Inductor Components

Abstract

To improve a shear strength between a via wiring line and an internal wiring line in an inductor component.SOLUTION: An inductor component includes: a first internal wiring line; a second internal wiring line; an interlayer insulation film disposed between the first internal wiring line and the second internal wiring line and having a first main surface on the first internal wiring line side, a second main surface on the second internal wiring line side, and a via passing through between the first main surface and the second main surface; and a via wiring line inserted into the via and electrically connecting the first internal wiring line and the second internal wiring line to each other. In a first cross-section including a central axis of the via wiring line, the via wiring line has a wedge portion interposed between the interlayer insulation film and the first internal wiring line in a direction parallel to the central axis.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to inductor components. [Background technology]

[0002] An example of an electronic component is described in Japanese Patent Application Laid-Open No. 2019-212692 (Patent Document 1). A conventional electronic component includes, for example, two internal wirings, an interlayer insulating layer having vias disposed between the internal wirings, and via wiring inserted into the vias. The via wiring electrically connects the two internal wirings. The via has a tapered shape in which the diameter decreases in the depth direction. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-212692 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in conventional electronic components, the shear strength between the via wiring and the internal wiring is insufficient, which may result in a decrease in connection reliability.

[0005] An object of the present disclosure is to provide an inductor component that has excellent shear strength between via wiring and internal wiring. [Means for solving the problem]

[0006] In order to solve the above problems, an inductor component according to one aspect of the present disclosure comprises: a first internal wiring; A second internal wiring; an interlayer insulating layer disposed between the first internal wiring and the second internal wiring, the interlayer insulating layer having a first main surface on the first internal wiring side, a second main surface on the second internal wiring side, and a via penetrating between the first main surface and the second main surface; a via wiring that is inserted into the via and electrically connects the first internal wiring and the second internal wiring, In a first cross section including a central axis of the via wiring, The via wiring has a wedge portion sandwiched between the interlayer insulating layer and the first internal wiring in a direction parallel to the central axis.

[0007] According to this aspect, the shear strength between the via wiring and the internal wiring can be increased. [Effects of the Invention]

[0008] According to the inductor component of one aspect of the present disclosure, the shear strength between the via wiring and the internal wiring is improved. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a perspective plan view showing a first embodiment of an inductor component. [Figure 2] FIG. 2 is a cross-sectional view taken along line II-II of FIG. [Figure 3] FIG. 3 is an enlarged view of part A in FIG. 2. [Figure 4A] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4B] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4C] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4D] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4E] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4F] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4G] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4H] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4I]5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4J] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 4K] 5A to 5C are schematic cross-sectional views illustrating a method for manufacturing an inductor component. [Figure 5] FIG. 4 is a schematic cross-sectional view showing a second embodiment of the inductor component. [Figure 6] FIG. 10 is a schematic cross-sectional view showing a third embodiment of the inductor component. [Figure 7] FIG. 10 is a schematic cross-sectional view showing a fourth embodiment of the inductor component. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, an inductor component according to one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0011] [First embodiment] (composition) FIG. 1 is a perspective plan view showing one embodiment of an inductor component. FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1. FIG. 2 shows an XZ cross section including a central axis AX of a via wiring. The XZ cross section is an example of a first cross section including the central axis AX. For convenience, FIG. 2 omits the constricted portion and protruding portion of the via wiring, the recessed portion of the first pad portion, and the seed layer, which will be described later. These are shown in FIG. 3 and subsequent figures.

[0012] In the figure, the thickness direction of the inductor component 1 is defined as the Z direction. In a plane perpendicular to the Z direction of the inductor component 1, the longitudinal direction of the inductor component 1, in which the first external terminal 51 and the second external terminal 52 are aligned, is defined as the X direction. The direction perpendicular to the longitudinal direction is defined as the Y direction. The XZ cross-sectional view is obtained by cutting the inductor component 1 along a plane formed by a line extending in the X direction and a line extending in the Z direction and including the central axis AX of the via wiring.

[0013] The inductor component 1 is mounted in electronic devices such as personal computers, DVD players, digital cameras, TVs, mobile phones, car electronics, etc., and is, for example, a component having an overall rectangular parallelepiped shape. However, the shape of the inductor component 1 is not particularly limited, and may be a cylindrical shape, a polygonal cylindrical shape, a truncated conical shape, or a truncated polygonal conical shape.

[0014] 1 and 2, the inductor component 1 has an element body 10, an inductor wiring 100, an insulating layer 30, a first vertical wiring 21, a second vertical wiring 22, a first external terminal 51, and a second external terminal 52. For convenience, the external terminals are depicted by two-dot chain lines in FIG. 1. In addition, the element body 10 and the coating film 60 are depicted as transparent in FIG. 1 to facilitate understanding of the structure, but they may also be translucent or opaque.

[0015] The element body 10 has an insulating substrate 90, an insulating layer 30 disposed on the insulating substrate 90, and a coating film 60 disposed on the insulating layer 30. The insulating substrate 90, the insulating layer 30, and the coating film 60 are stacked along the direction of the central axis AX so as to sandwich the inductor wiring 100. In other words, the inductor wiring 100 is provided inside the element body 10. A substrate 70, which will be described later, may be disposed between the insulating substrate 90 and the insulating layer 30.

