Substrate Processing Equipment

Abstract

To provide a substrate processing apparatus that reduces thermal resistance between a mounting table and a refrigeration unit.SOLUTION: A substrate processing apparatus has a mounting table having a first contact surface, a refrigeration unit having a second contact surface, a lifting device capable of thermally connecting or separating the second contact surface and the first contact surface, and a heat-conductive member interposed between the first contact surface and the second contact surface, and the heat-conductive member is made of a soft metal softer than the material of the first contact surface and / or that of the second contact surface.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a substrate processing apparatus. [Background technology]

[0002] Patent Document 1 discloses that in a substrate processing apparatus comprising a refrigeration device having a refrigerator and a cold link, a mounting table having a mounting portion on which a substrate is placed, a contactor arranged on the cold link side, and a contactor arranged on the mounting table side, a soft, thermally conductive indium sheet is sandwiched between the mounting portion and the contactor arranged on the mounting table side.

[0003] Patent Document 2 discloses a holding device equipped with a rotatable stage having a base and a chuck plate provided on the upper surface of the base via an indium sheet. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2022-112921 [Patent Document 2] Patent No. 6559347 Summary of the Invention [Problem to be solved by the invention]

[0005] In one aspect, the present disclosure provides a substrate processing apparatus that reduces thermal resistance between a mounting table and a refrigeration unit. [Means for solving the problem]

[0006] In order to solve the above problem, according to one aspect, a refrigeration system includes a mounting table having a first contact surface, a refrigeration system having a second contact surface, a lifting device capable of thermally connecting or separating the second contact surface and the first contact surface, and a heat conducting member interposed between the first contact surface and the second contact surface, wherein the heat conducting member is softer than the material of the first contact surface and / or the material of the second contact surface. soft metal sheet formed by The refrigeration device has a recess that accommodates the heat conduction member, and has a space between a side wall of the recess and a side surface of the heat conduction member disposed in the recess. A substrate processing apparatus is provided. [Effects of the Invention]

[0007] According to one aspect, it is possible to provide a substrate processing apparatus that reduces the thermal resistance between a mounting table and a refrigeration unit. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 3 is a cross-sectional view showing an example of the configuration of the substrate processing apparatus according to the first embodiment when a mounting table is rotated. [Figure 2] FIG. 3 is a cross-sectional view showing an example of the configuration of the substrate processing apparatus according to the first embodiment when cooling the mounting table. [Figure 3] FIG. 2 is a view showing an example of a contact portion between a mounting table and a cold link in the substrate processing apparatus according to the first embodiment. [Figure 4] FIG. 10 is a view showing an example of a contact portion between a mounting table and a cold link in a substrate processing apparatus according to a reference example. [Figure 5] FIG. 10 is a view showing an example of a contact portion between a mounting table and a cold link in a substrate processing apparatus according to a second embodiment. [Figure 6] 10 is a graph showing an example of a temperature change when the mounting table is cooled. [Figure 7] 10 is a graph showing an example of a temperature change of a mounting table. DETAILED DESCRIPTION OF THE INVENTION

[0009] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. In the drawings, the same components are denoted by the same reference numerals, and redundant explanations may be omitted.

[0010] <Substrate Processing Apparatus 1 According to First Embodiment> An example of a substrate processing apparatus 1 according to a first embodiment will be described with reference to Fig. 1 and Fig. 2. Fig. 1 is a cross-sectional view showing an example of the configuration of the substrate processing apparatus 1 according to the first embodiment when the mounting table 20 is rotating. Fig. 2 is a cross-sectional view showing an example of the configuration of the substrate processing apparatus 1 according to the first embodiment when the mounting table 20 is cooling.

[0011] The substrate processing apparatus 1 may be, for example, a substrate processing apparatus (e.g., a CVD (Chemical Vapor Deposition) apparatus, an ALD (Atomic Layer Deposition) apparatus, etc.) that supplies a processing gas into a processing vessel 10 and performs a desired processing (e.g., a film formation process, etc.) on a substrate W. The substrate processing apparatus 1 may also be, for example, a substrate processing apparatus (e.g., a PVD (Physical Vapor Deposition) apparatus, etc.) that supplies a processing gas into the processing vessel 10 and sputters a target provided in the processing vessel 10 to perform a desired processing (e.g., a film formation process, etc.) on a substrate W.

