Program, control device, imaging device, and control method

Abstract

SOLUTION: A program may allow a computer to execute a step of acquiring target posture information for showing a target posture of a movable member by m degree-of-freedom components related to movement or rotation of the movable member, a step of deriving correction information for showing a correction component for correcting an error of respective target positions of m+n positions of a movable member caused by at least one of n degree-of-freedom components other than m degrees of freedom related to movement or rotation of the movable member on the basis of at least one value of m+n values equivalent to m+n positions of the movable member shown by each position information, a step of deriving respective target positions of m+n positions of a movable member on the basis of m degree-of-freedom components shown by target posture information and correction components shown by correction information, and a step of outputting respective pieces of target position information for showing respective target positions to m+n control circuits, respectively.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a program, a control device, an imaging device, and a control method. [Background technology]

[0002] Patent Document 1 discloses the use of a closed-loop drive signal applied to an optical image stabilization actuator to improve the estimation of the position of the moving object and adjust measurements from a position sensor to compensate for crosstalk between the axes of the optical image stabilization. [Prior art document] [Patent documents] [Patent Document 1] U.S. Patent No. 9,560,247 Summary of the Invention [Problem to be solved by the invention]

[0003] When a plurality of actuators are driven to set the attitude of a movable member to a target attitude, the movable member may not reach the target position, resulting in an increase in power consumption by the actuators. [Means for solving the problem]

[0004] A program according to one aspect of the present invention may be a program for causing a computer to function as a control device that controls m+n control circuits that independently control m+n actuators (m and n are positive integers) that move or rotate a movable member with m degrees of freedom. The program may cause the computer to acquire position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member. The program may cause the computer to acquire target attitude information indicating a target attitude of the movable member using components of the m degrees of freedom related to the movement or rotation of the movable member. The program may cause the computer to derive correction information indicating a correction component for correcting an error in each of the m+n target positions of the movable member that is caused by at least one component of the n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one of the m+n values ​​corresponding to the m+n positions of the movable member indicated in the position information. The program may cause the computer to execute a step of deriving target positions of each of m+n positions of the movable member based on components of m degrees of freedom indicated in the target attitude information and correction components indicated in the correction information. The program may cause the computer to execute a step of outputting target position information indicating each target position to each of the m+n control circuits in order to bring the movable member into the target attitude.

[0005] The correction components may include a correction component for each of the n degrees of freedom components.

[0006] The step of deriving the correction information may include a step of deriving the correction information according to an algorithm defined by an (m+n)×(m+n) matrix, using m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information as variables.

[0007] The step of deriving the correction information may include a step of deriving components of m degrees of freedom related to the movement or rotation of the movable member according to a predetermined m×(m+n) matrix using m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information as variables, deriving m+n variables according to a predetermined (m+n)×m matrix corresponding to the inverse transform of the predetermined m×(m+n) matrix, and deriving the correction information by deriving differences between the m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information and the m+n variables.

[0008] The correction components may include correction components for the sum of components of n degrees of freedom.

[0009] The detection unit may include m+n position sensors. Each of the m+n control circuits and each of the m+n position sensors may be integrated to form m+n integrated circuits.

[0010] Each of the m+n actuators may be an electromagnetic actuator. Each of the m+n position sensors may be a magnetic sensor.

[0011] Each of the m+n control circuits may independently control each of the m+n actuators by PID control based on the respective target positions.

[0012] m may be 3 and n may be 1. When the m+n actuators are driven, the movable member may move along the first direction and the second direction and rotate about a first rotation axis that intersects with a plane that is aligned with the first direction and the second direction.

[0013] m may be 3 and n may be 1. When the m+n actuators are driven, the movable member may move along a first direction and rotate around a first rotation axis and a second rotation axis along a plane intersecting the first direction.

[0014] m may be 1, and n may be an integer equal to or greater than 1. The movable member may move along the first direction by driving the m+n actuators.

[0015] A control device according to one aspect of the present invention may be a control device that controls m+n control circuits that separately control m+n actuators (m and n are positive integers) that move or rotate a movable member with m degrees of freedom. The control device may include a position information acquisition unit that acquires position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member. The control device may include a target posture information acquisition unit that acquires target posture information indicating a target posture of the movable member using components of the m degrees of freedom related to the movement or rotation of the movable member. The control device may include a correction information derivation unit that derives correction information indicating a correction component for correcting an error in each of the target positions of the m+n positions of the movable member that is caused by at least one component of the n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one of the m+n values ​​corresponding to the m+n positions of the movable member indicated in the respective position information. The control device may include a target position derivation unit that derives target positions of each of the (m+n) positions of the movable member based on the components of the m degrees of freedom indicated in the target attitude information and the correction components indicated in the correction information. The control device may include an output unit that outputs target position information indicating each target position to each of the (m+n) control circuits in order to bring the movable member into the target attitude.

[0016] An imaging device according to one aspect of the present invention may include the control device, an imaging element, an optical system that forms an image of an object on an imaging surface of the imaging element, m+n actuators, and a detector that detects each of the m+n positions of the movable member. The movable member may be the imaging element or the optical system.

[0017] The detection unit may include m+n position sensors. Each of the m+n actuators may be an electromagnetic actuator. Each of the m+n position sensors may be a magnetic sensor.

[0018] Each of the m+n control circuits and each of the m+n position sensors may be integrated to form m+n integrated circuits.

[0019] m may be 3 and n may be 1. The movable member may be an imaging element. When driven by the m+n actuators, the imaging element may move along the first direction and the second direction and rotate about a first rotation axis that intersects with a plane that is aligned with the first direction and the second direction, thereby performing image stabilization.

[0020] m may be 3 and n may be 1. The movable member may be an optical system. When driven by the m+n actuators, the optical system may move along a first direction and rotate around a first rotation axis and a second rotation axis along a plane intersecting the first direction, thereby performing at least one of image shake correction and focusing control.

[0021] m may be 1, and n may be an integer equal to or greater than 1. The movable member may be an optical system. When driven by the m+n actuators, the optical system may move along a first direction to perform focus control or zoom control.

