Gate valve

Abstract

Provided is a gate valve that reduces generation of particles and deterioration of a seal member disposed on a valve body by having the seal member contact an opening surface of a processing unit from a perpendicular direction without swinging the valve body with respect to an opening of the processing unit.　This gate valve comprises a moving body that operates together with a valve body, and a conversion mechanism that moves the moving body in each of a perpendicular direction to an opening surface, and a cross direction crossing the perpendicular direction. The conversion mechanism comprises: a first operation mechanism that moves in the cross direction, and moves the moving body in the cross direction; and a second operation mechanism that moves the moving body in the perpendicular direction. The operation by the second operation mechanism includes an operation by an additional movement of the first movement mechanism in the cross direction from a state in which the moving body is restricted from moving in the cross direction.

Description

[Technical Field]

[0001] The present invention relates to a gate valve for sealing an opening communicating with a processing section of a processing apparatus for performing vacuum processing. [Background technology]

[0002] 2. Description of the Related Art Various gate valves have been proposed for sealing openings that communicate with processing equipment such as chambers for processing electronic components such as semiconductor wafers and liquid crystal substrates, or load lock devices.

[0003] Among these, there is a type in which the valve element that opens and closes the valve opening is swung by a link mechanism, and when the valve is closed, it is tightly pressed against the opening surface where the opening is formed, maintaining an airtight state inside the processing device.

[0004] For example, Patent Document 1 discloses a gate valve having a swinging frame rotatably connected to the tip of an arm constituting a link mechanism at a pivot point at its midpoint, and a valve body connected to the upper end of the swinging frame, and by swinging the swinging frame at the pivot point, the valve body moves toward and away from the opening peripheral surface, which is the opening surface of the opening communicating with the processing section, at a predetermined offset angle. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] International Publication No. 2000 / 075542 Summary of the Invention [Problem to be solved by the invention]

[0006] However, with the conventional gate valve, the valve disc moves at a predetermined angle relative to the opening surface when the valve is closed, causing a seal member made of an elastic material such as rubber attached to the valve disc to slide against the opening surface. Furthermore, the sliding of the seal member against the opening surface generates a shear force in the seal member in a direction parallel to the opening surface. The friction and shear force generated by the sliding of the seal member when the valve is closed could potentially cause particle generation and deterioration of the seal member (deterioration of sealing performance).

[0007] The object of this invention is to provide a gate valve that achieves separate movements of appearing and retracting to a position opposite an opening and moving toward or away from the opening surface without requiring the valve body to oscillate relative to an opening surface on which an opening communicating with a processing section is formed, and that abuts a sealing member arranged on the valve body perpendicularly against the opening surface, thereby reducing the generation of particles due to sliding and deterioration of the sealing member due to shear forces. [Means for solving the problem]

[0008] In order to solve the above problem, the present invention provides a gate valve that presses a valve body equipped with a sealing member against an opening surface having an opening communicating with a processing section of a processing apparatus that performs vacuum processing, thereby sealing the opening, and includes a movable body that operates integrally with the valve body, a conversion mechanism that moves the movable body in each of a direction perpendicular to the opening surface and a cross direction that crosses the perpendicular direction, and a transmission mechanism that transmits power from a drive source to the conversion mechanism, wherein the conversion mechanism moves in the cross direction and includes a first operating mechanism that moves the movable body in the cross direction and a second operating mechanism that moves the movable body in the vertical direction, and the operation by the second operating mechanism includes an operation by additional movement of the first operating mechanism in the cross direction from a state in which movement of the movable body in the cross direction is restricted.

[0009] The present invention also provides a gate valve that seals an opening by pressing a valve body with a seal member against an opening surface formed with the opening, the opening communicating with a processing section of a processing apparatus that performs vacuum processing, the gate valve comprising: a housing; a vertical moving body that is held by the housing and is movable in a direction perpendicular to the opening surface; and a vertical operation mechanism that is provided between the housing and the vertical moving body, the vertical moving body comprising a moving body that moves integrally with the valve body; a lifting body that moves together with the moving body in a direction intersecting the vertical direction; and a vertical operation mechanism that moves the lifting body in the intersecting direction. and a lifting / lowering mechanism provided between the lifting body and the moving body, wherein the lifting body is configured to be movable in the intersecting direction through a first operating region in which it moves in the intersecting direction together with the moving body via the lifting / lowering mechanism, and a second operating region in which it moves further in the intersecting direction by operating the vertical operating mechanism while the movement of the moving body in the intersecting direction is restricted, and the vertical operating mechanism moves the vertical moving body in the vertical direction in accordance with the movement of the lifting body in the intersecting direction in the second operating region. [Effects of the Invention]

[0010] According to the present invention, generation of particles and deterioration of sealing members in a gate valve can be reduced. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view showing the external configuration of a semiconductor manufacturing apparatus equipped with a gate valve according to an embodiment of the present invention; [Figure 2] 1 is a perspective view of the appearance of a gate valve according to an embodiment of the present invention. [Figure 3] 1 is a perspective view showing an internal configuration of a gate valve according to an embodiment of the present invention. [Figure 4] 1 is an exploded perspective view showing the internal configuration of a gate valve according to an embodiment of the present invention. [Figure 5] 1 is a partially enlarged perspective view showing the internal structure of a gate valve according to an embodiment of the present invention. FIG. [Figure 6]1 is a front view showing the internal configuration of a gate valve according to an embodiment of the present invention. FIG. [Figure 7] 1 is a front view showing the configuration of a vertical moving body of a gate valve according to an embodiment of the present invention. FIG. [Figure 8] 1 is a front view showing the internal configuration of a gate valve according to an embodiment of the present invention. FIG. [Figure 9] 1 is a front view showing the internal configuration of a gate valve according to an embodiment of the present invention. FIG. [Figure 10] 1 is a side view showing the internal configuration of a gate valve according to an embodiment of the present invention. [Figure 11] 1 is a side view showing the internal configuration of a gate valve according to an embodiment of the present invention. [Figure 12] 1 is a side view showing the internal configuration of a gate valve according to an embodiment of the present invention. [Figure 13] 10A and 10B are front views showing another example of the support structure of the guide member according to the embodiment of the present invention. [Figure 14] 1 is a partially enlarged side cross-sectional view showing the internal structure of a gate valve according to an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, embodiments of the gate valve according to the present invention will be described in detail with reference to the drawings. In the following description, unless otherwise specified, the closing side (left side in FIG. 10) where the valve element of the gate valve closes the opening will be referred to as the front side or front side, and the opposite side (right side in FIG. 10) will be referred to as the rear side or back side. Based on this, the left and right sides in FIG. 9 will be referred to as the left and right sides, the upper side in FIG. 9 will be referred to as the upper side or top side, and the lower side in FIG. 9 will be referred to as the lower side or bottom side.

[0013] [1. Schematic structure of a gate valve] The gate valve A according to this embodiment is provided with a mechanism for opening and closing a valve element 23 that is pressed against an opening surface A100 of an opening A10 that communicates with a processing section of a processing apparatus that performs vacuum processing, and seals the opening A10. As shown in Fig. 1, the gate valve A is disposed as a processing apparatus used in semiconductor manufacturing, for example, between a load lock apparatus B that increases the degree of vacuum to a predetermined value and a processing apparatus C that processes wafers in a vacuum.

[0014] As shown in Figures 1 and 2(a), the gate valve A of this embodiment is a so-called square gate valve that includes a valve box A1 that houses a valve body 23 and a housing 1 that is connected to the valve box A1 below.

[0015] The valve box A1 has openings A10 and A10' that correspond to the opening B10 of the load lock device B and the opening C10 of the processing device C, respectively, and communicate with the processing sections of the devices B and C. The housing 1 contains a valve element operating mechanism that operates the valve element 23 to open and close the openings A10 and A10'.

[0016] In the gate valve A, the valve element 23 is moved vertically to the opening surface of the opening A10, which serves as a wafer loading / unloading port, and as shown in Fig. 14, a sealing member 23a made of an elastic material provided on the valve element 23 (described later) is pressed against the opening surface A100 and crushed, thereby sealing the opening A10. In the gate valve A, the opening A10, which communicates with the opening B10 of the load lock device B, is formed by penetrating a hole that is rectangular in a front view at the front of the valve body A1, as shown in Fig. 2(a).

[0017] 2(b), the gate valve A may be a so-called door valve that does not have a valve box A1. In this case, the gate valve A is disposed such that the valve element 23 moves vertically to approach or move away from the opening plane of the opening B10 of the load lock device B or the opening C10 of the processing device C, for example.

[0018] The valve body 23 is a horizontally rectangular plate-like member that is slightly larger than the openings A10, B10, and C10 and similar in shape. One plate surface of the valve body 23 serves as an abutment surface that abuts against the outer peripheral edges that form the opening faces of the openings A10, B10, and C10. As shown in Figures 2(b), 4, and 14, a seal member 23a made of an elastic material is affixed to the abutment surface of the valve body 23.

