SUBSTRATE PROCESSING APPARATUS AND INNER CHAMBER ASSEMBLY

Abstract

One illustrative embodiment of the present invention provides a substrate processing device. The substrate processing device comprises a first member which includes a ceiling, and a second member which includes a side wall and supports the first member. The second member is electrically connected to a grounding part which is grounded and provided so as to surround a mounting table on which a substrate is mounted. The first member and the second member are configured as distinct members from each other, and are formed so as to be separable from each other.

Description

[Technical Field]

[0001] SUMMARY OF THE DISCLOSURE Exemplary embodiments of the present disclosure relate to a substrate processing apparatus and an inner chamber assembly. [Background technology]

[0002] A plasma processing apparatus is used for plasma processing of a substrate. The plasma processing apparatus includes a chamber and a substrate support. The substrate support supports a substrate in the chamber. The substrate is processed by chemical species from plasma generated from a processing gas in the chamber. Patent Document 1 listed below discloses such a plasma processing apparatus. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2019-197849 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides techniques to reduce the cost of replacing chambers that define processing spaces. [Means for solving the problem]

[0005] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber in which a mounting table for mounting a substrate is disposed, and a second chamber disposed within the first chamber. The second chamber includes a first member including a ceiling disposed above the mounting table, and a second member including a sidewall and supporting the first member. The second member is electrically connected to a grounded portion disposed to surround the mounting table. The first member and the second member are configured as separate members and are separable from each other. [Effects of the Invention]

[0006] According to one exemplary embodiment, it is possible to reduce the cost of replacing a chamber that defines a processing space. [Brief explanation of the drawings]

[0007] [Figure 1] 1 illustrates a substrate processing system according to an exemplary embodiment. [Figure 2] 1 is a schematic diagram of a transfer module of a substrate processing system according to an exemplary embodiment; [Figure 3] 1 is a diagram illustrating a substrate processing apparatus according to an exemplary embodiment; [Figure 4] 1 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment; [Figure 5] FIG. 10 is a schematic view showing a second chamber (inner chamber assembly) of a substrate processing apparatus according to another exemplary embodiment. [Figure 6] FIG. 10 is a schematic view showing a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 7] FIG. 10 is a schematic view showing a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 8] FIG. 10 is a schematic view showing a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 9] FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. 8. [Figure 10] FIG. 10 is a schematic view showing a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. [Figure 11] FIG. 10 is a diagram schematically illustrating a substrate processing apparatus according to another exemplary embodiment. [Figure 12] FIG. 10 is a schematic view showing a second chamber of a substrate processing apparatus according to yet another exemplary embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Various exemplary embodiments are described below.

[0009] In one exemplary embodiment, a substrate processing apparatus is provided. The substrate processing apparatus includes a first chamber in which a mounting table for mounting a substrate is disposed, and a second chamber disposed within the first chamber. The second chamber includes a first member including a ceiling disposed above the mounting table, and a second member including a sidewall and supporting the first member. The second member is electrically connected to a grounded portion disposed to surround the mounting table. The first member and the second member are configured as separate members and are separable from each other.

[0010] In the substrate processing apparatus described above, a plasma processing space is defined by a mounting table, a first member including a ceiling disposed above the mounting table, and a second member including a sidewall. High frequency waves for generating plasma are returned via a return path through the second member connected to a ground. In such a substrate processing apparatus, the first member disposed above the mounting table on which the substrate is placed is prone to wear. Because the first member and the second member are configured as separate members, only the worn first member can be replaced during maintenance. This reduces the cost of replacing the chamber defining the processing space.

[0011] In one exemplary embodiment, the first member and the second member may be made of different materials, and in this configuration, the material for each member can be selected depending on the required function, etc.

[0012] In one exemplary embodiment, the first member may be made of a Si-containing material. The Si-containing material may be a material containing silicon as a constituent element. For example, the first member may be made of any of Si, SiC, SiO2, and Si3N4, and the second member may be made of a metal material. In this configuration, the first member, which is easily consumed, is made of a low-contamination material, and the second member, which forms the high-frequency return path, is made of a metal material with low electrical resistance.

[0013] In one exemplary embodiment, the first member may have gas holes, which facilitates the supply of gas to the processing space.

[0014] In one exemplary embodiment, the first member may have a flange that engages with the second member, which configuration prevents the first member from falling off the second member.

[0015] In one exemplary embodiment, the substrate processing apparatus may further include a third member provided along the inner surface of the sidewall of the second member, which can reduce wear on the inner surface of the second member.

[0016] In one exemplary embodiment, the third member may be annular, which may reduce wear on the inner surface of the second member.

[0017] In one exemplary embodiment, the third member may be divided into a plurality of parts in the circumferential direction. In this configuration, the third member is divided into smaller parts, making it easier to arrange the third member inside the second member.

[0018] In one exemplary embodiment, the third member may be divided into multiple parts in the vertical direction. In this configuration, the third member is divided into smaller parts, making it easier to arrange the third member inside the second member.

[0019] In one exemplary embodiment, the ceiling formed by the first member may have a circular shape and a diameter larger than the inner diameter of the upper end of the third member, which prevents the inner surface of the second member from being exposed to the processing space.

[0020] In another exemplary embodiment, an inner chamber assembly is provided. The inner chamber assembly is provided within a chamber of a substrate processing apparatus. The inner chamber assembly includes a first member including a ceiling provided above a mounting table on which a substrate is placed, and a second member including a sidewall and supporting the first member. The second member is electrically connected to a grounded portion provided to surround the mounting table. The first member and the second member are configured as separate members and are formed to be separable from each other.

[0021] Various exemplary embodiments will be described in detail below with reference to the drawings, in which the same or equivalent parts are designated by the same reference numerals.

[0022] 1 is a diagram showing a substrate processing system having an inner chamber assembly according to an exemplary embodiment, which includes process modules PM1 to PM6, a transfer module CTM, and a controller MC.

[0023] The substrate processing system PS may further include stages 2a-2d, containers 4a-4d, an aligner AN, load lock modules LL1 and LL2, and a transfer module TM. The number of stages, containers, and load lock modules in the substrate processing system PS may be any number greater than or equal to one. The number of process modules in the substrate processing system PS may be any number greater than or equal to one.

[0024] The stages 2a to 2d are arranged along one edge of the loader module LM. The containers 4a to 4d are mounted on the stages 2a to 2d, respectively. Each of the containers 4a to 4d is, for example, a container called a FOUP (Front Opening Unified Pod). Each of the containers 4a to 4d is configured to accommodate a substrate W therein.

[0025] The loader module LM has a chamber. The pressure in the chamber of the loader module LM is set to atmospheric pressure. The loader module LM has a transport device TU1. The transport device TU1 is, for example, a transport robot, and is controlled by the controller MC. The transport device TU1 is configured to transport a substrate W through the chamber of the loader module LM. The transport device TU1 can transport the substrate W between each of the containers 4a to 4d and the aligner AN, between the aligner AN and each of the load lock modules LL1 and LL2, and between each of the load lock modules LL1 and LL2 and each of the containers 4a to 4d. The aligner AN is connected to the loader module LM. The aligner AN is configured to adjust the position of the substrate W (calibrate the position).

[0026] Each of the load lock modules LL1 and LL2 is provided between the loader module LM and the transfer module TM. Each of the load lock modules LL1 and LL2 serves as a preliminary decompression chamber. Each of the load lock modules LL1 and LL2 is connected to the loader module LM via a gate valve. Furthermore, each of the load lock modules LL1 and LL2 is connected to the transfer module TM via a gate valve.

[0027] The transfer module TM has a transfer chamber TC that can be decompressed. The transfer module TM has a transfer apparatus TU2. The transfer apparatus TU2 is, for example, a transfer robot, and is controlled by a controller MC. The transfer apparatus TU2 is configured to transfer a substrate W via the transfer chamber TC. The transfer apparatus TU2 can transfer the substrate W between each of the load lock modules LL1, LL2 and each of the process modules PM1 to PM6, and between any two of the process modules PM1 to PM6.

