Drying equipment for coating equipment

Abstract

To provide an excellent coating device dryer whose blower 6 is automatically controlled according to detected data fed back from an air flowrate detector 10 so that its wind velocity becomes equal to a set value by setting a suitable (intended) wind velocity, capable of drying a coating device at a suitable (the fastest) drying speed that does not cause deterioration of peeling strength, capable of carrying out hot air drying under various conditions and at an optimum wind velocity in each of drying zones for example, capable of carrying out suitable drying in a short period of time, and capable of increasing its throughput.SOLUTION: There is provided a coating device dryer which is configured in such a manner that the wind output of a blower 6 is controlled according to data detected by an air flowrate detector 10 and data detected by a temperature detector 11 so that the hot air delivery speed becomes equal to a set value.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a drying device for a coating device that dries the coating liquid (coating film) on a film-like substrate that has been coated with a coating liquid by a coating device by transporting the substrate through a drying chamber from which hot air is blown out. [Background technology]

[0002] A mass-production device for positive and negative electrodes in lithium-ion batteries uses a drying device for a coating device, which is configured so that a film-like substrate (current collector) is pulled out from a take-up roll and transported to a coating device equipped with a coating nozzle unit and a support roller arranged opposite the nozzle unit, a coating liquid containing an active material, a binder, etc. is ejected from the coating nozzle unit of the coating device to coat the upper surface of the substrate supported by the support roller, and the substrate is then supported, for example, by a support roller and transported horizontally through (the drying chamber of) a drying device connected to the coating device, where it is dried and then wound up on a recovery roll.

[0003] For example, in the case of a drying device used for mass production of positive and negative electrodes for lithium-ion batteries, if the coating liquid applied to the top surface of the substrate is simply heated and dried from the top side of the substrate using warm (hot) air, binder migration occurs, in which the binder moves to the surface (top side), resulting in a decrease in adhesion between the active material and the current collector. In other words, increasing the air velocity and volume of the hot air blown out will increase the drying speed, but this will also result in a decrease in adhesion and a decrease in peel strength.

[0004] Furthermore, if the substrate is simply heated and dried with hot air from the underside in order to suppress binder migration, the pressure of the hot air can cause the substrate to lift off the support roller, causing it to be transported in an unstable state and preventing uniform drying, among other problems.On the other hand, if a drying method uses an IR heater instead of this hot air (warm air) drying and exhaust method, even though it can solve the problem of binder migration (the problem of reduced adhesion), it will be more expensive than hot air drying, and safety measures will also be necessary when using a solvent-based coating liquid.

[0005] Therefore, conventionally, a hot air blowing section having a Coanda nozzle is placed below the substrate, and the hot air blown from the Coanda nozzle creates a Coanda effect, that is, the negative pressure generated by blowing air along the Coanda guide plate creates an effect of drawing the substrate downward (suction effect), and even if hot air is blown from the underside of the substrate, the substrate does not lift up from the support roller (this prevents the substrate from being transported stably and drying evenly, and also solves the problem of binder migration). Summary of the Invention [Problem to be solved by the invention]

[0006] In recent years, demand for lithium-ion batteries has increased across a variety of industries and fields, including electric and hybrid vehicles, which are calling for increased production. This has created an urgent need for suppliers to increase production to meet this growing demand.

[0007] Drying equipment for coating equipment, which is used to mass-produce positive and negative electrodes for the above-mentioned lithium-ion batteries, is no exception, and improving the productivity (mass production) of electrodes has become an urgent issue.

[0008] As a way to improve throughput and increase the productivity (mass production) of this drying device for coating equipment, the first things that come to mind are to make the drying device larger (lengthening the drying area) or to increase the temperature and volume of the hot air. However, making the device larger is not only costly, but also increases the footprint of the device, making it difficult to implement. Furthermore, simply increasing the temperature and volume of the hot air raises concerns that various problems may arise, such as a decrease in the stability of substrate transport, a decrease in peel strength, and an increase in evaporated gases emitted from the coating liquid that hinder drying.

