Analysis method and analysis device using optical microscope

Abstract

To provide an analysis method capable of easily obtaining a content ratio of compositions at a low cost for an analysis object sample including a plurality of types of compositions.SOLUTION: A method for quantitatively analyzing a content ratio of each of a plurality of types of compositions included in an analysis object sample by using an optical microscope comprises: a first step of performing spectrometry by emitting light to each region of the plurality of types of compositions existing in an image obtained by imaging the analysis object sample with the optical microscope; a second step of characterizing each of the plurality of types of compositions with a specific wavelength indicating the unique optical characteristics on the basis of the result of the spectrometry; a third step of performing imaging while emitting the light in the characterized specific wavelength to the analysis object sample; a fourth step of measuring an area of a region occupied by the composition characterized with the specific wavelength from the image acquired by imaging; and a fifth step of calculating the content ratio by calculating a ratio of occupation of the measured area of the region to the area of the regions of all the compositions in the image.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an analytical method and analytical device using an optical microscope, and in particular to an analytical method and analytical device that can easily and inexpensively determine the content ratios of multiple types of compositions in an analysis sample using an optical microscope. [Background technology]

[0002] For example, in the field of nonferrous metal smelting, there is a need for a technique for accurately quantitatively analyzing the composition of useful minerals and less valuable gangue contained in mined ores in order to determine the types of flotation agents, such as inhibitors, to be used during flotation, as well as their dosage. Chemical analysis methods, such as ICP emission spectroscopy and X-ray fluorescence spectroscopy, are known as methods for analyzing the composition of substances. While these methods can quantitatively analyze the overall composition of the sample, when the sample contains multiple types of components, such as the ore mentioned above, it is difficult to accurately quantitatively analyze the proportions of these components.

[0003] Therefore, a method has been proposed in which imaging by an optical microscope and image analysis technology are combined to analyze the content ratios of multiple types of compositions in an analysis target sample. For example, Patent Document 1 discloses a technology in which the sample to be analyzed is embedded in resin, the analysis surface is mirror-finished, and then the analysis surface is imaged with a reflected light microscope, and the obtained image is binarized using hue, brightness, and saturation, thereby quantitatively analyzing the analysis target sample.

[0004] In recent years, the use of mineral particle analyzers (MLA) for quantitative analysis of materials has also been increasing. This technology, also known as SEM-EDS (Scanning Electron Microscope-Energy Dispersive X-ray Spectroscopy), involves scanning an electron beam across the surface of a sample containing multiple components to detect secondary and backscattered electrons, thereby identifying the morphology of the components on the sample surface. It also performs elemental analysis by detecting characteristic X-rays emitted by the electron beam irradiation, allowing the content of each of the multiple components contained in the sample to be determined. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 01-307664 DISCLOSURE OF THE INVENTION [Problem to be solved by the invention]

[0006] The technology described in Patent Document 1 is believed to enable easy quantitative analysis of samples containing multiple compositions without requiring special expertise. However, when a sample contains multiple compositions with very small differences in the intensity of reflected light, it is difficult to distinguish between these multiple compositions when imaging the analysis surface with an optical microscope and processing the image. On the other hand, while MLAs can accurately perform quantitative analysis even for samples containing multiple compositions with very small differences in the intensity of reflected light, MLAs are extremely expensive analytical devices and are therefore overkill for some applications, such as analyzing mined ores. Therefore, they are not suitable for applications requiring simple and low-cost analysis.

[0007] The present invention has been made in consideration of the above circumstances, and aims to provide an analytical method and analytical device that can easily and inexpensively determine the content ratios of multiple types of compositions in an analytical sample containing these compositions. [Means for solving the problem]

[0008] As a result of extensive research to achieve the above-mentioned object, the inventors have discovered that, for an analysis sample containing multiple types of compositions, by previously understanding the optical properties specific to each of the compositions, the content ratios of the compositions can be determined easily and at low cost even in cases where the sample contains multiple types of compositions with extremely small differences in the intensity of reflected light, and have thus completed the present invention.

[0009] That is, the analytical method using an optical microscope according to the present invention is a method for quantitatively analyzing the content ratio of each of multiple types of compositions contained in a sample to be analyzed using an optical microscope, and is characterized by comprising: a first step of performing spectroscopic analysis by irradiating light onto each region of the multiple types of compositions present in an image obtained by imaging the sample to be analyzed with the optical microscope; a second step of characterizing each of the multiple types of compositions with a specific wavelength that exhibits unique optical properties based on the results of the spectroscopic analysis; a third step of imaging the sample to be analyzed while irradiating the sample with light of the characterized specific wavelength; a fourth step of measuring the area of ​​the region occupied by the composition characterized by the specific wavelength from the image obtained by the imaging; and a fifth step of calculating the content ratio by calculating the ratio of the area of ​​the measured region to the area of ​​all composition regions in the image.