[0028] Each of the process modules PM1 to PM6 is connected to the transfer module TM via a gate valve. Each of the process modules PM1 to PM6 is an apparatus configured to perform dedicated substrate processing. At least one of the process modules PM1 to PM6 is a substrate processing apparatus according to an exemplary embodiment described below.

[0029] The transfer module CTM includes a chamber and a transfer device. The transfer module CTM is controlled by a controller MC. The transfer module CTM includes the transfer device. The transfer device of the transfer module CTM is configured to transfer a second chamber provided in a first chamber of the substrate processing apparatus into the chamber of the transfer module CTM.

[0030] 2 is a diagram schematically illustrating a transfer module of a substrate processing system according to an exemplary embodiment. The transfer module CTM includes a chamber 110. The chamber 110 provides an internal space 112 and an internal space 114. The internal space 112 is provided above the internal space 114 and is separated from the internal space 114. A sidewall 110s of the chamber 110 provides an opening 110o that communicates with the internal space 112. The opening 110o can be opened and closed by a gate valve 116.

[0031] In one embodiment, a portion of the sidewall 110s has a dual structure formed from an inner wall 110i and an outer wall 110e. The inner wall 110i and the outer wall 110e define a space 110q therebetween. An opening 110o is formed in the inner wall 110i and the outer wall 110e. A gate valve 116 is provided along the inner wall 110i to open and close the opening 110o.

[0032] The transfer module CTM further includes a transfer device 120. The transfer device 120 is a transfer robot and includes an arm 120a. The transfer device 120 is provided in the internal space 112.

[0033] The transfer module CTM further includes an exhaust device 122. The exhaust device 122 is provided in the internal space 114. The exhaust device 122 is connected to the internal space 112 via a valve 124 and to the space 110q via a valve 126. The exhaust device 122 is configured to reduce the pressure in the internal space 112 and the space 110q.

[0034] The transport module CTM further includes a moving mechanism 130. The moving mechanism 130 includes a main body 132 and a plurality of wheels 134. The main body 132 incorporates a power source such as a battery, a power source, and a steering mechanism. The wheels 134 are rotated by the power source within the main body 132, and move the transport module CTM in a direction controlled by the steering mechanism within the main body 132. Note that the moving mechanism 130 may be a mechanism employing a type other than wheels, such as a walking type, as long as it is capable of moving the transport module CTM.

[0035] The transfer module CTM further includes a sensor 138 and a controller 140. The sensor 138 is attached to the outer wall of the chamber 110. The controller 140 is provided in the internal space 114. The sensor 138 senses the environment around the transfer module CTM and outputs the sensing result to the controller 140. The sensor 138 is, for example, an image sensor, and outputs an image of the environment around the transfer module CTM to the controller 140. The controller 140 may be a computer including a processor, a storage device such as a memory, and a communication unit. The controller 140 is configured to control each component of the transfer module CTM. The controller 140 controls the movement mechanism 130 to move the transfer module CTM using the sensing result of the sensor 138 to connect the transfer module CTM to the substrate processing apparatus 1. The controller 140 also controls the exhaust device 122 and the valves 124 and 126.

[0036] The controller MC is configured to control each part of the substrate processing system PS. The controller MC may be a computer equipped with a processor, a storage device, an input device, a display device, etc. The controller MC executes a control program stored in the storage device and controls each part of the substrate processing system PS based on the recipe data stored in the storage device.

[0037] A substrate processing apparatus according to an exemplary embodiment will be described below. FIG. 3 is a diagram schematically illustrating a substrate processing apparatus according to an exemplary embodiment. FIG. 4 is a partially enlarged cross-sectional view of a substrate processing apparatus according to an exemplary embodiment. The substrate processing apparatus 1 shown in FIGS. 3 and 4 is a capacitively coupled plasma processing apparatus. The substrate processing apparatus 1 includes a first chamber 10, a second chamber 20 (inner chamber assembly), and a substrate support 30.

[0038] The first chamber 10 provides an internal space. The first chamber 10 is made of a metal such as aluminum. The first chamber 10 is electrically grounded. A corrosion-resistant film may be formed on the surface of the first chamber 10. The corrosion-resistant film may be made of a material such as aluminum oxide or yttrium oxide.

[0039] The first chamber 10 includes a sidewall 10s. The sidewall 10s has a substantially cylindrical shape. A central axis of the sidewall 10s extends vertically and is shown as an axis AX in FIG. 3. The sidewall 10s provides a passage 10p. The internal space of the first chamber 10 is connected to the internal space of the transfer chamber TC of the transfer module TM via the passage 10p. The passage 10p can be opened and closed by a gate valve 10g. The substrate W passes through the passage 10p when being transferred between the internal space of the first chamber 10 and the outside of the first chamber 10.

[0040] The side wall 10s further provides an opening 10o. The opening 10o has a size that allows the second chamber 20 to pass through. The internal space of the first chamber 10 can be connected to the internal space of the transfer module CTM through the opening 10o. The opening 10o can be opened and closed by a gate valve 10v.

[0041] In one embodiment, a portion of the sidewall 10s has a double structure formed of an inner wall 10i and an outer wall 10e. The inner wall 10i and the outer wall 10e provide a space 10q therebetween. An opening 10o is formed in the inner wall 10i and the outer wall 10e. A gate valve 10v is provided along the inner wall 10i to open and close the opening 10o.

[0042] The first chamber 10 may further include an upper portion 10u. The upper portion 10u extends from the upper end of the side wall 10s in a direction intersecting with the axis line AX. The upper portion 10u provides an opening in a region intersecting with the axis line AX.

[0043] The first chamber 10 further includes a movable part 10m. The movable part 10m is provided below the upper part 10u of the first chamber 10 and inside the side wall 10s. The movable part 10m is configured to be movable upward and downward within the first chamber 10.

[0044] The substrate processing apparatus 1 further includes a lift mechanism 12. The lift mechanism 12 is configured to move the movable part 10m upward and downward. The lift mechanism 12 includes a drive device 12d and a shaft 12s. The movable part 10m is fixed to the shaft 12s. The shaft 12s extends upward from the movable part 10m through an opening in the upper part 10u. The drive device 12d is provided outside the first chamber 10. The drive device 12d is configured to move the shaft 12s upward and downward. The drive device 12d may include, for example, a motor for moving the shaft 12s. The upward and downward movement of the shaft 12s causes the movable part 10m to move upward and downward.

[0045] The substrate processing apparatus 1 may further include a bellows 14. The bellows 14 is provided between the movable part 10m and the upper part 10u. The bellows 14 separates the internal space of the first chamber 10 from the outside of the first chamber 10. The lower end of the bellows 14 is fixed to the movable part 10m. The upper end of the bellows 14 is fixed to the upper part 10u.

[0046] In one embodiment, the movable part 10m may include a first member 10a and a second member 10b. The first member 10a and the second member 10b are fixed to each other. The first member 10a has a substantially disk shape. The first member 10a may constitute an upper electrode in the substrate processing apparatus 1. The second member 10b has a substantially cylindrical shape. The second member 10b extends along the outer periphery of the first member 10a and above the first member 10a. The lower end of the bellows 14 is fixed to the upper end of the second member 10b. The first member 10a and the second member 10b are made of a conductor such as aluminum. The first member 10a and the second member 10b may be electrically connected to the first chamber 10.

[0047] In one embodiment, the movable part 10m may form a shower head together with the second chamber 20. That is, the movable part 10m may form a part of a shower head that supplies gas to the processing space S, which will be described later. In this embodiment, the movable part 10m provides a gas diffusion chamber 10d and a plurality of gas holes 10h.

