electrode

The elastically deformable electrode with a liquid wiring portion addresses noise issues in biological electrodes by maintaining consistent electrical connectivity through shape changes, enhancing signal reliability on moving surfaces.

JP7800407B2Active Publication Date: 2026-01-16MURATA MFG CO LTD
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Patent Information

Application Number
JP2022198816
Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2022-02-25
Filing Date
2022-12-13
Publication Date
2026-01-16
Estimated Expiration
2042-12-13

AI Technical Summary

Technical Problem

Biological electrodes with fibrous conductive members experience noise due to changes in resistance value during expansion and contraction, which is problematic for applications on moving surfaces.

Method used

An elastically deformable electrode design featuring a liquid wiring portion that electrically connects electrode bodies, allowing for suppression of noise caused by resistance changes during expansion and contraction.

Benefits of technology

The liquid wiring portion effectively reduces noise and maintains consistent electrical connectivity despite shape changes, ensuring reliable signal measurement and application on both living and non-living surfaces.

✦ Generated by Eureka AI based on patent content.

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Patent Text Reader

Abstract

To provide a bioelectrode capable of reducing the noise to occur during expansion and contraction, or an electrode for use in a nonbiological variable surface.SOLUTION: An elastically deformable electrode includes a plurality of electrode elements spaced from each other, and a liquid wire which is a liquid conductor configured to electrically connect the plurality of electrode elements.SELECTED DRAWING: Figure 1
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Description

[Technical Field]

[0001] The present invention relates to an electrode for use on a living or non-living surface. [Background technology]

[0002] Patent Document 1 describes a biological electrode comprising an electrode sheet having a number of electrode bodies arranged at a distance from one another and a conductive cloth portion superimposed on the electrode sheet, the electrode sheet having elastic wires connecting adjacent electrode bodies and formed in a mesh sheet shape with elasticity and flexibility. By using an elastic and flexible mesh sheet for the electrode sheet, this backplate electrode can ensure a certain contact area with the living body while remaining in close contact and able to suitably follow changes in the surface of the living body. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2018-23568 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the biological electrode described in Patent Document 1 includes a fibrous conductive member, which causes noise that is thought to be caused by changes in resistance value that occur when this member stretches.

[0005] Therefore, an object of the present invention is to provide a bioelectrode having a structure capable of suppressing noise caused by changes in resistance value during expansion and contraction, or an electrode for use on a moving surface of a non-biological body. [Means for solving the problem]

[0006] The electrode according to the present invention is an elastically deformable electrode, a plurality of electrode bodies arranged at a distance from one another; and a liquid wiring portion that is a liquid conductor that electrically connects the plurality of electrode bodies. [Effects of the Invention]

[0007] According to the electrode of the present invention, since the liquid wiring portion is disposed between the electrode bodies, noise due to changes in resistance value during expansion and contraction can be suppressed. [Brief explanation of the drawings]

[0008] [Figure 1] 3 is a transparent bottom view showing a planar arrangement in which the liquid wiring portion of the electrode according to the first embodiment is visible. FIG. [Figure 2] 2 is a schematic cross-sectional view showing a cross-sectional structure seen in the direction AA of FIG. 1. [Figure 3] FIG. 10 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion of the electrode according to the second embodiment is visible. [Figure 4] 4 is a schematic cross-sectional view showing a cross-sectional structure seen in the direction BB in FIG. 3. [Figure 5] FIG. 10 is a transparent bottom view showing a planar arrangement in which the liquid wiring portion of the electrode according to the third embodiment is visible. [Figure 6] 6 is a schematic cross-sectional view showing a cross-sectional structure seen in the CC direction of FIG. 5. [Figure 7] FIG. 10 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion of the electrode according to the fourth embodiment is visible. [Figure 8] 8 is a schematic cross-sectional view showing an example of a cross-sectional structure seen in the DD direction of FIG. 7. [Figure 9] 8 is a schematic cross-sectional view showing another example of the cross-sectional structure seen in the DD direction of FIG. 7. [Figure 10] FIG. 10 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion of the electrode according to the fifth embodiment is visible. [Figure 11] 11 is a schematic cross-sectional view showing an example of a cross-sectional structure seen in the EE direction of FIG. 10. [Figure 12] 10(a) is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a sixth embodiment, and FIG. 10(b) is an enlarged cross-sectional view showing a more detailed cross-sectional structure of the liquid wiring portion of FIG. [Figure 13] FIG. 13 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a seventh embodiment. [Figure 14] FIG. 13 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to an eighth embodiment. [Figure 15A] FIG. 10 is a plan view of an electrode including a liquid wiring portion for testing. [Figure 15B] 15B is a schematic cross-sectional view showing the cross-sectional structure of the electrode as viewed in the FF direction of FIG. 15A. [Figure 16A] FIG. 15B is a plan view of the same electrode as FIG. 15A. [Figure 16B] 16B is a plan view showing the electrode of FIG. 16A deformed when tension is applied to the electrode in the X direction. FIG. [Figure 17A] FIG. 13 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a ninth embodiment. [Figure 17B] 17B is an enlarged cross-sectional view of an area G surrounded by a dotted line and including one electrode body at the end of the electrode in FIG. 17A. FIG. [Figure 17C] FIG. 17C is an enlarged cross-sectional view showing a state in which a peeled portion has occurred at the end of the electrode in FIG. 17B. [Figure 17D] 10 is an enlarged cross-sectional view showing a state in which a peeled portion occurs in an electrode of a reference example that does not have a sealing portion that seals a liquid wiring portion. FIG. [Figure 18] FIG. 22 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a tenth embodiment. [Figure 19A] FIG. 22 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to an eleventh embodiment. [Figure 19B] 19B is an enlarged cross-sectional view of an area H surrounded by a dotted line and including one electrode body at the end of the electrode in FIG. 19A. [Figure 19C] FIG. 19C is an enlarged cross-sectional view showing a state in which a peeled portion has occurred at the end of the electrode in FIG. 19B. [Figure 19D] 10 is an enlarged cross-sectional view showing a state in which a peeled portion occurs in an electrode of a reference example that does not have a sealing portion that seals a liquid wiring portion. FIG. [Figure 20A] FIG. 22 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a twelfth embodiment. [Figure 20B]20B is an enlarged cross-sectional view of an area I surrounded by a dotted line including one electrode body at the end of the electrode in FIG. 20A, showing a state in which a crack has occurred at the end of the electrode. FIG. [Figure 20C] 10 is an enlarged cross-sectional view showing a state in which a crack has occurred in an electrode of a reference example that does not have a sealing portion that seals the liquid wiring portion. FIG. [Figure 21A] FIG. 22 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a thirteenth embodiment. [Figure 21B] 21B is an enlarged cross-sectional view of an area J surrounded by a dotted line and including one electrode body at the end of the electrode in FIG. 21A. FIG. [Figure 21C] 10 is an enlarged cross-sectional view showing a state in which a crack has occurred in an electrode of a reference example that does not have a sealing portion as a protective layer that covers the outside of an insulating portion. FIG. [Figure 22A] FIG. 20 is a schematic cross-sectional view showing the cross-sectional structure of an electrode according to a fourteenth embodiment. [Figure 22B] 22B is an enlarged cross-sectional view of an area K surrounded by a dotted line and including one electrode body 2 at the end of the electrode in FIG. 22A. DETAILED DESCRIPTION OF THE INVENTION