[0016] Hereinafter, the upward direction refers to the direction from the insulating substrate 90 toward the coating film 60 in the direction of the central axis AX (or the Z direction). The upper surface of an element refers to the upward surface of the element. The downward direction refers to the direction from the coating film 60 toward the insulating substrate 90 in the direction of the central axis AX. The lower surface of an element refers to the downward surface of the element.

[0017] The width direction is the direction perpendicular to the central axis AX, and is also called the X direction. The width of an element is the length of the element in the width direction. The height direction is the direction parallel to the central axis AX, and as mentioned above, is also called the Z direction. The height of an element is the length of the element in the height direction.

[0018] An inductor wiring refers to a curve (two-dimensional curve) that extends on a plane, and may be a curve with more than one turn, a curve with less than one turn, or a curve that may have a straight line in part.

[0019] The inductor wiring 100 is provided on the upper surface of the insulating substrate 90 and extends in a direction parallel to the upper surface of the insulating substrate 90. The inductor wiring 100 is wound in a spiral shape around the axis of the inductor wiring 100 on the upper surface of the insulating substrate 90. The inductor wiring 100 has a spiral shape with more than one turn. When viewed from above, the inductor wiring 100 is wound in a spiral shape in a clockwise direction from the outer peripheral end to the inner peripheral end. Note that the inductor wiring 100 may be a curve with less than one turn, or may have a straight line in part.

[0020] The thickness of the inductor wiring 100 is, for example, 40 μm or more and 120 μm or less. Specifically, the inductor wiring 100 has a thickness of 45 μm, a wiring width of 50 μm, and a wiring space of 10 μm. The wiring space may be 3 μm or more and 20 μm or less.

[0021] The inductor wiring 100 has a spiral portion 120, a first pad portion 111, and a second pad portion 112. The first pad portion 111 is connected to a first vertical wiring 21, and the second pad portion 112 is connected to a second vertical wiring 22. The spiral portion 120 has the first pad portion 111 as its outer peripheral end and the second pad portion 112 as its inner peripheral end, extends from the first pad portion 111 and the second pad portion 112 in a direction parallel to the upper surface of the insulating substrate 90, and is wound in a spiral shape.

[0022] The insulating substrate 90 supports the inductor wiring 100. The insulating substrate 90 is made of an insulating material that does not contain a magnetic substance, and contains, for example, any of epoxy, polyimide, phenol, acrylic, and vinyl ether resins.

[0023] The covering film 60 protects the inductor wiring 100. The covering film 60 is also made of the above insulating material that does not contain a magnetic substance. The covering film 60 is formed of, for example, solder resist.

[0024] The insulating layer 30 covers at least a portion of the inductor wiring 100. The insulating layer 30 includes an interlayer insulating layer 31, a resin wall 32, and a base insulating layer 33. The interlayer insulating layer 31 covers the top surface of the inductor wiring 100, the resin wall 32 covers the side surfaces of the inductor wiring 100, and the base insulating layer 33 covers the bottom surface of the inductor wiring 100. Specifically, the resin wall 32 is provided on the same surface as the inductor wiring 100, between the turns of the inductor wiring 100, and on the outer and inner diameter sides of the inductor wiring 100. The interlayer insulating layer 31 covers the top surface of the inductor wiring 100 and has vias at positions corresponding to the first and second pads 111 and 112 of the inductor wiring 100. The insulating layer 30 is composed of two interlayer insulating layers 31, the resin wall 32, and the base insulating layer 33, but may be composed of one, two, four, or more insulating layers.

[0025] The insulating layer 30 is formed of a photosensitive permanent photoresist. A photosensitive permanent photoresist is a photoresist that is not removed after processing. Specifically, the insulating layer 30 is made of the above insulating material that does not contain a magnetic material. This improves insulation reliability. The underlying insulating layer 33 may contain a non-magnetic filler such as silica. The thickness of the underlying insulating layer 33 is, for example, 10 μm or less.

[0026] The first vertical wiring 21 and the second vertical wiring 22 extend from the inductor wiring 100 in the direction of the central axis AX and penetrate the element body 10. The first vertical wiring 21 extends upward from the upper surface of the first pad portion 111 of the inductor wiring 100 and includes a first via wiring 212 that penetrates the inside of the interlayer insulating layer 31, and a first columnar wiring 211 that extends upward from the first via wiring 212 and penetrates the inside of the coating film 60. The second vertical wiring 22 extends upward from the upper surface of the second pad portion 112 of the inductor wiring 100 and includes a second via wiring 222 that penetrates the interlayer insulating layer 31, and a second columnar wiring 221 that extends upward from the second via wiring 222 and penetrates the inside of the coating film 60.

[0027] One of the inductor wiring 100 and the first columnar wiring 211 corresponds to an example of a "first internal wiring" set forth in the claims. The other of the inductor wiring 100 and the first columnar wiring 211 corresponds to an example of a "second internal wiring" set forth in the claims. In this case, the first via wiring 212 corresponds to an example of a "via wiring" set forth in the claims.

[0028] One of the inductor wiring 100 and the second columnar wiring 221 corresponds to an example of a "first internal wiring" set forth in the claims. The other of the inductor wiring 100 and the second columnar wiring 221 corresponds to an example of a "second internal wiring" set forth in the claims. In this case, the second via wiring 222 corresponds to an example of a "via wiring" set forth in the claims.

