Sensors and Inspection Equipment

Abstract

To provide a sensor and an inspection device capable of improving characteristics.SOLUTION: A sensor comprises an element portion and a controller. The element portion includes a first element. The first element includes a first magnetic element and a first conductive member. A rate of change in a first electrical resistance of the first magnetic element with respect to a change in a third direction magnetic field along a third direction is higher than a rate of change in the first electrical resistance with respect to a change in a second direction magnetic field along a second direction from a first other conductive portion to a first conductive portion. The controller includes a first circuit. The first circuit can supply a first current to the first conductive member. The first current includes an AC component. A local maximum value of the first current is of a first polarity. A local minimum value of the first current is of the first polarity or 0.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION The present invention relates to a sensor and an inspection device. [Background technology]

[0002] For example, there is a sensor using a magnetic layer, and it is desirable to improve the characteristics of the sensor. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-145021 Summary of the Invention [Problem to be solved by the invention]

[0004] Embodiments of the present invention provide sensors and inspection devices that can provide improved performance. [Means for solving the problem]

[0005] According to an embodiment of the present invention, a sensor includes an element unit and a control unit. The element unit includes a first element. The first element includes a first magnetic element and a first conductive member. The first magnetic element includes a first magnetic layer and a first opposing magnetic layer. The first conductive member includes a first conductive portion and a first other conductive portion. A second direction from the first other conductive portion to the first conductive portion intersects with a first direction from the first magnetic layer to the first opposing magnetic layer. A rate of change of a first electrical resistance of the first magnetic element with respect to a change in a third directional magnetic field along a third direction intersecting a plane including the first direction and the second direction is higher than a rate of change of the first electrical resistance with respect to a change in a second directional magnetic field along the second direction. The control unit includes a first circuit. The first circuit is electrically connected to the first conductive portion and the first other conductive portion and is capable of supplying a first current to the first conductive member. The first current includes an AC component. A maximum value of the first current has a first polarity. The minimum value of the first current is the first polarity or zero. [Brief explanation of the drawings]

[0006] [Figure 1] 1(a) to 1(c) are schematic views illustrating the sensor according to the first embodiment. [Figure 2] 2(a) to 2(c) are schematic views illustrating the sensor according to the first embodiment. [Figure 3] FIG. 3 is a schematic diagram illustrating the characteristics of the sensor. [Figure 4] FIG. 4 is a schematic diagram illustrating the characteristics of the sensor. [Figure 5] FIG. 5 is a schematic view illustrating the sensor according to the first embodiment. [Figure 6] FIG. 6 is a schematic view illustrating the sensor according to the first embodiment. [Figure 7] 7(a) to 7(c) are schematic views illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic view illustrating the sensor according to the first embodiment. [Figure 9] FIG. 9 is a schematic view illustrating the sensor according to the first embodiment. [Figure 10] FIG. 10 is a schematic view illustrating the sensor according to the first embodiment. [Figure 11] 11(a) to 11(c) are schematic views illustrating the sensor according to the first embodiment. [Figure 12] 12(a) to 12(c) are schematic views illustrating the sensor according to the first embodiment. [Figure 13] FIG. 13 is a schematic view illustrating the sensor according to the first embodiment. [Figure 14] FIG. 14 is a schematic view illustrating the sensor according to the first embodiment. [Figure 15] FIG. 15 is a schematic view illustrating the sensor according to the first embodiment. [Figure 16] FIG. 16 is a schematic view illustrating the sensor according to the first embodiment. [Figure 17]FIG. 17 is a schematic perspective view showing an inspection device according to the second embodiment. [Figure 18] FIG. 18 is a schematic plan view showing an inspection device according to the second embodiment. [Figure 19] FIG. 19 is a schematic diagram showing a sensor and an inspection device according to an embodiment. [Figure 20] FIG. 20 is a schematic diagram showing an inspection device according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) 1(a) to 1(c) and 2(a) to 2(c) are schematic views illustrating the sensor according to the first embodiment. Fig. 2(a) is a plan view, Fig. 2(b) is a cross-sectional view taken along line A1-A2 in Fig. 2(a), and Fig. 2(c) is a cross-sectional view taken along line B1-B2 in Fig. 2(a).

[0009] 1(a), a sensor 110 according to the embodiment includes an element unit 10U and a control unit 70. The element unit 10U includes a first element 10A. The sensor 110 is, for example, a magnetic sensor.

[0010] The first element 10A includes a first magnetic element 11 and a first conductive member .

[0011] 2(b), the first magnetic element 11 includes a first magnetic layer 11a and a first opposing magnetic layer 11b. In this example, the first magnetic element 11 includes a first non-magnetic layer 11n. The first non-magnetic layer 11n is provided between the first magnetic layer 11a and the first opposing magnetic layer 11b.

[0012] The first direction D1 from the first magnetic layer 11a to the first opposing magnetic layer 11b is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the Y-axis direction. The direction perpendicular to the Z-axis and Y-axis directions is defined as the X-axis direction.

[0013] 1(a), the first conductive member 21 includes a first conductive portion 21e and a first other conductive portion 21f. A second direction D2 from the first other conductive portion 21f to the first conductive portion 21e intersects with the first direction D1. The second direction D2 is, for example, the Y-axis direction.

[0014] In the embodiment, the sensor 110 is capable of detecting a magnetic field Ht to be detected. The magnetic field Ht to be detected includes a component along a third direction D3. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 is, for example, the X-axis direction.

[0015] In the sensor 110, the electric resistance (first electric resistance) of the first magnetic element 11 can change in response to a change in the magnetic field Ht to be detected.

[0016] For example, the rate of change of the first electrical resistance of the first magnetic element with respect to a change in the third direction magnetic field along the third direction D3 is higher than the rate of change of the first electrical resistance with respect to a change in the second direction magnetic field along the second direction D2. The first electrical resistance of the first magnetic element 11 has high sensitivity with respect to the third direction magnetic field.

[0017] The control unit 70 includes a first circuit 71A. The first circuit 71A is electrically connected to the first conductive portion 21e and the first other conductive portion 21f. The first circuit 71A is capable of supplying a first current i1 to the first conductive member 21.

[0018] FIG. 1(b) illustrates a first current i1. The horizontal axis of FIG. 1(b) represents time tm. The vertical axis of FIG. 1(b) represents the value of the first current i1. As shown in FIG. 1(b), the first current i1 includes an AC component ia1. The maximum of the first current i1 has a first polarity, and the minimum of the first current i1 has the first polarity or 0. The first polarity is either positive or negative. Below, an example in which the first polarity is positive will be described.

[0019] For example, the first current i1 includes an AC component ia1 and a DC component id1. The DC component id1 is equal to or greater than half the amplitude ip1 of the AC component ia1. In the first current i1, the difference between the minimum value and the maximum value corresponds to the amplitude ip1. In the embodiment, for example, both the minimum value and the maximum value have a first polarity (or the minimum value is 0). The first current i1 never has a second polarity (for example, negative). The minimum value of the first current i1 may also have the first polarity.

[0020] A first magnetic field Ha is generated by the first current i1. The first magnetic field Ha is aligned with the third direction D3. FIG. 1(c) illustrates the first magnetic field Ha. The horizontal axis of FIG. 1(c) represents time tm. The vertical axis of FIG. 1(c) represents the intensity of the first magnetic field Ha. As shown in FIG. 1(c), the first magnetic field Ha includes an AC magnetic field component Ha1. The maximum of the first magnetic field Ha is of the first polarity, and the minimum of the first magnetic field Ha is either the first polarity or 0. The minimum of the first magnetic field Ha may also be of the first polarity.

[0021] For example, the first magnetic field Ha includes an AC magnetic field component Ha1 and a DC magnetic field component Hd1. The DC magnetic field component Hd1 is equal to or greater than half the amplitude Hp1 of the AC magnetic field component Ha1. In the first magnetic field Ha, the difference between the minimum value and the maximum value corresponds to the amplitude Hp1. In the embodiment, both the minimum value and the maximum value have a first polarity (or the minimum value is 0). The first magnetic field Ha never has a second polarity (e.g., negative). The first magnetic field Ha never becomes 0. The minimum value Hmin of the first magnetic field Ha is the difference between the DC magnetic field component Hd1 and half the amplitude Hp1 of the AC magnetic field component Ha1. In the embodiment, for example, the minimum value Hmin of the first magnetic field Ha is positive or 0.