[0048] The gas diffusion chamber 10d may be provided in the first member 10a. A gas supply unit 16 is connected to the gas diffusion chamber 10d. The gas supply unit 16 is provided outside the first chamber 10. The gas supply unit 16 includes one or more gas sources used in the substrate processing apparatus 1, one or more flow controllers, and one or more valves. Each of the one or more gas sources is connected to the gas diffusion chamber 10d via a corresponding flow controller and a corresponding valve. A plurality of gas holes 10h extend downward from the gas diffusion chamber 10d.

[0049] The substrate support 30 (mounting table) is disposed within the first chamber 10 and below the movable part 10m. The substrate support 30 is configured to support a substrate W placed thereon. The substrate support 30 may be supported by a support part 31. The support part 31 has a substantially cylindrical shape. The support part 31 is formed from an insulator such as quartz. The support part 31 may extend upward from a bottom plate 32. The bottom plate 32 may be formed from a metal such as aluminum.

[0050] The substrate support 30 may include a lower electrode 34 and an electrostatic chuck 36. The lower electrode 34 has a substantially disk shape. The central axis of the lower electrode 34 substantially coincides with the axis AX. The lower electrode 34 is formed from a conductor such as aluminum. The lower electrode 34 has a flow path 34f therein. The flow path 34f extends, for example, in a spiral shape. The flow path 34f is connected to a chiller unit 35. The chiller unit 35 is provided outside the first chamber 10. The chiller unit 35 supplies a coolant to the flow path 34f. The coolant supplied to the flow path 34f is returned to the chiller unit 35.

[0051] The substrate processing apparatus 1 may further include a first high-frequency power supply 41 and a second high-frequency power supply 42. The first high-frequency power supply 41 is a power supply that generates a first high-frequency power. The first high-frequency power has a frequency suitable for generating plasma. The frequency of the first high-frequency power is, for example, 27 MHz or higher. The first high-frequency power supply 41 is electrically connected to the lower electrode 34 via a matching device 41m. The matching device 41m has a matching circuit for matching the impedance of the load side (lower electrode 34 side) of the first high-frequency power supply 41 to the output impedance of the first high-frequency power supply 41. Note that the first high-frequency power supply 41 may be connected to the upper electrode via the matching device 41m, instead of the lower electrode 34.

[0052] The second high frequency power supply 42 is a power supply that generates second high frequency power. The second high frequency power has a frequency suitable for attracting ions to the substrate W. The frequency of the second high frequency power is, for example, 13.56 MHz or less. The second high frequency power supply 42 is electrically connected to the lower electrode 34 via a matching device 42m. The matching device 42m has a matching circuit for matching the impedance of the load side (lower electrode 34 side) of the second high frequency power supply 42 to the output impedance of the second high frequency power supply 42.

[0053] The electrostatic chuck 36 is disposed on the lower electrode 34. The electrostatic chuck 36 includes a body and an electrode 36a. The body of the electrostatic chuck 36 has a substantially disc shape. The central axis of the electrostatic chuck 36 substantially coincides with the axis AX. The body of the electrostatic chuck 36 is formed from ceramic. The substrate W is placed on the upper surface of the body of the electrostatic chuck 36. The electrode 36a is a film formed from a conductor. The electrode 36a is disposed within the body of the electrostatic chuck 36. The electrode 36a is connected to a DC power supply 36d via a switch 36s. When a voltage from the DC power supply 36d is applied to the electrode 36a, an electrostatic attractive force is generated between the electrostatic chuck 36 and the substrate W. The generated electrostatic attractive force attracts the substrate W to the electrostatic chuck 36 and the substrate W is held by the electrostatic chuck 36. The substrate processing apparatus 1 may be provided with a gas line for supplying a heat transfer gas (for example, helium gas) to the gap between the electrostatic chuck 36 and the rear surface of the substrate W.

[0054] The substrate support 30 may support an edge ring ER disposed thereon. The substrate W is placed on the electrostatic chuck 36 within a region surrounded by the edge ring ER. The edge ring ER is made of, for example, silicon, quartz, or silicon carbide.

[0055] The substrate processing apparatus 1 may further include an insulating portion 37. The insulating portion 37 is made of an insulator such as quartz. The insulating portion 37 may have a generally cylindrical shape. The insulating portion 37 extends along the outer periphery of the lower electrode 34 and the outer periphery of the electrostatic chuck 36.

[0056] The substrate processing apparatus 1 may further include a conductor 38. The conductor 38 is made of a conductor such as aluminum. The conductor 38 may have a generally cylindrical shape. The conductor 38 is provided along the outer periphery of the substrate support 30. Specifically, the conductor 38 extends circumferentially outside the insulating portion 37 in the radial direction. The radial direction and the circumferential direction are directions based on the axis AX. The conductor 38 is connected to ground. In one example, the conductor 38 is connected to ground via the bottom plate 32 and the first chamber 10.

[0057] The substrate processing apparatus 1 may further include a cover ring 39. The cover ring 39 is made of an insulator such as quartz. The cover ring 39 has an annular shape. The cover ring 39 is provided on the insulating portion 37 and the conductor portion 38 so as to be located radially outside the region in which the edge ring ER is disposed.

[0058] The second chamber 20 is an inner chamber assembly that is disposed within the first chamber 10 of the substrate processing apparatus 1 and is configured to define a processing space S together with the substrate support 30. The second chamber 20 is removable from the first chamber 10 and can be transported between the interior space of the first chamber 10 and the outside of the first chamber 10 via the opening 10o. The second chamber 20 in one example embodiment is configured to include a first member 21 and a second member 22. The first member 21 and the second member 22 are configured as separate members and are formed to be separable from each other.

[0059] The first member 21 is provided above the substrate support 30 on which the substrate W is placed, and can constitute a ceiling that defines the processing space S. The first member 21 in the illustrated example has a disk-shaped main body 21a that extends substantially horizontally, and a protruding edge 21b provided on the edge of the main body 21a. The upper surface of the main body 21a abuts against the lower surface of the movable part 10m when the second chamber 20 is fixed to the first chamber 10. The main body 21a provides a plurality of gas holes 21h. The plurality of gas holes 21h penetrate the main body 21a and open toward the processing space S. The plurality of gas holes 21h are respectively connected to the plurality of gas holes 10h.

[0060] The protruding edge portion 21b provided on the first member 21 is an annular portion that protrudes radially outward from the edge of the main body portion 21a. The protruding edge portion 21b is provided along the upper surface of the main body portion 21a at the edge of the main body portion 21a. In other words, the edge portion of the first member 21 is formed in a stepped shape with the upper surface protruding outward more than the lower surface.

[0061] The first member 21 may be made of a material that suppresses particle generation (low-contamination material). For example, the first member 21 may be made of a Si-containing material. In one example, the first member 21 may be made of a material such as Si, SiC, SiO2, or Si3N4. A corrosion-resistant film may be formed on the surface of the first member 21. The corrosion-resistant film may be made of a material such as aluminum oxide or yttrium oxide.

[0062] The second member 22 may include a sidewall that defines the processing space S and may be configured to support the first member 21. The second member 22 may be formed of a material different from the material that constitutes the first member 21. For example, the second member 22 may be made of a material that is more conductive than the first member 21. An example of the second member 22 is made of a metal material such as aluminum.

[0063] The second member 22, as an example, includes a top portion 22c, a side portion 22s, and a bottom portion 22b. The top portion 22c has an annular plate shape. The top portion 22c has an annular protruding edge portion 22c1 that protrudes radially inward from its inner edge. The protruding edge portion 22c1 is provided along the inner edge of the top portion 22c along the lower surface of the top portion 22c. That is, the inner edge of the top portion 22c is formed in a stepped shape, with the lower surface protruding inward more than the upper surface. The inner diameter of the upper surface of the top portion 22c may be substantially the same as or slightly larger than the diameter of the upper surface of the first member 21. The inner diameter of the lower surface of the top portion 22c may be substantially the same as or slightly larger than the diameter of the lower surface of the first member 21. Furthermore, the inner diameter of the lower surface of the top portion 22c is smaller than the diameter of the upper surface of the first member 21. With this configuration, the protruding edge portion 22c1 of the second member 22 and the protruding edge portion 21b of the first member 21 engage with each other, and the first member 21 can be supported by the second member 22.

