Illuminated imaging device and position adjustment device

Abstract

An imaging device (2a) with illumination comprises: a projection unit (40) that irradiates a target (T1) with illumination light; an acceleration sensor (30) that senses vibration of the target (T1); and a vibration analysis circuit (111) that, on the basis of a sensing signal from the acceleration sensor (30), estimates a period during which the focus of a camera 50 is approximately matched to the target (T1), and in the period estimated by the vibration analysis circuit (111), causes the projection unit (40) to project the illumination light to a region including the target (T1), and except for the period, causes the projection unit (40) to stop the projection of the illumination light.

Description

[Technical Field]

[0001] The present invention relates to an illumination-equipped imaging device that illuminates an object and captures an image, and a position adjustment device that uses the illumination-equipped imaging device to adjust the position of the object. [Background technology]

[0002] In recent years, so-called visual feedback devices have been used in various FA (Factory Automation) devices, such as processing machines and mounting machines in the electronic, electrical, and mechanical fields, to obtain the position of an object based on captured images and move the object so that processing or mounting can be performed appropriately.

[0003] In a visual feedback device, if an object vibrates depending on the environment, it becomes impossible to acquire a clear image, and therefore the object cannot be moved appropriately. To address this issue, for example, the technique described in Patent Document 1 below can be used. Patent Document 1 below describes a technique for capturing a clear image by capturing an image only when the amplitude of the vibration is equal to or less than a predetermined threshold, even if the object to be measured vibrates. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Publication No. 2017-15483 Summary of the Invention [Problem to be solved by the invention]

[0005] The technique described in Patent Document 1 can capture a clear image when the amplitude of vibration is equal to or less than a predetermined threshold, but stops capturing images when the amplitude of vibration exceeds the predetermined threshold. Therefore, when the technique is applied to a visual feedback device, the target object cannot be moved properly if the amplitude of vibration exceeds the predetermined threshold.

[0006] In view of the above problem, the present invention aims to provide an illuminated photographing device that can properly capture an image of an object even when the object is vibrating, and a position adjustment device using the same. [Means for solving the problem]

[0007] The illuminated imaging device according to a first aspect of the present invention includes a projection unit that irradiates an object with illumination light; The aforementioned The illuminated image capture device includes a detection unit that detects vibrations of an object, a camera unit having a focus, and an analysis unit that estimates a period during which the focus will be approximately aligned with the object based on a detection signal from the detection unit. The illuminated image capture device projects the illumination light from a projection unit onto an area that includes the object during the period estimated by the analysis unit, and stops projecting the illumination light outside of the period.

[0008] An illuminated imaging device according to a second aspect of the present invention includes a projection unit that irradiates an object with illumination light; The aforementioned The illuminated image capturing device includes a detection unit that detects vibration of an object, a camera unit having a focus, and an analysis unit that estimates a period during which the focus is approximately aligned with the object based on a detection signal from the detection unit. The illuminated image capturing device controls the camera unit to expose each pixel during the period estimated by the analysis unit. Department and controls the camera so that exposure to each pixel is not performed outside the period. Department Control.

[0009] According to the illumination-equipped imaging devices of the first and second aspects, an image is captured using illumination light during a period when the camera's focus is approximately aligned with the object, and the captured image is a clear image in a state where the camera's focus is approximately aligned with the object. Therefore, even if the object is vibrating, the image of the object can be captured properly.

[0010] A position adjustment device according to a third aspect of the present invention includes an installation unit on which an object is installed, a drive unit that drives the installation unit to change the position of the object, an illuminated imaging device according to the first or second aspect, and a control unit that drives the drive unit using an image obtained by the illuminated imaging device as a feedback control image to adjust the position of the object to a target position.

[0011] According to the position adjustment device of this aspect, since the illuminated imaging device of the first or second aspect is used, the feedback control image is a clear image in which the camera's focus is approximately aligned with the object. Therefore, even if the object is vibrating, the control unit can appropriately adjust the position of the object to the target position based on the acquired captured image. [Effects of the Invention]

[0012] As described above, according to the present invention, it is possible to provide an illuminated imaging device that can properly capture an image of an object even when the object is vibrating, and a position adjustment device using the same.

[0013] The effects and significance of the present invention will become more apparent from the following description of the embodiments, however, the embodiments shown below are merely examples of how the present invention can be implemented, and the present invention is not limited to the embodiments described below. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a side view schematically showing the configuration of a position adjustment system according to the first embodiment. [Figure 2] FIG. 2 is a perspective view schematically showing the configuration of the position adjustment device according to the first embodiment. [Figure 3] FIG. 3 is a block diagram showing the configuration of a circuit unit of the position adjustment device according to the first embodiment. [Figure 4] FIG. 4 is a schematic diagram showing a procedure for acquiring a captured image when an object is vibrating in the Z-axis direction, according to a comparative example. [Figure 5] FIG. 5 is a schematic diagram showing a procedure for acquiring a captured image when an object is vibrating in the Z-axis direction according to the first embodiment. [Figure 6] FIG. 6 is a block diagram showing the configuration of a circuit section of a position adjustment device according to a modification of the first embodiment. [Figure 7] Fig. 7(a) is a perspective view schematically showing the configuration of an object according to embodiment 2. Fig. 7(b) is a graph schematically showing vibrations of each edge according to embodiment 2. [Figure 8] FIG. 8 is a perspective view schematically illustrating the configuration of a position adjustment device according to the second embodiment. [Figure 9] FIG. 9 is a block diagram showing the configuration of a circuit section of a position adjustment device according to the second embodiment. [Figure 10] FIG. 10 is a schematic diagram showing a procedure for acquiring a captured image according to the second embodiment. [Figure 11] FIG. 11 is a side view schematically showing the configuration of a position adjustment system according to the third embodiment. [Figure 12] FIG. 12 is a block diagram showing the configuration of a circuit section of a position adjustment device according to the fourth embodiment. [Figure 13] FIG. 13 is a schematic diagram showing a procedure for acquiring a captured image according to the fourth embodiment. [Figure 14] FIG. 14 is a diagram schematically illustrating a configuration example in which the illuminated imaging device according to the fifth embodiment is applied to a microscope.

[0015] However, the drawings are for illustrative purposes only and do not limit the scope of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0016] Hereinafter, embodiments of the present invention will be described with reference to the drawings. For convenience, the following drawings are labeled with mutually orthogonal X, Y, and Z axes. The positive direction of the Z axis is the height direction of the position adjustment system 1.

