Storage equipment

Abstract

To provide a storage facility that can keep cleanliness in the storage facility even when the supply of clean air from above the storage facility is not uniform with respect to the storage facility.SOLUTION: A storage facility (1) installed in a clean room (CR) in which clean air is supplied from a fan filter unit (FFU) installed on a ceiling (100) to keep cleanliness in the room is provided with a storage rack (2) on which containers (50) are placed, and, at least at a position (P) which is the ceiling of the storage rack (2), a plurality of holes (4) are provided to allow clean air supplied from the fan filter unit (FFU) into the clean room (CR) to pass through the storage facility (1).SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a storage facility. [Background technology]

[0002] It has been known that storage shelves for storing products that require high levels of cleanliness, such as semiconductors and liquid crystal panels, are installed in clean rooms. For example, Patent Document 1 discloses a storage shelf that is provided with a rectifying means that splits the air (clean air) blown out from the ceiling of the clean room into the front and rear of the storage shelf where the ceiling is installed, and directs the air that flows downward toward the storage shelf. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2002-338007 Summary of the Invention [Problem to be solved by the invention]

[0004] In addition, in clean rooms, the cleanliness of the air inside the room can be maintained by supplying clean air to the clean room from a fan filter unit installed in the ceiling. In such clean rooms, the required level of air cleanliness can result in the area in which the fan filter unit is installed being smaller than the area of ​​the ceiling of the clean room. In this case, there may be areas above the storage shelves where the fan filter unit is installed and areas where the fan filter unit is not installed, resulting in an uneven flow of clean air from the ceiling toward the storage shelves, which can easily cause stagnation of air inside the storage shelves.

[0005] An aspect of the present invention aims to maintain the cleanliness within a storage facility even when clean air is not uniformly supplied to the storage facility from above. [Means for solving the problem]

[0006] In order to solve the above problems, one aspect of the storage facility of the present invention is a storage facility installed in a clean room where cleanliness within the room is maintained by supplying clean air from a fan filter unit installed on the ceiling, and is equipped with storage shelves on which items are placed, and at least at the position that forms the ceiling of the storage shelves, multiple holes are provided to allow the clean air supplied from the fan filter unit into the clean room to pass through into the interior of the storage facility. [Effects of the Invention]

[0007] According to one aspect of the present invention, even if the supply of clean air to the storage facility from above the storage facility is not uniform, the cleanliness within the storage facility can be maintained. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a longitudinal cross-sectional view of a storage facility according to an embodiment of the present invention. [Figure 2] FIG. 2 is a cross-sectional view of the storage facility. [Figure 3] FIG. 2 is a front view of the storage facility. [Figure 4] FIG. 2 is a rear view of the storage facility. [Figure 5] FIG. 10 is a diagram showing the position where the fan filter unit is installed on the ceiling of the clean room in which the storage facility is installed. [Figure 6] FIG. 10 is a diagram showing the air flow within the storage facility. [Figure 7] FIG. 10 is a top view showing an example of the arrangement of punching plates in the storage facility. [Figure 8] 10A and 10B are diagrams showing the results of airflow analysis within the above storage facility and a conventional storage facility. [Figure 9] 10 is a table showing the results of measuring the oxygen concentration in the storage facility when the opening rate of the punching plate is changed. DETAILED DESCRIPTION OF THE INVENTION

[0009] An embodiment of the present invention will be described in detail below. However, the following description is an example of a storage facility 1 according to the present invention, and the technical scope of the present invention is not limited to the illustrated example. For ease of explanation, the following description will be given assuming that the vertical direction of the storage facility 1 in FIG. 1 is the Y-axis direction, the direction from the rear surface 52 toward the front surface 51 of the storage facility 1 is the Z-axis direction, and the direction perpendicular to the Y-axis and Z-axis is the X-axis direction.

[0010] [Outline of storage facilities] Products that require high levels of cleanliness, such as semiconductors and liquid crystal panels, may be stored in storage facilities installed in a clean room CR, which maintains the cleanliness of the air in the room by supplying clean air into the room from a fan filter unit (hereinafter referred to as FFU) installed on the ceiling 100.

