Dry cleaning device and dry cleaning method

Abstract

To provide a dry cleaning device suitable for cleaning a container component in a container of a semiconductor manufacturing process and for cleaning the container component with CO2 snow.SOLUTION: A dry cleaning device first inspects a container component before and after cleaning, then cleans the container component with CO2 snow according to a predetermined cleaning working set, and after the container component is cleaned, it can be used again for the next process. The dry cleaning device according to the present invention is fast and effective, and is suitable for the container cleaning needs of a semiconductor manufacturing process that does not require a liquid phase solvent.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention provides a dry cleaning apparatus and method, particularly for cleaning parts or containers. [Background technology]

[0002] In the semiconductor industry, semiconductor containers used to protect, store, and transport semiconductor components are common. These containers require further cleaning due to potential contamination inside the containers during semiconductor manufacturing processes due to factors such as the manufacturing process and the environment. Semiconductor components can be wafers, photomasks, PCBs, carrier boards, or other electronic components. The semiconductor containers can also be wafer carriers, photomask carriers, PCB carriers, or other electronic component carriers. The containers for semiconductor manufacturing processes contain components used to operate in combination with the semiconductor components. These components repeatedly come into contact with the semiconductor components and are contaminated by environmental dust, gas evaporation during the manufacturing process, and other factors. Furthermore, the containers for semiconductor manufacturing processes often contain components used in automated production lines or machines. Therefore, contamination outside the container can lead to cross-contamination of the components inside the container or the semiconductor components. Conventional cleaning methods for semiconductor containers and their components all use liquid solvents, which not only require a large amount of liquid medium during the washing process, but also require additional drying and baking processes after the washing process to remove residual solvent. Summary of the Invention [Problem to be solved by the invention]

[0003] However, due to the special design of the components inside the semiconductor manufacturing vessels, they are more susceptible to contamination and require repeated cleaning, drying, and heating, which requires a large amount of liquid solvent and long drying and heating times. Therefore, it is important to provide a dry cleaning device or method that is fast and effective and does not require liquid solvent to meet the needs of cleaning vessels in a large volume of semiconductor manufacturing processes and reduce the use of liquid solvent and the working time of the manufacturing process.

[0004] In view of this, the dry cleaning apparatus and method provided by the present invention can effectively provide a cleaning process suitable for different types of contamination situations, and does not require the use of liquid-phase solvent cleaning materials and waste time. [Means for solving the problem]

[0005] In one aspect of the present invention, there is provided a dry cleaning module adapted to clean container parts with CO2 snow, an inspection module adapted to inspect the container parts to obtain inspection results, a storage module adapted to store container parts and corresponding cleaning working sets, and a programmable logic controller (PLC) signal-coupling the dry cleaning module, the inspection module, and the storage module. a programmable logic controller (PLC) for performing the following steps: cleaning the container parts with CO2 snow in accordance with a cleaning working set by a dry cleaning module; inspecting the container parts before and after cleaning by an inspection module to obtain inspection results; determining the type of the container parts according to the pre-cleaning inspection result, selecting a predetermined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container parts with CO2 snow in accordance with the predetermined cleaning process by the dry cleaning module; determining whether the cleaning of the container parts is complete according to the post-cleaning inspection result and issuing a determination result; and selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the determination result, and cleaning the container parts with CO2 snow in accordance with the additional cleaning process by the dry cleaning module or using the container parts for a next process.

[0006] In the above dry cleaning apparatus, the dry cleaning module may include a chamber, a cleaning stage provided in the chamber and suitable for maintaining the container parts, a filter provided in the chamber and suitable for filtering gas to allow clean gas to flow into the chamber, and a dry cleaning nozzle provided in the chamber and spraying CO2 snow onto the container parts according to a cleaning working set.

[0007] In the above dry cleaning device, the dry cleaning nozzles may be plural and arranged at different positions in the chamber and may be controllable to be rotatable and pointed in different directions for cleaning the container parts.

[0008] In the above dry cleaning apparatus, the dry cleaning module may further comprise a cleaning movement module controlled by the programmable logic controller for adjusting the relative position of the dry cleaning nozzle and the container part.

[0009] In the above-mentioned dry cleaning apparatus, the inspection module may include an inspection stage adapted to load the container parts, an inspection camera adapted to inspect the container parts, and an inspection and analysis device used to analyze the condition of the container parts after inspection to obtain inspection results.

[0010] In the above dry cleaning machine, the inspection module may further include an inspection movement module controlled by the programmable logic controller for adjusting the relative positional relationship between the inspection camera and the container part.

[0011] In the dry cleaning device, the programmable logic controller may classify the container parts into areas of the container parts in a grid format according to the results of the pre-wash or post-wash inspection, and indicate the state of contamination.

[0012] In the above dry cleaning device, the programmable logic controller may determine the number of defective materials per unit area in the post-wash inspection results and compare them with a predetermined inspection standard to determine whether the washing is complete.

[0013] In the above dry cleaning device, the programmable logic controller may obtain an additional cleaning process from the cleaning working set according to the post-cleaning inspection result to enhance the cleaning of some areas.

[0014] In the above-mentioned dry cleaning device, the memory module stores multiple component types of container components and the corresponding contamination status of the cleaning working set, as well as default cleaning processes and additional cleaning processes, and the programmable logic controller may determine the component type and its contamination status according to the inspection results before or after cleaning, and select the default cleaning process or additional cleaning process corresponding to the contamination status.

[0015] In the dry cleaning machine, the programmable logic controller stores a cleaning working set including a default cleaning process and an additional cleaning process in the memory module according to the inspection result. feedback May be adjusted.