[0019] The sealing member 23a is, for example, an annular (endless) member having a circular cross section. As shown in Figures 14(a) to 14(c), the sealing member 23a is provided in a circumferential groove 23b formed in the contact surface of the valve body 23 along the outer edge of the valve body 23 so as to protrude a predetermined height from the contact surface of the valve body 23 toward the opening surface A100. Furthermore, at a closing position P3 (described later), the sealing member 23a is pressed against the opening surface A100 and crushed by the vertical movement of the valve body 23.

[0020] 11 to 12, 14(b) and 14(c), the vertical direction in which the valve disc 23 moves is a direction in which the valve disc 23 moves toward or away from the opening surface A100 between a facing position P2 and a closed position P3, which will be described later, in the facing direction of the opening surface A100, while maintaining a state in which the plate surface of the valve disc 23 and the opening surface A100 are plane-parallel. The vertical direction in which the valve disc 23 moves in this embodiment is a horizontal direction (front-to-back direction) perpendicular to the opening surface A100, which is a vertical plane.

[0021] 10-11 and 14(a) and 14(b), the intersecting direction in which the valve disc 23 moves is a direction intersecting the vertical direction in a side view of the gate valve A, and is a direction in which the valve disc 23 moves toward or away from the opening surface A100, with the position of the opening A10 in the opening surface A100 as a reference, between an open position P1 and a facing position P2 (described later) in the height direction of the opening surface A100. The intersecting direction in which the valve disc 23 moves in this embodiment is a vertical direction (a direction perpendicular to the up-down direction and the horizontal direction) parallel to the opening surface A100, which is a vertical plane. However, the intersecting direction in which the valve disc 23 moves may also be an inclined direction inclined relative to the vertical direction.

[0022] The valve element 23 of the gate valve A of this embodiment moves toward or away from the opening surface A100, or maintains a fixed distance from the opening surface A100, based on the position of the opening surface A100. Specifically, the valve element actuation mechanism housed in the housing 1 is configured so that the valve element 23 moves along a perpendicular path defined by the vertical direction and the orthogonal direction perpendicular to the vertical direction.

[0023] In other words, the closing direction of the valve element 23 that closes the opening A10 is the direction, either the intersecting direction or the perpendicular direction, in which the valve element 23 approaches the opening surface A100. The opening direction of the valve element 23 that opens the opening A10 is the direction, either the intersecting direction or the perpendicular direction, in which the valve element 23 moves away from the opening surface A100.

[0024] 3 and 4, the housing 1 has a lower wall 10, an upper wall 11, a left side wall 12, and a right side wall 13, and is formed in the shape of a hollow rectangular box. A support frame insertion hole 10a is formed in the center of the lower wall 10, through which a drive source support frame 72, which supports the drive source 3, is inserted. Furthermore, a shaft insertion hole 11a is formed in the center of the upper wall 11 of the housing 1, through which a valve element shaft 24, to which the valve element 23 is connected, is inserted. The shaft insertion hole 11a is formed with a certain clearance between it and the valve element shaft 24, so that the valve element shaft 24 can move in the vertical direction and the intersecting direction.

[0025] The housing 1 accommodates a valve element operating mechanism that moves the valve element 23 via the valve element shaft 24 in directions perpendicular to and intersecting the opening surface A100 of the opening A10.

[0026] As shown in Figures 3 to 6, the gate valve A has a valve body operating mechanism housed inside the housing 1, which includes a moving body 2 that operates integrally with the valve body 23, a conversion mechanism that moves the moving body 2 in each of the directions perpendicular to the opening surface A100 and in the intersecting directions that intersect with the perpendicular direction, and a transmission mechanism 4 that transmits power from a drive source 3 to the conversion mechanism.

[0027] The conversion mechanism includes a first operating mechanism 5 that moves in the intersecting direction and moves the movable body 2 in the intersecting direction, and a second operating mechanism 6 that moves the movable body 2 in the vertical direction. Note that the conversion mechanism does not necessarily have to move the movable body 2 perpendicularly. That is, as described above, the conversion mechanism moves the movable body 2 separately in the intersecting direction and the vertical direction by actuation of the first operating mechanism 5 and the second operating mechanism 6. However, as long as the valve body 23 can be moved closer to or farther away from the opening surface A100 of the opening A10 via the movable body 2, the technical idea of ​​the present invention does not deviate even if the trajectory of the movable body 2 moving in the intersecting direction and the trajectory of the movable body 2 moving in the vertical direction are not orthogonal.

[0028] A notable feature of the gate valve A of the present invention is that the operation by the second operating mechanism 6 includes an operation by additional movement of the first operating mechanism 5 in the intersecting direction from a state in which movement of the movable body 2 in the intersecting direction is restricted.

[0029] The gate valve A, in which the movement direction of the valve element 23 is controlled individually and stepwise by the first operating mechanism 5 and the second operating mechanism 6, comprises a housing 1 in which the second operating mechanism 6 is disposed, and a guide member 7 that is restricted from moving in the intersecting direction by the housing 1 and is provided so as to be movable in the vertical direction together with the movable body 2. In other words, the second operating mechanism 6 is provided in a fixed position in advance regardless of movement of the movable body 2 in the intersecting direction.

[0030] 6 , the second operating mechanism 6 includes a support portion 92 supported by the housing 1, an engagement portion 90 that engages with the guide member 7, and an input portion 91 that engages with or disengages from the first operating mechanism 5. The guide member 7 includes a first engagement member 77 that engages with the engagement portion 90 of the second operating mechanism 6. The first operating mechanism 5 includes a second engagement member 53 that engages with the input portion 91 of the second operating mechanism 6.

[0031] In particular, the second operating mechanism 6 of this embodiment is composed of a link mechanism 60, as shown in Figures 10 to 12, and has a vertical link portion 61 including an engagement portion 90 and a transmission link portion 62 including an input portion 91.

[0032] The second operating mechanism 6 converts the stress of additional movement in the transverse direction of the first operating mechanism 5, which is input from the first operating mechanism 5 to the input part 91, into movement stress in the vertical direction via the transmission link part 62 and the vertical link part 61.

[0033] The vertical movement stress converted by the second operating mechanism 6 is transmitted to the guide member 7 via the engaging portion 90 of the vertical link portion 61, and the guide member 7 moves vertically together with the movable body 2. As the movable body 2 moves vertically, the valve body 23 opens and closes.

[0034] 6 and 8 to 12, the valve element 23 is configured to be movable between an open position P1 in which it is housed in the lower part of the valve box A1, a facing position P2 in which it faces the opening surface A100 in which the opening A10 is formed in the upper part of the valve box A1 and is spaced apart from the opening A10, and a closed position P3 in which it faces the opening surface A100 in which the opening A10 is formed in the upper part of the valve box A1 and is in close contact with the periphery of the opening A10. When the valve element 23 is located in the closed position P3, it closes the opening A10, and when it is located in the open position P1, it opens the opening A10.

[0035] In addition, as shown in Figures 10 to 12, the first operating mechanism 5 moves the movable body 2, which operates integrally with the valve body 23, by operating in the first operating region R1 and the second operating region R2, thereby moving the valve body 23 to each of the open position P1, the facing position P2, and the closed position P3.

[0036] The first operation region R1 is a region in which the first operation mechanism 5 performs a first operation of moving the valve element 23 (movable body 2) between the open position P1 and the facing position P2. The second operation region R2 is a region in which the first operation mechanism 5 performs a second operation of moving the valve element 23 between the facing position P2 and the closed position P3.

[0037] More specifically, the first operating region R1 is a region in which the first operating mechanism 5 moves in the intersecting direction until a second engagement member 53 provided on the lifting body 50, which will be described later as the first operating mechanism 5, comes into contact with an engagement portion 90 of the second operating mechanism 6. The first operation of the first operating mechanism 5 is an operation in which the lifting body 50 moves within the first operating region R1, and is an operation in which the movable body 2 moves in the intersecting direction. The first operation causes the valve element 23 connected to the movable body 2 to move back and forth between an open position P1 and a facing position P2.

[0038] The second operation region R2 is a region in which the first operation mechanism 5 moves in the intersecting direction while maintaining contact between the second engagement member 53 provided on the first operation mechanism 5 and the input portion 91. The second operation of the first operation mechanism 5 is an operation in which the first operation mechanism 5 moves within the second operation region R2 and activates the second operation mechanism 6. The second operation causes the valve element 23 connected to the movable body 2 to move back and forth between the closed position P3 and the facing position P2. Note that in the second operation, the second operation mechanism 6 moves the movable body 2 in the vertical direction, but unlike the first operation, does not move the movable body 2 in the intersecting direction.