[0017] <Embodiment 1> In the embodiment 1 described below, an illuminated imaging device 2a (see FIG. 3) is configured by a projection unit 40, an acceleration sensor 30 (detection unit), a camera 50 (camera unit), an imaging processing unit 113 (camera unit), a vibration analysis circuit 111 (analysis unit), and a drive circuit 112.

[0018] FIG. 1 is a side view schematically showing the configuration of the position adjustment system 1. As shown in FIG.

[0019] The position adjustment system 1 includes a room 1a, a position adjustment device 2, and a robot 10. The room 1a is installed on the ground 3 and configured to prevent external light from entering the room 1a. The position adjustment device 2 and the robot 10 are disposed in the room 1a. In the first embodiment, when the position adjustment device 2 and the robot 10 are used, all lights in the room 1a are turned off except for the illumination light from the projection unit 40, making the room 1a a dark room. That is, the room 1a is a dark environment, and is dark enough that the camera 50 does not capture an image. By installing the position adjustment device 2 in a space where natural light is blocked, such as a dark environment, the influence of natural light can be suppressed in adjusting the position of the target object T1, which will be described later.

[0020] The position adjustment device 2 includes a support base 21, a drive unit 22, an installation unit 23, an acceleration sensor 30, a projection unit 40, and a camera 50.

[0021] The support base 21 is placed on the ground 3. The drive unit 22 is placed on the upper surface of the support base 21, and moves the installation unit 23 placed on the upper surface of the drive unit 22 in the X-axis direction and the Y-axis direction, and rotates it about an axis parallel to the Z-axis direction. The drive unit 22 is an XYθ stage. The installation unit 23 is a flat plate-shaped member. An operator or another robot places an object T1 near the center of the upper surface 23a of the installation unit 23. The object T1 is, for example, a semiconductor substrate.

[0022] An acceleration sensor 30 is installed near an end of the upper surface 23a of the installation section 23. The acceleration sensor 30 detects vibrations of the installation section 23 and the target object T1. The acceleration sensor 30 of the first embodiment is only required to be able to detect vibrations in at least the Z-axis direction.

[0023] The projection unit 40 is a light source that emits illumination light in a predetermined wavelength band. The projection unit 40 is, for example, an LED light source that emits monochromatic visible light. The projection unit 40 projects the illumination light onto an area that includes at least the object T1 on the installation unit 23. The projection unit 40 may be equipped with an optical system (lens, etc.) for limiting the projection area of ​​the illumination light. The camera 50 is configured to be able to capture visible light and includes a CMOS image sensor or a CCD image sensor. The camera 50 captures an image of the object T1 placed on the upper surface 23a of the installation unit 23 and outputs imaging information indicating the integrated amount of light received by each pixel.

[0024] The robot 10 includes a drive unit 11 , a support shaft 12 , a horizontal drive unit 13 , an arm 14 , and a gripper 15 .

[0025] The driving unit 11 is installed on the ground 3 and moves the vertically extending support shaft 12 in the Z-axis direction and rotates it about an axis parallel to the Z-axis direction. The horizontal driving unit 13 is installed at the upper end of the support shaft 12 and moves the horizontally extending arm 14 in the horizontal direction. The gripping unit 15 is installed on the underside of the tip of the arm 14 and is configured to be able to grip various types of chips.

[0026] Robot 10 drives drive unit 11 and horizontal drive unit 13 to move gripper 15 onto a chip placed in a chip storage area, and drives gripper 15 to grip the chip. Robot 10 drives horizontal drive unit 13 to move gripper 15 onto object T1 placed on installation unit 23, and drives gripper 15 to release the gripped chip and place the chip on object T1. Robot 10 sequentially places chips on object T1.

[0027] When robot 10 places a chip on object T1 in this way, if object T1 is not positioned appropriately, the chip will be placed in an inappropriate position. Therefore, based on the image information from camera 50, drive unit 22 moves installation unit 23 in the X-axis and Y-axis directions and rotates installation unit 23 about an axis parallel to the Z-axis direction so that object T1 is positioned appropriately.

[0028] FIG. 2 is a perspective view schematically showing the configuration of the position adjustment device 2. As shown in FIG.

[0029] The camera 50 captures images of edges E1 and E2 of the object T1. The edge E1 is the side of the top surface of the object T1 on the positive side of the X axis, and the edge E2 is the side of the top surface of the object T1 on the negative side of the Y axis. The imaging direction of the camera 50 is the negative direction of the Z axis. The position and focal length of the camera 50 are set so that the focal position of the camera 50 in the Z axis direction coincides with the positions of the edges E1 and E2 of the object T1 installed on the installation unit 23.

[0030] The position of the installation unit 23 is adjusted by driving the driving unit 22 so that the edge E1 overlaps with the line L1 indicating the appropriate position of the edge E1 and the edge E2 overlaps with the line L2 indicating the appropriate position of the edge E2 in the captured image acquired by the camera 50. As a result, the position of the target object T1 in the X-axis direction, the Y-axis direction, and the rotational position about the Z-axis are each adjusted to the target position.

[0031] FIG. 3 is a block diagram showing the configuration of the circuit section of the position adjustment device 2. As shown in FIG.

[0032] The position adjustment device 2 includes, as its circuit configuration, an image acquisition unit 110 and a control unit 120. The image acquisition unit 110 is made up of a vibration analysis circuit 111, a drive circuit 112, and an image capture processing unit 113.

[0033] The vibration analysis circuit 111 estimates the period during which the focus of the camera 50 is approximately aligned with the object T1 based on the detection signal of the acceleration sensor 30, and outputs a trigger to drive the drive circuit 112 during the estimated period. The specific operation of the vibration analysis circuit 111 will be described later with reference to FIGS. 4 and 5. The drive circuit 112 drives the projection unit 40 at the timing when the trigger is output from the vibration analysis circuit 111, causing the projection unit 40 to project illumination light. The image capture processing unit 113 processes the image capture information output from the camera 50 to obtain a captured image for feedback control, and outputs the obtained captured image to the control unit 120.

[0034] The control unit 120 detects the positions of the edges E1 and E2 based on the captured image acquired by the image capturing processing unit 113, and drives the driving unit 22 so that the edges E1 and E2 coincide with the lines L1 and L2 (see FIG. 2), respectively.

