Image Sensor Structure

Abstract

An image sensor structure including an image stack disposed above a device stack. The image stack includes a plurality of photodetectors. A first optical filter stack is disposed above the image stack. The first optical filter stack includes a light guide layer. Light pipe cavities are disposed within the light guide layer. Each light pipe cavity is associated with a photodetector. Each light pipe cavity has an aspect ratio greater than about 2.5 to about 1. A nanowell layer is disposed above the first optical filter stack. Nanowells are disposed within the nanowell layer. Each nanowell is associated with a photodetector.

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS) This patent application claims priority to U.S. Provisional Patent Application No. 62 / 912,908, entitled "Image Sensor Structure," filed October 9, 2019. The entire contents of the aforementioned application are incorporated herein by reference. [Background technology]

[0002] Image sensor structures, such as CMOS image sensors, often utilize multiple high-density nanowells arranged in a nanowell layer to perform a reaction on an analyte disposed in the nanowell. The nanowell layer is disposed on the front or back side of the image sensor structure, and the image sensor structure collects and analyzes data from the reaction. For example, the analytes (e.g., clusters of DNA segments) may be tagged with fluorescent labels, and excitation light may be directed to the labeled analytes to cause them to fluoresce and emit emitted light.

[0003] The analyte may then emit photons of fluorescent emission light, which may be transmitted from the nanowell to a plurality of photodetectors (e.g., photodiodes) associated with the nanowell. The photodetectors detect the emission light photons. Device circuitry may be connected to the photodetectors from within the device stack. The device circuitry may then process and transmit a data signal based on those detected photons. The data signal may then be analyzed to reveal a characteristic of the analyte.

[0004] In a front side illuminated (FSI) image sensor structure, a nanowell layer is disposed on the front side of the image sensor structure, and the nanowell layer is illuminated by excitation light. In an FSI image sensor structure, a device stack is positioned between the nanowell layer and multiple photodetectors. However, in such an image sensor structure, a portion of the active (e.g., light-sensing) area of ​​the photodetectors may be blocked by device circuitry in the device stack. As the size and pitch of the photodetectors become smaller, the portion of the active area blocked by the device stack increases, which may reduce the sensitivity of the photodetectors.

[0005] In a backside illuminated (BSI) image sensor structure, the nanowell layer is disposed on the backside of the image sensor structure, and the nanowell layer is illuminated by excitation light. In a BSI image sensor structure, the device stack is not positioned between the nanowell layer and the multiple photodetectors. Therefore, the device stack may not block the active areas of the photodetectors.

[0006] However, in FSI image sensor structures, device circuitry in the device stack is often used to help reduce crosstalk. Such device circuitry may not be available to help reduce crosstalk in BSI image sensor structures. Crosstalk includes emission light transmitted from a nanowell that is unintentionally detected by a photodetector not associated with the nanowell.

[0007] Also, unlike FSI image sensor structures, device stacks may not be available in BSI image sensor structures to help sufficiently block excitation light from reaching the photodetector. Furthermore, device stacks may not be available in BSI image sensor structures to help efficiently collect and focus emission light emitted from the nanowells onto the photodetector. Summary of the Invention

[0008] Embodiments provided herein can overcome the aforementioned challenges. For example, in one embodiment, a BSI image sensor structure is provided that reduces crosstalk between nanowells and unassociated photodetectors without the aid of a device stack. Furthermore, in another embodiment, a BSI image sensor structure is provided that can sufficiently block excitation light from a photodetector and efficiently collect and focus emission light onto the photodetector without the aid of a device stack.

[0009] The present disclosure offers advantages and alternatives over the prior art by providing an image sensor structure that can reduce crosstalk between nanowells disposed within the image sensor structure and unassociated photodetectors without the aid of a device stack when illuminated with excitation light directed toward the nanowells from the backside of the image sensor structure. In addition, light pipe cavities disposed within the image sensor structure have aspect ratios and sidewall angles that are sized to adequately block excitation light and efficiently collect emission light without the aid of a device stack. Furthermore, the aspect ratio is not too large and the sidewall angle is not too small so that the image sensor structure cannot be reliably manufactured.

[0010] An image sensor structure according to one or more aspects of the present disclosure includes an image stack disposed above a device stack. The image stack includes a plurality of photodetectors. A first optical filter stack is disposed above the image stack. The first optical filter stack includes a light guide layer and a plurality of light pipe cavities disposed within the light guide layer. Each light pipe cavity of the plurality of light pipe cavities is associated with one photodetector of the plurality of photodetectors. Each light pipe cavity has an aspect ratio greater than about 2.5 to 1. A nanowell layer is disposed above the first optical filter stack. A plurality of nanowells are disposed within the nanowell layer. Each nanowell is associated with one photodetector of the plurality of photodetectors.

[0011] In some embodiments, the light pipe cavity of the image sensor structure has a sidewall angle in the range of about 11 to about 1.2 degrees.

[0012] In some embodiments, the image sensor structure includes an optical filter material disposed within the light pipe cavity, the optical filter material being in direct contact with the light guide layer at the sidewalls of the light pipe cavity.

[0013] In some embodiments, the image sensor structure includes a second optical filter stack disposed above the first optical filter stack, the first optical filter stack and the second optical filter stack having an overall aspect ratio that is greater than the aspect ratio of either one of the first filter stack and the second filter stack.

[0014] In some embodiments, the light guide layer of the image sensor structure comprises one of a polymer material, a semiconductor material, and a dielectric material.

[0015] In some embodiments, the first optical stack of the image sensor structure includes an intermediate layer disposed above the image stack, and a light guide layer disposed above the intermediate layer. The light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity and not on the bottom surface of the light pipe cavity. The light guide layer has a thickness of about 100 nanometers or less.

[0016] In some embodiments, an image stack of an image sensor structure includes a substrate layer, a plurality of isolation trenches, and a dielectric material. The substrate layer is disposed over the plurality of photodetectors. The substrate layer acts to pass emission light and excitation light. The plurality of isolation trenches are disposed within the substrate layer. Each isolation trench is disposed adjacent to one photodetector of the plurality of photodetectors. A dielectric material is disposed within each isolation trench. The dielectric material acts to electrically isolate each photodetector of the plurality of photodetectors.

[0017] In some embodiments of the image sensor structure, the intermediate layer disposed in the first optical filter stack and the substrate layer in the image stack are composed of the same material.

[0018] In some embodiments of the image sensor structure, the intermediate layer and the substrate layer are composed of silicon.

[0019] In some embodiments, the image sensor structure includes a light guide layer composed of an optically absorbing material, and an optically transparent material disposed within the light pipe cavity, the optically transparent material having a refractive index greater than the refractive index of the optically absorbing material.

[0020] In some embodiments, the image sensor structure includes a crosstalk layer, a crosstalk curtain, a diffusing layer, and a light pipe extension. The crosstalk layer is disposed above the top surface of the optical filter stack between one or more of the light pipe cavities. The crosstalk curtain extends down from the top surface of the optical filter stack between one or more of the light pipe cavities. The diffusing layer is disposed between the optical filter stack and the image stack. The light pipe extension is disposed at the bottom of one or more of the light pipe cavities. The light pipe extension extends through the diffusing layer.

[0021] Another image sensor structure according to one or more aspects of the present disclosure includes an image stack disposed above the device stack. The image stack includes a plurality of photodetectors. A first optical filter stack is disposed above the image stack. The first optical filter stack includes a light guide layer, a plurality of light pipe cavities disposed within the light guide layer, and an optical filter material disposed within the light pipe cavities. Each light pipe cavity is associated with one of the plurality of photodetectors. The optical filter material is in direct contact with the light guide layer at a sidewall of the light pipe cavity. A nanowell layer is disposed above the first optical filter stack. A plurality of nanowells are disposed within the nanowell layer. Each nanowell is associated with one of the plurality of photodetectors.

[0022] In some embodiments of the image sensor structure, the light pipe cavity has an aspect ratio greater than about 2.5 to about 1.

[0023] In some embodiments of the image sensor structure, the light pipe cavity has a sidewall angle in the range of about 11 to about 1.2 degrees.

[0024] In some embodiments of the image sensor structure, the light guide layer comprises one of a polymer material, a semiconductor material, and a dielectric material.

[0025] In some embodiments of the image sensor structure, the first optical filter stack includes an intermediate layer disposed above the image stack. A light guide layer is disposed above the intermediate layer. The light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity but not on the bottom surface of the light pipe cavity. The light guide layer has a thickness of about 100 nanometers or less.

[0026] In some embodiments of the image sensor structure, the image stack includes a substrate layer, a plurality of isolation trenches, and a dielectric material. The substrate layer is disposed over the plurality of photodetectors. The substrate layer acts to pass emission light and excitation light. The plurality of isolation trenches are disposed within the substrate layer. Each isolation trench is disposed adjacent to one photodetector of the plurality of photodetectors. A dielectric material is disposed within each isolation trench. The dielectric material acts to electrically isolate each photodetector of the plurality of photodetectors.

[0027] In some embodiments of the image sensor structure, the intermediate layer disposed in the first optical filter stack and the substrate layer disposed in the image stack are composed of the same material.

[0028] In some embodiments, the image sensor structure includes a second optical filter stack disposed above the first optical filter stack, the first optical filter stack and the second optical filter stack having an overall aspect ratio that is greater than the aspect ratio of either one of the first filter stack and the second filter stack.

