Radiation detector, radiation measuring device, and radiation detector setting method

Abstract

To provide a radiation detector, a radiation measurement device, and a setting method of the radiation detector that can suppress double counting that detects a single pulse in a duplicate manner by multiple counters in the time of switching counters and acquire high-accuracy data.SOLUTION: A radiation detector 100 which can detect the radiation with continuous exposure includes: a sensor 110 which generates a pulse when a particle of radiation is detected; multiple counters 140a, 140b which are provided so as to be able to count the pulses; a setting retention circuit 150 which retains setting of the off-time that turns off both the multiple counters 140a, 140b; and a control circuit 160 which switches the counter that counts the pulse after the set off-time for a trigger signal.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a radiation detector capable of detecting radiation by continuous exposure, a radiation measuring device, and a method for setting a radiation detector. [Background technology]

[0002] Conventionally, radiation detectors that enable continuous exposure by switching between multiple counters are known (see, for example, Patent Document 1). The radiation detector described in Patent Document 1 switches counters when a trigger signal is received, thereby eliminating the dead time that occurs when reading detected data and realizing continuous exposure.

[0003] However, when measurements are taken with continuous exposure in zero-deadband mode, there is a certain width in the time (time constant) for a single pulse to exceed the threshold, and if the counter switches during that time, one photon that enters the radiation detector is counted as two (see, for example, Non-Patent Document 1). This double-counting phenomenon causes the number of counted X-ray photons to exceed the actual number, resulting in an error.

[0004] Non-Patent Document 1 reports that the number of photons detected during continuous exposure deviates from the ideal curve showing the number of detected photons relative to the incident photons, and that errors due to double counting become particularly noticeable when the exposure time is shortened. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-096841 [Non-patent literature]

[0006] [Non-Patent Document 1] Johannes Moller, Mario Reiser et al., “Implications of disturbed photon-counting statistics of Eiger detectors for X-ray speckle visibility experiments”, Journal of synchrotron radiation, Accepted 4 May 2019 Summary of the Invention [Problem to be solved by the invention]

[0007] As mentioned above, in zero-deadband mode, double counting occurs when the counter in the digital circuit is switched. Figure 10 is a timing chart showing an example of double counting. Figure 10 shows the height of the pulse input to the counter circuit, the on / off status of each counter that counts that pulse, and the counts made by the counters.

[0008] 10, in a conventional radiation detector, when pulse P01 reaches only counter C01, counter C01 counts 1. However, when pulse P02 reaches counters C01 and C02 at the timing of counter switching, counters C01 and C02 each count 1, resulting in a total count of 2.

[0009] The present invention has been made in consideration of the above circumstances, and aims to provide a radiation detector, a radiation measuring device, and a method for setting a radiation detector that can suppress double counting, in which a single pulse is detected by multiple counters at the time of counter switching, and that can obtain highly accurate data. [Means for solving the problem]

[0010] (1) In order to achieve the above object, the radiation detector of the present invention is a radiation detector capable of detecting radiation by continuous exposure, and is characterized by comprising: a sensor that generates a pulse when a particle of radiation is detected; a plurality of counters that are arranged to be able to count the pulses; a setting retention circuit that retains the setting of the off time that turns off all of the plurality of counters; and a control circuit that switches the counter that counts pulses after the set off time in response to a trigger signal.

[0011] (2) In the radiation detector described in (1) above, the off time is a time constant.

[0012] (3) The radiation detector of the present invention is a radiation detector capable of detecting radiation by continuous exposure, and is characterized by comprising a sensor that generates a pulse when a particle of radiation is detected, a plurality of counters that are arranged to be able to count the pulses, and a control circuit that switches the counter that counts the pulses in response to a trigger signal, and wherein the number of detected photons relative to the number of incident photons falls on a theoretical curve that is specified based on the radiation source.

[0013] (4) The radiation detector according to any one of (1) to (3) above is characterized in that it is a one-dimensional or two-dimensional detector.

[0014] (5) Furthermore, the radiation measuring device of the present invention is a radiation measuring device capable of measuring radiation by continuous exposure, characterized in that it comprises a radiation source that continuously irradiates radiation, a sample holder that holds a sample, and a radiation detector according to any one of (1) to (3) above.

