Semiconductor devices and methods of making and operating same

Abstract

The semiconductor device comprises a crystalline substrate and a nanowire epitaxially disposed on the crystalline substrate. The nanowire comprises a gating layer disposed on the substrate, a quantum well disposed on the gating layer, an intermediate barrier disposed between the gating layer and the quantum well, and a top barrier disposed above the quantum well. Incorporating a gating layer into the nanowire allows for bottom gating of the quantum well without the need for the substrate to incorporate a bottom gate. Methods of operating the semiconductor device and methods of manufacturing the semiconductor device are also provided.

Description

[Background technology]

[0001] Topological quantum computing is based on the phenomenon that non-abelian anyons in the form of "Majorana zero modes" (MZMs) can form in regions where semiconductors are coupled to superconductors. Non-abelian anyons are a type of quasiparticle—excitations in an electron liquid that, while not strictly particles, behave at least partially like particles. MZMs are specific bound states of such quasiparticles. Under certain conditions, these states can form near the semiconductor-superconductor interface in nanowires made from lengths of semiconductor coated with a superconductor. When MZMs are induced in a nanowire, it is said to be in the "topological regime." Inducing this requires cooling the nanowire to a temperature that induces superconducting behavior in superconductor materials, along with a magnetic field, which is conventionally applied externally. It may also require gating a portion of the nanowire with an electrostatic potential.

[0002] By forming a network of such nanowires and inducing topological regimes in places along the network, it is possible to create quantum bits (qubits), which can be manipulated for quantum computing purposes. A quantum bit, also called a qubit, is an element on which a measurement with two possible outcomes can be performed, but which at any given time (when not measured) can actually be in a quantum superposition of two states corresponding to those different outcomes.

[0003] To induce MZMs, the device is cooled to a temperature where the superconductor (e.g., aluminum, Al) exhibits superconducting behavior. The superconductor induces a proximity effect in the adjacent semiconductor, which causes the region of the semiconductor near the interface with the superconductor to also exhibit superconducting properties, i.e., inducing topological phase behavior in the superconductor and the adjacent semiconductor. It is within this region of the semiconductor that MZMs form.

[0004] Another condition for inducing a topological phase in which MZM can occur is the application of a magnetic field to lift (lift) the spin degeneracy in a semiconductor. Degeneracy, in the context of quantum systems, refers to the case where different quantum states have the same energy levels. Lifting degeneracy refers to forcing the states to adopt different energy levels. Spin degeneracy refers to the case where different spin states have the same energy levels. Spin degeneracy can be lifted by a magnetic field, resulting in energy level splitting between differently spin-polarized electrons. This is known as the Zeeman effect. Typically, the magnetic field is applied by an external electromagnet. However, U.S. Patent Application No. 16 / 246,287 also discloses a heterostructure in which a layer of ferromagnetic insulator is placed between the superconductor and the semiconductor to internally apply a magnetic field to lift the spin degeneracy without the need for an external magnet. Examples given of ferromagnetic insulators include EuS, GdN, Y3Fe5O, and others. 12 , Bi3Fe5O 12 , YFeO3, Fe2O3, Fe3O4, GdN, Sr2CrReO6, CrBr3 / CrI3, YTiO3 (heavy elements are europium, gadolinium, yttrium, iron, strontium and ruthenium).

[0005] Inducing an MZM also typically requires gating the nanowire with an electrostatic potential, which is applied using a gate electrode. Applying an electrostatic potential manipulates the number of charge carriers in the conduction or valence band of the semiconductor component. Summary of the Invention

[0006] In one aspect, the present invention provides a semiconductor device comprising a crystalline substrate and a nanowire epitaxially disposed on the crystalline substrate. The nanowire comprises a gating layer disposed on the substrate, a quantum well disposed on the gating layer, an intermediate barrier disposed between the gating layer and the quantum well, and a top barrier disposed above the quantum well. Incorporating the gating layer into the nanowire allows for bottom gating of the quantum well without the substrate having to incorporate a bottom gate.

[0007] A related aspect provides a method of operating a semiconductor device, the method comprising applying an electrostatic potential to a gating layer, whereby the gating layer acts as a gate electrode for gating a quantum well.

[0008] Another aspect provides the use of a semiconductor layer for gating a quantum well, the semiconductor layer underlying the quantum well, with an intermediate barrier between the semiconductor layer and the quantum well, the intermediate barrier comprising a further semiconductor layer. The semiconductor layer, the quantum well, and the intermediate barrier may each be components of a nanowire. The use may be in the context of a device as described herein.

