Peeling device

Abstract

To detect the state of separation between two workpieces without opening the chamber when two workpieces are separated from each other in a chamber. [Solution] In the peeling device, the chamber mechanism uses the elasticity of the sealing portion to change the relative position of the second chamber forming portion with respect to the first chamber forming portion between a first position and a second position while maintaining the first and second chamber forming portions in a combined state. The peeling mechanism enables two bonded workpieces to be peeled by growing a cleavage between their bonded surfaces within the chamber. It uses the internal pressure of the chamber to generate a pressure difference between the front and back of one of the workpieces, making the bonded surface of the workpiece positive pressure, and expands the area where this pressure difference occurs to grow the cleavage. The control device detects the state of peeling between the two workpieces based on the output of a displacement sensor that detects the relative position of the second chamber forming portion.

Description

[Technical Field]

[0001] The present invention relates to a technique for detecting a peeling state between two workpieces. [Background technology]

[0002] Patent Document 1 discloses a delamination device that delaminates a support substrate from a wafer in a chamber. In this delamination device, a cleft is created between the wafer and part of the outer periphery of the support substrate, which serves as a starting point for growing a cleavage. Then, a pad with multiple suction holes is used to apply moderate pressure to the support substrate, and the internal pressure of the chamber is increased in this state. Then, starting from the cleft, a pressure difference is generated between the front and back of the support substrate by suction using the holes in the pad. This lifts the support substrate while compressing and deforming the pad, growing a cleavage between the support substrate and the wafer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6377956 Summary of the Invention [Problem to be solved by the invention]

[0004] On the other hand, in the above-described delamination apparatus, the growth of the cleavage may be stopped midway during the delamination process for some reason. In this case, the delamination state between the wafer and the support substrate is such that the support substrate is partially left undetached from the wafer (a state in which delamination failure has occurred). However, in the past, it was not possible to confirm the state of delamination between the wafer and the support substrate until the chamber was opened. Therefore, if an attempt was made to retry delamination of the defective portion using the same delamination apparatus after the occurrence of delamination failure was discovered, it was necessary to start over from the formation of the chamber, which resulted in a problem of significantly increasing running costs.

[0005] SUMMARY OF THE INVENTION It is therefore an object of the present invention to enable, when two workpieces are to be separated from each other within a chamber, the state of separation between the two workpieces to be detected without opening the chamber. [Means for solving the problem]

[0006] A peeling device according to the present invention has the following configuration (Aspect 1). The peeling device includes a chamber mechanism, a peeling mechanism, a displacement sensor, and a control device. The chamber mechanism includes a first chamber forming unit and a second chamber forming unit. These chamber forming units are capable of changing their relative positional relationship in a first direction and form a chamber by combining via an elastic seal unit. The chamber mechanism can change the relative position of the second chamber forming unit with respect to the first chamber forming unit between a first position and a second position further away from the first chamber forming unit while maintaining the combined state of the chamber forming units by utilizing the elasticity of the seal unit. The peeling mechanism enables two bonded workpieces to be separated by growing a cleavage between their bonded surfaces within a chamber. The peeling mechanism uses the internal pressure of the chamber to generate a pressure difference between the front and back of one of the workpieces, making the bonded surface side of the workpiece positive pressure, and the cleavage grows by expanding the area where the pressure difference occurs. The displacement sensor detects the relative position of the second chamber forming unit with respect to the first chamber forming unit. The control device detects the state of separation between the two workpieces based on the output of the displacement sensor.

[0007] In the above-mentioned aspect 1, even if the internal pressure of the chamber is constant, as the peel area increases due to the growth of the cleavage, the pressure-receiving area of ​​the first and second chamber-forming portions increases, and therefore the force that tries to separate the two chamber-forming portions also increases. According to the above-mentioned aspect 1, the change in force can be manifested as a change in the relative position of the second chamber-forming portion with respect to the first chamber-forming portion. Therefore, by detecting the change in relative position with a displacement sensor, it is possible to indirectly detect how much the peel area has increased due to the growth of the cleavage (in other words, the state of peeling between the two workpieces).

[0008] The separation device according to the above-described aspect 1 may have the following configuration (aspect 2). Before causing the separation mechanism to start separating the two workpieces, the control device may increase the internal pressure of the chamber to a predetermined pressure and set the output of the displacement sensor at that time as the initial value before separation starts (process (S1)). Thereafter, the control device may cause the separation mechanism to perform separation on the two workpieces and detect the separation state between the two workpieces based on a change from the initial value that occurs in the output of the displacement sensor during the process (process (S2)).

[0009] According to the second aspect, the internal pressure of the chamber is increased to the pressure (predetermined pressure) required for separation by the separation mechanism, which generates a force in the first and second chamber-forming portions that tries to separate them. This force increases as the separation area increases due to the growth of the cleavage. Therefore, by utilizing this change in force, it is possible to cause the output of the displacement sensor to change (change from the initial value) in accordance with the growth of the cleavage.

[0010] The separation device according to the second aspect may have the following configuration (aspect 3). The separation device may further include a position adjustment mechanism. Here, the position adjustment mechanism is a mechanism that enables adjustment of the relative position of the second chamber forming portion with respect to the first chamber forming portion between a first position and a second position. In step (S1), the control device may adjust the relative position of the second chamber forming portion to coincide with a predetermined position set between the first position and the second position by controlling the position adjustment mechanism based on the output of the displacement sensor when increasing the internal pressure of the chamber to a predetermined pressure. In step (S2), the control device may detect a separation state between the two workpieces based on a change from an initial value that occurs in the output of the displacement sensor, without further adjusting the relative position of the second chamber forming portion.

[0011] According to the above aspect 3, when the internal pressure of the chamber is increased to the air pressure (predetermined pressure) required for separation by the separation mechanism, even if the relative position of the second chamber formation part changes in a direction away from the first chamber formation part, it is possible to return the relative position to a position (predetermined position) suitable for separation of the two wafers by the separation mechanism.

[0012] The peeling device according to the above-mentioned aspect 3 may have the following configuration (aspect 4). The position adjustment mechanism may include a movable part and a cam structure. The movable part may be installed in the first chamber forming part and configured to be capable of translational movement in a second direction perpendicular to the first direction. The cam structure may be provided in the movable part and the second chamber forming part and configured to convert translational movement of the movable part in the second direction into translational movement of the second chamber forming part toward the first position.

[0013] According to the fourth aspect, a position adjustment mechanism can be configured as a separate mechanism from the mechanism (elevating mechanism) that enables the second chamber forming portion to move closer to or further away from the first chamber forming portion. Using such a position adjustment mechanism, it becomes possible to adjust the position of the second chamber forming portion specifically when the chamber is being formed (including immediately before the chamber is formed). Therefore, it is not necessary to equip the elevator mechanism with the function of adjusting the relative position of the second chamber forming portion with high precision, and the elevator mechanism can be configured with a simple mechanism such as an air cylinder or hydraulic cylinder instead of a ball screw. As a result, the peeling device can be simplified and made smaller, and safety can be improved by using an air cylinder or hydraulic cylinder for the elevator mechanism.

[0014] The peeling device according to any one of the above-mentioned aspects 2 to 4 may have the following configuration (Aspect 5): In step (S2), when the output of the displacement sensor changes from an initial value and reaches a predetermined value, the control device may determine that the peel state between the two workpieces has reached a state where the cleavage has grown across the entire bonding surface and the peeling has been completed.

[0015] According to the above-mentioned fifth aspect, it becomes possible to indirectly detect, based on the output of the displacement sensor, that the separation of the two workpieces has been completed (that the cleavage has grown across the entire bonding surface).