[0016] In the above dry cleaning device, the programmable logic controller may further comprise a decision making artificial intelligence engine used to adjust the cleaning working set in the memory module according to the test results.

[0017] In the above dry cleaning machine, the inspection module may include an inspection artificial intelligence engine for further processing to obtain an inspection result.

[0018] As one aspect of the present invention, there is provided a dry cleaning method suitable for cleaning containers and their container parts in a semiconductor manufacturing process, comprising the steps of inspecting the part type of the container parts before cleaning, selecting a predetermined cleaning process corresponding to the part type from a cleaning working set according to the part type, cleaning the container parts with CO2 snow according to the predetermined cleaning process, inspecting the cleaning status of the container parts after cleaning to obtain inspection results, judging whether the cleaning of the container parts is complete according to the inspection results and issuing the judgment result, and if the cleaning of the container parts is incomplete according to the judgment result, selecting an additional cleaning process corresponding to the inspection result from the cleaning working set, cleaning the container parts again with CO2 snow until the cleaning of the container parts is complete, and if the cleaning of the container parts is complete, using the container parts for the next process.

[0019] In the above-mentioned dry cleaning method, the step of determining whether the cleaning of the container parts is complete may be performed by using an inspection artificial intelligence engine to classify the container parts into areas of the container parts in a grid format, indicate the number of defective substances in the areas, and compare them with predetermined inspection standards to produce a judgment result.

[0020] In the above dry cleaning method, the step of inspecting the part types of container parts before cleaning may further include a step of storing the contamination status of multiple part types of container parts and their corresponding cleaning working sets, default cleaning processes, and additional cleaning processes.

[0021] In the above-mentioned dry cleaning method, the step of inspecting the container parts before and after cleaning may involve a programmable logic controller determining the type of part and its contamination status according to the inspection results before or after cleaning, and selecting a default cleaning process or an additional cleaning process corresponding to the contamination status.

[0022] The above dry cleaning method may be performed by a dry cleaning device including a dry cleaning module for cleaning container parts with CO2 snow, an inspection module for inspecting the container parts to obtain inspection results, a memory module for storing the container parts and their corresponding cleaning working sets, and a programmable logic controller for connecting the dry cleaning module, the inspection module, and the memory module by signals and for executing the above dry cleaning method. [Effects of the Invention]

[0023] The dry cleaning apparatus and method of the present invention achieve a fast, effective dry cleaning apparatus or method that does not require a liquid solvent, thereby meeting the container cleaning needs of large-volume semiconductor manufacturing processes and reducing the use of liquid solvents and the manufacturing process time. Because the dry cleaning apparatus or method of the present invention does not require a liquid solvent, it avoids the waste of large amounts of DI water and the generation of large amounts of cleaning wastewater. Furthermore, compared to conventional cleaning processes that require processes such as washing, drying, and heating, the dry cleaning apparatus or method of the present invention only requires the dry cleaning process. In addition to saving time in the manufacturing process, it also reduces the costs of materials and parts related to the cleaning apparatus, thereby further improving the efficiency and quality of the container cleaning process required in semiconductor manufacturing processes. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is a block diagram illustrating a dry cleaning apparatus according to one embodiment of the present invention. [Figure 2] 1 is a schematic diagram illustrating a dry cleaning module of a dry cleaning machine in accordance with one embodiment of the present invention. [Figure 3A]1 is a schematic diagram illustrating an inspection module of a dry cleaning machine in accordance with one embodiment of the present invention. [Figure 3B] 1 is a schematic diagram showing areas in a grid format identified by an inspection module of a dry cleaning machine and illustrating aspects of contamination status in one embodiment of the present invention; FIG. [Figure 4] 1 is a block diagram illustrating a dry cleaning apparatus according to one embodiment of the present invention. [Figure 5] 1 is a flowchart illustrating a dry cleaning method in one embodiment of the present invention. [Figure 6] 1 is a flowchart illustrating the application of a dry cleaning method in one embodiment of the present invention. [Figure 7] 1 is a schematic diagram of a dry cleaning apparatus adapted to inspect different container parts in one embodiment of the present invention; [Figure 8] 1 is a schematic diagram of a dry cleaning device storing different soiling status aspects in accordance with one embodiment of the present invention; [Figure 9A] 1 is a schematic diagram showing the surface of a container part before dry cleaning in one embodiment of the present invention. [Figure 9B] 1 is a schematic diagram showing the surface of a container part after dry cleaning in one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0025] In order to explain the technical contents of the present invention in detail, the following will be further described in conjunction with the embodiments and drawings. It should be noted that in the description, terms such as "first," "second," and "third" are used to distinguish components, and are not used to limit the components themselves or indicate a particular order of the components. Furthermore, in the description, unless a specific number is specified, the article "a" refers to one or more components.

[0026] In order to fully understand the objects, features and effects of the present invention, the present invention will be described in detail below with reference to the following specific embodiments and accompanying drawings.

[0027] In one aspect of the present invention, a dry cleaning apparatus is disclosed that is suitable for cleaning containers and components thereof in semiconductor manufacturing processes, such as, but not limited to, wafer carriers, photomask carriers, carrier boxes for carrier boards, or other component containers and container cases, supports, limiters, door panels, trays, etc.

[0028] Please refer to Figure 1, which is a block diagram illustrating a dry cleaning apparatus according to one embodiment of the present invention. The dry cleaning apparatus 10 includes a dry cleaning module 100, an inspection module 200, a memory module 300, and a programmable logic controller (PLC) 400. The programmable logic controller 400 is signal-coupled to the dry cleaning module 100, the inspection module 200, and the memory module 300.

