Exhaust gas abatement device

Abstract

To provide a detoxification apparatus capable of processing an exhaust gas by means of wet processing devices less than the prior arts.SOLUTION: A detoxification apparatus comprises: a pre-stage wet processing devices 5; a combustion type processing device 6; gas introduction lines 7A-7D connected to process chambers 2A-2D of a deposition device 1; first passage switching devices 8A-8D connected to the gas introduction lines 7A-7D; first gas transfer lines 9A-9D extending from the first passage switching devices 8A-8D to the pre-stage wet processing devices 5; second gas transfer lines 10A-10D extending from the first passage switching devices 8A-8D to the combustion type processing device 6; and an operation control unit 15 by which operations of the passage switching devices 8A-8D are controlled, a process gas is sent to the pre-stage wet processing devices 5, and a cleaning gas is sent to the combustion type processing device 6. The number of pre-stage wet processing devices 5 is less than a plurality of process chambers 2A-2D.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an abatement apparatus for treating process gases and cleaning gases discharged from a film-forming apparatus such as a CVD apparatus used in the manufacture of semiconductor devices. [Background technology]

[0002] In the manufacture of semiconductor devices, CVD equipment is used to form films on wafers. CVD equipment introduces process gases such as dichlorosilane (DCS) and ammonia (NH3) into a process chamber to form a film on the wafer (film formation process). After the film formation process, a purge gas such as nitrogen gas is supplied to the process chamber to remove the process gas from the process chamber (purge process). In addition, a cleaning gas such as fluorine gas (F2) or hydrogen fluoride gas (HF) is supplied into the process chamber to clean the inside of the process chamber (cleaning process).

[0003] In this way, the CVD apparatus repeatedly performs the film formation process, purging process, and cleaning process. Because the process gas and cleaning gas are harmful gases, both gases must be treated with abatement systems. CVD apparatuses typically have multiple process chambers to increase productivity. Abatement systems are connected to these multiple process chambers and treat the process gas and cleaning gas discharged from each process chamber.

[0004] Figure 9 is a schematic diagram showing a conventional detoxification apparatus. As shown in Figure 9, the detoxification apparatus includes multiple wet treatment devices 501 and a combustion treatment device 502. The multiple wet treatment devices 501 are connected to multiple process chambers 500, respectively, and the combustion treatment device 502 is connected to the wet treatment device 501. The wet treatment device 501 has a function of removing water-soluble components contained in the process gas and cleaning gas with water, thereby preventing the generation of by-products. The combustion treatment device 502 has a function of detoxifying the process gas and cleaning gas by combustion treatment. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 5977419 specification Summary of the Invention [Problem to be solved by the invention]

[0006] Process gases such as dichlorosilane (DCS) and ammonia (NH) used in the film formation process are flammable, while cleaning gases such as fluorine gas (F) and hydrogen fluoride gas (HF) used in the cleaning process are combustion-supporting gases. Mixing process gases and cleaning gases can result in an explosion. For this reason, as shown in FIG. 9, multiple process chambers 500 are connected separately to multiple wet processing equipment 501. With this configuration, the process gas, purge gas, and cleaning gas discharged from each process chamber 500 are sent to the corresponding wet processing equipment 501 in sequence, preventing the process gas and cleaning gas from mixing within the wet processing equipment 501.

[0007] However, the conventional decontamination apparatus shown in FIG. 9 requires the provision of multiple wet treatment apparatuses 501 corresponding to the multiple process chambers 500, respectively, which increases the overall cost of the decontamination apparatus and also increases the footprint of the decontamination apparatus.

[0008] Therefore, the present invention provides a detoxification device that can treat exhaust gases with fewer wet treatment devices than conventional devices. [Means for solving the problem]

[0009] In one aspect, there is provided an abatement device for exhaust gas containing a process gas and a cleaning gas, comprising: at least one upstream wet treatment device; a combustion treatment device; a plurality of gas introduction lines connected to a plurality of process chambers of a film formation device; a plurality of first flow path switching devices connected to each of the plurality of gas introduction lines; a first gas transfer line extending from the plurality of first flow path switching devices to the upstream wet treatment device; a second gas transfer line extending from the plurality of first flow path switching devices to the combustion treatment device; and an operation control unit configured to control the operation of the plurality of first flow path switching devices to send the process gas to the upstream wet treatment device and the cleaning gas to the combustion treatment device, wherein the number of the at least one upstream wet treatment device is less than the number of process chambers.