[0011] In this case, if there are areas above the storage facility where FFUs are installed and areas where FFUs are not installed, the flow of clean air from above the storage facility to the facility will not be uniform. As a result, clean air will not be introduced into the storage facility with a uniform flow, and clean air will not flow uniformly inside the storage facility either, making it easier for air to stagnate within the facility and making it difficult to maintain the cleanliness within the facility.

[0012] Fig. 1 is a longitudinal cross-sectional view of a storage facility 1 according to an embodiment of the present invention, taken along a plane parallel to the Y-axis and Z-axis. As shown in Fig. 1, the storage facility 1 is installed in a clean room CR, which maintains the cleanliness of the room by supplying clean air from an FFU installed on a ceiling 100, and is equipped with a storage shelf 2 on which containers 50 are placed. Furthermore, at least at position P, which forms the ceiling of the storage shelf 2, a plurality of holes 4 are provided to allow the clean air supplied from the FFU into the clean room CR to pass into the interior of the storage facility 1.

[0013] As a result, even if the flow of clean air from above the storage facility 1 toward the storage facility 1 is not uniform, the storage facility 1 can introduce clean air into the storage facility 1 with a uniform flow, thereby allowing clean air to flow uniformly within the storage facility 1. As a result, it is possible to realize a storage facility 1 that can suppress the occurrence of stagnant air within the storage facility 1 and maintain the cleanliness within the storage facility 1.

[0014] [Storage equipment] Fig. 2 is a cross-sectional view of the storage facility 1 taken along a plane parallel to the X-axis and Z-axis. Fig. 3 is a front view of the storage facility 1. Fig. 4 is a rear view of the storage facility 1. In Fig. 4, for ease of understanding, the storage section 10S of the storage facility 1 is also shown by a dashed line.

[0015] As shown in Figures 1 to 4, the storage facility 1 is placed in a clean room CR. The clean room CR maintains the cleanliness of the air in the room by supplying clean air into the room from an FFU installed on the ceiling 100. The FFU supplies clean air into the clean room CR from the ceiling 100 of the clean room CR toward the floor of the clean room CR.

[0016] The storage facility 1 includes a storage shelf 2, a punching plate 3, a side portion 5, a stacker crane 20, an exhaust portion 30, and a cover 40.

[0017] (storage shelf) Containers 50 (items) are placed on the storage shelf 2. On the storage shelf 2, storage sections 10S for storing the containers 50 are arranged side by side in the Y-axis direction and the X-axis direction.

[0018] The container 50 is used to store semiconductors, liquid crystal panels, etc., and is, for example, a FOUP (Front Opening Unified Pod). A flange is formed on the top surface of the container 50 so that it can be gripped by a hoist-type transport vehicle D. In addition, an engagement groove is formed on the bottom surface of the container 50 with which a positioning pin engages, and when the container 50 is stored in the storage unit 10S, the placement position is determined by the positioning pin arranged on the top surface of the placement table 10 of the storage unit 10S.

[0019] The container 50 is also provided with a mechanism for injecting nitrogen gas as an inert gas. Although not shown, the container 50 is provided with, for example, an air inlet and an exhaust port. The air inlet is provided with an injection-side on-off valve, and the exhaust port is provided with a discharge-side on-off valve. The injection-side on-off valve and the discharge-side on-off valve are biased in a closing direction by a biasing means such as a spring. The injection-side on-off valve is configured to open when the discharge pressure of the nitrogen gas supplied to the air inlet reaches or exceeds a first predetermined pressure higher than atmospheric pressure, and the discharge-side on-off valve is configured to open when the pressure inside the container 50 reaches or exceeds a second predetermined pressure higher than atmospheric pressure. The container 50 is, for example, an airtight container made of synthetic resin.

[0020] The plurality of storage units 10S are configured to store containers 50. Each of the plurality of storage units 10S is provided with a plate-shaped mounting table 10 on which the container 50 is placed and supported. The above-mentioned positioning pins are provided on the upper surface of the mounting table 10.