[0009] The electrode according to the first aspect is an elastically deformable electrode, a plurality of electrode bodies arranged at a distance from one another; and a liquid wiring portion that is a liquid conductor that electrically connects the plurality of electrode bodies.

[0010] The electrode according to the second aspect is the electrode according to the first aspect, having a first surface, The plurality of electrode bodies may be disposed on the first surface.

[0011] In the electrode of the third aspect, in the first or second aspect described above, when the electrode is elastically deformed so that the distance between two of the plurality of electrode bodies is doubled when the electrode is not elastically deformed, the resistance value between the plurality of electrode bodies may be 50 times or less of the resistance value between the two electrode bodies before the electrode is elastically deformed.

[0012] In the electrode of the fourth aspect, in the first or second aspect described above, when the electrode is elastically deformed so that the distance between two electrodes of the plurality of electrode bodies is doubled when the electrode is not elastically deformed, the resistance value of the liquid wiring portion connecting the two electrode bodies may be 10 times or less than the resistance value of the liquid wiring portion connecting the two electrode bodies before the electrode is elastically deformed.

[0013] In the electrode according to a fifth aspect, in any one of the first to fourth aspects, the liquid wiring portion may contain a metal that becomes liquid at room temperature.

[0014] The electrode according to a sixth aspect is the electrode according to any one of the first to fifth aspects, wherein the liquid wiring portion may contain a metal containing 60% by weight or more of gallium.

[0015] In the electrode according to a seventh aspect, in the sixth aspect, the liquid wiring portion may contain a metal containing 40% by weight or less of indium.

[0016] The electrode according to the eighth aspect may be any of the first to seventh aspects, wherein the liquid wiring portion is arranged so as to extend from one of two adjacent electrode bodies to the other electrode body.

[0017] The electrode according to a ninth aspect is the electrode according to any one of the first to eighth aspects, wherein the liquid wiring portion may further include a resin that seals the periphery.

[0018] The electrode according to a tenth aspect is any one of the first to ninth aspects, wherein the electrode further comprises a first surface and a second surface opposite to the first surface; the plurality of electrode bodies are disposed on the first surface, The second surface may further include a substrate.

[0019] Hereinafter, electrodes according to embodiments will be described with reference to the accompanying drawings, in which substantially identical components are designated by the same reference numerals.

[0020] (Embodiment 1) Fig. 1 is a see-through bottom view showing the planar arrangement of the liquid wiring portion 4 of the electrode 10 according to embodiment 1. Fig. 2 is a schematic cross-sectional view showing the cross-sectional structure as seen in the AA direction in Fig. 1. For convenience, in Figs. 1 and 2, the plane facing the measurement surface of the object to be measured is shown as the XY plane, and the direction perpendicular to the XY plane is shown as the Z direction. As shown in FIG. 1, the electrodes 10 according to the first embodiment are arranged on the first surface 1 at a distance from each other. The electrode 10 comprises a plurality of arranged electrode assemblies 2 and a liquid wiring section 4 which is a liquid conductor that electrically connects the electrode assemblies 2. The electrode 10 also comprises a solid wiring section 5 which seals the liquid wiring section 4, and a planar substrate 11 which supports the plurality of electrode assemblies 2 and the liquid wiring section 4. In the electrode 10, the liquid wiring section 4 and the solid wiring section 5 between the electrode assemblies 2 provide electrical connection between the electrode assemblies 2 in the in-plane direction.

