Coating device and coating system

Abstract

The purpose of the present invention is to provide an application device of which an extending portion can be easily replaced and cleaned, for example, and that has excellent maintainability and improved stability of an extending operation by the extending portion. An application device 10 applies a film-forming liquid onto a peripheral portion of a substrate while the substrate and an application unit 20 are moved relative to each other. The application unit 20 includes an application mechanism 21 and an extension mechanism 30. The application mechanism 21 comprises an applying portion 22 that applies the film-forming liquid onto at least a peripheral-portion end surface of the substrate. The extension mechanism 30 comprises: an extending portion 31 that extends the film-forming liquid applied by the applying portion 22 into a thin film on the peripheral-portion end surface of the substrate and the upper and lower surfaces of the peripheral portion; and a biasing mechanism 34 that biases the extending portion 31 toward the peripheral-portion end surface of the substrate and the upper and lower surfaces of the peripheral portion. The application device 10 is configured such that the extending portion 31 can be removed without removing the biasing mechanism 34 from the extension mechanism 30.

Description

[Technical Field]

[0001] The present invention relates to a coating device, a drying device, a light irradiation device, and a coating system, and more specifically to a coating device capable of coating a liquid agent on the peripheral edge of a substrate, a drying device capable of drying and hardening the liquid agent coated on the peripheral edge of a substrate, a light irradiation device, and a coating system configured by combining these devices. [Background technology]

[0002] Printed wiring boards made of glass epoxy, composite, paper phenolic, or other materials are widely used as substrates for mounting electronic components. When these printed wiring boards are cut, fine dust composed of epoxy resin or glass fiber is generated at the cut portion. This fine dust can cause poor contact and reduced quality in the board circuits. Therefore, it is preferable to remove dust generated during cutting of the board before manufacturing the printed wiring board. Even if dust is removed from the cut end faces of the printed wiring board, the fragile end faces can easily collapse during subsequent etching processes and other board manufacturing processes, potentially generating additional dust.

[0003] Therefore, the present applicant has previously proposed a coating device and a coating method that can prevent the end face portion from collapsing by coating the end face of a substrate with a film-forming liquid to form a film (see Patent Document 1 below). In the coating device described in Patent Document 1, a pair of coating rollers are arranged opposite each other so as to sandwich the edge of the substrate, and are moved along the periphery of the substrate, thereby coating the edge surface of the substrate with a film-forming liquid.

[0004] Furthermore, in recent years, in order to accommodate the trend toward thinner and smaller electronic devices, there has been an increasing demand for thin copper-clad laminate substrates (also called package substrates) with thicknesses of approximately several tens of μm to several hundreds of μm. For such thin substrates, it is not easy to apply the film-forming liquid only to the edge surfaces of the substrate, and it has been considered desirable to apply the liquid to the peripheral portion including the edge surfaces of the substrate, for example, in a frame-like manner.

[0005] Therefore, the present applicant has previously proposed a coating device and coating method that can prevent the end face portion from collapsing by applying a film-forming liquid in a frame-like shape to the peripheral portion, including the end face, of a substrate to form a film (Patent Document 2 below). In the coating device described in Patent Document 2, a liquid reservoir for storing a film-forming liquid and a coating unit for coating the film-forming liquid adhered to the edge of a substrate that has passed through the liquid reservoir are provided on the opposing surfaces of a pair of upper and lower coating heads. With the edge of the substrate inserted in a gap formed on the opposing surfaces of the pair of coating heads, the pair of coating heads are moved along the peripheral edge of the substrate, so that the film-forming liquid is coated in a frame-like pattern on the peripheral edge, including the edge surface of the substrate.

[0006] Furthermore, recently, the types of substrates to be coated have increased, and the manufacturing processes for these substrates have also become more diverse. In addition, the manner in which the film-forming liquid is applied to the substrate has also become more diverse depending on the type of substrate and the manufacturing process, and there are cases in which the coating devices described in Patent Documents 1 and 2 cannot adequately handle such situations.

[0007] For example, in the coating device described in Patent Document 2, the film-forming liquid adhering to the edge surface of the substrate that has passed through the liquid reservoir and coating section of the pair of coating heads drips onto the lower part of the edge surface of the substrate and wraps around the corners of the lower part of the edge surface, causing small pools of liquid. As a result, the thickness of the coating film at the corners of the lower part of the edge surface of the substrate after drying may be partially thick, and there is a risk that the thickness of the coating film formed on the three peripheral surfaces of the substrate may not be uniform.

[0008] Furthermore, in the coating device described in Patent Document 2, the substrate is inserted into the gap between the pair of coating heads each having the liquid reservoir, which presents the problem that if the edge width to be coated on the peripheral edge of the substrate is narrow, it is difficult to coat the desired edge width.

[0009] Therefore, the present applicant further proposed a coating device that can precisely control the upper and lower surface coating width of the film-forming liquid applied to the peripheral edge of the substrate, including the edge of the substrate, to be extremely narrow, and that can reliably form a thin coating film of uniform thickness on the peripheral edge of the substrate (Patent Document 3 below). In the coating device described in Patent Document 3, the coating unit includes a coating section that coats a film-forming liquid on at least the edge surface of the peripheral edge of a substrate, and a spreading section that spreads the film-forming liquid coated by the coating section into a thin film on the upper and lower surfaces of the peripheral edge of the substrate. The spreading section includes an end surface spreading member, a narrow upper surface spreading member, and a narrow lower surface spreading member, so that the coating film formed on the three surfaces of the peripheral edge of the substrate can have a uniform thickness and the edge width of the upper and lower surfaces of the peripheral edge can be made extremely narrow.

[0010] Furthermore, the present applicant has previously proposed a drying device that can efficiently dry multiple substrates that have had a liquid agent applied to their edge surfaces or peripheral edges using the above-mentioned coating device, a light irradiation device that can irradiate the edge surfaces or peripheral edges of the substrates with light to harden and dry the liquid agent, and a coating system equipped with these (Patent Document 4 below).

[0011] [Problem to be solved by the invention] However, in the coating device described in Patent Document 3, the extension section has a structure that makes it difficult to perform maintenance such as part replacement, cleaning, and servicing, and there is a problem in that maintenance work is not easy.

[0012] In addition, in the application device described in Patent Document 3, the first biasing mechanism that constitutes the extension section includes an axial member and a first spring member inserted into the axial member, and the axial member is inserted into a first mounting member to which an upper surface extension member is attached and a second mounting member to which a lower surface extension member is attached. As a result, some of the film-forming liquid removed from the substrate by the upper surface extension member or the lower surface extension member may seep into gaps such as the axial hole of the first mounting member into which the shaft member is inserted. In this case, the film-forming liquid that has seeped into the axial hole gradually dries, gradually increasing the frictional resistance between the shaft member and the axial hole of the first mounting member, making it difficult for the first mounting member to properly bias up and down along the shaft member. As a result, the force biasing the upper surface extension member toward the lower surface extension member may weaken or become unstable, which could result in a decrease in the uniformity of the film thickness after extension.

[0013] In addition, in the drying device described in Patent Document 4, multiple shelves are fixed inside the drying chamber, a substrate holding member is disposed on each shelf, and doors for loading and unloading substrates corresponding to each shelf are provided on the side of the drying chamber. Therefore, there is a problem in that the number of parts constituting the drying chamber is large, resulting in a complex device structure. Furthermore, in the drying apparatus, when loading and unloading substrates, the loading fork portion of the loading means and the unloading fork portion of the unloading means are controlled to move horizontally by raising and lowering them to the height positions of the shelves for loading and unloading, respectively. Therefore, the structure is such that the lifting means for the loading fork portion and the lifting means for the unloading fork portion are provided on both sides of the drying chamber, and installation space is required for these lifting means, which poses a problem that it is difficult to reduce the space required for the apparatus.

[0014] Furthermore, in the light irradiation device described in Patent Document 4, the first light irradiation means is arranged above and below the transport means in a direction that intersects with the transport direction of the substrate, and the second light irradiation means is arranged above and below the transport means in a direction that is parallel to the transport direction of the substrate, and light irradiation is performed at the timing when the peripheral portion of the substrate being transported by the transport means passes through the irradiation area of ​​the first light irradiation means and the second light irradiation means. Therefore, it takes a long time to complete light irradiation on each side of the substrate, and it is difficult to irradiate each side of the substrate uniformly, which poses the problem that uneven irradiation may occur. [Prior art documents] [Patent documents]

[0015] [Patent Document 1] International Publication No. 2010 / 137418 [Patent Document 2] International Publication No. 2016 / 072250 [Patent Document 3] Japanese Patent Publication No. 2022-99172 [Patent Document 4] Japanese Patent Application Publication No. 2017-201219 Summary of the Invention Means to solve the problem and their effects

[0016] The present invention has been made in consideration of the above-mentioned problems, and aims to provide an application device that allows the extension section to be easily replaced or cleaned, is easy to maintain, and can improve the stability of the extension operation by the extension section. Another object of the present invention is to provide a drying device that can be simplified in structure and made compact. A further object of the present invention is to provide a light irradiation device that can uniformly and efficiently irradiate the end faces and peripheral edges of each side of a substrate with light. Furthermore, yet another object of the present invention is to provide a coating system that includes the coating device, the drying device, and / or the light irradiation device, is easy to maintain, and is capable of efficiently performing the process of applying, drying, and curing a film-forming liquid to the peripheral portion of a substrate, including its end face, in a space-saving manner.

[0017] In order to achieve the above object, a coating apparatus (1) according to the present invention is a coating apparatus that coats a peripheral portion of a substrate with a film-forming liquid while moving a substrate and a coating unit relative to each other, The application unit The device is configured to include a coating mechanism and a spreading mechanism, the coating mechanism includes a coating unit that coats the film-forming liquid on at least the peripheral edge surface of the substrate, The extension mechanism a spreading section that spreads the film-forming liquid applied by the applying section into a thin film on the edge surface and the upper and lower surfaces of the peripheral edge of the substrate; a biasing mechanism that biases the extension portion toward the edge surface and upper and lower surfaces of the peripheral portion of the substrate, The extension mechanism is characterized in that the extension section is detachable without removing the biasing mechanism from the extension mechanism.

[0018] According to the application device (1), the extension section can be removed without removing the biasing mechanism from the extension mechanism, and maintenance such as replacing only the extension section or cleaning the extension section can be easily performed, resulting in an application device with excellent maintainability.

[0019] Furthermore, the application device (2) according to the present invention is characterized in that, in the application device (1), the extension unit is configured to be replaceable with another extension unit without removing the biasing mechanism from the extension mechanism.

[0020] According to the coating device (2), the extension unit is configured to be replaceable with another extension unit without detaching the biasing mechanism from the extension mechanism, so that the extension unit can be flexibly replaced with another extension unit in response to changes in the type of substrate to be coated, coating conditions, etc., thereby improving the usability of the device. The other extension unit is, for example, an extension unit that spreads the film-forming liquid on the upper and lower peripheral surfaces of the substrate with a different extension width.

[0021] The coating device (3) according to the present invention is the coating device (1) or (2) described above, The extension portion is It includes an upper unit and a lower unit, The biasing mechanism a first support portion that supports the upper unit; a second support portion that supports the lower unit; a first linear motion mechanism to which the first support portion and the second support portion are respectively attached so as to be movable in a vertical direction; a second linear motion mechanism attached to the first linear motion mechanism so as to be movable in a horizontal direction perpendicular to the edge surface of the peripheral edge of the substrate; a first biasing portion that biases the first support portion downward; a second biasing portion that biases the second support portion upward; The device is characterized in that it is configured to include a third biasing portion that biases the first linear motion mechanism attached to the second linear motion mechanism toward the upper unit and the lower unit.

[0022] According to the coating device (3), the upper unit is supported by the first support portion, and the first support portion is biased downward by the first biasing portion, and the lower unit is supported by the second support portion, and the second support portion is biased upward by the second biasing portion. The first support portion and the second support portion are attached to the first linear motion mechanism, and the first linear motion mechanism attached to the second linear motion mechanism is biased toward the upper unit and the lower unit by the third biasing portion. Therefore, the upper unit can be removed separately from the first support part and the lower unit can be removed separately from the second support part without removing any of the first, second, and third urging parts from the extension mechanism, and maintenance, etc., can be performed on the upper unit and the lower unit individually.

[0023] The coating device (4) according to the present invention is the coating device (3) described above, The first support portion is a first linear motion portion attached to the first linear motion mechanism; a horizontal plate portion protruding from a lower portion of the first linear motion portion, The second support portion is a second linear motion unit attached to the first linear motion mechanism; a vertical plate portion protruding from a side portion of the second linear motion portion; a shaft portion projecting horizontally from the vertical plate portion, the upper unit is detachably attached to the horizontal plate portion, The lower unit is detachably attached to the vertical plate portion while being inserted into the shaft portion.

[0024] According to the coating device (4), the upper unit is removably attached to the horizontal plate portion, and the lower unit is removably attached to the vertical plate portion while being inserted into the shaft portion. Therefore, the upper unit can be removed from the horizontal plate portion and the lower unit can be removed from the vertical plate portion in the direction of the shaft without removing any of the first, second, and third urging portions from the extension mechanism, so that the upper and lower units can be easily removed without interfering with other device components.

[0025] The coating device (5) according to the present invention is the coating device (4) described above, The upper unit is an upper block disposed on the horizontal plate portion; a substantially L-shaped upper extension block covering the upper surface and one side surface of the upper block; a first mounting member for mounting the upper block and the upper extension block to the horizontal plate portion; The lower unit is a lower block having an axial hole through which the axial portion is passed; a substantially L-shaped lower extension block covering the lower surface and one side surface of the lower block; a second mounting member attached to the tip of the shaft portion to which the lower block is inserted; a third mounting member that mounts the lower extension block to the lower block; The upper extension block and the lower extension block have opposing surfaces on the one side surface, On the opposing surface, an upper surface extension member that contacts the upper surface of the peripheral edge portion of the substrate; an edge extension member that contacts the edge of the peripheral portion of the substrate; and a lower surface extension member that contacts the lower surface of the peripheral edge of the substrate.

[0026] According to the coating device (5), the upper block and the upper extension block can be detachably attached to the horizontal plate portion by the first attachment member, the lower extension block can be attached to the lower block by the third attachment member, and the lower block can be detachably attached to the vertical plate portion by the second attachment member with the lower block inserted into the shaft portion. Furthermore, since the upper surface extension member, the end surface extension member, and the lower surface extension member are provided on the opposing surfaces of the upper extension block and the lower extension block, the extension width of the film-forming liquid extended on the upper and lower surfaces of the peripheral portion of the substrate can be easily changed by replacing the upper extension block and the lower extension block in accordance with changes in the type of substrate, coating conditions, etc.

[0027] The coating device (6) according to the present invention is the coating device (5) described above, the lower block has a short pipe portion protruding from an opening of the axial hole, The short pipe portion has a flange portion at a tip portion, The shaft portion is A notch formed on the tip side; a locking portion formed on the outer peripheral surface of the tip portion on which the notch is formed; a tapered portion formed from the locking portion toward the tip end, The locking portion is configured to be able to be locked to the opening of the flange portion, The second mounting member is a hollow portion inside the flange portion and the tapered portion, a short pipe attachment port that is inserted into the short pipe portion and can be engaged with the flange portion; The hollow portion is characterized by being provided with an inclined pressing portion that can press along the tapered portion.

