substitution unit 26 of the phase spectrum design unit 22 substitutes the time-intensity waveform function a0(t) with the time-intensity waveform function b0(t) as shown in the following formula (j): That is, the time-intensity waveform function a0(t) included in the above function (h) is replaced with the time-intensity waveform function Target0(t) based on the desired waveform (function substitution step, process number (5)).

number

[0081] Next, the waveform function correction unit 27 of the phase spectrum design unit 22 corrects the second waveform function so that the spectrogram of the second waveform function (j) after the replacement approaches a target spectrogram generated in advance according to a desired wavelength band. First, the second waveform function (j) after the replacement is subjected to a time-frequency transform to convert the second waveform function (j) into a spectrogram SG 0,k (ω, t) (processing number (5-a) in the figure). The subscript k indicates the kth conversion process.

[0082] Here, time-frequency transformation refers to the process of converting a composite signal such as a time waveform into three-dimensional information consisting of time, frequency, and the strength of the signal component (spectral intensity) by performing frequency filtering or numerical calculation (multiplying by a window function while shifting it to derive a spectrum for each time) on the signal. In this embodiment, the result of this transformation (time, frequency, spectral intensity) is defined as a "spectrogram."

[0083] Examples of time-frequency transforms include the Short-Time Fourier Transform (STFT) and wavelet transforms (Haar wavelet transform, Gabor wavelet transform, Mexican Hat wavelet transform, Morlet wavelet transform).

[0084] Furthermore, a target spectrogram TargetSG0(ω,t) that has been generated in advance according to a desired wavelength band is read from the target generation unit 29. This target spectrogram TargetSG0(ω,t) is approximately the same value as the target time waveform (time intensity waveform and its constituent frequency components), and is generated by the target spectrogram function of processing number (5-b).

[0085] Next, the waveform function correction unit 27 of the phase spectrum design unit 22 calculates the spectrogram SG 0,k Pattern matching is performed between the second spectrogram TargetSG0(ω,t) and the target spectrogram TargetSG0(ω,t) to check the similarity (degree of agreement). In this embodiment, an evaluation value is calculated as an index representing the similarity. Then, in the following process number (5-c), it is determined whether the obtained evaluation value satisfies a predetermined termination condition. If the condition is satisfied, the process proceeds to process number (6); if not, the process proceeds to process number (5-d). In process number (5-d), the time phase waveform function φ0(t) included in the second waveform function is replaced with an arbitrary time phase waveform function φ 0,k (t). The second waveform function after the time-phase waveform function has been changed is converted back into a spectrogram by a time-frequency transform such as STFT. After that, the above-mentioned processes (5-a) to (5-d) are repeated. In this way, the spectrogram SG 0,k The second waveform function is corrected so that (ω, t) gradually approaches the target spectrogram TargetSG0(ω, t) (waveform function correction step).

[0086] Thereafter, the inverse Fourier transform unit 28 of the phase spectrum design unit 22 performs an inverse Fourier transform on the modified second waveform function (arrow A4 in the figure) to generate a third waveform function (k) in the frequency domain (inverse Fourier transform step, process number (6)).

number

[0087] 27 is a diagram showing the calculation procedure of the spectral intensity in the intensity spectrum design unit 23. Note that, since the process numbers (1) to (5-c) are the same as the calculation procedure of the spectral phase in the phase spectrum design unit 22 described above, the explanation will be omitted. The waveform function correction unit 27 of the intensity spectrum design unit 23 calculates the spectrogram SG 0,k If the evaluation value indicating the similarity between (ω, t) and the target spectrogram TargetSG0(ω, t) does not satisfy a predetermined termination condition, the time-phase waveform function φ0(t) included in the second waveform function is constrained to an initial value, and the time-intensity waveform function b0(t) is set to an arbitrary time-intensity waveform function b 0,k (t) (Processing No. (5-e)). The second waveform function after the time intensity waveform function has been changed is converted back into a spectrogram by a time-frequency transform such as STFT. After that, processing Nos. (5-a) to (5-c) are repeated. In this way, the spectrogram SG 0,k The second waveform function is corrected so that (ω, t) gradually approaches the target spectrogram TargetSG0(ω, t) (waveform function correction step).

