Vacuum system apparatus and method

Abstract

Aspects of the present invention relate to a vacuum system (1). The vacuum system (1) includes a vacuum pump (3) and a heat exchanger (7) for receiving a heat transfer fluid. The heat transfer fluid comprises a gas. The heat exchanger (7) is thermally coupled to the vacuum pump (3) and is operable to absorb thermal energy from the vacuum pump (3). Aspects of the present invention also relate to a method of operating the vacuum system (1) and a controller (31) for controlling the operation of the vacuum system (1).

Description

[Technical Field]

[0001] FIELD OF THE DISCLOSURE Aspects of the present disclosure relate to vacuum systems, heat exchange devices, methods of operating vacuum systems, and controllers for controlling the operation of vacuum systems. [Background technology]

[0002] It is known to provide industrial vacuum systems with cooling blocks to maintain a target operating temperature of the vacuum pump, which is typically set to suit a particular industrial process. Target operating temperatures for vacuum pumps continue to increase in order to reduce process-related pump failures.

[0003] Achieving the target operating temperature requires a high-power compression stage or active heating. The gas temperature in the discharge conduit must be maintained at the pump outlet temperature to prevent or reduce condensation of the process gas. It is known to introduce a purge gas, such as nitrogen (N), into the vacuum pump or its discharge conduit to minimize condensation problems. As the process flow to the pump increases, pump power increases while the pump is operating at high loads. The operating temperature of the vacuum pump also increases correspondingly. Vacuum pumps are equipped with cooling blocks to maintain the pump temperature even in such conditions. However, when the vacuum pump is operating at low loads, e.g., during idle operation, the cooling block acts as a heat sink, absorbing thermal energy. The cooling block delays the vacuum pump's reaching the target operating temperature. Therefore, additional power is consumed to achieve the target operating temperature. Summary of the Invention [Problem to be solved by the invention]

[0004] SUMMARY OF THE INVENTION It is an object of the present invention to address one or more of the shortcomings associated with the prior art. [Means for solving the problem]

[0005] Aspects and embodiments of the present invention provide a vacuum system, a method of operating a vacuum system, and a controller as set out in the accompanying claims.

[0006] According to a first aspect of the present invention, A vacuum pump and a heat exchanger for receiving a heat transfer fluid comprising a gas; a heat exchanger thermally coupled to the vacuum pump and operable to absorb thermal energy from the vacuum pump.

[0007] The heat transfer fluid facilitates heat removal from the vacuum pump. In at least certain embodiments, the supply of the heat transfer fluid to the heat exchanger can be controlled. Thus, the transfer of thermal energy from the vacuum pump can be controlled, for example, in response to one or more operating parameters of the vacuum pump. In at least certain embodiments, the footprint of the vacuum system can be smaller than the footprint of prior art systems. Power consumption of the vacuum system can be reduced and / or emissions associated with operation of the vacuum system can be reduced.

[0008] The heat exchanger may include an inlet and an outlet. A flow path may be defined between the inlet and the outlet. In use, a heat transfer fluid is introduced through the inlet, follows the flow path, and is discharged through the outlet. The flow path may include or consist of a serpentine or convoluted path, for example, to increase the heat exchange surface area. The heat exchanger may have one or more internal fins to facilitate heat exchange with the heat transfer fluid.

[0009] The heat exchanger can be attached to a vacuum pump. The vacuum pump can include a pump housing. The heat exchanger can be thermally coupled to the pump housing. The heat exchanger can be attached to the pump housing. A thermal coupler can be provided between the heat exchangers to facilitate heat transfer.

[0010] The heat transfer fluid may comprise a purge gas for introduction into a vacuum pump.

[0011] The vacuum system may include at least one port. A heat exchanger may be connected to at least one port. For example, the outlet line of the heat exchanger may be connected to the or each port. In use, heat transfer fluid from the heat exchanger may be introduced into at least one port. The port may be provided in a vacuum pump to allow introduction of the heat transfer fluid into the vacuum pump. The port may, for example, be configured to introduce the heat transfer fluid into an intermediate stage of the vacuum pump. The port may, for example, constitute an interstage port of the vacuum pump. Alternatively or additionally, a port may be provided at the outlet (or final stage) of the vacuum pump to introduce the heat transfer fluid into the outlet.

[0012] The vacuum system may include a gas heater for heating the heat transfer fluid. The gas heater may be disposed, for example, between the heat exchanger and the port. The heat transfer fluid discharged from the heat exchanger may be supplied to the gas heater. The gas heater may provide additional heating to the purge gas before it is introduced into the vacuum pump.