[0028] According to the application device (6), when attaching the lower block to the vertical plate portion, it is only necessary to insert the shaft portion into the shaft hole of the lower block and push the lower block toward the vertical plate portion until the locking portion of the shaft portion locks into the opening of the flange portion. When the lower block is to be removed from the vertical plate, the second mounting member is first pushed toward the shaft, and the pressing portion of the second mounting member is pressed against the tapered portion of the shaft, gradually narrowing the gap in the notch, causing the locking portion to disengage from the opening in the flange and be pushed into the short pipe. Furthermore, if the second mounting member is pulled in the direction of pulling it out from the shaft portion from this state, the short pipe mounting port will engage with the flange portion, and the lower block can be pulled out and removed from the shaft portion in that state. Therefore, the lower block can be easily attached to the vertical plate portion by pushing in the lower block, and the lower block can be easily removed from the vertical plate portion by the simple action of pushing in and pulling the second mounting member.

[0029] The coating device (7) according to the present invention is any one of the coating devices (1) to (6), The application unit is a rotating shaft having a threaded portion at its lower end; an application roller having an annular groove formed on its outer peripheral surface and a shaft hole formed in its central portion through which the rotary shaft is inserted; a liquid supply unit disposed adjacent to the outer peripheral surface of the application roller and supplying the film forming liquid to the annular groove; a recovery unit that recovers the film forming liquid dripping from the application roller, The recovery section a threaded portion having a screw hole that can be screwed into the threaded portion and that fixes the application roller to the rotation shaft; a liquid receiving portion disposed below the threaded portion; a connecting portion that connects the screw portion and the liquid receiving portion so that they have the same central axis, The application roller and the recovery unit are configured to be detachable from the rotary shaft.

[0030] According to the coating device (7), the coating roller is inserted onto the rotating shaft, the threaded portion of the recovery unit is screwed onto the threaded portion at the lower end of the rotating shaft, and the coating roller and the recovery unit are configured to be detachable from the rotating shaft, which facilitates maintenance such as replacement and cleaning of the coating roller.Furthermore, it is possible to easily replace the coating roller with another coating roller having a different annular groove structure (e.g., height, depth, etc.) depending on the type of substrate to be coated, coating conditions, etc.

[0031] The coating device (8) according to the present invention is any one of the coating devices (1) to (7), a support portion that supports the substrate; a moving means for moving a plurality of the coating units arranged around the support portion along a side of the substrate supported by the support portion; a coating control unit that controls the operation of each of the moving means and each of the coating units, The application control unit, While the coating portion of each coating unit is coating the film forming liquid on at least the peripheral edge surface of the substrate, The applied film forming liquid is spread in a thin film on the edge surface and the upper and lower surfaces of the peripheral portion of the substrate by the spreading unit, The moving means controls the movement of each of the coating units along the sides of the substrate.

[0032] According to the coating device (8), the peripheral portions of each side of the substrate are coated in parallel by the multiple coating units, which significantly reduces the time required to coat the entire periphery of the substrate, thereby improving coating efficiency. Furthermore, maintenance such as replacement and cleaning of the extension parts of each of the multiple coating units can be easily performed, thereby improving the efficiency of the maintenance work.

[0033] The drying apparatus (1) according to the present invention is a drying apparatus equipped with a drying furnace for drying a substrate coated with a film-forming liquid by a coating apparatus, a storage shelf provided in the drying furnace and having a plurality of shelves on which the substrates are placed; a loading opening / closing unit that opens and closes a loading opening through which a substrate loading unit is loaded and unloaded, the loading opening / closing unit being provided on a side surface of the drying furnace on the substrate loading side; an unloading opening / closing unit that is provided on a side surface of the drying furnace on the substrate unloading side and that opens and closes an unloading opening through which the substrate unloading means is inserted and removed; an opening / closing control unit that controls the opening and closing operations of the carry-in entrance opening / closing unit and the carry-out exit opening / closing unit; a lifting mechanism for lifting and lowering the storage shelf; The storage shelf is characterized by being provided with a lifting control section that controls the lifting operation of the lifting mechanism.

[0034] According to the drying apparatus (1), when the substrate is loaded or unloaded, the storage shelf is raised or lowered within the drying furnace, so there is no need to raise or lower the substrate loading means or the substrate unloading means, which simplifies the structure of the apparatus and enables space saving and compactness of the apparatus.

[0035] The drying device (2) according to the present invention is the above-mentioned drying device (1), The lift control unit is When carrying in a substrate, a shelf among the plurality of shelves into which the substrate is to be carried in is positioned at the height of the carry-in opening, and then the raising and lowering operation of the storage shelf is controlled so that the substrate carried in by the substrate carrying-in means is placed on the shelf; When unloading a substrate, the lifting and lowering operation of the storage shelf is controlled so that the shelf from which the substrate is to be unloaded is positioned at the height of the unloading port, and then the substrate placed on the shelf is transferred to the substrate unloading means.

[0036] According to the drying device (2), by controlling the lifting and lowering operation of the storage shelf using the lifting control unit, the substrates brought in from the loading entrance by the substrate loading means can be accurately placed on the shelf, and the substrates placed on the shelf can be accurately transferred to the substrate unloading means, thereby enabling the loading and unloading operations of the substrates to be performed efficiently.

[0037] The drying device (3) according to the present invention is the above-mentioned drying device (1) or (2), The lifting mechanism is a support portion that supports the storage shelf; an elevation drive unit that raises and lowers the support unit; The storage system is characterized by including a shelf position detection unit that detects that the shelf is at a height position of the entrance or exit.

[0038] According to the drying device (3), the shelf position detection unit detects which shelf among the multiple shelves is at the height position of the loading entrance or the unloading exit, so that the shelf on which the substrates brought in by the substrate loading means are placed or the shelf on which the substrates to be transferred to the substrate unloading means are placed can be accurately detected, thereby improving the accuracy of the loading and unloading operations of the substrates.

[0039] The light irradiation device (1) according to the present invention is a light irradiation device for irradiating light onto a peripheral portion of a substrate on which a film-forming liquid has been applied by an application device, and curing the film-forming liquid, a lifting stage that can be raised and lowered with the substrate placed thereon; a light irradiation unit disposed around the lifting space of the lifting stage and configured to irradiate the peripheral portion of the substrate with light; The light irradiation device is characterized by comprising a rotation mechanism that rotates the light irradiation unit so that the light irradiation surface of the light irradiation unit faces closely to at least the upper surface and the lower surface of the peripheral edge of the substrate.

[0040] According to the light irradiation device (1), the light irradiation units are arranged around the lifting space of the lifting stage, and the rotation mechanism rotates the light irradiation units so that the light irradiation surfaces of the light irradiation units are closely opposed to at least the upper and lower peripheral surfaces of the substrate placed on the lifting stage. Therefore, there is no need to move the substrate horizontally during light irradiation, and light can be uniformly and efficiently irradiated onto the upper and lower peripheral surfaces and the peripheral edge surfaces of each side of the substrate, thereby allowing the film-forming liquid to be uniformly and efficiently cured.

[0041] The light irradiation device (2) according to the present invention is the light irradiation device (1) described above, The light irradiation unit is a first pair of light irradiation units and a second pair of light irradiation units that are arranged opposite each other at different heights around the lifting space, The first light irradiation unit pair is arranged in a direction parallel to the transport direction of the substrate, The second light irradiation unit pair is arranged in a direction perpendicular to the transport direction of the substrate, The rotation mechanism is a first rotation mechanism pair that rotates the first light irradiation unit pair; The second light irradiation unit pair includes a second rotation mechanism pair for rotating the second light irradiation unit pair.

[0042] According to the light irradiation device (2), by moving the lifting stage on which the substrate is placed to the height position of the first pair of light irradiation units and rotating the first pair of light irradiation units with the first pair of rotation mechanisms, it is possible to uniformly and efficiently irradiate the upper surface, the end surface, and the lower surface of the peripheral portion of two sides of the substrate that are parallel to the transport direction of the substrate with light.Furthermore, by moving the lifting stage on which the substrate is placed to the height position of the second pair of light irradiation units that is different in height from the first pair of light irradiation units and rotating the second pair of light irradiation units with the second pair of rotation mechanisms, it is possible to uniformly and efficiently irradiate the upper surface, the end surface, and the lower surface of the peripheral portion of two sides of the substrate that are perpendicular to the transport direction of the substrate with light.

[0043] The light irradiation device (3) according to the present invention is the light irradiation device (2) described above, The apparatus is characterized by including a movement mechanism that moves at least one of the second pair of rotation mechanisms back and forth in the transport direction of the substrate.

[0044] According to the light irradiation device (3), the moving mechanism moves at least one of the second rotating mechanism pair back and forth in the transport direction of the substrate, thereby adjusting the spacing between the second rotating mechanism pair according to the size of the substrate, etc.

[0045] The light irradiation device (4) according to the present invention is any one of the light irradiation devices (1) to (3), a transport means for transporting the substrate is disposed below the lifting stage; The conveying means a plurality of narrow rollers arranged in a conveying direction of the substrate; The lifting stage is The conveying means is characterized by having an opening at a position opposite the plurality of narrow rollers, through which the narrow rollers are exposed onto the lift stage.

[0046] According to the light irradiation device (4), when the lifting stage is lowered, the narrow roller of the transport means can be exposed through the opening of the lifting stage, and therefore, the substrate on the lifting stage can be quickly and efficiently transferred to the transport means simply by lowering the lifting stage.

[0047] The light irradiation device (5) according to the present invention is any one of the light irradiation devices (1) to (4), a positioning means for positioning the substrate before moving the substrate onto the lifting stage; The substrate is positioned by the positioning means, and the substrate is moved onto the lift stage.

[0048] According to the light irradiation device (5), the positioning means adjusts the position of the substrate before moving the substrate onto the lifting stage, and the adjusted substrate can be moved onto the lifting stage by the moving means. Therefore, the substrate can be placed on the lifting stage in an accurately positioned state, and the light irradiation unit can accurately irradiate the upper peripheral surface, the edge surface, and the lower peripheral surface of the substrate with light.

[0049] The light irradiation device (6) according to the present invention is the light irradiation device (5) described above, The positioning means an upper table unit that is rotatable with the substrate placed thereon; a lower table unit disposed below the upper table unit and capable of linearly moving the upper table unit in a predetermined direction; a corner detection means for detecting the orientation and position of a corner of the substrate placed on the upper table unit; It is characterized by having a positioning control unit that drives the upper table unit and / or the lower table unit so that the orientation and position of the corner of the substrate detected by the corner detection means are in a predetermined orientation and position.

[0050] According to the light irradiation device (6), the orientation and / or position of the substrate can be adjusted by controlling the upper table unit and / or the lower table unit so that the orientation and position of the corner of the substrate detected by the corner detection means become a predetermined orientation and position.

[0051] The light irradiation device (7) according to the present invention is the light irradiation device (6) described above, The upper table unit is a mounting table on which the substrate is placed; a rotation shaft portion provided on a lower surface of one corner portion of the loading table; a roller portion provided on the underside of another corner of the loading table; a rotation drive unit that rotates the placing table around the rotation shaft unit, The lower table unit is a support table that supports the placement table; a linear motion mechanism that can adjust the position of the support table in a direction perpendicular to the moving direction of the substrate, The rotary shaft and the rotary drive unit are attached to the support table.

[0052] According to the light irradiation device (7), the upper table unit is configured to rotate the placement table around the rotation axis by the rotation drive unit, thereby enabling fine adjustment of the orientation (i.e., angle) of the substrate. Also, the lower table unit is configured to enable fine adjustment of the position of the support table that supports the placement table in a direction perpendicular to the movement direction of the substrate. Therefore, the orientation and positioning accuracy of the substrate can be improved.

[0053] The light irradiation device (8) according to the present invention is the light irradiation device (6) or (7), The corner detection means an illumination unit that illuminates the corners of the substrate from below; an imaging unit that is provided at a position opposite to the illumination unit and captures an image of the corner of the substrate from above; The positioning control unit The upper table unit and / or the lower table unit are driven so that the orientation and position of the corner of the substrate imaged by the imaging unit are in a predetermined orientation and position.

[0054] According to the light irradiation device (8), the corners of the substrate illuminated by the lighting unit are imaged by the imaging unit, so that the orientation and position of the corners of the substrate can be accurately detected from the image captured. The positioning control unit adjusts the orientation and / or position of the substrate by driving the upper table unit and / or the lower table unit so that the orientation and position of the corner of the substrate imaged by the imaging unit becomes a predetermined orientation and position, thereby allowing the orientation and / or position of the substrate to be adjusted with even greater precision.

[0055] The coating system (1) according to the present invention is characterized by including any one of the coating devices (1) to (8) and any one of the drying devices (1) to (3).

[0056] According to the coating system (1), it is possible to construct a coating system that has the effect of any one of the coating devices (1) to (8) and the effect of any one of the drying devices (1) to (3), and that is easier to maintain and more compact than conventional systems.

[0057] The coating system (2) according to the present invention is characterized by including any one of the coating devices (1) to (8) and any one of the light irradiation devices (1) to (8).

[0058] According to the coating system (2), it is possible to construct a coating system that has the effect of any one of the coating devices (1) to (8) and the effect of any one of the light irradiation devices (1) to (8), is easier to maintain than conventional systems, saves space, and can efficiently perform curing treatment by light irradiation.

[0059] The coating system (3) according to the present invention is characterized by including any one of the coating devices (1) to (8), any one of the drying devices (1) to (3), and any one of the light irradiation devices (1) to (8).

[0060] According to the coating system (3), it is possible to construct a coating system that has the effect of any one of the coating devices (1) to (8), the effect of any one of the drying devices (1) to (3), and the effect of any one of the light irradiation devices (1) to (8), is easier to maintain than conventional systems, requires less space, and can efficiently perform drying processing and curing processing by light irradiation. [Brief explanation of the drawings]

[0061] [Figure 1] 1 is a block diagram showing a configuration of a main part of a coating system according to an embodiment of the present invention. [Figure 2] 1 is a plan view schematically illustrating a configuration of a main part of a coating device according to an embodiment. [Figure 3] FIG. 2 is a perspective view showing a configuration of a main part of a coating unit. [Figure 4] FIG. 4 is a partial cross-sectional perspective view taken along the line IV-IV in FIG. 3. [Figure 5] 4 is a partial cross-sectional side view taken along line VV in FIG. 3. [Figure 6] FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5. [Figure 7] FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 5. [Figure 8] FIG. 10 is a perspective view showing a state in which the extension unit is removed from the extension mechanism. [Figure 9]10A and 10B are enlarged partial cross-sectional views for explaining another example of the mounting configuration of the second mounting member, in which (a) shows the state in which the lower block is mounted to the mounting shaft portion, and (b) and (c) show the state in which the lower block is in the process of being removed from the mounting shaft portion. [Figure 10] 1 is a partial cross-sectional front view showing a main configuration of a drying device according to an embodiment. [Figure 11] FIG. 2 is a partial cross-sectional side view showing the main configuration of the drying device. [Figure 12] 11 is a cross-sectional view taken along line XII-XII in FIG. 10. [Figure 13] 13 is a cross-sectional view taken along line XIII-XIII in FIG. 11. [Figure 14] FIG. 10 is a plan view of the main part showing a state in which a loading fork is inserted into the drying furnace. [Figure 15] 1 is a perspective view showing a main configuration of a light irradiation unit of an ultraviolet irradiation device according to an embodiment. [Figure 16] FIG. 2 is a plan view showing the configuration of a main part of a positioning unit of the ultraviolet irradiation device. [Figure 17] FIG. 2 is a side view showing the configuration of a main part of the positioning unit. [Figure 18] 10A and 10B are diagrams for explaining the light irradiation operation by the first light irradiation unit pair. [Figure 19] 10A and 10B are diagrams for explaining the light irradiation operation by the second light irradiation unit pair. DETAILED DESCRIPTION OF THE INVENTION

[0062] Hereinafter, embodiments of the coating device, drying device, light irradiation device, and coating system according to the present invention will be described with reference to the drawings. Note that the embodiments described below show preferred specific examples of the present invention, and various technically preferable limitations are attached, but the scope of the present invention is not limited to these embodiments unless otherwise stated in the following description to the effect that the present invention is particularly limited.