[0016] The peeling device according to the above-mentioned aspect 5 may have the following configuration (aspect 6): In the process (S2), if the output of the displacement sensor does not reach a predetermined value and the output stops changing midway, the control device may cause the peeling mechanism to restart peeling of the two workpieces from the beginning or partway through.

[0017] According to the sixth aspect, it becomes possible to indirectly detect the occurrence of a peeling failure between two workpieces (the cleavage growth being stopped midway) based on the output of the displacement sensor. If a peeling failure occurs, it becomes possible to redo the peeling until the peeling failure is eliminated. [Effects of the Invention]

[0018] According to the present invention, when two workpieces are separated from each other in a chamber, the separation state between the two workpieces can be detected without opening the chamber. [Brief explanation of the drawings]

[0019] [Figure 1] 1A and 1B are a front view and a block diagram conceptually illustrating a peeling device according to an embodiment; [Figure 2] FIG. 1 is a top view conceptually illustrating a separation device according to an embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along line II shown in FIG. 2. [Figure 4] 1A is a bottom view of the second chamber forming portion, and FIG. 1B is a bottom view showing the second chamber forming portion without the pad. [Figure 5] 1A and 1B are a front view and a cross-sectional view, respectively, showing the operation of the peeling device. [Figure 6] FIG. 10 is a front view showing the operation of the peeling device. [Figure 7] 1A and 1B are a front view and a cross-sectional view, respectively, showing the operation of the peeling device. [Figure 8] FIG. 7B is an enlarged view of the J1B region in FIG. [Figure 9] 7A is an enlarged view of a region J1A in FIG. 7A, showing (A) the second chamber forming part when the relative position is in the first position, and (B) the second position when the relative position is in the second position. [Figure 10] 1A is a cross-sectional view showing the operation of a peeling device, and FIG. 1B is an enlarged view of the J2 region in the cross-sectional view. [Figure 11] 1A is a cross-sectional view showing the operation of the peeling device, and FIG. 1B is an enlarged view of the J3 region in the cross-sectional view. [Figure 12] 5A to 5C are cross-sectional views showing the operation of the peeling device. [Figure 13] 10 is a flowchart showing a peeled state detection process executed in the embodiment. [Figure 14]10 is a conceptual diagram illustrating the relationship between the position of the piston and the amount of change from the initial value of the output of the displacement sensor. FIG. [Figure 15] 10A to 10C are conceptual diagrams showing four modified examples of the cam structure. [Figure 16] FIG. 11 is a cross-sectional view of a separation device according to a fifth modified example. [Figure 17] FIG. 13 is a conceptual diagram showing a peeling device according to a sixth modified example. DETAILED DESCRIPTION OF THE INVENTION

[0020] [1] Peeling device configuration 1A and 2 are a front view and a top view conceptually illustrating a delamination apparatus according to an embodiment. FIG. 1B is a block diagram conceptually illustrating the configuration of the delamination apparatus. FIG. 3 is a cross-sectional view taken along line II in FIG. 2. The delamination apparatus of this embodiment is an apparatus for delaminating two workpieces W1 and W2 at their bonding surfaces, targeting a laminate Ws (see FIG. 3) formed by bonding two workpieces W1 and W2. The delamination apparatus includes a chamber mechanism 1, a delamination mechanism 2, a position adjustment mechanism 3, a detection sensor 4, and a control device 5. As an example, the workpiece W1 is a semiconductor wafer, and the workpiece W2 is a substrate used for supporting semiconductor wafers in semiconductor processes or for nanoimprinting. Alternatively, the laminate Ws may be attached to a dicing tape and fixed to a dicing frame via the tape. The configuration of each component will be described in detail below.

[0021] Furthermore, the laminate Ws to be peeled may be one in which the workpieces W1 and W2 are directly bonded together, or one in which the workpieces W1 and W2 are indirectly bonded together via an adhesive layer (such as a resin), as long as the workpieces W1 and W2 can be peeled off at the bonding surface.

[0022] [1-1] Chamber mechanism The chamber mechanism 1 is a mechanism for forming a sealed chamber 10, and includes a first chamber forming section 11, a second chamber forming section 12, a drive section 13, and an internal pressure adjusting section 14 (see FIGS. 1(A) and 1(B)). In this embodiment, this chamber 10 (sealed space) is used to realize peeling at the bonding surfaces of two workpieces W1 and W2.

[0023] The first chamber forming portion 11 and the second chamber forming portion 12 are portions that combine to form the chamber 10. These chamber forming portions are configured so that their relative positional relationship in the first direction D1 (in other words, the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11 (see FIG. 3)) can be changed by the action of the drive portion 13. As a result, in the chamber mechanism 1, the chamber 10 can be formed by combining the two chamber forming portions (see FIG. 7(B)), and conversely, the chamber 10 can be opened by separating them (see FIG. 3).

[0024] In the example of FIG. 1(A), the second chamber forming portion 12 is disposed above the first chamber forming portion 11 so that the vertically upward direction corresponds to the first direction D1. Furthermore, while the first chamber forming portion 11 is fixed at a specific position in the first direction D1, the second chamber forming portion 12 is configured to be movable in the first direction D1 by the action of a drive unit 13. More specifically, the drive unit 13 is configured as an air cylinder or a hydraulic cylinder and supports the second chamber forming portion 12 from below. This allows the second chamber forming portion 12 to rise against gravity by increasing the internal pressure of the cylinder, and conversely, the second chamber forming portion 12 to descend using gravity by decreasing the internal pressure of the cylinder. In other words, the drive unit 13 functions as a lifting mechanism for the second chamber forming portion 12.

[0025] Furthermore, a first recess 101 and a second recess 102 are formed on the opposing surfaces 11s and 12s of the first chamber forming portion 11 and the second chamber forming portion 12 (see FIG. 3; in the example of FIG. 3, the upper surface of the first chamber forming portion 11 and the lower surface of the second chamber forming portion 12), which become the chamber 10 when they are combined. An elastic, annular seal 103 (see FIGS. 1(A) and 3) is provided on the opposing surface 11s on the first chamber forming portion 11 side, surrounding the opening area of ​​the first recess 101. The seal 103 may be an O-ring or a tubular seal (which can adjust the internal pressure of the tube and increase the sealing force by expanding the tube with the internal pressure). The annular seal 103 may also be provided on the opposing surface 12s on the second chamber forming portion 12 side, surrounding the opening area of ​​the second recess 102.

[0026] Due to the presence of such seal portion 103, when the two chamber forming portions are united, seal portion 103 is interposed between them (see FIG. 7(B)). Then, by uniting these chamber forming portions via seal portion 103, the internal spaces of first recess 101 and second recess 102 are sealed, thereby forming chamber 10 (sealed space).

[0027] Furthermore, by utilizing the elasticity of the seal portion 103, while maintaining the state in which the two chamber forming portions are united (the state in which the chamber 10 is formed), the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11 can be changed between a first position P1 (see FIG. 9(A)) in which the seal portion 103 is largely elastically deformed to bring the chamber forming portions closer to each other, and a second position P2 (see FIG. 9(B)) in which the chamber forming portions are further apart than in the first position, reducing the amount of elastic deformation of the seal portion 103. In other words, the chamber mechanism 1 is configured so that the relative position Pr of the second chamber forming portion 12 can be changed between the first position P1 and a second position P2 that is further away from the first position P1, while maintaining the state in which the chamber 10 is formed.

