Photoelectric conversion element and photoelectric conversion device

Abstract

To provide a photoelectric conversion element and a photoelectric conversion device, having an excellent high-speed responsibility.SOLUTION: A photoelectric conversion element provided to a semiconductor layer having first and second surfaces, includes: a first conductive type first semiconductor region; a second conductive type second semiconductor region that is arranged on a second surface side from the first semiconductor region, and forms a pn bond in a space from the first semiconductor region; a first conductive type third semiconductor region that is arranged on a second surface side from the second semiconductor region; a second conductive type fourth semiconductor region that is arranged on the second surface side from the third semiconductor region; a second conductive type fifth semiconductor region that is arranged in a depth between the third semiconductor region and the fourth semiconductor region; and a second conductive type sixth semiconductor region that is arranged so as to surround a region where the first, second, third, and fifth semiconductor regions are arranged in a plan view. The area of the fifth semiconductor region is smaller than that of the third semiconductor region in the plan view, and is overlapped with the first semiconductor region in the plan view.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a photoelectric conversion element and a photoelectric conversion device. [Background technology]

[0002] Known photoelectric conversion elements include an APD (Avalanche Photo Diode) and a SPAD (Single Photon Avalanche Diode), which multiply charges generated by incident photons through avalanche breakdown. Patent Documents 1 and 2 describe a photoelectric conversion element in which an N-type semiconductor region is disposed in an N-well of a photoelectric conversion region so as to be in contact with a P-type semiconductor region that forms the avalanche multiplication region, in order to facilitate collection of generated charges in the avalanche multiplication region. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-088488 [Patent Document 2] Japanese Patent Application Publication No. 2018-064086 Summary of the Invention [Problem to be solved by the invention]

[0004] In sensors requiring high-speed response, such as photoelectric conversion devices equipped with a ToF (Time of Flight) distance measurement function, it is necessary to minimize the variation in the collection time of charges generated by the incidence of photons. However, the photoelectric conversion elements described in Patent Documents 1 and 2 are not necessarily configured favorably from the viewpoint of reducing the variation in the collection time of charges generated by the incidence of photons.

[0005] An object of the present invention is to provide a photoelectric conversion element and a photoelectric conversion device that are excellent in high-speed response. [Means for solving the problem]

[0006] According to one disclosure of the present specification, there is provided a photoelectric conversion element provided in a semiconductor layer having a first surface and a second surface opposite to the first surface, the photoelectric conversion element including: a first semiconductor region of a first conductivity type; a second semiconductor region of a second conductivity type that is disposed closer to the second surface than the first semiconductor region and forms a pn junction with the first semiconductor region; a third semiconductor region of the first conductivity type that is disposed closer to the second surface than the second semiconductor region and overlaps with the first semiconductor region and the second semiconductor region in a planar view; and a third semiconductor region of the first conductivity type that is disposed closer to the second surface than the third semiconductor region and overlaps with the first semiconductor region, the second semiconductor region, and the third semiconductor region in a planar view. A photoelectric conversion element is provided, which includes: a fourth semiconductor region of the second conductivity type that overlaps with the entire region in which semiconductor regions are arranged; a fifth semiconductor region of the second conductivity type that is arranged at a depth between the third semiconductor region and the fourth semiconductor region; and a sixth semiconductor region of the second conductivity type that is arranged in a planar view so as to surround the region in which the first semiconductor region, the second semiconductor region, the third semiconductor region, and the fifth semiconductor region are arranged and is electrically connected to the fourth semiconductor region, wherein the fifth semiconductor region has an area in a planar view smaller than that of the third semiconductor region and overlaps with the first semiconductor region in a planar view. [Effects of the Invention]

[0007] According to the present invention, a photoelectric conversion element and a photoelectric conversion device having excellent high-speed response can be realized. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a block diagram (part 1) showing a schematic configuration of a photoelectric conversion device according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a block diagram (part 2) showing a schematic configuration of the photoelectric conversion device according to the first embodiment of the present invention. [Figure 3] 1 is a block diagram showing an example of the configuration of a pixel of a photoelectric conversion device according to a first embodiment of the present invention. [Figure 4]1 is a perspective view showing an example of the configuration of a photoelectric conversion device according to a first embodiment of the present invention. [Figure 5] FIG. 2 is a diagram illustrating the basic operation of a photoelectric conversion unit in the photoelectric conversion device according to the first embodiment of the present invention. [Figure 6] 1 is a plan view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a first embodiment of the present invention. [Figure 7] 1 is a schematic cross-sectional view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a first embodiment of the present invention. [Figure 8] 10A and 10B are diagrams illustrating the potential distribution and charge transfer paths inside a photoelectric conversion element according to a reference example. [Figure 9] 10 shows a frequency distribution of the time required for the electric charge generated inside the photoelectric conversion element according to the reference example to reach the avalanche multiplication region. [Figure 10] 2A and 2B are diagrams illustrating the potential distribution and charge transfer paths inside the photoelectric conversion element of the photoelectric conversion device according to the first embodiment of the present invention. [Figure 11] 1 shows a frequency distribution (part 1) of the time required for electric charges generated inside a photoelectric conversion element of the photoelectric conversion device according to the first embodiment of the present invention to reach an avalanche multiplication region. [Figure 12] 10 is a frequency distribution (part 2) of the time required for charges generated inside a photoelectric conversion element of the photoelectric conversion device according to the first embodiment of the present invention to reach an avalanche multiplication region. [Figure 13] FIG. 4 is a schematic cross-sectional view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a second embodiment of the present invention. [Figure 14] FIG. 10 is a plan view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a third embodiment of the present invention. [Figure 15] FIG. 10 is a schematic cross-sectional view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a fourth embodiment of the present invention. [Figure 16] FIG. 10 is a plan view (part 1) showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a fifth embodiment of the present invention. [Figure 17]FIG. 13 is a plan view (part 2) showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a fifth embodiment of the present invention. [Figure 18] FIG. 10 is a schematic cross-sectional view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a fifth embodiment of the present invention. [Figure 19] FIG. 13 is a schematic cross-sectional view showing the structure of a photoelectric conversion element in a photoelectric conversion device according to a modified example of the fifth embodiment of the present invention. [Figure 20] FIG. 10 is a block diagram showing a schematic configuration of a light detection system according to a sixth embodiment of the present invention. [Figure 21] FIG. 13 is a block diagram showing a schematic configuration of a range image sensor according to a seventh embodiment of the present invention. [Figure 22] FIG. 13 is a schematic diagram showing an example of the configuration of an endoscopic surgery system according to an eighth embodiment of the present invention. [Figure 23] FIG. 13 is a schematic diagram showing an example of the configuration of a moving body according to a ninth embodiment of the present invention. [Figure 24] FIG. 13 is a block diagram showing a schematic configuration of a light detection system according to a ninth embodiment of the present invention. [Figure 25] FIG. 13 is a flowchart showing the operation of the light detection system according to the ninth embodiment of the present invention. [Figure 26] FIG. 22 is a schematic diagram showing a schematic configuration of a light detection system according to a tenth embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] The embodiments shown below are intended to embody the technical concept of the present invention and are not intended to limit the present invention. The size and positional relationship of components shown in each drawing may be exaggerated for clarity. In the following description, the same components may be designated by the same reference numerals and their description may be omitted.

[0010] [First embodiment] The schematic configuration of a photoelectric conversion device according to a first embodiment of the present invention will be described with reference to Figs. 1 to 4. Figs. 1 and 2 are block diagrams showing the schematic configuration of a photoelectric conversion device according to this embodiment. Fig. 3 is a block diagram showing an example configuration of a pixel of a photoelectric conversion device according to this embodiment. Fig. 4 is a perspective view showing an example configuration of a photoelectric conversion device according to this embodiment.

[0011] As shown in FIG. 1, the photoelectric conversion device 100 according to this embodiment has a pixel region 10, a vertical scanning circuit section 40, a readout circuit section 50, a horizontal scanning circuit section 60, an output circuit section 70, and a control pulse generation section 80.

[0012] The pixel region 10 includes a plurality of pixels 12 arranged in an array of a plurality of rows and a plurality of columns. As described below, each pixel 12 may be composed of a photoelectric conversion unit including a photoelectric conversion element and a pixel signal processing unit that processes a signal output from the photoelectric conversion unit. The number of pixels 12 constituting the pixel region 10 is not particularly limited. For example, the pixel region 10 may be composed of a plurality of pixels 12 arranged in an array of several thousand rows and several thousand columns, as in a typical digital camera. Alternatively, the pixel region 10 may be composed of a plurality of pixels 12 arranged in a single row or a single column. Alternatively, the pixel region 10 may be composed of a single pixel 12.

[0013] A control line 14 is arranged in each row of the pixel array in the pixel region 10, extending in a first direction (the horizontal direction in FIG. 1 ). The control line 14 is connected to each of the pixels 12 aligned in the first direction and serves as a signal line common to these pixels 12. The first direction in which the control lines 14 extend may be referred to as the row direction or horizontal direction. Each of the control lines 14 may include multiple signal lines for supplying multiple types of control signals to the pixels 12. The control lines 14 in each row are connected to a vertical scanning circuit unit 40.

[0014] In addition, data lines 16 are arranged in each column of the pixel array in the pixel region 10, extending in a second direction (the vertical direction in FIG. 1 ) intersecting the first direction. The data lines 16 are connected to the pixels 12 aligned in the second direction, respectively, and serve as signal lines common to these pixels 12. The second direction in which the data lines 16 extend may be referred to as the column direction or vertical direction. Each of the data lines 16 may include multiple signal lines for transferring multi-bit digital signals output from the pixels 12 bit by bit.

[0015] The control lines 14 of each row are connected to a vertical scanning circuit unit 40. The vertical scanning circuit unit 40 is a control unit that receives control signals output from the control pulse generation unit 80, generates control signals for driving the pixels 12, and supplies the control signals to the pixels 12 via the control lines 14. The vertical scanning circuit unit 40 may include logic circuits such as a shift register and an address decoder. The vertical scanning circuit unit 40 sequentially scans the pixels 12 in the pixel region 10 row by row, and sequentially outputs pixel signals of each pixel 12 to the readout circuit unit 50 via the data lines 16.

[0016] The data lines 16 of each column are connected to a readout circuit unit 50. The readout circuit unit 50 includes a plurality of holding units (not shown) provided corresponding to each column of the pixel array of the pixel region 10, and has a function of holding pixel signals of the pixels 12 of each column, which are output row by row from the pixel region 10 via the data lines 16, in the holding unit of the corresponding column.

[0017] The horizontal scanning circuit unit 60 is a control unit that receives a control signal output from the control pulse generation unit 80, generates a control signal for reading out pixel signals from the holding units of each column of the readout circuit unit 50, and supplies the control signal to the readout circuit unit 50. The horizontal scanning circuit unit 60 may use logic circuits such as a shift register and an address decoder. The horizontal scanning circuit unit 60 sequentially scans the holding units of each column of the readout circuit unit 50, and sequentially outputs the pixel signals held in each to the output circuit unit 70.

[0018] The output circuit unit 70 has an external interface circuit and is a circuit unit for outputting the pixel signals output from the readout circuit unit 50 to the outside of the photoelectric conversion device 100. The external interface circuit included in the output circuit unit 70 is not particularly limited. For example, a SerDes (SERializer / DESerializer) transmission circuit such as an LVDS (Low Voltage Differential Signaling) circuit or an SLVS (Scalable Low Voltage Signaling) circuit can be used as the external interface circuit.