[0012] The substrate processing apparatus 1 includes a processing chamber 10, a mounting table 20 on which a substrate W is placed inside the processing chamber 10, a refrigeration unit 30, a rotation unit 40 that rotates the mounting table 20, and an elevation unit 50 that raises and lowers the refrigeration unit 30. The substrate processing apparatus 1 also includes a slip ring 60 for supplying power to the chuck electrode 21 of the rotating mounting table 20. The substrate processing apparatus 1 also includes a control unit 70 that controls various devices such as the refrigeration unit 30, the rotation unit 40, and the elevation unit 50.

[0013] The processing vessel 10 forms an internal space 10S. The processing vessel 10 is configured so that the internal space 10S can be depressurized to an ultra-high vacuum by operating an exhaust device (not shown) such as a vacuum pump. The processing vessel 10 is also configured so that a desired gas used for substrate processing is supplied to the processing vessel 10 via a gas supply pipe (not shown) that communicates with a processing gas supply device (not shown).

[0014] A mounting table 20 on which a substrate W is placed is provided inside the processing vessel 10. The mounting table 20 is made of a material with high thermal conductivity (e.g., Cu). The mounting table 20 includes an electrostatic chuck. The electrostatic chuck has a chuck electrode 21 embedded in a dielectric film. A predetermined potential is applied to the chuck electrode 21 via a slip ring 60 and wiring 63, which will be described later. With this configuration, the substrate W can be attracted by the electrostatic chuck and fixed to the upper surface of the mounting table 20. The mounting table 20 has a first contact surface that is thermally connected to a second contact surface of a refrigeration device 30, which will be described later. In the example shown in FIGS. 1 and 2, the first contact surface is formed on the lower surface of the mounting table 20.

[0015] A refrigeration device 30 is provided below the mounting table 20. The refrigeration device 30 is configured by stacking a refrigerator 31 and a cold link 32. The cold link 32 can also be referred to as a refrigeration support. The refrigerator 31 holds the cold link 32 and cools the upper surface of the cold link 32 to an extremely low temperature. From the viewpoint of cooling capacity, the refrigerator 31 preferably uses a Gifford-McMahon (GM) cycle. The cold link 32 is fixed on top of the refrigerator 31, and its upper portion is housed inside the processing vessel 10. The cold link 32 is formed of a material with high thermal conductivity (e.g., Cu) and has a substantially cylindrical outer shape. The cold link 32 is arranged so that its center coincides with the central axis CL of the mounting table 20. The cold link 32 has a second contact surface that is thermally connected to the first contact surface of the mounting table 20. In the example shown in FIGS. 1 and 2, the second contact surface is formed on the upper surface of the cold link 32.

[0016] A heat conductive member 33 is disposed on the upper surface of the cold link 32. When the mounting table 20 and the refrigeration device 30 are thermally disconnected (see FIG. 1), the heat conductive member 33 is disposed on the upper surface of the cold link 32 of the refrigeration device 30. When the mounting table 20 and the refrigeration device 30 are thermally connected (see FIG. 2), the heat conductive member 33 is interposed between the lower surface (first contact surface) of the mounting table 20 and the upper surface (second contact surface) of the cold link 32 of the refrigeration device 30.

[0017] The heat conductive member 33 is made of a soft metal that is elastically deformable. In other words, the heat conductive member 33 is made of a soft metal that is more elastically deformable than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. In other words, the heat conductive member 33 is made of a metal that is less hard (e.g., Vickers hardness) than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. The heat conductive member 33 is made of a material that can be used in the vacuum atmosphere of the internal space 10S and at the extremely low temperatures cooled by the refrigerator 31. The heat conductive member 33 is made of a material that does not affect the substrate processing process. The heat conductive member 33 is preferably made of a material with high thermal conductivity. However, the material of the heat conductive member 33 may be a material with lower thermal conductivity than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. Specifically, the soft metal may be indium, silver, tin, or the like. Furthermore, the heat conducting member 33 is formed as a sheet-like member (a soft metal sheet, for example, an indium sheet, etc.). As a result, even if the material of the heat conducting member 33 has a lower thermal conductivity than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32, by forming the heat conducting member 33 as a thin sheet-like member, the effect on the overall heat conduction from the refrigerator 31 to the mounting table 20 can be sufficiently reduced.

[0018] The mounting table 20 is rotatably supported by a rotation device 40. The rotation device 40 includes a rotation drive device 41, a fixed shaft 45, a rotating shaft 44, a housing 46, magnetic fluid seals 47 and 48, and a stand 49.