[0035] Incidentally, when the ground 3 (see FIG. 1) shakes due to vibrations from various devices installed in the room 1a (see FIG. 1), the vibrations of the ground 3 are transmitted to the object T1 via the support base 21, the drive unit 22, and the installation unit 23, causing the object T1 to vibrate. In this case, as shown by the white arrow in FIG. 3, if the vibration direction of the object T1 is the Z-axis direction, the positions of the edges E1 and E2 will be shifted from the focal position of the camera 50 in the Z-axis direction. As a result, the captured image acquired by the image capture processing unit 113 will become unclear, and it may become impossible to properly adjust the position of the object T1 based on the captured image.

[0036] In contrast, in this embodiment, the vibration analysis circuit 111 identifies the position of the object T1 in the Z-axis direction based on the detection signal of the acceleration sensor 30. Then, the vibration analysis circuit 111 outputs a trigger to the drive circuit 112 when the positions of the edges E1 and E2 of the object T1 approximately match the focal position of the camera 50. As a result, when the edges E1 and E2 of the object T1 come to the focal position of the camera 50, the object T1 is illuminated by the illumination light from the projection unit 40, and the captured image acquired by the image capture processing unit 113, as described below, becomes clear.

[0037] 4 and 5 are schematic diagrams showing the procedure for acquiring captured images in the comparative example and the first embodiment, respectively, when the object T1 is vibrating in the Z-axis direction.

[0038] In the example shown in Figures 4 and 5, since the object T1 is made of the same material, the entire object T1 vibrates in unison in the Z-axis direction. Furthermore, multiple vibrations are included in one frame period of the camera 50, and the Z-axis position H1 of the edges E1 and E2 coincides with the focal position H0 of the camera 50 approximately four times. The camera 50 is maintained in an exposure state during one frame period, and outputs the integrated amount of light received by each pixel during one frame period as imaging information. The imaging processing unit 113 acquires one captured image from the imaging information based on one frame.

[0039] Generally, vibrations that can occur in the object T1 in the position adjustment system 1 of FIG. 1 are approximately 100 Hz or higher. On the other hand, a typical camera 50 operates at 30 fps to 60 fps, with the length of one frame being approximately 16 milliseconds to 33 milliseconds. Therefore, one frame of the typical camera 50 contains approximately 1.6 to 3.3 vibration waves. In other words, one frame contains both an in-focus state in which the Z-axis position H1 of the edges E1 and E2 is approximately aligned with the focal position H0 of the camera 50, and an out-of-focus state other than the in-focus state.

[0040] As shown in FIG. 4, in the comparative example, the light projection intensity of the projection unit 40 is maintained constant during a frame period. Therefore, illumination light is constantly projected onto the object T1 during the frame period. Therefore, in addition to the image of the object T1 in a focused state indicated by a solid-line frame, an image of the object T1 in an out-of-focus state indicated by a dashed-line frame is also incident on each pixel of the camera 50. Therefore, the integrated amount of light at each pixel is mixed with so-called out-of-focus light. Therefore, in the comparative example, the captured image M0 formed based on one frame of imaging information is an unclear image.

[0041] 5, in the first embodiment, the projection unit 40 is turned on / off depending on the positions of the edges E1 and E2. Specifically, the vibration analysis circuit 111 (see FIG. 3) analyzes the detection signal of the acceleration sensor 30 by Fourier analysis or the like, and obtains the position Ht in the Z-axis direction of the upper surface 23a of the installation unit 23. The vibration analysis circuit 111 adds the known height h of the object T1 to the obtained position Ht, and obtains the position H1 of the edges E1 and E2 of the object T1.

[0042] The vibration analysis circuit 111 estimates a period P1 during which the position H1 of the edges E1 and E2 is approximately aligned with the focal position H0 of the camera 50. The vibration analysis circuit 111 stores the focal position H0 in advance. If the depth of field of the camera 50 (the distance on one side from the focal position) is δ, the period P1 is a period during which the following formula (1) is satisfied:

[0043] |H1-H0|≦δ …(1)

[0044] The vibration analysis circuit 111 analyzes the vibration pattern in the Z-axis direction based on the detection signal from the acceleration sensor 30, and estimates the period in which the above formula (1) is satisfied as the period P1 in the focused state from the analyzed vibration pattern.

[0045] Then, the vibration analysis circuit 111 outputs a trigger to the drive circuit 112 during the estimated period P1. The drive circuit 112 drives the projection unit 40 to project illumination light onto the object T1 during the period P1 in which the trigger is input. As a result, illumination light is projected onto the object T1 when edges E1 and E2 of the object T1 are near the focal position H0 of the camera 50. On the other hand, the vibration analysis circuit 111 does not output a trigger to the drive circuit 112 outside the period P1. If no trigger is input, the drive circuit 112 causes the projection unit 40 to stop projecting illumination light. As a result, illumination light is not projected onto the object T1 when edges E1 and E2 of the object T1 are not near the focal position H0 of the camera 50.

[0046] Thus, in the focused state, as shown by the solid-line frame, the image of the object T1 in the focused state is mainly incident on each pixel of the camera 50. That is, in the out-of-focus state, the object T1 is not illuminated by the illumination light and the room 1a is a dark room, so that the out-of-focus image is hardly incident on each pixel of the camera 50. Therefore, in the case of the first embodiment, the captured image M1 formed based on one frame of imaging information is a clear image.

[0047] <Effects of the First Embodiment> As described above, according to the first embodiment, the following effects are achieved.

[0048] The illuminated imaging device 2a (see FIG. 3) estimates a period P1 during which the camera 50 is approximately focused on the object T1 based on a detection signal from the acceleration sensor 30 (detection unit), and acquires a captured image M1 for feedback control using illumination light during the estimated period P1. The control unit 120 drives the drive unit 22 based on the captured image M1 to adjust the position of the object T1 to a target position. With this configuration, as described with reference to FIG. 5, the captured image M1 is acquired using illumination light during the period P1 during which the camera 50 is approximately focused on the object T1. Therefore, even if the object T1 is vibrating, the captured image M1 for feedback control can be properly acquired, and the control unit 120 can properly adjust the position of the object T1 to the target position based on the acquired captured image M1.

[0049] 5, during period P1, the image acquisition unit 110 causes the projection unit 40 to project illumination light onto an area including at least the target object T1 on the installation unit 23, and causes the projection unit 40 to stop projecting illumination light outside period P1. With this configuration, ON / OFF control of the illumination light can reduce blurring of the captured image caused by vibration.