[0022] A control method according to one aspect of the present invention may be a control method for controlling m+n (m and n are positive integers) control circuits that separately control m+n actuators that move or rotate a movable member with m degrees of freedom. The control method may include a step of acquiring position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member. The control method may include a step of acquiring target attitude information indicating a target attitude of the movable member using components of the m degrees of freedom related to the movement or rotation of the movable member. The control method may include a step of deriving correction information indicating a correction component for correcting an error in each of the target positions of the m+n positions of the movable member that is caused by at least one component of the n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one of the m+n values ​​corresponding to the m+n positions of the movable member indicated in the respective position information. The control method may include a step of deriving target positions of m+n positions of the movable member based on components of m degrees of freedom indicated in the target attitude information and correction components indicated in the correction information. The control method may include a step of outputting target position information indicating each target position to each of the m+n control circuits so as to bring the movable member into the target attitude.

[0023] The above summary of the invention does not list all of the features of the present invention, and subcombinations of these features may also be inventions. [Brief explanation of the drawings]

[0024] [Figure 1] FIG. 1 is a diagram illustrating an example of an imaging device according to an embodiment of the present invention. [Figure 2] 10A and 10B are diagrams illustrating the movement and rotation of an imaging element. [Figure 3] 10A and 10B are diagrams illustrating how an electromagnetic actuator is driven. [Figure 4] FIG. 10 is a diagram showing how a movable member is driven by two electromagnetic actuators. [Figure 5]FIG. 10 is a diagram showing a state in which four electromagnetic actuators and four position sensors are arranged on a substrate. [Figure 6A] 10 is a diagram for explaining how an electromagnetic actuator applies a thrust force of an X-direction component to a substrate. FIG. [Figure 6B] 10 is a diagram for explaining how the electromagnetic actuator applies a thrust force with a Y-direction component to the substrate. FIG. [Figure 6C] 10A and 10B are diagrams for explaining how an electromagnetic actuator applies a thrust force of a rotational component to a substrate. [Figure 6D] 10A and 10B are diagrams for explaining components of an excess degree of freedom that an electromagnetic actuator gives to a substrate. [Figure 7] FIG. 2 is a diagram illustrating an example of functional blocks of the imaging device. [Figure 8] FIG. 2 is a diagram illustrating an example of a circuit configuration of an image sensor driving unit. [Figure 9] 10A and 10B are diagrams for explaining a case where a focus lens is moved and rotated with one degree of freedom of translational movement and two degrees of freedom of rotation. [Figure 10] FIG. 10 is a diagram for explaining a case where a zoom lens is moved with one degree of freedom of linear movement. [Figure 11] FIG. 10 is a diagram for explaining a case where a zoom lens is moved with one degree of freedom of linear movement. [Figure 12] FIG. 2 illustrates an example of a hardware configuration. DETAILED DESCRIPTION OF THE INVENTION

[0025] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention according to the claims. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0026] 1 shows an example of an imaging device 10 according to this embodiment. The imaging device 10 may be a mobile terminal such as a mobile phone, a tablet, a notebook computer, or a small personal computer.

[0027] The imaging device 10 captures an image of an object 20. If a user holding the imaging device 10 moves or rotates the position of the imaging device 10, the captured image will be distorted by image blur. For example, the user may move or rotate the imaging device 10 in the X direction, Y direction, Z direction, and angle θ during imaging. X , angle θ Y , and angle θ Z The image capturing device 10 may be moved or rotated in a direction such as the angle θ X is the rotation angle around the X axis, and angle θ Y is the rotation angle around the Y axis, and angle θ Z and indicate the rotation angle around the Z axis. The imaging device 10 has a function of detecting its own direction of movement and rotation, and correcting image blur by moving or rotating an optical system such as a lens or an imaging element in the direction opposite to the detected direction of movement.

[0028] 2 shows the movement and rotation of the image sensor 120. The image sensor 120 is movable within the XY plane and rotatable around an axis along the Z axis that intersects the XY plane. The imaging device 10 corrects image blur by moving the image sensor 120 within the XY plane in the direction opposite to the detected direction of movement and rotation of the image sensor 120, or by rotating the image sensor 120 around an axis along the Z axis.

[0029] An electromagnetic actuator, i.e., a voice coil motor, can be used as an actuator that serves as a drive source for driving the imaging element 120. FIG. 3 is a diagram showing how the electromagnetic actuator 210 is driven. The electromagnetic actuator 210 has an air-core coil 212 and a magnet 214. The substrate 122 is an example of a movable member, and the imaging element 120 is disposed on the substrate 122. In other words, the imaging element 120 is movable together with the substrate 122.

[0030] When a current flows through the air-core coil 212 in the magnetic field of the magnet 214, a force is generated in the air-core coil 212 in a direction perpendicular to the magnetic field. This applies a thrust to the substrate 122 along the direction of the arrow 230. A position sensor 224 is disposed within the air-core portion 2241 of the air-core coil 212 on the substrate 122. The position sensor 224 may be a magnetic sensor such as a Hall element. The position sensor 224 may output a voltage whose magnitude corresponds to a change in the magnetic field. As the substrate 122 moves, the positional relationship between the position sensor 224 and the magnet 214 changes, and the magnitude of the magnetic field detected by the position sensor 224 changes. As a result, the position sensor 224 detects the position of the position sensor 224 relative to the magnet 214, i.e., the position of the substrate 122. Note that this embodiment describes a configuration in which the air-core coil 212 is disposed on the substrate 122. However, the magnet 214 may also be disposed on the substrate 122.

[0031] 4 shows how two electromagnetic actuators 210A and 210B are used to drive a movable member 12, such as a substrate 122. When the movable member 12 is driven by the electromagnetic actuators 210A and 210B, there are cases in which, while a position 240B of a position sensor 224B, moved by one of the electromagnetic actuators 210B, reaches a target position 242B relative to the magnet 214B, a position 240A of a position sensor 224A, moved by the other electromagnetic actuator 210A, does not reach a target position 242A relative to the magnet 214A. In such cases, an additional current flows through the air-core coil 212A of the other electromagnetic actuator 210A to move the position 240A of the position sensor 224A to the target position 242A relative to the magnet 214A. As a result, when position 240A of position sensor 224A reaches target position 242A relative to magnet 214A, position 240B of position sensor 224B deviates from target position 242B relative to magnet 214B. This repetition causes current to continuously flow through air core coil 212A and air core coil 212B, which may increase the power consumed by electromagnetic actuators 210A and 210B.

