Robot and Wireless Data Coupling

Abstract

To provide a robot for moving a substrate. [Solution] The substrate transport apparatus has two arm links (22, 24) and two end effectors (26A, 26B). The first arm link (22) of the two arm links is connected to a drive unit (18). The two end effectors are connected to the ends of the other arm links of the two arm links and each have a substrate support region. The first arm link is rotatably connected to the end of the other arm link by a first rotary joint (28), and the second arm link is rotatably connected to the end of the end effector by a second rotary joint (30). The first end effector and the second end effector can rotate independently of each other at the end of the second arm link. The drive unit is installed in a single fixed position in the substrate transport chamber.

Description

[Technical Field]

[0001] TECHNICAL FIELD The exemplary, non-limiting embodiments of the present application relate generally to robots, and more particularly to robots that move substrates.

[0002] Conventional manufacturing techniques for semiconductor integrated circuits and flat panel displays typically involve processing silicon wafers, called substrates, and glass panels in fully automated vacuum cluster tools. A typical cluster tool comprises a circular vacuum chamber with load locks and multiple process modules connected in a star-like configuration around the periphery of the chamber. The tool is typically operated by a robotic manipulator (robot) located near the center of the chamber, which cycles substrates from the load locks, through the process modules, and back to the load locks. Another robot may be located in an atmospheric transfer module that serves as an interface between the vacuum chamber's load locks and standard load ports operated by an external transport system. Abstract

[0003] The following summary is provided by way of example only and is not intended to limit the scope of the claims of this application. According to one embodiment, an exemplary apparatus is provided that includes a frame having at least three sections, a first position sensor, a drive unit, and a chamber. The at least three sections include an end effector and at least two links forming a movable arm. The end effector and the link are connected by a movable joint, and the end effector is configured to support a substrate. In the frame, a first position sensor is proximate to the first joint and configured to detect the relative positions of two of the sections. The drive unit is connected to the frame and configured to drive the movable arm. The frame may be disposed within a chamber, and the drive unit may extend through a wall of the chamber. According to another aspect, an exemplary apparatus is provided, comprising an electric device, a frame, a drive unit, and a heat transfer system. The frame mounts the electric device and has at least three sections, including an end effector and at least two links forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substrate. The drive unit is connected to the movable arm and configured to drive the movable arm. The heat transfer system is provided in the drive unit and configured to transfer heat from the movable arm to a location spaced apart from the arm.

[0004] According to yet another aspect, an exemplary apparatus is provided that includes a frame having at least three sections, a first position sensor, and a communication link. The at least three sections include an end effector and at least two links forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substrate. A first position sensor is located on the frame adjacent to the first joint and configured to sense the relative positions of two of the sections. The communication link is configured to transmit a signal from the first position sensor through the airtight enclosure to a device remote from the movable arm.

[0005] In another aspect, there is provided an apparatus comprising: a robotic arm configured to be positioned in a first environment, the robotic arm having a plurality of pivotable links and an end effector configured to support at least one substrate thereon; At least one active element disposed on the robot arm; an airtight enclosure disposed on the robot arm; at least one electrical conductor disposed on the robot arm, the electrical conductor passing through the airtight enclosure and connected to the at least one active element; Equipped with the at least one active element is disposed within the airtight enclosure, the airtight enclosure creating a second environment within the airtight enclosure that is different from the first environment, and isolating the at least one active element within the airtight enclosure from the second environment; the airtight enclosure seals passage of the at least one active element through the airtight enclosure to maintain isolation of the second environment from the first environment; The at least one electrical conductor includes at least one limited rotation flexure that compensates for relative movement of the plurality of links, thereby preventing damage to the at least one electrical conductor due to rotation of the plurality of links relative to one another. In another aspect, there is provided a method comprising: Positioning at least one active element within the airtight enclosure; positioning the airtight enclosure on a robotic arm; sealing the passage of at least one electrical conductor through the airtight enclosure; Including, the robot arm comprises a plurality of pivotable links and an end effector configured to support at least one substrate thereon, the airtight enclosure being located on a first of the plurality of links, and the robot arm being configured to be located in a first environment; the at least one electrical conductor is electrically connected to the at least one active element, and the passage is sealed to keep the second environment isolated from the first environment; The method further includes providing the at least one electrical conductor with at least one limited rotation flexure that compensates for relative movement of the plurality of links, thereby preventing damage to the at least one electrical conductor due to rotation of the plurality of links relative to one another.

[0006] In another aspect, there is provided an apparatus comprising: an arm configured to carry and move a substrate; a motor configured to drive the arm; a motor control coupling connected to the motor; A conveying device configured to be able to move horizontally within a chamber, the motor control coupling is configured to receive data from a controller regarding information about a position of the substrate provided by a plurality of sensors, generate a signal for the motor to adjust the position of the substrate based on the data from the controller, and send the signal to the motor; The motor control coupling is configured to communicate with the controller using at least one wireless communication device. In another aspect, there is provided an apparatus comprising: chamber and; a robot having a robotic arm and a robotic motor configured to move the robotic arm; a robot drive configured to connect the robot to the chamber and to move the robot horizontally within the chamber; a first wireless communication device connected to the chamber; a second wireless communication device connected to the robot; wherein the first wireless communication device is configured to transmit data wirelessly to the second wireless communication device, and the robot is configured to use the data received by the second wireless communication device to control movement of the robot motors. In another aspect, there is provided an apparatus comprising: chamber and; Robot motors and; Robot drive and; a robotic arm connected to the robotic motor; a first portion of a communication coupling connected to the robot motor; Equipped with the robot motor is connected to the chamber by the robot drive, the robot drive configured to move the robot motor horizontally within the chamber; the robotic motor configured to move the robotic arm; The first portion of the communication coupling is configured to move the robot motor horizontally within the chamber, the first portion of the communication coupling is configured to transmit a movement signal to the robot motor, and the first portion of the communication coupling is configured to wirelessly communicate with the second portion of the communication coupling for various horizontal positions of the first portion of the communication coupling within the chamber. In another aspect, there is provided a method comprising: connecting a robot to the chamber by a robot drive; connecting a first wireless communication device to the chamber; connecting a second wireless communication device to the robot; Including, the robot drive configured to move the robot horizontally within the chamber, the robot comprising a robot arm and a robot motor, the robot motor configured to move the robot arm; The first wireless communication device is configured to wirelessly transmit data to the second wireless communication device, and the robot is configured to use the data received by the second wireless communication device to control movement of the robot motors. In another aspect, there is provided a method, the method comprising disposing a robot in a chamber. the robot is connected to the chamber by a robot drive configured to move the robot horizontally along a linear path within the chamber, the robot comprises a robot arm and a robot motor configured to move the robot arm, a first wireless communication device is connected to the chamber, and a second wireless communication device is connected to the robot, and the method includes: wirelessly transmitting data from the first wireless communication device to the second wireless communication device; controlling movement of the robot motors at various horizontal positions of the robot along the linear path within the chamber based on the data transmitted from the first wireless communication device to the second wireless communication device; Includes. [Brief explanation of the drawings]

[0007] The foregoing aspects and other features are explained in the following description, which refers to the accompanying drawings, in which:

[0008] [Figure 1] 1 is a schematic diagram of a substrate processing apparatus.

[0009] [Figure 2] 2 is a top view of a substrate transfer device in the substrate process apparatus shown in FIG.

[0010] [Figure 3] 2 is a schematic diagram shown in FIG. 1 illustrating the boundary between the vacuum-compatible module and the atmospheric module.

[0011] [Figure 4] FIG. 1 is a perspective view of a communication / power flexure.

[0012] [Figure 5] FIG. 10 is a perspective view of another communication / power supply.

[0013] [Figure 6] FIG. 1 is a perspective view of a cooling system.

[0014] [Figure 7] 3 is a schematic diagram showing parts of the device shown in FIG. 2.

[0015] [Figure 8] 3 is a schematic diagram showing a cooling system for the device shown in FIG. 2.

[0016] [Figure 9] 3 is a schematic diagram showing some of the connections of the parts of the device shown in FIG. 2.

[0017] [Figure 10] 3 is a schematic diagram showing hermetic packaging of the device shown in FIG. 2.

[0018] [Figure 11] 1. FIG. 4 is a top view similar to FIG. 2, illustrating another substrate transfer device in the substrate process apparatus shown in FIG.

[0019] [Figure 12] 1. FIG. 4 is a top view similar to FIG. 2, showing yet another substrate transfer device in the substrate process apparatus shown in FIG.

[0020] [Figure 13] 1. FIG. 5 is a top view similar to FIG. 2, showing yet another substrate transfer device in the substrate processing apparatus shown in FIG.

[0021] [Figure 14] 1. FIG. 4 is a top view similar to FIG. 2 of yet another substrate transfer device in the substrate processing apparatus shown in FIG.

[0022] [Figure 15] 15 is a schematic top view of the apparatus shown in FIG. 14 in a vacuum chamber.

[0023] [Figure 16A]1A-1C are top views of different types of end effectors. [Figure 16B] 1A-1C are top views of different types of end effectors.

[0024] [Figure 16C] 16B is a schematic top view of the arm of FIG. 2 with the end effector shown in FIG. 16A in a vacuum chamber.