[0013] The vacuum system may comprise means for controlling the supply of heat transfer fluid to the heat exchanger. The control means may consist, for example, of a pump. Alternatively, the control means may consist of at least one control valve. The control valve may be suitable for controlling the supply of heat transfer fluid to the heat exchanger. The control valve(s) may consist, for example, of one or more three-way valves. Other types of valves are also contemplated.

[0014] At least one control valve may optionally control the rate of delivery of the heat transfer fluid. Alternatively or additionally, a flow restrictor may be provided to control the rate of delivery. The flow restrictor may be fixed or variable.

[0015] The at least one control valve may be selectively operable to bypass the heat exchanger, for example, to supply gas directly to a gas heater.

[0016] The vacuum system can include a valve controller for controlling operation of the at least one control valve. The valve controller can include at least one electronic processor having at least one input for receiving a signal indicative of an operating status of the vacuum pump.

[0017] The valve controller can be configured to selectively operate the control valve to reduce or prevent the supply of heat transfer fluid to the heat exchanger to reduce absorption of thermal energy from the vacuum pump. The valve controller can be configured to control the control valve to reduce heat removal during idle operation of the vacuum pump, such as during a start-up procedure. The heat exchanger can be configured to reduce heat removal in response to a reduced load or low load condition of the vacuum pump. The valve controller can be configured to selectively operate the control valve to reduce the supply of heat transfer fluid to the heat exchanger in response to a signal indicating that the vacuum pump is operating in a low load condition.

[0018] The valve controller can be configured to selectively actuate the control valve to increase the supply of heat transfer fluid to the heat exchanger to increase absorption of thermal energy from the vacuum pump. The valve controller can be configured to control the control valve to increase heat removal during high load operating conditions. The heat exchanger can be configured to increase heat removal in response to an increase in load or high load condition of the vacuum pump. The valve controller can be configured to selectively actuate the control valve to increase the supply of heat transfer fluid to the heat exchanger in response to a signal indicating the vacuum pump is operating in a high load condition.

[0019] The gas may be preheated before being supplied to the gas heater. A vacuum system may be configured to reduce the heating provided by the gas heater while the heat exchanger is operating.

[0020] The vacuum system can include a cooling block thermally coupled to the heat exchanger. The cooling block can be selectively operable to absorb thermal energy from the heat exchanger. The cooling block can be configured to receive a coolant. The coolant can include or consist of a liquid. The liquid can consist of, for example, water.

[0021] The cooling block may have an inlet and an outlet for carrying a coolant. Liquid coolant may be introduced into the cooling block through the inlet and discharged through the outlet.

[0022] The vacuum system can include a cooling block controller for controlling the supply of coolant to the cooling block. A coolant control valve can be provided for controlling the supply of coolant to the cooling block. The cooling block controller can control operation of the coolant control valve. The cooling block controller can be configured to supply coolant in response to determining that the temperature of the heat exchanger is at or above a predetermined temperature threshold.

[0023] The heat exchanger and cooling block can be operable independently of one another. For example, the vacuum system can be configured to activate the heat exchanger when the cooling block is inactive. The vacuum system can be configured to activate the heat exchanger and cooling block simultaneously.

[0024] According to a further aspect of the present invention there is provided a heat exchange apparatus for attachment to a vacuum pump, the heat exchange assembly comprising: a gas heat exchanger having a first side for thermally coupling to a vacuum pump; a cooling block for receiving a liquid coolant; and the cooling block is thermally coupled to a second side of the gas heat exchanger. The first and second sides may be opposite sides of the gas heat exchanger. In use, the gas heat exchanger is disposed between the vacuum pump and the cooling block. In at least certain embodiments, the cooling block is spaced apart from the vacuum pump. In use, the cooling block may be at least partially thermally isolated from the vacuum pump. The gas heat exchanger may be operable to facilitate removal of thermal energy from the vacuum pump. The cooling block may be operable to facilitate removal of thermal energy from the gas heat exchanger. The gas heat exchanger and the cooling block may be operable independently of one another. In use, one or both of the gas heat exchanger and the cooling block may be operable. For example, the gas heat exchanger may operate by itself or in conjunction with the cooling block.

