Vibration cause estimation device

Abstract

Provided is a vibration factor estimating device that can easily identify a vibration factor. This vibration factor estimating device comprises: a command creating unit that creates a motion command that includes control states of each control axis of an industrial machine; a motor control unit that controls a motor of the industrial machine on the basis of the motion command; a detecting unit that detects, as a detection value of the motor, at least one among the position, the speed, and the acceleration of the motor of the industrial machine; and a vibration factor estimating unit that estimates a vibration factor of the motor on the basis of the motion command and the detection value corresponding to the motion command.

Description

[Technical Field]

[0001] The present invention relates to a vibration cause estimation device. [Background technology]

[0002] Conventionally, systems for measuring vibrations in machine tool axes are known (see, for example, Patent Document 1). Vibrations occurring in feed axes and spindles of industrial machines such as machine tools are caused by various factors, and in addition to vibrations due to resonance or interference with the axis itself, vibrations can also be caused by external disturbances, making it difficult to identify the cause. In order to improve machining accuracy, it is necessary to identify the causes of machine tool vibration and improve or eliminate them. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2020-159752 Summary of the Invention [Problem to be solved by the invention]

[0004] The main causes of vibration are (1) resonance and interference of the axis itself, (2) vibrations of other axes within the same machine tool, vibrations of peripheral equipment, noise, and other disturbances, and (3) machining load (only during machining). In particular, when machine tools are under control, it can be difficult to distinguish between vibration causes (1) and (2). Furthermore, some vibration causes cannot be suppressed by controlling the machine tool motor, so there is a demand for an easy way to identify the causes of vibration in industrial machinery. [Means for solving the problem]

[0005] A vibration factor estimation device according to one aspect of the present disclosure includes a command creation unit that creates an operation command including a control state of each control axis of an industrial machine; a motor control unit that controls a motor of the industrial machine based on the operation command; a detection unit that detects at least one of a position, a speed, and an acceleration of the motor of the industrial machine as a detected value of the motor; and a vibration factor estimation unit that estimates a vibration factor of the motor based on the operation command and the detected value corresponding to the operation command. [Effects of the Invention]

[0006] According to the present invention, the cause of vibration can be easily identified. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a diagram illustrating an overview of a vibration cause estimation device according to an embodiment of the present invention. [Figure 2] FIG. 2 is a diagram illustrating a first processing example of the vibration factor estimating device according to the present embodiment. [Figure 3A] FIG. 2 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in a normal state. [Figure 3B] FIG. 10 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of the X-axis is disabled. [Figure 4] FIG. 10 is a diagram illustrating a second processing example of the vibration factor estimating device according to the present embodiment. [Figure 5A] FIG. 2 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in a normal state. [Figure 5B] FIG. 10 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of the X-axis is disabled. [Figure 5C] FIG. 10 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of axes other than the X-axis is disabled. [Figure 6] FIG. 10 is a diagram illustrating a third processing example of the vibration factor estimating device according to the present embodiment. [Figure 7A] FIG. 2 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in a normal state. [Figure 7B] FIG. 10 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of the X-axis is disabled. [Figure 7C]FIG. 10 is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of axes other than the X-axis is disabled. [Figure 8] FIG. 10 is a diagram showing the control state of the X-axis, Y-axis, and Z-axis. [Figure 9] 3 is a flowchart showing the processing of the vibration factor estimation device according to the present embodiment. [Figure 10] 3 is a flowchart showing the processing of the vibration factor estimation device according to the present embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] An example of an embodiment of the present invention will be described below. Fig. 1 is a diagram showing an overview of a vibration factor estimation device 1 according to this embodiment. The vibration factor estimation device 1 may be, for example, a numerical control device connected to a machine tool 2 as shown in Fig. 1, or a computer device connected to a numerical control device.

[0009] That is, the vibration factor estimation device 1 includes a processor such as a CPU (Central Processing Unit), a ROM (Read Only Memory) that stores an OS (Operating System), application programs, etc., a RAM (Random Access Memory), and a storage device such as a hard disk drive or SSD (Solid State Drive) that stores various other information.

[0010] The machine tool 2 is a device for machining a workpiece, and is directly or indirectly connected to the vibration cause estimation device 1. The machine tool 2 has a general configuration for machining a tool, a spindle, a feed axis, etc.

