Semiconductor Devices

Abstract

To provide a semiconductor device capable of improving a withstanding voltage of a termination region surrounding an active region to enhance a withstanding voltage of the semiconductor device.SOLUTION: A semiconductor device 1 has: a first semiconductor layer 11 of a first conductivity type that has an active region AR and a termination region TR surrounding the active region; a first electrode 20; a second electrode 30 provided in the active region so that the first semiconductor layer is located between the first electrode and itself; a second semiconductor layer 13 of a second conductivity type provided between the first semiconductor layer and the second electrode, and having a first layer thickness in a first direction from the first electrode toward the second electrode; a third semiconductor layer 15 of the second conductivity type provided in the termination region so as to surround the second semiconductor layer, and having a second layer thickness larger than the first layer thickness in the first direction; a fourth semiconductor layer 17 of the second conductivity type that surrounds the second and third semiconductor layers, and having a third layer thickness smaller than the second layer thickness in the first direction; and a fifth semiconductor layer 19 of the second conductivity type provided so that the third and fourth semiconductor layers are located between the first semiconductor layer and itself.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The embodiments relate to a semiconductor device. [Background technology]

[0002] In order to increase the breakdown voltage of a semiconductor device, it is important to improve the breakdown voltage of the termination region surrounding the active region. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-153787 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide a semiconductor device that enables an improvement in the breakdown voltage of the termination region. [Means for solving the problem]

[0005] The semiconductor device according to the embodiment includes a first semiconductor layer of a first conductivity type having an active region and a termination region surrounding the active region; a first electrode electrically connected to the first semiconductor layer; a second electrode provided in the active region so that the first semiconductor layer is located between the first electrode and the second electrode and electrically connected to the first semiconductor layer; a second semiconductor layer of a second conductivity type provided between the first semiconductor layer and the second electrode and having a first layer thickness in a first direction from the first electrode toward the second electrode; and a second semiconductor layer provided in the termination region so as to surround the second semiconductor layer. a third semiconductor layer of a second conductivity type having a second layer thickness longer than the first layer thickness in the first direction; a fourth semiconductor layer of a second conductivity type provided in the termination region to surround the second semiconductor layer and the third semiconductor layer, spaced apart from the third semiconductor layer, and having a third layer thickness shorter than the second layer thickness in the first direction; and a fifth semiconductor layer of a second conductivity type provided so that the third semiconductor layer and the fourth semiconductor layer are positioned between the first semiconductor layer and the fifth semiconductor layer, and electrically connected to the second semiconductor layer, the third semiconductor layer, and the fourth semiconductor layer. [Brief explanation of the drawings]

[0006] [Figure 1] 1 is a schematic cross-sectional view showing a semiconductor device according to an embodiment; [Figure 2] 1 is a schematic plan view showing a semiconductor device according to an embodiment; [Figure 3] 5A to 5C are schematic cross-sectional views showing a manufacturing process of the semiconductor device according to the embodiment. [Figure 4] FIG. 10 is a schematic cross-sectional view showing a semiconductor device according to a modified example of the embodiment. [Figure 5] FIG. 10 is a schematic cross-sectional view showing a semiconductor device according to another modified example of the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments will be described with reference to the drawings. Identical parts in the drawings are assigned the same numbers, and detailed descriptions thereof will be omitted as appropriate, and different parts will be described. Note that the drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc., are not necessarily the same as those in reality. Furthermore, even when the same part is shown, the dimensions and ratios may be different depending on the drawing.

[0008] Furthermore, the arrangement and configuration of each part will be explained using the X-axis, Y-axis, and Z-axis shown in each figure. The X-axis, Y-axis, and Z-axis are mutually perpendicular and represent the X-direction, Y-direction, and Z-direction, respectively. In addition, the Z-direction may be explained as upward and the opposite direction as downward.

[0009] 1 is a schematic cross-sectional view showing a semiconductor device 1 according to an embodiment. The semiconductor device 1 is, for example, a Schottky barrier diode (SBD). Note that the embodiment is not limited to an SBD, and may be, for example, a MOS transistor or an IGBT (Insulated Gate Bipolar Transistor).