[0022] When such a first current i1 flows through the first conductive member 21, a first magnetic field Ha is generated from the first conductive member 21. The first conductive member 21 is an example of the magnetic field generating unit 28. The magnetic field generating unit 28 generates a first magnetic field Ha along the third direction D3.

[0023] A first magnetic field Ha is applied to the first magnetic element 11. A first electrical resistance of the first magnetic element 11 changes in response to a change in the first magnetic field Ha. The change in electrical resistance is caused by, for example, the MR (magnetoresistance effect). For example, the first electrical resistance of the first magnetic element 11 changes in response to a change in the first current i1.

[0024] Meanwhile, a magnetic field to be detected Ht is applied to the first magnetic element 11. The magnetic field to be detected Ht also changes the first electrical resistance of the first magnetic element 11. In this way, the first electrical resistance changes in response to both the first current i1 (and the first magnetic field Ha) and the magnetic field to be detected Ht. In the embodiment, the magnetic field to be detected Ht can be detected by detecting the change in the first electrical resistance and processing the result based on the frequency of the AC component ia1 of the first current i1 (the frequency of the AC magnetic field component Ha1 of the first magnetic field Ha).

[0025] In the embodiment, as described above, the first current i1 and the first magnetic field Ha never become negative, which enables detection with reduced noise.

[0026] 3 and 4 are schematic diagrams illustrating the characteristics of the sensor. The horizontal axis of these figures represents the magnetic field Hx applied to the first magnetic element 11. The vertical axis represents the first electrical resistance R1 of the first magnetic element 11. The first electrical resistance R1 corresponds to the potential difference between both ends of the first magnetic element 11.

[0027] 3, the first electrical resistance R1 of the first magnetic element 11 changes nonlinearly (for example, quadratically) with respect to the magnetic field Hx. The rate of change of the first electrical resistance R1 with respect to the magnetic field Hx with a large absolute value is higher than the rate of change of the first electrical resistance R1 with respect to the magnetic field Hx with a small absolute value.

[0028] As shown in FIG. 3, the sum of a first magnetic field Ha based on a first current i1 and a magnetic field Ht to be detected is applied to the first magnetic element 11. In the example of FIG. 3, the first magnetic field Ha changes between positive and negative. The first electrical resistance R1 changes in response to such changes in the magnetic field. In the example of FIG. 3, the change in the first electrical resistance R1 is small. In the example of FIG. 3, a range in which the rate of change of the first electrical resistance R1 is low is used for detection.

[0029] In the example shown in FIG. 4, the first magnetic field Ha changes within a positive range and does not become negative. In response to this change in the magnetic field, the first electrical resistance R1 changes. In the example shown in FIG. 4, the change in the first electrical resistance R1 is larger than in the example shown in FIG. 3. In the example shown in FIG. 4, the range in which the rate of change of the first electrical resistance R1 is high is used for detection.

[0030] In the embodiment, the maximum value of the first current i1 is the first polarity, and the minimum value of the first current i1 is the first polarity or 0. In the embodiment, the first current i1 that changes with one polarity is used. This allows the range in which the rate of change of the first electrical resistance R1 is high to be used for detection. For example, detection with high sensitivity is possible. For example, a high signal-to-noise ratio can be obtained. According to the embodiment, a sensor with improved characteristics can be provided.

[0031] In the embodiment, a first current i1 that changes with one polarity is used. This allows, for example, a wide dynamic range to be obtained. For example, there are cases where the change in the magnetic field Ht to be detected is smaller than the change in the first magnetic field Ha caused by the first current i1. In such cases, by controlling the DC component id1 of the first current i1, the electrical signal corresponding to the change in the first electrical resistance R1 can be more easily adapted to the characteristics of the signal detection circuit. The signal can be amplified with low noise. High-precision detection is possible.

[0032] For example, when the first current i1 (and the first magnetic field) changes from positive to 0 or negative, magnetic domain disturbance may occur in at least one of the first magnetic layer 11a and the first opposing magnetic layer 11b. Magnetic domain disturbance includes, for example, the creation of a magnetic domain, the disappearance of a magnetic domain, or the movement of a magnetic domain. Magnetic domain disturbance may cause noise in the signal obtained from the first magnetic element 11. In an embodiment, if the first current i1 and the first magnetic field Ha are always of one polarity (for example, positive), noise caused by magnetic domain disturbance can be suppressed. This enables more stable and highly sensitive detection.

[0033] 4, the first electric resistance R1 changes as an even function with respect to the magnetic field Hx applied to the first magnetic element 11. The change in the first electric resistance R1 is nonlinear (for example, a quadratic function).

[0034] The magnetic field Hx (third direction magnetic field) applied to the first magnetic element 11 includes a first magnetic field H1, a second magnetic field H2, a third magnetic field H3, and a fourth magnetic field H4. The first magnetic field H1 is between 0 and the fourth magnetic field H4. The second magnetic field H2 is between the first magnetic field H1 and the fourth magnetic field H4. The third magnetic field H3 is between the second magnetic field H2 and the fourth magnetic field H4. The difference between the first magnetic field H1 and the second magnetic field H2 is the same as the difference between the third magnetic field H3 and the fourth magnetic field H4.

[0035] In the embodiment, a first rate of change of the first electrical resistance R1 in response to a change between the first magnetic field H1 and the second magnetic field H2 is lower than a second rate of change of the first electrical resistance R1 in response to a change between the third magnetic field H3 and the fourth magnetic field H4. In the range between the third magnetic field H3 and the fourth magnetic field H4, where the absolute value of the magnetic field Hx is relatively large, the first electrical resistance R1 exhibits a high rate of change.

[0036] In the embodiment, the range showing such a high rate of change is used for detection. For example, the magnetic field (first magnetic field Ha) generated from the first conductive member 21 by the first current i1 includes a third magnetic field H3 and a fourth magnetic field H4.

[0037] 1(a), the first circuit 71A may include an AC circuit 71a and a DC circuit 71b. The AC circuit 71a is, for example, an AC power supply. The DC circuit 71b is, for example, a DC power supply. The DC component id1 may be variable by the DC circuit 71b.

[0038] 1(a), the control unit 70 may include an element current circuit 72. The element current circuit 72 is capable of supplying a detection current id to the first magnetic element 11. The element current circuit 72 may be a constant current source. The element current circuit 72 does not have to be a constant current source.

[0039] As shown in FIG. 1(a), the control unit 70 may include a detection circuit 73. The detection circuit 73 can detect a value corresponding to a change in the first electrical resistance R1. For example, a detection current id generates a potential difference corresponding to the first electrical resistance R1. The detection circuit 73 detects a signal including the change in the potential difference. A signal corresponding to the magnetic field Ht to be detected is obtained from an output section 73o of the detection circuit 73.

[0040] As shown in FIG. 2(a), the length of the first conductive member 21 in the second direction D2 is defined as length Lc1. The length of the first conductive member 21 in the third direction D3 is defined as length Lc2. In the embodiment, it is preferable that length Lc1 is longer than length Lc2. The third direction D3 intersects with a plane including the first direction D1 and the second direction D2. The direction of the generated magnetic field (first magnetic field Ha) becomes more stable. The ratio of length Lc1 to length Lc2 (Lc1 / Lc2) is, for example, 2 to 1000 times.

[0041] As shown in FIG. 2(a), the length of the first magnetic element 11 in the second direction D2 is defined as length Le1. The length of the first magnetic element 11 in the third direction D3 is defined as length Le2. In the embodiment, it is preferable that length Le1 is longer than length Le2. This makes the magnetization direction of the magnetic layer more stable. This is due to shape anisotropy. The ratio of length Le1 to length Le2 (Le1 / Le2) is, for example, 2 times or more and 1000 times or less.

[0042] As shown in FIG. 2(b), in this example, when the first current i1 is not flowing, the magnetization 11aM of the first magnetic layer 11a is aligned with the second direction D2. The magnetization 11bM of the first opposing magnetic layer 11b is aligned with the second direction D2. In the embodiment, the magnetization 11aM may intersect with the magnetization 11bM. In the embodiment, the first magnetic layer 11a may be, for example, one of the reference layer and the magnetization free layer. The first opposing magnetic layer 11b may be, for example, the other of the reference layer and the magnetization free layer.