[0039] That is, the first operating mechanism 5 performs a first operation in the first operating region R1 to move the movable body 2 in the intersecting direction and position the valve body 23 from the open position P1 to the facing position P2, and then performs a second operation in the second operating region R2 to perform an additional movement in the intersecting direction different from the first operation. In conjunction with the additional movement in the intersecting direction as the second operation in the second operating region R2 of the first operating mechanism 5, the second operating mechanism 6 moves the movable body 2 in the vertical direction to position the valve body 23 from the facing position P2 to the closing position P3, thereby achieving tight sealing of the opening A10 of the processing section.

[0040] The valve element actuation mechanism of the gate valve A according to this embodiment is equipped with two movement mechanism systems: a valve element cross-movement mechanism system for adjusting the movement position of the valve element 23 in the cross direction with respect to the opening surface A100 communicating with the processing section, and a valve element vertical movement mechanism system for adjusting the movement position of the valve element 23 in the vertical direction. Each system will be described in detail below.

[0041] [2. Valve body cross movement mechanism] The valve body cross-movement mechanism system is held in the housing 1 and, as shown in Fig. 8, is composed of a moving body 2 that is movable in a direction crossing the opening surface A100, and a vertical moving body A2 that is equipped with a first operating mechanism 5. In the following, since the vertical moving body A2 basically has the same configuration symmetrically in a front view, the same components will be assigned the same reference numerals and explanations will be omitted unless otherwise specified.

[0042] As shown in Figure 8, the vertical moving body A2 is composed of a moving body 2, a first operating mechanism 5 that moves together with the moving body 2 in an intersecting direction that intersects the vertical direction, a drive source 3 that moves the first operating mechanism 5 in the intersecting direction, a transmission mechanism 4 that transmits power from the drive source 3 to the first operating mechanism 5, a lifting and lowering operating mechanism 8 that is provided between the moving body 2 and the first operating mechanism 5 and moves the moving body 2 in the intersecting direction in accordance with the operation of the first operating mechanism 5, and a guide member 7 that houses these together so that they can be moved vertically.

[0043] In the second operation region R2, the vertical mover A2 has a restricting member 74 that restricts the movement of the mover 2 in the intersecting direction, and a first engaging member 77 that engages with a vertical operation mechanism A3, which will be described later.

[0044] The guide member 7 functions as a substantial housing that houses the lift slider 20 as the moving body 2 and the lift body 50 as the first operating mechanism 5 and moves the valve body 23 in the intersecting direction. The guide member 7 is a hollow, substantially rectangular box-shaped member that is smaller than the housing 1 and is supported within the housing 1 so as to be movable in the vertical direction.

[0045] The guide member 7 itself does not move in the cross direction, but moves vertically together with the valve element 23 by a vertical operating mechanism A3 in a valve element vertical movement mechanism system described later. The valve element cross movement mechanism system can be said to be a vertical moving body A2 because the guide member 7 moves vertically by a valve element vertical movement mechanism system described later.

[0046] The guide member 7 comprises a lower wall 70, a guide rod 76 provided at a predetermined position on the lower wall 70 to guide the lifting slider 20 and the lifting body 50 in the intersecting direction, and a first engagement member 77 that engages with the engagement portion 90 of the second operating mechanism 6.

[0047] The guide member 7 of this embodiment is U-shaped with an open top when viewed from the front, and includes a pair of side walls, a left wall 71 and a right wall 71, erected at the left and right ends of a lower wall 70. The left wall 71 and the right wall 71 each have a front surface, a rear surface, and left and right outer side surfaces. These surfaces form a curved, plate-like columnar portion with a generally U-shaped cross section with the left and right inner surfaces open. The left wall 71 and the right wall 71 are not essential components as long as they function to guide the movable body 2 and the first operating mechanism 5 in the intersecting direction by the guide rod 76 provided on the lower wall 70. Furthermore, vertical rectangular window-like vertical holes 73 are formed in the lower halves of the left wall 71 and the right wall 71 of the guide member 7 of this embodiment, into which the left and right ends of the lifting body 50 serving as the first operating mechanism 5 are inserted. The vertical holes 73 are formed in the side surfaces of the left wall 71 and the right wall 71, respectively.

[0048] A motor 30 is provided below the guide member 7 as a drive source 3. The motor 30 has an output shaft connected to a transmission mechanism 4 via a coupling 31. The transmission mechanism 4 is configured with a so-called ball screw 40 that includes a screw shaft 41 connected to the output shaft of the motor 30 via the coupling 31 and a ball nut 42 that moves in the intersecting direction along the screw shaft 41. Note that, as other embodiments, the drive source 3 may be a pressure device using a fluid (e.g., air or hydraulics) or a linear actuator using magnetic force. Furthermore, the transmission mechanism 4 may be any mechanism that moves the first operating mechanism 5 in the intersecting direction.

[0049] As shown in Figures 6 and 7, the screw shaft 41 is inserted into an insertion hole 70a formed in the center of a lower wall 70 of the guide member 7. As shown in Figure 3, the ball nut 42 is connected to the screw shaft 41, which protrudes upward from the lower wall 70 into the guide member 7 through the insertion hole 70a, so as to be movable in the intersecting direction (up and down direction). In addition, the ball nut 42 is connected to the lifting body 50 serving as the first operating mechanism 5, and moves integrally with the lifting body 50 in the intersecting direction.

[0050] A drive source support frame 72 is provided on the lower peripheral edge of the insertion hole 70a of the lower wall 70, and supports the motor 30 and coupling 31, with their output shafts facing upward, below the guide member 7 in a suspended manner.

[0051] 6 to 8, the drive source support frame 72 includes four support frame portions 72a that are vertically installed at positions corresponding to the four corners of the rectangle at regular intervals around the periphery of the insertion hole 70a on the bottom surface of the lower wall 70, and a frame base plate 72b that is provided between the lower parts of the four support frame portions 72a. The motor 30 is attached to the lower surface side of the frame base plate 72b, and the coupling 31 is attached to the upper surface side.

[0052] 3, a support frame insertion hole 10a is formed in the center of the lower wall 10 of the housing 1, into which the motor 30 and coupling 31 are disposed together with the drive source support frame 72. The support frame insertion hole 10a is formed with a certain clearance between it and the drive source support frame 72 so that the drive source support frame 72 can move in the vertical direction. In this way, the drive source 3 is supported by the guide member 7 via the drive source support frame 72 in a state where its rotation is restricted.

[0053] The guide rod 76 is a member through which the movable body 2 is inserted at its upper side and the first operating mechanism 5 is inserted at its lower side, and which guides the movable body 2 and the first operating mechanism 5 in the intersecting direction. The guide rod 76 is erected on the lower wall 70 of the guide member 7, as shown in FIGS. 2 and 3. The guide rod 76 in this embodiment is formed to have approximately the same vertical length as the left and right walls 71, and is erected at positions on both the left and right sides of the screw shaft 41.

[0054] Guide rod insertion holes 21, 51 through which a pair of left and right guide rods 76 are inserted are formed in the lifting slider 20 as the moving body 2 and the lifting body 50 as the first operating mechanism 5. This restricts the movement of the moving body 2 and the first operating mechanism 5 in the vertical direction (front-back direction) and left-right direction, and also restricts the rotation of the ball nut 42 of the ball screw 40 as it moves in the intersecting direction.

[0055] The guide rod 76 also includes a restricting member 74 that restricts movement of the movable body 2 in the intersecting direction in the second operation region R2. The restricting member 74 is fixed to the upper end of the guide rod 76.

[0056] Specifically, the pair of left and right guide rods 76 are provided with a restricting member 74 on each of the left guide rod 76 and the right guide rod 76, with the screw shaft 41 at the center. The restricting member 74 is a member having a rectangular shape in a plan view and has horizontal upper and lower surfaces. The restricting member 74 is provided at the upper ends of the left and right side walls 71 so as to fit into the U-shaped shapes of each side wall in a plan view. The left restricting member 74 is fixed to the upper end of the left side wall 71 of the guide member 7 and the upper end of the left guide rod 76, respectively. The right restricting member 74 is fixed to the upper end of the right side wall 71 of the guide member 7 and the upper end of the right guide rod 76, respectively. As a result, the upper surfaces of the left and right sides of the movable body 2 abut against the lower surfaces of the restricting members 74, thereby regulating the position of the movable body 2 in the intersecting direction.

[0057] That is, the upward end position of the movable body 2, whose movement in the intersecting direction (up and down direction) is restricted by the restricting member 74, is the facing position P2 where the valve body 23 connected to the movable body 2 via the valve body shaft 24 protrudes upward within the valve box A1 and faces the opening surface A100, as shown in Figures 6 and 7.

[0058] The first engagement members 77 are provided on the left and right outer sides of the guide rod 76. In this embodiment, the first engagement members 77 are provided near the front of the outer upper parts of the left side wall 71 and the right side wall 71, but the first engagement members 77 may also be provided on the restricting members 74 provided at the upper ends of the guide rods 76.