[0029] The inductor wiring 100 is made of a conductive material, such as a metal material with low electrical resistance, such as Au, Pt, Pd, Ag, Cu, Al, Co, Cr, Zn, Ni, Ti, W, Fe, Sn, In, or an alloy containing any of these. This reduces the DC resistance of the inductor component 1. The first vertical wiring 21 and the second vertical wiring 22 are made of the same conductive material as the inductor wiring 100. In particular, they may be Cu, Ag, Au, Fe, or an alloy containing any of these.

[0030] The first external terminal 51 is provided on the upper surface of the covering film 60 and covers the end face of the first columnar wiring 211 exposed from the upper surface. This allows the first external terminal 51 to be electrically connected to the first pad 111 of the inductor wiring 100. The second external terminal 52 is provided on the upper surface of the covering film 60 and covers the end face of the second columnar wiring 221 exposed from the upper surface. This allows the second external terminal 52 to be electrically connected to the second pad 112 of the inductor wiring 100.

[0031] The first external terminal 51 and the second external terminal 52 are made of a conductive material and have a three-layer structure in which, for example, metal layers made of Cu, which has low electrical resistance and excellent stress resistance, Ni, which has excellent corrosion resistance, and Au, which has excellent solder wettability and reliability, are laminated from the inside to the outside in this order.

[0032] FIG. 3 is an enlarged view of portion A in FIG. 2. FIG. 3 shows a portion of a first cross section including the central axis AX. As shown in FIG. 3, the first via wiring 212 has a wedge portion 212a sandwiched between the interlayer insulating layer 31 and the first pad portion 111 in a direction parallel to the central axis AX. When a first reference line S1 is defined as a line including the first opening end 31Za of the via 31Z and parallel to the central axis AX, the wedge portion 212a is located on the opposite side of the first reference line S1 from the central axis AX. This creates an anchor effect of the wedge portion 212a on the interlayer insulating layer 31 and the first pad portion 111, improving the shear strength between the first via wiring 212 and the first pad portion 111 and enhancing connection reliability.

[0033] The interlayer insulating layer 31 has a first main surface 31X on the first pad portion 111 side, a second main surface 31Y on the first columnar wiring 211 side, and a via 31Z penetrating between the first main surface 31X and the second main surface 31Y. The first main surface 31X includes a first portion 31Xa in contact with the first pad portion 111. The via 31Z has a flat inner surface. Here, the flat inner surface refers to a linear portion of the inner surface of the via 31Z in the first cross section. The via 31Z includes a first opening end 31Za on the first pad portion 111 side and a second opening end 31Zb on the first columnar wiring 211 side. The flat inner surface of the via 31Z is a region connecting the first opening end 31Za and the second opening end 31Zb. In other words, the first opening end 31Za is at the end of the flat inner surface on the first pad portion 111 side, and the second opening end 31Zb is at the end of the flat inner surface on the first columnar wiring 211 side. The inner surface of the via 31Z extends in the direction along the central axis AX.

[0034] The first main surface 31X further has a connection portion 31Xb between the first opening end 31Za and the end of the first portion 31Xa on the first opening end 31Za side (the intersection of the first pad portion 111 and the interlayer insulating layer 31; hereinafter referred to as intersection P). The intersection P corresponds to an example of the "intersection of the first internal wiring and the interlayer insulating layer" set forth in the claims (claim 2). The connection portion 31Xb can also be said to be a portion of the first main surface 31X that does not contact the first pad portion 111. The connection portion 31Xb is located at the end of the first main surface 31X on the via 31Z side. More specifically, the wedge portion 212a is arranged between the connection portion 31Xb and the first pad portion 111.

[0035] A straight line including the first portion 31Xa is defined as a second reference line S2. In Fig. 3, the first reference line S1 and the second reference line S2 are indicated by dotted lines.

[0036] When the first via wiring 212 does not have the wedge portion 212a as in the conventional case, when an external force in the width direction is applied to the inductor component 1, the stress tends to concentrate at the boundary portion (typically on the second reference line S2) between the first via wiring 212 and the first pad portion 111. Because the first pad portion 111 and the first via wiring 212 are usually formed in separate processes, they are structurally prone to peeling at the boundary portion. If stress concentrates at this boundary portion, which is inherently prone to peeling, it easily breaks. By arranging the wedge portion 212a so that it is sandwiched between the interlayer insulating layer 31 and the first pad portion 111 in the direction parallel to the central axis AX, the area of ​​the boundary portion is increased, thereby mitigating the stress concentration. This makes it less likely for a break to occur, further improving the connection reliability of the inductor component 1.

[0037] The distance between the connection portion 31Xb and the first reference line S1 increases toward the central axis AX. This makes it easier for a plating solution to enter between the connection portion 31Xb and the first pad portion 111 when forming the first via wiring 212 by plating, thereby suppressing the generation of voids in the wedge portion 212a. Voids can cause breakage of the plating film, in this case, the first via wiring 212.

