Acoustic sensor and stethoscope

Abstract

This acoustic sensor (10) is provided with: a piezoelectric plate (30) which includes a conductive plate (32) that has a first surface and a second surface opposite to the first surface and a piezoelectric element (31) that is arranged on the second surface of the conductive plate (32); a cover member (12) which is arranged so as to face the first surface of the conductive plate (32); a support substrate (11) which is arranged so as to face the second surface of the conductive plate (32) and the piezoelectric element (31); a first connection member (21) which is formed from a conductive material, is arranged between the piezoelectric element (31) and the support substrate (11), and electrically connects the piezoelectric element (31) to the support substrate (11); a first insulation member (22) which is formed from an insulating material and is arranged between the second surface of the conductive plate (32) and the support substrate (11) on an outer edge of the second surface of the conductive plate (32); and a second connection member (23) which is formed from a conductive material, is arranged on an outer edge of the first surface of the conductive plate (32), and electrically connects the conductive plate (32) to the cover member (12).

Description

[Technical Field]

[0001] The present invention relates to an acoustic sensor and a stethoscope. [Background technology]

[0002] Patent Document 1 discloses a bioacoustic sensor using a piezoelectric plate and a stethoscope using the same. The stethoscope described in Patent Document 1 has a diaphragm with a contact surface that comes into contact with the living body, a piezoelectric plate that is arranged opposite the diaphragm and converts the vibration of the diaphragm into an electrical signal, and a vibration transmission member that is provided in the center of the piezoelectric plate and transmits the vibration of the diaphragm to the piezoelectric plate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2021 / 106865 Summary of the Invention [Problem to be solved by the invention]

[0004] In Patent Document 1, support members are provided to support the diaphragm and the piezoelectric plate, and a cable is connected to extract the electrical signal from the piezoelectric plate to the outside. An opening must be provided in the housing of the stethoscope to allow the cable to pass through. Therefore, in Patent Document 1, there is a possibility that the degree of freedom in the shape and arrangement of the diaphragm and the piezoelectric plate may be reduced.

[0005] An object of the present invention is to provide an acoustic sensor and a stethoscope that can detect vibrations well with a simple configuration. [Means for solving the problem]

[0006] An acoustic sensor according to one aspect of the present invention includes: a piezoelectric plate including a conductor plate having a first surface and a second surface opposite to the first surface; a piezoelectric element provided on the second surface of the conductor plate; a cover member arranged opposite the first surface of the conductor plate; a support substrate arranged opposite the second surface of the conductor plate and the piezoelectric element; a first connecting member made of a conductor and provided between the piezoelectric element and the support substrate, electrically connecting the piezoelectric element and the support substrate; a first insulating member made of an insulator and provided at an outer edge of the second surface of the conductor plate between the second surface of the conductor plate and the support substrate; and a second connecting member made of a conductor and provided at the outer edge of the first surface of the conductor plate, electrically connecting the conductor plate and the cover substrate.

[0007] A stethoscope according to one aspect of the present invention includes the above-described acoustic sensor, a chest piece incorporating the acoustic sensor, and ear tips connected to the chest piece that output to the outside a sound generated based on an electrical signal from the piezoelectric plate of the acoustic sensor. [Effects of the Invention]

[0008] According to the acoustic sensor and stethoscope of the present invention, vibrations can be detected well with a simple configuration. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is an exploded perspective view schematically illustrating the configuration of the acoustic sensor according to the first embodiment. [Figure 2] FIG. 2 is a plan view schematically showing a part of the acoustic sensor according to the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III' in FIG. [Figure 4] FIG. 4 is a graph showing the relationship between frequency and sensitivity of the acoustic sensor according to the example for each hardness ratio between the connecting member and the insulating member. [Figure 5] FIG. 5 is a graph showing the relationship between the hardness ratio of the connecting member and the insulating member and the sensitivity of the acoustic sensor according to the example. [Figure 6]FIG. 6 is an exploded perspective view schematically illustrating the configuration of the acoustic sensor according to the second embodiment. [Figure 7] FIG. 7 is a cross-sectional view schematically illustrating the configuration of the acoustic sensor according to the second embodiment. [Figure 8] FIG. 8 is an exploded perspective view schematically illustrating the configuration of the acoustic sensor according to the third embodiment. [Figure 9] FIG. 9 is a plan view schematically showing the configuration of a support substrate according to the third embodiment. [Figure 10] FIG. 10 is a plan view schematically showing the configuration of the back surface side of the support substrate according to the third embodiment. [Figure 11] FIG. 11 is a cross-sectional view taken along the line XI-XI' in FIG. [Figure 12] FIG. 12 is a circuit diagram showing an example of the configuration of a detection circuit of the acoustic sensor according to the third embodiment. [Figure 13] FIG. 13 is an explanatory diagram for explaining a stethoscope according to the fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Below, embodiments of the acoustic sensor and stethoscope of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to these embodiments. Each embodiment is an example, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. From the second embodiment onwards, description of matters common to the first embodiment will be omitted, and only the differences will be described. In particular, similar effects resulting from similar configurations will not be mentioned in each embodiment.