[0010] In one aspect, the operation control unit is configured to, when receiving a process gas exhaust signal from the film formation apparatus indicating that process gas is being exhausted from any one of the plurality of process chambers, operate a corresponding first flow path switching device to connect the corresponding one of the plurality of gas introduction lines to the first gas transfer line and block the connection between the corresponding gas introduction line and the second gas transfer line, and when receiving a cleaning gas exhaust signal from the film formation apparatus indicating that cleaning gas is being exhausted from any one of the plurality of process chambers, operate a corresponding first flow path switching device to connect the corresponding one of the plurality of gas introduction lines to the second gas transfer line and block the connection between the corresponding gas introduction line and the first gas transfer line. In one embodiment, the plurality of first flow path switching devices are a plurality of three-way valves. In one embodiment, the operation control unit is configured, when it detects blockage of the wet treatment device, to operate the plurality of first flow path switching devices to connect the plurality of gas introduction lines to the second gas transfer line and to cut off communication between the plurality of gas introduction lines and the first gas transfer line.

[0011] In one embodiment, the decontamination device further includes at least one second flow path switching device attached to the second gas transfer line and a bypass line connected to the second flow path switching device, and the operation control unit is configured to operate the second flow path switching device. In one embodiment, when the operation control unit detects blockage of the combustion type treatment device, it operates the plurality of first flow path switching devices to connect the plurality of gas introduction lines to the second gas transfer line and to block the connection between the plurality of gas introduction lines and the first gas transfer line, and it operates the plurality of second flow path switching devices to connect the second gas transfer line to the bypass line and to block the connection between the plurality of first flow path switching devices and the combustion type treatment device. In one aspect, the decontamination device further includes a downstream wet treatment device located downstream of the combustion treatment device and an exhaust line connected to the downstream wet treatment device, and the bypass line is connected to the exhaust line. In one embodiment, the wet pre-treatment device is a single wet pre-treatment device. [Effects of the Invention]

[0012] The operation control unit can send the process gas to the upstream wet treatment device and the cleaning gas to the combustion treatment device by separately operating the multiple first flow path switching devices. Because the cleaning gas is not sent to the upstream wet treatment device, the cleaning gas and the process gas are not mixed in the upstream wet treatment device. Therefore, there is no need to install as many wet treatment devices as there are process chambers. As a result, the cost and footprint of the abatement device can be reduced. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a schematic diagram illustrating one embodiment of an abatement apparatus for treating exhaust gases including process gases and cleaning gases. [Figure 2] FIG. 10 is a schematic diagram illustrating an operating state in which the process gas bypasses the pre-stage wet treatment device and is sent to the combustion treatment device. [Figure 3] FIG. 2 is a cross-sectional view showing an embodiment of detailed structures of a front-stage wet treatment device, a combustion treatment device, and a rear-stage wet treatment device. [Figure 4] FIG. 10 is a schematic diagram showing another embodiment of the abatement device. [Figure 5] FIG. 10 is a diagram illustrating the flow of process gas and cleaning gas when a serious failure occurs in the combustion type treatment device. [Figure 6] FIG. 10 is a schematic diagram showing still another embodiment of the abatement device. [Figure 7] FIG. 10 is a schematic diagram showing still another embodiment of the abatement device. [Figure 8] FIG. 10 is a schematic diagram showing still another embodiment of the abatement device. [Figure 9] FIG. 1 is a schematic diagram showing a conventional abatement device. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a schematic diagram showing one embodiment of a detoxification apparatus for treating exhaust gas containing process gas and cleaning gas. The detoxification apparatus is an apparatus for detoxifying exhaust gas containing process gas and cleaning gas discharged from a film formation apparatus 1 used in the manufacture of semiconductor devices. In the embodiment described below, the film formation apparatus 1 is a CVD (Chemical Vapor Deposition) apparatus equipped with multiple process chambers 2A, 2B, 2C, and 2D.

[0015] In the film forming apparatus 1, which is a CVD apparatus, a process gas (gas containing film material) for forming a film on the wafer, a purge gas for removing the process gas from the process chambers 2A-2D, and a cleaning gas for cleaning the inside of the process chambers 2A-2D are supplied to the process chambers 2A-2D in that order. Examples of the process gas include dichlorosilane (DCS) and ammonia (NH3). Examples of the cleaning gas include fluorine gas (F2), hydrogen fluoride gas (HF), nitrogen trifluoride gas (NF3), and chlorine trifluoride gas (ClF3).

[0016] In the film formation apparatus 1, a film formation process, a purge process, and a cleaning process are repeatedly performed in the process chambers 2A-2D at different intervals. The film formation process is a process in which a process gas containing film materials is introduced into the process chambers 2A-2D to form a film on the wafer. After the film formation process, a purge process is performed in which a purge gas such as nitrogen gas is supplied to the process chambers 2A-2D to remove the process gas from the process chambers 2A-2D. Furthermore, a cleaning process is performed in which a cleaning gas such as fluorine gas (F2) or hydrogen fluoride gas (HF) is supplied into the process chambers 2A-2D to clean the process chambers 2A-2D.