[0025] The gas heat exchanger may include a gas inlet and a gas outlet. The gas inlet and the gas outlet may be connected by an internal conduit. The internal conduit may, for example, comprise a serpentine path. The cooling block may include a liquid coolant inlet and a liquid coolant outlet. The gas inlet and the gas outlet are connected by an internal conduit. The internal conduit may, for example, comprise a serpentine path.

[0026] In a further aspect of the present invention, there is provided a method of operating a vacuum system, the vacuum system comprising a vacuum pump and a heat exchanger for absorbing thermal energy from the vacuum pump, the heat exchanger configured to receive a heat transfer fluid; The heat transfer fluid comprises a purge gas, and the method includes selectively supplying the heat transfer fluid from the heat exchanger to a vacuum pump or to an outlet of the vacuum pump.

[0027] The method may include controlling the supply of heat transfer fluid to the heat exchanger in response to one or more operating parameters of the vacuum pump.

[0028] The method may include supplying a heat transfer fluid to a heat exchanger in response to determining that the vacuum pump has an operating temperature above a predetermined threshold.

[0029] The method may include actuating a control valve to control the supply of heat transfer fluid to the heat exchanger.

[0030] The method may include selectively actuating a control valve to bypass the supply of heat transfer fluid to the heat exchanger.

[0031] According to a further aspect of the present invention, there is provided a controller for controlling operation of a vacuum system, the controller comprising at least one electronic processor and a memory, wherein a set of instructions are stored in the memory and, when executed, cause the controller to perform a method described herein.

[0032] Within the scope of this application, it is expressly intended that the various aspects, embodiments, examples, and alternatives, particularly individual features, set forth in the above paragraphs, claims, and / or the following description and drawings, may be obtained independently or in any combination. That is, all embodiments and / or features of any embodiments may be combined in any manner and / or combination, except where such features are incompatible. Applicant reserves the right to modify the claims of the original application or to file any new claims accordingly, including the right to amend the claims of the original application to correspond to and / or incorporate any feature of any other claim not so claimed in the original application.

[0033] One or more embodiments of the present invention will now be described, by way of example only, with reference to the accompanying drawings, in which: [Brief explanation of the drawings]

[0034] [Figure 1] 1 shows a schematic of a vacuum system according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a perspective view of a heat exchanger for mounting on a vacuum pump of the vacuum system shown in FIG. 1. [Figure 3] FIG. 2 is a block diagram showing the operation of the vacuum system shown in FIG. [Figure 4] 2 shows a schematic of a vacuum system according to a second embodiment of the present invention. [Figure 5] FIG. 5 is a perspective view of a heat exchanger for mounting on a vacuum pump of the vacuum system shown in FIG. 4. DETAILED DESCRIPTION OF THE INVENTION

[0035] A vacuum system 1 according to an embodiment of the present invention will now be described with reference to the accompanying drawings.

[0036] The vacuum system 1 includes a vacuum pump 3. The vacuum pump 3 is operable to create a vacuum in a vacuum chamber (not shown). The vacuum chamber is suitable for carrying out an industrial process. In use, a process gas is introduced into the vacuum chamber. The vacuum pump 3 includes a pump housing 5 that supports a rotor shaft (not shown). The vacuum pump 3 can be used, for example, in industrial processes and high-vacuum processes. The vacuum pump 3 is a multi-stage pump having multiple stages. The vacuum pump 3 can have, for example, five, six, or seven stages. The process gas is introduced through a process gas inlet into the first of the stages, passes through the last of the stages, and is exhausted through a process gas outlet.

[0037] As shown in FIG. 1 , the vacuum system 1 includes a vacuum pump 3, a heat exchanger 7, a control valve 9, and a gas heater 11. The heat exchanger 7 is thermally coupled to the pump housing 5 of the vacuum pump 3. As described herein, the heat exchanger 7 operates to cool the vacuum pump 3. In this embodiment, the control valve 9 is a three-way valve. The control valve 9 controls the supply of a heat transfer fluid to the heat exchanger 7. The heat transfer fluid transfers thermal energy from the heat exchanger 7, thereby assisting in the removal of heat from the vacuum pump 3 and providing a cooling function. In this embodiment, the heat exchanger is a gas heat exchanger, and the heat transfer fluid is a gas. The gas is supplied from a main gas supply 13. A heat transfer fluid control valve 14 is provided to selectively control the supply of gas from the main gas supply 13. In this embodiment, the heat transfer fluid is a purge gas suitable for introduction into the vacuum pump 3 to purge contaminants. The purge gas in this embodiment is nitrogen (N), but it should be understood that different purge gases can be used for other industrial processes. It is not essential that the heat transfer fluid also be used as the purge gas.

