Table device

Abstract

To provide a table device which can improve moment rigidity in a pitching direction and a yawing direction.SOLUTION: A first guide mechanism has a first slider connected to a reverse face of a table and a first rail for slidably supporting the first slider in a first direction, a second guide mechanism has a second slider connected to the reverse face of the table and a second rail for slidably supporting the second slider in the first direction, and a third guide mechanism has a third slider connected to the reverse face of the table and a third rail for slidably supporting the third slider in the first direction. The table has a V shape opening in the first direction when vied from a second direction, the first slider and the second slider are arranged at the same position in the first direction, and the third slider is arranged at a position deviated from the first slider and the second slider in the first direction.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a table device. [Background technology]

[0002] In the fields of measuring devices and machine tools, table devices having movable tables are used. For example, Patent Document 1 discloses a table device having two tables that move in the same direction.

[0003] The table device of Patent Document 1 includes a first table having a first upper surface, a second table having a second upper surface and arranged adjacent to the first table in the X direction when viewed from a direction perpendicular to the first upper surface, a first guide device that guides the first table in the X direction, and a second guide device that guides the second table in the X direction. The first upper surface of the first table and the second upper surface of the second table are aligned in the same plane, and the first guide device and second guide device are aligned in the Y direction with at least portions of them aligned in the same plane.

[0004] With this configuration, the first guide device that guides the first table in the X direction and the second guide device that guides the second table in the X direction are positioned offset in the Y direction, thereby expanding the range of movement of the first table in the X direction and the range of movement of the second table in the X direction, and making it possible to bring the first table and the second table closer together.

[0005] In the table device of Patent Document 1, the first guide device that guides the first table in the X direction includes a slider and rail of a first guide mechanism that supports one Y-direction end of the first table, and a slider and rail of a second guide mechanism that supports the other Y-direction end of the first table. The first table has a simple rectangular shape, and the slider of the first guide mechanism and the slider of the second guide mechanism are located in the same position in the X direction, so the distance between the sliders in the X direction (the so-called slider span) is zero. Therefore, improvement in moment rigidity in the pitching and yawing directions cannot be expected. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Patent No. 6323069 Summary of the Invention [Problem to be solved by the invention]

[0007] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a table device that can improve moment rigidity in the pitching direction and the yawing direction. [Means for solving the problem]

[0008] The above object of the present invention can be achieved by the following configuration. (1) A table and a guide device that guides the table in a first direction; A table device comprising: the table has a front surface and a back surface facing a second direction perpendicular to the first direction; The guide device is a first guide mechanism that supports one end of the table in a third direction that is perpendicular to the first direction and the second direction; a second guide mechanism that supports the other end of the table in the third direction; a third guide mechanism that supports an intermediate portion of the table in the third direction; and the first guide mechanism includes a first slider connected to the back surface of the table and a first rail supporting the first slider slidably in the first direction; the second guide mechanism includes a second slider connected to the back surface of the table and a second rail supporting the second slider slidably in the first direction; the third guide mechanism includes a third slider connected to the back surface of the table and a third rail supporting the third slider slidably in the first direction; the table has a V-shape that opens in the first direction when viewed from the second direction, In the first direction, the first slider and the second slider are disposed at the same position, In the first direction, the third slider is disposed at a position separated from the first slider and the second slider. Table equipment. (2) The table device includes a plurality of the tables arranged adjacent to each other in the first direction, the first guide mechanism includes a plurality of first sliders connected to the rear surfaces of the tables, the second guide mechanism includes a plurality of second sliders connected to the rear surfaces of the tables, the third guide mechanism includes a plurality of third sliders connected to the rear surfaces of the respective tables; The table device according to (1). (3) The tables adjacent to each other in the first direction can be arranged so as to partially overlap each other in a plane formed by the second direction and the third direction. (2) The table device according to (2). (4) The table device includes a plurality of drive devices connected to each of the tables to drive the tables in the first direction, Among the plurality of drive devices, the drive device connected to the odd-numbered table when counted in the first direction is disposed between the first guide mechanism and the third guide mechanism, Among the plurality of drive devices, the drive devices connected to the even-numbered tables counted in the first direction are disposed between the second guide mechanism and the third guide mechanism. A table device according to (2) or (3). [Effects of the Invention]