[0019] The control pulse generation unit 80 is a control circuit that generates control signals for controlling the operation and timing of the vertical scanning circuit unit 40, the readout circuit unit 50, and the horizontal scanning circuit unit 60, and supplies these to each functional block. Note that at least some of the control signals for controlling the operation and timing of the vertical scanning circuit unit 40, the readout circuit unit 50, and the horizontal scanning circuit unit 60 may be supplied from outside the photoelectric conversion device 100.

[0020] The connection of the functional blocks of the photoelectric conversion device 100 is not limited to the example configuration shown in FIG. 1, and may be configured as shown in FIG. 2, for example.

[0021] In the configuration example of FIG. 2, data lines 16 extending in a first direction are arranged in each row of the pixel array in the pixel region 10. The data lines 16 are connected to the pixels 12 aligned in the first direction, respectively, and serve as signal lines common to these pixels 12. Furthermore, control lines 18 extending in a second direction are arranged in each column of the pixel array in the pixel region 10. The control lines 18 are connected to the pixels 12 aligned in the second direction, respectively, and serve as signal lines common to these pixels 12.

[0022] The control line 18 of each column is connected to a horizontal scanning circuit unit 60. The horizontal scanning circuit unit 60 receives a control signal output from the control pulse generation unit 80, generates a control signal for reading out pixel signals from the pixels 12, and supplies the control signal to the pixels 12 via the control line 18. Specifically, the horizontal scanning circuit unit 60 sequentially scans the multiple pixels 12 in the pixel region 10 column by column, and outputs pixel signals of the pixels 12 in each row belonging to the selected column to the data line 16.

[0023] The data lines 16 of each row are connected to a readout circuit unit 50. The readout circuit unit 50 includes a plurality of holding units (not shown) provided corresponding to each row of the pixel array of the pixel region 10, and has a function of holding pixel signals of the pixels 12 of each row, which are output column by column from the pixel region 10 via the data lines 16, in the holding unit of the corresponding row.

[0024] The readout circuit section 50 receives a control signal output from the control pulse generation section 80, and sequentially outputs the pixel signals held in the holding section of each row to the output circuit section . Other configurations in the configuration example of FIG. 2 may be similar to the configuration example of FIG.

[0025] 3, each pixel 12 has a photoelectric conversion unit 20 and a pixel signal processing unit 30. The photoelectric conversion unit 20 has a photoelectric conversion element 22 and a quenching element 24. The pixel signal processing unit 30 has a signal processing circuit 32, a counter 34, and a pixel output circuit 36.

[0026] The photoelectric conversion element 22 may be an avalanche photodiode (hereinafter referred to as "APD"). The anode of the APD constituting the photoelectric conversion element 22 is connected to a node to which a voltage VL is supplied. The cathode of the APD constituting the photoelectric conversion element 22 is connected to one terminal of the quench element 24. The connection node between the photoelectric conversion element 22 and the quench element 24 is the output node of the photoelectric conversion unit 20. The other terminal of the quench element 24 is connected to a node to which a voltage VH higher than the voltage VL is supplied. The voltages VL and VH are set so that a reverse bias voltage sufficient for the APD to perform avalanche multiplication operation is applied. For example, a negative high voltage is applied as the voltage VL, and a positive voltage approximately equal to the power supply voltage is applied as the voltage VH. For example, the voltage VL is −30 V, and the voltage VH is 1 V.

[0027] As described above, the photoelectric conversion element 22 may be configured with an APD. When a reverse bias voltage sufficient for avalanche multiplication is applied to the APD, the charge generated by light incident on the APD undergoes avalanche multiplication, generating an avalanche current. When a reverse bias voltage is applied to the APD, the APD can operate in either Geiger mode or linear mode. In Geiger mode, a reverse bias voltage greater than the breakdown voltage of the APD is applied between the anode and cathode. In linear mode, a reverse bias voltage close to or less than the breakdown voltage of the APD is applied between the anode and cathode. An APD operating in Geiger mode is called a single photon avalanche diode (SPAD). The APD constituting the photoelectric conversion element 22 may operate in either linear mode or Geiger mode.

[0028] In this embodiment, the anode of the APD is held at a fixed potential, and the signal is extracted from the cathode side. Therefore, the first conductivity-type semiconductor region, which has majority carriers of charges of the same polarity as the signal charges, is an N-type semiconductor region, and the second conductivity-type semiconductor region, which has majority carriers of charges of a polarity opposite to that of the signal charges, is a P-type semiconductor region. The first conductivity-type carriers are electrons, and the second conductivity-type carriers are holes. The present invention also applies when the cathode of the APD is held at a fixed potential and the signal is extracted from the anode side. In this case, the first conductivity-type semiconductor region, which has majority carriers of charges of the same polarity as the signal charges, is a P-type semiconductor region, and the second conductivity-type semiconductor region, which has majority carriers of charges of a polarity opposite to that of the signal charges, is an N-type semiconductor region. The following description focuses on the case where one node of the APD is held at a fixed potential, but the potentials of both nodes may fluctuate.

[0029] In this specification, when the term "impurity concentration" is used simply, it means the net impurity concentration minus the amount compensated for by impurities of the opposite conductivity type. In other words, "impurity concentration" refers to the NET doping concentration. A region where the P-type doped impurity concentration is higher than the N-type doped impurity concentration is a P-type semiconductor region. Conversely, a region where the N-type doped impurity concentration is higher than the P-type doped impurity concentration is an N-type semiconductor region.

[0030] The quench element 24 has a function of converting a change in the avalanche current generated in the photoelectric conversion element 22 into a voltage signal. The quench element 24 also functions as a load circuit (quench circuit) during signal multiplication by avalanche multiplication, and has a function of reducing the voltage applied to the photoelectric conversion element 22 to suppress avalanche multiplication. The operation of the quench element 24 to suppress avalanche multiplication is called a quench operation. The quench element 24 also has a function of returning the voltage supplied to the photoelectric conversion element 22 to voltage VH by flowing a current equivalent to the voltage drop caused by the quench operation. The operation of the quench element 24 to return the voltage supplied to the photoelectric conversion element 22 to voltage VH is called a recharge operation. The quench element 24 can be configured using a resistor element, a MOS transistor, or the like.

[0031] The signal processing circuit 32 has an input node to which the output signal of the photoelectric conversion unit 20 is supplied, and an output node. The signal processing circuit 32 functions as a waveform shaping unit that converts the analog signal supplied from the photoelectric conversion unit 20 into a pulse signal. The signal processing circuit 32 may be configured with logic circuits including a NOT circuit (inverter circuit), a NOR circuit, a NAND circuit, etc. The output node of the signal processing circuit 32 is connected to a counter 34.

[0032] The counter 34 has an input node to which the output signal of the signal processing circuit 32 is supplied, an input node connected to the control line 14, and an output node. The counter 34 has the function of counting pulses superimposed on the signal output from the signal processing circuit 32 and holding a count value that is the counting result. Signals supplied to the counter 34 from the vertical scanning circuit unit 40 via the control line 14 may include an enable signal for controlling the pulse count period (exposure period) and a reset signal for resetting the count value held by the counter 34. The output node of the counter 34 is connected to the data line 16 via the pixel output circuit 36.

[0033] The pixel output circuit 36 ​​has a function of switching the electrical connection state (connected or disconnected) between the counter 34 and the data line 16. The pixel output circuit 36 ​​switches the connection state between the counter 34 and the data line 16 in response to a control signal supplied from the vertical scanning circuit unit 40 via the control line 14 (in the configuration example of FIG. 2, a control signal supplied from the horizontal scanning circuit unit 60 via the control line 18). The pixel output circuit 36 ​​may include a buffer circuit for outputting a signal.

[0034] The pixel 12 is typically a unit structure that outputs a pixel signal for forming an image. However, in cases where the purpose is distance measurement using a TOF (Time of Flight) method, the pixel 12 does not necessarily have to be a unit structure that outputs a pixel signal for forming an image. In other words, the pixel 12 can also be a unit structure that outputs a signal for measuring the time and amount of light arrival.

[0035] It is not necessary that one pixel signal processing unit 30 is provided for each pixel 12, but one pixel signal processing unit 30 may be provided for multiple pixels 12. In this case, the single pixel signal processing unit 30 can be used to sequentially perform signal processing for multiple pixels 12.

[0036] The photoelectric conversion device 100 according to this embodiment may be formed on a single substrate, or may be configured as a stacked photoelectric conversion device in which multiple substrates are stacked. In the latter case, for example, as shown in FIG. 4, a stacked photoelectric conversion device can be configured in which a sensor substrate 110 and a circuit substrate 180 are stacked and electrically connected. At least the photoelectric conversion element 22, which is one of the components of the pixel 12, can be arranged on the sensor substrate 110. Furthermore, among the components of the pixel 12, the quench element 24 and the pixel signal processing unit 30 can be arranged on the circuit substrate 180. The photoelectric conversion element 22, the quench element 24, and the pixel signal processing unit 30 are electrically connected via connection wiring provided for each pixel 12. Furthermore, the circuit substrate 180 can further include a vertical scanning circuit unit 40, a readout circuit unit 50, a horizontal scanning circuit unit 60, an output circuit unit 70, a control pulse generation unit 80, and the like.

[0037] The photoelectric conversion element 22, quench element 24, and pixel signal processing unit 30 of each pixel 12 may be provided on the sensor substrate 110 and the circuit substrate 180 so as to overlap in a plan view. The vertical scanning circuit unit 40, readout circuit unit 50, horizontal scanning circuit unit 60, output circuit unit 70, and control pulse generation unit 80 may be arranged around a pixel region 10 made up of a plurality of pixels 12. Note that "plan view" here refers to a view from a direction perpendicular to the surface of the sensor substrate 110.

[0038] By configuring the stacked photoelectric conversion device 100, it is possible to increase the integration density of elements and achieve higher functionality. In particular, by arranging the photoelectric conversion elements 22, the quenching elements 24, and the pixel signal processing units 30 on separate substrates, it is possible to arrange the photoelectric conversion elements 22 at high density without sacrificing the light-receiving area of ​​the photoelectric conversion elements 22, thereby improving the photon detection efficiency.

[0039] The number of substrates constituting the photoelectric conversion device 100 is not limited to two, and the photoelectric conversion device 100 may be constituted by stacking three or more substrates.

[0040] 4, the sensor substrate 110 and the circuit substrate 180 are assumed to be diced chips, but the sensor substrate 110 and the circuit substrate 180 are not limited to chips. For example, the sensor substrate 110 and the circuit substrate 180 may each be a wafer. The sensor substrate 110 and the circuit substrate 180 may be stacked in the wafer state and then diced, or may be formed into chips and then stacked and bonded.

[0041] Next, the basic operation of the photoelectric conversion unit 20 in the photoelectric conversion device according to this embodiment will be described with reference to Fig. 5. Fig. 5 is a diagram illustrating the basic operation of the photoelectric conversion unit in the photoelectric conversion device according to this embodiment. Fig. 5(a) is a circuit diagram of the photoelectric conversion unit 20 and the signal processing circuit 32, Fig. 5(b) shows the waveform of a signal at the input node (node ​​A) of the signal processing circuit 32, and Fig. 5(c) shows the waveform of a signal at the output node (node ​​B) of the signal processing circuit 32. Note that, for simplicity of explanation, it is assumed here that the signal processing circuit 32 is configured from an inverter circuit.