[0038] The distance in a direction perpendicular to the central axis AX from the intersection P of the first pad portion 111 and the interlayer insulating layer 31 to the first opening end 31Za (hereinafter referred to as the width W of the wedge portion 212a) may be 3 μm or more and 10 μm or less. When the width W of the wedge portion 212a is 3 μm or more, the anchor effect described above is easily obtained. When the width W of the wedge portion 212a is 10 μm or less, short circuits with other adjacent wirings are less likely to occur. Furthermore, when the wedge portion 212a is formed by plating, a seed layer 82 is easily formed in the gap 40 between the first pad portion 111 and the interlayer insulating layer 31 (see FIG. 4F), which makes it easier to prevent problems such as the generation of voids in the wedge portion 212a.

[0039] (Concave, convex) 3, the first pad portion 111 has a recess 111a recessed from the second reference line S2. The first via wiring 212 has a protrusion 212b that fits into the recess 111a. This increases the contact area between the first pad portion 111 and the first via wiring 212, further improving the shear strength.

[0040] Furthermore, the recess 111a causes the boundary between the first via wiring 212 and the first pad portion 111 to be shifted downward from the second reference line S2. In other words, the concentration point of stress due to an external force in the width direction and the boundary portion no longer coincide, making it less likely that a break will occur at the boundary portion.

[0041] In Fig. 2, cross sections of two via wirings are shown in a cross section including the central axis AX, but it is sufficient that at least one of the two via wirings satisfies the various configurations described above and shown in Fig. 3. In other cross sections including the central axis AX, the various configurations described above and shown in Fig. 3 may or may not be satisfied. It is sufficient that at least one of the multiple via wirings included in the inductor component 1 satisfies the various configurations described above and shown in Fig. 3.

[0042] (Manufacturing method) Next, a method for manufacturing inductor component 1 will be described with reference to Figures 4A to 4K. Figures 4A to 4K are diagrams corresponding to first pad portion 111 and first vertical wiring 21 of inductor wiring 100 in Figure 2.

[0043] As shown in Fig. 4A, an insulating base layer 33 that does not contain a magnetic material is formed on a substrate 70. The substrate 70 is made of, for example, sintered ferrite and has a flat plate shape.

[0044] The substrate 70 is flat and serves as a base for the manufacturing process of the inductor component 1. The substrate 70 is made of a sintered body such as a magnetic substrate made of NiZn-based or MnZn-based ferrite, or a non-magnetic substrate made of alumina or glass. The thickness of the substrate 70 is, for example, 5 μm or more and 100 μm or less.

[0045] The insulating base layer 33 is made of, for example, a polyimide resin that does not contain a magnetic material, an inorganic material, etc. The insulating base layer 33 is formed by coating the substrate 70 with a polyimide resin by printing, painting, etc., or by a dry process such as vapor deposition, sputtering, or CVD on the substrate 70.

[0046] As shown in FIG. 4B, a seed layer 81 and a resist film 310 are formed on the insulating base layer 33. Specifically, the material for the seed layer 81 is deposited on the upper surface of the insulating base layer 33 by sputtering. Then, the resist film 310 is formed on the seed layer 81. The seed layer 81 is made of a low electrical resistance metal material similar to the material for the inductor wiring 100. The resist film 310 is formed of a photosensitive photoresist.

[0047] As shown in FIG. 4C, a portion of the resist film 310 is removed. Specifically, photolithography is used. That is, exposure is performed using a photomask having openings corresponding to portions other than the first pad portion 111 and the spiral portion 120. As a result, the portions of the resist film 310 corresponding to the first pad portion 111 and the spiral portion 120 are not exposed and remain uncured. Subsequently, the uncured portions are removed by development. For example, an organic solvent such as PGMEA (propylene glycol monomethyl ether acetate pegmia) and an alkaline developer such as TMAH (tetramethylammonium hydroxide) are used for development.

[0048] 4D, the first pad portion 111 and the spiral portion 120 are formed on the seed layer 81. Specifically, plating is grown on the seed layer 81 by electrolytic plating. As a result, the first pad portion 111 and the spiral portion 120 are formed between the remaining portions of the resist film 310.

[0049] 4E, the resist film 310 and the seed layer 81 located on the lower surface thereof are removed by, for example, etching.

[0050] 4F, an interlayer insulating layer 31 having a via 31Z that covers the spiral portion 120 and exposes the top surface of the first pad portion 111, and a resin wall 32 that covers the side surface of the inductor wiring 100 are arranged. A part of the first pad portion 111 is exposed from the via 31Z. The method for forming the via 31Z is not particularly limited, and may be laser irradiation or photolithography.

[0051] 4G is an enlarged view showing the periphery of a via 31Z formed in the interlayer insulating layer 31. As shown in FIG. 4G, a gap 40 is formed in the first pad portion 111. Plating enters the gap 40, forming a wedge portion 212a. At this time, isotropic etching is performed to form a recess 111a in the portion of the first pad portion 111 exposed from the interlayer insulating layer 31, along with the gap 40.

[0052] The etching method is not particularly limited as long as it is capable of isotropic etching, and may be wet etching using acid or dry etching. The width W of the wedge portion 212a is controlled by the amount of etching of the first pad portion 111. The amount of etching can be adjusted by appropriately adjusting the time and temperature of the etching process. When wet etching is performed at 25°C using a treatment agent containing 5% H2O2 and 10% H3PO4, a wedge portion 212a with a width W of approximately 3 μm can be formed in a treatment time of 30 seconds, and a wedge portion 212a with a width W of approximately 10 μm can be formed in 240 seconds. The width W of the wedge portion 212a can be increased by increasing the acid concentration in the treatment agent or by increasing the treatment time.