[0064] The side portion 22s extends to the side of the processing space S. The side portion 22s has a substantially cylindrical shape. The side portion 22s extends downward from the outer edge of the ceiling portion 22c.

[0065] The bottom 22b extends from the lower end of the side portion 22s in a direction intersecting the axis AX. The bottom 22b has an annular plate shape and is configured to face the ceiling portion 22c across the processing space S. When viewed from the direction along the axis AX, the outer edge of the bottom 22b follows the outer edge of the side portion 22s, and the inner edge of the bottom 22b follows the outer edge of the conductor portion 38. A plurality of through-holes may be formed in the bottom 22b. The substrate processing apparatus 1 may further include an exhaust device 70. The exhaust device 70 includes a pressure regulator such as an automatic pressure control valve and a decompression pump such as a turbomolecular pump. The exhaust device 70 is connected to the bottom 22b of the first chamber 10 below the bottom 22b.

[0066] The second member 22 can be electrically connected to a grounded portion that is provided to surround the substrate support 30. That is, the second member 22 is connected to the ground. In one exemplary embodiment, the second member 22 is electrically connected to a conductor portion 38 that serves as the ground portion. In the illustrated example, the second member 22 is electrically connected to the conductor portion 38 by a contact 40 provided in the substrate processing apparatus 1.

[0067] The contact 40 is electrically connected to the conductor portion 38. The second member 22 abuts against the contact 40 while defining a processing space S together with the substrate support 30. The processing space S is a space in which the substrate W is processed. In one embodiment, the contact 40 is disposed radially outside the cover ring 39 and extends upward from the conductor portion 38.

[0068] The contact 40 may be configured to elastically contact the second member 22. As shown in FIG. 4, the contact 40 may have a spring 40s. The contact 40 may further have a contact portion 40c. The spring 40s and the contact portion 40c are conductive. The lower end of the spring 40s is fixed to the conductor portion 38. The spring 40s extends upward from the conductor portion 38. The contact portion 40c is fixed to the upper end of the spring 40s. The contact portion 40c is a portion that contacts the bottom portion 22b of the second member 22. In the illustrated example, a groove that accommodates the contact portion 40c is provided in the bottom portion 22b of the second member 22.

[0069] In one exemplary embodiment, the second chamber 20 may have a connecting member 28 that fixes the first member 21 and the second member 22. The connecting member 28 may be formed, for example, from the same material as the second member 22. One example of the connecting member 28 may have a circular plate shape. In the illustrated example, the connecting member 28 has an inner diameter equal to the inner diameter of the lower surface of the top portion 22c of the second member 22 and an outer diameter smaller than the outer diameter of the top portion 22c of the second member 22. The connecting member 28 may have a through hole near its outer edge into which a fastening member 28a, such as a screw, is disposed. In this case, the top portion 22c of the second member 22 may have a screw hole at a position corresponding to the through hole. The connecting member 28 is fastened to the second member 22 by the fastening member 28a disposed in the through hole. The first member 21 is fixed to the second member 22 and the connecting member 28 by clamping the protruding edge portion 21b of the first member 21 between the connecting member 28 and the protruding edge portion 22c1 of the second member 22.

[0070] In the illustrated example, a sealing member 20a (e.g., an O-ring) is disposed between the protruding edge portion 21b of the first member 21 and the protruding edge portion 22c1 of the second member 22. Furthermore, if the first member 21 is formed of a conductive material, conductive contact members 20b may be disposed between the protruding edge portion 21b of the first member 21 and the protruding edge portion 22c1 of the second member 22, and between the first member 21 and the connecting member 28. The arrangement of the contact members 20b electrically connects the first member 21, the second member 22, and the connecting member 28 to one another. The contact members 20b may be disposed radially outward of the sealing member 20a.

[0071] The substrate processing apparatus 1 further includes a clamp 50 and a release mechanism 60. The clamp 50 is configured to releasably fix the second chamber 20 to the first chamber 10. The release mechanism 60 is configured to release the fixation of the second chamber 20 by the clamp 50. The clamp 50 releasably fixes the connecting member 28 of the second chamber 20 to the movable part 10m of the first chamber 10.

[0072] 3 and 4, in one embodiment, the clamp 50 includes a plurality of support portions 52 and a plurality of springs 54. The clamp 50 may further include a plate 56. Note that the number of support portions 52 and the number of springs 54 of the clamp 50 may each be one.

[0073] Each of the plurality of support portions 52 has a lower end 52b. The lower ends 52b are formed so that the connecting member 28 is suspended therefrom. A plurality of springs 54 are provided to bias the connecting member 28 toward the movable portion 10m of the first chamber 10.

[0074] In one embodiment, the movable portion 10m of the first chamber 10 provides a cavity 10c. The cavity 10c may extend circumferentially around the axis AX. The cavity 10c is closed by a lid 58. The lid 58 is provided on the movable portion 10m of the first chamber 10 to close the cavity 10c. The movable portion 10m further provides a plurality of holes 10t. The holes 10t may be arranged at equal intervals around the axis AX. The holes 10t extend downward from the cavity 10c and open toward the connecting member 28. The connecting member 28 provides a plurality of recesses 20r. The recesses 20r are respectively connected to the holes 10t when the second chamber 20 is fixed to the first chamber 10.

[0075] In one embodiment, each of the plurality of support portions 52 is rod-shaped. The lower end 52b of each of the plurality of support portions 52 protrudes horizontally. The bottom of each of the plurality of recesses 20r includes an extension 20e. The extension 20e is formed so that the lower end 52b of a corresponding one of the plurality of support portions 52 can be positioned therein. In one example, each of the plurality of support portions 52 may be a screw, and the lower end 52b of each of the plurality of support portions 52 may be a screw head.

[0076] The plurality of support portions 52 extend downward from the cavity 10c through the plurality of holes 10t. When the top portion 20c is suspended from the plurality of support portions 52, the lower ends 52b of the plurality of support portions 52 are respectively disposed within the plurality of recesses 20r and their extensions 20e.

[0077] The upper ends of the plurality of support portions 52 are fixed to a plate 56 within the cavity 10c. The plurality of springs 54 are disposed within the cavity 10c. The plurality of springs 54 are disposed between the plate 56 and a surface of the movable portion 10m that defines the cavity 10c from below. In one embodiment, each of the plurality of springs 54 is a coil spring. The plurality of springs 54 are disposed so as to surround the plurality of support portions 52 within the cavity 10c.

[0078] In one embodiment, the release mechanism 60 includes an air supplier. The air supplier applies air pressure to separate the lower ends 52 b of the support portions 52 from the second chamber 20 to release the connection member 28 from the clamp 50. The air supplier of the release mechanism 60 can supply air to the gap between the lid body 58 and the plate 56. When air is supplied to the gap between the lid body 58 and the plate 56, the plate 56 and the support portions 52 move downward, and the lower ends 52 b of the support portions 52 are separated from the second chamber 20. In other words, the connection member 28 is released from the clamp 50. With the connection member 28 released from the clamp 50, the second chamber 20 is released from the first chamber 10, and the second chamber 20 can be transported from the interior space of the first chamber 10 to the outside of the first chamber 10.

[0079] A method for removing the second chamber 20 will be described. The second chamber 20 can be removed from the first chamber 10, for example, for maintenance, and transferred from the internal space of the first chamber 10 to the internal space of the chamber 110 of the transfer module CTM. The operation of the substrate processing apparatus 1 may be controlled by the controller MC. The operation of the transfer module CTM may be controlled by the controller 140. The controller 140 may control the transfer module CTM based on information such as commands transmitted from the controller MC.