[0042] At time t0, a reverse bias voltage with a potential difference equivalent to (VH-VL) is applied to the photoelectric conversion element 22. A reverse bias voltage sufficient to cause avalanche multiplication is applied between the anode and cathode of the APD that constitutes the photoelectric conversion element 22, but in a state where no photons are incident on the photoelectric conversion element 22, there are no carriers that serve as seeds for avalanche multiplication. Therefore, avalanche multiplication does not occur in the photoelectric conversion element 22, and no current flows through the photoelectric conversion element 22.

[0043] At subsequent time t1, it is assumed that a photon is incident on the photoelectric conversion element 22. When a photon is incident on the photoelectric conversion element 22, electron-hole pairs are generated by photoelectric conversion, and avalanche multiplication occurs using these carriers as seeds, causing an avalanche multiplication current to flow through the photoelectric conversion element 22. This avalanche multiplication current flows through the quench element 24, causing a voltage drop across the quench element 24, and the voltage at node A begins to drop. The amount of voltage drop at node A increases, and when the avalanche multiplication stops at time t3, the voltage level at node A no longer drops.

[0044] When avalanche multiplication in photoelectric conversion element 22 stops, a current that compensates for the voltage drop flows from the node to which voltage VL is supplied to node A via photoelectric conversion element 22, and the voltage at node A gradually increases. After that, at time t5, node A stabilizes at its original voltage level.

[0045] The signal processing circuit 32 binarizes the signal input from node A in accordance with a predetermined decision threshold and outputs the binarized signal from node B. Specifically, when the voltage level of node A exceeds the decision threshold, the signal processing circuit 32 outputs a low-level signal from node B, and when the voltage level of node A is equal to or lower than the decision threshold, the signal processing circuit 32 outputs a high-level signal from node B. For example, as shown in FIG. 5(b), assume that the voltage of node A is equal to or lower than the decision threshold during the period from time t2 to time t4. In this case, as shown in FIG. 5(c), the signal level at node B is low during the period from time t0 to time t2 and the period from time t4 to time t5, and is high during the period from time t2 to time t4.

[0046] In this way, the analog signal input from node A is waveform-shaped into a digital signal by the signal processing circuit 32. The pulse signal output from the signal processing circuit 32 in response to the incidence of a photon on the photoelectric conversion element 22 is a photon detection pulse signal.

[0047] Next, the specific structure of the photoelectric conversion element 22 in the photoelectric conversion device 100 according to this embodiment will be described with reference to Fig. 6 and Fig. 7. Fig. 6 is a plan view showing the structure of the photoelectric conversion element in the photoelectric conversion device according to this embodiment. Fig. 7 is a schematic cross-sectional view showing the structure of the photoelectric conversion element in the photoelectric conversion device according to this embodiment.

[0048] 6 shows a plan view of the photoelectric conversion elements 22 of two adjacent pixels 12 among the plurality of pixels 12 that make up the pixel region 10. FIG. 7 is a cross-sectional view taken along line AA' in FIG.

[0049] In this specification, the term "planar view" refers to a view from the normal direction of a light incident surface (second surface 124) of the semiconductor layer 120 described below or the surface opposite thereto (first surface 122). FIG. 6 corresponds to a planar view from the first surface 122 side of the semiconductor layer 120. Furthermore, a cross section refers to a surface parallel to the normal direction of the first surface 122 or the second surface 124 of the semiconductor layer 120. When the first surface 122 or the second surface 124 of the semiconductor layer 120 is a rough surface when viewed microscopically, the planar view is defined based on the first surface 122 or the second surface 124 of the semiconductor layer 120 when viewed macroscopically. Furthermore, in this specification, the depth direction is the direction from the first surface 122 toward the second surface 124 of the semiconductor layer 120. Hereinafter, the first surface 122 may be referred to as the "front surface," and the second surface 124 may be referred to as the "rear surface."

[0050] The photoelectric conversion device according to this embodiment can be configured as a stacked photoelectric conversion device in which a sensor substrate 110 and a circuit substrate 180 are stacked, as shown in FIG.

[0051] The sensor substrate 110 has a semiconductor layer 120 having a first surface 122 and a second surface 124 facing the first surface 122, and a wiring structure layer 150 provided on the first surface 122 side of the semiconductor layer 120. An optical structure layer 190 may be disposed on the second surface 124 side of the semiconductor layer 120. The second surface 124 side of the semiconductor layer 120 on which the optical structure layer 190 is provided serves as a light receiving surface that receives light to be detected. In other words, the photoelectric conversion device of this embodiment is a so-called back-illuminated photoelectric conversion device.

[0052] The semiconductor layer 120 is, for example, a thinned single crystal silicon substrate, and contains a predetermined concentration of N-type impurities or P-type impurities. As an example, the semiconductor layer 120 is assumed to be a thinned P-type silicon substrate.

[0053] The semiconductor layer 120 is provided with N-type semiconductor regions 126 and 128 and P-type semiconductor regions 130, 132, 134, and 138. The N-type semiconductor region 126 is disposed on the first surface 122 side of the semiconductor layer 120 in a cross-sectional view, and at least a portion of it reaches the first surface 122 of the semiconductor layer 120. The P-type semiconductor region 130 is disposed on the second surface 124 side of the semiconductor layer 120 relative to the N-type semiconductor region 126, and forms a pn junction with the N-type semiconductor region 126. The P-type semiconductor region 134 is disposed on the second surface 124 side of the semiconductor layer 120 in a cross-sectional view. The N-type semiconductor region 128 is disposed in a region between the P-type semiconductor region 130 and the P-type semiconductor region 134, and is spaced apart from the P-type semiconductor region 134. The P-type semiconductor region 138 is disposed in a region between the N-type semiconductor region 128 and the P-type semiconductor region 134. That is, in the semiconductor layer 120, an N-type semiconductor region 126, a P-type semiconductor region 130, an N-type semiconductor region 128, a P-type semiconductor region 138, and a P-type semiconductor region 134 are arranged in this order along the depth direction from the first surface 122 to the second surface 124.

[0054] In a plan view, the P-type semiconductor region 134 overlaps the entire region in which the N-type semiconductor regions 126, 128 and the P-type semiconductor regions 130, 138 are arranged. In a plan view, the P-type semiconductor region 132 is arranged so as to surround each of the regions in which the N-type semiconductor regions 126, 128 and the P-type semiconductor regions 130, 138 are provided. The P-type semiconductor region 132 is arranged from the first surface 122 of the semiconductor layer 120 to a depth where the P-type semiconductor region 134 is arranged, and is electrically connected to the P-type semiconductor region 134. The region in the semiconductor layer 120 surrounded by the P-type semiconductor regions 132, 134 is a well region (semiconductor region 136) in which the N-type semiconductor regions 126, 128 and the P-type semiconductor regions 130, 138 of one photoelectric conversion element 22 are arranged. In this embodiment, the conductivity type of the semiconductor region 136 is P-type.

[0055] In a planar view, the N-type semiconductor region 128 is disposed inside a region defined by the P-type semiconductor region 132. In a planar view, the N-type semiconductor region 126 is disposed in a region more inward than the N-type semiconductor region 128. In a planar view, the P-type semiconductor region 130 is disposed in a region more inward than the N-type semiconductor region 126. In a planar view, the P-type semiconductor region 138 is disposed in a region more inward than the N-type semiconductor region 128. That is, the area of ​​the P-type semiconductor region 138 in a planar view is smaller than the area of ​​the N-type semiconductor region 128 in a planar view. The P-type semiconductor region 138 is located in a central portion of the photoelectric conversion element 22 in a planar view. Here, the central portion of the photoelectric conversion element 22 in a planar view may be a portion where a signal charge extraction portion from the photoelectric conversion element 22 is located in a planar view (a portion where the N-type semiconductor region 126 and the cathode electrode 158 overlap in a planar view).

[0056] The semiconductor region 136 is arranged so as to surround the N-type semiconductor region 128 at the depth where the N-type semiconductor region 128 is provided. Furthermore, the semiconductor region 136 is arranged between the N-type semiconductor region 128 and the P-type semiconductor region 132 at the depth where the N-type semiconductor region 128 is provided. Furthermore, the semiconductor region 136 is arranged between the N-type semiconductor region 126 and the P-type semiconductor region 130 and the P-type semiconductor region 132 at the depth where the N-type semiconductor region 126 and the P-type semiconductor region 130 are provided. The semiconductor region 136 extends into the region between the N-type semiconductor region 128 and the P-type semiconductor region 134 excluding the region where the P-type semiconductor region 138 is provided.

[0057] The P-type semiconductor region 138 forms a pn junction with the N-type semiconductor region 128. The impurity concentration of the P-type semiconductor region 138 is desirably lower than the impurity concentration of the P-type semiconductor region 134. In a cross-sectional view, the end of the P-type semiconductor region 138 on the first surface 122 side is located closer to the first surface 122 than the end of the N-type semiconductor region 128 on the second surface 124 side.

[0058] In this embodiment, one photoelectric conversion element 22 includes N-type semiconductor regions 126 and 128 and P-type semiconductor regions 130, 132, 134, and 138. Adjacent photoelectric conversion elements 22 are electrically isolated from each other by the P-type semiconductor regions 132 and 134. That is, the P-type semiconductor regions 132 and 134 form an isolation portion that electrically isolates the photoelectric conversion elements 22. A depletion layer formed at the pn junction between the N-type semiconductor region 126 and the P-type semiconductor region 130 serves as an avalanche multiplication region. The N-type semiconductor region 128 serves to quickly collect charges generated in the semiconductor layer 120 into the avalanche multiplication region. The impurity concentration of the N-type semiconductor region 128 is lower than that of the N-type semiconductor region 126.

[0059] 7, the N-type semiconductor region 128 is provided in contact with the P-type semiconductor region 130, but the N-type semiconductor region 128 may be provided spaced apart from the P-type semiconductor region 130. Furthermore, the P-type semiconductor region 134 is provided in contact with the second surface 124, but the P-type semiconductor region 134 may be provided spaced apart from the second surface 124. Furthermore, in the configuration examples shown in FIGS. 6 and 7, the N-type semiconductor region 128 is provided spaced apart from the P-type semiconductor region 132, but the N-type semiconductor region 128 may be provided in contact with the P-type semiconductor region 132.

[0060] The wiring structure layer 150 has an insulating layer 152 and a wiring layer 154 disposed in the insulating layer 152. The wiring layer 154 includes an anode electrode (not shown) electrically connected to the P-type semiconductor region 132, a cathode electrode 158 electrically connected to the N-type semiconductor region 126, and a pad electrode 160 formed by the wiring layer farthest from the semiconductor layer 120. As shown in FIG. 6 , the cathode electrode 158 is disposed in the center of the N-type semiconductor region 126 in a plan view. Note that a plurality of cathode electrodes 158 may be disposed for one N-type semiconductor region 126.

[0061] The circuit board 180 is laminated on the wiring structure layer 150 side of the sensor substrate 110. The bonding surface 170 in FIG. 7 is the bonding portion between the sensor substrate 110 and the circuit board 180. The circuit board 180 has a semiconductor layer in which elements such as transistors are provided, and a wiring structure layer provided on the semiconductor layer. For simplicity of the drawing, FIG. 7 only shows a pad electrode 182 formed by the uppermost wiring layer of the semiconductor layers and wiring structure layers that make up the circuit board 180, and a portion of the wiring layer 184 connected to the pad electrode 182. The sensor substrate 110 and the circuit board 180 can be bonded, for example, by metal bonding between the metal member that makes up the pad electrode 160 and the metal member that makes up the pad electrode 182.