[0029] The dry cleaning module 100 is adapted to clean a semiconductor manufacturing process container and / or its container parts with CO2 snow. The inspection module 200 is adapted to inspect the container parts to obtain inspection results. In one embodiment of the present invention, the inspection results may include, for example, inspection of the part type, appearance, inspection of the type and size of the cleaning object, and inspection of the amount, type, and area of ​​contamination. The arrows in FIG. 1 indicate the transport path 901 of the semiconductor manufacturing process container and / or its container parts. In one embodiment of the present invention, the inspection is performed using optical or image detection. The memory module 300 is adapted to store different containers and different container parts, their corresponding cleaning processes, and cleaning working sets associated with the cleaning processes. That is, the cleaning working sets stored in the memory module 300 include multiple cleaning workings to correspond to cleaning conditions for any part of the container, such as the case, support, limiter, door panel, etc. Among these, items included in the cleaning conditions include, but are not limited to, cleaning modes and preset values ​​(e.g., cleaning time, strength, area, etc.) that satisfy the cleaning conditions. In one embodiment of the present invention, the cleaning working set includes a default cleaning process and an additional cleaning process. The various cleaning processes in the cleaning working set have different classifications and secondary cleaning processes for different containers and container parts, and the default cleaning process may refer to a cleaning process corresponding to the primary cleaning of the object to be cleaned. The additional cleaning process may refer to a cleaning process when cleaning is further strengthened based on the inspection results. In practice, these cleaning processes may be the same or different.

[0030] In one embodiment of the present invention, the cleaning working set includes multiple cleaning processes to accommodate different vessel configurations.

[0031] In one embodiment of the present invention, there may be multiple additional cleaning processes to accommodate different post-inspection cleaning needs.

[0032] In one embodiment of the present invention, the storage module 300 stores container parts including a plurality of part types and the contamination statuses, default cleaning processes, additional cleaning processes, and the like in the corresponding cleaning working sets.

[0033] In one embodiment of the present invention, the storage module 300 is a storage medium such as a database, a hard disk, a memory, a memory card, a cloud, a server, a workstation, or an electronic device on the Internet.

[0034] The programmable logic controller 400 is adapted to perform the following steps: cleaning the container parts with CO2 snow according to the cleaning working set by the dry cleaning module 100; inspecting the container parts before and after cleaning by the inspection module 200 to obtain inspection results; determining the type of the container parts according to the inspection results, selecting a predetermined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container parts with CO2 snow by the dry cleaning module 100 according to the predetermined cleaning process; determining whether the container parts have been cleaned according to the inspection results and generating a judgment result; selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the judgment result, and cleaning the container parts with CO2 snow by the dry cleaning module 100 according to the additional cleaning process, or using the container parts for a next process. Wherein, during the operation of determining the additional process according to the judgment result, if it is determined that the cleaning is incomplete according to the judgment result, the cleaning can be further strengthened, and a cleaning process corresponding to the inspection result can be selected from the cleaning working set, and the cleaning process can be performed again, for example, using the corresponding additional cleaning process. If it is determined that the cleaning is complete according to the above determination result, the process moves to the next step, for example, the next other process or manufacturing step is executed.

[0035] In one embodiment of the present invention, the inspection results include, but are not limited to, a visual inspection, an inspection of the type and size of the cleaning object, and an inspection of the amount and area of ​​contamination. For example, before cleaning, the inspection module 200 inspects the container part to determine which type of container and part it belongs to. The programmable logic controller 400 can then select a predetermined cleaning process corresponding to the type of container part and control the dry cleaning module 100 to perform cleaning using the predetermined cleaning process. Furthermore, the inspection module 200 can inspect the results of the container part after cleaning to determine, for example, whether the cleaning is complete or whether further cleaning is required for any type or area of ​​contamination. Based on this, the programmable logic controller 400 can then select a corresponding additional cleaning process to further intensify the cleaning. That is, the programmable logic controller 400 determines the component type and its contamination status according to the pre- or post-cleaning inspection results, and selects a default cleaning process or an additional cleaning process corresponding to the contamination status from the multiple component types of container components and the corresponding contamination statuses, default cleaning processes, and additional cleaning processes in the cleaning working set stored in the memory module 300. It is noteworthy that a computing device, processor, or microprocessor such as the programmable logic controller 400 may be provided in the dry cleaning module 100 or the inspection module 200 to perform computing decisions. The programmable logic controller 400 may be provided outside the dry cleaning module 100, the inspection module 200, or the memory module 300 and connected thereto via a signal.