[0053] Conventionally, the etching process performed after forming the interlayer insulating layer 31 is intended to remove residues, oxide films, etc., and is not intended to etch the first pad portion 111. Therefore, the gap 40 is not usually formed. In this embodiment, the gap 40 is intentionally formed, which enables the formation of the wedge portion 212a and improves the shear strength between the first pad portion 111 and the first via wiring 212.

[0054] 4H, a seed layer 82 is formed by sputtering on the inner surface of the via 31Z, the exposed portion of the upper surface of the first pad portion 111, and the upper surfaces of the interlayer insulating layer 31 and the resin wall 32. The seed layer 82 is also made of a low electrical resistance metal material similar to the material of the inductor wiring 100.

[0055] The thickness of the seed layer 82 is not particularly limited as long as it is capable of sharing charge and functioning as a seed layer for electrolytic plating, and may be, for example, 2 μm or less. To improve the adhesion between the interlayer insulating layer 31 and the seed layer 82, an adhesion layer may be formed between the interlayer insulating layer 31 and the seed layer 82. The material of the adhesion layer is not particularly limited as long as it does not affect the formation of the inductor wiring, and may be, for example, Ti.

[0056] As shown in FIG. 4I, a first via wiring 212 and a first columnar wiring 211 are formed in a portion corresponding to the exposed portion of the upper surface of the first pad portion 111. Specifically, a resist film 320 is formed on a seed layer 82, and an opening is provided in the resist film 320 at a position corresponding to the first via wiring 212. A plating layer is grown on the seed layer 82 by electrolytic plating to form a plating layer in the opening. As a result, the first via wiring 212 and the first columnar wiring 211 are formed in the opening. The first via wiring 212 and the first columnar wiring 211 may be formed by electroless plating, sputtering, vapor deposition, or coating.

[0057] 4J, the resist film 320 is peeled off to remove the exposed seed layer 82. Next, a coating film 60 is formed on the interlayer insulating layer 31, and a first external terminal 51 is formed on the upper surface of the first columnar wiring 211.

[0058] 4K, substrate 70 is removed, and insulating substrate 90 is placed on the lower surface of base insulating layer 33. Thereafter, inductor components 1 are manufactured by dividing into individual pieces using a dicer or the like.

[0059] [Second embodiment] (composition) Fig. 5 is a cross-sectional view showing a second embodiment of the inductor component. Fig. 5 is a cross-section corresponding to Fig. 3. The second embodiment differs from the first embodiment in the shape of the end of the interlayer insulating layer 31. This different configuration will be explained below. The other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment will be used, and explanations thereof will be omitted.

[0060] As shown in FIG. 5, in the inductor component 1A of the second embodiment, the connection portion 31Xb of the interlayer insulating layer 31 has a convex curved surface. In other words, the contact portion of the wedge portion 212a with the connection portion 31Xb has a concave curved surface. When an external force is applied to the inductor component 1A in the width direction, stress tends to concentrate particularly at the end of the boundary portion between the first via wiring 212 and the first pad portion 111. By making the end of the boundary portion a curved surface rather than a ridge, stress concentration is alleviated, making it easier to prevent disconnection. Only a portion of the connection portion 31Xb may have a convex curved surface.

[0061] (Manufacturing method) The inductor component 1A can be manufactured using the same manufacturing method as that shown in FIGS. 4A to 4K for the first embodiment. However, in the steps shown in FIGS. 4F and 4G, the via 31Z is formed by lithography using a photomask, and the irradiation intensity on the area surrounding the via 31Z is weakened during exposure. This reduces the degree of curing in the thickness direction of the photosensitive insulating film in the area surrounding the via 31Z. Subsequent development results in the formation of the via 31Z in the interlayer insulating layer 31, and also removes a portion of the lower surface of the end of the interlayer insulating layer 31 facing the via 31Z, resulting in the connection portion 31Xb of the interlayer insulating layer 31 becoming a convex curve.

[0062] [Third embodiment] (composition) Fig. 6 is a cross-sectional view showing a third embodiment of the inductor component. Fig. 6 is a cross-section corresponding to Fig. 2. The third embodiment differs from the first embodiment in the configuration of the inductor wiring. This different configuration will be explained below. The other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment will be used, and their explanation will be omitted.

[0063] 6, in an inductor component 1B of the third embodiment, two inductor wiring layers 100A and 100B are stacked in the Z direction. The first inductor wiring layer 100A is disposed above the second inductor wiring layer 100B. The first and second inductor wiring layers 100A and 100B are connected in series.

[0064] In the inductor component 1B, the first inductor wiring 100A and the second inductor wiring 100B are connected in series, so the inductance can be improved by increasing the number of turns. Also, because the first and second inductor wirings 100A and 100B are laminated in the normal direction, the area of ​​the inductor component 1B as viewed from the Z direction, i.e., the mounting area, can be reduced relative to the number of turns, thereby realizing a miniaturized inductor component 1B.

