Raman microscope

Abstract

Provided is an angle adjusting member for an optical element, the angle adjusting member being provided with two actuators and a center bar having a tip end portion that is operable through 360°. Furthermore, in order to provide a microscopic Raman spectroscopic device in which optical axis adjustment can be performed without opening a device housing, and fine adjustment of the optical axis can be performed without undue effort by a person carrying out the adjustment, at least one of an optical element for incident light and an optical element for Raman light includes the angle adjusting member.

Description

[Technical Field]

[0001] The present invention is Micro-La The present invention relates to a Mann spectrometer and an angle adjusting member for an optical element used in the spectrometer. [Background technology]

[0002] A Raman spectrometer can identify a sample by spectroscopically analyzing Raman scattered light of different wavelengths that is generated from the sample when irradiated with an excitation laser (see, for example, Patent Document 1). Among these, microscopic Raman spectroscopy has been developed as a means of analyzing the chemical structure of minute parts and has been widely applied in recent years.

[0003] A micro-Raman spectrometer having a confocal optical system, which is one type of micro-Raman spectroscopy, makes it possible to selectively extract only scattered light from the laser focusing position on the sample. However, because the diameter of the focused spot of a laser point source is on the order of 1 μm, while the diameter of the focused spot of a confocal optical system is on the order of several tens of μm, a microscopic Raman spectrometer using a confocal optical system requires extremely high precision in adjusting the optical axis. Furthermore, considering the stability of the laser's output angle, it is necessary to correct for daily fluctuations in the incident laser optical axis and the reflected Raman optical axis.

[0004] Conventionally, optical elements have been used to correct this optical axis. holder Known methods include a manual optical axis adjustment method in which an optical axis adjustment screw attached to the lens is manually adjusted, and an electric adjustment method in which the arrangement angle of the optical element is changed by a motor. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-113021

[0006] In the case of a method for manually adjusting the optical axis, the adjustment screw is usually installed inside the device housing. adjustmentTo manually adjust the screws, the device housing must be opened to expose the optical system, but because the Raman spectrometer uses laser light as its light source, it must be opened in a laser-controlled area.

[0007] Furthermore, whether the optical axis is adjusted manually or electrically, the optical elements must be adjusted to an angle of the order of 0.001 degrees, which requires a certain level of adjustment skill on the part of the optical axis adjuster, and adjusting the optical axis can be a burden for the adjuster as well. Furthermore, when using an electrically adjusted system, it is necessary to select a motor that can drive with high precision and accuracy, which can result in a large motor and high cost, which can make the Raman microscope itself bulky and expensive. Summary of the Invention [Problem to be solved by the invention]

[0008] Therefore, there has been a demand for an apparatus that allows adjustment of the optical axis without opening the apparatus housing, and that also allows fine adjustment of the optical axis without placing an excessive burden on the adjuster.

[0009] An object of the present invention is to provide a microscopic Raman spectrometer in which the optical axis can be adjusted without opening the housing of the device and in which fine adjustment of the optical axis can be performed without placing an excessive burden on the person making the adjustment. Another object of the present invention is to provide an angle adjusting member for an optical element that allows fine adjustment of the optical axis to be easily performed. [Means for solving the problem]

[0010] That is, the present invention provides: laser light source, Microscope optics, a plate for fixing the sample; A llama having an optical imaging element for producing a visible image Test Outline, and at least one optical element selected from the group consisting of an incident light optical element for guiding the laser emitted from the laser light source to the microscope optical unit and a Raman light optical element for guiding the Raman light reflected from the sample to the Raman detection system; and a microscopic Raman spectroscopic device, wherein at least one of the incident light optical element and the Raman light optical element has an angle adjustment member equipped with two actuators and a center bar whose tip portion can move 360°; to provide.