[0028] Furthermore, the above-described drive unit 13 can move the relative position Pr of the second chamber forming unit 12 with respect to the first chamber forming unit 11 to a third position P3 (see FIG. 3) where the chamber forming units are separated from each other to open the chamber 10. In other words, the chamber mechanism 1 is configured to be able to open the chamber 10 by relatively moving the second chamber forming unit 12 to the third position P3, which is further away from the second position P2.

[0029] The internal pressure adjustment unit 14 (see FIG. 1(B)) is a part that enables adjustment of the internal pressure of the chamber 10, and includes a pressure increase unit, such as a compression pump, that increases the internal pressure of the chamber 10 by supplying air into the chamber 10. The internal pressure adjustment unit 14 may also include a pressure reduction unit, such as a vacuum pump, that decreases the internal pressure of the chamber 10 by exhausting air from the chamber 10.

[0030] [1-2] Peeling mechanism The peeling mechanism 2 is a mechanism that enables two workpieces W1 and W2 in a bonded state to be peeled by growing a cleavage Kw between their bonded surfaces in the chamber 10. Specifically, the peeling mechanism 2 is a mechanism that enables the cleavage Kw to grow across the entire bonded surface, starting from a crack (see FIG. 8) created along the bonded surface between the two workpieces W1 and W2 at a part of the outer periphery of the laminate Ws, and has the following configuration (see FIG. 3). Note that, hereinafter, two axial directions that are perpendicular to each other in an imaginary plane perpendicular to the first direction D1 are referred to as the X-axis direction and the Y-axis direction.

[0031] A stage unit 20 for holding the laminate Ws is installed on the bottom surface of the first recess 101 formed in the first chamber forming unit 11 (see FIG. 3). The stage unit 20 has a chuck function (vacuum suction, electrostatic chuck, etc.) for fixing the laminate Ws placed thereon. In this embodiment, the laminate Ws is placed on the stage unit 20 with the back surface of the workpiece W2 (the surface opposite to the bonding surface) facing the first direction D1 (vertically upward in the example of FIG. 3).

[0032] Meanwhile, a platform-shaped raised portion 121 is provided on the bottom surface of the second recess 102 formed in the second chamber forming portion 12, and an annular groove 21A and a plurality of slit grooves 21B are formed on the surface 121a of the raised portion 121 (in the example of FIG. 3, the lower surface of the raised portion 121), and a pad 22 is attached in a state where it covers only the slit grooves 21B among the grooves. In addition, the raised portion 121 is formed so that when the chamber 10 is formed, the pad 22 is pressed against the back surface of the workpiece W2, and the amount of compression of the pad 22 itself at that time is within an allowable range. Specifically, it is as follows.

[0033] FIG. 4(A) is a bottom view of the second chamber forming portion 12, and FIG. 4(B) is a bottom view of the second chamber forming portion 12 without the pad 22. As shown in FIG. 4(B), the annular groove 21A is formed in the peripheral region of the surface 121a along the outer periphery of the surface 121a. The multiple slit grooves 21B are formed in a region of the surface 121a that is more inward than the annular groove 21A, and each has an elongated shape that extends in the Y-axis direction. In other words, the slit grooves 21B are formed so that their formation positions change one by one in the X-axis direction and so that they are parallel to each other. Furthermore, the annular groove 21A and the slit grooves 21B, and the slit grooves 21B are formed so that they are not connected to each other.

[0034] Furthermore, second chamber forming portion 12 (see FIG. 3) is formed with ventilation holes 23A that penetrate in first direction D1 from the bottom surface of annular groove 21A to back surface 12t of second chamber forming portion 12 (the surface opposite to opposing surface 12s; the upper surface in the example of FIG. 3), and ventilation holes 23B that penetrate in first direction D1 from the bottom surfaces of each slit groove 21B to back surface 12t. Specifically, they are as follows.

[0035] As shown in Fig. 4(B), when a virtual line Lx extending in the X-axis direction is set so as to intersect with all of the slit grooves 21B when viewed from the direction opposite to the first direction D1, the vent holes 23B are formed in each of the slit grooves 21B so as to be aligned in a row on the virtual line Lx. Also, the annular groove 21A is formed in the annular groove 21A so as to be aligned in a row together with the vent holes 23B on the virtual line Lx. The example of Fig. 4(B) shows a case in which the virtual line Lx is set so as to pass through the center of each of the slit grooves 21B.

[0036] A cylinder chamber 24 is provided on the back surface 12t of the second chamber forming portion 12 (see FIG. 1(A)). Specifically, the cylinder chamber 24 is provided so that the cylinder axis coincides with the imaginary line Lx when viewed from the first direction D1 (see FIG. 2), and all of the vent holes 23A and 23B communicate with the cylinder chamber 24 (see FIG. 3). In this embodiment, the back surface 12t of the second chamber forming portion 12 is exposed within the cylinder chamber 24, so that all of the vent holes 23A and 23B communicate directly with the cylinder chamber 24 (see FIGS. 2 and 3). Note that FIG. 2 is a top view showing a portion of the ceiling wall of the cylinder chamber 24 cut away. Therefore, FIG. 2 also shows the state in which the vent holes 23A and 23B are exposed on the back surface 12t of the second chamber forming portion 12.

[0037] A piston 241 that reciprocates in the direction of the cylinder axis (here, the X-axis direction) is provided in the cylinder chamber 24. The reciprocating motion of this piston 241 is performed via a shaft 242. In this embodiment, when growing the cleavage Kw along the bonding surface, the piston 241 is moved from a start position Ps (see FIG. 10(A)) between the vent hole 23A and the adjacent vent hole 23B to an end position Pt (see FIG. 12) where the piston 241 has passed through all of the vent holes 23B.

[0038] Of the two spaces (see Figure 3) within the cylinder chamber 24 separated by the piston 241, a first space S1 that communicates with the vent port 23A when the piston 241 is in the starting position Ps is connected to a pressure reduction section 25A (such as a vacuum pump; see Figure 1(B)) for reducing the internal pressure of the first space S1, and a second space S2 is connected to a pressure increase section 25B (such as a compression pump; see Figure 1(B)) for increasing the internal pressure of the second space S2.

[0039] As a result, the pressure in the annular groove 21A can be reduced or increased through the vent hole 23A, and the pressure in the slit groove 21B can be reduced or increased through the vent hole 23B, depending on the position of the piston 241 in the cylinder chamber 24. In addition, by moving the piston 241 toward the end position Pt, the number of reduced-pressure slit grooves 21B can be increased.

[0040] Furthermore, a pad 22 is attached to the surface 121a of the raised portion 121 so as to entirely cover only the slit groove 21B of the grooves (annular groove 21A and slit groove 21B) formed thereon (see FIG. 4(A)). The pad 22 is made of an airtight and elastic material (such as a non-porous sponge).

[0041] As a result, the portion of the pad 22 covering the depressurized groove of the slit groove 21B can be elastically deformed in a direction approaching the surface 121a of the raised portion 121 (here, the first direction D1; in the example of Figure 3, the upward direction) by the suction force generated by the depressurization in the slit groove 21B (see Figure 10(B)), while the portion of the pad 22 covering the pressurized groove of the slit groove 21B can be elastically deformed in a direction away from the surface 121a of the raised portion 121 (here, the opposite direction to the first direction D1; in the example of Figure 3, the downward direction) by the pressure force generated by the pressurization in the slit groove 21B (see Figure 11(B)).

[0042] Therefore, by moving the piston 241 toward the end position Pt and thereby increasing the number of decompressed slit grooves 21B, the portion of the pad 22 that has been elastically deformed by the suction force can be expanded (see Figures 11(A) and 11(B)).