[0011] The vibration factor estimation device 1 includes a command creation unit 11, a motor control unit 12, a data storage unit 15, and a vibration factor estimation unit 16. The detection unit 14 may be built into the vibration factor estimation device 1, may be included in the machine tool 2, or may be included in a separate device. In this embodiment, the vibration factor estimation device 1 estimates the vibration factor of the servo motor 13, but the vibration factor estimation device 1 can also estimate the vibration factor of other industrial machinery that has a servo motor and a detection unit.

[0012] In order to estimate the cause of vibration of the machine tool 2, the command creation unit 11 creates an operation command including the control state of each control axis of the machine tool 2 (for example, the spindle, X-axis, Y-axis, and Z-axis, which will be described later). The command creation unit 11 also creates an operation command including control enable or control inhibit for the servo motor 13 as the control state.

[0013] Motor control unit 12 controls servo motor 13 of machine tool 2 based on the operation command. Motor control unit 12 also detects at least one of position, speed, and acceleration using detection unit 14, and determines a voltage command value based on a feedback value from detection unit 14. Motor control unit 12 controls the driving of the motor by applying a modulated voltage using a pulse width modulation (PWM) method.

[0014] Servo motors 13 are motors for driving the spindle, X-axis, Y-axis, Z-axis, etc. of machine tool 2. The rotation amount, speed, torque, etc. of servo motors 13 are controlled by motor control unit 12. Servo motors 13 include, for example, servo motor 13a for driving the X-axis, servo motor 13b for driving the Y-axis, servo motor 13c for driving the Z-axis, servo motor 13d for driving the spindle, etc.

[0015] Detector 14 includes an encoder and detects at least one of the position, speed, and acceleration of servo motor 13 of machine tool 2 as a detected value of servo motor 13. Detector 14 includes, for example, detector 14a that detects the detected value of servo motor 13a, detector 14b that detects the detected value of servo motor 13b, detector 14c that detects the detected value of servo motor 13c, detector 14d that detects the detected value of servo motor 13d, etc. Detector 14 then outputs the detected value to motor control unit 12 as a feedback value.

[0016] The data storage unit 15 stores the operation command created by the command creation unit 11 and the detection value detected by the detection unit 14 in association with each other.

[0017] The vibration factor estimation unit 16 estimates the vibration factor of the servo motor 13 based on the operation command and the detection value corresponding to the operation command.

[0018] Furthermore, the command creation unit 11 creates an operation command including control enable or control suppression of the servo motor 13 as a control state by adjusting the gain of the servo motor 13, setting the torque command of the servo motor 13 to 0, or cutting off power to the servo motor 13. Here, suppressing control of the servo motor 13 includes, for example, not only completely disabling the gain but also making the gain very small.

[0019] Furthermore, the vibration factor estimation unit 16 may compare two or more detection values ​​corresponding to different control states and, based on the difference between the detected values, estimate whether the vibration factor of a certain servo motor 13 is an internal factor, such as resonance or interference of an axis driven by the certain servo motor 13, or an external factor, such as vibration of an axis of another servo motor 13, vibration of peripheral equipment, or noise. Here, in this specification, the internal factor means, for an axis driven by a certain servo motor 13 (e.g., servo motor 13a), resonance or interference occurring in the axis (e.g., servo motor 13a). The external factor means, for an axis driven by a certain servo motor 13 (e.g., servo motor 13a), vibration occurring in other servo motors 13 (e.g., servo motor 13b, servo motor 13c, etc.), vibration of peripheral equipment, noise, etc.

[0020] For example, the vibration factor estimation unit 16 compares two detection values ​​corresponding to different control states. If the difference between the detected values ​​is equal to or greater than a predetermined threshold, and if it is determined from the detected values ​​and the positive or negative sign of the difference that the vibration in the control disabled state is smaller than the vibration in the control enabled state, the vibration factor estimation unit 16 determines that the vibration has been eliminated. This allows the vibration factor estimation unit 16 to estimate that the vibration factor is an internal factor. Furthermore, if the difference between the detected values ​​is less than a predetermined threshold, or if it is determined from the detected values ​​and the positive or negative sign of the difference that the vibration in the control disabled state is larger than the vibration in the control enabled state, the vibration factor estimation unit 16 determines that the vibration has not been eliminated. This allows the vibration factor estimation unit 16 to estimate that the vibration factor is an external factor.

[0021] Furthermore, the vibration factor estimation unit 16 may extract at least one feature of the vibration frequency, amplitude, and phase included in the detected value, compare two or more feature values ​​corresponding to different control states, and estimate whether the vibration factor of a certain servo motor 13 is an internal or external factor based on the difference between the compared feature values.

