Storage equipment

Abstract

To take a target grinding wheel from a plurality of stacked grinding wheels.SOLUTION: A storage tool for storing a machining tool having an annular base and a grindstone or a pad provided on one surface side of the base comprises: a pair of side walls spaced apart to face each other; a plurality of linear supports provided along the depth direction of the side walls while being spaced apart from each other in the height direction of the side walls on the inner surface side of each of the side walls; a frame body having a first connection for connecting one ends of the side walls in the height direction of the side walls and a second connection for connecting the other ends of the side walls in the height direction; and a plate part supported by a pair of supports which can support the machining tool and which are arranged at positions corresponding to the height direction. The machining tool is stored, in the state of being supported by the plate part, together with the plate part in a space between the side walls from openings positioned between the side walls and the first and second connections.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a holder for holding a machining tool. [Background technology]

[0002] Electronic devices such as mobile phones are usually equipped with device chips, which are manufactured by, for example, forming devices such as integrated circuits (ICs) on the front side of a wafer made of a semiconductor material such as silicon, grinding the back side of the wafer to thin it, and then cutting and dividing the wafer.

[0003] A grinding machine is used to grind wafers (see, for example, Patent Document 1). The grinding machine has a cylindrical spindle whose longitudinal direction is arranged along the vertical direction. A disk-shaped wheel mount is fixed to the lower end of the spindle.

[0004] An annular grinding wheel is attached to the underside of the wheel mount. The grinding wheel has an annular base. A plurality of grinding stones are arranged around one side of the base.

[0005] There are various types of grinding wheels, depending on the material of the abrasive grains used in the grinding stone, the grain size of the abrasive grains, the concentration of the abrasive grains, the type of bond that secures the abrasive grains, the height and width of the grinding stone, the diameter of the base, etc. Furthermore, grinding stones wear out with use, so they are replaced as necessary.

[0006] Therefore, users of grinding machines must prepare in advance multiple grinding wheels with different specifications or multiple grinding wheels with the same specifications. Each grinding wheel is stored, for example, individually housed in a plastic case on a shelf or the like.

[0007] However, multiple grinding wheels are usually stored in a stacked state (so-called flat stack state) by stacking cases on top of each other, so when the grinding wheel to be used is on the bottom, all grinding wheels located above that grinding wheel must first be moved to the other side.

[0008] Such a moving operation is relatively difficult. Furthermore, when all the grinding wheels located above the grinding wheel to be used are temporarily moved to the other side, there is a risk that the grinding wheels may fall to the floor and be damaged. [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-288881 Summary of the Invention [Problem to be solved by the invention]

[0010] The present invention has been made in view of the above problems, and has as its object to easily remove a desired grinding wheel from a plurality of grinding wheels that are stacked. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a storage device for storing a machining tool having an annular base and a grinding stone portion or a pad portion provided on one side of the base, the storage device comprising: a pair of side walls arranged opposite to each other and spaced apart from each other; a frame body having a plurality of linear support portions each provided on an inner surface of the pair of side walls along the depth direction of the pair of side walls and spaced apart from each other in the height direction of the pair of side walls, a first connection portion connecting one end side of the pair of side walls in the height direction, and a second connection portion connecting the other end side of the pair of side walls in the height direction; and a plate portion capable of supporting the machining tool and supported by a pair of support portions arranged at corresponding positions in the height direction among the plurality of support portions, the plate portion has only one stopper portion on one surface side of the plate portion, which limits the position of one of the machining tools relative to the plate portion to a predetermined range;A storage device is provided in which the machining tool is supported by the plate portion and stored in the space between the pair of side walls together with the plate portion through an opening located between the pair of side walls and the first connecting portion and the second connecting portion.