[0043] The change in the first electrical resistance of the first magnetic element 11 is based on the change in the angle between the magnetization 11aM and the magnetization 11bM in response to a magnetic field applied to the first magnetic element 11, for example.

[0044] 2(b) and 2(c), in this example, the direction from the first conductive member 21 to the first magnetic element 11 is along the first direction D1. In this example, the first magnetic layer 11a is located between the first conductive member 21 and the first opposing magnetic layer 11b. In an embodiment, the first opposing magnetic layer 11b may be located between the first conductive member 21 and the first magnetic layer 11a.

[0045] In the embodiment, the first non-magnetic layer 11n may be conductive. The first non-magnetic layer 11n includes, for example, Cu. The first magnetic element functions as a GMR (Giant MagnetoResistive effect) element. The first non-magnetic layer 11n may be insulating. The first non-magnetic layer 11n includes, for example, MgO. The first magnetic element functions as a TMR (Tunnel Magneto Resistance effect) element.

[0046] 2(b) and 2(c), the first element 10A may include a first insulating member 81. At least a portion of the first insulating member 81 is provided between the first magnetic element 11 and the first conductive member 21. The first insulating member 81 electrically insulates the first magnetic element 11 from the first conductive member 21.

[0047] As shown in FIG. 2(a), the first magnetic element 11 includes a first element portion 11e and a first other element portion 11f. The first element portion 11e corresponds to the first conductive portion 21e. The first other element portion 11f corresponds to the first other conductive portion 21f. The direction from the first other element portion 11f to the first element portion 11e is along the second direction D2. The distance between the first element portion 11e and the first conductive portion 21e is shorter than the distance between the first element portion 11e and the first other conductive portion 21f. The distance between the first other element portion 11f and the first other conductive portion 21f is shorter than the distance between the first other element portion 11f and the first conductive portion 21e.

[0048] Hereinafter, some examples of sensors according to the embodiments will be described. FIG. 5 is a schematic view illustrating the sensor according to the first embodiment. 5, for ease of understanding, the first magnetic element 11 is depicted shifted in the X-axis direction from the first conductive member 21. The first magnetic element 11 may overlap the first conductive member 21 in the Z-axis direction.

[0049] As shown in FIG. 5, in the sensor 111 according to the embodiment, the element unit 10U includes a first element 10A and a first resistor 31. The first resistor 31 includes a first resistance portion 31e and a first other resistance portion 31f. In this example, the first element portion 11e is electrically connected to the element current circuit 72. The first other element portion 11f is electrically connected to the first resistance portion 31e. The first other resistance portion 31f is electrically connected to the element current circuit 72. The detection circuit 73 detects a change in the potential at the connection point between the first other element portion 11f and the first resistance portion 31e.

[0050] FIG. 6 and FIGS. 7(a) to 7(c) are schematic views illustrating the sensor according to the first embodiment. 6, in the sensor 112 according to the embodiment, the element unit 10U further includes a second element 10B. The second element 10B includes a second magnetic element 12 and a second conductive member 22.

[0051] In FIG. 6, for ease of viewing, the first magnetic element 11 is depicted shifted from the first conductive member 21 in the X-axis direction. The first magnetic element 11 may overlap the first conductive member 21 in the Z-axis direction. In FIG. 6, for ease of viewing, the second magnetic element 12 is depicted shifted from the second conductive member 22 in the X-axis direction. The second magnetic element 12 may overlap the second conductive member 22 in the Z-axis direction.

[0052] 7(b) and 7(c), the second magnetic element 12 includes a second magnetic layer 12a and a second opposing magnetic layer 12b. In this example, the second magnetic element 12 includes a second non-magnetic layer 12n. The second non-magnetic layer 12n is provided between the second magnetic layer 12a and the second opposing magnetic layer 12b.

[0053] In the second magnetic element 12, the second magnetic layer 12a may be, for example, one of a reference layer and a magnetization free layer. The second opposing magnetic layer 12b may be, for example, the other of a reference layer and a magnetization free layer. The change in the electrical resistance of the second magnetic element 12 is based on, for example, a change in the angle between the magnetization 12aM of the second magnetic layer 12a and the magnetization 12bM of the second opposing magnetic layer 12b in response to a magnetic field applied to the second magnetic element 12.

[0054] 6, the second conductive member 22 includes a second conductive portion 22e and a second other conductive portion 22f. The direction from the second other conductive portion 22f to the second conductive portion 22e is along the second direction D2.

[0055] 6, in this example, the first conductive portion 21e is electrically connected to the first circuit 71A. The first other conductive portion 21f is electrically connected to the second other conductive portion 22f. The second conductive portion 22e is electrically connected to the first circuit 71A. The first circuit 71A can supply a first current i1 to the first conductive member 21 and the second conductive member 22.

[0056] The first magnetic element 11 includes a first element portion 11e and a first other element portion 11f. The first element portion 11e corresponds to the first conductive portion 21e. The first other element portion 11f corresponds to the first other conductive portion 21f. The direction from the first element portion 11e to the first other element portion 11f is a first direction.

[0057] The second magnetic element 12 includes a second element portion 12e and a second other element portion 12f. The second element portion 12e corresponds to the second conductive portion 22e. The second other element portion 12f corresponds to the second other conductive portion 22f. The direction from the second element portion 12e to the second other element portion 12f is a second direction.

[0058] The detection current id supplied from the element current circuit 72 flows in a first direction through the first magnetic element 11 and in a second direction through the second magnetic element 12. When the first current i1 supplied from the first circuit 71A flows in the first direction through the first conductive member 21, the first current i1 flows in the second direction opposite to the second direction through the second conductive member 22.

[0059] FIG. 8 is a schematic view illustrating the sensor according to the first embodiment. As shown in FIG. 8 , in the sensor 113 according to the embodiment, the element unit 10U includes a first element 10A, a second element 10B, a first resistor 31, and a second resistor 32. The first element 10A includes a first magnetic element 11 and a first conductive member 21. The second element 10B includes a second magnetic element 12 and a second conductive member 22. In FIG. 8 , for ease of viewing, the first magnetic element 11 is depicted shifted from the first conductive member 21 in the X-axis direction. In FIG. 8 , for ease of viewing, the second magnetic element 12 is depicted shifted from the second conductive member 22 in the X-axis direction.

[0060] The first magnetic element 11 includes a first element portion 11e and a first other element portion 11f. The first element portion 11e corresponds to the first conductive portion 21e. The first other element portion 11f corresponds to the first other conductive portion 21f. The direction from the first element portion 11e to the first other element portion 11f is a first direction.

[0061] The second element 10B includes a second magnetic element 12 and a second conductive member 22. The second conductive member 22 includes a second conductive portion 22e and a second other conductive portion 22f. The direction from the second other conductive portion 22f to the second conductive portion 22e is along the second direction D2.

[0062] The first resistor 31 includes a first resistor portion 31e and a first other resistor portion 31f. The direction from the first other resistor portion 31f to the first resistor portion 31e is along the second direction D2. The second resistor 32 includes a second resistor portion 32e and a second other resistor portion 32f. The direction from the second other resistor portion 32f to the second resistor portion 32e is along the second direction D2.

[0063] The second magnetic element 12 includes a second element portion 12e and a second other element portion 12f. The second element portion 12e corresponds to the second conductive portion 22e. The second other element portion 12f corresponds to the second other conductive portion 22f. The direction from the second element portion 12e to the second other element portion 12f is a second direction.

[0064] The first element portion 11e is electrically connected to the element current circuit 72. The first other element portion 11f is electrically connected to the second resistance portion 32e. The second other resistance portion 32f is electrically connected to the element current circuit 72.

[0065] The first resistance portion 31e is electrically connected to the element current circuit 72. The first other resistance portion 31f is electrically connected to the second element portion 12e. The second other element portion 12f is electrically connected to the element current circuit 72.

[0066] The sense current id flows through the first magnetic element 11 in a first direction and through the second magnetic element 12 in a second direction.

[0067] 8, in this example, the first conductive portion 21e is electrically connected to the first circuit 71A. The first other conductive portion 21f is electrically connected to the second conductive portion 22e. The second other conductive portion 22f is electrically connected to the first circuit 71A. The first circuit 71A can supply a first current i1 to the first conductive member 21 and the second conductive member 22.