[0080] In one example, first, the transfer module CTM is moved, and the chamber 110 of the transfer module CTM is connected to the first chamber 10 of the substrate processing apparatus 1. When the chamber 110 is connected to the first chamber 10, the sidewall 10s, the gate valve 10v, the sidewall 110s, and the gate valve 10v define a sealed space. The sealed space includes the space 10q and the space 110q. The pressure of this sealed space is reduced by the exhaust device 122. At the same time, the pressure of the internal space 112 of the chamber 110 of the transfer module CTM is also reduced by the exhaust device 122.

[0081] Next, the gate valves 10v and 116 are moved to connect the internal space of the first chamber 10 with the internal space 112 of the chamber 110 of the transfer module CTM. Next, the lift mechanism 12 moves the movable part 10m and the second chamber 20 upwardly away from the substrate support 30 within the first chamber 10. Next, the arm 120a of the transfer device 120 enters the internal space of the first chamber 10 so as to extend below the second chamber 20. The movable part 10m and the second chamber 20 are moved downward by the lift mechanism 12, and the second chamber 20 is placed on the arm 120a. Next, the release mechanism 60 releases the second chamber 20 from being fixed by the clamp 50. Next, the transfer device 120 moves the second chamber 20 horizontally, causing the lower ends 52b of the multiple supports 52 to retract from the extension part 20e. Next, the movable part 10m is moved upward by the lift mechanism 12 and separated from the second chamber 20. As a result, the lower end 52b of the support part 52 moves to the outside of the recessed part 20r. Next, the second chamber 20 is moved by the arm 120a of the transfer device 120 from the internal space of the first chamber 10 to the internal space 112 of the chamber 110 of the transfer module CTM via the openings 10o and 110o. Then, the gate valves 10v and 116 are moved to close the openings 10o and 110o.

[0082] A second chamber according to another exemplary embodiment will be described below with reference to FIGS. 5 to 9. Note that configurations not specifically described below or omitted from the drawings may be similar to the second chamber 20 shown in FIGS. 3 and 4. FIG. 5 is a schematic diagram showing a second chamber 220, which is an inner chamber assembly according to another exemplary embodiment. The second chamber 220 shown in FIG. 5 has a first member 21, a second member 22, and a connecting member 28 that constitute the second chamber 20 shown in FIGS. 3 and 4.

[0083] The second chamber 220 further includes a third member 223. The third member 223 may be formed of, for example, the same material as the first member 21. The third member 223 may be annular and may be provided along the inner surface of the side portion 22s (side wall) of the second member 22. The third member 223 in the illustrated example has a substantially L-shape in cross section and is provided along the inner surfaces of the side portion 22s and bottom portion 22b of the second member 22. In this case, the second member 22 or the third member 223 may be configured by combining multiple parts.

[0084] Fig. 6 is a schematic diagram showing a second chamber 320, which is an inner chamber assembly of yet another exemplary embodiment. The second chamber 320 shown in Fig. 6 differs from the second chamber 220 shown in Fig. 5 only in the configuration of the connecting member 328. That is, the second chamber 320 has a first member 21, a second member 22, and a third member 223, as well as a connecting member 328. The connecting member 328 covers the upper part (upper surface) of the first member 21.

[0085] The connecting member 328 may be formed of, for example, the same material as the second member 22. One example of the connecting member 328 may be disk-shaped. The diameter of the connecting member 328 in the illustrated example is larger than the diameter of the upper surface of the first member 21 and smaller than the outer diameter of the second member 22. The connecting member 328 has a through hole similar to the connecting member 28 in FIG. 4, and is fastened to the second member 22 by a fastening member 28a arranged in the through hole.

[0086] When the second chamber 320 is fixed to the first chamber 10, the upper surface of the connecting member 328 abuts against the lower surface of the movable part 10m. In addition, the lower surface of the connecting member 328 abuts against the upper surface of the first member 21. Therefore, the connecting member 328 provides a plurality of gas holes. The plurality of gas holes penetrate the connecting member 328 and are connected to the gas hole 10h of the first chamber 10 and the gas hole 21h of the first member 21.

[0087] 7 is a schematic diagram showing a second chamber 420, which is an inner chamber assembly of yet another exemplary embodiment. The second chamber 420 includes a first member 421 and a second member 422. The first member 421 and the second member 422 are configured as separate members and are formed to be separable from each other. The first member 421 may be formed of the same material as the first member 21. The second member 422 may be formed of, for example, the same material as the second member 22.

[0088] The first member 421 is provided above the substrate support 30 on which the substrate W is placed, and constitutes a ceiling that defines the processing space S. The illustrated first member 421 has a disk-shaped main body 421a that extends substantially horizontally, and a protruding edge 421b provided on the edge of the main body 421a. The protruding edge 421b is provided along the upper surface of the main body 421a, at the edge of the main body 421a. In other words, the edge of the first member 421 is formed in a stepped shape with the upper surface protruding outward more than the lower surface.

[0089] The second member 422 may include a sidewall that defines the processing space S and be configured to support the first member 421. An example of the second member 422 includes a ceiling portion 422c, a side portion 422s, and a bottom portion 422b. The ceiling portion 422c has an annular plate shape. The inner diameter of the ceiling portion 422c is smaller than the diameter of the upper surface of the first member 421 and larger than the diameter of the lower surface of the first member 421. With this configuration, the protruding edge portion 421b of the first member 421 engages with the inner peripheral edge of the second member 422, and the first member 421 can be supported by the second member 422.

[0090] The side portion 422s and the bottom portion 422b may be configured in the same shape as the side portion 22s and the bottom portion 22b of the second chamber 20. The inner surfaces of the side portion 422s and the bottom portion 422b may be covered by a third member 423. The third member 423 may be formed, for example, from the same material as the second member 22. The third member 423 may be annular and may be provided along the inner surface of the side portion 422s (side wall) of the second member 422. The third member 423 in the illustrated example has a substantially L-shape in cross section and is provided along the inner surfaces of the side portion 422s and the bottom portion 422b of the second member 422.

[0091] The ceiling (lower surface) formed by the first member 421 has a circular shape and has a diameter larger than the inner diameter of the upper end of the third member 423. In the illustrated example, the upper end surface 423a of the third member 423 and the lower surface of the first member 421 are in contact with each other.

[0092] 8 is a schematic diagram showing a second chamber 520, which is an inner chamber assembly of yet another exemplary embodiment. The second chamber 520 includes a first member 521, a second member 522, and a third member 523. The first member 521, the second member 522, and the third member 523 are configured as separate members and are formed to be separable from one another. The first member 521 and the third member 523 may be formed of the same material as the first member 21, for example. The second member 522 may be formed of the same material as the second member 22, for example.

[0093] The first member 521 is provided above the substrate support 30 on which the substrate W is placed, and can constitute a ceiling that defines the processing space S. The first member 521 in the illustrated example has a disk-shaped main body 521a that extends substantially horizontally, and an annular protrusion 521b that protrudes downward from the lower surface of the main body 521a. The outer diameter of the protrusion 521b is smaller than the diameter of the main body 521a. In other words, the protrusion 521b is formed at a position more inward than the periphery of the main body 521a.

[0094] The second member 522 may include a sidewall that defines the processing space S and be configured to support the first member 521. An example of the second member 522 includes a side portion 522s and a bottom portion 522b. The side portion 522s is cylindrical. The inner diameter of the side portion 522s is smaller than the diameter of the main body portion 521a of the first member 521 and larger than the outer diameter of the protrusion portion 521b. With this configuration, the first member 521 can be supported on the upper end surface of the side portion 522s of the second member 522. The bottom portion 522b may be configured in a shape similar to the bottom portion 22b of the second chamber 20. A clamp 50 may be connectable to the upper end surface of the side portion 522s.

[0095] The third member 523 may be annular and may be provided along the inner surface of the side portion 522s of the second member 522. The third member 523 in the illustrated example is substantially L-shaped in cross section and is provided along the inner surfaces of the side portion 522s and bottom portion 522b of the second member 522.

