SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND MAINTENANCE METHOD

Abstract

To provide a substrate processing device that makes it possible to easily maintain a chamber defining a processing space in which processing on a substrate is performed.SOLUTION: A substrate processing device is disclosed which comprises a first and second chambers, a substrate supporter, a lifting mechanism, a clamp, and a release mechanism. The first chamber includes a movable part and a side wall that provides an opening. The lifting mechanism moves the movable part upward and downward. The substrate supporter is disposed in the first chamber. The second chamber is disposed in the first chamber and, together with the substrate supporter, defines a processing space. The second chamber is capable of being carried between an internal space of the first chamber and the outside of the first chamber through the opening. The clamp releasably fixes the second chamber to the movable part. The release mechanism is configured to release the fixation of the second chamber by the clamp.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] SUMMARY Exemplary embodiments of the present disclosure relate to a substrate processing apparatus, a substrate processing system, and a maintenance method. [Background technology]

[0002] A plasma processing apparatus is used for plasma processing of a substrate. The plasma processing apparatus includes a chamber and a substrate support. The substrate support supports a substrate in the chamber. The substrate is processed by chemical species from plasma generated from a processing gas in the chamber. Patent Document 1 listed below discloses such a plasma processing apparatus. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-197849 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for easily maintaining a chamber that defines a processing space in which processing of a substrate is performed. [Means for solving the problem]

[0005] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber, a substrate support, a second chamber, a clamp, a release mechanism, and a lift mechanism. The first chamber includes a sidewall providing an opening and further includes a movable part movable up and down within the first chamber. The substrate support is disposed within the first chamber. The second chamber is disposed within the first chamber and defines, together with the substrate support, a processing space in which a substrate placed on the substrate support is processed. The second chamber is detachable from the first chamber and transportable between the interior space of the first chamber and the outside of the first chamber through the opening in the sidewall of the first chamber. The clamp releasably secures the second chamber to a movable part extending above the second chamber. The release mechanism is configured to release the second chamber from being secured by the clamp. The lift mechanism is configured to move the movable part up and down. [Effects of the Invention]

[0006] According to one exemplary embodiment, a chamber defining a processing space in which processing of a substrate occurs can be easily maintained. [Brief explanation of the drawings]

[0007] [Figure 1] 1 illustrates a substrate processing system according to an exemplary embodiment. [Figure 2] 1 is a diagram illustrating a substrate processing apparatus according to an exemplary embodiment; [Figure 3] 1 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment; [Figure 4] 1 is a schematic diagram of a transfer module of a substrate processing system according to an exemplary embodiment; [Figure 5] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 6] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 7] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 8] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 9] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 10] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 11] 1 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment; [Figure 12] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 13] 1A and 1B are diagrams illustrating a state of a substrate processing system during execution of a maintenance method according to an exemplary embodiment. [Figure 14] FIG. 10 is a partial enlarged cross-sectional view of a substrate processing apparatus according to another exemplary embodiment. [Figure 15] FIG. 10 is a partial enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 16] FIG. 10 is a partial enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 17] FIG. 10 is a plan view illustrating a portion of a second chamber, a cover ring, and an edge ring in a substrate processing apparatus according to yet another exemplary embodiment. [Figure 18] FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG. 17. [Figure 19] FIG. 10 is a plan view illustrating a portion of a second chamber, a cover ring, and an edge ring in a substrate processing apparatus according to yet another exemplary embodiment. [Figure 20] FIG. 20 is a cross-sectional view taken along line XX-XX in FIG. 19. DETAILED DESCRIPTION OF THE INVENTION

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber, a substrate support, a second chamber, a clamp, a release mechanism, and a lift mechanism. The first chamber includes a sidewall providing an opening and further includes a movable part movable up and down within the first chamber. The substrate support is disposed within the first chamber. The second chamber is disposed within the first chamber and defines, together with the substrate support, a processing space in which a substrate placed on the substrate support is processed. The second chamber is detachable from the first chamber and transportable between the interior space of the first chamber and the outside of the first chamber through the opening in the sidewall of the first chamber. The clamp releasably secures the second chamber to a movable part extending above the second chamber. The release mechanism is configured to release the second chamber from being secured by the clamp. The lift mechanism is configured to move the movable part up and down.

[0010] In the substrate processing apparatus of the above embodiment, a substrate is processed in a second chamber. The second chamber is disposed within the first chamber and fixed to the first chamber. The second chamber can be released from the first chamber using a release mechanism. Furthermore, when the second chamber is released from the first chamber, the second chamber can be transported out of the first chamber through an opening in the sidewall of the first chamber. Therefore, according to the above embodiment, it is possible to easily perform maintenance on the chamber that defines the processing space in which substrate processing is performed, i.e., the second chamber.

[0011] In one exemplary embodiment, the second chamber may include a ceiling extending above the processing volume, and a clamp may releasably secure the ceiling to the movable portion of the first chamber.

[0012] In one exemplary embodiment, the clamp may include a support and a spring, the support having a lower end configured to have the top of the second chamber suspended therefrom, and the spring biasing the top of the second chamber toward the movable portion of the first chamber via the lower end of the support.

[0013] In one exemplary embodiment, the release mechanism may include an air supplier that provides air pressure to pull the bottom end of the support portion away from the second chamber to release the top portion from the clamp.

[0014] In one exemplary embodiment, the substrate processing apparatus may further include a conductor and a contact. The conductor is provided along the outer periphery of the substrate support and is connected to ground. The contact is electrically connected to the conductor. The second chamber may abut against the contact while defining a processing space together with the substrate support. The contact may extend upward from the conductor.

[0015] In one exemplary embodiment, the contact may be configured to resiliently contact the second chamber. The contact may include a spring.

[0016] In one exemplary embodiment, the contact may be a pin. The second chamber may provide a recess into which the pin fits. The pin may have a tapered shape. The recess in the second chamber may have a tapered shape that corresponds to the tapered shape of the pin.