[0062] As shown in FIG. 7 , the optical structure layer 190 may include a pinning film 192, a planarization layer 194, and a microlens layer including a plurality of microlenses 196. The optical structure layer 190 may further include a filter layer (not shown). Various optical filters, such as a color filter, an infrared cut filter, or a monochrome filter, can be applied to the filter layer. The semiconductor layer 120 may not include the P-type semiconductor region 134, and the pinning film 192 may be provided in contact with the P-type semiconductor region 132. Known materials can be used for the pinning film 192. The photoelectric conversion element 22 does not necessarily have to include the optical structure layer 190. The optical structure layer 190 may include only some of the above-described elements, or may further include other elements.

[0063] The photoelectric conversion element 22 generates avalanche multiplication using charges generated in the semiconductor layer 120 by photoelectric conversion as seeds by a reverse bias voltage applied between the N-type semiconductor region 128 and the P-type semiconductor region 130 via an anode electrode and a cathode electrode 158 (not shown). Carriers generated by avalanche multiplication are then output to the outside of the photoelectric conversion element 22 via the cathode electrode 158. Therefore, the faster the charges generated in the semiconductor layer 120 can be collected in the avalanche multiplication region, the faster the response speed of the photoelectric conversion element 22 will be.

[0064] In this regard, in the photoelectric conversion element 22 of this embodiment, as described above, the N-type semiconductor region 128, which has a lower impurity concentration than the N-type semiconductor region 126, is disposed between the P-type semiconductor region 130 and the P-type semiconductor region 134. Therefore, the potential of the N-type semiconductor region 128 is lower than the potential of the semiconductor region 136 for the signal charges, and it becomes possible to collect more signal charges in the avalanche multiplication region in a shorter time.

[0065] Furthermore, in the photoelectric conversion element 22 of this embodiment, a P-type semiconductor region 138 is further provided between the N-type semiconductor region 128 and the P-type semiconductor region 134. The effect of providing the P-type semiconductor region 138 will be described below with reference to FIGS.

[0066] 8 and 10 are diagrams illustrating the potential distribution and charge transfer paths inside the photoelectric conversion element 22. Figures 9 and 11 show the frequency distribution (probability distribution) of the time required for charges generated inside the photoelectric conversion element 22 to reach the avalanche multiplication region. Figures 8 and 9 show the case of a photoelectric conversion element (reference example) that does not have a P-type semiconductor region 138, while Figures 10 and 11 show the case of the photoelectric conversion element of this embodiment that has the P-type semiconductor region 138.

[0067] Fig. 8(a) is a schematic cross-sectional view showing a photoelectric conversion element of a reference example. The photoelectric conversion element of the reference example has the same structure as the photoelectric conversion element 22 of this embodiment, except that it does not have a P-type semiconductor region 138. Fig. 8(b) is a diagram showing the results of a simulation of the potential distribution in the region surrounded by the dotted line in Fig. 8(a).

[0068] In the photoelectric conversion element of the reference example, in the semiconductor region 136 closer to the P-type semiconductor region 134 than the N-type semiconductor region 128, a charge e c and charge e d Here, the charge e cis the charge generated in the center of the photoelectric conversion element (area C) in plan view, and the charge e d is the charge generated in the peripheral portion (region D) of the photoelectric conversion element in plan view.

[0069] When the photoelectric conversion element is driven, a predetermined reverse bias voltage is applied between the P-type semiconductor regions 132, 134 and the N-type semiconductor region 126. As a result, a potential distribution as shown in FIG. 8(b) is formed in the N-type semiconductor region 128 and the semiconductor region 136. The potential gradient formed in the N-type semiconductor region 128 and the semiconductor region 136 in this way decreases with respect to the signal charge from the periphery of the semiconductor region 136 toward the avalanche multiplication region 140. Therefore, the charge e generated in region C c and the charge e generated in region D d is attracted toward the avalanche multiplication region 140, for example, along the path indicated by the dotted arrows in FIGS. 8(a) and 8(b).

[0070] Figure 9 shows the charge e generated in region C. c and the charge e generated in region D d 9(a) shows the frequency distribution (probability distribution) of the time it takes for the charge e generated in region C to reach the avalanche multiplication region 140. c The frequency distribution of the time required for the charge e generated in region D to reach the avalanche multiplication region 140 is shown. d 9(b) and 9(c) separately show the frequency distribution of the time it takes for the charge e generated in region C to reach the avalanche multiplication region 140. c and the charge e generated in region D d The time required for the charge e to reach the avalanche multiplication region 140 is shown as a frequency distribution. c is the average time it takes for the charge e d9 represents the average time required for the charge e to reach the avalanche multiplication region 140. The spread in the horizontal direction in the graph of FIG. 9 represents the variation in the time required for the charge e to reach the avalanche multiplication region 140. FIG. 9 also shows the full width at half maximum (FWHM) as an index of this time variation. The time variation is caused by, for example, lattice scattering and ionized impurity scattering. Here, c The time variance (full width at half maximum FWHM (e c )) and charge e d The time variance (full width at half maximum FWHM (e d )) are considered to be equivalent.

[0071] As shown by the dotted arrow in Figure 8, under the potential distribution in Figure 8(b), the charge e d The distance traveled by the charge e from region D to reach the avalanche multiplication region 140 is c is longer than the distance traveled from region C to reach the avalanche multiplication region 140. In other words, the charge e d The time T4 required for the charge e to reach the avalanche multiplication region 140 is c is longer than the time T3 required for the charge e d The frequency distribution of the time it takes for the charge e to reach the avalanche multiplication region 140 is c is shifted to the longer time direction than the frequency distribution of the time it takes for the current to reach the avalanche multiplication region 140.

[0072] Therefore, the charge e generated in region C c and the charge e generated in region D d When the time required for the electrons to reach the avalanche multiplication region 140 is expressed as a frequency distribution, the full width at half maximum FWHM (e c +e d) will be wider. In this way, if there is a time difference between time T3 and time T4, the full width at half maximum FWHM (e c +e d ) is the full width at half maximum (FWHM) of each frequency distribution before summing. c ), FWHM(e d ) in the frequency distribution after addition. c +e d ) becomes larger. The full width at half maximum of the frequency distribution FWHM(e c +e d ) is one of the factors that affect the response performance of the sensor, for example, the time resolution in distance measurement applications, and it is desirable to make it as small as possible.

[0073] Fig. 10(a) is a schematic cross-sectional view showing a photoelectric conversion element 22 of this embodiment. As described above, the photoelectric conversion element 22 of this embodiment further includes a P-type semiconductor region 138 in addition to the photoelectric conversion element of the reference example. Fig. 10(b) is a diagram showing the results of a simulation of the potential distribution in the region surrounded by the dotted line in Fig. 10(a).

[0074] In the photoelectric conversion element 22 of this embodiment, regions A and B are assumed to correspond to regions C and D assumed in the photoelectric conversion element of the reference example. When light is incident, a charge e a is generated in region B, and a charge e b In the photoelectric conversion element 22 of this embodiment, the charge e a The region A where is generated overlaps with the region where the P-type semiconductor region 138 is provided.

[0075] When the photoelectric conversion element 22 is driven, a predetermined reverse bias voltage is applied between the P-type semiconductor regions 132, 134 and the N-type semiconductor region 126. As a result, a potential distribution such as that shown in Fig. 10(b) is formed in the N-type semiconductor region 128 and the semiconductor region 136. The potential gradient thus formed in the N-type semiconductor region 128 and the semiconductor region 136 decreases overall with respect to the signal charge from the periphery of the semiconductor region 136 toward the avalanche multiplication region 140.

[0076] However, in the photoelectric conversion element 22 of this embodiment, at the same depth where the N-type semiconductor region 128 and the P-type semiconductor region 138 are disposed, the potential of the P-type semiconductor region 138 with respect to the signal charge is higher than the potential of the N-type semiconductor region 128 with respect to the signal charge. In other words, in the photoelectric conversion element 22 of this embodiment, the P-type semiconductor region 138 is provided, so the potential gradient in this portion is gentler than the potential gradient in the corresponding portion in the photoelectric conversion element of the reference example. Since the signal charge is guided to the portion with a steeper potential gradient, the charge e generated in region A a 10, the charge e generated in the region A bypasses the central portion where the potential gradient is gentle, passes through the peripheral portion, and is attracted toward the avalanche multiplication region 140. That is, in the photoelectric conversion element 22 of this embodiment, the charge e a The time it takes for the charge e generated in region C in the photoelectric conversion element of the reference example to reach the avalanche multiplication region 140 is c is longer than the time it takes for the current to reach the avalanche multiplication region 140.

[0077] As a result, as shown in Figure 11(a), the charge e a The time T1 required for the charge e to reach the avalanche multiplication region 140 is b The difference between the time T2 required for the charge e to reach the avalanche multiplication region 140 and the time T3 is smaller than the difference between the time T4 and the time T4. a and charge e bThe full width at half maximum (FWHM) (e a +e b ) is the full width at half maximum (FWHM) (e c +e d ) is narrower than

[0078] Therefore, according to the photoelectric conversion element 22 of this embodiment, the variation in the time required for the charge generated in response to incident light to reach the avalanche multiplication region 140 can be reduced compared to the photoelectric conversion element of the reference example.

[0079] As described above, the photoelectric conversion element 22 of this embodiment may be configured to include a microlens 196. When the photoelectric conversion element 22 includes the microlens 196, incident light is focused by the microlens 196 on the center of the photoelectric conversion element 22. The explanations of FIGS. 8 to 11 are based on the premise that the frequency of charge generation is the same in the center and the periphery of the photoelectric conversion element 22, but the configuration of this embodiment is also effective when the photoelectric conversion element 22 includes the microlens 196.

[0080] 12A and 12B show the frequency distribution (probability distribution) of the time required for the electric charge generated inside the photoelectric conversion element to reach the avalanche multiplication region when the photoelectric conversion element is equipped with a microlens. Fig. 12A shows the case of the photoelectric conversion element according to the reference example, and Fig. 12B shows the case of the photoelectric conversion element 22 of this embodiment.

[0081] In Figure 12(a), the charge e generated in region C c The frequency distribution of the time required for the charge e generated in region D to reach the avalanche multiplication region 140 (thin solid line) d 12(a) shows the frequency distribution (dotted line) of the time required for the charge e in region C to reach the avalanche multiplication region 140. Also, FIG. 12(a) shows the frequency distribution (thick solid line) of the sum of these. In FIG. 12(a), c Frequency of occurrence of charge e in region D dThe ratio of the frequency of occurrence of c and full width at half maximum FWHMe d In addition, in Fig. 12(b), the charge e generated in region A is a The frequency distribution of the time required for the charge e generated in region B to reach the avalanche multiplication region 140 (thin solid line) is shown. b 12(b) shows the frequency distribution (dotted line) of the time required for the charge e in region A to reach the avalanche multiplication region 140. FIG. 12(b) shows the frequency distribution (thick solid line) of the sum of these. In FIG. 12(b), a Frequency of occurrence of charge e in region D b The ratio of the frequency of occurrence of a and full width at half maximum FWHMe b It is assumed that the above cases are equivalent.