[0021] The storage unit 10S is equipped with a mechanism for injecting nitrogen gas into the container 50. Although not shown, for example, the mounting table 10 is provided with a discharge nozzle that supplies nitrogen gas into the inside of the container 50 and a discharge pipe that discharges gas from the inside of the container 50. A supply pipe that supplies nitrogen gas from a predetermined location is connected to the discharge nozzle. The end of the discharge pipe opposite the container 50 is opened near each storage unit 10S inside the storage facility 1. As a result, excess nitrogen gas from the container 50 is discharged into the storage facility 1.

[0022] Note that some of the multiple storage units 10S in the storage shelf 2 may be storage units 10S configured to inject nitrogen gas. In this case, the container 50 provided with a configuration for injecting nitrogen gas is placed in the storage unit 10S configured to inject nitrogen gas into the container 50.

[0023] As shown in Fig. 2, the storage shelf 2 has a pair of opposing storage shelves 2A and 2B. The storage shelves 2A and 2B are arranged facing each other at a predetermined distance and generally parallel to the X-axis direction, with the direction in which the stacker crane 20 and the container 50 are transferred facing inward. The stacker crane 20, which will be described later, is arranged between the storage shelves 2A and 2B.

[0024] The side part 5 surrounds the area where the storage shelves 2A and 2B and the stacker crane 20 are installed. The side part 5 has a front surface 51, a rear surface 52 facing the front surface 51, and a pair of side surfaces 53 connecting the front surface 51 and the rear surface 52 at both ends of the front surface 51 in the X-axis direction. As shown in FIG. 2, the rear surface 52 and the pair of side surfaces 53 have no openings, but as shown in FIG. 3, openings 511, 512, 513, 514, and 515 are formed in the front surface 51. The storage facility 1 is installed so that the rear surface 52 is along the wall of the clean room CR.

[0025] Openings 511, 512, and 513 are all openings through which containers 50 pass when transporting containers 50 from the outside to the inside of storage facility 1, or from the inside to the outside of storage facility 1. A loading platform 11 for receiving and delivering containers 50 is installed inside opening 511 of storage facility 1. For example, a container 50 transported from storage section 10S by stacker crane 20 is placed on loading platform 11, and then the container 50 is picked up by transport vehicle D and transported to a predetermined location.

[0026] A conveyor CV is installed at the opening 512 so as to pass through the opening 512. For example, a container 50 transported by a transport vehicle D is placed on the conveyor CV, and the container 50 is transported from the outside to the inside of the storage facility 1 by the conveyor CV, and then transported by the stacker crane 20 to one of the plurality of storage sections 10S.

[0027] A loading platform (not shown) for receiving and transferring containers 50 is installed inside the storage facility 1 at the opening 513. For example, a container 50 transported from the storage section 10S by the stacker crane 20 is placed on the loading platform, and a person picks up the container 50 and transports it to a predetermined location. Since a person will be working at the opening 513, an opening / closing part that can be opened and closed relative to the opening 513 is installed at the opening 513.

[0028] The opening 514 is an opening through which workers enter and exit during maintenance of the storage facility 1, etc. The opening 514 is also provided with an opening / closing section that can be opened and closed relative to the opening 514. The opening 515 is formed along the X-axis direction at the lower end of the front surface 51. The opening 515 functions as an exhaust port for the exhaust section 30, which will be described later.

[0029] (stacker crane) The stacker crane 20 (see FIGS. 1 and 2) is configured to be able to transport containers 50 to the multiple storage sections 10S and openings 511, 512, and 513. As shown in FIG. 1, the stacker crane 20 is equipped with a traveling carriage 21 that can travel freely along traveling rails (not shown) provided on the floor between the storage shelf 2A and the storage shelf 2B, a mast 22 erected on the traveling carriage 21, and a lifting platform 24 that moves up and down along the mast 22.

[0030] Although not shown, the lifting platform 24 is equipped with a transfer device that transfers the container 50 to the storage section 10S, etc. The transfer device has a plate-shaped mounting support that supports the container 50. The mounting support moves between a protruding position where it protrudes into the interior of the storage section 10S and a retracted position where it retracts toward the lifting platform 24. By the movement of the mounting support and the raising and lowering operation of the lifting platform 24, the container 50 placed on the mounting support is stored in the storage section 10S, and the container 50 stored in the storage section 10S is removed from the mounting support. The mounting support is also configured to be able to protrude toward the load receiving tables of the openings 511 and 513 and the conveyor CV that passes through opening 512.