[0017] In one exemplary embodiment, the contact may include a membrane formed from a flexible and conductive material. The substrate processing apparatus may further include another air supplier configured to apply air pressure to the membrane to press the membrane against the second chamber.

[0018] In one exemplary embodiment, the second chamber may include a bottom extending below the processing volume, the bottom of the second chamber being in contact with the contact.

[0019] In one exemplary embodiment, the substrate processing apparatus may further include a cover ring having an inner edge and an outer edge. An edge ring is disposed on the substrate support. The inner edge of the cover ring may support the outer edge of the edge ring disposed thereon. The outer edge of the cover ring may include a plurality of radially protruding protrusions. The second chamber may include a bottom having an inner edge defining an inner hole through which the edge ring and the cover ring can pass. The second chamber may support the cover ring with a plurality of protrusions disposed on the inner edge of the bottom. The inner hole may include a plurality of notches provided by the inner edge through which the plurality of protrusions can pass.

[0020] In one exemplary embodiment, the substrate processing apparatus may be a plasma processing apparatus.

[0021] In another exemplary embodiment, a substrate processing system is provided. The substrate processing system includes a substrate processing apparatus according to any of the various exemplary embodiments described above, a transfer module, and a controller. The transfer module includes another chamber and a transfer device. The another chamber of the transfer module includes a sidewall providing an opening. The transfer device is configured to transfer a second chamber from the interior space of the first chamber to the interior space of the other chamber through the opening of the first chamber and the opening of the other chamber. The controller is configured to control the lift mechanism, the release mechanism, and the transfer device. The controller controls the lift mechanism to lift the movable part of the first chamber and the second chamber upwardly away from the substrate support. The controller controls the release mechanism to release the clamp that secures the second chamber to the transfer device. The controller controls the transfer device to transfer the second chamber from the interior space of the first chamber to the interior space of the other chamber through the opening of the first chamber and the opening of the other chamber.

[0022] In one exemplary embodiment, the substrate processing apparatus may further include a gate valve configured to open and close an opening of the first chamber. The transfer module may further include a gate valve configured to open and close an opening of another chamber, and the gate valve may be configured to be movable. When the other chamber is connected to the first chamber, a sidewall of the first chamber, a sidewall of the other chamber, the gate valve of the substrate processing apparatus, and the gate valve of the transfer module may define a sealed space therebetween. The substrate processing apparatus may further include an exhaust device configured to reduce the pressure of the sealed space.

[0023] In yet another exemplary embodiment, a maintenance method is provided. The maintenance method includes the step (a) of separating a second chamber upward from a substrate support within a first chamber of a substrate processing apparatus. The substrate processing apparatus includes a first chamber, a substrate support, and a second chamber. The first chamber includes a sidewall providing an opening and further includes a movable part extending over the second chamber and movable upward and downward within the first chamber. The substrate support is disposed within the first chamber. The second chamber is disposed within the first chamber and defines, together with the substrate support, a processing space in which a substrate placed on the substrate support is processed. The maintenance method further includes the step (b) of releasing the second chamber from the movable part of the first chamber. The maintenance method further includes the step (c) of transferring the second chamber from the interior space of the first chamber through the opening to the interior space of a chamber of the transfer module.

[0024] Various exemplary embodiments will be described in detail below with reference to the drawings, in which the same or equivalent parts are designated by the same reference numerals.

[0025] 1 is a diagram showing a substrate processing system according to an exemplary embodiment, The substrate processing system PS shown in Fig. 1 includes process modules PM1 to PM6, a transfer module CTM, and a controller MC.

[0026] The substrate processing system PS may further include stages 2a-2d, containers 4a-4d, an aligner AN, load lock modules LL1 and LL2, and a transfer module TM. The number of stages, containers, and load lock modules in the substrate processing system PS may be any number greater than or equal to one. The number of process modules in the substrate processing system PS may be any number greater than or equal to one.

[0027] The stages 2a to 2d are arranged along one edge of the loader module LM. The containers 4a to 4d are mounted on the stages 2a to 2d, respectively. Each of the containers 4a to 4d is, for example, a container called a FOUP (Front Opening Unified Pod). Each of the containers 4a to 4d is configured to accommodate a substrate W therein.

[0028] The loader module LM has a chamber. The pressure in the chamber of the loader module LM is set to atmospheric pressure. The loader module LM has a transport device TU1. The transport device TU1 is, for example, a transport robot, and is controlled by the controller MC. The transport device TU1 is configured to transport a substrate W through the chamber of the loader module LM. The transport device TU1 can transport the substrate W between each of the containers 4a to 4d and the aligner AN, between the aligner AN and each of the load lock modules LL1 and LL2, and between each of the load lock modules LL1 and LL2 and each of the containers 4a to 4d. The aligner AN is connected to the loader module LM. The aligner AN is configured to adjust the position of the substrate W (calibrate the position).

[0029] Each of the load lock modules LL1 and LL2 is provided between the loader module LM and the transfer module TM. Each of the load lock modules LL1 and LL2 serves as a preliminary decompression chamber. Each of the load lock modules LL1 and LL2 is connected to the loader module LM via a gate valve. Furthermore, each of the load lock modules LL1 and LL2 is connected to the transfer module TM via a gate valve.

[0030] The transfer module TM has a transfer chamber TC that can be decompressed. The transfer module TM has a transfer apparatus TU2. The transfer apparatus TU2 is, for example, a transfer robot, and is controlled by a controller MC. The transfer apparatus TU2 is configured to transfer a substrate W via the transfer chamber TC. The transfer apparatus TU2 can transfer the substrate W between each of the load lock modules LL1, LL2 and each of the process modules PM1 to PM6, and between any two of the process modules PM1 to PM6.