[0010] 1, the semiconductor device 1 includes a semiconductor portion 10, a first electrode 20, and a second electrode 30. The semiconductor portion 10 is, for example, silicon carbide (SiC). The first electrode 20 is, for example, a cathode electrode. The second electrode 30 is, for example, a Schottky electrode.

[0011] The semiconductor portion 10 is provided between a first electrode 20 and a second electrode 30. The first electrode 20 is provided on a back surface 10B of the semiconductor portion 10. The second electrode 30 is provided on a front surface 10F of the semiconductor portion 10 opposite to the back surface 10B.

[0012] The semiconductor portion 10 includes, for example, an active region AR and a termination region TR. The active region AR is located, for example, below the second electrode 30. The termination region TR is provided, for example, within the surface 10F, so as to surround the active region AR.

[0013] The semiconductor section 10 includes a first semiconductor layer 11 of a first conductivity type, a second semiconductor layer 13 of a second conductivity type, a third semiconductor layer 15 of the second conductivity type, a fourth semiconductor layer 17 of the second conductivity type, a fifth semiconductor layer 19 of the second conductivity type, and a sixth semiconductor layer 21 of the first conductivity type. In the following description, the first conductivity type is referred to as n-type and the second conductivity type is referred to as p-type.

[0014] The first semiconductor layer 11 extends from the active region AR to the termination region TR between the first electrode 20 and the second electrode 30. A plurality of second semiconductor layers 13 are provided between the first semiconductor layer 11 and the second electrode 20.

[0015] The first semiconductor layer 11 includes an extending portion 11ex that extends between the multiple second semiconductor layers 13 and is in contact with the second electrode 30. The extending portion 11ex is located between the second semiconductor layers 13 in the X direction. The second electrode 30 is connected to the extending portion 11ex of the first semiconductor layer 11, for example, by Schottky contact. The second electrode 30 is also connected to the second semiconductor layer 13 on the surface 10F of the semiconductor part 10. The second electrode 30 is connected to the second semiconductor layer 13, for example, by ohmic contact.

[0016] The semiconductor unit 10 has a so-called RESURF structure provided in the termination region TR. The RESURF structure according to the embodiment is a structure including a guard ring (Guard Ring assisted RESURF). That is, the semiconductor unit 10 is provided in the termination region TR and has a RESURF structure including a third semiconductor layer 15, a fourth semiconductor layer 17, and a fifth semiconductor layer 19. The third semiconductor layer 15 and the fourth semiconductor layer 17 function as guard rings and are connected to the fifth semiconductor layer 19, which is the main part of the RESURF structure.

[0017] The third semiconductor layer 15 and the fourth semiconductor layer 17 are each provided on the surface 10F side of the semiconductor portion 10. The third semiconductor layer 15 and the fourth semiconductor layer 17 are aligned in a direction along the surface 10F, for example, in the X direction. The third semiconductor layer 15 is provided between the second semiconductor layer 13 and the fourth semiconductor layer 17. Parts of the first semiconductor layer 11 extend between the second semiconductor layer 13 and the third semiconductor layer 15, and between the third semiconductor layer 15 and the fourth semiconductor layer 17.

[0018] At least one fourth semiconductor layer 17 is provided in the termination region TR. In this example, two fourth semiconductor layers 17 are provided and are aligned in the X direction. The fourth semiconductor layer 17 is located between the third semiconductor layer 15 and another fourth semiconductor layer 17. A portion of the first semiconductor layer 11 extends between the fourth semiconductor layer 17 and another fourth semiconductor layer 17.

[0019] The fifth semiconductor layer 19 is provided on the first semiconductor layer 11 so as to straddle the second semiconductor layer 13, the third semiconductor layer 15, and the fourth semiconductor layer 17. The fifth semiconductor layer 19 extends along the surface 10F of the semiconductor portion 10, and on each of the first semiconductor layer 11, the third semiconductor layer 15, and the fourth semiconductor layer 17. That is, in the Z direction, the third semiconductor layer 15 and the fourth semiconductor layer 17 are located between the first semiconductor layer 11 and the fifth semiconductor layer 19.