[0009] In yet a further aspect, the present invention provides a method for manufacturing a semiconductor device, the method comprising the steps of forming a mask over a crystalline substrate, the mask having an opening defining an area for growing a nanowire, and subsequently growing a nanowire epitaxially on the crystalline substrate in the area, wherein growing the nanowire comprises growing a bottom barrier over the substrate, growing a gating layer over the bottom barrier, growing an intermediate barrier over the gating layer, growing a quantum well over the intermediate barrier, and growing a top barrier over the quantum well.

[0010] This Summary is provided to introduce some concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. The claimed subject matter is not limited to implementations that solve any or all of the disadvantages discussed herein. [Brief explanation of the drawings]

[0011] To assist in understanding embodiments of the present disclosure and to show how those embodiments may be carried into effect, reference will now be made, by way of example only, to the accompanying drawings, in which: [Figure 1] FIG. 1 is a schematic perspective view showing an example of a semiconductor device. [Figure 2] 1 illustrates an exemplary configuration of a gate electrode of a semiconductor device. [Figure 3] 1 is a side view of an example semiconductor device including a first example set of electrical contacts. [Figure 4] FIG. 1 is a perspective view of an example semiconductor device including a second example set of electrical contacts. [Figure 5] FIG. 5 is a plan view of the device of FIG. [Figure 6] 1 is a flowchart outlining a method for manufacturing a semiconductor device.

[0012] The drawings are schematic and not to scale. DETAILED DESCRIPTION OF THE INVENTION

[0013] The verb 'have' is used herein as shorthand for 'comprise or consist of.' In other words, although the verb 'have' is intended to be an open term, particularly when used in connection with chemical compositions, replacement of this term with the closed term 'consisting of' is expressly contemplated.

[0014] Directional terms such as "top," "bottom," "left," "right," "upper," "lower," "horizontal," and "vertical" are used herein for convenience of explanation and relate to the orientation shown in the associated figures. For the avoidance of doubt, the terms are not intended to limit the orientation of the device in an external coordinate system.

[0015] As used herein, the term "superconductor" refers to a material that has a critical temperature T c Refers to a material that becomes superconducting when cooled to a lower temperature. The use of this term is not intended to limit the temperature of the device.

[0016] A "nanowire" is an elongated member having a nanoscale width and a length-to-width ratio of at least 10, or at least 100, or at least 500, or at least 1000. Nanowires typically have widths in the range of 10-500 nm, optionally 50-100 nm or 75-125 nm. The length is typically on the order of micrometers, e.g., at least 1 μm or at least 10 μm. For example, nanowires can have lengths in the range of 2-20 μm and widths in the range of 40-200 nm.

[0017] A "semiconductor-superconductor hybrid structure" has a semiconductor component and a superconductor component that can be coupled together under certain operating conditions. In particular, the term refers to a structure capable of exhibiting topological behavior, such as Majorana zero modes, or other excitations useful in quantum computing applications. The operating conditions generally include cooling the structure to a temperature below the Tc of the superconductor component, applying a magnetic field to the structure, and applying electrostatic gating to the structure. Typically, at least a portion of the semiconductor component is in intimate contact with the superconductor component; for example, the superconductor component may be epitaxially grown on the semiconductor component. However, certain device structures have been proposed that have one or more additional components between the semiconductor component and the superconductor component.

[0018] Various approaches have been taken to gating semiconductor devices, and it would be particularly useful to provide bottom-gated devices.

[0019] Implementing bottom gating for vapor-liquid-solid (VLS) grown nanowires is relatively straightforward. To fabricate a device containing VLS nanowires, the nanowires are first grown on a growth substrate. Nanowires produced by VLS are vertically oriented: their length axis is perpendicular to the plane of the growth substrate. The nanowires are then cleaved from the growth substrate and placed in a horizontal orientation on a device substrate. Prior to application of the nanowires, a bottom gate electrode, e.g., in the form of a patterned metal layer, can be previously formed on the device substrate.

[0020] Devices based on VLS nanowires have limited scalability due to the requirement to cleave the nanowires from the growth substrate. Positioning the nanowires is a delicate and time-consuming process that quickly becomes impractical as device complexity increases.

[0021] Another technique for fabricating nanowires is selective area growth. Selective area growth involves the use of a mask, allowing crystalline semiconductor to be selectively grown in areas defined by openings in the mask. Selective area growth produces horizontally oriented nanowires, which are grown directly on the device substrate; therefore, no cleaving or transfer is performed. This can make it possible to create relatively complex networks of nanowires.