[0036] FIG. 2 is a schematic diagram illustrating a dry cleaning module 100 of a dry cleaning apparatus 10 according to one embodiment of the present invention. Please refer to FIG. 2. In one embodiment of the present invention, the dry cleaning module 100 may include a chamber 110, a cleaning stage 120, a filter 130, and a programmable dry cleaning nozzle 140. The term "programmable" may refer to a programmable logic controller 400 or other electronic devices, computing devices, network devices, or a computing device such as a microprocessor of the dry cleaning module 100 itself. The chamber 110 is adapted to accommodate a container part 900. The cleaning stage 120 is adapted to load or hold the container part 900. In one embodiment of the present invention, the cleaning stage 120 is adapted to fix, clamp, suck, or load the container part 900, but is not limited to these. The cleaning stage 120 is adapted to hold the container part 900 in any manner. The filter 130 may be a HEPA filter and may be located above the chamber 110. After passing through the filter 130, the gas becomes filtered clean gas CG and flows into the chamber 110. The container part 900 is installed in the chamber 110. The dry cleaning nozzle 140, under program control, sprays CO2 snow toward the container part 900 according to a cleaning operating set, thereby removing contaminants or defective materials (e.g., dust, impurity particles, etc.) from the container part 900. The programmable dry cleaning nozzle 140 can control parameters and cleaning conditions, including, but not limited to, time, flow rate, position, and angle. The defective materials removed during cleaning are converted into impure gas DG mixed with clean gas filtered by the filter 130, which is then discharged downward from the chamber 110. It should be noted that the flow direction of the airflow is not limited to that illustrated in this embodiment. In one embodiment of the present invention, multiple dry cleaning modules 100 may be installed to perform multitasking cleaning processes.In one embodiment of the present invention, the number of filters 130 is not limited and may be installed at different positions within the chamber 110 according to needs.

[0037] In one embodiment of the present invention, the dry cleaning module 100 can adjust the size and number of chambers 110 accordingly to accommodate different sizes and types of semiconductor manufacturing process vessels or vessel parts 900 therein.

[0038] In one embodiment of the present invention, the dry cleaning module 100 can set different cleaning processes of the cleaning working set according to the characteristics or needs of different semiconductor manufacturing process vessels or vessel parts 900 thereof by the programmable logic controller 400 or the dry cleaning module 100's own microprocessor or user interface.

[0039] In one embodiment of the present invention, the dry cleaning module 100 may have multiple dry cleaning nozzles 140 positioned at different angles and at different locations within the chamber 110. The multiple dry cleaning nozzles 140 can be controlled to rotate and point in different directions to spray-clean the container parts. In one embodiment of the present invention, the multiple programmable dry cleaning nozzles 140 may be positioned in opposing positions. For example, one set of dry cleaning nozzles 140 may be adapted to clean a first surface of the container part 900, and another set of dry cleaning nozzles 140 may be adapted to clean a second surface of the container part 900. By moving the opposing dry cleaning nozzles 140, multiple surfaces of the container part 900 can be cleaned simultaneously.

[0040] In one embodiment of the present invention, the dry cleaning nozzle 140 of the dry cleaning module 100 is mounted on a programmable cleaning and transport module 150. The term "programmable" refers to programmable control by a programmable logic controller 400 or other electronic devices, computing devices, network devices, etc., and may also be controlled by a microprocessor or other computing device installed in the dry cleaning module 100 or the cleaning and transport module 150 itself. The cleaning and transport module 150 is adapted to provide three-dimensional movement of the dry cleaning nozzle 140 within the chamber 110, allowing the dry cleaning nozzle 140 to be moved to different positions, distances, and angles for cleaning under program control and to freely adjust its relative positional relationship. The arrows indicate the direction of movement MD. In one embodiment of the present invention, the dry cleaning nozzle 140 moves above the cleaning and transport module 150. In one embodiment of the present invention, the dry cleaning nozzle 140 moves along with the cleaning and transport module 150. In one embodiment of the present invention, the dry cleaning nozzle 140 can move above the cleaning and transport module 150 and also move along with the cleaning and transport module 150. In one embodiment of the present invention, the cleaning transport module 150 may be in the form of, but is not limited to, a rail, a pulley, an automated arm, a telescopic mechanism, a miniature automated vehicle, and the like.

[0041] FIG. 3A is a schematic diagram illustrating an inspection module 200 of a dry cleaning machine 10 according to one embodiment of the present invention. FIG. 3B is a schematic diagram illustrating an exemplary embodiment of inspection results obtained by the inspection module 200 of a dry cleaning machine 10 according to one embodiment of the present invention. The inspection module 200 or a programmable logic controller 400 connected thereto displays the inspection results via a user interface or other electronic device, and distinguishes areas of the container part in a grid format to indicate the contamination status. See FIG. 3A. In one embodiment of the present invention, the inspection module 200 may include a chamber 210, an inspection stage 220 suitable for inspecting the container part 900, a programmable inspection camera 240, and an inspection and analysis device (not shown). The programmable components may be programmably controlled by the programmable logic controller 400 or other electronic devices, computing devices, network devices, etc., or may be controlled by a computing device such as the microprocessor of the inspection module 200 itself. The inspection and analysis device is used to analyze the condition of the container part after inspection, thereby obtaining the inspection results. The condition of the container parts includes, but is not limited to, visual inspection before and after cleaning, the type and size of the container parts (i.e., the parts to be cleaned) before cleaning, and / or the type, level, amount, and area of ​​contamination of the container parts after cleaning. For example, before cleaning, the inspection module 200 can inspect the type of the container parts, and an inspection and analysis device can obtain an inspection result indicating which type of container or part it belongs to. Based on this, the programmable logic controller 400 can select a predetermined cleaning process corresponding to the type of container part and control the dry cleaning module 100 to perform cleaning using the corresponding predetermined cleaning process. The chamber 210 is suitable for accommodating the container parts 900. The inspection stage 220 is suitable for loading and maintaining the container parts 900, and the loading and maintaining method thereof may be the same as that of the cleaning stage 120.The chamber 210 of the inspection module 200 and the chamber 110 of the dry cleaning module 100 may be the same or different. See FIG. 3B. In one embodiment of the present invention, the inspection module 200 or the programmable logic controller 400 connected thereto can display the inspection results via a user interface or other electronic device or display module (e.g., a screen or operation panel) and can distinguish the container part 900 into areas of the container part 900 in a grid format. In one embodiment of the present invention, the inspection module 200 or the programmable logic controller 400 can distinguish the container part 900 into areas of the container part in a grid format and indicate the type of contamination condition (defect type). For example, a watermark area or a scratch area can be indicated. Distinguishing the areas of the container part in the grid format and indicating the type of contamination condition can, for example, identify areas with contamination according to the contour features, pattern shapes, grayscale change features, predefined reference features, predefined thresholds, etc. of the contamination condition, and can indicate the contaminated areas to indicate the type of contamination condition according to predefined or dynamic standards or conditions. For example, when a linear grayscale change with a thin, elongated contour appears in a certain area, it may be a scratch, and the area where the scratch appears is indicated. In one embodiment of the present invention, the inspection camera 240 is an optical lens. In one embodiment of the present invention, there may be multiple inspection modules 200 for multitasking inspection. In one embodiment of the present invention, there may be multiple inspection cameras 240 for inspecting from different positions and angles, and the different inspection positions, inspection angles, inspection times, inspection modules, etc. may be manually or automatically controlled under the above-mentioned program control.