[0031] Each of the process modules PM1 to PM6 is connected to the transfer module TM via a gate valve. Each of the process modules PM1 to PM6 is an apparatus configured to perform dedicated substrate processing. At least one of the process modules PM1 to PM6 is a substrate processing apparatus according to an exemplary embodiment described below.

[0032] The transfer module CTM has a chamber and a transfer device. The transfer module CTM is controlled by a controller MC. The transfer module CTM has a transfer device. The transfer device of the transfer module CTM is configured to transfer a second chamber provided in a first chamber of the substrate processing apparatus into the chamber of the transfer module CTM. Details of the transfer module CTM will be described later.

[0033] The controller MC is configured to control each part of the substrate processing system PS. The controller MC may be a computer including a processor, a storage device, an input device, a display device, etc. The controller MC executes a control program stored in the storage device and controls each part of the substrate processing system PS based on recipe data stored in the storage device. A maintenance method according to an exemplary embodiment described below can be performed in the substrate processing system PS by the controller MC controlling each part of the substrate processing system PS.

[0034] A substrate processing apparatus according to an exemplary embodiment will be described below. FIG. 2 is a diagram schematically illustrating a substrate processing apparatus according to an exemplary embodiment. FIG. 3 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment. The substrate processing apparatus 1 shown in FIGS. 2 and 3 is a capacitively coupled plasma processing apparatus. The substrate processing apparatus 1 includes a first chamber 10, a second chamber 20, and a substrate support 30.

[0035] The first chamber 10 provides an internal space. The first chamber 10 is made of a metal such as aluminum. The first chamber 10 is electrically grounded. A corrosion-resistant film may be formed on the surface of the first chamber 10. The corrosion-resistant film may be made of a material such as aluminum oxide or yttrium oxide.

[0036] The first chamber 10 includes a sidewall 10s. The sidewall 10s has a substantially cylindrical shape. A central axis of the sidewall 10s extends vertically and is shown as an axis AX in FIG. 2. The sidewall 10s provides a passage 10p. The internal space of the first chamber 10 is connected to the internal space of the transfer chamber TC of the transfer module TM via the passage 10p. The passage 10p can be opened and closed by a gate valve 10g. The substrate W passes through the passage 10p when being transferred between the internal space of the first chamber 10 and the outside of the first chamber 10.

[0037] The side wall 10s further provides an opening 10o. The opening 10o has a size that allows the second chamber 20 to pass through. The internal space of the first chamber 10 can be connected to the internal space of the transfer module CTM through the opening 10o. The opening 10o can be opened and closed by a gate valve 10v.

[0038] In one embodiment, a portion of the sidewall 10s has a double structure formed of an inner wall 10i and an outer wall 10e. The inner wall 10i and the outer wall 10e provide a space 10q therebetween. An opening 10o is formed in the inner wall 10i and the outer wall 10e. A gate valve 10v is provided along the inner wall 10i to open and close the opening 10o.

[0039] The first chamber 10 may further include an upper portion 10u. The upper portion 10u extends from the upper end of the side wall 10s in a direction intersecting with the axis line AX. The upper portion 10u provides an opening in a region intersecting with the axis line AX.

[0040] The first chamber 10 further includes a movable part 10m. The movable part 10m is provided below the upper part 10u of the first chamber 10 and inside the side wall 10s. The movable part 10m is configured to be movable upward and downward within the first chamber 10.

[0041] The substrate processing apparatus 1 further includes a lift mechanism 12. The lift mechanism 12 is configured to move the movable part 10m upward and downward. The lift mechanism 12 includes a drive device 12d and a shaft 12s. The movable part 10m is fixed to the shaft 12s. The shaft 12s extends upward from the movable part 10m through an opening in the upper part 10u. The drive device 12d is provided outside the first chamber 10. The drive device 12d is configured to move the shaft 12s upward and downward. The drive device 12d includes, for example, a motor. The upward and downward movement of the shaft 12s causes the movable part 10m to move upward and downward.

[0042] The substrate processing apparatus 1 may further include a bellows 14. The bellows 14 is provided between the movable part 10m and the upper part 10u. The bellows 14 separates the internal space of the first chamber 10 from the outside of the first chamber 10. The lower end of the bellows 14 is fixed to the movable part 10m. The upper end of the bellows 14 is fixed to the upper part 10u.

[0043] In one embodiment, the movable part 10m may include a first member 10a and a second member 10b. The first member 10a and the second member 10b are fixed to each other. The first member 10a has a substantially disk shape. The first member 10a is made of a conductor such as aluminum. The first member 10a may constitute an upper electrode in the substrate processing apparatus 1. The second member 10b has a substantially cylindrical shape. The second member 10b extends along the outer periphery of the first member 10a and above the first member 10a. The lower end of the above-mentioned bellows 14 is fixed to the upper end of the second member 10b.

[0044] In one embodiment, the movable part 10m may form a shower head together with a ceiling part (to be described later) of the second chamber 20. That is, the movable part 10m may form a part of the shower head that supplies gas to the processing space S (to be described later). In this embodiment, the movable part 10m provides a gas diffusion chamber 10d and a plurality of gas holes 10h.

[0045] The gas diffusion chamber 10d may be provided in the first member 10a. A gas supply unit 16 is connected to the gas diffusion chamber 10d. The gas supply unit 16 is provided outside the first chamber 10. The gas supply unit 16 includes one or more gas sources used in the substrate processing apparatus 1, one or more flow controllers, and one or more valves. Each of the one or more gas sources is connected to the gas diffusion chamber 10d via a corresponding flow controller and a corresponding valve. A plurality of gas holes 10h extend downward from the gas diffusion chamber 10d.

[0046] The substrate support 30 is disposed within the first chamber 10 and below the movable part 10m. The substrate support 30 is configured to support a substrate W placed thereon. The substrate support 30 may be supported by a support part 31. The support part 31 has a substantially cylindrical shape. The support part 31 is formed from an insulator such as quartz. The support part 31 may extend upward from a bottom plate 32. The bottom plate 32 may be formed from a metal such as aluminum.