[0009] An object of the present invention is to provide a table device that can improve moment rigidity in the pitching direction and the yawing direction. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a plan view of a table device 1 according to this embodiment as viewed from the +Z side. [Figure 2] FIG. 2 is a plan view of the table device 100 according to the second embodiment, as viewed from the +Z side. [Figure 3] FIG. 3 is a plan view of the table device 100 according to the comparative example, as viewed from the +Z side. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The requirements of each embodiment described below can be combined as appropriate. Furthermore, some components may not be used. In the following description, an XYZ Cartesian coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ Cartesian coordinate system. A direction parallel to a first axis (X axis) within a predetermined plane is defined as a first direction (X axis direction), a direction parallel to a third axis (Y axis) within the predetermined plane that is perpendicular to the X axis is defined as a third direction (Y axis direction), and a direction parallel to a second axis (Z axis) that is perpendicular to both the X axis and the Y axis is defined as a second direction (Z axis direction). The X axis is perpendicular to the YZ plane. The Y axis is perpendicular to the XZ plane. The Z axis is perpendicular to the XY plane. The XY plane is parallel to the predetermined plane. In this embodiment, the XY plane is parallel to a horizontal plane. The Z axis direction is the vertical direction (direction of gravity).

[0012] First Embodiment First Embodiment Fig. 1 is a plan view of a table device 1 according to this embodiment, as viewed from the +Z side.

[0013] 1, table device 1 includes guide device 3 that guides multiple tables 10, 20, and 30 in the X-axis direction (first direction), and drive system 5 that can move multiple tables 10, 20, and 30 in the X-axis direction. Of the multiple tables 10, 20, and 30, the first, second, and third tables counting from the -X side in the X-axis direction are referred to as first table 10, second table 20, and third table 30, respectively.

[0014] Each of the first to third tables 10, 20, and 30 is movable and supports an object 7, such as a workpiece gripping device, a measurement probe, or a processing device. The first to third tables 10, 20, and 30 have a front surface 11, 21, and 31 facing the +Z direction and a back surface facing the opposite direction (-Z direction) of the front surfaces 11, 21, and 31. The object 7 is placed on a pair of spacers 19, 29, and 39 that protrude toward the +Z side from the front surfaces 11, 21, and 31 of the first to third tables 10, 20, and 30, respectively. The pair of spacers 19, 29, and 39 are respectively provided on first connecting portions 17, 27, and 37 and second connecting portions 18, 28, and 38, which will be described later. Note that while FIG. 1 is a plan view of the table device 1 as viewed from the +Z side, the object 7 and spacers 19, 29, and 39 on the first to third tables 10, 20, and 30 are depicted by dashed lines. The surfaces 11, 21, and 31 can support the object 7 via spacers 19, 29, and 39. In this embodiment, the surfaces 11, 21, and 31 and the back surface are each parallel to the XY plane. In this way, the object 7 is supported by the surfaces 11, 21, and 31 via the spacers 19, 29, and 39, preventing the object 7 supported on one surface (for example, surface 11) from interfering with another adjacent surface (for example, surface 21).

[0015] First table 10, second table 20, and third table 30 are arranged adjacent to each other in the X-axis direction. First table 10 is arranged on the -X side of second table 20. Second table 20 is arranged on the +X side of first table 10 and on the -X side of third table 30. Third table 30 is arranged on the +X side of second table 20. First table 10 is movable in the area (space) on the -X side of second table 20. Second table 20 is movable in the area (space) on the +X side of first table 10 and on the -X side of third table 30. Third table 30 is movable in the area (space) on the +X side of second table 20.