[0063] FIG. 1 is a block diagram showing a configuration of a main part of a coating system according to an embodiment. The coating system 1 includes a coating device 10, a drying device 60, and an ultraviolet irradiation device 90. The ultraviolet irradiation device 90 is an example of a light irradiation device.

[0064] The coating apparatus 10 is an apparatus for coating a film forming liquid onto the peripheral edge (also referred to as the outer peripheral edge) of a substrate while moving a coating unit 20 relative to the substrate. The substrate to be coated is, for example, a so-called electronic circuit board such as a printed wiring board or a module board. The constituent material of the substrate is not particularly limited. For example, the substrate may be made of various materials such as a copper-clad laminate substrate, an aluminum substrate, a glass substrate, or a ceramic substrate. The size of the substrate is also not particularly limited, but the substrate may be, for example, a rectangular substrate measuring approximately 400 to 800 mm in length and width and having a thickness of approximately several tens of μm to several mm.

[0065] The film-forming liquid is a liquid agent for forming a thin coating film (with a film thickness after curing of, for example, about 10 μm to 200 μm) on the peripheral edge of the substrate. The film-forming liquid is used to prevent the generation of dust due to collapse of the edge surface of the substrate, to reinforce the peripheral edge of the substrate with the coating film, to improve the handleability of the substrate in subsequent processes, and to reduce the rate of defective substrates. The film-forming liquid preferably contains a mixture of multiple resin components so that it does not peel off during substrate processing steps (etching steps, plating steps, etc.) (resistance to acids and / or alkalis) and has excellent adhesion to the substrate surface. For example, various liquids prepared according to the intended use can be used, such as a coating agent containing an aqueous urethane resin, an aqueous styrene resin, and an aqueous thickener in an aqueous medium solvent. The viscosity of the film-forming liquid can be adjusted appropriately depending on conditions such as the film thickness and edge width to be applied.

[0066] The coating device 10 includes a transport section 11 that transports the substrate into the device, a positioning section 12 that positions the substrate that has been brought in, a coating stage 13 that supports the substrate, and a substrate transfer section 14 that transfers the substrate. The coating device 10 further includes a coating unit 20 arranged around the coating stage 13, a moving unit 15 that moves the coating unit 20 along the edge of the substrate, a coating control unit 16 that controls the operation of each of these units, and an operation unit 17. The coating unit 20 has the function of coating the peripheral portion of the substrate placed on the coating stage 13. The operation unit 17 has an operation panel for inputting settings such as operating conditions of each unit of the coating system 1 and inputting operations to operate each unit.

[0067] The transport unit 11 is configured, for example, by a roller-type conveyor device. The positioning unit 12 is configured, for example, as a device having substrate clamping units (not shown) on both sides of the width of the conveying unit 11, and a mechanism for lightly clamping both sides of the substrate on the conveying unit 11 with the substrate clamping units to position and place the substrate at a predetermined position. The substrate transfer unit 14 has the function of transferring a substrate positioned by the positioning unit 12 to the coating stage 13, and the function of transferring a substrate coated by the coating unit 20 on the coating stage 13 to the carry-in unit 62 of the drying device 60. The substrate transfer unit 14 is configured to include, for example, a substrate holding unit having a plurality of suction units that suction and hold a substrate, a horizontal movement mechanism that moves the substrate holding unit back and forth in the substrate transport direction, and a vertical movement mechanism that moves the substrate holding unit back and forth in the vertical direction (none of which are shown). The specific configuration of the coating unit 20, etc. will be described later.

[0068] The drying device 60 is a device for drying the substrate whose peripheral edge has been coated with the film-forming liquid by the coating device 10. The drying device 60 includes a drying furnace 61 for drying substrates, an inlet section 62 for loading substrates through an inlet 61a provided on the side of the drying furnace 61 on the substrate loading side, and an outlet section 63 for unloading substrates through an outlet 61b provided on the side of the drying furnace 61 on the substrate unloading side. The drying device 60 further includes a blower 64 for supplying air (hot air) to the drying furnace 61, a suction section 65 for sucking gas from the drying furnace 61, and an exhaust section 66 for exhausting part of the gas from the drying furnace 61. A dust collection filter 64d is provided between the blower 64 and the drying furnace 61.

[0069] A storage shelf 71 with multiple shelves on which substrates are placed is arranged within the drying furnace 61, and the drying device 60 is equipped with a lifting mechanism 80 that raises and lowers the storage shelf 71, and a lifting control unit 81 that controls the lifting and lowering operation of the storage shelf 71 by the lifting mechanism 80. An inlet opening / closing unit 67 for opening and closing an inlet 61a is provided on a side surface of the drying furnace 61 on the substrate loading side, and an outlet opening / closing unit 68 for opening and closing an outlet 61b is provided on a side surface of the drying furnace 61 on the substrate unloading side. The drying apparatus 60 is equipped with an opening / closing control unit 69 for controlling the opening and closing operations of the inlet opening / closing unit 67 and the outlet opening / closing unit 68. The specific configuration of the drying furnace 61, etc. will be described later.

[0070] The ultraviolet irradiation device 90 is a device for irradiating ultraviolet rays onto the peripheral edge of the substrate that has been coated with the film-forming liquid by the coating device 10 and then dried by the drying device 60, thereby hardening the film-forming liquid. The ultraviolet irradiation device 90 includes a positioning unit 92 that positions the substrate transported from the drying device 60, and a UV irradiation stage 91 that can be raised and lowered with the substrate transferred from the positioning unit 92 placed on it. The ultraviolet irradiation device 90 further includes a substrate transfer unit 93 and a transport unit 94. The substrate transfer unit 93 has the function of transferring the substrate that has been carried out by the carry-out unit 63 of the drying device 60 to the positioning unit 92, and the function of transferring the substrate that has been positioned in the positioning unit 92 to the UV irradiation stage 91. The transport unit 94 is disposed below the UV irradiation stage 91, and has the function of transporting the substrate from the UV irradiation stage 91.

[0071] Furthermore, the ultraviolet irradiation device 90 is configured to include a light irradiation unit 95, a rotation mechanism 96, and an irradiation control unit 98 that controls the operation of each of these components. The light irradiation unit 95 is arranged around the lifting space of the UV irradiation stage 91 and has the function of irradiating the peripheral portion of the substrate with ultraviolet light. The rotation mechanism 96 has the function of rotating the light irradiation unit 95 so that the light irradiation surface of the light irradiation unit 95 closely faces at least the upper surface and the lower surface of the peripheral portion of the substrate. The specific configurations of the positioning unit 92, the light irradiation unit 95, etc. will be described later.

[0072] In the coating system 1, first, in the coating device 10, a process is carried out in which a film forming liquid is applied to at least the peripheral edge surface of the substrate, and the applied film forming liquid is spread into a thin film on the peripheral edge surface and the upper and lower surfaces of the peripheral edge of the substrate. Next, in the drying device 60, the substrate on which the film-forming liquid has been applied and spread in the coating device 10 is carried into the drying furnace 61, and a process is carried out in which the film-forming liquid that has been spread in a thin film form on the peripheral edge of the substrate is dried. Thereafter, in the ultraviolet irradiation device 90, ultraviolet rays are irradiated onto the peripheral edge of the substrate that has been dried in the drying device 60, and a step of curing the film-forming liquid that has been spread into a thin film is carried out.

[0073] Next, a coating device constituting the coating system according to the embodiment will be described. FIG. 2 is a plan view schematically showing the configuration of the main part of the coating device according to the embodiment. The coating device 10 is composed of a coating stage 13, four coating units 20 arranged around the coating stage 13, four moving units 15 that move these coating units 20 along each side of the substrate 2, a coating control unit 16, and an operation unit 17.

[0074] The coating apparatus 10 is configured so that four coating units 20 are used to simultaneously and in parallel coat the peripheral portions of the four sides of the substrate 2. In another configuration example, one coating unit 20 may be used to coat the four sides of the substrate 2 in sequence, and it is sufficient that the coating apparatus 10 is equipped with at least one coating unit 20.

[0075] Each coating unit 20 includes a coating mechanism 21 and a spreading mechanism 30 . The coating mechanism 21 includes a coating unit 22 that coats at least the peripheral edge surface of the substrate 2 with a film-forming liquid. The extension mechanism 30 includes an extension unit 31 and a biasing mechanism 34. The extension unit 31 is configured to spread the film-forming liquid applied by the application unit 22 to at least the peripheral edge surface of the substrate 2 into a thin film over the peripheral edge surface and upper and lower surfaces of the substrate 2. The biasing mechanism 34 is configured to bias the extension unit 31 toward the peripheral edge surface and upper and lower surfaces of the substrate 2. One of the features of the coating device 10 according to the embodiment is that the coating unit 20 is configured such that the extension section 31 can be removed without removing the biasing mechanism 34 from the extension mechanism 30. The specific configurations of the coating mechanism 21 and the extension mechanism 30 will be described later.

[0076] The coating control unit 16 controls the operation of each part of each coating unit 20, and also controls each moving unit 15 to move each coating unit 20 along the side of the substrate 2 (in the direction of arrow A).

[0077] In addition to controlling the operation of each coating unit 20 and each moving unit 15, the coating control unit 16 may also have a function of controlling the operation of each part of the apparatus, such as controlling the operation (e.g., raising and lowering control) of the coating stage 13. The coating control unit 16 is configured to include, for example, a microcomputer, a driver circuit, a memory unit, a power supply unit, and the like (none of which are shown).

[0078] The coating stage 13 is supported from below by a lifting mechanism (not shown) so that it can be raised and lowered. The coating stage 13 may also be provided with a suction mechanism (not shown), in which case the substrate 2 can be adsorbed to the upper surface of the coating stage 13. The suction mechanism may, for example, be configured such that a vacuum pump is connected via air tubes to a plurality of air intake holes provided in the coating stage 13. The substrate 2 is transferred from the transport unit 11 by the substrate transfer unit 14 and placed at a predetermined position on the coating stage 13.

[0079] Each moving unit 15 is arranged in a manner surrounding the application stage 13, and is composed of, for example, an orthogonal robot, and includes an X-axis linear motion mechanism 15a and a Y-axis linear motion mechanism 15b attached to the X-axis linear motion mechanism 15a.

[0080] The X-axis linear motion mechanism 15a is a device for moving the coating unit 20 along the sides (X-axis direction) of the substrate 2, and is configured to include, for example, an X-axis cylinder arranged parallel to each side of the coating stage 13, and an X-axis slider that slides on the X-axis cylinder.

[0081] The Y-axis linear motion mechanism 15b is a device for moving the coating unit 20 in a direction (Y-axis direction) perpendicular to the side of the substrate 2. The Y-axis linear motion mechanism 15b includes a Y-axis cylinder attached to the X-axis slider of the X-axis linear motion mechanism 15a, and a Y-axis slider that slides on the Y-axis cylinder.

[0082] Furthermore, the operation unit 17 can receive various inputs such as setting the operating conditions of each part of the apparatus, issuing operating instructions for each part, and switching between operating modes. Operation signals and setting signals input via the operation unit 17 are output to the coating control unit 16. For example, the operation unit 17 can set the operating conditions of each part, such as the initial position of the coating unit 20, the movement speed of the moving unit 15, and the supply speed of the film-forming liquid by the coating unit 20.

[0083] In the coating device 10 configured as described above, the coating control unit 16 controls each coating unit 20 to move along each side of the substrate 2, and controls each coating section 22 to apply film-forming liquid to at least the peripheral edge surface of the substrate 2 (coating process). In addition, in parallel with the above coating process, the coating control unit 16 controls each coating unit 20 to move along each side of the substrate 2 while the extension section 31 is urged toward the peripheral edge face and upper and lower surfaces of the substrate by the biasing mechanism 34, i.e., while the extension section 31 is pressed against the peripheral edge face and upper and lower surfaces of the substrate, and controls the film forming liquid applied in the above coating process to be spread into a thin film by the extension mechanism 30 onto the peripheral edge face and upper and lower surfaces of the substrate (stretching process).

[0084] Fig. 3 is a perspective view showing the configuration of the main parts of the coating unit 20. Fig. 4 is a partial cross-sectional perspective view taken along line IV-IV in Fig. 3, showing the configuration of the main parts of the coating mechanism 21. To simplify the drawing, hatching of the cross section of the coating unit has been omitted.

[0085] The application unit 20 comprises an application mechanism 21 having an application section 22, and an extension mechanism 30 having an extension section 31 and a biasing mechanism 34, and is configured so that the extension section 31 can be removed without removing the biasing mechanism 34 from the extension mechanism 30.

[0086] The coating unit 20 further includes a liquid storage section 50 that stores the film-forming liquid, and a transfer pump 54 that transfers the film-forming liquid from the liquid storage section 50 to the coating section 22 via a tube (not shown).

[0087] The application mechanism 21, spreading mechanism 30, liquid storage section 50, and transfer pump 54 are assembled and integrated into a mounting member 55 attached to the Y-axis linear motion mechanism 15b of the moving unit 15 (see FIG. 2).

[0088] The liquid storage section 50 is disposed below the coating mechanism 21 and the stretching mechanism 30, and includes a lid 51, a lower box 52, and a box receiving stand 53 on which the lower box 52 is placed. The box receiving stand 53 is attached at a slight incline so that the film forming liquid in the lower box 52 flows from the coating mechanism 21 toward the stretching mechanism 30. The lid 51 is provided with a tube mounting section 51a, and a tube (not shown) connected to a transfer pump 54 is attached to the tube mounting section 51a. The liquid storage section 50 also stores the film forming liquid recovered by the coating mechanism 21 and the stretching mechanism 30, and the film forming liquid circulates within the coating unit 20 so that it can be reused.

[0089] Next, the configuration of the coating mechanism 21 will be described. 3 and 4, the coating unit 22 provided in the coating mechanism 21 includes a rotary shaft 23 that rotates by a driving force from a drive motor (not shown), a coating roller 24, a liquid supply unit 25, and a recovery unit 26. A threaded portion 23a is formed on the lower end of the rotary shaft 23.

[0090] The application roller 24 has a generally disk-like shape, with an annular groove 24a formed on its outer periphery and a shaft hole 24b formed in its center through which the rotary shaft 23 is inserted. The annular groove 24a has a generally U-shaped cross section, but is not limited to this shape. The width and depth of the annular groove 24a can be set appropriately depending on conditions such as the type and thickness of the substrate 2 to be coated, and the width of extension of the substrate 2 to the upper and lower peripheral surfaces. In addition, the coating device 10 may be individually equipped with coating rollers 24 each having annular grooves 24a for the extension width of, for example, 1 mm, 3 mm, 5 mm, or 7 mm, and with this configuration, it becomes possible to appropriately replace the coating roller 24 depending on conditions such as the extension width. The application roller 24 is configured to be rotated at a predetermined speed by the drive motor, which is adjusted to a rotation speed that matches the relative movement speed between the application roller 24 and the substrate 2, for example.

[0091] The liquid supply unit 25 is disposed adjacent to the outer peripheral surface of the application roller 24 and is a member for supplying the film forming liquid to the annular groove 24a. The liquid supply unit 25 includes a tube attachment unit 25a, a liquid discharge unit 25b, and a contact piece (not shown).

[0092] Tube mounting portion 25a is configured as an L-shaped pipe to which a tube (not shown) from transfer pump 54 is attached. Discharge hole 25ba is formed in liquid discharge portion 25b. Discharge hole 25ba is a liquid flow path formed from tube mounting portion 25a toward the surface of applying roller 24 facing annular groove 24a. The abutting piece is disposed adjacent to liquid discharge portion 25b, and is attached with its tip abutting against the outer peripheral surface of applying roller 24.