[0032] Furthermore, there are cases where the position 240A of the position sensor 224A does not reach the target position 242A relative to the magnet 214A, and the position 240B of the position sensor 224B does not reach the target position 242B relative to the magnet 214B. In such cases, while the movable member 12 maintains its current posture, a current continuously flows through the air-core coil 212A of the electromagnetic actuator 210A to cause the position 240A of the position sensor 224A to reach the target position 242A relative to the magnet 214A, and a current also continuously flows through the air-core coil 212B of the electromagnetic actuator 210B to cause the position 240B of the position sensor 224B to reach the target position 242B relative to the magnet 214B. This may increase the power consumed by the electromagnetic actuators 210A and 210B.

[0033] These phenomena occur when a solution to the simultaneous equations between the detected position of the movable member 12 and the target position cannot be derived, as described below, due to a positional discrepancy between the position of the movable member 12 detected by the position sensors 224A and 224B and the actual position of the movable member 12, caused by manufacturing errors of the position sensors 224A and 224B or the influence of surrounding magnetic fields other than the magnetic fields of the magnets 214A and 214B. Furthermore, an increase in power consumption due to an inability to derive a solution to the simultaneous equations can occur when the electromagnetic actuators 210A and 210B are controlled independently. This can occur when the detection result of the position sensor 224A is used for feedback control of the electromagnetic actuator 210A but not for feedback control of the electromagnetic actuator 210B, and when the detection result of the position sensor 224B is used for feedback control of the electromagnetic actuator 210B but not for feedback control such as PID control of the electromagnetic actuator 210A.

[0034] This phenomenon can be prevented if the target positions of the movable member 12 required to reach the target posture of the movable member 12 coincide with the positions detected by the position sensors 224. In other words, this phenomenon can be prevented if the target positions of the movable member 12 required to reach the target posture of the movable member 12 can be accurately derived taking into account the positional deviation of the position sensors 224.

[0035] 5 shows a state in which four electromagnetic actuators 210A, 210B, 210C, and 210D (hereinafter sometimes collectively referred to as electromagnetic actuators 210) and four position sensors 224A, 224B, 224C, and 224D (hereinafter sometimes collectively referred to as position sensors 224) are arranged on a substrate 122. In response to thrust from the four electromagnetic actuators 210, the substrate 122 moves in the X and Y directions with three degrees of freedom, and rotates around a rotation axis along the Z axis perpendicular to the XY plane.

[0036] As shown in FIG. 6A, electromagnetic actuator 210A and electromagnetic actuator 210B apply thrust to substrate 122 with components X1 and X2 in the X direction in the coordinate system of substrate 122. As shown in FIG. 6B, electromagnetic actuator 210C and electromagnetic actuator 210D apply thrust to substrate 122 with components Y1 and Y2 in the Y direction in the XY coordinate system of substrate 122. Also, as shown in FIG. 6C, electromagnetic actuators 210A, 210B, 210C, and 210D apply thrust with rotational component θ to substrate 122 by combining components X1, X2, X3, and X4 of their respective thrusts. In addition, as shown in FIG. 6D, if an error is included in the position detected by position sensor 224, in addition to the X component, Y component, and rotational component θ of the degree of freedom that contribute to the movement and rotation of substrate 122, an excess component R of the degree of freedom that does not contribute to the movement and rotation of substrate 122 and should not actually exist will be present.

[0037] Here, the position of the electromagnetic actuator 210A in coordinate system A detected by the position sensor 224A is defined as x1. The position of the electromagnetic actuator 210B in coordinate system B detected by the position sensor 224B is defined as x2. The position of the electromagnetic actuator 210C in coordinate system C detected by the position sensor 224C is defined as y1. The position of the electromagnetic actuator 210D in coordinate system D detected by the position sensor 224D is defined as y2. Furthermore, each target position to be detected by each position sensor 224 corresponding to the target attitude (X, Y, θ) is defined as x1. T ,x2 T ,y1T ,y2 T Let's say.

[0038] Target posture (X, Y, θ) and target position (x1 T ,x2 T ,y1 T ,y2 T ) can be mathematically expressed by the following equation (1):

number

[0039] The target position (x1 T ,x2 T ,y1 T ,y2 T ) is derived by using four variables (x1 T ,x2 T ,y1 T ,y2 T ) to derive a solution to the simultaneous equations that satisfy the four variables (x1, x2, y1, y2). However, as described above, the position detected by the position sensor 224 may contain an error. Therefore, it may not be possible to derive a solution to the simultaneous equations that satisfy the four variables (x1, x2, y1, y2) for the three variables (X, Y, θ). If a solution cannot be derived in this way, the attitude of the substrate 122 cannot be set to the target attitude, and the power consumed by each electromagnetic actuator 210 may increase.

[0040] Therefore, taking into account the component R of the excess degree of freedom, the four variables (X, Y, θ, R) are calculated as follows: T ,x2 T ,y1 T ,y2 T ) to find the solution to the simultaneous equations.

number

[0041] According to the above matrix formula, even if the position detected by the position sensor 224 contains an error, x1T ,x2 T ,y1 T ,y2 T We can derive the solutions for each of the above.

[0042] The component R of the excess degree of freedom may be derived from the following equation (3), which takes as variables each reference point of the substrate 122 detected by the position sensor 224, for example, positions x1, x2, y1, and y2, which are the positions where each position sensor 224 of the substrate 122 is located.

number

[0043] That is, the component R of the excess degree of freedom may be derived based on the values ​​corresponding to the positions of each reference point detected by each position sensor 224 and the above 4×4 matrix formula. Note that each component of the 4×4 matrix formula in formula (3) is an example and may be adjusted depending on the magnetic characteristics of each position sensor 224, the position detected by the position sensor 224, the target position, etc. After deriving R using formula (3), feedback control is performed to move each position of each reference point to each target position according to formula (2). During this feedback control, the target position may be adjusted by performing a calculation process that scales R.