[0013] Preferably, the container further includes a cover member on one surface side of the plate portion, the cover member being capable of covering the grindstone portion or the pad portion of the processing tool. [Effects of the Invention]

[0014] With the container according to one aspect of the present invention, the tool can be removed from the frame by pulling out the plate that supports the tool from the opening in the frame. Therefore, even when multiple tools are stacked, the desired tool can be easily removed. [Brief explanation of the drawings]

[0015] [Figure 1] FIG. [Figure 2] FIG. 10 is a diagram showing a grinding wheel supported by a plate portion. [Figure 3] FIG. 10 is a diagram showing how one grinding wheel is accommodated. [Figure 4] FIG. 10 is a diagram showing a state in which cassettes containing grinding wheels are stacked. [Figure 5] FIG. [Figure 6] 10A and 10B are diagrams showing a plate portion, a grinding wheel, and a cover member of a second embodiment. [Figure 7] 10A and 10B are diagrams showing a plate portion, a polishing pad, and a cover member of a third embodiment. [Figure 8] 10A and 10B are diagrams showing a plate portion, a polishing pad, and a cover member of a fourth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0016] An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a storage tool 2 according to a first embodiment. The storage tool 2 stores processing tools such as a grinding wheel 24 (see Fig. 2), a polishing pad 44 (see Fig. 7), and a polishing wheel (not shown), which will be described later.

[0017] The container 2 has a frame 4 and one or more plate portions 20. First, the configuration of the frame 4 of the container 2 will be described with reference to Fig. 1. The frame 4 has a first side wall 6 and a second side wall 8 (i.e., a pair of side walls) that are arranged opposite each other and spaced apart.

[0018] 1, the width direction 4a, depth direction 4b, and height direction 4c of the first side wall 6 and the second side wall 8 are perpendicular to each other. The first side wall 6 has a substantially flat outer surface 6a, and the second side wall 8 also has a substantially flat outer surface 8a.

[0019] The first side wall 6 and the second side wall 8 are arranged so that their outer surfaces 6a, 8a are substantially parallel to each other. The inner surface 6b of the first side wall 6 and the inner surface 8b of the second side wall 8 face each other.

[0020] For example, each of the first side wall 6 and the second side wall 8 has a length of 386 mm in the depth direction 4b and a length of 182 mm in the height direction 4c, and the distance between the outer surface 6a and the outer surface 8a in the width direction 4a is 390 mm.

[0021] The first side wall 6 has a plurality of support portions 10 provided so as to protrude from the inner surface 6b. The plurality of support portions 10 are each a linear plate member, provided along the depth direction 4b, and arranged spaced apart from one another at approximately equal intervals in the height direction 4c.

[0022] Similarly, the second side wall 8 has a plurality of support portions 10 on the inner surface 8b. The pitch of the support portions 10 in the height direction 4c is, for example, 10 mm. A groove portion 10a is formed between two support portions 10 adjacent to each other in the height direction 4c.

[0023] Of the support portions 10 of the first side wall 6 and the second side wall 8, a pair of support portions 10 located at corresponding positions in the height direction 4c (for example, the same position in the height direction 4c) can support both ends of the plate portion 20 described later.

[0024] A first connecting portion 12 having a rectangular shape in top view is provided on one end (upper end in FIG. 1) side in the height direction 4c of the first side wall 6 and the second side wall 8. The first connecting portion 12 connects the first side wall 6 and the second side wall 8 in the width direction 4a at approximately the center in the depth direction 4b.

[0025] A pair of handles 14 are provided on the outer surface side (top surface side in FIG. 1) of the first connecting portion 12, which can be used by an operator to manually transport the frame 4. Each handle 14 is rotatably fixed to a support shaft provided on the outer surface side of the first connecting portion 12.

[0026] When an operator holds the frame 4 in his / her hands, the pair of handles 14 are in an upright position as shown in Figures 1 and 3. In contrast, when multiple frame units 4 are stacked in the height direction 4c, the pair of handles 14 are in a face-down position (see Figure 4).

[0027] Groove portions 12a for accommodating the pair of handle portions 14 in a face-down state are formed on the outer surface side of the first connecting portion 12. When the pair of handle portions 14 are in a face-down state, the pair of handle portions 14 are accommodated in the groove portions 12a so as not to protrude beyond one end of the first side wall 6 and the second side wall 8 in the height direction 4c to the outer surface side (the upper surface side in FIG. 1).

[0028] A cylindrical protrusion 6c is provided in the center in the depth direction 4b of the upper end of the first side wall 6. Furthermore, a hole (not shown) that fits onto the protrusion 6c of another frame 4 is provided in the center in the depth direction 4b of the lower end of the first side wall 6.

[0029] Similarly, a protrusion 8c is provided at the upper end of the second side wall 8, and a hole (not shown) that fits into the protrusion 8c is provided at the lower end of the second side wall 8. By utilizing the protrusions 6c, 8c and the hole, it is possible to prevent misalignment of multiple frames 4 stacked in the height direction 4c.

