Processing device and processing device management method

Abstract

To easily, inexpensively, and safely perform data backup of information stored in a storage unit of a processing device.SOLUTION: A processing device for processing a workpiece, comprises a control unit and a communication device capable of communicating with an external processing device via a communication line, wherein the control unit comprises: a storage unit that can store various sorts of information; a backup data transmission control unit that creates self-backup data including the information stored in the storage unit and controls the communication device to transmit the self-backup data to the external processing device; and a backup data reception control unit that controls the communication device to receive the other device backup data transmitted by the external processing device and stores the received other device backup data in the storage unit.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a processing apparatus that processes a workpiece such as a semiconductor wafer, and a processing apparatus management method that controls the processing apparatus so as to store data related to the processing apparatus. [Background technology]

[0002] In manufacturing factories for device chips that are incorporated into electronic devices, plate-shaped workpieces, such as semiconductor wafers and resin package substrates, are processed using a variety of processing equipment. Multiple processing equipment is installed in factories, and workpieces are processed sequentially by each processing equipment. Furthermore, when multiple processing equipment of the same type is installed in a factory, multiple workpieces can be processed simultaneously in parallel.

[0003] Examples of processing devices include a cutting device that cuts a workpiece with an annular cutting blade (see, for example, Patent Document 1), a laser processing device that processes a workpiece with a laser beam, a polishing device that polishes a workpiece with a polishing pad, a grinding device that grinds a workpiece with a grinding wheel, etc. Furthermore, in factories and the like, processing devices such as a cleaning device that cleans a workpiece, an ultraviolet irradiation device that irradiates a workpiece with ultraviolet rays, etc. may also be used.

[0004] Each processing device includes a holding table for holding a workpiece, a processing unit for processing the workpiece held on the holding table, and a processing feed unit for relatively feeding the holding table and the processing unit. Each processing device also includes an input unit used for inputting commands, etc., and a display unit for displaying various information.

[0005] Furthermore, each processing device incorporates a control unit configured with a computer (microcomputer, personal computer) or the like, which controls each component of the processing device. The control unit has a storage unit configured with a HDD, SSD, flash memory, or the like that can store various types of information.

[0006] The memory unit stores various information such as the OS that runs the control unit, programs that cause each component to perform a specific operation, and processing conditions that are used depending on the type of workpiece and the purpose of processing. Furthermore, when a workpiece is processed by the processing device, various information such as operation records of each component and evaluation results of the processing results is created and stored in the memory unit.

[0007] In machining equipment, on very rare occasions, the control unit may malfunction and lose its function. As a result, various pieces of information stored in the memory unit may become unreadable and be lost. Therefore, data backups (hereinafter simply referred to as backups) of the information stored in the memory unit are periodically performed.

[0008] For example, a storage medium such as a USB memory or DVD-R is connected to the processing device, the information stored in the storage unit is written to this storage medium, and the storage medium is then removed from the processing device and stored. Alternatively, if a server machine or the like that can remotely control multiple processing devices installed in a factory or the like is installed and connected to each processing device, the server machine will perform the backup. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-53432 Summary of the Invention [Problem to be solved by the invention]

[0010] However, performing regular backups of each processing device is time-consuming. Furthermore, managing the storage media that stores the backup data is not easy, and a management system that takes into consideration the prevention of information leaks is required. Furthermore, some factories do not have a server machine that can remotely manage each processing device, making it impossible to perform backups using a server machine.

[0011] The present invention has been made in consideration of such problems, and its purpose is to provide a processing device and a method for managing a processing device that can easily, cheaply, and safely back up data of information stored in the memory unit of the processing device. [Means for solving the problem]

[0016] The present invention One According to one aspect, there is provided a processing device for processing a workpiece, comprising: a holding table for holding the workpiece; a processing unit for processing the workpiece held on the holding table; a processing feed unit for processing and feeding the holding table and the processing unit relative to one another; a control unit; and a communication device capable of communicating with a plurality of external processing devices via a communication line, wherein the control unit comprises: a memory unit capable of storing various information; a processing control unit for controlling the holding table, the processing unit, and the processing feed unit to process the workpiece; a backup data transmission control unit for creating self-backup data including the information stored in the memory unit, dividing the self-backup data to create divided self-backup data, and controlling the communication device to transmit the different divided self-backup data to each of the plurality of external processing devices; and a backup data reception control unit for controlling the communication device to receive divided other-device backup data transmitted by each of the plurality of external processing devices, and storing the divided other-device backup data in the memory unit.

[0017] Preferably, the control unit further includes a restoration unit that controls the communication device to receive the divided self-backup data from each of the plurality of external processing devices, creates the self-backup data based on all the divided self-backup data, restores the information based on the self-backup data, and stores the information in the storage unit.

[0018] According to another aspect of the present invention, there is provided a method for managing a plurality of processing devices, each of which has a control unit including a storage unit capable of storing information, and which is connected to one another via a communication line, the method comprising: a creating step of creating backup data including the information stored in the storage unit in the control unit of the plurality of processing devices; a transmitting step of causing the control unit of each of the plurality of processing devices to transmit the backup data to another processing device via the communication line; and a storing step of storing the backup data in the storage unit of the control unit of the processing device that has received the backup data via the communication line. In the storing step, the memory units of the control units of the processing devices store different backup data. The present invention provides a method for managing a processing device.