[0059] As shown in FIGS. 5 and 10 to 12, the first engaging member 77 is a first bearing 770 having a vertically elongated groove 770a that is open upward. A first engaging shaft 900 serving as the engaging portion 90 of the second operating mechanism 6 is inserted into the vertically elongated groove 770a. As shown in FIG. 5, the first bearing 770 has a vertically elongated groove 770b that is open downward on its lower side. The vertically elongated groove 770b is formed to be vertically symmetrical with the upper vertically elongated groove 770a. This reduces the frequency of replacement of the first bearing 770 when the first bearing 770 wears out due to repeated use by simply flipping the left and right first bearing 770 upside down and replacing them. When the left and right first bearing 770 are flipped upside down and replaced, the first engaging shaft 900 serving as the engaging portion 90 of the second operating mechanism 6 is inserted into the vertically elongated groove 770b.

[0060] The first bearing body 770 supports the first engagement shaft 900, which is displaced in accordance with the operation of the link mechanism 60, in the vertically elongated groove portion 770a so that the first engagement shaft 900 can slide up and down. As shown in Figures 8 to 10, each of the left and right walls 71 and 71 of the guide member 7 is provided with a link restriction member 78 connected to the rear side of the upper outer portion thereof, which abuts against the rear end of the driving link body 620 of the link mechanism 60 and restricts the swing range of the link body.

[0061] 6, such guide member 7 is supported from above and below by upper support portion 75 and lower support portion 75 within housing 1 so as to be movable in the vertical direction while movement in the intersecting direction is restricted. Upper support portion 75 and lower support portion 75 have the same configuration, and are provided on diagonal lines of the rectangular outer shape of guide member 7 when viewed from the front.

[0062] 6 and 7, the upper support part 75 is made up of a support shaft 75a protruding from the upper wall 11 of the housing 1 and a boss 75b protruding from the upper end of the guide member 7, loosely fitted onto the support shaft 75a, and movable in the vertical direction around the support shaft 75a. Similarly, the lower support part 75 is made up of a support shaft 75a protruding from the lower wall 10 of the housing 1 and a boss 75b protruding from the lower end of the guide member 7. The vertical movable body A2 is supported by the housing 1 via the upper support part 75 and the lower support part 75 so as to be movable in the vertical direction.

[0063] The configuration for supporting the guide member 7 within the housing 1 is not limited to the support configuration using the upper support portion 75 and the lower support portion 75. For example, as shown in Fig. 13, a configuration including a pair of left and right slide mechanisms 175 may be used as the support configuration for the guide member 7 within the housing 1. The slide mechanisms 175 are provided above the left and right restriction members 74 that form the upper end portions of the guide member 7.

[0064] The slide mechanism 175 has a rail structure with a vertical sliding direction, and includes a linear guide 176 fixed to the lower surface 11b of the upper wall 11 with bolts or the like, and a slider 177 slidably engaged with the linear guide 176. The linear guide 176 extends in the vertical direction. The slider 177 is fixed to the upper end surface 7a of the guide member 7 (for example, the upper surface of the restriction member 74) with bolts or the like, and moves integrally with the guide member 7.

[0065] The slider 177 is a sliding member that is shorter than the linear guide 176 in the extension direction of the linear guide 176, and has an engagement groove 177a into which the lower part of the linear guide 176 fits. The linear guide 176 has grooves 176a on its left and right side surfaces along the sliding direction, and the slider 177 engages with the linear guide 176 with the left and right opening edges above the engagement grooves 177a respectively fitted into the left and right grooves 176a of the linear guide 176. This engagement between the linear guide 176 and the slider 177 restricts the vertical movement of the slider 177 relative to the linear guide 176, i.e., the vertical movement of the guide member 7 relative to the upper wall 11.

[0066] In this manner, the guide member 7 may be supported by the left and right slide mechanisms 175 within the housing 1 so as to be slidable in the vertical direction relative to the upper wall 11 that constitutes the housing 1. The support configuration for the guide member 7 by the left and right slide mechanisms 175 restricts downward movement of the guide member 7 relative to the upper wall 11, making it possible to support the guide member 7 by suspending it from the upper wall 11. This eliminates the need for a support portion provided between the guide member 7 and the lower wall 10 of the housing 1, such as the lower support portion 75 shown in FIG. 9 . Note that the configuration of the slide mechanism 175 may be upside down from the configuration shown in FIG. 13 , i.e., a configuration in which the linear guide 176 is provided on the upper end surface 7a of the guide member 7 and the slider 177 is provided on the upper wall 11.

[0067] The lifting slider 20 as the moving body 2 functions as a substantial operating base that moves the valve body 23 in the closing direction and the opening direction when it receives moving stresses in the vertical direction and the intersecting direction of the valve body 23 from the first operating mechanism 5 and the second operating mechanism 6. The lifting slider 20 is a member having a box-like outer shape, and is connected to the valve body 23 via a valve body shaft 24. The lifting slider 20 is housed in the guide member 7 at a position (upper position) closer to the valve body 23 than the lifting body 50 in the intersecting direction, and is provided so as to be guided and movable in the intersecting direction (up and down direction).

[0068] A screw shaft insertion hole 22 for inserting the screw shaft 41 is formed in the center of the lift-up slider 20. In addition, as shown in Figures 3 to 7, the upper surface of the lift-up slider 20 is flat and has a valve body shaft 24 standing upright, which connects to the valve body 23 in the center of the lift-up slider 20, and the left and right sides (upper surfaces of the left and right upper corners) serve as contact surfaces that come into contact with the regulating member 74.

[0069] The valve element shaft 24 in this embodiment is arranged so that its axial direction is coaxial with the axial direction of the screw shaft 41, and the lift slider 20 is connected to its lower end. This ensures that the movement stress in the cross direction from the transmission mechanism 4 is transmitted reliably to the valve element 23 connected to the upper end of the valve element shaft 24, thereby realizing precise movement.

[0070] The lifting body 50 serving as the first operating mechanism 5 first receives the movement stress of the drive source 3 in the transverse direction transmitted from the transmission mechanism 4, moves, and then transmits the movement stress to the movable body 2 and the second operating mechanism 6. The lifting body 50 is configured to be movable in the transverse direction between a first operating region R1 in which it moves in the transverse direction together with the movable body 2 via the lifting operation mechanism 8, and a second operating region R2 in which it moves further in the transverse direction by operating a vertical operation mechanism described below, while the movement of the movable body 2 in the transverse direction is restricted. That is, as described above, the lifting body 50 moves in the transverse direction along the screw shaft 41 together with the ball nut 42, and moves back and forth between the first operating region R1 and the second operating region R2.

[0071] The lifting body 50 is a rectangular plate-shaped member, and is connected to the lifting slider 20 via the lifting operation mechanism 8, and is also connected to the transmission mechanism 4. The lifting body 50 is housed in the guide member 7 at a position closer to the drive source 3 (lower position) than the lifting slider 20 in the intersecting direction, and its movement in the intersecting direction (up and down direction) is guided. The lifting body 50 is provided in a state where it is positioned lower than the lifting slider 20, which serves as the moving body 2. A ball nut 42, which serves as the transmission mechanism 4 and is housed in the guide member 7, is attached integrally to the lifting body 50.

[0072] 7, the lifting body 50 has a nut fitting hole 54 formed in the center thereof, into which the ball nut 42 is fitted, which moves in the intersecting direction along the screw shaft 41. The ball nut 42 is fixed to the nut fitting hole 54, so that the lifting body 50 can move integrally with the ball nut 42 which moves along the screw shaft 41.

[0073] 4 to 7, the lifting body 50 is formed so that its left-right width is slightly longer than that of the lifting slider 20. Side end portions 52 of the lifting body 50 in the left-right direction are positioned outward from the left and right walls 71 via vertical holes 73 formed in the lower halves of the left and right walls 71, respectively. In other words, the left and right side end portions 52 of the lifting body 50 protrude from the vertical holes 73 to the left and right outside of the left and right walls 71.

[0074] 7 to 12, a second bearing body 530 is connected to the side end portion 52 of the lifting body 50 as a second engagement member 53. The second bearing body 530 has a fitting groove portion 530a that receives and guides the second engagement shaft 910, which is the input portion 91 located at the lowest end of the link mechanism 60.

[0075] The second bearing body 530 functions as a so-called cam groove with the fitting groove portion 530a using the second engagement shaft 910 provided at the lower end of the driving link body 620 located at the lowest end of the link mechanism 60 as a contactor, and each link body constituting the link mechanism 60 as a cam follower.

[0076] 10, the fitting groove portion 530a is a horizontal groove that is formed on the left and right end surfaces of the lifting body 50 and has an entrance 530e at the upper end of one side of the L-shaped path. The entrance 530e is a portion that receives a second engagement shaft 910 provided at the lowest end of the link mechanism 60, which will be described later, and opens upward.