[0030] A second connection portion 16 having a rectangular shape when viewed from below is provided on the other end (lower end in FIG. 1) side in the height direction 4c of the first side wall 6 and the second side wall 8. The second connection portion 16 connects the first side wall 6 and the second side wall 8 in the width direction 4a at approximately the center in the depth direction 4b.

[0031] A rectangular region located at one end (the front part in FIG. 1) in the depth direction 4b serves as an opening 4d of the frame body 4. The opening 4d is located between the first side wall 6 and the second side wall 8 in the width direction 4a, and is located between the first connecting portion 12 and the second connecting portion 16 in the height direction 4c.

[0032] The first side wall 6 and the second side wall 8, the support portion 10, the first connecting portion 12, the pair of handle portions 14, the second connecting portion 16, etc. are formed, for example, from an aluminum alloy that has been black anodized, but may also be formed from other materials such as resin.

[0033] It should be noted that a commercially available cassette for accommodating workpieces such as silicon wafers may be used as the frame 4. A plate portion 20 and a grinding wheel 24 (see FIG. 2) are accommodated in a rectangular parallelepiped space 4e located between the first side wall 6 and the second side wall 8 and between the first connecting portion 12 and the second connecting portion 16.

[0034] When the plate portion 20 is inserted into the groove portions 10a at corresponding positions in the height direction 4c, both ends of the plate portion 20 are supported by a pair of supports 10 arranged at corresponding positions in the height direction 4c. Note that the plate portion 20 can slide in the depth direction 4b while being supported by the pair of supports 10.

[0035] The plate portion 20 has approximately the same outer shape as a ring frame (also called a dicing frame, tape ring, etc.) used when performing cutting, laser processing, etc. on a workpiece such as a silicon wafer. However, the plate portion 20 does not have the through-holes that are normally formed in ring frames.

[0036] The plate portion 20 is made of a metal such as stainless steel, but may be made of other materials such as resin. The plate portion 20 has one substantially flat surface 20a and another substantially flat surface 20b located on the opposite side of the first surface 20a in the thickness direction.

[0037] The plate portion 20 has four straight portions 20c1, 20c2, 20c3, and 20c4 of approximately the same length on its outer periphery. The straight portions 20c1 and 20c2 are arranged approximately parallel to each other, and the straight portions 20c3 and 20c4 are also arranged approximately parallel to each other. The straight portions 20c1 and 20c2 are also arranged approximately perpendicular to the straight portions 20c3 and 20c4.

[0038] Between two adjacent straight line sections of the four straight line sections 20c1, 20c2, 20c3, 20c4 in the circumferential direction of a circle of diameter 20a2 (e.g., 380 mm) passing through the center 20a1 of one face 20a, an arc region 20d corresponding to a part of the circle of diameter 20a2 passing through the center 20a1 is formed.

[0039] The arcuate regions 20d located at both ends of the linear portion 20c2 are formed with cutouts 20e and 20f having substantially the same shape as the ring frame. An annular stopper portion 22 is provided on one surface 20a of the plate portion 20.

[0040] The outer diameter 22a of the stopper portion 22 is set to be approximately the same as the inner diameter of the annular base 26 (see FIG. 2) of the grinding wheel 24. The stopper portion 22 protrudes from the surface 20a by a predetermined length (for example, 5 mm).

[0041] The stopper portion 22 is formed from a resin such as ABS resin (acrylonitrile, butadiene, styrene copolymer), ASA resin (acrylonitrile, styrene, acrylate copolymer), polypropylene, polyethylene terephthalate, epoxy resin, acrylic resin, polyamide, polycarbonate, or the like.

[0042] In one example, the stopper portion 22 is formed using a 3D printer and attached to the surface 20a with an adhesive or the like. However, the stopper portion 22 manufactured by another manufacturing method using another manufacturing device may also be attached to the surface 20a with an adhesive or the like.

[0043] The plate portion 20 is inserted into the space 4e in the direction shown by the arrow in Fig. 1, and the straight portions 20c3 and 20c4 are supported by the support portions 10 which are at the same height. An open / close type stopper member (not shown), such as a block or a frame, may be provided at one end portion in the depth direction 4b (the front portion in Fig. 1) to prevent the plate portion 20 from falling off.