[0068] When the first current i1 flows through the first conductive member 21 in a first direction, the first current i1 flows through the second conductive member 22 in a second direction.

[0069] The detection circuit 73 can detect the potential difference between the first connection point CP1 and the second connection point CP2. The first connection point CP1 is a connection point between the first other element portion 11f and the second resistance portion 32e. The second connection point CP2 is a connection point between the first other resistance portion 31f and the second element portion 12e.

[0070] The detection circuit 73 may include a differential amplifier 74 and a processing circuit 75. The differential amplifier 74 detects the potential difference between the first connection point CP1 and the second connection point CP2. The processing circuit 75 processes the output signal from the differential amplifier 74. The processing circuit 75 may include, for example, at least one of a lock-in amplifier, a band-pass filter circuit, and an FFT (Fast Fourier Transform) circuit. The processing circuit 75 extracts, for example, a first frequency component of the differential amplifier 74. The first frequency is, for example, the frequency of the AC component ia1 of the first current i1. The first frequency is, for example, the frequency of the AC magnetic field component Ha1 of the first magnetic field Ha. The first frequency may include, for example, harmonic components of the AC component ia1 of the first current i1. The first frequency may include, for example, harmonic components of the AC magnetic field component Ha1 of the first magnetic field Ha.

[0071] In this way, the element section 10U may include a bridge circuit 10V (see FIG. 8) including the first element 10A. The element current circuit 72 is capable of supplying a detection current id to the bridge circuit 10V. The detection circuit 73 is capable of detecting a value corresponding to the difference between the potential at a first midpoint (e.g., first connection point CP1) of the bridge circuit 10V and the potential at a second midpoint (e.g., second connection point CP2) of the bridge circuit 10V.

[0072] FIG. 9 is a schematic view illustrating the sensor according to the first embodiment. 9, in the sensor 114 according to the embodiment, the element unit 10U includes a first element 10A, a first resistor 31, a second resistor 32, and a third resistor 33. The third resistor 33 includes a third resistor portion 33e and a third other resistor portion 33f. The direction from the third other resistor portion 33f to the third resistor portion 33e is along the second direction D2.

[0073] In this example, the first element portion 11e is electrically connected to the element current circuit 72. The first other element portion 11f is electrically connected to the second resistance portion 32e. The second other resistance portion 32f is electrically connected to the element current circuit 72. The first resistance portion 31e is electrically connected to the element current circuit 72. The first other resistance portion 31f is electrically connected to the third resistance portion 33e. The third other resistance portion 33f is electrically connected to the element current circuit 72. The first connection point CP1 is a connection point between the first other element portion 11f and the second resistance portion 32e. The second connection point CP2 is a connection point between the first other resistance portion 31f and the third resistance portion 33e.

[0074] FIG. 10, FIG. 11(a) to FIG. 11(c), and FIG. 12(a) to FIG. 12(c) are schematic views illustrating the sensor according to the first embodiment. 10 , in the sensor 115 according to the embodiment, the element unit 10U includes a first element 10A, a second element 10B, a third element 10C, and a fourth element 10D. The first element 10A includes a first magnetic element 11 and a first conductive member 21. The second element 10B includes a second magnetic element 12 and a second conductive member 22. The third element 10C includes a third magnetic element 13 and a third conductive member 23. The fourth element 10D includes a fourth magnetic element 14 and a fourth conductive member 24.

[0075] 11(b) and 11(c), the third magnetic element 13 includes a third magnetic layer 13a and a third opposing magnetic layer 13b. In this example, the third magnetic element 13 includes a third non-magnetic layer 13n. The third non-magnetic layer 13n is provided between the third magnetic layer 13a and the third opposing magnetic layer 13b.

[0076] In the third magnetic element 13, the third magnetic layer 13a may be, for example, one of a reference layer and a magnetization free layer. The third opposing magnetic layer 13b may be, for example, the other of a reference layer and a magnetization free layer. The change in the electrical resistance of the third magnetic element 13 is based on, for example, a change in the angle between the magnetization 13aM of the third magnetic layer 13a and the magnetization 13bM of the third opposing magnetic layer 13b in response to a magnetic field applied to the third magnetic element 13.

[0077] 12(b) and 12(c), the fourth magnetic element 14 includes a fourth magnetic layer 14a and a fourth opposing magnetic layer 14b. In this example, the fourth magnetic element 14 includes a fourth non-magnetic layer 14n. The fourth non-magnetic layer 14n is provided between the fourth magnetic layer 14a and the fourth opposing magnetic layer 14b.

[0078] In the fourth magnetic element 14, the fourth magnetic layer 14a may be, for example, one of a reference layer and a magnetization free layer. The fourth opposing magnetic layer 14b may be, for example, the other of a reference layer and a magnetization free layer. The change in the electrical resistance of the fourth magnetic element 14 is based on, for example, a change in the angle between the magnetization 14aM of the fourth magnetic layer 14a and the magnetization 14bM of the fourth opposing magnetic layer 14b in response to a magnetic field applied to the fourth magnetic element 14.

[0079] 11(a), the third conductive member 23 includes a third conductive portion 23e and a third other conductive portion 23f. The direction from the third other conductive portion 23f to the third conductive portion 23e is along the second direction D2.

[0080] 12(a), the fourth conductive member 24 includes a fourth conductive portion 24e and a fourth other conductive portion 24f. The direction from the fourth other conductive portion 24f to the fourth conductive portion 24e is along the second direction D2.

[0081] 10, the first magnetic element 11 includes a first element portion 11e and a first other element portion 11f. The first element portion 11e corresponds to the first conductive portion 21e. The first other element portion 11f corresponds to the first other conductive portion 21f. The direction from the first element portion 11e to the first other element portion 11f is a first direction.

[0082] 10, the second magnetic element 12 includes a second element portion 12e and a second other element portion 12f. The second element portion 12e corresponds to the second conductive portion 22e. The second other element portion 12f corresponds to the second other conductive portion 22f. The direction from the second element portion 12e to the second other element portion 12f is a second direction.

[0083] 10, the third magnetic element 13 includes a third element portion 13e and a third other element portion 13f. The third element portion 13e corresponds to the third conductive portion 23e. The third other element portion 13f corresponds to the third other conductive portion 23f. The direction from the third element portion 13e to the third other element portion 13f is a third direction.

[0084] 10, the fourth magnetic element 14 includes a fourth element portion 14e and a fourth other element portion 14f. The fourth element portion 14e corresponds to the fourth conductive portion 24e. The fourth other element portion 14f corresponds to the fourth other conductive portion 24f. The direction from the fourth element portion 14e to the fourth other element portion 14f is a fourth direction.

[0085] The first element portion 11e is electrically connected to the element current circuit 72. The first other element portion 11f is electrically connected to the second element portion 12e. The second other element portion 12f is electrically connected to the element current circuit 72.

[0086] The third element portion 13e is electrically connected to the element current circuit 72. The third other element portion 13f is electrically connected to the fourth element portion 14e. The fourth other element portion 14f is electrically connected to the element current circuit 72.

[0087] The detection current id flows through the first magnetic element 11 in a first direction, through the second magnetic element 12 in a second direction, through the third magnetic element 13 in a third direction, and through the fourth magnetic element 14 in a fourth direction.

[0088] In this example, the first conductive portion 21e is electrically connected to the first circuit 71A. The first other conductive portion 21f is electrically connected to the fourth other conductive portion 24e. The fourth other conductive portion 24f is electrically connected to the third other conductive portion 23f. The third conductive portion 23e is electrically connected to the second other conductive portion 22f. The second conductive portion 22e is electrically connected to the first circuit 71A.

[0089] When the first current i1 supplied from the first circuit 71A flows through the first conductive member 21 in a first direction, the first current i1 flows through the second conductive member 22 in a direction opposite to the second direction, the first current i1 flows through the third conductive member 23 in a direction opposite to the third direction, and the first current i1 flows through the fourth conductive member 24 in a fourth direction.

[0090] The first connection point CP1 is a connection point between the first other element portion 11f and the second element portion 12e, and the second connection point CP2 is a connection point between the third other element portion 13f and the fourth element portion 14e.