[0009] The present invention has identified and solved such problems, and aims to provide an extremely practical drying device for a coating device that can precisely set and control the wind speed and volume of hot air blown (protruding) from the hot air blowing section in the drying chamber, and by setting the appropriate (desired) wind speed and volume, the air output of the blower device for blowing out the hot air is automatically controlled to this set value (desired value) based on detection data, allowing drying at an appropriate (fastest) drying speed that does not reduce peel strength, for example, hot air drying at the optimum wind speed and volume for various conditions and each drying zone, allowing appropriate drying to be performed in a short time and improving throughput. [Means for solving the problem]

[0010] The gist of the present invention will be explained with reference to the accompanying drawings.

[0011] A coating liquid is applied to the upper surface of the substrate 2 by a coating device 1, and the substrate 2 is conveyed and passed through a drying chamber 3. Upper and The coating liquid is applied to the upper surface of the substrate 2. Above and A hot air delivery section 5 is provided from below to deliver hot air 4 for drying, a blower device 6 for blowing the hot air 4 to the hot air delivery section 5, a heating device 7 for heating the blown gas blown from the blower device 6 to produce the hot air 4, and a heater 8 for heating the hot air 4. The respective substrates 2 are disposed on the upper and lower sides thereof. An air guide duct 8 that guides air to the hot air delivery section 5 is provided, and an air blowing output control device 9 that controls the air blowing output of the blower device 6 is provided. The respective substrates 2 are disposed on the upper and lower sides thereof.an air volume detection unit 10 that detects the air pressure or air volume of the hot air 4 introduced into the hot air delivery unit 5 and outputs the detection data to the air output control device 9; In the air guide passage portion 8 A temperature detection unit 11 that detects the temperature of the hot air 4 and outputs the detection data to the air output control device 9. Toga The air blowing output control device 9 includes: a hot air temperature setting input unit for inputting the temperature of the hot air 4 in the hot air delivery unit 5; A desired value setting input section for inputting a hot air blowing speed value or a hot air blowing volume value in the hot air blowing section 5. and The air blowing output control device 9 is provided with a hot air blowing speed value or a hot air blowing volume value in the hot air blowing unit 5 set in the desired value setting input unit and a hot air temperature setting value set in the hot air temperature setting input unit. In the hot air blowing section 5 The detected data of the air volume detection unit 10 and the detected data of the temperature detection unit 11 are adjusted to the hot air temperature. and a plurality of drying chambers 3 as one drying zone 12 are arranged in series in the conveying direction of the substrate 2, and the coating liquid on the substrate 2 is dried with hot air by conveying it through the plurality of drying zones 12; alternatively, a plurality of hot air delivery section groups 12 each consisting of one or more hot air delivery sections 5 are arranged in the conveying direction of the substrate 2, and the coating liquid on the substrate 2 is dried with hot air by conveying it through the plurality of drying zones 12, and each drying zone 12 The airflow output control device 9 is provided, and at least The substrate 2 Upper and The hot air 4 sent out from the hot air delivery section 5 arranged on the lower side is controlled by the air output control device 9 to a predetermined hot air delivery air velocity value or hot air delivery air volume value, and the hot air delivery air velocity value or hot air delivery air volume value can be controlled to a different value for each drying zone 12. The air blowing output control device 9 in each drying zone 12 is configured to control, at least in the first drying zone 12 at the beginning of the transport passage of the substrate 2, the hot air blowing velocity value of the hot air 4 at the hot air blowing section 5 below the substrate 2 to be higher than the hot air blowing velocity value of the hot air 4 at the hot air blowing section 5 above the substrate 2, and to control the hot air blowing velocity value to be higher than the hot air blowing velocity value of the hot air 4 at the hot air blowing section 5 below the substrate 2 in the drying zone 12 downstream of the transport of the substrate 2 from the first drying zone 12. The present invention relates to a drying device for a coating device characterized by the above.

