Modular Abatement Equipment

Abstract

A modular abatement apparatus and method is disclosed for abating exhaust streams from semiconductor processing tools, the abatement apparatus comprising a housing defining a common housing chamber and a plurality of combustion chamber modules positionable within the common housing chamber for treating the exhaust streams, each combustion chamber module including a perforated sleeve defining a combustion chamber therein. In this manner, a plurality of combustion chambers may be provided within a single common housing, each of which may be configured to treat a particular exhaust stream. Thus, the number of combustion chambers may be selected to accommodate different types and flow rates of exhaust streams expected from any particular processing tool. This results in an architecture that is easily scalable to accommodate the needs of different exhaust gas stream types and flow rates while maintaining a common housing that may be interconnected with upstream and downstream components.

Description

[Technical Field]

[0001] The field of the invention relates to modular abatement devices and methods. [Background technology]

[0002] Abatement devices, such as radiant burners, are known and are typically used to treat exhaust gas streams from manufacturing process tools used, for example, in the semiconductor or flat panel display manufacturing industries. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gas streams pumped from the process tools. PFCs are difficult to remove from the exhaust gases, and their release into the environment is undesirable because they are known to have a relatively high greenhouse effect.

[0003] Known radiant burners, such as those described in European Patent Publication No. 0,694,735, use combustion to remove PFCs and other compounds from an exhaust gas stream. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. The exhaust gas stream is conveyed to a combustion chamber laterally surrounded by the exit face of a perforated gas burner. In some cases, a treatment material, such as a fuel gas, can be mixed with the exhaust gas stream before entering the combustion chamber. The fuel gas and air are simultaneously supplied to the perforated burner to affect combustion at the exit face. Combustion products from the perforated burner react with the exhaust stream mixture to combust the compounds in the exhaust stream. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] European Publication No. 0,694,735 Summary of the Invention [Problem to be solved by the invention]

[0005] Although techniques for treating exhaust gas streams exist, each has its own drawbacks. It would therefore be desirable to provide improved techniques for treating exhaust gas streams. [Means for solving the problem]

[0006] According to a first aspect, a modular abatement apparatus is provided for abating an exhaust stream from a semiconductor processing tool, the abatement apparatus comprising: a housing defining a common housing chamber; and a plurality of combustion chamber modules positionable within the common housing chamber for treating the exhaust stream, each combustion chamber module including a perforated sleeve defining a combustion chamber therein.

[0007] The first aspect recognizes that a problem with existing abatement device configurations is that they cannot be easily scaled to handle different types and / or amounts of exhaust streams. That is, each abatement device is typically designed to handle a specific exhaust stream and flow rate, and the design is then validated through testing. Also, when intermittent exhaust streams are supplied, different abatement devices are typically provided, and these abatement devices are placed in active and idle modes in response to the intermittent exhaust streams. These different abatement devices typically have their own downstream processing equipment, which can lead to larger-than-desired installations. Also, when different exhaust stream flow rates need to be handled, a new design is typically required, which then needs to be validated. While some standard components can be reused, each design is therefore inherently unique, and the basic architecture of existing configurations has scalability limitations.

[0008] Thus, an abatement apparatus can be provided. The abatement apparatus can be a modular abatement apparatus. The apparatus can abate or treat an exhaust stream or process stream from a semiconductor processor tool. The apparatus can include a housing or enclosure defining a common, shared, or unitary housing chamber. The apparatus can include multiple combustion chamber modules or units. The combustion chamber modules can be positioned or located within or within the common housing chamber. Each combustion chamber module can include or house a perforated or porous sleeve or jacket. The sleeve can define, surround, or enclose the combustion chamber. In other words, each combustion chamber module can be unitary and provide its own combustion chamber. In this manner, multiple combustion chambers can be provided within a single common housing, each configured to treat a specific exhaust stream. Thus, the number of combustion chambers can be selected to accommodate different types and flow rates of exhaust streams expected from any particular processing tool. This results in an architecture that is easily scalable to meet the needs of different exhaust gas stream types and flow rates while maintaining a common housing that can interconnect with upstream and downstream components.

[0009] The perforated sleeve may be of unitary construction or formed from a single continuous piece.