[0020] According to yet another aspect of the present invention, there is provided a method for managing a plurality of processing devices, each of which has a control unit including a memory unit capable of storing information and which is connected to one another via a communication line, the method comprising: a creation step in which the control units of the plurality of processing devices create backup data including the information stored in the memory unit; a division step in which the control units of the plurality of processing devices divide the backup data to create a plurality of divided backup data; a transmission step in which the control units transmit the different divided backup data to the other plurality of processing devices via the communication line; and a storage step in which the divided backup data is stored in the memory unit of the control unit of the processing device that received the divided backup data via the communication line. [Effects of the Invention]

[0021] In a processing device and a management method for a processing device according to one aspect of the present invention, the processing device is connected to an external processing device via a communication line, and information stored in a memory unit of the processing device is backed up in the memory unit of the external processing device. Therefore, there is no need to prepare a storage medium for the backup, and there is no need to transport the storage medium to the processing device or manage the storage medium on which the backup data is written. Since the backup data is not taken outside the area where the processing device is located, the risk of information leakage is also limited.

[0022] Therefore, according to one aspect of the present invention, a processing device and a method for managing a processing device are provided that can easily, cheaply, and safely back up data of information stored in a memory unit of the processing device. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 2 is a perspective view schematically showing a processing device. [Figure 2] FIG. 2 is a perspective view schematically showing a plurality of processing devices. [Figure 3] FIG. 2 is a block diagram schematically showing the configuration of a plurality of processing devices. [Figure 4] FIG. 4(A) is a block diagram showing a typical example of a backup data storage mode, and FIG. 4(B) is a block diagram showing a typical example of another backup data storage mode. [Figure 5] FIG. 5(A) is a block diagram showing a typical example of a backup data storage mode, and FIG. 5(B) is a block diagram showing a typical example of another backup data storage mode. [Figure 6] Figure 6(A) is a flowchart explaining the flow of each step of a method for managing processing equipment according to one example, Figure 6(B) is a flowchart explaining the flow of each step of a method for managing processing equipment according to another example, and Figure 6(C) is a flowchart explaining the flow of each step of a method for managing processing equipment according to yet another example. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In a processing device and a processing device management method according to this embodiment, backup data of information stored in a memory unit of a control unit of the processing device is stored in a memory unit of a control unit of an external processing device (another processing device). First, the processing device will be described. Figure 1 is a perspective view showing a processing device 2 in a schematic manner.

[0025] The processing device 2 processes a substrate such as a semiconductor wafer as a workpiece using a processing unit. A plate-shaped workpiece 1 is shown in FIG. 1. The workpiece is, for example, a wafer made of a material such as Si (silicon), SiC (silicon carbide), GaN (gallium nitride), GaAs (gallium arsenide), or other semiconductors. Alternatively, the workpiece is, for example, a substantially disk-shaped substrate made of a material such as sapphire, glass, or quartz.

[0026] A plurality of mutually intersecting division lines are set on the surface of the workpiece. Devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in each area defined by the division lines. The workpiece is ground from the backside to thin it, the ground surface is polished to flatten it, and the workpiece is divided along the division lines to form individual device chips. However, the workpiece is not limited to this.

[0027] The processing device 2 according to this embodiment is, for example, a cutting device that cuts and divides a workpiece along a planned dividing line with a cutting blade. Alternatively, it is a laser processing device that divides a workpiece along a planned dividing line by laser processing. The processing device 2 may also be a grinding device that grinds a workpiece, or a polishing device that polishes a workpiece. Furthermore, the processing device 2 is not limited to these, and may be other processing devices, and may process workpieces other than semiconductor wafers. Below, an example will be described in which the processing device 2 is a cutting device.

[0028] The processing device 2 includes a base 4 that supports each component, and a housing 6 that covers each component supported on the base 4. A cassette support table 8 is provided in one corner of the base 4 that is not covered by the housing 6. A cassette that accommodates multiple workpieces is mounted on the top surface of the cassette support table 8.

[0029] A touch panel display 10 is provided on the outer surface of the processing device 2. The touch panel display 10 displays various information and operation screens. An operator can input various commands to the processing device 2 by touching a predetermined position on the touch panel display 10 that displays the display screen. In other words, the touch panel display 10 functions as an input unit (input interface) used to input various commands, and also functions as a display unit that displays various information.

[0030] The inside of the housing 6 of the processing device 2 is a processing chamber 12. The processing device 2 processes (cuts) a workpiece in the processing chamber 12. The processing chamber 12 houses a chuck table (holding table) 14 that can hold the workpiece by suction. The chuck table 14 moves in the processing feed direction (X-axis direction) by a processing feed unit (X-axis movement mechanism) not shown. The chuck table 14 is also connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis that is approximately parallel to the Z-axis direction (vertical direction).

[0031] The processing feed unit may move a processing unit 16, which will be described later, instead of or together with the chuck table 14. That is, the processing feed unit moves the chuck table 14 and the processing unit 16 relative to each other.

[0032] The upper surface 14a of the chuck table 14 serves as a holding surface for suction-holding the workpiece. The upper surface 14a of the chuck table 14 is formed substantially parallel to the X-axis direction and the Y-axis direction, and is connected to a suction source (not shown) such as an ejector via a suction passage (not shown) provided inside the chuck table 14.