[0012]

[0013] [Effects of the Invention]

[0014] Since the present invention is configured as described above, it is possible to precisely set and control the wind speed, air volume, and temperature of the hot air blown (protruding) from the hot air blowing section in the drying chamber, and by setting the appropriate (desired) wind speed, air volume, and temperature, the air output of the blower device for blowing out the hot air is automatically controlled to this set value (desired value) based on the detection data, allowing drying at the appropriate (fastest) drying speed that does not reduce the peel strength, and for example, hot air drying at the optimal wind speed and air volume for various conditions and each drying zone, making it an extremely practical drying device for a coating device that can perform appropriate drying in a short time and improve throughput. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. 2 is a schematic diagram illustrating the configuration of the main part of the present embodiment. [Figure 2] FIG. 1 is a schematic diagram illustrating the configuration of the present embodiment. [Figure 3] This is a control explanatory diagram that explains an arithmetic formula for calculating the hot air discharge velocity value from the air flow dynamic pressure Pv (detection data) measured by the air flow meter (air flow detection unit) installed in the duct (air guide duct unit) of this embodiment, the hot air temperature (detection data) inside the duct measured by the temperature measurement unit, and fixed values ​​that are initially input, and how the blower device's air output is inverter-controlled based on this arithmetic formula (a calculation formula showing the relationship between the hot air discharge velocity value Vn and the duct air flow dynamic pressure Pv) so that the measured air flow dynamic pressure Pv becomes the air flow dynamic pressure Pv that becomes the input-set desired hot air discharge velocity value Vn. DETAILED DESCRIPTION OF THE INVENTION

[0016] The best mode for carrying out the present invention will now be briefly described with reference to the accompanying drawings, illustrating the operation of the present invention.

[0017] The film-like substrate 2, on whose upper surface the coating liquid is applied by the coating device 1 and delivered, is transported by a transport device and passes through the drying chamber 3 (furnace) of this device. At this time, hot air (warm air) is delivered from the hot air delivery unit 5 disposed at least below the substrate 2 in the drying chamber 3, and the coating liquid that has been applied to the upper surface of this substrate 2 is dried.

[0018] This device comprises a blower device 6 for blowing hot air 4 to the hot air discharge section 5 in the drying chamber 3, a heating device 7 for heating the gas blown from the blower device 6 to turn it into the hot air, and an air guide section 8 (such as a duct or nozzle straightening section) for guiding the heated hot air 4 to the hot air discharge section 5, and the blower device 6 is equipped with an air output control device 9 for controlling the air output.

[0019] The device is also equipped with an air volume detection unit 10 that detects the air pressure (e.g., duct air dynamic pressure Pv) or air volume of the hot air 4 introduced to the hot air discharge unit 5, a temperature detection unit 11 that detects the temperature of the hot air 4 (e.g., duct hot air temperature T), and a hot air temperature setting input unit provided in the air output control device 9, and the air output control device 9 is equipped with a desired value setting input unit that inputs the desired hot air discharge air velocity value (Vn) or hot air discharge air volume value at the hot air discharge unit 5.

[0020] Therefore, by inputting and setting the hot air output speed value or hot air output volume value at the hot air output unit 5 into the desired value setting input unit of the air output control device 9 and inputting and setting the hot air temperature into the hot air temperature setting input unit, the air output control device 9 will automatically control the air output of the blower device 6 to be the set value (the desired hot air output speed value or desired hot air output volume value of the hot air 4 to be output) based on the detection data of the air volume detection unit 10 and the detection data of the temperature detection unit 11 or the hot air temperature setting data set in the hot air temperature setting input unit.