[0017] As shown in FIG. 1, the decontamination apparatus includes a single upstream wet treatment apparatus 5, a single combustion treatment apparatus 6, a plurality of gas introduction lines 7A, 7B, 7C, and 7D connected to a plurality of process chambers 2A, 2B, 2C, and 2D of the film formation apparatus 1, a plurality of first flow path switching devices 8A, 8B, 8C, and 8D connected to the plurality of gas introduction lines 7A, 7B, 7C, and 7D, a plurality of first gas transfer lines 9A, 9B, 9C, and 9D extending from the plurality of first flow path switching devices 8A, 8B, 8C, and 8D to the upstream wet treatment apparatus 5, a plurality of second gas transfer lines 10A, 10B, 10C, and 10D extending from the plurality of first flow path switching devices 8A, 8B, 8C, and 8D to the combustion treatment apparatus 6, and an operation control unit 15 that controls the operation of the first flow path switching devices 8A, 8B, 8C, and 8D.

[0018] The operation control unit 15 is composed of at least one computer. The operation control unit 15 includes a storage device 15a and an arithmetic unit 15b. The arithmetic unit 15b includes a CPU (Central Processing Unit) or a GPU (Graphics Processing Module) that performs calculations according to instructions included in a program stored in the storage device 15a. The storage device 15a includes a main storage device (e.g., random access memory) accessible by the arithmetic unit 15b, and an auxiliary storage device (e.g., a hard disk drive or solid state drive) that stores data and programs. However, the specific configuration of the operation control unit 15 is not limited to these examples.

[0019] The front-stage wet treatment device 5 is connected to the combustion treatment device 6 by a first connection line 21. One ends of the gas introduction lines 7A to 7D are connected to the process chambers 2A to 2D, respectively, and the other ends of the gas introduction lines 7A to 7D are connected to the first flow path switching devices 8A to 8D, respectively. The number of the gas introduction lines 7A to 7D is the same as the number of the first flow path switching devices 8A to 8D. In this embodiment, four process chambers 2A to 2D, four gas introduction lines 7A to 7D, and four first flow path switching devices 8A to 8D are provided, but these numbers are not limited to this embodiment.

[0020] One end of each of the first gas transfer lines 9A to 9D is connected to the first flow path switching devices 8A to 8D, respectively, and the other end of each of the first gas transfer lines 9A to 9D is connected to the upstream wet-treatment device 5. In the embodiment shown in FIG. 1 , the multiple first gas transfer lines 9A to 9D extend to the upstream wet-treatment device 5 without merging, but in one embodiment, the multiple first gas transfer lines 9A to 9D may merge to form at least one merging line, and this merging line may be connected to the upstream wet-treatment device 5.

[0021] One end of each of the second gas transfer lines 10A to 10D is connected to the first flow path switching devices 8A to 8D, respectively, and the other end of each of the second gas transfer lines 10A to 10D is connected to the combustion treatment device 6. In the embodiment shown in FIG. 1, the second gas transfer lines 10A to 10D extend to the combustion treatment device 6 without merging, but in one embodiment, the second gas transfer lines 10A to 10D may merge to form at least one merging line, and this merging line may be connected to the combustion treatment device 6.

[0022] The first flow path switching devices 8A-8D are configured to selectively connect the gas introduction lines 7A-7D to either the first gas transfer lines 9A-9D or the second gas transfer lines 10A-10D. These first flow path switching devices 8A-8D are configured to be able to operate independently of each other. In the embodiment shown in FIG. 1, each of the first flow path switching devices 8A-8D is configured as a three-way valve. Each three-way valve is an actuator-driven valve such as an electric valve or a solenoid valve. In one embodiment, each of the first flow path switching devices 8A-8D may be configured as a combination of multiple valves.

[0023] The operation control unit 15 is electrically connected to the first flow path switching devices 8A-8D and is configured to be able to operate the first flow path switching devices 8A-8D separately. Therefore, for example, as shown in FIG. 1, the operation control unit 15 operates the first flow path switching device 8A to connect the gas inlet line 7A to the first gas transfer line 9A and to block the connection between the gas inlet line 7A and the second gas transfer line 10A. Meanwhile, the operation control unit 15 operates the first flow path switching device 8B to block the connection between the gas inlet line 7B and the first gas transfer line 9B and to connect the gas inlet line 7B to the second gas transfer line 10B. Similarly, the operation control unit 15 can operate the first flow path switching devices 8C and 8D independently of each other and independently of the first flow path switching devices 8A and 8B.

[0024] The film formation apparatus 1 performs a film formation process, a purge process, and a cleaning process in different cycles in the multiple process chambers 2A-2D. Therefore, the process gas, purge gas, and cleaning gas are discharged from the process chambers 2A-2D in this order at different times. The purge gas is an inert gas such as nitrogen gas, but the process gas is a flammable gas and the cleaning gas is a combustion-supporting gas. Therefore, if both the process gas and the cleaning gas are sent to a single front-end wet treatment device 5, the two gases may be mixed in the front-end wet treatment device 5, which may cause an explosion.