[0047] The substrate support 30 may include a lower electrode 34 and an electrostatic chuck 36. The lower electrode 34 has a substantially disk shape. The central axis of the lower electrode 34 substantially coincides with the axis AX. The lower electrode 34 is formed from a conductor such as aluminum. The lower electrode 34 has a flow path 34f therein. The flow path 34f extends, for example, in a spiral shape. The flow path 34f is connected to a chiller unit 35. The chiller unit 35 is provided outside the first chamber 10. The chiller unit 35 supplies a coolant to the flow path 34f. The coolant supplied to the flow path 34f is returned to the chiller unit 35.

[0048] The substrate processing apparatus 1 may further include a first high-frequency power supply 41 and a second high-frequency power supply 42. The first high-frequency power supply 41 is a power supply that generates a first high-frequency power. The first high-frequency power has a frequency suitable for generating plasma. The frequency of the first high-frequency power is, for example, 27 MHz or higher. The first high-frequency power supply 41 is electrically connected to the lower electrode 34 via a matching device 41m. The matching device 41m has a matching circuit for matching the impedance of the load side (lower electrode 34 side) of the first high-frequency power supply 41 to the output impedance of the first high-frequency power supply 41. Note that the first high-frequency power supply 41 may be connected to the upper electrode via the matching device 41m, instead of the lower electrode 34.

[0049] The second high frequency power supply 42 is a power supply that generates second high frequency power. The second high frequency power has a frequency suitable for attracting ions to the substrate W. The frequency of the second high frequency power is, for example, 13.56 MHz or less. The second high frequency power supply 42 is electrically connected to the lower electrode 34 via a matching device 42m. The matching device 42m has a matching circuit for matching the impedance of the load side (lower electrode 18 side) of the second high frequency power supply 42 to the output impedance of the second high frequency power supply 42.

[0050] The electrostatic chuck 36 is disposed on the lower electrode 34. The electrostatic chuck 36 includes a body and an electrode 36a. The body of the electrostatic chuck 36 has a substantially disc shape. The central axis of the electrostatic chuck 36 substantially coincides with the axis AX. The body of the electrostatic chuck 36 is formed from ceramic. The substrate W is placed on the upper surface of the body of the electrostatic chuck 36. The electrode 36a is a film formed from a conductor. The electrode 36a is disposed within the body of the electrostatic chuck 36. The electrode 36a is connected to a DC power supply 36d via a switch 36s. When a voltage from the DC power supply 36d is applied to the electrode 36a, an electrostatic attractive force is generated between the electrostatic chuck 36 and the substrate W. The generated electrostatic attractive force attracts the substrate W to the electrostatic chuck 36 and the substrate W is held by the electrostatic chuck 36. The substrate processing apparatus 1 may be provided with a gas line for supplying a heat transfer gas (for example, helium gas) to the gap between the electrostatic chuck 36 and the rear surface of the substrate W.

[0051] The substrate support 30 may support an edge ring ER disposed thereon. The substrate W is placed on the electrostatic chuck 36 within a region surrounded by the edge ring ER. The edge ring ER is made of, for example, silicon, quartz, or silicon carbide.

[0052] The substrate processing apparatus 1 may further include an insulating portion 37. The insulating portion 37 is made of an insulator such as quartz. The insulating portion 37 may have a generally cylindrical shape. The insulating portion 37 extends along the outer periphery of the lower electrode 34 and the outer periphery of the electrostatic chuck 36.

[0053] The substrate processing apparatus 1 may further include a conductor 38. The conductor 38 is made of a conductor such as aluminum. The conductor 38 may have a generally cylindrical shape. The conductor 38 is provided along the outer periphery of the substrate support 30. Specifically, the conductor 38 extends circumferentially outside the insulating portion 37 in the radial direction. The radial direction and the circumferential direction are directions based on the axis AX. The conductor 38 is connected to ground. In one example, the conductor 38 is connected to ground via the bottom plate 32 and the first chamber 10.

[0054] The substrate processing apparatus 1 may further include a cover ring 39. The cover ring 39 is made of an insulator such as quartz. The cover ring 39 has an annular shape. The cover ring 39 is provided on the insulating portion 37 and the conductor portion 38 so as to be located radially outside the region in which the edge ring ER is disposed.

[0055] The substrate processing apparatus 1 may further include a contact 40. The contact 40 is electrically connected to the conductor 38. The second chamber 20 abuts against the contact 40 while defining a processing space S together with the substrate support 30. The processing space S is a space in which the substrate W is processed. In one embodiment, the contact 40 is disposed radially outside the cover ring 39 and extends upward from the conductor 38.

[0056] The contact 40 may be configured to resiliently contact the second chamber 20. As shown in FIG. 3, the contact 40 may have a spring 40s. The contact 40 may further have a contact portion 40c. The spring 40s and the contact portion 40c are conductive. The lower end of the spring 40s is fixed to the conductor portion 38. The spring 40s extends upward from the conductor portion 38. The contact portion 40c is fixed to the upper end of the spring 40s. The contact portion 40c is the portion that contacts the second chamber 20.

[0057] The second chamber 20 is disposed within the first chamber 10 and is configured to define a processing space S together with the substrate support 30. The second chamber 20 is made of a metal such as aluminum. A corrosion-resistant film may be formed on the surface of the second chamber 20. The corrosion-resistant film may be made of a material such as aluminum oxide or yttrium oxide.

[0058] The second chamber 20 is removable from the first chamber 10 and can be transported between the interior space of the first chamber 10 and the outside of the first chamber 10 via the opening 10o.

[0059] The substrate processing apparatus 1 further includes a clamp 50 and a release mechanism 60. The clamp 50 is configured to releasably fix the second chamber 20 to the first chamber 10. The release mechanism 60 is configured to release the fixation of the second chamber 20 by the clamp 50. Details of the clamp 50 and the release mechanism 60 will be described later.