[0019] The rotary drive device 41 is a direct drive motor having a rotor 42 and a stator 43. The rotor 42 has a generally cylindrical shape extending coaxially with the rotary shaft 44 and is fixed to the rotary shaft 44. The stator 43 has a generally cylindrical shape with an inner diameter larger than the outer diameter of the rotor 42. The rotary drive device 41 may be in a form other than a direct drive motor, and may be in a form including a servo motor and a transmission belt, for example.

[0020] The rotating shaft 44 has a generally cylindrical shape that extends coaxially with the central axis CL of the mounting table 20. A fixed shaft 45 is provided radially inside the rotating shaft 44. The fixed shaft 45 has a generally cylindrical shape that extends coaxially with the central axis CL of the mounting table 20. A housing 46 is provided radially outside the rotating shaft 44. The housing 46 has a generally cylindrical shape that extends coaxially with the central axis CL of the mounting table 20, and is fixed to the processing vessel 10.

[0021] A magnetic fluid seal 47 is provided between the outer circumferential surface of the fixed shaft 45 and the inner circumferential circle of the rotating shaft 44. The magnetic fluid seal 47 rotatably supports the rotating shaft 44 relative to the fixed shaft 45 and seals the gap between the outer circumferential surface of the fixed shaft 45 and the inner circumferential circle of the rotating shaft 44, thereby separating the depressurizable interior space 10S of the processing vessel 10 from the outer space of the processing vessel 10. A magnetic fluid seal 48 is provided between the inner circumferential surface of the housing 46 and the outer circumferential circle of the rotating shaft 44. The magnetic fluid seal 48 rotatably supports the rotating shaft 44 relative to the housing 46 and seals the gap between the inner circumferential surface of the housing 46 and the outer circumferential circle of the rotating shaft 44, thereby separating the depressurizable interior space 10S of the processing vessel 10 from the outer space of the processing vessel 10. Thus, the rotating shaft 44 is rotatably supported by the fixed shaft 45 and the housing 46.

[0022] Furthermore, the cold link 32 is inserted into the radially inner side of the fixed shaft 45 .

[0023] The stand 49 is provided between the rotary shaft 44 and the mounting table 20 and is configured to transmit the rotation of the rotary shaft 44 to the stand 49 .

[0024] With the above configuration, when the rotor 42 of the rotation drive device 41 rotates, the rotation shaft 44, the stand 49, and the mounting table 20 rotate relative to the cold link 32 in the X1 direction.

[0025] The refrigeration device 30 is supported by an elevator device 50 so that it can be raised and lowered. The elevator device 50 has an air cylinder 51, a link mechanism 52, a refrigeration device support portion 53, a linear guide 54, a fixing portion 55, and a bellows 56. By raising and lowering the refrigeration device 30, the elevator device 50 can switch between a state in which the lower surface (first contact surface) of the mounting table 20 and the upper surface (second contact surface) of the cold link 32 are thermally connected (see FIG. 2) and a state in which the lower surface (first contact surface) of the mounting table 20 and the upper surface (second contact surface) of the cold link 32 are separated (see FIG. 1).

[0026] The air cylinder 51 is a mechanical device whose rod moves linearly due to air pressure. The link mechanism 52 converts the linear movement of the rod of the air cylinder 51 into the lifting and lowering movement of the refrigeration device support part 53. The link mechanism 52 has a lever structure with one end connected to the air cylinder 51 and the other end connected to the refrigeration device support part 53. This allows a large pressing force to be generated with a small thrust of the air cylinder 51. The refrigeration device support part 53 supports the refrigeration device 30 (refrigerator 31, cold link 32). The movement of the refrigeration device support part 53 is guided in the lifting and lowering direction by a linear guide 54.

[0027] The fixed part 55 is fixed to the lower surface of the fixed shaft 45. A substantially cylindrical bellows 56 surrounding the refrigerator 31 is provided between the lower surface of the fixed part 55 and the upper surface of the refrigerator support part 53. The bellows 56 is a metal bellows structure that is expandable and contractible in the vertical direction. As a result, the fixed part 55, the bellows 56, and the refrigerator support part 53 seal the gap between the inner circumferential surface of the fixed shaft 45 and the outer circumferential circle of the cold link 32, separating the internal space 10S of the processing vessel 10, which can be depressurized, from the external space of the processing vessel 10. The lower surface of the refrigerator support part 53 is adjacent to the external space of the processing vessel 10, and the area of ​​the upper surface of the refrigerator support part 53 surrounded by the bellows 56 is adjacent to the internal space 10S of the processing vessel 10.