[0011] (First embodiment) Fig. 1 is an exploded perspective view schematically showing the configuration of the acoustic sensor according to the first embodiment. Fig. 2 is a plan view schematically showing a part of the acoustic sensor according to the first embodiment. Fig. 3 is a cross-sectional view taken along line III-III' in Fig. 2. Note that in Fig. 2, the support substrate 11 and the cover member 12 are omitted, and the first connecting member 21 and the second connecting member 23 are shown with diagonal lines.

[0012] 1 and 3, the acoustic sensor 10 includes a piezoelectric plate 30, a support substrate 11, a cover member 12, signal lines 13 and 14, a first connecting member 21, a first insulating member 22, a second connecting member 23, and a second insulating member 24. The first connecting member 21 and the first insulating member 22, the piezoelectric plate 30, the second connecting member 23 and the second insulating member 24, and the cover member 12 are stacked on the support substrate 11 in this order.

[0013] In the following description, a direction in a plane parallel to a plane including the surface 11a of the support substrate 11 is referred to as a first direction Dx. A direction perpendicular to the first direction Dx in a plane parallel to the plane including the surface 11a is referred to as a second direction Dy. A direction perpendicular to each of the first direction Dx and the second direction Dy is referred to as a third direction Dz. The third direction Dz is the normal direction of the surface 11a of the support substrate 11. In this specification, a plan view refers to a positional relationship when viewed from the third direction Dz.

[0014] The piezoelectric plate 30 is a sensor element that converts vibrations of a detection target (e.g., a human) into a corresponding electrical signal. Specifically, as shown in Fig. 3, the piezoelectric plate 30 has a piezoelectric element 31 and a conductor plate 32. The conductor plate 32 is a plate-shaped member made of a conductor such as a metal material, and has a first surface 32a and a second surface 32b opposite to the first surface 32a. The piezoelectric element 31 is provided on the second surface 32b of the conductor plate 32. For the piezoelectric element 31, a piezoelectric ceramic such as PZT is used.

[0015] The cover member 12 is disposed opposite the first surface 32a of the conductor plate 32. The cover member 12 is a plate-like member made of a conductive material such as a metal material. The cover member 12 is a member that transmits vibrations of the object to be detected (not shown) to the piezoelectric plate 30, and is made of a material that is substantially not compressively deformed. The cover member 12 may be in direct contact with the object to be detected, or may be in contact with the object to be detected via another member such as a protective layer.

[0016] The support substrate 11 is disposed opposite the second surface 32b of the conductor plate 32 and the piezoelectric elements 31. The support substrate 11 is a plate-like member having a front surface 11a (the surface facing the piezoelectric elements 31) and a back surface 11b (the surface opposite the surface facing the piezoelectric elements 31) opposite the front surface 11a. The support substrate 11 is a conductor and is formed of a conductive material such as a metal material. The support substrate 11 has higher rigidity than the piezoelectric plate 30 and is configured not to deform due to vibration of the object to be detected or to suppress deformation due to vibration of the object to be detected.

[0017] The first connecting member 21 and the first insulating member 22 are provided between the piezoelectric plate 30 and the support substrate 11 in the third direction Dz. Specifically, the first connecting member 21 is a columnar member, and is provided between the piezoelectric element 31 and the support substrate 11. One end side of the first connecting member 21 in the third direction Dz contacts the piezoelectric element 31, and the other end side in the third direction Dz contacts the support substrate 11. The first connecting member 21 is formed of a conductor, and electrically connects the piezoelectric element 31 and the support substrate 11.

[0018] The first insulating member 22 is formed of an insulator and is provided on the outer edge of the second surface 32b of the conductive plate 32, between the second surface 32b of the conductive plate 32 and the support substrate 11. The first insulating member 22 is also arranged so as to overlap with part of the outer edge of the piezoelectric element 31. The first insulating member 22 is an annular member with an opening OP provided in the center, and the first connecting member 21 is provided at a position overlapping with the opening OP of the first insulating member 22. The first insulating member 22 may also be arranged so as not to overlap with the outer edge of the piezoelectric element 31.