[0025] [Figure 17] 9 is a cross-sectional schematic diagram showing the cooling system of FIG. 8 installed in the apparatus shown in FIG. 2.

[0026] [Figure 18] 18 is a schematic cross-sectional view similar to FIG. 17, of another exemplary embodiment.

[0027] [Figure 19] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0028] [Figure 20] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0029] [Figure 21] 21 is a schematic cross-sectional view of the device shown in FIG. 19 taken along line 21-21.

[0030] [Figure 22] 22 is a schematic cross-sectional view of the device shown in FIG. 19 taken along line 22-22.

[0031] [Figure 23] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 24] 1 is a schematic top view of an exemplary substrate transport apparatus.

[0032] [Figure 25] 25 is a cross-sectional schematic diagram of the device shown in FIGS. 23-24.

[0033] [Figure 26] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 27] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 28] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 29] 1 is a schematic top view of an exemplary substrate transport apparatus. [Figure 30] 1 is a schematic top view of an exemplary substrate transport apparatus. Detailed Description of the Embodiments

[0034] Reference is first made to Figure 1, which shows a simplified top view of an exemplary substrate transport apparatus 10 including a substrate transport device 12. While the present invention will be described with reference to the embodiments shown in the accompanying drawings, it should be understood that the present invention may be embodied in a variety of other embodiments and forms, and any suitable size, shape, material, or type of components may be used.

[0035] The substrate processing apparatus 10 includes a substrate transport apparatus 12 as well as a substrate cassette elevator 16 that connects to a plurality of substrate processing chambers 14 and a vacuum chamber 15. The transport apparatus 12 is disposed within at least a portion of the chambers 15 and is configured to transport planar substrates, such as semiconductor wafers or flat panel displays, between the chambers 14 and the elevator apparatus 16. In alternate embodiments, the transport apparatus 12 may be used in any suitable type of substrate processing apparatus.

[0036] Conventional vacuum-environment robotic manipulators typically include a drive unit that houses all of the robotic manipulator's active components. These active components, such as the actuators, sensors, and upper arms, are driven by the drive unit. The arms are typically passive mechanisms and do not include active components such as actuators and sensors. This is primarily due to the difficulties of outgassing, power distribution, and heat removal in a vacuum environment.

[0037] In conventional vacuum environment robotic manipulators, the arms of the robotic manipulator are passive mechanisms, so the number of independently driven links is limited by the number of motion axes provided by the drive unit and the complexity of transmitting actuation torque to the arm's independent links. This limits the arm configurations that can be actually used to those described above, which in turn can limit the range of motion and throughput performance of existing vacuum environment robotic manipulators.

[0038] Additionally, while air-environment robotic manipulators often utilize various substrate grippers, vacuum-compatible robots typically hold substrates during processing solely through friction between the substrate and the robot's end effector. The inertial forces acting on the substrate must not exceed the holding force securing the substrate to the end effector to prevent slippage. Therefore, substrate acceleration must be limited accordingly, thereby limiting the tool's throughput (number of substrates processed per unit time). Therefore, grippers such as tip clamping mechanisms or electrostatic holding configurations are needed. These grippers can remove the constraint on acceleration required to prevent substrate slippage. It is also desirable to place sensors on the robot's end effector to assist with substrate alignment, guide the process, and similar operations.

[0039] This provides an advantageous method for supplying power and signals to the arms and end effectors of vacuum-compatible robots. Traditional configurations such as slip-ring and rolling-contact rotary couplings and service loops are designed for atmospheric use and have been successfully used in atmospheric robotics. However, these configurations are difficult to use under vacuum conditions due to their performance (cold welding) and outgassing issues.

[0040] In summary, because robot manipulator arms are passive mechanisms, the number of independently driven links is limited by the number of axes of motion provided by the drive unit and the complexity of transmitting actuation torque to the arm's independent links. Furthermore, the substrate holding and sensor sensing configurations have essentially never been used in vacuum environments. These circumstances limit the range of motion, throughput performance, and repeatability of substrate placement of existing vacuum robot manipulators. Therefore, it would be advantageous to provide a robotic system with active components, such as actuators and sensors, located within a vacuum environment or other non-atmospheric environment in which the robot manipulator arms can operate.

[0041] Referring now to FIG. 2, a substrate transport apparatus 12 (or vacuum-compatible robot system) having improved features over conventional apparatuses is shown. The substrate transport apparatus 12 includes a drive section 18 and a frame section 20. The frame section 20 includes a member including at least two links 22, 24 that form an arm assembly 25 and an end effector 26. The drive section 18 has two rotational axes. The arm assembly 25 is coupled to the drive section 18. The arm assembly 25 may include a first link 22, a second link 24, and an end effector 26. The first link 22 is directly connected to the first rotational axis of the drive section 18. The second link 24 is coupled to the first link 22 via a first rotational joint 28. The end effector 26 is coupled to the second link 24 via a second rotational joint 30. The second link 24 is driven via a belt / band. The belt / band may include a first pulley 34 attached to the second rotational axis of the drive section 18. A first belt / band 36 and a second pulley 38 are attached to the second link 24 of the arm assembly 25. The end effector 26 is constrained to a generally radial orientation relative to the drive unit 18 via another belt / band arrangement. This belt / band arrangement may include a third pulley 42 rotatably coupled to the first link 22, and a second belt / band 44 and a fourth pulley 46 attached to the end effector 26. In various other exemplary embodiments, the features disclosed herein may be provided by any suitable drive mechanism, actuator, sensor, or other mechanism, including those disclosed in the following documents, or combinations thereof: U.S. Provisional Application Nos. 61 / 627,030, filed September 16, 2011, and 61 / 683,297, filed August 15, 2012, and the same filed U.S. patent applications based on these applications, the entire contents of which are incorporated herein by reference.

[0042] The third pulley 42 is incrementally movable relative to the first link 22 of the arm assembly by a first actuator 48. The first actuator 48 can adjust the orientation of the third pulley 42 relative to the first link 22 of the arm assembly within a predetermined range. The first actuator 48 is preferably self-locking so that torque acting on the third pulley does not reverse the movement. For example, the first actuator 48 may include an electric motor with a lead screw mechanism or worm configuration, a piezoelectric actuator, or any other suitable actuator configuration. The first actuator 48 may also include a position measurement device that determines the angular orientation of the third pulley 42 relative to the first link 22 of the arm assembly. The active components of the first actuator, such as the stator of the electric motor, may or may not be fully or partially enclosed within an airtight enclosure 50. Additionally, the active components may or may not be separated from the passive components, such as the rotor of the electric motor, by a separating wall. The first actuator 48 is connected to a cooling subsystem, such as an exemplary cooling subsystem described below.

[0043] The first actuator 48 is controlled by a first controller 52. The first controller 52 may be connected to the first link 22 of the arm assembly. The first controller 52 may be housed in the same airtight enclosure 50 as the first actuator 48 or may be located in a separate airtight enclosure (not shown). The first controller 52 is connected to a cooling subsystem, one of the exemplary cooling subsystems described below. The first controller 52 may process signals output by a position sensing device in the first actuator 48 and output a control signal to the first actuator 48. For example, this may be for the purpose of energizing the windings of an electric motor incorporated in the actuator. The first controller 52 may be powered and communicate with a robot controller 54 via a power distribution and communication subsystem, described in more detail below.

[0044] The power distribution and communication subsystem may include an electrical rotary coupling 56, 57, 58 disposed at or associated with each rotary joint of the robotic manipulator 25. The rotary couplings 56, 57, 58 may transfer power from the robot controller 54 to the first control 52 and other active components of the arm assembly 25, such as the gripper 60 and sensors 62 of the end effector 26. Examples of electrical rotary couplings according to one or more embodiments of a vacuum-compatible robotic arm system are described below.

[0045] The end effector 26 may include an active substrate gripper 60. The active substrate gripper 60 may utilize, for example, an electrically actuated tip clamping mechanism, an electrostatic holding arrangement, or the like. The gripper may be connected to a power distribution and communication subsystem as well as a cooling subsystem of the robot arm, as described in more detail below. An arm system according to one or more embodiments may utilize rotary electrical couplings 56-58 that provide power and / or signals to the various rotary joints. The electrical couplings 56-58 may be, for example, of the continuous rotation type or limited rotation type. The gripper may have features described in U.S. Provisional Application No. 61 / 629,838, entitled "Vacuum Compatible Robot Gripper," filed November 29, 2011, which is incorporated herein by reference in its entirety. However, any suitable gripper may be provided in other exemplary embodiments.