[0096] The third member 523 may be divided into multiple parts in the vertical direction. As an example, the third member 523 may be composed of a cylindrical fourth member 524 and an annular plate-like fifth member 525. In the illustrated example, the fourth member 524 covers the side portion 522s of the second member 522, and the fifth member 525 covers the bottom portion 522b of the second member 522. As shown in FIG. 8 , a recess 524a (step) may be formed at the upper end of the fourth member 524. The protrusion 521b of the first member 521 is accommodated in the recess 524a. The recess 524a is provided in a stepped shape on the inner periphery of the upper end surface of the fourth member 524. The recess 524a may be formed in a groove shape in the radial center of the upper end surface of the fourth member 524, or may be formed in a stepped shape on the outer periphery of the upper end surface.

[0097] The protrusion 521b of the first member 521 is defined by a plurality of planes that intersect with each other. Similarly, the recess 524a of the fourth member 524 is defined by a plurality of planes that intersect with each other. The plurality of planes that define the protrusion 521b of the first member 521 and the plurality of planes that define the recess 524a of the fourth member 524 abut against each other.

[0098] A recess capable of accommodating the protrusion 525a formed on the fifth member 525 is formed at the lower end of the fourth member 524. In the illustrated example, an annular protrusion 525a protruding upward is provided at the outer edge of the fifth member 525. The recess 524b of the fourth member 524 is provided in a stepped shape on the outer periphery of the lower end surface of the side portion. The recess 524b may be formed in a groove shape in the center in the radial direction on the lower end surface of the fourth member 524, or may be formed in a stepped shape on the inner periphery of the lower end surface. In either case, the protrusion 525a of the fifth member 525 is provided at a position corresponding to the recess 524b.

[0099] The recess 524b of the fourth member 524 is defined by a plurality of planes that intersect with each other. Similarly, the protrusion 525a of the fifth member 525 is also defined by a plurality of planes that intersect with each other. The plurality of planes that define the recess 524b of the fourth member 524 and the plurality of planes that define the protrusion 525a of the fifth member 525 abut against each other.

[0100] Furthermore, the third member 523 may be divided into multiple pieces in the circumferential direction. FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. 8, showing a cross-section of a fourth member 524 constituting the third member 523. Note that hatching is omitted in FIG. 9 for ease of understanding. As shown in FIG. 9, in one exemplary embodiment, the fourth member 524 constituting the third member 523 is composed of multiple parts 524A. The fourth member 524 in the illustrated example is composed of six parts 524A. The parts 524A constituting the fourth member 524 have the same shape. Each part 524A has a shape obtained by cutting a cylinder in the circumferential direction. One circumferential end (first end) of each part 524A has a step 524d whose inner periphery protrudes more than the outer periphery, and the other circumferential end (second end) of each part 524A has a step 524c whose outer periphery protrudes more than the inner periphery. Step portion 524d is defined by a plurality of planes that intersect with each other. Similarly, step portion 524c is also defined by a plurality of planes that intersect with each other. In adjacent parts 524A, adjacent step portions 524d and 524c fit together. In other words, the plurality of planes that define step portion 524c and the plurality of planes that define step portion 524d abut against each other. Note that fifth member 525 may be configured by a plurality of parts, similar to fourth member 524.

[0101] 10 is a schematic diagram showing a second chamber 620, which is an inner chamber assembly according to yet another exemplary embodiment. The second chamber 620 shown in FIG. 10 has the first member 21, the second member 22, and the connecting member 28 that constitute the second chamber 20 shown in FIGS. 3 and 4. The second chamber 620 can be provided in the first chamber 10 of the substrate processing apparatus 1, instead of the second chamber 20.

[0102] The second chamber 620 further includes a third member 623. The third member 623 may be formed of, for example, the same material as the first member 21. The third member 623 may be annular and fit along the inner surface of the side portion 22s of the second member 22. For example, the third member 623 may be abutted against the inner surface of the second member 22. In the illustrated example, the third member 623 is provided along the inner surfaces of the side portion 22s, bottom portion 22b, and top portion 22c of the second member 22. That is, the third member 623 includes a side portion 623s, a bottom portion 623b, and a top portion 623c. The side portion 623s is provided along the inner surface of the side portion 22s and covers the side portion 22s. The bottom portion 623b is connected to the lower end of the side portion 623s and fits along the inner surface of the bottom portion 22b, covering the inner surface. The top portion 623c is connected to the upper end of the side portion 623s and covers the inner surface of the top portion 22c along the inner surface. In the radial direction, the position of the inner edge of the bottom portion 623b may coincide with the position of the inner edge of the bottom portion 22b. In addition, in the radial direction, the position of the inner edge of the top portion 623c may coincide with the position of the inner edge of the top portion 22c (i.e., the position of the periphery of the main body portion 21a). The second member 22 or the third member 623 may be formed by combining multiple parts.

[0103] 11 is a diagram schematically illustrating a substrate processing apparatus 701 according to another exemplary embodiment. The substrate processing apparatus 701 can be employed as one of the process modules PM1 to PM6 in place of the substrate processing apparatus 1. Hereinafter, the configuration of the substrate processing apparatus 701 that differs from that of the substrate processing apparatus 1 will be mainly described, and a description of the configuration that is common to the substrate processing apparatus 1 will be omitted.

[0104] The substrate processing apparatus 701 has a movable part 710 instead of the movable part 10m of the substrate processing apparatus 1. Like the movable part 10m, the movable part 710 is fixed to the shaft 12s and is configured to move upward and downward. In one embodiment, the movable part 710 may include an electrode part 711, an insulating part 712, a fixed part 713, and a support part 714. The electrode part 711, the insulating part 712, the fixed part 713, and the support part 714 may be fixed to each other.

[0105] The electrode portion 711, the insulating portion 712, and the fixed portion 713 correspond to the first member 10a of the movable portion 10m, and the support portion 714 corresponds to the second member 10b of the movable portion 10m. The electrode portion 711 has a substantially disk shape and is made of a conductor such as aluminum. Like the first member 10a, the electrode portion 711 provides a gas diffusion chamber 10d and a plurality of gas holes 10h. When a high-frequency power source is connected to the electrode portion 711, it can function as an upper electrode.

[0106] The insulating portion 712 has a substantially circular ring shape and extends in the circumferential direction about the axis AX. The insulating portion 712 is formed of an insulator such as quartz. The insulating portion 712 surrounds the electrode portion 711 in the circumferential direction and supports the electrode portion 711. In one example, a flange portion may be formed on the upper end of the outer edge of the electrode portion 711, and the flange portion of the electrode portion 711 may be supported by the upper end of the inner edge of the insulating portion 712. The insulating portion 712 may have a step portion corresponding to the flange portion. The gap between the electrode portion 711 and the insulating portion 712 may be sealed by a sealing member such as an O-ring.

[0107] The fixed portion 713 has a substantially annular shape and extends in the circumferential direction about the axis AX. The fixed portion 713 is provided with a clamp 50, similar to the first member 10a. The fixed portion 713 is formed of a conductor such as aluminum. The fixed portion 713 surrounds the insulating portion 712 in the circumferential direction and supports the insulating portion 712. In one example, a flange may be formed on the upper end of the outer edge of the insulating portion 712, and the flange of the insulating portion 712 may be supported by the upper end of the inner edge of the fixed portion 713. The fixed portion 713 may have a step corresponding to the flange. A sealing member such as an O-ring may seal the gap between the insulating portion 712 and the fixed portion 713. The insulating portion 712 is interposed between the electrode portion 711 and the fixed portion 713, so that the electrode portion 711 and the fixed portion 713 are electrically insulated from each other.