[0091] FIG. 13 is a schematic view illustrating the sensor according to the first embodiment. 13 , in sensor 116 according to the embodiment, element unit 10U includes first element 10A, second element 10B, third element 10C, and fourth element 10D. In sensor 116, the connection relationship of the plurality of conductive members is different from the connection relationship of the plurality of conductive members in sensor 115. In sensor 116, the connection relationship of the plurality of magnetic elements may be the same as the connection relationship of the plurality of magnetic elements in sensor 115.

[0092] In sensor 116, first conductive portion 21e and third conductive portion 23e are electrically connected to first circuit 71A. First other conductive portion 21f is electrically connected to second conductive portion 22e. Third other conductive portion 23f is electrically connected to fourth conductive portion 24e. Second other conductive portion 22f and fourth other conductive portion 24f are electrically connected to first circuit 71A.

[0093] In the sensor 116, the magnetization direction in the reference layer of the first magnetic element 11 is the same as the magnetization direction in the reference layer of the fourth magnetic element 14. The magnetization direction in the reference layer of the second magnetic element 12 is the same as the magnetization direction in the reference layer of the third magnetic element 13. The magnetization directions in the reference layer of the first magnetic element 11 and the fourth magnetic element 14 are opposite to the magnetization directions in the reference layer of the second magnetic element 12 and the third magnetic element 13. The configuration of the sensor 116 also makes it possible to provide a sensor that is able to suppress the influence of noise and improve its characteristics.

[0094] In the embodiment, a circuit may be provided to supply a current including an AC component to each of the second conductive member 22, the third conductive member 23, and the fourth conductive member 24. In each circuit, the DC component may be independently variable.

[0095] FIG. 14 is a schematic view illustrating the sensor according to the first embodiment. 14, in the sensor 122 according to the embodiment, the control unit 70 further includes a second circuit 71 B. The configuration of the sensor 122 other than this may be similar to the configuration of the sensor 112.

[0096] For example, the element unit 10U further includes a second element 10B. The second element 10B includes a second magnetic element 12 and a second conductive member 22. As already described, the second magnetic element 12 includes a second magnetic layer 12a and a second opposing magnetic layer 12b. The second conductive member 22 includes a second conductive portion 22e and a second other conductive portion 22f. The direction from the second other conductive portion 22f to the second conductive portion 22e is along the second direction D2.

[0097] The second circuit 71B is electrically connected to the second conductive portion 22e and the second other conductive portion 22f. The second circuit 71B is capable of supplying a second current i2 to the second conductive member 22. The second current i2 includes an AC component. The maximum value of the second current i2 has a first polarity. The minimum value of the second current i2 is the first polarity or 0. The control unit 70 may be capable of controlling the DC component of the second current i2 independently of the DC component id1 of the first current i1. For example, it is possible to correct the difference in characteristics between the first element 10A and the second element 10B.

[0098] FIG. 15 is a schematic view illustrating the sensor according to the first embodiment. 15, in the sensor 123 according to the embodiment, the control unit 70 further includes a second circuit 71B. The remaining configuration of the sensor 123 may be similar to that of the sensor 113. In the sensor 123 as well, the control unit 70 may be able to control the DC component of the second current i2 independently of the DC component id1 of the first current i1.

[0099] FIG. 16 is a schematic view illustrating the sensor according to the first embodiment. 16, in a sensor 125 according to this embodiment, a control unit 70 includes a first circuit 71A, a second circuit 71B, a third circuit 71C, and a fourth circuit 71D. Except for this, the configuration of the sensor 125 may be the same as the configuration of the sensor 115.

[0100] As already described, the second element 10B includes the second magnetic element 12 and the second conductive member 22. The second magnetic element 12 includes the second magnetic layer 12a and the second opposing magnetic layer 12b. The second conductive member 22 includes the second conductive portion 22e and the second other conductive portion 22f. The direction from the second other conductive portion 22f to the second conductive portion 22e is along the second direction D2.

[0101] As already described, the third element 10C includes the third magnetic element 13 and the third conductive member 23. The third magnetic element 13 includes the third magnetic layer 13a and the third opposing magnetic layer 13b. The third conductive member 23 includes the third conductive portion 23e and the third other conductive portion 23f. The direction from the third other conductive portion 23f to the third conductive portion 23e is along the second direction D2.

[0102] As already described, the fourth element 10D includes the fourth magnetic element 14 and the fourth conductive member 24. The fourth magnetic element 14 includes a fourth magnetic layer 14a and a fourth opposing magnetic layer 14b. The fourth conductive member 24 includes a fourth conductive portion 24e and a fourth other conductive portion 24f. The direction from the fourth other conductive portion 24f to the fourth conductive portion 24e is along the second direction D2.

[0103] The second circuit 71B is electrically connected to the second conductive portion 22e and the second other conductive portion 22f. The second circuit 71B is capable of supplying a second current i2 to the second conductive member 22. The second current i2 includes an AC component. The maximum value of the second current i2 has a first polarity. The minimum value of the second current i2 is either the first polarity or zero.

[0104] The third circuit 71C is electrically connected to the third conductive portion 23e and the third other conductive portion 23f. The third circuit 71C is capable of supplying a third current i3 to the third conductive member 23. The third current i3 includes an AC component. The maximum value of the third current i3 has the first polarity. The minimum value of the third current i3 is the first polarity or zero.

[0105] The fourth circuit 71D is electrically connected to the fourth conductive portion 24e and the fourth other conductive portion 24f. The fourth circuit 71D is capable of supplying a fourth current i4 to the fourth conductive member 24. The fourth current i4 includes an AC component. The maximum value of the fourth current i4 has a first polarity. The minimum value of the fourth current i4 is either the first polarity or zero.

[0106] The control unit 70 may be capable of controlling at least one of the DC component of the second current i2, the DC component of the third current i3, and the DC component of the fourth current i4 independently of the DC component id1 of the first current i1.

[0107] In the sensor 122, the AC component of the second current i2 is in opposite phase to the AC component of the first current i1, and in the sensor 123, the AC component of the second current i2 is in the same phase as the AC component of the first current i1.

[0108] In the sensor 125, the phase of the AC component of the second current i2 is opposite to the phase of the AC component of the first current i1. In the sensor 125, the phase of the AC component of the third current i3 is opposite to the phase of the AC component of the first current i1. In the sensor 125, the phase of the AC component of the fourth current i4 is the same as the phase of the AC component of the first current i1.

[0109] (Second embodiment) The second embodiment relates to an examination device, which may include a diagnostic device, as will be described later.

[0110] FIG. 17 is a schematic perspective view showing an inspection device according to the second embodiment. As shown in Fig. 17, an inspection device 710 according to the second embodiment includes a sensor 150a (magnetic sensor) and a processing unit 770. The sensor 150a may be the sensor according to the first embodiment or a variation thereof. The processing unit 770 processes an output signal obtained from the sensor 150a. The processing unit 770 may compare the signal obtained from the sensor 150a with a reference value. The processing unit 770 can output an inspection result based on the processing result.

[0111] For example, the test object 680 is tested by the test device 710. The test object 680 is, for example, an electronic device (including a semiconductor circuit, etc.). The test object 680 may also be, for example, a battery 610.

[0112] For example, the sensor 150a according to the embodiment may be used together with the battery 610. For example, the battery system 600 includes the battery 610 and the sensor 150a. The sensor 150a can detect a magnetic field generated by a current flowing through the battery 610.

[0113] FIG. 18 is a schematic plan view showing an inspection device according to the second embodiment. 18, the sensor 150a includes, for example, a plurality of sensors according to the embodiment. In this example, the sensor 150a includes a plurality of sensors (such as element units 10U of the sensors 110). The plurality of sensors are arranged, for example, along two directions (such as the X-axis direction and the Y-axis direction). The plurality of sensors 110 are provided, for example, on a substrate.

[0114] The sensor 150a can detect a magnetic field generated by a current flowing through the inspection target 680 (which may be, for example, a battery 610). For example, when the battery 610 approaches an abnormal state, an abnormal current may flow through the battery 610. By detecting the abnormal current with the sensor 150a, it is possible to know a change in the state of the battery 610. For example, with the sensor 150a placed close to the battery 610, the entire battery 610 can be inspected in a short time using sensor group driving means in two directions. The sensor 150a may be used to inspect the battery 610 during the manufacture of the battery 610.

