Sensors and Sensor Systems

Abstract

To provide a sensor and a sensor system that can improve detection accuracy.SOLUTION: According to an embodiment, a sensor includes a housing and a sensor unit. The housing includes a first housing member. The first housing member includes an opening. The sensor unit is provided inside the housing. The sensor unit includes a sensor member including holes, and a sensor element. A first space between the sensor element and the sensor member is connected with the other, second space inside the housing. A gas to be detected can flow into the first space through the opening and the holes.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION Embodiments of the present invention relate to sensors and sensor systems. [Background technology]

[0002] In gas sensors and the like, it is desirable to improve the detection accuracy. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-121910 Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION Embodiments of the present invention provide sensors and sensor systems that allow for improved detection accuracy. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes a housing and a sensor unit. The housing includes a first housing member. The first housing member includes an opening. The sensor unit is provided within the housing. The sensor unit includes a sensor member including a hole and a sensor element. A first space between the sensor element and the sensor member is connected to another second space within the housing. A detection target gas can flow into the first space through the opening and the hole. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. [Figure 3]FIG. 3 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating a part of the sensor according to the first embodiment. [Figure 6] FIG. 6 is a graph illustrating the characteristics of the sensor. [Figure 7] FIG. 7 is a graph illustrating the characteristics of the sensor. [Figure 8] FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. FIG. 2 is a schematic cross-sectional view illustrating a part of the sensor according to the first embodiment. Fig. 2 is an enlarged view of a part of Fig. 1. As shown in Fig. 1 and Fig. 2, a sensor 110 according to the embodiment includes a housing 40 and a sensor unit 10.

[0009] The housing 40 includes a first housing member 41. The first housing member 41 includes an opening 41h.

[0010] The sensor unit 10 is provided in a housing 40. The sensor unit 10 includes a sensor element 11 and a sensor member 12. The sensor member 12 includes a hole 12h. The sensor member is, for example, a lid portion.

[0011] The first space SP1 between the sensor element 11 and the sensor member 12 is connected to the second space SP2. A first gap G1 is provided between the sensor element 11 and the sensor member 12. The first space SP1 includes the first gap G1. The second space SP2 is another space within the housing 40. For example, the space within the housing 40 includes the first space SP1 and the second space SP2. The space within the housing 40 may further include another space. The detection target gas 80 can flow into the first space SP1 through the opening 41h and the hole 12h.

[0012] The detection target gas 80 that has flowed into the first space SP1 is detected by the sensor element 11. In this embodiment, the first space SP1 is connected to the second space SP2, so that changes in the state of the first space SP1 are reduced by the second space SP2.

[0013] For example, the humidity in the first space SP1 may change due to the influence of the external space through the opening 41h and the hole 12h. Compared to the first space SP1, the second space SP2 is less susceptible to the influence of outside air. Even if the humidity in the first space SP1 increases due to the influence of outside air, it is easier to maintain a low humidity in the second space SP2. In the embodiment, the first space SP1 is connected to the second space SP2. This reduces the change in humidity in the first space SP1 compared to the second space SP2.

[0014] The detection characteristics of the sensor element 11 are affected by the state (e.g., humidity) of the first space SP1. In the embodiment, the influence of substances other than the target gas 80 is reduced in the first space SP1. For example, the influence of humidity is reduced in the first space SP1. According to the embodiment, a sensor capable of improving the detection accuracy of the target gas 80 can be provided.

[0015] In the embodiment, the volume of the second space SP2 is preferably equal to or larger than the volume of the first space SP1, so that the change in state of the first space SP1 is more effectively alleviated by the second space SP2.

[0016] As shown in FIGS. 1 and 2, the sensor 110 may further include a gas-permeable film member 31. The film member 31 includes an inner region 31i and an outer region 31o. The outer region 31o is a region surrounding the inner region 31i. The boundary between these regions may be clear or unclear. The outer region 31o is fixed to the first housing member 41. The sensor member 12 is located between the sensor element 11 and the inner region 31i. The detection target gas 80 can flow into the first space SP1 through the opening 41h, the film member 31, and the hole 12h.

[0017] For example, water (liquid) is prevented from entering the first space SP1 by providing the film member 31. The film member 31 can prevent liquid from passing through the opening 41h into the first space SP1. For example, the first space SP1 is substantially waterproof.

[0018] The film member 31 preferably contains, for example, a fluororesin. For example, the film member 31 may contain polytetrafluoroethylene. This more effectively prevents water from entering.