[0046] An example of a continuous rotary coupling may be based on the principle of electromagnetic induction. As shown in FIG. 3 , an exemplary continuous rotary coupling 56 may include an atmospheric module 64 and a vacuum-compatible module 66, with the two modules interacting across a gap 68. A separation wall 70 may be present in the gap, separating the environment in which the vacuum-compatible module 66 resides from the environment in which the atmospheric module 64 resides. The two modules 64, 66 each include one or more rotary transformers. To provide power and / or signals from the atmospheric environment to the vacuum environment, a primary winding of the rotary transformer may be disposed in the atmospheric module 64, and a corresponding secondary winding may be disposed in the vacuum-compatible module 66. To transmit signals from the vacuum environment to the atmospheric environment, a primary winding of the rotary transformer may be disposed in the vacuum-compatible module 66, and a corresponding secondary winding may be disposed in the atmospheric module 64. Typically, the atmospheric module resides in an atmospheric environment, while the vacuum module resides in a vacuum or non-ambient environment. The vacuum-compatible module 66 may include an airtight container 72 that encloses the components of the vacuum-compatible module, such as to prevent outgassing. The vacuum compatible module 66 may be connected to a cooling subsystem of the robot arm, such as the exemplary cooling subsystem described below.

[0047] Another example of a continuous rotation coupling according to one or more embodiments of the present invention may combine electromagnetic induction principles for power supply and a wireless network-based configuration for communication.

[0048] Next, an embodiment of a limited rotation flexure coupling is shown in FIG. 4. In this embodiment, power and / or communication signals are each carried by one or more conductors 73 (see FIG. 2). Some of the conductors include a helical coil flexure 74. An end 76 of the helical coil flexure 74 may be connected to one part of the robot, preferably via an insulator 78. Another end 80 of the helical coil flexure 74 may be connected to another part of the robot, preferably via an insulator. The two connected parts may be connected through one of the rotary joints. Multiple helical coil flexures 74 may be arranged substantially concentrically at the rotary joint to provide paths for multiple power sources and / or communication signals. Individual helical coil flexures may be wound in opposite directions to balance the restoring forces associated with each individual helical coil flexure as much as possible, regardless of the displacement of the rotary joint. Insulating cylinders 82 may be used between individual helical coil flexures to eliminate the risk of short circuits between adjacent helical coil flexures. By way of example, although two helical coil flexures are shown in FIG. 4, this is for clarity of illustration only and any suitable number of helical coil flexures may be used, such as one, two or more.

[0049] Another embodiment of the limited rotation flexure coupling of the present invention is shown in FIG. 5. In this embodiment, power and / or communication signals may each be carried by a spiral coil flexure 74'. Two spiral coil flexures 74' are shown in FIG. 5. An end 76' of the spiral coil flexure 74' may be connected to one portion of the robot, preferably via an insulator. Another end 80' of the spiral coil flexure may be connected to another portion of the robot, preferably via an insulator. The two connected portions may be connected via a rotary joint. Multiple spiral coil flexures may be stacked to provide paths for multiple power sources and / or communication signals. Individual spiral coil flexures may be wound in opposite directions to balance the spring forces associated with the individual spiral coil flexures as much as possible, regardless of the displacement of the rotary joint. Insulating disks may be used between the individual spiral coil flexures to eliminate the risk of short circuits between adjacent spiral coil flexures. Although two spiral coil flexures are shown in FIG. 5, this is for clarity of illustration and any suitable number of spiral coil flexures may be used.

[0050] The number of helical or spiral coil flexures used in a single rotary coupling may be related to the number of power or communication signals transmitted through the rotary joint. A single signal may be distributed across multiple helical or spiral coil flexures to reduce current density or provide redundancy.

[0051] The purpose of a cooling subsystem that may be used in conjunction with a vacuum-compatible robotic arm assembly is to remove heat generated by the active components incorporated into the robotic arm assembly. Heat removal is more difficult in a vacuum than in air due to the lack of convection from the surrounding air. Heat conduction is also limited by the long path from the heat source to the actuator, and thermal radiation is only effective at low temperatures.

[0052] The cooling subsystem used in a vacuum-compatible robotic arm system may include, for example, a heat sink connected to the active components that generate heat, a radiator exposed to the exterior of the robotic arm assembly, or a thermoelectric cooler connected to the heat sink and radiator. Figure 6 shows an example of a thermoelectric cooler 84. The thermoelectric cooler 84 may be a solid-state active heat pump that consumes electrical energy to move heat against a temperature gradient (cold to hot) from the heat sink side (cold side) 86 of the device to the radiator side (hot side) 88. The primary advantages of a thermoelectric cooler are the lack of moving parts or circulating fluids, and the flexibility of a compact form factor.

[0053] Alternatively, the cooling subsystem may utilize any suitable heat pump and specific fluid. Such fluid, either liquid or gas, is circulated through a heat sink connected to the heat-generating active components of the arm assembly and either exhausted from the system or into a radiator. The radiator is preferably integrated into the robot drive and may be exposed to the atmosphere. Fluid may be circulated through the joints of the robot system in a vacuum-compatible housing arranged similarly to the flexures shown in Figures 4 and 5.

[0054] Reference is now made to Figures 7 and 8, which illustrate a substrate transport apparatus 12 in different schematic views. While the substrate transport apparatus 12 is described in connection with a vacuum robot, any suitable substrate transport apparatus, whether atmospheric or otherwise, may be provided with the features described herein. The substrate transport apparatus 12 includes a controller 54, a drive 18, and an arm 25, and is configured to transport a substrate S. The controller 54 may include a processor, memory, power amplifiers, etc. The arm 25 is shown as a SCARA-type arm and is driven by the drive 18. While the substrate transport apparatus 12 is described in connection with a two-link arm, any suitable number of links may be used. Additionally, any suitable number of arms may be used. Furthermore, any suitable arm may include any combination of rotational and / or linear axes.

[0055] In the illustrated embodiment, the arm 25 has three rotational axes 90, 92, and 94. Each axis is directly coupled to a respective position sensing device 96, 98, and 100. The position sensing devices may be optical, electromagnetic, or any suitable position sensing device. The position sensing devices 96, 98, and 100 may be incremental (relative), absolute, or a combination of both. The position sensing devices 96, 98, and 100 may be used in conjunction with other position sensing devices within the drive shafts of the drive 18. The position sensing devices 96, 98, and 100 interface with the controller 54 to determine the positions of the joints 92, 94, and 98. This is in contrast to robot drives that do not have position sensing devices directly coupled to the joints. Alternatively, not all joints may have position sensing devices. The position sensing devices 96, 98, and 100 may interface with the controller 54 using signals transmitted through the arm. The signals may be electrical, optical, or other. Alternatively, wireless or other suitable contactless communication may be provided. Note that hysteresis is not a factor in determining the positioning accuracy of substrate transport apparatus 12, which utilizes direct position measurement of each joint.

[0056] The drive unit 18 may further include a position sensing device separate from the motor. The controller 54, in conjunction with the drive unit 18 and the position sensing devices 96, 98, and 100, uses a control algorithm to minimize vibration in the payload S and maximize repeatability of the position of the payload S during picking and placing. Temperature sensing devices 102, 104, and 106 may also be connected to the links 22, 24, and 26, respectively, to sense the temperature at one or more locations on each link. The temperature sensing devices 102, 104, and 106 may also be connected to the controller 54 to incorporate thermal effects, such as thermal expansion and thermal deflection, into determining the position of the end effector 26. In addition to or alternatively to the temperature sensing devices 102, 104, and 106, a vibration sensing device 108 and / or a deflection sensing device 110 may be provided and connected to the controller 54 to monitor vibration and incorporate deflection into positioning and smoothness measurements. In other exemplary embodiments, any of the devices may be attached to any suitable component. Such devices may or may not be heat sinks. Alternatively, each device may be connected to one or more controllers, such as controller 52, in one or more links.

[0057] Referring now to FIG. 8, a cooling subsystem for the substrate transport apparatus 12 of FIG. 2 is shown. The drive unit 18 is a two-axis drive. The drive unit 18 includes a vertical drive 120 and a bellows 122 and is connected to the vacuum chamber 15. The drive unit 18 also includes a rotary drive 126 with a stator connected to a base 128 and the bellows 122. The rotary drive 126 directly rotates the link 22 and may include a gear drive or direct drive motor, a position encoder, and a power coupling. The power coupling may be a non-contact rotary power coupling or any other suitable power coupling that provides power to the link 22. Here, the power coupling may be a non-contact inductive transformer, and power and / or communication signals may be provided in a contactless manner. Alternatively, power and / or data may be transmitted in a contactless manner or via other suitable slip rings or couplings. The drive unit 18 also includes a non-contact optical feedthrough 130 with first and second fiber optic channels 132, 134. The fiber optic channels provide high-speed communication to the controller 52 for the link 22. Here, the controller 52 may include an optical device, Ethercat™, or other suitable converter. Alternatively, the converter and feedthrough 130 may be electromagnetically inductive, e.g., a coupler that transmits both power and CAN or other high-frequency signals or data. These may be used with wires, flexures, or other means.

[0058] A suitable non-contact optical feedthrough may use a fixed grin lens and a fixed mirror. An example of such a feedthrough is provided by Moog Components Group, but is intended for vacuum applications. Alternatively, any suitable coupling or feedthrough may be used. Here, non-contact fiber optic high-speed communications are connected to the non-contact rotary power supply controller 52, which is required to drive the arm 25. In addition to the high-speed communications coupling, a non-contact inductive power coupling may also be provided. The drive unit 18 may further include a heat sink 140 or 80 on the atmosphere side and a thermoelectric cooler 142 on the vacuum or atmosphere side. A heat sink 144 is connected to the base 128. The heat sink 144 may include a series of concentric tubes 145 with high emissivity. Similarly, a heat sink 146 is connected to a thermoelectric cooler 148, which is connected to the link body 22. The heat sink 146 includes a series of concentric tubes 147 with high emissivity, alternating with the tubes 145 of the sink 144. Thus, the coolers 142 , 148 operate to transfer heat from the link body 22 through the radiative cooling connections 144 , 146 and dissipate it using the sink 140 .