[0093] The recovery unit 26 is a component for recovering the film-forming liquid dripping from the application roller 24. The recovery unit 26 includes a threaded portion 26a that fixes the application roller 24 to the rotary shaft 23, a liquid receiving portion 26b disposed below the threaded portion 26a, and a connecting portion 26c that connects the threaded portion 26a and the liquid receiving portion 26b so that they have the same central axis.

[0094] The screw portion 26a has a screw hole 26aa that can be screwed onto the threaded portion 23a of the rotary shaft 23. The liquid receiving portion 26b is formed in a dish shape with a diameter larger than that of the application roller 24, and has a pipe portion 26d extending downward from a central hole. The lower end of the pipe portion 26d is inserted into the liquid storage portion 50, so that the film forming liquid that drips from the application roller 24 into the liquid receiving portion 26b is collected in the liquid storage portion 50 through the pipe portion 26d. The screw portion 23a is configured with a reverse thread to prevent the screw-engaging portion 26a from loosening as the rotary shaft 23 rotates, and the screw hole 26aa is configured with a reverse thread.

[0095] Next, the configuration of the extension mechanism 30 will be described. Fig. 5 is a partial cross-sectional side view taken along line VV in Fig. 3, showing the configuration of the main parts of the extension mechanism 30. Fig. 6 is a cross-sectional view taken along line VI-VI in Fig. 5, showing the configuration of the main parts of the upper extension block 32b and the lower extension block 33b. Fig. 7 is a cross-sectional view taken along line VII-VII in Fig. 5, showing the configuration of the main parts of the lower unit 33, the second support part 36, and the first linear motion mechanism 37. Fig. 8 is a perspective view of the main parts showing the extension mechanism 30 with the extension part 31 removed.

[0096] 3, 5, and 8, the extension mechanism 30 includes an extension unit 31 and a biasing mechanism 34. The extension unit 31 is configured to extend the film-forming liquid applied to at least the peripheral edge surface of the substrate by the application unit 22 into a thin film over the peripheral edge surface and the upper and lower surfaces of the substrate. In this embodiment, the extension unit 31 includes an upper unit 32 and a lower unit 33.

[0097] The biasing mechanism 34 is configured to bias the extension unit 31 toward the peripheral edge end surface and the upper and lower surfaces of the peripheral edge of the substrate 2. In this embodiment, the biasing mechanism 34 includes a first support portion 35 that supports the upper unit 32 and a second support portion 36 that supports the lower unit 33, and further includes a first linear motion mechanism 37 and a second linear motion mechanism 38. The first support portion 35 and the second support portion 36 are each attached to the first linear motion mechanism 37 so as to be movable in the vertical direction. The first linear motion mechanism 37 is attached to the second linear motion mechanism 38 so as to be movable in the horizontal direction perpendicular to the peripheral edge end surface of the substrate 2. The biasing mechanism 34 further includes a first biasing section 39 that biases the first support section 35 downward (towards the second support section 36), a second biasing section 40 that biases the second support section 36 upward (towards the first support section 35), and a third biasing section 41 that biases the first linear motion mechanism 37 towards the upper unit 32 and the lower unit 33.

[0098] The first linear motion mechanism 37 includes a linear motion guide portion 37b having a linear motion rail 37a provided in the vertical direction, an upper sliding block 37c slidably attached to the linear motion rail 37a, and a lower sliding block 37d. The linear motion guide portion 37b has a generally L-shaped configuration in side view.

[0099] The second linear motion mechanism 38 includes a linear motion guide section 38b on which a linear motion rail 38a is provided in a horizontal direction perpendicular to the peripheral edge surface of the substrate 2, a sliding block 38c slidably attached to the linear motion rail 38a, and a stopper section 38d that limits the movement of the sliding block 38c. A linear motion guide section 37b is attached onto the sliding block 38c.

[0100] The first support portion 35 includes a first linear motion portion 35a attached to the upper sliding block 37c of the first linear motion mechanism 37, and a horizontal plate portion 35b protruding horizontally from the lower portion (lower edge portion) of the first linear motion portion 35a.

[0101] The second support portion 36 includes a second linear motion portion 36a attached to a lower sliding block 37d of the first linear motion mechanism 37, a vertical plate portion 36b projecting vertically from a side portion (side edge) of the second linear motion portion 36a, an attachment shaft portion 36c projecting horizontally from the vertical plate portion 36b, and a support shaft portion 36d. The attachment shaft portion 36c and the support shaft portion 36d are arranged parallel to the horizontal direction. The second linear motion portion 36a is also provided with a stopper portion 36e that limits upward movement of the lower sliding block 37d.

[0102] The first biasing portion 39 includes a tension coil spring 39a arranged in the vertical direction, and the upper end of the tension coil spring 39a is attached to the first linear motion portion 35a, and the lower end is attached to the second linear motion portion 36a. The second biasing portion 40 includes a tension coil spring 40a arranged in the vertical direction, and the upper end of the tension coil spring 40a is attached to the linear guide portion 37b, and the lower end is attached to the second linear motion portion 36a. The third biasing portion 41 includes a tension coil spring 41a disposed in the horizontal direction, one end of the tension coil spring 41a being attached to the stopper portion 38d and the other end being attached to the sliding block 38c.

[0103] The upper unit 32 that constitutes the extension section 31 is configured to include an upper block 32a, an upper extension block 32b, and a first mounting member 32c. The upper block 32a has a substantially rectangular parallelepiped shape and is placed on the horizontal plate portion 35b of the first support section 35. The upper extension block 32b has a substantially L-shape that covers the top surface and one side surface of the upper block 32a. The first mounting member 32c is a member for mounting the upper block 32a and the upper extension block 32b to the horizontal plate portion 35b.

[0104] The first mounting member 32c is configured as a stepped male screw having a stepped head 32ca and a screw shank 32cb. The screw shank 32cb is inserted through the upper extension block 32b and the upper block 32a, and the threaded tip of the screw shank 32cb is screwed into a screw hole 35ba formed in the upper surface of the horizontal plate piece 35b. The first mounting member 32c has a locking portion (outer peripheral protrusion) formed on the threaded shaft portion 32cb to prevent the first mounting member 32c from falling off the upper extension block 32b and the upper block 32a. A step is formed in the insertion hole of the upper block 32a so that the locking portion can be locked in the insertion hole. The upper block 32a and the upper extension block 32b are fixed together by a fixing member 32d such as a fixing pin.

[0105] The lower unit 33 is configured to include a lower block 33a, a lower extension block 33b, a second mounting member 33c, and a third mounting member 33d. The lower block 33a has an axial hole 33aa through which the mounting shaft 36c of the second support part 36 passes, and an axial hole 33ab through which the support shaft 36d passes. The lower extension block 33b has a generally L-shaped configuration that covers the lower surface and one side surface of the lower block 33a. The second mounting member 33c is attached to the tip of the mounting shaft 36c to which the lower block 33a is inserted, and is a member for mounting the lower block 33a to the mounting shaft 36c. The third mounting member 33d is a member for mounting the lower extension block 33b to the lower block 33a.

[0106] The second mounting member 33c is configured as a female screw having a head 33ca and a female screw portion 33cb, and is adapted to be screwed onto the threaded tip portion of the mounting shaft portion 36c. The third mounting member 33d is configured with a stepped male screw having a stepped head 33da and a shaft 33db. The shaft 33db is inserted through the recovery section 33e and the lower extension block 33b, and the threaded tip of the shaft 33db is screwed into a threaded hole formed in the underside of the lower block 33a.

[0107] 5, 6, and 7, the upper extension block 32b and the lower extension block 33b have opposing surfaces on the one side thereof, which are provided with an upper extension member 32ba that contacts the upper surface of the peripheral edge of the substrate 2, an end extension member 32bb that contacts the end surface of the peripheral edge of the substrate 2, and a lower extension member 33ba that contacts the lower surface of the peripheral edge of the substrate 2.

[0108] The extension section 31 is configured to move along the outer periphery of the substrate while sandwiching the peripheral edge edge and upper and lower surfaces (three surfaces) of the substrate between the upper surface extension member 32ba, the end surface extension member 32bb, and the lower surface extension member 33ba, thereby being able to extend the film-forming liquid into a thin film.

[0109] In this embodiment, an upper extension member 32ba and an end extension member 32bb are provided at the lower end of the one side surface of the upper extension block 32b, and a lower extension member 33ba is provided at the upper end of the one side surface of the lower extension block 33b. In another configuration example, the upper extension member 32ba may be provided on the upper extension block 32b, and the lower extension member 33ba and the end extension member 32bb may be provided on the lower extension block 33b.

[0110] The end surface extension member 32bb is disposed so as to face the space between the upper surface extension member 32ba and the lower surface extension member 33ba. In other words, the end surface extension member 32bb is disposed so as to be able to press against the peripheral edge of the substrate 2 sandwiched between the upper surface extension member 32ba and the lower surface extension member 33ba.

[0111] It is preferable to form a plurality of microgrooves along the movement direction of the coating unit 20 on the surfaces of the upper surface extending member 32ba, the end surface extending member 32bb, and the lower surface extending member 33ba facing the substrate 2. The multiple microgrooves may be, for example, grooves with a corrugated cross section or grooves with a V-shaped cross section, and the spacing and depth of these microgrooves can be set appropriately depending on the viscosity and other characteristics of the film-forming liquid used and the film thickness to be formed. For example, when forming a coating film with a thickness of approximately 10 μm to 50 μm, it is preferable to use grooves with a center-to-center spacing of approximately 0.2 mm to 0.3 mm and a depth of approximately 0.05 mm to 0.1 mm.

[0112] The upper surface extension member 32ba and the lower surface extension member 33ba are fixed to the upper extension block 32b and the lower extension block 33b. The upper surface extension member 32ba and the lower surface extension member 33ba are made of, for example, a circular or semicircular member obtained by slicing a round bar coater with a diameter of about 5 mm to 15 mm into a width of a few millimeters (for example, 1 mm to 8 mm), or a thin plate-like member with a curved surface.

[0113] Alternatively, the upper extension member 32ba may be formed by processing the lower edge portion (the portion facing the lower extension block 33b) on one side of the upper extension block 32b into a disk, semicircular, or curved shape several millimeters wide (for example, approximately 1 mm to 8 mm). Similarly, the lower extension member 33ba may be formed by processing the upper edge portion (the portion facing the upper extension block 32b) on one side of the lower extension block 33b into a disk, semicircular, or curved shape several millimeters wide (for example, approximately 1 mm to 8 mm). Furthermore, the coating device 10 may be configured to include several (plural) types of upper units 32 and lower units 33 with different extension widths so that they can be replaced depending on the coating conditions. For example, the coating device 10 may be equipped with four types of upper units 32 equipped with upper surface extension members 32ba for extension widths of 1 mm, 3 mm, 5 mm, and 7 mm, and four types of lower units 33 equipped with lower surface extension members 33ba for extension widths of 1 mm, 3 mm, 5 mm, and 7 mm, respectively. With this configuration, it is possible to appropriately replace the upper unit 32 and the lower unit 33 that constitute the spreading section 31 depending on the application conditions such as the spreading width. In this case, it is preferable to also replace the application roller 24 of the application section 22 at the same time depending on the conditions such as the spreading width.

[0114] The lower extension block 33b is provided with a recovery path 33bb, which serves as a flow path for recovering the film-forming liquid removed from the substrate 2 by the extension operation. A bottom surface extension member 33ba is provided on the inner wall surface of the recovery path 33bb, and the end surface extension member 32bb is configured to be assembled in the recovery path 33bb so that a part of the end surface extension member 32bb is in contact with the bottom surface extension member 33ba.

[0115] A recovery section 33e for recovering the film forming liquid dripping from the recovery path 33bb is provided at the bottom of one side surface of the lower extension block 33b. The recovery section 33e includes a liquid receiving section 33ea that receives the film-forming liquid dripping from the recovery path 33bb, and a pipe section 33eb that extends downward from the liquid receiving section 33ea. The lower part of the pipe section 33eb is inserted into the liquid storage section 50, so that the film-forming liquid dripping from the lower extension block 33b flows through the liquid receiving section 33ea and the pipe section 33eb into the liquid storage section 50.

[0116] As described above, in the coating device 10 according to the embodiment, the upper unit 32 of the extension part 31 is detachably attached to the horizontal plate part 35b of the first support part 35. The lower unit 33 is detachably attached to the vertical plate part 36b in a state where it is inserted between the mounting shaft part 36c and the support shaft part 36d of the second support part 36.

[0117] Next, the operation of attaching and detaching the extension section 31 (upper unit 32 and lower unit 33) to and from the extension mechanism 30 of the application unit 20 will be described. 8, to remove the upper unit 32 from the extension mechanism 30, the stepped head 32ca of the first mounting member 32c is turned counterclockwise. This causes the tip of the screw shank 32cb of the first mounting member 32c to come out of the screw hole 35ba of the horizontal plate piece 35b, allowing the upper unit 32 to be removed from the horizontal plate piece 35b. At this time, the upper block 32a and the upper extension block 32b remain engaged with the screw shank 32cb of the first mounting member 32c.

[0118] In this way, the upper unit 32 can be removed separately from the lower unit 33. Furthermore, when the upper unit 32 is removed from the extension mechanism 30, the components constituting the biasing mechanism 34 are configured not to be removed from the extension mechanism 30.

[0119] Next, to remove the lower unit 33 from the extension mechanism 30, turn the head 33ca of the second mounting member 33c in the unscrewing (counterclockwise) direction. This disengages the female thread 33cb of the second mounting member 33c from the tip thread of the mounting shaft 36c, allowing the lower block 33a to be pulled out from the mounting shaft 36c and the support shaft 36d, and the lower unit 33 can be removed from the vertical plate 36b. At this time, the lower extension block 33b and the recovery unit 33e remain attached to the lower block 33a by the third mounting member 33d.

[0120] In this way, the lower unit 33 can be removed separately from the upper unit 32. Furthermore, when the lower unit 33 is removed from the extension mechanism 30, the components constituting the biasing mechanism 34 are configured not to be removed from the extension mechanism 30.

[0121] According to the applicator 10 of the above-described embodiment, the extension unit 31 can be removed without removing the biasing mechanism 34 from the extension mechanism 30. Therefore, maintenance such as replacement of the extension unit 31 alone or cleaning of the extension unit 31 can be easily performed, resulting in an applicator with excellent maintainability.

[0122] Furthermore, according to the coating device 10, the extension unit 31 is configured to be replaceable with another extension unit without removing the biasing mechanism 34 from the extension mechanism 30. Therefore, in response to changes in the type of substrate to be coated or the coating conditions, the extension unit 31 can be flexibly replaced with another extension unit, for example, an extension unit that spreads a different width of the film-forming liquid onto the upper and lower surfaces of the peripheral edge of the substrate, thereby improving the usability of the device.

[0123] Moreover, according to the coating device 10, the upper unit 32 of the extension section 31 is supported by a first support portion 35 of the biasing mechanism 34, and the first support portion 35 is biased downward (toward the upper surface of the peripheral edge of the substrate) by a first biasing portion 39. Moreover, the lower unit 33 of the extension section 31 is supported by a second support portion 36 of the biasing mechanism 34, and the second support portion 36 is biased upward (toward the lower surface of the peripheral edge of the substrate) by a second biasing portion 40. Furthermore, the first support portion 35 and the second support portion 36 are attached to a first linear motion mechanism 37, and the first linear motion mechanism 37 attached to a second linear motion mechanism 38 is biased by a third biasing portion 41 toward the upper unit 32 and the lower unit 33 (toward the edge surface of the substrate). Therefore, the upper unit 32 can be removed separately from the first support part 35 and the lower unit 33 can be removed separately from the second support part 36 without removing any of the first biasing part 39, the second biasing part 40, and the third biasing part 41 from the extension mechanism 30, and maintenance, etc., can be performed on the upper unit 32 and the lower unit 33 individually.

