High frequency supply conductor and electronic device equipped with high frequency supply conductor

Abstract

The present invention relates to a conductor path device (1) for high-frequency signals, comprising a support (16) and a layered signal conductor (10) disposed on the support (16) and defined by at least one inner edge (3) and at least one outer edge (2), the signal conductor (10) extending from one end to the other, the signal conductor (10) of the conductor path device (1) changing its direction within a turning region (4) between the ends and having a minimum width (W min ) and the minimum width (W min ) is narrower than the width (W) of the signal conductor (10) at the end, and at least one of the edges (2, 3) within the redirection region (4) is curved in at least a portion thereof.

Description

[Technical Field]

[0001] The present invention relates generally to a high frequency supply conductor, in particular to a high frequency supply conductor whose direction of travel changes, and further to an electronic device comprising such a high frequency supply conductor. [Background technology]

[0002] High-frequency supply conductors are known in principle. In particular, supply conductors of this type are required for supplying data to electronic devices. This is described, for example, in the applicant's German patent application no. 102020105772.5.

[0003] In such cases, high frequency supply conductors disposed on the submount are used, which include signal and ground conductors.

[0004] This type of conductor tracks and their properties are described, for example, in Agilent Technologies, Advanced Design System 1.5, Circuit Components, Distributed Components, Chapter 2 (available at the internet address http: / / literature.cdn.keysight.com / litweb / pdf / ads15 / ccdist / ccdist026.html).

[0005] Depending on the layout and wiring of the devices to be supplied, the direction of the conductor may need to be changed for geometric reasons. The problem that arises in this case is that the change in direction can cause a change in capacitance along the conductor. This can lead to an undesirable increase in return loss. Furthermore, a sudden change of 90° can cause significant reflections. When changing direction by 90°, the prior art suggests that the outer surface of the conductor be positioned at a 45° angle to the previous and new propagation directions, resulting in a turning section or chamfer that is oblique to both directions of propagation. Another option is to provide a rounded conductor section. However, this option has the disadvantage of requiring even more space.

[0006] On the other hand, a disadvantage of a 45° chamfered turn configuration is that the turn section acts as an antenna, which causes reflection losses within the turn region of the conductor. The turn configuration also limits the bandwidth of high frequency signals that can be transmitted on the conductor.

[0007] In addition to reflection losses, at very high frequencies, higher-order waves can also be generated or propagate at a certain cutoff frequency. As a result, not only the fundamental wave but also higher-order waves propagate along the conductor. The fundamental wave and all higher-order waves are called the conductor's natural waves. In an undisturbed conductor, these natural waves are independent and do not interfere with each other. However, in the event of disturbance, these natural waves combine, and as soon as higher-order waves propagate, the characteristics of the fundamental wave also change. That is, higher-order waves are excited when the conductor is no longer uniform or inhomogeneous in the direction of propagation. A change in direction constitutes such inhomogeneity. For this reason, a certain conductor angle is also called a discontinuity. With the 45° chamfer mentioned above, capacitance compensation is achieved by the chamfer, i.e., by a sudden change in the conductor cross-section. Therefore, at correspondingly high frequencies, this conductor angle excites higher-order waves. Summary of the Invention [Problem to be solved by the invention]

[0008] The object of the present invention is therefore to provide a high-frequency supply conductor which has lower reflection losses in the deflection region than the prior art, preferably also has a higher cutoff frequency for higher-order waves, and makes it possible to use a wider bandwidth than the prior art. [Means for solving the problem]

[0009] This problem is solved by the subject matter of the independent claims. Further embodiments and advantageous developments of the invention are subject matter of the dependent claims.

[0010] According to the present invention, a conductor path device for high-frequency signals is proposed, comprising a support and a layered signal conductor arranged on the support and defined by at least one inner edge and at least one outer edge, the signal conductor extending from one end of the signal conductor to the other end, preferably to a ground conductor arranged on the support, the signal conductor of the conductor path device changing its direction in a turning region between the end portions, particularly between the two legs, and having a predetermined width, the width of the signal conductor in the turning region being narrower in at least some sections than the width at at least one of the signal conductor's ends, thereby compensating for the otherwise increased capacitance in the turning region. The width of the signal conductor in the turning region can also be narrower than the width of the signal conductor at the end portions, particularly at both end portions, of the signal conductor.

[0011] In this case, the term leg is typically understood to mean a particularly straight section of a signal conductor, preferably without a change in direction, and / or a section portion defined by an inner edge and an outer edge, both of which do not have a change in direction. The inner edge and the outer edge of one leg may have the same length, but alternatively the inner edge is longer than the outer edge, or the outer edge is longer than the inner edge of one leg. Each leg preferably extends from one end of the signal conductor to the turning region.

[0012] According to one embodiment, a conductor track device for high-frequency signals is proposed, comprising a support and a layered signal conductor arranged on the support and defined by at least one inner edge and at least one outer edge, the signal conductor extending from one end of the signal conductor to the other end, the signal conductor of the conductor track device changing its direction and having a minimum width in a turning region between the ends, the minimum width of the signal conductor in the turning region being narrower than the width of the signal conductor at its ends, and at least one of the edges in the turning region being curved at least in part. By reducing the conductor width, less metal can be used for the signal conductor in the turning region, thereby compensating for the capacitance that is normally increased in the turning region. Preferably, the outer and inner edges can be partially curved at least in part in the turning region, thereby further compensating for the increased capacitance in the turning region.

[0013] Therefore, in one embodiment it is also proposed that the minimum width is reduced from the width at one of the ends of the signal conductor by a factor in the range 0.5 to 0.95, preferably by a factor in the range 0.6 to 0.8.

[0014] In order to arrange the compensation of the capacitances so that they can be individually matched, at least one of the following features is proposed: The inner and outer edge curvatures each have a center, with the centers of the inner and outer edge curvatures being offset from one another, in particular so that the inner and outer edge curvatures are eccentric to one another, in particular so that their centers differ from one another. The radius of curvature of the outer edge is larger than the radius of curvature of the inner edge. The curvature of the outer and / or inner edge is continuous, in particular without interruption. The curvature of the outer and / or inner edges is constant. The outer and / or inner edge curvature is non-constant. The width of the signal conductor changes constantly within the deflection region, with this width progression preferably being constantly subdivided at least twice. The minimum width of the signal conductor is located in the central third of the deflection area, preferably in the center of the deflection area.