[0025] Therefore, the operation control unit 15 controls the operation of the first flow path switching devices 8A-8D to send the process gas to the upstream wet treatment device 5, while sending the cleaning gas to the combustion treatment device 6. In other words, the cleaning gas is not sent to the upstream wet treatment device 5. For example, as shown in FIG. 1, when the process gas is discharged from the process chamber 2A, the operation control unit 15 operates the first flow path switching device 8A to connect the gas inlet line 7A to the first gas transfer line 9A and to block the connection between the gas inlet line 7A and the second gas transfer line 10A. As a result, the process gas is sent to the upstream wet treatment device 5 through the first gas transfer line 9A. In FIG. 1, the white triangle of the first flow path switching device 8A represents the open state, and the black triangle represents the closed state.

[0026] At the same time, when cleaning gas is discharged from process chamber 2B, operation control unit 15 operates first flow path switching device 8B to cut off communication between gas inlet line 7B and first gas transfer line 9B and to connect gas inlet line 7B and second gas transfer line 10B. As a result, the cleaning gas is not sent to pre-stage wet treatment device 5 but is sent to combustion type treatment device 6 through second gas transfer line 10B. In Figure 1, the white triangle of first flow path switching device 8B represents the open state, and the black triangle represents the closed state.

[0027] In this way, the operation control unit 15 can send the process gas to the pre-stage wet treatment device 5 and, on the other hand, send the cleaning gas to the combustion treatment device 6 by separately operating the first flow path switching devices 8A to 8D. Because the cleaning gas is not sent to the pre-stage wet treatment device 5, the cleaning gas and the process gas are not mixed within the pre-stage wet treatment device 5. Therefore, unlike the conventional detoxification device shown in FIG. 9, there is no need to provide as many wet treatment devices as there are process chambers. In particular, in the embodiment shown in FIG. 1, only a single pre-stage wet treatment device 5 is provided, which reduces the cost and footprint of the detoxification device.

[0028] In order to ensure that the process gas is sent to the upstream wet treatment device 5 while preventing the cleaning gas from being sent to the upstream wet treatment device 5, it is preferable that the timing at which the operation control unit 15 operates the first flow path switching devices 8A to 8D is when the purge gas is passing through the first flow path switching devices 8A to 8D.

[0029] The operation control unit 15 is electrically connected to the film formation apparatus 1 and configured to receive a process gas exhaust signal, a purge gas exhaust signal, and a cleaning gas exhaust signal emitted from the film formation apparatus 1. The film formation apparatus 1 is configured to generate a process gas exhaust signal when the process gas is exhausted from any one of the process chambers 2A to 2D and send the signal to the operation control unit 15. The process gas exhaust signal includes information identifying one of the process chambers 2A to 2D from which the process gas is exhausted.

[0030] For example, when operation control unit 15 receives a process gas discharge signal from film formation apparatus 1 indicating that process gas is being discharged from process chamber 2A, it operates first flow path switching device 8A corresponding to process chamber 2A to connect corresponding gas inlet line 7A to first gas transfer line 9A and to block connection between corresponding gas inlet line 7A and second gas transfer line 10A. By operating first flow path switching device 8A in this manner, the process gas discharged from process chamber 2A is sent to front-stage wet treatment device 5 through gas inlet line 7A, first flow path switching device 8A, and first gas transfer line 9A.

[0031] The film forming apparatus 1 is configured to generate a cleaning gas discharge signal when cleaning gas is discharged from any one of the plurality of process chambers 2A to 2D and send the signal to the operation control unit 15. The cleaning gas discharge signal includes information specifying one of the process chambers 2A to 2D from which cleaning gas is discharged.

[0032] For example, when operation control unit 15 receives a cleaning gas discharge signal from film formation apparatus 1 indicating that cleaning gas is being discharged from process chamber 2B, operation control unit 15 operates first flow path switching device 8B corresponding to process chamber 2B to block communication between corresponding gas inlet line 7B and first gas transfer line 9B and to connect corresponding gas inlet line 7B and second gas transfer line 10B. By operating first flow path switching device 8B in this manner, cleaning gas discharged from process chamber 2B is sent to combustion type treatment device 6 through gas inlet line 7B, first flow path switching device 8B, and second gas transfer line 10B.

[0033] The detoxification apparatus further includes a subsequent wet treatment device 22 provided downstream of the combustion treatment device 6, and an exhaust line 23 connected to the subsequent wet treatment device 22. The subsequent wet treatment device 22 is connected to the combustion treatment device 6 by a second connection line 24. According to the detoxification apparatus having such a configuration, the process gas is treated in turn by the previous wet treatment device 5, the combustion treatment device 6, and the subsequent wet treatment device 22, and the cleaning gas is treated in turn by the combustion treatment device 6 and the subsequent wet treatment device 22.