[0010] The combustion chambers can be shaped and / or sized to occupy a modular cross-sectional area, and the common housing chamber can be shaped and / or sized to span multiple modular cross-sectional areas. In other words, the combustion chamber modules can be thought of as occupying a predetermined cross-sectional area of ​​a single unit, and the common housing chamber can be designed to provide space for multiples of those units of cross-sectional area.

[0011] The common housing chamber may be shaped and sized to span the cross-sectional area of ​​a plurality of adjacent modules.

[0012] The common housing chamber may be shaped and sized to span an N x M array of adjacent module cross-sectional areas.

[0013] N may be equal to M. Thus, the array may be a square array.

[0014] N may not be equal to M. Thus, the array may be a rectangular array.

[0015] The common housing chamber can be shaped and sized to span multiple adjacent module cross-sectional areas and the pilot module cross-sectional area, i.e., the common housing chamber can accommodate multiple combustion chamber modules and pilot modules.

[0016] The common housing chamber can have a head plate. The head plate can define an upstream surface of the housing chamber. The head plate can have a plurality of exhaust inlets. Each of the exhaust inlets can be positioned toward the center or away from the periphery of the cross-sectional area of ​​the corresponding module. In other words, for each designated cross-sectional area in the housing chamber, at least one exhaust inlet can be provided, and at least one exhaust inlet can be positioned away from the periphery of the cross-sectional area of ​​the module to deliver exhaust flow toward the center of that combustion chamber and away from the perforated sleeve.

[0017] The head plate can have multiple process material inlets, each positioned toward the periphery of the corresponding module cross-sectional area or away from the center of the corresponding module cross-sectional area, to aid in delivering process material proximate the perforated sleeve.

[0018] The head plate may include a purge inlet configured to deliver a purge gas to a gap or void in the common housing chamber between the multiple combustion chamber modules, which helps prevent residue buildup between the combustion chamber modules.

[0019] The head plate may include a gallery that may be in fluid communication with the purge inlet for delivering or conveying purge gas to a space within the common housing chamber between the multiple combustion chamber modules.

[0020] Multiple combustion chamber modules may be releasably or removably held or secured within a common housing chamber, allowing the combustion chambers to be removed or replaced as needed to allow for repair or reconfiguration of the device.

[0021] The multiple combustion chamber modules can have releasable locking mechanisms that can be configured to releasably engage or lock with complementary releasable locking mechanisms in the housing chamber, such that each combustion chamber module can be individually secured into and released from the common housing chamber.

[0022] Multiple combustion chambers may be positioned adjacent or abutting one another within the common housing chamber, allowing the combustion chambers to be closely packed within the space provided by the common housing chamber.

[0023] Multiple combustion chamber modules may be tessellated within a common housing chamber, thereby reducing gaps between the combustion chamber modules and increasing packing density within the common housing chamber.

[0024] The combustion chamber modules may be of different sizes, i.e., combustion chamber modules of different cross-sectional areas may be provided, allowing different sized combustion chamber modules to be provided for different exhaust flow requirements.

[0025] Each combustion chamber can be shaped and / or sized to occupy a multiple of the cross-sectional area of ​​a module. That is, if a module is intended to occupy the cross-sectional area of ​​one unit, each combustion chamber module is shaped and sized to occupy a multiple (typically an integer) of the cross-sectional area of ​​that unit. This helps ensure that multiple combustion chamber modules of different sizes can fit within a common housing chamber, even when different sized combustion chamber modules are used.

[0026] At least one combustion chamber module may be a multiple size combustion chamber module shaped and sized to occupy a plurality of module cross-sectional areas.

[0027] Multiple size combustion chamber modules may be shaped and / or sized to occupy a PxQ array of adjacent module cross-sectional areas.

[0028] P may be equal to Q. In other words, the multiple size combustion chamber module may be square.

[0029] P may not be equal to Q. In other words, the multiple size combustion chamber module may be rectangular.

[0030] Each combustion chamber module may include a perforated sleeve that surrounds the combustion chamber, or in other words, that defines all combustion surfaces of the combustion chamber.