[0020] The sixth semiconductor layer 21 is located between the first semiconductor layer 11 and the first electrode 20. The sixth semiconductor layer 21 contains a first conductivity type impurity at a concentration higher than the concentration of the first conductivity type impurity in the first semiconductor layer 11. The first electrode 20 is in ohmic contact with the sixth semiconductor layer 21, for example.

[0021] 1 is the distance in the Z direction between the surface 10F of the semiconductor portion 10 and the lower end of the second semiconductor layer 13 (the boundary between the first semiconductor layer 11 and the second semiconductor layer 13). The second distance D2 is the distance in the Z direction between the surface 10F of the semiconductor portion 10 and the lower end of the third semiconductor layer 15 (the boundary between the first semiconductor layer 11 and the third semiconductor layer 15). The third distance D3 is the distance in the Z direction between the surface 10F of the semiconductor portion 10 and the lower end of the fourth semiconductor layer 17 (the boundary between the first semiconductor layer 11 and the fourth semiconductor layer 17).

[0022] In the semiconductor device 1, when a forward voltage is applied between the first electrode 20 and the second electrode 30, a forward current initially flows through the Schottky junction between the second electrode 30 and the first semiconductor layer 11, and when the voltage exceeds the built-in potential between the first semiconductor layer 11 and the second semiconductor layer 13, a forward current begins to flow from the first semiconductor layer 11 to the second electrode 30 via the second semiconductor layer 13. This makes it possible to reduce the forward voltage.

[0023] On the other hand, when a reverse voltage is applied between the first electrode 20 and the second electrode 30, carriers (electrons and holes) in the first semiconductor layer 11 are discharged to the first electrode 20 and the third electrode 30, causing the first semiconductor layer 11 to become depleted. This increases the electric field in the first semiconductor layer 11. At this time, the electric field concentration at the boundary between the active region AR and the termination region TR becomes significant, causing avalanche breakdown. The RESURF structure is provided to suppress the electric field concentration at the boundary between the active region AR and the termination region TR.

[0024] In the RESURF structure according to the embodiment, third semiconductor layer 15 is provided such that second distance D2 is longer than first distance D1 and third distance D3, thereby alleviating electric field concentration at the lower end of second semiconductor layer 13 on the termination region TR side and improving the breakdown voltage of termination region TR.

[0025] Fig. 2 is a schematic plan view showing the semiconductor device 1 according to the embodiment. Fig. 2 is a plan view showing a surface 10F of the semiconductor portion 10. Note that Fig. 1 is a cross-sectional view taken along line AA shown in Fig. 2. The dashed lines in the figure represent the second semiconductor layer 13, the third semiconductor layer 15, and the fourth semiconductor layer 17.

[0026] 2 , the third semiconductor layer 15 is provided so as to surround, for example, the extension portion 11ex of the first semiconductor layer 11 and the second semiconductor layer 13. The fourth semiconductor layer 17 is provided so as to surround the termination region TR side of the third semiconductor layer 15. The fifth semiconductor layer 19 is provided so as to surround the second semiconductor layer 13 and extend from the second semiconductor layer 13 to the termination region TR. Note that the embodiment is not limited to this example, and for example, the third semiconductor layer 15 and the fourth semiconductor layer 17 may have a configuration in which a plurality of portions spaced apart from each other are arranged so as to surround the second semiconductor layer 13.

[0027] 3(a) to 3(c) are schematic cross-sectional views showing the manufacturing process of the semiconductor device 1 according to the embodiment. 3(a) to 3(c) show the process of forming the second semiconductor layer 13, the third semiconductor layer 15, the fourth semiconductor layer 17, and the fifth semiconductor layer 19. Here, the first distance D1 will be described as the layer thickness D1, the second distance D2 as the layer thickness D2, and the third distance D3 as the layer thickness D3.

[0028] 3(a), an ion implantation mask HM1 is formed on the surface 10F of the semiconductor portion 10. The ion implantation mask HM1 has openings above regions on the surface 10F of the semiconductor portion 10 where the second semiconductor layer 13 and the fourth semiconductor layer 17 are to be formed.