[0050] 3, the detection unit that detects vibrations of the object T1 is an acceleration sensor 30 installed on the installation unit 23. With this configuration, it is possible to easily detect vibrations of the object T1.

[0051] As described above, typical vibrations that can occur in the object T1 are approximately 100 Hz or higher, and a typical camera 50 operates at 30 fps to 60 fps. In this case, as shown in FIGS. 4 and 5, one frame includes both in-focus and out-of-focus states. In contrast, in the first embodiment, an image of the object T1 is incident on each pixel of the camera 50 only in the in-focus state. Therefore, even if one frame includes both in-focus and out-of-focus states, the captured image M1 formed based on the imaging information of one frame is a clear image. Therefore, the object T1 can be appropriately positioned at the target position based on the captured image M1.

[0052] <Modification of the first embodiment> In the first embodiment, the acceleration sensor 30 is used to detect the vibration state of the object T1, but in this modified example, a TOF (Time Of Flight) sensor 60 is used.

[0053] FIG. 6 is a block diagram showing the configuration of the circuit section of the position adjustment device 2 according to this modified example.

[0054] Compared to the first embodiment shown in FIG. 3, the position adjustment device 2 of this modified example includes a TOF sensor 60 instead of the acceleration sensor 30. The TOF sensor 60 is installed, for example, on the underside of the camera 50. The TOF sensor 60 projects pulsed light in the negative Z-axis direction and receives the pulsed light reflected by the top surface of the object T1. The TOF sensor 60 detects the distance from the TOF sensor 60 to the top surface of the object T1 based on the time difference between the emission timing and the reception timing of the pulsed light. The vibration analysis circuit 111 analyzes the vibration of the object T1 in the Z-axis direction based on the distance from the TOF sensor 60 to the object T1, and obtains the position H1 of the edges E1 and E2 of the object T1.

[0055] In this modified example, as in the first embodiment, the vibration analysis circuit 111 estimates a period P1 during which the position H1, which changes in response to vibration, approximately aligns with the focal position H0 of the camera 50, and outputs a trigger to the drive circuit 112 during the estimated period P1. The drive circuit 112 drives the projection unit 40 to project illumination light onto the object T1 during the period P1 when the trigger is input. As a result, as in the first embodiment, the captured image M1 formed based on one frame of imaging information becomes a clear image. Therefore, the control unit 120 can appropriately adjust the position of the object T1 to the target position based on the acquired captured image M1.

[0056] In this modified example, a TOF sensor 60 that measures the distance to the object T1 is used as a detector that detects vibrations of the object T1. This allows a configuration for detecting vibrations of the object T1 to be realized at low cost. Furthermore, the TOF sensor 60 can directly measure vibrations near the edges E1 and E2, thereby improving the measurement accuracy of vibrations in the measurement object compared to the first embodiment, in which the vibrations of the edges E1 and E2 are indirectly measured by detecting the vibrations of the installation portion 23.

[0057] <Embodiment 2> In the above-described embodiment 1, since the object T1 is made of the same material, when vibration occurs, the entire object T1 vibrates integrally in the Z-axis direction. In contrast, in embodiment 2, the object T1 is made of a plurality of different materials, and each part made of the different materials vibrates with a different phase.

[0058] In the second embodiment, the projection units 41, 42, TOF sensors 61, 62 (detection units), cameras 51, 52 (camera units), image capture processing units 113, 133 (camera units), vibration analysis circuits 111, 131 (analysis units), and drive circuits 112, 132 constitute an illuminated image capture device 2a (see FIG. 9).

[0059] FIG. 7(a) is a perspective view schematically showing the configuration of the target object T1 according to the second embodiment.

[0060] The object T1 in the second embodiment is composed of portions T11 and T12 made of different materials. Edge E1 is the edge on the portion T11 side, and edge E2 is the edge on the portion T12 side. When portions T11 and T12 are made of different materials, the speeds of vibrations transmitted to portions T11 and T12 are different, and therefore, even if the same vibration is applied from the ground 3, the phases of the vibrations will be different at edges E1 and E2.

[0061] FIG. 7(b) is a graph schematically showing vibrations of the edges E1 and E2 according to the second embodiment.

[0062] The vibration waveforms of edges E1 and E2 are indicated by solid and dashed lines, respectively. In this example, the vibration waveforms of edges E1 and E2 have the same shape but different phases. In this case, when portions T11 and T12 of object T1 vibrate at different phases, if an image is captured in the same manner as in the first embodiment, one of edges E1 and E2 will be unclear in the captured image. Therefore, in the second embodiment, as shown below, vibrations are detected for each of portions T11 and T12, and a captured image is generated based on the imaging information obtained from portions T11 and T12, respectively.

[0063] FIG. 8 is a perspective view schematically showing the configuration of a position adjustment device 2 according to the second embodiment.

[0064] Compared to the first embodiment shown in FIG. 2, the position adjustment device 2 of the second embodiment includes projection units 41 and 42 and cameras 51 and 52 instead of the projection unit 40 and camera 50. The cameras 51 and 52 have the same configuration as the camera 50. The position adjustment device 2 of the second embodiment also includes TOF sensors 61 and 62 and filters 71 and 72. The TOF sensors 61 and 62 have the same configuration as the TOF sensor 60 shown in the modified example of the first embodiment. The other configurations of the second embodiment are the same as those of the first embodiment.

[0065] The TOF sensor 61 is installed on the underside of the camera 51 and detects the distance from the TOF sensor 61 to the vicinity of the edge E1. The TOF sensor 62 is installed on the underside of the camera 52 and detects the distance from the TOF sensor 62 to the vicinity of the edge E2. The projection unit 41 is an LED light source that emits illumination light in a first wavelength band, and the projection unit 42 is an LED light source that emits illumination light in a second wavelength band different from the first wavelength band. The first wavelength band is, for example, a red light wavelength band, and the second wavelength band is, for example, a blue light wavelength band. Both cameras 51 and 52 capture an image of the entire object T1. The filter 71 is a bandpass filter for the camera 51 that transmits light in the first wavelength band and blocks light other than the first wavelength band. The filter 72 is a bandpass filter for the camera 52 that transmits light in the second wavelength band and blocks light other than the second wavelength band.

[0066] FIG. 9 is a block diagram showing the configuration of a circuit section of a position adjustment device 2 according to the second embodiment.