[0042] In one embodiment of the present invention, the inspection camera 240 of the inspection module 200 is mounted on a programmable inspection movement module 250. The term "programmable" as used herein refers to the same as described above, and the inspection movement module 250 is adapted to provide three-dimensional spatial movement of the inspection camera 240 within the chamber 210, so that the inspection camera 240 can be moved to different positions, distances, and angles under program control to perform inspection, and the relative positional relationship between the inspection camera 240 can be freely adjusted. The arrows in the figure indicate the movement direction MD.

[0043] In one embodiment of the present invention, inspection camera 240 moves above mobile inspection module 250. In one embodiment of the present invention, inspection camera 240 moves along with mobile inspection module 250. In one embodiment of the present invention, inspection camera 240 can move above mobile inspection module 250 and also move along with mobile inspection module 250.

[0044] In one embodiment of the present invention, the test transfer module 250 and the wash transfer module 150 are the same shared device.

[0045] In one embodiment of the present invention, the inspection transfer module 250 and the cleaning transfer module 150 are devices that operate independently. It is noteworthy that the dry cleaning module 100 and the inspection module 200 may be controlled by the programmable logic controller 400, but the dry cleaning module 100 and the inspection module 200 may be provided with a processor, microprocessor, computing device, etc., such as the programmable logic controller 400, so that the dry cleaning module 100 and the inspection module 200 can complete the above-mentioned judgment, computing, and program control by themselves, and also perform the functions of outputting results and receiving inputs through a user interface.

[0046] FIG. 4 is a block diagram illustrating a dry cleaning apparatus according to one embodiment of the present invention. Please refer to FIG. 4. In one embodiment of the present invention, the dry cleaning apparatus 20 further includes an input module 510, a disassembly module 520, an inspection module 530, a dry cleaning module 540, an assembly module 550, a continuous gas filling module 560, an evacuation module 570, and a transport module 580. Arrows indicate transport paths 901 for containers and / or container parts during semiconductor manufacturing processes. The inspection module 530 and the dry cleaning module 540 have been described above and will not be described again here.

[0047] The input module 510 is adapted to introduce a semiconductor manufacturing process container into the dry cleaning apparatus 20, i.e., container introduction 511. The semiconductor manufacturing process container may be, for example, a wafer carrier, a photomask carrier, or a carrier box for a carrier board. In one embodiment of the present invention, the input module 510 may be multiple and operate in a multitasking manner. The disassembly module 520 is adapted to disassemble a semiconductor manufacturing process container into multiple container parts 900, for example, disassembling a photomask carrier or wafer carrier into container parts such as a cover, base, stage, or components. In one embodiment of the present invention, the disassembly module 520 may be multiple and operate in a multitasking manner. The assembly module 550 is adapted to assemble the container parts 900 dry-cleaned by the dry cleaning module 540 into a container. For example, it assembles cleaned wafer / photomask carrier components into a wafer / photomask carrier.

[0048] In one embodiment of the present invention, the assembly module 550 may be multiple and may operate in a multitasking manner. The continuous gas filling module 560 is adapted to continuously fill the assembled container with gas, for example, to remove moisture and keep the inside of the container dry, or to fill with a low-reactive gas for preserving semiconductor components.

[0049] In one embodiment of the present invention, there may be multiple continuous gas filling modules 560 and they may operate in a multitasking manner. Discharge module 570 is adapted to remove containers from the semiconductor component manufacturing process from dry cleaning apparatus 20, i.e., container removal 571.

[0050] In one embodiment of the present invention, there may be multiple discharge modules 570 and they may operate in a multitasking manner. Transport module 580 is adapted to move semiconductor manufacturing process containers or disassembled container parts 900 within dry cleaning apparatus 20.

[0051] In one embodiment of the invention, the transport module 580 may be an automated arm or, for example, a conveyor belt, a transport stage, etc. In one embodiment of the invention, the transport module 580 may be multiple and may perform multitasking operations.

[0052] In another aspect of the present invention, a dry cleaning method suitable for a dry cleaning apparatus for cleaning a container or container parts thereof in the above-described semiconductor manufacturing process is disclosed.