[0021] With this electrode 10, when the shape of the surface of the measurement object changes, the liquid wiring portion 4 is provided for electrical connection between the electrode bodies 2, so breakage due to stress caused by the shape change does not occur. This makes it possible to reduce the change in resistance value that accompanies expansion and contraction of the liquid wiring portion 4. Reducing the change in resistance value allows for reduction of signal noise. Furthermore, noise due to shape changes is reduced when measuring the surface of a living body using this electrode 10. Furthermore, when applying electrical stimulation to a living body using this electrode 10, changes in the electrical pulse actually applied to the living body are reduced. In addition, since the electrode 10 has a plurality of electrode bodies 2 electrically connected by the liquid wiring portion 4, it has the same potential as a whole and functions as a single electrode.

[0022] Each of the components that make up this electrode 10 will be described below.

[0023] <Electrode body> The electrode bodies 2 are arranged on the first surface 1 at a distance from each other. The electrode bodies 2 are made of a metal such as copper, silver, gold, or aluminum. The shape of the electrode bodies 2 may be rectangular as shown in FIGS. 1, 3, and 1C. The shape of the electrode bodies 2 is not limited to a rectangle, and may be circular, polygonal, or have a shape including straight and curved lines.

[0024] <Liquid wiring section> The liquid wiring portion 4 is a liquid conductor that electrically connects the electrode bodies 2. The liquid wiring portion 4 is made of, for example, a metal that is liquid at room temperature. For example, the liquid wiring portion 4 is made of a material containing gallium. For example, the liquid wiring portion 4 may be made of a material containing 0 to 40% by weight of indium and 60 to 100% by weight of gallium. The material of the liquid wiring portion 4 is not limited to the above, and may be EGaIn containing 75.5% by weight of Ga and 24.5% by weight of In (melting point: 15.5°C), 68.5% by weight of Ga, 21.5% by weight of In, and 10% by weight of Sn (melting point: -19°C), or Galinstran containing 62% by weight of Ga, 25% by weight of In, and 13% by weight of Sn (melting point: 10°C). These materials have melting points lower than human body temperature, so the liquid wiring portion 4 can be kept in a liquid state when the electrode is in use, reducing resistance changes associated with expansion and contraction and suppressing noise.

[0025] The configuration of the liquid wiring section 4 is not limited to the above example. For example, as shown in a sixth embodiment (FIG. 12) described later, the liquid wiring section 4 may be a conductive paste in which a conductive material such as metal particles is dispersed in a liquid resin.

[0026] Furthermore, the liquid wiring portion 4 may be made of a material such as an alloy having a melting point of 40° C. or less. Specifically, it is sufficient that the composition ratio is within the range of an alloy having a melting point of 40° C. or less, and the addition of other metals is not prevented. Furthermore, the liquid wiring portion may be made of a metal that is liquid at room temperature. Here, "room temperature" varies depending on the application. For example, when used as a biological electrode, it is approximately 15°C to 25°C, and when used on a non-biological surface, it is approximately 15°C to 60°C.

[0027] Furthermore, the resistance value of the liquid wiring portion 4 when the length of the liquid wiring portion 4 in one direction parallel to the surface is extended to twice the reference length is 10 times or less compared to the resistance value when the liquid wiring portion is at the reference length. This allows the change in resistance value due to the expansion and contraction of the liquid wiring portion 4 to be reduced to 10 times or less compared to the reference length. This reduces signal noise associated with changes in resistance value. The reference length is the length of the liquid wiring portion when the electrodes are not elastically deformed. The resistance value of the liquid wiring portion may be measured directly, but is not limited to this. Regarding the resistance value between two electrode bodies, when the resistance value at the reference length between the two electrode bodies (the length when not elastically deformed) is compared to the resistance value between the two electrode bodies when the length between the two electrode bodies is elastically deformed to twice the reference length, the change in resistance value between the two electrode bodies can be reduced to 50 times or less compared to the reference length.

[0028] The liquid wiring portion 4 may be arranged so as to extend from one of two adjacent electrode bodies 2 to the other electrode body 2. This reduces the effect of noise that occurs when stress is applied in a direction perpendicular to the extension direction of the electrode bodies 2. In FIG. 1, the liquid wiring portions 4 are arranged in a grid pattern with gaps between the electrode bodies 2 within the plane in which the electrode bodies 2 are arranged.

[0029] The liquid wiring portion 4 is sealed around its periphery. For example, as shown in Fig. 1, the liquid wiring portion 4 may be sealed by a solid wiring portion 5 that is a solid conductor. In this case, electrical connection is maintained between the liquid wiring portion 4 and the solid wiring portion 5, so the liquid wiring portion 4 may be electrically connected to the electrode body 2 via the solid wiring portion 5. Alternatively, the liquid wiring portion 4 may be sealed by a solid insulating portion. In this case, the liquid wiring portion 4 may be electrically connected to the electrode body 2 through a via made of a conductive material, for example. Furthermore, when the electrode body 2 and the liquid wiring section 4 are supported by the base material 11, a part of the liquid wiring section 4 may be sealed by the base material 11.

[0030] <Solid wiring section> The solid wiring section 5 may be, for example, a metal foil such as copper foil, aluminum foil, etc. The solid wiring section 5 is not limited to the above, and may be any solid conductor.