[0010] Furthermore, the analytical apparatus according to the present invention is an apparatus for quantitatively analyzing the content ratio of each of multiple types of compositions contained in a sample to be analyzed, and is composed of an optical microscope that images the analysis surface of the sample to be analyzed, a spectroscopic analyzer that performs spectroscopic analysis by irradiating light onto each region of the multiple types of compositions present in the captured image, and an image analyzer that performs image analysis based on the image captured by the optical microscope and data obtained by the spectroscopic analyzer, and is characterized by comprising: means for characterizing each type of composition by a specific wavelength that exhibits unique optical properties through the spectroscopic analysis; means for measuring the area of ​​the region occupied by the composition characterized by the specific wavelength from an image captured while irradiating the sample to be analyzed with light of the characterizing specific wavelength; and means for calculating the content ratio by calculating the ratio of the area of ​​the measured region to the area of ​​all regions of the compositions in the image. [Effects of the Invention]

[0011] According to the present invention, it is possible to easily and inexpensively determine the content ratios of multiple types of compositions in an analysis sample containing these compositions, and therefore the industrial value of the present invention is extremely great. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 1 is a block flow diagram showing an embodiment of an analysis method using an optical microscope of the present invention. [Figure 2] 1 is a configuration diagram of a specific example of an analytical device using an optical microscope of the present invention. [Figure 3] 1 is a graph showing the spectral profiles of compositions A to D obtained in examples of the present invention. [Figure 4] 1A and 1B are schematic diagrams of images acquired by an analysis method according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0013] An embodiment of an analytical method using an optical microscope according to the present invention will be described in detail below. The analytical method according to this embodiment of the present invention is a method for quantitatively analyzing the content ratios of each of a plurality of types of compositions contained in an analysis sample using an optical microscope, and includes the following steps: a first step of spectroscopically analyzing each of the plurality of types of compositions present in an image obtained by imaging the analysis sample with the optical microscope, irradiating light onto each of the regions of the plurality of types of compositions present in the image; a second step of characterizing each of the plurality of types of compositions with a specific wavelength exhibiting unique optical properties based on the results of the spectroscopic analysis; a third step of imaging the analysis sample while irradiating the analysis sample with light of the characterized specific wavelength; a fourth step of measuring the area of ​​the region occupied by the composition characterized by the specific wavelength from the image obtained by the imaging; and a fifth step of calculating the proportion of the area of ​​the measured region to the area of ​​all regions of the compositions in the image, thereby calculating the content ratio.

[0014] As described above, the samples targeted by the analytical method of the embodiment of the present invention contain a plurality of types of compositions. Examples of such samples include raw ore for dry copper smelting, which contains useful metals such as sulfide ore and oxide ore, gangue with little utility value, and non-metallic oxides; concentrates recovered by flotation of the raw ore and the remaining tailings; and intermediates containing useful metals, slag composed of slag components, and other oxides, which are produced by smelting the concentrate in the dry copper smelting process using the intermediate raw material.

[0015] As described above, when a sample to be analyzed contains multiple types of compositions, a known method for determining the content ratio of each of the multiple types of compositions is to first embed the sample to be analyzed in resin, and then mirror-polish the embedded sample to expose the analytical surface in a thin slice form, photograph the embedded sample using an optical microscope, analyze the image obtained, determine the area of ​​the region occupied by each composition in the image, and determine the content ratio of the multiple types of compositions based on the area ratio of the obtained multiple types of compositions.

[0016] In the imaging using the optical microscope, so-called white light that includes a wide range of wavelengths, such as a halogen lamp, is used as the light source. However, depending on the sample to be analyzed, the image of reflected light captured when irradiated with white light may contain multiple types of compositions, making it difficult to distinguish one type of composition from another. In such cases, it has been difficult to accurately determine the content ratios of the multiple compositions contained in the sample to be analyzed.

