Antenna device, communication device, and imaging system

Abstract

To provide a technique that can prevent deterioration in signal quality of an oscillation signal supplied to an antenna.SOLUTION: An antenna device includes, on a semiconductor substrate: a first active antenna which has a first antenna for transmitting or receiving a first electromagnetic wave of a first frequency and a first negative resistance element; an oscillation unit which has a second negative resistance element for generating a second electromagnetic wave by oscillating at a second frequency and a resonant unit; a coupling line which electrically connects the first active antenna and the oscillation unit; a first wiring line which is electrically connected to the first negative resistance element and into which a first bias signal supplied to the first negative resistance element is input; and a second wiring line which is electrically connected to the second negative resistance element and into which a second bias signal supplied to the second negative resistance element is input.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to an antenna device, a communication device, and an imaging system. [Background technology]

[0002] In recent years, wireless communications using high frequencies, such as terahertz waves, have been attracting attention as a promising area for future use in data communications using electromagnetic waves. Signal transmission and reception requires an oscillator to generate a carrier wave. Known applications of semiconductor devices used in the terahertz wave region include high-frequency signals from oscillator circuits using negative resistance elements fabricated on compound semiconductor substrates, such as InP and GaAs. Furthermore, to address the significant impact of transmission line impedance on the transmission of high-frequency signals, such as those in the terahertz band, radiating oscillators have been proposed that integrate antennas based on patterns and structures on substrates made of FR4 or other materials, thereby integrating these antennas structurally and functionally. Patent Document 1 discloses a receiver that uses an active element using a resonant tunneling diode to perform synchronization and detection by exciting the oscillation frequency of the resonant tunneling diode itself to the frequency of an injection-locked signal through injection locking with electromagnetic waves incident on the antenna. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2008 / 120826 [Non-patent literature]

[0004] [Non-Patent Document 1] Jpn.J.Appl.Phys.,Vol.47,No.6(2008), pp.4375-4384 Summary of the Invention [Problem to be solved by the invention]

[0005] In Patent Document 1, as shown in Fig. 25, injection locking is performed on a radiating oscillator (on the back side of 2501) by inputting an oscillation signal from an external oscillator 2500. Here, in high frequency bands such as terahertz waves, the influence of the impedance of the transmission line becomes large, and signal quality is reduced due to a decrease in amplitude and waveform distortion caused by loss of the oscillation signal, which can impair the reliability and stability of the device.

[0006] In view of the above-mentioned problems, an object of the present invention is to provide a technique capable of preventing a decrease in the signal quality of an oscillation signal supplied to an antenna. [Means for solving the problem]

[0007] In order to achieve the above object, an antenna device according to the present invention comprises: On a semiconductor substrate, a first active antenna having a first antenna for transmitting or receiving a first electromagnetic wave of a first frequency and a first negative resistance element; an oscillation unit having a second negative resistance element and a resonance unit that oscillates at a second frequency to generate a second electromagnetic wave; a coupling wire electrically connecting the first active antenna and the oscillation unit; a first wiring electrically connected to the first negative resistance element and receiving a first bias signal to be supplied to the first negative resistance element; a second wiring electrically connected to the second negative resistance element and receiving a second bias signal to be supplied to the second negative resistance element; The present invention is characterized by comprising: [Effects of the Invention]

[0008] According to the present invention, it is possible to prevent degradation of the signal quality of the oscillation signal supplied to the antenna. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a block diagram showing an antenna device according to a first embodiment. [Figure 2]IV curve graph of the negative resistance element according to embodiment 1 [Figure 3] Frequency Conversion Example of Frequency Mixer According to Embodiment 1 [Figure 4] 1 is a schematic top view of a semiconductor substrate according to Embodiment 1. [Figure 5] 1(a) to 1(c) are cross-sectional schematic views of a semiconductor substrate according to a first embodiment. [Figure 6] Equivalent circuit of the semiconductor substrate according to the first embodiment [Figure 7] A simplified circuit diagram of the equivalent circuit shown in Figure 6 [Figure 8] 1 is a schematic top view of a semiconductor substrate according to a second embodiment. [Figure 9] FIG. 10 is a block diagram showing an antenna device according to a third embodiment. [Figure 10] 10A and 10B are block diagrams showing an antenna device according to a fourth embodiment. [Figure 11] 10 is a schematic top view of a semiconductor substrate according to a fourth embodiment. [Figure 12] 1(a) to 1(c) are cross-sectional schematic views of a semiconductor substrate according to a fourth embodiment. [Figure 13] 10 is a schematic top view of a semiconductor substrate according to Embodiment 5. [Figure 14] 10 is a schematic top view of a semiconductor substrate according to a sixth embodiment. [Figure 15] 10 is a schematic top view of a semiconductor substrate according to Embodiment 7. [Figure 16] 10 is a schematic top view of a semiconductor substrate according to Embodiment 7. [Figure 17] 10 is a schematic top view of a semiconductor substrate according to embodiment 8. [Figure 18] FIG. 13 is a block diagram showing an antenna device according to an eighth embodiment. [Figure 19] 10 is a schematic top view of a laminated substrate according to Embodiment 9. [Figure 20] 10(a) to 10(c) are cross-sectional schematic views of a laminated substrate according to a ninth embodiment. [Figure 21] Block diagram of an imaging device according to a tenth embodiment. [Figure 22] 13 is an example of a circuit block of an imaging device according to a tenth embodiment. [Figure 23]FIG. 10 is a diagram illustrating an example of a communication device according to another embodiment. [Figure 24] 10A and 10B are diagrams illustrating an example of a communication device according to another embodiment. [Figure 25] Illustrative diagram of external injection locking DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0011] In the following explanation, the antenna device will be described as being used as a receiving device for detecting terahertz waves, but the antenna device can also be used as a transmitting device for emitting terahertz waves. Here, terahertz waves refer to electromagnetic waves within a frequency range of 10 GHz to 100 THz, for example, 30 GHz to 30 THz.

[0012] [Embodiment 1] FIG. 1 is a block diagram showing the configuration of a receiving device 100 applicable to terahertz waves according to this embodiment. The receiving device 100 is configured to receive electromagnetic waves called terahertz waves 101 incident from the outside. In this embodiment, the frequency of the terahertz waves 101 is defined as f1, and the signal name is defined as signal 1. The receiving device 100 includes a semiconductor substrate 102, a first bias control unit 105, a second bias control unit 106, and a detection circuit 110 serving as a detection unit. The semiconductor substrate 102 is a substrate formed of semiconductor materials including elemental semiconductors such as silicon (Si) and germanium (Ge), as well as compound semiconductors such as gallium arsenide (GaAs), indium arsenide (InP), and gallium nitride (GaN). The semiconductor substrate 102 can also be referred to as a chip or die. The semiconductor substrate 102 includes an active antenna 103 and an oscillation unit 104. Furthermore, the active antenna 103 and the oscillator 104 are respectively connected to a first bias control section (first bias control circuit) 105 and a second bias control section (second bias control circuit) 106 outside the semiconductor substrate 102. The semiconductor substrate 102 is an example of the antenna device according to this embodiment.

[0013] The active antenna 103 has an upper conductor 107 connected to a negative resistance element. The upper conductor 107 constitutes a part of the resonant structure. The active antenna 103 can oscillate due to the resonant structure within the active antenna 103 and the negative resistance generated by the negative resistance element. The negative resistance element is an element having a negative resistance characteristic between its terminals. In this embodiment, the negative resistance element is described as a resonant tunneling diode (RTD). However, the negative resistance element may also be a two-terminal element such as an IMPATT (Impact Ionization Avalanche Transit-Time) diode or a Gunn diode. The negative resistance element may also be a transistor that does not have two terminals, such as a field effect transistor (FET) or a bipolar junction transistor (BJT). In other words, the negative resistance element is not limited to these, as long as it generates a negative resistance between its terminals that satisfies the oscillation conditions due to the resonant structure within the active antenna 103 and can be fabricated on a semiconductor substrate.

[0014] The oscillator 104 also includes the aforementioned negative resistance element and resonant structure, and is configured to oscillate at a specific frequency f2. Furthermore, a first bias control unit 105 and a second bias control unit 106 are connected to the active antenna 103 and the oscillator 104, respectively, and apply a bias voltage to each negative resistance element. The bias control units 105 and 106 control the bias voltage based on power input from outside the receiver 100. Furthermore, to stabilize the relatively high frequencies of 0.1 to 10 GHz in each resonant structure, an AC (alternating current) short circuit may be placed inside the bias control units 105 and 106 or in the bias path from the bias control units 105 and 106 to the negative resistance element. Specifically, this is a circuit in which a TiW resistive layer and an MIM (Metal-Insulator-Metal) capacitance structure are connected in series. In this case, the MIM capacitance is large within the aforementioned frequency range, e.g., a capacitance of approximately several pF. Each bias control unit applies a predetermined bias voltage continuously or intermittently. The coupling wire 108 is a metal wire that electrically connects the active antenna 103 and the oscillation section 104 , and is, for example, a microstrip line formed as a pattern on the semiconductor substrate 102 .

[0015] Second bias control unit 106 applies a bias voltage that generates negative resistance to the negative resistance element, causing oscillation unit 104 to oscillate and generate signal 2 having frequency f2. Signal 2 propagates from oscillation unit 104 to active antenna 103 via coupled wire 108. Active antenna 103 is excited by signal 2, causing signal 3 of frequency f3 to be generated within active antenna 103. Excitation unit 109 is a resonant structure within active antenna 103, and has the function of synchronizing active antenna 103 with signal 2. First bias control unit 105 applies a bias voltage that generates positive resistance to the negative resistance element of active antenna 103, causing the resonant structure within the active antenna to resonate due to excitation, generating signal 3 having frequency f3.

[0016] Furthermore, a detection circuit 110 that detects a received signal is connected to the first bias path between the first bias control unit 105 and the negative resistance element. The connection configuration from the first bias path to the detection circuit 110 will be described later. The active antenna 103 has an excitation unit 109 and a mixer 111 as functions consisting of the negative resistance element, the antenna, and surrounding resonating units. These may be functions that are possessed by a single specific element within the active antenna, or functions that are realized by a combination of multiple elements or structures.

[0017] Figure 2 is an IV curve graph 200 that plots the amount of current flowing when a bias voltage is applied to a negative resistance element. The horizontal axis represents the applied bias voltage [V], and the vertical axis represents the amount of current [mA]. ​​As shown in graph 200, the amount of current gradually increases as the bias voltage is gradually increased from 0 V to 0.5 V. This bias voltage range is referred to as a first region 201. Similarly, as the bias voltage is increased from a peak of 0.5 V to approximately 1.0 V, a second region 202 appears in which the amount of current decreases. After approximately 1.0 V, a third region 203 appears in which the amount of current increases again as the voltage increases. Thus, the second region 202, in which the amount of current decreases as the bias voltage increases, is called the negative resistance region, while the first region 201 and the third region 203, in which the amount of current increases as the bias voltage increases, are called positive resistance regions. As shown in graph 200, whether a negative resistance element operates in the positive resistance region or the negative resistance region can be controlled by the applied bias voltage. Note that the IV curve is an example for explanation purposes, and the values ​​of the bias voltage and current are not limited to this. In this embodiment, the first bias control unit 105 is controlled to apply a bias voltage that causes the negative resistance element of the active antenna 103 to operate in the first region 201 or the third region 203.

[0018] Next, the operation of receiving and detecting electromagnetic waves will be explained using Figures 1 and 3. Figure 3 is a graph illustrating the operation of the mixer, with the horizontal axis representing frequency [THz] and the vertical axis representing intensity. First, active antenna 103 receives signal 1, which is the received RF signal of terahertz wave 101, via upper conductor 107. Signal 1 is modulated based on frequency f1 and is shown as peak 2400 at frequency f1 THz in Figure 3. Signal 1 excites active antenna 103. At the same time, signal 2 oscillated by oscillator 104 is also input to active antenna 103 via coupling wire 108. Signal 2 oscillates at frequency f2 and is shown as peak 2401 at frequency f2 THz in Figure 3. Peak 2401 is the reference oscillation signal, and its frequency band is narrower than that of peak 2400. Signal 2 also excites active antenna 103, generating signal 3. Peak 2402 is the intensity of the electromagnetic wave on active antenna 103 due to reception and oscillation of peak 2401, and its intensity is reduced compared to peak 2401 by the amount of antenna loss. Here, frequencies f2 and f3 of signals 2 and 3 are the same, so f2 = f3. Note that, as shown in Fig. 3, frequencies f1 to f4 of signals 1 to 4 are center frequencies, and may have a predetermined frequency width if they are modulated signals.