[0011] The present invention also provides An angle adjustment member for optical elements equipped with two actuators and a center bar whose tip can move 360°. to provide. [Effects of the Invention]

[0012] According to the present invention, there is provided a microscopic Raman spectrometer in which the optical axis can be adjusted without opening the device housing, and in which fine adjustment of the optical axis can be performed without placing an excessive burden on the adjuster. Furthermore, the present invention provides an angle adjusting member for an optical element that allows fine adjustment of the optical axis to be easily performed. [Brief explanation of the drawings]

[0013] [Figure 1] 1 is a schematic diagram showing one embodiment of a microscopic Raman spectroscopic device of the present invention, which has an optical element for incident light. [Figure 2] FIG. 1 is a schematic diagram showing another embodiment of the microscopic Raman spectrometer of the present invention, which has an optical element for incident light and an optical element for Raman light. [Figure 3] 1 is a schematic diagram showing an angle adjusting member used in the micro-Raman spectroscopic apparatus of the present invention. FIG. [Figure 4] FIG. 4 is a cross-sectional view taken along line AA in FIG. [Figure 5] 1A to 1C are schematic diagrams illustrating a method for adjusting the angle of an optical element using an angle adjustment member of the present invention. [Figure 6] 10A to 10C are schematic diagrams showing another preferred embodiment of the angle adjustment method for an optical element using an angle adjustment member of the present invention. [Figure 7] 1 is a schematic diagram showing one preferred embodiment of an angle adjustment member of the present invention. [Figure 8] 10 is a schematic diagram showing the displacement angle of the optical element 4. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0014] The present invention will be described with reference to FIGS. 1 and 2, but the present invention is not limited to these figures. FIG. 1 shows an embodiment having one incident light optical element for guiding the laser emitted from the laser light source to the microscope optical section.

[0015] In Fig. 1, light emitted from a laser light source A passes through a focused spot 9, and then reaches a microscope optical unit 3 via an incident light optical element 41 and a beam splitter 6. Note that the arrow in Fig. 1 indicates the direction of light travel. In Fig. 1, the incident light optical element 41 has an angle adjustment member 5. The light emitted from laser light source A Size ranges from several μm to several tens in μm The wavelengths are preferably 532 nm and 785 nm from the viewpoint of the detection sensitivity of Raman light.

[0016] The microscope optical unit 3 has an objective lens (not shown) that is a combination of a convex lens and a concave lens, and light incident on the microscope optical unit 3 is focused by these objective lenses onto a measurement target sample (hereinafter also referred to as "sample") fixed on the plate 2. The magnification of the objective lens is preferably 50x or more, and preferably 100x or less. The Raman light reflected by the sample passes through a condenser lens 7 and a condensing spot 9 and is guided to a Raman detection system 8. The Raman light condensed by the condenser lens 7 is focused on the condensing spot 9 and is guided to the Raman detection system. In this case, it is preferable from the viewpoint of resolution that the microscope optical section 3 be a confocal optical system in which the positions of the light source A, the plate 2, and the light condensing spot 9 are in a conjugate relationship.

[0017] On the other hand, FIG. 2 shows an embodiment having, in addition to the incident light optical element 41 of FIG. 1, a Raman light optical element 42 for guiding the Raman light reflected from the sample to the Raman detection system. In Fig. 2, the Raman light transmitted through the beam splitter 6 is guided to the condenser lens 7 by the Raman light optical element 42, passes through the condensed spot 9, and is guided to the Raman detection system 8. In Fig. 2, in addition to the incident light optical element 41, the Raman light optical element 42 also has an angle adjustment member 5.

[0018] A portion of the Raman light guided to the Raman detection system 8 is guided to an optical imaging element (not shown) that the Raman detection system 8 has, if necessary, and a portion of the Raman light is guided to a Raman spectrometer (not shown). The optical imaging element generates a visible image of the area where the Raman light is reflected, so that the measurement area of ​​the sample where the Raman light is being measured can be identified by the optical imaging element.

[0019] The optical imaging element may be, for example, a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary Metal Oxide Semiconductor) image sensor, and is configured to capture still or moving images of the sample. Depending on the configuration of the microscope optical unit 3 and transmitted illumination (not shown), the optical imaging element can capture all or at least one of a bright-field image, a dark-field image, a phase-contrast image, a fluorescent image, and a polarizing microscope image of the sample. If necessary, the optical imaging element outputs the captured image to another information processing device or the like.

[0020] The Raman spectrometer generates a two-dimensional spectral image of Raman scattered light from a sample, and obtains a spectrum of Raman scattering (hereinafter also referred to as a "Raman spectrum") from the two-dimensional spectral image. A Raman spectrometer can extract a flat spectrum from the generated 2D spectroscopic image in areas where the object of observation does not exist, and then obtain the Raman spectrum of the sample by subtracting that spectrum from the spectrum of each pixel. A Raman spectrum is usually a plot of the intensity of emitted light against wavelength. The emitted light contains scattered light due to Raman scattering, and the wavelength shift of the scattered light due to Raman scattering (Raman shift) varies depending on the molecular structure and crystalline structure of the sample.