[0015] The width of the signal conductor in the deflection region or between at least one curved edge and the other edge, preferably between two curved edges, is determined in the context of the present invention by the distance between the tangent of the inner curve of the inner edge and the tangent of the inner curve of the outer edge, in particular by a common perpendicular to the tangent of the inner curve of the outer edge and the tangent of the inner curve of the inner edge, preferably one perpendicular in this case lying perpendicular to both tangents of the inner curve, i.e. at an angle of 90°, with the length of the perpendicular corresponding to the width of the signal conductor or the distance from the inner edge to the outer edge.

[0016] In one preferred embodiment, the inner and outer edge curves can be arranged concentrically with respect to one another, with the outer and inner edge curves having a common center. In another embodiment, the inner and outer edge curves can be formed eccentrically, particularly non-concentrically, with respect to one another, preferably so that the width of the signal conductor in the deflection region is narrower than at one end, preferably both ends, of the signal conductor. As a result, the cutoff frequency of higher harmonics is increased, so that higher harmonics occur at higher frequencies and the fundamental harmonic is no longer disturbed or is only slightly disturbed. Moreover, if the width of the signal conductor changes constantly and / or the outer and inner edges are constantly, particularly continuously, curved, abrupt changes in capacitance can be avoided, and thus capacitance compensation can be performed without sudden abrupt changes in the conductor cross-section.

[0017] Advantageously, the shape of the signal conductor can be adapted to the geometric configuration of the submount without having to abandon the aforementioned advantages. To this end, it is proposed that the signal conductor within the deflection region or the deflection region be asymmetrically or symmetrically configured, in particular that the deflection region be configured with a mirror axis along the angle bisector of the deflection angle. The deflection region can also extend from one end of the signal conductor to the other. In this way, the signal conductor can be configured, for example, curved along its entire length so that the signal conductor is not interrupted by folds.

[0018] According to a further embodiment, a conductor path device for high-frequency signals is proposed, comprising a support, a layered signal conductor arranged on the support and defined by two edges, and a ground conductor arranged on the support, wherein the signal conductor of the conductor path device changes its direction between two legs in a turning region, and wherein at least one of the edges of the signal conductor has at least two turning sections that are positioned at an angle to one another in the turning region. Accordingly, it is proposed to turn the edge into a new direction in at least two stages.

[0019] Surprisingly, it has been found that this not only reduces return loss, but the configuration of the turning section can also be used to fine-tune the impedance to match a predetermined signal frequency.

[0020] In order to combine the above-mentioned advantages of reduced return loss and reduced capacitance, it is also possible to propose that one edge, for example the inner edge or the outer edge, is curved in at least a section, and the other edge, preferably the outer edge or the inner edge, has at least two or more deflection sections.

[0021] According to one particularly preferred embodiment, the signal conductors are deflected by an angle of 90° or approximately 90°. It is particularly proposed here that the deflection within the deflection region is performed at an angle in the range of 75° to 105°, preferably at an angle of 90° as mentioned above.

[0022] The conductor trace arrangement is preferably configured as a microstrip line, a coplanar waveguide, or a CBCPW arrangement. A conductor trace arrangement configured as a microstrip line is preferred. This allows for a particularly compact design and, in particular, allows for simple manufacture with relatively few manufacturing steps.

[0023] In the case of a coplanar waveguide or CBCPW device, the conductor track device preferably additionally comprises, in particular, a layered ground conductor, which is arranged opposite the layered signal conductor, and wherein at least one of the following characteristics applies to the spacing between the ground conductor and the signal conductor: The gap is in the range of 0.025 mm to 0.5 mm, preferably in the range of 0.05 mm to 0.4 mm. The width of the signal conductor at its termination is greater than the spacing between the ground conductor and the signal conductor by a factor in the range of 0.5 to 7.5, preferably by a factor of 0.6 to 5. The ratio of the spacing between the signal conductor and the ground conductor to the difference between the width of the signal conductor at one of the ends of the signal conductor and the minimum width of the signal conductor has a value in the range of 0.5 to 2.

[0024] These ranges are particularly suitable if the predetermined impedance is between 15 Ω and 65 Ω, in particular between 20 Ω and 60 Ω, or even exactly 20 Ω or 60 Ω. Such value ranges are preferred when the signal conductors are arranged on a submount, preferably made of glass or ceramic, in particular ALN or Al2O3, which may typically have a thickness of 0.025 mm to 0.5 mm.

[0025] Since the width of the signal conductor and the distance to the ground conductor influence the capacitance to a considerable extent, the above-mentioned values ​​of these parameters allow the capacitance to be optimally adjusted to the desired application, but in particular to very good signal transmission at significantly higher frequencies, for example above 80 GHz. The conductor track arrangement is therefore designed so that the limit frequency, in particular the limit frequency for the generation of higher-order waves, is above 60 GHz, preferably above 70 GHz. This is especially true in the configuration of the conductor bends of the signal conductor and / or the width W in the deflection area, which is reduced in particular in combination with the curved edges. min The present invention will now be described in more detail with reference to the accompanying drawings. [Brief explanation of the drawings]

[0026] [Figure 1] 1A and 1B are diagrams showing the geometry of a conductor track arrangement with a 45° deflection according to the prior art; [Figure 2] 1 shows a conductor track arrangement having two deflection sections at the outer edge within a deflection region; [Figure 3] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 4] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 5] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 6] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 7] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 8] 10A to 10C show further various embodiments of a conductor track arrangement having different numbers of deflection sections on the inner or outer edge; [Figure 9] 1A to 1C are diagrams showing various configurations of conductor path devices; [Figure 10] 1A to 1C are diagrams showing various configurations of conductor path devices; [Figure 11] 1A to 1C are diagrams showing various configurations of conductor path devices; [Figure 12] FIG. 1 shows the return loss as a function of signal frequency for three different conductor track configurations. [Figure 13] FIG. 10 shows return loss as a function of signal frequency for various turning angles of the turning section. [Figure 14] FIG. 1 shows a graph with summed return loss over a wide frequency range as a function of turning angle. [Figure 15] FIG. 1 illustrates an electronic device. [Figure 16] FIG. 10 shows a conductor track arrangement in which the signal conductor has a constant width and two curved edges. [Figure 17] 1 shows, in two partial views, a conductor track arrangement with two curved edges, in which the signal conductors are narrower in the deflection region than at the signal conductor ends. [Figure 18] FIG. 10 illustrates a structure for determining a desired width of a signal conductor within a redirection region. [Figure 19] FIG. 1 shows insertion loss as a function of signal frequency for a signal conductor with a 45° chamfer when used in a transistor outline package (TO package). [Figure 20] FIG. 10 shows the return loss as a function of signal frequency for a signal conductor with a 45° chamfer when used in a TO package. [Figure 21] FIG. 10 shows insertion loss as a function of signal frequency for a signal conductor with constant conductor width and curved edges when used in a TO package. [Figure 22] FIG. 10 shows the return loss as a function of signal frequency for a signal conductor with constant conductor width and curved edges when used in a TO package. [Figure 23] FIG. 10 shows insertion loss as a function of signal frequency for signal conductors with varying conductor widths and curved edges when used in a TO package. [Figure 24] FIG. 10 shows return loss as a function of signal frequency for signal conductors with varying conductor widths and curved edges when used in a TO package. [Figure 25] FIG. 10 shows the insertion attenuation signal as a function of signal frequency for various signal conductor geometries on a thick submount. [Figure 26] FIG. 10 shows the return loss signal as a function of signal frequency for various signal conductor geometries on a thick submount. [Figure 27]FIG. 10 shows the insertion attenuation signal as a function of signal frequency for various signal conductor geometries on a thin submount. [Figure 28] FIG. 10 shows return loss signals as a function of signal frequency for various signal conductor geometries on a thin submount. [Figure 29] FIG. 1 shows a schematic diagram of a signal conductor for use in a TO package. [Figure 30] FIG. 1 shows a cross section of a submount in three partial views with various electric fields. DETAILED DESCRIPTION OF THE INVENTION