[0019] 1, the outer region 31o may contact the first housing member 41. The inner region 31i may contact the sensor member 12.

[0020] 2, the sensor unit 10 may further include an element substrate 15 and a support unit 13. The sensor element 11 is located between the element substrate 15 and the sensor member 12. The support unit 13 is fixed to the element substrate 15. The support unit 13 is located between the element substrate 15 and the sensor member 12. The support unit 13 supports the sensor member 12.

[0021] The direction from the sensor element 11 to the sensor member 12 is defined as the first direction D1. The first direction D1 is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0022] The support portion 13 is located around the sensor element 11 in a plane (XY plane) that intersects with a first direction D1 from the sensor element 11 to the sensor member 12. The element substrate 15, the support portion 13, the sensor member 12, and the film member 31 are located around a first space SP1. For example, the first space SP1 is surrounded by the element substrate 15, the support portion 13, the sensor member 12, and the film member 31. The direction from the sensor element 11 to the support portion 13 is along a second direction D2. The second direction D2 intersects with the first direction D1. The second direction D2 may be, for example, the X-axis direction or the Y-axis direction.

[0023] 2, for example, the sensor member 12 may be fixed to the support portion 13 via an electrode 13e and a sensor fixing portion 13c provided on the support portion 13. The sensor fixing portion 13c is, for example, a conductive paste.

[0024] 2, there is an area where the sensor fixing portion 13c is not provided. This area becomes an opening (sensor opening 10h) of the sensor unit 10. The sensor opening 10h connects the first space SP1 to the second space SP2. The sensor opening 10h becomes a path between the first space SP1 and the second space SP2.

[0025] In this manner, the sensor unit 10 may include a sensor fixing portion 13c. The sensor fixing portion 13c fixes a part of the sensor member 12 to a part of the support unit 13. The sensor fixing portion 13c is not provided between another part of the sensor member 12 and another part of the support unit 13. The first space SP1 is connected to the second space SP2 through the space between the other part of the sensor member 12 and the other part of the support unit 13.

[0026] In the embodiment, the area of ​​the path between the first space SP1 and the second space SP2 (the cross-sectional area of ​​the sensor opening 10h) is preferably, for example, 1 / 10 to 10 times the area (cross-sectional area) of the hole 12h. For example, the state of the first space SP1 (e.g., humidity) tends to approach the state of the second space SP2. For example, the influence of humidity is reduced, and highly accurate detection is possible.

[0027] As shown in FIG. 1 , the housing 40 includes a second housing member 42 and a third housing member 43. The sensor unit 10 is located between the third housing member 43 and the first housing member 41. The second housing member 42 is located around the sensor unit 10 in a plane (XY plane) intersecting a direction from the third housing member 43 to the first housing member 41 (e.g., a first direction D1). The second housing member 42 is connected to the first housing member 41 and the third housing member 43. The first housing member 41, the second housing member 42, and the third housing member 43 are located around a second space SP2. For example, the second space SP2 is surrounded by the first housing member 41, the second housing member 42, and the third housing member 43. The second space SP2 is substantially waterproof.

[0028] 2, the housing 40 may further include a fourth housing member 44. The outer region 31o is located between the fourth housing member 44 and the first housing member 41. The outer region 31o is fixed by the fourth housing member 44 and the first housing member 41. For example, a fixing member 47 may be provided. The fixing member 47 fixes the fourth housing member 44 to the first housing member 41. The fixing member 47 is, for example, a screw.

[0029] As shown in FIG. 2, the sensor 110 may further include a first elastic member 46a. The first elastic member 46a is located between the outer region 31o and the first housing member 41. By providing the first elastic member 46a, the outer region 31o is more likely to come into close contact with the first housing member 41. The first elastic member 46a is, for example, annular. The first elastic member 46a may be, for example, an O-ring. For example, the first elastic member 46a is made of resin.

[0030] As shown in FIG. 2, the sensor 110 may further include a second elastic member 46b. The second elastic member 46b is located between the fourth housing member 44 and the outer region 31o. The second elastic member 46b may be, for example, an annular member. The second elastic member 46b may be, for example, an O-ring. For example, the second elastic member 46b is made of resin.

[0031] There are cases where the adhesiveness of the film member 31 is low. As described above, the film member 31 may be mechanically fixed by the fourth housing member 44, the first housing member 41, the first elastic member 46a, the second elastic member 46b, the fixing member 47, and the like. Even when the adhesiveness of the film member 31 is low, the film member 31 can be fixed with high adhesion. It is possible to prevent liquid from entering the sensor unit 10 from the outside. It is possible to enable the sensor unit 10 to operate stably. It is possible to maintain high detection accuracy.