[0082] In the case of the photoelectric conversion element according to the reference example, the charge e c Peak position of the frequency distribution and charge e d As described above, there is a time difference (T4-T3) between the peak positions of the frequency distributions of the signal charges e and the avalanche multiplication region 140, which is determined by the difference in the distance traveled by the signal charges. c Frequency distribution of charge e d The combined frequency distribution (e c +e d ) is shown by the thick solid line in Figure 12(a) as a function of the charge e c and charge e d The charge e c The distribution is wider than the frequency distribution of

[0083] On the other hand, in the case of the photoelectric conversion element 22 of this embodiment, the charge e a Peak position of the frequency distribution and charge e b As described above, the difference between the peak position of the frequency distribution of the charge e a Frequency distribution of charge e b The combined frequency distribution (e a +e b) full width at half maximum FWHM(e a +e b ) is a frequency distribution (e c +e d ) full width at half maximum FWHM(e c +e d ) is narrower than

[0084] Therefore, in the photoelectric conversion element 22 of this embodiment, even when the photoelectric conversion element 22 has a microlens 196, the variation in the time required for the charge generated in response to incident light to reach the avalanche multiplication region can be reduced.

[0085] As described above, according to this embodiment, a photoelectric conversion element and a photoelectric conversion device with excellent high-speed response can be realized.

[0086] [Second embodiment] A photoelectric conversion device according to a second embodiment of the present invention will be described with reference to Fig. 13. Components similar to those in the photoelectric conversion device according to the first embodiment are given the same reference numerals, and descriptions thereof will be omitted or simplified. Fig. 13 is a schematic cross-sectional view showing an example of the configuration of a photoelectric conversion element in the photoelectric conversion device according to this embodiment.

[0087] The photoelectric conversion device according to this embodiment is similar to the photoelectric conversion device according to the first embodiment except for the configuration of the photoelectric conversion element 22. In this embodiment, the following description will focus on the differences between the photoelectric conversion element 22 of this embodiment and the photoelectric conversion element 22 of the first embodiment, and descriptions of the parts common to the photoelectric conversion element 22 of the first embodiment will be omitted as appropriate.

[0088] In the photoelectric conversion device of this embodiment, one photoelectric conversion element 22 also includes N-type semiconductor regions 126 and 128, P-type semiconductor regions 130, 132, 134, and 138, and a semiconductor region 136. In this embodiment, the conductivity type of the semiconductor region 136 is N-type. As shown in FIG. 13 , the photoelectric conversion element 22 of this embodiment differs from the photoelectric conversion element 22 of the first embodiment in the configurations of the N-type semiconductor region 126 and the P-type semiconductor region 130. That is, in the photoelectric conversion element 22 of this embodiment, the area of ​​the N-type semiconductor region 126 in a plan view is smaller than the area of ​​the P-type semiconductor region 130 in a plan view, and the N-type semiconductor region 126 is disposed in the center of the P-type semiconductor region 130 in a plan view. Furthermore, the outer periphery of the P-type semiconductor region 130 in a plan view is in contact with the P-type semiconductor region 132.

[0089] By configuring the photoelectric conversion element 22 in this manner, it becomes possible to collect more charges in the avalanche multiplication region in the center where the N-type semiconductor region 126 and the P-type semiconductor region 130 meet, thereby improving sensitivity compared to the photoelectric conversion element 22 of the first embodiment. Furthermore, with this configuration, the avalanche multiplication region can be made smaller, which makes it possible to reduce noise caused by strong electric fields.

[0090] On the other hand, in the photoelectric conversion element 22 of this embodiment, since the avalanche multiplication region is smaller, a difference is likely to occur between the time it takes for charge generated in the central portion to reach the avalanche multiplication region and the time it takes for charge generated in the peripheral portion to reach the avalanche multiplication region. However, in the photoelectric conversion element 22 of this embodiment, like the photoelectric conversion element 22 of the first embodiment, the P-type semiconductor region 138 is arranged in the central portion, so that charge can be propagated to the avalanche multiplication region by bypassing the central portion and passing through the peripheral portion. This makes it possible to reduce the time variance between the time it takes for charge generated in the central portion to reach the avalanche multiplication region and the time it takes for charge generated in the peripheral portion to reach the avalanche multiplication region to the same extent as in the photoelectric conversion element 22 of the first embodiment.

[0091] In other words, the configuration of this embodiment can improve sensitivity and reduce noise compared to the photoelectric conversion element of the first embodiment, while reducing the variation in the time it takes for the charge generated in response to incident light to reach the avalanche multiplication region.

[0092] As described above, according to this embodiment, a photoelectric conversion element and a photoelectric conversion device with excellent high-speed response can be realized.

[0093] [Third embodiment] A photoelectric conversion device according to a third embodiment of the present invention will be described with reference to Fig. 14. Components similar to those in the photoelectric conversion devices according to the first and second embodiments are given the same reference numerals, and descriptions thereof will be omitted or simplified. Fig. 14 is a plan view showing an example of the configuration of a photoelectric conversion element in the photoelectric conversion device according to this embodiment.

[0094] The photoelectric conversion device according to this embodiment is similar to the photoelectric conversion device according to the first embodiment except for the configuration of the photoelectric conversion element 22. In this embodiment, the following description will focus on the differences between the photoelectric conversion element 22 of this embodiment and the photoelectric conversion element 22 of the first embodiment, and descriptions of the parts common to the photoelectric conversion element 22 of the first embodiment will be omitted as appropriate.

[0095] 14, the photoelectric conversion element 22 of this embodiment differs from the photoelectric conversion element 22 of the first embodiment in that a plurality of P-type semiconductor regions 138 are provided. That is, in the photoelectric conversion element 22 of the first embodiment, one P-type semiconductor region 138 is arranged in the center of the photoelectric conversion element 22 in a planar view. In contrast, in the photoelectric conversion element 22 of this embodiment, four P-type semiconductor regions 138 are further arranged in two diagonal directions to sandwich the P-type semiconductor region 138 arranged in the center in a planar view. These four P-type semiconductor regions 138 are arranged between the central P-type semiconductor region 138 and the P-type semiconductor region 132 in a planar view. The areas of the P-type semiconductor regions 138 arranged at the four corners in a planar view are smaller than the area of ​​the P-type semiconductor region 138 arranged in the center in a planar view.

[0096] By arranging the P-type semiconductor regions 138 in locations other than the central portion in plan view, it becomes possible to more appropriately control the time it takes for signal charges generated in each portion of the photoelectric conversion element 22 to reach the avalanche multiplication region. For example, by reducing the area and density of the P-type semiconductor regions 138 in plan view from the central portion toward the periphery, it is possible to configure the signal charges generated near the central portion to have a longer detour path. In particular, when the arrangement interval (pitch) of the photoelectric conversion elements 22 (or pixels 12) is larger than the thickness of the semiconductor layer 120, it is effective to arrange multiple P-type semiconductor regions 138 or to increase the area of ​​the P-type semiconductor region 138 in the central portion.

[0097] The arrangement of the P-type semiconductor region 138 in plan view is preferably selected appropriately according to the size and shape of the photoelectric conversion element 22 so as to reduce the variation in the time it takes for the signal charge generated in each part of the photoelectric conversion element 22 to reach the avalanche multiplication region.

[0098] As described above, according to this embodiment, a photoelectric conversion element and a photoelectric conversion device with excellent high-speed response can be realized.

[0099] [Fourth embodiment] A photoelectric conversion device according to a fourth embodiment of the present invention will be described with reference to Fig. 15. Components similar to those of the photoelectric conversion devices according to the first to third embodiments are given the same reference numerals, and descriptions thereof will be omitted or simplified. Fig. 15 is a schematic cross-sectional view showing an example of the configuration of a photoelectric conversion element in the photoelectric conversion device according to this embodiment.

[0100] The photoelectric conversion device according to this embodiment is similar to the photoelectric conversion device according to the first embodiment except for the configuration of the photoelectric conversion element 22. In this embodiment, the following description will focus on the differences between the photoelectric conversion element 22 of this embodiment and the photoelectric conversion element 22 of the first embodiment, and descriptions of the parts common to the photoelectric conversion element 22 of the first embodiment will be omitted as appropriate.

[0101] 15, the photoelectric conversion element 22 of this embodiment differs from the photoelectric conversion element 22 of the first embodiment in the arrangement of the P-type semiconductor region 138 in the semiconductor layer 120. That is, in the photoelectric conversion element 22 of the first embodiment, the P-type semiconductor region 138 is arranged so that the long side direction in a cross-sectional view is parallel to the depth direction. In contrast, in the photoelectric conversion element 22 of this embodiment, the P-type semiconductor region 138 is arranged so that the long side direction in a cross-sectional view is perpendicular to the depth direction.

[0102] Depending on the size and shape of the photoelectric conversion element 22, the propagation path of the charge generated in the central portion may be made longer by arranging the P-type semiconductor region 138 so that the long side direction in a cross-sectional view is parallel to the depth direction. In such a case, by applying the configuration of this embodiment, it is possible to further reduce the variation in the time it takes for the signal charge generated in each portion of the photoelectric conversion element 22 to reach the avalanche multiplication region.

[0103] As with the planar layout of the P-type semiconductor region 138 described in the third embodiment, the cross-sectional shape of the P-type semiconductor region 138 is preferably selected appropriately depending on the size and shape of the photoelectric conversion element 22. When multiple P-type semiconductor regions 138 are arranged as described in the third embodiment, the cross-sectional shapes of these multiple P-type semiconductor regions 138 may be different. Furthermore, the P-type semiconductor region 138 does not necessarily need to be in contact with the P-type semiconductor region 134, and may be spaced apart from the P-type semiconductor region 134 as shown in FIG. 15 .

[0104] As described above, according to this embodiment, a photoelectric conversion element and a photoelectric conversion device with excellent high-speed response can be realized.

[0105] [Fifth embodiment] A photoelectric conversion device according to a fifth embodiment of the present invention will be described with reference to Figs. 16 to 19. Components similar to those of the photoelectric conversion devices according to the first to fourth embodiments are given the same reference numerals, and descriptions thereof will be omitted or simplified. Figs. 16 and 17 are plan views showing configuration examples of photoelectric conversion elements in a photoelectric conversion device according to this embodiment. Fig. 18 is a schematic cross-sectional view showing a configuration example of a photoelectric conversion element in a photoelectric conversion device according to this embodiment. Fig. 19 is a schematic cross-sectional view showing a configuration example of a photoelectric conversion element in a photoelectric conversion device according to a modified example of this embodiment.

[0106] The photoelectric conversion device according to this embodiment is similar to the photoelectric conversion device according to the first embodiment except for the configuration of the photoelectric conversion element 22. In this embodiment, the following description will focus on the differences between the photoelectric conversion element 22 of this embodiment and the photoelectric conversion element 22 of the first embodiment, and descriptions of the parts common to the photoelectric conversion element 22 of the first embodiment will be omitted as appropriate.

[0107] 16 and 17 show two adjacent photoelectric conversion elements 22 among the multiple pixels 12 that make up the pixel region 10. Fig. 16 is a plan view of the semiconductor layer 120 viewed from the first surface 122 side, and Fig. 17 is a plan view of the semiconductor layer 120 viewed from the second surface 124 side. Fig. 18 is a cross-sectional view taken along line A-A' in Figs. 16 and 17. The dotted lines shown in Figs. 16 to 18 indicate the boundaries between adjacent pixels 12 (photoelectric conversion elements 22).

[0108] As shown in FIGS. 16 to 18, the photoelectric conversion element 22 of this embodiment differs from the photoelectric conversion element 22 of the first embodiment in that it further includes an isolation structure 142 and a concave-convex structure 144.