[0016] When viewed from the Z-axis direction, first to third tables 10, 20, 30 each have a V-shape that opens in the X-axis direction (+X side). First to third tables 10, 20, 30 each have first base portions 14, 24, 34 (one end portion in the Y-axis direction) arranged on the +Z side of first guide mechanism 40 (described later), second base portions 15, 25, 35 (the other end portion in the Y-axis direction) arranged on the +Z side of second guide mechanism 50 (described later), and third base portions 16, 26, 36 (intermediate portion in the Y-axis direction) arranged on the +Z side of third guide mechanism 60 (described later).

[0017] For each of the first to third tables 10, 20, and 30, the first base portions 14, 24, and 34 and the second base portions 15, 25, and 35 are disposed at the same position in the X-axis direction. On the other hand, the third base portions 16, 26, and 36 are disposed at positions offset from the first base portions 14, 24, and 34 and the second base portions 15, 25, and 35 in the X-axis direction, more specifically, at positions on the -X side of the first base portions 14, 24, and 34 and the second base portions 15, 25, and 35.

[0018] Furthermore, first to third tables 10, 20, 30 each have first connecting portions 17, 27, 37 connecting first base portions 14, 24, 34 and third base portions 16, 26, 36, and second connecting portions 18, 28, 38 connecting second base portions 15, 25, 35 and third base portions 16, 26, 36. First connecting portions 17, 27, 37 incline toward the -Y side as they approach the -X side. Second connecting portions 18, 28, 38 incline toward the +Y side as they approach the -X side.

[0019] When viewed from the Z-axis direction, first to third tables 10, 20, and 30 each have a V-shape that opens in the X-axis direction (+X side). Therefore, as shown in FIG. 1, adjacent first and second tables 10 and 20, and adjacent second and third tables 20 and 30, can be arranged so that they partially overlap each other in the YZ plane (the plane formed by the second and third directions). When arranged in this manner, the first and second connecting portions 27 and 28 and the third base portion 26 of second table 20 fit into the opening on the +X side of the V-shape of first table 10. Similarly, the first and second connecting portions 37 and 38 and the third base portion 36 of third table 30 fit into the opening on the +X side of the V-shape of second table 20.

[0020] Surfaces 11, 21, 31 of first to third tables 10, 20, 30 are disposed at substantially the same height. Each of surfaces 11, 21, 31 is flat (planar). Surfaces 11, 21, 31 are disposed flush with the XY plane.

[0021] The guide device 3 includes a first guide mechanism 40 that supports first base portions 14, 24, 34, which are one end portion (+Y side end portion) of the first to third tables 10, 20, 30 in the Y direction, a second guide mechanism 50 that supports second base portions 15, 25, 35, which are the other end portions (-Y side end portion) of the first to third tables 10, 20, 30 in the Y direction, and a third guide mechanism 60 that supports third base portions 16, 26, 36, which are the intermediate portions of the first to third tables 10, 20, 30 in the Y direction.

[0022] First to third guide mechanisms 40, 50, 60 are arranged adjacent to each other in the Y-axis direction. First to third guide mechanisms 40, 50, 60 extend in the X-axis direction and guide first to third tables 10, 20, 30 in the X-axis direction.

[0023] The first guide mechanism 40 has three first sliders 41 connected to the back surfaces of the first base portions 14, 24, 34 of the first to third tables 10, 20, 30, and a first rail 43 that supports these three first sliders 41 slidably in the X-axis direction.

[0024] The second guide mechanism 50 has three second sliders 51 connected to the back surfaces of the second base portions 15, 25, and 35 of the first to third tables 10, 20, and 30, and a second rail 53 that supports these three second sliders 51 slidably in the X-axis direction.

[0025] The third guide mechanism 60 has three third sliders 61 connected to the back surfaces of the third bases 16, 26, and 36 of the first to third tables 10, 20, and 30, and a third rail 63 that supports these three third sliders 61 slidably in the X-axis direction.