[0027] 1 shows a signal conductor 10 of a conductor path device 1 having a 90° deflection in a deflection region 4 relative to the previous and new propagation directions, or a deflection region having a chamfered outer edge. The conductor path-like or layer-like signal conductor 10 has an outer edge 2 and an inner edge 3. In the deflection region 4, the outer edge 2 is bent at a deflection angle of 45° relative to the previous propagation direction, so that the contour of the conductor has a chamfered edge 8.

[0028] If the signal conductor 10 has a width W as shown in Figure 1, the angular connection has a width D of the signal conductor 10 along the mirror axis, which width D is created by chamfering it by a value X, resulting in a bevel X based on the previously described configuration of the deflection. For optimal orientation, according to the Agilent Technologies publication cited above,

number

[0029] Here, H is the thickness of the conductor path. Obviously, √2×W holds for D.

[0030] For typical dimensions of W=500μm and H=150μm, for bevel X X=372.8μm is obtained.

[0031] This will be used as the reference model from now on.

[0032] FIG. 2 shows an embodiment of a signal conductor 10 of a conductor path device for high-frequency signals according to the present disclosure. The signal conductor 10 is generally formed as a flat, particularly layered, conductor, e.g., in the form of a conductor track. As in FIG. 1, the signal conductor 10 is shown in plan view. The elongated signal conductor 10 has a turning region 4 connecting two legs 13, 14, within which the signal conductor 10 changes its direction. Due to this change in direction, the legs 13, 14 are positioned at a predetermined angle relative to each other. As in the embodiment of FIG. 1, the change in direction is 90°. The signal conductor 10 is defined by two edges 2, 3. One edge, edge 2, forms the outer edge, and the other edge 3 is the inner edge. The outer edge is determined by the change in direction of the signal conductor 10, which guides the signal conductor 10 away from the outer edge. In the case of the inner edge, the change in direction results in a line drawn along the inner edge intersecting the signal conductor 10 within the turning region 4. In other words, the profile of the outer edge 2 within the turning region is generally convex, and the profile of the inner edge 3 is generally concave.

[0033] According to the embodiment underlying the example of Fig. 2, the outer edge 2 has two deflection sections 5 which are positioned at an angle to one another. In particular, the deflection sections 5 are preferably straight or slightly curved.

[0034] According to a further general embodiment, which is also realized in the example of FIG. 2, at least two deflection sections 5 are connected via a corner 12. Via the corner, the deflection sections 5 are positioned at a predetermined angle relative to one another. According to a further embodiment, which is also realized in the example of FIG. 2, each edge 2 or 3 merges into the deflection section 5 via a corner 12. A corner that is a point-like structure in the mathematical sense is not possible in the actual structuring of conductor tracks. Therefore, a corner is generally understood to be a section of one edge 2 or 3 having a length that is at most 1 / 10 of the length of the shorter of the adjacent deflection sections 5.

[0035] The signal conductor 10 according to Fig. 4 has three deflection sections 5 at the edge 2 in the deflection region 4, where the edge 2 forms the outer edge. The other edge 3, which forms the inner edge, does not have a deflection section 5, as in the embodiment shown in Fig. 3. Overall, a 90° change in conductor direction occurs. The deflection sections 5 are inclined at different angles relative to each other.

[0036] In the embodiment shown in FIG. 3 , the signal conductor 10 has at least one curved deflection section 5, 6 in the deflection region 4, and therefore, in particular, the individual edges 2, 3 that have a curved deflection section do not have a straight or angled deflection section. In the illustrated embodiment, at least one deflection section 6 of the inner edge 3, in particular of the inner edge 3, is curved. However, it is also possible for several deflection sections, for example, positioned at an angle to one another, to be curved. The curved deflection section 5 or these curved deflection sections 5 may be located at the inner edge 3 and / or the outer edge 2. In general, and without being limited to the illustrated example, the inner edge 3 and / or the outer edge 2 may have a deflection section. In other words, the deflection section 5 may be located, for example, only at the outer edge 2, or only one edge, for example, only the outer edge 2, may be modified or optimized to improve the return loss.

[0037] In addition, generally according to a further embodiment, the deflection sections 5 may have different lengths, as in the example of Figure 4. In contrast to the previously shown embodiments, in the example shown in Figure 5, the deflection sections 6 are provided on the edge 3 forming the inner edge.

[0038] Furthermore, according to one embodiment, at least one deflection section 5, 6 can be inclined or extend in a direction opposite to the deflection direction of the signal conductor 10. This embodiment is also realized in the example shown in Figure 5. In this example, these are the two inner deflection sections 6, in particular the two inner deflection sections 6 facing each other.

[0039] 6 also has deflection sections 5 running in the opposite direction to the deflection direction, but these deflection sections 5 are arranged on the outer edge. In this example, these are every other deflection section 5. In this example, the edge 2 is formed in the deflection region 4 by several short deflection sections 5 arranged at right angles to one another, resulting in a stepped configuration on the outer edge. Overall, six deflection sections are provided in the deflection region 4. Overall, a 90° change of the signal conductor 10 occurs.

[0040] In the embodiment shown in Figure 7, both edges 2, 3 have deflection sections 5, 6. Moreover, both edges 2, 3 are each provided with more than two deflection sections 5, 6, i.e., three deflection sections 5, 6. However, more than three deflection sections 5, 6 can also be provided, preferably on the outer edge 2 or the inner edge 3, and in particular, so that a curved edge is approximated by a number of deflection sections 5, 6.