[0060] In one embodiment, the second chamber 20 may include a ceiling portion 20c. The ceiling portion 20c extends substantially horizontally above the processing space S. When the second chamber 20 is fixed to the first chamber 10, the upper surface of the ceiling portion 20c abuts against the lower surface of the movable portion 10m. The ceiling portion 20c provides a plurality of gas holes 20h. The plurality of gas holes 20h penetrate the ceiling portion 20c and open toward the processing space S. The plurality of gas holes 20h are respectively connected to the plurality of gas holes 10h.

[0061] In one embodiment, the second chamber 20 may further include a side portion 20s. The side portion 20s extends laterally of the processing space S. The side portion 20s has a generally cylindrical shape. The side portion 20s extends downward from the edge of the top portion 20c.

[0062] In one embodiment, the second chamber 20 may further include a bottom 20b. The bottom 20b extends from the lower end of the side 20s in a direction intersecting the axis AX. The bottom 20b abuts against the contact 40 when the second chamber 20, together with the substrate support 30, defines the processing space S.

[0063] The bottom 20b has a plurality of through-holes formed therein. The substrate processing apparatus 1 may further include an exhaust device 70. The exhaust device 70 includes a pressure regulator such as an automatic pressure control valve and a decompression pump such as a turbomolecular pump. The exhaust device 70 is connected to the bottom of the first chamber 10 below the bottom 20b.

[0064] The following describes the clamp 50 and the release mechanism 60. The clamp 50 releasably fixes the top portion 20c of the second chamber 20 to the movable portion 10m of the first chamber .

[0065] 2 and 3, in one embodiment, the clamp 50 includes a plurality of support portions 52 and a plurality of springs 54. The clamp 50 may further include a plate 56. Note that the number of support portions 52 and the number of springs 54 of the clamp 50 may each be one.

[0066] Each of the plurality of support portions 52 has a lower end 52b. The lower end 52b is formed so that the top portion 20c is suspended therefrom. A plurality of springs 54 are provided to bias the top portion 20c against the movable portion 10m of the first chamber 10.

[0067] In one embodiment, the movable portion 10m of the first chamber 10 provides a cavity 10c. The cavity 10c may extend circumferentially around the axis AX. The cavity 10c is closed by a lid 58. The lid 58 is provided on the movable portion 10m of the first chamber 10 to close the cavity 10c. The movable portion 10m further provides a plurality of holes 10t. The holes 10t may be arranged at equal intervals around the axis AX. The holes 10t extend downward from the cavity 10c and open toward the top portion 20c. The top portion 20c provides a plurality of recesses 20r. The recesses 20r are respectively connected to the holes 10t when the second chamber 20 is fixed to the first chamber 10.

[0068] In one embodiment, each of the plurality of support portions 52 is rod-shaped. The lower end 52b of each of the plurality of support portions 52 protrudes horizontally. The bottom of each of the plurality of recesses 20r includes an extension 20e. The extension 20e is formed so that the lower end 52b of a corresponding one of the plurality of support portions 52 can be positioned therein. In one example, each of the plurality of support portions 52 may be a screw, and the lower end 52b of each of the plurality of support portions 52 may be a screw head.

[0069] The plurality of support portions 52 extend downward from the cavity 10c through the plurality of holes 10t. When the top portion 20c is suspended from the plurality of support portions 52, the lower ends 52b of the plurality of support portions 52 are respectively disposed within the plurality of recesses 20r and their extensions 20e.

[0070] The upper ends of the plurality of support portions 52 are fixed to a plate 56 within the cavity 10c. The plurality of springs 54 are disposed within the cavity 10c. The plurality of springs 54 are disposed between the plate 56 and a surface of the movable portion 10m that defines the cavity 10c from below. In one embodiment, each of the plurality of springs 54 is a coil spring. The plurality of springs 54 are disposed so as to surround the plurality of support portions 52 within the cavity 10c.

[0071] In one embodiment, the release mechanism 60 includes an air supplier. The air supplier applies air pressure to separate the lower ends 52b of the support members 52 from the second chamber 20 to release the top portion 20c from the clamp 50. The air supplier of the release mechanism 60 can supply air to the gap between the cover 58 and the plate 56. When air is supplied to the gap between the cover 58 and the plate 56, the plate 56 and the support members 52 move downward, and the lower ends 52b of the support members 52 are separated from the second chamber 20. In other words, the top portion 20c is released from the clamp 50. With the top portion 20c released from the clamp 50, the second chamber 20 is released from the first chamber 10, and the second chamber 20 can be transported from the interior space of the first chamber 10 to the outside of the first chamber 10.

[0072] The transfer module CTM will be described below. FIG. 4 is a diagram schematically illustrating a transfer module of a substrate processing system according to an exemplary embodiment. The transfer module CTM includes a chamber 110. The chamber 110 provides an internal space 112 and an internal space 114. The internal space 112 is provided above the internal space 114 and is separated from the internal space 114. A sidewall 110s of the chamber 110 provides an opening 110o that communicates with the internal space 112. The opening 110o can be opened and closed by a gate valve 116.

[0073] In one embodiment, a portion of the sidewall 110s has a double structure formed from an inner wall 110i and an outer wall 110e. The inner wall 110i and the outer wall 110e define a space 110q therebetween. An opening 110o is formed in the inner wall 110i and the outer wall 110e. A gate valve 110v is provided along the inner wall 110i to open and close the opening 110o.

[0074] The transfer module CTM further includes a transfer device 120. The transfer device 120 is a transfer robot and includes an arm 120a. The transfer device 120 is provided in the internal space 112.

[0075] The transfer module CTM further includes an exhaust device 122. The exhaust device 122 is provided in the internal space 114. The exhaust device 122 is connected to the internal space 112 via a valve 124 and to the space 110q via a valve 126. The exhaust device 122 is configured to reduce the pressure in the internal space 112 and the space 110q.