[0031] Each combustion chamber module can include a module housing. The module housing can be positioned or located apart from the perforated sleeve. The module housing can surround the perforated sleeve. The module housing can define a combustion chamber plenum configured to convey treatment material from a corresponding treatment material inlet, through the perforated sleeve, and into the corresponding combustion chamber. Thus, each combustion chamber can be supplied with its own treatment material via a plenum formed in the module housing of the combustion chamber module.

[0032] Each combustion chamber may be tubular, it being understood that a variety of different cross-sectional shapes of the tubes are possible, including circular, non-circular, rectangular, and polygonal.

[0033] Each combustion chamber may include an outlet for conveying the treated exhaust stream to a downstream treatment device. In other words, the exhaust stream treated in the combustion chamber is discharged to the downstream treatment device through the outlet. This allows a common downstream treatment device to be provided for all combustion chambers, eliminating the need for a dedicated downstream treatment device for each combustion chamber.

[0034] At least one combustion chamber module may include a combustion chamber mount through which a corresponding exhaust inlet may extend. The combustion chamber mount may carry the exhaust flow and treatment material from the head plate to the combustion chamber plenum. The mount may be made of a material that is less heat-resistant and less corrosion-resistant than the combustion chamber. The combustion chamber mount may be sized to shorten or modify the internal length of the combustion chamber relative to other combustion chambers. Typically, the mount may be used to shorten the length of the combustion chamber between the exhaust inlet and outlet to provide multiple combustion chambers with different characteristics all housed within a common housing chamber.

[0035] The common housing chamber can include a wall configured to extend around the plurality of combustion chamber modules, and the wall can extend from the head plate to the downstream processing equipment.

[0036] The downstream processing device can include a weir. The weir can be positioned downstream of the common housing chamber. The weir can have a cross-sectional area that matches or is similar to the cross-sectional area of ​​the common housing chamber. This allows the common housing chamber holding multiple combustion chamber modules to be positioned on the weir, which allows for a compact configuration and allows multiple combustion chamber modules to share the weir for downstream processing.

[0037] Each combustion chamber module may be sized to extend from the common housing chamber at least partially into the weir.

[0038] The device can include at least one blanking module, blocking module, or filling module that can be positioned in a common housing chamber adjacent to or abutting the at least one combustion chamber module. Thus, the blanking module can be positioned in the common housing chamber when a combustion chamber is not needed in that location. This results in a flexible and reconfigurable device.

[0039] The blanking module can include a blanking plate. The blanking plate can span the blanking module. The blanking plate can be aligned with the exhaust port. Thus, the blanking plate effectively obscures the space that the blanking module fills. The blanking plate can include a perforated surface. The perforated surface can carry combustion reactants for combustion thereon or can carry purge gas to provide a purged surface.

[0040] The apparatus can include logic operable to control multiple process material inlets. The control logic can control the multiple process material inlets independently, together, and / or in groups.

[0041] The control logic may be operable to control multiple exhaust inlets. The control logic may be operable to control multiple exhaust inlets independently, together, and / or in groups.

[0042] According to a second aspect, there is provided a method including the steps of determining dimensions of a housing defining a common housing chamber, and positioning a plurality of combustion chamber modules within the common housing chamber to process exhaust flows, each combustion chamber module including a perforated sleeve defining a combustion chamber therein.

[0043] The method may include shaping and sizing at least one combustion chamber module to occupy a module cross-sectional area, and shaping and sizing a common housing chamber to span at least a plurality of the module cross-sectional areas.

[0044] The method may include shaping and sizing a common housing chamber to span cross-sectional areas of at least a plurality of adjacent modules.

[0045] The method can include shaping and sizing the common housing chamber to span at least an N x M array of adjacent module cross-sectional areas.

[0046] N may be equal to M.

[0047] N may not be equal to M.

[0048] The method may include shaping and sizing a common housing chamber to span a plurality of module cross-sectional areas and a pilot module cross-sectional area.

[0049] The method may include providing a head plate defining an upstream surface of the housing chamber, and positioning a plurality of discharge inlets within the head plate, each discharge inlet positioned toward the center of a corresponding module cross-sectional area.

[0050] The method can include providing a plurality of process material inlets in the head plate, each of the plurality of process material inlets positioned toward a periphery of a corresponding module cross-sectional area.