[0031] <Substrate> The substrate 11 is a planar member disposed on the second surface 3 opposite the first surface 1, and supports the plurality of electrode assemblies 2 and the liquid wiring section 4. The substrate 11 may also serve to fix the electrode assemblies 2 and the liquid wiring section 4. The substrate 11 may be a planar member made of, for example, a thermoplastic resin such as urethane resin, acrylic resin, or silicone resin.

[0032] (Embodiment 2) 3 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion 4 of the electrode 10a according to embodiment 2 is visible. FIG. 4 is a schematic cross-sectional view showing the cross-sectional structure as seen in the direction BB in FIG. The electrode 10a according to the second embodiment differs from the electrode according to the first embodiment in that electrical connection is made to each electrode body 2 in the stacking direction. Specifically, electrical connection is made to each electrode body 2 from the liquid wiring portion 4 via the solid wiring portion 5 in the stacking direction. 3, the liquid wiring section 4 is arranged in a lattice pattern so as to overlap with the lattice of the electrode body 2 when viewed from the stacking direction within the plane on which the electrode body 2 is arranged. In this case, the lattice points of the electrode body 2 and the lattice points of the liquid wiring section 4 substantially overlap.

[0033] (Embodiment 3) 5 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion 4 of the electrode 10b according to embodiment 3 is visible. FIG. 6 is a schematic cross-sectional view showing a cross-sectional structure seen in the CC direction in FIG. The electrode 10b according to embodiment 3 differs from the electrodes according to embodiments 1 and 2 in that the liquid wiring portions 4 are not continuous linearly but are scattered. Specifically, as shown in Fig. 5, the liquid wiring portions 4 are scattered at lattice points with gaps between the electrode bodies 2 within the plane in which the electrode bodies 2 are arranged. In this way, even if the liquid wiring portions 4 are scattered, they can alleviate the stress caused by changes in shape, so that the change in resistance value can be kept low, and the generation of noise can be suppressed.

[0034] Furthermore, the electrode 10b according to the third embodiment differs from the electrodes according to the first and second embodiments in that it has an insulating portion 6 arranged in a planar shape between the solid wiring portion 5 and the electrode body 2. In this case, the liquid wiring portion 4 may be electrically connected to the electrode body 2 through, for example, a via (not shown) made of a conductive material.

[0035] <Insulation section> The insulating portion 6 is disposed in a planar form between the electrode body 2 and the solid wiring portion 5. The insulating portion 6 may also be stretchable. As a result, even if the surface to be measured of the measurement object fluctuates and the distance between the two electrode bodies 2 changes, the insulating portion 6 also has stretchability, so that it can accommodate the movement of the electrode body 2 without suppressing the deformation of the liquid wiring portion 4 and the elastic deformation of the solid wiring portion 5, thereby suppressing the generation of noise. The insulating portion 6 can be made of a commonly used thermoplastic resin or thermosetting resin.

[0036] (Fourth embodiment) Fig. 7 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion 4 of the electrode 10c according to embodiment 4 is visible. Fig. 8 is a schematic cross-sectional view showing an example of the cross-sectional structure as seen in the DD direction of Fig. 7. Fig. 9 is a schematic cross-sectional view showing another example of the cross-sectional structure as seen in the DD direction of Fig. 7. Electrode 10c according to embodiment 4 differs from the electrodes according to embodiments 1 to 3 in that the liquid wiring portion 4 is arranged to extend across the space between the electrode bodies 2 in plan view, as shown in Fig. 7. As an example of the arrangement of the liquid wiring portion 4 as described above, it extends wider than the width between the electrode bodies 2, as shown in the cross-sectional view of electrode 10c1 in Fig. 8, but it may also extend across the entire back surface of the electrode body 2. Alternatively, it may be arranged to extend across the entire back surface of the electrode body 2, as shown in the cross-sectional view of electrode 10c2 in Fig. 9.

[0037] (Embodiment 5) Fig. 10 is a see-through bottom view showing a planar arrangement in which the liquid wiring portion 4 of the electrode 10d according to embodiment 5 is visible. Fig. 11 is a schematic cross-sectional view showing an example of the cross-sectional structure as seen in the EE direction of Fig. 10. Electrode 10d according to embodiment 5 differs from the electrodes according to embodiments 1 to 4 in that liquid wiring portion 4 extends in one direction. As shown in Figure 10, by extending the liquid wiring portion 4 in a direction perpendicular to the expansion / contraction direction, the liquid wiring portion 4 changes shape even when expanded or contracted, suppressing changes in resistance value and reducing noise generation. The expansion / contraction direction refers to the direction in which less force is required to elastically deform the electrode. For example, when applying the same tension to cause elastic deformation, the length stretched by elastic deformation will be longer when tension is applied in the expansion / contraction direction compared to when tension is applied in a direction other than the expansion / contraction direction.