[0115] The sensor according to the embodiment can be applied to an inspection device 710 such as a diagnostic device, for example. FIG. 19 is a schematic diagram showing a sensor and an inspection device according to an embodiment. 19, a diagnostic device 500, which is an example of an inspection device 710, includes a sensor 150. The sensor 150 includes the sensors described in relation to the first embodiment and variations thereof.

[0116] In the diagnostic device 500, the sensor 150 is, for example, a magnetoencephalograph. The magnetoencephalograph detects magnetic fields emitted by cranial nerves. When the sensor 150 is used in a magnetoencephalograph, the size of the magnetic element included in the sensor 150 is, for example, 1 mm or more and less than 10 mm. This size is, for example, the length including the MFC.

[0117] As shown in Fig. 19, the sensor 150 (magnetoencephalograph) is worn on, for example, the head of a human body. The sensor 150 (magnetoencephalograph) includes a sensor unit 301. The sensor 150 (magnetoencephalograph) may include a plurality of sensor units 301. The number of the plurality of sensor units 301 is, for example, approximately 100 (for example, not less than 50 and not more than 150). The plurality of sensor units 301 are provided on a flexible base 302.

[0118] The sensor 150 may include, for example, a circuit for differential detection, etc. The sensor 150 may also include a sensor (for example, a potential terminal or an acceleration sensor) separate from the sensor.

[0119] The size of the sensor 150 is smaller than that of a conventional SQUID sensor. This makes it easy to install multiple sensor units 301. It also makes it easy to install multiple sensor units 301 together with other circuits. It also makes it easy for multiple sensor units 301 to coexist with other sensors.

[0120] The base 302 may include an elastic material such as silicone resin. For example, a plurality of sensor units 301 are connected to the base 302. The base 302 can be attached to the head, for example.

[0121] The input / output cord 303 of the sensor unit 301 is connected to a sensor driving unit 506 and a signal input / output unit 504 of the diagnostic device 500. The sensor unit 301 performs magnetic field measurement based on power from the sensor driving unit 506 and a control signal from the signal input / output unit 504. The measurement result is input to the signal input / output unit 504. The signal obtained by the signal input / output unit 504 is supplied to a signal processing unit 508. The signal processing unit 508 performs processing such as noise removal, filtering, amplification, and signal calculation. The signal processed by the signal processing unit 508 is supplied to a signal analysis unit 510. The signal analysis unit 510 extracts, for example, a specific signal for magnetoencephalography. The signal analysis unit 510 performs signal analysis, for example, to align the signal phase.

[0122] The output of the signal analysis unit 510 (data after signal analysis) is supplied to a data processing unit 512. The data processing unit 512 performs data analysis. In this data analysis, for example, image data such as MRI (Magnetic Resonance Imaging) can be incorporated. In this data analysis, for example, scalp potential information such as EEG (Electroencephalogram) can be incorporated. By the data analysis, for example, neural firing point analysis or inverse problem analysis can be performed.

[0123] The results of the data analysis are supplied to, for example, the imaging diagnostic unit 516. Imaging is performed in the imaging diagnostic unit 516. The imaging assists diagnosis.

[0124] The above series of operations is controlled, for example, by a control mechanism 502. For example, necessary data such as primary signal data or metadata during data processing is stored in a data server. The data server and the control mechanism may be integrated.

[0125] The diagnostic device 500 according to the embodiment includes a sensor 150 and a processing unit that processes an output signal obtained from the sensor 150. The processing unit includes, for example, at least one of a signal processing unit 508 and a data processing unit 512. The processing unit includes, for example, a computer.

[0126] In the sensor 150 shown in Fig. 19, the sensor unit 301 is placed on the head of the human body. The sensor unit 301 may also be placed on the chest of the human body. This allows for cardiac magnetism measurement. For example, the sensor unit 301 may also be placed on the abdomen of a pregnant woman. This allows for fetal heart rate testing.

[0127] The sensor device including the subject is preferably placed in a shielded room, which can suppress the influence of, for example, geomagnetism or magnetic noise.

[0128] For example, a mechanism may be provided to locally shield the measurement site on the human body or the sensor unit 301. For example, a shielding mechanism may be provided in the sensor unit 301. For example, effective shielding may be performed in signal analysis or data processing.

[0129] In the embodiment, the substrate 302 may be flexible or may not have substantial flexibility. In the example shown in FIG. 19, the substrate 302 is a continuous film processed into a hat shape. The substrate 302 may be net-shaped. This may provide, for example, good wearability. For example, the substrate 302 may adhere better to the human body. The substrate 302 may be helmet-shaped and hard.

[0130] FIG. 20 is a schematic diagram showing an inspection device according to an embodiment. In the example shown in FIG. 20, a sensor section 301 is provided on a flat hard substrate 305 .

[0131] In the example shown in Fig. 20, the input and output of signals obtained from the sensor unit 301 are the same as the input and output described with reference to Fig. 19. In the example shown in Fig. 20, the processing of signals obtained from the sensor unit 301 is the same as the processing described with reference to Fig. 19.

[0132] There is a reference example in which a SQUID (Superconducting Quantum Interference Device) sensor is used as a device to measure weak magnetic fields such as those generated by living organisms. However, because this reference example uses superconductivity, the device is large and consumes a lot of power, which places a heavy burden on the subject (patient) to be measured.

[0133] According to the embodiment, the device can be made smaller. Power consumption can be reduced. The burden on the measurement subject (patient) can be reduced. According to the embodiment, the signal-to-noise ratio of magnetic field detection can be improved. Sensitivity can be improved.

[0134] The embodiment may include the following configurations (for example, technical solutions). (Configuration 1) An element unit including a first element including a first magnetic element and a first conductive member, the first magnetic element includes a first magnetic layer and a first opposing magnetic layer; the first conductive member includes a first conductive portion and a first other conductive portion, and a second direction from the first other conductive portion to the first conductive portion intersects with a first direction from the first magnetic layer to the first opposing magnetic layer; a rate of change of a first electrical resistance of the first magnetic element with respect to a change in a third direction magnetic field along a third direction intersecting a plane including the first direction and the second direction is higher than a rate of change of the first electrical resistance with respect to a change in a second direction magnetic field along the second direction; the element portion; a control unit including a first circuit, the first circuit being electrically connected to the first conductive portion and the first other conductive portion and capable of supplying a first current to the first conductive member, the first current including an AC component, a maximum value of the first current being of a first polarity, and a minimum value of the first current being of the first polarity or 0; A sensor equipped with

[0135] (Configuration 2) 2. The sensor according to claim 1, wherein the magnetic field to be detected includes a component along the third direction.

[0136] (Configuration 3) An element unit including a first element including a first magnetic element and a first conductive member, the first magnetic element includes a first magnetic layer and a first opposing magnetic layer; the first conductive member includes a first conductive portion and a first other conductive portion, and a second direction from the first other conductive portion to the first conductive portion intersects with a first direction from the first magnetic layer to the first opposing magnetic layer; the element portion; a control unit including a first circuit, the first circuit being electrically connected to the first conductive portion and the first other conductive portion and capable of supplying a first current to the first conductive member, the first current including an AC component, a maximum value of the first current being of a first polarity, and a minimum value of the first current being of the first polarity or 0; Equipped with a first electrical resistance of the first magnetic element that varies in response to a magnetic field to be detected; The sensor, wherein the magnetic field to be detected includes a component along a third direction that intersects with a plane including the first direction and the second direction.

[0137] (Configuration 4) 4. The sensor according to any one of configurations 1 to 3, wherein the length of the first magnetic element in the second direction is longer than the length of the first magnetic element in the third direction.

[0138] (Configuration 5) a first magnetic field generated from the first conductive member by the first current includes a first magnetic field, a second magnetic field, a third magnetic field, and a fourth magnetic field; the first magnetic field value is between 0 and the fourth magnetic field value; the second value magnetic field is between the first value magnetic field and the fourth value magnetic field; the third magnetic field is between the second magnetic field and the fourth magnetic field; a difference between the first magnetic field value and the second magnetic field value is the same as a difference between the third magnetic field value and the fourth magnetic field value; The sensor of any one of configurations 1 to 4, wherein a first rate of change of the first electrical resistance in response to a change between the first value magnetic field and the second value magnetic field is lower than a second rate of change of the first electrical resistance in response to a change between the third value magnetic field and the fourth value magnetic field.