[0019] The second connecting member 23 and the second insulating member 24 are provided between the piezoelectric plate 30 and the cover member 12 in the third direction Dz. The second connecting member 23 is formed of a conductor and electrically connects the conductor plate 32 and the cover member 12. Specifically, the second connecting member 23 is an annular member and is provided on the outer edge of the first surface 32a of the conductor plate 32. One end side of the second connecting member 23 in the third direction Dz contacts the cover member 12, and the other end side of the second connecting member 23 in the third direction Dz contacts the first surface 32a of the conductor plate 32.

[0020] The second insulating member 24 is formed of an insulator and is provided in the center of the first surface 32a of the conductive plate 32, between the first surface 32a of the conductive plate 32 and the cover member 12. The second insulating member 24 is provided closer to the center than the second connecting member 23, and is disposed within the area surrounded by the second connecting member 23.

[0021] As shown in FIG. 2, each component of the acoustic sensor 10 (piezoelectric plate 30, first connecting member 21, first insulating member 22, second connecting member 23, second insulating member 24) is circular in plan view and is arranged concentrically with respect to the center 32c of the conductive plate 32.

[0022] The diameter of the first connecting member 21 is smaller than the diameter of the piezoelectric element 31. The outer diameter of the first insulating member 22 is approximately equal to the diameter of the conductive plate 32. The first insulating member 22 is provided along the entire circumference of the outer edge of the second surface 32b of the conductive plate 32, and is arranged to surround the first connecting member 21. The diameter of the opening OP of the first insulating member 22 (the inner diameter of the first insulating member 22) is larger than the diameter of the first connecting member 21. In other words, the first insulating member 22 is provided at a distance from the first connecting member 21 in the radial direction. Furthermore, the inner edge that forms the opening OP of the first insulating member 22 is provided to cover the entire circumference of the outer edge of the piezoelectric element 31.

[0023] The second connecting member 23 is provided along the entire outer periphery of the first surface 32a of the conductive plate 32. The outer diameter of the second connecting member 23 is approximately equal to the diameter of the conductive plate 32. The inner diameter of the second connecting member 23 is larger than the diameter of the first connecting member 21 and the diameter of the piezoelectric element 31. In this embodiment, the diameter of the second insulating member 24 is approximately equal to the inner diameter of the second connecting member 23. The second insulating member 24 is provided in a region that overlaps with the opening OP of the piezoelectric element 31, the first connecting member 21, and the first insulating member 22 in a plan view. The outer periphery of the second insulating member 24 is provided in contact with the inner periphery of the second connecting member 23. However, this is not limited thereto, and the diameter of the second insulating member 24 may be smaller than the inner diameter of the second connecting member 23, or the outer periphery of the second insulating member 24 may be separated from the inner periphery of the second connecting member 23 with a space therebetween.

[0024] 2, as shown in FIGS. 1 and 3, the diameter of the support substrate 11 and the diameter of the cover member 12 are equal to the diameter of the conductor plate 32 of the piezoelectric plate 30. However, without being limited to this, the diameter of the support substrate 11 and the diameter of the cover member 12 may be larger than the diameter of the conductor plate 32 of the piezoelectric plate 30. Furthermore, the diameter of the support substrate 11 and the diameter of the cover member 12 may be equal to or different from each other.

[0025] Next, examples of materials for the first connecting member 21, the first insulating member 22, the second connecting member 23, and the second insulating member 24 will be described. The hardness of the first connecting member 21 is harder than the hardness of the first insulating member 22. Specifically, the material for the first connecting member 21 is carbon-based silicone, urethane foam, polybutadiene, or the like. The material for the first connecting member 21 is preferably a closed-cell structure. The hardness of the first connecting member 21 is approximately Shore hardness A70. The volume resistivity of the first connecting member 21 is 1×10 -2 (Ω m) or more, 1×10 2 (Ω·m) or less.

[0026] The material of the first insulating member 22 is a PET film, natural rubber (NR), or chloroprene rubber. (CR), polyethylene (PE), ethylene propylene rubber (EPDM), acrylic, etc. The material of the first insulating member 22 is preferably a closed-cell structure. The hardness of the first insulating member 22 is approximately Shore hardness A20. The volume resistivity of the first insulating member 22 is 1×10 -26 (Ω m) or more, 1×10 10 (Ω·m) or less.

[0027] The second connecting member 23 is made of the same material as the first connecting member 21 described above, and the second insulating member 24 is made of the same material as the first insulating member 22 described above. That is, the hardness of the second connecting member 23 is harder than the hardness of the second insulating member 24. Material examples, hardness, and volume resistivity of the second connecting member 23 are the same as those of the first connecting member 21 described above, and therefore repeated description will be omitted. Material examples, hardness, and volume resistivity of the second insulating member 24 are the same as those of the first insulating member 22 described above, and therefore repeated description will be omitted. The second connecting member 23 may be made of the same material as the first connecting member 21, or may be made of a different material. The second insulating member 24 may be made of the same material as the first insulating member 22, or may be made of a different material. For example, the second insulating member 24 may be made of an air layer.