[0034] When cleaning gases containing fluorine gas (F2), hydrogen fluoride gas (HF), or nitrogen trifluoride gas (NF3) are subjected to wet treatment, acidic water that is corrosive to metals is produced. According to the embodiment shown in Figure 1, the cleaning gas bypasses the pre-stage wet treatment device 5, thereby preventing corrosion of the first connection line 21 connecting the pre-stage wet treatment device 5 and the combustion treatment device 6.

[0035] Furthermore, since the cleaning gas bypasses the front-stage wet treatment device 5, the cleaning gas can be introduced to the combustion treatment device 6 while maintaining the cleaning gas in a dry state and avoiding a drop in temperature of the cleaning gas. As a result, the combustion treatment device 6 can combustibly treat the cleaning gas with high efficiency. In particular, the combustion treatment device 6 can treat cleaning gases containing difficult-to-decompose gases such as chlorine trifluoride gas (ClF3) with high efficiency.

[0036] The mixture of the process gas and the cleaning gas may form solidified by-products as its temperature drops. Examples of by-products include ammonium fluoride and ammonium silicofluoride. Such by-products are likely to be formed upstream of the combustion treatment device 6, where the temperature is lowest. The by-products may clog the gas flow path, and the formation of by-products should be prevented as much as possible. According to the above embodiment, ammonia (NH3) contained in the process gas is removed in the upstream wet treatment device 5, and the cleaning gas bypasses the upstream wet treatment device 5, so the above-mentioned by-products are not formed. In addition, because ammonia is removed in the upstream wet treatment device 5, NOx is released in the subsequent combustion treatment device 6. X The occurrence of is suppressed.

[0037] As shown in Fig. 1, the abatement device includes a pressure sensor 30 connected to at least one of the plurality of gas introduction lines 7A to 7D. In the embodiment shown in Fig. 1, the pressure sensor 30 is connected to the gas introduction line 7A. The pressure sensor 30 is electrically connected to the operation control unit 15, and the measured value of the pressure in the gas introduction line 7A is sent from the pressure sensor 30 to the operation control unit 15. A plurality of pressure sensors 30 may be connected to the plurality of gas introduction lines 7A to 7D, respectively.

[0038] By-products composed of components of the process gas may accumulate in the upstream wet-treatment device 5. As the accumulation of such by-products progresses, it may clog the internal flow paths of the upstream wet-treatment device 5. Therefore, the operation control unit 15 is configured to detect clogging of the upstream wet-treatment device 5 based on the pressure measurement value sent from the pressure sensor 30. Specifically, when the first flow path switching device 8A connects the gas inlet line 7A and the first gas transfer line 9A, and the measured pressure in the gas inlet line 7A exceeds a threshold value, and when the first flow path switching device 8A connects the gas inlet line 7A and the second gas transfer line 10A, and the measured pressure in the gas inlet line 7A is below the threshold value, the operation control unit 15 determines that the upstream wet-treatment device 5 is clogged.

[0039] On the other hand, when the first flow path switching device 8A connects the gas inlet line 7A and the first gas transfer line 9A and the measured pressure value in the gas inlet line 7A is below the threshold value, the operation control unit 15 determines that both the upstream wet treatment device 5 and the combustion treatment device 6 are not blocked.

[0040] 2, the operation control unit 15 operates all first flow path switching devices 8A-8D to block communication between all gas introduction lines 7A-7D and all first gas transfer lines 9A-9D, and to connect all gas introduction lines 7A-7D to all second gas transfer lines 10A-10D. By this operation, the process gas is not sent to the pre-wet treatment device 5 (bypassing the pre-wet treatment device 5) but is sent to the combustion treatment device 6. Although the process gas and the cleaning gas may be sent to the combustion treatment device 6 simultaneously, the process gas, which is a flammable gas, and the cleaning gas, which is a combustion-supporting gas, are mixed in the combustion treatment device 6 to form a mixed gas, and this mixed gas is quickly combusted, so that an unexpected explosion does not occur.

[0041] 3 is a cross-sectional view showing one embodiment of the detailed structures of the upstream wet treatment device 5, the combustion treatment device 6, and the downstream wet treatment device 22. The upstream wet treatment device 5 includes a water storage chamber 41, a water supply nozzle 42 that supplies water to the water storage chamber 41, a wetted wall section 44 from which water drips from the water storage chamber 41 to form a wetted wall, a water ejector 46 that sprays water onto the process gas that has passed through the wetted wall section 44, and a gas-liquid separation tank 48 that separates the water from the gas. The upstream wet treatment device 5 is connected to the combustion treatment device 6 by a first connection line 21, and the combustion treatment device 6 is connected to the downstream wet treatment device 22 by the gas-liquid separation tank 48 and a second connection line 24.