[0033] The machining chamber 12 accommodates a machining unit (cutting unit) 16 that processes (cuts) a workpiece held by the chuck table 14. The machining unit 16 is supported by a lifting unit (Z-axis movement mechanism) and an indexing feed unit (Y-axis movement mechanism), not shown, and is movable in the vertical direction (Z-axis direction) and the indexing feed direction (Y-axis direction).

[0034] The processing unit 16 has a spindle 18 that is parallel to the upper surface 14a of the chuck table 14 and is arranged above the chuck table 14. The spindle 18 is disposed along the Y-axis direction. The processing unit 16 further has a rotational drive source (not shown) that is composed of a motor or the like connected to the base end of the spindle 18, and a processing tool (cutting blade) 20 that is attached to the tip of the spindle 18.

[0035] When cutting a workpiece with the processing device 2, the workpiece is first carried out from the cassette placed on the cassette support table 8, placed on the upper surface 14a of the chuck table 14, and sucked and held by the chuck table 14. Then, the chuck table 14 is rotated to align the direction of the planned dividing line of the workpiece with the processing feed direction (X-axis direction). Furthermore, the height of the processing unit 16 is adjusted, and the processing tool (cutting blade) 20 is rotated at high speed.

[0036] Thereafter, the chuck table 14 is moved in the processing feed direction, and the processing tool 20 is caused to cut into the workpiece along the planned dividing line, thereby cutting the workpiece. Next, the processing unit 16 is moved in the indexing feed direction (Y-axis direction), and the workpiece is successively cut along the other planned dividing lines.

[0037] After the workpiece has been cut along all the planned dividing lines in one direction of the workpiece, the chuck table 14 is rotated and the planned dividing lines in the other direction are cut in the same manner. When the workpiece has been cut along all the planned dividing lines set on the workpiece, the cutting process in the processing device 2 is completed.

[0038] The processing device 2 includes a control unit 22 that controls each component to process the workpiece. The control unit 22 is connected to each component. The control unit 22 is configured by a computer including, for example, a processing device such as a central processing unit (CPU), a main storage device such as a dynamic random access memory (DRAM), and an auxiliary storage device such as a flash memory. The functions of the control unit 22 are realized by operating the processing device and the like in accordance with software stored in the auxiliary storage device.

[0039] The control unit 22 has a memory section 24 that can store various types of information. The memory section 24 stores various types of information, such as an OS that operates the control unit 22, programs that cause each component to perform a predetermined operation, and processing conditions that are used depending on the type of workpiece and the purpose of processing.

[0040] For example, the machining conditions include the type of the machining tool (cutting blade) 20, the rotation speed of the machining tool, the relative machining feed rate and index feed amount of the chuck table 14 and the machining unit 16, the cutting depth of the machining tool into the workpiece, etc. The machining conditions may also include the amount of machining fluid supplied to the machining tool 20, etc. for purposes such as cooling and cleaning, the negative pressure of the chuck table 14 that suction-holds the workpiece, the load current value of the motor that rotates the spindle 18, etc.

[0041] The control unit 22 further includes a processing control unit 26 that controls the chuck table (holding table) 14, the processing unit 16, and the processing feed unit to process the workpiece. The processing control unit 26 reads processing conditions suitable for the type of workpiece and the desired processing results from the storage unit 24, and controls each component in a predetermined procedure in accordance with the processing conditions to perform processing in the processing device 2.

[0042] Furthermore, when the processing device 2 processes a workpiece, various information such as operation records of each component and evaluation results of the processing results are created, and these are stored and saved in the memory unit 24. For example, the processing device 2 is equipped with an imaging unit (not shown) that images the surface of the workpiece held on the chuck table 14, and the imaging unit images the surface of the workpiece after processing, and the quality of the processing results is judged from the captured image. In this case, the judgment results and the captured image are accumulated in the memory unit 24.

[0043] Furthermore, in the processing device 2, the load current value of the motor that rotates the spindle 18 may be monitored, and the transition of the load current value may be stored in the memory unit 24. In this case, if a problem is detected later in the workpiece, the transition of the load current value stored in the memory unit 24 can be read out to verify the cause of the problem. In this way, various information is stored in the memory unit 24.

[0044] However, in the processing device 2, on very rare occasions, the control unit 22 may malfunction and lose its function. This may cause various pieces of information stored in the storage unit 24 to become unreadable, resulting in significant damage. Therefore, it is desirable to back up the information stored in the storage unit 24. After the control unit 22 is restored, the information can be restored from the backup data and stored again in the storage unit 24, thereby restoring the processing device 2.

[0045] As a method of backup, for example, a storage medium such as a USB memory or DVD-R is connected to the processing device 2, the information stored in the storage unit 24 is written to this storage medium as backup data, and this storage medium is stored. Alternatively, if a server machine or the like capable of remotely controlling multiple processing devices 2 belonging to a factory or the like is installed in the factory and the server machine is connected to each processing device 2, the server machine performs backup and the backup data is written to the storage unit of the server machine.

[0046] However, it is time-consuming to periodically back up each processing device 2 installed in a device chip manufacturing factory, etc. In addition, managing the storage media that stores the backup data is not easy, and a management system that takes into consideration the prevention of information leaks is required. Furthermore, factories, etc. may not have a server machine that can remotely manage each processing device 2, so it may not be possible to perform backups using a server machine.