[0038] (Embodiment 6) FIG. 12(a) is a schematic cross-sectional view showing the cross-sectional structure of an electrode 10e according to embodiment 6, and (b) is an enlarged cross-sectional view showing a more detailed cross-sectional structure of the liquid wiring portion 4a of (a). The electrode 10e according to the sixth embodiment is characterized in that the liquid wiring portion 4a has a conductive material 14 dispersed in a matrix of a liquid resin 12. For example, the liquid wiring portion 4a may be a silver paste itself in its liquid state without baking or drying it. Note that the liquid wiring portion 4a is not limited to silver paste, and any conductive paste in which the conductive material 14 is dispersed in the liquid resin 12 may be used. In the above case, the entire liquid wiring portion 4a is not made of a conductive material, but even in this case, the liquid wiring portion 4a changes shape when stretched, suppressing changes in resistance value and suppressing noise generation. The conductive material 14 may itself be liquid or solid. Furthermore, without being limited thereto, the liquid wiring portion 4a may be, for example, a conductive aqueous solution in which an electrolyte is dissolved in the matrix of the aqueous solution.

[0039] (Embodiment 7) FIG. 13 is a schematic cross-sectional view showing the cross-sectional structure of an electrode 10f according to the seventh embodiment. The electrode 10f according to the seventh embodiment differs from the electrode according to the first embodiment in that it has an insulating portion 6. By providing the insulating portion 6 between the electrode bodies 2, it is possible to prevent contact with the measurement object at locations other than the electrode bodies 2.

[0040] (Embodiment 8) FIG. 14 is a schematic cross-sectional view showing the cross-sectional structure of an electrode 10g according to the eighth embodiment. The electrode 10g according to embodiment 8 differs from the electrode according to embodiment 7 in that the liquid wiring portion 4 extends between the electrode bodies 2. This allows the liquid wiring portion 4 to directly absorb expansion and contraction between the electrode bodies 2.

[0041] The wiring pattern of the liquid wiring portion is not limited to the above example and can be selected from various patterns within the scope of the present disclosure. For example, it may be a lattice pattern, a line pattern, a dot pattern, a plane pattern, etc. Furthermore, the solid wiring portion and the insulating portion may be interchangeable as long as the electrical connection between the liquid wiring portion and the electrode body is ensured.

[0042] (Regarding noise generated by liquid wiring) Fig. 15A is a plan view of electrode 40 including a test liquid wiring portion 4, and Fig. 15B is a schematic cross-sectional view showing the cross-sectional structure of electrode 40 as viewed in the FF direction of Fig. 15A. Fig. 16A is a plan view of the same electrode 40 as Fig. 15A, and Fig. 16B is a plan view showing electrode 40 deformed when tension is applied to the electrode of Fig. 16A in the X direction. 15A to 16B, noise generated in a sealed liquid wiring unit 4 when subjected to a tensile force will be described. As shown in FIG. 15A, an H-shaped electrode 40 is prepared. The electrode 40 includes a liquid wiring unit 4 sealed in a solid wiring unit 5 containing, for example, silicone resin, and a pair of conducting wires 32 connected to the liquid wiring unit 4. The impedance of the liquid wiring unit 4 can be measured by extending the pair of conducting wires connected to the liquid wiring unit 4. The pair of conducting wires 32 are disposed at both ends of the liquid wiring unit 4 in the first direction (X direction). An initial impedance R0 is measured, and then a tensile force is applied to the electrode 40 in the first direction (X direction) so that the stretch rate is 100%, and the impedance R at the 100% stretch rate is measured. A stretch rate of 100% refers to a state in which the length is 2X, where X is the length from one end to the other end of the liquid wiring unit 4 in the first direction (X direction) when no tensile force is applied. On the other hand, a stretch rate of 0% is a state in which the length from one end to the other end of the liquid wiring portion 4 in the first direction (X direction) is the length X.

[0043] Table 1 compares the resistance change rate at 100% stretch for an electrode that uses a conductive paste, such as Ag paste, for the liquid wiring portion and an electrode that uses liquid metal for the liquid wiring portion. The impedance R0 at 0% stretch (length X) is 1 Ω for both electrodes. When a tensile force is applied to achieve a 100% stretch (length 2X), the electrode that uses conductive paste for the liquid wiring portion exhibits an impedance R that is 130 times higher (resistance value: 130 Ω), while the electrode that uses liquid metal for the liquid wiring portion exhibits an impedance R that is approximately three times higher (resistance value: 3 Ω). From the above, it can be seen that liquid wiring portions that use liquid metal produce less noise than liquid wiring portions that use conductive paste. The liquid wiring section 4 may be an aqueous solution of an electrolyte. The liquid wiring section 4 may also be an aqueous solution containing metal powder, or an aqueous solution containing a metal coated with a conductive resin.

[0044] TIFF0007800407000001.tif42124In Table 1, R0 is the impedance (resistance value) of the liquid wiring portion before expansion / contraction (expansion rate 0%), and R is the impedance (resistance value) of the liquid wiring portion when it expands / contracts (expansion rate 100%).

[0045] The definition of the expansion / contraction ratio is not limited to this. For example, when there are two adjacent electrode bodies sandwiching a liquid wiring portion, and the distance from one electrode body to the other when no external pressure is applied is defined as X, the expansion / contraction ratio may be defined as 100% when the distance between the two electrode bodies is 2X.