[0015] (6) Furthermore, the radiation detector setting method of the present invention is a setting method for a radiation detector that detects radiation by continuous exposure, and is characterized by including a step of receiving an input for setting an off time for turning off all of a plurality of counters that the radiation detector has, and a step of causing the radiation detector to retain the input setting. [Brief explanation of the drawings]

[0016] [Figure 1] FIG. 1 is a schematic diagram illustrating a configuration of a radiation detector. [Figure 2] 10 is a flowchart showing the operation of the radiation detector. [Figure 3] 10 is a timing chart showing an example of suppressing double counting. [Figure 4] 10 is a timing chart showing an example of suppressing counting losses. [Figure 5] FIG. 1 is a schematic diagram showing the configuration of a radiation measuring device. [Figure 6] FIG. 1 is a schematic diagram showing imaging of multiple frames. [Figure 7] FIG. 1 is a plan view showing an example of a radiation measuring device. [Figure 8] FIG. 1 is a side view showing an example of a radiation measuring device. [Figure 9] FIG. 2 is a schematic diagram showing a configuration of a radiation detector when set up. [Figure 10] 10 is a timing chart showing an example of double counting. [Figure 11] Graphs (a) and (b) show the results of XPCS measurements of comparative examples (using burst mode and zero-dead mode, respectively). [Figure 12] Graphs (a) and (b) show the results of XPCS measurements in the example (using burst mode and zero-dead mode, respectively). DETAILED DESCRIPTION OF THE INVENTION

[0017] Next, an embodiment of the present invention will be described with reference to the drawings. To facilitate understanding of the description, the same reference numerals are used to designate the same components in the drawings, and duplicated descriptions will be omitted.

[0018] [Configuration of radiation detector] FIG. 1 is a schematic diagram showing the configuration of a radiation detector 100. The radiation detector 100 is a detector that can detect radiation by continuous exposure by switching a counter in synchronization with a trigger signal. The radiation detector 100 is a semiconductor detector with a zero- to two-dimensional data buffer function, but is preferably a one- or two-dimensional detector. The radiation to be detected is most effective when it is X-rays, but is not limited to this and may also be alpha rays, beta rays, gamma rays, neutron rays, etc.

[0019] The radiation detector 100 includes a sensor 110 , a gate 115 , a detection circuit 120 , a switching circuit 130 , a first counter 140 a , a second counter 140 b , a setting and holding circuit 150 , a control circuit 160 and a readout circuit 170 .

[0020] The sensor 110 generates a pulse when a particle of radiation is detected. The sensor 110 can detect the intensity of the X-ray beam incident on the light-receiving surface as surface information.

[0021] Gate 115 is opened and closed by an electronic shutter in response to the transmission of the pulse. In zero-dead mode, gate 115 is always open, and the exposure time is continuous. Since cutting off the analog circuit requires recovery time until it stabilizes, opening and closing of gate 115 is not used. Note that the analog circuit is located in the stage before gate 115, and the digital circuit is located in the stage after.

[0022] The detection circuit 120 determines whether the pulse is higher than a reference value, and if so, sends it as a voltage signal to one of the counters 140 a, 140 b that is currently counting. When the switching circuit 130 receives a counter switching signal from the control circuit 160, it switches the counter that counts the voltage signal.

[0023] Counter 140a (first counter) and counter 140b (second counter) have the same functions and are provided to be able to count pulses. In the example shown in Fig. 1, two counters are provided, but three or more counters may be provided. By switching the counters, exposure can be maintained without dead time.

[0024] The setting retention circuit 150 retains the setting of the off time during which all of the multiple counters are turned off. The off time is the time during which all of the multiple counters in the radiation detector 100 are turned off. The off time is preferably a time constant. This prevents overlapping of the times at which pulses exceed the threshold in the multiple counters, thereby preventing double counting and counting errors. In this way, high-speed, highly accurate data can be acquired. The threshold is set in advance by the provider of the radiation detector 100.

[0025] The time constant is the time it takes for the pulse height to exceed a threshold. Strictly speaking, the time constant is determined for each pixel. The time constant here includes not only the time constant for each pixel but also the global time constant (a statistical value such as the average value across the entire detection surface). The time constant is not a single value determined by the definition above, but is preferably centered on a statistical value and has a width large enough to ensure that the standard deviation or double-counting error for all pixels falls within the statistical error.