[0047] Therefore, in the processing device 2 and its management method according to this embodiment, the storage unit of an external processing device (another processing device) is used for backup in order to easily, cheaply, and safely back up data of information stored in the storage unit 24 of the processing device 2. The following will mainly explain the configuration of the processing device 2 and its management method according to this embodiment, which are related to data backup.

[0048] The processing device 2 is equipped with a communication device 34 that can communicate with other processing devices (external processing devices) via a communication line. Here, the other processing devices (external processing devices) refer to processing devices other than the processing device 2 when focusing on a certain processing device 2, and refer to other processing devices located inside or outside the factory where the processing device 2 is installed. There are no limitations on the configuration or installation location of the other processing devices (external processing devices) used for backup.

[0049] The communication device 34 is a transceiver that transmits and receives data to and from an external processing device via a wired communication line or a wireless communication line conforming to a predetermined standard. The communication device 34 communicates with the communication device of the external processing device via, for example, a wireless LAN line. However, the form of the communication device 34 is not limited to this.

[0050] The communicator 34 is connected to the control unit 22 and has a function of transmitting information sent from the control unit 22 to an external processing device via a communication line, and a function of sending information received from an external processing device via the communication line to the control unit 22. The control unit 22 also has a function of controlling the communicator 34 to send and receive information.

[0051] The control unit 22 is provided with a backup data transmission control unit 28 that creates self-backup data including the information stored in the storage unit 24 and controls the communication device 34 to transmit this self-backup data to another processing device (external processing device). The control unit 22 is also provided with a backup data reception control unit 30 that controls the communication device 34 to receive other-device backup data transmitted by the other processing device (external processing device) and stores the received other-device backup data in the storage unit 24.

[0052] Here, the self-backup data is data created to back up information stored in the memory unit 24 of the control unit 22 of the processing device 2. The other-device backup data is data created to back up information stored in the memory unit of the control unit of an external processing device.

[0053] The self-backup data in the processing device 2 becomes other-device backup data in an external processing device that includes a memory unit that stores the data. Conversely, the other-device backup data in the processing device 2 becomes self-backup data in the external processing device that transmits the data. In other words, the terms self-backup data and other-device backup data can be interpreted appropriately depending on the situation.

[0054] Fig. 2 is a perspective view showing a state in which a processing device 2a equipped with a communication device 34a is connected to communication devices 34b, 34c, and 34d of other processing devices (external processing devices) 2b, 2c, and 2d installed in a factory or the like via a communication line 36. Fig. 3 is a block diagram showing a simplified configuration of each of the processing devices 2a, 2b, 2c, and 2d. The communication device 34a is connected to the communication devices 34b, 34c, and 34d to send and receive information.

[0055] Here, the procedure for backing up the information stored in the memory unit 24a of the control unit 22a of the processing device 2a will be described. The following procedure can be appropriately interpreted as the procedure for backing up the information stored in the memory units 24b, 24c, and 24d of the other processing devices 2b, 2c, and 2d.

[0056] First, the backup data transmission control unit 28 (not shown in FIG. 3) of the control unit 22a reads out from the storage unit 24a information to be backed up among the information stored in the storage unit 24a, and creates its own backup data.

[0057] Note that the information considered as self-backup data does not necessarily have to be all of the information stored in the storage unit 24a. For example, information specific to the processing device 2a is of high need for protection, while general-purpose information also held by other processing devices is of low need for protection. Furthermore, for example, log information on processing performed by the processing device 2a, images showing the processed workpiece, evaluations of the processing results, etc. are of relatively high need for protection, while general processing conditions for the processing control unit 26 to control the components, the OS software of the control unit 22, etc. are of relatively low need for protection.

[0058] Furthermore, the information included in the self-backup data may be selected based on the capacity (data size) of the information. For example, among the unique information possessed by the processing device 2a, the capacity of images showing the processed workpiece is relatively large, and when the self-backup data including the captured images is stored in the storage unit of the external processing device, it puts a strain on the storage area of ​​the storage unit. Therefore, the captured images may be excluded from the information included in the self-backup data.

[0059] The backup data transmission control unit 28 transmits the self backup data to the other processing devices (external processing devices) 2b, 2c, and 2d using the communication device 34a via the communication line 36. The backup data reception control units 30 of the other processing devices 2a, 2b, and 2d then cause the communication devices 34b, 34c, and 34d to receive the transmitted self backup data as other device backup data. The backup data reception control unit 30 then stores the other device backup data in the storage units 24b, 24c, and 24d.

[0060] This completes the backup of the processing device 2a by the other processing devices (external processing devices) 2b, 2c, and 2d. Conversely, the processing device 2a can back up the other processing devices 2b, 2c, and 2d by receiving backup data from the other processing devices 2b, 2c, and 2d and storing it in the storage unit 24a.

[0061] In this way, the processing device 2 according to this embodiment uses an external processing device to back up the information stored in the storage unit 24. Therefore, there is no need to connect a storage medium to the processing device 2 to store the backup data, and there is no need to perform backup using a server machine or the like that controls the factory where the processing device 2 is located.