[0019] Signals 1 and 3 generated within active antenna 103 excite the negative resistance element and resonator provided within active antenna 103. Due to the nonlinearity of the negative resistance element, it operates as mixer 111, mixing signals 1 and 3 to generate signal 4, which is the detection signal. Signal 4 is generated as a signal containing frequency f4, shown as peak 2403 in FIG. 3. Because frequency f4 of signal 4 is the difference between frequency f1 of signal 1 and frequency f3 of signal 3, the equation f1 - f3 = f4 holds. The intensity of peak 2403 is lower than the intensity of peak 2400 due to losses in mixer 111. By setting frequencies f1 and f3 to relatively close frequencies in the terahertz band, signal 4, which is the difference between them, becomes a low-frequency signal. While FIG. 3 illustrates only a signal containing a frequency component at frequency f4, which is necessary for the detection signal, signals containing multiple frequency components other than frequency f4 may be generated by mixing.

[0020] For example, if f1 = 0.500 THz and f3 = 0.498 THz, then f1 - f3 = f4 = 0.002 THz, i.e., a 2 GHz signal. Because signal 4 has a frequency lower than the terahertz band, the detection circuit 110 can be configured to use a detection device similar to an existing gigahertz band detector. When f1 and f3 are different frequencies within a predetermined frequency band (f1 ≠ f3 = f2), as described above, the active antenna 103 can function as a heterodyne downconverter (heterodyne detector). Signal 1 can be used as the RF input and signal 3 as the LO (local oscillator) input, allowing mixer operation. The downconverted signal 4 can be output as an IF signal. Because the receiver of this embodiment functions as a heterodyne detector, the detection circuit 110 can be configured to perform detection using a superheterodyne scheme.

[0021] Furthermore, by setting the frequency f3 of signal 3 to the same frequency as the frequency f1 of signal 1 (f1 = f3 = f2), it is also possible to make the active antenna 103 function as a homodyne downconverter. The homodyne downconverter is also called a zero IF system because the frequency f4 of signal 4 is 0 Hz. In this case, a direct conversion detection circuit can be used as the detection circuit 110. In the circuit configuration of this embodiment, by appropriately setting the frequency f2 of the oscillator 104, it is possible to configure a general-purpose receiving device that is compatible with both the heterodyne and homodyne types.

[0022] Next, an example of the structure of the semiconductor substrate 102 according to this embodiment will be described with reference to Figures 4 and 5. Figure 4 is a schematic top view of the semiconductor substrate 102, and Figures 5(a) to 5(c) are schematic cross-sectional views of the substrate 102 in Figure 4 taken along the A-A' plane, the B-B' plane, and the C-C' plane. The structure described here is a simplified example for explaining this embodiment, and is not intended to limit the structure.

[0023] The right side of FIG. 4 is the active antenna 103, and the square part located in the center of the active antenna is the upper conductor 107 of the antenna. In this embodiment, the antenna is described as a microstrip-type rectangular patch antenna. Alternatively, the antenna can be a dipole antenna, a log-periodic antenna, a bowtie antenna, a slot antenna, a loop antenna, or any other antenna that can be formed on a semiconductor substrate. A first negative resistance element 300 is disposed near the center of the upper conductor 107, and a stacked structure of a resonant tunneling diode (RTD) and wiring for electrical connection are formed in this area. FIG. 5(a) shows the cross-sectional structure of the corresponding portion, in which a via 3001 formed by a via or the like connected to the upper conductor 107 is connected to a semiconductor layer 3002 and an RTD 3003. In other words, one terminal of the first negative resistance element 300 is electrically connected to the upper conductor 107, and another terminal is electrically connected to the GND layer 309. The mixer 111 in the functional block shown in FIG. 1 corresponds to the upper conductor 107 and the first negative resistance element 300 shown in FIG. 5(a). Further, the excitation section 109 corresponds to the upper conductor 107. In this embodiment, the upper conductor 107 and the negative resistance element 300 are integrated together, but a resonant section made of a metal conductor may be provided separately around the first negative resistance element 300, and the resonant section may be separately connected to the upper conductor 107. In other words, the connection between the active antenna 103 and the first negative resistance element 300 is not limited to the structure in this embodiment.

[0024] Furthermore, power supply vias 307a and 307b that supply power to the upper conductor 107 are provided above and below the upper conductor 107 in FIG. 4 , providing a power supply path for applying a bias voltage to the negative resistance element 300. The bias voltage is supplied to the first bias wiring 310 in FIG. 4 from the first bias control unit 105 outside the semiconductor substrate 102. The first bias wiring 310 connects the first bias conductive layers 303 via first bias vias 305, and is connected from the first bias conductive layers 303 to the power supply vias 307a and 307b. The first bias via 305 is connected to the first bias conductive layer 303 for biasing the first negative resistance element 300. The bias voltage is supplied to the first negative resistance element 300 via a first bias path that includes these paths. The first bias path also includes a path from a power supply unit that generates the bias voltage to the semiconductor substrate 102, and exists inside or outside the semiconductor substrate 102, and is not limited to the components described above.

[0025] Here, the width of the power feed vias 307a and 307b is smaller than the width of the upper conductor 107. Furthermore, the width of the portion (connection portion) of the first bias conductive layer 303 connected to the power feed vias 307a and 307b is smaller (thinner) than the width of the active antenna 103. The width of the connection portion of the power feed vias 307a and 307b, the upper conductor 107, and the first bias conductive layer 303 is the length in the electromagnetic wave resonance direction (A-A' direction) within the active antenna 103. Furthermore, these widths are 1 / 10 or less of the effective wavelength λ (λ / 10 or less) of the terahertz wave of the oscillation frequency standing in the active antenna 103. This prevents the power feed vias 307a and 307b and the first bias conductive layer 303 from interfering with the resonant electric field within the active antenna 103 and reducing the radiation efficiency of the active antenna 103.

[0026] Furthermore, the positions of the power feed vias 307a and 307b are located at nodes of the electric field of the terahertz wave of the oscillation frequency standing in the active antenna 103 (i.e., positions where the electric field of the standing wave of the terahertz wave becomes zero). In this case, the power feed vias 307a and 307b and the first bias conductive layer 303 are configured so that their impedance is sufficiently higher than the absolute value of the negative differential resistance of the RTD, which is the first negative resistance element 300, in a frequency band near the oscillation frequency. In other words, the power feed vias 307a and 307b and the first bias conductive layer 303 are connected to the active antenna 103 so as to present a high impedance to the RTD at the oscillation frequency. In this case, the active antenna 103 is isolated (separated) by the bias wiring path at the oscillation frequency. As a result, the current of the oscillation frequency induced in each active antenna via the first bias wiring 310 and the first bias control unit 105 does not affect adjacent antennas. Furthermore, interference between the electric field of the oscillation frequency standing in the active antenna 103 and the power supply member is suppressed.

[0027] The left side of FIG. 4 includes an oscillator 104. The oscillator 104 is configured using a microstrip line resonator and is mainly composed of a second negative resistance element 301 and a resonance unit 302. Similar to the first negative resistance element 300, the second negative resistance element 301 is also configured with a via 3011, a semiconductor layer 3012, and an RTD 3013 shown in FIG. 5(a), and electrically connects the resonance unit 302 and the GND layer 309. Furthermore, a power feed via 308 that feeds power to the resonance unit 302 is provided in a portion of the resonance unit 302 shown in FIG. 4, and a power feed path for applying a bias voltage to the second negative resistance element 301 is provided. The bias voltage is supplied to the second bias wiring 311 shown in FIG. 4 by the second bias control unit 106 from outside the semiconductor substrate 102. The second bias wiring 311 connects the second bias conductive layer 304 via the second bias via 306, and is connected from the second bias conductive layer 304 to the power feed via 308. A bias voltage is supplied to the second negative resistance element 301 via these connections. These bias paths inside and outside the semiconductor substrate 102 are referred to as second bias paths. In this embodiment, the first bias control unit 105 and the second bias control unit 106 are configured to apply bias voltages to the first negative resistance element 300 and the second negative resistance element 301 individually, but the bias voltages supplied and the control may be common. As shown in FIG. 5(a), forming the first negative resistance element 300 and the second negative resistance element 301 in the same layer can reduce variations in the characteristics of the first negative resistance element 300 and the second negative resistance element 301. The widths of the first bias via 305 and the second bias via 306 are greater than the widths of the power feed vias 307a and 307b. Here, the width may refer to the length along the B-B' direction.

[0028] The power feed via 308 and the portion (connection portion) of the second bias conductive layer 304 connected to the power feed via 308 are similar to the power feed vias 307a and 307b and the first bias conductive layer 303. The power feed via 308 is a connection portion for electrically and mechanically connecting the second bias wiring 311 to the resonator unit 302. In addition to serving as a component of the microstrip line resonator, the resonator unit 302 also serves as an electrode for injecting current into the second negative resistance element 301 by being connected to these vias. The power feed via 308 is also positioned at a node of the electric field of the terahertz wave of the oscillation frequency standing in the resonator unit 302. In this case, the power feed via 308 and the second bias conductive layer 304 have impedances sufficiently higher than the absolute value of the negative differential resistance of the RTD, which is the second negative resistance element 301, in a frequency band near the oscillation frequency. In other words, the power supply via 308 and the second bias conductive layer 304 are connected to the resonating unit 302 so as to present a high impedance to the RTD at the oscillation frequency.

[0029] A coupled wire 108 is arranged between the upper conductor 107 and the resonator 302 in Figure 4. This is to transmit the signal 2 oscillated in the oscillator 104 to the active antenna 103. The coupled wire 108 is formed by a pattern on the semiconductor substrate 102. This makes it possible to keep the line width, thickness, and line length of the coupled wire 108 constant and prevent signal loss due to changes in impedance. A cross section of the coupled wire 108 is shown in Figure 5(a). The connection part 108a of the coupled wire 108 with the resonator 302 and the connection part 108b with the upper conductor 107 are not physically connected, but are electrically connected. This is because the connection is capacitive coupling. Since it is only necessary to transmit the high-frequency component of the signal 2 to be transmitted, and the first bias control unit 105 and the second bias control unit 106 may have different bias voltages, the electrical connection is made to pass only the AC (alternating current) component and not the DC (direct current) component. Of course, when the bias is controlled in the same way, the connection may be made directly, or only one of the connection parts 108a and 108b may be connected by capacitive coupling, or a capacitive coupling part may be provided midway along the coupling line 108.

[0030] 5(a) to 5(c), an insulator layer and a dielectric layer 312 are arranged around the negative resistance elements 300 and 301, the upper conductor 107, the resonator 302, and the coupling wire 108, thereby ensuring insulation between the antenna and the resonator and adjusting the dielectric constant around the antenna and the resonator. The dielectric constant is an important parameter because it is related to the wavelength of the high-frequency signal passing through the microstrip line of the antenna, the resonator, etc. In addition, a passivation layer 313 is provided on the top of the device to protect the device.

[0031] Next, an equivalent circuit simulating the configuration of this embodiment will be described with reference to FIG. 6. The circuit diagram shows, from left to right, the second bias control unit 106, the oscillator 104, the coupled wire 108, the active antenna 103, and the first bias control unit 105, connected in this order. The coupled wire 108 has distributed constants: capacitances C1 and C2, resistances R1 and R2, and line inductances L1 and L2, which connect the bias potential to GND. C3 and C4 represent the capacitive coupling component between the active antenna 103 and the coupled wire 108, and the capacitive coupling component between the oscillator 104 and the coupled wire 108, respectively. Z1, Z2, and Z3 in the circuit diagram represent the impedance components specific to the upper conductor 107, the resonator 302, and the coupled wire 108, respectively.