[0029] In some embodiments, the image sensor structure includes a crosstalk layer, a crosstalk curtain, a diffusing layer, and a light pipe extension. The crosstalk layer is disposed above the top surface of the optical filter stack between one or more of the light pipe cavities. The crosstalk curtain extends down from the top surface of the optical filter stack between one or more of the light pipe cavities. The diffusing layer is disposed between the optical filter stack and the image stack. The light pipe extension is disposed at the bottom of one or more of the light pipe cavities. The light pipe extension extends through the diffusing layer.

[0030] Another image sensor structure according to one or more aspects of the present disclosure includes an image stack disposed above the device stack. The image stack includes a plurality of photodetectors. A first optical filter stack is disposed above the image stack. The first optical filter stack includes a light guide layer composed of an optically absorbing material, a plurality of light pipe cavities disposed within the light guide layer, and an optically transparent material disposed within the light pipe cavities. Each light pipe cavity is associated with one of the plurality of photodetectors. The optically transparent material has a refractive index greater than the refractive index of the optically absorbing material. A nanowell layer is disposed above the first optical filter stack. A plurality of nanowells are disposed within the nanowell layer. Each nanowell is associated with one of the plurality of photodetectors.

[0031] In some embodiments of the image sensor structure, the light pipe cavity has a sidewall angle in the range of about 11 to about 1.2 degrees and an aspect ratio greater than about 2.5 to about 1.

[0032] In some embodiments of the image sensor structure, the optically absorbing material is in direct contact with the optically transparent material at the sidewalls of the light pipe cavity.

[0033] In some embodiments, the image sensor structure includes a crosstalk layer, a crosstalk curtain, a diffusing layer, and a light pipe extension. The crosstalk layer is disposed above the top surface of the optical filter stack between one or more of the light pipe cavities. The crosstalk curtain extends down from the top surface of the optical filter stack between one or more of the light pipe cavities. The diffusing layer is disposed between the optical filter stack and the image stack. The light pipe extension is disposed at the bottom of one or more of the light pipe cavities. The light pipe extension extends through the diffusing layer.

[0034] A method of forming an image sensor structure according to one or more aspects of the present disclosure includes disposing an image stack on a device stack. The image stack includes a plurality of photodetectors. A light guide layer is disposed over the image stack. A plurality of light pipe cavities are etched in the light guide layer. Each light pipe cavity is associated with one of the plurality of photodetectors. Each light pipe cavity has an aspect ratio greater than about 2.5 to 1. A nanowell layer is disposed over the light guide layer. A plurality of nanowells are disposed in the nanowell layer. Each nanowell is associated with one of the plurality of photodetectors. The light guide layer, the plurality of light pipe cavities, and an optical filter material constitute a first optical filter stack disposed over the image stack.

[0035] In some embodiments, the method includes disposing an intermediate layer on the image stack. A light guide layer is disposed on the intermediate layer. The light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity and not on the bottom surface of the light pipe cavity. The light guide layer has a thickness of about 100 nanometers or less.

[0036] In some embodiments, the method includes disposing an optical filter material within the light pipe cavity, the optical filter material in direct contact with the light guide layer at the sidewalls of the light pipe cavity.

[0037] In some embodiments, the method includes disposing a second optical filter stack over the first optical filter stack, wherein the first optical filter stack and the second optical filter stack have an overall aspect ratio that is greater than an aspect ratio of either one of the first filter stack and the second filter stack.

[0038] In some embodiments, the method includes the light guide layer being composed of an optically absorbing material. An optically transparent material is disposed within the light pipe cavity. The optically transparent material has a refractive index greater than the refractive index of the optically absorbing material.

[0039] It is to be understood that all combinations of the foregoing concepts and additional concepts discussed in more detail below (provided such concepts are not mutually inconsistent) are considered to be part of the inventive subject matter disclosed herein and may be used to realize the benefits and advantages described herein. [Brief explanation of the drawings]

[0040] The present disclosure will be more fully understood from the following detailed description when read in conjunction with the accompanying drawings.

[0041] [Figure 1] 1 is a cross-sectional view of an example image sensor structure at an intermediate stage of fabrication, where an image stack including multiple photodetectors is positioned above the device stack, according to aspects described herein.

[0042] [Figure 2] 2 is a cross-sectional view of the example image sensor structure of FIG. 1 at an intermediate stage of fabrication, where a light guide layer is disposed above the imaging stack, according to embodiments described herein.

[0043] [Figure 3]FIG. 3 is a cross-sectional view of an example image sensor structure of FIG. 2 at an intermediate stage of fabrication, according to an embodiment described herein, in which a plurality of light pipe cavities are etched into the light guide layer, such that each light pipe cavity is associated with one photodetector of a plurality of photodetectors.

[0044] [Figure 4] 4 is a cross-sectional view of an example of a close-up of the circular area 4-4 of FIG. 3, illustrating the aspect ratio and sidewall angle of the light pipe cavity, according to embodiments described herein.

[0045] [Figure 5] FIG. 4 is a cross-sectional view of an example image sensor structure of FIG. 3 at an intermediate stage of fabrication, according to an embodiment described herein, where an optical filter material is disposed within the light pipe cavity, and the light guide layer, the plurality of light pipe cavities, and the optical filter material form a first optical filter stack.

[0046] [Figure 6] 6 is a cross-sectional view of an example of the image sensor structure of FIG. 5 at an intermediate stage of fabrication, where a second optical filter stack is disposed above the first optical filter stack of FIG. 5, according to an embodiment described herein.

[0047] [Figure 7] FIG. 6 is a cross-sectional view of the example image sensor structure of FIG. 5 at a completed stage of fabrication, in which a nanowell layer having a plurality of nanowells is disposed above a first optical filter stack, according to embodiments described herein.

[0048] [Figure 8] FIG. 1 is a cross-sectional view of an example image sensor structure at an intermediate stage of fabrication, according to an aspect described herein, in which multiple light pipe cavities are etched into an intermediate layer and a metal light guide layer is disposed on the sidewalls of the light pipe cavities.

[0049] [Figure 9]FIG. 10 is a cross-sectional view of an example image sensor structure of FIG. 8 at an intermediate stage of fabrication, according to an embodiment described herein, where an optical filter material is disposed within the light pipe cavity, and the intermediate layer, the light guide layer, the plurality of light pipe cavities, and the optical filter material form a first optical filter stack.

[0050] [Figure 10] FIG. 10 is a cross-sectional view of an example of the image sensor structure of FIG. 9 at a completed stage of fabrication, in which a nanowell layer having a plurality of nanowells is disposed above a first optical filter stack, according to embodiments described herein.

[0051] [Figure 11] A cross-sectional view of an example of an image sensor structure at an intermediate stage of fabrication according to an aspect described herein, where an intermediate layer is disposed on top of a substrate layer of an image stack, the intermediate layer and the substrate layer being composed of the same material, and multiple light pipe cavities are etched into the intermediate layer.

[0052] [Figure 12] 12 is a cross-sectional view of the example image sensor structure of FIG. 11 at an intermediate stage of fabrication, where a metal light guide layer is disposed on the sidewalls of a light pipe cavity, according to embodiments described herein.

[0053] [Figure 13] FIG. 13 is a cross-sectional view of an example image sensor structure of FIG. 12 at an intermediate stage of fabrication, according to an embodiment described herein, where an optical filter material is disposed within the light pipe cavity, and the intermediate layer, the light guide layer, the plurality of light pipe cavities, and the optical filter material form a first optical filter stack.

[0054] [Figure 14] FIG. 14 is a cross-sectional view of an example image sensor structure of FIG. 13 at a completed stage of fabrication, in which a nanowell layer having a plurality of nanowells is disposed above a first optical filter stack, according to embodiments described herein.

[0055] [Figure 15]4 is a cross-section of an example of another image sensor structure 400 at a completed stage of fabrication, where a diffusive layer is disposed between the imaging stack and the optical filter stack, according to embodiments described herein.

[0056] [Figure 16] 5 is a cross-section of an example of another image sensor structure 500 at a completed stage of fabrication, according to an embodiment described herein, where the light guide layer is made of an optical filter material and the light pipe cavity is filled with an optically transparent material. DETAILED DESCRIPTION OF THE INVENTION

[0057] Specific embodiments will now be described to provide a general understanding of the principles of the structure, function, manufacture, and use of the methods, systems, and devices disclosed herein. One or more embodiments are illustrated in the accompanying drawings. Those skilled in the art will understand that the methods, systems, and devices specifically described herein and illustrated in the accompanying drawings are non-limiting examples, and that the scope of the present disclosure is defined only by the claims. Features shown or described in connection with one embodiment may be combined with features of other embodiments. Such modifications and variations are intended to be within the scope of the present disclosure.

[0058] The terms "substantially," "approximately," "about," "relatively," or other such similar terms, which may be used throughout this disclosure, including the claims, are used to describe and take into account small variations from a reference or parameter, such as those due to variations in processing. Such small variations include zero-point variations from a reference or parameter. For example, they may refer to ±10% or less, such as ±5% or less, such as ±2% or less, such as ±1% or less, such as ±0.5% or less, such as ±0.2% or less, such as ±0.1% or less, such as ±0.05% or less.

[0059] 1-16, like reference numerals are used throughout the several views to indicate like or similar components. 1-6, 8-9, and 11-13 show example image sensor structures 100, 200, and 300, respectively, at various intermediate stages of fabrication according to embodiments described herein. 7, 10, 14, 15, and 16 show example image sensor structures 100, 200, 300, 400, and 500, respectively, at completed stages of fabrication.