[0062] When some abnormality occurs in the processing device 2, the manager or the like of the processing device 2 attempts to restore the processing device 2 by operating the control unit 22 using the touch panel display 10 while checking the status of the processing device 2. If the manager or the like detects that some or all of the information stored in the memory unit 24 has been lost, he or she will cause the control unit 22 to perform an operation to restore the information.

[0063] For example, the control unit 22 may further include a restoration unit 32 (see FIG. 1 ) that controls the communication device 34 to receive self-backup data from the external processing device, restores the information based on the self-backup data, and stores the information in the storage unit 24. The restoration unit 32 communicates with the external processing device via the communication line 36 using the communication device 34, causes the external processing device to transmit the self-backup data that was previously transmitted to the external processing device, and has the communication device 34 receive the data. The lost information is then restored based on the self-backup data and stored in the storage unit 24.

[0064] More specifically, if the self-backup data is the same information that was stored in storage unit 24, restoration unit 32 stores the self-backup data as that information in storage unit 24. Alternatively, if the self-backup data is compressed data, encrypted data, or the like, restoration unit 32 restores the data to its original format and stores it in storage unit 24. In other words, the self-backup data, etc., may be data in a format different from the information that was stored in storage unit 24.

[0065] Next, several aspects of the overall picture of backup performed in a factory or the like where the processing apparatus 2 according to this embodiment is lined up will be described. Fig. 4(A) is a block diagram schematically showing backup data stored in the memories 24a and 24b of the control units 22a and 22b of two processing apparatuses 2a and 2b installed in a factory or the like.

[0066] In the example shown in Fig. 4(A), two storage units 24a and 24b are used to back up each other. That is, backup data A of one processing device 2a is stored in the storage unit 24b of the control unit 22b of the other processing device 2b, and backup data B of the other processing device 2b is stored in the storage unit 24a of the control unit 22a of the one processing device 2a. This allows the processing devices 2a and 2b to back up each other.

[0067] Here, backup data A is the self-backup data of the processing device 2a and also the backup data of other devices in the processing device 2b, and backup data B is the self-backup data of the processing device 2b and also the backup data of other devices in the processing device 2a.

[0068] When three or more processing devices 2 are installed in a factory or the like, each processing device 2 may back up all of the other processing devices. Fig. 4(B) is a block diagram schematically showing backup data stored in memories 24a, 24b, 24c, and 24d of control units 22a, 22b, 22c, and 22d of four processing devices 2a, 2b, 2c, and 2d installed in a factory or the like.

[0069] 4(B), each of the four storage units 24a, 24b, 24c, and 24d is used to back up the other storage units 24a, 24b, 24c, and 24d. That is, backup data A of the processing device 2a is stored in the storage units 24b, 24c, and 24d of the control units 22b, 22c, and 22d of the processing devices 2b, 2c, and 2d. Also, backup data B of the processing device 2b is stored in the storage units 24a, 24c, and 24d of the control units 22a, 22c, and 22d of the processing devices 2a, 2c, and 2d.

[0070] Furthermore, the backup data C of the processing device 2c is stored in the memories 24a, 24b, and 24d of the control units 22a, 22b, and 22d of the processing devices 2a, 2b, and 2d. The backup data D of the processing device 2d is stored in the memories 24a, 24b, and 24c of the control units 22a, 22b, and 22c of the processing devices 2a, 2b, and 2c.

[0071] This makes it possible to restore lost information even if information stored in the memories 24a, 24b, 24c, and 24d is lost simultaneously in multiple processing devices among those installed in a factory, etc. However, if each of the processing devices 2a, 2b, 2c, and 2d backs up the other processing devices 2a, 2b, 2c, and 2d, the amount of data stored for backup in each of the memories 24a, 24b, 24c, and 24d becomes extremely large.

[0072] Therefore, for example, each of the processing devices 2a, 2b, 2c, and 2d may back up one of the other processing devices 2a, 2b, 2c, and 2d. Fig. 5(A) is a block diagram schematically showing backup data stored in memories 24a, 24b, 24c, and 24d of control units 22a, 22b, 22c, and 22d of four processing devices 2a, 2b, 2c, and 2d installed in a factory or the like.

[0073] 5(A), each of the four storage units 24a, 24b, 24c, and 24d is used to back up one of the other storage units 24a, 24b, 24c, and 24d. For example, backup data A of the processing device 2a is stored in the storage unit 24b of the control unit 22b of the processing device 2b. Also, backup data B of the processing device 2b is stored in the storage unit 24c of the control unit 22c of the processing device 2c.

[0074] Furthermore, the backup data C of the processing device 2c is stored in the memory unit 24d of the control unit 22d of the processing device 2d. Also, the backup data D of the processing device 2d is stored in the memory unit 24a of the control unit 22a of the processing device 2a. As a result, if information stored in the memory units 24a, 24b, 24c, and 24d of any one of the processing devices installed in a factory or the like is lost, the information can be restored by an external processing device that stores backup data related to the lost information in its memory unit.

[0075] In this case, information can be restored unless two or more processing devices 2a, 2b, 2c, and 2d fail simultaneously and the information in the storage units 24a, 24b, 24c, and 24d is lost. Since it is rare for two or more processing devices 2a, 2b, 2c, and 2d installed in a factory or the like to fail simultaneously, the risk is sufficiently small even with this backup system. On the other hand, no matter how many processing devices are installed in a factory, the capacity of each storage unit 24a, 24b, 24c, and 24d will not be strained, and there will be no capacity issues.