[0059] Similarly, any joint may utilize such thermal coupling. Alternatively, any suitable heat pump may be used, such as a phase-change heat pump that cools an active component and heats any suitable radiator to very high temperatures. Because heat dissipation is proportional to the fourth power of temperature, such a heat pump allows for greater heat transfer efficiency over a smaller surface area. Heat may also be dissipated externally from the arm, as opposed to heat sink cooling or a series of thermal couplings. For example, the mechanisms described above may be used. Alternatively, closed-loop cooling circuits may be provided within individual sections of the robot, such as the links of the arm. By way of example, such circuits may be heat pumps similar to those used in computers. Such heat pumps may be fully sealed to ensure substantial leak and outgassing protection. Alternatively, in other exemplary embodiments, active cooling or cooling equipment may be eliminated.

[0060] Couplings 144, 146 may be made of coated aluminum, such as aluminum nitride ceramic, or any other suitable material. Module 136 may also include a thermal sink or housing for cooler 148, link body 22, etc. Module 136 may also include control and motor drive circuitry, a positioning coding read head, and inputs and outputs for external devices. Such external devices may be thermoelectric coolers 148, other read heads, tip grip actuators, or other devices.

[0061] For example, see FIG. 9. The encoder 150 may be directly coupled to the wrist joint 30 associated with the end effector 26 and coupled to a readhead associated with the module 52. Similarly, the edge detection, edge gripping, and edge placement devices 62, 60 may also be connected to the end effector 26 and associated with the module 52. In the described embodiments, encoders may be provided for some or each joint, and motors may be provided for some or each joint. A combination of motor, encoder, and controller may be provided for some or each joint. In alternative embodiments, components such as the module 52 may be exposed or encapsulated. If encapsulated, they may be encapsulated in a hermetically sealed metal enclosure, the link body 22, a partial metal enclosure, or a combination thereof. Power and communication may be provided using cables and rigid feedthroughs, non-contact magnetic slip rings, contact slip rings, via individual bearings, flexures, or other means, or a combination thereof. Heat sinking may be achieved by radiative cooling, convection, or conduction. For example, the coolant may pass through a feedthrough, be stationary, or circulate. Alternatively, one or more of the shafts may have a feedthrough, such as a magnetic fluid seal or other suitable seal. Alternatively, the drive section 18 may have multiple links, concentric or offset, that provide one, more, or all of the independently driven shafts. Additionally, more or fewer coolers may be used. For example, multiple thermoelectric coolers may be omitted, or additional thermoelectric coolers may be provided. Additionally, a heat pump may be provided to transfer and dissipate heat from one portion of the arm or drive section to another.

[0062] Referring now to FIG. 10, an airtight vessel / enclosure 50 is shown. In this embodiment, the airtight enclosure encloses at least a portion of the actuator 48, the control unit 52, and the sensor 98. Alternative embodiments may include one or more of these components. Each component 48, 52, and 98 has a power and / or communication conductor 73A, 73B, and 73C, respectively, which connects to the conductor 73 through a seal 75 or the like in the airtight enclosure 50. The bodies 73A, 73B, and 73C may be electrical and / or optical. The enclosure 50 protects the interior of the vacuum chamber 15 from gases or contaminants from the components 48, 52, and 98, which would otherwise reduce the vacuum within the vacuum enclosure 15. Alternative exemplary embodiments may or may not use an airtight enclosure. Alternative exemplary embodiments may or may not use an airtight enclosure. For example, a portion of the motor or a portion of the sensor may be exposed to a vacuum, the entire motor or sensor may be exposed, or the entire motor or sensor may be sealed within an enclosure. This configuration is applicable to any type of device that can be enclosed in an airtight enclosure.

[0063] Referring now to FIG. 11, another exemplary embodiment of a vacuum-compatible robotic arm system is shown, depicting a single arm with two links 22, 24 and a pivoting end effector 25. In this example, the robotic system may include a drive unit with at least two rotational axes and an arm assembly coupled to the drive unit. The arm assembly may include a first link 22, a second link 24, and an end effector 26. The first link is directly connected to a first rotational axis of the drive unit 18, the second link 24 is connected to the first link through a first rotary joint, and the end effector is connected to the second link through a second rotary joint. The second link 24 may be driven via a belt / band. The belt / band may include a first pulley 34 attached to a second rotational axis of the drive unit 18. A first belt / band 36 and a second pulley 38 may be attached to the second link of the arm assembly.

[0064] The end effector 26 may be actuated by a first actuator 48. The first actuator may control the orientation of the end effector 26 relative to the second link 24 of the arm assembly. For example, the first actuator 48 may include an electric motor, a piezoelectric actuator, or any other suitable actuator configuration. The first actuator 48 may also include a position measurement device that determines the angular orientation of the end effector 26 relative to the second link 24 of the arm assembly. The active components of the first actuator, such as the stator of the electric motor, may be housed in an airtight enclosure 50 and may be separated from the passive components, such as the rotor of the electric motor, by a separation wall. The first actuator may be connected to a cooling subsystem, such as the chiller described above.

[0065] The first actuator 48 may be controlled by a first controller 52. The first controller 52 may be connected to the second link of the arm assembly. The first controller may be housed in the same airtight enclosure 50 as the first actuator, or may be located in a separate airtight enclosure. The first controller 52 may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process a signal output by the position sensing device 100 in the first actuator 48 and output a control signal to the first actuator 48, for example, to energize the windings of an electric motor incorporated in the actuator. The first controller may be powered via a power distribution and communication subsystem 73 and may be able to communicate with the robot controller 54.

[0066] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. Rotary couplings 56, 57, and 58 may transfer power from the robot controller 54 to the first control section 52 and other active components of the arm assembly 25, such as the gripper 60 and sensors 62 of the end effector 26.

[0067] Another exemplary embodiment of a vacuum-compatible robotic arm system is shown in FIG. 12. In this example, the robotic system may include a drive unit 18 having at least two rotational axes and an arm assembly 1225 coupled to the drive unit. The arm assembly may include a first link 22, a second link 24, and two end effectors 26A and 26B. The two end effectors 26A and 26B are referred to as the first end effector and the second end effector, respectively. The first link 22 may be directly coupled to the first rotational axis of the drive unit 18, and the second link 24 may be coupled to the first link 22 via a first rotary joint 28. The first and second end effectors 26A and 26B may be coupled to the second link 24 via a second rotary joint 30 and a third rotary joint 31, respectively. The second link 24 may be driven via a belt / band. The belt / band may include a first pulley 34 attached to the second rotational axis of the drive unit. The first belt / band 36 and second pulley 38 may be attached to the second link 24 of the arm assembly 1225 .

[0068] The first end effector 26A may be actuated by a first actuator 48A. The first actuator may control the orientation of the first end effector relative to the second link 24 of the arm assembly. Similarly, the second end effector 26B may be actuated by a second actuator 48B. The second actuator may control the orientation of the second end effector 26B relative to the second link 24 of the arm assembly. For example, the first and second actuators 48A, 48B may comprise electric motors, piezoelectric actuators, or other suitable actuator configurations. The first and second actuators 48A, 48B may also comprise position measurement devices that determine the angular orientation of the corresponding end effector relative to the second link 24 of the arm assembly. The active components of the first and second actuators, such as the stators of the electric motors, may be housed in an airtight enclosure 50 and separated from the passive components, such as the rotors of the electric motors, by a separating wall. A single airtight enclosure may be used for both actuators 48A, 48B. Alternatively, each actuator may be housed in its own airtight enclosure. The first and second actuators may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above.

[0069] The first and second actuators 48A, 48B may be controlled by a first controller 52. The first controller 52 may be connected to the second link of the arm assembly. The first controller may be housed in the same airtight enclosure 50 as the first and second actuators, or may be located in a separate airtight enclosure. The first controller may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process signals output by position sensing devices in the first and second actuators and output control signals to the first and second actuators, such as to energize windings of electric motors incorporated in the actuators. The first controller may be powered via a power distribution and communication subsystem and may be able to communicate with a robot controller.

[0070] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. The rotary coupling may transfer power from the robot controller to the first controller and other active components of the arm assembly, such as the gripper and sensors of the end effector. Alternatively, two separate controllers may be used, one for the first actuator 48A and one for the second actuator 48B.