[0031] (Exhaust section) As shown in FIG. 3 , the exhaust unit 30 is provided at the bottom of the front surface 51 and exhausts air inside the storage facility 1 to the outside. The exhaust unit 30 allows clean air introduced from the FFUs through the holes 4 to flow efficiently from the top to the bottom of the storage facility 1, thereby enabling clean air to flow uniformly within the storage facility 1. Furthermore, by installing the exhaust unit 30, it is possible to prevent air from flowing out of the storage facility 1 through the openings 511, 512, 513, and 514. In this embodiment, as shown in FIG. 3 , 17 exhaust units 30 are installed, but this is not limited to the above. The number and air volume of the exhaust units 30 are set appropriately depending on the size of the storage facility 1.

[0032] (Punching plate) The punched plate 3 is installed at least at a position P that will be the ceiling of the storage shelf 2. The punched plate 3 has a plurality of holes 4 that allow clean air supplied from the FFU into the clean room CR to pass through into the storage facility 1.

[0033] Position P that will become the ceiling of storage shelf 2 indicates the position of the top of storage shelf 2 within storage facility 1, and position P that will become the ceiling of storage shelf 2 may coincide with the position that will become the ceiling of storage facility 1. For example, as shown in FIG. 1 , perforated plate 3 may be installed so as to cover from the upper edge of front surface 51 to the upper edge of rear surface 52. In other words, perforated plate 3 may be installed over the entire position that will become the ceiling of storage facility 1. The perforated plate 3 is not limited to the above, and it is sufficient that it is installed at least at position P that will become the ceiling of storage shelf 2, and the range can be set appropriately.

[0034] FIG. 5 is a diagram showing the position where the FFU is installed on the ceiling of the clean room CR in which the storage facility 1 is installed. For ease of understanding, the location of the storage facility 1 in the clean room CR is shown by a dashed line in FIG. 5. As shown in FIG. 5, the storage facility 1 is arranged along the wall 101 of the clean room CR. FIG. 6 is a diagram showing the air flow within the storage facility 1 / 200, where 6001 in FIG. 6 shows the air flow within the conventional ceiling-less storage facility 200 and 6002 in FIG. 6 shows the air flow within the storage facility 1.

[0035] The number of FFUs to be installed in the clean room CR is determined by the required cleanliness level, and therefore, there may be some areas on the ceiling 100 above the storage facility 1 (storage facility 200) where FFUs are installed and some areas where FFUs are not installed, as shown in Fig. 5. In such cases, the flow of clean air from above the storage facility 200 toward the storage facility 200 becomes uneven, and there is a possibility that clean air will be introduced into the storage facility 200 without a uniform flow.

[0036] Here, "the flow of clean air from above the storage facility 200 to the storage facility 200 is not uniform" means that the flow rate of the clean air when it reaches the storage facility 200 is not uniform within an area equivalent to the area of ​​the storage facility 200 when viewed in a plan view (hereinafter referred to as the facility footprint of the storage facility 200).

[0037] Furthermore, "clean air is introduced into storage facility 200 in a non-uniform flow state" means that the flow rate of the clean air is not uniform when it passes through the position that forms the ceiling of storage facility 200 within the equipment footprint of storage facility 1 when storage facility 200 is viewed in a plan view.

[0038] If clean air is introduced into the storage facility 200 in a state where the flow is not uniform, the air may flow upward in a part of the storage facility 200, as shown by 6001 in Fig. 6. This may cause particles generated by, for example, the stacker crane 20 to be lifted up into the upper part of the storage facility 200, which may reduce the cleanliness of the storage facility 200.

[0039] In contrast, the storage facility 1 is provided with a perforated plate 3 at least at position P, which is the ceiling of the storage shelves 2, so when clean air supplied from the FFU into the clean room CR reaches the storage facility 1, the clean air is introduced into the storage facility 1 through the holes 4. Therefore, even if clean air with an uneven flow is supplied to the storage facility 1 from the ceiling 100, the perforated plate 3 straightens the clean air, allowing the clean air to be introduced into the storage facility 1 so that the flow becomes uniform within the storage facility 1. This makes the flow of clean air within the storage facility 1 uniform, as shown by 6002 in Figure 6, and therefore makes it possible to prevent stagnation of air within the storage facility 1.