[0041] FIG. 8 shows an example of a particularly preferred embodiment of a conductor track device or signal conductor 10 of a conductor track device according to the present invention. This embodiment is based on the asymmetrical design of the deflection region 4. In particular, there is no mirror axis as a line of symmetry. In contrast, the deflection region of the example shown in FIG. 2 has a mirror axis along the angle bisector 38 of the deflection angle, specifically the deflection angle of the edge 3. The inner edge 3 of the signal conductor 10 does not have a deflection section within the deflection region 4, whereas the outer edge 2 has two deflection sections 5 of different lengths within the deflection region, where the edge from the leg 13 to the first deflection section 5 undergoes a deflection angle α. In the illustrated example, this deflection or deflection angle α is approximately 16°. Furthermore, according to one embodiment, and without being limited to the illustrated example, it is generally proposed here that the change in direction or deflection angle at one edge 2, 3, preferably the outer edge 2, is less than 45°, preferably less than 40°, at the transition from one leg 13, 14 to the adjacent deflection section 5.

[0042] 9 to 11 show preferred structures of the conductor track device 1. FIG. 9 shows an embodiment of a particularly preferred configuration. The signal conductor 10 and the ground conductor 11 are arranged on opposite sides of a support 16. Such configurations are basically known to those skilled in the art as so-called microstrip conductors. In general, the support 16 can be a submount 17. Such a submount can be arranged on a socket of a package for an electronic device. In particular, sockets for TO packages (TO = Transistor Outline) are considered here. The shape of the signal conductor 10 with two deflection sections on its outer edge corresponds to the embodiment of FIG. 2.

[0043] The submount 17 can be manufactured, for example, from aluminum nitride ceramic, more generally from ceramic containing aluminum nitride, or from aluminum oxide (Al2O3). Other materials with good thermal conductivity, such as glass or glass and ceramic, can also be used. For high-frequency supply, a submount 17 made of glass can also be used. Thin glass may be particularly suitable due to its small thickness. A submount thickness of less than 0.2 mm can, for example, partially compensate for significantly poorer thermal conductivity. The so-called thermal resistance is what is important: the thinner the substrate, the lower its thermal resistance.

[0044] The configuration of FIG. 10 is based on the fact that the signal conductor 10 and the ground conductor 11 are arranged on the same side of the support 16. In this case, the signal conductor 10 extends through a gap 18 in the ground conductor 11. This embodiment is therefore a coplanar conductive wire arrangement (CPW = " c o p lanar w aveguide”).

[0045] 11 shows a variant embodiment of the coplanar conductor line device 1. In this case, in addition to the conductor paths of the ground conductors 11 arranged on the same plane as the signal conductors 10, there are also conductor paths of the ground conductors 11 arranged on the opposite side of the support 16. Such a device is called a CBCPW (" c Conductor b acked c oplanar w All embodiments have in common that the deflection is performed in at least two stages.

[0046] In the following, the return loss of the conductor trace device according to the present disclosure is compared with other devices, and for this purpose, Fig. 12 shows the return loss calculated by simulation as a function of signal frequency for three different devices.

[0047] Curve (a) in Fig. 12 shows the return loss for a deflection region with a rounded outer edge, where the radius of curvature is wider than the conductor track, i.e. (2) ((radius of curved portion) / (strip width of conductor path))≧1 If ≡ ...

[0048] Curve (b) is the return loss for a turning region with only one 45° chamfer, ie for a turning region as shown in the embodiment of FIG.

[0049] Curve (c) shows the return loss for an asymmetric two-stage deflection according to the present disclosure, i.e., for an embodiment similar to that of the signal conductor 10 according to FIG. 8. The deflection angle α between the edge of leg 13 and the first deflection section is here 30°. In this case, the signal flow direction is from leg 13 through deflection region 4 to leg 14. The width 10 of the signal conductor 10 at legs 13, 14 is 0.6 mm in all embodiments.

[0050] As is clear from FIG. 12, the return loss of the conductor path device 1 having two turning sections 5 and an asymmetric turning region is significantly smaller than that of the comparative device in the wide frequency range of 10 GHz to 50 GHz.

[0051] The effect of the deflection angle α of the deflection section 5 on the adjacent edge of the leg 13 will now be discussed with reference to Figure 13. For this purpose, Figure 13 shows the return loss in dB as a function of the signal frequency for various deflection angles α of the deflection section 5. Several curves are shown for individual deflection angles varying between 28° and 32°. For comparison, a curve for a device with a simple 45° chamfer, i.e. the device of Figure 1, is also plotted. This curve is labeled "45°".

[0052] The following model parameters were used for the conductor track device: The support on which the conductor track device configured as a microstrip is mounted consists of aluminum nitride ceramic with a dielectric constant of 8.8. The dielectric loss factor tan(δ) is 0.001. The conductor tracks, in particular the signal conductor 10, are made of gold. The conductivity of gold conductor tracks is 41,000,000 Siemens / m.

[0053] As can be seen from the curves, a simple 45° chamfer exhibits the highest loss. For high signal frequencies, between 30 GHz and 45 GHz, the device with a 30° turning angle exhibits particularly low attenuation.

[0054] As can be seen from Figure 13, the scattering parameter S 11 Since in this case all the curves are located below -15 dB, or even below -20 dB, it is generally proposed, according to one embodiment of the invention, without being limited to the illustrated example, to calculate the absolute value mag(S 11 ) or scattering parameter S 11 is smaller than -15 dB, preferably smaller than -20 dB, and preferably smaller than -25 dB, particularly over the considered frequency range of 1 GHz to 50 GHz.

[0055] In order to be able to evaluate the angular dependence of return loss in the entire high frequency range, n Regarding the attenuation mag(S 11 (f)) is accumulated, i.e.,

number

[0056] The results of this summation are plotted in Figure 14. Figure 14 shows the return loss S accumulated in 220 MHz steps in the frequency range from 1 GHz to 50 GHz.11 The amplitude or absolute value mag(S 11 ) is shown for various turning angles between 28° and 32°. The progression of the illustrated curves shows a clear minimum at a turning angle of 30°. The return loss in the turning sections, calculated according to equation (3), is less than 1000 for turning angles in the range of 28° to 30°. Such values ​​can also be achieved with other geometries of the turning region, with multiple turning sections along one edge. Thus, in one embodiment, it is generally proposed to calculate the scattering parameter S 11 That is, the direction-changing region 4 is formed so that the sum S of the sizes of the above is less than 1000.