[0044] In addition, a fixed stopper member (not shown) such as a wall, block, or frame may be provided at the other end in the depth direction 4b (the portion located opposite the opening 4d) to prevent the plate portion 20 from falling off.

[0045] 2 is a diagram showing the grinding wheel 24 supported on one surface 20a of the plate portion 20. The grinding wheel 24 has an annular base 26 made of a metal such as an aluminum alloy. On one surface 26a of the base 26, a plurality of grinding stones (grinding stone portions) 28 are provided at approximately equal intervals along the circumferential direction of the base 26.

[0046] The inner diameter of the annular one surface 26a is larger than the diameter of the opening in the other surface 26b of the base 26 located opposite to the one surface 26a. The stopper portion 22 described above fits into the inner periphery of the annular other surface 26b.

[0047] The position of the grinding wheel 24 relative to the plate portion 20 is determined on the one surface 20a by the engagement of the stopper portion 22. The grinding wheel 24 is supported by the plate portion 20 in a state where it is positioned by the stopper portion 22.

[0048] However, as long as the grinding wheel 24 does not protrude beyond the plate portion 20 in a direction parallel to the one surface 20a (i.e., as long as the movement range of the grinding wheel 24 can be limited to a predetermined range within the one surface 20a), the outer diameter 22a of the stopper portion 22 may be smaller than the inner diameter of the other surface 26b.

[0049] When the grinding wheel 24 is supported by the plate portion 20, the other surface 26b of the base 26 comes into contact with the one surface 20a of the plate portion 20. This reduces damage to the grinding wheel 28 due to the load of the grinding wheel 24 compared to when the grinding wheel 24 comes into contact with the one surface 20a.

[0050] The grinding wheel 24 is supported by the plate portion 20 and accommodated together with the plate portion 20 through the opening 4d in the space 4e inside the frame 4. Figure 3 is a diagram showing how one grinding wheel 24 is accommodated in the frame 4.

[0051] 3 shows a case where one set of the plate portion 20 and the grinding wheel 24 is housed in the space 4e, but one frame 4 may house multiple sets of the plate portion 20 and the grinding wheel 24 (see FIG. 4). FIG. 4 shows a state where the frame bodies 4, each housing three grinding wheels 24, are stacked one on top of the other.

[0052] In Figure 4, three sets of plate portions 20 and grinding wheels 24 are housed in space 4e without contacting the first connection portion 12 in the height direction 4c, without contacting each other, and stacked along the height direction 4c.

[0053] In this embodiment, even if a plurality of grinding wheels 24 are housed in one frame 4, the grinding wheels 24 can be removed by pulling out the plate portion 20 from the opening 4d. Therefore, it is not necessary to temporarily move all of the grinding wheels 24 located above the grinding wheel 24 to be used to the other side.

[0054] Therefore, the desired grinding wheel 24 can be easily removed from the multiple grinding wheels 24 stacked along the height direction 4c. In addition, the multiple frames 4 can be positioned relative to each other by fitting the protrusions 6c, 8c into the corresponding holes.

[0055] Furthermore, the protrusions 6c, 8c and the corresponding holes can prevent misalignment between stacked frames 4. Of course, in this embodiment, even when multiple frames 4 are stacked as shown in Fig. 4, the desired grinding wheel 24 can be easily removed by pulling out the plate portion 20 from the opening 4d.

[0056] Incidentally, a cover member 30 (see FIG. 5) capable of covering the grinding wheel 24 may be provided on one surface 20a of the plate portion 20. FIG. 5 is a perspective view showing the cover member 30 and the like. The cover member 30 has a cylindrical side portion 30a.

[0057] The inner diameter of the side portion 30a is approximately the same as the outer diameter of the base 26 of the grinding wheel 24. An annular roof portion 30b that covers the multiple grinding stones 28 is provided on the upper part of the side portion 30a, and a circular opening 30c is formed in the center of the roof portion 30b.

[0058] However, the opening 30c is not essential, and the opening 30c may be closed. The cover member 30 has the function of preventing the operator's hands from coming into contact with the grinding wheel 28 and reducing the amount of dust that adheres to the grinding wheel 28.

[0059] The height direction length 30d of the side portion 30a is slightly longer than the length 24a from the other surface 26b of the grinding wheel 24 to the tip of the grinding stone 28. Therefore, the cover member 30 can cover the grinding wheel 24 without coming into contact with the grinding stone 28.