[0076] The number of external processing devices that store the backup data of the memory unit 24 of the processing device 2 does not have to be the number of external processing devices installed in the factory minus 1, and does not have to be 1. For example, the backup data of each memory unit 24 may be stored in the memory units of two or more predetermined number of external processing devices.

[0077] The backup data transmission control unit 28 of each processing device 2 creates its own backup data including the information stored in the storage unit 24, and controls the communication device 34 to transmit the own backup data to some or all of the multiple other processing devices (external processing devices) 2.

[0078] The backup data reception control unit 30 of each processing device 2 controls the communication device 34 to receive the other device backup data transmitted by one or more of the plurality of other processing devices (external processing devices) 2. Then, all of the received other device backup data is stored in the storage unit 24.

[0079] In addition, the restoration unit 32 of each processing device 2 controls the communication device 34 to receive self-backup data from at least one of the other processing devices 2 that store the self-backup data, restores information based on the self-backup data, and stores the information in the memory unit 24.

[0080] However, the more other device backup data stored in the storage unit 24 of the processing device 2, that is, the more external processing devices are used to back up one processing device 2, the greater the security risk.

[0081] For example, an intruder may infiltrate a network operating in a factory or the factory itself with the intention of stealing information and gain unauthorized access to the control unit 22 of one of the processing devices 2. In this case, not only the information about the processing device 2 stored in the memory unit 24 of the processing device 2, but also the backup data of other devices stored in the memory unit 24 may be stolen. Therefore, it is desirable to take measures against the risk of the processing device 2 using an external processing device for backup or storing the backup data of other devices in the memory unit 24.

[0082] Therefore, the backup data transmission control unit 28 may divide the self-backup data including the information stored in the storage unit 24 of one processing device 2 into a plurality of pieces of divided self-backup data, and may then control the communication device 34 to transmit the different divided self-backup data to each of a plurality of other processing devices (external processing devices).

[0083] Figure 5(B) is a block diagram showing a schematic diagram of backup data stored in the memory units 24a, 24b, 24c, and 24d of the control units 22a, 22b, 22c, and 22d of four processing devices 2a, 2b, 2c, and 2d installed in a factory, etc. The system for storing divided self-backup data will be explained using Figure 5(B).

[0084] 5(B), the self-backup data is divided into three parts, the number of which is the number of external processing devices, in the processing device 2a, and divided self-backup data (backup data A1, A2, A3) is created. Then, backup data A1 is sent to the storage unit 24b of the processing device 2b, backup data A2 is sent to the storage unit 24c of the processing device 2c, and backup data A3 is sent to the storage unit 24d of the processing device 2d, and stored as divided other-device backup data.

[0085] Similarly, in the processing device 2b, three divided self-backup data (backup data B1, B2, B3) are created. Then, the backup data B1 is sent to the storage unit 24a of the processing device 2a, the backup data B2 is sent to the storage unit 24c of the processing device 2c, and the backup data B3 is sent to the storage unit 24d of the processing device 2d, and stored as divided other-device backup data.

[0086] Then, in the processing device 2c, three divided self-backup data (backup data C1, C2, C3) are created. The backup data C1 is sent to the storage unit 24a of the processing device 2a, the backup data C2 is sent to the storage unit 24b of the processing device 2b, and the backup data C3 is sent to the storage unit 24d of the processing device 2d, and stored as divided other-device backup data.

[0087] Furthermore, in the processing device 2d, three divided self-backup data (backup data D1, D2, D3) are created. The backup data D1 is sent to the storage unit 24a of the processing device 2a, the backup data D2 is sent to the storage unit 24b of the processing device 2b, and the backup data D3 is sent to the storage unit 24c of the processing device 2c, and stored as divided other-device backup data.

[0088] In this case, as the divided other device backup data, backup data B1, C1, and D1 are stored in storage unit 24a, and backup data A1, C2, and D2 are stored in storage unit 24. Furthermore, backup data A2, B2, and D3 are stored in storage unit 24c, and backup data A3, B3, and C3 are stored in storage unit 24d. That is, each backup data is divided and stored in each of storage units 24a, 24b, 24c, and 24d.

[0089] When a failure occurs in any of the processing devices 2 and the information stored in the storage unit 24 is lost, the restoration unit 32 controls the communication device 34 to receive divided self-backup data from each of the multiple external processing devices. Then, self-backup data is created based on all of the divided self-backup data, and the lost information is restored based on this self-backup data and stored in the storage unit 24. Conversely, self-backup data cannot be created unless all of the divided self-backup data is collected.

[0090] For example, consider a case where unauthorized access occurs to processing device 2c and information stored in storage unit 24c is stolen. In this case, information about processing device 2c stored in storage unit 24c is leaked. However, the information stored in storage units 24a, 24b, and 24d cannot be restored using only backup data A2, B2, and D3 stored in storage unit 24c, i.e., only some of the divided self-backup data.

[0091] For example, if the divided self-backup data is simply divided self-backup data, it may be possible to restore some information based on the leaked divided self-backup data. However, if the divided self-backup data is encrypted or the self-backup data is divided in a form that makes it impossible to restore some information by itself, it may be impossible to restore some information based on the leaked divided self-backup data.