[0032] The upper conductor 107 and the first negative resistance element 300 connect between a first bias potential 502 biased with a voltage V1 by the first bias control unit 105 and GND via each element. The upper conductor 107 connects between the first bias potential 502 and GND, and the first negative resistance element 300 connects between the first bias potential 502 and GND. The voltage V1 is a potential at which the first negative resistance element 300 operates in the first region 201 or the third region 203 where it generates positive resistance. The resonator 302 and the second negative resistance element 301 are supplied with a second bias potential 503 of voltage V2 by the second bias control unit 106, and are connected via an equivalent circuit element between the second bias potential 503 and GND. The voltage V2 is a potential at which the second negative resistance element 301 operates in the second region 202 where it generates negative resistance. The second bias potential 503 includes signal 2 generated by oscillation of the oscillator 104, and the resonator 302 is set so that the frequency f2 at which the oscillator 104 oscillates is the resonant frequency. The coupled wire 108 is set to an impedance that transmits signal 2, and by supplying power of the first bias potential 502 to the active antenna 103, the active antenna 103 is excited and generates signal 3. Each GND may be supplied by any method, such as being supplied from a common terminal via a common conductor, being supplied from separate terminals via individual conductors, or being branched from a common terminal to individual conductors.

[0033] The upper conductor 107 also oscillates by receiving the terahertz wave 101 from the outside as signal 1 (S1). Because the first negative resistance element 300 is connected to the first bias potential, signal 1 and signal 3 are mixed due to nonlinearity to generate signal 4. Signal 4 is transmitted to the detection circuit 110 via a detection signal extraction means such as a bias T 501. The bias T transmits only the AC component of the first bias potential 502 using C5, separating the first bias potential 502 from signal 4, and then detecting it. In this embodiment, the bias voltage is generated by a bias control unit. However, a passive circuit or switch for adjusting the bias voltage can be provided on the semiconductor substrate 102 to convert or turn on / off the bias voltage from the bias control units 105 and 106. Although the bias T 501 is provided as a detection signal extraction means, only the capacitive coupling component of the bias T 501 can be disposed on the semiconductor substrate 102 and connected to a detection circuit external to the semiconductor substrate 102. Furthermore, the inductance L3 may be replaced by a wiring in a semiconductor as an inductance component of the wiring, and the configuration of the signal extraction means is not limited to this.

[0034] FIG. 7 shows a simplified equivalent circuit of FIG. 6, focusing on the active antenna 103. A bias signal of bias voltage 600 from the first bias control unit 105 is supplied to the upper conductor 107 of the active antenna and the first negative resistance element 300, and these are connected via a first bias path 601 of a first bias potential 502. The first bias path 601 is connected to a coupled wire 108 including a capacitive coupling element C3 and a detection signal extraction means including C5. C3 and C5 function as a high-pass filter (HPF) that blocks direct current (DC) components and transmits alternating current (AC) components. Because signal 2 flowing through the coupled wire 108 is high-frequency, C3 has a high cutoff frequency. C5 has a low cutoff frequency to transmit the down-converted frequency components of signal 4. Therefore, the capacitance of C5 is set larger than that of C4. Furthermore, if a circuit with a low cutoff frequency is added to C3, signal 4 from the active antenna 103 will be transmitted through the coupled wire 108, increasing the loss of the detection signal.

[0035] According to this embodiment, a receiver can be constructed as a standalone device. Terahertz-band oscillation signals, which are difficult to handle in conventional configurations, can be generated by the oscillator 104 on the same substrate and transmitted to the active antenna 103 with minimal loss. Furthermore, by changing the frequency f2 of the oscillator 104, not only homodyne but also heterodyne types can be configured for mixing, and the synchronized phase can be changed by adjusting the coupling line 108. By constructing these signal processing units with terahertz-band frequencies on a single semiconductor substrate 102, the receiver can be manufactured using highly accurate semiconductor manufacturing techniques. Because a high-frequency signal 2 can be used as the synchronization signal, the frequency of the signal 4 handled by the signal processing circuit external to the semiconductor substrate can be lowered, making it possible to detect terahertz waves using a device similar to a conventional signal processing circuit.

[0036] According to this embodiment, mixing can be performed by changing the bias signal supplied to the antenna device configured on the same substrate. As a result, unlike Patent Document 1, which is based on homodyne detection, since the mixer and resonator are the same element, changing the phase of the local oscillation signal to the mixer can provide the function of a quadrature mixer that obtains amplitude and phase information.

[0037] [Embodiment 2] In the second embodiment, a configuration in which multiple active antennas of the first embodiment are cascaded will be described. In this embodiment, the active antenna 103 and the oscillator 104 can be configured as shown in FIG. 8. Of the three element structures on the left, right, and center of FIG. 8, the right and left elements are similar to the configurations shown in FIG. 4 described in the first embodiment. The element structure in the center is a second active antenna 7103 in which the active antenna 103 on the right side is additionally arranged. The square portion located in the center of the second active antenna 7103 is a second upper conductor 7107. A third negative resistance element 7300 is provided near the center of the second upper conductor 7107, and a stacked structure of a resonant tunneling diode (RTD) and wiring for electrical connection are formed in this portion. Furthermore, power supply vias 7307a and 7307b are arranged above and below the second upper conductor 7107 in FIG. 8, forming a power supply path for applying a bias voltage to the third negative resistance element 7300.

[0038] A bias voltage is supplied to the third bias wiring 7310 from a bias control unit outside the semiconductor substrate 102. The third bias wiring 7310 connects the third bias conductive layer 7303 via a third bias via 7305, and the third bias conductive layer 7303 is connected to power supply vias 7307a and 7307b. The bias control unit may be the same as the first bias control unit 105 used for the active antenna 103 on the right, or a different bias control unit may be used. A signal oscillated in the resonator 302 excites the second active antenna 7103 via the second coupled line 7108, and further excites the active antenna 103 via the coupled line 108. From the perspective of the active antenna 103, the two element structures on the left and center can be considered as the oscillator 104. In addition, although the present embodiment describes a configuration in which a connection is made via one active antenna, multiple active antennas may be used, and the number of cascaded active antennas is not limited to this.

[0039] As described above, according to this embodiment, oscillation signals can be efficiently supplied to the multiple active antennas 7103 and 103. Impedance control is required for the coupled wire 108 and the second coupled wire 7108 to reduce loss. Furthermore, since the oscillator 104 can supply an oscillation signal to one active antenna via another active antenna, the degree of freedom in designing the semiconductor substrate 102 on which the multiple active antennas 7103 and 103 are arranged can be improved.

[0040] [Embodiment 3] In the third embodiment, an embodiment will be described in which the active antenna 103 performs self-oscillation. Note that a description of the same configurations and functions as those of the first and second embodiments will be omitted, and only the differences from the first and second embodiments will be described in detail.

[0041] 9 is a functional block diagram of an antenna device 800 according to this embodiment. Unlike the first and second embodiments, the antenna device 800 according to this embodiment includes an excitation unit 113 in an oscillating state in the active antenna 103. The first bias control unit 105 applies a bias voltage that generates negative resistance to the negative resistance element of the active antenna 103, causing the negative resistance element and the resonant structure in the active antenna 103 to function as an oscillator and excite (self-oscillate) the natural frequency. In addition, injection locking is performed by inputting a signal 2 via a coupled wire 108.

[0042] Injection locking is a phenomenon in which the oscillation frequency of an internal self-oscillating oscillator is synchronized to the frequency of an external signal by injecting a synchronization signal (in this case, signal 2) into an oscillator performing self-oscillation. In this embodiment, the active antenna 103 functions as a self-oscillating oscillator and performs injection locking using signal 2. Furthermore, the voltage of the first bias control unit 105 generates negative resistance in the first negative resistance element. Therefore, unlike in embodiments 1 and 2, a voltage is applied that causes the first negative resistance element to operate in the second region 202 of FIG. 2 . Furthermore, the active antenna 103 can amplify signals through the oscillation of the negative resistance element and the resonant structure of the active antenna 103, thus functioning as a receiving device equipped with an amplifier 112, an oscillator, and a mixer 111. This detection operation is generally called coherent detection, and it is known that the active antenna 103 amplifies the injection-locked frequency component. In a homodyne detector to which this embodiment is applied, the active antenna 103 can also oscillate synchronously at frequency f1 by being injection-locked to the received terahertz wave 101. By doing so, f1 of signal 1 and f3 of signal 3 are synchronized, so that f1 = f3. Injection locking increases the strength of signal 3, allowing for efficient mixing.

[0043] In addition, the condition for injection locking to occur can be obtained by transforming the condition of equation (1) for determining the lock range of injection locking, which is known for injection locking of RTDs, into equation (2), and the injection signal strength P inj It can be seen that this is related to the strength of |Δf| ≦ (f OSC / Q)×(P inj / P OSC ) 1 / 2 (1) (|Δf|×(Q / f OSC )) 2 ×P OSC ≦ P inj (2) where |Δf| is the absolute value of the difference between the oscillation frequency of the self-oscillating oscillator and the frequency of the injection-locked signal, Q is the Q factor of the resonator, and f OSC is the oscillation frequency of the oscillator, P OSC is the oscillation intensity of the oscillator, P injis the injection intensity of the injection-locked signal. inj It can be seen that injection locking occurs when P inj Δf and f OSC In the case of injection locking by signal 2, it is determined by the intensity and frequency of signal 2, and in the case of injection locking by signal 1 of received terahertz wave 101, it is also influenced by the intensity and frequency of signal 1. In injection locking, the generation can be controlled by appropriately controlling second bias control unit 106 and signal 1 of terahertz wave 101 using these intensities and frequencies as thresholds.

[0044] The bias voltage applied from the first bias control unit 105 may be a value near the boundary between the first region 201 and the second region 202 in Figure 2. In this case, the amplitude will fluctuate between the regions that generate positive and negative resistance when a signal causes a current or voltage fluctuation. In this state, all frequency components of the input signal can be amplified, enabling detection while maintaining a high modulation depth. This detection method is called amplified detection. Either detection method is expected to improve signal quality, enabling terahertz waves to be detected in the detection circuit.

[0045] Also, in this embodiment, similarly to the second embodiment, it is possible to cascade-connect a plurality of active antennas 103.

[0046] The equivalent circuit of this embodiment will be described with reference to FIG. 6 . In the active antenna 103, the upper conductor 107 and the first negative resistance element 300 are biased by the first bias control unit 105 at a first bias potential 502 of voltage V1, and the first bias potential 502 is connected to GND via equivalent circuit elements. Unlike in the first and second embodiments, the voltage V1 has a potential in the second region 202 that generates negative resistance in the first negative resistance element 300. In the oscillator 104, the second negative resistance element 301 is biased by the second bias control unit 106 at a second bias potential 503 of voltage V2, as in the previously described embodiments, and the second bias potential 503 is connected to GND via equivalent circuit elements. As in the first and second embodiments, the second negative resistance element 301 has a potential in the second region 202 that generates negative resistance.

[0047] The first negative resistance element 300 generates negative resistance, causing self-oscillation together with the resonant structure within the active antenna 103. The resonant structure, including the upper conductor 107, is an impedance-controlled portion configured so that the self-oscillation frequency is the resonant frequency. Furthermore, the active antenna 103 is injection-locked using signal 2 input via coupled wire 108 as an injection signal, generating signal 3, which is synchronized at the same frequency as signal 2, such that f2 = f3. The active antenna 103 generates signal 4, a detection signal, by mixing signal 1 generated by the incidence of electromagnetic waves with signal 3. Since f2 = f3 in injection locking with signal 2, homodyne detection is possible when the frequency f3 of signal 3, i.e., the frequency f2 of signal 2, is the same as the frequency f1 of signal 1. If the frequency f3 differs, heterodyne detection is possible. Furthermore, if the conditions for injection locking with signal 1 can be met, the frequency f1 of signal 1 and the frequency f3 of signal 3 become equal (f1 = f3), allowing operation as a homodyne detector even in this case. In other words, when operating as a heterodyne detector, the antenna device 800 controls the bias signals output from the bias control sections 105 and 106 so that injection locking by the signal 1 does not occur.

[0048] Generally, a high-quality IF signal can be obtained by inputting a high-intensity, low-phase-noise LO (local oscillator) signal in addition to the RF signal for mixing. In this embodiment, in addition to the advantages of the above-described embodiments, the power of signal 3 generated by injection locking is added to the power of signal 2, thereby obtaining a high-intensity signal 3. Furthermore, by using an oscillator 104 with low phase noise, the phase noise of signal 3 generated by injection locking can also be reduced, thereby improving the quality of the output signal. Furthermore, by improving signal quality through amplification detection and coherent detection, a low-noise detection signal can be obtained even for high-speed modulated signals, thereby reducing the bit error rate (BER) in wireless communication. Furthermore, even when multiple active antennas are cascaded, each active antenna 103 performs self-oscillation, so attenuation of the synchronization signal due to coupling lines is minimal. This configuration is advantageous when the number of cascaded active antennas is increased.