[0038] FIG. 2 shows a perspective view of the heat exchanger 7. The heat exchanger 7 includes a body 15, a first inlet 17 for introducing a heat transfer fluid, and a first outlet 19 for discharging the heat transfer fluid. The heat exchanger 7 is thermally coupled to the pump housing 5. In this embodiment, the heat exchanger 7 is secured to the pump housing 5 in a face-to-face arrangement. Mechanical fasteners (not shown) are disposed in respective mounting openings 21 formed in the body 15. The body 15 of the heat exchanger 7 and the pump housing 5 may have complementary contours. For example, the pump housing 5 may include a flat portion for contacting a sidewall of the body 15 of the heat exchanger 7. Optionally, a heat conductor, such as a thermally conductive gel, may be provided at the interface between the pump housing 5 and the heat exchanger 7. Alternatively, the heat exchanger 7 may be incorporated into the pump housing 5. For example, the heat exchanger 7 may be formed within the pump housing 5.

[0039] The vacuum system 1 includes an inlet line 23, an outlet line 25, and a bypass line 27. The inlet line 23 connects the first inlet 17 of the heat exchanger 7 to the control valve 9. The outlet line 25 connects the first outlet 19 of the heat exchanger 7 to the gas heater 11. In use, the inlet line 23 supplies a heat transfer fluid from the gas supply 13 to the heat exchanger 7, and the outlet line 25 delivers the heat transfer fluid from the heat exchanger 7 to the gas heater 11. At least one internal conduit is formed in the body 15 of the heat exchanger 7 to establish a flow path between the first inlet 17 and the first outlet 19. The at least one internal conduit forms a tortuous flow path for the heat transfer fluid to increase the internal heat exchange surface area of ​​the heat exchanger 7. The at least one internal conduit may, for example, define a serpentine flow path within the heat exchanger 7. Alternatively or additionally, one or more fins or protrusions may be provided inside the heat exchanger 7 to increase the internal heat exchange surface area. The heat exchanger 7 is constructed of a thermally conductive material, such as aluminum or a metal alloy. In this embodiment, the heat exchanger 7 is formed using an additive manufacturing process, such as three-dimensional (3D) printing. Alternatively or additionally, the heat exchanger 7 can be formed using a casting process and / or a machining process.

[0040] The gas heater 11 is provided to heat the purge gas before it is introduced into the vacuum pump 3. The gas heater 11 can be an in-line heater. In this embodiment, the gas heater 11 is a positive temperature coefficient (PTC) heater. The heat transfer fluid discharged from the heat exchanger 7 is conveyed to the gas heater 11 through the outlet line 23. As described above, the heat transfer fluid is the purge gas for introduction into the vacuum pump 3 (or other pump). The gas heater 11 heats the heat transfer fluid to a predetermined target temperature before mixing with the process gas. The heat transfer fluid is supplied to an interstage port 29 provided in the vacuum pump 3. The interstage port 29 introduces the heat transfer fluid into an intermediate stage or the final stage (exhaust stage) of the vacuum pump 3. As described herein, the heat exchanger 7 can preheat the heat transfer fluid before it is introduced into the gas heater 11. Preheating the heat transfer fluid can reduce energy consumption by the gas heater 11. Alternatively, the control valve 9 can be operated to supply the heat transfer fluid directly to the gas heater 11, bypassing the heat exchanger 7. The introduction of the heat transfer fluid to the vacuum pump 3 (or other pump) after heating by the gas heater 11 remains unchanged in this variant.

[0041] The vacuum system 1 includes a valve controller 31 for controlling the operation of the control valve 9. The valve controller 31 includes at least one electronic processor 33 and a memory 35. A set of computational instructions is stored in the memory 35. When executed, the computational instructions cause the at least one electronic processor 33 to perform the method(s) described herein. The valve controller 31 is configured to receive one or more input signals S1 from a vacuum pump controller 37 and to output one or more control signals S2 to the control valve 9. The input signal S1 is configured to provide an indication of the operating state of the vacuum pump 3. The input signal S1 may indicate a load on the vacuum pump 3. The valve controller 31 may determine that the vacuum pump 3 is operating at a low load (e.g., an idle state). The valve controller 31 may determine that the vacuum pump 3 is operating at a high load, for example, when a process gas inlet valve is open to supply process gas to the vacuum pump 3. The valve controller 31 is configured to operate the control valve 9 in response to the determined operating state of the vacuum pump 3. Alternatively or additionally, the input signal S1 may indicate the load status of the vacuum pump 3. The operation of the vacuum pump 3 is controlled by a vacuum pump controller 37 in a conventional manner. It should be understood that the valve controller 31 and the vacuum pump controller 37 may be integrated into a single controller. The single controller may control both the vacuum pump 3 and the control valve 9. For example, the vacuum pump controller 37 may be configured to control the control valve 9 in accordance with the method(s) described herein.