[0053] Please also refer to Figures 1 and 5. Figure 5 is a flowchart showing a dry cleaning method according to one embodiment of the present invention. The dry cleaning method according to one embodiment of the present invention is suitable for a dry cleaning apparatus for cleaning container parts of a container used in a semiconductor manufacturing process. The dry cleaning apparatus 10 includes a dry cleaning module 100, an inspection module 200, and a memory module 300 that stores cleaning working sets corresponding to the container parts. The dry cleaning method includes a step (S510) of inspecting the part type of the container part before cleaning, a step (S520) of selecting a predetermined cleaning process corresponding to the part type from a cleaning working set according to the part type, a step (S530) of cleaning the container part with CO2 snow according to the predetermined cleaning process, a step (S540) of inspecting the cleaning status of the container part after cleaning to obtain the inspection result, a step (S550) of determining whether the cleaning of the container part is complete according to the inspection result and issuing the judgment result, a step (S560) of selecting an additional cleaning process corresponding to the inspection result from the cleaning working set and cleaning the container part with CO2 snow again until the cleaning of the container part is complete, and a step (S570) of using the container part for the next process if the cleaning of the container part is complete according to the judgment result if the cleaning of the container part is complete in step (S550).

[0054] In one embodiment of the present invention, the step of determining whether the cleaning of the container part is complete involves using an inspection artificial intelligence engine to distinguish areas of the container part in a grid format, indicating the number of defective materials in the area, and comparing this with predetermined inspection standards to produce a determination result.

[0055] In one embodiment of the present invention, the step of inspecting the part type of the container part before cleaning further includes storing the contamination status aspects, default cleaning processes, and additional cleaning processes for multiple part types of the container part and their corresponding cleaning working sets.

[0056] In one embodiment of the present invention, the step of inspecting the container parts before and after cleaning includes having the programmable logic controller determine the type of part and its contamination status according to the inspection results before or after cleaning, and selecting the default cleaning process or the additional cleaning process corresponding to the contamination status.

[0057] In one embodiment of the present invention, the dry cleaning method can be performed by the dry cleaning apparatus described above.

[0058] 6 is a flowchart showing a process of applying a dry cleaning method to a container or semiconductor component in one embodiment of the present invention. The dry cleaning method in one embodiment of the present invention includes the steps of introducing a container or semiconductor component (S610), disassembling the container components (S620), inspecting the appearance before cleaning (S630), dry cleaning with CO2 snow (S640), inspecting the appearance after cleaning (S650), assembling the container components (S660), continuously filling with gas (S670), removing the container (S680), and inspecting and comparing the appearance before and after cleaning (S690).

[0059] See FIG. 6. First, a semiconductor manufacturing container is disassembled into container parts in a disassembly module and transported to an inspection module in a transport module for a pre-cleaning visual inspection. For example, the appearance, type, and size of the container parts are inspected to determine the type and / or pre-cleaning contamination status of the container parts. After inspection, the container parts are transported to a dry cleaning module in the transport module, where they are cleaned with CO2 snow to remove any defects on the container parts. The transport module then transports the container parts to an inspection module for a post-cleaning visual inspection to determine whether the post-cleaning contamination status meets the cleaning criteria. If the post-cleaning visual inspection fails (NG), the inspection module compares the pre-cleaning and post-cleaning visual inspection results and transports the container parts to a dry cleaning module. Areas found to contain residual defective material can be cleaned again, or cleaning can be enhanced for specific areas or contamination types. This is operation step (S690). If the post-cleaning visual inspection passes (PASS), the container parts are used for the next process, such as another subsequent process after cleaning. In one embodiment of the present invention, the transport module transports the container parts to the assembly module for assembly, and after filling the container parts with gas in the continuous gas filling module, the transport module transports the container parts to the discharge module for removal from the dry cleaning apparatus.

[0060] In one embodiment of the present invention, the inspection module determines whether the visual inspection after cleaning passes according to a predetermined inspection standard. For example, an exemplary inspection standard may determine a failure if the number of defective materials per area is greater than the predetermined standard. For example, an exemplary inspection standard may determine a pass if the number of defective materials per area is less than or equal to the predetermined standard.

[0061] In one embodiment of the present invention, if the visual inspection after cleaning fails, the inspection module compares the visual inspection results before and after cleaning, and then reads the corresponding additional cleaning process from, for example, a database in a memory module using a programmable logic controller, and cleans the container with CO2 snow (CO2 clean) according to the additional cleaning process using a dry cleaning module.

[0062] In one embodiment of the present invention, cleaning procedures and cleaning processes corresponding to a plurality of different contamination statuses (e.g., different defect substance statuses) are stored in a storage module (e.g., a database), so that the contamination statuses can be determined for different visual inspection results, and additional cleaning processes corresponding to the different contamination statuses (e.g., different defect substance statuses) can be selected, and an appropriate additional cleaning process can be selected for a specific defect status.

[0063] In one embodiment of the present invention, a storage module (e.g., a database) stores cleaning procedures and processes corresponding to different contamination types, different contamination areas, and different amounts of contamination. In one embodiment of the present invention, to clean different contamination types, different contamination levels, and different contamination areas, the cleaning parameters in the multiple cleaning procedures and cleaning processes in the cleaning working set include, but are not limited to, cleaning time, cleaning distance, CO2 snow flow rate, CO2 snow nozzle movement speed, and CO2 snow nozzle movement path.

[0064] In one embodiment of the present invention, the contamination state of the container part may be, for example, but not limited to, watermarks, stains, scratches, marks, and particles. In one embodiment of the present invention, the defective material may be, for example, but not limited to, carbon-containing, oxygen-containing, metal-containing, and silicon-containing compounds.