[0026] Control circuit 160 switches the counter that counts pulses among the multiple counters after a set off-time in synchronization with a signal received from an external device or an internally generated trigger signal. Specifically, in response to the trigger signal, it ends counting on one of the counters that is currently counting and starts the off-time whose setting is held in setting holding circuit 150. Then, after the off-time ends, it starts counting on the other counter.

[0027] This allows radiation to be detected without dead time by maintaining an exposure state in which radiation is continuously incident. It also prevents double counting, where a single pulse is detected by multiple counters when the counters are switched. Examples of signals received from external devices include signals that specify the time or position when the arm position or the sample position is changed. The term "sample" refers to the object of analysis, and includes products.

[0028] The readout circuit 170 reads the count value from the counter that just finished counting between the timings of trigger signal generation. It is preferable to read the count value from the counter when the counter finishes counting and enters the off-time. While one counter is off and running, the count value is read from the other counter, allowing the other counter to prepare to start counting for the next switchover. By finishing reading the count value from the counter early, the counter can be returned to a counting state at an early stage.

[0029] The radiation detector 100 is preferably a one-dimensional or two-dimensional detector. In a zero-dimensional detector, there are no adjacent pixels, so charge sharing does not occur. In such cases, one option for suppressing double counting is to increase the threshold and reduce the time constant. In contrast, if the threshold is increased in a one-dimensional or two-dimensional detector, the charge sharing amount cannot be counted, creating a dead zone. In the present invention, by providing an off time when switching counters, even in one-dimensional or two-dimensional detectors, double counting can be suppressed without creating a dead zone.

[0030] [Radiation detector operation] The operation of the radiation detector 100 configured as described above will now be described. Figure 2 is a flowchart showing the operation of the radiation detector. First, radiation is irradiated onto a sample in zero-deadband mode (step S1). When a particle of radiation that has entered the detection surface is detected by the sensor 110, a pulse is generated. First, one of the counters starts measuring the radiation (step S2). The pulses are counted by one of the counters.

[0031] When an external or internal trigger signal is received, the control circuit 160 causes one of the counters to stop counting pulses, and the readout circuit 170 starts reading out the count data from the counter that has stopped counting (step S3). At the same time, an off time begins (step S4). During the off time, neither counter counts.

[0032] After the OFF time ends, the other counter starts counting pulses (step S5). While the other counter continues counting, the reading of the count data from the counter that finished counting earlier is completed (step S6).

[0033] Thereafter, the radiation measurement device using the radiation detector 100 determines whether or not the measurement has been completed (step S7), and if the measurement has not been completed, returns to step S3, waits for a trigger signal, and switches the counter. In this way, steps S3 to S7 are repeated until the measurement is completed. S If it is determined that the measurement has finished in step 7, the counting is stopped and the measurement is completed.

[0034] By such operation of the radiation detector 100, double counting is suppressed, and the count number I1 when one exposure is performed with a single counter and the count number I when continuous exposure is performed by switching between multiple counters are N This significantly reduces errors in continuous exposures with short exposure times.

[0035] Consider the case where radiation is incident at random timing and counting losses due to overlapping pulses can be ignored. The number of counts I1 when a single counter exposes one image can be expressed as equation (1) using the exposure time T1 (s) and the average incident intensity I0 (cps).

number

[0036] Next, consider the case where multiple counters are switched for exposure. exp is the exposure time for one frame, the number of counts when N images are taken is I N can be expressed by equation (2).

number

[0037] where T1 and T expIf the following relation is established, the total exposure time is the same for both I1 and I N should match.

number

[0038] However, double counting occurs when the counter is switched, so in reality, N is expressed as equation (4).

number

[0039] τ is the time constant of the detector. Also, from equations (1), (3) and (4), I1 and I N The ratio is calculated.

number

[0040] From this formula, the increase in intensity due to double counting is τ / T exp I understand that. T exp If is sufficiently long compared to τ, double counting is rare and the error is small. exp If the time is set too short, the probability of double counting increases, resulting in a larger error. off If we set, equation (4) can be rewritten as follows:

number

[0041] T off If the off time is set so that =τ, then equation (6) becomes equation (7).

number

[0042] Equation (8) is derived from equations (1), (3), and (7), and I N and I1 were shown to be consistent.

number

[0043] By inserting an off time, double counting is suppressed, and measurements with fewer errors can be expected even with continuous short-time exposures. The number of detected photons relative to the number of incident photons follows a theoretical curve specified based on the radiation source. This significantly reduces errors in measurements with short exposures when using a high-intensity radiation source.