[0044] 7 shows an example of functional blocks of the imaging device 10. The imaging device 10 includes a control unit 110, an imaging element 120, an imaging element driving unit 200, an optical system 130, a lens driving unit 132, a lens driving unit 134, a lens driving unit 136, a storage unit 140, and a vibration detection unit 150.

[0045] The optical system 130 includes a zoom lens 131, a focus lens 133, and an image stabilization lens 135. The focus lens 133 and the image stabilization lens 135 may each be composed of at least one lens. That is, at least one lens may provide both focus control and image stabilization functions. The image capture device 10 has an optical image stabilization mechanism (OIS) and an in-body image stabilization mechanism (BIS). The image capture device 10 may be equipped with at least one of an optical image stabilization mechanism (OIS) and an in-body image stabilization mechanism (BIS). The OIS performs image stabilization by moving or rotating the image stabilization lens 135. The BIS performs image stabilization by moving or rotating the image sensor 120. When the image capture device 10 is equipped with both an OIS and a BIS, the OIS and the BIS may perform image stabilization so as to suppress vibrations in different frequency bands.

[0046] The image sensor 120 may be configured with a CCD or CMOS. The image sensor 120 outputs image data of an optical image formed via a zoom lens 131, a focus lens 133, and an image shake correction lens 135 to the control unit 110.

[0047] The control unit 110 may be configured with a microprocessor such as a CPU or MPU, or a microcontroller such as an MCU. The control unit 110 may be configured with an SoC (system on chip). The storage unit 140 may be a computer-readable recording medium and may include at least one of SRAM, DRAM, EPROM, EEPROM (registered trademark), and flash memory such as a USB memory. The storage unit 140 stores programs and the like required for the control unit 110 to control the image sensor 120, the optical system 130, and the like. The storage unit 140 may be provided inside the housing of the imaging device 10. The storage unit 140 may be provided so as to be removable from the housing of the imaging device 10.

[0048] The zoom lens 131, the focus lens 133, and the image stabilization lens 135 may each include at least one lens. At least a part or all of the zoom lens 131 and the focus lens 133 are arranged to be movable along the optical axis.

[0049] The lens driver 132 moves the zoom lens 131 along the optical axis in accordance with a zoom control command. The lens driver 134 moves the focus lens 133 along the optical axis in accordance with a focus control command. The lens driver 136 moves the image stabilization lens 135 within a plane intersecting the optical axis (XY plane) in accordance with an image stabilization command. The lens driver 136 may rotate the image stabilization lens 135 around axes (X-axis and Y-axis) along the plane intersecting the optical axis in accordance with the image stabilization command. The lens driver 132, the lens driver 134, and the lens driver 136 may each include an electromagnetic actuator, i.e., a voice coil motor, as a drive source. The lens driver 132, the lens driver 134, and the lens driver 136 may each include a shape memory alloy (SMA) actuator or a piezoelectric actuator as a drive source. The lens driving unit 132 and the lens driving unit 134 may include a stepping motor as a driving source.

[0050] The vibration detection unit 150 outputs a vibration signal indicating vibration of the imaging device 10. The vibration detection unit 150 may include a gyro sensor that detects the angular velocity of the imaging device 10. The gyro sensor detects angular velocities around axes along the X-axis, Y-axis, and Z-axis. The vibration detection unit 150 may include an acceleration sensor that detects acceleration of the imaging device 10. The vibration detection unit 150 may include an inertial measurement unit (IMU) that detects the angular velocities of the imaging device 10 around axes along the X-axis, Y-axis, and Z-axis, and the acceleration of the imaging device 10 in the X-axis, Y-axis, and Z-axis directions of the imaging device 10.

[0051] The image sensor driving unit 200 moves the image sensor 120 in a plane intersecting the optical axis in accordance with the image shake correction command. The image sensor driving unit 200 also rotates the image sensor 120 around an axis along the optical axis in accordance with the image shake correction command. The image sensor driving unit 200 may move and rotate the image sensor 120 with three degrees of freedom. The image sensor driving unit 200 may move the image sensor 120 along the XY plane and rotate it around an axis along the Z axis.

[0052] The control unit 110 controls the entire imaging device 10. The control unit 110 controls the lens driving unit 132, the lens driving unit 134, the lens driving unit 136, and the imaging element driving unit 200.

[0053] 8 shows an example of the circuit configuration of the image sensor driving section 200. The image sensor driving section 200 has electromagnetic actuators 210A, 210B, 210C, and 210D, and integrated circuits 220A, 220B, 220C, and 210D.

[0054] The electromagnetic actuators 210A, 210B, 210C, and 210D include air-core coils 212A, 211B, 212C, and 212D (hereinafter sometimes collectively referred to as air-core coils 212) and magnets 214A, 214B, 214C, and 214D (hereinafter sometimes collectively referred to as magnets 214). The air-core coils 212 may be provided on a substrate 122 on which the image sensor 120 is mounted. The magnets 214 may be disposed on a holding member that holds the substrate 122 so that it can move along the imaging surface of the image sensor 120 and rotate around an axis along the optical axis. The holding member may be, for example, the housing of the image sensor 10. The substrate 122 may be supported on the housing of the image sensor 10 so that it can move and rotate via an elastic body such as a spring. The magnets 214 may be fixed to the inner surface of the housing. Alternatively, magnet 214 may be provided on substrate 122, and air-core coil 212 may be provided on a holding member such as the inner surface of the housing.

[0055] The integrated circuit 220 has a control circuit 222 and a position sensor 224. The control circuit 222 is a driver IC that controls the driving of the electromagnetic actuator 210. The position sensor 224 detects the relative position of the position sensor 224 with respect to the magnet 214. The position sensor 224 may be a magnetic sensor that detects the relative position of the position sensor 224 with respect to the magnet 214 from a change in the magnitude of a magnetic field that occurs due to a change in the positional relationship between the magnet 214 and the position sensor 224. The magnetic sensor may be a Hall element. The control circuit 222 and the position sensor 224 may be integrated to form the integrated circuit 220.