[0109] The isolation structure 142 is provided in a region between pixels 12 (photoelectric conversion elements 22) in a planar view, extending from the first surface 122 to the second surface 124 of the semiconductor layer 120. For example, as shown in FIGS. 16 and 17 , the isolation structure 142 may be provided inside a region in which a P-type semiconductor region 132 is disposed. The isolation structure 142 serves to prevent light from leaking into adjacent photoelectric conversion elements 22, and is preferably a wall-like body surrounding each region in which a photoelectric conversion element 22 is disposed. The isolation structure 142 may be formed, for example, by embedding an insulating member or a metal member in a groove formed in the semiconductor layer 120. Note that, in the configuration examples of FIGS. 16 and 17 , the isolation structure 142 is provided so as to extend from the first surface 122 to the second surface 124 of the semiconductor layer 120, but the isolation structure 142 does not necessarily have to extend from the first surface 122 to the second surface 124.

[0110] The uneven structure 144 is provided on the second surface 124 of the semiconductor layer 120. Figures 17 and 18 show an example of the uneven structure 144 in which lattice-shaped grooves are provided on the second surface 124 of the semiconductor layer 120. However, the uneven structure 144 has a role of scattering light incident from the second surface 124 side of the semiconductor layer 120, and the pattern constituting the uneven structure 144 is not particularly limited as long as it has the function of scattering light incident from the second surface 124. The uneven structure 144 can be formed, for example, by embedding an insulating member in grooves formed on the second surface 124 of the semiconductor layer 120.

[0111] By providing the isolation structure 142 and the concave-convex structure 144 in the semiconductor layer 120, light incident on the semiconductor layer 120 is scattered by the concave-convex structure 144 and is confined within one pixel by the isolation structure 142. This increases the effective optical path length, improving sensitivity. On the other hand, compared to a configuration in which the microlens 196 focuses light toward the center of the pixel, this embodiment has a relatively higher probability of generating charges near the boundary of the pixel 12. The increased probability of generating charges near the boundary of the pixel 12 means that there is more likely to be a time lag between the charges generated near the center of the pixel 12 and the charges reaching the avalanche multiplication region 140.

[0112] However, even in the configuration of this embodiment, by providing the P-type semiconductor region 138, the charge can be propagated to the avalanche multiplication region 140 so as to bypass the central portion and pass through the peripheral portion. This makes it possible to reduce the variation in the time it takes for the charge to reach the avalanche multiplication region 140 to the same extent as in the first embodiment.

[0113] In other words, the configuration of this embodiment improves sensitivity compared to the photoelectric conversion element of the first embodiment, while reducing the variation in the time it takes for the charge generated in response to incident light to reach the avalanche multiplication region.

[0114] 19 is a schematic cross-sectional view showing the structure of a photoelectric conversion element according to a modified example of this embodiment. In this reference example, a part of the concave-convex structure 144 (convex-convex structure 146) is arranged so as to extend to the P-type semiconductor region 138. By arranging the concave-convex structures 144, 146 in this manner, it is possible to reduce the variation in the time it takes for the signal charge to reach the avalanche multiplication region, as explained above.

[0115] As described above, according to this embodiment, a photoelectric conversion element and a photoelectric conversion device with excellent high-speed response can be realized.

[0116] [Sixth embodiment] A light detection system according to a sixth embodiment of the present invention will be described with reference to Fig. 20. Fig. 20 is a block diagram showing a schematic configuration of the light detection system according to this embodiment. In this embodiment, a light detection sensor to which the photoelectric conversion device 100 described in any of the first to fifth embodiments is applied will be described.

[0117] The photoelectric conversion device 100 described in the first to fifth embodiments can be applied to various photodetection systems. Examples of applicable photodetection systems include imaging systems such as digital still cameras, digital camcorders, surveillance cameras, copiers, fax machines, mobile phones, vehicle-mounted cameras, and observation satellites. Camera modules equipped with an optical system such as a lens and an imaging device are also included in the photodetection system. Fig. 20 illustrates a block diagram of a digital still camera as an example of such systems.

[0118] 20 includes a photoelectric conversion device 201, a lens 202 that forms an optical image of a subject on the photoelectric conversion device 201, an aperture 204 that adjusts the amount of light passing through the lens 202, and a barrier 206 that protects the lens 202. The lens 202 and the aperture 204 form an optical system that focuses light on the photoelectric conversion device 201. The photoelectric conversion device 201 is the photoelectric conversion device 100 described in any one of the first to fifth embodiments, and converts the optical image formed by the lens 202 into image data.

[0119] The photodetection system 200 also includes a signal processing unit 208 that processes an output signal output from the photoelectric conversion device 201. The signal processing unit 208 generates image data from the digital signal output from the photoelectric conversion device 201. The signal processing unit 208 also performs various corrections and compressions as necessary to output the image data. The photoelectric conversion device 201 may include an AD conversion unit that generates a digital signal to be processed by the signal processing unit 208. The AD conversion unit may be formed in a semiconductor layer (semiconductor substrate) on which the photoelectric conversion elements of the photoelectric conversion device 201 are formed, or may be formed on a semiconductor substrate separate from the semiconductor layer on which the photoelectric conversion elements of the photoelectric conversion device 201 are formed. The signal processing unit 208 may also be formed on the same semiconductor substrate as the photoelectric conversion device 201.

[0120] The light detection system 200 further includes a buffer memory unit 210 for temporarily storing image data, and an external interface unit (external I / F unit) 212 for communicating with an external computer or the like. The light detection system 200 also includes a recording medium 214 such as a semiconductor memory for recording or reading out imaging data, and a recording medium control interface unit (recording medium control I / F unit) 216 for recording or reading out imaging data from the recording medium 214. The recording medium 214 may be built into the light detection system 200 or may be removable. Communication between the recording medium control I / F unit 216 and the recording medium 214 and communication from the external I / F unit 212 may be performed wirelessly.

[0121] The photodetection system 200 further includes an overall control and calculation unit 218 that performs various calculations and controls the entire digital still camera, and a timing generation unit 220 that outputs various timing signals to the photoelectric conversion device 201 and the signal processing unit 208. Here, the timing signals and the like may be input from outside, and the photodetection system 200 only needs to include at least the photoelectric conversion device 201 and the signal processing unit 208 that processes the output signal output from the photoelectric conversion device 201. The timing generation unit 220 may be mounted on the photoelectric conversion device 201. The overall control and calculation unit 218 and the timing generation unit 220 may be configured to perform some or all of the control functions of the photoelectric conversion device 201.

[0122] The photoelectric conversion device 201 outputs an imaging signal to the signal processing unit 208. The signal processing unit 208 performs predetermined signal processing on the imaging signal output from the photoelectric conversion device 201 and outputs image data. The signal processing unit 208 generates an image using the imaging signal. The signal processing unit 208 may be configured to perform distance measurement calculations on the signal output from the photoelectric conversion device 201.

[0123] As described above, according to this embodiment, by configuring a light detection system using the photoelectric conversion device of the first embodiment, it is possible to realize a light detection system capable of acquiring higher quality images.

[0124] [Seventh embodiment] A range image sensor according to a seventh embodiment of the present invention will be described with reference to Fig. 21. Fig. 21 is a block diagram showing a schematic configuration of the range image sensor according to this embodiment. In this embodiment, the range image sensor will be described as an example of a light detection system to which the photoelectric conversion device 100 described in any of the first to fifth embodiments is applied.

[0125] 21, the range image sensor 300 according to this embodiment may include an optical system 302, a photoelectric conversion device 304, an image processing circuit 306, a monitor 308, and a memory 310. This range image sensor 300 receives light (modulated light or pulsed light) that is irradiated from a light source device 320 toward a subject 330 and reflected by the surface of the subject 330, and obtains a range image according to the distance to the subject 330.

[0126] The optical system 302 is composed of one or more lenses, and serves to focus image light (incident light) from the subject 330 onto the light receiving surface (sensor section) of the photoelectric conversion device 304.

[0127] The photoelectric conversion device 304 is the photoelectric conversion device 100 described in any of the first to fifth embodiments, and has the function of generating a distance signal indicating the distance to the subject 330 based on image light from the subject 330, and supplying the generated distance signal to the image processing circuit 306.

[0128] The image processing circuit 306 has a function of performing image processing to construct a distance image based on the distance signal supplied from the photoelectric conversion device 304 .

[0129] The monitor 308 has a function of displaying the distance image (image data) obtained by the image processing in the image processing circuit 306. The memory 310 has a function of storing (recording) the distance image (image data) obtained by the image processing in the image processing circuit 306.

[0130] Thus, according to this embodiment, by constructing a distance image sensor using the photoelectric conversion devices of the first to fifth embodiments, it is possible to realize a distance image sensor that can acquire distance images containing more accurate distance information, in combination with improved characteristics of pixel 12.

[0131] [Eighth embodiment] An endoscopic surgery system according to an eighth embodiment of the present invention will be described with reference to Fig. 22. Fig. 22 is a schematic diagram showing an example of the configuration of the endoscopic surgery system according to this embodiment. In this embodiment, the endoscopic surgery system will be described as an example of a light detection system to which the photoelectric conversion device 100 described in any of the first to fifth embodiments is applied.

[0132] FIG. 22 shows a state in which an operator (doctor) 460 is performing surgery on a patient 472 on a patient bed 470 using an endoscopic surgery system 400.

[0133] 22, an endoscopic surgery system 400 of this embodiment may include an endoscope 410, a surgical tool 420, and a cart 430 on which various devices for endoscopic surgery are mounted. The cart 430 may be mounted with a CCU (camera control unit) 432, a light source device 434, an input device 436, a treatment tool control device 438, a display device 440, and the like.

[0134] The endoscope 410 includes a lens barrel 412, a region of which a predetermined length from the tip is inserted into a body cavity of a patient 472, and a camera head 414 connected to the base end of the lens barrel 412. Although Fig. 22 illustrates the endoscope 410 configured as a so-called rigid lens barrel having a rigid lens barrel 412, the endoscope 410 may also be configured as a so-called flexible lens barrel having a flexible lens barrel. The endoscope 410 is held in a movable state by an arm 416.

[0135] An opening into which an objective lens is fitted is provided at the tip of the lens barrel 412. A light source device 434 is connected to the endoscope 410, and light generated by the light source device 434 is guided to the tip of the lens barrel by a light guide extending inside the lens barrel 412, and is irradiated via the objective lens towards an observation target inside the body cavity of the patient 472. The endoscope 410 may be a direct-viewing endoscope, an oblique-viewing endoscope, or a side-viewing endoscope.

[0136] An optical system and a photoelectric conversion device (not shown) are provided inside the camera head 414, and light reflected from an observation object (observation light) is collected by the optical system onto the photoelectric conversion device. The photoelectric conversion device photoelectrically converts the observation light to generate an electrical signal corresponding to the observation light, i.e., an image signal corresponding to an observation image. The photoelectric conversion device may be the photoelectric conversion device 100 described in any of the first to fifth embodiments. The image signal is transmitted to the CCU 432 as RAW data.

[0137] The CCU 432 is configured with a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), etc., and comprehensively controls the operations of the endoscope 410 and the display device 440. Furthermore, the CCU 432 receives an image signal from the camera head 414, and performs various image processing on the image signal, such as development processing (demosaic processing), to display an image based on the image signal.

[0138] The display device 440 , under the control of the CCU 432 , displays an image based on the image signal that has been subjected to image processing by the CCU 432 .

[0139] The light source device 434 is configured from a light source such as an LED (Light Emitting Diode), and supplies the endoscope 410 with irradiation light when photographing an operation site or the like.

[0140] The input device 436 is an input interface for the endoscopic surgery system 400. A user can input various information and instructions to the endoscopic surgery system 400 via the input device 436.