[0049] Example 1 An example for carrying out the third embodiment will be described with reference to FIGS. 4 and 5. The shape, dimensions, and manufacturing method in this example are merely examples and are not intended to be limiting. The active antenna 103 in FIG. 4 is a semiconductor device capable of receiving signals in the frequency band of 0.45 to 0.5 THz, and the active antenna 103 and the oscillation unit 104 are semiconductor devices capable of single-mode oscillation in the same frequency band. The semiconductor substrate 102 is a semi-insulating InP substrate. The semiconductor layers 3002 and 3012 and the RTDs 3003 and 3013 are configured with a multiple quantum well structure made of InGaAs / AlAs lattice-matched to the semiconductor substrate 102, and in this example, an RTD with a double-barrier structure is used. This is also called an RTD semiconductor heterostructure. The current-voltage characteristics of the RTD used in this example are, for example, a peak current density of 9 mA / μm 2 and the negative differential conductance per unit area is 10 mS / μm 2The semiconductor layers 3002 and 3012 and the RTDs 3003 and 3013 are formed in a mesa structure, and are composed of a semiconductor structure including the RTD and an ohmic electrode for electrical connection to the semiconductor structure. The mesa structure is circular with a diameter of 2 μm, and the magnitude of the negative differential resistance of the RTD in this case is approximately -30 Ω per diode. In this case, the negative differential conductance (GRTD) of the negative resistance elements 300 and 301 including the RTD is estimated to be approximately 30 mS, and the diode capacitance (CRTD) is estimated to be approximately 10 fF.

[0050] The active antenna 103 has a resonance direction in the A-A' direction of the upper conductor 107, and its width is λ THz It is set to operate as a resonator with λ / 2. THz is the effective wavelength in the insulator and dielectric layer 312 of the terahertz wave that resonates in the active antenna 103. When the wavelength of the terahertz wave in a vacuum is λ0, the effective relative dielectric constant of the insulator and dielectric layer 312 is ε r Then, λ THz =λ0×ε r -1 / 2 The active antenna 103 of this embodiment is a square patch antenna in which one side of the upper conductor 107 is 150 μm, and the resonator length (L) of the antenna is 150 μm. The line length of the oscillation unit 104 is 150 μm in the A-A' direction and 150 μm in a direction perpendicular to the A-A' direction, and the second negative resistance element 301 is arranged at the intersection of the vertical and horizontal strip lines, where the input impedance to the strip lines is adjusted. In other words, the oscillation unit 104 has a microstrip line resonator formed by microstrip lines.

[0051] The upper conductor 107 and the resonator 302 are made of a metal layer (metal containing Ti / Au) mainly made of a thin Au film with low resistivity. The GND layer 309, which is a ground conductor, is made of a Ti / Au layer and a thin Au film with an electron concentration of 1×10 18 cm -3The metal and semiconductor layers are connected by low-resistance ohmic contact. The upper part of the insulator and dielectric layer 312 is made of BCB (benzocyclobutene). The lower part of the insulator and dielectric layer 312 is made of two layers of SiO2.

[0052] The RTD 3003, which is a semiconductor layer, is positioned at a position shifted 40% (60 μm) of one side of the upper conductor 107 in the resonance direction (A-A' direction) from the center of gravity of the upper conductor 107. Here, the position of the RTD within the antenna determines the input impedance when feeding high frequency power from the RTD to the patch antenna. The bias conductive layers 303 and 304 are formed of a metal layer containing Ti / Au laminated in the insulator and dielectric layer 312. The active antenna 103 and the oscillator 104 are configured to generate a frequency f by setting a bias in the negative resistance region of the RTD included in the negative resistance elements 300 and 301. THz It is designed to achieve oscillation with a power of 0.2 mW at =0.5 THz.

[0053] The frequency f of the terahertz wave oscillated from the active antenna 103 and the oscillation unit 104 THz is determined by the resonant frequency of the total parallel resonant circuit that combines the patch antenna or resonant section with the reactance of the negative resistance elements 300 and 301. Specifically, from the equivalent circuit of the oscillator described in Non-Patent Document 1, the admittance (Y RTD and Y 11 ) for a resonant circuit that combines the amplitude condition of equation (3) and the phase condition of equation (4), the frequency that satisfies the oscillation frequency f THz is determined as follows.

[0054] Re[Y RTD ]+Re[Y 11 ]≦0 (3) Im[Y RTD ]+Im[Y 11 ]=0 (4) where Y RTDis the admittance of the negative resistance elements 300 and 301, where Re is the real part and Im is the imaginary part. The first negative resistance element 300 has a negative resistance, so Re[Y RTD ] has a negative value. 11 indicates the admittance of the entire structure of the active antenna 103 and the resonating unit 302 as viewed from the negative resistance elements 300 and 301, respectively.

[0055] Among the insulator and dielectric layers 312, the areas around the GND layer 309 and the RTDs 3003 and 3013 require insulation (insulators that do not conduct electricity in direct current transmission and act as high resistance bodies), barrier properties (properties that prevent diffusion of metal materials used in electrodes), and processability (properties that require processing with submicron precision). Specific examples of materials that satisfy these requirements include silicon oxide (ε r2 =4), silicon nitride (ε r2 =7), inorganic insulating materials such as aluminum oxide and aluminum nitride are used. r2 is the relative dielectric constant of the material of the dielectric layer 312.

[0056] The width of the via 3001 is preferably set to a size that does not interfere with the resonant electric field, and is typically set to a value equal to or smaller than the standing oscillation frequency f of the active antenna 103. THz The width of the via 3001 is set to 1 / 10 or less of the effective wavelength λ of the terahertz wave. The width of the via 3001 may be small enough not to increase the series resistance, and as a guideline, it can be reduced to about twice the skin depth. To reduce the series resistance to a level not exceeding 1 Ω, the width of the antenna-element via 3001 typically has a diameter in the range of 0.1 μm to 20 μm, and in one example, it is a cylindrical structure with a diameter of 10 μm.

[0057] The power supply vias 307a and 307b are connection portions for electrically and physically connecting the first bias conductive layer 303 to the upper conductor 107. In this way, a structure that electrically connects upper and lower layers is called a via. In addition to serving as a component of the patch antenna, the upper conductor 107 also serves as an electrode for injecting current into the first negative resistance element 300 by being connected to these vias. The vias 3001, 3011, 307, 308, 305, and 306 used in this embodiment have a resistivity of 1×10 -6 Materials with a resistance of Ω·m or less can be used, such as metals and metal compounds such as Ag, Au, Cu, W, Ni, Cr, Ti, Al, AuIn alloys, and TiN.

[0058] Bias wiring 310, 311 are bias wiring for the active antenna 103 and the oscillator 104. Bias control units 105, 106 are power supplies arranged outside the semiconductor substrate 102 to supply bias signals to the negative resistance elements 300, 301 of each antenna. The bias control units 105, 106 include stabilization circuits for suppressing low-frequency parasitic oscillation. The stabilization circuits are set to have impedance lower than the absolute value of the negative resistance corresponding to the gain of the negative resistance elements 300, 301 in the frequency band from DC to 10 GHz.

[0059] The active antenna 103 and the oscillator 104 are connected to a coupled wire 108, which transmits signal 2 from the oscillator 104 to the active antenna 103 in the terahertz frequency band. The ends of the coupled wire 108 overlap the upper conductor 107 and the resonator 302 by 5 μm, sandwiching an insulator and dielectric layer 312 between them, thereby forming a capacitive structure. The coupled wire 108 is designed to be a λ / 2 line, where λ is the effective wavelength of the line at the oscillation frequency f2 of the oscillator 104. When connecting the coupled wire 108 to the active antenna 103 and the oscillator 104, the length of the coupled wire 108 is designed to satisfy the phase matching condition in either or both of the magnetic field direction (H direction) and the electric field direction (E direction).

[0060] (Production method) Next, a method for manufacturing the semiconductor substrate 102 will be described.

[0061] (1) First, an InGaAs / AlAs-based semiconductor multilayer structure constituting semiconductor layers 3002, 3003, 3012, and 3013 including an RTD is formed by epitaxial growth on a semiconductor substrate 102 made of InP.

[0062] (2) The ohmic electrode Ti / Au layers that constitute the semiconductor layers 3002 and 3012 are formed by sputtering.

[0063] (3) The RTD and semiconductor layers 3002, 3003, 3012, and 3013 are formed into a circular mesa structure with a diameter of 2 μm. Photolithography and dry etching are used to form the mesa shape.

[0064] (4) After the GND layer 309 is formed on the semiconductor substrate 102 by the lift-off method on the etched surface, a silicon oxide film is formed to form the underlying insulator and dielectric layer 312. A Ti / Au layer is formed as a conductor that forms the bias wiring 310, 311 on the insulator and dielectric layer 312.

[0065] (5) An additional insulator and dielectric layer 312, silicon oxide, is deposited.

[0066] (6) Via holes are formed by removing the insulator and dielectric layer 312 from the portions where vias 305 and 306 are to be formed by photolithography and dry etching. Furthermore, a Ti / Au layer is formed as a conductor constituting bias conductive layers 303 and 304 on the additional insulator and dielectric layer 312.

[0067] (7) Spin coating and dry etching are used to fill and planarize the upper insulating and dielectric layer 312 with BCB.

[0068] (8) The BCB and silicon oxide are removed from the portions where vias 3001 and 3011 are to be formed by photolithography and dry etching, forming via holes (contact holes).

[0069] (9) Vias 3001 and 3011 are formed in the via holes by a conductor containing Cu. The via holes are filled with Cu and planarized using sputtering, electroplating, and chemical mechanical polishing.

[0070] (10) An electrode Ti / Au layer is formed to form the upper conductor 107 and the resonator part 302. The upper conductor 107 and the resonator part 302 are patterned by photolithography and dry etching.

[0071] (11) Silicon nitride is deposited to form the top insulator and dielectric layer 312. A Ti / Au electrode layer is deposited to form the conductor layer that constitutes the bond wires 108. The bond wires 108 are patterned by photolithography and etching.

[0072] (12) Finally, a passivation layer 313 is formed as a protective layer to complete the laminated structure of the semiconductor substrate 102.

[0073] [Embodiment 4] In the fourth embodiment, an embodiment in which the oscillator 104 is used as an active antenna for transmission will be described. FIG. 10 shows a block diagram of this embodiment. FIG. 10(a) shows a case in which the active antenna 103 operates in the same way as in the first and second embodiments, and FIG. 10(b) shows a case in which the active antenna 103 operates in the same way as in the third embodiment. FIGS. 10(a) and 10(b) show receiving devices 1000a and 1000b of this embodiment, respectively. The receiving devices 1000a and 1000b are configured to receive terahertz waves 101 incident from the outside. They also have the function of radiating a signal generated within the receiving device to the outside as terahertz waves 1005. In this embodiment, the received terahertz waves 101 are signals 1 having a frequency f1, and the radiated terahertz waves 1005 are signals 1 having a frequency f 1tThe following description will be given assuming that the signal T1 has the following:

[0074] The receiving devices 1000a and 1000b each include a semiconductor substrate 102, a first bias control unit 105, a second bias control unit 106, a detection circuit 110, and a signal generating circuit 1006. The semiconductor substrate 102 is the same as in the other embodiments. The semiconductor substrate 102 includes an active antenna 103, an oscillator 104, and a coupled wire 108, as in the previously described embodiments. The oscillator 104 is composed of a negative resistance element and a resonator, but in this embodiment, the oscillator 104 has an antenna. This allows the oscillator 104 to operate as a transmitting antenna. In the following description, the oscillator 104 may be referred to as the transmitting antenna 104, and the active antenna 103 may be referred to as the receiving antenna 103.

[0075] The transmitting antenna 104 is configured to oscillate at a natural frequency f2 depending on its elements and structure. Furthermore, a first bias control unit 105 and a second bias control unit 106 are connected to the receiving antenna 103 and the transmitting antenna 104, respectively, and apply a bias voltage to each negative resistance element. The bias path from the first bias control unit 105 to apply a bias voltage to the negative resistance element of the receiving antenna 103 is referred to as the first bias path, and the bias path from the second bias control unit 106 to apply a bias voltage to the negative resistance element of the transmitting antenna 104 is referred to as the second bias path. A detection circuit 110 is connected to the first bias path, and a signal generation circuit 1006 is connected to the second bias path.