[0056] 7, the control unit 110 includes a position information acquisition unit 111, a target attitude information acquisition unit 112, a correction information derivation unit 113, a target position derivation unit 114, and an output unit 115.

[0057] The position information acquisition unit 111 acquires, from each position sensor 224, position information (A), position information (B), position information (C), and position information (D) indicating the positions of each reference point of the substrate 122. The position information may be information indicating the magnitude of the magnetic field detected by the position sensor 224.

[0058] The target orientation information acquisition unit 112 acquires target orientation information indicating a target orientation of the substrate 122. When the image sensor 120 or the image stabilization lens 135 is moved or rotated as a movable member to correct image shake, the target orientation information is derived from a vibration signal detected by the vibration detection unit 150. The target orientation information acquisition unit 112 may acquire target orientation information of the substrate 122 indicating a target orientation of the substrate 122 for moving and rotating the substrate 122 and the image sensor 120 in a direction that cancels out vibrations of the imaging device 10, which is identified based on the detection results by the vibration detection unit 150. The target orientation information indicates a target orientation (X, Y, θ) including X and Y coordinate values ​​of a main reference point in a coordinate system of the substrate 122 and an amount of rotation from the reference orientation. The target orientation (X, Y, θ) includes an X component, a Y component, and a θ component related to the movement or rotation of the substrate 122. When the focus lens 133 is moved as a movable member to perform focus control, the target attitude information may indicate a target position of the focus lens 133 in the optical axis direction to achieve the focused state specified by the focus control command. When the zoom lens 131 is moved as a movable member to perform zoom control, the target attitude information may indicate a target position of the zoom lens 131 in the optical axis direction to achieve the target zoom magnification specified by the zoom control command.

[0059] The correction information derivation unit 113 derives correction information indicating correction components for correcting errors in the target positions of the four reference points of the substrate 122 caused by a component of one degree of freedom other than the X component, Y component, and θ component, which are components of the three degrees of freedom related to the movement or rotation of the substrate 122, according to a predetermined algorithm having four variables corresponding to the positions of the four reference points of the substrate 122 indicated by the respective position information (A), (B), (C), and (D). The predetermined algorithm may be determined, for example, by a mathematical expression of a 4×4 matrix. The correction information derivation unit 113 may derive the correction information according to the mathematical expression of the 4×4 matrix shown in Equation (3) using the values ​​x1, x2, y1, and y2 corresponding to the positions of the respective reference points of the substrate 122.

[0060] The target position derivation unit 114 calculates the target positions x1, y2, and θ of the four reference points of the substrate 122 based on the X, Y, and θ components of the three degrees of freedom indicated in the target attitude information and the correction component R for the other one degree of freedom indicated in the correction information. T ,x2 T ,y1 T ,y2 T The target position derivation unit 114 derives the target positions x1, x2, x3, x4, x5, x6, x7, x8, x9, x10, x11, x12, x13, x14, x15, x16, x17, x18, x19, x20, x21, x22, x23, x24, x25, x26, x27, x28, x29, x30, x31, x32, x40, x51, x62, x70, x81, x90, x11, x12, x13, x14, x15, x16, x17, x25, x26, x27, x28, x32, x33, x41, x42, x52, x63, x74, x85, x90, x15, x16, x17, x1 T ,x2 T ,y1 T ,y2 T The target position derivation unit 114 derives the target position x1 in accordance with Equation (2), which is a 4×4 matrix formula, based on the X component, Y component, and θ component of the three degrees of freedom indicated in the target attitude information and the correction component R for the other one degree of freedom indicated in the correction information. T ,x2 T ,y1 T ,y2 T can be derived.

[0061] The output unit 115 outputs the target position x1 T ,x2 T ,y1 T ,y2 T The target position information (A), (B), (C), and (D) indicating the above are output to the control circuits 222A, 222B, 222C, and 222D, respectively.

[0062] The control circuit 222 controls the electromagnetic actuator 210 in accordance with the target position information. The control circuit 222 controls the electromagnetic actuator 210 by PID control in accordance with the target position indicated in the target position information.

[0063] As described above, according to this embodiment, it is possible to derive the target positions of the reference points of the substrate 122 by taking into consideration the excess degrees of freedom that do not contribute to the movement or rotation of the substrate 122, which is the movable member. Therefore, even if the positions of the reference points detected by the position sensors 224 contain errors, it is possible to prevent the substrate 122 from reaching the target posture and prevent an increase in the power consumed by the electromagnetic actuators 210.

[0064] In the above embodiment, an example has been described in which the imaging element 120 is moved and rotated with three degrees of freedom by separately controlling four electromagnetic actuators 210. However, other configurations are possible as long as the number of separately controlled electromagnetic actuators 210 is greater than the number of degrees of freedom contributing to the movement or rotation of the movable member.

[0065] That is, the control unit 110 may control m+n control circuits 222 that separately control m+n electromagnetic actuators 210 that move or rotate the movable member with m degrees of freedom, where m and n are positive integers.

[0066] The position information acquisition unit 111 may acquire position information indicating each of the m+n positions of the movable member from the m+n position sensors 224 that detect each of the m+n positions of the movable member. The target posture information acquisition unit 112 may acquire target posture information indicating a target posture of the movable member using components of m degrees of freedom related to the movement or rotation of the movable member.

[0067] The correction information derivation unit 113 may derive correction information indicating a correction component for correcting an error in a target position of each of the m+n positions of the movable member caused by at least one component of the n degrees of freedom other than the m degrees of freedom related to movement or rotation of the movable member, based on at least one value of the m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information. The correction information derivation unit 113 may derive correction information indicating a correction component for correcting an error in a target position of each of the m+n positions of the movable member caused by at least one component of the n degrees of freedom other than the m degrees of freedom related to movement or rotation of the movable member, according to a predetermined algorithm in which at least one of the m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information is used as a variable. The correction information derivation unit 113 may derive correction information indicating correction components for correcting errors in the target positions of each of the m+n positions of the movable member caused by n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, according to a predetermined (m+n)×(m+n) matrix with m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information as variables.