[0042] Thermal energy generated by the operation of the vacuum pump 3 is transferred to the heat exchanger 7. The valve controller 31 controls the control valve 9 to control the supply of heat transfer fluid to the heat exchanger 7, thereby controlling the cooling of the vacuum pump 3 and the pump housing 5. The valve controller 31 outputs a control signal S2 to the control valve 9 and the heat transfer fluid control valve 14. The control valve 9 and the heat transfer fluid control valve 14 operate in response to the control signal S2. The valve controller 31 is configured to operate the heat transfer fluid control valve 14 to a closed state when the input signal S1 indicates that the vacuum pump 3 is not operating. The valve controller 31 is configured to operate the heat transfer fluid control valve 14 to an open state when the input signal S1 indicates that the vacuum pump 3 is operating in either a low-load state or a high-load state. The heat transfer fluid passes through at least one internal conduit 23 (schematically shown in FIG. 2) formed within the heat exchanger 7. The heat transfer fluid absorbs thermal energy from the heat exchanger 7 and is then discharged from the heat exchanger 7. As described herein, in this embodiment, the control valve 9 is a three-way valve. To control the operation of the heat exchanger 7, the control valve 9 can be configured to selectively operate in the following states:

[0043] (i) Heat exchanger supply The inlet line 23 is in fluid communication with the main gas supply 13 and supplies heat transfer fluid to the heat exchanger 7. The bypass line 27 is closed, thereby preventing (or reducing) the supply of heat transfer fluid directly to the gas heater 11. (ii) Heat exchanger bypass The bypass line 27 is in fluid communication with the main gas supply 13 and supplies heat transfer fluid directly to the gas heater 11. The inlet line 23 is closed, preventing (or reducing) the supply of heat transfer fluid to the heat exchanger 7.

[0044] The valve controller 31 is configured to operate the control valve 9 in a "heat exchanger bypass" state when the input signal S1 indicates that the vacuum pump 3 is operating at a low load. The heat transfer fluid is supplied directly to the gas heater 11, bypassing the heat exchanger 7. This reduces the rejection of thermal energy from the pump housing 5, allowing the vacuum pump 3 to reach a target operating temperature more quickly during idle or low load conditions. The valve controller 31 is configured to operate the control valve 9 in a "heat exchanger supply" state when the input signal S1 indicates that the vacuum pump 3 is operating at a high load. The control valve 9 diverts at least a portion of the heat exchange fluid to the heat exchanger 7 to compensate for an increase in pump temperature due to a high load. The heat exchanger 7 is effective to maintain or reduce the temperature of the vacuum pump 3. The heat exchange fluid is preheated by the heat exchanger 7 and supplied to the gas heater 11.

[0045] The operation of the vacuum system 1 will now be described with reference to the first block diagram 100 shown in FIG. 3 . The vacuum system 1 is activated (block 105). The vacuum pump 3 is initially not operating, and the valve controller 31 activates (keeps) the heat transfer fluid control valve 14 closed (block 110). The supply of heat transfer fluid to the heat exchanger 7 and gas heater 11 is blocked. The vacuum pump controller 37 activates the vacuum pump 3 (block 115). The vacuum pump 3 operates in an idle, low-load state. The valve controller 31 activates the heat transfer fluid control valve 14 to an open state. The valve controller 31 activates the control valve 9 to a “heat exchanger bypass” state (block 120). The bypass line 27 is opened so that the heat transfer fluid bypasses the heat exchanger 7. In this configuration, the heat exchanger 7 provides limited cooling for the vacuum pump 3. The vacuum pump 3 reaches a target operating temperature (block 125). The process gas inlet valve is actuated to an open state, supplying process gas to the vacuum pump 3. The vacuum pump controller 37 outputs a first control signal S1 indicating that the vacuum pump 3 is operating at a high load (block 130). The valve controller 31 actuates the control valve 9 to the "heat exchanger supply" state (block 135). The inlet line 23 is opened to allow heat exchange fluid to be supplied to the heat exchanger 7. In this configuration, the heat exchanger 7 provides effective cooling for the vacuum pump 3. The heat transfer fluid is preheated by the heat exchanger 7 and then supplied to the gas heater 11. The gas heater 11 provides controlled heating of the heat transfer fluid for introduction into the vacuum pump 3 and mixing with the process gas. The vacuum pump controller 37 closes the process gas supply valve to prevent the supply of process gas to the vacuum pump 3. The vacuum pump controller 37 outputs a first control signal S1 indicating that the vacuum pump 3 is operating at a low load (block 140). The vacuum pump controller 37 deactivates the vacuum pump 3 (block 140). The valve controller 31 actuates the heat transfer fluid control valve 14 to a closed state (block 143). The vacuum system 1 is deactivated (block 150).