[0057] By choosing unequal lengths of the turning angles and turning sections, the following advantages are achieved:

[0058] Compared to a simple 45° turn according to the prior art, better control of the capacitance of the corners of the conductor tracks within the turn area is achieved, thereby increasing the signal bandwidth used to transmit data. Since a minimum value is found near a 30° turn angle, one embodiment generally suggests that the turn angle of the edge 2, 3, preferably the outer edge 2, at the transition from the legs 13, 14 of the signal conductor 10 to the adjacent turn section 5 be between 29° and 31°.

[0059] The present disclosure also generally relates to an electronic component that is integrated into a package and connected to a conductor path arrangement described herein for transmitting high-frequency electrical signals. The package component is typically a socket, into which the electronic component is attached and through which signals are supplied. For this purpose, a socket 20 for an electronic component is generally provided, which includes an electronic component 28 and a conductor path arrangement 1 according to the present disclosure. The socket has an electrical feedthrough 22, with the electronic component 28 and the electrical feedthrough 22 both connected to the signal conductor 10 of the conductor path arrangement 1, such that the electrical signal is guided from the feedthrough 22 through the signal conductor 10 to the component 28. In particular, the connection between the feedthrough 22 and the electronic component is made at one of the legs 13, 14, respectively, so that the electrical signal flows sequentially through one leg and the deflection region 4, and then through the other leg.

[0060] The present disclosure also relates to an electronic device with a socket. The electronic device 30 is a component with a package in which an electronic component 28 and a conductor path arrangement 1 are enclosed. In particular, the package can include a socket 20 and a cap 31.

[0061] 15 shows a schematic diagram of an electronic device 30 equipped with such a socket 20. An optical-to-electrical converter is preferably used as the electronic component 28 in the electronic device 30. Thus, the electronic component 28 can be a laser diode for the purpose of converting a high-frequency electrical signal for optical signal transmission. Conversely, the electronic component 28 can also be a photodiode for the purpose of converting optically transmitted data back into an electrical signal.

[0062] The package of the electronic device 30 can be, for example, a TO package (TO = "Transistor Outline"). If the electronic component 28 is an optoelectronic transducer, a cap 31 joined to the socket 20 can have a window 32. For example, the window 32 can be joined to the thin metal plate of the cap 31 using glass solder.

[0063] The signal guide direction is determined depending on the direction in which the signal is converted. In the case of an electrical-to-optical converter such as a laser diode, this is the signal guide direction along the signal conductor 10 from the feedthrough 22 towards the laser diode. To achieve a good return loss, and without being limited to the illustrated embodiment, it is generally particularly preferred here if the turning section 5 adjacent to the leg 13 through which the electrical signal first flows has a turning angle of less than 45°, preferably less than 40°, relative to the edge, preferably the outer edge 2 of the leg 13. The leg 13, 14 through which the electrical signal first flows is determined here by the signal guide direction. Preferably, the leg 13 is the leg through which the electrical signal first flows, as determined by the signal flow direction.

[0064] The deflection of the signal conductor 10 as described in this disclosure can be advantageous, for example, when it is desirable to thermally decouple the electronic component 28 from the socket 20. For this purpose, one embodiment proposes the following: the electronic device 28 is arranged on a base 24, which is cooled by a thermoelectric cooler 26, with the support 16 carrying the signal conductor 10 being arranged laterally of the base 24 and separated from the base 24 by a gap 27. The gap 27 prevents thermal contact between the conductor path device 1 and the support 16. However, in this case, this arrangement results in the signal conductor extending laterally from the thermoelectric cooler 26 and the base. In this case, the deflection serves to guide the signal conductor 10 toward the electronic component 28, as can be seen in the example of FIG. 15 .

[0065] Furthermore, in this case, the gap 27 can be bridged by a bonding wire 29 attached to one end of the signal conductor 10, in particular to the end of leg 14. The electrical connection to the electronic component 28 is made, as depicted in the example, from the feedthrough 22 to the first leg 13 of the signal conductor 10, via the deflection region 4 to the second leg 14, and then to the end of the signal conductor 10, typically also the end of the second leg 14, and from there via the bonding wire 29. The bonding wire 29 can be in direct contact with the electronic component 29 or can form a connection to another conductor path on the base 24. In the example shown in FIG. 15, the electronic component 28 is directly connected to the bonding wire 29.

[0066] Those skilled in the art will understand that the conductor track arrangement 1, as well as the socket 20 equipped with this conductor track arrangement and the electronic device formed with the socket 20, are not limited to the specific example shown. Therefore, additional legs can be connected to one or both legs 13, 14 via additional deflection regions. In this way, the signal conductor 10 can be U-shaped, for example, or the additional legs can extend parallel to and offset laterally from the first leg. It is also conceivable to provide two or more signal conductors 10 on the support 16. Thus, according to one embodiment, the signal conductors 10 can extend coplanarly on one of the faces of the support 16, with a common ground conductor provided on the opposite face.

[0067] Although signal conductors are known from the prior art that are indeed curved on both edges, the cross-sectional width of the conductor tracks does not change during the bend, as shown, for example, in FIG. 16. A constant cross-sectional width increases the capacitance of the bend, which in turn changes the conductor impedance. This leads to conductor matching errors, which increase the signal return loss at the bend. This is avoided by changing the width W of the signal conductor 10 in the turning region 4, which allows the capacitance to be matched to the required impedance and is particularly reduced.

[0068] 17a and 17b show a conductor path device 1 with two curved edges, in which the signal conductor 10 is narrower in the turning region 4 than at the end of the signal conductor 10. In particular, the signal conductor 10 has a width W at the beginning or at one end and at the other end of the conductor bend or turning region 4. The conductor is thus matched to the required conductor impedance at the beginning and end. The width W preferably varies continuously through a bend angle of preferably 0° to 90°. Preferably, the signal conductor 10 has a minimum width W within a half bend angle range of 35° to 60°. min However, in cases where the redirection area is configured asymmetrically, the minimum width W min can be located above 60° or below 35°. Further along, the width W increases again, reaching width W again at the end near 90°. In this way, improved transmission characteristics are achieved at high frequencies compared to the prior art conductor track shown in FIG. 16, for example.

[0069] The signal conductor 10, having two curved edges and a narrower width W in the turning region than at the ends, can be configured in various ways. Preferably, the curved portion of the inner edge 3 and the curved portion of the outer edge 2 have an elliptical or circular outline. It is therefore conceivable that the center of the circle formed by the inner edge 3 is located closer to the signal conductor 10 than the center of the circle formed by the outer edge 2.