[0021] For example, the air output control device 9 is configured to be able to adjust the air output of the blower device 6 by inverter control, and rather than simply adjusting the frequency (number of rotations) to adjust the output of the blower device 6, this inverter control feedback-controls the output of the blower device 6 based on detection data so that, for example, the desired hot air blowing speed value is achieved.

[0022] To explain further, the air blown out from the blower device 6 by adjusting its output is heated to a predetermined temperature by, for example, the steam-type heating device 7, which can adjust the temperature, and the hot air 4 at this predetermined temperature is guided to the air guide path 8, and is guided, for example, through the air guide path 8 (duct, rectifying section 13) to the hot air delivery sections 5, which are arranged in parallel in the rectifying section 13 inside the drying chamber 3, and is delivered (spit out) from the hot air delivery sections 5 (nozzles), so that the upper-surface-coated substrate 2 is dried with hot air from below.

[0023] Then, for example, when the desired hot air discharge speed value of the hot air 4 to be discharged is input and set as the desired setting value, the air output of the blower device 6 is inverter-controlled based on the detection data (for example, the air flow dynamic pressure Pv data of the hot air 4) from the air volume detection unit 10 (air flow meter or differential pressure meter) provided in the air guide duct unit 8, the detection data (measured hot air temperature T data of the hot air 4) from the hot air temperature detection unit 11, or the hot air temperature setting data input to the hot air temperature setting input unit, so that the air flow dynamic pressure Pv becomes the desired hot air discharge speed value Vn through this feedback, and the air flow speed of the hot air 4 discharged from the hot air discharge unit 5 is always managed and controlled.

[0024] This allows, for example, the coating liquid applied to the upper surface of the substrate 2 to be always hot-air dried from below with hot air 4 controlled at a wind speed determined (input set) according to various conditions, and the wind speed of this discharged hot air 4 can be easily controlled and managed for each drying zone 12, for example, according to various conditions or to vary the drying conditions in the conveying direction.This allows the drying speed to be increased without reducing the peel strength of the coating liquid, shortening the drying time and improving the throughput of the drying device. [Example]

[0025] A specific embodiment 1 of the present invention will be described with reference to the drawings.

[0026] In this embodiment, a film-like substrate 2 is coated on its upper surface with a coating liquid by a coating device 1 and discharged from the coating device 1, and is transported horizontally through a drying chamber 3 by a conveying device.In the drying chamber 3, a hot air delivery section 5 is provided that delivers hot air 4 to dry the coating liquid coated on the upper surface of the substrate 2, and the coating liquid (coating film) is hot-air dried by the hot air 4 delivered (protruding) from the hot air delivery section 5.

[0027] This hot air delivery unit 5 is configured to be provided in multiple locations above and below the substrate 2, and is configured to be provided in multiple locations parallel to each other at intervals in the substrate conveying direction on both the top and bottom. Specifically, a plurality of nozzles having discharge slits in the substrate width direction are arranged in parallel to the hot air straightening unit 13 having a length in the substrate conveying direction, and in this embodiment, the hot air delivery unit 5 arranged below the substrate 2 is configured as a Coanda nozzle structure, that is, a Coanda nozzle equipped with a Coanda guide plate that suppresses the floating and distortion of the substrate 2 even when the wind speed is increased by causing the substrate 2 to be pulled downward by the hot air delivery angle of the discharge slit and the Coanda effect, and is configured to be provided in pairs opposite to each other (back to back) below each support roller 15.

[0028] In addition, in this embodiment, the hot air delivery section 5 of the Coanda nozzle structure arranged below the substrate 2 is configured to be protruding in a parallel state above the hot air rectification section 13 at intervals in the substrate transport direction, so that the hot air 4 guided to this hot air rectification section 13 is rectified and discharged toward the substrate 2 at almost the same wind speed, and is blown along the Coanda guide plate.