[0046] In at least certain embodiments, the vacuum system 1 may provide advantages over prior art configurations. Bypassing the heat exchanger 7 may reduce the transfer of thermal energy from the vacuum pump 3 (to the heat exchanger 7). As a result, the power consumption of the vacuum pump 3 may be reduced in certain embodiments. In prior art configurations, a cooler block may be attached to the pump housing 5 of the vacuum pump 3. The cooler block uses a liquid coolant, typically water. In at least certain embodiments, the vacuum system 1 described herein may require less water to cool the vacuum pump 3. This may also reduce the requirements for cooling the heated coolant (water), thereby reducing the need for cooler operation to reduce the temperature of the heated coolant before recirculation. In at least certain embodiments, the heat exchanger 7 may be smaller in size (and potentially less mass) than the cooling block, thereby reducing the footprint of the vacuum pump 3. Excess heat generated by the vacuum pump 3 may be used to heat the purge gas. This may reduce the power consumption by the gas heater 11.

[0047] The valve controller 31 is described herein as controlling the control valve 9 in response to an input signal S1 received from the vacuum pump controller 37. In a variant, the input signal S1 may include or consist of a temperature signal indicative of the operating temperature of the vacuum pump 3. The temperature signal may, for example, be measured by one or more temperature sensors or modeled based on one or more operating parameters of the vacuum pump 3.

[0048] A vacuum system 1 according to a further embodiment of the present invention will now be described with reference to Figure 4. The vacuum system 1 is an extension of the above embodiment and will be described herein focusing on the differences, with like reference numerals used for like components.

[0049] The vacuum system 1 comprises a vacuum pump 3 operable to create a vacuum in a vacuum chamber for carrying out an industrial process. A process gas can be introduced into the vacuum chamber. The vacuum pump 3 comprises a rotor shaft (not shown) supported in a pump housing 5. The vacuum system 1 comprises the vacuum pump 3, a heat exchanger 7, a control valve 9, and a gas heater 11. The heat exchanger 7, the control valve 9, and the gas heater 11 correspond to similar components of the previous embodiments. The operation of these components remains substantially unchanged.

[0050] The vacuum system 1 also includes a cooling block 39. The cooling block 39 is supplied with a liquid coolant for cooling. The cooling block 39 is thermally coupled to the heat exchanger 7. In this embodiment, the cooling block 39 is attached to the heat exchanger 7 in a face-to-face arrangement. As shown in FIG. 4 , the cooling block 39 is attached to an outer surface of the heat exchanger 7 spaced apart from the pump housing 5. Thus, the heat exchanger 7 is disposed between the pump housing 5 and the cooling block 39. The cooling block 39 may have, for example, mounting holes aligned with the mounting holes 21 formed in the heat exchanger 7. Mechanical fasteners may fasten the heat exchanger 7 and the cooling block 39 to the pump housing 5. Alternatively, the heat exchanger 7 and the cooling block 39 may be integrally formed.

[0051] The cooling block 39 includes a second inlet 41 and a second outlet 43. A coolant control valve 45 is provided to control the supply of liquid coolant to the second inlet 41. The coolant control valve 45 is selectively actuated to control the absorption of thermal energy from the heat exchanger 7. The liquid coolant is discharged through the second outlet 43. The coolant discharged from the second outlet 43 may be supplied to a chiller (not shown) for cooling and then recirculated through the cooling block 39.