[0044] The theoretical curve is expressed as the distribution of the probability of double counting versus the probability of counting incident photons per pixel (X-ray intensity). In the rightmost diagram of Figure 3 in Non-Patent Document 1, the theoretical curve is shown by a solid line as a Poisson-Gamma (PG) distribution. In conventional radiation detectors, when a high-intensity radiation source is used and short-term exposure is performed, the probability of double counting can be higher than the value given by the theoretical curve, but the present invention can reduce such occurrences. In particular, when the number of detected photons per pixel is 1 x 10 -4 More than 1×10 -2 below In this range, double counting is prevented and the number of detected photons relative to the number of incident photons falls on a theoretical curve specified based on the radiation source.

[0045] For example, assuming that the pulse time constant τ is 100 ns, the exposure time Texp for one frame is 50 μs, and that X-rays are incident at random times, the probability of double counting can be calculated as follows:

number

[0046] Assuming that the average intensity I of the incident X-rays is 2 Mcps and the number of images N is 10,000, the true count number can be calculated as follows:

number

[0047] On the other hand, if this method is not applied, the estimated count number can be calculated as follows.

number

[0048] Under these conditions, the error due to double counting (+2000 counts) is larger than the statistical error (±1000 counts) calculated using the square root of the true count number. The present invention is effective when such an error due to double counting is large.

[0049] [Preventing double counting] Figure 3 is a timing chart showing an example of double counting prevention. Figure 3 shows the wave height of the pulse input to the counter circuit, the on / off status of each counter that counts the pulse, and the count of the counter (similar to Figure 4).

[0050] 3, in the radiation detector 100, the counting counter is switched between counter 140a and counter 140b, so that the exposure time (Exp time) of each frame continues without interruption. The time constant of the pulse signal of the incident photons is about 100 ns, and the effect of suppressing double counting is particularly high when measuring with the exposure time Exp time per frame set to 100 μs or less.

[0051] After one of the counters 140a and 140b finishes counting, it waits for an off time Ta, and then the other counter starts counting time Tb. During counting time Tb, the counter turns on and counts. The sum of the off time Ta and counting time Tb corresponds to the conventional counting time. By providing the off time Ta, sensitivity during that time is prevented from being affected by the pulse width of the incident photon.

[0052] In the radiation detector 100 that operates in this manner, if pulses P11 and P12 reach the counters as in the example of Fig. 10, pulse P12 enters counter 140a just before it turns off and is counted only by counter 140a. At the timing when counter 140b turns on, pulse P12 is below the threshold, so pulse P12 is not counted by counter 140b.

[0053] In other words, the time when pulse P12 exceeds the threshold overlaps with the count time Tb of counter 140a, so counter 140a counts pulse P12. However, due to the existence of off time Ta, the time when pulse P12 exceeds the threshold does not overlap with the count time Tb of counter 140b, so counter 140b does not count pulse P12. Therefore, double counting does not occur in this case.

[0054] [Preventing counting errors] FIG. 4 is a timing chart showing an example of suppressing counting losses. As shown in FIG. 4, after one of the counters 140a and 140b finishes counting, the other counter waits for an off time Ta, and then starts counting time Tb. The off time Ta corresponds to the time constant of the pulse. The time constant of the pulse is, for example, about 100 ns.

[0055] In the radiation detector 100 that operates in this manner, if pulse P22 reaches the counter circuit, pulse P22 enters the counter circuit after counter 140a turns off and before counter 140b turns on. In this case, when counter 140b turns on after a waiting time equivalent to the time constant, the wave height of pulse P22 still exceeds the threshold, so it is counted by counter 140b.

[0056] In other words, the time when pulse P22 exceeds the threshold does not overlap with the counting time Tb of counter 140a, so counter 140a does not count pulse P22. However, because the off-time Ta is set by the pulse time constant, the time when pulse P22 exceeds the threshold overlaps with the counting time Tb of counter 140b, so counter 140b counts pulse P22. Therefore, in this case, no counting loss occurs. In this way, even though there is a gap in the counting time, by setting that gap equal to the pulse time constant, measurement without counting loss is achieved.