[0022] Furthermore, the vibration factor estimation unit 16 may extract the peak value of the detected value, compare two or more peak values ​​corresponding to different control states, and estimate whether the vibration factor of a certain servo motor 13 is an internal factor or an external factor based on the difference between the compared peak values.

[0023] Furthermore, when the detection unit 14 detects the detection values ​​of a plurality of servo motors 13 (servo motor 13a, servo motor 13b, servo motor 13c, etc.), the vibration cause estimation unit 16 may compare two or more detection values ​​corresponding to different control states other than a certain motor, and estimate whether the vibration cause of a certain servo motor 13 is a cause of another servo motor 13 within the same machine tool 2 based on the difference between the compared detection values.

[0024] Fig. 2 is a diagram showing a first processing example of the vibration factor estimating device 1 according to this embodiment. Fig. 3A is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in normal times, and Fig. 3B is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when X-axis control is disabled.

[0025] 2, vibration cause estimation device 1 controls servo motor 13a that drives X-axis 17a, servo motor 13b that drives Y-axis 17b, servo motor 13c that drives Z-axis 17c, and servo motor 13d that drives the spindle of machine tool 2. Furthermore, detector 14a detects the detection value of servo motor 13a, detector 14b detects the detection value of servo motor 13b, detector 14c detects the detection value of servo motor 13c, and detector 14d detects the detection value of servo motor 13d.

[0026] In the processing example shown in Fig. 2, vibration A1 occurs in X-axis 17a. As shown in Fig. 3A, the positions of Y-axis 17b and Z-axis 17c fluctuate in accordance with commands, but the position of X-axis 17a does not follow the commands and is unstable. When control of X-axis 17a is disabled by vibration cause estimation device 1, the position of X-axis 17a becomes constant, as shown in Fig. 3B, and no vibration occurs in X-axis 17a. Therefore, vibration cause estimation device 1 estimates that the cause of vibration of X-axis 17a is not an external factor such as other servo motors 13 (servo motor 13b, servo motor 13c, etc.) of machine tool 2 or other processing machines and peripheral devices, but is an internal factor of X-axis 17a itself, such as resonance or interference of X-axis 17a.

[0027] Fig. 4 is a diagram showing a second processing example of the vibration factor estimation device 1 according to this embodiment. Fig. 5A is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in normal times, Fig. 5B is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of the X-axis is disabled, and Fig. 5C is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when control of axes other than the X-axis is disabled.

[0028] In the processing example shown in Fig. 4, vibration A2 occurs in X-axis 17a. As shown in Fig. 5A, under normal circumstances, the positions of Y-axis 17b and Z-axis 17c fluctuate in accordance with commands, but the position of X-axis 17a is unstable. When control of X-axis 17a is disabled by vibration cause estimation device 1, as shown in Fig. 5B, the positions of Y-axis 17b and Z-axis 17c fluctuate in accordance with commands, but the position of X-axis 17a is unstable.

[0029] Furthermore, when the vibration cause estimation device 1 disables control of axes other than the X-axis 17a, the positions of the Y-axis 17b and Z-axis 17c become constant, but the position of the X-axis 17a becomes unstable, as shown in FIG. 5C. Therefore, even when the control of the X-axis 17a is disabled, the X-axis 17a still vibrates, and the differences in the vibration frequency, amplitude, and phase included in the detected values ​​are small. Furthermore, the controlled axes other than the X-axis 17a do not affect the vibration. Therefore, the vibration cause estimation device 1 estimates that the cause of the vibration of the X-axis 17a is an external factor, such as other processing machines and peripheral devices other than the other servo motors 13 (servo motors 13b, 13c, etc.) of the machine tool 2.

[0030] Fig. 6 is a diagram showing a third processing example of the vibration factor estimation device 1 according to this embodiment. Fig. 7A is a diagram showing the positions of the X-axis, Y-axis, and Z-axis in normal times, Fig. 7B is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when X-axis control is disabled, and Fig. 7C is a diagram showing the positions of the X-axis, Y-axis, and Z-axis when Y-axis control is disabled.

[0031] In the processing example shown in Fig. 6, vibration A3 occurs in Y-axis 17b, and vibration A4 occurs in X-axis 17a. As shown in Fig. 7A, under normal circumstances, the position of Z-axis 17c fluctuates in accordance with a command, but the positions of X-axis 17a and Y-axis 17b are unstable.