[0076] The bias control unit applies power input from outside the receiving devices 1000a and 1000b as a bias voltage to the respective negative resistance elements. Furthermore, the first and second bias paths may include a filter circuit using a shunt resistor or capacitor, and a switch for turning the power on and off, in order to prevent parasitic oscillation in each resonant structure.

[0077] Each bias control unit is continuously or intermittently controlled to a predetermined bias voltage. In the case of FIG. 10(a), the first bias control unit applies a voltage that generates positive resistance to the negative resistance element of the receiving antenna 103, and in the case of FIG. 10(b), it applies a voltage that generates negative resistance. The coupling wire 108 is a signal line that electrically connects the receiving antenna 103 and the transmitting antenna 104, and is formed as a pattern on the semiconductor substrate 102. The second bias control unit 106 applies a bias voltage that generates negative resistance to the negative resistance element in order to oscillate the transmitting antenna 104.

[0078] FIG. 10 illustrates the oscillation caused by the negative resistance element of the transmitting antenna 104 from a functional perspective as oscillator 1004. Signal 2 generated by oscillator 1004 is transmitted to the receiving antenna 103 via coupled wire 108. The receiving antenna 103 is excited by signal 2, generating signal 3 of frequency f3 within the receiving antenna 103. The operation of exciters 109 and 113 differs between FIGS. 10(a) and 10(b). In FIG. 10(a), exciter 109 excites the receiving active antenna with signal 2, generating signal 3 such that f2 = f3. In FIG. 10(b), exciter 113 is applied a bias voltage by first bias controller 105 that generates negative resistance in the negative resistance element of the receiving antenna 103. Therefore, the negative resistance element in the receiving active antenna and the resonant structure within the receiving antenna 103 function as an oscillator, exciting a natural frequency (self-oscillation). In addition, injection locking is performed by inputting signal 2 via coupled wire 108, thereby generating signal 3 where f2=f3.

[0079] The receiving antenna 103 of the receiving device 1000b in FIG. 10(b) can amplify a signal propagating to the receiving antenna 103 by oscillating the negative resistance element and the resonant structure of the active antenna 103. Therefore, the receiving antenna 103 can operate as a receiving device equipped with an amplifier 112, synchronous oscillation, and a mixer 111. Furthermore, the signal generating circuit 1006 generates a baseband signal, which is a signal component to be superimposed on the transmitted terahertz wave 1005 together with a carrier wave. The signal generating circuit 1006 supplies the baseband signal to the transmitting antenna 104 via a second bias path. The connection between the signal generating circuit 1006 and the second bias path is made using a circuit such as a bias T. Furthermore, a circuit configuration using capacitive coupling or the like may be used to combine the AC component of the baseband signal with the DC component of the bias voltage.

[0080] Because the negative resistance element in the transmitting antenna 104 has nonlinearity, it operates as a mixer that mixes the self-oscillating signal 2 with the baseband signal, up-converting the baseband signal. In Figures 10(a) and 10(b), it is illustrated functionally as a transmitting mixer 1003. Specifically, the self-oscillating signal 2, f2, is used as a carrier wave and the baseband signal is superimposed as a modulating wave to generate a modulated signal in the terahertz band, signal 1T. Signal 1T is radiated into space because impedance matching is achieved between the transmitting antenna 104 and external space. This allows it to function as the transmitting antenna 104.

[0081] Furthermore, signal 2 or signal 1T generated in transmitting antenna 104 propagates to receiving antenna 103 via coupled wire 108. At this time, electromagnetic waves having multiple frequency components generated in the resonant structure of transmitting antenna 104 propagate to receiving antenna 103 via coupled wire 108. In this embodiment, since transmitting antenna 104 also receives a transmission signal input from signal generating circuit 1006, electromagnetic waves propagating through space and coupled wire 108 may affect the receiving active antenna on receiving antenna 103. In this case, electromagnetic waves corresponding to the baseband signal included in received signal 1 and those corresponding to the baseband signal included in signal 1T to be transmitted may be mixed together (crosstalk may occur). This may interfere with the detection of signal 1 by detection circuit 110. However, by designing the electrical length of coupled wire 108 and the line impedance based on the reference frequency of signal 2, the influence of unwanted signals propagating through coupled wire 108 can be reduced.

[0082] Another method is to set the phase of the synchronization signal input to the receiving antenna 103 via the coupled wire 108 to be switchable between 0° and 90°. Methods for changing the phase include changing the impedance or propagation distance of the coupled wire 108. The absolute value of the received wave can be detected using a swell signal extracted from the detection signal acquired at different switched phases, thereby obtaining accurate strength of the received wave. Alternatively, signal processing can be performed in the receiving antenna 103 or the detection circuit 110 to cancel the signal component generated by the signal generation circuit 1006. Furthermore, a stub or capacitive coupling element can be placed on the coupled wire 108 to function as a filter circuit acting on the target frequency component. In space, polarization conversion of the transmitted and received signals can be performed by using a quarter-wave plate or the like in the propagation path of the terahertz wave in space, and separation of the transmitted and received signals in space can be achieved by changing the polarization direction. Note that one of the embodiments comprising an oscillator using a negative resistance element and a connection configuration of an active receiving antenna can be applied, and the configuration for reducing transmit and receive crosstalk is not limited to this. In the present invention, the coupling wire 108 may be connected to any of the resonant structures of the transmitting active antenna, but in this embodiment, an example is described in which it is connected to the transmitting antenna 104, and the connection position is not limited to this embodiment.

[0083] On the other hand, a detection circuit 110 for detecting a received signal is branched and connected to the first bias path on the receiving antenna 103 side. This operates in the same manner as in the above-described embodiment.

[0084] FIG. 11 is a schematic top view of the transceiver devices 1000a and 1000b according to this embodiment. Also, FIGS. 12(a) to 12(c) are schematic cross-sectional views taken along lines A-A', B-B', and C-C' in FIG. 11, respectively. The structure on the left side of FIG. 11 is the transmitting antenna 104, and the structure on the right side is the receiving antenna 103. The same parts as those in FIG. 4 will be omitted for the following description. The square in the center of the transmitting antenna 104 is the upper conductor 1001, which functions as the resonator 302 in FIG. 4. The upper conductor 1001 has power feed vias 308a and 308b arranged therein, similar to the upper conductor 107 for reception. The rest of the configuration differs only in shape, and the description is the same as in FIGS. 4 and 5. In this embodiment, the transmitting antenna 104 and the receiving antenna 103 are arranged adjacent to each other. However, they may be arranged separately within the semiconductor substrate 102 to avoid the influence of electromagnetic waves due to transmission output and reception. In order to transmit the frequency component f2 of signal 2 on the semiconductor substrate with less attenuation, coupled wire 108 is wired with a length of N×(λ / 2) (N is an integer), where λ is the wavelength of signal 2 traveling through coupled wire 108.

[0085] Using this embodiment, an application can be configured in which terahertz waves 1005 transmitted from transmitting antenna 104 hit an object (subject) present in the direction of radiation of the electromagnetic waves, and the reflected and returned electromagnetic waves are received by receiving antenna 103 as terahertz waves 101. In this case, the radiated electromagnetic waves are based on signal 2, and the synchronization signal of receiving antenna 103 is also signal 2, so it is possible to configure a homodyne receiving device. Using the above-mentioned application, a radar device can be configured as an example of a device using a transmitting and receiving device.

[0086] In addition, it is possible to construct a communication system in which a similar antenna device is placed on the opposite side of the terahertz waves 101 and 1005 to be transmitted and received, and the transmitted and received signals are exchanged between the two antenna devices. In this case, if the oscillation frequencies of the elements on the opposite side are the same, the device can be constructed as a homodyne-type receiving device, and if the oscillation frequencies are different, the device can be constructed as a heterodyne-type receiving device. In the latter case, the difference between the internal oscillation frequency (frequency f2 of signal 2) and the frequency (f1) of the received electromagnetic wave will be the same in both the transmitting and receiving device itself and the transmitting and receiving device on the opposite side. Therefore, a similar configuration can be used for the detection circuit. With this configuration, a full-duplex communication device can be realized.

[0087] As described above, this embodiment has the advantage that the transmitting and receiving antennas can be fabricated on the same substrate, and the oscillation frequencies of both active antennas can be synchronized. By calculating changes in the frequency and phase of the transmitted and received signals through signal processing, signal correction and analysis can be performed efficiently, and the present invention can be used in high-performance radar devices and communication devices.

[0088] [Embodiment 5] A fifth embodiment, which is a modification of the fourth embodiment, will now be described. FIG. 13 is a diagram illustrating the configuration of this embodiment. The configurations of the transmitting antenna 104 and the receiving antenna 103 in the center and right of FIG. 13 are similar to those of the transmitting antenna 104 and the receiving antenna 103 in the fourth embodiment described with reference to FIG. 11, and therefore will not be described again. In the example of FIG. 13, an injection-locked oscillator 1200 is connected to the transmitting antenna 104. The injection-locked oscillator 1200 is an oscillator having a third negative resistance element 1201 and a resonator 1202. The third bias conductive layer 1203 is connected to the third negative resistance element 1204 via a via 1204 connected to the resonator 1202, and power input from an external bias control unit is input from a third bias via 1205 through a third bias wiring 1206. This applies a bias voltage to the third negative resistance element 1201.

[0089] These have the same structure as the oscillator 104 described above in connection with FIG. 4 , and therefore detailed description of the structure will be omitted. The signal generated by the injection-locked oscillator 1200 is transmitted through the coupled transmission line 1207 and input to the transmitting antenna 104, thereby performing injection locking of the transmitting antenna 104. In this embodiment, the transmitting antenna 104 and the receiving antenna 103 are coupled by the coupled line 108, but crosstalk between the transmitting signal of the transmitting antenna 104 and the receiving signal of the receiving antenna 103 can increase noise. To address this issue and ensure isolation between the transmitting and receiving signals, a configuration may be adopted in which the injection-locked oscillator 1200 is disposed in the center, and coupled lines are connected to the transmitting antenna 104 and the receiving antenna 103, which are disposed on either side of the injection-locked oscillator 1200. In other words, the arrangement of the injection-locked oscillator 1200 and the active antennas 103, 104 is not limited to the configuration shown in FIG. 13 .

[0090] According to this embodiment, even if the oscillation accuracy of the transmitting antenna 104 is poor and the phase noise is large, it is possible to improve the oscillation accuracy by using an injection locked signal from an oscillator with higher accuracy. Furthermore, in this embodiment, the injection locked oscillator 1200 has been described using an oscillator with a negative resistance element arranged on the same substrate, but injection locking may be performed based on a signal input from outside the semiconductor, and the configuration of the injection locked oscillator 1200 is not limited to the configuration shown in FIG.

[0091] [Embodiment 6] Next, as a sixth embodiment, the configuration of a receiving device having a receiving active antenna array in which multiple receiving antennas 103 are arranged will be described. FIG. 14 is a schematic top view of the receiving device. An active antenna array 1300 is arranged in the center, with M×N (M=3, N=3) receiving antennas 103. An oscillator array 1301 with multiple oscillators 104 is arranged on the upper side, and is connected to some of the receiving antennas 103 in the receiving active antenna array by coupling wires 108. An oscillator array 1302 with multiple oscillators 104 is also arranged on the lower side of the array, and is also connected to some of the receiving antennas 103 in the active antenna array 1300 by coupling wires 108. Resonators 1303a, 1303b, 1303c, 1303d, 1303e, and 1303f in the upper and lower oscillator arrays have different shapes, but each resonates with a negative resistance element and an oscillator to generate signal 2. The resonators are coupled to each other, allowing their oscillation frequencies to be synchronized.

[0092] By making the bias conductive layer 1304 of the oscillator array a common region for each oscillator structure, the influence of inductance during synchronous coupling between the oscillators can be reduced. Alternatively, the bias conductive layer 1304 may be provided separately for each oscillator. Each active receiving antenna in the active antenna array 1300 receives a signal from the oscillator array and is excited to oscillate synchronously. Even for active receiving antennas that are not connected to the oscillator array by coupling wires 108, the oscillation frequencies between the antennas can be synchronized by electrically coupling the active receiving antennas with each other via coupling wires. Thus, each antenna functions as a receiver as shown in the above-described embodiment. M and N of the active antenna array may be integers greater than or equal to 1.