[0077] Specifically, the second bearing body 530 has a lower groove wall 530b that protrudes outward from the left and right end faces of the lifting body 50 and extends in the front-to-rear direction, a short upper groove wall 530c that extends in the front-to-rear direction above the lower groove wall 530b, and a vertical groove wall 530d that connects the front ends of the lower groove wall 530b and the upper groove wall 530c. The vertical groove wall 530d connects the lower groove wall 530b and the upper groove wall 530c. The space surrounded by these walls (530b, 530c, 530d) of the second bearing body 530 forms an insertion groove portion 530a that has an entrance port 530e that opens upward at the upper rear end. Thus, the second bearing body 530 has a fitting groove portion 530a formed by the lower groove wall 530b, the upper groove wall 530c and the vertical groove wall 530d, and the fitting groove portion 530a has an entrance port 530e that is open on the upper side.

[0078] The upper groove wall 530c is formed so that its length in the front-to-rear direction is shorter than that of the lower groove wall 530b, and when viewed from above and below the fitting groove portion 530a, the area where the upper groove wall 530c and the lower groove wall 530b do not overlap is the area where the entrance 530e is formed.

[0079] The second bearing body 530 may further include a guide groove wall 530f erected on the rear side of the lower groove wall 530b. The guide groove wall 530f is a curved surface portion having an R-shape in a side view, and is configured to restrict rearward movement (to the right in FIG. 10) of the second engagement shaft 910 that has entered the fitting groove portion 530a, and to encourage forward movement (to the left in FIG. 10).

[0080] 10 and 11, when the valve body 23 does not seal the opening A10, the second engagement shaft 910 is positioned so as to overlap with the entrance 530e in the vertical direction. In other words, the driving link body 620 of the link mechanism 60 causes the input portion 91 to face the entrance 530e when the lifting body 50 is positioned in the first operating region R1.

[0081] The first operating region R1 of the lifting body 50 of this embodiment configured as described above is the lower region of the region in which the lifting body 50 moves up and down in the axial direction of the screw shaft 41. The second operating region R2 is the upper region of the region in which the lifting body 50 moves up and down in the axial direction of the screw shaft 41.

[0082] Specifically, the first operating region R1 is a region in which the lifting body 50 moves up and down until the second bearing body 530 serving as the second engaging member 53 connected to the lifting body 50 comes into contact with the second engaging shaft 910 serving as the input portion 91. The second operating region R2 is a region in which the lifting body 50 moves up and down while maintaining the second bearing body 530 serving as the second engaging member 53 connected to the lifting body 50 in contact with the second engaging shaft 910 serving as the input portion 91.

[0083] In addition, a lifting / lowering mechanism 8 is provided between the first operating mechanism 5 and the moving body 2. More specifically, the lifting / lowering mechanism 8 is an elastic body 80, such as a compression coil spring. A plurality of elastic bodies 80 are interposed between the lower surface of the lifting / lowering slider 20 and the upper surface of the lifting / lowering body 50. In other words, the lifting / lowering slider 20 and the lifting / lowering body 50 are connected to each other via the elastic bodies 80 serving as the lifting / lowering mechanism 8, as shown in FIGS. 4 to 12.

[0084] Two elastic bodies 80 are provided on the lift slider 20 and the lift body 50 at positions that are point-symmetrical about the axial center of the screw shaft 41. As shown in Fig. 4, the elastic bodies 80 are fitted onto the outside of a guide rod 81 that extends between the lift slider 20 and the lift body 50, and constantly urge the lift slider 20 upward on the lift body 50. Note that, as another example, the elastic bodies 80 may be a plurality of disc springs or the like fitted onto the exterior of the guide rod 81.

[0085] The lifting slider 20 and lifting body 50 configured as described above are housed and arranged in the guide member 7, and move up and down following the threaded rotation of the ball screw 40 without co-rotating. That is, in the vertical moving body A2 serving as the valve body crossing movement mechanism system, as shown in Figs. 4 to 7, as the motor 30 serving as the drive source 3 is driven, its power is transmitted to the ball screw 40 serving as the transmission mechanism 4.

[0086] Specifically, screw shaft 41, which is connected to the output shaft of motor 30 via coupling 31, is driven to rotate, and ball nut 42, which is threadedly engaged with it, moves up and down. As ball nut 42 moves up and down, lifting body 50, which is provided integrally with ball nut 42, also starts to move up and down, and the movement stress is transmitted to lifting slider 20, which serves as moving body 2 located above, via elastic body 80, which serves as lifting mechanism 8. In other words, lifting body 50 moves up and down together with lifting slider 20, via ball screw 40, via elastic body 80, which is maintained in an extended form.

[0087] In this way, the elastic body 80 is provided so as to move integrally with the lift slider 20 and the lift body 50 in the transverse direction and the perpendicular direction. By adopting such a configuration for integral movement, it is possible to prevent buckling deformation of the elastic body 80, for example, when moving in the vertical direction. Furthermore, since there is less sliding at the contact portion between the elastic body 80 and the lift slider 20 and at the contact portion between the elastic body 80 and the lift body 50, it is possible to reduce the generation of particles.

[0088] When the lifting slider 20 hits the regulating member 74 and stops at the uppermost position, the valve body 23 protrudes upward within the valve box A1 and takes up a facing position P2, maintaining a certain distance from the opening A10, as shown in Figures 8 and 11.

[0089] That is, the first operation performed by the lift body 50 in the first operation region R1 causes the lift slider 20 to move between the open position P1 and the facing position P2. In other words, the lift slider 20 moves in the up and down direction between a state in which it is positioned downward and a state in which it abuts against the restricting member 74.

[0090] In this way, the vertical moving body A2 moves the lifting body 50 and the lifting slider 20 in the cross direction by the rotation of the ball screw 40, making it possible to operate the up and down position of the valve disc 23. That is, when the screw shaft 41 connected to the output shaft is rotated by the operation of the motor 30, the lifting slider 20 moves along the screw shaft 41, and the valve disc shaft 24 connected integrally to the lifting slider 20 also moves, moving the valve disc 23 in the cross direction to adjust its position, and adjusting the height position of the valve disc 23 to accurately correspond to the opening A10 of the valve box A1.

[0091] Furthermore, when the lifting body 50 performs the second operation in the second operation region R2, a valve body vertical movement mechanism system (described later) is activated, and the lifting slider 20 moves vertically together with the valve body 23, causing the valve body 23 to approach or move away from the opening A10. This second operation of the lifting body 50 moves the lifting body 50 away from or towards the lifting slider 20 while deforming the elastic body 80 into an extended or contracted form, with respect to the lifting slider 20 stopped at the uppermost position.

[0092] [3. Valve body vertical movement mechanism] Next, the valve disc vertical movement mechanism system will be described in detail. The valve disc vertical movement mechanism system is composed of a vertical mover A2 as a valve disc cross-movement mechanism system, as well as a vertical operation mechanism A3 provided between the housing 1 and the vertical mover A2. Note that the vertical operation mechanism A3 basically has the same configuration symmetrically in front view, so the same components will be assigned the same reference numerals and explanations will be omitted unless otherwise specified.

[0093] As shown in Figures 9 and 12, the vertical operation mechanism A3 moves the vertical moving body A2 in the vertical direction in accordance with the second operation of the lifting body 50 as the first operation mechanism 5 in the second operation area R2, i.e., movement in the intersecting direction.

[0094] The vertical operating mechanism A3 is provided with a pair of link mechanisms 60 that are interposed between the housing 1 and the guide member 7 and swing as the second operating mechanism 6 described above, and is configured to displace the vertical moving body A2 as a whole in the vertical direction of the housing 1, i.e., the moving body 2 equipped with the valve body 23, together with the guide member 7, in the vertical direction.

[0095] 10 to 12, the link mechanism 60 is made up of multiple link bodies connected to be rotatable relative to one another. The multiple link bodies include a tension link body 611 rotatably supported at one end by the housing 1, a driven link body 610 connected at one end to the tension link body 611 to be rotatable relative to one another and engaging with the first engagement member 77 at the other end, and a driving link body 620 connected at one end to at least one of the tension link body 611 and the driven link body 610.

[0096] The link mechanism 60 moves the moving body 2 from the transverse direction to the vertical direction via the driven link body 610 and the tension link body 611. Specifically, in the second operation region R2, the link mechanism 60 displaces the driving link body 620 via the second engagement member 53 of the lifting body 50 of the first operation mechanism 5, thereby causing the shape of the tension link body 611 and the driven link body 610 to change, and moving the moving body 2 in the vertical direction.

[0097] 10 to 12, the configuration of the tension link body 611 and the driven link body 610 in the link mechanism 60 can be changed in two ways: a bent configuration T1 in which the tension link body 611 and the driven link body 610 intersect so as to project downward, and a straight configuration T2 in which the tension link body 611 and the driven link body 610 are aligned in a straight line in the vertical direction. In other words, the configurations of the tension link body 611 and the driven link body 610 in the link mechanism 60 include the bent configuration T1 and the straight configuration T2.