[0124] Furthermore, according to the coating device 10, the upper unit 32 is removably attached to the horizontal plate portion 35b of the first support portion 35, and the lower unit 33 is removably attached to the vertical plate portion 36b while being inserted into the mounting shaft portion 36c of the second support portion 36. Therefore, the upper unit 32 can be easily removed from the horizontal plate portion 35b without removing any of the first biasing portion 39, the second biasing portion 40, and the third biasing portion 41 from the extension mechanism 30. Also, the lower unit 33 can be easily removed from the vertical plate portion 36b in the axial direction of the mounting shaft portion 36c. Therefore, the upper unit 32 and the lower unit 33 can be easily removed without interfering with each other or other device components.

[0125] Furthermore, according to the coating device 10, the upper block 32a and the upper extension block 32b can be detachably attached to the horizontal plate portion 35b by the first attachment member 32c of the upper unit 32. Furthermore, the lower block 33a can be detachably attached to the vertical plate portion 36b by the second attachment member 33c with the lower block 33a inserted into the attachment shaft portion 36c. Furthermore, the lower extension block 33b can be attached to the lower block 33a by the third attachment member 33d of the lower unit 33.

[0126] An upper surface extension member 32ba, an end surface extension member 32bb, and a lower surface extension member 33ba are provided on the opposing surfaces of the upper extension block 32b and the lower extension block 33b. Therefore, by replacing the upper extension block 32b and the lower extension block 33b in accordance with changes in the type of substrate, coating conditions, etc., it is possible to easily change the extension width of the film-forming liquid that is spread on the upper and lower surfaces of the peripheral edge of the substrate.

[0127] Furthermore, according to the coating device 10, the coating roller 24 is inserted onto the rotating shaft 23 of the coating unit 22, and the threaded portion 26a of the recovery unit 26 is screwed onto the threaded portion 23a at the lower end of the rotating shaft 23, so that the coating roller 24 and the recovery unit 26 are detachably attached to the rotating shaft 23. This facilitates maintenance such as replacement and cleaning of the coating roller 24. Furthermore, depending on the type of substrate to be coated or changes in coating conditions, the coating roller 24 can be easily replaced with another coating roller having a different structure (e.g., height, depth, etc.) of the annular groove 24a.

[0128] Furthermore, with coating apparatus 10, the four coating units 20 coat the peripheral portions of each side of the substrate in parallel, significantly reducing the time required to coat the entire periphery of the substrate and improving coating efficiency. Furthermore, maintenance such as replacement and cleaning of extension parts 31 of each coating unit 20 can be easily performed, improving the efficiency of maintenance work for the entire apparatus.

[0129] In the application device 10 according to the above embodiment, the second mounting member 33c is configured as a female screw, and the mounting shaft portion 36c has a tip screw portion, and these are configured to be screwed together, but the mounting configuration of the second mounting member 33c is not limited to this. Figure 9 is a partially enlarged cross-sectional view for explaining an example of the mounting configuration of the second mounting member 33f in another embodiment, where (a) shows the state in which the lower block 33a is mounted to the mounting shaft portion 36c, and (b) and (c) show the state in which the lower block 33a is in the process of being removed from the mounting shaft portion 36c.

[0130] In this other mounting configuration example, the structure of the second mounting member 33f differs from the structures of the lower block 33a and the mounting shaft portion 36c, and the structure for mounting the second mounting member 33f to the mounting shaft portion 36c differs.

[0131] A lower block 33a according to another mounting configuration example includes a short pipe portion 33ac protruding from the opening of the axial hole 33aa, and an annular flange portion 33ad is formed at the tip of the short pipe portion 33ac. The mounting shaft 36c also includes a notch 36ca that bifurcates the distal end, a locking portion 36cb that protrudes from the outer circumferential surface of the distal end where the notch 36ca is formed, and a tapered portion 36cc that narrows in diameter from the locking portion 36cb toward the distal end. The locking portion 36cb is configured to be able to lock onto the edge of the opening of the flange 33ad.

[0132] The second attachment member 33f has a push button-shaped outer shape with a hollow portion 33fa therein capable of accommodating the flange portion 33ad and the tapered portion 36cc. The second mounting member 33f has a short pipe mounting opening 33fb that is fitted into the short pipe portion 33ac and is configured to be able to engage with the flange portion 33ad, and has an inclined pressing portion 33fc that can be pressed along the tapered portion 36cc in the hollow portion 33fa.

[0133] As shown in Figure 9(a), the lower block 33a is inserted into the mounting shaft portion 36c, and the lower block 33a is pressed against the vertical plate portion 36b (see Figure 8). Then, the locking portion 36cb of the mounting shaft portion 36c is locked into the flange portion 33ad of the lower block 33a, and the lower block 33a is attached so that it does not come off the mounting shaft portion 36c. Therefore, when installing, the lower block 33a can be easily installed by simply inserting it onto the mounting shaft portion 36c and pushing it toward the vertical plate portion 36b until the locking portion 36cb locks onto the flange portion 33ad.

[0134] Next, when removing the lower block 33a from the mounting shaft 36c, as shown in Figure 9(b), the second mounting member 33f is pushed toward the lower block 33a. This causes the pressing portion 33fc of the hollow portion 33fa to come into contact with the tapered portion 36cc of the mounting shaft 36c. When the second mounting member 33f is pushed further, the pressing portion 33fc bends the tapered portion 36cc inward, narrowing the gap of the notch 36ca. This causes the locking portion 36cb, which had been locked to the flange portion 33ad, to disengage from the flange portion 33ad, and the tapered portion 36cc is pushed into the short pipe portion 33ac.

[0135] When the second mounting member 33f is pulled out from the mounting shaft 36c in this state, the short pipe mounting opening 33fb of the second mounting member 33f engages with the flange 33ad, as shown in Figure 9(c). By pulling out the second mounting member 33f and the lower block 33a from the mounting shaft 36c while the second mounting member 33f and the lower block 33a remain in this engaged state, the lower block 33a can be removed from the mounting shaft 36c.

[0136] According to the other mounting configuration example described above, the lower block 33a can be easily mounted to the vertical plate portion 36b (i.e., the lower unit 33 can be easily mounted to the second support portion 36) by simply pressing the lower block 33a inserted onto the mounting shaft portion 36c against the vertical plate portion 36b. Furthermore, the lower block 33a inserted onto the mounting shaft portion 36c can be easily removed from the vertical plate portion 36b by simply pressing the second mounting member 33f shown in Fig. 9 into the lower block 33a and then pulling it.

[0137] Next, the drying device 60 constituting the coating system 1 according to the embodiment will be described. Fig. 10 is a partial cross-sectional front view showing the main configuration of the drying apparatus according to the embodiment, illustrating the internal configuration of the drying oven on the door side. Fig. 11 is a partial cross-sectional side view showing the main configuration of the drying apparatus, illustrating the internal configuration of the drying oven on the substrate unloading side. Fig. 12 is a cross-sectional view taken along line XII-XII in Fig. 10, showing the internal structure of the drying oven with the door open. Fig. 13 is a cross-sectional view taken along line XIII-XIII in Fig. 11, showing the inner surface of the door. FIG. 14 is a partial plan view showing a state in which the loading section is inserted into the storage shelf of the drying furnace. 10 to 13, hatching showing the cross section of the drying furnace is omitted for the sake of simplicity.

[0138] The drying furnace 61 has a roughly rectangular box shape, and a storage shelf 71 having multiple shelves 70 on which substrates are placed is arranged inside the drying furnace 61. A substrate inlet 61a is provided in one location on the side wall of the drying furnace 61 on the substrate loading side, and a substrate outlet 61b is provided in one location on the side wall of the drying furnace 61 on the substrate unloading side. The loading entrance 61a is large enough to allow the loading forks 62a that make up the loading section 62 to be inserted and removed, and the unloading exit 61b is large enough to allow the unloading forks 63a that make up the unloading section 63 to be inserted and removed.

[0139] The storage shelf 71 is configured with a frame including vertical frame members 71a and horizontal frame members 71b, with the ridge lines of a rectangular parallelepiped as the skeleton. In addition, lower frame members 71c corresponding to the number of shelves 70 are erected between the pair of vertical frame members 71a on the carrying-in entrance 61a side, and lower frame members 71c corresponding to the number of shelves 70 are erected between the pair of vertical frame members 71a on the carrying-out exit 61b side. Each shelf 70 is configured to include short, rectangular support members 70a and rectangular crosspiece members 70b. The support members 70a are attached to three locations (at both ends and the center) of each lower frame member 71c on the loading entrance 61a side and the unloading exit 61b side, protruding in a direction perpendicular to the lower frame member 71c. The crosspiece members 70b are installed between the support members 70a on the loading entrance 61a side and the unloading exit 61b side. Substrates are placed on the three crosspiece members 70b that make up the shelf 70.

[0140] The positions of the three crosspiece members 70b are set taking into consideration the size of the board and the position of the empty space on the board where no circuits or the like are formed. The loading section 62 includes a loading fork 62a on which the substrate is placed, and a linear motion mechanism (not shown) that reciprocates the loading fork 62a in the loading direction of the substrate. The unloading section 63 includes an unloading fork 63a on which the substrate is placed, and a linear motion mechanism (not shown) that reciprocates the unloading fork 63a in the unloading direction of the substrate. 14, the loading fork 62a has a shape with four tines, and the positions and spacing of the four tines are set so that they do not overlap with the three crosspiece members 70b of the shelf 70. The unloading fork 63a has the same configuration.

[0141] The drying furnace 61 is equipped with a lifting mechanism 80 for raising and lowering the storage shelf 71 , and the lifting and lowering operation of the lifting mechanism 80 for raising and lowering the storage shelf 71 is controlled by a lifting control unit 81 . The lifting mechanism 80 includes a support part 80a that supports the storage shelf 71 in a suspended state, a lifting drive part 80b that raises and lowers the support part 80a, and a shelf position detection part 80c that detects a shelf located at the height of the loading entrance 61a or the unloading exit 61b.

[0142] The support portion 80a includes an elevation shaft 80aa and an elevation plate 80ab. The lifting shaft 80aa is disposed so as to penetrate the ceiling wall of the drying furnace 61, with its lower end attached to the top of the storage shelf 71 and its upper end attached to a lifting plate 80ab disposed above the drying furnace 61. A shaft hole 61c through which the lifting shaft 80aa passes is formed in the ceiling wall of the drying furnace 61, and a linear bushing 80ac through which the lifting shaft 80aa passes is attached to the shaft hole 61c.

[0143] A shelf position detector 80c is attached to the top of the linear bushing 80ac. The shelf position detector 80c is configured, for example, with a photoelectric sensor such as a fiber sensor. The lifting shaft 80aa is provided with a plurality of detection holes 80ad formed to correspond to the number and spacing of the multiple shelves 70. By detecting that light emitted from the photoelectric sensor has passed through the detection holes 80ad, it is possible to detect whether a shelf 70 is located at the height of the carry-in entrance 61a or the carry-out exit 61b, and thus to determine which shelf of the multiple shelves 70 is located at the height of the carry-in entrance 61a or the carry-out exit 61b.

[0144] The lifting drive unit 80b is composed of a hoist or the like that has a function of attaching a suspending device such as a chain wound around a drum that rotates by the power of a servo motor or the like to the lifting plate 80ab, and raising and lowering the support unit 80a in a state where the storage shelf 71 is suspended. An attachment 80ae for attaching the suspending device is provided on the upper surface of the lifting plate 80ab.

[0145] The lifting control unit 81 controls the movement of the shelf 70 from among the multiple shelves 70 that carries in the substrates to the height position of the inlet 61a, and the movement of the shelf 70 from which the substrates are unloaded to the height position of the outlet 61b, based on detection signals from the shelf position detection unit 80c and detection signals of the hanging height of the support unit 80a by the lifting drive unit 80b.

[0146] That is, when the substrates are carried in, the lift control unit 81 controls the lift drive unit 80b to position the shelf 70 into which the substrates are to be carried in, among the multiple shelves 70, at the height of the carry-in entrance 61a. Thereafter, the lift control unit 81 controls the lifting operation of the storage shelf 71 so that the substrates, which have been carried in from the carry-in entrance 61a while resting on the carry-in unit 62, are placed on the shelf 70. Furthermore, when unloading the substrates, the lift control unit 81 controls the lift drive unit 80b to position the shelf 70 from which the substrates are to be unloaded, among the multiple shelves 70, at the height of the unloading opening 61b. Thereafter, the lift control unit 81 controls the lifting operation of the storage shelf 71 so that the substrates placed on the shelf 70 are transferred onto the unloading unit 63 inserted through the unloading opening 61b.

[0147] An inlet opening / closing unit 67 is provided on the outer wall surface of the drying furnace 61 on the substrate loading side, and an outlet opening / closing unit 68 is provided on the outer wall surface of the drying furnace 61 on the substrate unloading side. The inlet opening / closing unit 67 includes a lid 67a for closing the inlet 61a and a movement mechanism 67b for moving the lid 67a in the opening / closing direction. The outlet opening / closing unit 68 includes a lid 68a for closing the outlet 61b and a movement mechanism 68b for moving the lid 68a in the opening / closing direction. An opening / closing control section 69 controls the opening and closing operation of the lid section 67a by the movement mechanism 67b and the opening and closing operation of the lid section 68a by the movement mechanism 68b.

[0148] The lift control unit 81 and the opening / closing control unit 69 may be configured to exchange control signals with each other. For example, the lift control unit 81 may position the shelf 70 for carrying in substrates at the height position of the loading entrance 61a, and then send an open command to the opening / closing control unit 69 to open the lid 68a closing the loading entrance 61a. Alternatively, the lift control unit 81 may position the shelf 70 for carrying out substrates at the height position of the unloading exit 61b, and then send an open command to the opening / closing control unit 69 to open the lid 68a closing the unloading exit 61b.

[0149] In addition, a blower section 64 that supplies gas (hot air) into the drying furnace 61 and a suction section 65 that sucks gas from the drying furnace 61 are provided on both side walls that intersect with the side wall on the substrate loading side of the drying furnace 61, i.e., on the wall surface of the single-wing opening / closing door 61d and its opposite wall surface. An air outlet 64a of the air blower 64 and a suction port 65a of the suction unit 65 are provided on both sides of the floor of the drying furnace 61. A blower 64c is connected to the air outlet 64a via a duct 64b, and a suction machine 65c is connected to the suction port 65a via a duct 65b. A dust collection filter 64d is provided between the air outlet 64a and the air blower 64c.

[0150] The aspirator 65c and the blower 64c are connected by a duct 65g, and the gas sucked by the aspirator 65c is sent to the blower 64c, allowing the gas (hot air) inside the drying furnace 61 to circulate. 12 and 13, the air blowing section 64 includes vertical air blowing cylindrical sections 64e (at substantially the same height as the interior of the drying furnace 61) disposed near the four corners of the drying furnace 61, and a vertically elongated air outlet 64f provided in a shape (approximately beak-shaped) that protrudes from the side surface of the air blowing cylindrical section 64e toward the interior of the furnace. The lower part of the air blowing cylindrical section 64e is connected to the air outlet 64a. The air outlet 64f is formed in the shape of a narrow slit and is directed along the side of the substrate placed on the shelf 70, so as to form a circulating flow of gas within the drying furnace 61. The slit width of the air outlet 64f can be adjusted (approximately 1 mm or more).