[0088] Then, the inverse Fourier transform unit 28 of the intensity spectrum design unit 23 performs an inverse Fourier transform on the modified second waveform function (arrow A4 in the figure) to generate a third waveform function (m) in the frequency domain (inverse Fourier transform step, process number (6)).

number

[0089] Next, in process number (7-b), the filter processing unit of the intensity spectrum design unit 23 calculates the intensity spectrum function B 0,k (ω) is subjected to filtering based on the intensity spectrum of the input light (filtering step). Specifically, the intensity spectrum function B 0,kThe intensity spectrum obtained by multiplying (ω) by the coefficient α is cut off in the portion that exceeds the cutoff intensity for each wavelength determined based on the intensity spectrum of the input light. 0,k This is to prevent the spectral intensity of the input light from exceeding that of the input light. In one example, the cutoff intensity for each wavelength is set to match the intensity spectrum of the input light (in this embodiment, the initial intensity spectral function A0(ω)). In that case, as shown in the following formula (n), the intensity spectral function αB 0,k At frequencies where (ω) is greater than the intensity spectral function A0(ω), the intensity spectral function A TWC-TFD The value of the intensity spectrum function A0(ω) is taken as the value of (ω). Also, the value of the intensity spectrum function αB 0,k At frequencies where (ω) is less than or equal to the intensity spectral function A0(ω), the intensity spectral function A TWC-TFD (ω) as the value of the intensity spectrum function αB 0,k The value of (ω) is taken in (process number (7-b) in the figure).

number

[0090] The modulation pattern generator 24 generates the phase spectrum function Φ TWC-TFD The spectral phase indicated by (ω) and the intensity spectrum function A calculated by the intensity spectrum design unit 23 TWC-TFD A phase modulation pattern (for example, a computer-generated hologram) for imparting the spectral intensity indicated by (ω) to the output light is calculated (data generation step).

[0091] FIG. 28 shows an example of a procedure for generating a target spectrogram TargetSG0(ω,t) in the target generator 29. The target spectrogram TargetSG0(ω,t) represents a target time waveform (a time-intensity waveform and its constituent frequency components (wavelength band components)). Therefore, creating a target spectrogram is an extremely important process for controlling the frequency components (wavelength band components). As shown in FIG. 28, the target generator 29 first inputs a spectral waveform (initial intensity spectral function A0(ω) and initial phase spectral function Φ0(ω)) and a desired time-intensity waveform function Target0(t). It also inputs a time function p0(t) containing desired frequency (wavelength) band information (processing number (1)).

[0092] Next, the target generation unit 29 generates a phase spectrum function Φ for realizing the time intensity waveform function Target0(t) using, for example, the iterative Fourier transform method shown in FIG. IFTA (ω) is calculated (Processing No. (2)).

[0093] Next, the target generator 29 generates the phase spectrum function Φ IFTA The intensity spectrum function A to realize the time intensity waveform function Target0(t) by the iterative Fourier transform method using (ω) IFTA (ω) is calculated (processing number (3)). Here, FIG. 29 shows the intensity spectrum function A IFTA FIG. 10 is a diagram illustrating an example of a procedure for calculating (ω).

[0094] First, the initial intensity spectrum function A k=0 (ω) and the phase spectrum function Ψ0(ω) are prepared (process number (1) in the figure). Next, the intensity spectrum function A k A frequency domain waveform function (o) including the phase spectrum function Ψ(ω) is prepared (process number (2) in the figure).

number

[0095] Next, the function (o) is subjected to a Fourier transform from the frequency domain to the time domain (arrow A5 in the figure). This results in a time-intensity waveform function b k The frequency domain waveform function (p) containing (t) is obtained (processing number (3) in the figure).

number

[0096] Next, the time-intensity waveform function b included in the above function (p) k (t) is replaced with a time-intensity waveform function Target0(t) based on the desired waveform (process numbers (4) and (5) in the figure).

number

number

[0097] Next, the function (r) is subjected to an inverse Fourier transform from the time domain to the frequency domain (arrow A6 in the figure). This results in the intensity spectrum function C k (ω) and the phase spectrum function Ψ k The waveform function (s) in the frequency domain including (ω) is obtained (processing number (6) in the figure).

number

number

[0098] In addition, the intensity spectrum function C in the frequency domain after inverse Fourier transform k (ω) is filtered based on the intensity spectrum of the input light. Specifically, the intensity spectrum function C k In the intensity spectrum represented by (ω), a portion exceeding the cutoff intensity for each wavelength determined based on the intensity spectrum of the input light is cut off. In one example, the cutoff intensity for each wavelength is determined based on the intensity spectrum of the input light (for example, the initial intensity spectrum function A k=0 (ω)). In this case, the intensity spectrum function C is set to match the k (ω) is the intensity spectrum function A k=0 At frequencies greater than (ω), the intensity spectral function A k (ω) as the value of the intensity spectrum function A k=0 (ω) is taken into account. Also, the intensity spectrum function C k (ω) is the intensity spectrum function A k=0 At frequencies below (ω), the intensity spectrum function A k (ω) as the value of the intensity spectrum function C k The value of (ω) is taken in (process number (7-b) in the figure).

number

[0099] Thereafter, by repeating the above steps (2) to (7-b), the intensity spectrum function A k The intensity spectrum shape represented by (ω) can be made closer to the intensity spectrum shape corresponding to the desired time intensity waveform. IFTA (ω) is obtained.