[0021] The Raman spectrometer outputs the acquired Raman spectrum to a monitor or the like (not shown), and stores it in a memory storage unit (not shown) if necessary. The Raman detection system 8 may include the information processing device, a monitor, a memory storage unit, and other necessary components in addition to the optical imaging element and the Raman spectrometer.

[0022] In the embodiment shown schematically in FIGS. 1 and 2, the diameter of the focused spot 9 is approximately 1 μm on the light source side and approximately 30 μm on the Raman detection system side, so even a slight deviation of the optical axis reduces the accuracy of the Raman spectroscopic analysis. In FIGS. 1 and 2, the incident light optical element 41 and the Raman light optical element 42 have angle adjustment members 5 to correct the deviation of the optical axes.

[0023] The microscopic Raman spectroscopic device 1 of the present invention has at least one of the optical element for incident light and the optical element for Raman light. The optical element for incident light or the optical element for Raman light bends the optical path of the laser light from the light source, thereby enabling the miniaturization of the microscopic Raman spectroscopic device. From the viewpoint of further miniaturization of the microscopic Raman spectrometer, it is preferable to have both an optical element for incident light and an optical element for Raman light. Although it is possible to have a plurality of optical elements for incident light and an optical element for Raman light, if there are too many, the deviation of the optical axis becomes large and excessive man-hours are required for adjustment. Therefore, from the viewpoint of miniaturization and the man-hours for adjusting the optical axis, the number of optical elements for incident light and the number of optical elements for Raman light should be set appropriately.

[0024] In the microscopic Raman spectroscopic device of the present invention, at least one of the optical element for incident light and the optical element for Raman light (hereinafter, both will be collectively referred to as “optical element”) has an angle adjusting member 5 . The angle adjusting member 5 has two actuators 11 and 12 and one center bar 13, as shown in FIG. holder 10, the angle adjustment member 5 is an optical element holder 10 may not be included. holder 10, optical element holder When the optical element 10 is displaced as described below, the displacement is transmitted to the optical element 4. holder The optical element 10 is arranged so that the displacement of the optical element 10 is transmitted to the optical element 4. holder The optical element 4 is supported by a support 101 (not shown) along the circumference of the optical element 4. holder If the actuator 10 is not provided, the actuators 11 and 12 and the center bar 13 are arranged so as to be in direct contact with the optical element 4 . Also, optical elements holder The displacement of the optical element 4 may be transmitted to the optical element 4 via a center bar 13. For example, as shown in FIG. holder A suitable gap is provided between the optical element 10 and the optical element 4. holder The center bar 13 displaced in response to the displacement of the optical element 4 may be configured to displace the optical element 4 .

[0025] 3 is a view of the angle adjustment member 5 as seen from the optical element side, and the dotted line indicates the optical element as seen from the optical element side. holder 1 shows that two actuators 11 and 12 are installed on the back surface of 10. 4 is a cross-sectional view taken along the line AA in FIG. holder The actuators 11 and 12 pass through the approximate center of the optical element 4 and contact the approximate center of the optical element 4. The approximate center does not have to be exactly the center, but it is sufficient that the actuators 11 and 12 are installed at a position where the surface of the optical element 4 is displaced in three dimensions in response to the displacement of the actuators 11 and 12, as will be described later.

[0026] Actuators 11 and 12 are optical elements holder Two optical elements are arranged on the opposite side of the optical element 4 with respect to the optical element 10. holder If the actuator 10 is not provided, two actuators 11 and 12 are arranged so as to be in direct contact with the surface of the optical element 4 opposite to the surface that reflects the laser light.

[0027] The actuators 11 and 12 have a machine or an electric circuit that converts energy or an electric signal received from the outside into physical movement. As the actuators 11 and 12, for example, an actuator having a piezoelectric element is preferable. The micro-Raman spectroscopic device of the present invention preferably has an input device 14 for inputting energy or electrical signals to the actuator and a monitor 15 for visualizing the input values.