[0076] The transport module CTM further includes a moving mechanism 130. The moving mechanism 130 includes a main body 132 and a plurality of wheels 134. The main body 132 incorporates a power source such as a battery, a power source, and a steering mechanism. The wheels 134 are rotated by the power source within the main body 132, and move the transport module CTM in a direction controlled by the steering mechanism within the main body 132. Note that the moving mechanism 130 may be a mechanism employing a type other than wheels 561, such as a walking type, as long as it is capable of moving the transport module CTM.

[0077] The transfer module CTM further includes a sensor 138 and a controller 140. The sensor 138 is attached to the outer wall of the chamber 110. The controller 140 is provided in the internal space 114. The sensor 138 senses the environment around the transfer module CM and outputs the sensing result to the controller 140. The sensor 138 is, for example, an image sensor and outputs an image of the environment around the transfer module CM to the controller 140. The controller 140 may be a computer including a processor, a storage device such as a memory, and a communication unit. The controller 140 is configured to control each component of the transfer module CTM. The controller 140 controls the movement mechanism 130 to move the transfer module CTM using the sensing result of the sensor 138 to connect the transfer module CTM to the substrate processing apparatus 1. The controller 140 also controls the exhaust device 122 and the valves 124 and 126.

[0078] A maintenance method according to an exemplary embodiment will be described below with reference to FIGS. 5 to 13. Control of the controller MC for the maintenance method will also be described. Each of FIGS. 5 to 10 and 12 to 13 shows the state of the substrate processing system during execution of a maintenance method according to an exemplary embodiment. FIG. 11 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment. In the maintenance method, the second chamber 20 is removed from the first chamber 10 for maintenance, and is transferred from the internal space of the first chamber 10 to the internal space of the chamber 110 of the transfer module CTM.

[0079] The maintenance method is started in a state where the second chamber 20 is fixed to the movable part 10m and defines the processing space S together with the substrate support 30. In this state, the second chamber 20 is in contact with the contact 40 and is connected to ground.

[0080] First, in the maintenance method, the transfer module CTM is moved, and the chamber 110 of the transfer module CTM is connected to the first chamber 10 of the substrate processing apparatus 1, as shown in FIG. 5. The first chamber 10 and the chamber 110 are connected so that the openings 10o and 110o are aligned. To move the transfer module CTM in this manner, the controller MC controls the transfer module CTM. Specifically, the controller 140 receives a command from the controller MC and controls the moving mechanism 130 to move the transfer module CTM.

[0081] When the chamber 110 is connected to the first chamber 10, the sidewall 10s, the gate valve 10v, the sidewall 110s, and the gate valve 10v define a sealed space. The sealed space includes the space 10q and the space 110q. In the maintenance method, the sealed space is depressurized by the exhaust device 122. At the same time, the internal space 112 of the chamber 110 of the transfer module CTM is also depressurized by the exhaust device 122. The exhaust device 122 is controlled by the control unit MC to depressurize the sealed space and the internal space 112. Specifically, the exhaust device 122 is controlled by the control unit 140 that receives a command from the control unit MC.

[0082] Next, in the maintenance method, as shown in FIG. 6, the gate valve 10v and the gate valve 116 are moved to connect the internal space of the first chamber 10 with the internal space 112 of the chamber 110 of the transfer module CTM. The movement of the gate valve 10v and the gate valve 116 opens the openings 10o and 110o. The gate valve 10v and the gate valve 116 are controlled by the controller MC for their movement. The gate valve 116 is controlled by the controller 140 in response to a command from the controller MC.

[0083] Next, in the maintenance method, as shown in Fig. 7, the movable part 10m and the second chamber 20 are pulled upward from the substrate support 30 in the first chamber 10. The movable part 10m and the second chamber 20 are moved upward by the lift mechanism 12. The lift mechanism 12 is controlled by the control unit MC to move the movable part 10m and the second chamber 20 upward. Note that in the state shown in Fig. 7, i.e., in the state where the second chamber 20 is pulled upward from the substrate support 30, the second chamber 20 is also pulled away from the contact 40.

[0084] Next, in the maintenance method, as shown in Fig. 8, the arm 120a of the transfer device 120 enters the internal space of the first chamber 10 so as to extend from the internal space 112 of the chamber 110 of the transfer module CTM to below the second chamber 20. To this end, the transfer device 120 is controlled by the control unit MC. Specifically, the transfer device 120 is controlled by the control unit 140 that receives commands from the control unit MC.

[0085] Next, in the maintenance method, as shown in Fig. 9, the movable part 10m and the second chamber 20 are moved downward by the lift mechanism 12, and the second chamber 20 is placed on the arm 120a. To move the movable part 10m and the second chamber 20 downward, the lift mechanism 12 is controlled by the control unit MC.

[0086] Next, in the maintenance method, as shown in Figures 10 and 11, the second chamber 20 is released from being fixed by the clamp 50. The fixation of the second chamber 20 by the clamp 50 is released by the release mechanism 60. In one example, the release mechanism 60 supplies air from its air supplier to the gap between the lid body 58 and the plate 56. As a result, the fixation of the second chamber 20 by the clamp 50 is released. In order to release the fixation of the second chamber 20 by the clamp 50, the release mechanism 60 is controlled by the control unit MC.

[0087] 10 and 11, the second chamber 20 is moved horizontally by the transfer device 120. As a result, the lower ends 52b of the multiple support portions 52 are retracted from the extension portion 20e. To move the second chamber 20 horizontally, the transfer device 120 is controlled by the control unit MC. Specifically, the transfer device 120 is controlled by the control unit 140, which receives commands from the control unit MC.

[0088] 12, in the maintenance method, the movable part 10m is moved upward and separated from the second chamber 20. The movable part 10m is moved upward by the lift mechanism 12. To move the movable part 10m upward, the lift mechanism 12 is controlled by the control unit MC.