[0070] 17a, the circular section formed by the outer edge 2 can be smaller than 90°, or preferably larger than 90°. Similarly, the angle between the inner surface of the outer edge 2 and a line defined by the width W of the signal conductor 10 at the point where the outer edge 2 begins to bend can have a value of 90° or less. The angle between the inner surface of the inner edge 3 and a line defined by the width W of the signal conductor 10 at the point where the inner edge 3 begins to bend can have a value of 90° or less. It is possible for the point where the outer edge 2 begins to bend to be offset relative to the point where the inner edge 3 begins to bend in the length direction of the signal conductor 10, and preferably, at least the outer edge and / or the inner edge 3 have at least one straight, not particularly curved, section within the deflection region 4.

[0071] 17b shows another geometrical shape of the signal conductor 10, in which the angle between the inner surface of the outer edge 2 and the line defined by the width W of the signal conductor 10 at the point where the outer edge 2 begins to bend has a value of 90° or more. In this case, the circular section formed by the outer edge 2 is less than 90°, or preferably exactly 90°. The angle between the inner surface of the inner edge 3 and the line defined by the width W of the signal conductor 10 at the point where the inner edge 3 begins to bend can also have a value of 90° or more. In this case, the circular section formed by the inner edge 3 is greater than 90°, preferably greater than 130°, and preferably greater than 180°. It is conceivable here that the point where the outer edge 2 begins to be bent is offset relative to the point where the inner edge 3 begins to be bent, preferably so that at least the outer edge and / or the inner edge 3 has a straight, not particularly curved, section within the deflection region 4.

[0072] FIG. 18 shows the preferred width W min16 shows how the distance R can be determined. Depicted here is a structure with a conductor track as presented in FIG. 16, which has a constant conductor width W at the conductor bend in the turning region 4. Also shown is an auxiliary circle 34. The center point of the auxiliary circle 34 is defined by the fact that the distance from the center point of this circle to the outer contour point or edge point 33 of the conductor bend is equal at the beginning or one end 35 and the other end 36 of the bend or turning region 4. Both contour points 33 are enclosed by dashed lines. The radius R of the auxiliary circle 34 h If the radius W of the outer edge 2 of the signal conductor 10 is greater than the radius of the outer edge 2 of the signal conductor 10, a crescent-shaped surface 40 is cut out of the conductor bend by the auxiliary circle 34. In this case, the desired conductor bend is obtained by subtracting the crescent surface 40 from the conductor bend. The crescent surface 40 consists of two circle segments with different radii. The distance between these two circle segments is zero at bend angles of 0° and 90°, and is maximum at a bend angle of 45°. This means that no conductor bend is cut between 0° and 90°. At the start 35 and end 35 of the turning region 4, the width W of the signal conductor 10 remains the same or unchanged. In contrast, especially at a bend angle of 45°, the most is cut out of the conductor bend. There, the width W of the signal conductor 10 min is preferably minimal.

[0073] Depending on the support material, the desired conductor impedance, and the curve radius of the conductor bend, an appropriate radius R of the auxiliary circle 34 is determined through simulation. h can be obtained. This is typically a compromise between the shift of the cutoff frequency of higher-order waves and the required return loss. However, instead of the auxiliary circle 34, an ellipse or a parabola could also be used. However, it is important here that the auxiliary surface is formed by a continuous function to avoid abrupt changes, and that the outer edge of the signal conductor 10 intersects the auxiliary surface in at least two points. Based on this type of simulation and their results, it will be considered below that the width W of the signal conductor 10 in the redirection region 4 minThe benefits of reducing

[0074] 17a, 17b and 18 show that a suitable shape of the signal conductor 10 can be obtained, without being limited to the specific embodiment shown, if the outer and inner edges form non-concentric curves, in particular segments of non-concentric circles or ellipses. The curved portion or curved transition of the inner edge 3 and the curved portion of the outer edge each have a center, and the centers of the curved portions of the inner edge 3 and the outer edge 2 are offset from one another, in particular so that the curved portions of the inner edge 3 and the outer edge 2 are formed eccentrically. For this purpose, the center of the curve of the inner edge 3 can be positioned closer to the signal conductor 10 than the center of the curve of the outer edge 2. This applies to both configurations of FIG. 17. In these embodiments, this offset of the center lies along the angle bisector 38 of the deflection, resulting in a mirror-symmetric shape of the deflection region, and preferably of the entire signal conductor 10, with respect to the angle bisector 38, in the case of circular segment-shaped outer and inner edges.

[0075] 19, 21, 23, 25 and 27 therefore show the insertion loss, and in 20, 22, 24, 26 and 28 the return loss, for a 90° conductor angle known from the prior art with a 45° chamfer 8 as shown in 1 and with a conductor bend having a constant conductor width W according to 16. The insertion loss and return loss achievable by the inventive design of the bend of the signal conductor 10 in the turning region 4 are likewise shown, in which both edges 2, 3 are bent and the width W of the signal conductor 10 in the turning region 4 is constant. minis smaller than the width W at the ends 35, 36 of the deflection region 4. For better clarity and to make the diagrams comparable, appropriate pictograms have been inserted, which represent individual configurations of the three aforementioned configurations of the signal conductor 10 that achieve the results shown. These pictograms correspond to the embodiments of the signal conductor 10 shown in the subsections a, b of FIGS. 1, 16 and 17.

[0076] For this purpose, Figs. 19 to 24 show the scattering parameter S, which represents the signal attenuation in a transistor outline header (TO header) with a signal conductor connected to a feedthrough. 21 and S 11 The conductor bends according to the invention in Figures 23 and 24 show significantly improved performance at higher frequencies than the conductor bends with conductor angles (Figures 19 and 20) or constant conductor width W (Figures 21 and 22) known from the prior art. The cutoff frequencies for higher harmonics are marked by the locations of singularities in the insertion attenuation. In the case of the two known bends of the signal conductor 10, the lower cutoff frequency is located at approximately 65-70 GHz. With a reduced width W min In the case of a conductor bend with curved edges 2, 3, the cutoff frequency is preferably above 80 GHz or is no longer within the measuring range. min and the curvature of the edges 2, 3, the fundamental wave is shifted to a significantly higher value, so that at higher frequencies the fundamental wave is no longer corrupted by higher order waves than would be possible with prior art signal conductors.

[0077] A conductor bend with a constant conductor width W cannot compensate for the increased capacitance at the corner, so the return loss is generally greater than that of a 90° conductor bend with a 45° chamfer. However, with a reduced width W minand conductor bends with curved edges 2, 3 are able to compensate significantly better for the increased capacitance and therefore also show improved return loss compared to 45° chamfers 8 or constant width W. These graphs show that conductor bends with 45° chamfers 8 and constant widths can no longer be used for interference-free signal transmission above the cutoff frequency.

[0078] Reduced width W min In order to demonstrate the application range of the signal conductor 10 with improved conductor bends, and with curved edges 2,3, simulations were carried out using two different carrier boards.