[0017] In contrast, the analytical method of an embodiment of the present invention first performs spectroscopic analysis on a sample to be analyzed using a spectroscopic analyzer incorporated into an optical microscope, as described above, to characterize each of the multiple types of compositions contained in the sample to be analyzed by a specific wavelength that exhibits unique optical properties, and then images are taken while irradiating the sample to be analyzed with light of this specific wavelength, making it possible to clearly distinguish in the obtained image the area occupied by the composition characterized by the specific wavelength from the area occupied by other compositions.

[0018] More specifically, as shown in Figure 1, an embedded sample is prepared by embedding a powdered or granular sample to be analyzed in resin and then polishing it to a mirror finish. In the first step, the embedded sample is placed on the stage of an optical microscope. Measurement points are determined for each region of multiple compositions appearing on the analysis surface of the embedded sample by visual observation using an optical microscope with a normal light source, and light is irradiated onto the measurement points for spectroscopic analysis. This results in a spectrum for each composition. In this first step, spectroscopic analysis may be performed by determining only one measurement point for each type of composition that can be visually distinguished by its shape, brightness, etc., or by determining measurement points for all composition regions appearing within the field of view, regardless of the type of composition that can be visually distinguished.

[0019] Next, in the second step, the spectral profiles of the multiple compositions obtained in the first step are compared, and a portion of each spectrum whose relative intensity significantly differs from the relative intensity of the other spectra is selected, and each composition is characterized by the wavelength of that portion. For example, if a certain composition contained in the sample to be analyzed has the optical property of absorbing light of a specific wavelength, its spectrum will have a characteristic profile that is convex downward and steeply decreases at that specific wavelength. On the other hand, if another composition has the optical property of not absorbing light at all within a specific range of wavelengths, its spectrum will have a characteristic profile that is convex upward and gently increases within that wavelength range. By comparing the profiles in this way, each composition can be characterized by a specific wavelength.

[0020] Even if the relative intensity of a certain spectrum is difficult to clearly distinguish from other spectra, this does not pose a problem if this difficult-to-distinguish spectrum is only for one type of composition among multiple compositions, as described below. Furthermore, if the profile of one spectrum is nearly identical to the profile of another spectrum across the entire wavelength range, it can be determined that these two spectra belong to the same type of composition. Therefore, even if spectroscopic analysis is performed on the regions of all compositions appearing in the field of view in the first step, as described above, the specific wavelengths for each type of composition can be determined in this second step.

[0021] Next, in the third step, the embedded sample on the stage is irradiated with light of a specific wavelength, which was characterized for each composition in the previous second step, and then imaged using an optical microscope. The specific wavelength of light may be obtained by using a single-wavelength light source that emits the specific wavelength, or by passing light emitted from a general light source through a single-wavelength filter that transmits only the specific wavelength. Furthermore, the specific wavelength of light may be irradiated either by an epi-illumination method, in which the embedded sample is irradiated from the objective lens side, or by a transmission method, in which the embedded sample is irradiated from the opposite side of the objective lens. Generally, the former method is preferred for samples that are difficult to transmit light through or are thick.

[0022] Next, in the fourth step, the area of ​​the region occupied by the composition characterized by the specific wavelength is measured from the image obtained by irradiating with light of a specific wavelength in the third step. For example, in the second step before the previous step, a powdery analysis target sample composed of three types of compositions B to D was embedded in a resin composed of composition A, and four spectral profiles obtained by spectroscopic analysis of the embedded sample were compared. The profile of composition A was measured at a wavelength λ A The relative intensity at wavelength λ is significantly different from that of the other compositions B, C, and D, and the profile of composition B shows a downward convex steep decline. B In the case where the relative intensity of composition D is significantly different from that of the other compositions A, C, and D at wavelength λ , and the relative intensity of composition D is significantly higher than that of the other compositions A, B, and C over almost the entire wavelength range, and the relative intensity of composition C is not significantly different from that of the other compositions A and B, composition A is considered to be the A and composition B can be characterized by a wavelength λ B and composition D can be characterized in the entire wavelength range.

[0023] Therefore, the embedded sample is first exposed to light of wavelength λ A In the image obtained by imaging with an optical microscope while irradiating light of wavelength λ A The area of ​​the dark area is measured to determine the area S of the area occupied by composition A in the image. A On the other hand, the wavelength λ B In the image obtained by irradiating the sample with light of wavelength λ with an optical microscope, the area where composition B is present is B The area of ​​the brightly-appearing region is measured to determine the area S of the region occupied by composition B in the image. B can be easily obtained.