[0028] A slip ring 60 is provided below the rotating shaft 44 and the housing 46. The slip ring 60 includes a rotating body 61 including a metal ring and a fixed body 62 including a brush. The rotating body 61 has a generally cylindrical shape extending coaxially with the rotating shaft 44 and is fixed to the lower surface of the rotating shaft 44. The fixed body 62 has a generally cylindrical shape with an inner diameter slightly larger than the outer diameter of the rotating body 61 and is fixed to the lower surface of the housing 46. The slip ring 60 is electrically connected to a DC power supply (not shown) and supplies power from the DC power supply to the wiring 63 via the brushes of the fixed body 62 and the metal ring of the rotating body 61. This configuration allows a potential to be applied from the DC power supply to the chuck electrode 21 without causing twisting or the like in the wiring 63. Note that the structure of the slip ring 60 may be other than a brush structure, such as a contactless power supply structure or a structure including mercury-free or conductive liquid.

[0029] The control device 70 is, for example, a computer, and includes a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), an auxiliary storage device, etc. The CPU operates based on a program stored in the ROM or the auxiliary storage device, and controls the operation of the substrate processing apparatus 1. The control device 70 may be provided inside or outside the substrate processing apparatus 1. When the control device 70 is provided outside the substrate processing apparatus 1, the control device 70 can control the substrate processing apparatus 1 via communication means such as wired or wireless.

[0030] 1, when a desired process is performed on the substrate W, the control device 70 controls the lifting device 50 (air cylinder 51) to separate the mounting table 20 from the cold link 32, and controls the rotation device 40 (rotation drive device 41) to rotate the mounting table 20 on which the substrate W is placed. This makes it possible to improve the in-plane uniformity of the substrate process (e.g., film formation process) on the substrate W.

[0031] 2, when cooling the mounting table 20 and the substrate W placed on the mounting table 20, the control device 70 stops the rotation device 40 (rotation drive device 41) to stop the rotation of the mounting table 20, and controls the lifting device 50 (air cylinder 51) to bring the mounting table 20 into contact with the cold link 32. This thermally connects the cold link 32 and the mounting table 20 via the heat conduction member 33, and the substrate W placed on the mounting table 20 can be cooled.

[0032] Here, if the pressing force pressing the cold link 32 against the mounting table 20 is insufficient, a loss occurs in heat conduction, and the cooling capacity for the mounting table 20 becomes insufficient.

[0033] In contrast, in the substrate processing apparatus 1, the upper surface (second contact surface) of the cold link 32 comes into contact with the lower surface (first contact surface) of the mounting table 20 via the heat conduction member 33, and the cold link 32 comes into contact and stops.

[0034] Furthermore, by reducing the pressure of the internal space 10S of the processing vessel 10 to create a vacuum atmosphere, a pressure difference (vacuum pressure difference) is generated between the upper surface of the refrigeration device support part 53, which is in a vacuum atmosphere, and the lower surface of the refrigeration device support part 53, which is in an air atmosphere, and a pressing force is generated that presses the cold link 32 toward the mounting table 20. Therefore, a pressing force is applied to the cold link 32 by the thrust of the air cylinder 51 and the pressure difference (vacuum pressure difference) generated between the upper and lower surfaces of the refrigeration device support part 53. As a result, when the cold link 32 is brought into contact with the mounting table 20 to cool the mounting table 20, even if the mounting table 20 undergoes thermal contraction, the pressing force allows the cold link 32 to rise in response to the thermal contraction of the mounting table 20.

[0035] The cold link 32 is guided as it moves up and down by the refrigeration device support 53 and the linear guide 54. This allows the cold link 32 to move up and down while maintaining the lower surface (first contact surface) of the mounting table 20 and the upper surface (second contact surface) of the cold link 32 parallel to each other.

[0036] In addition, a shim (not shown) may be inserted into the cold link 32 to adjust the parallelism of the upper surface (second contact surface) of the cold link 32 relative to the lower surface (first contact surface) of the mounting table 20.

[0037] Furthermore, by using the air-driven air cylinder 51, the pressing force can be easily adjusted by air pressure.

[0038] The contact portion (thermal connection portion) between the mounting table 20 and the cold link 32 will now be described further with reference to FIGS. 3 and 4. FIG. 3 is a diagram illustrating an example of the contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus 1 according to the first embodiment. FIG. 3(a) is a cross-sectional view illustrating an example of the configuration of the contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus 1 according to the first embodiment. FIG. 3(b) is an enlarged cross-sectional view illustrating an example of the contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus 1 according to the first embodiment. FIG. 4 is a diagram illustrating an example of the contact portion between the mounting table 20 and the cold link 32 in a substrate processing apparatus according to a reference example. FIG. 4(a) is a cross-sectional view illustrating an example of the configuration of the contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus according to the reference example. FIG. 4(b) is an enlarged cross-sectional view illustrating an example of the contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus according to the reference example.