[0067] 3, the position adjustment device 2 of the second embodiment has a circuit configuration including a vibration analysis circuit 131, a drive circuit 132, and an image capture processing unit 133. The image acquisition unit 110 of the second embodiment is configured with the vibration analysis circuit 111, the drive circuit 112, the image capture processing unit 113, the vibration analysis circuit 131, the drive circuit 132, and the image capture processing unit 133.

[0068] The vibration analysis circuit 111 analyzes the vibration in the Z-axis direction near the edge E1 based on the distance from the TOF sensor 61 to the vicinity of the edge E1, and estimates the period during which the focus of the camera 51 is approximately aligned with the edge E1 from the analysis result based on the above formula (1), and outputs a trigger to drive the drive circuit 112 during the estimated period. As a result, the edge E1 is illuminated by the illumination light from the projection unit 41 when the edge E1 is approximately aligned with the focal position of the camera 51.

[0069] Similarly, the vibration analysis circuit 131 analyzes the vibration in the Z-axis direction near the edge E2 based on the distance from the TOF sensor 62 to the vicinity of the edge E2, and estimates the period during which the focus of the camera 52 is approximately aligned with the edge E2 from the analysis result based on the above formula (1), and outputs a trigger to drive the drive circuit 132 during the estimated period. As a result, the edge E2 is illuminated by the illumination light from the projection unit 42 when the edge E2 is approximately aligned with the focal position of the camera 52.

[0070] The camera 51 is equipped with a filter 71 that transmits only light in the first wavelength band, and therefore receives only illumination light in the first wavelength band from the projection unit 41 and outputs imaging information. The imaging processing unit 113 processes the imaging information output from the camera 51 to obtain a captured image M11 for feedback control, and outputs the obtained captured image M11 to the control unit 120. The captured image M11 is an image in which the edge E1 is clear.

[0071] Similarly, camera 52 is equipped with filter 72 that transmits only light in the second wavelength band, and therefore camera 52 receives only illumination light in the second wavelength band from projection unit 42 and outputs imaging information. Imaging processing unit 133 processes the imaging information output from camera 52 to obtain a captured image M12 for feedback control, and outputs the obtained captured image M12 to control unit 120. The captured image M12 is an image in which edge E2 is clear.

[0072] The control unit 120 extracts the line of edge E1 from the captured image M11 and extracts the line of edge E2 from the captured image M12. Then, the control unit 120 combines the image of the extracted edge E1 with the image of the extracted edge E2 to obtain a captured image M10 that includes only edges E1 and E2. The control unit 120 drives the installation unit 23 so that the line of edge E1 in the captured image M10 coincides with line L1 and the line of edge E2 in the captured image M10 coincides with line L2.

[0073] FIG. 10 is a schematic diagram showing a procedure for acquiring captured images M11, M12, and M10 according to the second embodiment.

[0074] As described above, edges E1 and E2 vibrate in the Z-axis direction at different phases. The projection unit 41 projects illumination light of a first wavelength onto the object T1 during a period P1 in which the focal position of the camera 51 is approximately aligned with edge E1. As a result, an image of the object T1 in a focused state, as indicated by a solid-line frame, is incident on each pixel of the camera 51. Therefore, a captured image M11 in which edge E1 is clearly visible is acquired based on one frame of imaging information from the camera 51.

[0075] Similarly, the projection unit 42 projects illumination light of the second wavelength onto the object T1 during a period P2 when the focal position of the camera 52 is substantially aligned with the edge E2. As a result, an image of the object T1 in a focused state, as indicated by a solid-line frame, is incident on each pixel of the camera 52. Therefore, a captured image M12 in which the edge E2 is clearly visible is acquired based on one frame of imaging information from the camera 52.

[0076] In this way, the control unit 120 generates a captured image M10 based on the captured image M11 in which the edge E1 is clear and the captured image M12 in which the edge E2 is clear, and appropriately adjusts the position of the object T1 to the target position based on the captured image M10.

[0077] <Effects of the Second Embodiment> As described above, according to the second embodiment, the following effects are achieved.

[0078] According to the second embodiment, similarly to the first embodiment, it is possible to acquire captured images M11 and M12 in which the edges E1 and E2 are clear, and it is possible to properly adjust the position of the object T1 to the target position.

[0079] Furthermore, filter 71 blocks light outside the wavelength band of the illumination light from projection unit 41 from reaching camera 51, and filter 72 blocks light outside the wavelength band of the illumination light from projection unit 42 from reaching camera 52. Filter 71 can prevent unwanted light outside the wavelength band of the illumination light from projection unit 41 from entering camera 51 not only during period P1 but also outside period P1. Filter 72 can prevent unwanted light outside the wavelength band of the illumination light from projection unit 42 from entering camera 52 not only during period P2 but also outside period P2. Therefore, blurring of captured images M11, M12, and M10 caused by vibration can be reliably prevented.

[0080] <Embodiment 3> In the first embodiment, the room 1a is set to be a dark room, whereas in the third embodiment, the room 1a is illuminated with illumination light of a predetermined color.

[0081] As in embodiment 1, in embodiment 3, an illuminated imaging device 2a (see FIG. 12) is configured by a projection unit 40, an acceleration sensor 30 (detection unit), a camera 50 (camera unit), an imaging processing unit 113 (camera unit), and a vibration analysis circuit 111 (analysis unit).

[0082] FIG. 11 is a side view schematically showing the configuration of a position adjustment system 1 according to the third embodiment.

[0083] The position adjustment system 1 of the third embodiment, compared to the first embodiment of FIG. 1, includes an illumination device 1b and a filter 70. The illumination device 1b is installed in the room 1a. The illumination device 1b emits, for example, yellow illumination light. As a result, the room 1a is illuminated with the yellow illumination light. The projection unit 40 is, for example, an LED light source that emits illumination light in a red or blue wavelength band. The filter 70 is a bandpass filter that transmits light in the wavelength band of the illumination light from the projection unit 40 and blocks light outside the wavelength band of the illumination light from the projection unit 40 for the camera 50. As a result, the illumination light from the illumination device 1b does not enter the imaging plane of the camera 50.

[0084] <Effects of the Third Embodiment> 5, in the third embodiment, illumination light is projected from the projection unit 40 during a period P1 in which the position H1 of the edges E1 and E2 is substantially aligned with the focal position H0 of the camera 50. This allows a clear captured image M1 to be acquired, similar to the first embodiment.