[0071] Another embodiment of a vacuum-compatible robotic arm system of the present invention is shown in FIG. 13. In this example, the robotic system includes a drive unit 1318 having at least three axes of rotation and an arm assembly 1325 coupled to the drive unit. The arm assembly 1325 may include a first link 1322, a second link 1324, a third link 1326, and an end effector 1326. The first link 1322 may be directly coupled to the first axis of rotation of the drive unit, the second link 1324 may be coupled to the first link via a first rotary joint, and the third link 1326 may be coupled to the second link via a second rotary joint. The end effector may be coupled to the third link via a third rotary joint. The second link 1324 may be driven via a belt / band. The belt / band may include a first pulley 1334 attached to the second axis of rotation of the drive unit 1318. The first belt / band 1336 and second pulley 1338 may be attached to the second link 1324 of the arm assembly. The third link 1326 may be driven from the third axis of rotation of the drive unit through a two-stage belt / band drive. The first stage of the belt / band drive may include pulleys 1340 and 1342 and a belt / band 1344, and the second stage of the belt / band drive may include pulleys 1346 and 1348 and a belt / band 1350. Pulley 1340 may be driven directly from the third axis of rotation of the drive unit 1318. Pulleys 1338 and 1346 may be coupled to each other, and pulley 1348 may be attached to the third link 1326 of the arm assembly.

[0072] The end effector 26 may be operated by a first actuator 48. The first actuator may control the orientation of the end effector relative to the third link of the arm assembly. For example, the first actuator may include an electric motor, a piezoelectric actuator, or other suitable actuator configuration. The first actuator may also include a position measurement device 100 that determines the angular orientation of the end effector relative to the third link of the arm assembly. Active components of the first actuator, such as the stator of the electric motor, may be housed in an airtight enclosure 50 and may be separated from passive components, such as the rotor of the electric motor, by a separation wall. The first actuator 48 may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above.

[0073] The first actuator 48 may be controlled by a first controller 52. The first controller 52 may be connected to the third link of the arm assembly. The first controller may be housed in the same airtight enclosure 50 as the first actuator, or may be located in a separate airtight enclosure. The first controller 52 may be connected to a cooling subsystem, such as the exemplary cooling subsystem described above. The first controller 52 may process a signal output by the position sensing device 100 in the first actuator 48 and output a control signal to the first actuator 48, for example, to energize the windings of an electric motor incorporated in the actuator. The first controller 52 may be powered via a power distribution and communication subsystem 73 and may be able to communicate with a robot controller.

[0074] The power distribution and communication subsystem 73 may include an electrical rotary coupling located at or associated with each rotary joint of the robot manipulator. The rotary coupling may transfer power from the robot controller to the first control and other active components of the arm assembly, such as the gripper and sensors of the end effector.

[0075] In another embodiment of the arm assembly shown in FIG. 13 , the third link 1326 of the arm assembly may be actuated by an actuator integrated into the second link 1324. The actuator may control the orientation of the third link 1326 relative to the second link 1324 of the arm assembly. For example, the actuator may comprise an electric motor, a piezoelectric actuator, or any other suitable actuator configuration. The actuator may also comprise a position measurement device that determines the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight enclosure and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem.

[0076] 13, the third link 1326 of the arm assembly may be operated by an actuator integrated into the third link 1326. The actuator may control the orientation of the third link 1326 relative to the second link 1324 of the arm assembly.

[0077] Yet another exemplary embodiment of a vacuum-compatible robotic arm system is shown in Figures 14 and 15. In this example, the robotic system may include a drive unit 1318 having at least three axes of rotation and an arm assembly 1325 coupled to the drive unit. The arm assembly may include a first link 1322, a second link 1326, a third link 1326, and two end effectors 26A and 26B. The two end effectors 26A and 26B are referred to as the first end effector and the second end effector, respectively. The first link 1322 may be directly connected to a first axis of rotation of the drive unit, the second link 1324 may be connected to the first link via a first rotary joint, and the third link 1326 may be connected to the second link via a second rotary joint. The first and second end effectors 26A and 26B may be connected to the third link via third and fourth rotary joints, respectively.

[0078] The first end effector 16A may be actuated by a first actuator 48A. The first actuator may control the orientation of the first end effector relative to the third link of the arm assembly. Similarly, the second end effector 26B may be actuated by a second actuator 48B. The second actuator may control the orientation of the second end effector relative to the third link of the arm assembly. For example, the first and second actuators may comprise electric motors, piezoelectric actuators, or other suitable actuator configurations. The first and second actuators may also comprise position measurement devices that determine the angular orientation of the corresponding end effector relative to the third link of the arm assembly. The active components of the first and second actuators, such as the stator of the electric motor, may be housed in an airtight enclosure and separated from the passive components, such as the rotor of the electric motor, by a separating wall. A single airtight enclosure may be used for both actuators. Alternatively, each actuator may be housed in its own airtight enclosure. The first and second actuators may be connected to a cooling subsystem.

[0079] The first and second actuators 48A, 48B may be controlled by a first controller 52. The first controller 52 may be connected to the third link of the arm assembly. The first controller may be housed in the same airtight container 50 as the first and second actuators, or may be located in a separate airtight container. The first controller may be connected to the cooling subsystem described above. The first controller 52 may process signals output by position sensing devices in the first and second actuators and output control signals to the first and second actuators, for example, to energize windings of electric motors incorporated in the actuators. The first controller 52 may be powered via a power distribution and communication subsystem 73 and may be able to communicate with a robot controller.

[0080] The power distribution and communication subsystem may include an electrical rotary coupling disposed at or associated with each rotary joint of the robot manipulator. The rotary coupling may transmit power from the robot controller to the first controller and other active components of the arm assembly, such as the gripper and sensors of the end effector. Alternatively, two separate controllers may be used, one for the first actuator and one for the second actuator.

[0081] In yet another alternative embodiment of the arm assembly of FIG. 14 , the third link of the arm assembly may be operated by an actuator integrated into the second link. The actuator may control the orientation of the third link relative to the second link of the arm assembly. By way of example, the actuator may comprise an electric motor, a piezoelectric actuator, or any other suitable actuator configuration. The actuator may also comprise a position measurement device that determines the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight enclosure and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem as described above.

[0082] In yet another alternative embodiment of the arm assembly of FIG. 14 , the third link of the arm assembly may be operated by an actuator integrated into the third link. The actuator may control the orientation of the third link relative to the second link of the arm assembly. For example, the actuator may include an electric motor, a piezoelectric actuator, or other suitable actuator configuration. The actuator may also include a position measurement device to determine the angular orientation of the third link relative to the second link of the arm assembly. The active components of the actuator, such as the stator of the electric motor, may be housed in an airtight enclosure and separated from the passive components, such as the rotor of the electric motor, by a separation wall. The actuator may be connected to a cooling subsystem, such as the exemplary cooling subsystems described above. FIG. 15 illustrates the assembly 1325 in an apparatus 1510 that includes a process module 14 and a load lock 16.

[0083] In another exemplary embodiment having some of the features, the configurations for end effector phasing and movement described above may be used in a dual-arm robotic manipulator. The configurations for end effector phasing may be used in both arms / end effectors of the dual-arm robotic manipulator, or may be used in only one arm / end effector of the dual-arm robotic manipulator.

[0084] As shown in Figures 16A, 16B, and 16C, the exemplary arm assembly described above may use a dual substrate side-by-side end effector. In one embodiment, the dual substrate side-by-side end effector 1626 may include two substantially fixed substrate holders 1628A, 1628B. In another embodiment, the two substrate holders 1628D, 1628E may be configured to be movable, allowing active adjustment of the relative distance between the two substrate holders and / or the relative orientation of the substrate holders. Figure 16C shows a robot arm assembly with an arm 1626 for use in an apparatus including a vacuum chamber 1615, a process module 1614, and a load lock 1616.

[0085] Referring now to FIG. 17, a schematic diagram of the drive unit 18 and cooling system of FIG. 8 is shown in conjunction with the arm 1225 of FIG. 12. The power coupling may be a non-contact inductive transformer, providing power and / or communication signals in a non-contact manner. Alternatively, power and / or data may be transmitted via contact or other suitable slip rings or couplings. The non-contact optical feedthrough 130 includes first and second fiber optic channels 132, 134, which provide high-speed communication to a controller 136 of the link 22. Here, the controller 136 may include an optical device, Ethercat®, or other suitable converter 138. Alternatively, the converter 138 and feedthrough 130 may be electromagnetically inductive, e.g., a coupler transmitting both power and CAN or other high-frequency signals or data. These may be used in conjunction with wires, flexures, or other means. A suitable non-contact optical feedthrough may utilize a fixed grin lens and a fixed mirror. An example of such a feedthrough is provided by Moog Components Group and is suitable for vacuum applications. Alternatively, any suitable coupling or feedthrough may be used. Here, non-contact fiber optic high-speed communications are connected to a non-contact rotary power supply controller 136, which is required to drive the arm. In addition to the high-speed communications coupling, a non-contact inductive power coupling may also be provided. Module 136 may also include control and motor drive circuitry, a position-encoded readhead, and inputs / outputs for external devices. Such external devices may be a thermoelectric cooler 148, another readhead, a distal grip actuator, or other devices. For example, encoders 150, 152 may be directly coupled to the wrist joint associated with end effector 26A, 26B and coupled to a readhead associated with module 136. Similarly, edge detection, edge grip, and edge placement devices 154, 156 may also be connected to end effector 26A, 26B and associated with module 136.