[0100] Referring again to Figure 28, the phase spectrum function Φ IFTA (ω) and the intensity spectrum function A IFTA By calculating (ω), a third waveform function (v) in the frequency domain including these functions is obtained (process number (4)).

number

number

[0101] The spectrogram correction unit 29b of the target generation unit 29 converts the fourth waveform function (w) into a spectrogram SG IFTA (ω, t) (Processing No. (6)). Then, in Processing No. (7), a spectrogram SG is generated based on the time function p0(t) containing the desired frequency (wavelength) band information. IFTA By modifying (ω, t), the target spectrogram TargetSG0(ω, t) is generated. For example, the spectrogram SG IFTA The characteristic pattern appearing in (ω, t) is partially extracted, and the frequency components of that portion are manipulated based on the time function p0(t). A specific example of this will be explained in detail below.

[0102] For example, consider the case where a triple pulse with a time interval of 2 picoseconds is set as the desired time intensity waveform function Target0(t). In this case, the spectrogram SG IFTA (ω, t) results as shown in Figure 30(a). In Figure 30(a), the horizontal axis indicates time (unit: femtoseconds) and the vertical axis indicates wavelength (unit: nm). The spectrogram values ​​are indicated by the brightness of the figure, with the brighter the image, the larger the spectrogram value. This spectrogram SGIFTA At (ω, t), the triple pulse appears as domains D1, D2, and D3 separated on the time axis by 2 picosecond intervals. The central (peak) wavelength of domains D1, D2, and D3 is 800 nm.

[0103] If one wishes to control only the time intensity waveform of the output light (simply obtain a triple pulse), there is no need to manipulate these domains D1, D2, and D3. However, if one wishes to control the frequency (wavelength) band of each pulse, one must manipulate these domains D1, D2, and D3. That is, as shown in FIG. 30(b), moving each domain D1, D2, and D3 independently in the direction along the wavelength axis (vertical axis) means changing the constituent frequencies (wavelength bands) of each pulse. Such a change in the constituent frequencies (wavelength bands) of each pulse is performed based on the time function p0(t).

[0104] For example, when the peak wavelength of domain D2 is fixed at 800 nm and the peak wavelengths of domains D1 and D3 are translated by -2 nm and +2 nm, respectively, the spectrogram SG IFTA (ω, t) changes to the target spectrogram TargetSG0(ω, t) shown in Figure 30(b). For example, by performing such processing on the spectrogram, it is possible to create a target spectrogram in which the constituent frequencies (wavelength bands) of each pulse are arbitrarily controlled without changing the shape of the time-intensity waveform.

[0105] The effects obtained by the dispersion measurement apparatus 1A and dispersion measurement method of the present embodiment described above will be described.

[0106] When measuring the amount of chromatic dispersion of the optical component 7, optical pulses Pb1 and Pb2 having a time difference and different center wavelengths are transmitted through the optical component 7. The amount of chromatic dispersion of the optical component 7 can be estimated based on the time waveform (e.g., the peak interval) of the correlated light Pc obtained from the optical pulses Pb1 and Pb2. However, in conventional dispersion measurement devices, when the optical pulses Pb1 and Pb2 transmit through the optical component 7, the pulse widths of the optical pulses Pb1 and Pb2 gradually increase and the peak intensities of the optical pulses Pb1 and Pb2 gradually decrease due to the chromatic dispersion of the optical component 7. FIG. 31 is a graph illustrating an example of such a phenomenon, showing the time waveforms of the optical pulses Pb1 and Pb2 before they enter the optical component 7 (graph G61) and the time waveforms of the optical pulses Pb1 and Pb2 after they have transmitted through the optical component 7 (graph G62). 32 shows the time waveform of the correlated light Pc when the optical component 7 is not provided (graph G71) and the time waveform of the correlated light Pc when the optical component 7 is provided (graph G72). As described above, the wider the pulse width of the optical pulses Pb1 and Pb2 in the optical component 7, the lower the detection accuracy of the peak interval between the optical pulses Pb1 and Pb2 (or the peak interval between the multiple optical pulses included in the correlated light Pc). Furthermore, the lower the peak intensity of the optical pulses Pb1 and Pb2 in the optical component 7, the lower the detection accuracy of the time waveform of the optical pulses Pb1 and Pb2 (or the time waveform of the multiple optical pulses included in the correlated light Pc). Therefore, there is a risk that the amount of chromatic dispersion of the optical component 7 cannot be measured accurately.