[0065] In one embodiment of the present invention, the programmable logic controller compares the visual inspection result after cleaning and / or the visual inspection results before and after cleaning, and stores the cleaning procedure, cleaning process, and / or cleaning parameters of the cleaning working set in the memory module. feedback By adjusting the cleaning procedure, cleaning process and / or its cleaning parameters corresponding to different visual inspection results can be optimized, and the parameters of the cleaning procedure and cleaning process can be automatically adjusted to correspond to different contamination situations. The above cleaning procedure and cleaning process include the above-mentioned default cleaning process and additional cleaning process, and the actual cleaning content and parameters in the default cleaning process and additional cleaning process may be the same, but the actual cleaning parameter conditions required are not distinguished by classification as default or additional.

[0066] In one embodiment of the present invention, the programmable logic controller further comprises a decision-making artificial intelligence engine for adjusting the cleaning working set in the storage module according to the test results, and for determining the cleaning procedure, cleaning process and / or cleaning parameters thereof in the cleaning working set. feedback For example, if contaminants always remain in the corners of the cleaned parts after cleaning, the cleaning working set can be adjusted and strengthened to enhance cleaning in the corners.

[0067] In one embodiment of the present invention, the inspection module further includes an inspection artificial intelligence engine, which can automatically adjust and optimize the analytical judgment on the contamination status aspects according to different appearance inspection results through a machine learning model or a deep learning model.

[0068] In one embodiment of the present invention, a machine learning model or a deep learning model can provide feedback updates to the inspection module and / or storage module (e.g., a database) on analysis criteria relating to aspects of the contamination situation, thereby optimizing the criteria relating to those aspects of the contamination situation.

[0069] In one embodiment of the present invention, the operations of the test module can be performed by a programmable logic controller. In another embodiment of the present invention, the operations performed by the programmable logic controller can be performed by the test module's own test analysis device or test artificial intelligence engine. In a further embodiment of the present invention, the programmable logic controller can be included in the test module.

[0070]

[0033] Figure 7 is a schematic diagram of a dry cleaning apparatus adapted to inspect different container parts in one embodiment of the present invention. See Figure 7. In one embodiment of the present invention, a schematic diagram of inspecting different container parts by an inspection module, such as a cover, a base, a stage or part.

[0071] In one embodiment of the present invention, the inspection module can preset different inspection areas for different container parts, for example, different inspection ROIs can be set for different areas of the container part.

[0072] FIG. 8 is a schematic diagram of a dry cleaning apparatus storing different contamination aspects in one embodiment of the present invention. Please refer to FIG. 8. In one embodiment of the present invention, an exemplary container part defect category diagram is shown with respect to different contamination aspects (e.g., different defect material aspects) stored in the inspection module and / or database. Container part contamination aspects include, but are not limited to, watermarks, stains, scratches, marks, and particles.

[0073] FIG. 9A is a schematic diagram showing the surface of a container part before dry cleaning in one embodiment of the present invention. FIG. 9B is a schematic diagram showing the surface of a container part after dry cleaning in one embodiment of the present invention. Please refer to FIG. 9A. FIG. 9A is a schematic diagram showing two different areas on the surface of the container part before dry cleaning, where contaminants remain on the surface of the container part, as can be seen within the areas indicated by the dotted lines. FIG. 9B is a schematic diagram showing the same two areas on the surface of the container part after dry cleaning, where contaminants originally remaining on the surface have been removed by dry cleaning, as can be seen in the same areas.

[0074] As a result, the dry cleaning apparatus or method of the present invention can achieve a fast and effective dry cleaning apparatus and method that does not require a liquid solvent, thereby meeting the needs of container cleaning in a large number of semiconductor manufacturing processes and reducing the use of liquid solvents and the operating time of the manufacturing process. Because the dry cleaning apparatus or method of the present invention does not require a liquid solvent, it avoids the waste of large amounts of DI water and the generation of large amounts of cleaning wastewater. Furthermore, compared to conventional cleaning processes that require processes such as washing, drying, and heating, the dry cleaning apparatus or method of the present invention only requires the dry cleaning process. In addition to saving time in the manufacturing process, it also reduces the costs of materials and parts related to the cleaning apparatus, shortens the equipment development and assembly schedule, and reduces the equipment's installation space, thereby further improving the efficiency and quality of the container cleaning process required in semiconductor manufacturing processes.

[0075] Although the present invention has been disclosed in the above preferred embodiments, it is understood by those skilled in the art that the above embodiments are used only to describe the present invention and are not intended to limit the scope of the present invention. It is particularly important to note that all equivalent modifications and replacements of the above embodiments should be construed as falling within the scope of the present invention. Therefore, the scope of protection of the present invention is as set forth in the appended claims, and the appended claims should be interpreted in the broadest sense to include such modifications, similar arrangements, processes, and the like. [Explanation of symbols]

[0076] 10 Dry cleaning equipment 100 Dry Cleaning Modules 110 Chamber 120 Cleaning Stage 130 filters 140 Dry cleaning nozzle 150 Cleaning Transfer Module 200 Inspection Modules 210 Chamber 220 Inspection Stage 240 Inspection Camera 250 Inspection Mobile Module 300 Memory Module 400 Programmable Logic Controller 510 Input Module Introduction of 511 containers 520 Decomposition Module 530 Inspection Module 540 Dry Cleaning Module 550 Assembly Module 560 Continuous Gas Charging Module 570 Emission Module 571 Container Derivation 580 Transport Module 900 Container parts 901 Transport route of containers or container parts CG Clean gas DG Unclean Gas MD movement direction S510~S570 Step S610~S690 Step