[0093] As described in this embodiment, arranging receiving antennas to form an active antenna array makes it possible to apply the present invention to an imaging device. In the imaging device, each antenna serves as a pixel to receive terahertz waves 101, and the detected signals are subjected to image processing to perform analysis and display. In the active antenna array of the present invention, all pixels can receive terahertz waves synchronously, so information regarding the phase of the received terahertz waves can also be obtained, making it possible not only to image the incident terahertz waves but also to identify materials and determine distances.

[0094] [Embodiment 7] In the seventh embodiment, as shown in FIG. 15 , some of the active antennas in a 3×3 active antenna array 1300 may be configured as receiving antennas 103, and some of the active antennas may be configured as transmitting antennas 104. In this embodiment, the central element of the 3×3 active antenna array 1300 is configured as a transmitting antenna 104, and the remaining eight elements are configured as receiving antennas 103. The receiving antennas 103 arranged above and below the central row are synchronized by being connected to the central transmitting antenna 104 by coupling lines. Furthermore, the other receiving antennas 103 are connected to the synchronized receiving antennas 103 by coupling lines, and receive signals in synchronization. The arrangement of the elements of the transmitting antenna 104 and receiving antenna 103 is not limited to this. Alternatively, as shown in FIG. 16 , a configuration is possible in which the oscillator array shown in FIG. 14 is a transmitting active antenna array 1400, and the central 3×3 elements are a receiving active antenna array 1401. In this case, the active antenna array 1300 is 3×5. The synchronization signal from the transmitting active antenna array 1400 enables the receiving active antenna array 1401 to receive in synchronization.

[0095] This embodiment can be applied to a MIMO (Multiple-Input Multiple-Output) antenna equipped with multiple active transmitting antennas and active receiving antennas. A MIMO antenna can transmit data simultaneously using multiple antennas, which can contribute to faster wireless communication and more stable radio waves.

[0096] [Embodiment 8] 17, two receiving antennas, first and second, 1600 and 1601 may be connected to the oscillator 104 by first and second coupled wires 1602 and 1603. In this case, the impedances of the first and second coupled wires 1602 and 1603 are made different to change the electrical length of the signal transmitted through the line. The second coupled wire 1603 has a line different from the first coupled wire 1602, and functions as a phase converter 1604 that converts the phase. This makes it possible to change the phase of the synchronization signal synchronized with the first receiving antenna 1600 and the second receiving antenna 1601.

[0097] 18 shows a receiving device in which a quadrature mixer is configured using multiple receiving antennas according to embodiment 8. A first receiving antenna 1600 and a second receiving antenna 1601 are arranged on a semiconductor substrate 102, and first and second coupling lines 1602 and 1603 are coupled so that an oscillator 104 and a received terahertz wave 101 are common. Alternatively, a configuration may be adopted in which multiple oscillators 104 are arranged on the semiconductor substrate 102, and common frequencies and phases are generated by synchronizing each oscillator, and synchronization is established between the separate oscillators and the first and second receiving antennas 1600 and 1601 via coupling lines.

[0098] Both receiving antennas are connected via coupling wires 1602 and 1603 to receive signals from the oscillator 104, but oscillation signals of different phases are input to the receiving antenna 1600 and the second receiving antenna 1601 by the phase converter 1604. The phase converter 1604 differs the impedance of the wiring between the first coupling wire 1602 and the second coupling wire 1603, and is configured to shift the phase of the synchronization signal by π / 4 (45°). This allows the first receiving antenna 1600 and the second receiving antenna 1601 to function as quadrature mixer devices with the same frequency but a π / 4 phase shift. By matching the frequency f2 of the oscillator 104 to the frequency f1 of the terahertz wave 101 to be received, a direct conversion receiving device using a homodyne detector can be realized.

[0099] Although this embodiment uses two receiving antennas, more active receiving antennas may be used. In this case, the phase converters of the coupled wires may be the same or different. Although only a π / 4 conversion is described for the phase converter, π / 2 or other phases may also be used. Furthermore, phase converters may be provided on both the first and second coupled wires 1602 and 1603. While the frequencies (f1 and f2) of signal 1 of the received terahertz wave 101 and signal 2 of the oscillator 104 are the same, they may be different. Even when f1 and f2 are different, the receiving device of this embodiment can be used as an image rejection mixer for a heterodyne detector. Although the first detection circuit (detection circuit 1) 1605 and the second detection circuit (detection circuit 2) 1606 are shown separately, they may be a common detection circuit that inputs multiple detection signals. This embodiment also includes other configurations in which the phases of the oscillation signals are shifted by coupled wires for multiple receiving antennas to synchronize reception.

[0100] The detection signals output from the two receiving antennas are extracted as an I signal and the other as a Q signal, thereby functioning as a quadrature mixer. The quadrature mixer combines and demodulates the I and Q signals in the first detection circuit 1605 and second detection circuit 1606 connected thereto, thereby calculating the amplitude and phase of the received signal. This makes it possible to support modulation methods such as amplitude modulation, phase modulation, frequency modulation, and modulated signals (QAM) that combine these. In addition, the image rejection mixer uses signal processing to remove unwanted image frequency components that are generated when converting a received signal to a lower frequency, and this can be achieved by extracting the I and Q signals separately. In either case, the receiving device of this embodiment can be used to help improve the detection accuracy and signal quality of the receiving device.

[0101] [Embodiment 9] In the ninth embodiment, a method for laminating a semiconductor substrate on which an active antenna array according to this embodiment is arranged and an integrated circuit substrate such as a CMOS, using semiconductor lamination technology, will be described with reference to FIG. 19. FIG. 19 is a schematic top view of an antenna device according to this embodiment. This is a schematic top view of an array of transmitting antennas 104 and receiving antennas 103 according to the sixth embodiment, with some shapes modified for semiconductor lamination. FIGS. 20(a), 20(b), and 20(c) are schematic cross-sectional views taken along the A-A' plane, the B-B' plane, and the C-C' plane of FIG. 19, respectively. As with FIG. 15, the active antenna array 1300 has only one central element which is a transmitting antenna 104, and the surrounding elements are receiving antennas 103.

[0102] The receiving antenna 103 is a patch antenna having a structure in which a first negative resistance element 300 and an insulating layer and a dielectric layer 312 are sandwiched between an upper conductor 107, which is an upper conductor for the receiving antenna, and a GND layer 309, which is a conductor layer that is a reflector. The upper terminal of the first negative resistance element 300 is electrically connected to the upper conductor 107, and the RTD 3003 is electrically connected to the antenna-element via 3001. The lower terminal of the RTD 300 is electrically connected to the GND layer 309. The upper conductor 107 is f THz The first negative resistance element 300 is connected to a first bias conductive layer 303 for individual bias via a power feed via 307 at a node of the resonant electric field at the first negative resistance element 300. This structure allows bias to be applied above and below the first negative resistance element 300. The first bias conductive layer 303 is connected to an MIM capacitor 320 via an MIM capacitor connection 321. The MIM capacitor connection 321 includes a resistive layer made of TiW and serves as an AC short connected in series with the MIM capacitor structure. Here, an MIM (Metal Insulator Metal) capacitor is a capacitance element in which two metals are sandwiched between insulating layers. When a bias voltage that generates negative resistance is applied to the negative resistance element, it undergoes self-oscillation, and the MIM capacitor prevents output reduction and oscillation instability due to parasitic oscillation. The transmitting antenna 104 has a configuration similar to the receiving active antenna, except for an upper conductor 1001, which is the upper conductor for the transmitting antenna. These antennas are connected and synchronized by multiple coupling wires 1808a to 1808r.

[0103] FIG. 20(a) shows the cross-sectional structure of each active antenna 103, 104. The structure of the antenna portion is the same as that in FIG. 5(a), so a description thereof will be omitted. A bonding portion 1900 is provided on the back surface of the semiconductor substrate 102, and bonds the top surface of the bonding portion 1900 side of the compound semiconductor substrate, which is the base material of the semiconductor substrate 102, to the top surface of the bonding portion 1900 side of the integrated circuit substrate 1903 on which an integrated circuit is formed. An integrated circuit region 1912 is formed in the integrated circuit substrate 1903, and the integrated circuit region 1912 includes a second semiconductor substrate 1901, which is the base material, and a driving circuit formed in an integrated circuit insulating layer 1902. The bonding portion 1900 is a bonding interface formed by directly bonding a conductor layer formed on the back surface of the semiconductor substrate 102 to the metal of the conductor layer exposed on the top surface of the integrated circuit substrate 1903. Here, bonding forms include metal bonding such as CuCu bonding, SIO bonding, and the like. x / SiO x Insulator bonding such as bonding, adhesive bonding using an adhesive such as BCB, and hybrid bonding, which is a combination of these, can be used. Furthermore, bonding processes include low-temperature bonding using plasma activation and conventional thermocompression bonding. Also, bonding of semiconductor wafers of the same size and bonding of semiconductor wafers of different sizes can be used. A method of bonding multiple semiconductor chips spaced apart on a wafer (tiling) can also be used. Although the drive circuit integrated in the integrated circuit region 1912 is described as an example of this embodiment, the connection and structure are not limited to this.

[0104] 20(a), GND layer 309 of semiconductor substrate 102 is electrically connected to GND layer 1908 of integrated circuit substrate 1903. The semiconductor substrate 102 side has GND via 1904 extending from GND layer 309 toward joint 1900 and GND terminal 1905 formed on the joint surface. In contrast, GND layer 1908 of integrated circuit substrate 1903 has GND via 1907 extending to joint 1900 and GND terminal 1906 formed on the joint surface. Both GND terminals 1905, 1906 are electrically coupled at the joint and share the GND potential.

[0105] In FIG. 20(c), an MIM capacitor 320 is provided in the bias path of the semiconductor substrate 102. The MIM capacitor 320 has a capacitance structure formed by a conductor layer 325 connected to the tip of an MIM capacitor connection portion 321 extending from bias conductive layers 303 and 304, which are connected to the upper conductor 107 of the receiving antenna 103 and the upper conductor 1001 of the transmitting antenna 104 via power supply vias 307 and 308, and a conductor layer, GND layer 309. However, this is not limiting and any MIS structure may be used as long as it forms capacitance. Furthermore, the GND layer 1908 of the integrated circuit substrate 1903 may be common to the GND layer and GND potential of the integrated circuit region 1912 of the integrated circuit substrate 1903, or there may be multiple GND layers. Furthermore, the GND layer 309 and the GND layer 1908 may be solid patterns, and, for example, dummy terminals 1909 and 1913 not connected to signal lines may be provided in the joint 1900 to increase bonding strength. By distributing the dummy terminals 1909 and 1913 in a wide solid pattern in an area where electrodes for wiring are not required, the bonding strength is increased, contributing to improved yield and reliability. In addition, such a solid GND configuration can reduce the influence of electromagnetic noise caused by the integrated circuits on the integrated circuit substrate 1903 on the active antennas 103 and 104 on the semiconductor substrate 102.

[0106] The bias control will now be described. The semiconductor substrate 102 side is connected in this order by a first bias via 305, a wiring layer provided in an opening of the GND layer 309, and a through via formed in the semiconductor substrate 102, and is then connected to a conductor 1910 that forms an electrode serving as a bias terminal formed on the bonding surface of the bonding portion 1900. Similarly, the integrated circuit substrate 1903 side is electrically connected from a bias terminal 1911 formed on the bonding surface of the bonding portion 1900 to a MOS-FET 1322, a transistor formed in the integrated circuit region 1912. The MOS-FET 1322 constitutes a grounded-gate amplifier circuit as a first-stage amplifier. The amplified signal is further amplified by a grounded-source amplifier circuit including a MOS-FET 2324. The grounded-gate amplifier circuit and the grounded-source amplifier circuit are coupled by an MIM capacitor 323 for AC coupling. The MIM capacitor 323 is an example, and a configuration using a gate insulating film capacitance of a FET may also be used. The MOS-FET 1322 also serves as a bias control section, and is connected to the semiconductor substrate through the MOS-FET 1322 to apply a bias voltage to the negative resistance elements 300 and 301. Alternatively, a terminal for applying a bias voltage may be provided on the integrated circuit substrate 1903, and a voltage may be supplied from outside.