[0085] Furthermore, the filter 70 blocks light other than the wavelength band of the illumination light from the projection unit 40 from reaching the camera 50. The wavelength band of the illumination light from the projection unit 40 is set to a wavelength band different from the wavelength band of light used to illuminate the room 1a in which the position adjustment device 2 is installed. This allows the illumination light from the room 1a to be removed by the filter 70, thereby suppressing blurring that occurs in the captured image M1 due to the illumination light from the room 1a.

[0086] In semiconductor manufacturing, a room 1a is used that is lit from the inside with monochromatic visible light, such as a yellow room, so that workers can work in it. Even in this case, the influence of light from the lighting device 1b that illuminates the room 1a can be suppressed, and a clear captured image M1 can be acquired.

[0087] <Embodiment 4> In the first embodiment, the camera 50 is in an exposure state for the entire period of one frame. In contrast, in the fourth embodiment, the projection unit 40 is always turned on, and the camera 50 is in an exposure state when the edges E1 and E2 are substantially aligned with the focal position H0 of the camera 50. In the fourth embodiment, a camera capable of switching the exposure state within one frame is used as the camera 50.

[0088] In the fourth embodiment, the projection unit 40, the acceleration sensor 30 (detection unit), the camera 50 (camera unit), the image capture processing unit 113 (camera unit), the vibration analysis circuit 111 (analysis unit), and the drive separation 112 also constitute the illuminated image capture device 2a (see FIG. 12).

[0089] FIG. 12 is a block diagram showing the configuration of a circuit section of the position adjustment device 2 according to the fourth embodiment.

[0090] In the fourth embodiment, compared to the first embodiment shown in FIG. 3, the vibration analysis circuit 111 outputs a trigger to the image capture processing unit 113 when the edges E1 and E2 are approximately aligned with the focal position H0 of the camera 50. The camera 50 is configured to be able to switch the exposure state within one frame in response to an instruction from the image capture processing unit 113. Other configurations of the fourth embodiment are the same as those of the first embodiment.

[0091] FIG. 13 is a schematic diagram showing a procedure for acquiring a captured image M1 according to the fourth embodiment.

[0092] In the fourth embodiment, the projection unit 40 is always turned on. The vibration analysis circuit 111 outputs a trigger to the image capture processing unit 113 when the edges E1 and E2 are approximately aligned with the focal position H0 of the camera 50, i.e., during the period P1. The image capture processing unit 113 sets the shutters of all pixels of the camera 50 to an exposed state through exposure control at the timing when the trigger is input, i.e., during the period P1. On the other hand, the image capture processing unit 113 sets the shutters of all pixels of the camera 50 to a non-exposed state through exposure control outside the period P1.

[0093] As a result, similar to the first embodiment, when edges E1 and E2 are approximately aligned with the focal position H0 of camera 50, an image of object T1 in a focused state is incident on each pixel of camera 50. On the other hand, when edges E1 and E2 are not approximately aligned with the focal position H0 of camera 50, an image of object T1 is not incident on each pixel of camera 50. Therefore, also in the fourth embodiment, captured image M1 formed based on one frame of imaging information is a clear image.

[0094] <Effects of the Fourth Embodiment> The image acquisition unit 110 controls the camera 50 to expose each pixel during the period P1, and controls the camera 50 not to expose each pixel outside the period P1. This allows the exposure control of the camera 50 to suppress blurring of the captured image M1 caused by vibration.

[0095] <Embodiment 5> In the above-described first to fourth embodiments, the illuminated imaging device 2a is used in the position adjustment device 2. However, the device in which the illuminated imaging device is used is not limited to the position adjustment device, and the device may also be used as appropriate in other devices that can be used in an environment in which vibrations can cause blurring in captured images.

[0096] FIG. 14 is a diagram showing a schematic configuration example in which the illuminated photographing device 200 is applied to a microscope 4. In FIG.

[0097] In this configuration example, the illuminated imaging device 200 is made up of a projection unit 210, an acceleration sensor 242 (detection unit), an imaging unit 220 (camera unit), an imaging processing unit 253 (camera unit), a vibration analysis circuit 251 (analysis unit), and a drive circuit 252.

[0098] An object T1 having an uneven surface is placed on a stage 241. A microscope 4 is placed above the object T1. The microscope 4 incorporates a projection unit 210, an imaging unit 220, and a half mirror 231. The projection unit 210 includes a light source 211, a collimator lens 212, and an objective lens 221. The imaging unit 220 includes an objective lens 221, a condenser lens 222, and an image sensor 223. The objective lens 221 is shared by the projection unit 210 and the imaging unit 220. The imaging unit 220, together with an image processing unit 253, constitutes a camera unit.

[0099] The light source 211 emits illumination light. The light source 211 is configured, for example, by a light-emitting diode (LED). The illumination light emitted from the light source 211 is converted into approximately parallel light by a collimator lens 212, reflected by a half mirror 231, and directed toward the object T1. The illumination light is then condensed by an objective lens 221 and illuminates the object T1. The range illuminated by the illumination light only needs to include the imaging location. The light from the illuminated range is captured by the objective lens 221 as light for imaging. The light for imaging then passes through the half mirror 231 and is condensed by a condenser lens 222 onto the imaging surface of an imaging element 223. As a result, an image of the object T1 is formed on the imaging surface of the imaging element 223.

[0100] An acceleration sensor 242 for detecting vibrations is installed on the stage 241. Vibrations transmitted from an external vibration source to the object T1 via the stage are detected by this acceleration sensor 242. A signal from the acceleration sensor 242 is output to a vibration analysis circuit 251. The photographing location of the object T1 shakes due to the vibration. However, as in the first embodiment, a trigger is output from the vibration analysis circuit 251 to the drive circuit 252 so that the illumination light is irradiated onto the object T1 only during the period when the location coincides with the photographing focus (the focal position determined by the objective lens 221 and the condenser lens 222). As a result, only an image at the focal position is formed on the image sensor 223.

[0101] The imaging processing unit 252 processes the imaging information output from the imaging element 223 to acquire a captured image, and outputs the acquired captured image to, for example, an analysis processing unit for inspecting the state of the object T1. Alternatively, the imaging processing unit 252 may display the acquired captured image on a display unit such as a monitor.

[0102] <Effects of the fifth embodiment> The configuration of the fifth embodiment also makes it possible to capture an image without blur, similar to the first to fourth embodiments.

[0103] When a person directly views and observes the image of the object T1, the image sensor 223 may be omitted from the imaging unit 220. In other words, if the "retina of the human eye" is also considered to be an imaging unit, the illuminated imaging device according to the present invention can be applied to a microscope even when observing directly with the eye.