[0039] 4(a), the substrate processing apparatus according to the reference example differs from the substrate processing apparatus 1 according to the first embodiment (see FIGS. 1 to 3) in that it does not include the heat conduction member 33. The other configurations are the same, and therefore, redundant explanations will be omitted.

[0040] The mounting table 20 and the cold link 32 are made of a material with high thermal conductivity (e.g., Cu). Furthermore, the lower surface of the mounting table 20 and the upper surface of the cold link 32 have surface roughness that corresponds to the processing accuracy. Therefore, when the elevating device 50 raises the refrigeration unit 30 and brings the upper surface of the cold link 32 into contact with the lower surface of the mounting table 20, a gap 410 is formed between the lower surface of the mounting table 20 and the upper surface of the cold link 32, as shown in FIG. 4(b). The upper surface of the cold link 32 and the lower surface of the mounting table 20 only come into contact at a contact point 420. Furthermore, the cold link 32 and the mounting table 20 are located within the internal space 10S, which is a vacuum atmosphere, and the gap 410 is also a vacuum atmosphere. Therefore, the size of the contact area at the contact point 420 between the lower surface of the mounting table 20 and the upper surface of the cold link 32 affects heat transfer. In other words, the gap 410 creates a large thermal resistance, which increases the thermal resistance at the contact point between the mounting table 20 and the cold link 32.

[0041] In contrast, in the substrate processing apparatus 1 according to the first embodiment, as shown in FIG. 3(a), a heat-conducting member 33 is disposed on the upper surface of the cold link 32. When the elevating device 50 raises the refrigeration device 30 and brings the upper surface of the cold link 32 into contact with the lower surface of the mounting table 20 (see FIG. 2), the heat-conducting member 33 elastically deforms in accordance with the surface roughness of the upper surface of the cold link 32 and the lower surface of the mounting table 20, as shown in FIG. 3(b). As a result, the contact area between the upper surface of the heat-conducting member 33 and the lower surface of the mounting table 20 is increased compared to the contact area at the contact portion 420 (see FIG. 4(b)). Furthermore, the contact area between the lower surface of the heat-conducting member 33 and the upper surface of the cold link 32 is increased compared to the contact area at the contact portion 420 (see FIG. 4(b)). This reduces the thermal resistance at the contact portion between the mounting table 20 and the cold link 32. This improves the cooling performance of the refrigerator 31 for the mounting table 20.

[0042] Moreover, although the heat conduction member 33 has been described as being disposed on the upper surface side of the cold link 32, this is not limitative and the heat conduction member 33 may be disposed on the lower surface side of the mounting table 20. It is preferable that the heat conduction member 33 be disposed on the upper surface side of the cold link 32.

[0043] Furthermore, when the heat conducting member 33 is a sheet-like member (soft metal sheet), the thickness of the heat conducting member 33 is preferably 3 mm or less. The thickness of the heat conducting member 33 is more preferably in the range of 0.3 mm to 1.5 mm. This makes it possible to absorb the surface roughness of the lower surface of the heat conducting member 33 and the surface roughness of the upper surface of the cold link 32, while suppressing an increase in thermal resistance due to the presence of the heat conducting member 33.

[0044] Although the heat conducting member 33 has been described as being formed as a sheet-like member (a soft metal sheet, for example, an indium sheet) and placed on the upper surface of the cold link 32, this is not limitative. The heat conducting member 33 may also be a soft metal film (for example, an indium film or indium plating) formed on the upper surface of the cold link 32. The metal film may be formed by a film formation process or a plating process. By using a metal film as the heat conducting member 33, the adhesion between the heat conducting member 33 and the cold link 32 can be further improved.

[0045] The heat conducting member 33 may be made of a liquid such as grease that can be used in a vacuum atmosphere and at extremely low temperatures.

[0046] Second Embodiment Next, an example of a substrate processing apparatus 1 according to a second embodiment will be described with reference to Fig. 5. Fig. 5 is a diagram showing an example of a contact portion between the mounting table 20 and the cold link 32 in the substrate processing apparatus 1 according to the second embodiment. As shown in Fig. 5, the substrate processing apparatus 1 according to the second embodiment differs from the substrate processing apparatus 1 according to the first embodiment (see Figs. 1 to 3) in the configuration of the contact portion between the mounting table 20 and the cold link 32. The other configurations are similar, so redundant description will be omitted.