[0139] (Configuration 6) 6. The sensor of claim 5, wherein the magnetic field generated by the first current includes the third value magnetic field and the fourth value magnetic field.

[0140] (Configuration 7) 7. The sensor according to any one of configurations 1 to 6, wherein the first electrical resistance varies as an even function with respect to a magnetic field applied to the first magnetic element.

[0141] (Configuration 8) the control unit includes an element current circuit, The sensor according to any one of configurations 1 to 7, wherein the element current circuit is capable of supplying a detection current to the first magnetic element.

[0142] (Configuration 9) the control unit includes a detection circuit; 9. The sensor of claim 8, wherein the detection circuit is capable of detecting a value corresponding to a change in the first electrical resistance.

[0143] (Configuration 10) the element section includes a bridge circuit including the first element, 10. The sensor of claim 9, wherein the detection circuit is capable of detecting a value corresponding to a difference between a potential at a first midpoint of the bridge circuit and a potential at a second midpoint of the bridge circuit.

[0144] (Configuration 11) the element portion further includes a second element, the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the first conductive portion is electrically connected to the first circuit; the first other conductive portion is electrically connected to the second other conductive portion, the second conductive portion is electrically connected to the first circuit; the first circuit is capable of supplying the first current to the second conductive member; the first magnetic element includes a first element portion and a first other element portion, the first element portion corresponds to the first conductive portion, the first other element portion corresponds to the first other conductive portion, and a direction from the first element portion to the first other element portion is a first direction; the second magnetic element includes a second element portion and a second other element portion, the second element portion corresponds to the second conductive portion, the second other element portion corresponds to the second other conductive portion, and a direction from the second element portion to the second other element portion is a second direction; the detection current flows through the first magnetic element in the first direction and through the second magnetic element in the second direction; 11. The sensor of claim 10, wherein when the first current flows through the first conductive member in the first direction, the first current flows through the second conductive member in a direction opposite to the second direction.

[0145] (Configuration 12) The element portion is a second element; and The first resistance, The second resistor, further comprising the first magnetic element includes a first element portion and a first other element portion, the first element portion corresponds to the first conductive portion, the first other element portion corresponds to the first other conductive portion, and a direction from the first element portion to the first other element portion is a first direction; the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the first resistor includes a first resistor portion and a first other resistor portion, and a direction from the first other resistor portion to the first resistor portion is along the second direction; the second resistor includes a second resistor portion and a second other resistor portion, and a direction from the second other resistor portion to the second resistor portion is along the second direction; the second magnetic element includes a second element portion and a second other element portion, the second element portion corresponds to the second conductive portion, the second other element portion corresponds to the second other conductive portion, and a direction from the second element portion to the second other element portion is a second direction; the first element portion is electrically connected to the element current circuit; the first other element portion is electrically connected to the second resistor portion; the second other resistance portion is electrically connected to the element current circuit, the first resistance portion is electrically connected to the element current circuit; the first other resistor portion is electrically connected to the second element portion, the second other element portion is electrically connected to the element current circuit, the detection current flows through the first magnetic element in the first direction and through the second magnetic element in the second direction; 11. The sensor of claim 10, wherein when the first current flows through the first conductive member in the first direction, the first current flows through the second conductive member in the second direction.

[0146] (Configuration 13) The element portion is a second element; and a third element; and a fourth element; and further comprising the first magnetic element includes a first element portion and a first other element portion, the first element portion corresponds to the first conductive portion, the first other element portion corresponds to the first other conductive portion, and a direction from the first element portion to the first other element portion is a first direction; the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the second magnetic element includes a second element portion and a second other element portion, the second element portion corresponds to the second conductive portion, the second other element portion corresponds to the second other conductive portion, and a direction from the second element portion to the second other element portion is a second direction; the third element includes a third magnetic element and a third conductive member; the third magnetic element includes a third magnetic layer and a third opposing magnetic layer; the third conductive member includes a third conductive portion and a third other conductive portion, and a direction from the third other conductive portion to the third conductive portion is along the second direction; the third magnetic element includes a third element portion and a third other element portion, the third element portion corresponds to the third conductive portion, the third other element portion corresponds to the third other conductive portion, and a direction from the third element portion to the third other element portion is a third direction; the fourth element includes a fourth magnetic element and a fourth conductive member; the fourth magnetic element includes a fourth magnetic layer and a fourth opposing magnetic layer, the fourth conductive member includes a fourth conductive portion and a fourth other conductive portion, and a direction from the fourth other conductive portion to the fourth conductive portion is along the second direction; the fourth magnetic element includes a fourth element portion and a fourth other element portion, the fourth element portion corresponds to the fourth conductive portion, the fourth other element portion corresponds to the fourth other conductive portion, and a direction from the fourth element portion to the fourth other element portion is a fourth direction; the first element portion is electrically connected to the element current circuit; the first other element portion is electrically connected to the second element portion; the second other element portion is electrically connected to the element current circuit, the third element portion is electrically connected to the element current circuit, the third other element portion is electrically connected to the fourth element portion, the fourth other element portion is electrically connected to the element current circuit, the detection current flows through the first magnetic element in the first direction, the second magnetic element in the second direction, the third magnetic element in the third direction, and the fourth magnetic element in the fourth direction; 11. The sensor of claim 10, wherein when the first current flows through the first conductive member in the first direction, the first current flows through the second conductive member in a direction opposite to the second direction, the first current flows through the third conductive member in a direction opposite to the third direction, and the first current flows through the fourth conductive member in the fourth direction.

[0147] (Configuration 14) the element portion further includes a second element, the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the control unit further includes a second circuit; the second circuit is electrically connected to the second conductive portion and the second other conductive portion and is capable of supplying a second current to the second conductive member, the second current including an AC component, a maximum value of the second current being the first polarity, and a minimum value of the second current being the first polarity or 0; 11. The sensor of claim 10, wherein the control unit is capable of controlling a DC component of the second current independently of a DC component of the first current.

[0148] (Configuration 15) The element portion is a second element; and a third element; and a fourth element; and further comprising the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the third element includes a third magnetic element and a third conductive member; the third magnetic element includes a third magnetic layer and a third opposing magnetic layer; the third conductive member includes a third conductive portion and a third other conductive portion, and a direction from the third other conductive portion to the third conductive portion is along the second direction; the fourth element includes a fourth magnetic element and a fourth conductive member; the fourth magnetic element includes a fourth magnetic layer and a fourth opposing magnetic layer, the fourth conductive member includes a fourth conductive portion and a fourth other conductive portion, and a direction from the fourth other conductive portion to the fourth conductive portion is along the second direction; the control unit further includes a second circuit, a third circuit, and a fourth circuit; the second circuit is electrically connected to the second conductive portion and the second other conductive portion and is capable of supplying a second current to the second conductive member, the second current including an AC component, a maximum value of the second current being the first polarity, and a minimum value of the second current being the first polarity or 0; the third circuit is electrically connected to the third conductive portion and the third other conductive portion and is capable of supplying a third current to the third conductive member, the third current including an AC component, a maximum value of the third current being the first polarity, and a minimum value of the third current being the first polarity or 0; The sensor of configuration 10, wherein the fourth circuit is electrically connected to the fourth conductive portion and the fourth other conductive portion and is capable of supplying a fourth current to the fourth conductive member, the fourth current including an AC component, the maximum value of the fourth current being the first polarity, and the minimum value of the fourth current being the first polarity or 0.

[0149] (Configuration 16) 16. The sensor of claim 15, wherein the control unit is capable of controlling at least one of the DC component of the second current, the DC component of the third current, and the DC component of the fourth current independently of the DC component of the first current.

[0150] (Configuration 17) 17. The sensor according to any one of configurations 1 to 16, wherein a direction from the first conductive member to the first magnetic element is along the first direction.

[0151] (Configuration 18) The sensor according to any one of configurations 1 to 17, a processing unit for processing an output signal obtained from the sensor; An inspection device equipped with:

[0152] According to the embodiment, a sensor and an inspection device that can improve characteristics can be provided.

[0153] The embodiments of the present invention have been described above with reference to examples. However, the present invention is not limited to these examples. For example, the specific configurations of the elements included in the sensor or inspection device, such as the magnetic layer, magnetic element, conductive member, control unit, and processing unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0154] Any combination of two or more elements of each example within the scope of technical feasibility is also included within the scope of the present invention as long as it encompasses the gist of the present invention.