[0028] With this configuration, on the first surface 32a side of the conductive plate 32, the second connecting member 23, which is harder than the second insulating member 24, is formed in a ring shape along the outer edge of the conductive plate 32. When the cover member 12 vibrates due to vibration of the object to be detected and is repeatedly displaced in the third direction Dz, the displacement of the cover member 12 is transmitted mainly via the second connecting member 23, which is harder than the second insulating member 24, to the outer edge of the piezoelectric plate 30, i.e., the outer edge of the conductive plate 32.

[0029] On the second surface 32b side of the conductor plate 32, a first insulating member 22 is provided in an area overlapping with the second connecting member 23, and a first connecting member 21 harder than the first insulating member 22 is provided in the central portion of the piezoelectric element 31. Therefore, the central portion of the piezoelectric element 31 is supported by the first insulating member 22 and is suppressed from displacement, while the outer edge side of the conductor plate 32 and the outer edge side of the piezoelectric element 31 are more likely to displace than the central portion of the piezoelectric element 31 due to elastic deformation of the first insulating member 22. Therefore, when displacement of the cover member 12 is transmitted via the second connecting member 23, the outer edge side of the conductor plate 32 and the outer edge side of the piezoelectric element 31 are displaced, causing the piezoelectric element 31 to flex and deform.

[0030] The piezoelectric element 31 outputs an electric signal corresponding to the deformation. The electric signal from the piezoelectric element 31 is output to an external terminal (for example, detection circuits 50, 50A (see FIGS. 6 and 12)) via the first connecting member 21, the support substrate 11, and the signal line 13. The electric signal from the conductor plate 32 is output to the external terminal via the second connecting member 23, the cover member 12, and the signal line 14.

[0031] In this way, the first connecting member 21 supports the center of the piezoelectric plate 30, and the second connecting member 23 transmits vibrations of the object to be detected to the outer edge of the piezoelectric plate 30. Furthermore, the first connecting member 21 and the second connecting member 23 also serve as electrical connecting members that output electrical signals from the piezoelectric plate 30 to the outside. Therefore, it is not necessary to connect a cable to the piezoelectric element 31 and the conductor plate 32 to extract the electrical signal to the outside. As a result, it is not necessary to form a through hole in the support substrate 11 and the cover member 12 to pass the cable through. Therefore, the acoustic sensor 10 can be configured more simply than when a cable is connected to the piezoelectric plate 30. As a result, the acoustic sensor 10 can be configured more compactly, including the wiring connected to the piezoelectric plate 30 and external circuits (e.g., the detection circuit 50 (see FIG. 6, etc.)).

[0032] Furthermore, since there is no need to form through holes in the support substrate 11 and the cover member 12 for passing cables through, the first surface 32a side of the conductor plate 32 can be easily sealed by the second connecting member 23, the second insulating member 24, and the cover member 12. Furthermore, the second surface 32b side of the conductor plate 32 can be easily sealed by the first connecting member 21, the first insulating member 22, and the support substrate 11. Therefore, the acoustic sensor 10 can have a liquid-tight structure in which both sides of the piezoelectric plate 30 are sealed, as necessary.

[0033] As described above, the second connecting member 23, which is harder than the second insulating member 24, is formed in an annular shape on the first surface 32a side of the conductive plate 32. Furthermore, the first connecting member 21, which is harder than the first insulating member 22, is provided in the center of the piezoelectric element 31 on the second surface 32b side of the conductive plate 32. This makes it easier for the piezoelectric element 31 to deform in the compression direction when the cover member 12 vibrates due to vibration of the object to be detected. Therefore, the acoustic sensor 10 can improve the resistance of the piezoelectric element 31 to excessive bending deformation compared to a structure in which the piezoelectric element 31 is deformed in the tensile direction.

[0034] (Example) Fig. 4 is a graph showing the relationship between frequency and sensitivity for each hardness ratio between the connecting member and the insulating member of the acoustic sensor according to the example. Fig. 5 is a graph showing the relationship between the hardness ratio between the connecting member and the insulating member and sensitivity for the acoustic sensor according to the example.

[0035] 4 and 5 show simulation results of the sensitivity (output voltage) of the piezoelectric plate 30 for each frequency and for each hardness ratio between the connecting member and the insulating member. The frequencies in FIGS. 4 and 5 are the driving frequencies of the displacements applied to the cover member 12. The hardness ratios in FIGS. 4 and 5 indicate the ratio (SH2 / SH1) of the hardness of the first insulating member 22 (hereinafter referred to as Shore hardness SH2) to the hardness of the first connecting member 21 (hereinafter referred to as Shore hardness SH1). The hardness and hardness ratio of the second connecting member 23 and the second insulating member 24 are assumed to be the same as those of the first connecting member 21 and the first insulating member 22, respectively.