[0047] Here, the lifting device 50 presses the cold link 32 toward the mounting table 20 (see FIG. 2). As a result, the heat conduction member 33 elastically deforms in accordance with the surface roughness of the underside of the mounting table 20. As the contact area between the underside of the mounting table 20 and the upper surface of the heat conduction member 33 increases, the adhesion between the mounting table 20 and the heat conduction member 33 also increases. This could result in the heat conduction member 33 adhering to the underside of the mounting table 20. If the cold link 32 is moved away from the mounting table 20 (see FIG. 1) with the heat conduction member 33 adhering to the underside of the mounting table 20, the heat conduction member 33 could float up from the upper surface of the cold link 32 and be deformed. Furthermore, if the mounting table 20 is rotated in the X1 direction by the rotation device 40 while the heat conduction member 33 is adhering to the underside of the mounting table 20, the heat conduction member 33 could be deformed or damaged.

[0048] The substrate processing apparatus 1 according to the second embodiment has a recess 32a on the upper surface of the cold link 32 that accommodates the heat conduction member 33. The horizontal width of the recess 32a is wider than the horizontal width of the heat conduction member 33. That is, an outer circumferential space 32b is formed between the sidewall of the recess 32a and the side surface of the heat conduction member 33 disposed in the recess 32a. As a result, when the refrigeration apparatus 30 is pressed against the mounting table 20 by the lifting device 50, the heat conduction member 33 is compressed in the vertical direction and can be expanded horizontally toward the outer circumferential space 32b.

[0049] Furthermore, the substrate processing apparatus 1 according to the second embodiment has a presser member 34 that presses the outer periphery of the heat conduction member 33 housed in the recess 32a toward the cold link 32. The presser member 34 is formed in a ring shape with an open center when viewed from above. The presser member 34 abuts against the outer edge of the upper surface of the heat conduction member 33 and is fixed to the cold link 32. As a result, even if the heat conduction member 33 is attached to the underside of the mounting table 20 when the cold link 32 is separated from the mounting table 20, the presser member 34 presses down on the heat conduction member 33, preventing the heat conduction member 33 from floating up from the upper surface of the cold link 32 and becoming deformed.

[0050] The heat conducting member 33 also includes a soft metal sheet 331 and a protective portion 333 .

[0051] The soft metal sheet 331 is a sheet-like member made of an elastically deformable soft metal. The soft metal sheet 331 is made of a soft metal that is more elastically deformable than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. In other words, the heat conductive member 33 is made of a metal having a lower hardness (e.g., Vickers hardness) than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. The soft metal sheet 331 is made of a material that can be used in the vacuum atmosphere of the internal space 10S and at the extremely low temperatures cooled by the refrigerator 31. The soft metal sheet 331 is made of a material that does not affect the substrate processing process. The soft metal sheet 331 is preferably made of a material with high thermal conductivity. However, the material of the soft metal sheet 331 may be made of a material with lower thermal conductivity than the material of the lower surface of the mounting table 20 and / or the upper surface of the cold link 32. Specifically, indium, silver, tin, etc. can be used. The soft metal sheet 331 is formed as a sheet-like member (for example, an indium sheet or the like).

[0052] The protective portion 333 is provided on the upper surface side of the soft metal sheet 331 (in other words, on the side of the lower surface (first contact surface) of the mounting table 20). The protective portion 333 protects the upper surface of the soft metal sheet 331 and improves the durability of the upper surface of the heat conduction member 33, which is repeatedly brought into contact and separated from the soft metal sheet 331. The protective portion 333 may be a sheet-like member or a film (plating) formed on the upper surface of the soft metal sheet 331. The protective portion 333 is made of a metal harder (metal less susceptible to elastic deformation) than the material of the soft metal sheet 331 (indium, silver, tin, etc.). In other words, the protective portion 333 is made of a material harder (e.g., Vickers hardness) than the material of the soft metal sheet 331. The protective portion 333 may be a Cu sheet with a thickness of 0.1 mm, for example. The protective portion 333 may also be a Cu film (plating) formed on the upper surface of the soft metal sheet 331. This prevents the heat conductive member 33 from sticking to the underside of the mounting table 20 when the cold link 32 moves away from the mounting table 20. The thickness of the protective portion 333 is formed to be sufficiently thinner than the thickness of the soft metal sheet 331. This allows the protective portion 333, together with the soft metal sheet 331, to deform in accordance with the surface roughness of the underside of the mounting table 20. In other words, the heat conductive member 33 having the soft metal sheet 331 and the protective portion 333 reduces the thermal resistance at the contact portion between the mounting table 20 and the cold link 32 compared to the reference example (see FIG. 4 ), and prevents the heat conductive member 33 from sticking to the underside of the mounting table 20.