[0043] An annular seal portion 26 is fitted into the raised portion 121 and surrounds it (see FIGS. 3 and 4(A)). When the pad 22 is pressed against the back surface of the workpiece W2 (the surface opposite to the bonding surface) (see FIGS. 7(B) and 8), the seal portion 26 is pressed against the peripheral region of the back surface of the workpiece W2 around the pad 22, thereby dividing the space within the chamber 10 into two regions, an inside and an outside of the seal portion 26 (hereinafter, the inside region will be referred to as the "inside seal region Rg" and the outside space will be referred to as the "outside seal region Rh") and sealing between these regions.

[0044] Therefore, when the seal portion 26 seals between the two regions, if the internal pressure adjustment unit 14 increases the pressure inside the chamber 10, only the pressure inside the seal outer region Rh is increased. Meanwhile, on the surface 121a of the raised portion 121, the annular groove 21A is exposed and not covered by the pad 22 (see FIG. 4(A)). Therefore, during the sealing, the pressure inside the seal inner region Rg can be reduced by the pressure reduction unit 25A through the first space S1 of the cylinder chamber 24, the vent 23A, and the annular groove 21A. This generates a pressure difference between the seal inner region Rg and the seal outer region Rh, such that the pressure on the seal outer region Rh side is positive, and this pressure difference can be used to keep the back surface of the workpiece W2 in close contact with the surface of the pad 22.

[0045] Therefore, by gradually elastically deforming the pad 22 with the suction force generated by moving the piston 241 toward the end position Pt, the workpiece W2 in close contact with the pad 22 can be moved together with the pad 22 in a direction approaching the surface 121a of the protrusion 121 (here, the first direction D1; upward in the example of FIG. 3) (see FIGS. 11(A) and 11(B)). As a result, a pressure difference is generated between the front and back of the workpiece W2, using the internal pressure of the chamber 10, so that the bonding surface side of the workpiece W2 becomes positive pressure, and the area in which the pressure difference is generated can be expanded, thereby allowing the cleavage Kw to grow along the bonding surface between the two workpieces W1 and W2.

[0046] With this type of peeling mechanism 2, a crack (see Figure 8) created along the bonding surface between the two workpieces W1 and W2 at a part of the outer edge of the laminate Ws can be used as a trigger to cause the cleavage Kw to grow across the entire bonding surface within the chamber 10, thereby making it possible to peel the two workpieces W1 and W2 at the bonding surface (see Figure 12).

[0047] [1-3]Position adjustment mechanism The position adjustment mechanism 3 is a mechanism separate from the lifting mechanism (drive unit 13) provided in the chamber mechanism 1, and enables adjustment of the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11 between a first position P1 and a transfer position Ph when those chamber forming portions are combined (when the chamber 10 is formed), and between the first position P1 and a second position P2 after they are combined (after the chamber 10 is formed). Details of the transfer position Ph will be described later.

[0048] In this embodiment, the position adjustment mechanism 3 includes a biasing portion 301 and a main adjustment portion 302 (see FIGS. 1(A) and 2), and one main adjustment portion 302 is installed on each side of the chamber mechanism 1 (specifically, on each side in the Y-axis direction; see FIG. 2). These two main adjustment portions 302 adjust the position in conjunction with each other, thereby changing the relative position Pr of the second chamber forming portion 12 while maintaining an appropriate attitude (here, a horizontal attitude) of the second chamber forming portion 12 (in other words, without causing tilting of the second chamber forming portion 12). Below, the specific configurations of the biasing portion 301 and one main adjustment portion 302 will be described, focusing on the biasing portion 301 and one main adjustment portion 302.

[0049] The biasing unit 301 is installed on the first chamber forming unit 11, and when the second chamber forming unit 12 descends under the action of the driving unit 13 to form the chamber 10, the biasing unit 301 takes over from the driving unit 13 and supports the second chamber forming unit 12 from below just before the second chamber forming unit 12 is combined with the first chamber forming unit 11 (see FIG. 5(A)). In this embodiment, the biasing unit 301 spring-biases the support unit 301Q in the first direction D1. The relative position Pr of the second chamber forming unit 12 when the biasing unit 301 takes over supporting the second chamber forming unit 12 from below from the driving unit 13 is referred to as the takeover position Ph.

[0050] The main adjustment portion 302 includes a pair of movable portions 31A and 31B and a pair of cam structures 32A and 32B (see FIG. 1(A)).

[0051] Both movable parts 31A and 31B are installed on the side surface of first chamber forming part 11. Movable part 31A is configured to be able to translate in a second direction D2 (which corresponds to the X-axis direction in this embodiment) perpendicular to first direction D1. When movable part 31A moves in the second direction D2, movable part 31B is configured to move in the opposite direction in conjunction with movable part 31A. More specifically, ball screw 310 is installed on the side surface of first chamber forming part 11 with its axial direction aligned with second direction D2, and its screw shaft 311 is formed with a right-handed thread portion and a left-handed thread portion. Movable part 31A is fixed to nut 312A, which moves one of the thread portions, and movable part 31B is fixed to nut 312B, which moves the other thread portion. Furthermore, movable parts 31A and 31B are both slidably supported on guide rails 313 so that their appropriate postures are maintained even during movement.

[0052] The cam structure 32A is provided on the side of the movable part 31A and the second chamber forming part 12, and is configured to convert the translational movement of the movable part 31A in the second direction D2 into translational movement of the second chamber forming part 12 toward the first position P1 (here, in the direction opposite to the first direction D1).

[0053] Specifically, an inclined surface 321A facing diagonally downward to the right in FIG. 1A is formed on the movable part 31A as a cam (driving link) constituting the cam structure 32A. Furthermore, a roller 322A is provided on the side surface of the second chamber forming part 12 as a follower constituting the cam structure 32A. The inclined surface 321A and the roller 322A are configured so that when the second chamber forming part 12 is supported from below by the biasing part 301, the inclined surface 321A can be brought into contact with the peripheral surface of the roller 322A by moving the movable part 31A in the second direction D2 (see FIG. 6).

[0054] According to such cam structure 32A, by further moving movable part 31A in second direction D2 after inclined surface 321A comes into contact with the circumferential surface of roller 322A, roller 322A can be relatively moved along inclined surface 321A (see FIG. 7(A)), and as a result, roller 322A can be moved in the direction opposite to first direction D1 against the biasing force of biasing part 301. Then, by moving roller 322A in this manner, second chamber forming part 12, which is a follower of cam structure 32A, can be displaced by the same amount as the displacement of roller 322A toward first position P1.

[0055] Therefore, by controlling the amount of movement of movable part 31A, it becomes possible to control the amount of displacement of second chamber forming part 12, and as a result, it becomes possible to adjust the relative position Pr of second chamber forming part 12 with respect to first chamber forming part 11. In this embodiment, such adjustment of relative position Pr of second chamber forming part 12 (position adjustment process) is performed when second chamber forming part 12 is combined with first chamber forming part 11 (when forming chamber 10) and when correcting positional deviation that occurs after they are combined (i.e., after forming chamber 10), as necessary.

[0056] The cam structure 32B is provided on the movable part 31B and the side of the second chamber forming part 12, and is configured to convert the translational movement of the movable part 31B in the direction opposite to the second direction D2 into translational movement of the second chamber forming part 12 toward the first position P1 (here, in the direction opposite to the first direction D1), and to displace the second chamber forming part 12 in the same direction and amount as the direction and amount of displacement of the second chamber forming part 12 obtained at that time by the cam structure 32A.