[0026] The first to third sliders 41, 51, 61 support the central portions of the first base portions 14, 24, 34, the second base portions 15, 25, 35, and the third base portions 16, 26, 36 in the X-axis direction and the Y-axis direction.

[0027] The first to third rails 43, 53, 63 are long members extending in the X-axis direction. The first to third rails 43, 53, 63 are arranged parallel to one another.

[0028] The first to third guide mechanisms 40, 50, 60 include linear guide mechanisms (e.g., linear guides). The first to third sliders 41, 51, 61 include first to third rails 43, 53, 63 and first to third sliders 41, 51, 61 (slider blocks) that are movable on the first to third rails 43, 53, 63. The first to third sliders 41, 51, 61 may include linear bearings. In this embodiment, the first to third sliders 41, 51, 61 may include linear rolling bearings. The rolling bearings have rolling elements. The rolling elements may include either or both of balls and rollers. In other words, the rolling bearings may include either or both of ball bearings and roller bearings. In this embodiment, the first to third sliders 41, 51, 61 may include linear ball bearings.

[0029] Grooves (not shown) are formed on both sides of the first to third rails 43, 53, 63 in the Y-axis direction, and rolling elements (balls) placed in the grooves roll, allowing the first to third sliders 41, 51, 61 to move smoothly on the first to third rails 43, 53, 63.

[0030] Drive system 5 includes first to third drive devices 70, 80, 90 connected to first to third tables 10, 20, 30 to drive these first to third tables 10, 20, 30 in the X-axis direction.

[0031] Of the first to third driving devices 70, 80, 90, the first and third driving devices 70, 90 connected to the first and third tables 10, 30, which are odd-numbered tables counted in the X-axis direction, are disposed between the first guide mechanism 40 and the third guide mechanism 60 in the Y-axis direction. On the other hand, of the first to third driving devices 70, 80, 90, the second driving device 80 connected to the second table 20, which is an even-numbered table counted in the X-axis direction, is disposed between the second guide mechanism 50 and the third guide mechanism 60 in the Y-axis direction.

[0032] The first to third drive units 70, 80, 90 of this embodiment are linear motors. The first drive unit 70 includes a stator (not shown) and a first mover 71 that is fixed to the back surface of the first connection unit 17 of the first table 10 and moves relative to the stator. The second drive unit 80 includes a stator (not shown) and a second mover 81 that is fixed to the back surface of the second connection unit 28 of the second table 20 and moves relative to the stator. The third drive unit 90 includes a stator (not shown) and a third mover 91 that is fixed to the back surface of the first connection unit 37 of the third table 30 and moves relative to the stator.

[0033] The stator has a plurality of coils. Each of the first to third movers 71, 81, 91 has a magnet. That is, in this embodiment, the linear motors serving as the first to third drive devices 70, 80, 90 are moving magnet type linear motors. Alternatively, the stator may have a magnet, and each of the first to third movers 71, 81, 91 may have a coil. That is, the linear motors serving as the first to third drive devices 70, 80, 90 may be moving coil type linear motors.

[0034] The first and third drive devices 70, 90 connected to the first and third tables 10, 30, which are odd-numbered tables counted in the X-axis direction, may share a stator. In the example shown, the first mover 71 connected to the first table 10 and the third mover 91 connected to the third table 30 share a single stator and are positioned coaxially, which allows the table device 1 to be made more compact.

[0035] In addition, the drive units connected to the even-numbered tables counted along the X-axis may also share the stator. In the illustrated example, the drive unit connected to the even-numbered tables counted along the X-axis is one of the second drive units 80, so the stator is not shared.

[0036] The first to third drive devices 70 to 90 can be operated separately. The drive system 5 can move the first to third tables 10, 20, and 30 separately using the first to third drive devices 70 to 90. The drive system 5 may also move the first to third tables 10, 20, and 30 simultaneously.