[0068] The target position derivation unit 114 may derive target positions of the m+n reference points of the movable member based on the components of the m degrees of freedom indicated in the target attitude information and correction components for the n degrees of freedom indicated in the correction information. The target position derivation unit 114 may derive target positions of the m+n reference points of the movable member in accordance with the components of the m degrees of freedom indicated in the target attitude information, the correction components for the n degrees of freedom indicated in the correction information, and a predetermined (m+n)×(m+n) matrix. The output unit 115 may output target position information indicating the respective target positions to the m+n control circuits 222, respectively, to bring the movable member into the target attitude. The correction information derivation unit 113 may derive correction information without using an (m+n)×(m+n) matrix. For example, m components of the degrees of freedom related to the movement or rotation of the movable member may be derived according to a predetermined m×(m+n) matrix, and m+n variables may be obtained according to a predetermined (m+n)×m matrix equivalent to the inverse transformation of the predetermined m×(m+n) matrix. The correction information derivation unit 113 may derive the correction information by deriving the differences between these m+n variables and the original positions detected by the m+n position sensors 224.

[0069] In the above, an example has been described in which the image sensor 120 is moved and rotated with two degrees of freedom of translational movement and one degree of freedom of rotation. However, the present technology may be applied to a case in which the optical system 130, instead of the image sensor 120, is moved and rotated with one degree of freedom of translational movement and two degrees of freedom of rotation.

[0070] 9, the lens driving unit 136 may arrange four magnets 214 on a holding frame that holds the focus lens 133, and may move the focus lens 133 in the Z-axis direction and rotate the focus lens 133 around the X-axis and the Y-axis. The lens driving unit 136 performs focusing control by moving the focus lens 133 along the Z-axis direction. Furthermore, the lens driving unit 136 performs image stabilization by rotating the focus lens 133 around an axis along the X-axis or the Y-axis. Note that when image stabilization is performed using the focus lens 133, the imaging device 10 does not need to include the image stabilization lens 135.

[0071] Let z1, z2, z3, and z4 be the values ​​corresponding to the positions of the reference points of the focus lens 133 detected by each position sensor 224. The target attitude includes a Z component that contributes to the movement of the focus lens 133, a θ1 component that contributes to the rotation of the focus lens 133 about the X axis, and a θ2 component that contributes to the rotation of the focus lens 133 about the Y axis.

[0072] The correction information derivation unit 113 may derive a correction component R for one extra degree of freedom as correction information according to the 4x4 matrix formula shown in the following equation (4) and the values ​​z1, z2, z3, and z4 corresponding to the positions of each reference point of the focus lens 133.

number

[0073] The target position derivation unit 114 derives the target positions (z1, θ2) of the four reference points of the focus lens 133 in accordance with the components (Z, θ1, θ2) of the three degrees of freedom indicated in the target attitude information, the correction component R for one degree of freedom indicated in the correction information, and the mathematical formula of a 4×4 matrix shown in the following formula (5). T , z2 T ,z3 T , and z4 T ) can be derived.

number

[0074] As shown in Figures 10 and 11, the lens driving unit 132 may pass a current through the air-core coil 212, thereby moving the zoom lens 131 along the Z-axis direction with one degree of freedom of linear movement together with a magnet 214 provided in a holding frame that holds the zoom lens 131.

[0075] 10, two position sensors 224 detect the positions in the Z-axis direction of two reference points of the zoom lens 131. In this case, values ​​corresponding to the positions of the reference points of the zoom lens 131 detected by each position sensor 224 are defined as z1 and z2. The target attitude includes a Z component that contributes to the movement of the zoom lens 131.

[0076] The correction information derivation unit 113 may derive a correction component R for one extra degree of freedom as correction information according to the 2x2 matrix formula shown in the following equation (6) and the values ​​z1 and z2 corresponding to the positions of each reference point of the focus lens 133.

number

[0077] The target position derivation unit 114 calculates the target positions (z1, z2, z3, z4) of the two reference points of the zoom lens 131 in accordance with a component Z of one degree of freedom indicated in the target attitude information, a correction component R for one degree of freedom indicated in the correction information, and a 2×2 matrix formula shown in the following formula (7). T , z2 T ) can be derived.

number

[0078] 11, four position sensors 224 detect the positions in the Z-axis direction of four reference points of the zoom lens 131. In this case, values ​​corresponding to the positions of the reference points of the zoom lens 131 detected by each position sensor 224 are defined as z1, z2, z3, and z4. The target attitude includes a Z component that contributes to the movement of the zoom lens 131.

[0079] The correction information derivation unit 113 may derive components R1, R2, and R3 for the three remaining degrees of freedom as correction information according to the 4x4 matrix formula shown in the following equation (8) and the values ​​z1, z2, z3, and z4 corresponding to the positions of each reference point of the zoom lens 131.

number

[0080] The target position derivation unit 114 calculates the target positions (z1, z2, z3) of the four reference points of the zoom lens 131 in accordance with the component Z of one degree of freedom indicated in the target attitude information, the correction components R1, R2, and R3 for the three degrees of freedom indicated in the correction information, and the mathematical formula of the 4×4 matrix shown in the following formula (9). T , z2 T ,z3 T , z4 T ) can be derived.

number

[0081] The above describes an example in which the correction information derivation unit 113 derives correction components for each of n degrees of freedom. As another example, the correction information derivation unit 113 may derive correction components based on components of m degrees of freedom derived from m+n values ​​corresponding to the m+n positions of the movable member indicated in each piece of position information. The target position derivation unit 114 may derive target positions for each of the m+n positions of the movable member based on the components of m degrees of freedom indicated in the target posture information and the m+n correction components indicated in the correction information.