[0107] In the dispersion measurement apparatus 1A and dispersion measurement method of this embodiment, the pulse forming unit 3 (pulse forming step S102) imparts to the optical pulse Pa group delay dispersion having an opposite sign to the group delay dispersion of the optical component 7. As a result, the peak intensities of the optical pulses Pb1 and Pb2 incident on the optical component 7 temporarily decrease and the pulse widths temporarily increase. However, after these optical pulses Pb1 and Pb2 enter the optical component 7 and before they exit the optical component 7, the peak intensities of the optical pulses Pb1 and Pb2 increase and the pulse widths of the optical pulses Pb1 and Pb2 decrease due to the group delay dispersion of the optical component 7. As described above, according to this embodiment, the pulse widths of the optical pulses Pb1 and Pb2 emitted from the optical component 7 decrease, so that it is possible to suppress a decrease in the detection accuracy of the peak interval between the optical pulses Pb1 and Pb2 (in this embodiment, the peak interval between the multiple optical pulses included in the correlated light Pc). Furthermore, since the peak intensities of the optical pulses Pb1 and Pb2 emitted from the optical component 7 are increased, it is possible to suppress a decrease in the detection accuracy of the time waveform of the optical pulse train Pb (the time waveform of the correlated light Pc in this embodiment). Therefore, the amount of chromatic dispersion of the optical component 7 can be measured with high accuracy.

[0108] The effects of the dispersion measurement apparatus 1A and dispersion measurement method of this embodiment will be specifically described. Fig. 33 is a graph showing an example of the relationship between the group delay dispersion of the optical component 7 and the pulse width of the correlated light Pc. In Fig. 33, a plot D21 indicated by a black square indicates a value of -20000 fs. 2 The plot D21 shows the case where a group delay dispersion of -20000 fs is given to the optical pulse Pa. The plot D22 with open circles shows the case where no group delay dispersion is given to the optical pulse Pa. Referring to the plot D22, when no group delay dispersion is given to the optical pulse Pa, the pulse width of the correlated light Pc is minimum when the group delay dispersion of the optical component 7 is zero, and increases as the absolute value of the group delay dispersion of the optical component 7 increases. In contrast, referring to the plot D21, 2 When a group delay dispersion of 20000 fs is given to the optical pulse Pa, this relationship becomes 2 Shift by -20000fs. 2 is given to the optical pulse Pa, the pulse width of the correlated light Pc is2 The group delay dispersion of the optical component 7 is 20000 fs 2 The further away from the optical element 7, the larger the group delay dispersion. 2 In a larger range, the pulse width of the correlated light Pc becomes smaller than when no group delay dispersion is applied to the optical pulse Pa. In other words, −A(fs 2 ) is given to the optical pulse Pa, in the range where the group delay dispersion of the optical component 7 is greater than A / 2, the pulse width of the correlated light Pc will be smaller than when no group delay dispersion is given to the optical pulse Pa. Therefore, when the group delay dispersion of the optical component 7 is greater than A / 2, the pulse width of the correlated light Pc can be reduced to suppress a decrease in the detection accuracy of the peak interval of the correlated light Pc.

[0109] 34 is a graph showing an example of the relationship between the group delay dispersion of the optical component 7 and the peak intensity of the correlated light Pc. In FIG. 34, a plot D31 indicated by a black square indicates a peak intensity of the correlated light Pc at -20000 fs. 2 The plot D31 shows the case where a group delay dispersion of -20000 fs is given to the optical pulse Pa. The plot D32 with open circles shows the case where no group delay dispersion is given to the optical pulse Pa. Referring to the plot D32, when no group delay dispersion is given to the optical pulse Pa, the peak intensity of the correlated light Pc is maximum when the group delay dispersion of the optical component 7 is zero, and decreases as the absolute value of the group delay dispersion of the optical component 7 increases. In contrast, referring to the plot D31, 2 When a group delay dispersion of 20000 fs is given to the optical pulse Pa, this relationship becomes 2 Shift by -20000fs. 2 is given to the optical pulse Pa, the peak intensity of the correlated light Pc is 2 The group delay dispersion of the optical component 7 is 20000 fs 2 The group delay dispersion of the optical component 7 decreases as the distance from the optical component increases. 2 In a larger range, the peak intensity of the correlated light Pc is larger than when no group delay dispersion is applied to the optical pulse Pa. In other words, −A(fs 2) is given to the optical pulse Pa, in the range where the group delay dispersion of the optical component 7 is greater than A / 2, the peak intensity of the correlated light Pc becomes greater than when no group delay dispersion is given to the optical pulse Pa. Therefore, when the group delay dispersion of the optical component 7 is greater than A / 2, the peak intensity of the correlated light Pc can be increased and a decrease in the detection accuracy of the time waveform of the correlated light Pc can be suppressed.