[0060] 1, a cross-sectional view of an example image sensor structure 100 at an intermediate stage of fabrication is shown, according to embodiments described herein. At this stage of fabrication, the image sensor structure 100 includes an image stack 102 disposed on a device stack 104. As described in more detail herein, the image sensor structure 100 is a backside illuminated (BSI) image sensor structure.

[0061] A carrier substrate 106 is bonded to the device stack 104 to provide mechanical support for the image sensor structure 100. The carrier substrate 106 may include or be silicon or another semiconductor material. The carrier substrate 106 may have a thickness in the range of 400 to 800 micrometers.

[0062] Electrical input / output connections from the device stack 104 to conductive pads 108 bonded to the front side of the carrier substrate 106 may be made using through silicon vias (TSVs) 110. The TSVs may have a metal liner 109 or may be filled with a metal such as tungsten (W), aluminum (Al), or copper (Cu).

[0063] The device stack 104 may include multiple dielectric layers 111. The dielectric layers 111 may include or be SiO2, SiN, SiON, or other dielectric materials.

[0064] The dielectric layer 111 may include various device circuits 112, such as, for example, resistors, capacitors, diodes, and / or transistors, and their interconnections. The device circuits 112 of the device stack 104 interface with a plurality of photodetectors 114A, 114B, 114C, 114D, 114E (collectively 114) disposed in the image stack 102. The device circuits 112 are operable to process data signals from the photodetectors 114 using detected light photons of the emitted light 158 ​​(best seen in FIG. 7 ).

[0065] As used herein, photodetector 114 may be, for example, a semiconductor. The semiconductor may include a photodiode, a complementary metal oxide semiconductor (CMOS) material, or both. Photodetector 114 may also be a photodiode junction region or an implant in a semiconductor material. For example, photodiode 114 may be an n-type doped region in a p-type substrate, an n-type doped region on a p-type well on an n-type doped substrate, or any other diode combination.

[0066] The imaging stack 102 includes a plurality of photodetectors 114 disposed above the device stack 104. A substrate layer 116 is disposed above the plurality of photodetectors 114. The substrate layer 116 may include or be silicon, silicon germanium, gallium arsenide, or other semiconductor material. As described in further detail herein, the substrate layer 116 acts to pass both emission light 158 ​​and excitation light 156 emanating from nanowells 148 disposed above the imaging stack 102 (best seen in FIG. 7). The emission light 158 ​​may be, for example, in a wavelength range of about 500 nanometers (nm) to about 650 nm. The excitation light 156 may be, for example, in a wavelength range of about 400 nm to about 570 nm. The emission light 158 ​​may have a longer wavelength than the excitation light 156. More specifically, the emission light 158 ​​may have a wavelength that is about 40 nm to 140 nm longer than the wavelength of the excitation light 156.

[0067] The image stack 102 also includes a plurality of isolation trenches 118A, 118B, 118C, 118D, and 118E (collectively 118) disposed within the substrate layer 116. Each isolation trench 118 is disposed adjacent to one photodetector 114 of the plurality of photodetectors 114. The isolation trenches 118 may be deep trenches and may have a large aspect ratio AR of about 5 to 1 to about 25 to 1. As used herein, the aspect ratio AR is the ratio between the height of a feature (in this case, the isolation trenches 118) and the maximum width of the feature.

[0068] Due to manufacturing tolerances, isolation trenches 118 may not all have the same height. For example, isolation trenches 118A-118D are depicted as not extending through the entire thickness of substrate layer 116, while isolation trenches 118E and 118F are depicted as extending through the entire thickness of substrate layer 116.

[0069] The image stack 102 also includes a dielectric material 120 disposed within each isolation trench 118. The dielectric material 118 acts to electrically isolate each photodetector 114 of the plurality of photodetectors 114. The dielectric material 118 also acts to significantly reduce crosstalk between the photodetectors by blocking or significantly reducing transmission of light or photo-generated electrons between the photodetectors 114. The dielectric material may include or be SiO2, SiN, SiON, or other dielectric material.

[0070] An example method for fabricating the image sensor structure 100 at the intermediate stage of fabrication shown in FIG. 1 may include first providing a substrate layer 116. Various doping techniques may then be utilized to form n-type and p-type doped photodiode junction regions within the substrate layer 116 to form the photodetectors 114. Isolation trenches 118 may then be anisotropically etched (e.g., using a reactive ion etching (RIE) process) between the photodetectors 114. The isolation trenches 118 may then be filled with a dielectric material 120 to provide electrical deep trench isolation (DTI) and significantly reduce crosstalk between the photodetectors 114. Any excess dielectric material 120 may be planarized, for example, by a chemical mechanical planarization (CMP) process, down to the level of the photodetectors 114. The device stack 104 may then be positioned directly above the photodetectors 114 to complete the formation of the image stack 102 and device stack 104 of the image sensor structure 100. A carrier substrate 106 may then be bonded to the device stack 104 to provide mechanical support for the image sensor structure 100 .

[0071] Referring to FIG. 2 , a cross-sectional view of an example of the image sensor structure 100 of FIG. 1 at an intermediate stage of fabrication is shown, according to embodiments described herein, with a light guide layer 122 disposed above the image stack 102. The light guide layer 122 may include or be, for example, a polymeric material, a semiconductor material, or a dielectric material. If the light guide layer is a polymer, it may include or be SU-8 photoresist material, benzocyclobutene (BCB), polyamide, polymethyl methacrylate (PMMA), or other dye-colored film. If the light guide layer is a dielectric, it may include or be SiO 2 , SiN 2 , SiC, silicon oxynitride, or other dielectric material. If the light guide layer is a semiconductor material, it may include or be silicon or other semiconductor material.

[0072] 3 , a cross-sectional view of an example of the image sensor structure 100 of FIG. 2 at an intermediate stage of fabrication according to embodiments described herein is shown, where multiple light-pipe cavities 124A, 124B, 124C, 124D, and 124E (collectively 124) are formed in the light guide layer 122. Each light-pipe cavity 124 is associated with one of the multiple photodetectors 114. More specifically, each light-pipe cavity 124A, 124B, 124C, 124D, and 124E is aligned with an associated photodetector 114A, 114B, 114C, 114D, and 114E, respectively. Thus, light traveling through a light-pipe cavity 124 may be directed to its associated photodetector 114 or may not be directed to any unassociated photodetectors.

[0073] The light pipe cavity 124 may be anisotropically etched and / or lithographically patterned into the light guide layer 122. The light pipe cavity 124 may not always extend through the entire thickness of the light guide layer 122 due to manufacturing tolerances. For example, light pipe cavity 124D is shown with a thinner thickness of the light guide layer 122 material disposed at the bottom of the light pipe cavity. However, the thickness of the light guide layer 122 at the bottom of the light pipe cavity 124D is small enough so as not to significantly block light directed toward the light sensor 114. To avoid significant light blockage, the thickness of the light guide layer 122 at the bottom of the light pipe cavity 124 may be approximately 50 nanometers or less, or approximately 20 nanometers or less.

[0074] The light guide layer 122 significantly reduces or blocks the transmission of light from one light pipe cavity 124 to another, helping to reduce crosstalk between photodetectors 114. As used herein, the term "significant" may refer to approximately 50% or greater. For example, the light guide layer 122 may reduce the transmission of light from one light pipe cavity 124 to another by 50 percent, 60 percent, 75 percent, or more. The light guide layer 122 may also help direct a significant portion of the emitted light 156 through the light pipe cavity 124 to its associated photodetector 114. For example, the light guide layer may help direct more than 50 percent, 60 percent, 75 percent of the emitted light 156 to its associated photodetector 114.

[0075] 4, an enlarged cross-sectional view of an example circular region 4-4 of FIG. 3 is shown, illustrating the aspect ratio AR and sidewall angle θ of the light-pipe cavity 124, according to embodiments described herein. As described in more detail herein, the aspect ratio AR of the light-pipe cavity 124 may range from about 2.5 to 1 to about 25 to 1, depending on the need to block excitation light and collect emission light from nanowells 148 located directly above the light-pipe cavity 124 in the image sensor structure 100. More specifically, the aspect ratio AR of the light-pipe cavity 124 in FIGS. 3 and 4 is the ratio of the actual height H of the light-pipe cavity 124 to its maximum width W, which is the top width W at the top of the light-pipe cavity 124.

[0076] It may not be practical or cost-effective to reliably manufacture such high aspect ratio light pipe cavities 124, where the bottom width W′ at the bottom of the cavity 124 is equal to the top width W at the top of the cavity 124. In other words, a reliable and cost-effective manufacturing process for these high aspect ratio light pipe cavities 124 may likely include sidewalls 130 that have a non-zero sidewall angle θ with respect to the vertical reference line 126 (i.e., a line 126 that is substantially perpendicular to the top surface 128 of the light guide layer 122).

[0077] The sidewall angles θ on either side of the light pipe cavity 124 are likely to be substantially equal. Thus, the horizontal distance d of the bottom width W′ (on either side of the light pipe cavity 124) from a vertical reference line 126 extending downward from the top edge 129 of the cavity 124 may also be substantially equal.