[0082] For example, in the example shown in FIG. 11, the correction information derivation unit 113 calculates a component z of one degree of freedom according to the following equation (10) using four values ​​z1, z2, z3, and z4 corresponding to the positions of the reference points of the zoom lens 131 as variables: o In the example shown in FIG. 11, the following equation (10) is derived from the dependency (z1+z2+z3+z4) of the values ​​z1, z2, z3, and z4 detected by each position sensor 224 of the first component (Z) on the left side of the above equation (8). Since this dependency is the sum of the values ​​z1, z2, z3, and z4, z o is sometimes called the correction component of the sum.

number

[0083] The correction information derivation unit 113 calculates the values ​​z1, z2, z3, and z4 corresponding to the positions of the reference points of the zoom lens 131 and the component z of one degree of freedom according to the following equation (11): o , i.e., the correction component z of the summation o By deriving the difference between these, correction components Δz1, Δz2, Δz3, and Δz4 for the component of one degree of freedom indicated in the desired attitude information are derived.

number

number

[0084] 12 illustrates an example of a computer 1200 in which aspects of the present invention may be embodied, in whole or in part. A program installed on the computer 1200 may cause the computer 1200 to perform operations associated with an apparatus according to an embodiment of the present invention or to function as one or more “parts” of the apparatus. Alternatively, the program may cause the computer 1200 to perform the operations or one or more “parts” of the apparatus. The program may cause the computer 1200 to perform a process or steps of a process according to an embodiment of the present invention. Such a program may be executed by the CPU 1212 to cause the computer 1200 to perform specific operations associated with some or all of the blocks in the flowcharts and block diagrams described herein.

[0085] The computer 1200 according to this embodiment includes a CPU 1212 and a RAM 1214, which are interconnected by a host controller 1210. The computer 1200 also includes a communication interface 1222 and an input / output unit, which are connected to the host controller 1210 via an input / output controller 1220. The computer 1200 also includes a ROM 1230. The CPU 1212 operates according to programs stored in the ROM 1230 and RAM 1214, thereby controlling each unit.

[0086] The communication interface 1222 communicates with other electronic devices via a network. A hard disk drive may store programs and data used by the CPU 1212 in the computer 1200. The ROM 1230 stores a boot program executed by the computer 1200 upon activation and / or programs dependent on the computer's hardware. The programs may be provided via a computer-readable recording medium such as a CD-ROM, USB memory, or IC card, or via a network. The programs may be installed in the RAM 1214 or the ROM 1230, which are also examples of computer-readable recording media, and executed by the CPU 1212. The information processing described in these programs is read by the computer 1200 and establishes cooperation between the programs and the various types of hardware resources described above. An apparatus or method may be configured by implementing operations or processing of information in accordance with the use of the computer 1200.

[0087] For example, when communication is performed between computer 1200 and an external device, CPU 1212 may execute a communication program loaded into RAM 1214 and instruct communication interface 1222 to perform communication processing based on the processing described in the communication program. Under the control of CPU 1212, communication interface 1222 reads transmission data stored in a transmission buffer area provided in RAM 1214 or a recording medium such as a USB memory, and transmits the read transmission data to a network, or writes reception data received from the network to a reception buffer area or the like provided on the recording medium.

[0088] The CPU 1212 may also cause all or a necessary portion of a file or database stored on an external recording medium such as a USB memory to be read into the RAM 1214, and perform various types of processing on the data on the RAM 1214. The CPU 1212 may then write the processed data back to the external recording medium.

[0089] Various types of information, such as various types of programs, data, tables, and databases, may be stored on the recording medium and may undergo information processing. The CPU 1212 may perform various types of processing on data read from the RAM 1214, including various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information search / replacement, etc., as described throughout this disclosure and specified by the instruction sequences of the programs, and write the results back to the RAM 1214. The CPU 1212 may also search for information in a file, database, etc. on the recording medium. For example, if multiple entries, each having an attribute value of a first attribute associated with an attribute value of a second attribute, are stored on the recording medium, the CPU 1212 may search for an entry that matches a condition specified by the attribute value of the first attribute from among the multiple entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies a predetermined condition.

[0090] The above-described programs or software modules may be stored in a computer-readable storage medium on or near the computer 1200. A recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can also be used as a computer-readable storage medium, thereby providing the programs to the computer 1200 via the network.

[0091] A computer-readable medium may include any tangible device capable of storing instructions that are executed by an appropriate device. As a result, the computer-readable medium with instructions stored thereon comprises an article of manufacture, including instructions that can be executed to create means for performing the operations specified in the flowchart or block diagram. Examples of computer-readable media may include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, etc. More specific examples of computer-readable media may include floppy disks, diskettes, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), electrically erasable programmable read-only memory (EEPROM), static random access memory (SRAM), compact disc read-only memory (CD-ROM), digital versatile disc (DVD), Blu-ray (RTM) disc, memory stick, integrated circuit card, etc.

[0092] The computer-readable instructions may include either source code or object code written in any combination of one or more programming languages. The source code or object code includes conventional procedural programming languages. The conventional procedural programming languages ​​may be assembler instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state-setting data, or object-oriented programming languages ​​such as Smalltalk®, JAVA®, C++, etc., and the “C” programming language or similar programming languages. The computer-readable instructions may be provided to a processor or programmable circuitry of a general-purpose computer, a special-purpose computer, or other programmable data processing apparatus locally or over a wide-area network (WAN) such as a local area network (LAN), the Internet, etc. The processor or programmable circuitry may execute the computer-readable instructions to create means for performing the operations specified in the flowcharts or block diagrams. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc.

[0093] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.