[0053] The heat conductive member 33 also includes an internal structure 332 within the soft metal sheet 331. The internal structure 332 is made of a metal harder (i.e., less susceptible to elastic deformation) than the material (e.g., indium, silver, tin, etc.) of the soft metal sheet 331. In other words, the internal structure 332 is made of a material harder (e.g., Vickers hardness) than the material of the soft metal sheet 331. The internal structure 332 may be made of, for example, a Cu mesh. Alternatively, the internal structure 332 may be made of a Cu sheet. As a result, when the elevating device 50 raises the refrigeration device 30 and brings the upper surface of the cold link 32 into contact with the lower surface of the mounting table 20 (see FIG. 2), the soft metal sheet 331 and the protective portion 333 of the heat conductive member 33 elastically deform in accordance with the surface roughness of the lower surface of the mounting table 20. This increases the contact area between the upper surface of the heat conductive member 33 and the lower surface of the mounting table 20. Furthermore, when the elevating device 50 lowers the refrigeration device 30 to separate the cold link 32 from the mounting table 20 (see FIG. 1), the internal structure 332 suppresses deformation of the heat conducting member 33, preventing the heat conducting member 33 from adhering to the underside of the mounting table 20. Furthermore, it is possible to suppress crushing of the soft metal sheet 331 beyond the deformation amount necessary for it to conform to the surface roughness of the underside of the mounting table 20 and / or the upper surface of the cold link 32, thereby improving the durability of the heat conducting member 33.

[0054] Furthermore, by using a material for inner structure 332 that has a higher thermal conductivity than the material for soft metal sheet 331, the thermal resistance of heat conduction member 33 can be reduced.

[0055] Although the heat conducting member 33 has been described as having both the internal structure 332 and the protective portion 333, this is not limited thereto and the heat conducting member 33 may have only one of them. The protective portion 333 may be omitted from the heat conducting member 33. This reduces the contact interface between the soft metal sheet 331 and the protective portion 333, thereby reducing the thermal resistance.

[0056] Next, the effect of the heat conducting member 33 will be described with reference to FIGS.

[0057] FIG. 6 is a graph showing an example of temperature changes when the mounting table 20 is cooled. The horizontal axis represents time (Time [H]). The vertical axis represents the temperature (Temp. [K]) of the mounting table 20. Here, the mounting table 20 is cooled from room temperature to an extremely low temperature by a refrigerator 31. The solid line represents the temperature change of the mounting table 20 in the substrate processing apparatus 1 according to this embodiment (first embodiment, second embodiment) in which a heat conductive member 33 is interposed between the mounting table 20 and the cold link 32. The dashed line represents the temperature change of the mounting table 20 in the substrate processing apparatus according to the reference example (see FIG. 4) in which a heat conductive member 33 is not interposed between the mounting table 20 and the cold link 32.

[0058] 6, the substrate processing apparatus 1 according to this embodiment can cool the temperature of the mounting table 20 to a lower temperature than the substrate processing apparatus according to the reference example. Furthermore, the substrate processing apparatus 1 according to this embodiment can shorten the time until the temperature of the mounting table 20 stabilizes (the time until cooling is completed) compared to the substrate processing apparatus according to the reference example.

[0059] FIG. 7 is a graph showing an example of the temperature change of the mounting table 20. Here, a process of bringing the mounting table 20 into contact with the refrigeration device 30 to cool the mounting table 20 (see FIG. 2 ) and a process of separating the mounting table 20 from the refrigeration device 30, placing the substrate W on the mounting table 20, and rotating the mounting table 20 (see FIG. 1 ) are repeated. The horizontal axis represents time (Time [sec]). The vertical axis represents the temperature change (Drift Temp. Δ [K]) of the mounting table 20. The solid line represents the temperature change of the mounting table 20 in the substrate processing apparatus 1 of this embodiment (first embodiment, second embodiment) in which a heat conductive member 33 is interposed between the mounting table 20 and the cold link 32. The dashed line represents the temperature change of the mounting table 20 in the substrate processing apparatus of the reference example in which a heat conductive member 33 is not interposed between the mounting table 20 and the cold link 32 (see FIG. 4 ).