[0028] Actuators 11 and 12 receive external energy or electrical signals and are displaced in a direction perpendicular to the laser light or Raman light reflecting surface (hereinafter, both will be referred to as the "reflecting surface") of optical element 4 (in the direction of the arrow in FIG. 4). If actuators 11 and 12 have piezoelectric elements, an external voltage will displace their length in the direction perpendicular to the reflecting surface of optical element 4. In the case of piezoelectric elements, the greater the external voltage, the greater the displacement of actuators 11 and 12. 5 is a schematic diagram showing a state in which, when actuators 11 and 12 have piezoelectric elements, the length of actuator 11 is displaced in a direction perpendicular to the reflecting surface of optical element 4 (the direction of the arrow in FIG. 5) upon receiving an externally applied voltage. The solid line portion of actuator 11 indicates the original state, and the dashed line indicates that the length of actuator 11 is displaced in a direction perpendicular to the laser light reflecting surface of optical element 4 upon application of an external voltage.

[0029] The actuator 11 displaced in a direction perpendicular to the reflecting surface of the optical element 4 by applying a voltage is holder5. On the other hand, since no voltage is applied to the actuator 12, it is not displaced and remains in its original state. As a result, the optical element 4 shown in FIG. holder The actuator 11 side of the optical element 10 is displaced to the left side of the drawing. holder 10 is an optical element holder When 10 is displaced, the displacement is transmitted to the optical element 4, so that the actuator 11 side of the optical element 4 is also displaced to the left, resulting in the optical element 4 tilting.

[0030] On the other hand, the center bar 13 is an optical element holder 5, when the optical element 4 is tilted as shown in Fig. 5, the tip of the center bar 13 that is in contact with the optical element 4 moves downward in response to the tilt.

[0031] 4 and 5, the optical element 4 is holder 10 is shown holding the optical element 4 and the optical element holder 10 is an optical element holder It is sufficient if the structure is such that when the optical element 10 is displaced, the displacement is transmitted to the optical element 4. For example, the two may be connected by a plurality of rigid connecting members, and the optical element holder 10 may have claws that can hold the optical element 4. As shown in FIG. 6, the optical element 4 is connected to the center bar 13. holder 10 may be linked.

[0032] The structure of the center bar 13 that allows the tip of the center bar 13 to move 360° can be exemplified by a structure in which the center bar 13 is made up of multiple structures, and each structure is connected in a straight line by elastic bodies such as rubber or springs, movable connecting members such as bearings, hinges, etc. The center bar 13 is an optical element holder It does not need to be glued to 10, bar 13 penetrates optical element holder 10 penetrations and center bar It is preferable to have an air gap between them.

[0033] Optical elements holder 10, actuators 11 and 12 and optical element holder The purpose of preventing the contact surface with the actuator 10 from slipping as much as possible is to efficiently transfer the displacement of the actuators 11 and 12 to the optical element. holder It is preferable to be able to transmit it to 10. Optical elements holder Such slippage can be suppressed by increasing the coefficient of friction of the contact surfaces between 10 and actuators 11 and 12. Methods for increasing the coefficient of friction include roughening the surface and using a material with a high coefficient of friction such as polyolefin or polyvinyl chloride. As shown in FIG. 7, the actuators 11 and 12 are optical elements. holder The actuators 11 and 12 are provided with notches at the points where they contact the optical element 10. holder The tip portion that contacts the optical element 10 may be structured to fit into the notched portion to prevent slippage. holder The cutouts may be provided along the circumference of the optical element, or only at the portion where the actuators 11 and 12 are in contact. The cross-sectional shape of the cutouts may be triangular, rectangular, polygonal, semicircular, or semi-elliptical. holder The shape of the tip that comes into contact with 10 may be any of triangular, rectangular, other polygonal, semicircular, and semielliptical shapes.

[0034] Two actuators 11, 12 and a center bar 13 optical element holder The actuator 11, the center bar 13, and the optical element of the actuator 12 are not installed on a straight line. holder The upper installation position is optical Element holder On the installation surface of 10, it is preferable that the angle between actuator 11 and actuator 12 (θ in Figure 3) relative to center bar 13 is between 10° and 170°, preferably between 70° and 100°, more preferably approximately 90°, and even more preferably 90°. Optical elements holderIf 10 is not provided, the positional relationship between the actuator 11, center bar 13, and actuator 12 on the surface opposite the reflecting surface of the optical element 4 will be as described above. The preferred angles are also the same as above.