[0060] The cover member 30 may be removably fixed to one surface 20a of the plate portion 20, or may be fixed to one surface 20a so as to be openable and closable by a hinge (not shown) or the like. The cover member 30 is formed of a resin that is transparent to visible light, such as an acrylic resin or polycarbonate.

[0061] Forming the cover member 30 from a material that is transparent to visible light has the advantage that the operator can easily check the information (not shown) indicating the specifications of the grinding wheel 24 that is written on the side of the base 26 of the grinding wheel 24.

[0062] Next, a second embodiment will be described with reference to Fig. 6. In the second embodiment, a stopper portion 32, which is different from the annular stopper portion 22 of the first embodiment, is provided on one surface 20a of the plate portion 20.

[0063] 6 is a diagram showing the plate portion 20, the grinding wheel 24, and the cover member 38 of the second embodiment. The stopper portion 32 is formed from the same material as the stopper portion 22 described above. The stopper portion 32 has a disk-shaped base portion 34.

[0064] The base 34 includes an upper surface 34b having a diameter 34a larger than the diameter of the cover member 38. A plurality of arc-shaped blocks 36 are arranged on the outer periphery of the base 34 along the circumferential direction of the base 34. The outer periphery side surfaces of the blocks 36 are substantially flush with the outer periphery of the base 34.

[0065] However, the base 34 may be omitted, and the blocks 36 may be fixed directly to one surface 20a of the plate portion 20. The blocks 36 have a predetermined height 36a. The predetermined height 36a is, for example, 5 mm. The inner diameter defined by the multiple blocks 36 is approximately the same as the outer diameter of the cylindrical cover member 38.

[0066] The cover member 38 has a cylindrical side portion 38a and an annular bottom portion 38b, and is made of the same material as the above-mentioned cover member 30. The cover member 38 is removably fixed to one surface 20a of the plate portion 20.

[0067] The diameter of a circular opening 38c formed in the bottom portion 38b is smaller than the inner diameter defined by the plurality of grinding wheels 28. In addition, the side portion 38a has a predetermined length 38d in its height direction that is longer than the segment height of the grinding wheels 28 (i.e., the amount of protrusion from the base 26).

[0068] When the grinding wheel 24 is placed on the cover member 38 so that the grinding wheels 28 contact the bottom portion 38b, the side portions 38a and bottom portion 38b cover the grinding wheels 28. The cover member 38 prevents the worker's hands from coming into contact with the grinding wheels 28 and also functions to reduce damage to the grinding wheels 28 due to the load.

[0069] Furthermore, with the multiple grinding wheels 28 covered with the cover member 38, the grinding wheels 24 and the cover member 38 can be removed from the plate portion 20 and transported, and the grinding wheels 24 can be attached to the spindle of the grinding device.

[0070] When the cover member 38 is placed on the stopper portion 32 with the grinding wheel 28 supported by the bottom portion 38b, the positions of the grinding wheel 24 and the cover member 38 on the one surface 20a are fixed by the multiple blocks 36. In this way, the stopper portion 32 has the function of determining the positions of the grinding wheel 24 and the cover member 38 relative to the plate portion 20 on the one surface 20a.

[0071] However, the inner diameter defined by the blocks 36 may be larger than the outer diameter of the cover member 38, as long as the range of movement of the grinding wheel 24 and the cover member 38 can be limited to a predetermined range within the surface 20a.

[0072] Next, a third embodiment will be described with reference to Fig. 7. In the third embodiment, a base 44a of a polishing pad 44 used for so-called wet polishing is supported by a plate portion 20, and a pad portion 44b of the polishing pad 44 is covered by a cover member 40.

[0073] 7 is a diagram showing the plate portion 20, the cover member 40, and the polishing pad 44 of the third embodiment. The polishing pad 44 has an annular base 44a made of metal such as an aluminum alloy.

[0074] An annular pad portion 44b made of resin-impregnated nonwoven fabric, foamed resin, or the like is provided on one surface of the base 44a. The pad portion 44b may be provided with abrasive grains (not shown) made of diamond or the like.

[0075] When no abrasive grains are provided on the pad portion 44b, a polishing liquid (not shown) containing free abrasive grains is supplied to the pad portion 44b through the through hole 44b1 of the pad portion 44b and the through hole 44a1 (see Figure 8) formed in the base 44a approximately concentrically with the through hole 44b1.