[0079] In Figures 19-24, as well as in the graphs of Figures 25-28, the frequency curves of the scattering parameters for various shapes of signal conductor 10 are characterized diagrammatically. The frequency curves for known devices with 45° chamfers are shown by dotted lines, the curves for curved signal conductors 10 with a constant width W are shown by dashed lines, and the curves for curved signal conductors 10 with variable width W are shown by solid lines. Additionally, each curve is characterized by pictograms representing various conductor track shapes. Figure 25 shows the insertion loss results of a simulation performed using a carrier board or submount 17 with a thickness or height of 0.2 mm. Figure 26 shows the corresponding return loss results for the characteristics described in Figure 25.

[0080] 27 shows the insertion loss with a 0.15 mm high submount 17. FIG. 28 shows the corresponding results for return loss for the characteristics described with respect to FIG.

[0081] The simulations presented in Figures 25, 26 and 27, 28 therefore differ for values ​​of the height or thickness of the submount 17 and the width W of the signal conductor 10, which are typical for use in TOs. It can be clearly seen in Figures 25-28 that the cutoff frequency for the excitation of higher-order waves is already around 70 GHz for a 45° chamfer and a constant conductor width W, while the cutoff frequency is between 80 and 100 GHz when a relatively thin submount 17 is used. In contrast, for a reduced width W min The threshold frequency for the signal conductor 10 with the curved edges 2, 3 is significantly higher in all cases. Here, the cutoff frequency is increased by more than about 20 GHz. In the case of the thin submount, a significantly smaller bend in the insertion loss can be seen around 90 GHz, which is indicative of the cutoff frequency, but the width W min By appropriately selecting , this cutoff frequency can be minimized to the point of insignificance. The improvement in return loss compared to the 45° chamfer and constant conductor width W is also clearly noticeable.

[0082] FIG. 29 shows the reduced width W when used with a further electronic device having socket 20 and its base 21. min 15, the signal conductor 10 is shown schematically with curved edges 2, 3. As also shown in FIG. 15, the electronic component 28 can be an electronic device, preferably an optoelectronic converter, in particular a laser diode or a light sensor. Without being limited to the illustrated embodiment, the electronic component 28 can be connected to two signal conductors 10, which can each be electrically connected to a pin for further signal transmission. To achieve a good return loss, it is generally advantageous for one end 35 of each of the turning regions or signal conductors 10 to be electrically coupled to a pin and the other end 36 to be electrically coupled to the component 28. The turning typically serves to guide one or more signal conductors 10 from the pin toward the component 28.

[0083] Preferably, the signal conductors 10 are electrically separated or decoupled from one another, for example, by a gap 27. At least one signal conductor can be electronically connected to a component 28, preferably by at least one bonding wire. It is typically proposed that the other signal conductor be directly coupled to a connection terminal of the component, in particular without a bonding wire. The deflection of the signal conductor 10 as described in this disclosure can be advantageous, for example, when it is desired to thermally decouple the electronic component 28 from the socket 20, as shown in FIG. 15 . For this purpose, it is proposed that the component 28 be arranged on a base 24 that is cooled by a thermoelectric cooler 26. However, it is preferable that, unlike the case shown in FIG. 15 , the electronic component 28 be cooled without a thermoelectric cooler 26 and, in particular, be thermally coupled to the base 24. Furthermore, a submount 17 or a support 16 is preferably arranged on the base 24, on whose upper surface one or more signal conductors 10 are arranged. A ground conductor is arranged on the underside of the support 16, in particular in electrical contact with the base 24, for grounding purposes, so that the conductor track arrangement 1 can be configured as a microstrip line or CBCPW arrangement.

[0084] The conductor path device 1 or one or more signal conductors 10 has a deflection region 4, in which the width W min is narrower, at least in a section, than the width W of at least one of the ends 35, 36 of the deflection region 4. Preferably, the edges 2, 3, in particular the outer edge 2 and the inner edge 3, of at least one signal conductor 10, preferably two signal conductors 10, are curved, in particular continuously, at least in a section. In this case, the curvature of the inner edge 3 and the curvature of the outer edge 2 are preferably formed eccentrically, so that the radius of curvature of the outer edge 2 is greater than the radius of curvature of the inner edge 3. The deflection region 4 can extend from one end to the other end of one or more signal conductors.

[0085] To understand the operation and, in particular, the effectiveness of the above-described conductor track arrangement, the generation of higher-order waves on a microstrip line, such as that illustrated in FIGS. 9 and 29, is briefly described below. For this purpose, FIG. 30 shows, in three partial views, a cross section of the microstrip line and the field lines 42 formed between the signal conductor 10 and the ground conductor 11, located on the opposite side of the signal conductor 10 and the submount 17. The submount 17 has a height h that is less than one-quarter of a wavelength. For this reason, no higher-order waves exist in the vertical direction. However, if the width W is on the order of a multiple of half a wavelength (nλ / 2), higher-order waves can propagate in the horizontal direction. In this case, additional standing waves can form laterally. Therefore, a cutoff frequency exists, above which higher-order waves can propagate or exist. Higher-order waves can also be excited by disturbances in the signal conductor 10.

[0086] Microstrip lines have nonuniform material filling and therefore do not produce simple transverse electromagnetic waves (TEM waves). However, the fundamental waves behave almost like TEM waves over a wide frequency range, and are therefore also called quasi-TEM waves. They can be successfully used for signal transmission. For these fundamental or quasi-TEM waves, the electric field (E field) field lines are oriented in the same direction, i.e., constant, across the cross section of the signal conductor 10, or across the width W of the signal conductor 10, as shown in subfigure (a). In contrast, the field lines of higher-order waves change direction across the width W of the signal conductor 10, and thus the E field vanishes between such changes in direction. Subfigures (b) and (c) therefore show the field lines of two first-harmonic or higher-order waves.

[0087] The fundamental wave and all higher-order waves are called the natural waves of the signal conductor 10. On an undisturbed conductor, the natural waves move independently of each other and do not interfere with each other. When a disturbance occurs, such as a change in direction or a bend in the signal conductor, natural waves, or the fundamental wave, couple with the higher-order waves. This changes the characteristics of the fundamental wave as soon as the higher-order waves propagate.