[0092] In this way, if the backup data related to the information stored in the storage unit 24 of the processing device 2 is divided and different divided backup data is stored in each external processing device, the increase in security risk caused by the backup of information is extremely small. Also, if the backup data is divided, the capacity of each storage unit 24 occupied by the backup is limited.

[0093] Furthermore, if information were stolen from all of the processing devices 2 installed in a factory, etc., all of the divided backup data would be collected and it would be possible to create information by integrating the divided backup data. However, at this point, the perpetrator of the theft would already have directly obtained information about each processing device 2, so there would be no new information to be obtained using the backup data. Therefore, it can be said that the increase in security risk resulting from backing up information is extremely small.

[0094] Next, a method for managing a processing device according to this embodiment will be described. This method for managing a processing device relates to a method for backing up information stored in the control units of multiple processing devices 2 installed in a factory or the like. In other words, the following describes a method for managing a processing device that includes a control unit 22 including a storage unit 24 capable of storing information, and that manages multiple processing devices 2 connected to each other via a communication line 36. Figure 6(A) is a flowchart illustrating the flow of each step of the method for managing a processing device according to this embodiment.

[0095] First, a creating step S10 is performed in which backup data including information stored in the storage unit 24 is created by the control units 22 of the multiple processing devices 2. Next, a transmitting step S20 is performed in which the control units 22 of the processing devices 2 that have created the backup data transmit the backup data to other processing devices 2 via the communication line 36. The creating step S10 and the transmitting step S20 are performed, for example, by the backup data transmission control unit 28 of the control unit 22 of each processing device 2.

[0096] In the sending step S20, each processing device 2 may send the backup data to all other processing devices 2. However, the sending step S20 is not limited to this, and each processing device 2 may send the backup data to one of the other processing devices 2 or to multiple processing devices 2.

[0097] After the sending step S20, a storage step S30 is performed in which the backup data is stored in the storage unit 24 of the processing device 2 that received the backup data via the communication line 36. In the storage step S30, the storage unit 24 of each processing device 2 may store the backup data of all the other processing devices 2, or may store multiple backup data or one different backup data.

[0098] Furthermore, in the management method for processing devices according to this embodiment, backup data of information stored in the storage unit 24 of a processing device 2 may be divided as described above and stored in the storage unit 24 of another processing device 2. Fig. 6(B) is a flowchart illustrating the flow of each step of the processing method for processing devices in this case. In this case, it is preferable that the creation step S10 is performed to create backup data for each processing device 2, and then the division step S40 is performed.

[0099] In the division step S40, the control units 22 of the multiple processing devices 2 divide the backup data to create multiple divided backup data. For example, the backup data transmission control unit 28 of each processing device 2 divides the backup data by the number obtained by subtracting 1, which indicates the processing device itself, from the number of processing devices 2 installed in a factory, etc. However, the number of divided backup data is not limited to this, and the backup data may be divided by a number smaller than this number.

[0100] When the division step S40 is performed and divided backup data is created, the next transmission step S20 causes the control units 22 of the plurality of processing devices 2 to transmit different divided backup data to the other plurality of processing devices 2 via the communication line 36. Then, the next storage step S30 causes the memory units 24 of the control units 22 of the processing devices 2 that received the divided backup data via the communication line 36 to store the divided backup data.

[0101] Next, a procedure for restoring information using backup data stored in the storage unit 24 of another processing device 2 when the processing device 2 breaks down for some reason and information stored in the storage unit 24 is lost will be described. That is, a method for managing a processing device that restores information stored in the storage unit 24 from backup data will be described. Fig. 6(C) is a flowchart showing the flow of each step of the method for managing a processing device that restores information.

[0102] First, from among a plurality of processing devices 2 installed in a factory or the like, a processing device 2 that requires the restoration of information in the storage unit 24 is identified. Then, a receiving step S50 is performed in which the control unit 22 of this processing device 2 receives backup data stored in the storage unit 24 of the control unit 22 of the other processing devices 2.

[0103] The receiving step S50 is performed, for example, by the restoration unit 32 of the control unit 22. The restoration unit 32 controls the communicator 34 to communicate with the control unit 22 of the other processing device 2 via the communication line 36, and sends a command to the control unit 22 of the other processing device 2 to transmit backup data necessary for restoring information. Upon receiving the command, the control unit 22 of the other processing device 2 controls the communicator 34 to transmit the backup data stored in the memory unit 24 via the communication line 36.

[0104] Then, when the backup data is transmitted from the other processing device 2, the restoration section 32 of the control unit 22 of the processing device 2 in which information restoration is to be performed receives the backup data via the communication device 34. Then, the restoration section 32 restores the information stored in the memory section 24 based on the received backup data, and performs a restoration step S60 of storing this information in the memory section 24. As a result, information restoration based on the backup data saved in the other processing device 2 is performed.

[0105] If the divided backup data of the information stored in the storage unit 24 of the processing device 2 is stored in the storage units 24 of multiple other processing devices 2, in the receiving step S50, the restoration unit 32 receives the divided backup data from each of the other processing devices 2. After all the divided backup data are collected in the receiving step S50, an integration step is performed in which the divided backup data are integrated to form backup data before the restoration step S60 is performed. Then, the restoration step S60 is performed to restore the information in the storage unit 24.