[0076] Incidentally, a polishing wheel (not shown) used for so-called dry polishing may be used instead of the polishing pad 44. The polishing wheel has an annular base and a grinding stone part provided on one side of the base. The grinding stone part includes a flexible base material such as polishing cloth or rubber, and abrasive grains such as diamond, cerium oxide, or silicon oxide dispersed in the base material.

[0077] The plate portion 20 is the same as in the first and second embodiments, but the stopper portion 46 provided on the plate portion 20 of this embodiment is composed of multiple blocks 46a directly fixed to one surface 20a. Each block 46a is arc-shaped and has approximately the same shape.

[0078] The blocks 46a have a predetermined height (e.g., 5 mm). The inner peripheral surfaces of the multiple (four in this embodiment) blocks 46a define a circle 46a1 with a predetermined diameter. The diameter of the circle 46a1 is approximately the same as the outer diameter of the annular base 44a of the polishing pad 44.

[0079] When the polishing pad 44 is placed on the surface 20a so that the base 44a is in contact with the surface 20a, the outer peripheral side surface of the base 44a comes into contact with the inner peripheral side surface of the block 46a, thereby limiting the movement range of the polishing pad 44 to a predetermined range within the surface 20a.

[0080] As described above, as long as the movement range of the polishing pad 44 can be limited to a predetermined range within the surface 20a, the diameter of the circle 46a1 defined by the multiple blocks 46a may be larger than the outer diameter of the base 44a.

[0081] The cover member 40 has a cylindrical side portion 40a. The inner diameter of the side portion 40a is approximately the same as the outer diameter of the base 44a. A dome-shaped roof portion 40b that covers the pad portion 44b is provided on the upper portion of the side portion 40a.

[0082] The cover member 40 is made of the same material as the above-mentioned cover member 30. The cover member 40 is fixed to one surface 20a of the plate portion 20 so as to be removable or openable.

[0083] A height direction length 40d of the side portion 40a of the cover member 40 is longer than a thickness 44c of the polishing pad 44. By covering the pad portion 44b with the cover member 40, damage to the pad portion 44b can be reduced, and the amount of dust and the like adhering to the pad portion 44b can also be reduced.

[0084] Of course, in this embodiment as well, the target polishing pad 44 can be easily removed from the plurality of polishing pads 44 stacked in the height direction 4c. Note that, instead of the plurality of blocks 46a, or together with the plurality of blocks 46a, a cylindrical protrusion (not shown) that can be inserted into the through-hole 44a1 may be provided.

[0085] Next, a fourth embodiment will be described with reference to Fig. 8. Fig. 8 is a diagram showing a plate portion 20, a polishing pad 44, and a cover member 48 of the fourth embodiment. The fourth embodiment differs from the third embodiment in the orientation in which the polishing pad 44 is placed and the shapes of the cover member 48 and the stopper portion 52.

[0086] A plurality of screw holes 44a2 are formed at approximately equal intervals around the through-hole 44a1 in the base 44a of the polishing pad 44. The cover member 48 includes a cylindrical side portion 48a and a disk-shaped bottom portion 48b. The side portion 48a has a predetermined length 48d in its height direction that is longer than the thickness 44c of the pad portion 44b.

[0087] When the polishing pad 44 is placed on the cover member 48 so that the pad portion 44b is in contact with the bottom portion 48b, the pad portion 44b is covered by the side portion 48a and the bottom portion 48b. The cover member 48 has the function of preventing the operator's hands from coming into contact with the pad portion 44b and reducing damage to the pad portion 44b due to the load.

[0088] The cover member 48 is made of the same material as the cover member 30. The cover member 48 is removably fixed to one surface 20a of the plate portion 20. With the pad portion 44b covered by the cover member 48, the polishing pad 44 can be transported to a polishing apparatus (not shown) and attached to the spindle of the polishing apparatus.

[0089] 6, the stopper portion 52 has a disk-shaped base portion 54 made of resin. The base portion 54 includes an upper surface 54b having a diameter 54a larger than the outer diameter of the cover member 48.

[0090] A plurality of blocks 56 are provided on the outer periphery of the base 54 along the circumferential direction of the base 54. Each block 56 has an arc shape and is generally the same shape. The outer periphery side surface of each block 56 is generally flush with the outer periphery of the base 54.