[0088] The microstrip line described above has the following advantages: it has a simple structure compared to more complex conductor systems such as CBCPW devices; and the characteristic of the natural waves is decisively influenced by the geometry of the signal conductor 10, particularly its curvature and width W or cross-section, as well as the thickness of the submount 17 or carrier board for the signal conductor 10. Without being limited to the examples discussed herein, this relationship is illustrated based on some exemplary values: the cutoff frequency of higher-order waves decreases the wider the width W of the signal conductor 10. If the conductor impedance is only 25 Ω, i.e., about half the otherwise common 50 Ω impedance for the same carrier board, the 25 Ω conductor is three times wider than the 50 Ω conductor. Therefore, the cutoff frequency for higher-order waves is one-third lower for the 25 Ω conductor than for the typical 50 Ω conductor.

[0089] As shown in Figures 19 to 28, the cutoff frequencies of higher order waves could be shifted to higher frequency values, for example above 80 GHz, in particular by the embodiments presented in Figures 17a, 17b, 18 and 29. This allows the fundamental wave, and thus the signal conductor, to be barely or even not disturbed at all up to frequency values ​​of up to 80 GHz, preferably up to 90 GHz, and preferably even above 100 GHz. [Explanation of symbols]

[0090] 1 Conductor path device 2 Outer edge of signal conductor 10 3 Inner edge of signal conductor 10 4 Orientation area 5. Turning section of 2 6. Turning section of 3 8 Chamfered part 10 Signal Conductor 11 Grounding conductor 12 Corners 13,14 Legs 16 Support 17 Submount Gap at 18 11 20 sockets 21 20 base 22 Feedthrough 24 Pedestal 26 Thermoelectric cooler 27 Gap 28 Electronic Components 29 Bonding Wire 30 Electronic Devices 31 Cap 32 Windows 33 Outer contour points 34 Auxiliary Circle 35 One end of the redirection area 36 Other end of the redirection area 38 angle bisector 40 Crescent surface 42 Leylines α deflection angle H1 thickness W 10 width W min A minimum width of 10 at either end of 1 D √2×W R h Auxiliary circle radius X Bevel

Claims

1. A conductor path device (1) for high frequency signals, the conductor path device (1) comprising: a support (16); and a layered signal conductor (10) disposed on the support (16) and defined by at least one inner edge (3) and at least one outer edge (2); The signal conductor (10) extends from one end to the other end of the signal conductor (10), The signal conductor (10) of the conductor path device (1) changes its direction within the turning region (4) between the ends and has a minimum width (W ｍｉｎ ) The minimum width (W) of the signal conductor (10) in the turning region (4) ｍｉｎ ) is narrower than the width (W) of the signal conductor (10) at the end, At least one of the edges (2, 3) in the turning region (4) is curved in at least a portion thereof, The width of the signal conductor (10) varies continuously within the redirection region (4); the curved portion of the inner edge portion (3) and the curved portion of the outer edge portion (2) each have a center, and the centers of the curved portions of the inner edge portion (3) and the outer edge portion (2) are arranged offset from each other, whereby the curved portions of the inner edge portion (3) and the outer edge portion (2) are formed eccentrically; the profile of the outer edge (2) in the deflection area is generally convex and the profile of the inner edge (3) is generally concave; Conductor path device (1).

2. The minimum width (W ｍｉｎ ) is reduced by a factor in the range of 0.5 to 0.95, preferably by a factor in the range of 0.6 to 0.8, than the width (W) of one of the ends (35, 36) of the signal conductor; 2. The conductor track arrangement (1) according to claim 1.

3. The outer edge portion (2) and the inner edge portion (3) are curved in at least a portion of the turning region. The conductor track arrangement (1) according to claim 1 or 2.

4. It has at least one of the following characteristics: the curvature of the outer edge (2) and / or the inner edge (3) is continuous, in particular uninterrupted; The minimum width (W ｍｉｎ ) is located in the central third of the deflection area (4), preferably in the center of the deflection area (4), The conductor track arrangement (1) according to any one of claims 1 to 3.

5. 5. The conductor path arrangement (1) according to claim 1, wherein the deflection region (4) extends from one end of the signal conductor to the other end of the signal conductor.

6. It has one of the following characteristics: the deflection area (4) is asymmetrically formed; the turning area (4) has a mirror axis along the angle bisector (38) of the turning angle; The conductor track arrangement (1) according to any one of claims 1 to 5.

7. The signal conductor (10) is deflected in the deflection region (4) at an angle in the range of 75° to 105°, preferably at an angle of 90°. The conductor track arrangement (1) according to any one of claims 1 to 6.

8. The redirection region (4) is formed so that the magnitude mag(S 11 ) of the scattering parameter S 11 is less than −15 dB, preferably less than −20 dB, preferably less than −25 dB over a frequency range of 1 GHz to 50 GHz. The conductor track arrangement (1) according to any one of claims 1 to 7.

9. The conductor line device (1) is configured as a microstrip line, as a coplanar waveguide, or as a CBCPW device. The conductor track arrangement (1) according to any one of claims 1 to 8.

10. The conductor path device (1) includes a layered ground conductor (11) arranged on the opposite side of the layered signal conductor (10), and the spacing between the ground conductor (11) and the signal conductor (10) satisfies at least one of the following characteristics: the spacing is in the range of 0.025 mm to 0.5 mm, preferably in the range of 0.05 to 0.4 mm; the width (W) of the signal conductor (10) at its ends (35, 36) is greater than the spacing between the ground conductor (11) and the signal conductor (10) by a factor in the range of 0.5 to 7.5, preferably by a factor of 0.6 to 5; The spacing between the signal conductor (10) and the ground conductor (11), the width (W) of the signal conductor (10) at one of the ends (35, 36) of the signal conductor (10), and the minimum width (W) of the signal conductor (10) ｍｉｎ ) and the ratio of the difference between the two has a value in the range of 0.5 to 2; The conductor track device (1) is configured so that the limit frequency, in particular the limit frequency for the generation of higher-order waves, is greater than 60 GHz, preferably greater than 70 GHz. The conductor track arrangement (1) according to any one of claims 1 to 9.

11. It has the following characteristics: The support (16) is made of aluminum nitride ceramic, ceramic containing aluminum nitride, aluminum oxide (Al ２ O ３ ), glass, or glass and ceramic, The conductor track arrangement (1) according to any one of claims 1 to 10.

12. 12. A socket (20) for an electronic device comprising an electronic component (28) and a conductor track arrangement (1) according to any one of claims 1 to 11, The socket has an electrical feedthrough (22), and both the electronic component (28) and the electrical feedthrough (22) are connected to the signal conductor (10) of the conductor path device (1), so that an electrical signal is guided from the electrical feedthrough (22) to the electronic component (28) via the signal conductor (10). A socket (20) for an electronic device.

13. An electronic device (30) in the form of a component with a package, in which an electronic component (28) and a conductor path arrangement (1) according to any one of claims 1 to 11 are enclosed. An electronic device (30).

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