[0029] Subsequently, second conductivity type impurities, for example, aluminum (Al), are ion-implanted through the openings in the ion implantation mask HM1. The second conductivity type impurities are introduced into the first semiconductor layer 11 with an implantation energy of, for example, 300 keV. The second conductivity type impurities ion-implanted into the first semiconductor layer 11 are activated by, for example, heat treatment. As a result, the second semiconductor layer 13 and the fourth semiconductor layer 17 are formed. In this case, the layer thickness D1 in the Z direction of the second semiconductor layer 13 is the same as the layer thickness D3 in the Z direction of the fourth semiconductor layer 17.

[0030] 3(b), after removing the ion implantation mask HM1, an ion implantation mask HM2 is formed on the surface 10F of the semiconductor portion 10. The ion implantation mask HM2 has an opening above a region on the surface 10F of the semiconductor portion 10 where the third semiconductor layer 15 is to be formed.

[0031] Subsequently, a second conductivity type impurity, for example, aluminum (Al), is ion-implanted through the openings in the ion implantation mask HM2. The second conductivity type impurity is introduced into the first semiconductor layer 11 with an implantation energy of, for example, 750 keV.

[0032] The second conductivity type impurities ion-implanted into the first semiconductor layer 11 are activated by, for example, heat treatment. As a result, a third semiconductor layer 15 is formed in the first semiconductor layer 11. A thickness D2 in the Z direction of the third semiconductor layer 15 is greater than a thickness D1 of the second semiconductor layer 13 and a thickness D3 of the fourth semiconductor layer 17.

[0033] 3(c), after removing the ion implantation mask HM2, an ion implantation mask HM3 is formed on the surface 10F of the semiconductor portion 10. The ion implantation mask HM3 has an opening above a region on the surface 10F of the semiconductor portion 10 where the fifth semiconductor layer 19 is to be formed.

[0034] Subsequently, second conductivity type impurities, for example, aluminum (Al), are ion-implanted through the openings in the ion implantation mask HM3. The second conductivity type impurities are introduced into the first semiconductor layer 11 with, for example, an implantation energy of 100 keV. The second conductivity type impurities ion-implanted into the first semiconductor layer 11 are activated by, for example, heat treatment. This forms the fifth semiconductor layer 19. The thickness D4 in the Z direction of the fifth semiconductor layer 19 is thinner than the thickness D1 of the second semiconductor layer 13, the thickness D2 of the third semiconductor layer 15, and the thickness D3 of the fourth semiconductor layer 17.

[0035] 4(a) and 4(b) are schematic cross-sectional views showing semiconductor devices 2 and 3 according to modified examples of the embodiment, taken along line AA in FIG.

[0036] 4(a), a third distance D3 between the surface 10F of the semiconductor portion 10 and the lower end of the fourth semiconductor layer 17 may be shorter than a first distance D1 between the surface 10F and the second semiconductor layer 13. Such a structure can be realized by forming the fourth semiconductor layer 17 by ion implantation separate from that for the second semiconductor layer 13.

[0037] 4(b), three fourth semiconductor layers 17 may be arranged side by side in the X direction. In this way, the number of fourth semiconductor layers 17 is arbitrary, and four or more fourth semiconductor layers 17 may be arranged.

[0038] The first distance D1 is set so as to provide an optimal thickness in the active region AR of the second semiconductor layer 13. That is, with respect to the optimal value of the first distance D1, the second distance D2 is longer than the first distance D1. The third distance D3 is sufficient as long as it is at least shorter than the second distance D2, and as shown in this example, is set shorter than the first distance D1. Furthermore, the third distance D3 may be longer than the first distance D1 as long as it can alleviate electric field concentration at the lower end of the second semiconductor layer 13 on the termination region TR side.

[0039] 5(a) and 5(b) are schematic cross-sectional views showing semiconductor devices 4 and 5 according to other modifications of the embodiment, taken along line AA in FIG.

[0040] 5(a), in this example, three fourth semiconductor layers 17 are provided. A first distance W1 between the third semiconductor layer 15 and the adjacent fourth semiconductor layer 17 is narrower than the second distance W2 and the third distance W3 between adjacent fourth semiconductor layers 17. Furthermore, the second distance W2 between adjacent fourth semiconductor layers 17 is narrower than the third distance W3 between adjacent fourth semiconductor layers 17 at a position farther from the third semiconductor layer 15.