[0052] The vacuum system 1 includes a valve controller 31 configured to control the cooling block 39. In this embodiment, the valve controller 31 controls the operation of a coolant control valve 45 to control the supply of coolant to the cooling block 39. As shown in FIG. 4 , the valve controller 31 outputs a pump control signal S3 to control the operation of the coolant control valve 45. In a variant, the valve controller 31 can selectively open and close the control valve to control the supply of coolant to the cooling block 39. The valve controller 31 can control the operation of the coolant control valve 45 in response to the operating temperature of the vacuum pump 3 and / or the heat exchanger 7. The operating temperature of the vacuum pump 3 and / or the heat exchanger 7 can be measured, for example, by one or more temperature sensors or modeled in response to one or more operating parameters of the vacuum pump 3. The valve controller 31 can be configured to control the coolant control valve 45 to supply coolant to the cooling block in response to determining that the operating temperature of the vacuum pump 3 and / or the heat exchanger 7 is equal to or greater than a predetermined temperature threshold. A cooling block 39 may be provided if the workload of the vacuum pump 3 is such that the temperature exceeds the capacity of the heat exchanger 7 or is expected to do so.

[0053] The operation of the vacuum system 1 according to this embodiment will now be described with reference to the second block diagram 200 shown in FIG. 6 . The vacuum system 1 is activated (block 205). The vacuum pump 3 is initially deactivated. The valve controller 31 activates (keeps) the heat transfer fluid control valve 14 closed (block 210). The supply of heat transfer fluid to the heat exchanger 7 and the gas heater 11 is blocked. The supply of coolant to the cooling block 39 is blocked (block 215). The vacuum pump controller 37 activates the vacuum pump 3 (block 220). The vacuum pump 3 operates in an idle, low-load state. The valve controller 31 activates the heat transfer fluid control valve 14 open and activates the control valve 9 to the “heat exchanger bypass” state (block 225). The bypass line 27 is opened so that the heat transfer fluid bypasses the heat exchanger 7. In this configuration, the heat exchanger 7 provides limited cooling for the vacuum pump 3. The vacuum pump 3 reaches the target operating temperature (block 230). The process gas inlet valve is actuated to an open state, supplying process gas to the vacuum pump 3. The vacuum pump 3 operates in a high-load state (block 235). The valve controller 31 actuates the control valve 9 in the "heat exchanger supply" state (block 240). The inlet line 23 is opened to supply heat transfer fluid to the heat exchanger 7. The valve controller 31 determines that the operating temperature of the vacuum pump 3 is above a preset operating threshold (block 245). The valve controller 31 determines that additional cooling is appropriate for the vacuum pump 3. The valve controller 31 actuates the coolant control valve 45 to supply coolant to the cooling block 39 (block 250). The valve controller 31 deactivates the coolant control valve 45, for example, when the temperature of the vacuum pump 3 drops below the preset operating threshold (block 255). The vacuum pump controller 37 closes the process gas supply valve to prevent the supply of process gas to the vacuum pump 3. The vacuum pump controller 37 outputs a first control signal S1 indicating that the vacuum pump 3 is operating under low load conditions. The vacuum pump controller 37 deactivates the vacuum pump 3 (block 260).The valve controller 31 actuates the control valve 9 to a closed state (block 265). The vacuum system 1 is deactivated (block 270).

[0054] It should be understood that various changes and modifications can be made without departing from the scope of the present application. [Explanation of symbols]

[0055] 105 Vacuum system activated 110 Blocking the supply of heat transfer fluid 115 Vacuum pump operates under low load 120 Blocking the supply of heat transfer fluid or bypassing the heat exchanger 125 Vacuum pump reaches target operating temperature 130 Vacuum pump operates under high load 135 Supplying heat transfer fluid to heat exchangers 140 Deactivate vacuum pump 143 Blocking the supply of heat transfer fluid 150 Vacuum system stops working 205 Vacuum system activated 210 Blocking the supply of heat transfer fluid 215 Blocking the coolant supply 220 Vacuum pump operates under low load 225 Blocking the supply of heat transfer fluid or bypassing the heat exchanger 230 Vacuum pump reaches target operating temperature 235 Vacuum pump operating under high load 240 Supplying heat transfer fluid to the heat exchanger 243 Vacuum pump temperature exceeds threshold 250 Cooling block provides additional cooling by supplying coolant to the block 255 Blocks the supply of coolant to the cooling block 260 Deactivate vacuum pump 265 Blocking the supply of heat transfer fluid 270 Vacuum system stops working 1. Vacuum system 3. Vacuum pump 5 Pump housing 7 Heat exchanger (gas heat exchanger) 9 Control Valves 11 Gas heater 13 Gas supply equipment 14 Heat Transfer Gas Control Valve 15 Main body 17 First Entrance 19 Exit 1 21 Mounting opening 23 Entrance Line 25 Exit Line 27 Bypass Line 29 ports 31 Valve Controller 33 processors 35 memory 37 Vacuum pump controller 39 Cooling Block 41 Second Entrance 43 Second Exit 45 Coolant Control Valve