[0078] Such a non-zero sidewall angle θ limits the maximum achievable height Hmax, and therefore the maximum achievable aspect ratio ARmax that the light pipe cavity 124 can achieve for any given sidewall angle θ. That is, the maximum achievable height Hmax is limited to the height at which the bottom width W' at the bottom of the light pipe cavity 124 can be zero. In other words, the maximum achievable height Hmax is limited to the height at which the sidewalls 130 can intersect at point 132 for any given sidewall angle θ. Because the sidewall angles θ on both sides of the light pipe cavity 124 are substantially equal, point 132 is located horizontally midway between the widths W at the top of the cavity 124. Therefore, the horizontal distance from the vertical reference line 126 to bottom point 132 can be substantially equal: W / 2.

[0079] The relationship between the actual aspect ratio AR, the maximum achievable aspect ratio ARmax, the actual height H, the maximum achievable height Hmax, the sidewall angle θ, the top width W, the bottom width W′, and the distance d can be expressed as follows: AR=H / W; tanθ=d / H=0.5W / Hmax; ARmax=Hmax / W=H / (2d)=H / (W-W')=0.5 / (tanθ)

[0080] Accordingly, the smaller the sidewall angle θ, the larger the maximum achievable aspect ratio ARmax that can be achieved, since ARmax=0.5 / (tan θ).

[0081] 5 , a cross-sectional view of the example image sensor structure 100 of FIG. 3 at an intermediate stage of fabrication is shown, where optical filter material 134 is disposed within light pipe cavities 124, according to embodiments described herein. At this stage of fabrication, light guide layer 122, multiple light pipe cavities 124, and optical filter material 134 form a completed first optical filter stack 136 disposed above image stack 102.

[0082] The optical filter material 134 may block a significant portion of the excitation light. For example, the optical filter material may transmit a significant portion of emission light wavelengths in the range of approximately 500 nm to 650 nm, and block a significant portion of excitation light in the range of 400 to 570 nm.

[0083] The optical filter material 134 is disposed within the light pipe cavity 124 such that it directly contacts the light guide layer 122 at the sidewalls 130 of the light pipe cavity 124. Having the optical filter material 134 directly contact the light guide layer 122 at the sidewalls 130 of the light pipe cavity 124 ensures that no significant amount of excitation light 156 can inadvertently transmit between the optical filter material 134 and the light guide layer 122 to reach the underlying photodetector 114.

[0084] The optical filter material 134 may include or be a blend of a dye and a polymer that may have low fluorescence. For example, the dye may include or be a member of the metal azo dye complex class, such as Orasol Orange-type dye, Orasol Yellow-type dye, Solvent Yellow-type dye, Solvent Orange-type dye, or Solvent Red-type dye. The polymer may include or be, for example, cellulose acetate butyrate.

[0085] The material 134 may be spin-coated or sprayed into the light pipe cavity 124 and baked and / or cured. Any excess optical filter material 134 may be planarized down to the level of the top surface 128 of the light guide layer 122.

[0086] The light-pipe cavity 124 and optical filter material 130 effectively function as a light guide that blocks most of the excitation light 156 and transmits a significant portion of the emission light 158 ​​to the multiple photodetectors 114. To operate efficiently as a light guide, the light-pipe cavity 124, in some implementations, has a height H that is sufficiently high to allow the selected light-guiding material 134 to block a significant portion of the excitation light 156 from transmitting to the underlying photodetectors 114.

[0087] Additionally, to operate efficiently as a light guide, in some implementations, the top width W of the cavity 124 is large enough to efficiently collect a significant amount of emitted light 158 ​​even when the pitch between photodetectors 114 is small, for example, less than about 0.5 micrometers. When the pitch between photodetectors 114 is small compared to the top width W, the bottom width W′ of the light pipe cavity 124 may also be small compared to the top width W.

[0088] One way to increase the height H of the light pipe cavity and the difference between the top width W and the bottom width W' is to increase the aspect ratio. For example, the aspect ratio H / W may be greater than about 2.5 to 1, greater than about 5 to 1, greater than about 10 to 1, or greater than about 20 to 1.

[0089] The higher the actual aspect ratio H / W, the higher the maximum achievable aspect ratio Hmax / W and the smaller the sidewall angle θ can be. For example, If the actual aspect ratio is about 2.5 to 1, the maximum achievable aspect ratio may be about 2.5 to 1 or greater, and the sidewall angle θ may be about 11 degrees or less; If the actual aspect ratio is about 5:1, the maximum achievable aspect ratio may be about 5:1 or greater and the sidewall angle θ may be about 6 degrees or less; If the actual aspect ratio is about 10:1, the maximum achievable aspect ratio may be about 10:1 or greater and the sidewall angle θ may be about 3 degrees or less; If the actual aspect ratio is about 20 to 1, the maximum achievable aspect ratio may be about 20 to 1 or greater, and the sidewall angle θ may be about 1.5 degrees or less.

[0090] However, a high maximum achievable aspect ratio and a corresponding small sidewall angle θ may be impractical, unreliable, and expensive to manufacture. For example, a maximum achievable aspect ratio greater than about 25 to 1, and a corresponding sidewall angle θ less than about 1.2 degrees, may be difficult to reliably manufacture in large quantities.

[0091] Accordingly, to enable reliable fabrication of a light guide, i.e., a light pipe cavity 124 filled with optical filter material 134, that efficiently blocks excitation light 156 and collects emission light 158, the aspect ratio H / W and sidewall angle θ of the light pipe cavity may be fabricated within certain predetermined ranges. For example, the light pipe cavity may be fabricated such that: An aspect ratio of approximately 2.5:1 or greater and a sidewall angle within the range of approximately 11 degrees to approximately 1.2 degrees; An aspect ratio of approximately 5:1 or greater and a sidewall angle within the range of approximately 6 degrees to approximately 1.2 degrees; An aspect ratio of approximately 5:1 or greater and a sidewall angle within the range of approximately 6 degrees to approximately 1.5 degrees; An aspect ratio of approximately 10:1 or greater and a sidewall angle within the range of approximately 3 degrees to approximately 1.2 degrees; It may have an aspect ratio of about 10:1 or greater and a sidewall angle in the range of about 3 degrees to about 1.5 degrees.

[0092] 6, a cross-sectional view of an example image sensor structure of FIG. 5 at an intermediate stage of fabrication according to embodiments described herein is shown, where a second optical filter stack 138 is disposed above the first optical filter stack 136 of FIG. 5. The first optical filter stack 136 and the second optical filter stack 138 together have an overall aspect ratio that is greater than the aspect ratio of either the first optical filter stack or the second optical filter stack.

[0093] High aspect ratios, which may normally be difficult to reliably manufacture, may be desirable to enable parameters such as substantially blocking excitation light 156 or efficiently collecting emission light 158. For example, overall aspect ratios greater than about 10, greater than about 15, greater than about 20, and greater than about 25 may be desired. To achieve such high aspect ratios and still keep the sidewall angle θ within reasonable manufacturing limits, a second optical filter stack 138 may be disposed above the first optical filter stack 136. Such reasonable manufacturing limits for sidewall angle θ may be, for example, 1.2 degrees or greater, 1.5 degrees or greater, or 3 degrees or greater.

[0094] The second optical filter stack 138 may include a second light guide layer 140 disposed above the first optical filter stack 136. A second plurality of light pipe cavities 142 may be formed in the second light guide layer 140. Each second light pipe cavity is associated with one photodetector 114 of the plurality of photodetectors. A second optical filter material 144 may be disposed within each second light pipe cavity 142. The second light pipe cavities may have a second light pipe cavity height H2 and a second light pipe cavity top width W2.

[0095] The overall aspect ratio is the combined overall height H of the first light pipe cavity 124 and the second light pipe cavity 140. TOT may be approximately equal to the aspect ratio θ of the first light pipe cavity 124 divided by the maximum combined width of the first light pipe cavity 124 and the second light pipe cavity 140. If the second optical filter stack 138 is substantially geometrically identical to the first optical filter stack 136, the overall aspect ratio may be approximately twice the aspect ratio of the first light pipe cavity 124, and the sidewall angle θ may remain approximately the same.

[0096] That is, the overall aspect ratio is the total height H = 1 / 2 of the first light pipe cavity 124 and the second light pipe cavity 140. TOTmay be approximately equal to the total height H divided by the maximum width of the first light pipe cavity 124 and the second light pipe cavity 140 combined. The maximum width may be the wider of the two top widths W, W2. TOT may be approximately twice the height H of the first light pipe cavity 124, and the maximum width may be approximately equal to the width W of the first light pipe cavity, so that the overall aspect ratio may be approximately twice the aspect ratio of the first light pipe cavity 124. However, the sidewall angle θ may remain approximately the same throughout the first light pipe cavity 124 and the second light pipe cavity 142.

[0097] 6, second optical filter stack 138 is shown as being substantially identical to first optical filter stack 136, but other configurations of second optical filter stack 138 may be utilized. For example, second optical filter stack 138 may differ from first optical filter stack 136 in the material and size of second light guide layer 140, the material and size of second light pipe cavity 142, and the material and size of the second optical filter material.

[0098] 7, a cross-sectional view of one example of the image sensor structure 100 of FIG. 5 at a completed stage of fabrication is shown, according to embodiments described herein, where a nanowell layer 146 having a plurality of nanowells 148A, 148B, 148C, 148D, and 148E (collectively 148) is disposed above a first optical filter stack 136. Each nanowell 148 is associated with one photodetector 114 of a plurality of photodetectors. More specifically, each nanowell 148A, 148B, 148C, 148D, and 148E may be aligned with an associated light pipe cavity 124A, 124B, 124C, 124D, and 124E, respectively, and associated photodetector 114A, 114B, 114C, 114D, and 114E. Accordingly, a particular light exiting a nanowell 148 may travel through its associated light pipe cavity 124 and be directed to its associated photodetector 114, and may not be directed to any of the unassociated photodetectors.