[0110] The magnitude of the group delay dispersion of the optical component 7 also affects the rate of change of the peak spacing of the correlated light Pc relative to a change in the group delay dispersion of the optical component 7. Plot D41 with open circles in Fig. 35 shows an example of the relationship between the group delay dispersion of the optical component 7 and the amount of change in the peak spacing of the correlated light Pc when the optical pulses Pb1 and Pb2 incident on the optical component 7 do not have group delay dispersion (the group delay dispersion of the optical pulses Pb1 and Pb2 is zero). In Fig. 35, the vertical axis shows the amount of change (unit: fs) in the peak spacing of the correlated light Pc, and the horizontal axis shows the group delay dispersion (unit: fs) of the optical component 7. 2 ) is shown. Also, FIG. 36 is a graph showing the relationship between the absolute value of the group delay dispersion of the optical component 7 and the rate of change of the peak spacing of the correlated light Pc with the group delay dispersion of the optical component 7. As shown in FIGS. 35 and 36, the closer the group delay dispersion of the optical component 7 is to zero, the greater the rate of change of the peak spacing of the correlated light Pc with a change in the group delay dispersion of the optical component 7, and the larger the absolute value of the group delay dispersion of the optical component 7, the smaller the rate of change of the peak spacing of the correlated light Pc with a change in the group delay dispersion of the optical component 7. In other words, the closer the group delay dispersion of the optical component 7 is to zero, the higher the measurement sensitivity of the amount of chromatic dispersion becomes, and the larger the absolute value of the group delay dispersion of the optical component 7, the lower the measurement sensitivity of the amount of chromatic dispersion becomes.

[0111] In contrast, for example, -20000fs 2 is applied to the optical pulse Pa, the relationship between the group delay dispersion of the optical component 7 and the amount of change in the peak interval of the correlation light Pc is 20000 fs, as shown in the plot D42 with black squares in FIG. 2 Shift by -20000fs. 2is given to the optical pulse Pa, the rate of change of the peak interval of the correlation light Pc with respect to the change of the group delay dispersion of the optical component 7 is 2 The group delay dispersion of the optical component 7 is 20000 fs 2 Therefore, the group delay dispersion of the optical component 7 is 20000 fs 2 In other words, the closer the absolute value of the group delay dispersion imparted to the optical pulse Pa is to the absolute value of the group delay dispersion possessed by the optical component 7, the higher the measurement sensitivity of the chromatic dispersion amount can be.

[0112] As in this embodiment, the light detection unit 4 may have a correlation optical system 40 that receives the optical pulse train Pb and outputs correlated light Pc including cross-correlation or auto-correlation of the optical pulse train Pb, and may detect the time waveform of the correlated light Pc instead of the time waveform of the optical pulse train Pb. The calculation unit 5b may then estimate the amount of chromatic dispersion of the optical component 7 based on feature quantities of the time waveform of the correlated light Pc. Similarly, in the detection step S103, correlated light Pc including cross-correlation or auto-correlation of the optical pulse train Pb may be generated, and the time waveform of the correlated light Pc may be detected instead of the time waveform of the optical pulse train Pb. In the calculation step S104, the amount of chromatic dispersion of the optical component 7 may be estimated based on feature quantities of the time waveform of the correlated light Pc. In this case, the time waveform of the optical pulse train Pb can be measured even when the optical pulses Pb1 and Pb2 are ultrashort pulses on the order of femtoseconds. Therefore, the amount of chromatic dispersion of the optical component 7 can be measured with greater accuracy using ultrashort pulses.

[0113] As described above, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern may be within the predicted range of the absolute value of the group delay dispersion of the optical component 7. In this case, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern can be made to approach the absolute value of the group delay dispersion of the optical component 7. Therefore, the pulse widths of the optical pulses Pb1 and Pb2 can be made smaller in the optical component 7, and a decrease in the detection accuracy of the peak interval between the optical pulses Pb1 and Pb2 (in this embodiment, the peak interval between the multiple optical pulses included in the correlated light Pc) can be further suppressed. Furthermore, the peak intensities of the optical pulses Pb1 and Pb2 can be made higher in the optical component 7, and a decrease in the detection accuracy of the time waveform of the optical pulse train Pb (in this embodiment, the time waveform of the correlated light Pc) can be further suppressed.