[0060] In a process in which the mounting table 20 is brought into contact with the refrigeration device 30 to cool the mounting table 20 (see FIG. 2), the temperature of the mounting table 20 decreases. On the other hand, in a process in which the mounting table 20 is separated from the refrigeration device 30, the substrate W is placed on the mounting table 20, and the mounting table 20 is rotated (see FIG. 1), the temperature of the mounting table 20 increases due to radiant heat from the processing vessel 10. By repeating this process, the temperature of the mounting table 20 gradually increases, and by further repeating this process, the temperature of the mounting table 20 becomes stable.

[0061] 7, the substrate processing apparatus 1 according to this embodiment can reduce the temperature rise until the temperature of the mounting table 20 stabilizes, compared to the substrate processing apparatus according to the reference example. Furthermore, the substrate processing apparatus 1 according to this embodiment can shorten the time until the temperature of the mounting table 20 stabilizes, compared to the substrate processing apparatus according to the reference example.

[0062] The substrate processing apparatus 1 has been described above, but the present disclosure is not limited to the above embodiments, and various modifications and improvements are possible within the scope of the gist of the present disclosure as described in the claims. [Explanation of symbols]

[0063] W substrate CL center axis 1. Substrate processing equipment 10 Processing container 10S interior space 20 Mounting table 21 Chuck electrode 30 Refrigeration equipment 31 Refrigeration Machine 32 Cold Link 32a Recess 32b Peripheral space 33 Thermal Conduction Materials 40 Rotating Device 50 Lifting device 60 slip ring 70 Control device 331 Soft Metal Sheet 332 Internal structure 333 Protection Department

Claims

1. a mounting table having a first contact surface; a refrigeration device having a second contact surface; an elevating device capable of thermally connecting or separating the second contact surface and the first contact surface; a heat conduction member interposed between the first contact surface and the second contact surface, The heat conduction member is the first contact surface and / or the second contact surface is made of a soft metal sheet that is softer than the material of the first contact surface and / or the material of the second contact surface; the refrigeration device has a recess that accommodates the heat conduction member, a space is provided between a side wall of the recess and a side surface of the heat conducting member disposed in the recess; Substrate processing equipment.

2. Further provided is a pressing member that presses an outer edge of the heat conduction member toward the refrigeration device. The substrate processing apparatus according to claim 1 .

3. a mounting table having a first contact surface; a refrigeration device having a second contact surface; an elevating device capable of thermally connecting or separating the second contact surface and the first contact surface; a heat conduction member disposed on the second contact surface side and interposed between the first contact surface and the second contact surface, The heat conduction member is a soft metal sheet softer than the material of the first contact surface and / or the material of the second contact surface; a protective portion for protecting the soft metal sheet on the side of the first contact surface of the soft metal sheet, Substrate processing equipment.

4. The protective portion is formed of a metal harder than the material of the soft metal sheet. The substrate processing apparatus according to claim 3 .

5. The protective part is Copper sheet, The substrate processing apparatus according to claim 3 .

6. a mounting table having a first contact surface; a refrigeration device having a second contact surface; an elevating device capable of thermally connecting or separating the second contact surface and the first contact surface; a heat conduction member disposed on the second contact surface side and interposed between the first contact surface and the second contact surface, The heat conduction member is a soft metal sheet softer than the material of the first contact surface and / or the material of the second contact surface; an internal structure within the soft metal sheet that suppresses deformation of the heat conduction member; Substrate processing equipment.

7. a mounting table having a first contact surface; a refrigeration device having a second contact surface; an elevating device capable of thermally connecting or separating the second contact surface and the first contact surface; a heat conduction member interposed between the first contact surface and the second contact surface, The heat conduction member is a soft metal sheet softer than the material of the first contact surface and / or the material of the second contact surface; an internal structure formed within the soft metal sheet and made of a metal harder than the material of the soft metal sheet; Substrate processing equipment.

8. a mounting table having a first contact surface; a refrigeration device having a second contact surface; an elevating device capable of thermally connecting or separating the second contact surface and the first contact surface; a heat conduction member interposed between the first contact surface and the second contact surface, The heat conduction member is a soft metal sheet softer than the material of the first contact surface and / or the material of the second contact surface; An internal structure of copper mesh within the soft metal sheet. Substrate processing equipment.

9. The soft metal sheet is formed from indium, silver, or tin, The substrate processing apparatus according to claim 1 .

10. The thickness of the soft metal sheet is Within the range of 0.3 mm or more and 1.5 mm or less, The substrate processing apparatus according to claim 1 .

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