[0104] In addition to the microscope shown in FIG. 14, an illuminated imaging device having the same configuration as above can also be used for other imaging devices, such as imaging devices used for inspecting parts in an environment with vibration.

[0105] 14, similarly to the fourth embodiment, an in-focus captured image may be obtained by controlling the exposure time of the image sensor 223 while constantly irradiating illumination light from the light-emitting unit 210. This also makes it possible to obtain a clear captured image without blur. Also, in the configuration example of FIG. 14, other vibration detection means such as a TOF sensor may be used instead of the acceleration sensor 242.

[0106] <Other change examples> The configurations of the position adjustment system 1 and the position adjustment device 2 can be modified in various ways in addition to the configurations shown in the above embodiment and modified examples.

[0107] In the above-described first and fourth embodiments and the modified example of the first embodiment, the projection unit 40 is an LED light source that emits monochromatic light, but it may also be an LED light source that emits white light. However, because the response frequency of an LED light source that emits monochromatic light is higher than the response frequency of an LED light source that emits white light, it is preferable that the LED light source used as the projection unit 40 be an LED light source that emits monochromatic light. When an LED light source that emits monochromatic light is used, the illumination light can be turned on and off in response to high-frequency vibrations.

[0108] In the above-described first, third, and fourth embodiments, the acceleration sensor 30 is installed on the installation unit 23, and vibrations of the object T1 are indirectly detected by detecting vibrations of the installation unit 23. However, this is not limiting, and for example, if the object T1 to be adjusted in position is a moving object equipped in the device itself, the acceleration sensor 30 may be installed on the object T1. Furthermore, if the ground 3 hardly vibrates but the camera 50 vibrates, the acceleration sensor 30 may be installed on the camera 50.

[0109] In the above-described fourth embodiment, the projection unit 40 is always turned on, but further, as in the first embodiment, the lighting of the projection unit 40 may be controlled when the edges E1 and E2 are approximately aligned with the focal position H0 of the camera 50. This makes it possible to reliably prevent unwanted light from entering the imaging surface of the camera 50.

[0110] In the above-described fourth embodiment, the projection unit 40 is always turned on. However, when the lighting device 1b is installed in the room 1a as in the third embodiment, the projection unit 40 may be omitted. That is, the lighting device 1b installed in the room 1a may be used instead of the projection unit 40 of the position adjustment device 2. In this case, the illumination light from the lighting device 1b is always irradiated onto the object T1, and the exposure of the camera 50 is controlled, so that a clear captured image M1 can be acquired as in the fourth embodiment.

[0111] In the above-described first to fourth embodiments and the modification of the first embodiment, the position adjustment device 2 is provided with the cameras 50, 51, and 52. However, when cameras are used for position control of the robot 10, the position adjustment device 2 does not need to be provided with the cameras 50, 51, and 52. That is, among the multiple cameras used for position control of the robot 10, a camera whose focal position is approximately aligned with the vicinity of the edge of the target T1 may be used instead of the cameras 50, 51, and 52 of the position adjustment device 2. In this case, the imaging processing unit of the position adjustment device 2 acquires a captured image using imaging information from that camera.

[0112] In the above-described modified example of the first embodiment and the second embodiment, TOF sensors 60, 61, and 62 that measure the distance to the edges E1 and E2 of the object T1 are used as the detectors that detect vibrations of the object T1. However, the configuration for measuring the distance to the edges E1 and E2 of the object T1 is not limited to TOF sensors, and an eddy current sensor or a capacitance sensor may also be used. In these cases, too, a configuration for detecting vibrations of the object T1 can be realized inexpensively. Furthermore, these configurations allow the positions of the edges E1 and E2 to be measured directly, thereby improving measurement accuracy.

[0113] In the second embodiment, the focal positions of the cameras 51 and 52 are the same H0, but if the height of the object T1 differs between the edges, the focal positions of the cameras 51 and 52 are set to different positions. In this case as well, the projection unit 41 is turned on during a period P1 when the edge E1 approximately matches the focal position of the camera 51, and the projection unit 42 is turned on during a period P2 when the edge E2 approximately matches the focal position of the camera 52. Therefore, in this case as well, a captured image M11 in which the edge E1 is clear and a captured image M12 in which the edge E2 is clear can be obtained.

[0114] In the second embodiment, another imaging processing unit may be provided upstream of the control unit 120 to generate a captured image M10 by combining a captured image M11 from the imaging processing unit 113 and a captured image M12 from the imaging processing unit 133. Also, the captured images M11 and M12 do not necessarily have to be combined. In this case, the control unit 120 drives the installation unit 23 so that the line of the edge E1 extracted from the captured image M11 coincides with the line L1, and the line of the edge E2 extracted from the captured image M12 coincides with the line L2.

[0115] In the second embodiment, the vibrations of the edge E1 and the edge E2 have the same shape and only the phases of the vibrations are different, but this is not limiting, and the amplitudes and periods of the two vibrations may be different from each other. Also, although the timing of one frame period of the cameras 51 and 52 is the same, they may be shifted from each other.

[0116] 5, 10, and 13, the edge position of the object T1 is illustrated as a sinusoidal waveform, but this is not limiting and the amplitude of the waveform may change over time. In this case, too, the vibration analysis circuit estimates the period during which the edge position of the object T1 approximately matches the focal position of the corresponding camera. This effectively reduces blurring of the captured image caused by vibration.

[0117] In the above-described first to fourth embodiments and the modification of the first embodiment, the projection units 40, 41, and 42 are configured to emit visible light, and the cameras 50, 51, and 52 are configured to capture images of the visible light. However, this is not limiting, and the projection units 40, 41, and 42 may be configured to emit infrared light or ultraviolet light, and the cameras 50, 51, and 52 may be configured to capture images of the corresponding infrared light or ultraviolet light.

[0118] In the above-described first to fourth embodiments and the modification of the first embodiment, the vibration analysis circuit 111 previously holds the focal positions of the cameras 50, 51, and 52. However, this is not limiting, and the focal positions of the cameras 50, 51, and 52 may be determined by, for example, moving the cameras at a low speed in the Z-axis direction in a vibration-free state, fixing the camera positions in a state where the edge of the target object T1 in the captured image is clear, and setting the position of the edge of the target object T1 at this time as the focal position of the camera.