[0040] Here, "clean air can be introduced into the storage facility 1 so that the flow within the storage facility 1 is uniform" means that clean air is introduced into the storage facility 1 so that the flow rate of the clean air passing through the punching plate 3 is approximately uniform within the equipment footprint of the storage facility 1 when viewed from above. Also, "the flow within the storage facility 1 is uniform" means that the flow rate of the clean air is approximately uniform within the equipment footprint of the storage facility 1 at each height of the storage facility 1.

[0041] On the other hand, when nitrogen gas is injected into container 50, if air with a locally reduced oxygen concentration leaks out of storage facility 1 through openings 511, 512, 513, and 514, there is a risk that workers and others around storage facility 1 may inhale air with a reduced oxygen concentration, which is undesirable.

[0042] In contrast, by introducing clean air into the storage facility 1 so that the flow is uniform within the storage facility 1, it is possible to prevent a significant drop in the oxygen concentration locally within the storage facility 1. Therefore, it is possible to prevent air with a significantly reduced oxygen concentration from being discharged to the outside of the storage facility 1 through the openings 511, etc.

[0043] The diameter, pitch, and opening ratio of the holes 4 in the punched plate 3 are not particularly limited, but the hole diameter is preferably 3φ or more and 5φ or less, and more preferably 5φ. The pitch of the holes 4 is preferably 4 mm or more and 10 mm or less, and more preferably 8 mm or more and 10 mm or less. The opening ratio is preferably set in the range of 20% to 40%, and more preferably 22% to 36%.

[0044] FIG. 7 is a top view showing an example of the arrangement of the punching plate 3 of the storage facility 1. 7001 in FIG. 7 is a cut-out view of only the area where the storage facility 1 is installed in FIG. 4. 7002 in FIG. 7 is a top view showing an example of the arrangement of the punching plate 3 of the storage facility 1. In 7002 in FIG. 7, areas shown with the same hatching indicate areas where the aperture ratio of the multiple holes 4 is the same. As shown in FIG. 7, the area R where the multiple holes 4 are provided at position P, which becomes the ceiling of the storage facility 1, includes at least a first area R1 and a second area R2. In the first area R1, the aperture ratio of the multiple holes 4 is set to a first aperture ratio. In the second area R2, the aperture ratio of the multiple holes 4 is set to a second aperture ratio which is higher than the first aperture ratio.

[0045] As shown in 7001 and 7002 in FIG. 7, in the storage facility 1, the entire position that will become the ceiling of the storage facility 1 is region R, and holes 4 are provided in the entire position that will become the ceiling of the storage facility 1. Furthermore, a first region R1 having a first opening ratio is arranged in a region of the ceiling 100 corresponding to a location where an FFU is arranged, and a second region R2 having a second opening ratio is arranged in a region of the ceiling 100 corresponding to a location where an FFU is not arranged. In other words, the first region R1 is arranged in a region R that is close to the FFU, and the second region R2 is arranged in a region R that is farther away from the FFU than the first region R1. In other words, in a region of the region R that is farther away from the FFU than the first region R1, the opening ratio of the punching plate 3 is set to a second opening ratio that is higher than the first opening ratio.

[0046] This makes it easier for clean air to pass into the interior of the storage facility 1 in the second area R2, which is farther away from the FFU, than in the first area R1, so that clean air can be introduced more uniformly into the storage facility 1 more efficiently.

[0047] (cover) 1, the storage facility 1 may be provided with a cover 40 that guides clean air supplied from the FFU to the clean room CR up to a position that will become the ceiling of the storage facility 1. The cover 40 extends from the storage facility 1 to at least the ceiling 100 of the clean room CR around the upper end of the storage facility 1, and encloses the FFU.

[0048] Without the cover 40, for example, in the clean room CR, clean air from the FFU may flow into an area where no punching plate 3 is installed, potentially reducing the amount of clean air introduced into the storage facility 1. If the amount of clean air flowing into the storage facility 1 decreases, stagnation of air within the storage facility 1 is more likely to occur.