[0091] However, the base 54 may be omitted and the blocks 56 may be fixed directly to one surface 20a of the plate portion 20. The inner diameter defined by the plurality of blocks 56 is approximately the same as the outer diameter of the cylindrical cover member 48.

[0092] The block 56 has a predetermined height 56a. The predetermined height 56a is, for example, 5 mm. When the polishing pad 44 and the cover member 48 are placed on the one surface 20a of the plate portion 20 with the pad portion 44b supported by the bottom portion 48b, the positions of the polishing pad 44 and the cover member 48 are fixed by the stopper portion 52.

[0093] In this way, the stopper portion 52 has the function of determining the positions of the polishing pad 44 and the cover member 48 on the one surface 20a relative to the plate portion 20. However, as long as the movement range of the polishing pad 44 can be limited to a predetermined range within the one surface 20a, the inner diameter defined by the plurality of blocks 56 may be larger than the outer diameter of the cover member 48.

[0094] Of course, in this embodiment as well, the target polishing pad 44 can be easily removed from the plurality of polishing pads 44 stacked in the height direction 4c. In addition, the structures, methods, etc. according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

[0095] For example, the stopper portions 22, 32, 46, 52 and the cover members 30, 38, 40, 48 may be omitted from the container 2. The dimensions of the frame 4 in the width direction 4a, depth direction 4b, and height direction 4c, the number of stages and pitch of the support portions 10, and the like may be changed as appropriate depending on the sizes, shapes, and the like of the processing tools and cover members 30, 38, 40, 48 to be contained in the container 2. [Explanation of symbols]

[0096] 2: container, 4: frame, 4a: width direction, 4b: depth direction, 4c: height direction 4d: opening, 4e: space 6: 1st side wall, 6a: outer surface, 6b: inner surface, 6c: protrusion 8: 2nd side wall, 8a: outer surface, 8b: inner surface, 8c: protrusion 10: Support part, 10a: Groove part, 12: First connection part, 12a: Groove part, 14: Handle part 16: Second connection part 20: Plate, 20a: One side, 20a1: Center, 20a2: Diameter, 20b: Other side 20c1, 20c2, 20c3, 20c4: Straight section 20d: Arc area, 20e, 20f: Notch 22: stopper portion, 22a: outer diameter 24: Grinding wheel (machining tool), 24a: Length 26: base, 26a: one surface, 26b: other surface, 28: grinding wheel (grinding wheel part) 30: Cover member, 30a: Side portion, 30b: Roof portion, 30c: Opening, 30d: Length 32: stopper portion, 34: base portion, 34a: diameter, 34b: upper surface 36: Block, 36a: Height 38: Cover member, 38a: Side portion, 38b: Bottom portion, 38c: Opening, 38d: Length 40: Cover member, 40a: Side portion, 40b: Roof portion, 40d: Length 44: Polishing pad (processing tool), 44a: Base, 44a1: Through hole, 44a2: Screw hole 44b: pad portion, 44b1: through hole, 44c: thickness 46: stopper part, 46a: block, 46a1: circle 48: Cover member, 48a: Side portion, 48b: Bottom portion, 48d: Length 52: stopper portion, 54: base portion, 54a: diameter, 54b: upper surface 56: Block, 56a: Height

Claims

1. A storage device for storing a processing tool having an annular base and a grinding stone portion or a pad portion provided on one side of the base, A pair of side walls arranged to face each other and spaced apart from each other; a plurality of linear support portions provided on each inner surface of the pair of side walls along a depth direction of the pair of side walls and spaced apart from each other in a height direction of the pair of side walls; a first connection portion connecting one end side of the pair of side walls in the height direction, and a second connection portion connecting the other end side of the pair of side walls in the height direction; a frame body having a plate portion capable of supporting the machining tool and supported by a pair of support portions among the plurality of support portions that are arranged at corresponding positions in the height direction; Equipped with the plate portion has only one stopper portion on one surface side of the plate portion, which limits the position of one of the machining tools relative to the plate portion to a predetermined range; The processing tool is supported by the plate portion and accommodated in the space between the pair of side walls together with the plate portion through an opening located between the pair of side walls and the first and second connection portions.

2. 2. The container according to claim 1, further comprising a cover member on one surface of the plate portion, the cover member being capable of covering the grinding stone portion or the pad portion of the processing tool.

Images