[0106] In the processing device 2 and the management method for the processing device 2 according to the present embodiment, a manager of a factory or the like may sequentially perform the backup work by operating each processing device 2. Alternatively, the manager may cause each processing device 2 to simultaneously perform the backup work by transmitting a command to each processing device 2 to perform the backup work from a server or the like that manages and operates each processing device 2.

[0107] Furthermore, a command to perform a backup operation at a predetermined timing may be input in advance to the control unit 22 of the processing device 2. Here, the predetermined timing may be when a certain amount of time has passed, when a predetermined number of workpieces have been processed by the processing device 2, or when the data volume of the information stored in the memory unit 24 has increased by a predetermined amount. When the backup operation is automatically performed in the processing device 2, not only is the reliability of the processing device 2 improved, but there is also the advantage that the administrator or the like does not have to take the time and effort of inputting commands.

[0108] As described above, the processing device 2 and the management method for the processing device 2 according to this embodiment make it possible to easily, safely, and at low cost back up data of information stored in the memory unit 24 of the processing device 2. A server machine or the like that manages multiple processing devices 2 is not required for the backup; information can be backed up simply by using a portion of the memory area of ​​the memory unit 24 provided in each processing device 2.

[0109] The present invention is not limited to the above-described embodiment and can be implemented with various modifications. For example, the above-described embodiment describes a case where multiple processing devices 2 installed in a factory or the like are mutually utilized to perform mutual backup. That is, the processing device 2 transmits its own backup data to an external processing device and stores it therein, and also receives and stores backup data from other devices. However, one aspect of the present invention is not limited to this.

[0110] The processing device 2 according to one embodiment of the present invention may have a function to transmit its own backup data to an external processing device, but may not have a function to receive and store backup data from other devices. Furthermore, the processing device 2 may have a function to receive and store backup data from other devices, but may not have a function to transmit its own backup data to an external processing device and have it store it. When backup is performed only for processing devices 2 with a relatively high failure rate, the load on the communication line 36 becomes relatively light.

[0111] Furthermore, in the above embodiment, an example was described in which two or four processing devices 2 are installed in a factory, etc., but it goes without saying that the number of processing devices 2 installed in a factory, etc. is not limited to this.

[0112] In addition, the structures, methods, etc. according to the above-described embodiments and modifications can be modified as appropriate without departing from the scope of the present invention. [Explanation of symbols]

[0113] 1 Workpiece 2,2a,2b,2c,2d processing equipment 4 Foundation 6. Housing 8 Cassette support stand 10 Touch panel display 12 Processing room 14 Chuck table 14a Top side 16 Processing Unit 18 Spindle 20 Processing tools 22, 22a, 22b, 22c, 22d control unit 24,24a,24b,24c,24d Storage section 26 Processing control unit 28 Backup data transmission control section 30 Backup data reception control section 32 Restoration Department 34,34a,34b,34c,34d Communication equipment 36 Communication lines

Claims

1. A processing device for processing a workpiece, a holding table for holding the workpiece; a processing unit that processes the workpiece held on the holding table; a processing feed unit that relatively feeds the holding table and the processing unit; a control unit; a communication device capable of communicating with a plurality of external processing devices via a communication line; The control unit a storage unit capable of storing various types of information; a machining control unit that controls the holding table, the machining unit, and the machining feed unit to perform machining of the workpiece; a backup data transmission control unit that creates self-backup data including the information stored in the storage unit, divides the self-backup data to create divided self-backup data, and controls the communication device to transmit the divided self-backup data that differ from each other to each of the plurality of external processing devices; A processing device characterized by comprising a backup data reception control unit that controls the communication device to receive divided other device backup data transmitted by each of the plurality of external processing devices and stores the divided other device backup data in the memory unit.

2. 2. The processing device according to claim 1, wherein the control unit further comprises a restoration unit that controls the communication device to receive the divided self-backup data from each of the plurality of external processing devices, creates the self-backup data based on all the divided self-backup data, restores the information based on the self-backup data, and stores the restored information in the memory unit.

3. A method for managing a plurality of processing devices, each of which includes a control unit including a storage unit capable of storing information, and which manages the processing devices connected to each other via a communication line, comprising: a creating step of creating backup data including the information stored in the storage unit in the control units of the plurality of processing devices; a transmitting step of causing the control unit of each of the plurality of processing devices to transmit the backup data to the other processing devices via the communication line; a storage step of storing the backup data in the storage unit of the control unit of the processing device that receives the backup data via the communication line, In the storing step, the storage unit of the control unit of each of the processing devices stores one backup data that is different from the other.

4. A method for managing a plurality of processing devices, each of which includes a control unit including a storage unit capable of storing information, and which manages the processing devices connected to each other via a communication line, comprising: a creating step of creating backup data including the information stored in the storage unit in the control units of the plurality of processing devices; a dividing step of dividing the backup data by the control units of the plurality of processing devices to create a plurality of divided backup data; a transmitting step of causing the control unit to transmit the different divided backup data to the other plurality of processing devices via the communication line; a storage step of storing the divided backup data in the storage section of the control unit of the processing device that has received the divided backup data via the communication line.

Images