Claims

1. a dry cleaning module adapted to clean the container parts with CO2 snow; an inspection module adapted to inspect the container part to obtain an inspection result; a storage module adapted to store said container parts and their corresponding cleaning working sets; 1. A dry cleaning apparatus adapted for cleaning container parts in a semiconductor manufacturing process container, comprising: a programmable logic controller signal-coupling said dry cleaning module, said inspection module, and said storage module; the programmable logic controller causes the dry cleaning module to clean the container parts with CO2 snow according to the cleaning working set; inspecting the container parts before and after cleaning with the inspection module to obtain the inspection results; determining a part type of the container part according to the inspection result before cleaning, selecting a predetermined cleaning process corresponding to the part type from the cleaning working set according to the part type, and cleaning the container part with CO2 snow by the dry cleaning module according to the predetermined cleaning process; determining whether the cleaning of the container part is complete according to the inspection result after cleaning, and issuing a determination result; A dry cleaning apparatus characterized by performing a step of selecting an additional cleaning process corresponding to the inspection result from the cleaning working set according to the judgment result, and cleaning the container part with CO2 snow using the dry cleaning module according to the additional cleaning process, or using the container part for a next process.

2. 2. The dry cleaning apparatus according to claim 1, wherein the dry cleaning module comprises a chamber, a cleaning stage provided in the chamber and suitable for maintaining the container parts, a filter provided in the chamber and suitable for filtering gas to allow clean gas to flow into the chamber, and a dry cleaning nozzle provided in the chamber and for blowing CO2 snow onto the container parts according to the cleaning working set.

3. 3. The dry cleaning apparatus of claim 2, wherein the dry cleaning nozzles are multiple and positioned at different positions within the chamber and are controllable to be rotatable and pointed in different directions to clean the container parts.

4. 3. The dry cleaning apparatus of claim 2, wherein the dry cleaning module further comprises a wash transfer module controlled by the programmable logic controller for adjusting the relative position of the dry cleaning nozzle and the container component.

5. 2. The dry cleaning apparatus of claim 1, wherein the inspection module comprises an inspection stage adapted to load the container parts, an inspection camera adapted to inspect the container parts, and an inspection and analysis device used to analyze the condition of the container parts after inspection to obtain the inspection results.

6. 6. The dry cleaning apparatus of claim 5, wherein the inspection module further comprises an inspection movement module controlled by the programmable logic controller for adjusting the relative position of the inspection camera and the container part.

7. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller divides the container parts into areas of the container parts in a grid format according to the inspection results before or after cleaning, and indicates the state of contamination.

8. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller determines whether the cleaning is complete by determining the number of defective substances per unit area in the inspection result after the cleaning and comparing it with a predetermined inspection standard.

9. The dry cleaning apparatus according to claim 1 , wherein the programmable logic controller obtains the additional cleaning process from the cleaning working set according to the inspection result after cleaning to strengthen cleaning of some areas.

10. The dry cleaning apparatus of claim 1, wherein the memory module stores multiple component types of the container components and their corresponding contamination statuses in the cleaning working set, the default cleaning process, and the additional cleaning process, and the programmable logic controller determines the component types and their contamination statuses according to the inspection results before or after cleaning, and selects the default cleaning process or the additional cleaning process corresponding to the contamination status.

11. 2. The dry cleaning apparatus of claim 1, wherein the programmable logic controller feedback-adjusts the cleaning working set including the default cleaning process and the additional cleaning process in the memory module according to the test result.

12. 12. The dry cleaning apparatus of claim 11, wherein the programmable logic controller further comprises a decision making artificial intelligence engine used to update the cleaning working set in the storage module according to the test results.

13. The dry cleaning machine of claim 5 , wherein the inspection module comprises an inspection artificial intelligence engine for further processing to obtain the inspection results.

14. Suitable for cleaning containers and their components in semiconductor manufacturing processes, inspecting the type of the container parts before cleaning; selecting a predetermined cleaning process corresponding to the part type from a cleaning working set according to the part type; cleaning the container parts with CO2 snow according to the predetermined cleaning process; inspecting the cleaning status of the container parts after cleaning to obtain an inspection result; determining whether the cleaning of the container parts is complete according to the inspection result and issuing a determination result; According to the judgment result, if the cleaning of the container part is incomplete, an additional cleaning process corresponding to the inspection result is selected from the cleaning working set, and the container part is cleaned again with CO2 snow until the cleaning of the container part is complete, and if the cleaning of the container part is complete, the container part is used for the next process.

15. The dry cleaning method of claim 14, wherein the step of determining whether the cleaning of the container part is complete comprises dividing the container part into areas of the container part in a grid format using an inspection artificial intelligence engine, indicating the number of defective substances in each area, and comparing the number with a predetermined inspection standard to produce the determination result.

16. The dry cleaning method according to claim 14, wherein the step of inspecting the part type of the container part before cleaning further includes a step of storing multiple part types of the container part and their corresponding contamination status in the cleaning working set, the default cleaning process, and the additional cleaning process.

17. The dry cleaning method according to claim 14, wherein the step of inspecting the container parts before and after cleaning includes determining the type of the parts and the type of contamination status thereof by a programmable logic controller according to the inspection results before or after cleaning, and selecting the default cleaning process or the additional cleaning process corresponding to the type of contamination status.

18. a dry cleaning module for cleaning the container parts with CO2 snow; an inspection module for inspecting the container part to obtain the inspection result; a storage module for storing the container parts and the corresponding cleaning working sets; 15. The dry cleaning method of claim 14, wherein the method is performed by a dry cleaning machine comprising a programmable logic controller signally connecting the dry cleaning module, the inspection module, and the storage module and used to perform the dry cleaning method.

Images