[0046] (Embodiment 9) Fig. 17A is a schematic cross-sectional view showing the cross-sectional structure of electrode 10h according to embodiment 9. Fig. 17B is an enlarged cross-sectional view of area G surrounded by a dotted line including one electrode body 2 at the end of electrode 10h in Fig. 17A. Fig. 17C is an enlarged cross-sectional view showing a state in which peeled portion 28 has occurred at the end of electrode 10h in Fig. 17B. Fig. 17D is an enlarged cross-sectional view showing a state in which peeled portion 28 has occurred in electrode 50 of a reference example that does not have a sealing portion that seals the liquid wiring portion. Electrode 10h according to embodiment 9 differs from the electrode according to embodiment 1 in that it includes a sealing portion 24 that seals the liquid wiring portion 4, as shown in FIG. 17B. To achieve electrical continuity between the liquid wiring portion 4 and the electrode body 2, this sealing portion 24 may be conductive. With this electrode 10h, even if a peeled portion 28 occurs at a resin joint 27 between the substrate 11 and the electrode body 2 and the liquid wiring portion 4, as shown in FIG. 17C, the liquid wiring portion 4 is sealed by a sealing portion 2416, so leakage of the liquid wiring portion 4 does not occur. On the other hand, in the case of electrode 50 of the reference example that does not include a sealing portion, leakage of the liquid wiring portion 4 may occur if a peeled portion 28 occurs between the substrate 11 and the electrode body 2 and the liquid wiring portion 4, as shown in FIG. 17D.

[0047] <Sealing part> The sealing portion 24 only needs to be able to seal the periphery of the liquid wiring portion 4. Note that, in FIG. 17B, the sealing portion 24 is shown as sealing the entire periphery of the liquid wiring portion 4, but this is not limited thereto, and the liquid wiring portion 4 may be sealed in predetermined units. For example, the entire surface of the liquid wiring portion 4 may be covered with a single integrated sealing portion. Alternatively, the liquid wiring portion may be sealed in rows or columns by multiple sealing portions. Furthermore, the liquid wiring portion may be sealed in units of unit area by multiple sealing portions. When the liquid wiring portion is sealed in parts by multiple sealing portions, it is only necessary to ensure conductivity between each sealing portion.

[0048] The sealing portion 24 may be made of an elastic resin such as elastomer, PDMS, or PVP, or a hydrogel. The sealing portion 24 may also be made of polyurethane or other fibers, tungsten oxide, copper, or gallium oxide (Ga2O3). The sealing portion 24 is not limited to a single member, but may be a composite made of multiple materials, such as resin and copper. The sealing portion 24 may be insulating, or may be conductive to achieve electrical continuity with the electrode body. As described below, the sealing portion may have an inner first sealing portion and an outer second sealing portion. In this case, the first sealing portion may be conductive, and the second sealing portion may be insulating. The inner first sealing portion may be a solid wiring portion. The outer second sealing portion may be an insulating portion. The sealing portion may also be referred to as a holder or a protective layer depending on its function.

[0049] The sealing portion 24 may contain a porous material. The porous material may be, for example, a sponge containing resin. When the sealing portion 24 contains a porous material, the porous material retains the liquid that constitutes the liquid wiring portion 4, and since the porous material is solid, the liquid wiring portion 4 is less likely to deform, thereby reducing noise. This is particularly effective in suppressing deformation of the liquid wiring portion 4 that occurs when the electrode 10h deforms. The porous material is not limited to resin, and may contain materials such as cloth and metal. The porous material may also be, for example, a nonwoven fabric.

[0050] (Embodiment 10) FIG. 18 is a schematic cross-sectional view showing the cross-sectional structure of an electrode 10i according to the tenth embodiment. The electrode 10i according to the tenth embodiment differs from the electrode according to the first embodiment in that the liquid wiring portion 4 contains a porous material 26, as shown in FIG. 18 . The porous material 26 is, for example, a sponge containing resin. By including a porous material in the liquid wiring portion 4, the porous material retains the liquid that constitutes the liquid wiring portion 4, and since the porous material is solid, the liquid wiring portion 4 is less likely to deform, thereby reducing noise. This is particularly effective in suppressing deformation of the liquid wiring portion 4 that occurs when the electrode 10i deforms. The porous material 26 is not limited to resin, and may contain materials such as cloth and metal. The porous material 26 may also be, for example, a nonwoven fabric.

[0051] (Embodiment 11) Fig. 19A is a schematic cross-sectional view showing the cross-sectional structure of electrode 10j according to embodiment 11. Fig. 19B is an enlarged cross-sectional view of region H surrounded by a dotted line including one electrode body 2 at the end of electrode 10j in Fig. 19A. Fig. 19C is an enlarged cross-sectional view showing a state in which peeled portion 28 has occurred at the end of electrode 10j in Fig. 19B. Fig. 19D is an enlarged cross-sectional view showing a state in which peeled portion 28 has occurred in electrode 50a of a reference example that does not have a sealing portion that seals liquid wiring portion 4. Electrode 10j according to embodiment 11 differs from the electrode according to embodiment 1 in that it includes a sealing portion 24 that seals liquid wiring portion 4, as shown in Fig. 19B. With this electrode 10j, even if peeling portion 28 occurs at resin joint 27 between substrate 11 and electrode body 2 and liquid wiring portion 4, as shown in Fig. 19C, leakage of liquid wiring portion 4 does not occur because liquid wiring portion 4 is sealed by sealing portion 24. In the case of electrode 50a of the reference example that does not have a sealing portion, leakage of liquid wiring portion 4 may occur if peeling portion 28 occurs between substrate 11 and electrode body 2 and liquid wiring portion 4, as shown in Fig. 19D.