[0022] Bottom-gating of selective-area grown nanowires is challenging. One approach is to configure the substrate as a bottom gate, for example, by forming a conductive buffer layer over the surface of the substrate before forming the mask. While this approach allows bottom-gating to be achieved, it has limitations. The conductive buffer layer limits the possible circuit designs. Also, because the mask is formed after the conductive buffer layer is formed, charge traps can be created between the nanowire and the buffer layer, which can adversely affect device performance.

[0023] Provided herein are semiconductor devices that incorporate bottom-gating of selective-area-grown nanowires while enabling the use of insulating substrates. The devices may be particularly useful as components of qubit devices, but are also applicable in other situations where bottom-gating control of quantum wells is desired.

[0024] An example semiconductor device 100 will now be described with reference to Figure 1. The device comprises nanowires disposed on a substrate 110. Figure 1 is a schematic perspective view of device 100.

[0025] The device 100 includes a substrate 110. The substrate comprises a wafer, i.e., a piece of single-crystal material. One example of a wafer material is indium phosphide. Other examples of wafer materials include gallium arsenide, indium antimonide, indium arsenide, and silicon.

[0026] The substrate may consist of a wafer, or it may be a functionalized wafer further comprising additional structures, for example integrated electrical circuits.

[0027] A dielectric mask 112 is disposed on the wafer. The nanowires provided herein can be fabricated using selective area growth, which utilizes the mask 112 to control the locations where epitaxial growth of components occurs. The mask 112 can comprise any material that provides selectivity during growth, and in particular, can comprise an amorphous dielectric material. The components can be grown using techniques such as molecular beam epitaxy ("MBE"), metalorganic vapor phase epitaxy ("MOVPE"), or the like. The mask 112 is typically not removed after growing the components and therefore remains present in the finished device. An example of a dielectric material useful for forming the mask is silicon oxide (SiO ). x , silicon nitride SiN x , aluminum oxide AlO x , and hafnium oxide HfO x Includes.

[0028] The nanowires, which in this example are nanowires obtainable by selective area growth (also referred to as "SAG nanowires"), extend from the surface of the substrate 110 through openings in the dielectric mask 112. The nanowires are oriented horizontally; in other words, their length dimension is parallel to the surface of the substrate. The relative heights of the nanowires shown in FIG. 1 are exaggerated.

[0029] The nanowire has multiple layers, including a gating layer 140 and a quantum well 160 arranged in a sandwich structure with further barrier layers 130, 150, and 170. The quantum well 160 is the active region of the device, and in use, it is within this layer that the quantum excitations of interest are generated. The gating layer 140 acts as a bottom gate for the quantum well 160.

[0030] Integrating the bottom gate into the SAG nanowire itself, as opposed to the substrate, removes the design constraints imposed by incorporating the bottom gate into the substrate. As an example, the substrate may be an insulating substrate, thereby allowing electrical circuitry to be formed on the substrate. This may allow the semiconductor device to be incorporated into a wider range of systems.

[0031] The nature of the gating layer 140 is not particularly limited, provided that the gating layer 140 is capable of providing an electrostatic field for gating the quantum well 160 when connected to a voltage source. The gating layer 140 may be a quantum well. Alternatively, the gating layer 140 may be a semiconductor, particularly a doped semiconductor. A doped semiconductor has a relatively high electrical conductivity compared to an undoped semiconductor.

[0032] We now discuss each of the various layers present in this example nanowire in turn.

[0033] The bottom layer of this example nanowire is an optional buffer layer 120. Buffer layer 120 is epitaxially disposed on the surface of crystalline substrate 110. Because the nanowire is formed by epitaxial growth, good lattice matching between immediately adjacent layers of the nanowire is desirable. In other words, adjacent layers desirably have as similar a lattice constant as possible. To this end, buffer layer 120 may comprise a material selected to have a lattice constant between that of the crystalline substrate and that of the next layer, which in this example is bottom barrier 130. A suitable buffer layer may be provided between any two components of the device.

[0034] A bottom barrier 130 is disposed above the buffer layer 120. The bottom barrier is an insulating component that serves to localize charge within the gating layer 140. The bottom barrier may have a layer of a single material or may have multiple layers of two or more different materials. For example, the bottom barrier may have an alternating stack of layers of two different materials. The number of such layers is not particularly limited.