[0035] As described above, actuators 11 and 12 are displaced in a direction perpendicular to the reflecting surface of optical element 4 (the direction of the arrow in Figure 5) by external energy or an electrical signal. By changing the displacement of actuators 11 and 12 independently, the reflecting surface of optical element 4 can be adjusted to any angle in three dimensions. If the actuators 11 and 12 have piezoelectric elements, the angle can be adjusted by changing the applied voltage. Furthermore, if a constant voltage is always applied to the actuators 11 and 12, the displacement of the actuators from their normal positions can be varied from positive to negative by increasing or decreasing the voltage applied to the actuators. This allows the angle of the reflecting surface of the optical element 4 to be changed significantly.

[0036] There are no particular limitations on the cross-sectional shapes of the actuators 11 and 12 and the center bar 13, and they may be triangular, rectangular, polygonal, semicircular, or semi-elliptical. Furthermore, they do not need to be solid, and may be hollow to reduce weight. Optical elements holder When the angle adjusting member 5 has the optical element 10, holder The shape of 10 is not particularly limited, and may be any of a triangular plate, a square plate, other polygonal plate, a disk, and an elliptical plate.

[0037] As mentioned above, the energy or electrical signal to the actuators 11 and 12 adjustment By doing so, the angle of the reflecting surface of the optical element 4 can be changed. Therefore, if there is a misalignment between the optical axis of the laser light incident on the sample and the optical axis of the Raman light reflected from the sample, the misalignment of the optical axis can be corrected by monitoring on monitor 15 the energy or electrical signal applied to actuator 11 or 12 from input device 14, which inputs the energy or electrical signal, and adjusting it until the misalignment of the optical axis is eliminated. When the actuators 11 and 12 have piezoelectric elements, the voltage applied by the input device 14 may be changed until the misalignment of the optical axes is eliminated.

[0038] As shown in FIG. 8, the displacement angle α of the optical element 4 is expressed by the following formula (1), where ΔL is the displacement of the actuator 11 or 12 and D is the distance between the center bar 13 and the actuator 11 or 12. α =tan -1 (ΔL / D) (1) Therefore, by setting the distance D between the center bar 13 and the actuator 11 or 12 in advance, the precision of the adjustable angle α can be increased, and an extremely small angle can be adjusted. The distance D between the center bar 13 and the actuator 11 or 12 is the distance between the center of the center bar 13 and the center of the actuator 11 or 12 .

[0039] In the microscopic Raman spectrometer of the present invention, the optical axis can be adjusted without opening the housing of the device, and fine adjustment of the optical axis can be performed without placing an excessive burden on the person making the adjustment. Furthermore, by using the angle adjusting member for an optical element of the present invention, a microscopic Raman spectrometer can be provided in which fine adjustment of the optical axis can be easily performed.

[0040] [Aspect] It will be appreciated by those skilled in the art that the exemplary embodiment is a specific example of the following aspects:

[0041] [1] Laser light source, Microscope optics, a plate for fixing the sample; a Raman optical detection system having an optical imaging element for producing a visible image; at least one optical element selected from the group consisting of an incident light optical element for guiding the laser emitted from the laser light source to the microscope optical unit and a Raman light optical element for guiding the Raman light reflected from the sample to the Raman detection system; and At least one of the optical element for incident light and the optical element for Raman light is 、 At least one of the optical element for incident light and the optical element for Raman light Displacement and an angle adjusting member having a center bar whose tip is connected to the center of the at least one optical element for incident light or one optical element for Raman light. 、 The center bar is made up of a plurality of structures, each structure being connected by a movable member. Raman microscope.

[0042] According to the invention [1] above, a microscopic Raman spectrometer is provided in which the optical axis can be adjusted without opening the device housing, and in which fine adjustment of the optical axis can be performed without placing an excessive burden on the adjuster.

[0043] [2] Multiple the incident light optical element; Multiple The microscopic Raman spectroscopic device according to [1], which has the optical element for Raman light, and at least one of the optical elements for incident light and at least one of the optical elements for Raman light have the angle adjustment member.

[0044] [3] The Raman microscope spectroscopic device according to [1] or [2], wherein the microscope optical unit is a confocal optical system. [4] Ibid. From the center bar The two actuators Line heading towards are at 90° angles to each other The two actuators are arranged so as to The angle adjustment member Installed The Raman microscope spectroscopic device according to any one of [1] to [3] above,

[0045] [5] The Raman microspectroscopy apparatus according to any one of [1] to [4], wherein the actuator has a piezoelectric element. [6] The micro-Raman spectroscopic apparatus according to [5], further comprising a device for applying a voltage to the piezoelectric element. [7] The micro-Raman spectroscopic device according to any one of [1] to [6], wherein the angle adjustment member has an optical element holder. [8] Ibid. Operable parts teeth 、 Elastic body, Movable connecting member , or hinge is The Raman microspectroscopy device according to any one of [1] to [7] above,

[0046] From [2] above 8 According to the invention of [1], a miniaturized micro-Raman spectroscopic device is provided that allows for easier adjustment of the optical axis.