[0029] In this embodiment, the hot air blowing section 5 provided in the hot air straightening section 13 is arranged below the substrate 2, so that the substrate 2 is dried with hot air from below. In this embodiment, the desired wind speed value of the hot air 4 from below (hot air blowing speed value Vn) is input and set, and the blowing output of the blower device 6 is inverter-controlled based on the measurement data (detection data) that is fed back so as to achieve this wind speed value.

[0030] In this embodiment, hot air 4 is also blown out from a hot air blowing section 5 provided above the substrate 2, so that the substrate 2 is dried with hot air from both above and below. However, in this embodiment, although this upper hot air 4 is branched off from an air guide duct section 8 of a blower device 6 and guided therethrough, it is not automatically controlled by feedback, and the wind speed is adjusted manually by adjusting a damper as appropriate based on detection by an air volume detection section 10 provided in the air guide duct section 8, etc.

[0031] In addition, for the upper hot air delivery section 5, for example, a separate blower device 6 may be provided, and the air output of this blower device 6 may be controlled by a feedback inverter in the same manner as for the lower side, so that the desired hot air delivery wind speed can be automatically controlled by simply inputting and setting this value.

[0032] To explain further, this embodiment is configured to include a blower device 6 for blowing the hot air 4, a heating device 7 for heating the gas blown from the blower device 6 with steam to form the hot air 4, and an air guide duct section 8 for guiding the hot air 4 to the hot air discharge section 5 (hot air rectification section 13), and as mentioned above, the blower device 6 is configured to be able to adjust the air output by inverter control using the air output control device 9. That is, as described above, the air adjusted and sent out from the blower device 6 by this inverter control is heated by the steam heat exchange type heating device 7, which can adjust the temperature, to heat it to hot air 4 of a predetermined temperature, and this hot air 4 is guided through a filter 14 and an air guide path section 8 (air guide duct) to the hot air delivery section 5 (said hot air rectification section 13) in the drying chamber 3 (furnace), and the hot air 4 is sent out (discharged) from this hot air delivery section 5 (nozzle section), and the upper surface coated substrate 2 is hot air dried at least from below by the hot air 4 at a controlled wind speed.

[0033] In this embodiment, in order to obtain feedback detection data to be input to the air output control device 9 which inverter controls the air output of the blower device 6, an air volume detection unit 10 which detects the air dynamic pressure Pv of the air guide duct 8 (duct) of the hot air 4 which is guided to the hot air discharge section 5, and a temperature detection unit 11 (TC) which detects the temperature T of the hot air 4 in the duct are provided in this duct, and the air output control device 9 is also configured to have a desired value setting input unit for inputting the desired hot air discharge wind speed value Vn at the hot air discharge section 5.

[0034] More specifically, the air blowing output control device 9 is configured to inverter-control the air blowing output of the blower device 6 based on the detection data of the air volume detection unit 10 (blowing dynamic pressure Pv data of the hot air 4 detected by, for example, a Pitot tube air volume meter and a differential pressure gauge installed in the duct) and the detection data of the temperature detection unit 11 (hot air temperature T data detected by a temperature sensor TC installed in the duct) so that the hot air blowing speed value Vn at the hot air blowing unit 5 becomes the value set in the desired value setting input unit.

[0035] Specifically, as shown and explained in Figure 3, for example, the hot air discharge velocity value Vn is calculated using the equation shown in the figure from the air flow dynamic pressure Pv (detection data) measured by the air flow meter and differential pressure meter (air flow detection unit 10) installed in the air guide duct unit 8 (duct), the hot air temperature T (detection data) inside the duct measured by the temperature measurement unit 11, and fixed values ​​that are initially input, and based on this equation (a calculation equation that shows the relationship between the hot air discharge velocity value Vn and the duct air flow dynamic pressure Pv), the blower output of the blower device 6 is inverter controlled so that the measured air flow dynamic pressure Pv becomes the air flow dynamic pressure Pv that corresponds to the desired hot air discharge velocity value Vn that has been input and set.