[0086] In the described embodiments, encoders may be provided at some or each of the joints, and motors may be provided at some or each of the joints. A combination of motors, encoders, and controllers may be provided at some or each of the joints. In other embodiments, components such as those in the module 136 may be exposed or encapsulated. If encapsulated, they may be encapsulated in a sealed metal enclosure, the arm body 112, a partially metal enclosure, or a combination thereof. Power and communication may be provided using cables and fixed feedthroughs, non-contact magnetic slip rings, contact slip rings, individual bearings, flexures, or other means, or a combination thereof. Heat sinking may be achieved by radiative cooling, convection, or conduction. For example, a coolant may pass through the feedthrough, be stationary, or circulate. In other embodiments, one or more axes may have feedthroughs, such as magnetic fluid seals or other suitable seals. In other embodiments, the drive section may have multiple arms, concentric or offset, each with one or more or all of the independently driven axes. Additionally, more or fewer coolers may be used. For example, multiple thermoelectric coolers may be omitted, additional thermoelectric coolers may be provided, and a heat pump may be provided to move and dissipate heat from one part of the arm or drive section to another.

[0087] Reference is now made to FIG. 18, which shows a schematic diagram of a transport device with rotary and vertical drive using optical feedthrough 1812 and rotary thermal feedthrough as described in connection with FIG. 17. Rotor 1816 includes two independently movable arms 1818, 1820, each driven by rotary drives 1822, 1824. Rotary drives 1822, 1824 in turn include optical couplings 1826, 1828 and thermal couplings 1830, 1832, respectively. In alternative embodiments, the arms and axes may be driven directly or remotely, and may have more or fewer arms and axes. In this embodiment, heat is dissipated through a series of joints and a series of thermal couplings, i.e., 1830 to 1831 and 1832 to 1831, respectively. In alternative embodiments, the number of joints may be more or fewer. For example, there may be two or more arms that can move independently on one axis or some or all of multiple axes, each arm having a main link driven concentrically about a common axis or other suitable configuration.

[0088] Reference is now also made to FIG. 19, which shows a block diagram of an exemplary system 400. System 400 includes a vacuum chamber 402 and first and second transports 404, 406. Here, transport 404 is a combination linear and rotary drive, which may be used in a linear tool arrangement such as 400. Reference is now also made to FIG. 20, which shows system 410. System 410 includes a vacuum chamber 412 and transports 414, 416, 418, and 420. The illustrated embodiment is merely exemplary. Accordingly, combinations of linear robots, such as the illustrated robot, fixed robots, and other robots may be used, with more or fewer axes. For example, multiple fixed robots may be used with one or more transport chambers, each equipped with a single-axis or multi-axis linear shuttle having the characteristics described above.

[0089] Reference is now also made to FIG. 21, which shows a cross-sectional view of system 400. Chamber 402 includes slots 430, 432 for inserting and removing substrates. The transport or robot drive includes a drive section 434 and an arm section 436, which may include the features described above or may be a SCARA-type arm driven by drive section 434. Reference is now also made to FIG. 22, which shows a partial cross-sectional view of system 400. Drive section 434 is shown with slides 440, 442 mounted to the floor of chamber 402. In alternative embodiments, drive section 434 may be connected to an intermediate plate or other component. Slides 440, 442 may be conventional linear slide structures, or may be magnetic suspension, non-contact slides, active, passive, or other structures. While the illustrated embodiment does not require feedthroughs and / or service loops for operation, cooling, power, etc., alternative embodiments may include one or more feedthroughs and / or service loops. The slides 440, 442 are mounted to a base or thermally conductive plate 444. Here, heat generated by components of the drive unit 434 is dissipated to the base 444. Alternatively, other heat generated by the components may be dissipated to the base 444 or another component, or may not be dissipated elsewhere. In this case, heat generated by the components may be dissipated to the surroundings by radiation or other mechanisms. The base 444 and the components mounted thereon may traverse the slides 440, 442 to selectively access slots in the chamber 402 of the system 400. Power and / or communications may be provided by an electromagnetic induction coupling 446. Here, the electromagnetic induction coupling 446 may include a base coupling 448 connected to the chamber 402 and a pickup 450 connected to the plate 444. The base coupling 448 may provide power and / or communications to the pickup 450 along the entire length of the chamber 402 or a portion thereof, regardless of where the drive unit 434 selectively traverses. Couplings 446 may be numerous or in a few configurations, in series, parallel, or other arrangements, to operate one or more drives simultaneously or individually.Alternatively, any suitable coupling may be used, such as the couplings described above, or a flexure-based coupling for short distances such as communications. A linear drive module 452 with a fixed plate 454 spans the base 444. The fixed plate is connected to the chamber 402 and operates one or more drives through the chamber length and a forcer 456 connected to the base 444. Here, module 452 may be any suitable linear electric drive, such as a brushless linear motor with an active platen with a magnet, a passive platen without a magnet, or the like. Drive module 452 may also include position sensing devices such as electromagnetic induction, optical, incremental, absolute, or other types. Here, a read head may be packaged with or near the forcer 456. A read track may be packaged with or near the platen 454 or the chamber 402. Heat is transferred from a sink 458 attached to the base 444 to a sink 460 attached to the chamber 402. Here, each sink has an interleaved surface to form a radiative coupling, and sink 460 may be aligned along the length of chamber 402. Drive 434 includes active components that may generate heat, such as motor windings, encoder readheads, brakes, controllers, amplifiers, Ethercat® optical elements, rectifiers, power conditioners, or any other suitable heat-generating or heat-sensitive components. These components may be thermally coupled to or heat-sinked by base 444. Such base 444 may dissipate heat via couplings 458, 460, etc. These components may be fully or partially enclosed in an enclosure or potted in resin. Such enclosures, potting, or other suitable structures or couplings transfer thermal energy to base 444. For example, forcer 456 may directly radiate heat to base 444. Linear motor 456 may include a magnet mounted on a stationary platen. It may also include a magnetless passive platen as described in U.S. Patent No. 7,800,256, which is incorporated herein by reference in its entirety.As a further example, the rotary and vertical power elements of drive section 434 may be housed, recessed, or otherwise radiated to base 444 as previously described.

[0090] In this exemplary embodiment, the exemplary arm 436 may be a SCARA-type arm with passive components, such as bands and pulleys, and active components, such as encoders and motors. The rotary / vertical portion of the drive unit 434 includes a vertical actuator 462, such as a lead screw drive, and first and second rotary drives 464, 466. A screw 470 drives a nut 468 of the drive unit 462, which connects to a shaft 472 of the rotary drive unit 466. The shafts 472, 472 are operatively coupled to the arm 436, allowing vertical, rotational, and radial movement. The shafts 472, 472 are operatively coupled to shafts 476, 478 of the drive units 466, 464 by a prismatic joint. The prismatic joint acts to resist rotation, allowing torque transmission with free and vertical movement while keeping the active components below the drive unit 434 fixed relative to the base 444. Here, the drives 462, 464, 466 may include active components such as motor windings 480, read head 482, electronics assembly 484, brake windings 486, or other active components that dissipate heat from the base 444 as described above. As previously discussed, high speed communication may be achieved through connection 446 or one or more optical connections 488, 490. Such connections may interface with corresponding connections in chamber 402 along intersecting axes of motion. Alternatively, any suitable combination of the modules and components described herein may be used.

[0091] Reference is now also made to FIG. 23, which illustrates a drive 600 incorporating several of the described embodiments in a retracted position. Reference is now also made to FIG. 24, which illustrates a drive 600 incorporating several of the described embodiments in an extended position. The drive 600 includes four end effectors 602, 604, 606, and 608 that move independently in a radial direction. End effectors 602 and 606 are linearly mounted to linear drive 610, and end effectors 604 and 608 are linearly mounted to linear drive 612. Linear drive 610 is mounted to rotary drive 614, which is mounted to rotary drive 616. Rotary drives 614 and 616 can rotate independently. Two processed substrates S may now be picked and two unprocessed substrates S' may be placed. For example, a substrate may be placed at two locations simultaneously, separate from other substrates, and error correction may be performed independently of each other in the air.

[0092] Reference is now made to FIG. 25, which illustrates a cross-sectional view of system 600. Each of linear drives 610, 612 drives two independent linear drive motors to drive associated end effectors 602, 606, 604, and 608, respectively. Linear drives 610, 612 and rotary drives 614, 616 may include features described herein and / or disclosed with respect to other aspects of the described embodiments. In this exemplary embodiment, drive 600 includes four linear motors 620. In this exemplary embodiment, drive 600 includes four power and communication connections and linear position sensors 622. Transfers 624 are also provided at four locations. Rotary drives 626 are provided at two locations with position encoders and power and communication connections. A communication link 628 is also provided. A heat exchanger 630 is provided in conjunction with an external heat exchanger 632.