[0114] As in this embodiment, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern may be equal to the absolute value of the group delay dispersion in the design of the optical component 7. In this case, too, the absolute value of the group delay dispersion imparted to the optical pulse Pa by the phase pattern can be made closer to the absolute value of the group delay dispersion of the optical component 7. Therefore, the pulse widths of the optical pulses Pb1 and Pb2 in the optical component 7 can be made smaller, and a decrease in the detection accuracy of the peak interval between the optical pulses Pb1 and Pb2 (in this embodiment, the peak interval between the multiple optical pulses included in the correlated light Pc) can be further suppressed. Furthermore, the peak intensities of the optical pulses Pb1 and Pb2 in the optical component 7 can be made higher, and a decrease in the detection accuracy of the time waveform of the optical pulse train Pb (in this embodiment, the time waveform of the correlated light Pc) can be further suppressed.

[0115] As in this embodiment, the optical component 7 may be disposed on the optical path between the pulse forming unit 3 and the light detecting unit 4. Furthermore, in the detection step S103, the time waveform of the optical pulse train Pb that has passed through the optical component 7 (in this embodiment, the time waveform of the correlated light Pc) may be detected. According to this embodiment, for example, the optical component 7 to be measured can be disposed at any position on the optical path in this manner. This allows for a high degree of freedom in the spatial design of the device, and enables device design aimed at improving convenience, such as downsizing the device and facilitating attachment and removal of the optical component 7.

[0116] As in the present embodiment, the dispersion measurement apparatus 1A may include a control unit 5a that stores a first phase pattern for imparting positive group delay dispersion to the optical pulse Pa and a second phase pattern for imparting negative group delay dispersion to the optical pulse Pa, and selectively outputs the first phase pattern and the second phase pattern to the SLM 14. In this case, the phase pattern can be easily switched between when the optical component 7 has positive group delay dispersion and when the optical component 7 has negative group delay dispersion.

[0117] (First Modification) According to the findings of the present inventors, various feature quantities in the time waveform of the optical pulse train Pb (for example, the pulse interval, peak intensity, pulse width, etc. of the optical pulses Pb1 and Pb2) also have a significant correlation with the amount of chromatic dispersion of the optical component 7. Therefore, the amount of chromatic dispersion of the optical component 7 can also be estimated by evaluating the time waveform of the optical pulse train Pb instead of the correlation light Pc.

[0118] FIG. 38 shows the configuration of a dispersion measurement apparatus 1B according to a first modification of the above embodiment. The dispersion measurement apparatus 1B of this modification differs from the above embodiment in that it includes a photodetector 4A instead of the photodetector 4 of the above embodiment, but is otherwise identical to the above embodiment. The photodetector 4A includes a detector 400 but does not include the correlation optical system 40 of the above embodiment. Currently, detectors that can directly detect the time waveform of optical pulses having a time width on the order of nanoseconds already exist. Therefore, by using such a detector, the photodetector 4A can accurately detect the time waveform of the optical pulse train Pb without the correlation optical system 40. However, if the response speed of the detector 400 is insufficient, for example, when the time width of the optical pulse train Pb is on the order of femtoseconds, the correlation optical system 40 may be used as in the above embodiment.

[0119] When the light detecting unit 4A does not have the correlation optical system 40 as in this modification, in detection step S103 shown in Fig. 20, the light detecting unit 4A detects the time waveform of the light pulse train Pb instead of the correlated light Pc. Specifically, the detector 400 receives the light pulse train Pb that has passed through the optical component 7 and detects the time waveform of the light pulse train Pb. The detector 400 detects the time waveform of the light pulse train Pb by converting the intensity of the light pulse train Pb into an electrical signal. The electrical signal is provided to the calculation unit 5b.

[0120] In this modification, in calculation step S104 shown in FIG. 20, the calculation unit 5b estimates the amount of chromatic dispersion of the optical component 7 from the time waveform of the optical pulse train Pb. Specifically, the calculation unit 5b first acquires a feature amount of the time waveform of the optical pulse train Pb that has been theoretically calculated in advance (or measured in advance) assuming that the amount of chromatic dispersion of the optical component 7 is zero. This feature amount may be stored in advance in the auxiliary storage device 57 (see FIG. 19). The calculation unit 5b also acquires a feature amount of the time waveform of the optical pulse train Pb detected in detection step S103. This feature amount is, for example, at least one of the peak intensity, full width at half maximum, and peak time interval of the optical pulses Pb1 and Pb2. Next, the calculation unit 5b compares the feature amount of the time waveform of the optical pulse train Pb that has been theoretically calculated in advance (or measured in advance) assuming that the amount of chromatic dispersion of the optical component 7 is zero with the feature amount of the time waveform of the optical pulse train Pb detected in detection step S103, thereby estimating the amount of chromatic dispersion of the optical component 7.