[0037] First to third tables 10, 20, 30 are movable such that both ends of surfaces 11, 21, 31 in the X axis direction approach each other. First to third tables 10, 20, 30 may be moved such that both ends of surfaces 11, 21, 31 in the X axis direction come into contact with each other. Drive system 5 is capable of moving first to third tables 10, 20, 30 together in the X axis direction while both ends of surfaces 11, 21, 31 in the X axis direction are brought into proximity or contact with each other.

[0038] According to the table device of this embodiment configured as described above, the first to third tables 10, 20, and 30 each have a V-shape that opens in the X-axis direction (+X side) when viewed from the Z-axis direction, and in the X-axis direction, the first slider 41 and the second slider 51 are arranged in the same position, and in the X-axis direction, the third slider 61 is arranged in a position away from the first slider 41 and the second slider 51.

[0039] Therefore, a slider span can be ensured for the first to third tables 10, 20, and 30, thereby improving rigidity in the pitching direction (direction of rotation about the Y-axis) and yawing direction (direction of rotation about the Z-axis). Note that the slider span S for the first table 10 is shown in FIG.

[0040] The table device 1 also has first to third tables 10, 20, and 30 arranged adjacent to each other in the X-axis direction, and the first guide mechanism 40 has a plurality of first sliders 41 connected to the back surfaces of each of the first to third tables 10, 20, and 30, the second guide mechanism 50 has a plurality of second sliders 51 connected to the back surfaces of each of the first to third tables 10, 20, and 30, and the third guide mechanism 60 has a plurality of third sliders 61 connected to the back surfaces of each of the first to third tables 10, 20, and 30.

[0041] In this way, when multiple tables 10, 20, 30 are provided, multiple first sliders 41 slide on a single shared first rail 43, multiple second sliders 51 slide on a single shared second rail 53, and multiple third sliders 61 slide on a single shared third rail 63. Therefore, the table device 1 can be made smaller.

[0042] Furthermore, when viewed from the Z-axis direction, each of the first to third tables 10, 20, and 30 has a V-shape that opens in the X-axis direction (+X side). Therefore, as shown in FIG. 1, adjacent first and second tables 10 and 20 and adjacent second and third tables 20 and 30 can be arranged so that they partially overlap each other in the YZ plane (the plane formed by the second and third directions). When arranged in this manner, the first and second connecting portions 27 and 28 and the third base portion 26 of the second table 20 fit into the opening on the +X side of the V-shape of the first table 10. Similarly, the first and second connecting portions 37 and 38 and the third base portion 36 of the third table 30 fit into the opening on the +X side of the V-shape of the second table 20. Therefore, the first to third tables 10, 20, and 30 can be arranged close to each other.

[0043] The table device 1 is equipped with first to third drive devices 70, 80, 90 connected to the first to third tables 10, 20, 30, respectively, and driving the first to third tables 10, 20, 30 in the X-axis direction. Of the first to third drive devices 70, 80, 90, the first and third drive devices 70, 90 connected to the odd-numbered tables (first and third tables 10, 30) counted in the X-axis direction are arranged between the first guide mechanism 40 and the third guide mechanism 60, and the second drive device 80 connected to the even-numbered table (second table 20) counted in the X-axis direction among the first to third drive devices 70, 80, 90 is arranged between the second guide mechanism 50 and the third guide mechanism 60.

[0044] Therefore, the first and second drive units 70, 80 connected to the first and second tables 10, 20 adjacent to each other in the X-axis direction can be spaced apart in the Y-axis direction. This allows the first and second movers 71, 81 of the first and second drive units 70, 80 to be positioned so that they overlap in the YZ plane, as shown in FIG. 1, enabling the first and second tables 10, 20 to be positioned close to each other in the X-axis direction. Similarly, the second and third drive units 80, 90 connected to the second and third tables 20, 30 adjacent to each other in the X-axis direction can be spaced apart in the Y-axis direction. This allows the second and third movers 81, 91 of the second and third drive units 80, 90 to be positioned so that they overlap in the YZ plane, as shown in FIG. 1, enabling the second and third tables 20, 30 to be positioned close to each other in the X-axis direction.