[0098] The bent configuration T1 of the tension link body 611 and the driven link body 610 separates the valve body 23 from the opening surface A100, leaving the opening A10 open. The straight configuration T2 of the tension link body 611 and the driven link body 610 brings the valve body 23 into close contact with the opening surface A100, leaving the opening A10 closed.

[0099] The linear form T2 is not necessarily limited to a state in which the tension link body 611 and the driven link body 610 are aligned in a straight line. The linear form T2 may be, for example, a form in which the tension link body 611 and the driven link body 610 are slightly bent (including both a form in which they are slightly bent with the upper side as the protruding side and a form in which they are slightly bent with the lower side as the protruding side), as long as the engagement portion 90 (first engagement shaft 900) moves in the vertical direction. Note that in the linear form T2 bent with the upper side as the protruding side, if movement of the lifting body 50 in the intersecting direction is restricted, the closed state of the opening A10 (described later) will not be released even if an external force is applied that moves the valve body 23 in the vertical direction.

[0100] Such shape changes of the tension link body 611 and the driven link body 610 are performed by movement in the intersecting direction in the second operation region R2 of the first operation mechanism 5. That is, in the second operation region R2, the lifting body 50 brings the link mechanism 60 into the bent shape T1 by engaging the upper groove wall 530c of the second bearing body 530 with the driving link body 620, and brings the link mechanism 60 into the straight shape T2 by engaging the lower groove wall 530b of the second bearing body 530 with the driving link body 620.

[0101] The following provides a more detailed description of the configuration of the link mechanism 60. The multiple link bodies that make up the link mechanism 60 are connected to each other via multiple swing pivot shafts including engagement portions 90 and input portions 91 so as to be able to rotate relative to one another, and are held on the left side wall 12 and the right side wall 12 of the housing 1 via multiple housing pivot shafts that serve as support portions 92.

[0102] The housing pivot shafts serving as the support portion 92 are made up of three shafts: an upper housing pivot shaft 920 located at the upper front side of the left and right side walls 12 of the housing 1, a middle housing pivot shaft 921 located at the middle rear side, and a lower housing pivot shaft 922 located at the lower front side of the left and right side walls 12 of the housing 1. In this way, the support portion 92 is made up of multiple housing pivot shafts, and holds the link mechanism 60 serving as the second operating mechanism 6 at a predetermined position (site) on the left and right side walls 12 of the housing 1.

[0103] The oscillating pivot shaft including the engagement portion 90 and the input portion 91 consists of four parts: a first engagement shaft 900 that moves the lift slider 20 vertically at a position below the upper housing pivot shaft 920; an intermediate oscillating pivot shaft 930 between the first engagement shaft 900 and the intermediate housing pivot shaft 921; a lower oscillating pivot shaft 931 that is located below the intermediate oscillating pivot shaft 930 and rearward of the lower housing pivot shaft 922; and a second engagement shaft 910 that is located at the lowest end of the link mechanism 60.

[0104] That is, the engagement part 90 is composed of a first engagement shaft 900 that engages with a first bearing body 770 that is the first engagement member 77 of the vertical moving body A2. The input part 91 is composed of a second engagement shaft 910 that engages with a second bearing body 530 that is the second engagement member 53 of the lifting body 50 that serves as the first operating mechanism 5 of the vertical moving body A2.

[0105] In the link mechanism 60, the driven link body 610 and the tension link body 611 constitute a vertical link unit 61 including an engagement portion 90. In detail, the vertical link unit 61 is made up of the driven link body 610 interposed between a first engagement shaft 900 at one end and a swing pivot shaft at the other end, the tension link body 611 interposed between the swing pivot shaft at the other end of the driven link body 610 and the housing pivot shaft, and an upper swing link body 612 interposed between the first engagement shaft 900 at one end of the driven link body 610 and the housing pivot shaft at the other end. In other words, the driven link body 610 has the first engagement shaft 900 at one end, which is configured as the engagement portion 90.

[0106] In the link mechanism 60, the driving link body 620 constitutes the transmission link section 62 including the input section 91. In detail, the transmission link section 62 is composed of a driving link body 620 connected at one end to at least the driven link body 610 or the tension link body 611 via a swing pivot shaft, and an intermediate swing link body 621 interposed between the swing pivot shaft at the middle part of the driving link body 620 and the housing pivot shaft at the other end.

[0107] The driving link body 620 is provided at its other end with a second engagement shaft 910 that engages with or disengages from the lifting body 50, and this end is configured as an input part 91 that engages with the lifting body 50. As shown in FIG. 10 , when the lifting body 50 is positioned in the first operating region R1, the driving link body 620 positions the input part 91 opposite the entrance 530e. The second engagement shaft 910 at the end of the driving link body 620 is inserted into the fitting groove part 530a of the second bearing body 530 of the lifting body 50.

[0108] The second engagement shaft 910 is adapted to be freely fitted into and removed from a fitting groove portion 530 a of a second bearing body 530 of the lifting body 50 protruding from the vertical hole 73 of the guide member 7 .

[0109] One end of the driving link body 620 is swingably supported on an intermediate swing pivot shaft 930 that connects the driven link body 610 and the tension link body 611. In other words, the driven link body 610, the tension link body 611, and the driving link body 620 are connected to each other so as to be swingable (rotatable) around the common intermediate swing pivot shaft 930.

[0110] The driving link body 620 is the longest link body in the link mechanism 60, and one end is pivoted via the intermediate swing pivot shaft 930, and the other end is positioned as the lowest end of the link mechanism 60 at the upper side of the vertical hole 73 provided in the lower half of the left side wall 71 and the right side wall 71 of the guide member 7, as shown in Figures 10 to 12.

[0111] The driving link body 620 pivotally supports the other end of the intermediate swing link body 621 via a lower swing pivot shaft 931 provided in the middle of the driving link body 620 so that the other end of the intermediate swing link body 621 can swing.

[0112] The intermediate swing link body 621 defines the swing direction and swing range of the other link bodies in the link mechanism 60. Specifically, as shown in Figures 10 to 12, the intermediate swing link body 621 defines the posture of the driving link body 620 to a bent form T1 that opens the opening A10 and a corresponding tilted form T3, and a straight form T2 that closes the opening A10 and a corresponding upright form T4, thereby functioning as a restricting link that reliably reproduces the bent form T1 and the straight form T2.

[0113] The driven link body 610, tension link body 611, and upper swing link body 612 as link bodies, and the upper housing pivot shaft 920, intermediate housing pivot shaft 921, first engagement shaft 900, and intermediate swing pivot shaft 930 as pivot shafts constitute a single unit, the vertical link section 61. As shown in Figures 10 to 12, the vertical link section 61 moves the vertical moving body A2 in the vertical direction by changing the posture of the driven link body 610 and tension link body 611 between a bent configuration T1 and a straight configuration T2.

[0114] The driving link body 620 as a link body, the intermediate swing link body 621, the lower housing pivot shaft 922 as a pivot shaft, the intermediate swing pivot shaft 930, the lower swing pivot shaft 931, and the second engagement shaft 910 constitute a single unit of the transmission link section 62. The transmission link section 62 transmits input from the lifting body 50 to the vertical link section 61, and changes the attitude of the vertical link section 61.

[0115] 10 to 12, vertical link section 61, which is made up of driven link body 610 and tension link body 611 connected via intermediate swing pivot shaft 930, is linearly displaced (changes shape) by a force input to transmission link section 62, which is made up of lower swing pivot shaft 931 connected via intermediate swing pivot shaft 930. When vertical link section 61 is displaced linearly, lift-up slider 20, which is connected to link mechanism 60 via guide member 7, moves vertically (forward) together with guide member 7. As lift-up slider 20 moves vertically, valve body 23 connected to lift-up slider 20 also moves vertically, and opening A10 is closed by valve body 23.

[0116] In other words, the link mechanism 60 as the second operating mechanism 6 maintains the bent form T1 while the first operating mechanism 5 moves in the intersecting direction in the first operating region R1, moving the valve body 23 away from the opening surface A100 to open the opening A10, and only when the first operating mechanism 5 moves further in the intersecting direction against the biasing force of the elastic body 80 in the second operating region does it assume the straight form T2, moving the valve body 23 closer to the opening surface A100 to close the opening A10.

[0117] Thus, in gate valve A, compared to a conventional valve disc actuation structure using a link mechanism, link mechanism 60 as second operating mechanism 6 does not move with movement of valve disc 23 in the cross direction, but is provided in housing 1 at a position separate from lift slider 20 as movable body 2 and lift body 50 as first operating mechanism 5. Link mechanism 60 is provided in housing 1 at a pre-fixed location separate from lift body 50, regardless of vertical movement of movable body 2. This allows for simple and reliable assembly of the valve disc, minimizing breakdowns and wear and tear on the link sliding parts.