[0151] As shown in Figures 12 and 13, the suction section 65 comprises a vertical suction cylindrical section 65d (approximately the same height as the height inside the drying furnace 61) arranged next to the blower section 64, and a vertically long suction slit 65e provided on the side of the suction cylindrical section 65d, and the lower part of the suction cylindrical section 65d is connected to the suction port 65a. The suction slit 65e can have its slit width (approximately 1 mm or more) adjusted by shifting the position of the slit width adjustment plate 65f. The slit width adjustment plate 65f can also be fixed by shifting it diagonally, which allows adjustment of the slit shape, for example, so that the slit width at the top is wider than that at the bottom.

[0152] An exhaust section 66 is provided on the ceiling wall of the drying furnace 61 and is connected to an exhaust duct (not shown), making it possible to exhaust part of the gas inside the drying furnace 61 to the outside. The suction device 65c is also equipped with a function for taking in outside air, such as an outside air intake valve, and is configured to be able to take in outside air as needed, making it possible to adjust conditions such as humidity inside the drying furnace 61.

[0153] The operation of the drying device 60 according to the embodiment will be described. First, the operation of carrying the substrate into the drying furnace 61 will be described. When the coating process of the film-forming liquid to the peripheral portion including the edge surface of the substrate is completed in the coating device 10, the substrate is transferred onto the loading fork 62a of the loading section 62 by the substrate transfer section 14 (see Figure 1) of the coating device 10, and placed on the loading fork 62a.

[0154] When the substrate is placed on the loading fork 62 a, the operation of loading the substrate into the drying furnace 61 begins. The lifting control unit 81 determines the position of the shelf 70 into which the substrates are to be loaded based on the status (history) of loading and unloading of the substrates into the drying furnace 61, and causes the lifting mechanism 80 to move the storage shelf 71 up and down so that the position of the shelf 70 is at the height position of the loading entrance 61a. At the same time, the opening / closing control unit 69 drives the moving mechanism 67b of the loading entrance opening / closing unit 67 to move the lid 67a downward so that the loading entrance 61a is open.

[0155] Thereafter, the loading section 62 moves the loading fork 62a carrying the substrate horizontally toward the loading opening 61a and inserts the loading fork 62a through the loading opening 61a to a predetermined position. In this state, the substrate placed on the loading fork 62a is not placed on the shelf 70, and there is a gap between the underside of the substrate and the shelf 70. From this state, the lifting control unit 81 drives the lifting mechanism 80 to slightly lift the storage shelf 71 so that the substrate is placed on the shelf 70, and the substrate is placed on the shelf 70. After the substrate is placed on the shelf 70, the loading fork 62a is moved horizontally in the direction opposite to the loading direction, and the loading fork 62a is pulled out from the loading entrance 61a, and the loading fork 62a is retracted to a predetermined position.

[0156] Thereafter, the opening / closing control unit 69 drives the moving mechanism 67b of the entrance opening / closing unit 67 to move the lid 67a upward so that the entrance 61a is closed, thereby completing the substrate loading operation. The above operation is then repeated according to the timing at which the substrate is transported from the coating apparatus 10.

[0157] Next, the operation of drying the substrate in the drying furnace 61 will be described. Hot air (for example, air at about 80°C to 200°C) from blower 64c with a heater function is sent through dust collection filter 64d and duct 64b into air-blowing cylindrical portions 64e connected to air-blowing ports 64a located at the four corners of drying furnace 61. The hot air sent into air-blowing cylindrical portions 64e is blown into drying furnace 61 from vertically elongated slit-shaped outlet ports 64f.

[0158] The air blowing section 64 is arranged at the four corners of the drying furnace 61, and the air outlet 64f is directed in a fixed direction along each side of the substrate, so that an airflow is generated that flows in a fixed direction along the four sides of the substrate (in other words, circulates in a fixed direction within the drying furnace 61).

[0159] At the same time as air is being blown into the drying oven 61, part of the hot air inside the drying oven 61 is sucked through the suction slit 65e of the suction section 65 and sent to the suction machine 65c via the suction cylindrical section 65d, the suction port 65a, and the duct 65b. The hot air sucked by the suction machine 65c is sent to the blower 64c. In addition, the gas inside the drying oven 61 is appropriately exhausted from the exhaust section 66 provided in the drying oven 61, and outside air is appropriately introduced through an intake valve (not shown) provided in the suction machine 65c, so that conditions inside the drying oven 61, such as the humidity and temperature, can be adjusted.

[0160] Next, the operation of unloading the substrate from the drying furnace 61 will be described. After the substrates have been carried into the drying furnace 61 and a predetermined drying time has elapsed, the substrate unloading operation begins. The lifting control unit 81 determines the shelf 70 on which the substrates to be unloaded are placed based on the state (history) of the substrates carried into the drying furnace 61, and drives the lifting mechanism 80 to raise and lower the storage shelf 71 so that the position of the shelf 70 is at the height of the unloading port 61b. At the same time, the opening / closing control unit 69 drives the moving mechanism 68b of the unloading port opening / closing unit 68 to move the lid 68a downward so that the unloading port 61b is open.

[0161] Thereafter, the unloading unit 63 moves the unloading fork 63a horizontally toward the unloading opening 61b and inserts the unloading fork 63a from the unloading opening 61b to a predetermined position. In this state, the unloading fork 63a is located below the shelf 70 on which the substrate to be unloaded is placed, and there is a gap between the underside of the substrate on the shelf 70 and the unloading fork 63a.

[0162] From this state, the lifting control unit 81 drives the lifting mechanism 80 to slightly lower the storage shelf 71 so that the substrate on the shelf 70 is placed on the unloading fork 63a, and the substrate is placed on the unloading fork 63a. After the substrate is placed on the unloading fork 63a, the unloading fork 63a is moved horizontally in the unloading direction, and the unloading fork 63a with the substrate placed on it is pulled out of the drying furnace 61 through the unloading opening 61b and retracted to a predetermined position. Thereafter, the opening / closing control unit 69 drives the moving mechanism 68b of the unloading opening / closing unit 68 to move the lid unit 68a upward so that the unloading opening / closing unit 68b closes the unloading opening / closing unit 68b, thereby completing the unloading operation of the substrate. Then, the above operation is repeated at the timing when a predetermined drying time has elapsed.

[0163] The drying device 60 according to the embodiment is configured such that a storage shelf 71 having a plurality of shelves 70 is raised and lowered within a drying furnace 61. Therefore, there is no need to raise and lower the loading forks 62a of the loading section 62 or the unloading forks 63a of the unloading section 63, which simplifies the structure of the device and allows for space saving and compactness of the device.

[0164] Furthermore, in the drying apparatus 60, by controlling the lifting and lowering operation of the storage shelf 71 by the lifting control unit 81, the substrates carried in from the carry-in entrance 61a on the carry-in forks 62a can be accurately placed on the shelf 70 located at the same height as the carry-in entrance 61a. Furthermore, the substrates placed on the shelf 70 located at the same height as the carry-out exit 61b can be accurately transferred to the carry-out forks 63a inserted from the carry-out exit 61b, thereby enabling accurate and efficient substrate carrying-in and carrying-out operations.

[0165] Furthermore, in the drying device 60, the shelf position detection unit 80c detects which shelf among the multiple shelves 70 is at the height position of the carry-in entrance 61a or the carry-out exit 61b. Therefore, it is possible to accurately detect the shelf 70 on which the substrates carried in by the carry-in fork 62a are placed or the shelf 70 on which the substrates to be transferred to the carry-out fork 63a are placed, thereby improving the accuracy of the substrate carrying-in and carry-out operations.

[0166] Next, the ultraviolet irradiation device 90 constituting the coating system 1 according to the embodiment will be described. 1, the ultraviolet irradiation device 90 is a device for irradiating ultraviolet rays onto the peripheral portion of a substrate that has been coated with the film-forming liquid by the coating device 10 and then dried by the drying device 60, thereby hardening the film-forming liquid. The ultraviolet irradiation device 90 is configured to include a UV irradiation stage 91, a positioning unit 92, a substrate transfer section 93, a transport section 94, a light irradiation unit 95, a rotation mechanism 96, and an irradiation control section 98.

[0167] First, the configuration of the light irradiation unit 95, which is the main part of the ultraviolet irradiation device 90, will be described. FIG. 15 is a perspective view showing the main configuration of the light irradiation unit 95 of the ultraviolet irradiation device 90. As shown in FIG. The light irradiation unit 95 is composed of a first pair of light irradiation units 95a, 95b and a second pair of light irradiation units 95c, 95d, which are arranged facing each other at different heights around the lifting space of the UV irradiation stage 91.

[0168] The first pair of light irradiation units 95a, 95b are arranged in a direction parallel to the transport direction B of the substrate 2 and are equipped with irradiation sections 95aa, 95ba in which a number of ultraviolet irradiation lamps (e.g., LED lamps) are arranged in a row, and are configured so that the irradiation state (ON, OFF) can be switched by an irradiation control section 98. The second pair of light irradiation units 95c, 95d are arranged in a direction perpendicular to the transport direction B of the substrate 2, and include irradiation sections 95ca, 95da in which a number of ultraviolet irradiation lamps are arranged in a row, and are configured so that the switching of the irradiation state (ON, OFF) and the like is controlled by an irradiation control section 98. The ultraviolet irradiation lamps use LEDs that irradiate ultraviolet light in a wavelength range effective for curing the film-forming liquid, for example, in the long wavelength range of 320 to 400 nm.

[0169] The rotation mechanism 96 includes a first rotation mechanism pair 96a, 96b that rotates the first light irradiation unit pair 95a, 95b, and a second rotation mechanism pair 96c, 96d that rotates the second light irradiation unit pair 95c, 95d.

[0170] The first pair of rotation mechanisms 96a and 96b are configured to rotate the first pair of light irradiation units 95a and 95b about an axis C in a direction parallel to the transport direction B of the substrate 2. The first pair of rotation mechanisms 96a, 96b include rotation motors 96aa, 96ba, rotation members 96ab, 96bb that rotate together with the rotation shafts of the rotation motors 96aa, 96ba, and fixed frames 96ac, 96bc to which the rotation motors 96aa, 96ba and the rotation members 96ab, 96bb are attached. The first pair of light irradiation units 95a, 95b are attached to the rotation members 96ab, 96bb.

[0171] The second pair of rotation mechanisms 96c and 96d are configured to rotate the second pair of light irradiation units 95c and 95d about an axis D in a direction perpendicular to the transport direction B of the substrate 2. The second pair of rotation mechanisms 96c, 96d include rotation motors 96ca, 96da, rotation members 96cb, 96db that rotate together with the rotation shafts of the rotation motors 96ca, 96da, and fixed frames 96cc, 96dc to which the rotation motors 96ca, 96da and rotation members 96cb, 96db are attached. A second pair of light irradiation units 95c, 95d are attached to the rotation members 96cb, 96db.

[0172] The ultraviolet irradiation device 90 further includes a moving mechanism 97 that moves at least one of the second pair of rotating mechanisms 96c, 96d (in this embodiment, the second pair of rotating mechanisms 96d) forward and backward in the transport direction B of the substrate. The movement mechanism 97 is configured to include a linear motion mechanism that can move the second rotation mechanism pair 96d forward and backward in the transport direction B of the substrate 2. The linear motion mechanism is configured to include a guide portion 97a that allows the second rotation mechanism pair 96d to move forward and backward in the transport direction B of the substrate 2, and a sliding portion 97b that moves the second rotation mechanism pair 96d along the guide portion 97a.

[0173] A transport unit 94 that transports the substrate 2 is disposed below the UV irradiation stage 91, and is configured, for example, by a magnet-driven conveyor, and includes a plurality of roller shafts 94a disposed at predetermined intervals in the transport direction B of the substrate 2, and a plurality of narrow rollers 94b inserted onto each of these roller shafts 94a. The transport unit 94 can drive the roller shafts 94a in a non-contact manner using the magnetic force of the magnets, which reduces wear on the drive unit and suppresses dust generation.

[0174] The UV irradiation stage 91 has an opening 91a at a position facing the plurality of narrow rollers 94b of the transport unit 94. By lowering the UV irradiation stage 91 so that the narrow rollers 94b are above the opening 91a, the substrate 2 on the UV irradiation stage 91 can be placed on the narrow rollers 94b.

[0175] Next, the configuration of the positioning unit 92 disposed before the light irradiation unit 95 will be described. FIG. 16 is a plan view showing the main configuration of a positioning unit of an ultraviolet irradiation device, and FIG. 17 is a side view showing the main configuration of a positioning unit of an ultraviolet irradiation device. The positioning unit 92 includes a mechanism for positioning and disposing the substrate at a predetermined position before the substrate is transferred from the drying device 60 onto the UV irradiation stage 91.

[0176] Above the positioning unit 92, there is provided a substrate transfer unit 93 (see FIG. 1) that moves the substrate, which has been positioned as required by the positioning unit 92, onto the UV irradiation stage 91. The substrate transfer unit 93 includes, for example, a substrate holding unit that holds the substrate, a horizontal movement mechanism that moves the substrate holding unit back and forth in the substrate transport direction, and a vertical movement mechanism (none of which are shown) that moves the substrate holding unit back and forth in the vertical direction. The substrate holding unit is provided with a suction holder that holds the substrate by suction.

[0177] The positioning unit 92 includes an upper table unit 92a that can rotate with a substrate placed on it, and a lower table unit 92b that is disposed below the upper table unit 92a. The lower table unit 92b includes a mechanism that moves the upper table unit 92a in a predetermined direction (a horizontal direction perpendicular to the substrate transport direction B).

[0178] Furthermore, the positioning unit 92 includes a corner detection unit 92c and a positioning control unit 92d. The corner detection unit 92c has a function of detecting the orientation and position of both corners on one side of the substrate placed on the upper table unit 92a. The positioning control unit 92d has a function of driving the upper table unit 92a and / or the lower table unit 92b so that the orientation and position of both corners of the substrate detected by the corner detection unit 92c become predetermined orientations and positions.

[0179] The upper table unit 92a includes a mounting table 92aa on which a substrate is placed, a rotation axis portion 92ad which serves as the rotation axis of the mounting table 92aa, a roller portion 92ae which rotates while supporting the mounting table 92aa, and a rotation drive portion 92af which rotates the mounting table 92aa. The rotation shaft 92ad is provided on the underside of one of the four corners of the mounting table 92aa. The rollers 92ae are provided on the undersides of the other three corners of the mounting table 92aa. The rotation drive unit 92af has a function of rotating the mounting table 92aa around the rotation shaft 92ad. The mounting table 92aa includes a substantially rectangular flat plate portion 92ab and three rectangular rod-shaped substrate mounting portions 92ac attached to the upper surface of the flat plate portion 92ab. The substrate mounting portions 92ac are attached facing the substrate transport direction B.

[0180] The rotation drive unit 92af is configured to include a rod-type ROBO cylinder (radial cylinder) 92ag and a bearing unit (rod end bearing) 92ah, and one end side (the tip end of the rod) of the ROBO cylinder 92ag is attached to the bearing unit 92ah. The ROBO Cylinder 92ag is attached to the underside of the side of the mounting table 92aa opposite to the side where the rotation shaft 92ad is provided. The bearing 92ah is attached to a corner of the mounting table 92aa adjacent in the substrate transport direction B to the corner where the rotation shaft 92ad is provided. By controlling the stroke length of the rod of the ROBO Cylinder 92ag, the placement table 92aa rotates around the rotation shaft 92ad, making it possible to adjust the orientation (angle) of the substrate as well as the table angle.