[0041] In this way, the spacing between the multiple fourth semiconductor layers 17 in the direction from the active region AR toward the termination region TR, i.e., in the X direction, may be set to increase, for example, the farther away from the third semiconductor layer 15. This causes the spatial average concentration of the second conductivity type impurity to decrease the farther away from the active region AR, making it possible to distribute the electric field evenly to each of the fourth semiconductor layers, and improving the breakdown voltage at the outer edge of the termination region TR.

[0042] Furthermore, the fourth distance W4 between the second semiconductor layer 13 and the third semiconductor layer 15 may be the same as or different from the first distance W1. The embodiment is not limited to the above example, and the first distance W1 to the fourth distance W4 may be set arbitrarily. The arrangement of the multiple fourth semiconductor layers 17 may be, for example, equidistant, with the first distance W1, the second distance W2, and the third distance W3 being equal.

[0043] 5(b), the first semiconductor layer 11 may be provided so that the third semiconductor layer 15 is connected to the second semiconductor layer 13, without including a portion located between the second semiconductor layer 13 and the third semiconductor layer 15. This eliminates the need to control the fourth distance W4, making the manufacturing process easier. It also makes it possible to narrow the width of the termination region TR.

[0044] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be implemented in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the inventions described in the claims and their equivalents. [Explanation of symbols]

[0045] 1, 2, 3, 4, 5...semiconductor device, 10...semiconductor portion, 10B...rear surface, 10F...front surface, 11...first semiconductor layer, 11ex...extension portion, 13...second semiconductor layer, 15...third semiconductor layer, 17...fourth semiconductor layer, 19...fifth semiconductor layer, 20...first electrode, 21...sixth semiconductor layer, 30...second electrode, AR...active region, HM1, HM2, HM3...ion implantation mask, TR...termination region

Claims

1. a first semiconductor layer of a first conductivity type having an active region and a termination region surrounding the active region; a first electrode electrically connected to the first semiconductor layer; a second electrode provided in the active region such that the first semiconductor layer is located between the first electrode and the second electrode, the second electrode being electrically connected to the first semiconductor layer; a second semiconductor layer of a second conductivity type provided between the first semiconductor layer and the second electrode, the second semiconductor layer having a first thickness in a first direction from the first electrode toward the second electrode; a third semiconductor layer of a second conductivity type provided in the termination region so as to surround the second semiconductor layer and having a second thickness longer than the first thickness in the first direction; a fourth semiconductor layer of the second conductivity type provided in the termination region so as to surround the second semiconductor layer and the third semiconductor layer, spaced apart from the third semiconductor layer, and having a third thickness that is shorter than the second thickness in the first direction; a fifth semiconductor layer of the second conductivity type provided between the first semiconductor layer and the third semiconductor layer and the fourth semiconductor layer, and electrically connected to the second semiconductor layer, the third semiconductor layer, and the fourth semiconductor layer; and further comprising another fourth semiconductor layer provided between the third semiconductor layer and the fourth semiconductor layer; A first distance between the third semiconductor layer and the another fourth semiconductor layer is narrower than a second distance between the fourth semiconductor layer and the another fourth semiconductor layer. the third semiconductor layer is closest to the second semiconductor layer among the second conductivity type semiconductor layers provided in the termination region; the second thickness of the third semiconductor layer is the thickest among the semiconductor layers of the second conductivity type provided in the termination region.

2. The semiconductor device according to claim 1 , wherein a part of the first semiconductor layer is provided between the second semiconductor layer and the third semiconductor layer in a second direction perpendicular to the first direction.

3. The semiconductor device according to claim 1 , wherein the first thickness of the second semiconductor layer is the same as the third thickness of the fourth semiconductor layer.

4. The semiconductor device according to claim 1 , wherein the first thickness of the second semiconductor layer is greater than the third thickness of the fourth semiconductor layer.

5. The semiconductor device according to claim 1 , wherein said third semiconductor layer is provided so as to be directly connected to said second semiconductor layer.

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