[0042] The combustion type treatment device 6 includes a combustion chamber 50 connected to the first connection line 21, a burner 51 that generates a flame in the combustion chamber 50, and the gas-liquid separation tank 48 that separates water and gas. The gas-liquid separation tank 48 is shared with the previous-stage wet treatment device 5, and the water in the gas-liquid separation tank 48 circulates as shown by the arrows. A reduced flow path 48a that constitutes part of the gas-liquid separation tank 48 is filled with water, and the reduced flow path 48a located between the previous-stage wet treatment device 5 and the combustion type treatment device 6 is sealed with water.

[0043] The downstream wet treatment device 22 includes a water treatment chamber 60 connected to a second connection line 24, and water spray nozzles 61, 62 arranged in the water treatment chamber 60. The second connection line 24 is connected to a gas-liquid separation tank 48 of the combustion treatment device 6.

[0044] The process gas and cleaning gas are treated as follows: The process gas is first treated by the front-stage wet treatment device 5. The process gas flows into the water reservoir 41 and then flows downward through the wetted wall portion 44. The water ejector 46 sprays water onto the process gas flowing through the flow path 47, thereby removing water-soluble components contained in the process gas. For example, the Si component contained in dichlorosilane (DCS) dissolves in water and is removed, thereby reducing the treatment load of the subsequent combustion treatment device 6. Ammonia (NH3) in the process gas is also removed by the water.

[0045] The water sprayed from the water ejector 46 and the process gas are separated in a gas-liquid separation tank 48, the water is stored in the gas-liquid separation tank 48, and the process gas flows through the first connection line 21 into the combustion chamber 50 of the combustion type treatment device 6. The water in the gas-liquid separation tank 48 contains ammonia (NH3) in the process gas, and becomes alkaline water. The alkaline water does not corrode the gas-liquid separation tank 48, which is made of metal, and therefore does not require coating to prevent corrosion.

[0046] The process gas treated by the pre-wet treatment device 5 is then treated by the combustion treatment device 6. The cleaning gas is not treated by the pre-wet treatment device 5, but is treated by the combustion treatment device 6. A burner 51 forms a flame in the combustion chamber 50, and the process gas, which is a flammable gas, and the cleaning gas, which is a combustion-supporting gas, are combusted by the flame. A wetted wall made of a water film is formed on the inner surface of the combustion chamber 50 to protect the combustion chamber 50.

[0047] The combustion-treated process gas and / or cleaning gas (hereinafter referred to as treated gas) flows down through the combustion chamber 50, passes through the gas-liquid separation tank 48, and is sent to the subsequent wet treatment device 22 through the second connection line 24. The subsequent wet treatment device 22 further wet-treats the treated gas by spraying water onto the treated gas from water spray nozzles 61, 62. The treated gas that has been wet-treated by the subsequent wet treatment device 22 is discharged from the abatement device through the exhaust line 23. In this way, the process gas is treated by the previous wet treatment device 5, the combustion treatment device 6, and the subsequent wet treatment device 22, and the cleaning gas is treated by the combustion treatment device 6 and the subsequent wet treatment device 22.

[0048] In the embodiment shown in FIG. 3 , a common gas-liquid separation tank 48 is used for the upstream wet treatment device 5 and the combustion treatment device 6. The reduced flow path 48a located between the upstream wet treatment device 5 and the combustion treatment device 6 is always filled with water, so the process gas does not flow from the upstream wet treatment device 5 to the combustion treatment device 6 through the gas-liquid separation tank 48. However, the process gas may fall into the water in the gas-liquid separation tank 48 along with the water sprayed from the water ejector 46, generating bubbles in the water. The bubbles of the process gas may be carried by the water circulating in the gas-liquid separation tank 48, pass through the reduced flow path 48a, and reach the downstream side of the combustion treatment device 6. Although such a process gas shortcut may occur, the bypassed process gas is treated by the downstream wet treatment device 22, so the process gas is not discharged untreated.

[0049] On the other hand, since the cleaning gas does not flow into the front-stage wet treatment device 5, the above-mentioned shortcut through the gas-liquid separation tank 48 does not occur in principle. In other words, the cleaning gas always passes through the combustion treatment device 6 and is treated by the combustion treatment device 6. Furthermore, the cleaning gas is treated by the rear-stage wet treatment device 22.

[0050] Next, another embodiment of the abatement device will be described with reference to Fig. 4. The configuration and operation of this embodiment, which will not be specifically described, are the same as those of the embodiment described with reference to Figs. 1 to 3, and therefore, redundant description will be omitted.