[0032] As shown in FIGS. 1 and 2, the sensor unit 10 may include a first mounting substrate 16a. As shown in FIG. 2, the element substrate 15 is fixed to the first mounting substrate 16a. The first mounting substrate 16a may include various wiring layers. The wiring included in the element substrate 15 may be electrically connected to the wiring layers included in the first mounting substrate 16a by connecting members 17a (e.g., solder). The first mounting substrate 16a is, for example, a sensor substrate. The sensor substrate is provided with a circuit that can output sensor data in response to a request from, for example, a control substrate. The control substrate is, for example, a microcomputer. The sensor substrate may be provided with, for example, an integrated circuit (IC). The IC may include, for example, an analog-to-digital converter 75a, a capacitance-to-digital converter 75b, or a DC / DC converter 75c.

[0033] 1, the sensor unit 10 may further include a second mounting substrate 16b. A first mounting substrate 16a is provided between the second mounting substrate 16b and the element substrate 15. A control circuit may be provided between the second mounting substrate 16b and the first mounting substrate 16a. The control circuit may include, for example, at least one of a microcomputer and a wireless communication circuit. The second mounting substrate 16b may be provided with, for example, a circuit capable of controlling an IC provided on the first mounting substrate 16a.

[0034] As shown in FIG. 1, the first mounting board 16a may be fixed to the first housing member 41 by a structure .

[0035] FIG. 3 is a schematic plan view illustrating a part of the sensor according to the first embodiment. FIG. 3 illustrates the sensor unit 10. The sensor member 12 is omitted in FIG. 3. As shown in FIG. 3, the sensor grip 13c may be, for example, a conductive paste. In this example, there is an area where the sensor grip 13c is not provided. This area becomes the sensor opening 10h. The first space SP1 is connected to the outside (second space SP2) through the sensor opening 10h. In the example of FIG. 3, the sensor grip 13c has a single continuous pattern shape.

[0036] FIG. 4 is a schematic plan view illustrating a part of the sensor according to the first embodiment. FIG. 4 illustrates the sensor unit 10 in the sensor 110a according to the embodiment. The sensor member 12 is omitted in FIG. 4. As shown in FIG. 4, the sensor 110a has a plurality of sensor grips 13c (e.g., conductive paste) provided therein. The areas between the plurality of sensor grips 13c form sensor openings 10h. A plurality of sensor openings 10h may be provided. The first space SP1 is connected to the outside (second space SP2) via the plurality of sensor openings 10h. The plurality of sensor grips 13c may be island-shaped. In the embodiment, the number and pattern shape of the sensor grips 13c are arbitrary.

[0037] FIG. 5 is a schematic plan view illustrating a part of the sensor according to the first embodiment. FIG. 5 illustrates the sensor unit 10 in a sensor 110b according to the embodiment. The sensor member 12 is omitted in FIG. 5. As shown in FIG. 5, a single continuous sensor grip 13c is provided in the sensor 110b. In the XY plane, the sensor grip 13c surrounds the first space SP1. In this example, the sensor grip 13c is porous. The sensor grip 13c may be, for example, a porous conductive paste. In the sensor 110b, a hole provided in the sensor grip 13c functions as the sensor opening 10h.

[0038] Examples of sensor characteristics will be described below. FIG. 6 is a graph illustrating the characteristics of the sensor. 6 illustrates the characteristics of a reference example in which the first space SP1 is not connected to the second space SP2. The horizontal axis of FIG. 6 represents the humidity H1 (% RH) of the first space SP1. The vertical axis represents the noise N1 (relative value) of the detection result of the sensor element 11. As shown in FIG. 4, as the humidity H1 increases, the noise N1 increases significantly. In the reference example, when the humidity of the first space SP1 increases due to the influence of the outside air, the S / N ratio in the detection of the target gas 80 decreases.

[0039] FIG. 7 is a graph illustrating the characteristics of the sensor. FIG. 7 illustrates the characteristics when the first space SP1 is connected to the second space SP2. In the example of FIG. 7, the humidity in the outside air (the space outside the housing 40) is 90% RH. The humidity in the second space SP2 is 10% RH. The horizontal axis of FIG. 7 represents the humidity H1 (% RH) in the first space SP1. The vertical axis represents the S / N ratio of the detection result of the sensor element 11. The S / N ratio is normalized to a value of 1 when the humidity H1 is 90% RH.