[0052] (Embodiment 12) Fig. 20A is a schematic cross-sectional view showing the cross-sectional structure of electrode 10k according to embodiment 12. Fig. 20B is an enlarged cross-sectional view of region I surrounded by a dotted line including one electrode body 2 at the end of electrode 10k in Fig. 20A, showing a state in which a crack 29 has occurred at the end of electrode 10k. Fig. 20C is an enlarged cross-sectional view showing a state in which a crack has occurred in an electrode of a reference example that does not have a sealing portion that seals the liquid wiring portion. 20B, the electrode 10k according to embodiment 12 differs from the electrode according to embodiment 1 in that it includes a first sealing portion 24a that seals the liquid wiring portion 4 and a second sealing portion 24b that is located outside the first sealing portion 24a. The first sealing portion 24a and the second sealing portion 24b function as solid wiring portions. With this electrode 10k, even if the insulating portion 6 is broken due to sudden expansion / contraction or external force, the first sealing portion 24a and the second sealing portion 24b can prevent leakage of liquid from the liquid wiring layer 4.

[0053] The first sealing portion 24a is disposed inside the electrode 10k, and the second sealing portion 24b is disposed outside the first sealing portion 16a. The first sealing portion 24a and the second sealing portion 24b may have different elastic moduli. For example, if the elastic modulus of the first sealing portion 24a is greater than the elastic modulus of the second sealing portion 24b, even when pressure is applied to the electrode 10k, the second sealing portion 16b deforms to absorb the pressure, and the first sealing portion 24a is less likely to deform than the second sealing portion 24b, thereby reducing the amount of noise generated.

[0054] On the other hand, when the relationship of elastic modulus of first sealing portion 24a<elastic modulus of second sealing portion 24b holds, even if second sealing portion 24b is damaged by pressure applied to electrode 10k, first sealing portion 24a is more easily deformed, and therefore damage to second sealing portion 24b can be prevented from extending to first sealing portion 24a. Furthermore, because first sealing portion 24a is less likely to be damaged, leakage of the liquid constituting the liquid wiring portion to the outside can be prevented, and noise caused by leakage to the outside can be prevented in advance. Furthermore, the first sealing portion 24a and the second sealing portion 24b may be separate bodies that are movable relative to each other. By making them movable, even if the second sealing portion 24b is damaged by pressure applied to the electrode 10k, the damage to the second sealing portion 16b can be prevented from spreading to the first sealing portion 24a, since the second sealing portion 24b can be moved relative to each other. Furthermore, first sealing portion 24a and second sealing portion 24b may be different colors from each other. By using different colors from each other, the user can notice when second sealing portion 24b is damaged, and therefore it is possible to prevent the liquid constituting the liquid wiring portion from leaking to the outside.

[0055] (Embodiment 13) Fig. 21A is a schematic cross-sectional view showing the cross-sectional structure of electrode 10l according to embodiment 13. Fig. 21B is an enlarged cross-sectional view of region J surrounded by a dotted line including one electrode body 2 at the end of electrode 10l in Fig. 21A. Fig. 21C is an enlarged cross-sectional view showing a state in which a crack 29a has occurred in an electrode of reference example 50c that does not have a sealing portion as a protective layer covering the outside of the insulating portion. 21B, electrode 10l according to embodiment 13 differs from the electrode according to embodiment 1 in that it has sealing portion 30 as a protective layer that covers the outside of insulating portion 6. With this electrode 10l, even if insulating portion 6 is broken due to sudden expansion / contraction or external force, sealing portion 30 as a protective layer that covers the outside of insulating portion 6 can prevent leakage of liquid from the liquid wiring portion.

[0056] (Embodiment 14) Fig. 22A is a schematic cross-sectional view showing the cross-sectional structure of electrode 10m according to embodiment 14. Fig. 22B is an enlarged cross-sectional view of region K surrounded by a dotted line and including one electrode body 2 at the end of electrode 10m in Fig. 22A. The electrode 10m according to embodiment 14 differs from the electrode according to embodiment 1 in that a magnet 34 is disposed near the electrode body 2, as shown in FIG. 22B. In this case, the liquid wiring portion may contain a ferromagnetic material, such as Fe, Ni, or Co. By disposing the magnet 34, the liquid wiring portion 4 containing the ferromagnetic material is held near the wiring of the electrode 10m, so that noise generation can be suppressed even if the shape of the electrode 10m changes. The magnet 34 is preferably disposed in a position overlapping the electrode body 2 when viewed in a plan view from the normal direction to the top surface of the substrate 11.

[0057] The conductivity can be improved by improving the wettability between the liquid wiring portion and the electrode body. For example, the wettability of the electrode body can be improved by reducing the surface roughness of the electrode body to 1 μm or less. The wettability between the liquid wiring portion and the electrode body can also be improved by providing a layer of conductive liquid (called a "slip layer"), for example, a layer of electrolyte, between the liquid wiring portion and the electrode body. Furthermore, the wettability can be improved by setting the relative humidity between the electrode body and the liquid wiring portion to, for example, 50% or more, preferably 75% or more.

[0058] Furthermore, an electrode according to an eleventh aspect is the electrode according to the second aspect, wherein the liquid wiring portion includes a ferromagnetic material, and The electrode further includes a magnet that attracts the ferromagnetic material; The magnet may be disposed at a position overlapping at least one of the electrode bodies when viewed in a plan view from a normal direction of the first surface.