[0032] When the control of the X-axis 17a is disabled by the vibration factor estimation device 1, the position of the Z-axis 17c fluctuates in accordance with the command, but the positions of the X-axis 17a and the Y-axis 17b are unstable, as shown in Fig. 7B. When the control of the Y-axis 17b is disabled by the vibration factor estimation device 1, the position of the Y-axis 17b becomes constant, and the positions of the X-axis 17a and the Z-axis 17c fluctuate in accordance with the command, as shown in Fig. 7C.

[0033] Therefore, even when the control of the X-axis 17a is disabled, the X-axis 17a still vibrates, and the difference between the detected values ​​is small. Furthermore, when the control of the Y-axis 17b is disabled, the Y-axis 17b does not vibrate, and the difference between the detected values ​​is large. Furthermore, the X-axis does not vibrate. Therefore, the vibration factor estimation device 1 estimates that the cause of the vibration of the Y-axis 17b is the Y-axis 17b itself, and that the cause of the vibration of the X-axis 17a is the Y-axis 17b.

[0034] Fig. 8 is a diagram showing the control states of the X-axis, Y-axis, and Z-axis. Fig. 9 and Fig. 10 are flowcharts showing the processing of the vibration cause estimation device 1 according to this embodiment. In the explanations shown in Fig. 8 to Fig. 10, the vibration cause estimation device 1 estimates the vibration cause of the X-axis in a machine tool 2 having an X-axis, a Y-axis, and a Z-axis.

[0035] As shown in FIG. 8, control state C1 indicates that control of the X-axis, Y-axis, and Z-axis is in the ON state, control state C2 indicates that control of the X-axis is in the OFF state and control of the Y-axis and Z-axis is in the ON state, control state C3 indicates that control of the X-axis is in the ON state and control of the Y-axis and Z-axis is in the OFF state, control state C4 indicates that control of the X-axis and Z-axis is in the ON state and control of the Y-axis is in the OFF state, control state C5 indicates that control of the X-axis and Y-axis is in the ON state and control of the Z-axis is in the OFF state, control state C6 indicates that control of the X-axis and Z-axis is in the OFF state and control of the Y-axis is in the ON state, and control state C7 indicates that control of the X-axis and Y-axis is in the OFF state and control of the Z-axis is in the ON state.

[0036] In step S1 of FIG. 9, the command creation unit 11 creates operation commands including control states C1 to C5 of the X-axis, Y-axis, and Z-axis of the machine tool 2 in order to estimate the cause of vibration of the X-axis.

[0037] In step S2, motor control unit 12 controls servo motors 13 (for example, servo motors 13a, 13b, and 13c described above) corresponding to the X-axis, Y-axis, and Z-axis of machine tool 2 based on the operation command.

[0038] In step S3, the detection unit 14 detects a detection value corresponding to the control state C1, a detection value corresponding to the control state C2, and a detection value corresponding to the control state C3 as detection values ​​of the servo motor 13. The data storage unit 15 stores the operation command including the control states C1 to C3 created in step S1 in association with the detection values ​​detected in step S2. Specifically, the data storage unit 15 stores an operation command including a control state C1 in association with a detection value corresponding to the control state C1. Similarly, the data storage unit 15 stores an operation command including a control state C2 in association with a detection value corresponding to the control state C2, and stores an operation command including a control state C3 in association with a detection value corresponding to the control state C3.

[0039] In step S4, the vibration factor estimation unit 16 compares the detected value corresponding to the control state C1 with the detected value corresponding to the control state C2. In step S5, the vibration factor estimation unit 16 determines whether the vibration of the X-axis has been resolved in the control state C2. If the vibration of the X-axis has been resolved (YES), the process proceeds to step S6. On the other hand, if the vibration of the X-axis has not been resolved (NO), the process proceeds to step S7.

[0040] In step S6, the vibration factor estimation unit 16 estimates the X-axis itself as the vibration factor, and ends the process.

[0041] In step S7, the vibration factor estimation unit 16 estimates that the vibration factor is an external factor, and the process proceeds to step S8. In step S8, the vibration factor estimation unit 16 compares the detection value corresponding to the control state C1 with the detection value corresponding to the control state C3.

[0042] In step S9, the vibration cause estimation unit 16 determines whether the vibration of the X-axis has been resolved. If the vibration of the X-axis has not been resolved (YES), the process proceeds to step S10. On the other hand, if the vibration of the X-axis has been resolved (NO), the process proceeds to step S11.