[0057] Specifically, as a cam (driving link) constituting cam structure 32B, movable section 31B is formed with inclined surface 321B facing diagonally downward to the left in FIG. 1(A) so as to be bilaterally symmetrical with inclined surface 321A. Furthermore, as a follower constituting cam structure 32B, roller 322B separate from roller 322A is installed on the side surface of second chamber forming section 12. More specifically, roller 322B has the same diameter as roller 322A and is installed so as to be at the same position (same height in this embodiment) as roller 322A in first direction D1. These inclined surface 321B and roller 322B are configured so that when the second chamber forming section 12 is supported from below by the biasing section 301, the movable section 31B is moved in the direction opposite to the second direction D2 in conjunction with the movable section 31A, thereby allowing the inclined surface 321B to contact the circumferential surface of the roller 322B at the same time that the inclined surface 321A contacts the circumferential surface of the roller 322A in the cam structure 32A (see Figure 6).

[0058] According to such cam structure 32B, after inclined surface 321B comes into contact with the peripheral surface of roller 322B, movable portion 31B is further moved in the direction opposite to second direction D2 in conjunction with movable portion 31A, thereby relatively moving roller 322B along inclined surface 321B (see FIG. 7(A)), and as a result, roller 322B can be moved in the same direction and by the same displacement amount as roller 322A. Therefore, with cam structure 32B, second chamber forming portion 12, which is its follower (a follower shared with cam structure 32A), can also be displaced toward first position P1 by the same amount as the displacement amount of second chamber forming portion 12 obtained by cam structure 32A at that time.

[0059] Therefore, with such a configuration of the position adjustment mechanism 3, it becomes possible to perform position adjustments in the same direction and with the same amount of displacement at multiple locations on the second chamber forming section 12. As a result, it becomes possible to perform position adjustments while maintaining an appropriate posture (a horizontal posture in this embodiment) of the second chamber forming section 12 (in other words, without causing tilting of the second chamber forming section 12).

[0060] Furthermore, the position adjustment mechanism 3 described above can be configured as a mechanism (elevating mechanism; in this embodiment, the driving unit 13 (air cylinder or hydraulic cylinder)) that enables the second chamber forming unit 12 to move closer to or further away from the first chamber forming unit 11. Using such a position adjustment mechanism 3, it is possible to adjust the position of the second chamber forming unit 12 specifically when the chamber 10 is being formed (including immediately before the chamber 10 is formed). Therefore, it is not necessary to provide the lifting mechanism (driving unit 13) with the function of adjusting the relative position Pr of the second chamber forming unit 12 with high precision. Therefore, the lifting mechanism (driving unit 13) can be configured with a simple mechanism such as an air cylinder or hydraulic cylinder instead of a ball screw. As a result, the peeling device can be simplified and made smaller. Furthermore, using an air cylinder or hydraulic cylinder for the lifting mechanism (driving unit 13) can improve safety. Furthermore, the position adjustment mechanism 3 itself can be configured thinly along the side of the chamber mechanism 1.

[0061] Furthermore, in this embodiment, movable part 31A is configured to be able to move to a retracted position where it can avoid collision with the cam component (roller 322A) on the second chamber forming part 12 side that constitutes cam structure 32A when second chamber forming part 12 moves relatively between second position P2 and third position P3 (see FIGS. 1(A) and 5(A)). Furthermore, movable part 31B is configured to be able to move, in conjunction with the movement of movable part 31A when it moves to the retracted position, to a retracted position where it can avoid collision with the cam component (roller 322B) on the second chamber forming part 12 side that constitutes cam structure 32B.

[0062] According to this configuration, it is possible to make the position adjustment mechanism 3 function without interfering with the function of the lifting mechanism (drive unit 13).

[0063] [1-4] Detection sensor The detection sensor 4 (see FIGS. 1(A) and 1(B)) includes a displacement sensor 41 that detects the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11. In this embodiment, the displacement sensor 41 is a contact-type sensor that is installed in the first chamber forming portion 11 and detects the position of the opposing surface 12s in the first direction D1 as the relative position Pr of the second chamber forming portion 12 by contacting the opposing surface 12s on the second chamber forming portion 12 side from below (see FIGS. 9(A) and 9(B)). Note that a non-contact type displacement sensor may also be used as the displacement sensor 41.

[0064] [1-5] Control device The control device 5 (see FIG. 1(B)) is composed of a processing device (such as a CPU) and a storage device (such as a RAM or ROM), and controls each part of the separation device (such as the chamber mechanism 1, separation mechanism 2, position adjustment mechanism 3, and detection sensor 4) in accordance with a control program installed in the separation device. In this embodiment, the control device 5 executes a position adjustment process, a separation process, and a separation state detection process. These processes will be described in detail below.

[0065] Here, before being installed in the peeling device, the control program may be stored in a readable state on a portable storage medium (for example, a flash memory, etc.), or may be stored in a downloadable state on another server, etc. The control processes (position adjustment process, peeling process, peeling state detection process, etc.) performed by the control device 5 are not limited to being realized by software through execution of a program, but may also be realized by hardware using a processing circuit built in the peeling device.

[0066] <Position adjustment process> The position adjustment process begins when the stack Ws is placed on the stage section 20 and then the relative position Pr of the second chamber forming section 12 with respect to the first chamber forming section 11 reaches the handover position Ph (i.e., when the biasing section 301 takes over support from below of the second chamber forming section 12 from the driving section 13; see Figures 5(A) and 5(B)).

[0067] When the position adjustment process is started, the control device 5 rotates the screw shaft 311 of the ball screw 310, thereby moving the movable parts 31A and 31B in interlocking movements in outward directions away from each other (the same direction as and opposite to the second direction D2) (see FIG. 6). This causes the inclined surface 321A (cam) provided on the movable part 31A to come into contact with the roller 322A (follower), and at the same time, causes the inclined surface 321B (cam) provided on the movable part 31B to come into contact with the roller 322B (follower).

[0068] Thereafter, control device 5 further rotates screw shaft 311, thereby interlocking movable portions 31A and 31B and further moving them outward (see FIG. 7(A)). This causes roller 322A to move relatively along inclined surface 321A, and as a result, roller 322A moves in the direction opposite to first direction D1 against the biasing force of biasing portion 301. At the same time, roller 322B moves relatively along inclined surface 321B, and as a result, roller 322B moves in the same direction as roller 322A by the same displacement amount.

[0069] In this way, the control device 5 displaces the second chamber forming section 12, which is a follower common to the cam structures 32A and 32B, toward the first position P1 by the same amount as the displacement of the rollers 322A and 322B while maintaining an appropriate posture (in this embodiment, a horizontal posture), thereby merging the second chamber forming section 12 with the first chamber forming section 11 (see Figure 7(A)).

[0070] This forms the chamber 10, and the pad 22 is pressed against the back surface of the workpiece W2 (the surface opposite to the lamination surface) (see FIGS. 7(B) and 8). Furthermore, the seal portion 26 is pressed against the back surface of the workpiece W2, thereby dividing the space within the chamber 10 into an inner seal region Rg and an outer seal region Rh, and sealing the space between these regions (see FIG. 8).

[0071] At this time, the control device 5 adjusts the relative position Pr of the second chamber forming part 12 to coincide with a predetermined position Pz (see FIG. 9(B)) set between the first position P1 and the second position P2 so that the compression amount of the pad 22 itself becomes an appropriate value (in other words, so that the pad 22 is in a moderately compressed state). Specifically, the control device 5 controls the positions of the movable parts 31A and 31B based on the output G of the displacement sensor 41, thereby adjusting the relative position Pr of the second chamber forming part 12 to coincide with the predetermined position Pz.