[0099] Nanowell layer 146 may be one or more layers of a dielectric material, such as silicon nitride SiN or a type of tantalum oxide (such as tantalum pentoxide Ta2O5). Nanowells 148 may be lithographically patterned and etched into nanowell layer 146.

[0100] Optionally, a passivation stack 150 may be disposed directly on top of the first optical filter stack 136, and the nanowell layer 146 may be disposed on top of the passivation stack. The passivation stack may be one or more layers of a dielectric material, such as SiO2 or SiN. The passivation stack may also be one or more layers of a polymer, such as BCB or SU8. The passivation stack may be used to reduce chemical reactions of the first optical filter stack 136, which chemical reactions take place in the nanowells 148.

[0101] In operation, specific analytes 152 (such as clusters of DNA segments) may be tagged with fluorescent label molecules 154 and placed within the nanowells 148. Various types of excitation light 156 may then be emitted onto the analytes 152 within the nanowells 148, causing the label molecules 154 to fluoresce and emit emission light 158. A majority of the photons of the emission light 158 ​​may transmit through the passivation stack 150 and enter its associated light-pipe cavity 124. The light-pipe cavity 124, along with its optical filter material 134, functions as a light guide that can filter out most of the excitation light 156 and direct a significant portion of the emission light 158 ​​to an associated photodetector 114 located directly below the light guide.

[0102] The photodetector 114 detects the emitted light photons 158. The device circuitry 112 in the device stack 104 then processes and communicates a data signal based on those detected photons of the emitted light 158. The data signal may then be analyzed to reveal characteristics of the analyte 152.

[0103] Image sensor structure 100 is a backside illuminated (BSI) image sensor structure because nanowell 148 is disposed on the backside of image sensor structure 100 and device stack 104 is not disposed between nanowell layer 146 and plurality of photodetectors 114. In other words, device stack 104 and nanowell layer 146 are disposed on opposite sides of plurality of photodetectors 114. Thus, nanowell 148 is illuminated by excitation light 156 from the backside of image sensor structure 100.

[0104] However, due to the location of the device stack 104, the device circuitry 112 may not be available to help reduce crosstalk of emission light photons 158 exiting the nanowells 148 to unassociated photodetectors 114. To compensate for the absence of the device stack 104, the light guide layer 122 is utilized to block transmission of a large portion of the emission light 158 ​​and excitation light 156 from one light-pipe cavity 124 to another. In other words, the light guide layer 122 acts to prevent, or at least substantially prevent, the emission light 158 ​​emitted from the fluorescently labeled molecules 154 within the nanowells 148 and the excitation light 156 illuminating the nanowells 148 from the backside of the image sensor structure 100 from passing through the light guide layer 122.

[0105] Additionally, the light guide layer 122 is in direct contact with the optical filter material 134 at the sidewalls 130 of the light pipe cavity 124. Therefore, little or no excitation light 156 can transmit through the light pipe cavity 124 without passing through the optical filter material 134. The optical filter material 134 acts to block the excitation light 156 and allow the emission light 158 ​​to pass to the photodetector 114.

[0106] The high aspect ratio H / W of the light-pipe cavity 124 geometrically shapes the optical filter material 134 that fills the cavity 124. Thus, the high aspect ratio of the light-pipe cavity 124 helps provide an appropriate height H for the optical filter material 134, which enables the optical filter material 134 to block a significant portion of the excitation light 156 from passing through.

[0107] The high aspect ratio H / W of the light-pipe cavity 124 also provides a significantly wider top width W relative to the bottom width W' of the light-pipe cavity 124. In this manner, the light-pipe cavity 124 can efficiently collect emitted light 158 ​​even when the pitch between photodetectors 114 is small, for example, about 0.6-0.5 micrometers or even smaller.

[0108] The high aspect ratio H / W of the light pipe cavity 124 may be as great as about 2.5 to 1, about 5 to 1, about 10 to 1, about 20 to 1, or even greater. Additionally, the sidewall angle θ is small enough to allow for a high aspect ratio within the light pipe cavity 124, but not so large as to make manufacturing the light pipe cavity unreliable and / or excessively expensive. The sidewall angle θ of the light pipe cavity 124 may be in the range of about 11 degrees to about 1.2 degrees, in the range of about 10 degrees to about 1.5 degrees, in the range of about 6 degrees to about 1.2 degrees, in the range of about 3 degrees to about 1.2 degrees, and in the range of about 3 degrees to about 1.5 degrees.

[0109] 8 , a cross-sectional view of one example of another image sensor structure 200 at an intermediate stage of fabrication according to embodiments described herein is shown, in which a plurality of light-pipe cavities 124 are etched into an intermediate layer 160 and a metal light guide layer 162 is disposed on the sidewalls 130 of the light-pipe cavities 124. The light guide layer 162 may include or be a metal such as aluminum, gold, or copper. However, if the thickness of the metal light guide layer 162 between the light-pipe cavities 124 is too large, the metal may excessively absorb the emitted light 158 ​​before it reaches the photodetector 114. To avoid excessive absorption of the emitted light 158, the thickness of the metal light guide layer 162 between the light-pipe cavities 124 may be, for example, about 100 nanometers or less, about 50 nanometers or less, or about 40 nanometers or less.

[0110] An intermediate layer 160 is disposed above the image stack 102 and provides mechanical support for a relatively thin metal light guide layer 162. The light guide layer 162 is disposed above the intermediate layer 160 on the sidewalls 130 of the light pipe cavity 124. In one implementation, the metal layer is disposed directly on the sidewalls.

[0111] The metal light guide layer 162 does not have to be disposed on the bottom surface 164 of the light pipe cavity 124 because if the metal light guide layer 162 were disposed on the bottom surface 164 of the light pipe cavity 124, a significant portion of the emitted light 158 ​​would be prevented from transmitting into the image stack 102, even if the metal light guide layer 162 were 100 nanometers or thinner.

[0112] Intermediate layer 160 may include or be, for example, a polymeric material, a semiconductor material, or a dielectric material. If the intermediate layer includes a polymer, the polymer may include or be SU-8 photoresist material, benzocyclobutene (BCB), polyamide, polymethyl methacrylate (PMMA), or other dye-colored films. If the light guide layer includes a dielectric, the dielectric may include or be SiO2, SiN, SiC, or other dielectrics. If the light guide layer is a semiconductor material, the light guide layer may include or be silicon or other semiconductor materials. Light pipe cavity 124 may be anisotropically etched and / or lithographically patterned in intermediate layer 160.

[0113] The intermediate layer 160 may be composed of a material that is too transparent to function as a light guide layer, but that can be easily and reliably etched to the high aspect ratios discussed earlier in this specification. In that case, it may be advantageous to use the intermediate layer 160 to enable the fabrication of such high aspect ratio light pipe cavities 124 and then coat the cavity sidewalls 130 with a thin metal light guide layer 162.

[0114] The metal light guide layer 162 may be coated on the sidewalls 130 of the light pipe cavity 124 using, for example, a blank deposition process, atomic layer deposition, electroless plating, or electroplating. Any metal light guide layer 162 inadvertently disposed on the bottom surface 164 of the light pipe cavity 124 may be removed by, for example, an anisotropic etching process (such as a reactive ion etching process). The anisotropic etching process leaves the metal light guide layer 162 on the sidewalls 130 of the light pipe cavity 124.

[0115] Referring to Figure 9, a cross-sectional view of an example of the image sensor structure 200 of Figure 8 at an intermediate stage of fabrication is shown, in accordance with an embodiment described herein, where an optical filter material 134 is disposed within the light pipe cavity 124, and the intermediate layer 160, the light guide layer 162, the plurality of light pipe cavities 124, and the optical filter material 134 form a first optical filter stack 136.

[0116] The optical filter material 134 is disposed within the light pipe cavity 124 such that it directly contacts the light guide layer 162 at the sidewalls 130 of the light pipe cavity 124. Having the optical filter material 134 directly contact the light guide layer 162 at the sidewalls 130 of the light pipe cavity 124 ensures that no significant amount of the excitation light 156 can inadvertently transmit between the optical filter material 134 and the light guide layer 162 to reach the underlying photodetector 114.

[0117] The optical filter material 134 may be a dye-based polymer. The material 134 may be spin-coated or sprayed into the light pipe cavity 124 and baked and / or cured. Any excess optical filter material 134 may be planarized down to the level of the top surface 128 of the intermediate layer 160.

[0118] 10 , a cross-sectional view of one example of the image sensor structure 200 of FIG. 9 at a completed stage of fabrication is shown, according to embodiments described herein, where a nanowell layer 146 having a plurality of nanowells 148 is disposed above a first optical filter stack 136. All aspects of the image sensor structure 200 are substantially the same as or similar to those of the image sensor structure 100 described above, except that a metal light guiding layer 162 is disposed on the sidewall 130 of the light pipe guide 124, and an intermediate layer 160 provides mechanical support for the light guiding layer 162.

[0119] In operation, specific analytes 152 (such as clusters of DNA segments) may be tagged with fluorescent label molecules 154 and placed within the nanowells 148. Various types of excitation light 156 may then be emitted onto the analytes 152 within the nanowells 148, causing the label molecules 154 to fluoresce and emit emission light 158. A majority of the photons of the emission light 158 ​​may transmit through the passivation stack 150 and enter its associated light-pipe cavity 124. The light-pipe cavity 124, along with its optical filter material 134, functions as a light guide that can filter out most of the excitation light 156 and direct a significant portion of the emission light 158 ​​to an associated photodetector 114 located directly below the light guide.