[0035] The nanowire components may comprise III-V or II-VI semiconductor materials, which may be compounds or alloys comprising at least one group III element selected from indium, aluminum, and gallium, and at least one group V element selected from arsenic, phosphorus, and antimony.

[0036] The buffer layer and / or the lower barrier layer may each independently be represented by Formula 1: Al x In y Ga z As where the values ​​of x, y, and z are independently selected and range from 0 to 1. The sum of x, y, and z may be 1. The material may be selected from indium arsenide, aluminum indium arsenide, indium gallium arsenide, aluminum gallium arsenide, and aluminum indium gallium arsenide.

[0037] The inclusion of a separate buffer layer is optional, and the lower barrier layer may be disposed directly on the surface of the substrate. The lower barrier layer may have two or more layers of two or more different materials, each of which may be a material of Formula 1.

[0038] A gating layer 140 is disposed on the bottom barrier 130 and sandwiched between the bottom barrier 130 and the intermediate barrier 150. The gating layer 140 comprises a layer of semiconductor material having a relatively small bandgap compared to the bandgaps of the bottom barrier 130 and the intermediate barrier 150.

[0039] The gating layer 140 may comprise a material of Formula 1. By varying the values ​​of x, y, and z, it is possible to control the electronic properties of the material, particularly the bandgap. For example, the barrier layer may comprise aluminum gallium arsenide, and the quantum well layer may comprise gallium arsenide.

[0040] In use, the gating layer 140 acts as a conductive layer, and charge is localized within the gating layer 140. This allows the gating layer 140 to be operated as a gate electrode to gate the quantum well 160.

[0041] An intermediate barrier 150 is disposed on the gating layer 140. Like the lower barrier 130, the intermediate barrier 150 is an insulating component. The intermediate barrier 150 functions as a gate dielectric to prevent current flow between the gating layer 140 and the quantum well 160.

[0042] The middle barrier 150 may have a structure similar to the bottom barrier 130 and may include one or more layers of relatively high bandgap semiconductor material(s), such as the material of Formula 1.

[0043] In the illustrated example, the intermediate barrier has a first layer 152, a second layer 154, and a third layer 156. Constructing a barrier from multiple layers can provide defect filtering, i.e., reduce the effect of dislocations in the crystalline structure of the material used.

[0044] Disposed on the intermediate barrier 150 is a quantum well 160. The quantum well 160 may comprise a layer of semiconductor material with a bandgap that is relatively small compared to the bandgap of the barrier. Materials useful for forming quantum wells are described, for example, in Odoh and Njapba, “A Review of Semiconductor Quantum Well Devices,” Advances in Physics Theories and Applications, vol. 46, 2015, pp. 26-32, and in S. Kasap and P. Capper (eds.), “Springer Handbook of Electronic and Photonic Materials,” DOI 10.1007 / 978-3-319-48933-9_40.

[0045] The quantum well 160 is the active working component of the semiconductor device. In use, an excitation of interest, such as a Majorana zero mode, can be generated within the quantum well 160, and the gating layer 140 acts as a bottom gate for the quantum well 160.

[0046] In this example, a top barrier 170 is disposed above the quantum well 160. The top barrier 170 may be similar in structure to the bottom and middle barriers 130, 150. The top barrier 170 may comprise one or more layers of the material of Formula 1.

[0047] A superconductor component 180 is disposed on the top barrier 170. This example device is configured as a semiconductor-superconductor hybrid device. In other words, the superconductor component 180 may be configured to undergo energy level hybridization with the material of the quantum well 160. The top barrier 170 may serve to adjust the strength of the interaction between the quantum well 160 and the superconductor component 180.

[0048] When present, the nature of the superconductor is not particularly limited and can be selected appropriately. The superconductor is typically an s-wave superconductor. Any of a variety of s-wave superconductors known in the art may be used. Examples include aluminum, indium, tin, and lead, with aluminum being preferred in some circumstances. In embodiments in which aluminum is used, the superconductor component may have a thickness in the range of, for example, 3-20 nm.

[0049] Various modifications may be made to the illustrated structure. For example, the top barrier 170 is optional and may be omitted. The superconductor component 180 may be omitted. The device may include more than one quantum well. The device may include more than one gating layer. For example, the superconductor component 180 may be replaced with an additional gating layer configured to function as a top gate.