[0051] The method can include providing a purge inlet in the head plate configured to deliver purge gas to a space within a common housing chamber between a plurality of combustion chamber modules.

[0052] The method may include providing a gallery in the head plate in fluid communication with the purge inlet for delivering purge gas to a space within a common housing chamber between the plurality of combustion chamber modules.

[0053] The method may include releasably retaining a plurality of combustion chamber modules within a common housing chamber.

[0054] The method may include providing a releasable locking mechanism on each combustion chamber configured to releasably engage a complementary releasable locking mechanism in the common housing chamber.

[0055] The method may include positioning a plurality of combustion chamber modules adjacent to one another within a common housing chamber.

[0056] The method may include tessellating a plurality of combustion chamber modules within a common housing chamber.

[0057] The method may include providing combustion chamber modules of different sizes.

[0058] The method may include shaping and sizing each combustion chamber module to occupy a multiple of the module cross-sectional area.

[0059] The method may include providing at least one combustion chamber module as a multiple size combustion chamber module shaped and sized to occupy a plurality of module cross-sectional areas.

[0060] The method may include shaping and sizing multiple sized combustion chamber modules to occupy a PxQ array of adjacent module cross-sectional areas.

[0061] P may be equal to Q.

[0062] P may not be equal to Q.

[0063] The method may include providing a perforated sleeve in each combustion chamber module surrounding the combustion chamber.

[0064] The method may include providing each combustion chamber module with a module housing spaced apart from and surrounding the perforated sleeve to define a combustion chamber plenum configured to convey treatment material from a corresponding treatment material inlet, through the perforated sleeve, and into the combustion chamber.

[0065] The method may include forming each combustion chamber module to be tubular.

[0066] The method may include providing an outlet in each combustion chamber module that conveys the treated exhaust stream to a downstream treatment device.

[0067] The method may include providing at least one combustion chamber module with a combustion chamber mount having a corresponding exhaust inlet extending therethrough, and sizing the combustion chamber mount to reduce the internal length of the combustion chamber relative to other combustion chambers.

[0068] The common housing chamber may include a wall extending around the plurality of combustion chamber modules, the wall extending from the head plate to the downstream processing equipment.

[0069] The method may include providing a weir having a cross-sectional area matching a cross-sectional area of ​​the common housing chamber as a downstream processing device positioned downstream of the common housing chamber.

[0070] The method may include sizing each combustion chamber module to extend from the common housing chamber at least partially into the weir.

[0071] The method may include positioning at least one blanking module in a common housing chamber adjacent to the at least one combustion chamber module.

[0072] The method may include providing the blanking module with a blanking plate extending across the blanking module and aligned with the outlet.

[0073] The method can include controlling multiple process material inlets independently, together, and / or in groups.

[0074] The method may include controlling multiple exhaust inlets independently, together, and / or in groups.

[0075] Further particular and preferred aspects are set out in the accompanying independent and dependent claims. Features of the dependent claims may be combined with features of the independent claims as appropriate and in combinations other than those explicitly set out in the claims.

[0076] Where features of an apparatus are described as being operable to provide a certain function, this will be understood to include features of an apparatus that provide that function or that are adapted or configured to provide that function.

[0077] Embodiments of the present invention will now be further described with reference to the accompanying drawings. [Brief explanation of the drawings]

[0078] [Figure 1A] 1 is a perspective view of components of a modular abatement apparatus according to one embodiment. [Figure 1B] 1B is a cross-sectional view of FIG. 1A showing a cross-sectional view of pilot module 20. FIG. [Figure 1C] 1B is a cross-sectional view of FIG. 1A showing a cross-sectional view of the combustion chamber module. [Figure 1D] FIG. 3 is a cross-sectional view showing the combustion chamber module in more detail. [Figure 2A] 1 shows the head plate in more detail. [Figure 2B] FIG. 2 is a view of the combustion chamber module as seen from the downstream side. [Figure 3A-B] With the housing removed, the configuration of the combustion chamber module and pilot module is shown in more detail. [Figure 4A-J] 10A-10C show schematic diagrams of different configurations of the housing and combustion chamber module; [Figure 5] 1 shows different inlet supply configurations for the inlet of the combustion chamber; [Figure 6] FIG. 2 is a schematic side view of a pair of adjacent combustion chamber modules having different lengths. DETAILED DESCRIPTION OF THE INVENTION