[0121] In this modification, as in the above embodiment, the pulse widths of the optical pulses Pb1 and Pb2 emitted from the optical component 7 are reduced, making it possible to suppress a decrease in the accuracy of detecting the peak interval between the optical pulses Pb1 and Pb2. Furthermore, the peak intensities of the optical pulses Pb1 and Pb2 emitted from the optical component 7 are increased, making it possible to suppress a decrease in the accuracy of detecting the time waveform of the optical pulse train Pb. Therefore, the amount of chromatic dispersion of the optical component 7 can be measured with high accuracy.

[0122] (Second Modification) 39 is a diagram showing the configuration of a dispersion measurement apparatus 1C according to a second modification of the above embodiment. This modification differs from the above embodiment in that the optical component 7 to be measured is arranged on the optical path between the pulse laser source 2 and the pulse forming unit 3, rather than on the optical path between the pulse forming unit 3 and the light detection unit 4, but is the same as the above embodiment in other respects. In this modification, the optical pulse Pa output from the pulse laser source 2 passes through the optical component 7 and then enters the pulse forming unit 3.

[0123] In this modification, after the optical pulse Pa passes through the optical component 7, the pulse forming unit 3 forms an optical pulse train Pb from the optical pulse Pa in a pulse forming step S102. At this time, the optical pulse Pa is given a group delay dispersion with an opposite sign to the group delay dispersion of the optical component 7. Then, in a detection step S103, the correlation optical system 40 generates correlated light Pc from the optical pulse train Pb, and the detector 400 detects the time waveform of the correlated light Pc. Alternatively, as in the first modification, the correlation optical system 40 may not be provided, and the detector 400 may detect the time waveform of the optical pulse train Pb. The calculation unit 5b estimates the amount of chromatic dispersion of the optical component 7 from the time waveform of the correlated light Pc or the optical pulse train Pb.

[0124] As in this modification, the optical component 7 to be measured may be disposed on the optical path between the pulse laser source 2 and the pulse forming unit 3. Even in this case, as in the above embodiment, the pulse widths of the optical pulses Pb1 and Pb2 emitted from the optical component 7 are reduced, so that it is possible to suppress a decrease in the detection accuracy of the peak interval between the optical pulses Pb1 and Pb2 (or the peak interval between the multiple optical pulses included in the correlated light Pc). Furthermore, the peak intensities of the optical pulses Pb1 and Pb2 emitted from the optical component 7 are increased, so that it is possible to suppress a decrease in the detection accuracy of the time waveform of the optical pulse train Pb (or the time waveform of the correlated light Pc). Therefore, the amount of chromatic dispersion of the optical component 7 can be measured with high accuracy. [Explanation of symbols]

[0125] 1A, 1B... Dispersion measuring device, 2... Pulse laser light source, 3... Pulse forming unit, 3a... Optical input terminal, 3b... Optical output terminal, 4, 4A... Optical detection unit, 4a... Optical input terminal, 5... Control device, 5a... Control unit, 5b... Calculation unit, 5c... Input unit, 5d... Output unit, 7... Optical component, 7a... Optical input terminal, 7b... Optical output terminal, 12... Diffraction grating, 13... Lens, 14... Spatial light modulator (SLM), 15... Lens, 16... Diffraction grating, 17 ...modulation surface, 17a...modulation region, 20...modulation pattern calculation device, 21...arbitrary waveform input unit, 22...phase spectrum design unit, 23...intensity spectrum design unit, 24...modulation pattern generation unit, 25...Fourier transform unit, 26...function substitution unit, 27...waveform function correction unit, 28...inverse Fourier transform unit, 29...target generation unit, 29a...Fourier transform unit, 29b...spectrogram correction unit, 40, 40A, 40 B, 40C... correlation optical system, 40b... optical output terminal, 40c to 40f... optical path, 41... lens, 42... optical element, 43... lens, 44... beam splitter, 45, 46... mirror, 47, 49... moving stage, 48... mirror, 51... processor (CPU), 52... ROM, 53... RAM, 54... input device, 55... output device, 56... communication module, 57... auxiliary storage device, 400... detector, A, B... direction, P1... light, P2... modulated light, Pa... optical pulse (first optical pulse), Pb, Pba, Pbb... optical pulse train, Pb1, Pb2... optical pulse (second optical pulse), Pc... correlation light, Pd... optical pulse train, Pd1, Pd2... optical pulse, Pr... reference optical pulse, S101... output step, S102... pulse formation step, S103... detection step, S104... calculation step, SC... control signal.