[0065] The first and second inductor wirings 100A and 100B are provided on the upper surface of the insulating substrate 90 and extend in a direction parallel to the upper surface of the insulating substrate 90. The first and second inductor wirings 100A and 100B are each spirally wound around the axis of each inductor wiring on the upper surface of the insulating substrate 90. The first and second inductor wirings 100A and 100B have a spiral shape with more than one turn. The first and second inductor wirings 100A and 100B have the same configuration as the inductor wiring 100 in the first embodiment. The first and second inductor wirings 100A and 100B may be curved with less than one turn, or may have a straight line in part.

[0066] The first pad 111, which is the outer peripheral end of the first inductor wiring 100A, is connected to the first external terminal 51 via the first vertical wiring 21. The second pad 112, which is the inner peripheral end of the first inductor wiring 100A, and the second pad 112, which is the inner peripheral end of the second inductor wiring 100B, are connected via the first interlayer via wiring 251. The first pad 111, which is the outer peripheral end of the second inductor wiring 100B, is connected to the second external terminal 52 via the second interlayer via wiring 252, the lead-out wiring 241, and the second vertical wiring 22. With the above configuration, the first inductor wiring 100A and the second inductor wiring 100B are connected in series and electrically connected to the first external terminal 51 and the second external terminal 52.

[0067] The lead-out wiring 241 is provided in the same layer as the first inductor wiring 100A. The lead-out wiring 241 is not directly connected to the first inductor wiring 100A. The lead-out wiring 241 is a wiring that leads out the first pad portion 111 to the second vertical wiring 22. By making the width of the lead-out wiring 241 larger than the width of the second vertical wiring 22 (the second columnar wiring 221 and the second via wiring 222) in the XZ cross section, the strength of the element body 10 can be ensured.

[0068] One of the first inductor wiring 100A and the first columnar wiring 211 corresponds to an example of a "first internal wiring" set forth in the claims. The other of the first inductor wiring 100A and the first columnar wiring 211 corresponds to an example of a "second internal wiring" set forth in the claims. In this case, the first via wiring 212 corresponds to an example of a "via wiring" set forth in the claims.

[0069] One of the lead wiring 241 and the second columnar wiring 221 corresponds to an example of a "first internal wiring" as set forth in the claims. The other of the lead wiring 241 and the second columnar wiring 221 corresponds to an example of a "second internal wiring" as set forth in the claims. In this case, the second via wiring 222 corresponds to an example of a "via wiring" as set forth in the claims.

[0070] One of the first inductor wiring 100A and the second inductor wiring 100B corresponds to an example of a "first internal wiring" as set forth in the claims. The other of the first inductor wiring 100A and the second inductor wiring 100B corresponds to an example of a "second internal wiring" as set forth in the claims. In this case, the first interlayer via wiring 251 corresponds to an example of a "via wiring" as set forth in the claims.

[0071] In Fig. 6, cross sections of four via wirings are shown in a cross section including the central axis AX, and at least one of the four via wirings satisfies the various configurations described above and shown in Fig. 3. Other cross sections of the inductor component 1B including the central axis AX may or may not satisfy the various configurations described above and shown in Fig. 3. It is sufficient that at least one of the multiple via wirings included in the inductor component 1B satisfies the various configurations described above and shown in Fig. 3.

[0072] [Fourth embodiment] (composition) Fig. 7 is a schematic cross-sectional view showing a fourth embodiment of the inductor component. Fig. 7 is a cross-section corresponding to Fig. 2. The fourth embodiment differs from the first embodiment in the configuration of the element body. This different configuration will be explained below. The other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment will be used and their explanation will be omitted.

[0073] 7, the element body 10 has a first magnetic layer 11 and a second magnetic layer 12 disposed on the first magnetic layer 11. The first magnetic layer 11 and the second magnetic layer 12 are stacked along the direction of the central axis AX so as to sandwich the inductor wiring 100 and the insulating layer 30. The element body 10 has a two-layer structure of the first magnetic layer 11 and the second magnetic layer 12, but may also have a three-layer structure of the first magnetic layer 11, a substrate, and the second magnetic layer 12.

[0074] The first magnetic layer 11 and the second magnetic layer 12 contain resin and metal magnetic powder as a magnetic body contained in the resin. Therefore, compared to a magnetic layer made of ferrite, the metal magnetic powder can improve DC bias characteristics, and the resin provides insulation between the metal magnetic powder particles, reducing loss (iron loss) at high frequencies.

[0075] The resin includes, for example, any of epoxy, polyimide, phenol, and vinyl ether resins. This improves insulation reliability. More specifically, the resin is epoxy, a mixture of epoxy and acrylic, or a mixture of epoxy, acrylic, and other materials. This ensures insulation between the metal magnetic powder particles and reduces loss (iron loss) at high frequencies.