[0040] For example, the humidity H1 of the first space SP1 is determined by the size of the sensor opening 10h (or the ratio of the volumes between the first space SP1 and the second space SP2, etc.).

[0041] For example, if the sensor opening 10h is significantly small, the humidity in the first space SP1 will be approximately the same as the humidity of the outside air (90% RH). For example, if the volume of the second space SP2 is significantly smaller than the volume of the first space SP1, the humidity in the first space SP1 will be approximately the same as the humidity of the outside air (90% RH). If the humidity H1 in the first space SP1 is high, at approximately 90% RH, the S / N ratio will be low.

[0042] On the other hand, for example, if the sensor opening 10h is significantly large, the humidity H1 in the first space SP1 will be substantially 10% RH due to the influence of the second space SP2. For example, if the volume of the second space SP2 is significantly larger than the volume of the first space SP1, the humidity H1 in the first space SP1 will be substantially 10% RH due to the influence of the second space SP2. In such a case, the target gas 80 contained in the first space SP1 flows out into the second space SP2, reducing the concentration of the target gas 80 in the first space SP1. For example, the rate of decrease in the concentration of the target gas 80 in the first space SP1 is linked to the rate of decrease in the humidity in the first space SP1 relative to the humidity of the external space. Therefore, when the humidity H1 in the first space SP1 is approximately 10%, the S / N ratio is low. An example of a significantly large sensor opening 10h includes a case where the sensor opening 10h is larger than the opening 41h of the first housing member 41.

[0043] For example, when the sensor opening 10h is an appropriate size, the humidity H1 in the first space SP1 decreases. The low humidity H1 reduces the noise N1. When the sensor opening 10h is an appropriate size, the concentration of the target gas 80 in the first space SP1 does not become excessively low. In this case, a high S / N ratio is obtained. In this example, the S / N ratio peaks when the humidity H1 is approximately 50% RH.

[0044] When the humidity H1 becomes lower than approximately 50% RH, the concentration of the detection target gas 80 in the first space SP1 decreases, resulting in a decrease in the S / N ratio.

[0045] As described above, the second space SP2 maintains the humidity H1 in the first space SP1 low. Meanwhile, the second space SP2 reduces the concentration of the target gas 80 in the first space SP1. The S / N ratio is determined by the influence of both the reduction in humidity in the first space SP1 and the reduction in the concentration of the target gas 80 in the first space SP1.

[0046] In the embodiment, a condition is adopted in which the effect of reducing the concentration of the detection target gas 80 in the first space SP1 is small, thereby obtaining a high S / N ratio.

[0047] For example, the area (cross-sectional area) of the sensor opening 10h is preferably 1 / 10 to 10 times the area (cross-sectional area) of the hole 12h. For example, a low humidity H1 and a high concentration of the target gas 80 in the first space SP1 can be maintained. Highly accurate detection with little noise is possible.

[0048] For example, the first space SP1 is connected to the external space through the opening 41h of the first housing member 41 and the hole 12h of the sensor member 12. The second space SP2 is connected to the first space SP1 through the opening of the sensor unit 10 (the sensor opening 10h or the porous sensor fixing portion 13c).

[0049] The second space SP2, which is larger than the first space SP1, is connected to the first space SP1 by the opening of the sensor unit 10 as described above.

[0050] In the embodiment, for example, the sensor element 11 may include a capacitive MEMS gas sensor. The sensor element 11 may include a thermal conduction MEMS gas sensor. The sensor element 11 may include a catalytic combustion MEMS gas sensor. The sensor element 11 may include an oxide semiconductor MEMS gas sensor. The sensor element 11 may include at least one of the above gas sensors.

[0051] FIG. 8 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 8, the sensor 111 according to the embodiment includes a dehumidifying unit 51. The remaining configuration of the sensor 111 may be the same as that of the sensor 110. The dehumidifying unit 51 can dehumidify the space inside the housing 40 (for example, the second space SP2). For example, the influence of humidity is suppressed, and the gas to be detected can be detected with higher accuracy.

[0052] A porous member 32 may be provided between the external space and the dehumidifying unit 51. This can prevent liquid from adhering to the dehumidifying unit 51. The porous member 32 may contain, for example, polytetrafluoroethylene. The porous member 32 may be fixed to the housing 40 by any method.

[0053] In this example, the sensor 111 includes a battery 53. The battery 53 is capable of supplying power to the sensor unit 10.