[0051] As shown in FIG. 4, the abatement system further includes a plurality of second flow path switching devices 71A, 71B, 71C, and 71D attached to the plurality of second gas transfer lines 10A, 10B, 10C, and 10D, respectively, and a plurality of bypass lines 73A, 73B, 73C, and 73D connected to the second flow path switching devices 71A, 71B, 71C, and 71D, respectively. The bypass lines 73A-73D are connected to the exhaust line 23. The second flow path switching devices 71A-71D are electrically connected to the operation control unit 15, which is configured to be able to independently operate the second flow path switching devices 71A-71D. In the embodiment shown in FIG. 4, each of the second flow path switching devices 71A-71D is configured as a three-way valve. Each three-way valve is an actuator-driven valve such as an electric valve or a solenoid valve. In one embodiment, each of the second flow path switching devices 71A-71D may be configured as a combination of multiple valves.

[0052] The second flow path switching devices 71A-71D are configured to selectively direct the cleaning gas flowing through the second gas transfer lines 10A-10D to either the combustion treatment device 6 or the bypass lines 73A-73D. That is, the second flow path switching devices 71A-71D are configured to be able to switch between a normal path and an emergency path. The normal path is a path that connects the first flow path switching devices 8A-8D to the combustion treatment device 6 and blocks the communication between the second gas transfer lines 10A-10D and the bypass lines 73A-73D. The emergency path is a path that connects the second gas transfer lines 10A-10D to the bypass lines 73A-73D and blocks the communication between the first flow path switching devices 8A-8D and the combustion treatment device 6.

[0053] In FIG. 4, the white triangles of the second flow path switching devices 71A-71D represent an open state, and the black triangles represent a closed state. During normal operation, as shown in FIG. 4, the second flow path switching devices 71A-71D are in the normal path state. That is, the first flow path switching devices 8A-8D communicate with the combustion treatment device 6 through the second flow path switching devices 71A-71D, and the second gas transfer lines 10A-10D communicate with the bypass lines 73A-73D through the second flow path switching devices 71A-71D. Therefore, the cleaning gas can be sent to the combustion treatment device 6 through the multiple gas introduction lines 7A-7D, the first flow path switching devices 8A-8D, the second gas transfer lines 10A-10D, and the second flow path switching devices 71A-71D.

[0054] On the other hand, when a serious failure requiring the detoxification system to be shut down occurs, as shown in FIG. 5, the operation control unit 15 operates the first flow path switching devices 8A-8D to connect the gas inlet lines 7A-7D to the second gas transfer lines 10A-10D and to cut off the connection between the gas inlet lines 7A-7D and the first gas transfer lines 9A-9D. Furthermore, the operation control unit 15 operates the second flow path switching devices 71A-71D to switch from the normal path to the emergency path. The second gas transfer lines 10A-10D and the bypass lines 73A-73D are connected through the second flow path switching devices 71A-71D, and the first flow path switching devices 8A-8D (and the gas inlet lines 7A-7D) are cut off from the combustion treatment device 6 by the second flow path switching devices 71A-71D. Therefore, the process gas and cleaning gas bypass both the upstream wet treatment device 5 and the combustion treatment device 6 and are sent to the exhaust line 23. More specifically, the process gas and cleaning gas are sent to exhaust line 23 through gas introduction lines 7A to 7D, first flow path switching devices 8A to 8D, second gas transfer lines 10A to 10D, second flow path switching devices 71A to 71D, and bypass lines 73A to 73D.

[0055] An example of a serious malfunction that requires the detoxification device to be shut down is blockage of the combustion treatment device 6. The operation control unit 15 can detect blockage of the combustion treatment device 6 based on the measured value of the pressure in the gas introduction line 7A sent from the pressure sensor 30. More specifically, when the first flow path switching device 8A connects the gas introduction line 7A and the second gas transfer line 10A and the measured value of the pressure in the gas introduction line 7A exceeds the threshold value, the operation control unit 15 determines that the combustion treatment device 6 is blockage.

[0056] 5, operation control unit 15 operates all first flow path switching devices 8A-8D to block communication between all gas introduction lines 7A-7D and all first gas transfer lines 9A-9D and to connect all gas introduction lines 7A-7D to all second gas transfer lines 10A-10D. Furthermore, operation control unit 15 operates all second flow path switching devices 71A-71D to block communication between all first flow path switching devices 8A-8D and combustion treatment device 6 and to connect all second gas transfer lines 10A-10D to all bypass lines 73A-73D.

[0057] By this operation, the process gas and cleaning gas are not sent to both the pre-stage wet treatment device 5 and the combustion treatment device 6 (bypassing the pre-stage wet treatment device 5 and the combustion treatment device 6), but are sent to the exhaust line 23. As a result, damage caused by a rise in pressure inside the abatement device can be prevented.