[0072] Then, with this positional adjustment performed on the chamber mechanism 1, the peeling process described below is initiated. Meanwhile, in the peeling process, as a process necessary for growing the cleavage Kw, in the initial stage (before peeling of the two workpieces W1 and W2 is initiated), the internal pressure of the seal-free region Rh in the chamber 10 is increased to a predetermined pressure required for peeling using the pressure difference with the backside of the workpiece W2. This causes a force to be generated in the first chamber forming portion 11 and the second chamber forming portion 12 that tries to separate them. Therefore, there is a risk that the chamber 10 itself will expand at this time; in other words, the relative position Pr of the second chamber forming portion 12 will change in a direction away from the first chamber forming portion 11. Therefore, even if the compression amount of the pad 22 itself is adjusted to an appropriate value, if the internal pressure of the seal-free region Rh is subsequently increased, the compression amount of the pad 22 itself will decrease, weakening the pressing force against the workpiece W2. This may result in poor peeling when growing the cleavage Kw. Thus, expansion of the chamber 10 may adversely affect the processing within the chamber 10.

[0073] Therefore, even when the internal pressure of the non-sealed area Rh in the chamber 10 is increased to a predetermined pressure in the early stage of the peeling process, the control device 5 controls the positions of the movable parts 31A and 31B based on the output G of the displacement sensor 41, thereby adjusting the relative position Pr of the second chamber forming part 12 to coincide with the predetermined position Pz.

[0074] As a result, when the internal pressure of the non-sealed area Rh in the chamber 10 is increased to the air pressure (predetermined pressure) required for peeling by the peeling mechanism 2, even if the relative position Pr of the second chamber forming part 12 changes in a direction away from the first chamber forming part 11, it is possible to return the relative position Pr to a position (predetermined position Pz) suitable for peeling the two workpieces W1 and W2 by the peeling mechanism 2. Therefore, it is possible to suppress expansion and contraction of the chamber 10 itself due to changes in internal pressure as needed, while simplifying and miniaturizing the peeling device.

[0075] Hereinafter, the adjustment of the internal pressure of the chamber 10 and the adjustment of the relative position Pr performed by the control device 5 at the initial stage of the peeling process will be collectively referred to as process (S1). In this embodiment, in process (S1), the control device 5 further sets the output G of the displacement sensor 41 when the relative position Pr of the second chamber forming part 12 is aligned with the predetermined position Pz as the initial value Gs before the start of peeling.

[0076] After adjusting the relative position Pr, the control device 5 detects the peeling state between the two workpieces W1 and W2 based on the change from the initial value Gs that occurs in the output G of the displacement sensor 41 by executing the peeling state detection process described below without making any further adjustments to the relative position Pr.

[0077] <Peeling treatment> The peeling process begins after the formation of the chamber 10 (see FIG. 7(B)) by the position adjustment process described above. Therefore, at the start of the peeling process, the seal portion 26 is pressed against the rear surface of the workpiece W2, thereby dividing the space within the chamber 10 into an in-seal region Rg and an out-seal region Rh, and these regions are sealed by the seal portion 26 (see FIG. 8). A crack (see FIG. 8) that triggers peeling (growth of the cleavage Kw) is created near the vent hole 23A on the outer periphery of the laminate Ws using a known creating means 6 (see, for example, Patent Document 1). The creation of such a crack (triggering) may be performed before the formation of the chamber 10, or after the formation of the chamber 10 and before the start of the peeling process.

[0078] When the peeling process is started, the control device 5 sets the position of the piston 241 in the cylinder chamber 24 to the start position Ps (the position between the vent hole 23A and the adjacent vent hole 23B) (see FIG. 10(A)).

[0079] Thereafter, the control device 5 controls the pressure intensifier 25B to increase the internal pressure of the second space S2 in the cylinder chamber 24, thereby increasing the pressure in all of the slit grooves 21B through the vent holes 23B, and the resulting pressure force presses the entire pad 22 strongly against the workpiece W2 (see FIGS. 10(A) and 10(B)). This increases the overall compression amount of the pad 22 itself, and strengthens the pressing force on the entire workpiece W2.

[0080] Next, the control device 5 controls the internal pressure adjusting unit 14 to increase the internal pressure of the outer seal area Rh in the chamber 10 to a predetermined pressure required for peeling using the pressure difference with the back side of the workpiece W2 (process (S1), see FIG. 10(B)). At this time, as described above, the control device 5 adjusts the relative position Pr of the second chamber forming unit 12 in the position adjustment process so that it coincides with the predetermined position Pz.

[0081] Thereafter, the control device 5 causes the peeling mechanism 2 to perform peeling on the two workpieces W1 and W2 (peeling in the chamber 10).

[0082] Specifically, the control device 5 controls the pressure reducing unit 25A to reduce the internal pressure of the first space S1 in the cylinder chamber 24, thereby reducing the pressure inside the seal inner region Rg through the vent 23A and the annular groove 21A. This generates a pressure difference between the seal inner region Rg and the seal outer region Rh such that the seal outer region Rh side is under positive pressure, and this pressure difference is used to bring the back surface of the workpiece W2 into close contact with the surface of the pad 22 (see FIG. 10(B)). FIG. 10(B) shows a case where the workpiece W2 is in close contact with the surface of the pad 22, causing the cleavage Kw to grow along the seal inner region Rg to near the pad 22.

[0083] Next, the control device 5 moves the piston 241 via the shaft 242 from the start position Ps toward the end position Pt (here, in the X-axis direction) (see FIG. 11(A)), thereby expanding the area occupied by the first space S1 within the cylinder chamber 24, and thereby switching the space within the cylinder chamber 24 that communicates with the vent port 23B from the second space S2 to the first space S1, starting from the vent port 23B closest to the vent port 23A. In this way, the state within the slit groove 21B is switched from a pressurized state to a reduced-pressure state, starting from the slit groove 21B closest to the vent port 23A.

[0084] As a result, a pressure difference is generated between the slit groove 21B and the outer seal area Rh (crack Kw), starting from the slit groove 21B closest to the vent 23A, such that the outer seal area Rh side becomes positive pressure (i.e., a suction force is generated in the slit groove 21B).Then, by utilizing this pressure difference to elastically deform the pad 22, the crack Kw grows along the bonding surface (see FIGS. 11(A) and 11(B)).Through this process, the crack Kw grows across the entire bonding surface in the chamber 10, and the two workpieces W1 and W2 are peeled off at the bonding surface (see FIG. 12).

[0085] On the other hand, when the cleavage Kw grows, even if the internal pressure of the chamber 10 is constant, the pressure-receiving area of ​​the first chamber forming portion 11 and the second chamber forming portion 12 increases as the peeling area increases due to the growth of the cleavage Kw, and therefore the force trying to separate the two chamber forming portions also increases. In the peeling device of this embodiment, this change in force appears as a change in the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11. Therefore, in this embodiment, the peeling state between the two workpieces W1 and W2 is indirectly detected by utilizing this change in the relative position Pr as the cleavage Kw grows. This will be explained in detail below.

[0086] <Peeling state detection process> 13 is a flowchart showing the peeling state detection process. This peeling state detection process is started when the initial value Gs before the start of peeling is set in the above-mentioned process (S1). Therefore, the peeling state detection process is executed in parallel with the peeling process performed by the peeling mechanism 2 on the two workpieces W1 and W2 (peeling in the chamber 10). The peeling state detection process can be called the process (S2) executed after the process (S1).

[0087] When the peeling state detection process is started, the control device 5 detects the peeling state between the two workpieces W1 and W2 based on the change from the initial value Gs that occurs in the output G of the displacement sensor 41 during the peeling process. Specifically, this is as follows.