[0076] The average particle size of the metal magnetic powder is, for example, 0.1 μm or more and 5 μm or less. During the manufacturing process of the inductor component 1, the average particle size of the metal magnetic powder can be calculated as the particle size corresponding to 50% of the integrated value in the particle size distribution determined by a laser diffraction / scattering method. The metal magnetic powder may be, for example, an FeSi-based alloy such as FeSiCr, an FeCo-based alloy, an Fe-based alloy such as NiFe, or an amorphous alloy thereof. The content of the metal magnetic powder is preferably 20 vol% or more and 70 vol% or less of the entire magnetic layer. When the average particle size of the metal magnetic powder is 5 μm or less, the DC bias characteristics are further improved, and the fine powder can reduce iron loss at high frequencies. When the average particle size of the metal magnetic powder is 0.1 μm or more, uniform dispersion in the resin is facilitated, improving the manufacturing efficiency of the first magnetic layer 11 and the second magnetic layer 12. Instead of or in addition to the metal magnetic powder, a ferrite magnetic powder such as a NiZn-based or MnZn-based powder may be used. [Example]

[0077] [Example 1] Thirty inductor components 1A having the configuration of the second embodiment were fabricated according to the manufacturing method shown in FIGS. 4A to 4K. In the steps shown in FIGS. 4F and 4G, vias 31Z were formed by lithography. The width of the vias 31Z on the second main surface 31Y side was 100 μm, and the distance in the direction of the central axis AX of the vias 31Z (height, or thickness of the interlayer insulating layer 31) was 15 μm. In the step shown in FIG. 4F, wet etching was performed at 25°C using a treatment agent containing 5% H2O2 and 10% H3PO4. The etching time was adjusted to set the width W of the wedge portion 212a to 2.0 μm.

[0078] [Example 2] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 2.5 μm.

[0079] [Example 3] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 3.0 μm.

[0080] [Example 4] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 4.0 μm.

[0081] [Example 5] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 9.0 μm.

[0082] [Example 6] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 10.0 μm.

[0083] [Example 7] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 10.5 μm.

[0084] [Example 8] Thirty inductor components 1A were fabricated in the same manner as in Example 1, except that the etching time was adjusted so that the width W of the wedge portion 212a was 11.0 μm.

[0085] [evaluation] The resulting inductor components 1A were evaluated for connection reliability in accordance with JIS C60062-2-58. Inductor components 1A with a resistance change rate of 20% or less were classified as passing, while inductor components 1A with a resistance change rate of more than 20% and cracks in the via wiring were classified as failing. In order to exclude inductor components 1A with a resistance change rate of more than 20% due to causes other than cracks, inductor components 1A with a resistance change rate of more than 20% and no cracks in the via wiring were excluded from the pass / fail judgment. The pass / fail judgment was continued until the total number of passing and failing products reached 30. Table 1 shows the number of passing products out of the total number of products judged (30).

[0086] [Table 1]

[0087] It can be seen that all of the inductor components 1A provided with the wedge portion 212a had excellent connection reliability. Examples 3 to 6, in which the width W of the wedge portion 212a was 3 μm or more and 10 μm or less, had particularly excellent connection reliability.

[0088] The present disclosure is not limited to the above-described embodiments, and design modifications are possible within the scope of the present disclosure.

[0089] In the above embodiment, in the first cross section, the first via wiring 212 is symmetrical with respect to the central axis AX, but the first via wiring 212 may be asymmetrical with respect to the central axis AX. The first via wiring 212 has wedge portions 212a on both sides of the central axis AX, but the wedge portions 212a may be on only one side.

[0090] In the above embodiment, the first via wiring 212 is rectangular in the perspective plan view of the inductor component, but is not limited thereto. The first via wiring 212 may be circular, elliptical, or polygonal in the plan view.

[0091] In the above embodiment, the second via wiring 222 is circular in the perspective plan view of the inductor component, but is not limited to this. The second via wiring 222 may be rectangular, elliptical, or polygonal in the plan view.

[0092] In the above embodiment, the wedge portion 212a is formed by etching the first pad portion 111, but it may also be formed by etching the first pad portion 111 side of the end of the interlayer insulating layer 31 on the via 31Z side.

[0093] In the above embodiment, the first via wiring 212 has the convex portion 212b, but the first via wiring 212 does not necessarily have to have the convex portion 212b.

[0094] In the above embodiment, the first pad portion 111 has the recess 111a, but the first pad portion 111 does not necessarily have to have the recess 111a.

[0095] In the above embodiment, the inner surface of the via 31Z extends in the direction along the central axis AX, but may be inclined so that the width of the via 31Z increases or decreases from the first pad 111 toward the first columnar wiring 211. The flat inner surface of the via 31Z may also be inclined with respect to the central axis AX as described above, as long as it is shown as a straight line in the first cross section.

[0096] In the above embodiment, the interlayer insulating layer 31 and the resin wall 32 are integrally formed, but this is not limiting. The interlayer insulating layer 31 and the resin wall 32 may be separate bodies and may be formed in different processes.

[0097] In the third embodiment, two layers of inductor wiring 100A and 100B are stacked in the direction of the central axis AX, but three or more layers of inductor wiring may be stacked in the direction of the central axis AX. Also, multiple inductor wirings may be arranged in a direction perpendicular to the direction of the central axis AX.