[0024] In addition, since the relative intensity of composition D is different from that of the other compositions A to C in almost the entire wavelength range, the area in which composition D exists can be easily identified. Therefore, the area S of the area occupied by composition D in the image can be easily identified. D The area S of the region where composition C exists can be easily calculated. C is calculated from the area of ​​the image where compositions A to D are present, by the wavelength λ A The area S of the region of composition A measured in the image taken with light A , wavelength λ B The area S of the region of composition B measured in the image taken with light B , and the area S of the region of composition D D can be found by excluding

[0025] Next, in the fifth step, the analysis surface of the embedded sample, in which the powdery analysis sample composed of compositions B to D is embedded in the resin composed of composition A as described above, is photographed multiple times using an optical microscope while changing the wavelength of the light irradiated, and the area S of the region occupied by each of compositions A to D is calculated for each of the multiple images. A ~S D The content ratio of each composition in the sample to be analyzed can be calculated from the ratio of these values ​​to the total value. For example, the volumetric content ratio V of composition B B can be calculated from the following formula 1.

[0026] [Formula 1] TIFF0007760944000001.tif16144If the density of each composition is known, the mass-based content ratio M of composition B can be calculated using the following formula 2. B where ρ B , ρ C , and ρ D are the densities of composition B, composition C, and composition D, respectively.

[0027] [Formula 2] TIFF0007760944000002.tif16150

[0028] In the analytical method according to an embodiment of the present invention, it is preferable to repeat the above steps 1 to 5 for each of multiple locations on the analysis surface of the embedded sample using an optical microscope, and calculate the arithmetic mean of the content ratios of each composition determined for each of the images taken at these multiple locations. This makes it possible to average out the variation in the content ratios of each composition depending on the location where the images are taken, thereby improving the accuracy of the analytical results.

[0029] When using an optical microscope to image multiple locations on the analysis surface of an embedded sample as described above, it is preferable to use an optical microscope with a tiling function, which allows for efficient quantitative analysis. The tiling function automatically controls the XY movement and imaging of the stage on which the embedded sample is placed, thereby continuously imaging the analysis surface of the embedded sample, and then stitches together the multiple images thus acquired to ultimately obtain a single image covering a wide range (multiple fields of view) in the optical microscope field of view.

[0030] The analytical method according to the embodiment of the present invention described above can be suitably carried out, for example, by an analytical device such as that shown in Fig. 2. That is, this analytical device is composed of at least an optical microscope 1 that captures an image of the analysis surface of a sample to be analyzed, a spectroscopic analyzer 2 that performs spectroscopic analysis by irradiating light onto each region of the multiple types of compositions present in the captured image, an image analyzer 3 that performs image analysis based on the image captured by the optical microscope 1 and the data obtained by the spectroscopic analyzer 2, and a control device 4 such as a personal computer that controls these devices.

[0031] The image analysis device 3 includes a means for characterizing each type of composition by a specific wavelength that exhibits unique optical properties based on the spectroscopic analysis performed by the spectroscopic analysis device 2, a means for measuring the area of ​​a region occupied by a composition characterized by the specific wavelength from an image captured while irradiating the sample to be analyzed with light of the specific wavelength, and a means for calculating the content ratio of the measured region by calculating the proportion of the area of ​​the region of all compositions in the image.

[0032] The above-described analytical device may be provided with a mechanism capable of irradiating the embedded sample with single-wavelength light by replacing the light source 5 of the optical microscope 1 with a single-wavelength light source. Alternatively, the analytical device may be provided with a mechanism capable of irradiating the sample with single-wavelength light by placing a single-wavelength filter 6 on the optical axis between the light source 5 of the optical microscope 1 and the sample to be observed. The analytical method according to the embodiment of the present invention described above will now be described in more detail with reference to the following examples and comparative examples. [Example]

[0033] [Example] The sample to be analyzed was matte, an intermediate product produced in the flash furnace of a pyrometallurgical copper smelting process, which was cooled and then crushed to a particle size of a few millimeters or less. Analysis of this sample by ICP atomic emission spectroscopy revealed that it was a mixture of three compositions: Composition B, consisting of oxides derived from the copper concentrate raw material that do not react during the smelting process in the flash furnace; Composition C, which is a slag consisting of slag components produced during the smelting process in the flash furnace; and Composition D, which is a metal consisting of metal components produced during the smelting process in the flash furnace. Separate analysis of the composition revealed that the majority of the sample to be analyzed, accounting for more than 80%, was metal from Composition D, with the other components each accounting for less than 10%.