Claims

1. a vacuum pump (3); a heat exchanger (7) for receiving a heat transfer fluid consisting of a gas; a control valve (9) for controlling the supply of said heat transfer fluid to said heat exchanger (7); a valve controller (31) for controlling the operation of said control valve (9); A vacuum system (1) comprising: the heat exchanger (7) is thermally coupled to the vacuum pump (3) and is operable to absorb thermal energy from the vacuum pump (3); the control valve (9) being selectively operable to bypass the heat exchanger (7); the valve controller (31) comprises at least one electronic processor having at least one input for receiving a signal indicative of the operating status of the vacuum pump (3); The valve controller (31) is configured to selectively operate the control valve (9) to reduce the supply of the heat transfer fluid to the heat exchanger (7) to reduce the absorption of heat energy from the vacuum pump (3).

2. 2. The vacuum system (1) of claim 1, comprising at least one port (29) for introducing the heat transfer fluid from the heat exchanger (7) into the vacuum pump (3) and / or into the outlet of the vacuum pump (3).

3. 3. The vacuum system (1) of claim 2, further comprising a gas heater (11) for heating the heat transfer fluid, the gas heater (11) being disposed between the heat exchanger (7) and the port (29).

4. 2. The vacuum system (1) of claim 1, wherein the valve controller (31) is configured to selectively operate the control valve (9) to reduce the supply of the heat transfer fluid to the heat exchanger (7) in response to a signal indicating that the vacuum pump (3) is operating under low load.

5. 5. The vacuum system (1) of claim 1 or 4, wherein the valve controller (31) is configured to selectively operate the control valve (9) to increase the supply of the heat transfer fluid to the heat exchanger (7) so as to increase the absorption of thermal energy from the vacuum pump (3).

6. 6. The vacuum system (1) of claim 1, 4 or 5, wherein the valve controller (31) is configured to selectively operate the control valve (9) to increase the supply of the heat transfer fluid to the heat exchanger (7) in response to a signal indicating that the vacuum pump (3) is operating under high load.

7. 7. The vacuum system (1) of claim 1, further comprising a cooling block (39) thermally coupled to the heat exchanger (7) and selectively operable to absorb thermal energy from the heat exchanger (7), the cooling block (39) configured to receive a coolant, the coolant comprising a liquid.

8. 8. The vacuum system (1) of claim 7, wherein the cooling block (39) has an inlet and an outlet for conveying the coolant.

9. 9. A vacuum system (1) according to claim 7 or 8, comprising a cooling block controller (31) for controlling the supply of the coolant to the cooling block (39), the cooling block controller (31) being configured to supply the coolant in response to determining that the temperature of the heat exchanger (7) is equal to or greater than a predetermined temperature threshold.

10. 10. The vacuum system (1) according to any one of claims 7 to 9, wherein the heat exchanger (7) and the cooling block (39) are operable independently of each other.

11. 1. A method of operating a vacuum system (1), the vacuum system (1) comprising: a vacuum pump (3); a heat exchanger (7) for absorbing thermal energy from the vacuum pump (3); and a control valve (9), the heat exchanger (7) being thermally coupled to the vacuum pump (3) and configured to receive a heat transfer fluid comprising a gas, the control valve (9) being selectively operable to bypass the heat exchanger (7) to control the supply of the heat transfer fluid to the heat exchanger (7); The method comprises: receiving a signal indicative of the operating status of said vacuum pump (3); and selectively operating the control valve (9) to reduce the supply of the heat transfer fluid to the heat exchanger (7) to reduce the absorption of heat energy from the vacuum pump (3). method.

12. 12. The method of claim 11, comprising controlling the supply of the heat transfer fluid to the heat exchanger (7) in response to one or more operating parameters of the vacuum pump (3).

13. 13. The method of claim 12, comprising supplying the heat transfer fluid to the heat exchanger in response to determining that the vacuum pump has an operating temperature above a predetermined threshold.

14. A controller (31) for controlling the operation of a vacuum system (1), said controller (31) comprising at least one electronic processor (33) and a memory (33), wherein a set of instructions are stored in said memory (33) and, when executed, said instructions cause said controller (31) to perform a method according to any one of claims 11 to 13.

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