[0107] By bonding the semiconductor substrate 102 and the integrated circuit substrate 1903 using semiconductor bonding technology as in this embodiment, it is no longer necessary to arrange the control circuit around the active antenna on the same plane as the semiconductor substrate 102. This reduces the space required to arrange the control circuit on the same plane as the antenna, preventing degradation of antenna characteristics due to coupling between the control circuit and the antenna. When individually controlling bias control or other parameters for each antenna, it is necessary to individually prepare each bias terminal. However, in this embodiment, this can be easily connected to the integrated circuit substrate 1903 using through-hole vias. Even when using an active antenna array as in the above-mentioned embodiment, the control circuit can be arranged on the back side of the semiconductor substrate 102, allowing for an increase in the number of antenna arrays without being affected by layout constraints, etc. Because the integrated circuit substrate 1903 is fabricated using conventional CMOS technology, complex circuits can be configured in the detection circuit and signal processing circuit, further expanding the applications of the terahertz wave receiving device according to this embodiment.

[0108] [Embodiment 10] In this embodiment, a case where the antenna device of any of the above-described embodiments is applied to a terahertz camera system (imaging system) will be described with reference to Fig. 21. A plurality of pixel active antennas 2000, each having an antenna 2001, an amplifier 2002, a first mixer 2003, and a local oscillator 2004 similar to those of the present invention, are arranged in an array on a semiconductor substrate. The detection signal output is demodulated inside or outside the pixel and converted to a digital value by an ADC in a signal conversion processing unit 2005, and the values ​​of the plurality of pixels are transferred to a calculation device such as an image processing device 2006 for image processing. This allows the system to be used as an imaging device that displays or analyzes signals received by each pixel of the antenna array as an image.

[0109] Next, an embodiment of an active imaging device that irradiates terahertz waves and receives reflected or transmitted terahertz light will be described. FIG. 22 shows a specific example of the pixel active antenna 2000 and signal conversion processing unit 2005 shown in FIG. 21. A pixel 2100 in FIG. 22 represents one of a plurality of pixels arranged in a two-dimensional array of M×N (M and N are integers). The pixel 2100 includes a receiving antenna 103 formed on a semiconductor substrate 102. The receiving antenna 103 includes an upper conductor 107 and a first negative resistance element 300. The resonant frequency of the upper conductor 107 is adjusted to be the same frequency as the terahertz wave 101 generated from the transmitting unit 2101. The first negative resistance element 300 is, for example, a resonant tunneling diode (RTD). The receiving antenna 103 is electrically connected to an oscillator 104 via a coupling wire. The receiving antenna 103 and the oscillator 104 are formed on a semiconductor substrate 102, and the other elements of the pixel 2100 are formed on an integrated circuit substrate 1903. In addition to the pixel 2100, the integrated circuit substrate 1903 also includes a selection switch 2102, a readout line 2103, a vertical scanning circuit necessary for pixel drive, signal wiring, etc. The circuit of the integrated circuit substrate 1903 is formed on a silicon substrate using a standard CMOS process.

[0110] The signal from the receiving antenna 103 is amplified by a grounded-gate amplifier circuit consisting of a current source 2104, a reset switch 2105, a bias capacitor 2106, and an NMOS transistor 2107, which also supplies a bias voltage to the receiving active antenna. The amplified signal is further amplified by a grounded-source amplifier circuit consisting of a current source 2108, a reset switch 2109, and an NMOS transistor 2110. The grounded-gate amplifier circuit and the grounded-source amplifier circuit are coupled by an AC coupling capacitor 2111. The reset operation by the reset switches 2105 and 2109 is performed once per frame or once per row readout period, thereby determining the operating points of the NMOS transistors 2107 and 2110. The output signal from the receiving antenna 103 is small, approximately several hundred μV, and has a voltage corresponding to the magnitude of the terahertz wave input. The output signal from the receiving antenna 103 is amplified by a gain of approximately several thousand times by the grounded-gate amplifier circuit and the grounded-source amplifier circuit, and is output as the output signal from the detector 2112. The output signal of detector 2112 is accumulated by first accumulation capacitor Cs 2120. Switch 2113 and capacitor 2114 form a high frequency cut filter, and function to remove electrical noise from the signal from detector 2112. Switch 2113 is a filter function selection switch.

[0111] Based on a signal received from a signal generator 2116, the non-overlap circuit 2115 supplies control signals to the switches SWs2117 and SWi2118 to prevent the switches SWs2117 and SWi2118 from being turned on simultaneously. This prevents charge leakage from the second storage capacitor Ci2119. The control signal frequency of SWs2117 and SWi2118 is several MHz. The receiving antenna 103 may generate low-frequency noise such as 1 / f noise. The frequency at which low-frequency noise is buried in white noise is called the noise corner frequency, and if the control signal can be operated at a frequency above the noise corner frequency, low-frequency noise can be effectively reduced.

[0112] Next, the accumulation operation according to this embodiment will be described. The output of the receiving antenna 103 when the transmitting unit 2101 is irradiating is amplified by the amplifier circuit at the next stage and input to the first accumulation capacitor Cs2120 as an irradiation potential (second potential). Next, the output of the receiving antenna 103 when the transmitting unit 2101 is not irradiating is amplified by the amplifier circuit at the next stage and input to the first accumulation capacitor Cs2120 as a non-irradiation potential (first potential). When SWs2117 and SWi2118 are controlled by the output pulse of the non-overlap circuit 2115, a signal proportional to the difference between the irradiation potential and the non-irradiation potential is accumulated in the second accumulation capacitor Ci2119 in one accumulation operation. This operation acts as a subtraction operation (irradiation potential - non-irradiation potential) during the period in which SWs2117 and SWi2118 are controlled. The control cycle of SWs 2117 and SWi 2118 is faster than the cycle of low-frequency noise, so they can function as a filter that cuts out low-frequency noise such as 1 / f noise that occurs in the output signal of detector 2112 .

[0113] The signal generator 2116 is provided outside the receiving device. The signal generator 2116 outputs to the non-overlap circuit 2115 a signal that serves as the source of the signals controlling the switches SWs 2117 and SWi 2118. The signal generator 2116 also outputs to the transmitting unit 2101 a light source on / off control signal having the same frequency as the signal output to the non-overlap circuit 2115. The transmitting unit 2101 irradiates the subject with terahertz waves 101 by repeatedly turning them on and off at the same cycle as the control signal from the signal generator 2116. A transmitting active antenna is used to generate terahertz waves. The circuit configuration and terahertz wave source of the detector 2112 are not limited to this, and any known terahertz wave generating source can be used. The charge accumulated in the second storage capacitor Ci 2119 is read out as a voltage to the readout line 2103 via the selection switch 2102. The readout signal is digitized by a signal processing circuit 2122 outside the circuit board. The digitized signals are processed by an external image processing device.

[0114] By including the pixel 2100 of this embodiment, the terahertz wave receiving device of the present invention can be incorporated into an imaging device and can be used as an active imaging device. Furthermore, the receiving antenna 103 operating as a pixel active antenna according to this embodiment can amplify the signal of the received terahertz wave 101 by self-oscillation (self-excitation). In such a case, the active imaging device can detect even weaker signals, improving detection accuracy and reducing noise. Note that, although the tenth embodiment has been described as applying the antenna device of this embodiment to the pixel 2100, which is the receiving unit, the transmitting active antenna according to this embodiment may also be applied to the transmitting unit 2101.

[0115] [Other embodiments] Although the embodiments of the present invention have been described above, the present invention is not limited to these embodiments, and various modifications and changes are possible within the scope of the gist of the present invention.

[0116] As another embodiment, a form in which any of the above-described embodiments is applied to a communication system will be described. FIG. 23 is a block diagram of a receiving device of a communication system according to another embodiment. A signal received from an antenna 2200 is amplified by an amplifier 2201. The receiving device uses a low-noise amplifier (LNA), which is particularly low in noise. The amplified signal is then frequency-converted by a frequency converter 2202. At this time, a local oscillation signal from a local oscillator 2204 is input to remove the carrier component from the received signal. After the frequency converter 2202, a demodulator 2203 demodulates the signal modulated during transmission. This signal is used as a communication signal. In this embodiment, the antenna 2200, amplifier 2201, frequency converter 2202, and local oscillator 2204 are integrated on a semiconductor substrate, and a demodulator 2203 is used on the detection circuit side, making it possible to apply the device as a receiving device for communication signals.

[0117] Furthermore, we will explain two methods used in communication: the superheterodyne method and the direct conversion method.

[0118] FIG. 24(a) shows a block diagram of the superheterodyne system. In the superheterodyne system, as shown in FIG. 24(a), the received signal is frequency converted to an IF signal using a first mixer 2205 and a local oscillator 2206. Then, in the frequency band of the IF signal, a filter 2207 is used, and a second mixer 2208 and local oscillator 2209, which perform further frequency conversion, are used to separate the detection signal and remove noise. After that, the detection signal is digitally converted by an analog-to-digital converter (ADC) 2210, and then demodulated by a demodulator 2203. In the receiving device according to this embodiment, components up to the first mixer 2205 are fabricated on a semiconductor substrate, and subsequent signal processing is performed in a detection circuit outside the semiconductor substrate. Because there is no need to handle high frequencies such as the terahertz band from the output of the first mixer 2205, it is possible to reuse the configuration of a conventional detector.

[0119] Also, Figure 24(b) shows a block diagram of the direct conversion method. In this case, the signal is down-converted to a directly modulated component by a local oscillator 2206 having the same frequency as the carrier wave received by the first mixer 2205. Here too, the components up to the first mixer 2205 are fabricated on a semiconductor substrate, and the subsequent demodulator 2203 is realized by a detection circuit outside the semiconductor substrate. After that, signal processing is performed on the communication signal, enabling it to function as a communication device.

[0120] In the above-described embodiment, the carriers are assumed to be electrons, but the present invention is not limited to this and may be implemented using holes. Materials for the substrate and dielectric may be selected according to the intended use, and include semiconductor layers such as silicon, gallium arsenide, indium arsenide, and gallium phosphide, and resins such as glass, ceramic, polytetrafluoroethylene, and polyethylene terephthalate.

[0121] Furthermore, although the above-described embodiment uses a square patch antenna as a terahertz wave resonator, the shape of the resonator is not limited to this. For example, a resonator having a structure using a patch conductor of a polygonal shape such as a rectangle or a triangle, a circle, an ellipse, or the like may be used.

[0122] Furthermore, the number of negative differential resistance elements integrated in the element is not limited to one, and a resonator including multiple negative differential resistance elements may be used. The number of lines is also not limited to one, and a configuration having multiple lines may be used. By using the antenna device described in the above-mentioned embodiments, it is possible to oscillate and detect terahertz waves.

[0123] In addition, in each of the above-described embodiments, a double-barrier RTD made of InGaAs / AlAs grown on an InP substrate has been described as the RTD. However, the present invention is not limited to these structures and material systems, and other structures and material combinations can also be used to provide the device of the present invention. For example, an RTD with a triple-barrier quantum well structure or an RTD with four or more multi-barrier quantum wells may also be used.

[0124] Furthermore, the following combinations may be used as materials for the RTD. GaAs / AlGaAs, GaAs / AlAs, InGaAs / GaAs / AlAs formed on GaAs substrate InGaAs / InAlAs, InGaAs / AlAs, InGaAs / AlGaAsSb formed on InP substrate InAs / AlAsSb and InAs / AlSb grown on InAs substrates ·SiGe / SiGe formed on a Si substrate The above-mentioned structure and materials can be appropriately selected depending on the desired frequency and the like.

[0125] [Summary of the embodiment] At least some of the above-described embodiments can be summarized as follows.

[0126] (Item 1) On a semiconductor substrate, a first active antenna having a first antenna for transmitting or receiving a first electromagnetic wave of a first frequency and a first negative resistance element; an oscillation unit having a second negative resistance element and a resonance unit that oscillates at a second frequency to generate a second electromagnetic wave; a coupling wire electrically connecting the first active antenna and the oscillation unit; a first wiring electrically connected to the first negative resistance element and receiving a first bias signal to be supplied to the first negative resistance element; a second wiring electrically connected to the second negative resistance element and receiving a second bias signal to be supplied to the second negative resistance element; An antenna device comprising:

[0127] (Item 2) the first active antenna receives the first electromagnetic wave; 2. The antenna device according to item 1, wherein a detection circuit that detects that the first active antenna receives the first electromagnetic wave is electrically connected to the first wiring.

[0128] (Item 3) 3. The antenna device according to item 2, wherein the detection circuit is capacitively coupled to the first wiring through a first capacitance.

[0129] (Item 4) 4. The antenna device according to item 3, wherein the coupling line is capacitively coupled to the first active antenna through a second capacitance.

[0130] (Item 5) 5. The antenna device according to item 4, wherein the first capacitance is larger than the second capacitance.