[0050] The bottom gating provided by the first quantum well 140 may be used in combination with other forms of gating. Different portions of the device may be gated differently, allowing for even finer control of the device's behavior. Example configurations of additional gate electrodes for the semiconductor devices described herein are now described with reference to Figure 2, which is a simplified schematic cross-sectional view of an exemplary device.

[0051] Generally, a structure for providing gating includes a gate electrode and a gate dielectric to prevent current flow between the gate electrode and further components of the device, and such a structure may be referred to as a gate stack.

[0052] Figure 2 shows an example device 200 including a dielectric mask 212, a semiconductor device 220, and a substrate 210, as described with reference to Figure 1. Details of the semiconductor device 220 have been omitted from the figure for clarity of presentation. Device 200 differs from device 100 in that it is side-gated and top-gated.

[0053] Side gating is provided by side gate 230, which is an electrode laterally separated from semiconductor device 220 by a space S, which acts as a gate dielectric between side gate 230 and semiconductor device 220. Space S may be empty, as shown, or may have a layer of dielectric material disposed within it.

[0054] 2 also shows an example of a gate stack for a top gate, which includes a gate electrode 240 and a gate dielectric 242. The gate electrode 240 extends over the semiconductor device 220 and is separated from the semiconductor device 220 by the gate dielectric 242.

[0055] Examples of materials useful for forming the gate dielectric include aluminum oxide, hafnium oxide, silicon oxide, and silicon nitride. Although the gate dielectric 242 is shown as a single layer, there may be two or more layers of dielectric material.

[0056] When a superconductor component is disposed between the semiconductor component and the gate stack, the superconductor component may shield the semiconductor component from the electrostatic field applied by the gate stack. Therefore, top gating or side gating is typically applied to portions of the device that do not include the superconductor component. Alternatively, a top gate or side gate may be aligned with a face of the semiconductor component that does not carry the superconductor component.

[0057] The illustrated example includes a top gate and a side gate, although in practice the device may include any number of gates, and the properties of each gate may be independently selected as appropriate.

[0058] In use, the gating layer and quantum well are each connected to a respective electrical contact. The electrical contacts can be arranged in a variety of ways. A first example arrangement is shown in Figure 3, which is a cross-sectional view along the length of an example nanowire.

[0059] The example nanowire 300 includes a gating layer 340 and a quantum well 360. The gating layer 340 is sandwiched between a bottom barrier 330 and a middle barrier 350. The quantum well 360 is sandwiched between the middle barrier 350 and a top barrier 370. A superconductor component 380 is disposed above the quantum well 360 and separated from the quantum well 360 by the top barrier 370. The gating layer, quantum well, barriers, and superconductor component may be as described above with reference to FIG.

[0060] In the end regions, the nanowire 300 connects to a first electrical contact 390 for the gating layer 340 and a second electrical contact 395 for the quantum well 360 .

[0061] To avoid creating a short, the first electrical contact 390 and the second electrical contact 395 are insulated from each other. In the illustrated example, portions of the upper barrier layer 370 and the quantum well 360 have been removed, for example by etching. The lower barrier 330, the gating layer 340, and the middle barrier 350 extend further than the upper barrier layer 370 and the quantum well 360. This allows the first electrical contact 390 to be laterally spaced from the second electrical contact 395a.

[0062] A vertical separation between the first electrical contact 390 and the second electrical contact 395a is provided by disposing the first electrical contact 390 on the lower barrier 330 and the second electrical contact on the middle barrier 350.

[0063] The gating layer 340 is for applying an electrostatic field to the quantum well 360. Therefore, the gating layer is typically connected to only one electrical contact 390. No current needs to flow through the gating layer 340.

[0064] In contrast, it may be desirable to allow current flow through quantum well 360. Quantum well 360 therefore typically connects to a further electrical contact 395b located at the second end of nanowire 300.

[0065] A second exemplary arrangement of electrical contacts is shown in Figures 4 and 5. Figure 4 is a schematic perspective view of an area of ​​one end of an exemplary device 400, and Figure 5 is a schematic plan view of device 400.

[0066] 1, example device 400 includes a gating layer 440 and a quantum well 460 sandwiched between bottom, middle, and top barriers 430, 450, 470. Above quantum well 460, a superconductor component 480 is disposed on top barrier 470.

[0067] The example device 400 differs from device 300 in that one end of the nanowire is bifurcated into two limbs 402, 404. As shown in Figure 5, the nanowire includes a section that resembles a 'T' junction when viewed in plan. A first electrical contact 490 for the gating layer 440 connects to the first limb 402 of the nanowire, and a second electrical contact 495a for the quantum well 460 connects to the second limb 404 of the nanowire.