[0036] That is, in this embodiment, when the desired hot air discharge velocity value Vn of the hot air 4 discharged from the hot air discharge section 5 is input and set as the desired set value, the air output of the blower device 6 is feedback-controlled based on the above-mentioned calculation formula so that the air dynamic pressure Pv becomes the desired hot air discharge velocity value Vn, and the velocity of the hot air 4 discharged from the hot air discharge section 5 is always managed and controlled to this hot air discharge velocity value Vn.

[0037] In other words, the hot air discharge speed value Vn at the hot air discharge section 5 is calculated from the measured air flow dynamic pressure Pv, and the air output of the blower device 6 is feedback controlled so that this hot air discharge speed value Vn becomes the desired (input-set) hot air discharge speed value Vn, so that the speed of the hot air 4 discharged from the hot air discharge section 5 is always managed and controlled to this hot air discharge speed value Vn.

[0038] In this embodiment, a plurality of drying chambers 3 serving as one drying zone 12 are arranged in series in the conveying direction of the substrate 2, and the substrate 2 is conveyed through the plurality of drying zones 12, whereby the coating liquid on the substrate 2 is dried sequentially with hot air at a controlled air speed for each drying zone.

[0039] Specifically, within each drying chamber 3 divided into each drying zone 12, a group of hot air delivery sections (one hot air straightening section 13) consisting of a plurality of the hot air delivery sections 5 is arranged as one drying zone 12 within each drying chamber 3, and the coating liquid on the substrate 2 is transported through these multiple drying zones 12 in sequence to dry it with hot air.

[0040] That is, the hot air 4 blown out from the hot air blowing section 5 arranged below the substrate 2 in each drying zone 12 is controlled and managed to a predetermined hot air blowing speed value by the blowing output control device 9.

[0041] As a result, for example, for each drying zone 12 (each drying chamber 3, each hot air straightening section 13, each hot air delivery section group 12), the air output of the blower device 6 is inverter controlled so that the air speed of the hot air delivery section 5 of each drying zone 12 becomes the hot air delivery air speed value set in the desired value setting input section (control is performed so that hot air 4 is delivered at an appropriate air speed for each drying zone 12), making it possible to easily set and manage the air speed of each drying zone 12.

[0042] For example, the wind speed of the hot air 4 blown from above the substrate 2 on the upper surface of which the coating liquid is applied is set to a slightly lower wind speed in all drying zones 12, while the wind speed of the hot air 4 blown from below the substrate 2 in each drying zone 12 is set to a slightly lower wind speed. Fast The system is configured so that it automatically performs feedback control to the desired hot air blowing speed value that has been input. For example, in any drying zone 12, the wind speed on the lower side is set to a higher value than the wind speed on the upper side, but the wind speed is set to the desired wind speed value for each drying zone, and the air volume detection data and temperature detection data are constantly fed back to achieve this wind speed value, and the blower device 6 is inverter controlled.

[0043] This air speed value is determined and input based on various conditions such as the material and dimensions of the substrate 2, the coating liquid, the tension of the substrate 2 during transport, the hot air temperature, the nozzle structure and shape of the hot air discharge section, the shape of the hot air straightening section 13, and product requirements such as allowable peel strength.In this embodiment, as described above, the detection data from the air volume meter and temperature sensor provided in the air guide section 8 are fed back, and based on the hot air discharge air speed value (calculated value) calculated from the measured air discharge dynamic pressure Pv based on the calculation formula shown in Figure 3 previously set in the control software, and the desired input-set hot air discharge air speed value, the inverter controls the air output of the blower device 6 to be a specified air volume (air discharge dynamic pressure that results in the desired hot air discharge air speed value), thereby enabling easy automatic control of the various air speeds of the hot air 4 projecting from the hot air discharge section 5.