[0181] The lower table unit 92b includes a support table 92ba that supports the placement table 92aa, and a linear motion mechanism 92bb that can adjust the position of the support table 92ba in a direction perpendicular to the transfer direction B of the substrate. The lower end of the rotary shaft 92ad is attached to the support table 92ba, and the other end of the ROBO cylinder 92ag is also attached to the support table 92ba. The lower table unit 92b further includes an elevation mechanism 92bc disposed below the linear motion mechanism 92bb. The elevation mechanism 92bc enables the positioning unit 92 to be raised and lowered in the vertical direction.

[0182] The corner detection unit 92c includes two lighting units 92ca that illuminate both corners of one side of the substrate from below, and two imaging units 92cb that are positioned opposite these lighting units 92ca and capture images of both corners of the substrate from above. The positioning control unit 92d controls the driving of the upper table unit 92a and / or the lower table unit 92b so that the orientation and position of both corners of the substrate imaged by the two imaging units 92cb are in a predetermined orientation and position.

[0183] Next, the light irradiation operation performed by the ultraviolet irradiation device 90 according to the embodiment will be described. Fig. 18 is a diagram (side cross-sectional view) for explaining the light irradiation operation by the first light irradiation unit pair 95a, 95b of the ultraviolet irradiation device, and Fig. 19 is a diagram (front cross-sectional view) for explaining the light irradiation operation by the second light irradiation unit pair 95c, 95d of the light irradiation device.

[0184] When the substrate 2 is carried out by the carrying-out fork 63a from the carrying-out port 61b of the drying device 60, the substrate transfer section 93 transfers the substrate 2 from the carrying-out fork 63a to above the positioning unit 92, and the substrate 2 is placed on the placement table 92aa. At this time, the placement table 92aa is moved by the lifting mechanism 92bc to a predetermined height position (for example, between the illumination section 92ca and the imaging section 92cb of the corner detection section 92c).

[0185] Next, the corner detection unit 92c activates the illumination unit 92ca and the imaging unit 92cb, and the imaging unit 92cb captures images of both corners of one side of the substrate 2 placed on the placement table 92aa. The positioning control unit 92d controls the positioning of the substrate by operating the upper table unit 92a and / or the lower table unit 92b so that the orientation and position of both corners of one side of the imaged substrate 2 are in a predetermined orientation and position that has been set in advance.

[0186] When the positioning unit 92 has completed positioning of the substrate 2, the substrate transfer unit 93 transfers the substrate 2 from the positioning unit 92 to above the UV irradiation stage 91, and the substrate 2 is placed on the UV irradiation stage 91. When the substrate 2 is placed on the UV irradiation stage 91, the irradiation control unit 98 controls the UV irradiation stage 91 to rise to the height position of the first light irradiation unit pair 95a, 95b, as shown in FIG. The irradiation control unit 98 then controls the rotation motors 96aa, 96ba of the first rotation mechanism pair 96a, 96b to be driven. The first irradiation unit pair 95a, 95b are then rotated until the irradiation sections 95aa, 95ba of the first irradiation unit pair 95a, 95b face substantially vertically downward (the state shown in FIG. 18(a)). At this time, the light irradiation surfaces of the irradiation sections 95aa, 95ba are closely opposed to the upper surfaces of the peripheral portions of two sides of the substrate 2 parallel to the transport direction B of the substrate 2. From this state, the irradiation control unit 98 starts controlling the irradiation units 95aa and 95ba of the first pair of light irradiation units 95a and 95b to irradiate ultraviolet light onto the upper surfaces of the peripheral edges of two sides of the substrate 2. If the substrate 2 is a thin plate, the ultraviolet light is irradiated onto the edge surfaces of the peripheral edges of the substrate 2 as well as the upper surfaces of the peripheral edges.

[0187] When ultraviolet irradiation of the upper peripheral edge surface of the substrate 2 is completed, the irradiation control unit 98 controls the rotation motors 96aa, 96ba of the first rotation mechanism pair 96a, 96b to be driven. Then, the first light irradiation unit pair 95a, 95b is rotated approximately 180 degrees until the irradiation sections 95aa, 95ba of the first light irradiation unit pair 95a, 95b are facing substantially vertically upward (the state shown in FIG. 18(b)). At this time, the light irradiation surfaces of the irradiation sections 95aa, 95ba and the lower surfaces of the peripheral edges of two sides of the substrate 2 parallel to the transport direction B of the substrate 2 are closely opposed to each other. From this state, the irradiation control unit 98 starts controlling the irradiation units 95aa and 95ba of the first pair of light irradiation units 95a and 95b to irradiate ultraviolet light onto the lower surfaces of the peripheral edges of two sides of the substrate 2. If the substrate 2 is a thin plate, the ultraviolet light is irradiated onto the lower surfaces of the peripheral edges of the substrate 2 as well as the end surfaces of the peripheral edges.

[0188] When ultraviolet irradiation of the underside of the peripheral portions of two sides of the substrate 2 parallel to the substrate transport direction B is completed, the irradiation control unit 98 controls the UV irradiation stage 91 to descend to the height position of the second light irradiation unit pair 95c, 95d. Furthermore, the irradiation control unit 98 controls the rotation motors 96ca and 96da of the second rotation mechanism pair 96c and 96d to be driven. Then, the second light irradiation unit pair 95c and 95d are rotated until the irradiation units 95ca and 95da of the second light irradiation unit pair 95c and 95d face substantially vertically downward (the state shown in FIG. 19(a)). At this time, the light irradiation surfaces of the irradiation units 95ca and 95da are closely opposed to the upper surfaces of the peripheral portions of two sides of the substrate 2 in a direction perpendicular to the transport direction B of the substrate 2. From this state, the irradiation control unit 98 starts controlling the irradiation units 95ca and 95da of the second pair of light irradiation units 95c and 95d to irradiate ultraviolet light, and ultraviolet light is irradiated onto the upper surfaces of the peripheral edges of the other two sides of the substrate 2. If the substrate 2 is a thin plate, ultraviolet light is irradiated onto the peripheral edge end surfaces as well as the upper surfaces of the peripheral edges of the substrate 2.

[0189] When ultraviolet irradiation of the upper peripheral edge surface of the substrate 2 is completed, the irradiation control unit 98 controls the rotation motors 96ca and 96da of the second rotation mechanism pair 96c and 96d to be driven. Then, the second light irradiation unit pair 95c and 95d are rotated approximately 180 degrees until the irradiation units 95ca and 95da of the second light irradiation unit pair 95c and 95d are facing substantially vertically upward (the state shown in FIG. 19(b)). At this time, the light irradiation surfaces of the irradiation units 95ca and 95da and the lower surfaces of the peripheral edges of the other two sides of the substrate 2 are closely opposed to each other. From this state, the irradiation control unit 98 starts controlling the irradiation of ultraviolet light from the irradiation units 95ca and 95da of the second pair of light irradiation units 95c and 95d, and ultraviolet light is irradiated onto the lower surfaces of the peripheral edges of the other two sides of the substrate 2. If the substrate 2 is a thin plate, ultraviolet light is irradiated onto the peripheral edge end surfaces as well as the lower surfaces of the peripheral edges of the substrate 2.

[0190] When the irradiation of the lower peripheral edge of the substrate 2 with ultraviolet rays is completed, the irradiation control unit 98 lowers the UV irradiation stage 91 to the height position of the transport unit 94, and places the substrate 2 on the UV irradiation stage 91 on the narrow rollers 94b of the transport unit 94. Thereafter, the transport unit 94 is driven to transport the substrate 2 out of the light irradiation unit 95, thereby completing the light irradiation process.

[0191] The orientation of the light irradiation units 95 (the first pair of light irradiation units 95a, 95b and the second pair of light irradiation units 95c, 95d) relative to the peripheral edge of the substrate 2 during ultraviolet irradiation is not limited to the above-described configuration (approximately vertically upward, approximately vertically downward). The orientation (angle) of the first pair of light irradiation units 95a, 95b and the second pair of light irradiation units 95c, 95d relative to the peripheral edge of the substrate 2 can be set appropriately depending on conditions such as the thickness of the substrate 2 to be coated and the coating width relative to the upper and lower surfaces of the peripheral edge.

[0192] For example, when the thickness of the substrate 2 is equal to or greater than a predetermined thickness, when ultraviolet irradiation of the upper surfaces of the peripheral portions of two sides of the substrate 2 is completed in the state shown in Figure 18(a) described above, the irradiation control unit 98 controls the rotation motors 96aa, 96ba of the first rotation mechanism pair 96a, 96b to drive, and rotates the first light irradiation unit pair 95a, 95b by approximately 90 degrees until the irradiation sections 95aa, 95ba of the first light irradiation unit pair 95a, 95b face each other horizontally. Then, when the light irradiation surfaces of the irradiation sections 95aa, 95ba are closely opposed to the peripheral edge surface of the substrate 2, the irradiation control section 98 may start to control the irradiation of ultraviolet light from the irradiation sections 95aa, 95ba of the first pair of light irradiation units 95a, 95b, and perform ultraviolet light irradiation toward the peripheral edge surfaces of two sides of the substrate 2 parallel to the transport direction of the substrate 2.

[0193] Similarly, in the state shown in Figure 19(a) above, when ultraviolet irradiation of the upper surfaces of the peripheral portions of the other two sides of the substrate 2 is completed, the irradiation control unit 98 controls the rotation motors 96ca and 96da of the second rotation mechanism pair 96c and 96d to be driven, and rotates the second light irradiation unit pair 95c and 95d by approximately 90 degrees until the irradiation sections 95ca and 95da of the second light irradiation unit pair 95c and 95d are facing each other horizontally. Then, when the light irradiation surfaces of the irradiation units 95ca and 95da are closely opposed to the peripheral edge surface of the substrate 2, the irradiation control unit 98 may start controlling the irradiation of ultraviolet light from the irradiation units 95ca and 95da of the second light irradiation unit pair 95c and 95d, and perform ultraviolet light irradiation toward the peripheral edge surfaces of the other two sides of the substrate 2.

[0194] In yet another embodiment, the irradiation control unit 98 may control the orientation (angle) of each irradiation unit of the light irradiation unit 95 to an angle of less than 90 degrees relative to the top and bottom surfaces of the substrate 2, so that ultraviolet light is irradiated from an oblique direction toward the top and end surfaces of the peripheral portion of the substrate 2, and toward the bottom and end surfaces of the peripheral portion of the substrate.

[0195] According to the ultraviolet irradiation device 90 of the above embodiment, the light irradiation units 95 are arranged around the lifting space of the UV irradiation stage 91, and the rotation mechanism 96 rotates the light irradiation units 95 so that the light irradiation surface of the light irradiation unit 95 closely faces at least the upper and lower peripheral surfaces of the substrate placed on the UV irradiation stage 91. Therefore, there is no need to move the substrate in the horizontal direction during light irradiation, and light can be uniformly and efficiently irradiated onto the peripheral edge surfaces of each side of the substrate and the upper and lower peripheral surfaces, allowing the film-forming liquid to be cured uniformly and efficiently.

[0196] Furthermore, with the ultraviolet irradiation device 90, the UV irradiation stage 91 on which the substrate is placed is moved to the height position of the first pair of light irradiation units 95a, 95b, and the first pair of light irradiation units 95a, 95b is rotated by the first pair of rotation mechanisms 96a, 96b, thereby enabling uniform and efficient light irradiation to be performed on the upper peripheral surface, the end surface of the peripheral portion, and the lower peripheral surface of the two sides of the substrate that are parallel to the transport direction B of the substrate. Furthermore, by moving the UV irradiation stage 91 on which the substrate is placed to a height position of a second pair of light irradiation units 95c, 95d that is different in height from the first pair of light irradiation units 95a, 95b, and rotating the second pair of light irradiation units 95c, 95d using the second pair of rotation mechanisms 96c, 96d, it is possible to uniformly and efficiently irradiate the upper surface, the end surface, and the lower surface of the peripheral portion of two sides of the substrate that are perpendicular to the substrate transport direction B. Therefore, it is possible to save space in the ultraviolet irradiation device 90 and achieve a compact device configuration.

[0197] Furthermore, according to the ultraviolet irradiation device 90, by using the moving mechanism 97 to move at least one of the second rotating mechanism pair 96c, 96d back and forth in the substrate transport direction, the spacing between the second rotating mechanism pair 96c, 96d can be adjusted depending on the size of the substrate, etc., and the device can be applied to substrates of different sizes.

[0198] Furthermore, with the ultraviolet irradiation device 90, when the UV irradiation stage 91 is lowered, the narrow rollers 94b of the transport section 94 can be exposed through the opening 91a of the UV irradiation stage 91. Therefore, simply by lowering the UV irradiation stage 91, the substrate on the UV irradiation stage 91 can be transferred to the transport section 94, thereby improving the efficiency of transferring and carrying out the substrate onto the transport section 94.

[0199] Furthermore, the ultraviolet irradiation device 90 is equipped with a positioning unit 92, and controls the upper table unit 92a and / or the lower table unit 92b so that the orientation and position of the corners of the substrate detected by the corner detection unit 92c are in a predetermined orientation and position, thereby enabling adjustment of the orientation and / or position of the substrate.

[0200] In addition, the corner detection unit 92c is configured to capture an image of the corner of the substrate illuminated by the lighting unit 92ca using the imaging unit 92cb, so the orientation and position of the corner of the substrate can be detected more accurately from the captured image. The positioning control unit 92d then drives the upper table unit 92a and / or the lower table unit 92b to adjust the orientation and position of the substrate so that the orientation and position of the corners of the substrate imaged by the imaging unit 92cb are in a predetermined orientation and position, thereby adjusting the orientation and / or position of the substrate with even greater precision.

[0201] The upper table unit 92a is configured to rotate the mounting table 92aa around a rotation shaft 92ad using a rotation drive unit 92af, allowing fine adjustment of the orientation (angle) of the substrate. The lower table unit 92b is configured to allow fine adjustment of the position of the support table 92ba, which supports the mounting table 92aa, in a direction perpendicular to the movement direction of the substrate. This improves the accuracy of the orientation and positioning of the substrate.

[0202] The positioning unit 92 adjusts the orientation and / or position of the substrate before moving it onto the UV irradiation stage 91, and the adjusted substrate can be moved onto the UV irradiation stage 91 by the substrate transfer unit 93. Therefore, the substrate can be placed on the UV irradiation stage 91 in an accurately positioned state, and the light irradiation unit 95 can accurately irradiate the upper peripheral surface, the edge surface of the peripheral portion, and the lower peripheral surface of the substrate with light.

[0203] Furthermore, the coating system 1 according to the embodiment is configured to include the coating device 10, the drying device 60, and the ultraviolet irradiation device 90, and is therefore a system that achieves the above-mentioned effects of the coating device 10, the above-mentioned effects of the drying device 60, and the above-mentioned effects of the ultraviolet irradiation device 90. Therefore, it is possible to construct a coating system that is superior in maintainability and space-saving compared to conventional systems, can efficiently perform drying processing and curing processing by light irradiation, and is suitable for incorporation into a substrate manufacturing process.