[0118] The vertical operation mechanism A3 has a basic structure of a link mechanism 60 serving as a second operation mechanism 6. The link mechanism 60 connects a driven link body 610, which moves the valve disc 23 in the vertical direction, to a tension link body 611 via an intermediate swing pivot shaft 930, and operates the driven link body 610 by displacing the intermediate swing pivot shaft 930. In other words, a complex link mechanism is not required, and the vertical movement of the valve disc 23 can be achieved with the minimum configuration required to establish a link mechanism.

[0119] [4. Closing operation of the valve body] Next, the closing operation of the valve element 23 that closes the opening A10 will be described. As shown in Figures 6, 8, 10, and 11, as a first operation in the first operation region R1, when the lifting body 50 moves in the intersecting direction, the valve element 23 is moved from the open position P1 to the facing position P2.

[0120] When the lifting body 50 performs the second operation in the second operation region R2, the second engagement shaft 910 fits into the fitting groove 530a, as shown in Fig. 11. If the lifting body 50 moves further in the intersecting direction in this state, the driving link body 620 pushes up the intermediate swing pivot shaft 930, causing the driven link body 610 and the tension link body 611 to assume a straight line configuration T2, as shown in Fig. 12. In other words, as the driving link body 620 pushes up the intermediate swing pivot shaft 930, the configuration formed by the driven link body 610 and the tension link body 611 changes from the bent configuration T1 to the straight line configuration T2.

[0121] The displacement of the driven link body 610 and the tension link body 611 to the linear form T2 induces vertical movement of the lift slider 20 via the first bearing body 770 that receives the first engagement shaft 900 of the driven link body 610, causing the lift slider 20 to move vertically together with the guide member 7.

[0122] 11 and 12, the valve element 23 moves vertically from the facing position P2 to the closing position P3 via the valve element shaft 24 connected to the lift slider 20. In this way, the valve element 23 tightly closes the opening A10 of the gate valve A.

[0123] Specifically, the lifting body 50, which is moved in the vertical direction by the ball screw 40, moves the lifting slider 20 located above it until it abuts against the restricting member 74. During this time, the elastic body 80 connecting the lifting body 50 and the lifting slider 20 maintains a substantially extended state. In addition, in the bending configuration T1 of the link mechanism 60, the second engagement shaft 910 serving as the movement input portion 91 is located directly above the entrance 530e of the fitting groove portion 530a in the second bearing body 530 serving as the lower second engagement member 53.

[0124] As shown in Figures 10 to 12, the lifting body 50 moves in the transverse direction in the first operating region R1 as a first operation, moving the lifting slider 20 to the regulating member 74, and then, as a second operation, performs additional movement in the transverse direction in the second operating region R2 while contracting and deforming the elastic body 80 interposed between the lifting slider 20 against the elastic stress.

[0125] By performing the second operation of the lifting body 50, the fitting groove 530a of the second bearing body 530 approaches the lower end of the driving link body 620, and the second engagement shaft 910 of the driving link body 620 enters the fitting groove 530a through the entrance 530e.

[0126] The second engagement shaft 910 that has entered the fitting groove portion 530a approaches the vertical groove wall 530d while being guided by the lower groove wall 530b and the guide groove wall 530f of the second bearing body 530 as the lifting body 50 continues to move. Because the swing range of the driving link body 620 is restricted by the intermediate swing link body 621, the posture of the driving link body 620 changes from the inclined posture T3 to the upright posture T4 in accordance with the movement of the second engagement shaft 910, as shown in Figures 11 and 12.

[0127] As a result, the driven link body 610 and the tension link body 611 are pushed up by the driving link body 620 via the intermediate swing pivot shaft 930, and are displaced from the bent form T1 with the lower side facing forward to a straight form T2. The first engagement shaft 900 at one end of the driven link body 610 moves vertically from the intermediate housing pivot shaft 921 at one end of the tension link body 611 as a starting point.

[0128] As a result, the first engagement shaft 900, which has moved vertically, presses the front groove wall of the vertically elongated groove portion 770a of the first bearing body 770, vertically moving the lift-up slider 20 together with the guide member 7. Therefore, the valve body 23 connected to the lift-up slider 20 moves vertically from a facing position P2 facing the opening A10 to a closing position P3 so as to approach the opening surface A100, thereby closing the opening A10 as shown in FIGS.

[0129] When the opening A10 is blocked by the valve body 23, the driven link body 610 and the tension link body 611 of the link mechanism 60 are constantly urged upward by the driving link body 620 via the intermediate swing pivot shaft 930, so that even if an external force acts to move the valve body 23 away from the opening A10, the linear shape T2 is maintained and the valve body 23 is kept pressed against the opening A10.

[0130] Specifically, the link mechanism 60 functions as a toggle mechanism. The larger the angle formed between the driven link body 610, one end of which is connected to an object to be moved (for example, the vertical moving body A2), and the tension link body 611, one end of which is rotatably supported by the housing 1 and the other end of which is connected to the driven link body 610, the larger the output that moves the vertical moving body A2 relative to the magnitude of the force input from the intermediate swing pivot support shaft 930.

[0131] The link mechanism 60 can press the valve disc 23 strongly against the opening A10 even when it is actuated with a small force. That is, even when the gate valve A uses a drive source 3 with a small output, the actuation of the link mechanism 60 can press the valve disc 23 strongly against the opening A10, thereby achieving tight closure. Therefore, actuation of the link mechanism 60 allows the valve disc 23 to move vertically with a small actuation force, thereby saving energy consumption.

[0132] Furthermore, when the valve body 23 is blocking the opening A10, the driven link body 610 and the tension link body 611 take on a linear shape T2, so even if an external force acts to move the valve body 23 away from the opening A10 due to unintentional contact or the like, the valve body 23 can maintain the state of blocking the opening A10.

[0133] Specifically, when an external force acts on the valve disc 23, a force that moves the first engagement shaft 900 in the vertical direction is applied via the lift slider 20 that is connected to the valve disc 23. However, this force is received by the tension link body 611, one end of which is fixed to the housing 1, via the driven link body 610, and the driven link body 610 and the tension link body 611 do not move from the straight form T2 to the bent form T1 with the lower side as the protruding side. Therefore, the valve disc 23 is maintained in a pressed state against the opening A10.

[0134] That is, without providing a special locking mechanism, it is possible to realize a valve element lock that maintains a tight closing state of the opening A10 by the valve element 23 by the linear configuration T2 of the driven link body 610 and the tension link body 611 of the link mechanism 60. Therefore, the sealing state of the opening A10 by the valve element 23 can be maintained by linearly configuring the driven link body 610 and the tension link body 611, and energy to maintain the sealing state is not required, thereby preventing unnecessary energy consumption.

[0135] [5. Opening of the valve body] Next, the opening operation of the valve element 23 that opens the opening A10 will be described. As described above, when the opening A10 is closed by the valve element 23, the lifting body 50 moves further in the intersecting direction away from the valve element 23 in the second operating region R2, and the valve element 23 moves from the closing position P3 to the facing position P2, as shown in Figures 8, 9, 11, and 12. That is, with the second operation of the lifting body 50, the second engagement shaft 910 of the link mechanism 60, which has entered the fitting groove 530a, engages with the upper groove wall 530c of the fitting groove 530a and moves downward and rearward, thereby moving away from the vertical groove wall 530d.

[0136] 11 and 12, the driving link body 620 changes its posture from an upright posture T4 to an inclined posture T3 in response to the movement of the second engagement shaft 910. Accordingly, the driven link body 610 and the tension link body 611 are pulled downward by the driving link body 620 via the intermediate swing pivot shaft 930, and are displaced from the straight form T2 to the bent form T1 as shown in FIGS. 10 and 11. That is, the intermediate swing pivot shaft 930 is pulled downward by the driving link body 620, which changes its posture from the upright posture T4 to the inclined posture T3, and the form formed by the driven link body 610 and the tension link body 611 changes from the straight form T2 to the bent form T1. Furthermore, the first engagement shaft 900 at one end of the driven link body 610 moves vertically from the intermediate housing pivot shaft 921 at one end of the tension link body 611 as a starting point.

[0137] As a result, the first engagement shaft 900, which has moved vertically, presses the rear groove wall of the vertically elongated groove portion 770a of the first bearing body 770, causing the lift-up slider 20 to move vertically together with the guide member 7. Therefore, the valve body 23 connected to the lift-up slider 20 moves vertically away from the opening A10, opening the opening A10.

[0138] Finally, the lifting body 50 moves the lifting slider 20 in the intersecting direction in the first operating region R1 via the elastic body 80 so as to move it away from the opening surface A100, thereby positioning the valve body 23 from the facing position P2 to the open position P1, as shown in Figures 6 and 10, and opening A10 is put into an open state.