[0094] It should be noted that the execution order of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order. [Explanation of symbols]

[0095] 10. Imaging device 20 Object 110 control section 111 Location information acquisition unit 112 Target posture information acquisition unit 113 Correction information derivation unit 114 Target position derivation section 115 Output section 120 image sensor 122 PCB 130 Optical system 131 Zoom Lens 133 Focus Lens 135 Image stabilization lens 132, 134, 136 Lens drive unit 140 Storage section 150 Vibration detection unit 200 Image sensor drive unit 210A, 210B, 210C, 210D Electromagnetic Actuators 212A, 212B, 212C, 212D Air-core coil 214A, 214B, 214C, 214D Magnets 220A, 220B, 220C, 220D Integrated Circuits 222A, 224B, 224C, 224D control circuit 224A, 224B, 224C, 224D Position Sensors 1200 Computer 1210 host controller 1212 CPU 1214 RAM 1220 Input / Output Controller 1222 communication interface 1230 ROM

Claims

1. A program for causing a computer to function as a control device that controls m+n control circuits that separately control m+n (m and n are positive integers) actuators that move or rotate a movable member with m degrees of freedom, acquiring position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member; acquiring target attitude information indicating a target attitude of the movable member using m components of degrees of freedom related to the movement or rotation of the movable member; deriving correction information indicating a correction component for correcting an error in a target position of each of the m+n positions of the movable member caused by at least one component of n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one value of m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information; deriving target positions of m+n positions of the movable member based on components of m degrees of freedom indicated in the target attitude information and the correction components indicated in the correction information; outputting target position information indicating each of the target positions to each of the m+n control circuits so as to bring the movable member into a target attitude; A program that causes the computer to execute the above.

2. The program according to claim 1 , wherein the correction components include correction components for each of n degrees of freedom.

3. 3. The program according to claim 2, wherein the step of deriving the correction information includes a step of deriving the correction information according to an algorithm defined by an (m+n) × (m+n) matrix, using m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information as variables.

4. 3. The program according to claim 2, wherein the step of deriving the correction information includes a step of deriving components of m degrees of freedom related to the movement or rotation of the movable member according to a predetermined m×(m+n) matrix using the m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information as variables, deriving m+n variables according to a predetermined (m+n)×m matrix corresponding to the inverse transform of the predetermined m×(m+n) matrix, and deriving the correction information by deriving differences between the m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information and the m+n variables.

5. The program according to claim 1 , wherein the correction component includes a correction component for a sum of components of n degrees of freedom.

6. the detection unit includes m+n position sensors, 6. The program according to claim 1, wherein each of the m+n control circuits and each of the m+n position sensors are integrated to form m+n integrated circuits.

7. each of the m+n actuators is an electromagnetic actuator; The computer program product according to claim 6 , wherein each of the m+n position sensors is a magnetic sensor.

8. 8. The program according to claim 1, wherein each of the m+n control circuits controls each of the m+n actuators independently by PID control based on the respective target positions.

9. m is 3 and n is 1; 9. The program according to claim 1, wherein the m+n actuators are driven to cause the movable member to move along a first direction and a second direction and rotate around a first rotation axis that intersects a plane along the first direction and the second direction.

10. m is 3 and n is 1; 9. The program according to claim 1, wherein the m+n actuators are driven to cause the movable member to move along a first direction and rotate around a first rotation axis and a second rotation axis along a plane intersecting the first direction.

11. m is 1 and n is an integer of 1 or greater; The program according to claim 1 , wherein the movable member moves along a first direction by driving the m+n actuators.

12. A control device that controls m+n control circuits that separately control m+n (m and n are positive integers) actuators that move or rotate a movable member with m degrees of freedom, a position information acquisition unit that acquires position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member; a target attitude information acquisition unit that acquires target attitude information indicating a target attitude of the movable member using components of m degrees of freedom related to the movement or rotation of the movable member; a correction information derivation unit that derives correction information indicating a correction component for correcting an error in a target position of each of the m+n positions of the movable member caused by at least one component of n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one value of m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information; a target position derivation unit that derives target positions of m+n positions of the movable member based on m components of degrees of freedom indicated in the target attitude information and the correction components indicated in the correction information; an output unit that outputs target position information indicating each of the target positions to each of the m+n control circuits so as to bring the movable member into a target attitude; A control device comprising:

13. The control device according to claim 12; An imaging element; an optical system that forms an image of an object on an imaging surface of the imaging element; m+n of the actuators; a detection unit that detects each of the m+n positions of the movable member; Equipped with The imaging device, wherein the movable member is the imaging element or the optical system.

14. the detection unit includes m+n position sensors, each of the m+n actuators is an electromagnetic actuator; The imaging device of claim 13 , wherein each of the m+n position sensors is a magnetic sensor.

15. The imaging device according to claim 14 , wherein each of the m+n control circuits and each of the m+n position sensors are integrated to form m+n integrated circuits.

16. m is 3 and n is 1; the movable member is the imaging element, 16. The imaging device according to claim 13, wherein, when the m+n actuators are driven, the imaging element moves along a first direction and a second direction and rotates about a first rotation axis that intersects with a plane along the first direction and the second direction, thereby performing image shake correction.

17. m is 3 and n is 1; the movable member is the optical system, 16. The imaging device according to claim 13, wherein, by driving the m+n actuators, the optical system moves along a first direction and rotates around a first rotation axis and a second rotation axis along a plane intersecting the first direction, thereby performing at least one of image shake correction and focusing control.

18. m is 1 and n is an integer of 1 or greater; the movable member is the optical system, 16. The imaging device according to claim 13, wherein the m+n actuators are driven to move the optical system along a first direction, thereby performing focus control or zoom control.

19. A control method for controlling m+n (m and n are positive integers) control circuits that separately control m+n actuators that move or rotate a movable member with m degrees of freedom, the method comprising: acquiring position information indicating each of the m+n positions of the movable member from a detection unit that detects each of the m+n positions of the movable member; acquiring target attitude information indicating a target attitude of the movable member using m components of degrees of freedom related to the movement or rotation of the movable member; deriving correction information indicating a correction component for correcting an error in a target position of each of the m+n positions of the movable member caused by at least one component of n degrees of freedom other than the m degrees of freedom related to the movement or rotation of the movable member, based on at least one value of m+n values ​​corresponding to the m+n positions of the movable member indicated in each of the position information; deriving target positions of m+n positions of the movable member based on components of m degrees of freedom indicated in the target attitude information and the correction components indicated in the correction information; outputting target position information indicating each of the target positions to each of the m+n control circuits so as to bring the movable member into a target attitude; A control method comprising:

Images