[0054] In this example, a communication unit 54 is provided. The communication unit 54 is capable of transmitting a signal based on a signal obtained from the sensor element 11 to the outside.

[0055] FIG. 9 is a schematic plan view illustrating the sensor according to the first embodiment. 9, a sensor 112 according to the embodiment may be provided with a plurality of sensor units 10. The remaining configuration of the sensor 112 may be the same as that of the sensor 110, the sensor 110a, or the sensor 111. At least two of the plurality of sensor units 10 may have different detection targets. For example, one of the plurality of sensor units 10 may detect hydrogen, and another of the plurality of sensor units 10 may detect carbon dioxide.

[0056] (Second embodiment) The second embodiment relates to a sensor system. As shown in Fig. 8, a sensor system 210 according to the embodiment includes a sensor according to the embodiment (such as the sensor 110, the sensor 110a, or the sensor 111) and a communication unit 54. The sensor may be controlled via the communication unit 54.

[0057] The embodiment may include the following configurations (e.g., technical solutions). (Configuration 1) a housing including a first housing member including an opening; a sensor unit provided in the housing, the sensor unit including a sensor member including a hole and a sensor element, a first space between the sensor element and the sensor member being connected to another second space in the housing, and a detection target gas being able to flow into the first space through the opening and the hole; A sensor comprising:

[0058] (Configuration 2) 2. The sensor of claim 1, wherein the volume of the second space is greater than or equal to the volume of the first space.

[0059] (Configuration 3) Further comprising a gas-permeable film member; the film member includes an inner region and an outer region surrounding the inner region; the outer region is fixed to the first housing member; the sensor member is between the sensor element and the inner region; 3. The sensor according to claim 1, wherein the detection target gas is capable of flowing into the first space through the opening, the film member, and the hole.

[0060] (Configuration 4) the outer region is in contact with the first housing member, 4. The sensor of claim 3, wherein the inner region is in contact with the sensor member.

[0061] (Configuration 5) 5. The sensor according to claim 3, wherein the film member includes a fluororesin.

[0062] (Configuration 6) 5. The sensor of claim 3 or 4, wherein the film member comprises polytetrafluoroethylene.

[0063] (Configuration 7) the sensor unit further includes an element substrate and a support unit; the sensor element is located between the element substrate and the sensor member, the support portion is fixed to the element substrate, the support portion is located between the element substrate and the sensor member, 7. The sensor according to any one of configurations 3 to 6, wherein the support portion supports the sensor member.

[0064] (Configuration 8) the support portion is located around the sensor element in a plane intersecting a direction from the sensor element to the sensor member; 8. The sensor of claim 7, wherein the element substrate, the support, the sensor member, and the film member are located around the first space.

[0065] (Configuration 9) the sensor unit includes a sensor fixing unit, the sensor fixing portion fixes a part of the sensor member to a part of the support portion, the sensor fixing portion is not provided between another part of the sensor member and another part of the support portion, The sensor according to configuration 7 or 8, wherein the first space is connected to the second space via the other part of the sensor member and the other part of the support.

[0066] (Configuration 10) 10. The sensor according to any one of configurations 3 to 9, wherein the film member is capable of preventing a liquid from passing through the opening into the first space.

[0067] (Configuration 11) 11. The sensor of any one of configurations 3 to 10, wherein the first space is substantially waterproof.

[0068] (Configuration 12) 12. The sensor according to any one of configurations 3 to 11, wherein the second space is substantially waterproof.

[0069] (Configuration 13) Further comprising a first elastic member, 13. The sensor according to any one of configurations 3 to 12, wherein the first elastic member is between the outer region and the first housing member.

[0070] (Configuration 14) the housing further includes a fourth housing member; the outer region is between the fourth housing member and the first housing member, 14. The sensor according to any one of configurations 3 to 13, wherein the outer region is fixed by the fourth housing member and the first housing member.

[0071] (Configuration 15) Further comprising a second elastic member, 15. The sensor of claim 14, wherein the second elastic member is between the fourth housing member and the outer region.

[0072] (Configuration 16) Further comprising a dehumidifying section, 16. The sensor according to any one of configurations 1 to 15, wherein the dehumidifying section is capable of dehumidifying the second space.

[0073] (Configuration 17) the housing includes a second housing member and a third housing member; the sensor unit is located between the third housing member and the first housing member, the second housing member is disposed around the sensor unit in a plane intersecting a first direction from the third housing member to the first housing member; the second housing member is connected to the first housing member and the third housing member, 17. The sensor according to any one of configurations 1 to 16, wherein the first housing member, the second housing member, and the third housing member are arranged around the second space.