[0079] Before describing the embodiments in further detail, an overview will be provided. Some embodiments provide a modular architecture for an abatement device. This modular architecture allows different configurations of the abatement device to be manufactured to accommodate different types of exhaust streams and / or different amounts or flow rates of the exhaust stream using a standardized set of components. The building blocks of this architectural approach will typically begin with combustion chamber modules, which are sized as standard units sized to process a typical, minimum, or selected amount of exhaust stream. Each combustion chamber module is essentially self-contained, receiving its own exhaust stream and having its own perforated sleeve that defines its own combustion chamber for treatment of the exhaust stream using treatment materials, such as fuel and oxidizer, combusted on the perforated sleeve. A common housing is provided, sized to allow for the incorporation of combustion chambers in multiples of these standard unit sizes.

[0080] In a simple configuration, a common housing is formed to house an array of combustion chamber modules together within the housing. In this simple configuration, each of the combustion chamber modules has the same cross-sectional area, meaning that each occupies the same cross-sectional space within the common housing chamber. A head plate of the common housing can then be configured to deliver exhaust flow toward the center of each of the combustion chambers and deliver treatment material to the perforated sleeve of each combustion chamber module.

[0081] In another configuration, the combustion chamber modules have different cross-sectional areas, meaning that each occupies a different cross-sectional area of ​​space within the common housing chamber and is therefore optimized to handle different exhaust flows and / or flow rates. For example, combustion chambers 1.5, 2, 3, 4, etc. times the size of a standard unit's combustion chamber module can be provided. Again, these combustion chamber modules can be in a linear or array configuration. However, the head plate configuration can still remain the same; for example, a double-sized combustion chamber module can have two exhaust inlets that route the exhaust flow away from that combustion chamber's perforated sleeve. Additionally, two treatment material inlets can supply treatment material to the perforated sleeve. This allows the same common housing chamber to be filled with different numbers of larger combustion chamber modules or combustion chamber modules of different sizes. This allows for design flexibility while still maintaining a small number of common parts.

[0082] The effective length of each combustion chamber can be varied by changing the depth of the mounts on the head plate used to attach the combustion chambers within the common housing chamber, while still aligning the discharge ports of each combustion chamber. Similarly, if the full capacity of the common housing chamber is not needed, a blanking module can be incorporated into the housing to fill the space or void. The blanking module can provide a perforated ignition surface or a perforated purge surface. Again, this provides a customizable device using a minimum number of common parts.

[0083] This configuration provides self-contained combustion chambers within a common housing chamber, with each combustion chamber being individually operable and controllable without affecting the operation of the other combustion chamber modules. Also, each combustion chamber module can be individually removed and / or replaced. It will be appreciated that this configuration allows a variety of different configurations to be provided using a common set of components.

[0084] Abatement device Figure 1A is a perspective view of components of a modular abatement system 10 according to one embodiment. Figure 1B is a cross-sectional view of Figure 1A showing a cross-sectional view of pilot module 20. Figure 1C is a cross-sectional view of Figure 1A showing a cross-sectional view of combustion chamber module 30. Figure 1D is a cross-sectional view of combustion chamber module 30 in more detail.

[0085] A housing 40 is provided, defining a common housing chamber in which the combustion chamber modules 30 are mounted. A common head plate 150 is provided to cover the upstream opening of the housing 40. As can be seen in FIG. 2A , the head plate 150 receives an exhaust inlet 60 for supplying an exhaust flow, a process material inlet 70 for supplying a process material such as fuel, a pilot module inlet 110 for supplying fuel, and a purge inlet 160 for supplying an inter-module purge gas such as nitrogen. A weir 170 is located downstream of the housing 40, defining a wetted-wall chamber 180 having walls through which a fluid such as water flows during operation. In this example, there are two combustion chamber modules 30 linearly arranged within the housing 40; however, as described in more detail below, different configurations and numbers of combustion chamber modules 30 sharing a common housing and common head plate are possible.