[0058] If a malfunction occurs in the flame inside the combustion treatment device 6 due to a malfunction of the burner 51 or the like, a combustion malfunction signal is sent to the operation control unit 15 from a combustion detector (not shown). When the operation control unit 15 receives the combustion malfunction signal (i.e., if a malfunction occurs in the flame inside the combustion treatment device 6), the operation control unit 15 maintains the normal path of the second flow path switching devices 71A-71D. The flame malfunction is classified as a minor malfunction, and the extinguished combustion treatment device 6 simply functions as a flow path. Therefore, the process gas treated in the upstream wet treatment device 5 and the cleaning gas transferred through the second gas transfer lines 10A-10D simply pass through the combustion treatment device 6.

[0059] In one embodiment, as shown in Fig. 6, the second gas transfer line 10 may be configured as a collection line having one end connected to the first flow path switching devices 8A-8D and the other end connected to the combustion type treatment device 6. In this case, one second flow path switching device 71 may be attached to the second gas transfer line 10, and one bypass line 73 may be connected to the second flow path switching device 71. Furthermore, as shown in Fig. 7, a plurality of second flow path switching devices 71A, 71B may be attached to the second gas transfer lines 10A, 10B, the number of which is less than the number of the first flow path switching devices 8A-8D.

[0060] 1 to 7, only a single pre-wet treatment device 5 is provided. However, in one embodiment, a number of pre-wet treatment devices 5, which is less than the number of process chambers 2A-2D, may be provided. For example, in the example shown in FIG. 8, gas introduction line 7A is composed of a collective line connected to multiple process chambers 2A and 2B that perform film formation and cleaning processes in the same cycle, and gas introduction line 7B is composed of a collective line connected to multiple process chambers 2C and 2D that perform film formation and cleaning processes in the same cycle. In this case, multiple pre-wet treatment devices 5 corresponding to these gas introduction lines 7A and 7B may be provided. In this embodiment, the number of pre-wet treatment devices 5 is also less than the number of process chambers 2A-2D, thereby achieving a low-cost, low-footprint decontamination device.

[0061] The above-described embodiments have been described for the purpose of enabling a person of ordinary skill in the art to practice the present invention. Various modifications of the above-described embodiments would be obvious to a person skilled in the art, and the technical concept of the present invention may be applied to other embodiments. Therefore, the present invention is not limited to the described embodiments, but is to be interpreted in the broadest scope in accordance with the technical concept defined by the claims. [Explanation of symbols]

[0062] 1 Film deposition equipment 2A, 2B, 2C, 2D process chambers 5. Pre-stage wet treatment equipment 6. Combustion treatment equipment 7A, 7B, 7C, 7D Gas introduction lines 8A, 8B, 8C, 8D First flow path switching device 9A, 9B, 9C, 9D First gas transfer line 10A, 10B, 10C, 10D Second gas transfer line 15 Operation control section 21 First connecting line 22 Post-stage wet treatment device 23 Exhaust line 24 Second connecting line 30 Pressure Sensor 41 Water storage chamber 42 Water supply nozzle 44 Wet wall 46 Water ejector 48 Gas-liquid separation tank 48a Reducing channel 50 Combustion chamber 51 Burner 60 Water Treatment Room 61,62 Water spray nozzle 71A, 71B, 71C, 71D Second flow path switching device 73A, 73B, 73C, 73D Bypass lines

Claims

1. An apparatus for abatement of exhaust gases including process gases and cleaning gases, comprising: at least one wet pre-treatment unit; a combustion treatment device; a plurality of gas introduction lines connected to a plurality of process chambers of a film forming apparatus; a plurality of first flow path switching devices respectively connected to the plurality of gas introduction lines; a first gas transfer line extending from the plurality of first flow path switching devices to the front-stage wet treatment device; a second gas transfer line extending from the plurality of first flow path switching devices to the combustion type treatment device; at least one second flow path switching device attached to the second gas transfer line; a bypass line connected to the second flow path switching device; an operation control unit configured to control operations of the plurality of first flow path switching devices and the second flow path switching device to send the process gas to the front-stage wet treatment device and send the cleaning gas to the combustion treatment device; the operation control unit is configured, when detecting blockage of the combustion type treatment device, to operate the plurality of first flow path switching devices to connect the plurality of gas introduction lines to the second gas transfer line and to cut off communication between the plurality of gas introduction lines and the first gas transfer line, and to operate the second flow path switching device to connect the second gas transfer line to the bypass line and to cut off communication between the plurality of first flow path switching devices and the combustion type treatment device, The abatement system, wherein the number of the at least one wet pretreatment device is less than the number of the process chambers.

2. The abatement device is a downstream wet treatment device provided downstream of the combustion treatment device; Further, an exhaust line connected to the downstream wet treatment device is provided, The abatement apparatus of claim 1 , wherein the bypass line is connected to the exhaust line.

3. 3. The abatement apparatus according to claim 1, wherein the wet pre-treatment device is a single wet pre-treatment device.

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