Claims

1. An apparatus for measuring the amount of chromatic dispersion of an object to be measured having positive or negative group delay dispersion, a light source that outputs a first light pulse; a pulse forming unit that has a spatial light modulator that presents a phase pattern for generating modulated light by giving the first light pulse a predetermined phase shift for each wavelength, and that forms, from the first light pulse, an optical pulse train that is the modulated light including a plurality of second light pulses that have a time difference from each other and different center wavelengths; a light detection unit that detects a time waveform of the optical pulse train; a calculation unit electrically connected to the light detection unit, the measurement object is disposed on an optical path between the light source and the pulse forming unit, or on an optical path between the pulse forming unit and the light detecting unit, the calculation unit estimates the amount of chromatic dispersion of the object to be measured based on the feature amount of the time waveform; the phase pattern includes a pattern for imparting to the first optical pulse a group delay dispersion having an opposite sign to a group delay dispersion possessed by the object to be measured, a control unit that stores a first phase pattern for imparting positive group delay dispersion to the first optical pulse and a second phase pattern for imparting negative group delay dispersion to the first optical pulse, and selectively outputs the first phase pattern and the second phase pattern to a spatial light modulator.

2. the optical detection unit has a correlation optical system that receives the optical pulse train and outputs correlated light including cross-correlation or autocorrelation of the optical pulse train, and detects the time waveform of the correlated light instead of the time waveform of the optical pulse train; The dispersion measuring device according to claim 1 , wherein the calculation unit estimates the amount of chromatic dispersion of the measurement object based on a feature amount of the time waveform of the correlated light.

3. 3. The dispersion measuring device according to claim 1, wherein an absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern is within an expected range of absolute values ​​of the group delay dispersion to be measured.

4. 3. The dispersion measuring device according to claim 1, wherein an absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern is equal to an absolute value of the group delay dispersion in design of the object to be measured.

5. 5. The dispersion measuring device according to claim 1, wherein the measurement object is disposed on an optical path between the pulse forming section and the optical detecting section.

6. 6. The dispersion measurement device according to claim 1, wherein the wavelength characteristics of the spectral phase imparted to the first optical pulse by the phase pattern are symmetrical with respect to a central wavelength of the first optical pulse, and have a characteristic in which the spectral phase increases and then decreases with increasing distance from the central wavelength.

7. 6. The dispersion measurement device according to claim 1, wherein the wavelength characteristics of the spectral phase imparted to the first optical pulse by the phase pattern are symmetrical with respect to a center wavelength of the first optical pulse, and have a characteristic in which the spectral phase decreases and then increases with increasing distance from the center wavelength.

8. A method for measuring a chromatic dispersion amount of an object to be measured having positive or negative group delay dispersion, comprising: an output step of outputting a first optical pulse; a pulse forming step of forming, from the first light pulse, an optical pulse train that is the modulated light including a plurality of second light pulses that have a time difference from one another and different center wavelengths, using a spatial light modulator that presents a phase pattern for generating modulated light by giving the first light pulse a predetermined phase shift for each wavelength; a detection step of detecting a time waveform of the optical pulse train; a calculation step of estimating the amount of chromatic dispersion of the object to be measured, In the pulse forming step, the optical pulse train is formed from the first optical pulse that has passed through the object to be measured, or in the detecting step, a time waveform of the optical pulse train that has passed through the object to be measured is detected; In the calculation step, the amount of chromatic dispersion of the object to be measured is estimated based on the feature amount of the time waveform; the phase pattern includes a pattern for imparting to the first optical pulse a group delay dispersion having an opposite sign to a group delay dispersion possessed by the object to be measured, a first phase pattern for imparting positive group delay dispersion to the first optical pulse, and a second phase pattern for imparting negative group delay dispersion to the first optical pulse, which are stored in advance, and selectively output to the spatial light modulator in the pulse forming step.

9. In the detecting step, correlated light including cross-correlation or auto-correlation of the optical pulse train is generated, and the time waveform of the correlated light is detected instead of the time waveform of the optical pulse train; 9. The dispersion measuring method according to claim 8, wherein the calculation step estimates the amount of chromatic dispersion of the object to be measured based on a feature amount of the time waveform of the correlated light.

10. 10. The dispersion measurement method according to claim 8, wherein an absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern is within an expected range of absolute values ​​of the group delay dispersion to be measured.

11. 10. The dispersion measurement method according to claim 8, wherein an absolute value of the group delay dispersion imparted to the first optical pulse by the phase pattern is equal to an absolute value of the group delay dispersion in design of the object to be measured.

12. 12. The dispersion measurement method according to claim 8, wherein the wavelength characteristics of the spectral phase imparted to the first optical pulse by the phase pattern are symmetrical with respect to a central wavelength of the first optical pulse, and have a characteristic in which the spectral phase increases and then decreases with increasing distance from the central wavelength.

13. 12. The dispersion measurement method according to claim 8, wherein the wavelength characteristics of the spectral phase imparted to the first optical pulse by the phase pattern are symmetrical with respect to a central wavelength of the first optical pulse, and have a characteristic that the spectral phase decreases and then increases with increasing distance from the central wavelength.

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