[0204] The coating system according to the present invention does not necessarily have to include all of the coating device, drying device, and ultraviolet irradiation device. A coating system according to another configuration may be composed of a coating device and a drying device, and a coating system according to yet another embodiment may be composed of a coating device and an ultraviolet irradiation device. [Industrial Applicability]

[0205] The present invention can be widely used in fields such as the electronic circuit board industry and the electronic equipment industry, which handle various substrates such as printed wiring boards, metal substrates, package substrates, and glass substrates. [Explanation of symbols]

[0206] 1. Coating system 10 Coating equipment 60 Drying equipment 90 Ultraviolet irradiation device 2 boards 10 Coating equipment 11 Conveyor 12 Positioning part 13 Coating stage (support part) 14 Substrate transfer section 15 Mobile Unit (Means of Transportation) 15a X-axis linear motion mechanism 15b Y-axis linear motion mechanism 16 Coating control unit 17 Control section 20 Coating unit 21 Coating mechanism 22 Application section 23 Rotation axis 23a Threaded part 24 Application roller 24a Annular groove 24b Shaft hole 25 Liquid supply section 25a Tube mounting part 25b Liquid discharge part 25ba discharge hole 26 Recovery Department 26a Threaded part 26aa screw hole 26b Liquid receiving part 26c Connecting part 26d pipe section 30 Extension mechanism 31 Extension part 32 Upper Unit 32a Upper Block 32b Upper extension block 32ba Upper extension member 32bb End extension member 32c First mounting member 32ca stepped head 32cb screw shaft 32d Fixing member 33 Lower unit 33a Lower Block 33aa shaft hole 33ab shaft hole 33ac short pipe section 33ad flange 33b Lower extension block 33ba lower extension member 33bb recovery route 33c Second mounting member 33ca head 33cb female thread 33d Third mounting member 33da stepped head 33db shaft 33f Second mounting member 33fa Cavity 33fb short pipe mounting port 33fc Pushing part 33e Recovery Department 33ea Liquid receiving part 33eb pipe section 34 Biasing mechanism 35 1st support part 35a First linear motion section 35b Horizontal plate piece 35ba screw hole 36 Second support part 36a Second linear motion section 36b Vertical plate piece 36c Mounting shaft 36ca notch 36cb Locking part 36cc tapered section 36d Support shaft part 36e Stopper part 37 First linear motion mechanism 37a Linear rail 37b Linear guide section 37c Upper sliding block 37d Lower sliding block 38 Second linear motion mechanism 38a Linear rail 38b Linear guide section 38c sliding block 38d Stopper part 39 1st biasing section 39a Tension coil spring 40 Second biasing section 40a tension coil spring 41 Third biasing section 41a Extension coil spring 50 Liquid storage section 51 Lid 51a Tube mounting part 52 Lower box 53 Box Receiving Stand 54 Transfer pump 55 Mounting parts 60 Drying equipment 61 Drying oven 61a Loading entrance 61b Exit 61c shaft hole 61d Opening and closing door 62 Loading section (substrate loading means) 62a Loading fork 63 Unloading section (substrate unloading means) 63a Fork for carrying out 64 Blower 64a Air outlet 64b Duct 64c blower 64d dust collection filter 64e Air blowing cylinder 64f Air Outlet 65 Suction part 65a Suction port 65b Duct 65c suction machine 65d Suction tube 65e Suction slit 65f Slit width adjustment plate 65g duct 66 Exhaust section 67 Loading entrance opening / closing part 67a Lid 67b Moving mechanism 68 Exit opening / closing part 68a Lid 68b Moving mechanism 69 Opening and closing control section 70 shelves 70a Support member 70b Crosspiece 71 Storage Shelf 71a Vertical frame member 71b Horizontal frame member 71c Lower frame member 80 Lifting mechanism 80a Support part 80aa lifting axis 80ab lifting plate 80ac Linear Bush 80ad detection hole 80ae Mounting fixture 80b Lifting drive unit 80c Shelf position detection unit 81 Lift control section 90 Ultraviolet irradiation device (light irradiation device) 91 UV irradiation stage (elevating stage) 91a opening 92 Positioning unit (positioning means) 92a Upper table unit 92aa Mounting table 92ab flat plate part 92ac substrate placement area 92ad Rotating shaft 92ae Roller part 92af Rotation drive unit 92ag ROBO Cylinder 92ah bearing part 92b Lower table unit 92ba Support Table 92bb Linear motion mechanism (Linear motion mechanism part) 92bc lifting mechanism 92c Corner detection unit (corner detection means) 92ca lighting section 92cb imaging unit 92d Positioning control section 93 Substrate transfer section 94 Conveying section (conveying means) 94a Roller shaft 94b Narrow roller 95 Light irradiation unit 95a, 95b First light irradiation unit pair 95aa, 95ba irradiation part 95c, 95d Second light irradiation unit pair 95ca, 95da irradiation part 96 Rotating mechanism 96a, 96b First rotating mechanism pair 96aa, 96ba rotary motor 96ab, 96bb Rotating members 96ac, 96bc fixed frame 96c, 96d Second rotating mechanism pair 96ca, 96da rotary motor 96cb, 96db Rotating member 96cc, 96dc fixed frame 97 Moving mechanism 97a Guide part 97b Sliding part 98 Irradiation control unit A Direction of application unit movement B Board transport direction C and D axes (rotation center axis)

Claims

1. A coating apparatus that coats a peripheral portion of a substrate with a film forming liquid while moving a substrate and a coating unit relative to each other, The application unit is The device is configured to include a coating mechanism and a spreading mechanism, the coating mechanism includes a coating unit that coats the film-forming liquid on at least the peripheral edge surface of the substrate, The extension mechanism a spreading section that spreads the film-forming liquid applied by the applying section into a thin film on the edge surface and the upper and lower surfaces of the peripheral edge of the substrate; a biasing mechanism that biases the extension portion toward the edge surface and upper and lower surfaces of the peripheral portion of the substrate, The coating device is characterized in that the extension section is configured to be removable without removing the biasing mechanism from the extension mechanism.

2. 2. The coating device according to claim 1, wherein the extension unit is configured to be replaceable with another extension unit without removing the biasing mechanism from the extension mechanism.

3. The extension portion is It includes an upper unit and a lower unit, The biasing mechanism a first support portion that supports the upper unit; a second support portion that supports the lower unit; a first linear motion mechanism to which the first support portion and the second support portion are respectively attached so as to be movable in a vertical direction; a second linear motion mechanism attached to the first linear motion mechanism so as to be movable in a horizontal direction perpendicular to the edge surface of the peripheral edge of the substrate; a first biasing portion that biases the first support portion downward; a second biasing portion that biases the second support portion upward; 2. The coating device according to claim 1, further comprising a third biasing portion that biases the first linear motion mechanism attached to the second linear motion mechanism toward the upper unit and the lower unit.

4. The first support portion is a first linear motion portion attached to the first linear motion mechanism; a horizontal plate portion protruding from a lower portion of the first linear motion portion, The second support portion is a second linear motion portion attached to the first linear motion mechanism; a vertical plate portion protruding from a side portion of the second linear motion portion; a shaft portion projecting horizontally from the vertical plate portion, the upper unit is detachably attached to the horizontal plate portion, 4. The coating device according to claim 3, wherein the lower unit is detachably attached to the vertical plate portion while being inserted into the shaft portion.

5. The upper unit is an upper block disposed on the horizontal plate portion; a substantially L-shaped upper extension block covering the upper surface and one side surface of the upper block; a first mounting member for mounting the upper block and the upper extension block to the horizontal plate portion, The lower unit is a lower block having an axial hole through which the axial portion is passed; a substantially L-shaped lower extension block covering the lower surface and one side surface of the lower block; a second mounting member attached to the tip of the shaft portion to which the lower block is inserted; a third mounting member that mounts the lower extension block to the lower block; The upper extension block and the lower extension block have opposing surfaces on the one side surface, On the opposing surface, an upper surface extension member that contacts the upper surface of the peripheral edge portion of the substrate; an edge extension member that contacts the edge of the peripheral portion of the substrate; 5. The coating apparatus according to claim 4, further comprising a lower surface extending member that contacts the lower surface of the peripheral edge of the substrate.

6. the lower block has a short pipe portion protruding from an opening of the axial hole, The short pipe portion has a flange portion at a tip portion, The shaft portion is A notch formed on the tip side; a locking portion formed on the outer peripheral surface of the tip portion on which the notch is formed; a tapered portion formed from the locking portion toward the tip end, The locking portion is configured to be able to be locked to the opening of the flange portion, The second mounting member is a hollow portion inside the flange portion and the tapered portion, a short pipe attachment port that is inserted into the short pipe portion and can be engaged with the flange portion; 6. The coating device according to claim 5, wherein the hollow portion is provided with an inclined pressing portion that can press along the tapered portion.

7. The application unit is a rotating shaft having a threaded portion at its lower end; an application roller having an annular groove formed on its outer peripheral surface and a shaft hole formed in its central portion through which the rotary shaft is inserted; a liquid supply unit disposed adjacent to the outer peripheral surface of the application roller and supplying the film forming liquid to the annular groove; a recovery unit that recovers the film forming liquid dripping from the application roller, The recovery section a threaded portion having a screw hole that can be screwed into the threaded portion and that fixes the application roller to the rotation shaft; a liquid receiving portion disposed below the threaded portion; a connecting portion that connects the screw portion and the liquid receiving portion so that they have the same central axis, 2. The coating device according to claim 1, wherein the coating roller and the recovery unit are detachably attached to the rotary shaft.

8. a support portion that supports the substrate; a moving means for moving each of the coating units arranged around the support section along a side of the substrate supported by the support section; a coating control unit that controls the operation of each of the moving means and each of the coating units, The application control unit, While the coating portion of each coating unit is coating the film forming liquid on at least the peripheral edge surface of the substrate, The applied film forming liquid is spread in a thin film on the edge surface and the upper and lower surfaces of the peripheral portion of the substrate by the spreading unit, 2. The coating apparatus according to claim 1, wherein each of the moving means controls the movement of each of the coating units along the side of the substrate.

9. A coating system comprising the coating device according to any one of claims 1 to 8 and a drying device equipped with a drying furnace that dries a substrate onto which a film-forming liquid has been applied by the coating device, The drying device a storage shelf provided in the drying furnace and having a plurality of shelves on which the substrates are placed; a loading opening / closing unit that opens and closes a loading opening through which a substrate loading unit is loaded and unloaded, the loading opening / closing unit being provided on a side surface of the drying furnace on the substrate loading side; an unloading opening / closing unit that is provided on a side surface of the drying furnace on the substrate unloading side and that opens and closes an unloading opening through which the substrate unloading means is inserted and removed; an opening / closing control unit that controls the opening and closing operations of the carry-in entrance opening / closing unit and the carry-out exit opening / closing unit; a lifting mechanism for lifting and lowering the storage shelf; a lifting control unit that controls the lifting operation of the storage shelf by the lifting mechanism.

10. In the drying device, The lift control unit is When carrying in a substrate, a shelf among the plurality of shelves into which the substrate is to be carried in is positioned at the height of the carry-in opening, and then the lifting and lowering operation of the storage shelf is controlled so that the substrate carried in by the substrate carrying-in means is placed on the shelf; The coating system according to claim 9, characterized in that, when unloading a substrate, the lifting and lowering operation of the storage shelf is controlled so that the shelf from which the substrate is unloaded is positioned at the height of the unloading port, and then the substrate placed on the shelf is transferred to the substrate unloading means.

11. In the drying device, The lifting mechanism is a support portion that supports the storage shelf; an elevation drive unit that raises and lowers the support unit; The coating system according to claim 9, further comprising a shelf position detection unit that detects whether the shelf is at a height position of the entrance or the exit.

12. A coating system comprising the coating device according to any one of claims 1 to 8 and a light irradiation device for irradiating light onto a peripheral portion of a substrate onto which a film-forming liquid has been applied by the coating device, thereby hardening the film-forming liquid, The light irradiation device is a lifting stage that can be raised and lowered with the substrate placed thereon; a light irradiation unit disposed around the lifting space of the lifting stage and configured to irradiate the peripheral portion of the substrate with light; a rotation mechanism that rotates the light irradiation unit so that the light irradiation surface of the light irradiation unit faces closely to at least the upper surface and the lower surface of the peripheral edge of the substrate.

13. In the light irradiation device, The light irradiation unit is a first pair of light irradiation units and a second pair of light irradiation units that are arranged opposite each other at different heights around the lifting space, The first light irradiation unit pair arranged in a direction parallel to the transport direction of the substrate, The second light irradiation unit pair arranged in a direction perpendicular to the transport direction of the substrate, The rotation mechanism is a first rotation mechanism pair that rotates the first light irradiation unit pair; 13. The coating system according to claim 12, further comprising a second pair of rotation mechanisms for rotating the second pair of light irradiation units.

14. A coating system as described in Claim 13, characterized in that the light irradiation device is provided with a movement mechanism that moves at least one of the second pair of rotation mechanisms back and forth in the transport direction of the substrate.

15. In the light irradiation device, a transport means for transporting the substrate is disposed below the lifting stage; The conveying means a plurality of narrow rollers arranged in a conveying direction of the substrate; The lifting stage is 13. The coating system according to claim 12, wherein the conveying means is provided with an opening at a position facing the plurality of narrow rollers, through which the narrow rollers are exposed onto the lifting stage.

16. The light irradiation device a positioning means for positioning the substrate before moving the substrate onto the lifting stage; 13. The coating system according to claim 12, further comprising a moving means for moving the substrate, which has been positioned by the positioning means, onto the lifting stage.

17. In the light irradiation device, The positioning means an upper table unit that is rotatable with the substrate placed thereon; a lower table unit disposed below the upper table unit and capable of linearly moving the upper table unit in a predetermined direction; a corner detection means for detecting the orientation and position of a corner of the substrate placed on the upper table unit; The coating system described in claim 16, characterized in that it is further equipped with a positioning control unit that drives the upper table unit and / or the lower table unit so that the orientation and position of the corner of the substrate detected by the corner detection means are in a predetermined orientation and position.

18. In the light irradiation device, The upper table unit is a mounting table on which the substrate is placed; a rotation shaft portion provided on a lower surface of one corner portion of the loading table; a roller portion provided on the underside of another corner of the loading table; a rotation drive unit that rotates the placing table around the rotation shaft unit, The lower table unit is a support table that supports the placement table; a linear motion mechanism that can adjust the position of the support table in a direction perpendicular to the moving direction of the substrate, 18. The coating system according to claim 17, wherein the rotation shaft portion and the rotation drive portion are attached to the support table.

19. In the light irradiation device, The corner detection means an illumination unit that illuminates the corners of the substrate from below; an imaging unit that is provided at a position opposite to the illumination unit and captures an image of the corner of the substrate from above; The positioning control unit The coating system described in claim 17, characterized in that the upper table unit and / or the lower table unit are driven so that the orientation and position of the corner of the substrate imaged by the imaging unit are in a predetermined orientation and position.

20. A coating system including the coating device according to any one of claims 1 to 8, a drying device having a drying furnace for drying a substrate onto which a film-forming liquid has been coated by the coating device, and a light irradiation device for irradiating light onto a peripheral portion of the substrate onto which the film-forming liquid has been coated by the coating device, thereby hardening the film-forming liquid, The drying device a storage shelf provided in the drying furnace and having a plurality of shelves on which the substrates are placed; a loading opening / closing unit that opens and closes a loading opening through which a substrate loading unit is loaded and unloaded, the loading opening / closing unit being provided on a side surface of the drying furnace on the substrate loading side; an unloading opening / closing unit that is provided on a side surface of the drying furnace on the substrate unloading side and that opens and closes an unloading opening through which the substrate unloading means is inserted and removed; an opening / closing control unit that controls the opening and closing operations of the carry-in entrance opening / closing unit and the carry-out exit opening / closing unit; a lifting mechanism for lifting and lowering the storage shelf; a lifting control unit that controls the lifting mechanism to lift the storage shelf, The light irradiation device is a lifting stage that can be raised and lowered with the substrate placed thereon; a light irradiation unit disposed around the lifting space of the lifting stage and configured to irradiate the peripheral portion of the substrate with light; a rotation mechanism that rotates the light irradiation unit so that the light irradiation surface of the light irradiation unit faces closely to at least the upper surface and the lower surface of the peripheral edge of the substrate.

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