[0036] 4 and 5, the diameter of the piezoelectric plate 30 (the diameter of the conductor plate 32) was set to 15 mm. The first connecting member 21 was made of a conductive material with a diameter of 9 mm, a thickness of 1 mm, and a Shore hardness of A70. The first insulating member 22 was made of an insulating material with an outer diameter of 20 mm, an inner diameter of 10 mm, a thickness of 1 mm, and an Shore hardness of A20.

[0037] The second connecting member 23 is made of a conductive material with an outer diameter of 20 mm, an inner diameter of 10 mm, a thickness of 1 mm, and a Shore hardness of A70. The second insulating member 24 is made of an insulating material with a diameter of 9 mm, a thickness of 1 mm, and a Shore hardness of A20.

[0038] The support substrate 11 and the cover member 12 were each made of a metal plate having a diameter of 20 mm and a thickness of 0.5 mm.

[0039] 4 shows the sensitivity (output voltage) of the piezoelectric plate 30 in the acoustic sensor 10 according to the embodiment when the hardness ratio SH2 / SH1 is changed to 0.5, 1.0, and 2.0. As shown in FIG. 4, the piezoelectric plate 30 exhibits a constant sensitivity (output voltage) with respect to changes in frequency. Furthermore, the piezoelectric plate 30 exhibits different sensitivity (output voltage) for each hardness ratio SH2 / SH1.

[0040] Fig. 4 shows the sensitivity (output voltage) of the piezoelectric plate 30 when the frequency is constant at 505 Hz. As shown in Fig. 5, the sensitivity (output voltage) changes as the hardness ratio SH2 / SH1 changes. When the hardness ratio SH2 / SH1 is in the range where SH2 / SH1>1, i.e., when the hardness of the first insulating member 22 is harder than the hardness of the first connecting member 21, the sensitivity (output voltage) increases as the hardness ratio SH2 / SH1 increases. However, when SH2 / SH1>1, deformation in the tensile direction occurs in the piezoelectric element 31, which may reduce durability.

[0041] In the region where SH2 / SH1<1, where relatively high durability is obtained, that is, when the hardness of the first connecting member 21 is harder than the hardness of the first insulating member 22, the sensitivity at a hardness ratio of SH2 / SH1=0.9 is about 1.4 times higher than the sensitivity at a hardness ratio of SH2 / SH1=1. As described above, in the acoustic sensor 10 according to the example, it was shown that by setting the hardness ratio SH2 / SH1<0.9, the durability of the piezoelectric element 31 was improved and good sensitivity (output voltage) was obtained.

[0042] (Second embodiment) Fig. 6 is an exploded perspective view schematically showing the configuration of an acoustic sensor according to a second embodiment. Fig. 7 is a cross-sectional view schematically showing the configuration of an acoustic sensor according to the second embodiment. In the second embodiment, unlike the first embodiment described above, a configuration will be described in which the support substrate 11A is an insulating substrate made of an insulator.

[0043] As shown in FIGS. 6 and 7, in an acoustic sensor 10A according to the second embodiment, a printed wiring board is used as the support substrate 11A. The support substrate 11A has an insulating resin material as a base and has a conductive member 15a inside. In the example shown in FIGS. 6 and 7, the support substrate 11A is provided with a contact hole 15 that penetrates from a front surface 11Aa (the surface facing the piezoelectric elements 31) to a back surface 11Ab (the surface opposite the surface facing the piezoelectric elements 31). The conductive member 15a fills the contact hole 15 and electrically connects the front surface 11Aa side and the back surface 11Ab side.

[0044] One end of the contact hole 15 (conductive member 15a) is electrically connected to the first connection member 21 on the front surface 11Aa of the support substrate 11A. The other end of the contact hole 15 (conductive member 15a) is electrically connected to the connection wiring 16 on the back surface 11Ab of the support substrate 11A. As a result, the piezoelectric element 31 of the piezoelectric plate 30 is electrically connected to the back surface 11Ab of the support substrate 11A via the first connection member 21 and the contact hole 15 (conductive member 15a).

[0045] 6, the acoustic sensor 10A of the second embodiment has a detection circuit 50 (not shown in FIG. 7) provided on the back surface 11Ab of the support substrate 11A. The detection circuit 50 is configured, for example, by an IC (Integrated Circuit), and is a circuit that processes the electrical signal from the piezoelectric plate 30.

[0046] In the acoustic sensor 10A of this embodiment, by using an insulating substrate as the support substrate 11A, the support substrate 11A serves both as a substrate that supports the piezoelectric plate 30 and as a wiring substrate on which various wires such as the connection wires 16 and components such as the detection circuit 50 are mounted. Therefore, the acoustic sensor 10A can be made smaller in overall configuration, including the detection circuit 50.