[0098] The present disclosure includes the following aspects. <1> a first internal wiring; A second internal wiring; an interlayer insulating layer disposed between the first internal wiring and the second internal wiring, the interlayer insulating layer having a first main surface on the first internal wiring side, a second main surface on the second internal wiring side, and a via penetrating between the first main surface and the second main surface; a via wiring that is inserted into the via and electrically connects the first internal wiring and the second internal wiring, In a first cross section including a central axis of the via wiring, The via wiring has a wedge portion sandwiched between the interlayer insulating layer and the first internal wiring in a direction parallel to the central axis. <2> In the first cross section, The via has a flat inner surface. the inner surface includes a first opening end on the first internal wiring side and a second opening end on the second internal wiring side, a first reference line that includes the first opening end and is parallel to the central axis; the wedge portion is located on the opposite side of the central axis with respect to the first reference line, a distance from an intersection of the first internal wiring and the interlayer insulating layer to the first opening end in a direction perpendicular to the central axis of the wiring to be formed is 3 μm or more and 10 μm or less; <1> The inductor component according to claim 1. <3> In the first cross section, the first main surface includes a first portion in contact with the first internal wiring; A straight line including the first portion is defined as a second reference line, the first internal wiring has a recess recessed from the second reference line, The via wiring has a protrusion that enters the recess. <1> or <2> The inductor component according to claim 1. <4> In the first cross section, The via has a flat inner surface. the inner surface includes a first opening end on the first internal wiring side and a second opening end on the second internal wiring side, the first main surface includes a first portion in contact with the first internal wiring; the interlayer insulating layer has a connection portion between the first opening end of the inner surface and an end portion of the first portion on the first opening end side, The connection portion includes a convex curved surface. <1> from <3> 10. An inductor component according to claim 9, wherein: <5> Furthermore, it has a base body, the first internal wiring and the second internal wiring are provided within the element body, At least one of the first internal wiring and the second internal wiring is an inductor wiring. <1> from <4> 10. An inductor component according to claim 9, wherein: <6> The first internal wiring and the second internal wiring are both inductor wirings. <5> The inductor component according to claim 1. <7> The element body includes a magnetic layer. <5> or <6> The inductor component according to claim 1. <8> the element body includes a non-magnetic insulating layer; <5> or <6> The inductor component according to claim 1. [Explanation of symbols]

[0099] 1,1A,1B,1C inductor components 10 Base 11 First magnetic layer 12 Second magnetic layer 21 1st vertical wiring 211 1st pillar wiring 212 First via wiring 212a Wedge 212b Convex part 22 2nd vertical wiring 221 2nd pillar wiring 222 Second via wiring 241 Output wiring 251 First layer via wiring 252 Second layer via wiring 253 Third layer via wiring 30 insulating layer 31 Interlayer insulating layer 31X 1st main surface 31Xa Part 1 31Xb connection part 31Y 2nd main surface 31Ya 2nd part 31Z Beer 31Za 1st opening end 31Zb 2nd open end 32 Resin Wall 33 Undercoat insulation layer 40 Gap 51 First external terminal 52 Second external terminal 60 Coating membrane 70 boards 81,82 Seed layer 90 Insulating substrate 100 Inductor wiring 111 First pad section 111a recess 112 Second pad section 120 Spiral Section 100A 1st inductor wiring 100B Second inductor wiring 310,320 Resist film AX center axis P intersection S1 1st reference line S2 2nd reference line

Claims

1. A first internal wiring that is an inductor wiring; a second internal wiring that is a pillar-shaped wiring; an interlayer insulating layer disposed between the first internal wiring and the second internal wiring, the interlayer insulating layer having a first main surface on the first internal wiring side, a second main surface on the second internal wiring side, and a via penetrating between the first main surface and the second main surface, the first main surface including a first portion in contact with the first internal wiring and a portion not in contact with the first internal wiring; a via wiring inserted into the via and electrically connecting the first internal wiring and the second internal wiring, In a first cross section including a central axis of the via wiring, the via wiring has a wedge portion sandwiched between the first internal wiring and a portion of the first main surface of the interlayer insulating layer that does not contact the first internal wiring in a direction parallel to the central axis, A straight line including the first portion is defined as a second reference line, the first internal wiring has a recess recessed from the second reference line, The via wiring has a protrusion that enters the recess and includes the wedge portion.

2. In the first cross section, The via has a flat inner surface. the inner surface includes a first opening end on the first internal wiring side and a second opening end on the second internal wiring side, a straight line including the first opening end and parallel to the central axis is defined as a first reference line; the wedge portion is located on the opposite side of the central axis with respect to the first reference line, 2. The inductor component according to claim 1, wherein the distance from the intersection of the first internal wiring and the interlayer insulating layer to the first opening end in a direction perpendicular to the central axis is 3 μm or more and 10 μm or less.

3. In the first cross section, The via has a flat inner surface. the inner surface includes a first opening end on the first internal wiring side and a second opening end on the second internal wiring side, the first main surface includes a first portion in contact with the first internal wiring; the interlayer insulating layer has a connection portion between the first opening end of the inner surface and an end portion of the first portion on the first opening end side, The inductor component according to claim 1 , wherein the connection portion includes a convex curved surface.

4. Furthermore, it has a base body, the first internal wiring and the second internal wiring are provided within the element body, 3. The inductor component according to claim 1, wherein at least one of the first internal wiring and the second internal wiring is an inductor wiring.

5. The inductor component according to claim 4 , wherein the first internal wiring and the second internal wiring are both inductor wirings.

6. The inductor component according to claim 4 , wherein the element body includes a magnetic layer.

7. The inductor component according to claim 4 , wherein the element body includes a non-magnetic insulating layer.

Images