[0141] The treatment tool control device 438 controls the driving of an energy treatment tool 450 for cauterizing tissue, incising, sealing blood vessels, or the like.

[0142] The light source device 434, which supplies illumination light to the endoscope 410 when photographing the surgical site, can be configured from a white light source configured from, for example, an LED, a laser light source, or a combination of these. When the white light source is configured from a combination of RGB laser light sources, the output intensity and output timing of each color (each wavelength) can be controlled with high precision, making it possible to adjust the white balance of the captured image in the light source device 434. In this case, it is also possible to capture images corresponding to each RGB color in a time-division manner by irradiating the object of observation with laser light from each RGB laser light source in a time-division manner and controlling the drive of the image sensor of the camera head 414 in synchronization with the irradiation timing. According to this method, a color image can be obtained without providing a color filter to the image sensor.

[0143] Furthermore, the light source device 434 may be controlled to change the intensity of light it outputs at predetermined time intervals. By controlling the driving of the image sensor of the camera head 414 in synchronization with the timing of the change in the light intensity to acquire images in a time-division manner and combining the images, it is possible to generate an image with a high dynamic range that is free of so-called blocked-up shadows and blown-out highlights.

[0144] The light source device 434 may also be configured to supply light in a predetermined wavelength band corresponding to special light observation. Special light observation utilizes, for example, the wavelength dependency of light absorption in body tissue. Specifically, by irradiating light with a narrower band than the light (i.e., white light) used in normal observation, a predetermined tissue, such as blood vessels on the surface of the mucosa, can be photographed with high contrast. Alternatively, special light observation may involve fluorescence observation, in which an image is obtained using fluorescence generated by irradiating excitation light. Fluorescence observation can involve irradiating excitation light onto a body tissue and observing the fluorescence from the body tissue, or locally injecting a reagent such as indocyanine green (ICG) into the body tissue and irradiating the body tissue with excitation light corresponding to the fluorescent wavelength of the reagent to obtain a fluorescent image. The light source device 434 may be configured to supply narrow band light and / or excitation light corresponding to such special light observation.

[0145] Thus, according to this embodiment, by configuring an endoscopic surgery system using the photoelectric conversion devices of the first to fifth embodiments, it is possible to realize an endoscopic surgery system that can acquire higher quality images.

[0146] [Ninth embodiment] A light detection system and a moving body according to a ninth embodiment of the present invention will be described with reference to Figs. 23 to 25. Fig. 23 is a schematic diagram showing a configuration example of a moving body according to this embodiment. Fig. 24 is a block diagram showing a schematic configuration of a light detection system according to this embodiment. Fig. 25 is a flow diagram showing the operation of the light detection system according to this embodiment. In this embodiment, an example of application to an in-vehicle camera is shown as a light detection system to which the photoelectric conversion device 100 described in any of the first to fifth embodiments is applied.

[0147] FIG. 23 is a schematic diagram showing an example of the configuration of a moving body (vehicle system) according to this embodiment. FIG. 23 shows the configuration of a vehicle 500 (automobile) as an example of a vehicle system incorporating a light detection system to which the photoelectric conversion device described in any of the first to fifth embodiments is applied. FIG. 23(a) is a schematic front view of the vehicle 500, FIG. 23(b) is a schematic plan view of the vehicle 500, and FIG. 23(c) is a schematic rear view of the vehicle 500. The vehicle 500 is provided with a pair of photoelectric conversion devices 502 on the front side. Here, the photoelectric conversion devices 502 are the photoelectric conversion devices 100 described in any of the first to fifth embodiments. The vehicle 500 also includes an integrated circuit 503, an alarm device 512, and a main control unit 513.

[0148] FIG. 24 is a block diagram showing an example configuration of a photodetection system 501 mounted on a vehicle 500. The photodetection system 501 includes a photoelectric conversion device 502, an image preprocessing unit 515, an integrated circuit 503, and an optical system 514. The photoelectric conversion device 502 is the photoelectric conversion device 100 described in any one of the first to fifth embodiments. The optical system 514 forms an optical image of a subject on the photoelectric conversion device 502. The photoelectric conversion device 502 converts the optical image of the subject formed by the optical system 514 into an electrical signal. The image preprocessing unit 515 performs predetermined signal processing on the signal output from the photoelectric conversion device 502. The function of the image preprocessing unit 515 may be incorporated into the photoelectric conversion device 502. The photodetection system 501 includes at least two sets of the optical system 514, the photoelectric conversion device 502, and the image preprocessing unit 515, and the output from each set of the image preprocessing unit 515 is input to the integrated circuit 503.

[0149] The integrated circuit 503 is an integrated circuit for use in an imaging system, and includes an image processing unit 504, an optical distance measuring unit 506, a parallax calculation unit 507, an object recognition unit 508, and an abnormality detection unit 509. The image processing unit 504 processes an image signal output from an image pre-processing unit 515. For example, the image processing unit 504 performs image processing such as development processing and defect correction on the output signal of the image pre-processing unit 515. The image processing unit 504 includes a memory 505 that temporarily stores the image signal. For example, the positions of known defective pixels in the photoelectric conversion device 502 can be stored in the memory 505.

[0150] The optical distance measurement unit 506 performs focusing and distance measurement of the subject. The parallax calculation unit 507 calculates distance information (distance information) from multiple image data (parallax images) acquired by the multiple photoelectric conversion devices 502. Each of the photoelectric conversion devices 502 may be configured to be able to acquire various information such as distance information. The object recognition unit 508 recognizes subjects such as cars, roads, signs, and people. When the abnormality detection unit 509 detects an abnormality in the photoelectric conversion device 502, it notifies the main control unit 513 of the abnormality.

[0151] The integrated circuit 503 may be realized by dedicated hardware, a software module, or a combination thereof. It may also be realized by an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), or the like, or a combination thereof.

[0152] The main control unit 513 supervises and controls the operations of the light detection system 501, the vehicle sensor 510, the control unit 520, etc. Note that the vehicle 500 does not necessarily have to include the main control unit 513. In this case, the photoelectric conversion device 502, the vehicle sensor 510, and the control unit 520 transmit and receive control signals via a communication network. For example, the CAN standard may be applied to the transmission and reception of these control signals.

[0153] The integrated circuit 503 has a function of receiving a control signal from the main control unit 513 or transmitting a control signal or a set value to the photoelectric conversion device 502 by its own control unit.

[0154] The optical detection system 501 is connected to a vehicle sensor 510 and can detect the vehicle's driving conditions, such as vehicle speed, yaw rate, and steering angle, as well as the conditions of the environment outside the vehicle and other vehicles and obstacles. The vehicle sensor 510 also serves as a distance information acquisition means for acquiring distance information to an object. The optical detection system 501 is also connected to a driving assistance control unit 511 that performs various driving assistance functions, such as automatic steering, automatic cruising, and collision prevention functions. In particular, the collision determination function determines whether or not a collision with another vehicle or obstacle has occurred based on the detection results of the optical detection system 501 and the vehicle sensor 510. This allows for avoidance control when a collision is estimated, and activation of safety devices in the event of a collision.

[0155] The optical detection system 501 is also connected to an alarm device 512 that issues an alarm to the driver based on the determination result of the collision determination unit. For example, if the collision determination unit determines that there is a high possibility of a collision, the main control unit 513 performs vehicle control to avoid the collision and mitigate damage by applying the brakes, releasing the accelerator, suppressing engine output, etc. The alarm device 512 warns the user by sounding an alarm or the like, displaying alarm information on a display screen of a car navigation system or meter panel, vibrating the seat belt or steering wheel, etc.

[0156] In this embodiment, the surroundings of the vehicle, for example, the front or rear, are photographed by the light detection system 501. Fig. 23(b) shows an example of the arrangement of the light detection system 501 when the light detection system 501 photographs the area in front of the vehicle.

[0157] As described above, the photoelectric conversion device 502 is disposed in front of the vehicle 500. Specifically, if the center line of the vehicle 500's heading or outer shape (for example, vehicle width) is regarded as an axis of symmetry, and the two photoelectric conversion devices 502 are disposed symmetrically about the axis of symmetry, this is preferable for obtaining distance information between the vehicle 500 and an object to be photographed and determining the possibility of a collision. Furthermore, the photoelectric conversion device 502 is preferably disposed so as not to obstruct the driver's field of vision when the driver visually checks the situation outside the vehicle 500 from the driver's seat. The warning device 512 is preferably disposed so as to be easily within the driver's field of vision.

[0158] Next, a fault detection operation of the photoelectric conversion device 502 in the light detection system 501 will be described with reference to Fig. 25. The fault detection operation of the photoelectric conversion device 502 can be performed according to steps S110 to S180 shown in Fig. 25.

[0159] Step S110 is a step for performing startup settings for the photoelectric conversion device 502. That is, settings for the operation of the photoelectric conversion device 502 are transmitted from outside the photodetection system 501 (for example, from the main control unit 513) or from inside the photodetection system 501, and the image capturing operation and fault detection operation of the photoelectric conversion device 502 are started.

[0160] Next, in step S120, pixel signals are acquired from valid pixels. Furthermore, in step S130, output values ​​are acquired from failure detection pixels provided for failure detection. These failure detection pixels, like valid pixels, have photoelectric conversion elements. A predetermined voltage is written to these photoelectric conversion elements. The failure detection pixels output signals corresponding to the voltage written to these photoelectric conversion elements. Note that steps S120 and S130 may be reversed.

[0161] Next, in step S140, a correspondence between the expected output value of the fault detection pixel and the actual output value from the fault detection pixel is determined. If the result of the correspondence determination in step S140 indicates that the expected output value and the actual output value match, the process proceeds to step S150, where it is determined that the imaging operation is normal, and the process proceeds to step S160. In step S160, the pixel signals of the scanning row are sent to memory 505 and temporarily stored. Thereafter, the process returns to step S120, where the fault detection operation continues. On the other hand, if the result of the correspondence determination in step S140 indicates that the expected output value and the actual output value do not match, the process proceeds to step S170. In step S170, it is determined that an abnormality exists in the imaging operation, and an alarm is issued to the main control unit 513 or the alarm device 512. The alarm device 512 displays the detection of the abnormality on the display unit. Thereafter, in step S180, the photoelectric conversion device 502 is stopped, and the operation of the light detection system 501 is terminated.

[0162] In this embodiment, the flowchart is looped for each line, but the flowchart may be looped for each set of lines, or the fault detection operation may be performed for each frame. The issuance of the alarm in step S170 may be notified to the outside of the vehicle via a wireless network.

[0163] Furthermore, although the present embodiment has been described as a control for preventing collisions with other vehicles, the present invention is also applicable to control for automatic driving by following other vehicles, control for automatic driving so as not to deviate from a lane, and the like. Furthermore, the light detection system 501 is not limited to vehicles such as the subject vehicle, but can be applied to moving bodies (moving devices) such as ships, aircraft, and industrial robots. In addition, the present invention is not limited to moving bodies, but can be applied to a wide range of devices that use object recognition, such as intelligent transport systems (ITS).

[0164] [Tenth embodiment] A light detection system according to a tenth embodiment of the present invention will be described with reference to Fig. 26. Fig. 26 is a schematic diagram showing a configuration example of the light detection system according to this embodiment. In this embodiment, an example of application to eyeglasses (smart glasses) will be described as a light detection system to which the photoelectric conversion device 100 described in any of the first to fifth embodiments is applied.

[0165] 26(a) shows glasses 600 (smart glasses) according to one application example. The glasses 600 include lenses 601, a photoelectric conversion device 602, and a control device 603.