[0047] The support substrate 11A is not limited to a configuration including the connection wiring 16, the contact hole 15, and the conductive member 15a, and may include wiring provided in an inner layer, a plurality of contact holes, and conductive members. Furthermore, the back surface 11Ab of the support substrate 11A may be provided with other mounted components and circuits, not limited to the detection circuit 50.

[0048] (Third embodiment) Fig. 8 is an exploded perspective view schematically showing the configuration of an acoustic sensor according to a third embodiment. Fig. 9 is a plan view schematically showing the configuration of a support substrate according to the third embodiment. Fig. 10 is a plan view schematically showing the configuration of the back surface side of the support substrate according to the third embodiment. Fig. 11 is a cross-sectional view taken along line XI-XI' in Fig. 9.

[0049] In the third embodiment, unlike the first and second embodiments described above, a configuration will be described in which an acoustic sensor 10B has a third connection member 25 that electrically connects a support substrate 11B and a cover member 12.

[0050] 8 and 11, in an acoustic sensor 10B according to the third embodiment, the support substrate 11B and the cover member 12 have a diameter (external shape) larger than that of the conductor plate 32 of the piezoelectric plate 30. The support substrate 11B is an insulating substrate made of an insulator, as in the second embodiment. Also, as in the second embodiment, the piezoelectric element 31 of the piezoelectric plate 30 is electrically connected to the back surface 11Bb side of the support substrate 11B via the first connection member 21 and the contact hole 15 (conductive member 15a).

[0051] The cover member 12 is a film-like member made of a conductive material. As in the first and second embodiments described above, the conductor plate 32 of the piezoelectric plate 30 is electrically connected to the cover member 12 via the second connecting member 23.

[0052] The third connecting member 25 is formed of a conductor and is provided outside the outer periphery of the conductor plate 32 of the piezoelectric plate 30, and electrically connects the support substrate 11B and the cover member 12. More specifically, as shown in Fig. 11, the third connecting member 25 is annular and surrounds the piezoelectric plate 30, the first connecting member 21, the first insulating member 22, the second connecting member 23, and the second insulating member 24. The third connecting member 25 is annularly provided along the entire periphery of the outer edge of the support substrate 11B. The third connecting member 25 is also disposed apart from the outer peripheries of the conductor plate 32 of the piezoelectric plate 30, the first insulating member 22, and the second connecting member 23 with a space therebetween.

[0053] One end side of the third connection member 25 in the third direction Dz contacts the cover member 12, and the other end side of the third connection member 25 in the third direction Dz is electrically connected to the surface 11Ba side of the support substrate 11B via the connection wiring 18.

[0054] 9, the connection wiring 18 is provided in a ring shape in a region overlapping with the third connection member 25, i.e., along the entire periphery of the outer edge of the front surface 11Ba of the support substrate 11B. A contact hole 17 penetrating the front surface 11Ba and the back surface 11Bb is provided in the support substrate 11B at a position overlapping with the connection wiring 18. A conductive member 17a is filled in the contact hole 17, and electrically connects the front surface 11Ba side and the back surface 11Bb side.

[0055] Furthermore, similarly to the second embodiment described above, the first connection member 21 is electrically connected to the rear surface 11Bb side of the support substrate 11B through the contact hole 15 (conductive member 15a) in the center of the support substrate 11B.

[0056] 10, a detection circuit 50A is provided on the back surface 11Bb of the support substrate 11B. The third connection member 25 is electrically connected to the detection circuit 50A via the contact hole 17 (conductive member 17a) and wiring provided on the back surface 11Bb. The first connection member 21 is electrically connected to the detection circuit 50A via the contact hole 15 (conductive member 15a) and wiring provided on the back surface 11Bb. A detailed configuration example of the detection circuit 50A will be described later with reference to FIG. 12.

[0057] With the above-described configuration, the piezoelectric element 31 of the piezoelectric plate 30 is electrically connected to the detection circuit 50A on the rear surface 11Bb of the support substrate 11B via the first connecting member 21 and the contact hole 15 (conductive member 15a). The conductor plate 32 of the piezoelectric plate 30 is electrically connected to the detection circuit 50A on the rear surface 11Bb of the support substrate 11B via the second connecting member 23, the cover member 12, the third connecting member 25, the connection wiring 18, and the contact hole 17 (conductive member 17a). Even in the configuration in which the third connecting member 25 is provided, the cover member 12 is formed of a deformable film-like member, so that vibrations of the object to be detected are transmitted well to the piezoelectric plate 30 via the cover member 12 and the second connecting member 23.