[0093] Reference is now made to Figures 26-18, which show various schematic diagrams of a linear platform with three-link arm robots 700, 800. Each arm robot has two independently movable end effectors 804. The robot 700 (800) is shown within a vacuum chamber 715 that includes a process chamber 14 and a load lock 16. The lock 16 may be a single load lock or a stack of load locks. Alternatively, one or more load locks may be located adjacent to the lock 16 or at other locations. In this embodiment, seven process modules 14 are shown. More or fewer process modules may be used. The process modules 14 may process single wafers or multiple wafers, for example, with stacks or batches of wafers in a carousel format, or in stacks of subordinate or independent process modules. As shown in this embodiment, the robot 700 may access the modules 14, 16 independently. Here, three opposing sets of modules are shown along the length of the linear platform, with a set of opposing modules at each end of the linear platform. There may be more or fewer process modules, located opposite each other, at opposite ends, or elsewhere. Alternatively, one or more platforms may be coupled together, one of which may be dedicated to wafer delivery. Wafers are processed and transported through one or more subsequent platforms and removed through the end of the delivery platform or intermediate platform. Dual end effectors are shown in each module to enable rapid swapping, with one end picking the substrate to be processed and the other placing the unprocessed substrate. Alternatively, a single end effector, multiple end effectors, or other suitable end effectors may be used. While only one robot 700 is shown, multiple robots may be used. In this way, more process modules may be accessed, resulting in higher process capabilities depending on the required throughput. While a three-link robot is shown, any suitable robot, such as those described above, or otherwise, may be used.For example, dual-arm robots, robots with any number of links, and robots with a combination of rotary and linear links and joints may be used. Reference is now also made to Figures 29-30, which show various schematic diagrams of a linear platform with a three-link arm robot 802 with dual end effectors 806. The end effectors may be fixed relative to one another or may be independently movable. The robot 802 is shown within a vacuum chamber having a process chamber and load locks, each of which processes two substrates. The locks may be a single load lock supporting two substrates or stacked load locks. Alternatively, one or more load locks may be located adjacently or in other locations. In this embodiment, seven process modules are shown. More or fewer process modules may be used. The process modules may process two or more wafers, for example, with stacked or batched wafers in a carousel fashion, or with subordinate or independent process modules in a stack. As shown in this embodiment, the robot 802 may access the modules independently. Here, three sets of opposing modules are shown along the length of the linear platform, with one set at each end of the linear platform. There may be more or fewer process modules at either end or at other locations. Alternatively, one or more platforms may be coupled together, one of which may be dedicated to wafer delivery. Wafers are processed and transported through one or more subsequent platforms and removed through the end of a delivery platform or intermediate platform. The dual end effector shown can pick or place two substrates simultaneously. Additional end effectors may also be used in each module to enable rapid swapping, with one end effector picking a set of processed substrates and the other placing a set of unprocessed substrates. Alternatively, a single end effector, multiple end effectors, or other suitable end effectors may be used. While only one robot 800 is shown, multiple robots may be used.In this way, more process modules may be accessed, resulting in higher process capacity depending on the required throughput. Although a three-link robot is shown, any suitable robot, such as those described above or otherwise, may be used. For example, dual-arm robots, robots with any number of links, and robots with a combination of rotary and linear links and joints may be used.

[0094] In one type of exemplary embodiment, the apparatus 25 may include a frame having at least three sections, a first position sensor 98 or 100, and an airtight enclosure 50. The three sections include an end effector 26 and at least two links 22, 24 forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substantially planar substrate. A first position sensor is located in the frame adjacent the first joint and configured to sense the relative position of two of the sections. An airtight enclosure is provided on the movable arm, and the first position sensor is at least partially or completely enclosed within the airtight enclosure.

[0095] The apparatus may also include a drive 18 coupled to the frame and configured to drive the movable arm. The apparatus may also include a vacuum chamber 15, with the frame disposed within the vacuum chamber and the drive penetrating the wall of the vacuum chamber. The apparatus may also include a heat conduction system (see, e.g., FIG. 8) in the drive, configured to conduct heat from the movable arm to a location remote from the arm. The apparatus may also include controllers 52 and / or 54 connected to the drive and / or a first position sensor. The first position sensor may be remote from the drive. The first position sensor may include a position-detecting encoder. The apparatus also includes a second position sensor. The second position sensor may be disposed on the frame proximate the second joint and configured to detect the relative positions of the two of the portions. The apparatus also includes an electric actuator 48 disposed on the frame. The electric actuator may be at least partially enclosed in an airtight enclosure 50 or completely enclosed in a second airtight enclosure. The first position sensor may be an optical encoder, with an optical fiber member 73B extending from the first position sensor through the airtight enclosure 50. The apparatus may also include a controller 52 on the frame connected to the optical encoder, the controller 52 being at least partially enclosed within the airtight enclosure 50 or completely enclosed within a second airtight enclosure, which may be at least partially formed by one of the links 22, 24 of the frame. The apparatus may also include at least one electrical conductor passing through the airtight enclosure.

[0096] The heat transfer system may include a first heat transfer member 146 and a second heat transfer member 144 connected to the first portion 1840 of the drive unit. The second heat transfer member 144 is positioned in association with the first heat transfer member to receive heat therefrom. The first heat transfer member 146 is movable relative to the second heat transfer member when the first portion 1840 of the drive unit moves.

[0097] The heat transfer system may include a first set of heat conduction members 1830 and a second set of heat conduction members 1832 spaced apart. The first set of heat conduction members 1830 includes a first heat conduction member 1842 connected to a first portion of the drive section 1844 and a second heat conduction member 1846. The second heat conduction member 1846 is positioned relative to the first heat conduction member 1842 and receives heat therefrom. The first heat conduction member 1842 is movable relative to the second heat conduction member when the first portion of the drive section 1844 moves. The second set of heat conduction members may include a third heat conduction member 1848 and a fourth heat conduction member 1852 connected to a second portion of the drive section 1850. The fourth heat conduction member 1852 is positioned relative to the third heat conduction member and receives heat therefrom. The third heat conduction member 1848 is movable relative to the fourth heat conduction member when the second portion of the drive section 1850 moves. The heat transfer system may also include a third set of heat transfer members. The third set of heat transfer members includes a fifth heat transfer member 146 and a sixth heat transfer member 144 connected to the third portion of the drive unit 1840. The sixth heat transfer member 144 is disposed in association with the fifth heat transfer member 146 and receives heat therefrom. The fifth heat transfer member 146 is movable relative to the sixth heat transfer member 144 when the third portion of the drive unit 1840 moves. The second and fourth heat transfer members 1846, 1852 may be supported by the third portion of the drive unit 1840. The apparatus may be a planar substrate transfer robot configured to move a planar substrate within a vacuum chamber with an end effector.

[0098] In another exemplary embodiment, the apparatus 12 may include an electric device 48 and / or 52 and / or 100, a frame 25, a drive unit 18, and a heat conduction system. The frame 25 mounts the electric device. The frame 25 also has at least three sections, including an end effector 26 and at least two links 22, 24 forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substantially planar substrate. The drive unit is connected to the movable arm and configured to drive the movable arm. The heat conduction system may be provided in the drive unit (see, e.g., FIG. 8 ) and configured to conduct heat from the movable arm to a location remote from the arm.

[0099] In yet another exemplary embodiment, the apparatus 12 may include a frame having at least three sections, a first position sensor 100, and a communication link 73. The three sections include an end effector 26 and at least two links 22, 24 forming a movable arm. The end effector and the links are connected by a movable joint, and the end effector is configured to support a substantially planar substrate. A first position sensor is located on the frame proximate the first joint and configured to sense the relative positions of two of the sections. The communication link is configured to transmit signals from the first position sensor to a device remote from the movable arm through the airtight enclosure.

[0100] The term "joint" should be considered broadly. For example, the joint may be a revolute joint, a prismatic joint, or any other suitable type of joint. Similarly, the terms "link" and "member" should be considered broadly to include composites of multiple connected elements. That is, any suitable link or member may be used.

[0101] It should also be understood that the foregoing description is merely illustrative. Numerous variations and modifications will occur to those skilled in the art. For example, features recited in the various dependent claims may be combined with each other in any suitable combination. In addition, features from the various embodiments described above may be selectively combined to form new embodiments. Accordingly, this application is intended to embrace all such variations, modifications, and variations that fall within the scope of the appended claims.

Claims

1. 1. An apparatus comprising: a substrate transfer chamber having a first side having a substantially straight side configured to be connected to at least two substrate processing chambers; a robot connected to the substrate transfer chamber; and a robot controller, the robot includes a drive unit and an arm unit connected to the drive unit; the arm portion has at least two arm links and at least two end effectors connected in series, a first arm link of the at least two arm links is connected to the drive unit, and the at least two end effectors are connected to ends of other arm links of the at least two arm links, and the at least two end effectors each have a substrate support region; a first end effector of the at least two end effectors is pivotally connected to an end of the other arm link by a first rotary joint; a second end effector of the at least two end effectors is pivotally connected to an end of the other arm link by a second rotary joint; the first end effector and the second end effector are rotatable independently of each other at the end of the other arm link, the drive unit is installed at a single fixed position in the substrate transfer chamber; the at least two end effectors are configured to be controlled by a controller mounted on the other arm link, whereby the arm is configured to move the at least two end effectors into and out of at least two substrate processing chambers connected to the first side of the substrate transport chamber; the control unit is capable of communicating with the robot controller and is configured to receive power from the robot controller; the at least two substrate processing chambers are aligned in series along the first side surface of the substrate transfer chamber; the single fixed position of the substrate transfer chamber, where the drive unit is installed, is located between the first side surface and a second side surface of the substrate transfer chamber that is opposite to the first side surface, and is closer to the first side surface than the second side surface; Device.