[0086] Between the head plate 150 and the combustion chamber modules 30 are mounts 50 that hold the combustion chamber modules 30 in place within the housing 40. The depth of the mounts 50 can be varied to accommodate combustion chamber modules 30 of different lengths while ensuring that each combustion chamber module 30 discharges into the weir 170 at the same location.

[0087] The combustion chamber modules 30 include a module housing 80 with a perforated sleeve 90 mounted therein. The perforated sleeve 90 defines a combustion chamber 120 in which the supplied exhaust stream is treated. Each combustion chamber module 30 includes an exhaust inlet 60 that conveys the exhaust stream to be treated into the combustion chamber of that combustion chamber module 30. The perforated sleeve 90 is spaced slightly from the module housing 80 to define a plenum 100. A treatment material inlet 70 conveys treatment material, such as fuel, through the mount 50 and into the plenum 100 of the respective combustion chamber module 30. Thus, each combustion chamber module 30 is essentially self-contained, and its operation does not affect the other combustion chamber modules 30 in the housing 40.

[0088] 2B is a view from the downstream side of the combustion chamber module 30. As can also be seen in FIG. 1D, the perforated sleeve 90 has a planar upstream ceiling 200 from which depend four divergent walls 180 that terminate in a rounded shoulder 140 at the discharge end of the combustion chamber 120. This forms the combustion chamber 120 with a generally trapezoidal configuration. The pilot module 20 has a downstream discharge face 130 that abuts the shoulder 140 of the perforated sleeve 90.

[0089] 3A and 3B show the configuration of the combustion chamber module 30 and pilot module 20 in more detail with the housing 40 removed. In this embodiment, the combustion chamber modules 30 are of equal length, and therefore the mounts 50 are of equal height. To protect the shoulder 140 and discharge face 130 from damage during assembly, the shoulder 140 and discharge face 130 include protrusions 190 that allow the combustion chamber module 30 and pilot module 20 to rest on a surface without contacting the shoulder 140 and discharge face 130.

[0090] Housing and combustion chamber module configuration As can be seen in FIG. 4A, the housing 40 is configured to accommodate two combustion chamber modules 30 and a pilot module 20. Because the combustion chamber modules 30 are considered unit-sized, the housing 40, along with the pilot module 20, is sized to provide space for a linear, or 2×1, arrangement of the combustion chamber modules. This configuration is useful when two separate exhaust streams need to be treated independently of one another. As can be seen in FIG. 4B, the same size housing 40 can also accommodate a single combustion chamber module 30′, along with the pilot module 20, sized to occupy the space of a 2×1 unit. This configuration is useful when a larger flow rate of the exhaust stream needs to be treated. Thus, it can be seen that the same housing 40 can accommodate two separate combustion chamber modules 30 or a single, larger combustion chamber module 30′.

[0091] As can be seen in Figure 4C, a larger housing 40A can be provided that houses a 2x2 array of combustion chamber modules 30, along with the pilot module 20. As can be seen in Figure 4D, the same housing 40A can house an even larger combustion chamber module 30'' sized to occupy the space of a 2x2 unit. Alternatively, it will be appreciated that the housing 40A can house two combustion chamber modules 30', or a combination of a larger combustion chamber module 30' and a combustion chamber module 30, as shown in Figures 4E and 4F.

[0092] FIG. 4G shows the arrangement of housing 40B sized to accommodate a 2×3 array of combustion chamber modules 30, along with pilot module 20. As can be seen in FIG. 4H, larger sized combustion chambers 30′ can be installed in housing 40B, along with combustion chamber modules 30, if desired. It will also be understood that housing 40B can accommodate combinations of combustion chamber modules 30, larger combustion chamber modules 30′, and / or even larger combustion chamber modules 30″. It will also be understood that even larger combustion chamber modules can be provided.

[0093] As can be seen in FIG. 4I, the housing 40C can be sized to accommodate a 2×4 array of combustion chamber modules 30, along with the pilot module 20. As can be seen in FIG. 4J, some of those combustion chamber modules 30 can be replaced with larger modules, such as one or more combustion chamber modules 30′. It will also be understood that the housing 40C can accommodate a combination of combustion chamber modules 30, larger combustion chamber modules 30′, and / or even larger combustion chamber modules 30″. It will also be understood that even larger combustion chamber modules can be provided.