[0059] The electrode of the twelfth aspect may be any of the first to eleventh aspects, further comprising a sealing portion that seals the liquid wiring portion, and the sealing portion may include a first sealing portion and a second sealing portion that is positioned outside the first sealing portion.

[0060] The electrode according to a thirteenth aspect is the electrode of the twelfth aspect, wherein the first sealing portion has a higher elastic modulus than the second sealing portion.

[0061] In the electrode according to a fourteenth aspect, in the twelfth aspect, the second sealing portion may have a greater elastic modulus than the first sealing portion.

[0062] The electrode according to a fifteenth aspect is the electrode according to the twelfth aspect, wherein the first sealing portion may include a porous material.

[0063] The electrode according to a sixteenth aspect is the electrode according to the twelfth aspect, wherein the liquid wiring portion includes a porous material.

[0064] In addition, the present disclosure includes appropriate combinations of any of the various embodiments and / or examples described above, and can achieve the effects of each embodiment and / or example. [Industrial Applicability]

[0065] The electrode according to the present invention can suppress changes in resistance due to surface variations and suppress signal noise, making it useful for use on a moving surface of a living body or a non-living body. For example, when used on a living body, it can be used as a living body electrode. When used on a non-living body, it can be used for IoT applications. [Explanation of symbols]

[0066] 1 Front page 2 Electrode body 3 Side 2 4, 4a Liquid wiring section 5 Solid wiring section 6 Insulation 10, 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h, 10i, 10j, 10k electrode 11 Circuit Board 12 Resin (liquid) 14 Conductive Materials 24, 24a, 24b Sealing part (holding body) 26 Porous materials 27 Seams 28 Peeling section 29, 29a Cleft 30 Sealing part (protective layer) 32 Conductor 34 Magnet 40 electrodes

Claims

1. An elastically deformable electrode a plurality of electrode bodies arranged at a distance from one another; a liquid wiring portion that electrically connects the plurality of electrode bodies; Equipped with The liquid wiring portion is arranged in a grid pattern across the electrode body when viewed from a direction perpendicular to the surface of the electrode.

2. a first surface; The electrode of claim 1 , wherein the plurality of electrode bodies are disposed on the first surface.

3. 2. The electrode according to claim 1, wherein when the electrode is elastically deformed so that the distance between two of the plurality of electrode bodies is doubled when the electrode is not elastically deformed, the resistance value between the plurality of electrode bodies is 50 times or less of the resistance value between the two electrode bodies before the electrode is elastically deformed.

4. The electrode according to claim 1, wherein when the electrode is elastically deformed so that the distance between two of the plurality of electrode bodies is doubled when the electrode is not elastically deformed, the resistance value of the liquid wiring portion connecting the two electrode bodies is 10 times or less than the resistance value of the liquid wiring portion connecting the two electrode bodies before the electrode is elastically deformed.

5. The electrode according to claim 1 , wherein the liquid wiring portion includes a metal that is liquid at room temperature.

6. The electrode according to claim 1 , wherein the liquid wiring portion contains a metal containing 60% by weight or more of gallium.

7. The electrode according to claim 6 , wherein the liquid wiring portion includes a metal containing 40% by weight or less of indium.

8. The electrode according to claim 1 , wherein the liquid wiring portion is arranged so as to extend from one of the two electrode bodies adjacent to each other to the other electrode body.

9. The electrode according to claim 1 , further comprising a resin that seals the liquid wiring portion.

10. the electrode further includes a first surface and a second surface opposite to the first surface; the plurality of electrode bodies are disposed on the first surface, The electrode of claim 1 further comprising a substrate on the second surface.

11. The liquid wiring portion includes a ferromagnetic material, and The electrode further includes a magnet that attracts the ferromagnetic material; The electrode according to claim 2 , wherein the magnet is disposed at a position overlapping at least one of the electrode bodies when viewed in a plan view from a normal direction of the first surface.

12. The electrode according to claim 1 , further comprising a sealing portion that seals the liquid wiring portion, the sealing portion including a first sealing portion and a second sealing portion that is disposed outside the first sealing portion.

13. The electrode of claim 12 , wherein the first sealing portion has a modulus of elasticity greater than the second sealing portion.

14. The electrode of claim 12 , wherein the second sealing portion has a modulus of elasticity greater than the modulus of elasticity of the first sealing portion.

15. The electrode of claim 12 , wherein the first sealing portion comprises a porous material.

16. The electrode of claim 1 , wherein the liquid wiring portion comprises a porous material.

17. An elastically deformable electrode. a plurality of electrode bodies arranged at a distance from one another; a liquid wiring portion that electrically connects the plurality of electrode bodies; an insulating part that insulatively seals the liquid wiring part; a sealing portion as a protective layer covering the outside of the insulating portion; a solid wiring section that electrically connects the liquid wiring section and the electrode body through vias provided in the insulating section and the sealing section between the liquid wiring section and the electrode body; Equipped with The sealing portion seals the liquid wiring portion from the outside of the insulating portion.

Citation Information

Patent Citations

  • Implanted flexible neural electrode based on liquid metal and production method

    CN105944228A

  • Circuit substrate, and flexible thin-film circuit and manufacturing method thereof

    CN111642067A

  • Semiconductor device, manufacturing method of semiconductor device, and testing method of semiconductor device

    JP2009094250A

  • Electrode for living body and wearing tool with electrode for living body

    JP2018023568A

  • Flexible printed circuit, method for fabricating the same, and display device

    US20190132946A1