[0088] 14(A) is a conceptual diagram illustrating the relationship between the position of the piston 241 and the amount of change ΔG from the initial value Gs in the output G of the displacement sensor 41 (an amount corresponding to the amount of displacement from a predetermined position Pz with respect to the relative position Pr of the second chamber forming part 12). As shown in this diagram, in the peeling process, by moving the piston 241 from the start position Ps to the end position Pt, the peeling area increases as the cleavage Kw grows, and accordingly, the amount of change ΔG from the initial value Gs in the output G of the displacement sensor 41 increases. When the cleavage Kw grows across the entire bonding surface, the amount of change ΔG reaches a predetermined value ΔGt corresponding to the peeling area at that time.

[0089] On the other hand, in the peeling device, the growth of the cleavage Kw may stop midway for some reason during the peeling process. In this case, the peeling state between the two workpieces W1 and W2 becomes a state in which the workpiece W2 is partially not peeled from the workpiece W1 (a state in which poor peeling has occurred). Then, as shown in Figure 14(B), the change amount ΔG stops changing while the piston 241 is moving toward the end position Pt (i.e., before reaching the predetermined value ΔGt).

[0090] Therefore, the control device 5 first determines whether or not there is a change in the amount of change ΔG itself from the initial value Gs for the output G of the displacement sensor 41 (step S101 in FIG. 13). If the control device 5 determines that there is no change (No) in step S101, then it determines that the peeling state between the two workpieces W1 and W2 has become a state in which a peeling failure has occurred (step S110 in FIG. 13).

[0091] On the other hand, if the control device 5 determines that "there is a change (Yes)" in step S101, it can determine that the cleavage Kw is growing based on that determination. In this case, the control device 5 determines whether the piston 241 has reached the end position Pt (step S102). Then, the control device 5 repeatedly executes steps S101 and S102 until it can determine that "there is no change (No)" in step S101 or can determine that "it has reached (Yes)" in step S102.

[0092] If the control device 5 determines "reached (Yes)" in step S102, it further determines whether the change amount ΔG has reached a predetermined value ΔGt (step S103 in FIG. 13). If the control device 5 determines "reached (Yes)" in step S103, it determines, based on that determination, that the peel state between the two workpieces W1 and W2 has reached a state where the cleavage Kw has grown across the entire bonding surface and peeling has been completed (step S111 in FIG. 13). On the other hand, if the control device 5 determines "not reached (No)" in step S103, it determines, based on that determination, that the peel state between the two workpieces W1 and W2 has reached a state where a peel failure has occurred (step S110 in FIG. 13).

[0093] According to this process, by detecting a change in the relative position Pr of the second chamber forming portion 12 with respect to the first chamber forming portion 11 with the displacement sensor 41, it becomes possible to indirectly detect how much the peel area has increased due to the growth of the cleavage Kw (in other words, the peel state between the two workpieces W1 and W2). Specifically, step S101 makes it possible to detect that a peel failure has occurred between the two workpieces W1 and W2 (that the growth of the cleavage Kw has stopped midway). Furthermore, step S103 makes it possible to detect that the peeling of the two workpieces W1 and W2 has been completed (that the cleavage Kw has grown across the entire bonding surface).

[0094] Therefore, according to the peeling device of this embodiment, when two workpieces W1 and W2 are peeled off in the chamber 10, the peeling state between the two workpieces W1 and W2 can be detected without opening the chamber 10.

[0095] [2] Variation [2-1] First modified example In the above-mentioned peeling device, if the control device 5 determines that there is no change (No) in step S101 of Figure 13, or determines that the target point has not been reached (No) in step S103, it may cause the peeling mechanism 2 to restart the peeling of the two workpieces W1 and W from the beginning or partway through.

[0096] This makes it possible to repeat the peeling process if a peeling defect occurs until the peeling defect is eliminated.

[0097] [2-2] Second variant In the above-mentioned peeling device, even when the chamber 10 expands by increasing the internal pressure of the non-sealed area Rh in the chamber 10 to a predetermined pressure in the early stage of the peeling process, if there is no need to adjust the relative position Pr of the second chamber forming portion 12 to coincide with the predetermined position Pz, the output G of the displacement sensor 41 at that time (the output G of the displacement sensor 41 without position adjustment) may be set as the initial value Gs.

[0098] [2-3] Third variant In the above-described position adjustment mechanism 3, the combination of the cam and follower constituting cam structure 32A is not limited to the one in which inclined surface 321A formed on movable portion 31A serves as the cam and roller 322A installed on the side surface of second chamber forming portion 12 serves as the follower, and may be changed as appropriate to one constituted by another combination that can exert the same effect. The same applies to cam structure 32B.

[0099] 15(A) to 15(D) are conceptual diagrams showing four modifications of the cam structure 32A. These modifications can also be applied to the cam structure 32B.

[0100] 15(A) shows a case where the follower of cam structure 32A is changed to inclined surface 323. In this case, by moving movable part 31A in second direction D2, inclined surface 321A (cam) is brought into surface contact with inclined surface 323 (follower) (see the right diagram in FIG. 15(A)), and then by further moving movable part 31A in second direction D2, inclined surface 321A slides along inclined surface 323 (follower) while maintaining surface contact, and as a result, inclined surface 323 (follower) can be moved in the direction opposite to first direction D1.

[0101] 15(B) shows a case where rolling means 324 (rollers, etc.) are provided on inclined surface 323 (follower) in the configuration of FIG. 15(A). This configuration improves the sliding of inclined surface 321A (cam) relative to inclined surface 323 (follower).

[0102] 15(C) shows a case where the follower of cam structure 32A is composed of linear guide 325, block portion 326, and receiving portion 327. Specifically, block portion 326 is slidably installed on inclined surface 321A via linear guide 325. In addition, receiving portion 327 is a portion installed on the side surface of second chamber forming portion 12, and is configured to receive block portion 326 midway when movable portion 31A moves in second direction D2 (see the right diagram in FIG. 15(C)), thereby allowing the subsequent movement of block portion 326 (movement caused by sliding relative to inclined surface 321A) to be transmitted directly to second chamber forming portion 12.

[0103] 15(C), receiving portion 327 is formed in an L-shape. As a result, after receiving portion 327 receives block portion 326, block portion 326 slides relatively along inclined surface 321A (cam), and as a result, when block portion 326 moves in the direction opposite to first direction D1, the movement of block portion 326 at that time can be transmitted directly to second chamber forming portion 12 via receiving portion 327.

[0104] FIG. 15(D) shows a case where the relationship between the cam and follower for the inclined surface 321A and the roller 322A in the above-described embodiment is reversed (so-called a case where a reverse cam is used).

[0105] [2-4] Fourth Variation In the above-described position adjustment mechanism 3, the movable part 31B may be configured to move in the same direction as the movable part 31A in conjunction with the movable part 31A. Specifically, the screw shaft 311 may be configured so that two threaded portions formed thereon (two threaded portions onto which the nuts 312A and 312B are respectively threaded) are both right-handed or both left-handed.

[0106] In this case, cam structure 32B is appropriately modified to have a configuration corresponding to the change. Specifically, cam structure 32B is configured so that, even when movable portion 31B is modified to move in the same direction as movable portion 31A, second chamber forming portion 12 can be displaced in the same direction and amount as the direction and amount of displacement of second chamber forming portion 12 obtained by cam structure 32A.

[0107] As another modification, the movable parts 31A and 31B may be configured to be able to selectively switch between moving in opposite directions in cooperation with each other and moving in the same direction. Specifically, the two screw parts described above may be connected via a switching gear, so that they can selectively switch between rotating in the same direction in cooperation with each other and rotating in opposite directions.