[0057] [Application example] The radiation detector 100 is particularly suitable for XPCS measurements and ultra-fine slice single crystal structure analysis, which require short exposure times. When high-speed measurements are not performed, errors due to double counting are buried in statistical errors. However, when high-speed measurements are possible in zero-deadband mode, these errors become significant. Since double-counting errors become particularly noticeable when the exposure time is shortened in zero-deadband mode, suppressing double counting is important.

[0058] The radiation detector 100 can be used to measure radiation in continuous exposure by being mounted in a radiation measurement device. Figure 5 is a schematic diagram showing the configuration of a radiation measurement device 200. The radiation measurement device 200 includes a radiation source 210, a sample holder 220, and the radiation detector 100.

[0059] The radiation source 210 continuously irradiates radiation. The sample holder 220 holds the sample S. The radiation detector 100 enables measurements that suppress double counting and counting errors caused by switching counters. This allows highly accurate data to be obtained in single crystal structure analysis, XPCS, and the like.

[0060] Figure 6 is a schematic diagram showing the capture of multiple frames. In single crystal structure analysis, multiple images are taken while moving the goniometer and then added together for analysis. Double counting does not occur when analyzing with only one frame of image, but when these images are added together to calculate the intensity, errors occur in conventional methods due to the influence of double counting caused by counter switching. Intensity is extremely important in single crystal structure analysis, and large errors result in poor accuracy in structural analysis. In the present invention, the piled-up radiation intensity is equal to the intensity of one frame multiplied by N, allowing measurements to be performed with flexible settings without worrying about errors associated with exposure time or the number of piled-up images.

[0061] In XPCS (X-ray Photon Correlation Spectroscopy) measurements, coherent X-rays are incident on moving particles and the time change (fluctuation) of the scattering intensity is measured. In order to observe the movement of fast particles, the exposure time must be shorter than the particle fluctuation time, so the scattering intensity in each frame is inevitably small. Furthermore, because coherent X-rays are used, the scattering intensity becomes even smaller. Therefore, in XPCS measurements, the scattering intensity per frame is very small.

[0062] For this reason, XPCS measurements require small errors even under conditions of short exposure times and low intensity. When double counting occurs and the scattering intensity of a single frame increases, the contrast between the images before and after it increases (or decreases). As a result, errors become significant in the short time domain, making it impossible to accurately measure the fast movement of particles. In such cases, the present invention, which suppresses double counting and counting errors, is particularly effective.

[0063] (single crystal structure analysis device) As a specific example, an example in which the radiation detector 100 is incorporated into an X-ray analysis apparatus will be described. Fig. 7 is a plan view showing an X-ray analysis apparatus 300 as an example of a radiation measurement apparatus. The X-ray analysis apparatus 300 is a single crystal structure analysis apparatus for capturing X-ray diffraction images, and includes an X-ray source 310, a sample stage 320, an arm 330, a control unit, and the radiation detector 100. The X-ray source 310 continuously irradiates the sample S0 with X-rays.

[0064] The radiation detector 100 can control the amount to be measured using a signal from the goniometer while remaining in an exposure state, and output measurement data in synchronization with the goniometer signal. Continuous exposure improves measurement throughput and reduces double counting and counting errors.

[0065] The sample stage 320 and the arm 330 are linked together and can be rotated around the sample S0 at a constant speed under the control of the control unit. The radiation detector 100 is provided at the end of the arm 330, and its movement around the sample S0 together with the arm 330 is controlled.

[0066] By having the radiation detector 100 as described above, the X-ray analysis device 300 can count X-rays with continuous exposure without dead time by switching the counter using, for example, an arm movement control signal from the control unit as a trigger signal.

[0067] (production line) 8 is a side view showing an X-ray analysis device 400 as an example of a radiation measurement device. The X-ray analysis device 400 is a production line capable of inspection using X-rays, and includes an X-ray source 410, rollers 420, a belt 425, a control unit 440, and a radiation detector 100. The X-ray source 410 continuously irradiates X-rays onto a product S1.

[0068] The rotation of the roller 420 moves the belt 425, which moves the product S1 in the direction of the arrow in the figure. 。The belt 425 moves at a constant speed under the control of the control unit 440. The radiation detector 100 is provided on the opposite side of the X-ray source 410 across the belt 425 and the product S1, and the movement of the belt 425 and the product S1 is controlled.