[0058] The support substrate 11B also has connection portions 19 that protrude radially outward from the outer periphery. The detection circuit 50A is electrically connected to an external control board via a plurality of connection wires 16 provided on the connection portions 19. The plurality of connection wires 16 include, for example, a ground line 16a that supplies a ground potential to the piezoelectric plate 30, a signal line 16b that outputs a signal from the piezoelectric plate 30 via the detection circuit 50A, and a power line 16c that supplies a power supply potential to the detection circuit 50A.

[0059] Fig. 12 is a circuit diagram showing an example of the configuration of a detection circuit of an acoustic sensor according to the third embodiment. As shown in Fig. 12, a detection circuit 50A has a protection circuit 51, an active filter 52, a constant voltage circuit 53, and a signal processing circuit 54. The protection circuit 51 is a circuit for protecting the piezoelectric plate 30 from overvoltage and the like, and has diodes 51a and 51b electrically connected to the piezoelectric plate 30.

[0060] The active filter 52 is a filter circuit that passes signals from the piezoelectric plate 30 within a predetermined frequency range, and includes an amplifier 52a, resistor elements 52b and 52c, and a capacitor 52d. In FIG. 12, the active filter 52 is configured as a low-pass filter. However, the active filter 52 may be a high-pass filter or a band-pass filter. Furthermore, the active filter 52 is not limited to the active filter 52, and a passive filter may be provided, or simply an amplifier 52a may be connected. The number of stages of the active filter 52 is also not limited to one, and multiple stages may be connected.

[0061] The constant voltage circuit 53 is a circuit that supplies a constant voltage to the amplifier 52a of the active filter 52, and includes resistance elements 53a and 53b.

[0062] The signal processing circuit 54 is a circuit that processes signals from the piezoelectric plate 30, and includes an A / D conversion circuit 54a and a signal processing unit 54b. The A / D conversion circuit 54a is a circuit that converts analog signals from the piezoelectric plate 30 into digital signals. The signal processing unit 54b is a circuit that receives the digital signals from the A / D conversion circuit 54a and performs signal processing such as amplification and filtering.

[0063] 10, the protection circuit 51, the active filter 52, and the constant voltage circuit 53 of the detection circuit 50A are provided on the back surface 11Bb of the support substrate 11B, and the signal processing circuit 54 is provided on an external control board. In this case, the signal line 16b (see FIG. 10) provided on the connection portion 19 is provided as wiring for extracting an analog signal from the active filter 52.

[0064] However, without being limited to this, the entire detection circuit 50A including the signal processing circuit 54 may be provided on the back surface 11Bb of the support substrate 11B. In this case, the signal line 16b (see FIG. 10) provided on the connection portion 19 is configured as a plurality of digital I / F signal input / output terminals rather than an analog signal output. Specifically, a serial port such as SPI, I2C, USB, or UART, or a parallel port is provided as the digital I / F signal input / output terminal.

[0065] Alternatively, a part of the detection circuit 50A may be provided on the front surface 11Ba of the support substrate 11B. Also, auxiliary circuits and components for stable operation of the circuit, such as a temperature sensor for temperature compensation, may be mounted on the back surface 11Bb of the support substrate 11B.

[0066] As described above, in the acoustic sensor 10B according to the third embodiment, the cover member 12 is electrically connected to the support substrate 11B via the third connecting member 25. Therefore, the detection circuit 50A and various wirings can be provided together on the support substrate 11B, and the entire acoustic sensor 10B including the detection circuit 50A and various wirings can be made smaller.

[0067] (Fourth embodiment) The acoustic sensors 10, 10A, and 10B of the above-described embodiments can be used, for example, in a digital stethoscope. Fig. 13 is an explanatory diagram for explaining a stethoscope according to a fourth embodiment. As shown in Fig. 13, the stethoscope 100 according to the fourth embodiment has a chest piece 101, a Y-shaped tube 103, two ear tubes 104, and two ear tips 105.

[0068] The chestpiece 101 has a housing 101a and a contact portion 101b. The acoustic sensors 10, 10A, and 10B are incorporated inside the housing 101a. The contact portion 101b is a member that comes into contact with a living body (e.g., a human) and is configured to transmit vibrations from the living body to a cover member 12 (see FIG. 1, etc.). Although not shown, the chestpiece 101 of the stethoscope 100 includes a signal processing circuit, an amplifier, a speaker, and the like that converts electrical signals from the piezoelectric plates 30 of the acoustic sensors 10, 10A, and 10B into audio. The stethoscope 100 may also include a wireless communication module that transmits electrical signals from the piezoelectric plates 30 of the acoustic sensors 10, 10A, and 10B to an external device, as needed.