[0044] Therefore, for example, in order to further increase the drying speed and the transport speed of the substrate 2, thereby shortening the drying time, when drying the coating liquid on the substrate 2, in the first drying zone which is used in the preheating period, the upper hot air 4 is set to a slightly lower wind speed, while the lower hot air 4 is set to a higher wind speed value; in the second and third drying zones which are used in the constant rate period, the lower wind speed is set to a slightly lower wind speed value, thereby controlling and managing so that the peel strength does not decrease; and in the fourth drying zone which is used in the decreasing rate period, the wind speed is again increased (set to a high wind speed value), which makes it easy to perform such control and management.

[0045] In this case, the blower device 6 and other devices are provided for each drying zone 12 so that the hot air 4 blown out from each hot air blowing section 5 can be set and controlled to a predetermined wind speed value, but the blower device 6 and other specified devices for each drying zone 12 may also be designed to be shared.

[0046] The present invention is not limited to this embodiment, and the specific configuration of each component can be designed as appropriate. [Explanation of symbols]

[0047] 1 Coating device 2 Base material 3 Drying room 4 Hot air 5 Hot air outlet 6 Blower unit 7 Heating device 8. Air guide duct 9. Airflow output control device 10 Air volume detection unit 11 Temperature detection unit 12 Drying zone (hot air outlet group)

Claims

[Claim 1] a drying chamber through which a film-like substrate, the upper surface of which has been coated with a coating liquid by a coating device and which is delivered from the coating device, is transported and passed; hot air delivery sections are provided above and below the substrate, and deliver hot air from above and below the substrate to dry the coating liquid coated on the upper surface of the substrate; The hot air delivery unit is provided with a blower device for delivering the hot air, a heating device for heating the gas delivered from the blower device to produce the hot air, and an air guide duct for guiding the hot air to each of the hot air delivery units disposed above and below the base material, An airflow output control device is provided for controlling the airflow output of the blower device, and an air volume detection unit is provided for detecting the airflow pressure or air volume of the hot air introduced into each of the hot air delivery units disposed above and below the base material and outputting the detection data to the airflow output control device, and a temperature detection unit is provided for detecting the temperature of the hot air in the air introduction path unit and outputting the detection data to the airflow output control device, the air blowing output control device includes a hot air temperature setting input unit for inputting the temperature of the hot air at the hot air blowing unit, and a desired value setting input unit for inputting a hot air blowing speed value or a hot air blowing volume value at the hot air blowing unit, This air blowing output control device is configured to control the air blowing output of the blower device based on the detection data of the air volume detection unit and the detection data of the temperature detection unit so that the hot air blowing speed value or the hot air blowing volume value at the hot air blowing unit set by the desired value setting input unit and the hot air temperature at the hot air blowing unit set by the hot air temperature setting input unit are achieved, a plurality of the drying chambers as one drying zone are arranged in series in the conveying direction of the substrate, and the substrate is conveyed through these plurality of drying zones to dry the coating liquid on the substrate with hot air; or a group of hot air delivery sections consisting of one or more of the hot air delivery sections is arranged as one drying zone in the conveying direction of the substrate, and the substrate is conveyed through these plurality of drying zones to dry the coating liquid on the substrate with hot air; each drying zone is provided with the air blowing output control device; the hot air delivered from the hot air delivery sections arranged at least above and below the substrate is controlled by the air blowing output control device to a predetermined hot air delivery air velocity value or hot air delivery air volume value, and the hot air delivery air velocity value or hot air delivery air volume value can be controlled to a different value for each drying zone; The drying device for a coating apparatus is characterized in that the air blowing output control device in each drying zone is configured to control the hot air blowing speed value of the hot air at the hot air blowing section below the substrate to be higher than the hot air blowing speed value of the hot air at the hot air blowing section above the substrate, at least in the first drying zone at the beginning of the substrate's passage through the drying zone, and to control the hot air blowing speed value to be higher than the hot air blowing speed value of the hot air at the hot air blowing section below the substrate in the drying zone downstream of the first drying zone in the substrate's transport.

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