[0068] To allow easier connection to the gating layer 440, the top barrier 470 and quantum well 460 may be selectively removed from the first rim 402, for example by etching.

[0069] Placing these electrical contacts on different rims of the branched nanowires is one technique for avoiding short circuits. Additionally, this configuration allows for the inclusion of a cutter gate 499 that can be operated to selectively deplete the quantum well 460 while allowing the gating layer 440 to continue to operate as a gate electrode.

[0070] A cutter gate 499 is disposed on the second rim 404 of the branched nanowire. A first electrical contact 490 on the first rim 402 is downstream of the cutter gate 499. The cutter gate 499 is shown as a single piece of material. In practice, a gate dielectric would be disposed between the cutter gate 499 and the remaining components of the device to prevent current flow from the cutter gate. The cutter gate 499 may be a wrap-around gate as shown, or may take any other suitable form.

[0071] In use, the cutter gate 499 can be operated to isolate the quantum well 460 from the electrical contact 495. This can be achieved by the placement of the cutter gate 499 on the rim of the nanowire without simultaneously isolating the gating layer 440 from the first electrical contact 490. This allows the cutter gate and the gating layer to be operated separately and independently of each other.

[0072] Similar to device 300, an additional electrical contact 495b for quantum well 460 may be provided at the opposite end of the nanowire.

[0073] Various modifications can be made to the illustrated structure.

[0074] The branch 402 carrying the first electrical contact 490 is shown near the end of the nanowire, however, the branch 402 may be located anywhere along the length of the nanowire, as long as the branch 402 is on the opposite side of the cutter gate from the second electrical contact.

[0075] The illustrated example has a single cutter gate 499. Additional cutter gates may be disposed between the additional electrical contact 495b and the branch 402.

[0076] Although the illustrated branches are in the form of T-junctions, the angle between the branches and the length of the nanowire need not necessarily be a right angle and can be chosen as appropriate.

[0077] Also provided herein are methods for operating a semiconductor device. In implementations where the device includes a superconductor component, the device can be cooled to the operating temperature of the semiconductor component, for example, using a suitable cryogenic chamber. A magnetic field can be applied to the device. An electrostatic potential is applied to a gating layer, which causes the gating layer to behave as a gate electrode for gating a quantum well. Useful quantum states, e.g., Majorana zero modes, can be generated in the quantum well. Measurements can be performed on the quantum well. The device can be used, for example, as a component of a qubit device.

[0078] An example of a method for manufacturing a semiconductor device provided herein will now be described with reference to Figure 6. Figure 6 is a flow diagram outlining the method.

[0079] The method involves fabricating the semiconductor components of the device using selective area growth, followed by any desired post-fabrication processing, such as adding electrical contacts and forming the superconductor components.

[0080] At block 601, a mask is formed on a crystalline substrate. The mask has at least one opening that defines an area where a semiconductor component will be grown. The mask can be formed by any suitable technique. Typically, the mask is formed by a lithography process, such as electron beam lithography.

[0081] Forming a mask using electron beam lithography involves applying a layer of resist to a crystalline substrate, for example by spin coating, selectively exposing areas of the resist to an electron beam, and then developing the resist to form the mask.

[0082] The various layers of the semiconductor device are then grown in sequence in the areas defined by the openings in the mask. These layers may be grown by molecular beam epitaxy, metalorganic vapor phase epitaxy ("MOVPE"), or any other suitable process for epitaxially growing crystalline materials.

[0083] Each growth process may be performed in the same growth chamber. The substrate may be maintained in the same growth chamber until all of the growth steps are completed. In other words, the substrate is preferably not exposed to the atmosphere during the growth steps. This may improve the quality of the interface between layers, thereby avoiding the generation of charge traps, which may degrade device performance. For example, charge traps have been found to be generated when a bottom gate is formed before forming a mask, such as as a buffer layer covering the entire surface of the substrate.

[0084] The growth process includes growing the bottom barrier portion of the nanowire in the area defined by the opening in the mask, at block 602. Optionally, this step may be preceded by growing a buffer layer in the opening. In implementations where the bottom barrier includes multiple layers of material, each layer is deposited sequentially.

[0085] At block 603, a gating layer is grown over the bottom barrier.

[0086] An intermediate barrier is then grown over the gating layer in block 604. Similar to the process of block 602, in implementations where the intermediate barrier includes multiple layers, the intermediate barrier is built layer by layer.