[0108] With this switchable configuration, when the position adjustment mechanism 3 moves the movable parts 31A and 31B in opposite directions to adjust the relative position Pr, even if a misalignment occurs between the two cam structures 32A and 32B for some reason in terms of the displacement amount of the second chamber forming part 12, the two movable parts 31A and 31B can be moved in the same direction, thereby adjusting the position of the midpoint that bisects the distance between the two movable parts 31A and 31B, thereby restoring the state to one without misalignment.

[0109] Furthermore, when the position adjustment mechanism 3 moves the movable parts 31A and 31B in the same direction to adjust the relative position Pr, even if for some reason a misalignment occurs between the two cam structures 32A and 32B in terms of the displacement amount of the second chamber forming part 12, the two movable parts 31A and 31B can be moved in opposite directions, thereby adjusting the distance between the two movable parts 31A and 31B, thereby restoring the state to one without misalignment.

[0110] [2-5] Fifth variant 16 is a cross-sectional view of a peeling device according to a fifth modified example (a cross-sectional view taken along the same line as line II shown in FIG. 2). As shown in this figure, an unevenness-reducing layer 27 may be formed on the surface of pad 22 to reduce unevenness that may occur on the surface when pad 22 is elastically deformed by a pressure difference (suction force). As an example, unevenness-reducing layer 27 is formed by attaching a resin plate (e.g., a resin plate with a thickness of about 1 to 1.5 mm) to the surface of pad 22.

[0111] According to the fifth modification, even if the workpiece W2 is thin and easily deformed, the portion peeled off from the workpiece W1 by the growth of the cleavage Kw can be kept as flat as possible. Furthermore, by forming an unevenness reducing layer 27 (such as a resin plate) on the surface of the pad 22, foreign matter (dust, dirt, etc.) originally attached to the pad 22 and wear powder of the pad 22 itself generated by repeated elastic deformation of the pad 22 can be contained within the pad 22 by the unevenness reducing layer 27. As a result, it becomes possible to prevent the foreign matter, wear powder, etc. from being transferred to the workpiece W2 during the peeling process and from adversely affecting the workpiece W2.

[0112] [2-6] Sixth Variation 17 is a conceptual diagram showing a peeling device according to a sixth modified example. As shown in this figure, the vent hole 23A may be connected to an internal pressure adjustment section 25C (including at least a pressure reduction section) that is different from the pressure reduction section 25A and the pressure increase section 25B, without being exposed to the inside of the cylinder chamber 24. With this configuration, it becomes possible to reduce the pressure inside the annular groove 21A independently of the position of the piston 241, in other words, independently of the control that reduces or increases the pressure inside the slit groove 21B through the inside of the cylinder chamber 24.

[0113] The above-described embodiments and modifications should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined not by the above-described embodiments and modifications, but by the claims. Furthermore, the scope of the present invention is intended to include all modifications that are equivalent to the scope of the claims and fall within the scope thereof.

[0114] Furthermore, from the above-described embodiments and variant examples, the subject matter of the invention is not limited to the peeling device, but may also include partially extracted components of the peeling device (such as the chamber mechanism 1 and the peeling mechanism 2), or may include some or all of the processes performed by the control device 5 (such as the position adjustment process, the peeling process, and the peeling state detection process, including the corresponding position adjustment methods, the peeling methods, and the peeling state detection methods), or even programs for executing them. [Explanation of symbols]

[0115] 1. Chamber mechanism 2 Peeling mechanism 3 Position adjustment mechanism 4 Detection sensor 5. Control device 6 Generation means G Output 10 Chambers 11 First chamber forming section 12 Second chamber forming section 11s, 12s Opposite side 12t back side 13 Drive unit 14 Internal pressure adjustment section 20 Stage Section 21A Annular groove 21B Slit groove 22 pads 23A, 23B ventilation holes 24 Cylinder chamber 25A pressure reducing section 25B Pressure booster 25C Internal pressure adjustment part 26 Seal part 27 Uneven relief layer 31A, 31B Movable parts 32A, 32B cam structure 41 Displacement Sensor D1 1st direction D2 2nd direction Gs initial value Kw cleavage Lx virtual line P1 1st position P2 2nd position P3 3rd position Ph. Successor position Pr relative position Ps start position Pt End position Pz Predetermined position Rg Seal area Rh outer seal area S1 1st space S2 2nd space W1, W2 work Ws laminate ΔG change ΔGt predetermined value 101 First recess 102 Second recess 103 Seal part 121 Ridge 121a surface 241 Piston 242 Shaft 301 energizing part 301Q Support part 302 Adjustment main part 310 ball screw 311 Screw shaft 312A, 312B Nut 313 Guide Rail 321A, 321B slopes 322A, 322B Roller 323 Slope 324 Rolling means 325 Linear Guide 326 Block Section 327 Receiving part

Claims

1. a chamber mechanism including a first chamber forming portion and a second chamber forming portion, the relative positional relationship of which can be changed in a first direction and which form a chamber by combining via an elastic seal portion, and which can change the relative position of the second chamber forming portion with respect to the first chamber forming portion between a first position and a second position further away by utilizing the elasticity of the seal portion while maintaining the combined state of the chamber forming portions; a peeling mechanism that enables two workpieces in a bonded state to be peeled by growing a cleavage between their bonded surfaces within the chamber, the peeling mechanism utilizing the internal pressure of the chamber to generate a pressure difference between the front and back of one of the workpieces such that the bonded surface side of the workpiece becomes positive pressure, and expanding the area where the pressure difference is generated to grow the cleavage; a displacement sensor that detects a relative position of the second chamber forming portion with respect to the first chamber forming portion; a control device that detects a separation state between the two workpieces based on an output of the displacement sensor; A peeling device comprising:

2. The control device a process (S1) of increasing the internal pressure of the chamber to a predetermined pressure before the peeling mechanism starts peeling the two workpieces, and setting the output of the displacement sensor at that time as an initial value before the start of peeling; Thereafter, a process (S2) of causing the peeling mechanism to perform peeling on the two workpieces, and detecting a peeling state between the two workpieces based on a change from the initial value that occurs in the output of the displacement sensor during the peeling process; The peeling device according to claim 1 ,

3. a position adjustment mechanism that enables adjustment of the relative position of the second chamber forming portion with respect to the first chamber forming portion between the first position and the second position; Further provided with The control device In the process (S1), when the internal pressure of the chamber is increased to a predetermined pressure, the position adjustment mechanism is controlled based on an output of the displacement sensor, thereby adjusting the relative position of the second chamber forming portion to coincide with a predetermined position set between the first position and the second position; The peeling device according to claim 2, wherein the process (S2) detects the peeling state between the two workpieces based on a change from the initial value that occurs in the output of the displacement sensor, without further adjustment of the relative position of the second chamber forming portion.

4. The position adjustment mechanism includes: a movable portion disposed in the first chamber forming portion and configured to be capable of translational movement in a second direction perpendicular to the first direction; a cam structure provided on the movable portion and the second chamber forming portion, the cam structure converting translational movement of the movable portion in the second direction into translational movement of the second chamber forming portion toward the first position; The stripping device according to claim 3 , comprising:

5. The peeling device according to any one of claims 2 to 4, wherein in the process (S2), when the output of the displacement sensor changes from the initial value and reaches a predetermined value, the control device determines that the peeling state between the two workpieces has reached a state in which the cleavage has grown across the entire bonding surface and peeling has been completed.

6. The peeling device described in claim 5, wherein in the process (S2), if the output of the displacement sensor does not reach the predetermined value and the output stops changing midway, the control device causes the peeling mechanism to restart peeling of the two workpieces from the beginning or partway through.

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