[0045] Second Embodiment A second embodiment will be described. In the following description, components that are the same as or equivalent to those in the above-described embodiment will be given the same reference numerals, and their description will be simplified or omitted. FIG. 2 is a plan view of the table device 100 according to the second embodiment, as viewed from the +Z side. Note that the object 7 and spacers 19, 29, and 39 are not shown in FIG. 2, but the object 7 and spacers 19, 29, and 39 are provided in the same manner as in the first embodiment (see FIG. 1).

[0046] Drive system 5 includes first to third drive devices 70, 80, 90 connected to first to third tables 10, 20, 30 to drive these first to third tables 10, 20, 30 in the X-axis direction.

[0047] Of the first to third driving devices 70, 80, 90, the first and third driving devices 70, 90 connected to the first and third tables 10, 30, which are odd-numbered tables counted in the X-axis direction, are disposed between the first guide mechanism 40 and the third guide mechanism 60 in the Y-axis direction. Furthermore, the first and third driving devices 70, 90 are disposed spaced apart in the Y-axis direction. Meanwhile, of the first to third driving devices 70, 80, 90, the second driving device 80 connected to the second table 20, which is an even-numbered table counted in the X-axis direction, is disposed between the second guide mechanism 50 and the third guide mechanism 60 in the Y-axis direction.

[0048] In this embodiment, the first to third driving devices 70, 80, 90 are ball screws. The first driving device 70 is fixed to the back surface of the first connection portion 17 of the first table 10 and includes a first nut 75 that moves relative to a first screw shaft 73 extending in the X-axis direction. The second driving device 80 is fixed to the back surface of the second connection portion 28 of the second table 20 and includes a second nut 85 that moves relative to a second screw shaft 83 that extends in the X-axis direction. The third driving device 90 is fixed to the back surface of the first connection portion 37 of the third table 30 and includes a third nut 95 that moves relative to a third screw shaft 93 that extends in the X-axis direction.

[0049] The first to third screw shafts 73, 83, 93 are rotated around the X-axis by the operation of respective actuators (not shown), and the first to third nuts 75, 85, 95 and the first to third tables 10, 20, 30 to which these first to third nuts 75, 85, 95 are connected move in the X-axis direction (linear movement).

[0050] The table device 1 of this embodiment configured as above can also achieve the same effects as the first embodiment.

[0051] The first to third drive devices 70, 80, 90 are not limited to the linear motors and ball screws described above, and a drive mechanism using a timing belt or a rack and pinion may also be used.

[0052] <Comparative Example> 3 is a plan view of a table device 100 according to a comparative example, seen from the +Z side. The table device 100 is equipped with a guide device 103 that guides multiple tables 110, 120, and 130 in the X-axis direction (first direction). Of the multiple tables 110, 120, and 130, the first, second, and third tables counted in the X-axis direction are referred to as the first table 110, the second table 120, and the third table 130, respectively.

[0053] First to third tables 110, 120, 130 are simply rectangular when viewed from the +Z direction, and are longer in the Y-axis direction than in the X-axis direction. First to third tables 110, 120, 130 each support object 107. Note that although Figure 3 is a plan view of table device 100 as viewed from the +Z side, object 107 on first to third tables 110, 120, 130 is drawn with dashed lines.

[0054] The guide device 103 includes a first guide mechanism 140 that supports one Y-direction end (+Y side end) of the first to third tables 110, 120, 130, and a second guide mechanism 150 that supports the other Y-direction end (-Y side end) of the first to third tables 110, 120, 130.

[0055] The first and second guide mechanisms 140 and 150 are arranged adjacent to each other in the Y-axis direction. The first and second guide mechanisms 140 and 150 guide the first, second and third tables 110, 120, and 130 in the X-axis direction.