[0108] The support portion 714 has a substantially cylindrical shape. The support portion 714 is made of a conductor such as aluminum. The support portion 714 extends along the outer periphery of the fixed portion 713 and extends above the electrode portion 711, the insulating portion 712, and the fixed portion 713. The support portion 714 supports the fixed portion 713. In one example, a flange portion may be formed at the upper end of the outer edge of the fixed portion 713, and the flange portion of the fixed portion 713 may be supported by the upper end of the inner edge of the support portion 714. A sealing member such as an O-ring may be used to seal between the fixed portion 713 and the support portion 714.

[0109] 12 is a schematic diagram showing a second chamber, which is an inner chamber assembly used in the substrate processing apparatus 701 shown in FIG. This second chamber 720 includes a first member 721, a second member 725, and a third member 722. The first member 721, the second member 725, and the third member 722 are configured as separate members and are formed to be separable from one another. Note that, although the portion of the movable part 710 that is fixed to the clamp 50 is omitted in FIG. 12, the method of fixing the second chamber 720 to the movable part 710 is not particularly limited.

[0110] The first member 721 may be formed of the same material as the first member 21. The first member 721 is provided above the substrate support 30 on which the substrate W is placed, and constitutes a ceiling that defines the processing space S. The illustrated first member 721 has a disk-shaped main body 721a that extends substantially horizontally, and a protruding edge 721b provided on the edge of the main body 721a. The protruding edge 721b is provided along the upper surface of the main body 721a at the edge of the main body 721a. That is, the edge of the first member 721 is formed in a stepped shape with the upper surface protruding outward more than the lower surface. The upper surface of the main body 721a may abut against the bottom surface of the electrode unit 711. The main body 721a may be provided with a gas hole connected to the gas hole 10h. The first member 721 may have a groove that accommodates a contact member for electrical connection with the electrode unit 711. Such a groove may be formed on the upper surface of the main body portion 721a.

[0111] The second member 725 is formed from a dielectric material with a dielectric constant ε of 3 or greater, such as Al2O3, AlN, high-resistivity silicon, or SiC. The second member 725 is generally annular and extends circumferentially about the axis AX. The second member 725 circumferentially surrounds the first member 721 and supports it. The top surface of the second member 725 abuts against the bottom surface of the insulating portion 712. The second member 725 has an annular protrusion 725a that protrudes radially inward to support the protrusion 721b of the first member 721. A sealing member such as an O-ring may seal the gap between the first member 721 and the second member 725. The second member 725 has an annular protrusion 725b that protrudes outward from its upper end.

[0112] The third member 722 may be formed of, for example, the same material as the second member 722. The third member 722 may include a sidewall that defines the processing space S and is configured to support the second member 725. An example of the third member 722 includes a ceiling portion 722c, a side portion 722s, and a bottom portion 722b. The ceiling portion 722c has an annular plate shape. The inner diameter of the ceiling portion 722c is smaller than the diameter of the protruding edge portion 725b of the second member 725 and larger than the diameter of the lower surface of the second member 725. With this configuration, the protruding edge portion 725b of the second member 725 can be supported on the inner peripheral edge of the third member 722. By interposing the second member 725 between the first member 721 and the third member 722, the first member 721 and the third member 722 are electrically insulated from each other. In this case, the electrode portion 711 and the third member 722 are also insulated from each other. The space between the second member 725 and the third member 722 may be sealed with a sealing member such as an O-ring. The third member can function as a high-frequency return path, similar to the second member 22.

[0113] The side portion 722s and the bottom portion 722b may be configured in the same shape as the side portion 22s and the bottom portion 22b of the second chamber 20. The inner surfaces of the top portion 722c, the side portion 722s, and the bottom portion 722b may be coated with a non-conductive coating such as anodized aluminum, aluminum oxide, or yttrium oxide. The inner surfaces of the top portion 722c, the side portion 722s, and the bottom portion 722b may be covered by, for example, a fourth member 723. The fourth member 723 may be formed of, for example, the same material as the second member 22. The fourth member 723 may be annular and may be provided along the inner surface of the side portion 722s of the third member 722. The fourth member 723 in the illustrated example is provided along the inner surfaces of the side portion 722s and the bottom portion 722b of the third member 722, similar to the third member 623 of the second chamber 620.

[0114] As described above, in one exemplary embodiment, the second chamber 20 is provided as an inner chamber assembly. The second chamber 20 is provided within the first chamber 10 of the substrate processing apparatus 1. The second chamber 20 includes a first member 21 including a ceiling provided above the substrate support 30 on which the substrate W is placed, and a second member 22 including a sidewall and supporting the first member 21. The second member 22 is electrically connected to a grounded conductor 38 provided so as to surround the substrate support 30. The first member 21 and the second member 22 are configured as separate members and are formed to be separable from each other.

[0115] In the second chamber 20, a processing space S is defined by a substrate support 30, a first member 21 including a ceiling disposed above the substrate support 30, and a second member 22 including a sidewall. The high-frequency power output from the first high-frequency power supply 41 is returned via a return path through the second member 22 connected to the conductor 38. In one example, the substrate support 30 on which the substrate W is placed includes a lower electrode 34, and the movable part 10m supporting the second chamber 20 includes an upper electrode. The first member 21 of the second chamber 20 is disposed between the lower electrode 34 and the upper electrode and is susceptible to wear. In one exemplary embodiment, the first member 21 and the second member 22 are configured as separate members. Therefore, during maintenance, the second chamber 20 can be disassembled and only the worn first member 21 can be replaced. This reduces the cost of replacing the chambers that define the processing space S.

[0116] In one exemplary embodiment, the first member 21 and the second member 22 may be made of different materials. In this configuration, the material for each member may be selected depending on the required function, etc. For example, the support mechanism for the second chamber may be formed on the second member 22. In this case, the second member 22 may be made of a material that is easy to process and difficult to break.

[0117] In one exemplary embodiment, the first member 21 may be made of a Si-containing material. For example, the first member 21 may be made of any of Si, SiC, SiO2, and Si3N4, and the second member 22 may be made of a metal material. In this configuration, the first member 21, which is easily consumed, is made of a low-contamination material, and the second member 22, which forms a high-frequency return path, is made of a metal material with low electrical resistance.

[0118] In one exemplary embodiment, the first member 21 may have a gas hole 21h. In this configuration, the gas hole 21h is connected to the gas hole 10h, so that gas can be easily supplied to the processing space S.

[0119] In one exemplary embodiment, the first member 21 may have a protruding edge 21b for being supported by the second member 22. In this configuration, the first member 21 is prevented from falling off the second member 22. In one example, by providing a support mechanism on the second member 22, the second chamber 20 is supported by the movable part 10m, and the application of unnecessary external force to the first member 21, which is a consumable part, is prevented.

[0120] In one exemplary embodiment, the second chamber 220 may include a third member 223 provided along the inner surface of the side wall of the second member 22. In this configuration, exposure of the inner surface of the second member 22 is suppressed, and wear of the second member 22 can be suppressed.

[0121] In one exemplary embodiment, the third member 223 may have an annular shape. In this configuration, it is easy to cover the entire inner surface of the second member 22.

[0122] In one exemplary embodiment, the third member 523 may be divided into multiple pieces in the circumferential direction. The third member 523 may be divided into multiple pieces in the vertical direction. In this configuration, the third member 523 is divided into smaller parts, making it easier to arrange the third member 523 inside the second member 22. Furthermore, the size of the third member as a consumable part is reduced, thereby reducing manufacturing costs. For example, the gaps between adjacent parts may not be formed linearly (flatly) but may be bent. This prevents the inner surface of the second member 22 from being exposed to the processing space S.

[0123] In one exemplary embodiment, the ceiling formed by the first member 421 may have a circular shape. The lower surface of the main body 421a of the first member 421 forming the ceiling may have a diameter larger than the inner diameter of the upper end of the third member 423. In this configuration, the inner surface of the second member 422 is prevented from being exposed to the processing space.

[0124] Although various exemplary embodiments have been described above, the present invention is not limited to the above-described exemplary embodiments, and various additions, omissions, substitutions, and modifications may be made. Furthermore, elements in different embodiments may be combined to form other embodiments.