[0074] (Configuration 18) 18. The sensor according to any one of configurations 1 to 17, wherein a first gas permeability between the first space and an external space is lower than a second gas permeability between the first space and the second space.

[0075] (Configuration 19) 19. The sensor according to any one of configurations 1 to 18, wherein the sensor element includes at least one of a capacitive MEMS gas sensor, a thermal conduction MEMS gas sensor, a catalytic combustion MEMS gas sensor, and an oxide semiconductor MEMS gas sensor.

[0076] (Configuration 20) The sensor according to any one of configurations 1 to 19, The Communications Department and Equipped with The communication unit is capable of transmitting a signal based on a signal obtained from the sensor element to an external device.

[0077] According to the embodiment, a sensor and a sensor system capable of improving detection accuracy can be provided.

[0078] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of each element included in the sensor system, such as the housing, sensor unit, sensor element, and film member, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0079] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0080] In addition, all sensors and sensor systems that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensors and sensor systems described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0081] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0082] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0083] 10...sensor portion, 10h...sensor opening portion, 11...sensor element, 12...sensor member, 12h...hole, 13...support portion, 13c...sensor fixing portion, 13e...electrode, 15...element substrate, 16a, 16b...first and second mounting substrates, 17a...connecting member, 31...film member, 31i...inner region, 31o...outer region, 32...porous member, 40...housing, 41-44...first to fourth housing members, 41h...opening portion, 46a, 46b...first and second elastic members, 47...fixing member, 48...structure, 51...dehumidifying portion, 53...battery, 54...communication portion, 75a...analog-digital converter, 75b...capacitance-digital converter, 75c...DC / DC converter, 80...detection target gas, 110, 110a, 110b, 111, 112...sensors; 210...sensor system; D1, D2...first and second directions; G1...first gap; H1...humidity; N1...noise; SP1, SP2...first and second spaces

Claims

1. a housing including a first housing member including an opening; a sensor unit provided in the housing, the sensor unit including a sensor member including a hole and a sensor element, a first space between the sensor element and the sensor member being connected to another second space in the housing, and a detection target gas being able to flow into the first space through the opening and the hole; a gas-permeable film member; Equipped with the film member includes an inner region and an outer region surrounding the inner region; the outer region is fixed to the first housing member; the sensor member is between the sensor element and the inner region; the detection target gas can flow into the first space through the opening, the film member, and the hole, the sensor unit further includes an element substrate and a support unit; the sensor element is located between the element substrate and the sensor member, the support portion is fixed to the element substrate, the support portion is located between the element substrate and the sensor member, the support portion supports the sensor member, the sensor unit includes a sensor fixing unit, the sensor fixing portion fixes a part of the sensor member to a part of the support portion, the sensor fixing portion is not provided between another part of the sensor member and another part of the support portion, The sensor, wherein the first space is connected to the second space via the other part of the sensor member and the other part of the support portion.

2. The sensor according to claim 1 , wherein the volume of the second space is equal to or greater than the volume of the first space.

3. The sensor of claim 1 , wherein the film member comprises polytetrafluoroethylene.

4. Further comprising a first elastic member, The sensor of claim 1 , wherein the first resilient member is between the outer region and the first housing member.

5. the housing further includes a fourth housing member; the outer region is between the fourth housing member and the first housing member, The sensor of claim 1 , wherein the outer region is secured by the fourth housing member and the first housing member.

6. Further comprising a second elastic member, The sensor of claim 5 , wherein the second resilient member is between the fourth housing member and the outer region.

7. a housing including a first housing member including an opening; a sensor unit provided in the housing, the sensor unit including a sensor member including a hole and a sensor element, a first space between the sensor element and the sensor member being connected to another second space in the housing, and a detection target gas being able to flow into the first space through the opening and the hole; a gas-permeable film member; Equipped with the film member includes an inner region and an outer region surrounding the inner region; the outer region is fixed to the first housing member; the sensor member is between the sensor element and the inner region; the detection target gas can flow into the first space through the opening, the film member, and the hole, the outer region is in contact with the first housing member; The inner region is in contact with the sensor member.

8. A sensor according to any one of claims 1 to 7; The Communications Department and Equipped with The communication unit is capable of transmitting a signal based on a signal obtained from the sensor element to an external device.

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