[0034] Because the sample to be analyzed is in a granular form, it is difficult to observe it using an optical microscope as is. Therefore, the granular sample to be analyzed was mixed with a powdered resin, which was then heated and hardened to embed the sample in the solidified resin. Specifically, a thermosetting phenolic resin was used as the embedding resin, and the sample was placed in a vial in a ratio of 1 part of the sample to 10 parts of resin by volume, and mixed using a rocking mill.

[0035] The resulting mixture was heated to 90°C using a pressure heating device (CitoPress-20) manufactured by Marumoto Struers Co., Ltd., and held there for 4 minutes, then heated to 180°C and held there for 5 minutes under a pressure of 75 bar, thereby allowing it to harden. To expose the observation surface (analysis surface) of the resulting embedded sample, it was polished with abrasive paper and buffed, and the exposed surface of the cross section of this embedded sample was then polished to a mirror finish to obtain an embedded sample.

[0036] The resulting embedded sample was placed on the stage of a Hirox Corporation optical microscope (Microscope RH-2000) with a tiling function, and the analysis surface was subjected to spectroscopic and image analysis according to the procedures (1) to (3) below to determine the content of each component. Image analysis was performed using a personal computer equipped with Mitani Corporation's image analysis software (WinROOF2018), and spectroscopic analysis was performed using a JASCO Corporation UV-Vis-NIR microspectrophotometer (MSV-5200). The light source for the optical microscope was a 300W xenon light source (MAX303) manufactured by Asahi Spectroscopy.

[0037] (1) Determination of the specific wavelength of each composition based on spectroscopic analysis Using a halogen or xenon lamp as the light source for the optical microscope, measurement targets were determined for each of the four compositions A to D that appeared on the analysis surface of the embedded sample by visual observation. Light was then irradiated onto these targets for spectroscopic analysis. This spectroscopic analysis yielded four spectra, as shown in Figures 3(a) and 3(b). Comparing the profiles of these four spectra, we found that the spectrum of composition A exhibited a distinct optical characteristic of a downward convex slope at 270 nm, distinct from the other spectra. The spectrum of composition B exhibited a distinct optical characteristic of an upward convex slope at 440 nm, distinct from the other spectra. Therefore, compositions A and B were characterized at these wavelengths: 270 nm and 440 nm, respectively. Furthermore, the spectrum of composition D had a higher relative intensity than the other spectra across almost the entire wavelength range, and therefore composition D was characterized across this entire wavelength range.

[0038] (2) Area measurement of each composition by irradiating with specific wavelengths As described above, composition D could be characterized over the entire wavelength range, so the analysis surface of the embedded sample was first irradiated with light from the halogen lamp used as the light source for the optical microscope, to obtain the first image shown in Figure 4(a). Because this first image was captured while irradiating it with light of a wavelength that characterizes composition D, the area with the highest brightness occupied by composition D could be easily distinguished from the areas occupied by the other compositions. This made it possible to measure the area of ​​the region occupied by composition D in the image.

[0039] Next, because composition A could be characterized at a wavelength of 270 nm, the light from a xenon lamp, the light source for the optical microscope, was passed through a 270 nm filter (LX0270) manufactured by Asahi Spectroscopy Co., Ltd., and the light obtained was irradiated onto the analysis surface of the embedded sample, yielding the second image shown in Figure 4(b). Because this second image was captured while irradiating the sample with light of the wavelength that characterizes composition A, the dark region occupied by composition A, which had the lowest brightness, could be easily distinguished from the regions occupied by the other compositions, making it possible to measure the area of ​​the region of composition A.

[0040] Next, since composition B could be characterized at a wavelength of 440 nm, the light from a halogen lamp (light source for the optical microscope) was passed through a 440 nm filter (Techspec, #86-350) to irradiate the analysis surface of the embedded sample with the light obtained, resulting in the third image shown in Figure 4(c). Because this third image was captured while irradiating the analysis surface with light at a wavelength characteristic of composition B, the brighter regions occupied by composition B and the brighter regions occupied by composition D could be distinguished from the regions occupied by compositions A and C. Since the area of ​​the composition D region among the regions of compositions B and D was already determined when processing the first image described above, excluding this region made it possible to measure the area of ​​the region occupied by composition B. The areas of the regions occupied by compositions A, B, and D could be determined by processing the first through third images described above, and by subtracting these values ​​from the overall image area, the area of ​​the region occupied by composition C within the image could be determined.