[0069] The Y-shaped tube 103 connects the chest piece 101 to two ear tubes 104. Two ear tips 105 are connected to the two ear tubes 104, respectively. Sound generated based on the electrical signal from the piezoelectric plate 30 of the acoustic sensor 10, 10A, 10B is output to the outside via the two ear tips 105.

[0070] Stethoscope 100 is configured with acoustic sensors 10, 10A, and 10B, which allows for a smaller chestpiece 101. Furthermore, acoustic sensors 10, 10A, and 10B can have a liquid-tight structure in which both sides of piezoelectric plate 30 are sealed, so stethoscope 100 with acoustic sensors 10, 10A, and 10B can prevent damage to piezoelectric plate 30 and detection circuits 50 and 50A due to intrusion of moisture or disinfectant.

[0071] In the fourth embodiment, the stethoscope 100 having the acoustic sensors 10, 10A, and 10B has been described, but the acoustic sensors 10, 10A, and 10B can be applied to devices other than the stethoscope 100. For example, the acoustic sensors 10, 10A, and 10B may be applied to a heart sound sensor that is kept attached to a living body for a long period of time in order to monitor heart sounds.

[0072] The above-described embodiments and modifications are merely examples and can be modified as appropriate. For example, the piezoelectric plate 30, the support substrate 11, and the cover member 12 are circular in plan view, but are not limited thereto, and the piezoelectric plate 30, the support substrate 11, and the cover member 12 may be other shapes, such as a square or polygonal shape.

[0073] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The present invention may be modified or improved without departing from the spirit and scope of the present invention, and equivalents thereof are also included in the present invention. [Explanation of symbols]

[0074] 10, 10A Acoustic Sensor 11, 11A, 11B Support board 11a, 11Aa, 11Ba surface 11b, 11Ab, 11Bb Back side 12 Cover member 13, 14 signal lines 15, 17 Contact holes 15a, 17a Conductive member 16 Connection wiring 18 Connection wiring 19 Connection 21 first connecting member 22 First insulating member 23 Second connecting member 24 Second insulating member 25 Third connecting member 30 Piezoelectric plate 31 Piezoelectric element 32 Conductor plate 32a 1st page 32b 2nd side 50 Detection circuit 100 stethoscopes 101 Chest Piece 101a enclosure 101b Contact part 105 ear tips

Claims

1. a piezoelectric plate including a conductor plate having a first surface and a second surface opposite to the first surface, and a piezoelectric element provided on the second surface of the conductor plate; a cover member disposed opposite the first surface of the conductive plate; a support substrate disposed opposite the second surface of the conductor plate and the piezoelectric element; a first connection member formed of a conductor and provided between the piezoelectric element and the support substrate, electrically connecting the piezoelectric element and the support substrate; a first insulating member formed of an insulator and provided at an outer edge of the second surface of the conductive plate between the second surface of the conductive plate and the support substrate; a second connection member formed of a conductor and provided on an outer edge of the first surface of the conductor plate, electrically connecting the conductor plate and the cover member; Acoustic sensor.

2. 2. The acoustic sensor according to claim 1, The hardness of the first connecting member is greater than the hardness of the first insulating member. Acoustic sensor.

3. 2. The acoustic sensor according to claim 1, a second insulating member formed of an insulator and provided on the first surface of the conductive plate closer to a center than the second connecting member and between the conductive plate and the cover member; The hardness of the second connecting member is greater than the hardness of the second insulating member. Acoustic sensor.

4. 2. The acoustic sensor according to claim 1, the first insulating member is provided along the entire periphery of the outer edge of the second surface of the conductive plate, The second connection member is provided along the entire periphery of the outer edge of the first surface of the conductive plate. Acoustic sensor.

5. 2. The acoustic sensor according to claim 1, The support substrate is formed of a conductor. Acoustic sensor.

6. 2. The acoustic sensor according to claim 1, the support substrate is an insulating substrate made of an insulator, a conductive member provided inside the support substrate and electrically connecting a surface of the support substrate facing the piezoelectric element to a surface opposite to the surface facing the piezoelectric element; The conductive member is electrically connected to the first connecting member on a surface of the support substrate facing the piezoelectric element. Acoustic sensor.

7. 7. The acoustic sensor according to claim 6, the support substrate and the cover member have outer shapes larger than the piezoelectric plate in a plan view, a third connection member formed of a conductor and provided outside the outer periphery of the conductor plate of the piezoelectric plate, electrically connecting the support substrate and the cover member; Acoustic sensor.

8. The acoustic sensor according to any one of claims 1 to 7; a chest piece incorporating the acoustic sensor; an ear tip connected to the chest piece and configured to output to the outside a sound generated based on an electrical signal from the piezoelectric plate of the acoustic sensor; Stethoscope.

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