[0131] (Item 6) 6. The antenna device according to any one of items 1 to 5, wherein the first negative resistance element and the second negative resistance element are resonant tunneling diodes.

[0132] (Item 7) 7. The antenna device according to any one of items 1 to 6, wherein the second bias signal has a bias voltage that generates a negative resistance in the second negative resistance element.

[0133] (Item 8) 8. The antenna device according to any one of items 1 to 7, wherein the first bias signal has a bias voltage that generates a positive resistance in the first negative resistance element.

[0134] (Item 9) 9. The antenna device according to any one of items 1 to 8, wherein the first bias signal has a bias voltage that generates a negative resistance in the first negative resistance element.

[0135] (Item 10) 10. The antenna device according to item 9, wherein the first active antenna oscillates at the second frequency of the second electromagnetic wave injected via the coupling line.

[0136] (Item 11) 10. The antenna device according to item 9, wherein the first negative resistance element amplifies a signal propagating to the first active antenna.

[0137] (Item 12) 12. The antenna device according to any one of items 1 to 11, wherein the second frequency is equal to the first frequency.

[0138] (Item 13) Item 13. The antenna device according to item 12, wherein the antenna device operates as a homodyne detector.

[0139] (Item 14) 12. The antenna device according to any one of items 1 to 11, wherein the second frequency is different from the first frequency.

[0140] (Item 15) a bias control unit that controls the second bias signal is connected to the second wiring; Item 15. The antenna device according to item 14, wherein the bias control unit controls the second bias signal so that, when the first electromagnetic wave is received, the power injected from the oscillation unit to the first active antenna through the coupling wire does not cause injection locking with respect to the electromagnetic wave within a predetermined range of the intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

[0141] (Item 16) a bias control unit that controls the second bias signal is connected to the second wiring; Item 16. The antenna device according to item 14 or 15, wherein the bias control unit controls the second bias signal so that, when the first electromagnetic wave is received, the power injected from the oscillation unit to the first active antenna through the coupling wire causes injection locking with the electromagnetic wave within a predetermined range of the intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

[0142] (Item 17) a bias control unit that controls the second bias signal is connected to the second wiring; Item 16. The antenna device according to item 14 or 15, wherein the bias control unit controls the second bias signal so that, when receiving the first electromagnetic wave, power injected from the oscillation unit to the first active antenna through the coupling wire causes injection locking with respect to the electromagnetic wave only when the intensity of the electromagnetic wave is greater than a predetermined threshold within a predetermined range of the intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

[0143] (Item 18) 18. The antenna device according to any one of items 14 to 17, wherein the first active antenna operates as a heterodyne detector when injection locking by the first electromagnetic wave is not performed.

[0144] (Item 19) 18. The antenna device according to any one of items 14 to 17, wherein the first active antenna operates as a homodyne detector when injection locking is performed by the first electromagnetic wave.

[0145] (Item 20) the first active antenna oscillates at the second frequency and generates a third electromagnetic wave at a third frequency when receiving the first electromagnetic wave; 20. The antenna device according to any one of items 1 to 19, wherein the first active antenna mixes the first electromagnetic wave and the third electromagnetic wave to generate a fourth electromagnetic wave having a fourth frequency lower than the first frequency and the third frequency.

[0146] (Item 21) 21. The antenna device according to any one of items 1 to 20, wherein a bias voltage is applied to the first antenna of the first active antenna.

[0147] (Item 22) 22. The antenna device according to any one of items 1 to 21, wherein the first antenna is a patch antenna.

[0148] (Item 23) 23. The antenna device according to any one of items 1 to 22, wherein the oscillation section is a microstrip line resonator.

[0149] (Item 24) 24. The antenna device according to item 23, wherein the coupling wire electrically connects the first antenna and the resonator of the oscillator.

[0150] (Item 25) a second active antenna including a second antenna that transmits or receives electromagnetic waves of the first frequency and a third negative resistance element; The first active antenna and the second active antenna are electrically connected by a coupling line different from the coupling line. 25. The antenna device according to any one of items 1 to 24,

[0151] (Item 26) 26. The antenna device according to any one of items 1 to 25, comprising two of the oscillation units connected by a coupling line different from the coupling line.

[0152] (Item 27) 26. The antenna device according to item 25, wherein the first active antenna receives the signal from the oscillator at a first phase, and the second active antenna receives the signal from the oscillator at a second phase different from the first phase.

[0153] (Item 28) 28. The antenna device according to item 27, wherein the line lengths of coupling lines connecting the oscillation unit to the first active antenna and the second active antenna are different.

[0154] (Item 29) 29. The antenna device according to item 27 or 28, wherein the difference between the first phase and the second phase is π / 4.

[0155] (Item 30) 30. The antenna device according to any one of items 1 to 29, wherein the oscillator includes a third active antenna having a third antenna and a third negative resistance element, and the third active antenna functions as a transmitting antenna that radiates electromagnetic waves of the second frequency.

[0156] (Item 31) 31. The antenna device according to item 30, wherein the coupling wire electrically connects the first antenna of the first active antenna and the third antenna of the third active antenna.

[0157] (Item 32) 32. The antenna device according to any one of items 1 to 31, wherein the coupling line is a microstrip line.

[0158] (Item 33) 33. The antenna device according to any one of items 1 to 32, wherein the first electromagnetic wave and the second electromagnetic wave are electromagnetic waves in the terahertz band.

[0159] (Item 34) 34. The antenna device according to any one of items 1 to 33, wherein the first negative resistance element and the second negative resistance element are formed in the same layer on the semiconductor substrate.

[0160] (Item 35) The antenna device according to any one of items 1 to 34, a transmitter that emits electromagnetic waves of the first frequency; a receiving unit that detects electromagnetic waves of the first frequency; A communication device comprising:

[0161] (Item 36) The antenna device according to any one of items 1 to 34, a transmitter that emits electromagnetic waves of the first frequency toward a subject; a detection unit that detects the electromagnetic wave of the first frequency reflected by the subject; An imaging system comprising: [Explanation of symbols]

[0162] 100 receiving device, 102 semiconductor substrate, 103 active antenna, 104 oscillation section, 105 first bias control section, 106 second bias control section, 107 antenna, 108 coupled wire, 110 detection circuit, 300 first negative resistance element, 301 second negative resistance element, 302 resonance section

Claims

1. On a semiconductor substrate, a first active antenna having a first antenna for transmitting or receiving a first electromagnetic wave of a first frequency and a first negative resistance element; an oscillation unit having a second negative resistance element and a resonance unit that oscillates at a second frequency to generate a second electromagnetic wave; a coupling wire electrically connecting the first active antenna and the oscillation unit; a first wiring electrically connected to the first negative resistance element and receiving a first bias signal to be supplied to the first negative resistance element; a second wiring electrically connected to the second negative resistance element and receiving a second bias signal to be supplied to the second negative resistance element; An antenna device comprising:

2. the first active antenna receives the first electromagnetic wave; 2. The antenna device according to claim 1, wherein a detection circuit that detects that the first active antenna receives the first electromagnetic wave is electrically connected to the first wiring.

3. 3. The antenna device according to claim 2, wherein the detection circuit is capacitively coupled to the first wiring through a first capacitance.

4. 4. The antenna device according to claim 3, wherein the coupling line is capacitively coupled to the first active antenna through a second capacitance.

5. 5. The antenna device according to claim 4, wherein the first capacitance is greater than the second capacitance.

6. 2. The antenna device according to claim 1, wherein the first negative resistance element and the second negative resistance element are resonant tunneling diodes.

7. 2. The antenna device according to claim 1, wherein the second bias signal has a bias voltage that causes the second negative resistance element to generate a negative resistance.

8. 2. The antenna device according to claim 1, wherein the first bias signal has a bias voltage that causes the first negative resistance element to generate a positive resistance.

9. 2. The antenna device according to claim 1, wherein the first bias signal has a bias voltage that generates a negative resistance in the first negative resistance element.

10. 10. The antenna device according to claim 9, wherein the first active antenna oscillates at the second frequency of the second electromagnetic wave injected via the coupled line.

11. 10. The antenna device according to claim 9, wherein the first negative resistance element amplifies a signal propagating to the first active antenna.

12. 2. The antenna device according to claim 1, wherein the second frequency is equal to the first frequency.

13. 13. The antenna device according to claim 12, wherein the antenna device operates as a homodyne detector.

14. 2. The antenna device according to claim 1, wherein the second frequency is different from the first frequency.

15. a bias control unit that controls the second bias signal is connected to the second wiring; The antenna device according to claim 14, characterized in that the bias control unit controls the second bias signal so that, when receiving the first electromagnetic wave, power injected from the oscillation unit to the first active antenna through the coupling wire does not cause injection locking with the electromagnetic wave within a predetermined range of intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

16. a bias control unit that controls the second bias signal is connected to the second wiring; The antenna device according to claim 14, characterized in that the bias control unit controls the second bias signal so that, when receiving the first electromagnetic wave, the power injected from the oscillation unit to the first active antenna through the coupling wire causes injection locking with the electromagnetic wave within a predetermined range of intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

17. a bias control unit that controls the second bias signal is connected to the second wiring; The antenna device according to claim 14, characterized in that the bias control unit controls the second bias signal so that, when receiving the first electromagnetic wave, power injected from the oscillation unit to the first active antenna through the coupling wire causes injection locking to occur with respect to the electromagnetic wave only when the intensity of the electromagnetic wave is greater than a predetermined threshold within a predetermined range of the intensity of the electromagnetic wave of the first frequency propagating to the first active antenna.

18. 15. The antenna device according to claim 14, wherein the first active antenna operates as a heterodyne detector when injection locking by the first electromagnetic wave is not performed.

19. 15. The antenna device according to claim 14, wherein the first active antenna operates as a homodyne detector when injection locking is performed by the first electromagnetic wave.

20. the first active antenna oscillates at the second frequency and generates a third electromagnetic wave at a third frequency when receiving the first electromagnetic wave; 2. The antenna device according to claim 1, wherein the first active antenna mixes the first electromagnetic wave with the third electromagnetic wave to generate a fourth electromagnetic wave having a fourth frequency lower than the first frequency and the third frequency.

21. 2. The antenna device according to claim 1, wherein a bias voltage is applied to the first antenna of the first active antenna.

22. 2. The antenna device according to claim 1, wherein the first antenna is a patch antenna.

23. 2. The antenna device according to claim 1, wherein the oscillator is a microstrip line resonator.

24. 24. The antenna device according to claim 23, wherein the coupling wire electrically connects the first antenna and the resonator of the oscillator.

25. a second active antenna including a second antenna for transmitting or receiving electromagnetic waves of the first frequency and a third negative resistance element; The first active antenna and the second active antenna are electrically connected by a coupling line different from the coupling line.

2. The antenna device according to claim 1.

26. 2. The antenna device according to claim 1, further comprising two of the oscillation sections connected by a coupling line different from the coupling line.

27. 26. The antenna device according to claim 25, wherein the first active antenna receives the signal from the oscillator at a first phase, and the second active antenna receives the signal from the oscillator at a second phase different from the first phase.

28. 28. The antenna device according to claim 27, wherein the lengths of coupling lines connecting the oscillation unit to the first active antenna and the second active antenna are different.

29. 28. The antenna device according to claim 27, wherein the difference between the first phase and the second phase is π / 4.

30. 2. The antenna device according to claim 1, wherein the oscillator includes a third active antenna having a third antenna and a third negative resistance element, and the third active antenna functions as a transmitting antenna that radiates electromagnetic waves of the second frequency.

31. 31. The antenna device according to claim 30, wherein the coupling wire electrically connects the first antenna of the first active antenna and the third antenna of the third active antenna.

32. 2. The antenna device according to claim 1, wherein the coupled line is a microstrip line.

33. 2. The antenna device according to claim 1, wherein the first electromagnetic wave and the second electromagnetic wave are electromagnetic waves in the terahertz band.

34. 2. The antenna device according to claim 1, wherein the first negative resistance element and the second negative resistance element are formed in the same layer on the semiconductor substrate.

35. an antenna device according to any one of claims 1 to 34; a transmitter that emits electromagnetic waves of the first frequency; a receiving unit that detects electromagnetic waves of the first frequency; A communication device comprising:

36. an antenna device according to any one of claims 1 to 34; a transmitter that emits electromagnetic waves of the first frequency toward a subject; a detection unit that detects the electromagnetic wave of the first frequency reflected by the subject; An imaging system comprising:

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