2. 2. The device of claim 1, wherein the arm comprises a first actuator in the other arm link configured to pivot the first end effector relative to the other arm link, and a second actuator configured to pivot the second end effector relative to the other arm link.

3. The apparatus of claim 2 , wherein the first actuator and the second actuator each comprise an electric motor.

4. The apparatus of claim 3 , wherein the electric motor is located within at least one airtight enclosure.

5. The apparatus of claim 1 , wherein the at least two arm links comprise at least three arm links.

6. 2. The apparatus of claim 1, wherein the arms are configured to move the at least two end effectors in and out of at least three of a plurality of substrate processing chambers connected to the substrate transfer chamber, the at least three substrate processing chambers being aligned in a straight line along a planar side of the substrate transfer chamber.

7. 2. The apparatus of claim 1, wherein the arm comprises a first pulley connected to the drive, a second pulley connected to the other arm link, and a mechanical transmission band connecting the first pulley to the second pulley, the second pulley being fixed to the other arm link.

8. The apparatus of claim 1 , wherein the at least two arm links include only two arm links.

9. The apparatus of claim 1 , wherein the first revolute joint and the second revolute joint have coaxial axes of rotation at the end of the other arm link.

10. 2. The apparatus of claim 1, wherein the arms are configured to move the at least two end effectors into and out of two more substrate processing chambers among a plurality of substrate processing chambers connected to the substrate transfer chamber, the two more substrate processing chambers being aligned in series along the second side.

11. the at least two arm links include only two arm links; the arm has a first pulley connected to the drive unit, a second pulley connected to the other arm link, and a mechanical transmission band connecting the first pulley to the second pulley, the second pulley being fixed to the other arm link; the arm section has a first actuator in the other arm link configured to rotate the first end effector relative to the other arm link, and a second actuator configured to rotate the second end effector relative to the other arm link; the first actuator and the second actuator each include an electric motor; the electric motor is located within at least one airtight enclosure; 11. The apparatus of claim 10.

12. 11. The apparatus of claim 10, wherein the arms are configured to move the at least two end effectors in and out of at least three of a plurality of substrate processing chambers connected to the substrate transfer chamber, the at least three substrate processing chambers being aligned in a straight line along a planar side of the substrate transfer chamber.

13. the at least two arm links include at least three arm links; the arm portion has a first pulley connected to a rotation shaft of the drive portion, a second pulley, and a mechanical transmission band connecting the first pulley to the second pulley; the arm section has a first actuator in the other arm link configured to rotate the first end effector relative to the other arm link, and a second actuator configured to rotate the second end effector relative to the other arm link; the arm is configured to move the at least two end effectors into and out of at least three of a plurality of substrate processing chambers connected to the substrate transfer chamber, the at least three substrate processing chambers being aligned in a straight line along a planar side surface of the substrate transfer chamber; the first actuator and the second actuator each include an electric motor; the electric motor is located within at least one airtight enclosure; 11. The apparatus of claim 10.

14. An apparatus comprising: a robot driving unit; a robot arm connected to the robot driving unit; and a robot controller, wherein the robot arm: a first arm link having a first end configured to be pivotally connected to a robot drive; a second arm link pivotally connected to a second end of the first arm link; a first transmission unit in the first arm link configured to rotate the second arm link relative to the first arm link and configured to be moved by the robot drive unit; at least two end effectors connected to the second arm link, each end effector having at least one substrate support area; Equipped with a first end effector of the at least two end effectors pivotally connected to the second arm link by a first rotary joint; a second end effector of the at least two end effectors is pivotally connected to the second arm link by a second rotary joint; the first end effector and the second end effector are rotatable independently of each other on the second arm link, the first end effector and the second end effector are configured to be controlled by a control unit mounted on the second arm link, the control unit is capable of communicating with the robot controller and is configured to receive power from the robot controller; the robot drive is connected to the substrate transfer chamber at a single, fixed location on the substrate transfer chamber; the substrate transfer chamber has a first side to which a plurality of substrate processing modules are connected, and the robot arm is configured to at least partially enter and exit the substrate processing modules at the first side while the robot drive is in the single fixed position; the single fixed position of the substrate transfer chamber, at which the robot drive unit is installed, is closer to the first side surface than a second side surface opposite the first side surface; Device.

15. 1. An apparatus comprising: a substrate transfer chamber having a first side configured to be connected to at least two substrate processing chambers; a robot connected to the substrate transfer chamber; and a robot controller, the robot includes a drive unit and an arm unit connected to the drive unit; the arm portion has at least three arm links connected in series and at least one end effector, a first arm link of the at least three arm links is connected to the drive unit, the at least one end effector is connected to an end of another arm link of the at least three arm links, and the at least one end effector has at least two substrate support regions; the at least one end effector is pivotally connected to an end of the other arm link; the drive unit is installed at a single position in the substrate transfer chamber; the at least one end effector is controlled by a controller mounted on the arm, whereby the arm is configured to move the at least one end effector into and out of the at least two substrate processing chambers; the control unit is capable of communicating with the robot controller and is configured to receive power from the robot controller; the single position is located between the first side surface and a second side surface of the substrate transfer chamber opposite the first side surface, and is closer to the first side surface than the second side surface; Device.

16. The apparatus of claim 15 , wherein the at least two substrate support regions are located at opposite ends of the at least one end effector.

17. 16. The apparatus of claim 15, wherein the arm comprises a first actuator configured to cause the other arm link to rotate the at least one end effector, the first actuator comprising an electric motor.

18. 20. The apparatus of claim 17, wherein the electric motor is located within at least one airtight enclosure.

19. 16. The apparatus of claim 15, wherein the arm includes a first pulley connected to the drive, a second pulley, and a mechanical transmission band connecting the first pulley to the second pulley.

20. a first end effector of the at least one end effector is pivotally connected to the end of the other arm link by a first rotary joint, and a second end effector of the at least one end effector is pivotally connected to the end of the other arm link by a second rotary joint; the first end effector and the second end effector are rotatable independently of each other at the end of the other arm link, and the first rotary joint and the second rotary joint have a coaxial rotation axis at the end of the other arm link.

16. The apparatus of claim 15.

21. 21. The apparatus of claim 20, wherein the arm is configured to move the first end effector and the second end effector into and out of two more substrate processing chambers of a plurality of substrate processing chambers connected to the substrate transfer chamber, the two more substrate processing chambers being aligned in series along the second side.

22. the arm portion has a first pulley connected to a rotation shaft of the drive portion, a second pulley, and a mechanical transmission band connecting the first pulley to the second pulley; the arm section has a first actuator in the other arm link configured to rotate the first end effector relative to the other arm link, and a second actuator configured to rotate the second end effector relative to the other arm link; the arm is configured to move the first end effector and the second end effector into and out of at least three of the plurality of substrate processing chambers attached to the substrate transfer chamber; the first actuator and the second actuator each include an electric motor; the electric motor is located within at least one airtight enclosure; 22. The apparatus of claim 21.

23. 1. An apparatus comprising: a substrate transfer chamber having a first side configured to connect at least two substrate processing chambers; a robot; and a robot controller, the robot includes a drive unit and an arm unit connected to the drive unit; the arm portion has at least three arm links connected in series and at least one end effector, a first arm link of the at least three arm links is connected to the drive unit, the at least one end effector is connected to an end of another arm link of the at least three arm links, and the at least one end effector has at least two substrate support regions; the at least one end effector is pivotally connected to an end of the other arm link; The drive unit is fixedly installed at a single position in the substrate transfer chamber, the at least one end effector is controlled by a controller mounted on the other arm link, whereby the arm is configured to move the at least one end effector into and out of at least two substrate processing chambers attached to a first side of the substrate transport chamber; the control unit is capable of communicating with the robot controller and is configured to receive power from the robot controller; the single position is located between the first side surface and a second side surface of the substrate transfer chamber opposite the first side surface, and is closer to the first side surface than the second side surface; Device.

24. The apparatus of claim 1 , wherein the substrate transfer chamber is a vacuum chamber.

25. 2. The apparatus of claim 1, wherein the substrate transfer chamber has a third side between the first side and the second side, the third side having at least one load lock, and the arm is configured to move at least one of the at least two end effectors into and out of the at least one load lock.

26. at least two additional substrate processing chambers are connected to the second side of the substrate transfer chamber, and the robot is configured to move the end effector in and out of both the substrate processing chambers on the first side and the substrate processing chambers on the second side.

10. The apparatus of claim 1.

27. at least two additional substrate processing chambers are connected to the second side of the substrate transfer chamber, and the robot is configured to move the at least one end effector in and out of both the substrate processing chambers on the first side and the substrate processing chambers on the second side.

16. The apparatus of claim 15.

28. the substrate transfer chamber is a vacuum chamber; the substrate transfer chamber has a third side between the first side and the second side, the third side having at least one load lock, and the arm is configured to move the at least one end effector into and out of the at least one load lock.

16. The apparatus of claim 15.

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