[0119] In the above-described first to fourth embodiments and the modification of the first embodiment, the imaging direction of the cameras 50, 51, and 52 is the Z-axis direction, but it is not limited to this and may be a direction tilted with respect to the Z-axis direction. In this case, the vibration of the object T1 in the imaging direction of the camera is analyzed in the vibration analysis circuit based on detection signals from the acceleration sensor, TOF sensor, etc.

[0120] In the above embodiments, if the optical design is such that the effective range of the focus on the XY plane is sufficiently small, vibrations in the X or Y axis can be treated in the same way as vibrations in the Z axis. In other words, illumination light only needs to be applied during the period when the edge falls within the effective range.

[0121] In addition, the embodiments of the present invention can be modified in various ways as appropriate within the scope of the technical ideas set forth in the claims.

[0122] (Addendum) The above description of the embodiments discloses the following techniques.

[0123] (Technology 1) a projection unit that irradiates an object with illumination light; a detection unit that detects vibrations of the object; a camera unit having a focal point; an analysis unit that estimates a period during which the focus of the camera is approximately aligned with the object based on the detection signal from the detection unit; During the period, the illumination light is projected from the projection unit onto an area including the object, and outside the period, the projection unit stops projecting the illumination light. An illuminated imaging device characterized by:

[0124] (Technology 2) a projection unit that irradiates an object with illumination light; a detection unit that detects vibrations of an object; a camera unit having a focal point; an analysis unit that estimates a period during which the focus is approximately aligned with the object based on a detection signal from the detection unit, controlling the camera so as to expose each pixel during the period, and controlling the camera so as not to expose each pixel outside the period; An illuminated imaging device characterized by:

[0125] According to the techniques 1 and 2, the captured image is acquired using illumination light during a period when the camera's focus is approximately aligned with the object, so the captured image is a clear image in a state where the camera's focus is approximately aligned with the object. Therefore, even if the object is vibrating, the image of the object can be properly acquired.

[0126] (Technology 3) In the illuminated imaging device according to any one of the first and second techniques, further comprising a filter that blocks light other than the wavelength band of the illumination light from reaching the camera. An illuminated imaging device characterized by:

[0127] This technology can prevent unwanted light outside the wavelength band of the illumination light from entering the camera not only during the above-mentioned period but also outside the above-mentioned period, thereby further reducing blurring of captured images caused by vibration.

[0128] (Technology 4) In the illumination-equipped imaging device described in Technical 3, a wavelength band of the illumination light is set to a wavelength band different from a wavelength band of light used to illuminate a room in which the illuminated imaging device is installed; An illuminated imaging device characterized by:

[0129] According to this technique, the illumination light in the room can be removed by a filter, and blurring of the captured image caused by the illumination light in the room can be suppressed.

[0130] (Technology 5) In the illuminated imaging device according to any one of the first to fourth aspects, The detection unit is an acceleration sensor installed on the installation unit or the object. An illuminated imaging device characterized by:

[0131] This technology makes it possible to easily detect vibrations of an object.

[0132] (Technology 6) In the illuminated imaging device according to any one of the first to fourth aspects, The detection unit is a device for measuring the distance to the object. An illuminated imaging device characterized by:

[0133] (Technology 7) In the illumination-equipped imaging device described in Technical 6, The detection unit is a TOF sensor. An illuminated imaging device characterized by:

[0134] This technology allows for inexpensive implementation of a configuration for detecting vibrations of an object. Furthermore, the TOF sensor can directly measure the position of an object, improving the accuracy of measuring the object's position.

[0135] (Technology 8) a placement unit on which an object is placed; a driving unit that drives the installation unit to change the position of the object; An illuminated imaging device according to any one of techniques 1 to 7; a control unit that drives the drive unit using the captured image obtained by the illuminated imaging device as a feedback control image to adjust the position of the object to a target position, A position adjustment device characterized by:

[0136] According to this technology, since the illuminated imaging device according to any one of technologies 1 to 7 is used, the feedback control image is a clear image in which the focus of the camera is approximately aligned with the object. Therefore, even if the object is vibrating, the control unit can appropriately adjust the position of the object to the target position based on the acquired captured image. [Explanation of symbols]

[0137] 2 Position adjustment device 2a, 200 Illuminated imaging device 22 Drive unit 23 Installation part 30 Acceleration sensor (detection part) 40, 41, 42, 210 Projection section 50, 51, 52 Camera 60, 61, 62 TOF sensor (detection part) 70, 71, 72 Filters 110 Image acquisition unit 111, 131, 251 Vibration analysis circuit (analysis section) 113, 133, 253 Imaging processing unit 120 control section M1, M10, M11, M12 captured images P1 and P2 periods T1 Object

Claims

1. a projection unit that irradiates an object with illumination light; a detection unit that detects vibrations of the object; a camera unit having a focal point; an analysis unit that estimates a period during which the focus is approximately aligned with the object based on a detection signal from the detection unit, During the period, the projection unit projects the illumination light onto an area including the object, and outside the period, the projection unit stops projecting the illumination light. An illuminated imaging device characterized by:

2. a projection unit that irradiates an object with illumination light; a detection unit that detects vibrations of the object; a camera unit having a focal point; an analysis unit that estimates a period during which the focus is approximately aligned with the object based on a detection signal from the detection unit, controlling the camera unit so as to expose each pixel during the period, and controlling the camera unit so as not to expose each pixel outside the period; An illuminated imaging device characterized by:

3. 3. The illuminated imaging device according to claim 1, further comprising a filter that blocks light outside the wavelength band of the illumination light from reaching the camera unit.

3. The illuminated imaging device according to claim 1 or 2.

4. 4. The illuminated imaging device according to claim 3, a wavelength band of the illumination light is set to a wavelength band different from a wavelength band of light used to illuminate a room in which the illuminated imaging device is installed; An illuminated imaging device characterized by:

5. 3. The illuminated imaging device according to claim 1, The detection unit is an installation unit on which the object is installed or an acceleration sensor installed on the object. An illuminated imaging device characterized by:

6. 3. The illuminated imaging device according to claim 1, The detection unit is a device for measuring the distance to the object. An illuminated imaging device characterized by:

7. 7. The illuminated imaging device according to claim 6, The detection unit is a TOF sensor. An illuminated imaging device characterized by:

8. a placement unit on which an object is placed; a driving unit that drives the installation unit to change the position of the object; The illuminated imaging device according to claim 1 or 2; a control unit that drives the drive unit using the captured image obtained by the illuminated imaging device as a feedback control image to adjust the position of the object to a target position, A position adjustment device characterized by:

Images