[0094] The housings 40A-40C can eliminate space for the pilot module 20 if an alternative pilot arrangement, such as a separate pilot for each combustion chamber module, is provided. In this embodiment, the combustion chamber modules and housings have a rectangular shape, but it will be understood that other shapes are possible, allowing any combustion chamber module to fit within the housing. The tessellated combination of combustion chamber modules is particularly space-efficient, allowing for minimal space between the combustion chamber modules being purged. Additionally, the combination of housings 40A-40C can be arranged to provide a larger abatement system.

[0095] It can thus be seen that the combustion chamber modules 30 can be sized to provide combustion chambers 120 suitable for processing minimal or typical exhaust stream flows, and the housing 40 can be sized to accommodate any number of these combustion chamber modules 30. Larger sized combustion chamber modules can also be provided, typically sized to be multiples of the combustion chamber modules 30 to accommodate different exhaust streams and / or different exhaust stream flows. The same housing 40 can then be used in different situations by simply incorporating the number and type of combustion chamber modules needed to meet the exhaust stream processing requirements. If not all of the processing capacity is needed, the combustion chamber modules can simply be omitted and blanking modules substituted in place of the unnecessary combustion chamber modules. Blanking modules typically comprise perforated surfaces that carry either combustion reactants (such as fuel and oxidant) for combustion thereon or a purge gas (such as nitrogen) to prevent the accumulation of particulates, powder, and condensate on the blanking modules.

[0096] 5 illustrates different inlet supply configurations for the inlets 60 of the combustion chambers 30, 30'. As can be seen, the combustion chamber 30 may have a single, elongated or oval inlet 60 positioned toward the center of the combustion chamber 120. A larger combustion chamber 30' may have a single, elongated or oval inlet 60' that is larger than the inlet 60 positioned toward the center of the combustion chamber 120, multiple inlets 60, multiple smaller circular inlets 60'', or a combination of the above to suit requirements.

[0097] As can be seen from FIG. 6, which is a schematic side view of a pair of adjacent combustion chamber modules, one of the combustion chamber modules 30'' is shorter in the direction of exhaust flow, and its mounting portion 50' is consequently higher so that both combustion chambers discharge into the downstream weir 170 at the same location.

[0098] Thus, it can be seen that, using a number of standard components, a standard housing can be selected to incorporate the required combination of combustion chamber modules 30, along with optional pilot modules 20, to suit the expected type and flow rate of the exhaust stream to be treated. During operation, each combustion chamber module 30 receives its own treatment material, as well as its own exhaust stream. The individual combustion chamber modules 30 can then be controlled and ignited from the pilot module 20, independently, together, or in groups, as needed. This allows some combustion chamber modules 30 to idle when there is no exhaust stream to be treated by that combustion chamber module 30, while other combustion chamber modules 30 continue to function.

[0099] Some embodiments provide a thermal treatment system capable of processing gases from a wide variety of applications in the same device by utilizing different combustion chamber modules. The modules share a common architecture, making it easy to customize and modify the assembly to keep up with changing upstream technology. The dimensions of the modules and the overall system can vary widely depending on the process requirements. The modules share downstream gas processing components, making it cost-effective and reducing system complexity. In this design, the modules fit into a larger plenum. An advantage of a common plenum is that the assembly is vacuum sealed, which simplifies the burner interface.

[0100] In addition, the common architecture allows the system to be adapted to many applications by selecting the appropriate modules; the common architecture allows cost-effective modification of existing systems to suit new specifications; the system footprint is significantly reduced due to the high packing density of the tessellated combination modules; the separate burner mount / plenum allows cost-effective replacement of burner modules; the separate pilot module allows for ignition and flame retardancy; the individual modules can be housed within a common plenum that is vacuum sealed at the top and bottom; interfacing at the top of the system reduces the footprint; and the common downstream gas handling components make the system cost-effective and reduce system complexity. [Explanation of symbols]