[0166] The photoelectric conversion device 602 is the photoelectric conversion device 100 described in any one of the first to fifth embodiments, and is provided on the lens 601. There may be one or more photoelectric conversion devices 602. When multiple photoelectric conversion devices 602 are used, multiple types of photoelectric conversion devices 602 may be combined. The arrangement position of the photoelectric conversion device 602 is not limited to that shown in FIG. 26(a). A display device (not shown) including a light-emitting device such as an OLED or LED may be provided on the back side of the lens 601.

[0167] The control device 603 functions as a power source that supplies power to the photoelectric conversion device 602 and the display device. The control device 603 also has a function of controlling the operations of the photoelectric conversion device 602 and the display device. The lens 601 is provided with an optical system for condensing light onto the photoelectric conversion device 602.

[0168] 26(b) shows glasses 610 (smart glasses) according to another application example. The glasses 610 include lenses 611 and a control device 612. The control device 612 may be equipped with a photoelectric conversion device (not shown) corresponding to the photoelectric conversion device 602 and a display device.

[0169] The lens 611 is provided with a photoelectric conversion device in the control device 612 and an optical system for projecting light from the display device, and an image is projected. The control device 612 functions as a power source that supplies power to the photoelectric conversion device and the display device, and also has a function of controlling the operations of the photoelectric conversion device and the display device.

[0170] The control device 612 may further include a gaze detection unit that detects the gaze of the wearer. In this case, an infrared light emitting unit may be provided in the control device 612, and the infrared light emitted from the infrared light emitting unit may be used to detect the gaze. Specifically, the infrared light emitting unit emits infrared light toward the eyeball of the user gazing at the displayed image. An imaging unit having a light receiving element detects the reflected light of the emitted infrared light from the eyeball, thereby obtaining an image of the eyeball. By providing a reduction unit that reduces the light from the infrared light emitting unit to the display unit in a planar view, it is possible to reduce degradation of image quality.

[0171] The user's line of sight with respect to the displayed image can be detected from an image of the eyeball obtained by capturing infrared light. Any known method can be applied to gaze detection using an image of the eyeball. As an example, a gaze detection method based on a Purkinje image formed by reflection of irradiated light on the cornea can be used. More specifically, a gaze detection process based on the pupil-corneal reflex method is performed. Using the pupil-corneal reflex method, a gaze vector representing the direction (rotation angle) of the eyeball is calculated based on the image of the pupil and the Purkinje image included in the image of the eyeball, thereby detecting the user's gaze.

[0172] The display device of this embodiment may include a photoelectric conversion device having a light receiving element, and may be configured to control a display image based on user line-of-sight information from the photoelectric conversion device. Specifically, the display device determines a first field of view area where the user gazes and a second field of view area other than the first field of view area based on the line-of-sight information. The first field of view area and the second field of view area may be determined by a control device of the display device or by an external control device. If determined by an external control device, they are communicated to the display device via communication. In the display area of ​​the display device, the display resolution of the first field of view area may be controlled to be higher than the display resolution of the second field of view area. In other words, the resolution of the second field of view area may be lower than the resolution of the first field of view area.

[0173] The display area may also be configured to have a first display area and a second display area different from the first display area, and to determine a high-priority area from the first display area and the second display area based on line-of-sight information. The first display area and the second display area may be determined by a control device of the display device or by an external control device. If determined by an external control device, the determination is communicated to the display device via communication. The resolution of the high-priority area may be controlled to be higher than the resolution of areas other than the high-priority area. In other words, the resolution of an area with a relatively low priority may be lowered.

[0174] Note that AI may be used to determine the first field of view area and areas with high priority. The AI ​​may be a model configured to estimate the angle of gaze and the distance to an object in the line of sight from an image of the eyeball, using as training data an image of the eyeball and the actual direction in which the eyeball in the image was looking. The AI ​​program may be included in the display device, the photoelectric conversion device, or an external device. If included in an external device, it is transmitted to the display device via communication.

[0175] When display control is performed based on visual recognition detection, the present invention is preferably applied to smart glasses that further include a photoelectric conversion device for capturing images of the outside world. The smart glasses can display captured external information in real time.

[0176] [Modified embodiment] The present invention is not limited to the above-described embodiment, and various modifications are possible. For example, an example in which part of the configuration of any one of the embodiments is added to another embodiment, or an example in which part of the configuration of another embodiment is substituted therefor, is also an embodiment of the present invention.

[0177] The circuit configuration of the pixel 12 is not limited to that of the above embodiment. For example, a switch such as a transistor may be provided between the photoelectric conversion element 22 and the quench element 24 or between the photoelectric conversion unit 20 and the pixel signal processing unit 30 to control the electrical connection state therebetween. A switch such as a transistor may be provided between the node to which the voltage VH is supplied and the quench element 24 and / or between the node to which the voltage VL is supplied and the photoelectric conversion element 22 to control the electrical connection state therebetween.

[0178] Furthermore, in the above embodiment, a configuration has been described in which the counter 34 is used as the pixel signal processing unit 30, but a TDC (Time to Digital Converter) and a memory may be used instead of the counter 34. In this case, the generation timing of the pulse signal output from the signal processing circuit 32 is converted into a digital signal by the TDC. When measuring the timing of the pulse signal, a control pulse pREF (reference signal) is supplied to the TDC from the vertical scanning circuit unit 40 via the control line 14. The TDC acquires, as a digital signal, a signal obtained when the input timing of the signal output from each pixel 12 is converted into a relative time based on the control pulse pREF.

[0179] Furthermore, in the above embodiment, a configuration has been shown in which one pixel 12 has one photoelectric conversion element 22, but one pixel 12 may have multiple photoelectric conversion elements 22. Furthermore, in the above embodiment, one photoelectric conversion element 22 is arranged in one semiconductor region 136 surrounded by the P-type semiconductor regions 132 and 134, but multiple photoelectric conversion elements 22 may be arranged in one semiconductor region 136.

[0180] The present invention can also be realized by supplying a program that realizes one or more functions of the above-described embodiments to a system or device via a network or a storage medium, and having one or more processors in the computer of the system or device read and execute the program.The present invention can also be realized by a circuit (e.g., ASIC) that realizes one or more functions.

[0181] It should be noted that the above-described embodiments are merely examples of specific embodiments for carrying out the present invention, and the technical scope of the present invention should not be construed as being limited by these embodiments. In other words, the present invention can be carried out in various forms without departing from its technical concept or main features. [Explanation of symbols]

[0182] 12...pixels 22...Photoelectric conversion element 100...Photoelectric conversion device 120...Semiconductor layer 122...Side 1 124…Second side 126, 128, 140...N-type semiconductor region 130, 132, 134, 138...P-type semiconductor region 136...Semiconductor field 158...Cathode electrode

Claims

1. A photoelectric conversion element provided in a semiconductor layer having a first surface and a second surface opposite to the first surface, a first semiconductor region of a first conductivity type; a second semiconductor region of a second conductivity type that is disposed closer to the second surface than the first semiconductor region and forms a pn junction with the first semiconductor region; a third semiconductor region of the first conductivity type that is disposed closer to the second surface than the second semiconductor region and overlaps with the first semiconductor region and the second semiconductor region in a plan view; a fourth semiconductor region of the second conductivity type that is arranged closer to the second surface than the third semiconductor region and that overlaps with an entire region in which the first semiconductor region, the second semiconductor region, and the third semiconductor region are arranged in a plan view; a fifth semiconductor region of the second conductivity type disposed at a depth between the third semiconductor region and the fourth semiconductor region; a sixth semiconductor region of the second conductivity type that is arranged so as to surround a region in which the first semiconductor region, the second semiconductor region, the third semiconductor region, and the fifth semiconductor region are arranged in a plan view and is electrically connected to the fourth semiconductor region, The fifth semiconductor region has an area smaller than that of the third semiconductor region in a plan view and overlaps with the first semiconductor region in a plan view. A photoelectric conversion element characterized by:

2. An end portion of the fifth semiconductor region on the first surface side in a cross-sectional view is located closer to the first surface than an end portion of the third semiconductor region on the second surface side in a cross-sectional view.

2. The photoelectric conversion element according to claim 1.

3. At the same depth where the third semiconductor region and the fifth semiconductor region are disposed, the potential of the fifth semiconductor region with respect to carriers of the first conductivity type is higher than the potential of the third semiconductor region with respect to carriers of the first conductivity type.

3. The photoelectric conversion element according to claim 2.

4. The third semiconductor region and the fifth semiconductor region form a pn junction.

4. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

5. a seventh semiconductor region of the first conductivity type arranged to surround the third semiconductor region at a depth where the third semiconductor region is provided; The seventh semiconductor region extends to a region between the third semiconductor region and the fourth semiconductor region, and forms a pn junction with the fifth semiconductor region.

5. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

6. further comprising a plurality of eighth semiconductor regions of the second conductivity type disposed at a depth between the third semiconductor region and the fourth semiconductor region; The eighth semiconductor regions are arranged between the fifth semiconductor region and the sixth semiconductor region in a plan view.

6. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

7. The fifth semiconductor region is in contact with the fourth semiconductor region.

7. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

8. The fifth semiconductor region is spaced apart from the fourth semiconductor region.

7. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

9. The impurity concentration of the fifth semiconductor region is lower than the impurity concentration of the fourth semiconductor region.

9. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

10. The area of ​​the second semiconductor region in a plan view is larger than the area of ​​the first semiconductor region in a plan view.

10. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

11. The second semiconductor region is in contact with the sixth semiconductor region.

11. The photoelectric conversion element according to claim 1.

12. The semiconductor layer has a concavo-convex structure provided on the second surface.

12. The photoelectric conversion element according to claim 1.

13. The uneven structure extends to a depth at which the fifth semiconductor region is disposed.

13. The photoelectric conversion element according to claim 12.

14. The semiconductor device further includes an isolation structure disposed inside the sixth semiconductor region so as to surround a region in which the first semiconductor region, the second semiconductor region, the third semiconductor region, and the fifth semiconductor region are disposed in a plan view.

14. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

15. a first electrode electrically connected to the first semiconductor region and a second electrode electrically connected to the sixth semiconductor region.

15. The photoelectric conversion element according to claim 1.

16. The semiconductor layer further includes an optical structure layer disposed on the second surface side.

16. The photoelectric conversion element according to claim 1, wherein the first and second electrodes are electrically connected to each other.

17. A photoelectric conversion device having a plurality of pixels arranged in a plurality of rows and a plurality of columns, Each of the plurality of pixels includes a photoelectric conversion element according to any one of claims 1 to 16, and a signal processing circuit that processes a signal output from the photoelectric conversion element. A photoelectric conversion device characterized by:

18. The arrangement interval of the plurality of pixels is larger than the thickness of the semiconductor layer.

18. The photoelectric conversion device according to claim 17.

19. a first substrate including the semiconductor layer on which the photoelectric conversion elements of the plurality of pixels are provided; a second substrate on which the signal processing circuits for the plurality of pixels are provided; 19. The photoelectric conversion device according to claim 17, further comprising:

20. The photoelectric conversion device according to any one of claims 17 to 19, a signal processing device that processes a signal output from the photoelectric conversion device; An optical detection system comprising:

21. The signal processing device generates a distance image representing distance information to an object based on the signal.

21. The optical detection system of claim 20.

22. A mobile object, The photoelectric conversion device according to any one of claims 17 to 19, a distance information acquisition means for acquiring distance information to an object from a parallax image based on a signal output from the photoelectric conversion device; a control means for controlling the moving object based on the distance information; A moving object characterized by having:

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