[0087] Then, in block 605, quantum wells are grown on top of the intermediate barrier.

[0088] A top barrier may then be grown over the quantum well in block 606. The top barrier, like the bottom and middle barriers, may include multiple layers of material or may be a single layer.

[0089] After growing the semiconductor component, a superconductor component can be fabricated on the nanowire. For example, a layer of superconductor can be globally deposited on the surface of the substrate and then selectively etched to pattern the desired superconductor component from the superconductor layer. This deposition can be performed in the same chamber as the growth step or using a different apparatus. In some implementations, the chamber can be a vacuum chamber. In such implementations, the substrate can be kept under vacuum until after the superconductor material has been deposited.

[0090] Electrical contacts and / or additional gate electrodes can then be added to the device. In implementations where the device has a superconductor component, the electrical contacts and / or gate electrodes can be formed simultaneously with the superconductor component or can be formed from a non-superconducting metal such as gold. Prior to forming the electrical contacts, portions of the nanowires can be selectively etched to allow easy access to the gating layer and quantum wells, such as forming the configurations shown in Figures 3 and 4. In implementations where more than one material is removed, the etching can include multiple sequential etching steps.

[0091] It will be understood that the above embodiments have been described by way of example only.

[0092] More generally, one aspect disclosed herein provides a semiconductor device having a crystalline substrate and a nanowire epitaxially disposed on the crystalline substrate. The nanowire has a gating layer, a quantum well disposed above the gating layer, an intermediate barrier disposed between the gating layer and the quantum well, and an upper barrier disposed above the quantum well. The inclusion of the gating layer within the nanowire allows for bottom gating of the quantum well without requiring modification of the substrate. Enabling bottom gating without substrate modification may enable a wider range of circuit designs, since insulating substrates may be used.

[0093] The gating layer may be a quantum well.

[0094] The nanowires can be selective area grown nanowires. The nanowires can have a periphery surrounded by a mask. The mask can be a hard mask. Circuitry can be disposed between the surface of the substrate and the mask.

[0095] The semiconductor device may further include a superconductor component disposed above the upper barrier. Incorporating a superconductor component into the device may enable interesting quantum mechanical behavior to be induced within the device. For example, in some implementations, Majorana zero modes may be generated within the quantum well. In particular, in implementations where the device is incorporated into a qubit device, the device may include a superconductor component.

[0096] The semiconductor device may further include a lower barrier disposed between the crystalline substrate and the gating layer, which may enable improved electronic properties to be obtained. The lower barrier may include two or more layers of two or more different materials. Forming the lower barrier from two or more layers may provide defect filtering.

[0097] A buffer layer may be disposed between the crystalline substrate and the bottom barrier, which may allow the bottom barrier to be grown more easily.

[0098] The intermediate barrier may have at least two layers of different materials. By constructing the barrier as a multi-layer structure, the electronic properties of the barrier may be improved. For example, the use of two or more layers may provide defect filtering.

[0099] In addition to the gating layer that allows bottom gating of the quantum well, the semiconductor device may further comprise an additional gate electrode. For example, the device may include a top gate by disposing a gate stack on top of the nanowire. Alternatively, or in addition, the semiconductor device may further comprise a side gate.

[0100] The semiconductor device may further include a first electrical contact connected to the gating layer and a second electrical contact connected to the quantum well. A third electrical contact may also be connected to the quantum well, e.g., at an opposite end of the nanowire from the second electrical contact. The gating layer may have exactly one electrical contact for applying an electrostatic field to the quantum well.

[0101] The nanowire may be branched and may have a first limb and a second limb. A first electrical contact may be connected to the first limb and a second electrical contact may be connected to the second limb. In such implementations, the semiconductor device may further include a cutter gate for electrically depleting the quantum well, the cutter gate configured to gate the second limb. This configuration allows the quantum well to be isolated from its electrical contact while simultaneously allowing the gating layer to continue to operate independently as a gate electrode.

[0102] The cutter gate may be a wrap-around gate, which may provide improved gating because the electrostatic field may be applied from more than one side of the nanowire.

[0103] A related aspect provides a method of operating a semiconductor device, the method comprising applying an electrostatic potential to a gating layer, whereby the gating layer acts as a gate electrode for gating a quantum well, and a nanowire configuration allows the gating layer to act as a bottom gate for gating the quantum well.