[0043] In step S10, the vibration factor estimation unit 16 estimates that the vibration factor is an external factor (other processing machines, peripheral devices, etc.) other than the control axis, and ends the process.

[0044] In step S11, the detection unit 14 detects a detection value corresponding to the control state C4 and a detection value corresponding to the control state C5 as detection values ​​of the servo motor 13. The data storage unit 15 stores the operation command including the control states C4 and C5 created in step S1 in association with the detection values ​​detected in step S11.

[0045] In step S12, the vibration factor estimation unit 16 compares the detection value corresponding to the control state C1 with the detection value corresponding to the control state C4. In step S13, the vibration cause estimation unit 16 determines whether the vibration of the X-axis has been resolved in control state C4. If the vibration of the X-axis has been resolved (YES), the process proceeds to step S14. On the other hand, if the vibration of the X-axis has not been resolved (NO), the process proceeds to step S15.

[0046] In step S14, the vibration factor estimation unit 16 estimates the vibration of the Y-axis as the vibration factor, and ends the process. In step S15, the vibration factor estimation unit 16 compares the detection value corresponding to the control state C1 with the detection value corresponding to the control state C5.

[0047] In step S16, the vibration cause estimation unit 16 determines whether the vibration of the X-axis has been resolved in control state C4. If the vibration of the X-axis has been resolved (YES), the process proceeds to step S17. On the other hand, if the vibration of the X-axis has not been resolved (NO), the process then ends. In step S17, the vibration factor estimation unit 16 estimates the Z-axis vibration as the vibration factor, and ends the process.

[0048] In the above-described flowchart, the vibration factor estimation device 1 estimates the vibration factor of the X-axis in the machine tool 2 having an X-axis, Y-axis, and Z-axis. However, the vibration factor estimation device 1 may further estimate the vibration factor of the Y-axis using control state C6 in Fig. 8 and the detection value corresponding to control state C6 after estimating the vibration of the Y-axis as the vibration factor in step S14. Furthermore, the vibration factor estimation device 1 may further estimate the vibration factor of the Z-axis using control state C7 and the detection value corresponding to control state C7 after estimating the vibration of the Z-axis as the vibration factor in step S17.

[0049] As described above, according to this embodiment, the vibration cause estimation device 1 comprises a command creation unit 11 that creates operation commands including the control state of each control axis of the machine tool 2; a motor control unit 12 that controls the servo motor 13 of the machine tool 2 based on the operation commands; a detection unit 14 that detects at least one of the position, speed, and acceleration of the servo motor 13 of the machine tool 2 as a detection value of the servo motor 13; and a vibration cause estimation unit 16 that estimates the vibration cause of the servo motor 13 based on the operation commands and the detection value corresponding to the operation commands.

[0050] As a result, the vibration factor estimation device 1 can extract disturbance components by analyzing feedback while the control of its own axis is isolated, making it easier to identify the cause of vibration. Therefore, the vibration factor estimation device 1 can reduce the amount of work required by an operator to identify the cause of vibration. Furthermore, the vibration factor estimation device 1 can improve the machining accuracy of the machine tool 2 by identifying the cause of vibration and improving or eliminating the cause of vibration.

[0051] Furthermore, the data storage unit 15 stores the operation commands created by the command creation unit 11 in association with the detection values ​​detected by the detection unit 14. This allows the vibration factor estimation device 1 to identify the vibration factor using the detection values ​​corresponding to the operation commands.

[0052] Furthermore, the command creation unit 11 creates an operation command including, as a control state, control enable or control suppression of the servo motor 13. This allows the vibration cause estimation device 1 to estimate the vibration cause by switching between control enable or control suppression (including control disable) of the servo motor 13.

[0053] Furthermore, the command creation unit 11 creates an operation command including control enable or control suppression for the servo motor 13 as the control state by adjusting the gain of the servo motor 13, setting the torque command of the servo motor 13 to 0, or cutting off power to the servo motor 13. This allows the vibration cause estimation device 1 to estimate the cause of vibration by adjusting the gain of the servo motor 13, adjusting the torque command, or cutting off power.

[0054] In addition, the vibration factor estimation unit 16 may compare two or more detection values ​​corresponding to different control states and estimate whether the vibration factor of a certain servo motor 13 is an internal factor or an external factor based on the difference between the detected values.