[0041] (3) Calculation of the content of each component The optical microscope was set to a magnification of 300x when capturing the first to third images. A tiling function was used to continuously capture a matrix of 10 fields of view in each direction (i.e., a total of 100 fields of view). The resulting images were then stitched together to form a single image covering a wide area (combining multiple fields of view) within the optical microscope. The area measurements were performed by importing the image data into an image analyzer and determining a threshold value using a conventional method to calculate the area occupied by each composition. From the area ratios of the resulting compositions A to D, the content ratios of each composition could be calculated, as shown in Table 1 below.

[0042] [Table 1]

[0043] [Comparative Example] Instead of characterizing each composition by a specific wavelength based on spectroscopic analysis as in the above-mentioned Examples, we attempted to calculate the content ratio of each composition by analyzing images taken with an optical microscope while irradiating the same embedded sample as in the Examples with light from a halogen lamp used as a light source. As a result, it was difficult to distinguish the areas occupied by compositions A to C, which had weak relative intensities, on the image, and therefore it was not possible to measure the area ratio except for 85% of composition D. The results of this comparative example, together with the above-mentioned Examples, are shown in Table 2 below.

[0044] [Table 2]

[0045] Furthermore, when each composition was analyzed separately using MLA, it was found that composition A was a resin. Therefore, to determine the content ratios of compositions B, C, and D that constituted the sample to be analyzed, the value for composition A was subtracted from the values ​​in Table 1 above, and the total of the values ​​for the remaining three compositions B, C, and D was set as 100%, and the content ratios of each composition were converted. The results are shown in Table 3 below.

[0046] [Table 3]

[0047] From the results of the above examples and comparative examples, it was found that by adopting the analytical method of the examples of the present invention, it is possible to easily and inexpensively analyze the content ratios of multiple types of compositions even in an analysis sample containing only a small difference in the intensity of reflected light. [Explanation of symbols]

[0048] 1. Optical microscope 2 Spectrometer 3. Image analysis equipment 4. Control Measures 5 light source 6 Single Wavelength Filters

Claims

1. A method for quantitatively analyzing the content ratio of each of multiple types of compositions contained in a sample to be analyzed using an optical microscope, comprising: a first step of performing spectroscopic analysis by irradiating light onto each region of the multiple types of compositions present in an image obtained by imaging the sample to be analyzed with the optical microscope; a second step of characterizing each of the multiple types of compositions with a specific wavelength that exhibits unique optical properties based on the results of the spectroscopic analysis; a third step of imaging the sample to be analyzed while irradiating the sample to light of the characterized specific wavelength; a fourth step of measuring the area of ​​the region occupied by the composition characterized by the specific wavelength from the image obtained by imaging; and a fifth step of calculating the content ratio by calculating the ratio of the area of ​​the measured region to the area of ​​all regions of the compositions in the image.

2. 2. The analysis method using an optical microscope according to claim 1, wherein a single wavelength light source is used for the light having the specific wavelength.

3. 2. The analysis method using an optical microscope according to claim 1, wherein light having the specific wavelength is passed through a single wavelength filter.

4. The analytical method using an optical microscope according to any one of claims 1 to 3, characterized in that the imaging of the sample to be analyzed by the optical microscope involves taking a plurality of images using a tiling function of the optical microscope, repeating steps 1 to 5 for each of the group of images thus obtained, and arithmetically averaging the resulting plurality of content ratios.

5. 1. An apparatus for quantitatively analyzing the content ratio of each of a plurality of types of compositions contained in a sample to be analyzed, comprising: an optical microscope that images an analysis surface of the sample to be analyzed; a spectroscopic analyzer that performs spectroscopic analysis by irradiating light onto each region of the plurality of types of compositions present in the captured image; and an image analyzer that performs image analysis based on the image captured by the optical microscope and data obtained by the spectroscopic analyzer, wherein the image analyzer comprises: means for characterizing each type of composition by a specific wavelength that exhibits unique optical properties through the spectroscopic analysis; means for measuring the area of ​​the region occupied by the composition characterized by the specific wavelength from an image captured while irradiating the sample to be analyzed with light of the characterizing specific wavelength; and means for calculating the content ratio by calculating the ratio of the area of ​​the measured region to the area of ​​all regions of the compositions in the image.

6. 6. The analytical device according to claim 5, wherein the light source of the optical microscope is replaceable with a single wavelength light source.

7. 6. The analytical device according to claim 5, wherein the optical microscope is capable of mounting a single wavelength filter on an optical axis between a light source and a mounting portion for the sample to be analyzed.

8. The analytical device according to any one of claims 5 to 7, wherein the optical microscope has a tiling function.

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