[0120] The photodetector 114 detects the emitted light photons 158. The device circuitry 112 in the device stack 104 then processes and communicates a data signal based on those detected photons of the emitted light 158. The data signal may then be analyzed to reveal characteristics of the analyte 152.

[0121] Image sensor structure 200 is a backside illuminated (BSI) image sensor structure because nanowells 148 are disposed on the backside of image sensor structure 200 and because device stack 104 is not disposed between nanowell layer 146 and plurality of photodetectors 114. Thus, nanowells 148 are illuminated by excitation light 156 from the backside of image sensor structure 200.

[0122] However, due to the location of the device stack 104, the device circuitry 112 may not be available to help reduce crosstalk of emission light photons 158 exiting the nanowell 148 to an unassociated photodetector 114. To compensate for the lack of the device stack 104, a light guiding layer 162 is disposed on top of the intermediate layer 160 and is used to block transmission of most of the emission light 158 ​​and excitation light 156 from one light-pipe cavity 124 to another.

[0123] Additionally, the light guide layer 162 is in direct contact with the optical filter material 134 at the sidewalls 130 of the light pipe cavity 124. Therefore, little or none of the excitation light 156 can transmit through the light pipe cavity 124 without passing through the optical filter material 134. The optical filter material 134 acts to block the excitation light 156 and allow the emission light 158 ​​to pass through to the photodetector 114.

[0124] The high aspect ratio H / W of the light-pipe cavity 124 geometrically shapes the optical filter material 134 that fills the cavity 124. Thus, the high aspect ratio of the light-pipe cavity 124 helps provide an appropriate height H for the optical filter material 134, which enables the optical filter material 134 to block a significant portion of the excitation light 156 from passing through.

[0125] The high aspect ratio H / W of the light-pipe cavity 124 also provides a significantly wider top width W relative to the bottom width W' of the light-pipe cavity 124. In this manner, the light-pipe cavity 124 can efficiently collect emitted light 158 ​​even when the pitch between photodetectors 114 is small, for example, about 0.6-0.5 micrometers or even smaller.

[0126] The high aspect ratio H / W of the light pipe cavity 124 may be as great as about 2.5 to 1, about 5 to 1, about 10 to 1, about 20 to 1, or even greater. Additionally, the sidewall angle θ is small enough to allow for a high aspect ratio within the light pipe cavity 124, but not so large as to make manufacturing the light pipe cavity unreliable and / or excessively expensive. The sidewall angle θ of the light pipe cavity 124 may be in the range of about 11 degrees to about 1.2 degrees, in the range of about 10 degrees to about 1.5 degrees, in the range of about 6 degrees to about 1.2 degrees, in the range of about 3 degrees to about 1.2 degrees, and in the range of about 3 degrees to about 1.5 degrees.

[0127] 11 , a cross-sectional view of an example image sensor structure 300 at an intermediate stage of fabrication is shown, according to embodiments described herein. In structure 300, an intermediate layer 166 is disposed above substrate layer 116 of imaging stack 102. Intermediate layer 166 and substrate layer 116 are composed of the same material. Intermediate layer 166 and substrate layer 116 may include or be silicon, silicon germanium, gallium arsenide, or other semiconductor materials.

[0128] During an early stage of fabrication, a combined layer 168 may be disposed above the device stack 104 at a height at least equal to the combined height of the imaging stack 102 and the first optical filter stack 136. The combined layer 168 may then be planarized to a predetermined height 170 that is substantially equal to the combined height of the imaging stack 102 and the first optical filter stack 136. At this stage of fabrication, the intermediate layer 166 includes an upper portion of the combined layer 168, and the substrate layer 116 includes a lower portion of the combined layer 168.

[0129] A plurality of light pipe cavities 124 may be anisotropically etched into the intermediate layer 166. This may be done, for example, by a reactive ion etching process. Because the intermediate layer 166 is a semiconductor material, it is easier to etch to a high aspect ratio. However, the intermediate layer 166 is too transparent to function as a light guide layer.

[0130] 12 is a cross-sectional view of an example of image sensor structure 300 of FIG. 11 at an intermediate stage of fabrication, according to embodiments described herein, where metal light guide layer 172 is disposed on sidewalls 130 of light pipe cavity 124. Similar to image sensor structure 200, intermediate layer 166 is too transparent to function as a light guide layer, so metal light guide layer 172 is disposed on sidewalls 130 of light pipe cavity 124.

[0131] The light guide layer 172 may include or be a metal such as aluminum, gold, or copper. However, if the thickness of the metal light guide layer 172 between the light pipe cavities 124 is too great, the metal may excessively absorb the emitted light 158 ​​before it reaches the photodetector 114. To avoid excessive absorption of the emitted light 158, the thickness of the metal light guide layer 172 between the light pipe cavities 124 may be, for example, about 100 nanometers or less, about 50 nanometers or less, or about 40 nanometers or less.

[0132] An intermediate layer 166 is disposed over the image stack 102 and provides mechanical support for a relatively thin metal light guide layer 172. The light guide layer 172 is disposed over the intermediate layer 166 on the sidewalls 130 of the light pipe cavity 124.

[0133] The metal light guide layer 172 does not have to be disposed on the bottom surface 174 of the light pipe cavity 124 because if the metal light guide layer 162 were disposed on the bottom surface 174 of the light pipe cavity 124, even if the metal light guide layer 162 were 100 nanometers or thinner, transmission of a significant portion of the emitted light 158 ​​into the image stack 102 would be reduced, and in some cases prevented.

[0134] The metal light guide layer 172 may be coated on the sidewalls 130 of the light pipe cavity 124 using, for example, a blank deposition process, atomic layer deposition, electroless plating, or electroplating. Any metal light guide layer 172 inadvertently disposed on the bottom surface 174 of the light pipe cavity 124 may be removed by, for example, an anisotropic etching process (such as a reactive ion etching process). The anisotropic etching process leaves the metal light guide layer 172 on the sidewalls 130 of the light pipe cavity 124.

[0135] Referring to FIG. 13, a cross-sectional view of an example of the image sensor structure 300 of FIG. 12 at an intermediate stage of fabrication is shown, in accordance with an embodiment described herein, where an optical filter material 134 is disposed within the light pipe cavity 124, and the intermediate layer 166, the light guide layer 172, the plurality of light pipe cavities 124, and the optical filter material 134 form a first optical filter stack 136.

[0136] The optical filter material 134 is disposed within the light pipe cavity 124 such that it directly contacts the light guide layer 172 at the sidewalls 130 of the light pipe cavity 124. Having the optical filter material 134 directly contact the light guide layer 172 at the sidewalls 130 of the light pipe cavity 124 ensures that no significant amount of the excitation light 156 can inadvertently transmit between the optical filter material 134 and the light guide layer 172 to reach the underlying photodetector 114.

[0137] The optical filter material 134 may be a dye-based polymer. The material 134 may be spin-coated or sprayed into the light pipe cavity 124 and baked and / or cured. Any excess optical filter material 134 may be planarized down to the level of the top surface 128 of the intermediate layer 166.

[0138] 14 , there is shown a cross-sectional view of one example of image sensor structure 300 of FIG. 13 at a completed stage of fabrication, according to embodiments described herein, where nanowell layer 146 having a plurality of nanowells 148 is disposed above first optical filter stack 136. All aspects of image sensor structure 300 are substantially the same as or similar to aspects of image sensor structure 200 described above, except that intermediate layer 166 and substrate layer 116 are the same material.

[0139] In operation, specific analytes 152 (such as clusters of DNA segments) may be tagged with fluorescent label molecules 154 and placed within the nanowells 148. Various types of excitation light 156 may then be emitted onto the analytes 152 within the nanowells 148, causing the label molecules 154 to fluoresce and emit emission light 158. A majority of the photons of the emission light 158 ​​may transmit through the passivation stack 150 and enter its associated light-pipe cavity 124. The light-pipe cavity 124, along with its optical filter material 134, functions as a light guide that can filter out most of the excitation light 156 and direct a significant portion of the emission light 158 ​​to an associated photodetector 114 located directly below the light guide.

[0140] The photodetector 114 detects the emitted light photons 158. The device circuitry 112 in the device stack 104 then processes and communicates a data signal based on those detected photons of the emitted light 158. The data signal may then be analyzed to reveal characteristics of the analyte 152.

[0141] Image sensor structure 300 is a backside illuminated (BSI) image sensor structure because nanowells 148 are disposed on the backside of image sensor structure 300 and because device stack 104 is not disposed between nanowell layer 146 and plurality of photodetectors 114. Thus, nanowells 148 are illuminated by excitation light 156 from the backside of image sensor structure 300.

[0142] However, due to the location of the device stack 104, the device circuitry 112 may not be available to help reduce crosstalk of emission light photons 158 exiting the nanowell 148 to an unassociated photodetector 114. To compensate for the lack of the device stack 104, a light guiding layer 172 is disposed on the intermediate layer 166 and is used to block transmission of most of the emission light 158 ​​and excitation light 156 from one light-pipe cavity 124 to another.