[0089] Next, in the maintenance method, as shown in Fig. 13, the second chamber 20 is moved from the internal space of the first chamber 10 through the openings 10o and 110o into the internal space 112 of the chamber 110 of the transfer module CTM. For this purpose, the arm 120a of the transfer device 120 is returned into the internal space 112 of the chamber 110 of the transfer module CTM. The transfer device 120 is controlled by the control unit MC to transfer the second chamber 20. Specifically, the transfer device 120 is controlled by the control unit 140 that receives commands from the control unit MC.

[0090] 13, gate valve 10v and gate valve 116 are moved to close openings 10o and 110o. Gate valve 10v and gate valve 116 are controlled by control unit MC for their movement. Gate valve 116 is controlled by control unit 140, which receives commands from control unit MC.

[0091] As described above, in the substrate processing apparatus 1, the substrate W is processed in the second chamber 20. The second chamber 20 is disposed within the first chamber 10 and fixed to the first chamber 10. The second chamber 20 can be released from its fixed position relative to the first chamber 10 using the release mechanism 60. Furthermore, when the second chamber 20 is released from its fixed position relative to the first chamber 10, the second chamber 20 can be transported out of the first chamber 10 through the opening 10o provided in the sidewall of the first chamber 10. This allows for easy maintenance of the second chamber 20 that defines the processing space S.

[0092] Furthermore, according to the substrate processing system PS and the above-described maintenance method, the second chamber 20 can be automatically carried out from the internal space of the first chamber 10. Therefore, the downtime of the substrate processing system PS due to maintenance (e.g., replacement) of the second chamber 20 is shortened.

[0093] Reference will now be made to FIG. 14 . FIG. 14 is a partially enlarged cross-sectional view of a substrate processing apparatus according to another exemplary embodiment. In the substrate processing apparatus shown in FIG. 14 , the configuration of the contacts 40 differs from the configuration of the contacts 40 of the substrate processing apparatus 1. In the substrate processing apparatus shown in FIG. 14 , the contacts 40 are pins. The second chamber 20 provides recesses 20r into which the pins of the contacts 40 are fitted. In one embodiment, the pins of the contacts 40 may have a tapered shape. The recesses 20r of the second chamber 20 may have a tapered shape corresponding to the tapered shape of the pins of the contacts 40. Other configurations of the substrate processing apparatus shown in FIG. 14 may be the same as the corresponding configurations of the substrate processing apparatus 1.

[0094] Reference will now be made to FIG. 15 . FIG. 15 is a partially enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. In the substrate processing apparatus shown in FIG. 15 , the configuration of the contact 40 is different from the configuration of the contact 40 of the substrate processing apparatus 1. In the substrate processing apparatus shown in FIG. 15 , the contact 40 includes a film. The film of the contact 40 is flexible and made of a conductive material. The film of the contact 40 is attached to the outer circumferential surface of the conductor portion 38. The film of the contact 40, together with the conductor portion 38, forms a pressure chamber 40p within the conductor portion 38.

[0095] The substrate processing apparatus 1 shown in FIG. 15 provides a flow path 40f. The flow path 40f is connected to a pressure chamber 40p. The flow path 40f is partially formed within the conductor portion 38. The substrate processing apparatus 1 shown in FIG. 15 further includes an air supplier 70a and an exhaust device 71a. The air supplier 70a is connected to the flow path 40f via a valve 70v. The exhaust device 71a is a device such as a dry pump and is connected to the flow path 40f via a valve 71v. The air supplier 70a supplies air to the pressure chamber 40p. That is, the air supplier 70a is configured to apply air pressure to the membrane of the contact 40 to press the membrane against the second chamber 20. In the illustrated example, the membrane of the contact 40 is pressed against the inner edge of the bottom 20b of the second chamber 20. When the air in the pressure chamber 40p is exhausted by the exhaust device 71a, the membrane of the contact 40 is pulled away from the second chamber 20. Other configurations of the substrate processing apparatus shown in FIG. 15 may be the same as the corresponding configurations of the substrate processing apparatus 1.

[0096] Reference will now be made to FIGS. 16 to 20. FIG. 16 is a partially enlarged cross-sectional view of a substrate processing apparatus according to yet another exemplary embodiment. FIG. 17 is a plan view showing a portion of a second chamber, a cover ring, and an edge ring in a substrate processing apparatus according to yet another exemplary embodiment. FIG. 17 shows a state in which multiple protrusions on the cover ring are disposed on the inner edge of the bottom of the second chamber. FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG. 17. FIG. 19 is a plan view showing a portion of a second chamber, a cover ring, and an edge ring in a substrate processing apparatus according to yet another exemplary embodiment. FIG. 19 shows a state in which the positions of the multiple protrusions on the cover ring and the positions of multiple notches provided by the inner edge of the bottom of the second chamber are aligned. FIG. 20 is a cross-sectional view taken along line XX-XX in FIG. 19.

[0097] 16 to 20, the cover ring 39 includes an inner edge portion 39i and an outer edge portion. The outer edge portion ERo of the edge ring ER disposed on the substrate support 30 is disposed on the inner edge portion 39i and is supported by the inner edge portion 39i. The outer edge portion of the cover ring 39 includes a plurality of protrusions 39p. The plurality of protrusions 39p protrude in the radial direction and are arranged along the circumferential direction.

[0098] The bottom 20b of the second chamber 20 includes an inner edge 20i. The inner edge 20i defines an inner hole 20p. The inner hole 20p is formed so that the edge ring ER supported by the cover ring 39 can pass through the inner hole 20p together with the cover ring 39 from the inside of the second chamber 20 to the outside of the second chamber 20. The inner hole 20p includes a plurality of notches 20n. The plurality of notches 20n are provided by the inner edge 20i. The plurality of notches 20n are arranged along the circumferential direction, similar to the plurality of protrusions 39p. The plurality of notches 20n are formed so that the plurality of protrusions 39p can pass through. The inner edge 20i of the bottom 20b of the second chamber 20 is configured to support the plurality of protrusions 39p of the cover ring 39 disposed thereon.