[0056] First guide mechanism 140 has three first sliders 141 connected to the rear surfaces of first to third tables 110, 120, and 130, and a first rail 143 that supports these three first sliders 141 slidably in the X-axis direction.

[0057] Second guide mechanism 150 has three second sliders 151 connected to the rear surfaces of first to third tables 110, 120, and 130, and second rails 153 that support these three second sliders 151 slidably in the X-axis direction.

[0058] Even with table device 100 according to this comparative example, it is possible to arrange many tables by shortening the pitch in the X-axis direction of first to third tables 110, 120, 130. However, first to third tables 110, 120, 130 are simply rectangular, and first slider 141 and second slider 151 are arranged in the same position in the X-axis direction. Therefore, it is not possible to ensure a slider span for first to third tables 110, 120, 130, and it is not possible to improve rigidity in the pitching and yawing directions.

[0059] The present invention is not limited to the above-described embodiments, and can be modified and improved as appropriate.

[0060] For example, although the number of tables is three in the above embodiment, the number of tables is not limited to three. If the number of tables is changed, the numbers of the first to third sliders 41, 51, 61 of the first to third guide mechanisms 40, 50, 60 that support the respective tables may also be changed so that they are the same as the number of tables. [Explanation of symbols]

[0061] 1 Table device 3 Guide device 5. Drive System 10, 20, 30 tables 11,21,31 surface 14,24,34 1st base (one end) 15,25,35 2nd base (other end) 16,26,36 Third base (middle part) 17, 27, 37 First connection part 18, 28, 38 Second connection part 40 First guide mechanism 41 First slider 43 First Rail 50 Second guide mechanism 51 Second slider 53 Second Rail 60 Third guide mechanism 61 Third Slider 63 Third Rail 70 First Drive Unit 71 1st mover 73 First screw shaft 75 First Nut 80 Second drive unit 81 Second mover 83 Second screw shaft 85 Second Nut 90 Third Drive Unit 91 Third mover 93 Third screw shaft 95 Third Nut S Slider Span

Claims

1. A table and a guide device that guides the table in a first direction; A table device comprising: the table has a front surface and a back surface facing a second direction perpendicular to the first direction; The guide device is a first guide mechanism supporting one end of the table in a third direction perpendicular to the first direction and the second direction; a second guide mechanism that supports the other end of the table in the third direction; a third guide mechanism that supports an intermediate portion of the table in the third direction; and the first guide mechanism includes a first slider connected to the back surface of the table and a first rail supporting the first slider so as to be slidable in the first direction; the second guide mechanism includes a second slider connected to the back surface of the table and a second rail supporting the second slider slidably in the first direction; the third guide mechanism includes a third slider connected to the back surface of the table and a third rail that supports the third slider slidably in the first direction, the table has a V-shape that opens in the first direction when viewed from the second direction, the first slider and the second slider are disposed at the same position in the first direction; In the first direction, the third slider is disposed at a position separated from the first slider and the second slider. Table equipment.

2. the table device includes a plurality of tables arranged adjacent to each other in the first direction, the first guide mechanism includes a plurality of first sliders connected to the rear surfaces of the tables, the second guide mechanism includes a plurality of second sliders connected to the rear surfaces of the tables, the third guide mechanism includes a plurality of third sliders connected to the rear surfaces of the respective tables; The table device according to claim 1 .

3. The tables adjacent to each other in the first direction are arranged so as to partially overlap each other in a plane formed by the second direction and the third direction. The table device according to claim 2 .

4. the table device includes a plurality of drive devices connected to each of the tables to drive the tables in the first direction; Among the plurality of drive devices, the drive device connected to the odd-numbered table when counted in the first direction is disposed between the first guide mechanism and the third guide mechanism, Among the plurality of drive devices, the drive devices connected to the even-numbered tables counted in the first direction are disposed between the second guide mechanism and the third guide mechanism.

4. The table device according to claim 2 or 3.

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