[0101] 10 Abatement equipment 20 Pilot Module 30 Combustion chamber module 40 Housing 50 Mounting section 60 Discharge inlet 70 Processing material inlet 80 module housing 90 Perforated Sleeve 100 Plenum 110 Pilot Module Entrance 120 Combustion chamber 130 Discharge surface 140 Shoulder 150 Head Plate 160 Purge inlet 170 Weir 180 Wall 190 Protrusion 200 ceiling

Claims

1. 1. A modular abatement apparatus for abatement of an exhaust stream from a semiconductor processing tool, comprising: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for processing the exhaust stream; Equipped with each of the combustion chamber modules includes a perforated sleeve defining a combustion chamber therein; At least one of the combustion chamber modules is shaped and sized to occupy a module cross-sectional area, and the common housing chamber is shaped and sized to span at least a plurality of the module cross-sectional areas; The modular abatement system, wherein the common housing chamber includes a head plate defining an upstream surface of the housing chamber, the head plate having a plurality of exhaust inlets each positioned toward a center of a corresponding modular cross-sectional area.

2. 10. The modular abatement system of claim 1, wherein said common housing chamber is shaped and sized to span the cross-sectional area of ​​at least a plurality of adjacent modules.

3. 10. The modular abatement system of claim 1, wherein said common housing chamber is shaped and sized to span at least an N x M array of adjacent module cross-sectional areas.

4. The modular abatement apparatus of claim 1, further comprising a pilot module, and the common housing chamber is shaped and dimensioned to span the multiple module cross-sectional areas and the pilot module cross-sectional area.

5. 10. The modular abatement system of claim 1, wherein said head plate has a plurality of treatment material inlets each positioned toward the periphery of a corresponding module cross-sectional area.

6. The plurality of combustion chamber modules may be releasably retained within the common housing chamber. The modular abatement system of claim 1 .

7. 10. The modular abatement system of claim 1, wherein the plurality of combustion chamber modules are arranged in a tessellated fashion within the common housing chamber.

8. The modular abatement system of claim 1 , wherein the plurality of combustion chamber modules comprises combustion chamber modules of different sizes.

9. 10. The modular abatement system of claim 1, wherein each of said combustion chamber modules is shaped and sized to occupy a multiple of said module cross-sectional area.

10. 10. The modular abatement system of claim 1, wherein at least one of said combustion chamber modules is a multiple size combustion chamber module shaped and sized to occupy a plurality of module cross-sectional areas.

11. 2. The modular abatement system of claim 1, wherein each of said combustion chamber modules includes said perforated sleeve surrounding said combustion chamber.

12. 12. The modular abatement device of claim 11, wherein each of the combustion chamber modules comprises a module housing positioned away from and surrounding the perforated sleeve to define a combustion chamber plenum, the combustion chamber plenum configured to convey treatment material from a corresponding treatment material inlet through the perforated sleeve and into the combustion chamber.

13. 10. The modular abatement system of claim 1, wherein each of said combustion chamber modules is tubular.

14. 10. The modular abatement system of claim 1, wherein each of the combustion chamber modules includes an outlet that conveys a treated exhaust stream to a downstream treatment device.

15. 2. The modular abatement device of claim 1, further comprising a combustion chamber mount portion that holds the combustion chamber module within the housing and through which a corresponding exhaust inlet extends, the depth of the combustion chamber mount portion being dimensioned to accommodate combustion chamber modules of different lengths.

16. 15. The modular abatement system of claim 14, wherein the common housing chamber comprises a wall configured to extend around the plurality of combustion chamber modules, the wall extending from the head plate to the downstream treatment device.

17. 15. The modular abatement system of claim 14, wherein the downstream treatment device comprises a weir positioned downstream of the common housing chamber, the weir having a cross-sectional area that matches a cross-sectional area of ​​the common housing chamber.

18. 10. The modular abatement system of claim 1, comprising at least one blanking module positioned within the common housing chamber adjacent at least one of the combustion chamber modules.

19. determining dimensions of a housing defining a common housing chamber; positioning a plurality of combustion chamber modules within the common housing chamber for processing exhaust streams, each of the combustion chamber modules including a perforated sleeve defining a combustion chamber therein; A method of manufacturing the modular abatement device of any one of claims 1 to 18, comprising:

Images