[0099] 16 to 20, the second chamber 20 can support the edge ring ER together with the cover ring 39 when the positions of the plurality of convex portions 39p and the positions of the plurality of notches 20n do not coincide. Therefore, the cover ring 39 and the edge ring ER can be carried out from the inside of the first chamber 10 to the outside of the first chamber 10 together with the second chamber 20. Furthermore, by adjusting the position of the cover ring 39 in the rotational direction so that the positions of the plurality of convex portions 39p and the positions of the plurality of notches 20n coincide, the cover ring 39 and the edge ring ER can be removed from the second chamber 20 through the inner hole 20p. Note that other configurations of the substrate processing apparatuses shown in FIGS. 16 to 20 may be the same as the corresponding configurations of the substrate processing apparatus 1.

[0100] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various additions, omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0101] For example, in other embodiments, the substrate processing apparatus may be another type of plasma processing apparatus, such as an inductively coupled plasma processing apparatus, an electron cyclotron resonance (ECR) plasma processing apparatus, or a plasma processing apparatus that generates plasma using microwaves. In still other embodiments, the substrate processing apparatus may be a substrate processing apparatus configured to perform substrate processing other than plasma processing.

[0102] The transfer module CTM does not have to be movable, but may be fixed and connected to a first chamber of the substrate processing apparatus having the second chamber 20. Instead of the transfer module CTM, the transfer module TM may be used as a module that transfers the second chamber 20 out of the internal space of the first chamber 10.

[0103] Additionally, the clamp 50 may include a cam mechanism that fixes the second chamber 20 relative to the first chamber 10. The release mechanism 60 may be configured to rotate a cam of the cam mechanism to release the fixation of the second chamber 20 by the cam mechanism.

[0104] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims. [Explanation of symbols]

[0105] 1...substrate processing apparatus, 10...first chamber, 10s...side wall, 10o...opening, 10m...movable part, 12...lift mechanism, 20...second chamber, 30...substrate support, S...processing space, 50...clamp, 60...release mechanism, PS...substrate processing system, CTM...transfer module.

Claims

1. a first chamber including a sidewall providing an opening; a substrate support disposed within the first chamber; a movable part disposed above the substrate support in the first chamber and movable in a vertical direction; a second chamber disposed between the substrate support and the movable part, defining a processing space together with the substrate support, the second chamber being transportable between an internal space of the first chamber and an outside of the first chamber through the opening; a clamp releasably securing the second chamber to the movable portion extending over the second chamber; a release mechanism configured to release the second chamber from the clamp by air pressure; a lift mechanism configured to move the movable part upward and downward; A substrate processing apparatus comprising:

2. the second chamber includes a ceiling extending above the processing space; The clamp releasably fixes the top portion to the movable portion. The substrate processing apparatus according to claim 1 .

3. The substrate processing apparatus of claim 2 , wherein the clamp includes a support having a lower end configured to have the top portion suspended therefrom.

4. a conductor portion provided along the outer periphery of the substrate support and connected to ground; a contact electrically connected to the conductor portion; Further provided with the second chamber abuts against the contact while defining the processing space together with the substrate support; The substrate processing apparatus according to any one of claims 1 to 3.

5. The substrate processing apparatus of claim 4 , wherein the contact is configured to resiliently contact the second chamber.

6. The substrate processing apparatus of claim 5 , wherein the contact includes a spring.

7. the contact is a pin; the second chamber provides a recess into which the pin fits; The substrate processing apparatus according to claim 4 .

8. The pin has a tapered shape, the recess of the second chamber has a tapered shape corresponding to the tapered shape of the pin; The substrate processing apparatus according to claim 7 .

9. the contact is flexible and includes a film formed from a conductive material; an air supplier configured to apply air pressure to the membrane to press the membrane against the second chamber; The substrate processing apparatus according to claim 5 .

10. 10. The substrate processing apparatus according to claim 4, wherein the second chamber includes a bottom extending below the processing space, the bottom abutting against the contact.

11. a cover ring having an inner edge and an outer edge; an edge ring disposed on the substrate support; the inner edge of the cover ring supports the outer edge of the edge ring disposed thereon; the outer edge of the cover ring includes a plurality of protrusions protruding in a radial direction, the second chamber includes a bottom having an inner edge defining an inner hole through which the edge ring and the cover ring can pass, and supports the cover ring with the plurality of protrusions disposed on the inner edge of the bottom; the inner hole includes a plurality of notches provided by the inner edge portion and through which the plurality of protrusions can pass; The substrate processing apparatus according to any one of claims 1 to 9.

12. 12. The substrate processing apparatus according to claim 1, which is a plasma processing apparatus.

13. A substrate processing apparatus according to any one of claims 1 to 12, a transfer module having a second chamber including a sidewall providing an opening and a transfer device configured to transfer the second chamber from an interior space of the first chamber to an interior space of the second chamber through the opening of the first chamber and the opening of the second chamber; a controller configured to control the lift mechanism and the transport device; Equipped with The control unit controlling the lift mechanism to move the movable part and the second chamber upwardly away from the substrate support; controlling the transport device to transport the second chamber, which has been released from the clamp, from the internal space of the first chamber to the internal space of the other chamber via the opening of the first chamber and the opening of the other chamber; Substrate processing system.

14. the substrate processing apparatus further includes a gate valve configured to open and close the opening of the first chamber; the transfer module further includes a gate valve configured to open and close the opening of the other chamber, and is configured to be movable; the sidewall of the first chamber, the sidewall of the other chamber, the gate valve of the substrate processing apparatus, and the gate valve of the transfer module define a sealed space therebetween when the other chamber is connected to the first chamber; Further comprising an exhaust device configured to reduce the pressure in the enclosed space. The substrate processing system of claim 13 .

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