[0069] The X-ray analysis device 400 includes the radiation detector 100 as described above, and can count X-rays with continuous exposure without dead time by switching the counter using, for example, a belt control signal from the control unit 440 as a trigger signal. In this case, double counting and counting errors can be suppressed.

[0070] [Radiation detector settings] In order for the radiation detector 100 to function, it is necessary to have not only a counter switching mechanism but also to set an off time, which must be set by an operator with specialized knowledge.

[0071] 9 is a schematic diagram showing the configuration of the radiation detector 100 during setup. If the radiation detector 100 is used by a user without setting the off time, an operator on the provider's side sets the off time. To set the off time, it is necessary to connect a computer 500 to the radiation detector 100. The operator operates the computer 500 to set the internal circuitry of the radiation detector 100.

[0072] First, the computer 500 displays a setting screen for the radiation detector 100 and receives input from an operator to set the off time. The computer 500 then stores the input setting in the radiation detector. This allows an update to be performed to set the off time in the radiation detector, which is capable of continuous exposure by switching the counter, and makes it possible to obtain highly accurate data by suppressing double counting.

[0073] [Example] XPCS measurements were performed on specific samples using a conventional radiation detector and the radiation detector 100 of the present invention. Measurement results were obtained as a comparative example and an example, respectively. Figures 11(a) and 11(b) are graphs showing the XPCS measurement results of the comparative example (burst mode and zero-deadband mode, respectively). Figures 12(a) and 12(b) are graphs showing the XPCS measurement results of the example (burst mode and zero-deadband mode, respectively).

[0074] The horizontal axis represents time, and the vertical axis represents the correlation function calculated from the time change in X-ray intensity. In the measurement results shown in Figures 11(a) and (b), it can be seen that the leftmost point (circled point) is significantly off. The phenomenon in which the value at this leftmost point (minimum time) is off occurs when a single incident photon is double-counted, resulting in pulses being counted across two adjacent frames.

[0075] In XPCS measurements, it is extremely important to accurately measure the temporal change in X-ray intensity. When double counting occurs during counter switching, pulses are always counted across two adjacent frames. As a result, the minimum time point (≒Exp time) calculated from the intensity change between adjacent frames will be significantly different from the true value.

[0076] On the other hand, when the present invention is applied, double counting does not occur even if X-rays are incident when the counter is switched, so the temporal change in X-ray intensity can be accurately captured. Therefore, as shown in Figures 12(a) and 12(b), the value does not deviate even at the minimum time point, and an accurate correlation function can be obtained. In other words, the correlation function plot becomes continuous. In this way, it has been demonstrated that the present invention is extremely effective when it is necessary to accurately measure changes in X-ray intensity over an extremely short period of time. [Explanation of symbols]

[0077] 100 Radiation Detector 110 Sensors Gate 115 120 Detection circuit 130 Switching Circuit 140a First Counter 140b Second Counter 150 Setting retention circuit 160 Control circuit 170 Readout circuit 200 Radiation measuring device 210 Radiation Source 220 Sample holder 300 X-ray analyzer 310 X-ray source 320 Sample stage 330 Arm 400 X-ray analyzer 410 X-ray source 420 Laura 425 Belt 440 Control Unit 500 computers S, S0 sample S1 Products P01, P02, P11, P12, P21, P22 pulse Ta Off time Tb Counting time

Claims

1. A radiation detector capable of detecting radiation with continuous exposure, a sensor that generates a pulse when a particle of radiation is detected; a plurality of counters each capable of counting pulses; a setting holding circuit that holds a setting of an off time for turning off any of the plurality of counters; Controls switching the counter to count pulses after the set off time in response to a trigger signal. and a control circuit.

2. 2. The radiation detector according to claim 1, wherein the off time is a time constant.

3. The number of detected photons relative to the number of incident photons falls on a theoretical curve specified based on the radiation source.

2. The radiation detector according to claim 1, wherein:

4. 3. The radiation detector according to claim 1, wherein the radiation detector is a one-dimensional or two-dimensional detector. Line detector.

5. A radiation measurement device capable of measuring radiation by continuous exposure, a radiation source that continuously emits radiation; a sample holder for holding a sample; A radiation measurement method comprising the radiation detector according to claim 1 or 2. Device.

Images