[0155] All sensors and inspection devices that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor and inspection device described above as embodiments of the present invention also fall within the scope of the present invention, as long as they include the gist of the present invention.

[0156] Within the scope of the concept of the present invention, a person skilled in the art may conceive of various modifications and alterations, and it is understood that these modifications and alterations also fall within the scope of the present invention.

[0157] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0158] 10A to 10D...first to fourth elements, 10U...element portion, 10V...bridge circuit, 11 to 14...first to fourth magnetic elements, 11a to 14a...first to fourth magnetic layers, 11aM to 14aM...magnetization, 11b to 14b...first to fourth opposing magnetic layers, 11bM to 14bM...magnetization, 11e to 14e...first to fourth element portions, 11f to 14f...first to fourth other element portions, 11n to 14n...first to fourth non-magnetic layers, 21 to 24...first to fourth conductive members, 21e to 24e...first to fourth conductive portions, 21f to 24f...first to fourth other conductive portions, 28...magnetic field generating portion, 31 to 33...first to third resistors, 31e-33e...first to third resistance portions, 31f-33f...first to third other resistance portions, 70...control portion, 71A-71D...first to fourth circuits, 71a...AC circuit, 71b...DC circuit, 72...element current circuit, 73...detection circuit, 73o...output portion, 74...differential amplifier, 75...processing circuit, 81...first insulating member, 110-116, 122, 123, 125, 150, 150a...sensor, 301...sensor portion, 302...base, 303...input / output code, 305...base, 500...diagnostic device, 502...control mechanism, 504...signal input / output portion, 506...sensor driving portion, 508...signal processing portion, 510...signal analysis portion, 512...data processing portion, 516...imaging diagnosis unit, 600...battery system, 610...battery, 680...inspection object, 710...inspection device, 770...processing unit, CP1, CP2...first and second connection points, D1 to D3...first to third directions, H1, H2...magnetic field, Ha...first magnetic field, Ha1...AC magnetic field component, Has...magnetic field strength, Hd1...DC magnetic field component, Hmin...minimum value, Hp1...amplitude, Ht...magnetic field to be detected, Hx...magnetic field, Lc1, Lc2, Le1, Le2...length, R1...first electrical resistance, i1, i2...first and second currents, ia1...AC component, id...detection current, id1...DC component, ip1...amplitude, tm...time

Claims

1. An element unit including a first element including a first magnetic element and a first conductive member, the first magnetic element includes a first magnetic layer and a first opposing magnetic layer; the first conductive member includes a first conductive portion and a first other conductive portion, and a second direction from the first other conductive portion to the first conductive portion intersects with a first direction from the first magnetic layer to the first opposing magnetic layer; a rate of change of a first electrical resistance of the first magnetic element with respect to a change in a third directional magnetic field along a third direction intersecting a plane including the first direction and the second direction is higher than a rate of change of the first electrical resistance with respect to a change in a second directional magnetic field along the second direction; the element portion; a control unit including a first circuit, the first circuit being electrically connected to the first conductive portion and the first other conductive portion and capable of supplying a first current to the first conductive member, the first current including an AC component; Equipped with the first electrical resistance changes in response to a magnetic field to be detected; the magnetic field to be detected includes a component along the third direction, a first magnetic field generated from the first conductive member by the first current of a first polarity includes a first value magnetic field, a second value magnetic field, a third value magnetic field, and a fourth value magnetic field; the first magnetic field value is between 0 and the fourth magnetic field value; the second value magnetic field is between the first value magnetic field and the fourth value magnetic field; the third magnetic field is between the second magnetic field and the fourth magnetic field; a difference between the first magnetic field value and the second magnetic field value is the same as a difference between the third magnetic field value and the fourth magnetic field value; a first rate of change of the first electrical resistance with respect to a change between the first value magnetic field and the second value magnetic field is lower than a second rate of change of the first electrical resistance with respect to a change between the third value magnetic field and the fourth value magnetic field; The control unit controls the first current so that, when detecting the magnetic field to be detected, the first magnetic field includes the third value magnetic field and the fourth value magnetic field, the maximum value of the first current is the first polarity, and the minimum value of the first current is the first polarity or 0.

2. the control unit includes an element current circuit, The sensor of claim 1 , wherein the element current circuit is capable of supplying a sense current to the first magnetic element.

3. the control unit includes a detection circuit; The sensor of claim 2 , wherein the detection circuit is capable of detecting a value corresponding to a change in the first electrical resistance.

4. the element section includes a bridge circuit including the first element, 4. The sensor according to claim 3, wherein the detection circuit is capable of detecting a value corresponding to a difference between a potential at a first midpoint of the bridge circuit and a potential at a second midpoint of the bridge circuit.

5. the element portion further includes a second element, the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the first conductive portion is electrically connected to the first circuit; the first other conductive portion is electrically connected to the second other conductive portion, the second conductive portion is electrically connected to the first circuit; the first circuit is capable of supplying the first current to the second conductive member; the first magnetic element includes a first element portion and a first other element portion, the first element portion corresponds to the first conductive portion, the first other element portion corresponds to the first other conductive portion, and a direction from the first element portion to the first other element portion is a first direction; the second magnetic element includes a second element portion and a second other element portion, the second element portion corresponds to the second conductive portion, the second other element portion corresponds to the second other conductive portion, and a direction from the second element portion to the second other element portion is a second direction; the sense current flows through the first magnetic element in the first direction and through the second magnetic element in the second direction; 5. The sensor of claim 4, wherein when the first current flows through the first conductive member in the first direction, the first current flows through the second conductive member in a direction opposite to the second direction.

6. The element portion is a second element; and a third element; and a fourth element; and further comprising the first magnetic element includes a first element portion and a first other element portion, the first element portion corresponds to the first conductive portion, the first other element portion corresponds to the first other conductive portion, and a direction from the first element portion to the first other element portion is a first direction; the second element includes a second magnetic element and a second conductive member; the second magnetic element includes a second magnetic layer and a second opposing magnetic layer; the second conductive member includes a second conductive portion and a second other conductive portion, and a direction from the second other conductive portion to the second conductive portion is along the second direction; the second magnetic element includes a second element portion and a second other element portion, the second element portion corresponds to the second conductive portion, the second other element portion corresponds to the second other conductive portion, and a direction from the second element portion to the second other element portion is a second direction; the third element includes a third magnetic element and a third conductive member; the third magnetic element includes a third magnetic layer and a third opposing magnetic layer; the third conductive member includes a third conductive portion and a third other conductive portion, and a direction from the third other conductive portion to the third conductive portion is along the second direction; the third magnetic element includes a third element portion and a third other element portion, the third element portion corresponds to the third conductive portion, the third other element portion corresponds to the third other conductive portion, and a direction from the third element portion to the third other element portion is a third direction; the fourth element includes a fourth magnetic element and a fourth conductive member, the fourth magnetic element includes a fourth magnetic layer and a fourth opposing magnetic layer, the fourth conductive member includes a fourth conductive portion and a fourth other conductive portion, and a direction from the fourth other conductive portion to the fourth conductive portion is along the second direction; the fourth magnetic element includes a fourth element portion and a fourth other element portion, the fourth element portion corresponds to the fourth conductive portion, the fourth other element portion corresponds to the fourth other conductive portion, and a direction from the fourth element portion to the fourth other element portion is a fourth direction; the first element portion is electrically connected to the element current circuit; the first other element portion is electrically connected to the second element portion, the second other element portion is electrically connected to the element current circuit, the third element portion is electrically connected to the element current circuit, the third other element portion is electrically connected to the fourth element portion, the fourth other element portion is electrically connected to the element current circuit, the detection current flows through the first magnetic element in the first direction, the second magnetic element in the second direction, the third magnetic element in the third direction, and the fourth magnetic element in the fourth direction; 5. The sensor of claim 4, wherein when the first current flows through the first conductive member in the first direction, the first current flows through the second conductive member in a direction opposite to the second direction, the first current flows through the third conductive member in a direction opposite to the third direction, and the first current flows through the fourth conductive member in the fourth direction.

7. A sensor according to any one of claims 1 to 6; a processing unit for processing an output signal obtained from the sensor; An inspection device equipped with:

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