[0047] It will also be understood by those skilled in the art that the exemplary embodiment is a specific example of the following aspects. [9] Two actuators , optical element Connected to the center R Equipped with a center bar The center bar is made up of multiple structures, each of which is connected by a movable member. Angle adjustment component for optical elements.

[0048] The above [ 9 According to the invention of [1], a microscopic Raman spectrometer analysis method is provided in which the optical axis can be easily finely adjusted by using an angle adjusting member for an optical element.

[0049]

[10] The center bar The tip of the optical element from the two actuators Each tip on the optical element side The two actuators are arranged so that the lines pointing to the Placed The angle adjusting member for an optical element according to [9] above.

[11] The angle adjusting member for an optical element according to [9] or

[10] , wherein the actuator has a piezoelectric element.

[0050] [ 12 ] Optical elements holder The above-mentioned [ 9 ]from[ 11 10. An angle adjusting member for an optical element according to any one of the preceding items.

[0051] The above [ 10 ]from[ 12 According to the invention of [1], a microscopic Raman spectrometer analysis method is provided that allows fine adjustment of the optical axis to be performed more easily. [Explanation of symbols]

[0052] A: Laser light source 1: Microscopic Raman spectrometer 2: Plate 3: Microscope optical section 4: Optical elements 41: Optical element for incident light 42: Optical element for Raman light 5: Angle adjustment member 6: Beam splitter 7: Condenser lens 8: Raman detection system 9: Light focusing spot 10: Optical elements holder 101: Optical element holding part 11, 12: Actuator 13: Center bar 14: Input device for inputting energy or electrical signals 15: Monitor

Claims

1. laser light source, Microscope optics, a plate for fixing the sample; a Raman detection system having an optical imaging element for producing a visible image; and at least one optical element selected from the group consisting of an incident light optical element for guiding the laser emitted from the laser light source to the microscope optical unit and a Raman light optical element for guiding the Raman light reflected from the sample to the Raman detection system; and at least one of the optical element for incident light and the optical element for Raman light has two actuators that push from the rear surface to displace the at least one optical element for incident light and the at least one optical element for Raman light, and an angle adjustment member that has a center bar whose tip is connected to the center of the at least one optical element for incident light or the at least one optical element for Raman light, The center bar is made up of a plurality of structures, each structure being connected by a movable member. Raman microscope.

2. 2. The micro-Raman spectroscopic apparatus according to claim 1, comprising a plurality of the incident light optical elements and a plurality of the Raman light optical elements, and at least one of the incident light optical elements and at least one of the Raman light optical elements has the angle adjustment member.

3. 3. The micro-Raman spectrometer according to claim 1, wherein the microscope optical unit is a confocal optical system.

4. 4. The micro-Raman spectroscopic device according to claim 1, wherein the two actuators are installed on the angle adjustment member so that lines extending from the center bar to the two actuators form an angle of 90 degrees with each other.

5. The Raman microspectrometer according to claim 1 , wherein the actuator has a piezoelectric element.

6. 6. The Raman microspectroscopy apparatus according to claim 5, further comprising a device for applying a voltage to the piezoelectric element.

7. The Raman microscope according to claim 1 , wherein the angle adjusting member has an optical element holder.

8. 8. The Raman microscope spectroscopic apparatus according to claim 1, wherein the movable member is an elastic body, a movable connecting member, or a hinge.

9. Two actuators, a center bar connected to the center of the optical element; The center bar is made up of a plurality of structures, each of which is connected by a movable member. Angle adjustment component for optical elements.

10. An angle adjustment member for optical elements as described in claim 9, wherein the two actuators are arranged so that the lines extending from the tip of the center bar on the optical element side to the respective tips of the two actuators on the optical element side form an angle of 90° with each other.

11. 11. The angle adjusting member for an optical element according to claim 9, wherein the actuator has a piezoelectric element.

12. The angle adjusting member for an optical element according to claim 9 , further comprising an optical element holder.

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