[0139] In this way, the gate valve A of this embodiment performs a closing operation by the valve body 23, which is "movement of the movable body in the cross direction as the valve body cross-movement mechanism system → movement of the vertical movable body A2 in the vertical direction by the vertical operating mechanism A3 as the valve body vertical movement mechanism system," such that "movement of the valve body 23 toward the opening A10 in the cross direction → movement of the valve body 23 toward the opening A10 in the vertical direction → closing of the opening A10," or an opening operation by the valve body 23, which is "movement of the valve body 23 away from the opening A10 in the vertical direction → movement of the valve body 23 away from the opening A10 in the cross direction → opening of the opening A10."

[0140] In particular, in the link mechanism 60 of this embodiment, the engagement between the driving link body 620 and the lifting body 50 causes the driven link body 610 and the tension link body 611 to be displaced into a straight form T2 or a bent form T1 via the intermediate swing pivot shaft 930, thereby enabling the vertical movement of the lifting slider 20, i.e., the movement of the valve body 23 toward or away from the opening A10 of the valve box A1 in the vertical direction.

[0141] As explained above, the gate valve A of this embodiment combines a simple mechanism of the vertical moving body A2 and the vertical operating mechanism A3 to achieve stepwise and individual movement of the valve body 23 by neatly separating movement in the cross direction and the vertical direction, while suppressing wear and tear on the sealing member 23a and tightly closing the opening A10 of the valve box A1 that communicates with the opening B10 of the load lock device B and the opening C10 of the processing device C.

[0142] It should be noted that the above-described embodiment is an example of the present invention, and the present invention is not limited to the above-described embodiment. Therefore, even if it is not the above-described embodiment, various modifications are possible depending on the design, etc., as long as they do not deviate from the technical idea of ​​the present invention. Furthermore, the effects described in this disclosure are merely examples and are not limited, and other effects may also be obtained. [Explanation of symbols]

[0143] A gate valve, A1 valve body, A2 vertical moving body, A3 vertical operation mechanism, 1 housing, 10 lower wall, 11 upper wall, 12 left side wall or right side wall, 2 moving body, 20 lifting slider, 21 guide rod insertion hole, 22 screw shaft insertion hole, 3 driving source, 30 motor, 31 coupling, 4 transmission mechanism, 40 ball screw, 41 screw shaft, 42 ball nut, 5 first operation mechanism, 50 lifting body, 51 guide rod insertion hole, 52 side end, 53 second engaging member, 530 second bearing body, 54 nut fitting hole, 6 second operation mechanism, 60 link mechanism, 61 vertical link portion, 610 driven link body, 611 tension link body, 612 upper swing link body, 62 transmission link portion, 620 driving link body, 621 Intermediate swing link body, 7 guide member, 70 lower wall, 71 left side wall or right side wall, 72 drive source support frame, 73 vertical hole, 74 regulating member, 75 upper support portion or lower support portion, 76 guide rod, 77 first engaging member, 770 first bearing body, 8 lifting operation mechanism, 80 elastic body, 81 guide rod, 90 engaging portion, 900 first engaging shaft, 91 input portion, 910 second engaging shaft, 92 support portion, 920 upper housing pivot shaft, 921 intermediate housing pivot shaft, 922 lower housing pivot shaft, 930 intermediate swing pivot shaft, 931 lower swing pivot shaft

Claims

1. A gate valve that seals an opening by pressing a valve body having a seal member against an opening surface formed with the opening, the opening communicating with a processing section of a processing apparatus that performs vacuum processing, a moving body that moves integrally with the valve body; a conversion mechanism that moves the movable body in a direction perpendicular to the opening surface and in a direction intersecting the perpendicular direction; a transmission mechanism that transmits power from a drive source to the conversion mechanism, The conversion mechanism is a first operating mechanism that moves in the intersecting direction and moves the moving body in the intersecting direction; a second operating mechanism that moves the moving body in the vertical direction, The operation by the second operating mechanism is an operation by additional movement of the first operating mechanism in the intersecting direction from a state in which movement of the movable body in the intersecting direction is restricted, a housing in which the second operating mechanism is disposed; and a guide member whose movement in the intersecting direction is restricted by the housing and which is provided so as to be movable in the vertical direction together with the movable body, The second operating mechanism is a support portion supported by the housing; an engaging portion that engages with the guide member; an input portion that engages with or disengages from the first operating mechanism; A gate valve comprising:

2. 2. The gate valve according to claim 1, wherein the second operating mechanism is provided at a predetermined position regardless of movement of the movable body in the intersecting direction.

3. (delete)

4. The second operating mechanism is a link mechanism, a vertical link portion including the engagement portion; a transmission link portion including the input portion, 3. The gate valve according to claim 1, wherein the transmission link portion transmits a force input from the first operating mechanism to the input portion to the vertical link portion.

5. the movable body is provided on the guide member so as to be movable in a vertical direction as the intersecting direction, the first operating mechanism is an elevating body that moves the movable body in the up-down direction within the guide member, the link mechanism as the second operating mechanism is configured to move the movable body together with the guide member in the vertical direction, 5. The gate valve according to claim 4, wherein the link mechanism is provided at a predetermined position different from the lifting body, regardless of the vertical movement of the moving body.

6. The link mechanism includes: a swing pivot shaft that connects the plurality of link bodies so that they can rotate relative to one another; The support portion includes a plurality of housing pivot shafts pivotally supported on the housing, The engaging portion includes a first engaging shaft that engages with the guide member, the vertical link portion includes a driven link body interposed between the first engagement shaft at one end and a swing pivot shaft at the other end, and a tension link body interposed between the swing pivot shaft at the other end of the driven link body and the housing pivot shaft, The transmission link portion includes a driving link body connected at one end to at least the driven link body or the tension link body via a swing pivot shaft, The gate valve according to claim 5, characterized in that the driving link body has a second engagement shaft at the other end thereof that engages with or disengages from the lifting body as the input part, and engages with the lifting body to follow the additional movement of the lifting body in the vertical direction.

7. 7. The gate valve according to claim 6, wherein the link mechanism moves the moving body from the intersecting direction to the perpendicular direction via the driven link body and the tension link body.

8. A gate valve that seals an opening by pressing a valve body having a seal member against an opening surface formed with the opening, the opening communicating with a processing section of a processing apparatus that performs vacuum processing, Housing and a vertical moving body held by the housing and movable in a direction perpendicular to the opening surface; a vertical movement mechanism provided between the housing and the vertical moving body; Equipped with The vertical moving body is a moving body that moves integrally with the valve body; an elevator that moves together with the moving body in a direction intersecting the vertical direction; a drive source that moves the lifting body in the intersecting direction; a lifting mechanism provided between the lifting body and the moving body, The lifting body is a first operating region in which the movable body moves in the intersecting direction together with the movable body via the lifting mechanism, and a second operating region in which the movable body further moves in the intersecting direction by operating the vertical operating mechanism while the movement of the movable body in the intersecting direction is restricted; The vertical movement mechanism includes: The vertical moving body is moved in the vertical direction in accordance with the movement of the lifting body in the intersecting direction in the second operation region, The vertical moving body is a restricting member that restricts movement of the movable body in the intersecting direction in the second motion region; a first engagement member that engages with the vertical movement mechanism, The vertical movement mechanism is a link mechanism, a tension link body pivotally supported at one end by the housing; a driven link body that is connected at one end to the tension link body so as to be relatively rotatable and that engages with the first engaging member at the other end; a driving link body, one end of which is connected to at least one of the tension link body and the driven link body; The lifting body is a second engaging member that engages with the driving link body; The link mechanism includes: A gate valve characterized in that, in the second operating region, the driving link body is displaced via the second engaging member, thereby causing a shape change between the tension link body and the driven link body.

9. (delete)

10. The shape displacement of the tension link body and the driven link body in the link mechanism is as follows: a bent shape in which the tension link body and the driven link body intersect so as to protrude downward; a linear form in which the tension link body and the driven link body are aligned in a straight line in the vertical direction, The moving body is The bent state of the link mechanism separates the valve body from the opening surface to open the opening, and 9. The gate valve according to claim 8, wherein the linear configuration of the link mechanism brings the valve body into close contact with the opening surface, thereby closing the opening.

11. the second engagement member has a fitting groove portion formed by a lower groove wall extending along the vertical direction, an upper groove wall extending along the vertical direction and shorter than the lower groove wall, and a vertical groove wall connecting the lower groove wall and the upper groove wall, The fitting groove portion has an entrance opening that is open on the upper side, The lifting body is In the second operating region, The upper groove wall is engaged with the driving link body to place the link mechanism in the bent state; 11. The gate valve according to claim 10, wherein the link mechanism is in the linear configuration by engaging the lower groove wall with the driving link body.

12. The driving link body is an input portion at the other end that engages with or disengages from the second engaging member; The gate valve according to claim 11, wherein the input portion faces the inlet when the lifting body is located in the first operating region.

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