[0049] In contrast, by connecting at least a portion of the clean air supply port of the FFU to the storage facility 1 with the cover 40, it is possible to reliably guide clean air from the FFU enclosed by the cover 40 into the storage facility 1. Note that the cover 40 is not limited to the above, and may extend from the floor to the ceiling 100 of the clean room CR to enclose the storage facility 1 and the FFU.

[0050] [Airflow analysis] FIG. 8 shows the results of airflow analysis within storage facility 1 and conventional storage facility 200. 8001 in FIG. 8 shows the results of airflow analysis within conventional storage facility 200 where punched plates 3 are not installed, and 8002 in FIG. 8 shows the results of airflow analysis within storage facility 1 where punched plates 3 are installed. The dimensions of storage facility 1 are 14,835 mm wide, 8,370 mm high, and 1,430 mm deep, and the FFUs are arranged as shown in FIG. 5. The punched plates 3 installed in storage facility 1 are installed over the entire top surface of storage facility 1 and have a uniform opening ratio.

[0051] As shown in 8001 and 8002 of Fig. 8, in storage facility 200, variations in the air flow velocity within storage facility 200 are observed, whereas in storage facility 1, no variations in the air flow velocity within storage facility 1 are observed. In this way, by installing perforated plate 3 at a position that will become the ceiling of storage shelf 2, the air flow within storage facility 1 becomes uniform. It can be seen that this makes it possible to prevent stagnation of air within storage facility 1.

[0052] [Oxygen concentration] Figure 9 is a table showing the results of measuring the minimum oxygen concentration in the storage facility 1 when the opening ratio of the perforated plate 3 was varied. For the measurements in Figure 9, the size of the storage facility 1, the arrangement of the FFUs, and other factors were the same as those used in the airflow analysis described above, and the number of exhaust units 30 was 13. The storage units 10S into which nitrogen gas was injected were 200, located within the range T shown in Figure 4, on the storage shelves 2A and 2B. The minimum oxygen concentration of the air exhausted from the exhaust units 30 was measured for each case where perforated plates 3 with different opening ratios were installed, with the openings 513 open and closed. For the concentration assessment, a minimum oxygen concentration greater than 19.5% was considered acceptable, and a minimum oxygen concentration of 19.5% or less was considered unacceptable. For the measurements in Figure 9, the storage facility 1 had openings 511, 512, and 515 open, and opening 514 closed.

[0053] In Plans 1 to 4, with the opening 513 open, the minimum oxygen concentration was measured when punched plates 3 with opening rates of 20%, 25%, and 30% were placed across the entire top surface of the storage facility 1, and when no punched plates 3 were installed.The results of Plans 1 to 4 showed that only when punched plates 3 with an opening rate of 20% were installed, the concentration was judged to be OK.

[0054] In Plans 5 to 8, with the opening 513 closed, the oxygen concentration was measured when punching plates 3 with opening rates of 20%, 25%, and 30% were placed across the entire top surface of the storage facility 1, and when no punching plates 3 were installed.The results of Plans 5 to 8 showed that the concentration was OK when punching plates 3 with opening rates of 20%, 25%, and 30% were installed.

[0055] 9, it was found that the installation of the punching plate 3 can suppress the decrease in oxygen concentration when the opening 513 is closed. It was also found that the installation of the punching plate 3 and setting the opening ratio to 20% can suppress the decrease in oxygen concentration even when the opening 513 is open.

[0056] 〔summary〕 The storage facility (1) according to aspect 1 of the present invention is a storage facility (1) installed in a clean room (CR) where cleanliness within the room is maintained by supplying clean air from a fan filter unit (FFU) installed in the ceiling (100), and is equipped with a storage shelf (2) on which items (containers 50) are placed, and at least at a position (P) which forms the ceiling of the storage shelf (2), a plurality of holes (4) are provided to allow the clean air supplied from the fan filter unit (FFU) into the clean room (CR) to pass into the interior of the storage facility (1).

[0057] According to the above configuration, when clean air supplied from the fan filter unit (FFU) into the clean room (CR) reaches the storage facility (1), the clean air is introduced into the storage facility (1) through the holes (4) provided in the ceiling of the storage shelf (2). Therefore, for example, by appropriately setting the positions of the holes (4), clean air can be uniformly circulated within the storage facility (1), thereby preventing stagnation of air within the storage facility (1). As a result, the cleanliness within the storage facility (1) can be maintained.