[0143] Additionally, the light guide layer 172 is in direct contact with the optical filter material 134 at the sidewalls 130 of the light pipe cavity 124. Therefore, little or none of the excitation light 156 can transmit through the light pipe cavity 124 without passing through the optical filter material 134. The optical filter material 134 has the effect of blocking the excitation light 156 and allowing the emission light 158 ​​to pass through to the photodetector 114.

[0144] The high aspect ratio H / W of the light-pipe cavity 124 geometrically shapes the optical filter material 134 that fills the cavity 124. Thus, the high aspect ratio of the light-pipe cavity 124 helps provide an appropriate height H for the optical filter material 134, which enables the optical filter material 134 to block a significant portion of the excitation light 156 from passing through.

[0145] The high aspect ratio H / W of the light-pipe cavity 124 also provides a significantly wider top width W relative to the bottom width W' of the light-pipe cavity 124. In this manner, the light-pipe cavity 124 can efficiently collect emitted light 158 ​​even when the pitch between photodetectors 114 is small, for example, about 0.6-0.5 micrometers or even smaller.

[0146] The high aspect ratio H / W of the light pipe cavity 124 may be as great as about 2.5 to 1, about 5 to 1, about 10 to 1, about 20 to 1, or even greater. Additionally, the sidewall angle θ is small enough to allow for a high aspect ratio within the light pipe cavity 124, but not so large as to make manufacturing the light pipe cavity unreliable and / or excessively expensive. The sidewall angle θ of the light pipe cavity 124 may be in the range of about 11 degrees to about 1.2 degrees, in the range of about 10 degrees to about 1.5 degrees, in the range of about 6 degrees to about 1.2 degrees, in the range of about 3 degrees to about 1.2 degrees, and in the range of about 3 degrees to about 1.5 degrees.

[0147] 15 , a cross-sectional view of an example of another image sensor structure 400 at a completed stage of fabrication is shown, according to embodiments described herein. Image sensor structure 400 is similar to image sensor structure 200, except for the addition of crosstalk blocking layer 180 and diffusing layer 182.

[0148] A crosstalk layer 180 may be disposed between one or more light pipe cavities 124 and on top of the optical filter stack 136. The crosstalk layer 180 helps to reduce crosstalk between the light pipe cavities 124.

[0149] The crosstalk layer 180 may be made of a metallic material. The crosstalk layer 180 may be made of W, Al, AlSi, Cu, or Ta. The crosstalk layer material may include a metallic material capable of forming a CMOS material. The thickness of the layer 180 may be in the range of approximately 20 nm to 150 nm.

[0150] Although crosstalk layer 180 is illustrated in this embodiment of image sensor structure 400, crosstalk layer 180 may be used in other image sensor structures. For example, crosstalk layer 180 may be used in any of the embodiments of image sensor structures 100, 200, 300, or 500 (see FIG. 16).

[0151] The diffuser layer 182 may be disposed between the optical filter stack 136 and the image stack 102. The diffuser layer 182 may be used as a diffusion barrier. The diffuser layer 182 may be used to reduce the flow of free ions from the optical filter material 134 or from other impurities such as packaging or moisture. The diffuser layer 182 may also be used as a planarization layer to planarize the surface of the substrate layer 116.

[0152] The diffusion layer 182 may be made of a dielectric metal oxide or nitride material, such as SiO2, TaO x, SiN, or SiON. The thickness of the diffusion layer 182 may be in the range of about 50 nm to about 350 nm.

[0153] Although the diffusion layer 182 is illustrated in this embodiment of the image sensor structure 400, the diffusion layer 182 may be used in other image sensor structures. For example, the diffusion layer 182 may be used in any of the embodiments of the image sensor structures 100, 200, 300, or 500 (see FIG. 16).

[0154] 16, a cross-sectional view of an example of another image sensor structure 500 at a completed stage of fabrication is shown, according to embodiments described herein. Image sensor structure 500 differs from previous image sensor structures 100-400 primarily in its optical filter stack 136.

[0155] In the optical filter stack 136 of the image sensor structure 500, the light guide layer 184 is composed of an optically absorbing material. The optically absorbing material may, for example, be the same material as the optical filter material 134 used to fill the light pipe cavity 124 in the image sensor structures 100-400. The optically absorbing material may, for example, have a refractive index in the range of approximately 1.5 to 1.8.

[0156] The optical filter material 184 may include or be, for example, a blend of a dye and a polymer that may have low fluorescence. For example, the dye may include or be a member of the metal azo dye complex class, such as an Orasol Orange-type dye, an Orasol Yellow-type dye, a Solvent Yellow-type dye, a Solvent Orange-type dye, or a Solvent Red-type dye. The polymer may include or be, for example, cellulose acetate butyrate.

[0157] Furthermore, unlike the previously described image sensor structures 100-400, which have optical filter material 134 disposed within light pipe cavity 124, image sensor structure 500 has optically transparent material 186 disposed within light pipe cavity 124. Transparent material 186 may be comprised of, for example, tantalum pentoxide (TaO), titanium dioxide (TiO), or silicon nitride (SiN).

[0158] Optically transparent material 186 has a refractive index that is greater than the refractive index of optically absorbing material 184. The refractive index of transparent material 186 may be in the range of approximately 1.8 to 2.7.

[0159] The difference in refractive index between the optically absorbing material comprising the light guide layer 184 and the optically transparent material 186 disposed within the light pipe cavity 124 significantly reduces crosstalk between the light pipe cavities 124 and helps direct the emission light 158 ​​through the light pipe cavity and onto the photodetectors 114 within the image stack 102. At the same time, the optically absorbing material acts to absorb a large portion of the excitation light 156, significantly reducing or preventing the excitation light 156 from reaching the photodetectors 114.

[0160] The greater the ratio of the height H of the light-pipe cavity 124 to the maximum width W of the light-pipe cavity (i.e., the actual aspect ratio AR of the light-pipe cavity), the greater the amount of excitation light 156 that can be absorbed by the optically absorbing material in the light guiding layer 184. Thus, the aspect ratio may be high. For example, the aspect ratio of the light-pipe cavity may be about 2.5 to 1 or greater, 5 to 1 or greater, 10 to 1 or greater, 15 to 1 or greater, or 20 to 1 or greater to optimize absorption of the excitation light 156.

[0161] However, as discussed earlier herein, the sidewall angle θ may be within a range that allows the light pipe cavity to be reasonably manufacturable. For example, the sidewall angle may be within a range of about 1.2 degrees to about 11 degrees, about 1.2 degrees to about 6 degrees, about 1.2 degrees to about 3 degrees, about 1.5 degrees to about 11 degrees, about 1.5 degrees to about 6 degrees, or about 1.5 degrees to about 3 degrees.

[0162] Furthermore, it is important that the optically absorbing material comprising the light guiding layer 184 be in direct contact with the optically transparent material 186 disposed within the light pipe cavity 124 at the sidewalls 130 of the light pipe cavity. This direct contact allows the difference in refractive index between the abutting optically absorbing and optically transparent materials 186 to help guide the emission light 158 ​​to the photodetector 114. Additionally, the direct contact between the optically absorbing and optically transparent materials reduces the excitation light 156 that is radiated between the two materials and unintentionally reaches the photodetector 114.

[0163] The filter stack 136 also includes a metal crosstalk curtain 188 disposed within the light guide layer 184 between the light pipe cavities 124. The crosstalk curtain 188 extends downward from the top surface of the optical filter stack 136 into the light guide layer 184. The crosstalk curtain 188 functions to further reduce crosstalk between the light pipe cavities 124. The crosstalk curtain 188 may work in conjunction with the crosstalk layer 180 to help reduce any crosstalk between the light pipe cavities 124 to an inconsequential level.

[0164] Also, like crosstalk layer 180, crosstalk curtain 188 can be used on any image sensor structure. For example, crosstalk curtain may be used on image sensor structures 100-400.

[0165] The crosstalk curtain 188 may be made of a metallic material, for example, W, Al, AlSi, Cu, Ta, or other CMOS compatible metals.

[0166] Although crosstalk curtain 188 is illustrated in this embodiment of image sensor structure 500, crosstalk curtain 188 may be used in other image sensor structures. For example, crosstalk curtain 188 may be used in any of the embodiments of image sensor structures 100, 200, 300, or 400.

[0167] The filter stack 136 of the image sensor structure 500 may also include a light pipe extension 190, which may be disposed at the bottom of the light pipe cavity 124 and may extend through the diffusing layer 182. The light pipe extension 190 may be composed of a nitride, such as silicon nitride (SiN), and has a refractive index of approximately 1.7 to 2.1.

[0168] Light pipe extension 190 has a refractive index greater than that of diffusing layer 182. For example, diffusing layer 182 may be composed of SiO2, which has a refractive index of approximately 1.4 to 1.55. In that case, a light pipe extension 190 comprising silicon nitride (SiN) may be appropriate because SiN has a refractive index of approximately 1.7 to 2.1. The refractive index of light pipe extension 190 being greater than that of diffusing layer 182 helps to focus emitted light 158 ​​onto photodetector 114 better than if the emitted light passed through diffusing layer 182 instead of light pipe extension 190.

[0169] Although light pipe extension 190 is illustrated in this embodiment of image sensor structure 500, light pipe extension 190 may be used in other image sensor structures. For example, light pipe extension 190 may be used in any of the embodiments of image sensor structures 100, 200, 300, or 400.

[0170] It is understood that all combinations of the foregoing and additional concepts more particularly discussed herein (provided such concepts are not mutually inconsistent) are contemplated as part of the inventive subject matter disclosed herein and achieve the benefits and advantages described herein. In particular, all combinations of claimed subject matter appearing at the end of this disclosure are contemplated as part of the inventive subject matter disclosed herein.