[0055] Furthermore, the vibration factor estimation unit 16 may extract at least one feature of the vibration frequency, amplitude, and phase included in the detected value, compare two or more feature values ​​corresponding to different control states, and estimate whether the vibration factor of a certain servo motor 13 is an internal or external factor based on the difference between the compared feature values.

[0056] Furthermore, the vibration factor estimation unit 16 may extract the peak value of the detected value, compare two or more peak values ​​corresponding to different control states, and estimate whether the vibration factor of a certain servo motor 13 is an internal factor or an external factor based on the difference between the compared peak values.

[0057] Furthermore, when the detection unit 14 detects the detection values ​​of a plurality of servo motors 13 (servo motor 13a, servo motor 13b, servo motor 13c, etc.), the vibration factor estimation unit 16 may compare two or more detection values ​​corresponding to different control states other than a certain motor, and estimate, based on the difference between the compared detection values, whether the vibration factor of a certain servo motor 13 is a factor of another servo motor 13 within the same machine tool 2. By performing such processing, the vibration factor estimation unit 16 can suitably estimate the vibration factor.

[0058] The embodiments of the present invention have been described above, but the vibration factor estimation device 1 can be realized by hardware, software, or a combination of these. The control method performed by the vibration factor estimation device 1 can also be realized by hardware, software, or a combination of these. "Realized by software" here means that the method is realized by a computer reading and executing a program.

[0059] The program can be stored and provided to a computer using various types of non-transitory computer readable media. Non-transitory computer readable media include various types of tangible storage media. Examples of non-transitory computer readable media include magnetic recording media (e.g., hard disk drives), magneto-optical recording media (e.g., magneto-optical disks), CD-ROMs (Read Only Memory), CD-Rs, CD-R / Ws, and semiconductor memories (e.g., mask ROMs, PROMs (Programmable ROMs), EPROMs (Erasable PROMs), flash ROMs, and RAMs (Random Access Memory)).

[0060] Furthermore, although the above-described embodiments are preferred embodiments of the present invention, the scope of the present invention is not limited to only the above-described embodiments, and the present invention can be implemented in various modified forms within the scope that does not deviate from the gist of the present invention. [Explanation of symbols]

[0061] 1. Vibration factor estimation device 2 Machine tools 11. Instructions Preparation Department 12 Motor control unit 13 Servo motor 14 Detector 15 Data storage unit 16 Vibration factor estimation section

Claims

1. a command creation unit that creates an operation command including a control state of each control axis of the industrial machine; a motor control unit that controls a motor of the industrial machine based on the operation command; a detection unit that detects at least one of a position, a speed, and an acceleration of a motor of the industrial machine as a detection value of the motor; a vibration factor estimation unit that estimates a vibration factor of the motor based on the operation command and the detection value corresponding to the operation command; Equipped with the command creation unit creates the operation command including, as the control state, control enable and control suppression of the motor. Vibration cause estimation device.

2. The vibration factor estimating device according to claim 1 , further comprising a data storage unit that stores the operation command created by the command creating unit and the detection value detected by the detecting unit in association with each other.

3. 2. The vibration cause estimation device according to claim 1, wherein the command creation unit creates the operation command including control enable and control suppression of the motor by adjusting a gain of the motor, setting a torque command of the motor to 0, or cutting off power to the motor as the control state.

4. 4. The vibration factor estimation device according to claim 1, wherein the vibration factor estimation unit compares two or more of the detection values ​​corresponding to different control states and estimates whether a vibration factor of the motor is an internal factor or an external factor based on a difference between the comparison of the detection values.

5. 4. The vibration factor estimation device according to claim 1, wherein the vibration factor estimation unit extracts at least one feature amount of a vibration frequency, an amplitude, or a phase included in the detection value, compares two or more of the feature amounts corresponding to different control states, and estimates whether a vibration factor of the motor is an internal factor or an external factor based on a difference between the feature amounts.

6. 4. The vibration factor estimation device according to claim 1, wherein the vibration factor estimation unit extracts peak values ​​of the detection values, compares two or more of the peak values ​​corresponding to different control states, and estimates whether a vibration factor of the motor is an internal factor or an external factor based on a difference between the compared peak values.

7. the detection unit detects detection values ​​of the plurality of motors, 4. The vibration factor estimation device according to claim 1, wherein the vibration factor estimation unit compares two or more of the detection values ​​corresponding to different control states other than a certain motor, and estimates whether a vibration factor of the motor is caused by another motor in the industrial machine based on a difference between the comparison of the detection values.

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