[0125] For example, in other embodiments, the substrate processing apparatus may be another type of plasma processing apparatus, such as an inductively coupled plasma processing apparatus, an electron cyclotron resonance (ECR) plasma processing apparatus, or a plasma processing apparatus that generates plasma using microwaves. In still other embodiments, the substrate processing apparatus may be a substrate processing apparatus configured to perform substrate processing other than plasma processing.

[0126] The transfer module CTM does not have to be movable, but may be fixed and connected to a first chamber of the substrate processing apparatus having the second chamber 20. Instead of the transfer module CTM, the transfer module TM may be used as a module that transfers the second chamber 20 out of the internal space of the first chamber 10.

[0127] Furthermore, although the embodiment in which the second chamber is supported by the clamp 50 has been shown, for example, a protrusion that protrudes upward may be provided on the second chamber, and the protrusion may be supported by the movable part 10m. Furthermore, the embodiment in which the contact 40 is in electrical contact with the second member has been shown, but for example, the contact may be formed on the bottom part 22b of the second member 22, and a recess for accommodating the contact may be formed in the conductor part 38.

[0128] From the foregoing, it will be understood that various embodiments of the present disclosure have been described herein for purposes of illustration, and that various modifications may be made without departing from the scope and spirit of the present disclosure. Accordingly, the various embodiments disclosed herein are not intended to be limiting, with the true scope and spirit being indicated by the appended claims.

[0129] Various exemplary embodiments included in the present disclosure are described below. [E1] a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a side wall and supporting the first member; the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The substrate processing apparatus, wherein the first member and the second member are configured as separate members and are separable from each other. [E2] The substrate processing apparatus according to [E1], wherein the first member and the second member are formed of different materials. [E3] The substrate processing apparatus according to [E2], wherein the first member is made of a Si-containing material. [E4] the first member is made of any one of Si, SiC, SiO2, and Si3N4, The substrate processing apparatus according to [E3], wherein the second member is made of a metal material. [E5] The substrate processing apparatus according to any one of [E1] to [E5], wherein the first member has a gas hole. [E6] The substrate processing apparatus according to any one of [E1] to [E5], wherein the first member has a protruding edge portion that is engaged with the second member. [E7] The substrate processing apparatus according to any one of [E1] to [E6], further comprising a third member provided along an inner surface of the side wall of the second member. [E8] The substrate processing apparatus according to [E7], wherein the third member has an annular shape. [E9] The substrate processing apparatus according to [E8], wherein the third member is divided into a plurality of parts in the circumferential direction. [E10] The substrate processing apparatus according to any one of [E7] to [E9], wherein the third member is divided into a plurality of parts in the vertical direction. [E11] The substrate processing apparatus according to any one of [E7] to [E10], wherein the ceiling formed by the first member has a circular shape and a diameter larger than an inner diameter of an upper end of the third member. [Explanation of symbols]

[0130] 1...substrate processing apparatus, 10...first chamber, 20...second chamber (inner chamber assembly), 21...first member, 22...second member, 30...substrate support (mounting table), 38...conductor portion (grounding portion), W...substrate.

Claims

1. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the second chamber includes an insulating member interposed between the first member and the second member and electrically insulating the first member from the second member; the second member supports the first member via the insulating member, The substrate processing apparatus, wherein the first member constitutes an upper electrode.

2. The substrate processing apparatus according to claim 1 , wherein the first member and the second member are formed of different materials.

3. The substrate processing apparatus according to claim 2 , wherein the first member is made of a Si-containing material.

4. The first member is made of Si, SiC, or SiO ２ and Si ３ N ４ It is configured to include one of the following: The substrate processing apparatus according to claim 3 , wherein the second member is made of a metal material.

5. The substrate processing apparatus according to claim 1 , wherein the first member has a gas hole.

6. The substrate processing apparatus according to claim 1 , wherein the first member has a protruding edge portion that is engaged with the second member.

7. The substrate processing apparatus according to claim 1 , further comprising a third member provided along an inner surface of the side wall of the second member.

8. The substrate processing apparatus according to claim 7 , wherein the third member has an annular shape.

9. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; an insulating member interposed between the first member and the second member to electrically insulate the first member from the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the second member supports the first member via the insulating member, The first member constitutes an upper electrode.

10. The first chamber comprises: a movable part configured to be movable upward and downward; a lift mechanism configured to move the movable part upward and downward, The substrate processing apparatus according to claim 1 , wherein the second chamber is releasably fixed to the movable portion by the clamp.

11. The substrate processing apparatus according to claim 6 , wherein the second member includes a top portion that is engaged with the protruding edge portion.

12. The first chamber comprises: a movable part configured to be movable upward and downward; a lift mechanism configured to move the movable part upward and downward, The substrate processing apparatus according to claim 11 , wherein the clamp is connected to the ceiling portion and releasably fixes the second member to the movable portion.

13. The substrate processing apparatus according to claim 10 , wherein the clamp connects to an upper portion of the side wall and releasably fixes the second member to the movable portion.

14. the first member has a protruding edge portion that is engaged with the second member, The inner chamber assembly of claim 9 , wherein the second member has a top portion that is engaged with the flange.

15. The inner chamber assembly according to claim 9 , further comprising a third member provided along an inner surface of the side wall of the second member.

16. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The substrate processing apparatus, wherein the third member has an annular shape and is divided into a plurality of parts in the circumferential direction.

17. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The substrate processing apparatus, wherein the third member is divided into a plurality of parts in the vertical direction.

18. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The substrate processing apparatus, wherein the ceiling formed by the first member has a circular shape and a diameter larger than an inner diameter of an upper end of the third member.

19. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the third member has an annular shape, The substrate processing apparatus, wherein the ceiling formed by the first member has a circular shape and a diameter larger than an inner diameter of an upper end of the third member.

20. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the third member has an annular shape and is divided into a plurality of parts in the circumferential direction, The substrate processing apparatus, wherein the ceiling formed by the first member has a circular shape and a diameter larger than an inner diameter of an upper end of the third member.

21. a first chamber in which a stage for placing a substrate is disposed; a second chamber disposed within the first chamber; a clamp releasably securing the second chamber to the first chamber; a release mechanism configured to release the clamp from securing the second chamber; The second chamber comprises: a first member including a ceiling provided above the mounting table; a second member including a sidewall and supporting the first member; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The third member is divided into a plurality of parts in the vertical direction, The substrate processing apparatus, wherein the ceiling formed by the first member has a circular shape and a diameter larger than an inner diameter of an upper end of the third member.

22. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The third member is annular and divided into a plurality of parts in the circumferential direction of the inner chamber assembly.

23. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The third member is an inner chamber assembly divided into a plurality of parts in the vertical direction.

24. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, An inner chamber assembly, wherein the ceiling formed by the first member has a circular shape and a diameter larger than the inner diameter of the upper end of the third member.

25. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the third member has an annular shape, An inner chamber assembly, wherein the ceiling formed by the first member has a circular shape and a diameter larger than the inner diameter of the upper end of the third member.

26. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, the third member has an annular shape and is divided into a plurality of parts in the circumferential direction, An inner chamber assembly, wherein the ceiling formed by the first member has a circular shape and a diameter larger than the inner diameter of the upper end of the third member.

27. An inner chamber assembly provided in a chamber of a substrate processing apparatus, comprising: a first member including a ceiling provided above a mounting table on which a substrate is placed; a second member including a sidewall and supporting the first member; a connecting member connected to a clamp that releasably secures the first and second members to the chamber; a third member provided along an inner surface of the side wall of the second member, the second member is electrically connected to a grounded portion that is provided so as to surround the mounting table, The first member and the second member are configured as separate members and are formed to be separable from each other, The third member is divided into a plurality of parts in the vertical direction, An inner chamber assembly, wherein the ceiling formed by the first member has a circular shape and a diameter larger than the inner diameter of the upper end of the third member.

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