[0171] While the present invention has been described with reference to particular embodiments, it should be understood that many variations may be made within the spirit and scope of the inventive concepts described. Accordingly, it is intended that the present disclosure not be limited to the described embodiments, but rather have full scope defined by the following claims.

Claims

1. 1. An image sensor structure comprising: an image stack disposed above the device stack, the image stack including a plurality of photodetectors; a first optical filter stack disposed above the image stack, the first optical filter stack comprising: The middle class and a light guide layer disposed on the intermediate layer; a first optical filter stack including: light pipe cavities disposed in the light guide layer, each light pipe cavity associated with one photodetector of the plurality of photodetectors, each light pipe cavity having an aspect ratio greater than 2.5 to 1; a nanowell layer disposed above the first optical filter stack; a plurality of nanowells disposed within the nanowell layer, each nanowell associated with one photodetector among the plurality of photodetectors; a substrate layer disposed over the plurality of photodetectors, the substrate layer operative to pass emission light and excitation light; a plurality of isolation trenches disposed in the substrate layer, each isolation trench disposed adjacent to one of the plurality of photodetectors; Equipped with An image sensor structure wherein the light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity and not on the bottom surface of the light pipe cavity.

2. 10. The image sensor structure of claim 1, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees.

3. 10. The image sensor structure of claim 1, comprising an optical filter material disposed within the light pipe cavity, the optical filter material being in direct contact with the light guide layer at a sidewall of the light pipe cavity.

4. a second optical filter stack disposed above the first optical filter stack; 2. The image sensor structure of claim 1, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

5. The image sensor structure of claim 1 , wherein the light guide layer of the first optical filter stack has a thickness of 100 nanometers or less.

6. The image stack and a dielectric material disposed within each said isolation trench, said dielectric material acting to electrically isolate each photodetector of said plurality of photodetectors.

7. The image sensor structure of claim 6 , wherein the intermediate layer disposed in the first optical filter stack and the substrate layer of the imaging stack are composed of the same material.

8. The image sensor structure of claim 7 , wherein the intermediate layer and the substrate layer are composed of silicon.

9. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; 10. The image sensor structure of claim 1, comprising: a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer.

10. The image sensor structure of any one of claims 3 to 9, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees.

11. 10. The image sensor structure of claim 4, further comprising an optical filter material disposed within the light pipe cavity, the optical filter material being in direct contact with the light guide layer at a sidewall of the light pipe cavity.

12. a second optical filter stack disposed above the first optical filter stack; 10. The image sensor structure of claim 5, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

13. The image sensor structure of claim 6 , wherein the intermediate layer and the substrate layer are composed of silicon.

14. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; 9. The image sensor structure of claim 5, further comprising: a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer.

15. 1. An image sensor structure comprising: an image stack disposed above the device stack, the image stack including a plurality of photodetectors; a first optical filter stack disposed above the image stack, the first optical filter stack comprising: The middle class and a light guide layer disposed on the intermediate layer; light pipe cavities disposed within the light guide layer, each light pipe cavity being associated with one photodetector of the plurality of photodetectors; a first optical filter stack including: an optical filter material disposed within the light pipe cavity, the optical filter material being in direct contact with the light guide layer at a sidewall of the light pipe cavity; a nanowell layer disposed above the first optical filter stack; a plurality of nanowells disposed within the nanowell layer, each nanowell associated with one photodetector among the plurality of photodetectors; a substrate layer disposed over the plurality of photodetectors, the substrate layer operative to pass emission light and excitation light; a plurality of isolation trenches disposed in the substrate layer, each isolation trench disposed adjacent to one photodetector of the plurality of photodetectors; An image sensor structure wherein the light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity and not on the bottom surface of the light pipe cavity.

16. 16. The image sensor structure of claim 15, wherein the light pipe cavity has an aspect ratio greater than 2.5:

1.

17. 17. The image sensor structure of claim 16, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees.

18. 16. The image sensor structure of claim 15, wherein the light guide layer of the first optical filter stack has a thickness of 100 nanometers or less.

19. The image stack and a dielectric material disposed within each said isolation trench, said dielectric material acting to electrically isolate each photodetector of said plurality of photodetectors.

20. 20. The image sensor structure of claim 19, wherein the intermediate layer disposed in the first optical filter stack and the substrate layer disposed in the imaging stack are composed of the same material.

21. a second optical filter stack disposed above the first optical filter stack; 16. The image sensor structure of claim 15, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

22. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; 16. The image sensor structure of claim 15, comprising: a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer.

23. The image sensor structure of any one of claims 17 to 22, wherein the light pipe cavity has an aspect ratio greater than 2.5:

1.

24. The image sensor structure of any one of claims 18 to 22, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees.

25. The image stack and a dielectric material disposed within each of the isolation trenches, the dielectric material acting to electrically isolate each photodetector of the plurality of photodetectors.

26. a second optical filter stack disposed above the first optical filter stack; 23. The image sensor structure of claim 20 or 22, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

27. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer; 21. The image sensor structure of claim 20, comprising:

28. 1. An image sensor structure comprising: an image stack disposed above the device stack, the image stack comprising a plurality of photodetectors; a first optical filter stack disposed above the image stack, the first optical filter stack comprising: a light guide layer made of an optically absorbing material; light pipe cavities disposed within the light guide layer, each light pipe cavity being associated with one photodetector of the plurality of photodetectors; a first optical filter stack including: an optically transparent material disposed within the light pipe cavity, the optically transparent material having a refractive index greater than a refractive index of the optically absorbing material; and a nanowell layer disposed above the first optical filter stack; a plurality of nanowells disposed within the nanowell layer, each nanowell associated with one photodetector among the plurality of photodetectors; a substrate layer disposed over the plurality of photodetectors, the substrate layer operative to pass emission light and excitation light; a plurality of isolation trenches disposed in the substrate layer, each of the isolation trenches disposed adjacent to one of the plurality of photodetectors.

29. 30. The image sensor structure of claim 28, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees and an aspect ratio greater than 2.5 to 1.

30. 30. The image sensor structure of claim 28, wherein the optically absorbing material is in direct contact with the optically transparent material at the sidewalls of the light pipe cavity.

31. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; 30. The image sensor structure of claim 28, comprising: a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer.

32. 32. The image sensor structure of claim 30 or 31, wherein the light pipe cavity has a sidewall angle in the range of 11 to 1.2 degrees and an aspect ratio greater than 2.5:

1.

33. 32. The image sensor structure of claim 29 or 31, wherein the optically absorbing material is in direct contact with the optically transparent material at the sidewalls of the light pipe cavity.

34. a crosstalk layer disposed between one or more of the light pipe cavities and on a top surface of the first optical filter stack; a crosstalk curtain extending downward from a top surface of the first optical filter stack between one or more of the light pipe cavities; a diffusing layer disposed between the first optical filter stack and the image stack; 31. The image sensor structure of claim 29 or 30, comprising: a light pipe extension disposed at a bottom of one or more of the light pipe cavities, the light pipe extension extending through the diffusing layer.

35. 1. A method of forming an image sensor structure, the method comprising: Placing an image stack on a device stack, the image stack comprising: a plurality of photodetectors; a substrate layer disposed over the plurality of photodetectors, the substrate layer operative to pass emission light and excitation light; a plurality of isolation trenches disposed in the substrate layer, each isolation trench disposed adjacent to one photodetector of the plurality of photodetectors; disposing an intermediate layer over the image stack; disposing a light guide layer on the intermediate layer; Etching a plurality of light pipe cavities in the light guide layer, each of the light pipe cavities associated with one of the plurality of photodetectors, the light pipe cavities having an aspect ratio greater than 2.5 to 1 and a sidewall angle in the range of 11 to 1.2 degrees; disposing a nanowell layer over the light guiding layer; disposing a plurality of nanowells in the nanowell layer, each nanowell associated with one photodetector of the plurality of photodetectors; Including, the light guide layer and the plurality of light pipe cavities form a first optical filter stack disposed above the image stack; The method, wherein the light guide layer is a metal layer disposed on the sidewalls of the light pipe cavity and not on the bottom surface of the light pipe cavity.

36. 36. The method of claim 35, wherein the light guide layer has a thickness of 100 nanometers or less.

37. 36. The method of claim 35, comprising disposing an optical filter material within the light pipe cavity, the optical filter material being in direct contact with the light guide layer at the sidewalls of the light pipe cavity.

38. disposing a second optical filter stack over the first optical filter stack; 36. The method of claim 35, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

39. 39. The method of claim 36 or 38, comprising disposing an optical filter material within the light pipe cavity, the optical filter material in direct contact with the light guide layer at a sidewall of the light pipe cavity.

40. disposing a second optical filter stack over the first optical filter stack; 38. The method of claim 36 or 37, wherein an overall aspect ratio of the light pipe cavities of the first optical filter stack and the second optical filter stack is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

41. 30. The image sensor structure of claim 28, wherein the optically transparent material disposed within the light pipe cavity is in direct contact with the light guide layer at a sidewall of the light pipe cavity.

42. a second optical filter stack disposed above the first optical filter stack; 30. The image sensor structure of claim 28, wherein an overall aspect ratio of the light pipe cavities of the first and second optical filter stacks is greater than an aspect ratio of the light pipe cavity of either the first optical filter stack or the second optical filter stack.

Images