[0104] Another aspect provides the use of a semiconductor layer for gating a quantum well, the semiconductor layer underlying the quantum well, with an intermediate barrier between the semiconductor layer and the quantum well, the intermediate barrier comprising a further semiconductor layer. The semiconductor layer, the quantum well, and the intermediate barrier may each be components of a nanowire. The use may be in the context of a device as described herein.

[0105] A still further aspect provides a method for manufacturing a semiconductor device, the method comprising the steps of forming a mask on a crystalline substrate, the mask having openings defining areas for growing nanowires, and subsequently growing nanowires epitaxially on the crystalline substrate in the areas. In other words, the nanowires are grown by selective area growth. Growing the nanowires includes: growing a bottom barrier over the substrate; growing a gating layer over the bottom barrier; growing an intermediate barrier over the gating layer; growing a quantum well on the intermediate barrier; growing a top barrier over the quantum well; It has the following.

[0106] The growth process can be performed in a single growth chamber. The substrate can be kept in the growth chamber until the growth operation is complete. For example, in implementations where nanowires are grown in a vacuum chamber, the nanowires can be kept under vacuum at least until the nanowire growth is complete. Avoiding exposure of the substrate to open atmosphere can avoid contamination, which may allow for higher quality interfaces between layers to be obtained. For example, the formation of charge traps can be avoided. This may improve the operating characteristics of the finished device.

[0107] The method may further include fabricating any of the additional elements described herein with reference to device aspects, for example, the method may further include forming a superconductor component on the upper barrier.

[0108] The mask can be configured such that the nanowire branches to include a first rim and a second rim, and the method can further include, after growing the nanowire, selectively etching the first rim of the nanowire to expose a portion of the gating layer.

[0109] The nanowire components may be grown by any suitable process, for example, the nanowires may be grown by molecular beam epitaxy.

[0110] Given the disclosure herein, other variations or use cases of the disclosed technologies may become apparent to one of ordinary skill in the art. The scope of the present disclosure is not limited by the described embodiments, but rather only by the appended claims.

Claims

1. a crystalline substrate; nanowires epitaxially disposed on the crystalline substrate; and The nanowires are a gating layer disposed over the substrate; a quantum well disposed above the gating layer; an intermediate barrier disposed between the gating layer and the quantum well; an upper barrier disposed above the quantum well; having Semiconductor devices.

2. 10. The semiconductor device of claim 1, further comprising a bottom barrier disposed between the crystalline substrate and the gating layer.

3. 3. The semiconductor device of claim 1, further comprising a superconductor component disposed above the upper barrier.

4. The semiconductor device of claim 1 , wherein the gating layer is a quantum well.

5. 5. The semiconductor device of claim 1, wherein the intermediate barrier comprises at least two layers of different materials.

6. The semiconductor device of claim 1 , further comprising a gate stack disposed over the nanowire.

7. a first electrical contact connected to the gating layer; a second electrical contact connected to the quantum well; 7. The semiconductor device according to claim 1, further comprising:

8. 8. The semiconductor device of claim 7, wherein the nanowire is bifurcated to have a first limb and a second limb, the first electrical contact connecting at the first limb and the second electrical contact connecting at the second limb.

9. 9. The semiconductor device of claim 8, further comprising a cutter gate for electrically depleting the quantum well, the cutter gate configured to gate the second rim, and optionally the cutter gate is a wrap-around gate.

10. A method of operating a semiconductor device according to any one of claims 1 to 9, comprising the steps of: applying an electrostatic potential to the gating layer, whereby the gating layer acts as a gate electrode for gating the quantum well; A method having the following.

11. 1. A method for manufacturing a semiconductor device, comprising: forming a mask over a crystalline substrate, the mask having openings defining areas for growing nanowires; Subsequently, growing nanowires epitaxially on the crystalline substrate in the area; and Growing the nanowires comprises: growing a bottom barrier over the substrate; growing a gating layer over the lower barrier; growing an intermediate barrier over the gating layer; growing a quantum well on the intermediate barrier; growing a top barrier over the quantum well; Having that, method.

12. The method of claim 11 , wherein all of the growth processes are performed in one growth chamber.

13. The method of claim 11 or 12, wherein the nanowires are grown by molecular beam epitaxy.

14. 14. The method of any of claims 11 to 13, further comprising forming a superconductor component on the top barrier.

15. the mask is configured such that the nanowire branches to include a first rim and a second rim; The method further comprises, after growing the nanowire, selectively etching the first rim of the nanowire to expose a portion of the gating layer.

15. The method according to any one of claims 11 to 14.

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