[0058] The storage facility (1) according to aspect 2 of the present invention is, in the above-mentioned aspect 1, characterized in that the region (R) in which a plurality of holes (4) are provided at a position (P) that forms the ceiling of the storage facility (1) includes at least a first region (R1) in which the opening rate of the plurality of holes (4) is set to a first opening rate, and a second region (R2) in which the opening rate of the plurality of holes (4) is set to a second opening rate that is higher than the first opening rate, and the second region (R2) may be farther from the fan filter unit (FFU) than the first region (R1).

[0059] According to the above configuration, the second area (R2), which is farther away from the fan filter unit (FFU), has a plurality of holes (1) with a higher opening ratio than the first area (R1), which is closer to the fan filter unit (FFU). This makes it easier for clean air to pass into the storage facility (1) in the second area (R2), which is farther away from the fan filter unit (FFU), than in the first area (R1), and therefore clean air can be introduced into the storage facility (1) with a more uniform flow.

[0060] The storage facility (1) according to aspect 3 of the present invention may be the same as that according to aspect 1 or 2 above, but further comprising a side portion (5) surrounding the storage facility (1) and an exhaust portion (30) provided at the bottom of the side portion (5) for exhausting air from within the storage facility (1) to the outside.

[0061] According to the above configuration, the air inside the storage facility 1 can be discharged to the outside by the exhaust section 30. Therefore, the clean air introduced from the fan filter unit (FFU) through the hole 4 can be efficiently circulated from the top to the bottom of the storage facility 1, thereby more suitably distributing the clean air uniformly inside the storage facility 1.

[0062] The storage facility (1) according to aspect 4 of the present invention, in any of aspects 1 to 3 above, further includes a cover (40) that guides the clean air supplied from the fan filter unit (FFU) to the clean room (CR) to a position that becomes the ceiling of the storage facility (1), and the cover (40) may extend at least from the storage facility (1) to the ceiling (100) of the clean room (CR) around the upper end of the storage facility (1) and surround the fan filter unit (FFU).

[0063] According to the above configuration, the cover (40) can connect the clean air supply port of the fan filter unit (FFU) to the ceiling of the storage facility (1). Therefore, clean air from the fan filter unit (FFU) enclosed by the cover (40) can be reliably supplied into the storage facility (1).

[0064] The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the claims. Embodiments obtained by appropriately combining the technical means disclosed in the embodiments are also included in the technical scope of the present invention. Furthermore, new technical features can be formed by combining the technical means disclosed in the embodiments. [Explanation of symbols]

[0065] 1 Storage equipment 2, 2A, 2B storage shelf 3 punching plate 4 holes 5 Side 30 Exhaust section 40 Cover 50 Containers (articles) 100 Cleanroom Ceiling CR Clean Room FFU Fan Filter Unit R Area with multiple holes R1 1st area R2 2nd area

Claims

1. This storage facility is installed in a clean room where clean air is supplied from a fan filter unit installed on the ceiling to maintain the cleanliness of the room. A storage shelf is provided for placing items thereon, A storage facility in which a plurality of holes are provided at least at the position that will become the ceiling of the storage shelf, allowing the clean air supplied from the fan filter unit into the clean room to pass through into the interior of the storage facility.

2. an area in which a plurality of holes are provided at a position that will become a ceiling of the storage facility includes at least a first area in which an opening rate of the plurality of holes is set to a first opening rate, and a second area in which an opening rate of the plurality of holes is set to a second opening rate that is higher than the first opening rate; the second region is farther from the fan filter unit than the first region; The storage facility of claim 1 .

3. A side portion surrounding the storage facility; The storage facility according to claim 1 , further comprising an exhaust section provided at a lower part of the side section, which exhausts air from within the storage facility to the outside.

4. a cover for guiding the clean air supplied from the fan filter unit to the clean room up to a position that becomes a ceiling of the storage facility; The storage facility according to claim 1 , wherein the cover extends from the storage facility to the ceiling of the clean room around the upper end of the storage facility and encloses the fan filter unit.

Images